JP2019178726A - Gasket and flow channel joint structure - Google Patents

Abstract

To demount a gasket from a fluid device without damaging a seal peripheral surface of the gasket.SOLUTION: A gasket 2 for connecting flow channel holes 13, 14 respectively formed on two piping blocks 11, 12 to each other, includes a pair of cylindrical diameter outer press-fitting portions 23 respectively press-fitted to cylindrical radial outer seal grooves 4 formed at a radial outer side with respect to the flow channel holes 13, 14, on end faces 11a, 12a of both piping blocks 11, 12, and seal peripheral surfaces 232a closely kept into contact with outer peripheral surfaces 42 of the radial outer seal grooves 4 to exert a sealing function, are formed on the outer peripheral surfaces of the radial outer press-fitting portions 23. A groove portion 5 opened at an axial outer side with respect to the end face of the piping block is formed on an outer peripheral surface of the gasket 2 in a state that any one of the pair of radial outer press-fitting portions 23 is press-fitted to the seal grooves 3, 4 of the piping blocks.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a gasket and a flow path joint structure.

Pumps, valves, and accumulators are used in the pipelines of fluids such as chemicals, high-purity liquids, ultrapure water, and cleaning liquids that are handled in manufacturing processes in various technical fields such as semiconductor manufacturing, medical / pharmaceutical manufacturing, and food processing / chemical industries As a connection structure that connects flow path holes formed in two fluid devices such as filters, flow meters, pressure sensors, and piping blocks, a flow path joint structure with a gasket that prevents fluid leakage is adopted. ing.
The gasket of this flow path joint structure includes a pair of cylindrical press-fit portions on both axial sides. These press-fit portions function as seals that prevent fluid leakage by being press-fitted into cylindrical seal grooves formed at the connection end portions of the flow path holes of both fluid devices (FIG. 14B of FIG. 1). reference).

International Publication No. 2017/176815

  The flow path joint structure may be disassembled by removing the gasket from both fluid devices, for example, during maintenance work. In this case, after pulling one fluid device outward in the axial direction and removing it from one press-fit portion of the gasket, the one press-fit portion is gripped by a jig and pulled outward in the axial direction, so that the other press-fitting of the gasket is performed. Can be removed from the other fluidic device. However, when the other press-fitted part is gripped by a jig, there is a risk of damaging the seal peripheral surface formed on the outer peripheral surface of the press-fitted part.

  This invention is made | formed in view of such a situation, and it aims at enabling it to remove a gasket from a fluid device, without damaging the seal | sticker surrounding surface of a gasket.

  (1) The gasket of the present invention has a cylindrical shape that is formed radially outside the flow path holes at the end surfaces of the fluid devices in order to connect the flow path holes formed in the two fluid devices. A pair of cylindrical press-fit portions that are respectively press-fitted into the seal grooves are provided on both sides in the axial direction, and a seal peripheral surface that is in close contact with the outer peripheral surface of the seal groove and performs a sealing function is provided on the outer peripheral surface of each press-fit portion A gasket formed, wherein at least one of the pair of press-fitting portions is press-fitted into a seal groove of the fluid device, and at least axially outside the end surface of the fluid device. A groove portion that is partially open is formed on the outer peripheral surface.

  According to this gasket, in a state where any one of the pair of press-fitting parts is press-fitted into the seal groove of the fluid device, the jig is hooked into the groove formed on the outer peripheral surface of the gasket, and the outer side in the axial direction. The one press-fitting part of the gasket can be removed from the seal groove of the fluid device. At that time, the seal peripheral surface on the outer peripheral surface of the other press-fitting part is not gripped by a jig, so that the seal peripheral surface can be prevented from being damaged.

(2) It is preferable that the groove width in the axial direction of the groove portion is set within the axial length range between the seal peripheral surfaces in the pair of press-fitting portions.
In this case, since the groove portion is not formed on the seal peripheral surface of each press-fit portion, even if the groove portion is formed on the outer peripheral surface of the gasket, the sealing performance of each press-fit portion does not deteriorate.

(3) The groove depth in the radial direction of the groove is preferably set so that the thickness in the radial direction of the gasket on the bottom surface of the groove is equal to or greater than the thickness in the radial direction of the press-fit portion.
In this case, since the thickness of the gasket in the radial direction at the position where the groove is formed can be secured, it is possible to prevent the sealing performance from being deteriorated due to the deformation of the gasket in the thickness portion.

(4) The groove portion is formed so that the entire pair of the press-fitting portions are opened between the end surfaces of the fluid devices in a state where the pair of press-fitting portions are respectively press-fitted into the seal grooves of the fluid devices. preferable.
In this case, even if one press-fitted part of the gasket is press-fitted into any of the seal grooves of both fluid devices, the entire groove part opens on the outer peripheral face of the gasket, so a jig is formed in the groove part formed on the outer peripheral face of the gasket. Can be reliably hooked. Therefore, even if one press-fit portion of the gasket is press-fitted into any of the seal grooves of both fluid devices, the press-fit portion of the gasket can be reliably removed from the seal groove.

  (5) The flow path joint structure of the present invention includes a gasket according to any one of (1) to (4) for connecting flow path holes respectively formed in two fluid devices, and the two fluid devices. A pair of cylindrical seal grooves that are respectively formed at connection end portions of the flow path holes and into which the corresponding press-fit portions of the gasket are press-fitted.

  According to this flow path joint structure, a jig is placed in the groove formed on the outer peripheral surface of the gasket while one of the pair of press-fitting parts of the gasket is press-fitted into the seal groove of the fluid device. By hooking and pulling outward in the axial direction, the one press-fit portion of the gasket can be removed from the seal groove of the fluid device. At that time, the seal peripheral surface on the outer peripheral surface of the other press-fitting part is not gripped by a jig, so that the seal peripheral surface can be prevented from being damaged.

  According to the present invention, the gasket can be removed from the fluid device without damaging the seal peripheral surface of the gasket.

It is a section perspective view showing an example of a channel joint structure concerning one embodiment of the present invention. It is an expanded sectional view of the above-mentioned channel joint structure. It is a decomposition | disassembly expanded sectional view of the said flow-path coupling structure. It is an expanded sectional view showing the state in the middle of decomposition of the channel joint structure. It is an expanded sectional view showing the state in the middle of decomposition of the channel joint structure. It is an expanded sectional view of the channel joint structure which shows the modification of a groove part. It is an expanded sectional view of a channel joint structure showing other modifications of a groove part.

Next, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
[Flow path joint structure]
FIG. 1 is a cross-sectional perspective view showing an example of a flow path joint structure according to an embodiment of the present invention. In FIG. 1, the flow path joint structure 1 of the present embodiment is formed in two pipe blocks (fluid devices) 11 and 12 that overlap each other, for example, in a pipe path through which a chemical used in a semiconductor manufacturing apparatus flows. It is used as a connection structure for connecting the flow path holes 13 and 14 to each other.

  In the example of FIG. 1, a plurality of small second piping blocks 12, 12 connected to a flow meter, a pressure sensor, etc. are overlapped on a large first piping block 11 made of a base block to constitute the piping path. In this case, the circular flow path holes 13 opened at two locations on the upper surface of the first piping block 11 and the circular flow path holes 14 and 14 opened at the lower surfaces of the second piping blocks 12 and 12 are respectively flowed. The road joint structure 1 is used for connection. In the present embodiment, the flow path holes 13 of the first piping block 11 and the flow path holes 14 and 14 of the second piping blocks 12 and 12 are all formed to have the same diameter.

  In addition, although the flow-path coupling structure 1 of this embodiment is used as a connection structure which connects the flow-path holes 13 and 14 of the piping blocks 11 and 12, other fluids, such as a pump, a valve, an accumulator, a filter, etc. The present invention can also be applied to a connection structure that connects channel holes of a device.

FIG. 2 is an enlarged cross-sectional view of the flow path joint structure 1. FIG. 3 is an exploded enlarged cross-sectional view of the flow path joint structure 1. 2 and 3, the piping blocks 11 and 12 are arranged side by side for convenience of explanation (the same applies to FIGS. 4 to 7).
2 and 3, the flow path joint structure 1 includes a gasket 2 for connecting the flow path holes 13 and 14 of the two pipe blocks 11 and 12, and the flow path holes 13 and 14 of both the pipe blocks 11 and 12. 14 are formed radially outside the flow path holes 13 and 14 in the inner diameter sealing grooves 3 formed in the connection end portions 14 and the end surfaces 11a and 12a on the connection end portions side of both the piping blocks 11 and 12, respectively. A radially outer seal groove (seal groove) 4 is provided.

[Diameter inner seal groove and outer diameter seal groove]
In FIG. 3, the radially inner seal groove 3 of the first piping block 11 is notched so as to gradually increase in diameter from the inner side in the axial direction toward the outer end in the axial direction on the peripheral surface of the connection end portion of the flow path hole 13. The tapered groove is formed. Similarly, the radially inner seal groove 3 of the second piping block 12 is notched so as to gradually increase in diameter from the inner side in the axial direction toward the outer end in the axial direction on the peripheral surface of the connection end portion of the flow path hole 14. Tapered groove.

  The radially outer seal grooves 4 of the first piping block 11 and the second piping block 12 are each formed in a cylindrical shape. An inner peripheral surface 41 of each outer diameter outer seal groove 4 includes a circumferential surface 41a extending straight in the axial direction in a cross-sectional view, and a tapered guide peripheral surface 41b formed on the outer side in the axial direction than the circumferential surface 41. have.

  The axial inner end of the guide circumferential surface 41b is connected to the axial outer end of the circumferential surface 41a. And the guide peripheral surface 41b is formed so that it may reduce in diameter gradually as it goes from an axial inner end to an axial outer end (from the circumferential surface 41a in FIG. 3 to the gasket 2 side described later). Thereby, the guide peripheral surface 41b guides the press-fitting when the outer-diameter press-fit portion 23 of the gasket 2 is press-fitted into the outer-diameter seal groove 4.

  The entire outer peripheral surface 42 of each outer diameter sealing groove 4 is a circumferential surface that extends straight in the axial direction in a sectional view. The channel joint structure 1 only needs to include at least one pair of the radially outer seal grooves 4 out of the pair of radially inner seal grooves 3 and the pair of radially outer seal grooves 4.

[gasket]
2 and 3, the gasket 2 has a pair of diameters that are press-fitted into the main body portion 21 (the portion indicated by cross-hatching in the drawing) and the radially inner seal grooves 3 of the first and second piping blocks 11 and 12, respectively. An inner press-fit portion 22 and a pair of radially outer press-fit portions (press-fit portions) 23 that are press-fitted into the radially outer seal grooves 4 of the first and second piping blocks 11 and 12 are provided. The gasket 2 only needs to include at least a pair of radially outer press-fit portions 23 out of the pair of radially inner press-fit portions 22 and the pair of radially outer press-fit portions 23.

  The main body portion 21 is formed in an annular shape at the axial center portion of the gasket 2 and is a thick portion where the thickness of the gasket 2 in the radial direction (vertical direction in the drawing) increases. In the state shown in FIG. 2, the main body 21 is disposed between the end faces 11 a and 12 a of both the piping blocks 11 and 12, and a gap S is formed between the both end faces 11 a and 12 a on the radially outer side of the main body 21. Is formed.

The pair of radially inner press-fit portions 22 are triangular portions that are formed in an annular shape so as to protrude from the radially inner side of each axial end portion of the main body portion 21 toward the axially outer side.
The inner peripheral surface of each inner diameter press-fit portion 22 is formed to have substantially the same diameter as the inner peripheral surface of the main body portion 21, and is formed to have approximately the same diameter as the flow path holes 13 and 14.

  Therefore, the inner peripheral surface of the main body 21, the inner peripheral surface of the pair of radially inner press-fitting portions 22, and the peripheral surfaces of the flow path holes 13 and 14 are formed substantially flush with each other in a sectional view. Thereby, inside the main body part 21 and the pair of radially inner press-fitting parts 22, the flow path holes 13 and 14 are connected to each other, and a connection flow path 24 having a circular shape when viewed from the axial direction is formed. . As described above, no step is generated between the flow path holes 13 and 14 and the inner peripheral surface of the gasket 2, so that the fluid flowing through the flow path holes 13 and 14 can be prevented from staying.

  The outer peripheral surface of each inner diameter press-fit portion 22 is a tapered peripheral surface 221 that gradually increases in diameter from the axial outer end toward the axial inner end. The tapered peripheral surfaces 221 of the pair of radially inner press-fitting portions 22 are seal peripheral surfaces that are in close contact with the peripheral surfaces of the radially inner seal grooves 3 of the first and second piping blocks 11 and 12 and exhibit a sealing function. . As a result, the pair of radially inner press-fit portions 22 of the gasket 2 are press-fitted into the radially inner seal grooves 3 of the first and second piping blocks 11 and 12, respectively, so that the seal closest to the flow path holes 13 and 14 ( It functions as a primary seal) and prevents the fluid in the flow path holes 13 and 14 from leaking to the outside.

  The pair of radially outer press-fit portions 23 are formed in a cylindrical shape so as to protrude outward in the axial direction from the radially outer side of each end portion in the axial direction of the main body portion 21. The outer peripheral surface of each outer diameter press-fit portion 23 is formed to have substantially the same diameter as the outer peripheral surface of the main body portion 21, and is formed to be substantially flush with the outer peripheral surface of the main body portion 21. Thereby, in this embodiment, the outer peripheral surface of the pair of radially outer press-fit portions 23 and the outer peripheral surface of the main body portion 21 are the outer peripheral surfaces of the gasket 2. The axial length of each radially outer press-fit portion 23 is slightly shorter than the axial length (groove depth) of the corresponding radially outer seal groove 4.

  A part of the inner peripheral surface 231 of each radially outer press-fit portion 23 (a portion outside the imaginary line indicated by a two-dot chain line in the drawing) is in close contact with the circumferential surface 41 a of the corresponding radially outer seal groove 4. The seal peripheral surface 231a exerts a sealing function. The other part of the inner peripheral surface 231 of each radially outer press-fit portion 23 (the portion on the inner side in the axial direction from the phantom line indicated by the two-dot chain line in the figure) is relative to the guide peripheral surface 41b of the corresponding radially outer seal groove 4. The non-seal peripheral surface 231b is opposed to each other with a predetermined gap and hardly exhibits a sealing function. The phantom line shown by the two-dot chain line is an imaginary line extending in the radial direction of the gasket 2 so as to pass through the boundary between the circumferential surface 41a and the guide circumferential surface 41b on the inner circumferential surface 41 of each radially outer seal groove 4. Line (see FIG. 2).

  A part of the outer peripheral surface 232 of each outer diameter press-fit portion 23 (a portion on the outer side in the axial direction from the phantom line indicated by a two-dot chain line in the drawing) is in close contact with the outer peripheral surface 42 of the corresponding outer diameter seal groove 4 and sealed. The seal peripheral surface 232a exerts its function. The other part of the outer peripheral surface 232 of each radially outer press-fit portion 23 (the portion on the inner side in the axial direction from the phantom line indicated by the two-dot chain line in the figure) is a non-seal peripheral surface 232b that hardly exhibits a sealing function. As a result, the pair of radially outer press-fit portions 23 of the gasket 2 are press-fitted into the radially outer seal grooves 4 of the first and second piping blocks 11 and 12, respectively, so that the fluid in the flow path holes 13 and 14 is outside. It functions as a secondary seal that prevents leakage.

  In addition, although the radial outside press-fit portion 23 of the present embodiment is formed in a cylindrical shape, it may be formed in a polygonal cylindrical shape. In this case, the outer diameter sealing groove 4 may be formed in a polygonal cylindrical shape in accordance with the shape of the outer diameter press-fit portion 23.

[Disassembly procedure of flow joint structure]
The flow path joint structure 1 of the present embodiment is disassembled as shown in FIG. 3 by removing the gasket 2 from both the piping blocks 11 and 12 from the state shown in FIG. There are two possible disassembling procedures for the flow path joint structure 1 as follows.

  In the first disassembly procedure, from the state shown in FIG. 2, the first piping block 11 is pulled outward in the axial direction to be removed from one of the gaskets 2 (the left side in the drawing) 22, 23, and shown in FIG. State. Then, from the state shown in FIG. 4, the one press-fit portion 22, 23 is pulled outward in the axial direction (left side in the figure), so that the other press-fit portion 22, 23 of the gasket 2 (right side in the figure) 2 Remove from the piping block 12.

  In the second disassembling procedure, from the state shown in FIG. 2, the second piping block 12 is pulled outward in the axial direction and removed from the press-fitting portions 22 and 23 on one side (right side in the drawing) of FIG. State shown. Then, from the state shown in FIG. 5, the one press-fit portion 22, 23 is pulled outward in the axial direction (right side in the drawing), so that the other press-fit portion 22, 23 of the gasket 2 (left side in the drawing) 1 Remove from the piping block 11.

[Groove]
In the state of disassembling the flow path joint structure 1 shown in FIG. 4 or FIG.
The groove part 5 of the present embodiment is formed in a concave cross section on the outer peripheral surface of the main body part 21 of the gasket 2. Further, in the groove portion 5 of the present embodiment, the pair of radially inner press-fit portions 22 and the pair of radially outer press-fit portions 23 of the gasket 2 are in the state shown in FIG. In the state of being press-fitted into the outer seal grooves 4, all of the gaps S between the end faces 11 a and 12 a of both the piping blocks 11 and 12 are formed to open radially outward.

  Thereby, in this embodiment, only the press-fit portions 22 and 23 on one side (one axial side) of the gasket 2 are press-fitted into the seal grooves 3 and 4 of the second piping block 12 (see FIG. 4), and In any state where only the other press-fit portions 22, 23 of the gasket 2 (the other side in the axial direction) are press-fit into the seal grooves 3, 4 of the first piping block 11 (see FIG. 5), the groove portion Since all of 5 are opened to the outside in the radial direction, the jig can be reliably hooked in the groove 5.

  4 and 5, at least a part of the groove portion 5 is opened outward in the axial direction from the end face of the piping block into which the press-fit portions 22 and 23 of the gasket 2 are press-fitted. What is necessary is just to be formed.

  In FIG. 3, the groove width W in the axial direction of the groove portion 5 is the length in the axial direction between the seal peripheral surfaces 232a of the pair of radially outer press-fit portions 23 (between two phantom lines indicated by two-dot chain lines in the figure). It may be set within the range of L. Accordingly, if the groove width W is set as described above, the groove portion 5 has not only the outer peripheral surface of the main body portion 21 but also the outer periphery on the axially inner side of the radially outer press-fit portion 23 as in the modification shown in FIG. It may also be formed on the surface, and may be longer than the end surfaces 11a and 12a of the respective piping blocks 11 and 12 on the outer side in the axial direction.

  In FIG. 3, the radial inner seal groove 3 and the outer radial seal groove 4 are formed in the main body portion 21 of the gasket 2 as in the present embodiment, so that the thickness of the main body portion 21 in the radial direction is increased. In this case, the radial groove depth H of the groove portion 5 is set so that the radial thickness t1 of the main body portion 21 at the bottom surface of the groove portion 5 is equal to or greater than the radial thickness t2 of the radially outer press-fit portion 23. It only has to be done. Therefore, as long as the groove depth H is set as described above, the groove portion 5 may be formed deeper inward in the radial direction than in FIG. 3, as in the modification shown in FIG.

  In addition, the groove part 5 may be formed in other cross-sectional shapes other than the cross-sectional concave shape as long as a jig can be hooked, such as a circular arc shape. Moreover, although the groove part 5 of this embodiment is formed in cyclic | annular form, you may be formed in one place or multiple places of the circumferential direction. Further, the groove 5 may be formed at a plurality of locations in the axial direction on the outer peripheral surface of the gasket 2.

[effect]
As described above, according to the flow path joint structure 1 of the present embodiment, in a state where any one of the press-fitting portions 22 and 23 of the gasket 2 is press-fitted into the seal grooves 3 and 4 of the one piping block 11 (12), The one press-fit portion of the gasket 2 from the seal grooves 3 and 4 of the one piping block 11 (12) by hooking a jig on the groove portion 5 formed on the outer peripheral surface of the gasket 2 and pulling it outward in the axial direction. 22 and 23 can be removed. At that time, since the seal peripheral surface 232a on the outer peripheral surface of the other press-fit portions 22 and 23 is not gripped by a jig, the seal peripheral surface 232a can be prevented from being damaged.

  Further, the groove width W in the axial direction of the groove portion 5 is set within the range of the axial length L between the seal peripheral surfaces 232a of the pair of radially outer press-fit portions 23. It is not formed on the seal peripheral surface 232a of the portion 23. Thereby, even if the groove part 5 is formed in the outer peripheral surface of the gasket 2, the sealing performance of each outer diameter press-fit part 23 is not deteriorated.

  The groove depth H in the radial direction of the groove portion 5 is set so that the radial thickness t1 of the gasket 2 (main body portion 21) on the bottom surface of the groove portion 5 is equal to or greater than the radial thickness t2 of the press-fit portion. ing. Thereby, since the thickness t1 of the gasket 2 in the radial direction at the position where the groove portion 5 is formed can be secured, it is possible to prevent the sealing performance from being deteriorated due to the deformation of the gasket 2 in the thickness t1 portion. Can do.

  Further, the groove portion 5 is formed in a state where the pair of radially inner press-fit portions 22 and the pair of radially outer press-fit portions 23 are respectively press-fitted into the radially inner seal groove 3 and the radially outer seal groove 4 of both the piping blocks 11 and 12. The pipe blocks 11 and 12 are formed so as to be entirely opened between the end faces 11a and 12a. As a result, even if one press-fit portion 22, 23 of the gasket 2 is press-fitted into any of the seal grooves 3, 4 of both the piping blocks 11, 12, the entire groove portion 5 is radially outward on the outer peripheral surface of the gasket 2. Since it opens, a jig | tool can be reliably hooked in the groove part 5 of the gasket 2. FIG. Therefore, even if one press-fit portion 22, 23 of the gasket 2 is press-fitted into any of the seal grooves 3, 4 of both the piping blocks 11, 12, the press-fit portions 22, 23 of the gasket 2 are connected from the seal groove 3, 4. It can be removed reliably.

It should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is defined by the terms of the claims, rather than the meanings described above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
For example, in the above-described embodiment, the integrated block 1 used in the semiconductor field has been described as an example. However, the field is not limited to this, and in the liquid crystal / organic EL field, the medical / pharmaceutical field, or the automobile-related field. Can also be used.

1 Channel joint structure 2 Gasket 4 Diameter outer seal groove (seal groove)
5 Groove 11 First piping block (fluid device)
11a End face 12 Second piping block (fluid device)
12a End face 13 Channel hole 14 Channel hole 23 Diameter outer side press-fit part (press-fit part)
232 outer peripheral surface of outer diameter press-fit portion 232a seal peripheral surface H groove depth t1 thickness of gasket radial direction t2 radial thickness of outer press-fit portion W groove width

Claims (5)

In order to connect the flow path holes respectively formed in the two fluid devices, they are press-fitted into a cylindrical seal groove formed on the outer side in the radial direction from the flow path hole in each of the end faces of the both fluid devices. A gasket comprising a pair of cylindrical press-fitting portions on both sides in the axial direction, and a seal peripheral surface that is in close contact with the outer peripheral surface of the seal groove and exhibits a sealing function is formed on the outer peripheral surface of each press-fitting portion. And
In a state where any one of the pair of press-fitting parts is press-fitted into the seal groove of the fluid device, a groove part at least a part of which is open outward in the axial direction from the end face of the fluid device is formed on the outer peripheral surface. Formed gasket.   2. The gasket according to claim 1, wherein the groove width in the axial direction of the groove portion is set within a length range in the axial direction between the seal peripheral surfaces in the pair of press-fit portions.   The groove depth in the radial direction of the groove portion is set so that the radial thickness of the gasket on the bottom surface of the groove portion is equal to or greater than the radial thickness of the press-fit portion. gasket.   The groove portion is formed so that all of the pair of press-fitting portions are opened between the end surfaces of the fluid devices in a state where the pair of press-fitting portions are respectively press-fitted into seal grooves of the fluid devices. 4. The gasket according to any one of 3 above. The gasket according to any one of claims 1 to 4, for connecting the channel holes respectively formed in the two fluidic devices,
A flow path joint structure comprising a pair of cylindrical seal grooves that are formed radially outward from the flow path holes in the end faces of the fluid devices and into which the press-fitted portions of the gasket are press-fitted.

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