JP2018513343A - 希薄過酸化水素(dhp)ガスを含むクリーンルームおよびその使用方法 - Google Patents
希薄過酸化水素(dhp)ガスを含むクリーンルームおよびその使用方法 Download PDFInfo
- Publication number
- JP2018513343A JP2018513343A JP2017554851A JP2017554851A JP2018513343A JP 2018513343 A JP2018513343 A JP 2018513343A JP 2017554851 A JP2017554851 A JP 2017554851A JP 2017554851 A JP2017554851 A JP 2017554851A JP 2018513343 A JP2018513343 A JP 2018513343A
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- ppm
- dhp gas
- dhp
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 title claims abstract description 200
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 title claims abstract description 115
- 238000000034 method Methods 0.000 title claims abstract description 105
- 230000002829 reductive effect Effects 0.000 claims abstract description 11
- 241000700605 Viruses Species 0.000 claims description 46
- 241000894007 species Species 0.000 claims description 28
- 238000009423 ventilation Methods 0.000 claims description 26
- 238000011109 contamination Methods 0.000 claims description 24
- 244000005700 microbiome Species 0.000 claims description 24
- 238000004519 manufacturing process Methods 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 15
- 241000894006 Bacteria Species 0.000 claims description 14
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 14
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 claims description 12
- 241000233866 Fungi Species 0.000 claims description 12
- 238000001914 filtration Methods 0.000 claims description 11
- 241000606161 Chlamydia Species 0.000 claims description 10
- 230000036541 health Effects 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 10
- 238000011160 research Methods 0.000 claims description 10
- 241000191967 Staphylococcus aureus Species 0.000 claims description 9
- 150000002894 organic compounds Chemical class 0.000 claims description 9
- 208000016604 Lyme disease Diseases 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 claims description 8
- FLKPEMZONWLCSK-UHFFFAOYSA-N diethyl phthalate Chemical compound CCOC(=O)C1=CC=CC=C1C(=O)OCC FLKPEMZONWLCSK-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- DQWPFSLDHJDLRL-UHFFFAOYSA-N triethyl phosphate Chemical compound CCOP(=O)(OCC)OCC DQWPFSLDHJDLRL-UHFFFAOYSA-N 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims description 8
- 241000194017 Streptococcus Species 0.000 claims description 7
- 239000003054 catalyst Substances 0.000 claims description 7
- 239000000356 contaminant Substances 0.000 claims description 7
- 241000589562 Brucella Species 0.000 claims description 6
- JYFHYPJRHGVZDY-UHFFFAOYSA-N Dibutyl phosphate Chemical compound CCCCOP(O)(=O)OCCCC JYFHYPJRHGVZDY-UHFFFAOYSA-N 0.000 claims description 6
- 201000010099 disease Diseases 0.000 claims description 6
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 241000187479 Mycobacterium tuberculosis Species 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 238000004378 air conditioning Methods 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- OMVSWZDEEGIJJI-UHFFFAOYSA-N 2,2,4-Trimethyl-1,3-pentadienol diisobutyrate Chemical compound CC(C)C(=O)OC(C(C)C)C(C)(C)COC(=O)C(C)C OMVSWZDEEGIJJI-UHFFFAOYSA-N 0.000 claims description 4
- 241000712892 Arenaviridae Species 0.000 claims description 4
- 241000305071 Enterobacterales Species 0.000 claims description 4
- 241000711950 Filoviridae Species 0.000 claims description 4
- RJQXTJLFIWVMTO-TYNCELHUSA-N Methicillin Chemical compound COC1=CC=CC(OC)=C1C(=O)N[C@@H]1C(=O)N2[C@@H](C(O)=O)C(C)(C)S[C@@H]21 RJQXTJLFIWVMTO-TYNCELHUSA-N 0.000 claims description 4
- 241000712464 Orthomyxoviridae Species 0.000 claims description 4
- 241000711798 Rabies lyssavirus Species 0.000 claims description 4
- 241000711931 Rhabdoviridae Species 0.000 claims description 4
- 241000606701 Rickettsia Species 0.000 claims description 4
- 241000315672 SARS coronavirus Species 0.000 claims description 4
- 241000607142 Salmonella Species 0.000 claims description 4
- 108010059993 Vancomycin Proteins 0.000 claims description 4
- 241000710772 Yellow fever virus Species 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 208000006454 hepatitis Diseases 0.000 claims description 4
- 231100000283 hepatitis Toxicity 0.000 claims description 4
- 229960003085 meticillin Drugs 0.000 claims description 4
- YCOZIPAWZNQLMR-UHFFFAOYSA-N pentadecane Chemical compound CCCCCCCCCCCCCCC YCOZIPAWZNQLMR-UHFFFAOYSA-N 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims description 4
- MYPYJXKWCTUITO-LYRMYLQWSA-N vancomycin Chemical compound O([C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC1=C2C=C3C=C1OC1=CC=C(C=C1Cl)[C@@H](O)[C@H](C(N[C@@H](CC(N)=O)C(=O)N[C@H]3C(=O)N[C@H]1C(=O)N[C@H](C(N[C@@H](C3=CC(O)=CC(O)=C3C=3C(O)=CC=C1C=3)C(O)=O)=O)[C@H](O)C1=CC=C(C(=C1)Cl)O2)=O)NC(=O)[C@@H](CC(C)C)NC)[C@H]1C[C@](C)(N)[C@H](O)[C@H](C)O1 MYPYJXKWCTUITO-LYRMYLQWSA-N 0.000 claims description 4
- 229960003165 vancomycin Drugs 0.000 claims description 4
- MYPYJXKWCTUITO-UHFFFAOYSA-N vancomycin Natural products O1C(C(=C2)Cl)=CC=C2C(O)C(C(NC(C2=CC(O)=CC(O)=C2C=2C(O)=CC=C3C=2)C(O)=O)=O)NC(=O)C3NC(=O)C2NC(=O)C(CC(N)=O)NC(=O)C(NC(=O)C(CC(C)C)NC)C(O)C(C=C3Cl)=CC=C3OC3=CC2=CC1=C3OC1OC(CO)C(O)C(O)C1OC1CC(C)(N)C(O)C(C)O1 MYPYJXKWCTUITO-UHFFFAOYSA-N 0.000 claims description 4
- 229940051021 yellow-fever virus Drugs 0.000 claims description 4
- 241000193755 Bacillus cereus Species 0.000 claims description 3
- 201000009182 Chikungunya Diseases 0.000 claims description 3
- 208000004293 Chikungunya Fever Diseases 0.000 claims description 3
- 241000193163 Clostridioides difficile Species 0.000 claims description 3
- 241000195493 Cryptophyta Species 0.000 claims description 3
- 241000710945 Eastern equine encephalitis virus Species 0.000 claims description 3
- 239000004593 Epoxy Substances 0.000 claims description 3
- 241000710781 Flaviviridae Species 0.000 claims description 3
- 241000222722 Leishmania <genus> Species 0.000 claims description 3
- 201000005505 Measles Diseases 0.000 claims description 3
- 208000005647 Mumps Diseases 0.000 claims description 3
- 241000233654 Oomycetes Species 0.000 claims description 3
- 241000150350 Peribunyaviridae Species 0.000 claims description 3
- 241000287531 Psittacidae Species 0.000 claims description 3
- 241000713124 Rift Valley fever virus Species 0.000 claims description 3
- 241000191963 Staphylococcus epidermidis Species 0.000 claims description 3
- 241000700647 Variola virus Species 0.000 claims description 3
- 241000710959 Venezuelan equine encephalitis virus Species 0.000 claims description 3
- 241000726445 Viroids Species 0.000 claims description 3
- 241000710886 West Nile virus Species 0.000 claims description 3
- 241000607479 Yersinia pestis Species 0.000 claims description 3
- 239000011152 fibreglass Substances 0.000 claims description 3
- 230000036571 hydration Effects 0.000 claims description 3
- 238000006703 hydration reaction Methods 0.000 claims description 3
- 206010022000 influenza Diseases 0.000 claims description 3
- 208000010805 mumps infectious disease Diseases 0.000 claims description 3
- 229920001568 phenolic resin Polymers 0.000 claims description 3
- 208000008864 scrapie Diseases 0.000 claims description 3
- HQUQLFOMPYWACS-UHFFFAOYSA-N tris(2-chloroethyl) phosphate Chemical compound ClCCOP(=O)(OCCCl)OCCCl HQUQLFOMPYWACS-UHFFFAOYSA-N 0.000 claims description 3
- NUONTTMMRCYJMI-UHFFFAOYSA-N 3,4-dibutylphthalic acid Chemical compound CCCCC1=CC=C(C(O)=O)C(C(O)=O)=C1CCCC NUONTTMMRCYJMI-UHFFFAOYSA-N 0.000 claims description 2
- KWXICGTUELOLSQ-UHFFFAOYSA-N 4-dodecylbenzenesulfonic acid Chemical compound CCCCCCCCCCCCC1=CC=C(S(O)(=O)=O)C=C1 KWXICGTUELOLSQ-UHFFFAOYSA-N 0.000 claims description 2
- 241000228212 Aspergillus Species 0.000 claims description 2
- 241000194107 Bacillus megaterium Species 0.000 claims description 2
- 244000063299 Bacillus subtilis Species 0.000 claims description 2
- 235000014469 Bacillus subtilis Nutrition 0.000 claims description 2
- 241000588724 Escherichia coli Species 0.000 claims description 2
- 241000187480 Mycobacterium smegmatis Species 0.000 claims description 2
- 241000588645 Neisseria sicca Species 0.000 claims description 2
- 241001136170 Neisseria subflava Species 0.000 claims description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 2
- 241000607715 Serratia marcescens Species 0.000 claims description 2
- 235000021355 Stearic acid Nutrition 0.000 claims description 2
- 241000194049 Streptococcus equinus Species 0.000 claims description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229960000074 biopharmaceutical Drugs 0.000 claims description 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 claims description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052698 phosphorus Inorganic materials 0.000 claims description 2
- 239000011574 phosphorus Substances 0.000 claims description 2
- 229940098362 serratia marcescens Drugs 0.000 claims description 2
- 239000008117 stearic acid Substances 0.000 claims description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 2
- 229920002554 vinyl polymer Polymers 0.000 claims description 2
- 239000003570 air Substances 0.000 claims 11
- 241000272814 Anser sp. Species 0.000 claims 1
- 241000239290 Araneae Species 0.000 claims 1
- 241000191948 Kocuria rosea Species 0.000 claims 1
- 241000194036 Lactococcus Species 0.000 claims 1
- 241000192041 Micrococcus Species 0.000 claims 1
- 235000002233 Penicillium roqueforti Nutrition 0.000 claims 1
- 206010035148 Plague Diseases 0.000 claims 1
- 206010039509 Scab Diseases 0.000 claims 1
- 208000031726 Spotted Fever Group Rickettsiosis Diseases 0.000 claims 1
- 206010041925 Staphylococcal infections Diseases 0.000 claims 1
- 239000012080 ambient air Substances 0.000 claims 1
- 239000013626 chemical specie Substances 0.000 claims 1
- 208000015688 methicillin-resistant staphylococcus aureus infectious disease Diseases 0.000 claims 1
- 201000004284 spotted fever Diseases 0.000 claims 1
- XZZNDPSIHUTMOC-UHFFFAOYSA-N triphenyl phosphate Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)(=O)OC1=CC=CC=C1 XZZNDPSIHUTMOC-UHFFFAOYSA-N 0.000 claims 1
- 239000012855 volatile organic compound Substances 0.000 abstract description 13
- 239000000463 material Substances 0.000 description 21
- 239000000203 mixture Substances 0.000 description 19
- 150000001875 compounds Chemical class 0.000 description 13
- 230000009467 reduction Effects 0.000 description 11
- 238000007254 oxidation reaction Methods 0.000 description 9
- 230000003647 oxidation Effects 0.000 description 7
- 108091032973 (ribonucleotides)n+m Proteins 0.000 description 6
- 108020004414 DNA Proteins 0.000 description 6
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 6
- 241000589968 Borrelia Species 0.000 description 5
- 102000053602 DNA Human genes 0.000 description 5
- -1 formaldehyde, carbon disulfide, carbohydrates Chemical class 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 102000040650 (ribonucleotides)n+m Human genes 0.000 description 4
- 241000282412 Homo Species 0.000 description 4
- 239000000443 aerosol Substances 0.000 description 4
- 230000000844 anti-bacterial effect Effects 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 230000008030 elimination Effects 0.000 description 4
- 238000003379 elimination reaction Methods 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052703 rhodium Inorganic materials 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910001868 water Inorganic materials 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 206010018612 Gonorrhoea Diseases 0.000 description 3
- 241000589902 Leptospira Species 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 241000709664 Picornaviridae Species 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 235000014633 carbohydrates Nutrition 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 208000001786 gonorrhea Diseases 0.000 description 3
- 210000004072 lung Anatomy 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229910017464 nitrogen compound Inorganic materials 0.000 description 3
- 150000002830 nitrogen compounds Chemical class 0.000 description 3
- 239000005416 organic matter Substances 0.000 description 3
- 150000002903 organophosphorus compounds Chemical class 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 241000193738 Bacillus anthracis Species 0.000 description 2
- 241000606660 Bartonella Species 0.000 description 2
- 241000588832 Bordetella pertussis Species 0.000 description 2
- 241000222122 Candida albicans Species 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 241000193403 Clostridium Species 0.000 description 2
- 241000193155 Clostridium botulinum Species 0.000 description 2
- 241000223203 Coccidioides Species 0.000 description 2
- 241000711573 Coronaviridae Species 0.000 description 2
- 201000003075 Crimean-Congo hemorrhagic fever Diseases 0.000 description 2
- 241001115402 Ebolavirus Species 0.000 description 2
- 241000709661 Enterovirus Species 0.000 description 2
- 241000626621 Geobacillus Species 0.000 description 2
- 241000606768 Haemophilus influenzae Species 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 206010023927 Lassa fever Diseases 0.000 description 2
- 241000589248 Legionella Species 0.000 description 2
- 241001115401 Marburgvirus Species 0.000 description 2
- 241000526636 Nipah henipavirus Species 0.000 description 2
- 241001263478 Norovirus Species 0.000 description 2
- 241000150452 Orthohantavirus Species 0.000 description 2
- 241000224016 Plasmodium Species 0.000 description 2
- 241000589517 Pseudomonas aeruginosa Species 0.000 description 2
- 206010039207 Rocky Mountain Spotted Fever Diseases 0.000 description 2
- 108020004682 Single-Stranded DNA Proteins 0.000 description 2
- 241000193998 Streptococcus pneumoniae Species 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 150000001336 alkenes Chemical class 0.000 description 2
- 150000001345 alkine derivatives Chemical class 0.000 description 2
- 230000000845 anti-microbial effect Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229940065181 bacillus anthracis Drugs 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000004566 building material Substances 0.000 description 2
- 229940095731 candida albicans Drugs 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 2
- 239000002738 chelating agent Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- DCAYPVUWAIABOU-UHFFFAOYSA-N hexadecane Chemical compound CCCCCCCCCCCCCCCC DCAYPVUWAIABOU-UHFFFAOYSA-N 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000011534 incubation Methods 0.000 description 2
- 230000002147 killing effect Effects 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- XMGQYMWWDOXHJM-UHFFFAOYSA-N limonene Chemical compound CC(=C)C1CCC(C)=CC1 XMGQYMWWDOXHJM-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 239000000575 pesticide Substances 0.000 description 2
- 150000002989 phenols Chemical class 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000010839 reverse transcription Methods 0.000 description 2
- 235000014214 soft drink Nutrition 0.000 description 2
- 229940031000 streptococcus pneumoniae Drugs 0.000 description 2
- STCOOQWBFONSKY-UHFFFAOYSA-N tributyl phosphate Chemical compound CCCCOP(=O)(OCCCC)OCCCC STCOOQWBFONSKY-UHFFFAOYSA-N 0.000 description 2
- 229910001930 tungsten oxide Inorganic materials 0.000 description 2
- 241001529453 unidentified herpesvirus Species 0.000 description 2
- 241001430294 unidentified retrovirus Species 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- YJTKZCDBKVTVBY-UHFFFAOYSA-N 1,3-Diphenylbenzene Chemical group C1=CC=CC=C1C1=CC=CC(C=2C=CC=CC=2)=C1 YJTKZCDBKVTVBY-UHFFFAOYSA-N 0.000 description 1
- HJXYDPWBEAEQIO-UHFFFAOYSA-N 2,2-dibutylhexanedioic acid Chemical compound CCCCC(CCCC)(C(O)=O)CCCC(O)=O HJXYDPWBEAEQIO-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- 241000589291 Acinetobacter Species 0.000 description 1
- 241000701242 Adenoviridae Species 0.000 description 1
- 241000701386 African swine fever virus Species 0.000 description 1
- 241001664176 Alpharetrovirus Species 0.000 description 1
- 241000239223 Arachnida Species 0.000 description 1
- 241000203069 Archaea Species 0.000 description 1
- 241000712891 Arenavirus Species 0.000 description 1
- 241000238421 Arthropoda Species 0.000 description 1
- 241001225321 Aspergillus fumigatus Species 0.000 description 1
- 241000228257 Aspergillus sp. Species 0.000 description 1
- 241000711404 Avian avulavirus 1 Species 0.000 description 1
- 241000193830 Bacillus <bacterium> Species 0.000 description 1
- 241001231757 Betaretrovirus Species 0.000 description 1
- 241000588807 Bordetella Species 0.000 description 1
- 241000724653 Borna disease virus Species 0.000 description 1
- 241000776207 Bornaviridae Species 0.000 description 1
- 241000589969 Borreliella burgdorferi Species 0.000 description 1
- 241001509299 Brucella canis Species 0.000 description 1
- 241000714198 Caliciviridae Species 0.000 description 1
- 241000589876 Campylobacter Species 0.000 description 1
- 241000589875 Campylobacter jejuni Species 0.000 description 1
- 241000222173 Candida parapsilosis Species 0.000 description 1
- 241001502567 Chikungunya virus Species 0.000 description 1
- 241001647372 Chlamydia pneumoniae Species 0.000 description 1
- UDHXJZHVNHGCEC-UHFFFAOYSA-N Chlorophacinone Chemical compound C1=CC(Cl)=CC=C1C(C=1C=CC=CC=1)C(=O)C1C(=O)C2=CC=CC=C2C1=O UDHXJZHVNHGCEC-UHFFFAOYSA-N 0.000 description 1
- 241000588923 Citrobacter Species 0.000 description 1
- 241000186216 Corynebacterium Species 0.000 description 1
- 241000700626 Cowpox virus Species 0.000 description 1
- 208000000307 Crimean Hemorrhagic Fever Diseases 0.000 description 1
- 201000007336 Cryptococcosis Diseases 0.000 description 1
- 241000221204 Cryptococcus neoformans Species 0.000 description 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
- 241001663879 Deltaretrovirus Species 0.000 description 1
- 241000725619 Dengue virus Species 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 241000588914 Enterobacter Species 0.000 description 1
- 241000194032 Enterococcus faecalis Species 0.000 description 1
- 241000991587 Enterovirus C Species 0.000 description 1
- 206010066919 Epidemic polyarthritis Diseases 0.000 description 1
- 241001663878 Epsilonretrovirus Species 0.000 description 1
- 241001663880 Gammaretrovirus Species 0.000 description 1
- 241000606790 Haemophilus Species 0.000 description 1
- 241000589989 Helicobacter Species 0.000 description 1
- 241000590002 Helicobacter pylori Species 0.000 description 1
- 241000893570 Hendra henipavirus Species 0.000 description 1
- 241000711549 Hepacivirus C Species 0.000 description 1
- 241000709721 Hepatovirus A Species 0.000 description 1
- 241000700586 Herpesviridae Species 0.000 description 1
- 241000238631 Hexapoda Species 0.000 description 1
- 241000228402 Histoplasma Species 0.000 description 1
- 241000701085 Human alphaherpesvirus 3 Species 0.000 description 1
- 241000725303 Human immunodeficiency virus Species 0.000 description 1
- 241000829111 Human polyomavirus 1 Species 0.000 description 1
- 241000701460 JC polyomavirus Species 0.000 description 1
- 241000712890 Junin mammarenavirus Species 0.000 description 1
- 208000007764 Legionnaires' Disease Diseases 0.000 description 1
- 241000713666 Lentivirus Species 0.000 description 1
- 241001135198 Leptospira santarosai Species 0.000 description 1
- 241000186781 Listeria Species 0.000 description 1
- 241000186779 Listeria monocytogenes Species 0.000 description 1
- 241000829100 Macaca mulatta polyomavirus 1 Species 0.000 description 1
- 241000712079 Measles morbillivirus Species 0.000 description 1
- 241000191938 Micrococcus luteus Species 0.000 description 1
- 241000862466 Monilinia laxa Species 0.000 description 1
- 241000588621 Moraxella Species 0.000 description 1
- 241000588655 Moraxella catarrhalis Species 0.000 description 1
- 241000711386 Mumps virus Species 0.000 description 1
- 241000186359 Mycobacterium Species 0.000 description 1
- 241000187488 Mycobacterium sp. Species 0.000 description 1
- 241000588650 Neisseria meningitidis Species 0.000 description 1
- IOVCWXUNBOPUCH-UHFFFAOYSA-N Nitrous acid Chemical compound ON=O IOVCWXUNBOPUCH-UHFFFAOYSA-N 0.000 description 1
- 241000714209 Norwalk virus Species 0.000 description 1
- 241000713112 Orthobunyavirus Species 0.000 description 1
- 241000711504 Paramyxoviridae Species 0.000 description 1
- CYTYCFOTNPOANT-UHFFFAOYSA-N Perchloroethylene Chemical group ClC(Cl)=C(Cl)Cl CYTYCFOTNPOANT-UHFFFAOYSA-N 0.000 description 1
- 241000233870 Pneumocystis Species 0.000 description 1
- 241000966057 Pneumocystis sp. Species 0.000 description 1
- 241000700625 Poxviridae Species 0.000 description 1
- 241000125945 Protoparvovirus Species 0.000 description 1
- 241000589516 Pseudomonas Species 0.000 description 1
- 241000589776 Pseudomonas putida Species 0.000 description 1
- 241000702247 Reoviridae Species 0.000 description 1
- 241000724205 Rice stripe tenuivirus Species 0.000 description 1
- 241000710942 Ross River virus Species 0.000 description 1
- 241000702670 Rotavirus Species 0.000 description 1
- 241000710799 Rubella virus Species 0.000 description 1
- 241000293869 Salmonella enterica subsp. enterica serovar Typhimurium Species 0.000 description 1
- 241000221662 Sclerotinia Species 0.000 description 1
- 241000008910 Severe acute respiratory syndrome-related coronavirus Species 0.000 description 1
- 241000710960 Sindbis virus Species 0.000 description 1
- 241001147691 Staphylococcus saprophyticus Species 0.000 description 1
- ZMZDMBWJUHKJPS-UHFFFAOYSA-M Thiocyanate anion Chemical compound [S-]C#N ZMZDMBWJUHKJPS-UHFFFAOYSA-M 0.000 description 1
- 241000589886 Treponema Species 0.000 description 1
- 208000025865 Ulcer Diseases 0.000 description 1
- 241000607598 Vibrio Species 0.000 description 1
- 241000607626 Vibrio cholerae Species 0.000 description 1
- 241000219094 Vitaceae Species 0.000 description 1
- 241000607734 Yersinia <bacteria> Species 0.000 description 1
- 241000607447 Yersinia enterocolitica Species 0.000 description 1
- 241000607477 Yersinia pseudotuberculosis Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 108700010877 adenoviridae proteins Proteins 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229940091771 aspergillus fumigatus Drugs 0.000 description 1
- 244000052616 bacterial pathogen Species 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000003115 biocidal effect Effects 0.000 description 1
- 239000003124 biologic agent Substances 0.000 description 1
- 229940055022 candida parapsilosis Drugs 0.000 description 1
- 238000009924 canning Methods 0.000 description 1
- AIXMJTYHQHQJLU-UHFFFAOYSA-N chembl210858 Chemical compound O1C(CC(=O)OC)CC(C=2C=CC(O)=CC=2)=N1 AIXMJTYHQHQJLU-UHFFFAOYSA-N 0.000 description 1
- 150000008280 chlorinated hydrocarbons Chemical class 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000002498 deadly effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005202 decontamination Methods 0.000 description 1
- 230000003588 decontaminative effect Effects 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 229940032049 enterococcus faecalis Drugs 0.000 description 1
- 230000008029 eradication Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 230000002538 fungal effect Effects 0.000 description 1
- 244000053095 fungal pathogen Species 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 235000021021 grapes Nutrition 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229940047650 haemophilus influenzae Drugs 0.000 description 1
- 229940037467 helicobacter pylori Drugs 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000000415 inactivating effect Effects 0.000 description 1
- 201000001371 inclusion conjunctivitis Diseases 0.000 description 1
- 208000015181 infectious disease Diseases 0.000 description 1
- 239000000543 intermediate Substances 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000009533 lab test Methods 0.000 description 1
- 229940087305 limonene Drugs 0.000 description 1
- 235000001510 limonene Nutrition 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 230000000813 microbial effect Effects 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000000825 pharmaceutical preparation Substances 0.000 description 1
- 229940127557 pharmaceutical product Drugs 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 201000000317 pneumocystosis Diseases 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000241 respiratory effect Effects 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229940037645 staphylococcus epidermidis Drugs 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 229950011008 tetrachloroethylene Drugs 0.000 description 1
- AYEKOFBPNLCAJY-UHFFFAOYSA-O thiamine pyrophosphate Chemical compound CC1=C(CCOP(O)(=O)OP(O)(O)=O)SC=[N+]1CC1=CN=C(C)N=C1N AYEKOFBPNLCAJY-UHFFFAOYSA-O 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 239000003053 toxin Substances 0.000 description 1
- 231100000765 toxin Toxicity 0.000 description 1
- 108700012359 toxins Proteins 0.000 description 1
- 206010044325 trachoma Diseases 0.000 description 1
- 239000001974 tryptic soy broth Substances 0.000 description 1
- 108010050327 trypticase-soy broth Proteins 0.000 description 1
- 231100000397 ulcer Toxicity 0.000 description 1
- 241000701161 unidentified adenovirus Species 0.000 description 1
- 241000712461 unidentified influenza virus Species 0.000 description 1
- 229940118696 vibrio cholerae Drugs 0.000 description 1
- 239000013603 viral vector Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229940098232 yersinia enterocolitica Drugs 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
- A61L2/20—Gaseous substances, e.g. vapours
- A61L2/208—Hydrogen peroxide
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
- A61L2/20—Gaseous substances, e.g. vapours
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/26—Accessories or devices or components used for biocidal treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L1/00—Enclosures; Chambers
- B01L1/04—Dust-free rooms or enclosures
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
- E04H1/00—Buildings or groups of buildings for dwelling or office purposes; General layout, e.g. modular co-ordination or staggered storeys
- E04H1/12—Small buildings or other erections for limited occupation, erected in the open air or arranged in buildings, e.g. kiosks, waiting shelters for bus stops or for filling stations, roofs for railway platforms, watchmen's huts or dressing cubicles
- E04H1/1277—Shelters for decontamination
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
- A61L2202/20—Targets to be treated
- A61L2202/25—Rooms in buildings, passenger compartments
Landscapes
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Epidemiology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Architecture (AREA)
- General Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Clinical Laboratory Science (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
- Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
- Ventilation (AREA)
- Central Air Conditioning (AREA)
- Agricultural Chemicals And Associated Chemicals (AREA)
Abstract
Description
実施例
実施例1:ゲオバチルス属サブティリスの胞子を制御するためのDHPの研究室テスト
実施例2:モジュール式クリーンルームの瓶詰め施設への適用
Claims (64)
- 少なくとも0.05百万分率(ppm)の濃度の希薄過酸化水素(DHP)ガスを含むクリーンルーム。
- DHPガスの前記濃度が最大10.0ppmである、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、ISO 14644クラス1のクリーンルーム、ISO 14644クラス2のクリーンルーム、ISO 14644クラス3のクリーンルーム、ISO 14644クラス4のクリーンルーム、ISO 14644クラス5のクリーンルーム、ISO 14644クラス6のクリーンルーム、ISO 14644クラス7のクリーンルーム、またはISO 14644クラス8のクリーンルームである、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、BS 5295クラス1のクリーンルーム、BS 5295クラス2のクリーンルーム、BS 5295クラス3のクリーンルーム、またはBS 5295クラス4のクリーンルームである、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、EU GMPグレードAのクリーンルーム、EU GMPグレードBのクリーンルーム、EU GMPグレードCのクリーンルーム、EU GMPグレードDのクリーンルームである、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、モジュール式のクリーンルームである、請求項1〜5のいずれか一項に記載のクリーンルーム。
- 前記DHPガスは、暖房、換気、および空調(HVAC)システムによってもたらされる、請求項1に記載のクリーンルーム。
- 前記HVACシステムは、0.015百万分率(ppm)以下のオゾンを含むDHPガスをもたらす、請求項7に記載のクリーンルーム。
- 前記HVACシステムは、再循環空気システムを含む、請求項7に記載のクリーンルーム。
- 前記HVACシステムは、1つ以上の精製過酸化水素ガス(PHPG)発生装置を含む、請求項9に記載のクリーンルーム。
- 連邦規格209による高性能微粒子(HEPA)濾過システムを更に含む、請求項7に記載のクリーンルーム。
- 前記HEPA濾過は、MiL−F−51068またはIEST−RP−CC−001による、0.3ミクロン粒子について少なくとも99.97%の効率の少なくとも1つのフィルタを含む、請求項11に記載のクリーンルーム。
- 前記HVACシステムは、排出した空気および漏出により失われた空気を補充する補給空気システムを更に含む、請求項7に記載のクリーンルーム。
- 前記補給空気システムは、0.015百万分率(ppm)以下のオゾンを含んでいるDHPガスをもたらす、請求項13に記載のクリーンルーム。
- 前記補給空気システムは、1つ以上のPHPG発生装置を含む、請求項13に記載のクリーンルーム。
- 前記補給空気システムは、30%ASHRAEフィルタ、60%ASHRAEフィルタ、または95%ASHRAEフィルタから選択される1つ以上のフィルタを含む、請求項13に記載のクリーンルーム。
- 前記DHPガスは、0.015百万分率(ppm)以下のオゾンを含むDHPガスをもたらす独立型のPHPG発生装置によってもたらされる、請求項1に記載のクリーンルーム。
- 前記PHPG発生装置により生成される前記DHPガスは、水和作用、オゾン、プラズマ種、または有機化学種を含んでいない、請求項17に記載のクリーンルーム。
- 前記クリーンルームは、モジュール式の設備である、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、乱流クリーンルームである、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、層流クリーンルームである、請求項1に記載のクリーンルーム。
- DHPガスを含む前記クリーンルームは、職業安全衛生管理局(OSHA)、国立労働安全衛生研究所(NIOSH)、または米国産業衛生専門家会議(ACGIH)規格による連続した人間の滞在にとって安全である、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、製薬用クリーンルームである、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、生物薬剤用クリーンルームである、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、半導体製造のためのクリーンルームである、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、浮遊分子状汚染物質のレベルが低減されている、請求項1に記載のクリーンルーム。
- 前記クリーンルームの内側表面は、フェノールプラスチック、ガラス強化プラスチック、鋼、被覆鋼、アルミニウム、エポキシ被覆されたコンクリートブロック、乾式壁体、およびビニル、ならびに厚膜型防錆仕上げの乾式壁体からなる群から選択される、請求項1に記載のクリーンルーム。
- 換気回数が、毎時1〜360回の換気(ACH)である、請求項19に記載のクリーンルーム。
- 平均気流速度が、0.005m/s〜0.508m/sである、請求項21に記載のクリーンルーム。
- 前記クリーンルームは、隣接領域より高い圧力に維持される、請求項1に記載のクリーンルーム。
- 前記クリーンルームは、前記隣接する非クリーンルーム領域より少なくとも5Pa高い圧力を有する、請求項30に記載のクリーンルーム。
- 前記クリーンルームは、前記隣接する非クリーンルーム領域より5〜50Pa高い圧力を有する、請求項31に記載のクリーンルーム。
- エアロック、パススルーエアロック、または準備室を更に含む、請求項1に記載のクリーンルーム。
- 前記エアロックまたは準備室は、インターロックを更に含む、請求項33に記載のクリーンルーム。
- 前記エアロックまたは準備室は、少なくとも0.05百万分率(ppm)の濃度のDHPガスを含む、請求項33に記載のクリーンルーム。
- 前記クリーンルームは、20〜22℃または18.9℃の温度に維持される、請求項1に記載のクリーンルーム。
- 前記クリーンルームの相対湿度は1〜99%である、請求項1に記載のクリーンルーム。
- 前記相対湿度は30〜60%の相対湿度である、請求項37に記載のクリーンルーム。
- 前記クリーンルームは、疾病管理予防センターによって、バイオセーフティレベル1(BSL−1)、バイオセーフティレベル2(BSL−2)、バイオセーフティレベル3(BSL−3)、またはバイオセーフティレベル4(BSL−4)として指定された生物学的封じ込め環境を備える、請求項1に記載のクリーンルーム。
- 前記生物学的封じ込め環境は、隣接する非クリーンルーム領域に対して陰圧を有する、請求項39に記載のクリーンルーム。
- 前記BSL−1環境は、オルソミクソウイルス、アルカリゲネス−フェカーリス、黒色アスペルギルス、バシラス−セレウス、バシラス−メガテリウム、バシラスサチリス、スポロゲネス菌、アイロゲネス腸内菌、汚物腸内菌、大腸菌、ミクロコッカス−ロゼウス、ミクロコッカス−ルテウス、マイコバクテリウムスメグマチス、ナイセリア−シッカ、ナイセリア‐サブフラバ、アオカビ、クモノスカビ、ロドスピリラム−ラブラム、セラチア‐マルセスセンス、スタフィロコッカス−エピデルミディス、ストレプトコッカス−ボビス、またはストレプトコッカス(ラクトコッカス)ラクチスについての研究に適している、請求項39に記載のクリーンルーム。
- 前記BSL−2環境は、C.ディフィシル、クラミジア、肝炎ウイルス、非天然痘オルトミクソウイルス科、インフルエンザ、ライム病、サルモネラ属、流行性耳下腺炎、はしか、スクレーピ、メチシリン耐性黄色ブドウ球菌(MRSA)、またはバンコマイシン耐性スタフィロコッカス‐アウレウス(VRSA)についての研究に適している、請求項39に記載のクリーンルーム。
- 前記BSL−3環境は、ペスト菌、野兎病菌、ドノバンリーシュマニア、ヒト結核菌、オウム病クラミジア、ベネズエラウマ脳炎ウイルス、東部ウマ脳炎ウイルス、SARSコロナウイルス、コクシエラ−バーネッティ、リフトバレー熱ウイルス、ロッキー山紅斑熱リケッチア、ブルセラ属、狂犬病ウイルス、チクングンヤ熱、黄熱ウイルス、および西ナイルウイルスについての研究に適している、請求項39に記載のクリーンルーム。
- 前記BSL−4環境は、アレナウイルス科、フィロウイルス科、ブニヤウイルス科、フラビウイルス科、またはラブドウイルス科についての研究に適している、請求項39に記載のクリーンルーム。
- 微生物によるクリーンルームの汚染を防止する方法であって、少なくとも0.05百万分率(ppm)の濃度のDHPガスを前記クリーンルームに供給することを含む、方法。
- 前記微生物は、ウイルス、ウイロイド、ウイルス様生物、細菌、原生動物、藻類、卵真菌、真菌およびカビからなる群から選択される、請求項39に記載の方法。
- 微生物によるクリーンルームの汚染を低減する方法であって、少なくとも0.05百万分率(ppm)の濃度のDHPガスを前記クリーンルームに供給することを含む、方法。
- 微生物によるクリーンルームの汚染を除去する方法であって、少なくとも0.05百万分率(ppm)の濃度のDHPガスを前記クリーンルームに供給することを含む、方法。
- クリーンルーム内の有機化合物を低減する方法であって、少なくとも0.05百万分率(ppm)の濃度のDHPガスをクリーンルームに供給することを含む、方法。
- クリーンルーム内の揮発性有機種のレベルを低減する方法であって、少なくとも0.05百万分率(ppm)の濃度のDHPガスを前記クリーンルームに供給することを含む、方法。
- 前記揮発性有機種は、ビス(2−エチルヘキシル)ベンゼン−1,2−ジカルボキシレート(DOP)、リン酸トリエチル(TEP)、ブチルヒドロキシトルエン(BHT)、テキサノールイソ酪酸塩(TXIB)、リン酸トリブチル(TBP)、リン酸ジブチル(DBP)からなる群から選択される、請求項50に記載の方法。
- 少なくとも0.05百万分率(ppm)の濃度のDHPガスを前記クリーンルームに供給する方法であって、表面に触媒を有する通気性の基板構造と光源とを含むPHPG発生装置を取り付けることを含み、空気が前記通気性基板構造を通って流れ、前記装置はPHPGを生成して、前記通気性基板構造から離れるようにそれを導く、方法。
- 前記PHPG発生装置により生成される前記DHPガスは、水和作用、オゾン、プラズマ種、および有機種を含んでいない、請求項52に記載の方法。
- 前記気流はHVACシステムによってもたらされる、請求項52に記載の方法。
- 前記DHPガスは湿気のある環境空気から調製される、請求項52に記載の方法。
- 前記DHPガスは気化した過酸化水素液体から調製されない、請求項55に記載の方法。
- 前記DHPガスは独立型PHPG発生装置により供給される、請求項52に記載の方法。
- 前記PHPG発生装置は、前記気流をもたらす送風機を更に含む、請求項52に記載の方法。
- 前記光源は紫外光である、請求項52に記載の方法。
- 前記光源は紫外光であり、187ナノメートル未満の波長を含まない、請求項52に記載の方法。
- 前記通気性基板構造は、約5ナノメートル〜約750ナノメートルの厚さである、請求項52に記載の方法。
- シリコンウエハを生産する間の有機種の吸着により誘発される汚染を低減する方法であって、少なくとも0.05百万分率(ppm)の濃度のDHPガスをシリコンウエハ生産設備のクリーンルームに供給することを含む、方法。
- 前記有機種は、ステアリン酸、ブチルヒドロキシトルエン、シロキサン、4−ドデシルベンゼンスルホン酸、n−ペンタデカン、ビス(2−エチルヘキシル)ベンゼン−1,2−ジカルボキシレート(DOP)、3,4−ジブチルフタル酸(DBP)、ジエチルフタレート(DEP)、リン酸トリス(2−クロロエチル)(TCEP)、リン酸トリフェニル(TPP)、リン酸トリエチル(TEP)、ヘキサンジオエート(hexanedioate)(DOA)、2,2−ジブチルヘキサン二酸(DBA)、および2,6−ジtert−ブチル−4−メチルフェノール(BHT)からなる群から選択される、請求項62に記載の方法。
- 前記有機種の吸着により誘発される汚染が少なくとも10%低減される、請求項62に記載の方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021121679A JP2021183902A (ja) | 2015-04-20 | 2021-07-26 | 希薄過酸化水素(dhp)ガスを含むクリーンルームおよびその使用方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562149925P | 2015-04-20 | 2015-04-20 | |
US62/149,925 | 2015-04-20 | ||
PCT/US2016/028457 WO2016172223A1 (en) | 2015-04-20 | 2016-04-20 | Clean rooms having dilute hydrogen peroxide (dhp) gas and methods of use thereof |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021121679A Division JP2021183902A (ja) | 2015-04-20 | 2021-07-26 | 希薄過酸化水素(dhp)ガスを含むクリーンルームおよびその使用方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018513343A true JP2018513343A (ja) | 2018-05-24 |
JP2018513343A5 JP2018513343A5 (ja) | 2019-05-30 |
Family
ID=57144214
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017554851A Pending JP2018513343A (ja) | 2015-04-20 | 2016-04-20 | 希薄過酸化水素(dhp)ガスを含むクリーンルームおよびその使用方法 |
JP2021121679A Pending JP2021183902A (ja) | 2015-04-20 | 2021-07-26 | 希薄過酸化水素(dhp)ガスを含むクリーンルームおよびその使用方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021121679A Pending JP2021183902A (ja) | 2015-04-20 | 2021-07-26 | 希薄過酸化水素(dhp)ガスを含むクリーンルームおよびその使用方法 |
Country Status (14)
Country | Link |
---|---|
US (1) | US20190056122A1 (ja) |
EP (1) | EP3285816A4 (ja) |
JP (2) | JP2018513343A (ja) |
KR (1) | KR20170141732A (ja) |
CN (1) | CN107921163A (ja) |
AU (2) | AU2016252618B2 (ja) |
BR (1) | BR112017022309B1 (ja) |
CA (1) | CA2983154A1 (ja) |
HK (1) | HK1250219A1 (ja) |
IL (1) | IL255130B (ja) |
MX (1) | MX2017013486A (ja) |
RU (1) | RU2752175C2 (ja) |
SG (2) | SG11201708605SA (ja) |
WO (1) | WO2016172223A1 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2020110707A (ru) | 2013-08-20 | 2020-06-29 | Джеймс Д. ЛИ | Способы улучшения здоровья дыхательной системы и повышения концентрации гипотиоцианат-иона в легких позвоночных |
DE102016124284B3 (de) * | 2016-12-14 | 2018-02-22 | Compliance Advice And Services In Microbiology Gmbh | Überprüfung einer Sterilisationswirkung |
IL267915B2 (en) * | 2017-01-09 | 2024-03-01 | Synexis Llc | Application of dry hydrogen peroxide gas (DHP) in poultry production methods |
USD890898S1 (en) | 2018-01-09 | 2020-07-21 | Synexis Llc | Device for producing non-hydrated purified hydrogen peroxide gas |
CN108559721A (zh) * | 2018-05-15 | 2018-09-21 | 北京师范大学 | 一种净化空气的复合微生物菌剂及其应用 |
SG11202103530XA (en) * | 2018-10-12 | 2021-05-28 | Synexis Llc | Electrolytic devices and methods for dry hydrogen peroxide production |
CN110237709A (zh) * | 2019-07-10 | 2019-09-17 | 中威新能源(成都)有限公司 | 基于太阳电池制造工艺的硅片表面抑制氧化方法 |
BE1027790B1 (nl) * | 2019-11-25 | 2021-06-23 | Advipro Bvba | Inrichting voor het monitoren en regelen van een stofvrije ruimte |
KR102348142B1 (ko) | 2020-01-02 | 2022-01-06 | 주식회사 휴온스메디케어 | 에어쿠션을 이용한 과산화수소 증기발생장치 |
KR20210143602A (ko) | 2020-05-20 | 2021-11-29 | 주식회사 휴온스메디케어 | 과산화수소 증기발생기, 이를 구비하는 공간 멸균장치 및 멸균방법 |
KR102402541B1 (ko) | 2020-06-26 | 2022-06-07 | 주식회사 휴온스메디텍 | 과산화수소 증기발생기 |
TWI747545B (zh) * | 2020-05-07 | 2021-11-21 | 鈺祥企業股份有限公司 | 過濾模組 |
CN113617142B (zh) | 2020-05-07 | 2023-04-18 | 钰祥企业股份有限公司 | 过滤模块 |
CN112067712B (zh) * | 2020-08-18 | 2022-11-01 | 上海纳米技术及应用国家工程研究中心有限公司 | 一种诊断新型冠状病毒的挥发性标志物及其应用 |
AU2022205935A1 (en) | 2021-01-08 | 2023-08-10 | Synexis Llc | Microbial control on high-touch surfaces in health care facilities |
CA3223857A1 (en) * | 2021-06-25 | 2022-12-29 | Mark Hernandez | Peroxide-enhanced germicidal irradiation for the treatment of airborne and surface-associated contaminants |
DE102023101233A1 (de) * | 2023-01-19 | 2024-07-25 | Khs Gmbh | Vorrichtung und Verfahren zur Behandlung von Behältern unter Sterilbedingungen |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55118541A (en) * | 1979-03-05 | 1980-09-11 | Sanko Kuki Sochi Kk | Downflow system laminar flow type clean room |
JPS5812937A (ja) * | 1981-07-16 | 1983-01-25 | Takasago Thermal Eng Co Lts | 省エネルギ−型クリ−ンル−ム |
JP2002292222A (ja) * | 2001-03-30 | 2002-10-08 | Japan Vilene Co Ltd | エアフィルタ用濾材、エアフィルタユニット、及びその製造方法、並びにその包装体 |
JP2004278887A (ja) * | 2003-03-14 | 2004-10-07 | Sharp Corp | 乱流式クリーンルーム |
US20050226764A1 (en) * | 2002-07-02 | 2005-10-13 | Claude Moirandat | Method and system for decontaminating a clean-room |
JP2011010892A (ja) * | 2009-07-02 | 2011-01-20 | Shimizu Corp | 室内除染システム |
JP3170439U (ja) * | 2011-07-05 | 2011-09-15 | 奇立實業股▲ふん▼有限公司 | 温湿度、風量、清潔度の自動調整能力を有するモジュール式クリーンルーム |
JP2012517862A (ja) * | 2009-02-13 | 2012-08-09 | リー・アンティマイクロビアル・ソリューションズ・リミテッド・ライアビリティ・カンパニー | 紫外光空気処理方法、及び紫外光空気処理装置 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59189023U (ja) * | 1983-06-03 | 1984-12-14 | 鹿島建設株式会社 | クリ−ンル−ムの給気装置 |
JPS6172947A (ja) * | 1984-09-18 | 1986-04-15 | Takasago Thermal Eng Co Ltd | クリ−ンル−ムの形成法およびこの方法に使用する空気調和設備ユニツト |
JPS6399434A (ja) * | 1986-10-15 | 1988-04-30 | Shin Nippon Kucho Kk | クリ−ンル−ムにおける天井構造 |
DE9116423U1 (de) * | 1991-07-08 | 1992-09-17 | Babcock-BSH AG vormals Büttner-Schilde-Haas AG, 4150 Krefeld | Modul zum Aufbau einer Reinraumdecke |
US5643404A (en) * | 1994-09-16 | 1997-07-01 | Purex Co., Ltd. | Method for examination of silicon wafer surface defects |
JPH10286437A (ja) * | 1997-04-12 | 1998-10-27 | Daikin Ind Ltd | 清浄空気供給装置およびそれに用いる通気性部材 |
KR100388107B1 (ko) * | 1998-12-22 | 2003-06-18 | 니혼 캠브리지 필터 가부시키가이샤 | 에어필터 |
CA2463988A1 (en) * | 2001-10-25 | 2003-05-01 | Steris Inc. | Decontamination of critical mail |
US20080293806A1 (en) * | 2004-05-12 | 2008-11-27 | Keith Douglas Perring | Odor Reduction Compositions |
US7285147B2 (en) * | 2004-12-02 | 2007-10-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Air supply systems and pressure adjustment devices for use therewith |
US7850931B2 (en) * | 2005-08-11 | 2010-12-14 | American Sterilizer Company | Self-contained deactivation device |
JP4923791B2 (ja) * | 2006-07-03 | 2012-04-25 | ダイキン工業株式会社 | 空調システム |
DE102006036475A1 (de) * | 2006-08-04 | 2008-02-07 | Khs Ag | Verfahren zur Sterilisation von Reinräumen für die Behandlung und/oder das Füllen und Verschließen von Behältern |
WO2008136215A1 (ja) * | 2007-04-26 | 2008-11-13 | C'stec Corporation | クリーンユニット、クリーンユニットの運転方法および連結クリーンユニット |
AU2008285414B2 (en) * | 2007-08-07 | 2014-01-30 | Synexis Llc | UV air treatment method and device |
WO2010097333A1 (en) * | 2009-02-26 | 2010-09-02 | Ortner Reinraumtechnik Gmbh | Clean room, clean room suit and arrangement therefor |
MY161931A (en) * | 2009-08-16 | 2017-05-15 | G-Con Mfg Inc | Modular, self-contained, mobile clean room |
EP2338331A1 (en) * | 2009-12-22 | 2011-06-29 | Research Center Pharmaceutical Engineering GmbH | Methods and compositions for biologically controlling microbial growth on clean room equipment |
US9321621B2 (en) * | 2010-05-25 | 2016-04-26 | Otsuka Pharmaceutical Co., Ltd. | Aseptic filling system |
JP2013158699A (ja) * | 2012-02-03 | 2013-08-19 | Ihi Shibaura Machinery Corp | 酸化処理方法および酸化処理システム |
CN104394906A (zh) * | 2012-07-02 | 2015-03-04 | 诺和诺德保健Ag(股份有限公司) | 制造医疗设备的方法 |
JP2014214915A (ja) * | 2013-04-23 | 2014-11-17 | 清水建設株式会社 | 清浄化空調システム |
RU2020110707A (ru) * | 2013-08-20 | 2020-06-29 | Джеймс Д. ЛИ | Способы улучшения здоровья дыхательной системы и повышения концентрации гипотиоцианат-иона в легких позвоночных |
-
2016
- 2016-04-20 US US15/567,564 patent/US20190056122A1/en not_active Abandoned
- 2016-04-20 WO PCT/US2016/028457 patent/WO2016172223A1/en active Application Filing
- 2016-04-20 MX MX2017013486A patent/MX2017013486A/es unknown
- 2016-04-20 CA CA2983154A patent/CA2983154A1/en not_active Abandoned
- 2016-04-20 JP JP2017554851A patent/JP2018513343A/ja active Pending
- 2016-04-20 AU AU2016252618A patent/AU2016252618B2/en active Active
- 2016-04-20 CN CN201680031338.0A patent/CN107921163A/zh active Pending
- 2016-04-20 SG SG11201708605SA patent/SG11201708605SA/en unknown
- 2016-04-20 KR KR1020177033424A patent/KR20170141732A/ko not_active Application Discontinuation
- 2016-04-20 BR BR112017022309-0A patent/BR112017022309B1/pt not_active IP Right Cessation
- 2016-04-20 RU RU2017139863A patent/RU2752175C2/ru not_active Application Discontinuation
- 2016-04-20 SG SG10202010181TA patent/SG10202010181TA/en unknown
- 2016-04-20 EP EP16783774.9A patent/EP3285816A4/en not_active Withdrawn
-
2017
- 2017-10-19 IL IL255130A patent/IL255130B/en unknown
-
2018
- 2018-07-26 HK HK18109661.9A patent/HK1250219A1/zh unknown
-
2020
- 2020-08-07 AU AU2020213371A patent/AU2020213371B2/en not_active Ceased
-
2021
- 2021-07-26 JP JP2021121679A patent/JP2021183902A/ja active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55118541A (en) * | 1979-03-05 | 1980-09-11 | Sanko Kuki Sochi Kk | Downflow system laminar flow type clean room |
JPS5812937A (ja) * | 1981-07-16 | 1983-01-25 | Takasago Thermal Eng Co Lts | 省エネルギ−型クリ−ンル−ム |
JP2002292222A (ja) * | 2001-03-30 | 2002-10-08 | Japan Vilene Co Ltd | エアフィルタ用濾材、エアフィルタユニット、及びその製造方法、並びにその包装体 |
US20050226764A1 (en) * | 2002-07-02 | 2005-10-13 | Claude Moirandat | Method and system for decontaminating a clean-room |
JP2004278887A (ja) * | 2003-03-14 | 2004-10-07 | Sharp Corp | 乱流式クリーンルーム |
JP2012517862A (ja) * | 2009-02-13 | 2012-08-09 | リー・アンティマイクロビアル・ソリューションズ・リミテッド・ライアビリティ・カンパニー | 紫外光空気処理方法、及び紫外光空気処理装置 |
JP2011010892A (ja) * | 2009-07-02 | 2011-01-20 | Shimizu Corp | 室内除染システム |
JP3170439U (ja) * | 2011-07-05 | 2011-09-15 | 奇立實業股▲ふん▼有限公司 | 温湿度、風量、清潔度の自動調整能力を有するモジュール式クリーンルーム |
Also Published As
Publication number | Publication date |
---|---|
AU2020213371A1 (en) | 2020-08-27 |
HK1250219A1 (zh) | 2018-12-07 |
US20190056122A1 (en) | 2019-02-21 |
MX2017013486A (es) | 2018-05-22 |
WO2016172223A1 (en) | 2016-10-27 |
AU2020213371B2 (en) | 2022-06-02 |
BR112017022309B1 (pt) | 2021-09-28 |
AU2016252618B2 (en) | 2020-05-07 |
SG11201708605SA (en) | 2017-11-29 |
AU2016252618A1 (en) | 2017-11-02 |
JP2021183902A (ja) | 2021-12-02 |
IL255130B (en) | 2022-02-01 |
RU2752175C2 (ru) | 2021-07-23 |
IL255130A0 (en) | 2017-12-31 |
SG10202010181TA (en) | 2020-11-27 |
RU2017139863A (ru) | 2019-05-23 |
CA2983154A1 (en) | 2016-10-27 |
CN107921163A (zh) | 2018-04-17 |
RU2017139863A3 (ja) | 2019-10-25 |
KR20170141732A (ko) | 2017-12-26 |
EP3285816A4 (en) | 2018-12-26 |
EP3285816A1 (en) | 2018-02-28 |
BR112017022309A2 (pt) | 2018-07-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2018513343A (ja) | 希薄過酸化水素(dhp)ガスを含むクリーンルームおよびその使用方法 | |
Lai et al. | Evaluation of cold plasma inactivation efficacy against different airborne bacteria in ventilation duct flow | |
Grinshpun et al. | Control of aerosol contaminants in indoor air: combining the particle concentration reduction with microbial inactivation | |
US9682345B2 (en) | Method of treating a cleanroom enclosure | |
WO2009021919A3 (de) | Verfahren zur textilreinigung und desinfektion mittels plasma und plasmaschleuse | |
Pyrgiotakis et al. | Mycobacteria inactivation using engineered water nanostructures (EWNS) | |
KR20120035206A (ko) | 산소/오존 혼합물을 사용한 건강관리 시설 소독 방법 및 시스템 | |
Skowron et al. | Efficacy of radiant catalytic ionization to reduce bacterial populations in air and on different surfaces | |
Tu et al. | Study of ozone disinfection in the hospital environment | |
Matys et al. | Disinfectants and devices for surface and air disinfection in dental offices | |
Nunayon et al. | Study of synergistic disinfection by UVC and positive/negative air ions for aerosolized Escherichia coli, Salmonella typhimurium, and Staphylococcus epidermidis in ventilation duct flow | |
Salonen et al. | Methods for infection prevention in the built environment—a mini-review | |
JP6990963B2 (ja) | オゾンガス消毒器 | |
Baek et al. | Evaluation of zone disinfection by air-passable plasma filter in a novel chamber model | |
Mosca et al. | Sanitizing of confined spaces using gaseous ozone produced by 4.0 machines | |
Hao et al. | Bioaerosol size as a potential determinant of airborne E. coli viability under ultraviolet germicidal irradiation and ozone disinfection | |
Khurana | Ozone treatment for prevention of microbial growth in air conditioning systems | |
WO2022024071A1 (en) | Apparatus and methods for decontaminating air supply in enclosed spaces | |
AU2022205935A9 (en) | Microbial control on high-touch surfaces in health care facilities | |
Bukłaha et al. | New trends in application of the fumigation method in medical and non-medical fields | |
Gupta et al. | Hospital-borne hazardous air pollutants and air cleaning strategies amid the surge of SARS-CoV-2 new variants | |
Adhikari et al. | Disinfection of microbial aerosols | |
Panneerselvam | Utilization of double dielectric barrier discharge (DBD) plasma reactor in the destruction of Escherichia coli and Bacillus subtilis | |
WO2023152778A1 (en) | Air sanitisation device | |
Rangel et al. | Potent Activity of High Concentration Ozone Therapy Against Antibiotic-Resistant Bacteria |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190418 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190418 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200616 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200630 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20200925 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201127 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20210323 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20210726 |
|
C116 | Written invitation by the chief administrative judge to file amendments |
Free format text: JAPANESE INTERMEDIATE CODE: C116 Effective date: 20210817 |
|
C22 | Notice of designation (change) of administrative judge |
Free format text: JAPANESE INTERMEDIATE CODE: C22 Effective date: 20210817 |
|
C22 | Notice of designation (change) of administrative judge |
Free format text: JAPANESE INTERMEDIATE CODE: C22 Effective date: 20211102 |
|
C23 | Notice of termination of proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C23 Effective date: 20220517 |
|
C03 | Trial/appeal decision taken |
Free format text: JAPANESE INTERMEDIATE CODE: C03 Effective date: 20220614 |
|
C30A | Notification sent |
Free format text: JAPANESE INTERMEDIATE CODE: C3012 Effective date: 20220614 |