JP2018031770A - Measuring method of sample using scan type probe microscope, and sample holder for scan type probe microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technology capable of accurately measuring samples of various shapes while keeping the measuring surface in parallel with the scan surface of a probe, in various measurement using a scan type probe microscope.SOLUTION: A method of measuring a sample using a scan type probe microscope includes: a pressing process of pressing the sample to a surface having an opening in a sample holder and exposing a part of the sample upward from the opening; and a scanning process of bringing the sample holder into contact with a sample stage in a sample pressed state, making the principal surface of the sample stage parallel with the exposure surface of the sample, and scanning the exposure surface of the sample using the scan type probe microscope. A sample holder for the scan type probe microscope related to the measuring method is provided.SELECTED DRAWING: Figure 4

Description

  The present invention belongs to a sample measuring method using a scanning probe microscope and a sample holder for a scanning probe microscope.

  A scanning probe microscope is a type of microscope that can observe and measure physical properties of a sample surface by scanning the sample surface with a probe having a sharp tip. Scanning probe microscopes have a very high spatial resolution compared to optical microscopes, and analysis on the atomic order is possible by adjusting the measurement environment.

  Various types of information can be acquired by selecting the probe type, operation method, and detection signal. For example, a sample is detected by detecting a tunnel current or an atomic force that appears when a probe is brought close to a sample surface to some extent as in a scanning tunneling microscope: STM, an atomic force microscope: AFM (for example, Patent Document 1). Surface irregularities can be measured. Also, each physical property distribution on the sample surface can be measured by detecting magnetism (scanning magnetic force microscope: MFM), potential (KFM, SMM), dielectric constant (scanning nonlinear dielectric microscope: SNDM). .

Special table 2009-525466

  As described above, the scanning probe microscope has a very high spatial resolution and can measure various physical properties. However, in order to measure a true state, “effect of disturbance” “sample state (for example, shape) "is important.

As for disturbances, there are a lot of attached devices and methods for suppressing sound and vibration available on the market, so it can be said that there are environments where the influence of disturbances can be measured at a level below the current level.
However, there are a wide variety of sample states, and there are many parts that depend on the skill of the measurer for measurement according to the state of the sample, and it is difficult to say that accurate measurement has been achieved.

  For example, when measuring a scanning portion of a probe, that is, a sample in which the parallelism between the sample surface and the sample back surface is not good, an AFM may fail to perform an accurate measurement. When the sample S is placed on the sample holder 100, the measurement surface may not be parallel to the scanning direction (scanning surface) of the probe MP as shown in FIG. The same applies to the sample S whose flatness of the back surface of the sample S is not good.

  A commercially available apparatus related to a scanning probe microscope is equipped with a function for unambiguously correcting a measurement result caused by the inclination or curvature of the sample surface using a function. However, this function has its limits.

  For example, as shown in FIG. 2, when there is a small undulation different from the surface roughness on the surface of the sample S, the function mounted on a commercially available apparatus recognizes this small undulation as an inclination and is originally corrected. There is a possibility that corrections will be made regardless of where they should not be.

  Further, as shown in FIG. 3, when the surface of the sample S is inclined, the probe MP interferes with the unevenness on the surface of the sample S depending on the relationship between the aspect ratio of the probe MP and the aspect ratio of the unevenness on the sample surface. However, it is conceivable that the probe MP does not approach the surface of the sample S depending on the direction of the unevenness, and there is a possibility that the true unevenness cannot be measured. The function installed in a commercially available device corrects the measurement result in such a state with an inclination, but as shown in FIG. 3, it does not always give an accurate result. .

  In other words, with the functions installed in commercially available devices, the sample state (for example, shape) is not necessarily fully corrected, and as a result, the true state cannot be measured strictly depending on the sample state. There is a possibility.

  In view of the knowledge obtained by the inventor's earnest study as described above, the present invention measures various types of samples with respect to the scanning surface of the probe in various types of measurements using a scanning probe microscope. An object of the present invention is to provide a technique for keeping the plane parallel and enabling measurement with high accuracy.

  As a result of investigations to solve the above-mentioned problems, it was found that if measures can be taken to fix the sample, it can be solved as a countermeasure against the existence of various sample states. That is, by pressing the sample from the top and bottom of the sample holder to the top (top) and the top (top) of the top and holding the state where the sample is spanned over the opening, The portion exposed to the surface is the same surface. Then, if the surface and the scanning surface are maintained in a parallel state after that, at least a portion exposed upward from the opening (that is, the measurement surface) can be maintained in parallel with the scanning surface.

The embodiments of the present invention made based on the above findings are as follows.
The first aspect of the present invention is:
A method of measuring a sample with a scanning probe microscope,
A pressing step of pressing a sample against a surface having an opening in the sample holder to expose a part of the sample upward from the opening;
A scanning step in which the sample holder is grounded to the sample stage while the sample is pressed, and the main surface of the sample stage and the exposed surface of the sample are parallel to each other, and the exposed surface of the sample is scanned with a scanning probe microscope;
Is a method for measuring a sample using a scanning probe microscope.

According to a second aspect of the present invention, in the invention according to the first aspect,
Both the grounding surface and the exposed surface of the sample when the sample holder is grounded to a horizontal sample stage are horizontal surfaces.

According to a third aspect of the present invention, in the invention according to the first or second aspect,
In-plane distribution information of electrical characteristics on the exposed surface of the sample is measured after making at least the surface of the sample holder having the opening conductive.

The fourth aspect of the present invention is:
A sample holder for fixing a sample for a scanning probe microscope,
A scanning probe microscope sample stage and a grounding base;
A sample pressing surface having an opening that exposes a part of the sample upward when the sample is pressed;
A pressing member that presses the sample against the sample pressing surface;
Have
It is a sample holder for a scanning probe microscope in which the base and the sample pressing surface are configured such that the main surface of the sample stage and the sample pressing surface are parallel to each other.

According to a fifth aspect of the present invention, in the invention described in the fourth aspect,
The ground contact surface and the sample pressing surface when the base is grounded to the sample stage are parallel to each other.

According to a sixth aspect of the present invention, in the invention according to the fourth or fifth aspect,
The pressing member is disposed in a portion surrounded by the base.

According to a seventh aspect of the present invention, in the invention according to any one of the fourth to sixth aspects,
The pressing member includes an elastic member that urges toward the sample pressing surface, and a member that fixes the elastic member in a state where the sample is pressed in the sample holder, and is a fixing member that is freely engageable with the base. And comprising.

According to an eighth aspect of the present invention, in the invention according to the seventh aspect,
The pressing member further includes an underlay member that presses the sample against the sample pressing surface by the biasing of the elastic member.

According to a ninth aspect of the present invention, in the invention according to any one of the fourth to eighth aspects,
At least a surface of the sample holder having the opening is configured to be conductive and connectable to a measuring device electrode in a scanning probe microscope.

The tenth aspect of the present invention provides
A method of measuring a sample with a scanning probe microscope,
With a scanning probe microscope, press the sample against the surface of the sample holder that has an opening to expose a part of the sample from the opening and correct the sample so that the exposed surface is parallel to the scanning surface. This is a method for measuring a sample using a scanning probe microscope that scans the exposed surface of the sample.

  According to the present invention, in various measurements using a scanning probe microscope, a measurement surface can be kept parallel to the scanning surface of a probe for a sample having various shapes, and measurement can be performed with high accuracy.

It is a schematic side view which shows a mode that it scans with a probe using the scanning probe microscope in a prior art (comparative example 1). It is a figure which shows the small wave | undulation in the sample surface. . It is a figure explaining the measurement result by the scanning probe microscope in a prior art (comparative example 2). It is a schematic side view which shows a mode that it scans with a probe using the scanning probe microscope in this embodiment (Example 1). It is the schematic which shows the base in the sample holder for scanning probe microscopes of this embodiment, (a) is a top view, (b) is a side view, (c) is a bottom view. (A) is a schematic top view of the sample pressing surface in the sample holder for scanning probe microscopes of this embodiment. (B) and (c) are schematic views in which the sample pressing surface is attached to the base and the sample is placed on the sample holder, (b) is a top view thereof, and (c) is a bottom view thereof. It is a schematic side view which shows the elastic member and fixing member in the sample holder for scanning probe microscopes of this embodiment, (a) is a dome shaped spring, (b) is a coil in this elastic member The case of a spring is shown. It is the schematic which shows a mode that a fixing member is fitted to a base (driving body), Comprising: (a) It is a side view (repost) of the base in the sample holder for scanning probe microscopes of this embodiment, (b) is fixed It is a top view of a member. It is a schematic side view which shows a mode that the sample was installed in the sample holder for scanning probe microscopes of this embodiment, (a) is a case where a sample with low parallelism is adopted by the surface and back surface of a sample, (b) The case where a curved sample is employed is shown. 2 is a bird's-eye view showing a state of a surface of a sample in Example 1. FIG. 6 is a bird's-eye view showing a state of a surface of a sample in Comparative Example 1. FIG. 6 is a bird's-eye view showing a state of a surface of a sample in Comparative Example 2. FIG. It is a figure which shows a mode that the in-plane distribution information of the electrical property in the exposed surface of a sample is measured, Comprising: (a) is a suitable example of this embodiment, Comprising: The surface which has an opening at least among sample holders 1 is conduction | electrical_connection. FIG. 2B is a schematic side view showing an example of connection with a measuring device electrode in a scanning probe microscope, while FIG. 2B shows a surface of electrical characteristics by placing a sample on a conductive surface. It is a figure which shows a mode that internal distribution information is measured. It is the schematic which shows the other aspect of the fixing member and base in the sample holder of this embodiment, (a) is an enlarged side view of a fixing member and a base, (b) is a bottom view of a fixing member and a base. .

Hereinafter, embodiments of the present invention will be described in the following order.
1. 1. Measuring method of sample using scanning probe microscope 1-1. Preparation process (sample holder for scanning probe microscope)
1-2. Pressing process 1-3. Scanning process 2. Effects of the embodiment Modifications etc. In this specification, “to” refers to a value that is greater than or equal to a predetermined value and less than or equal to a predetermined value.

<1. Sample Measurement Method Using Scanning Probe Microscope>
In the present embodiment, the following steps are mainly performed. Hereinafter, each step will be described with reference to FIG. FIG. 4 is a schematic side view showing a state of scanning with the probe MP using the scanning probe microscope in the present embodiment.

1-1. Preparation Step In this step, preparation for a method for measuring the sample S using a scanning probe microscope is performed. Specifically, preparation of a scanning probe microscope, preparation of a measurement target using the scanning probe microscope, preparation of the sample holder 1 for the scanning probe microscope, and the like are performed in this step.

  In the present embodiment, the scanning probe microscope is not particularly limited as long as it has a probe MP that scans in a predetermined plane, and those listed above can be used. The specific configuration of the scanning probe microscope such as the probe MP is as described above.

  There is no limitation in particular about the kind of sample S in this embodiment. As described in the effect of the present invention, the shape of the sample S is not a problem as long as it is large enough to span an opening 31 provided in the sample pressing surface 3 described later. However, since the size of the opening 31 may be changed when the extremely small sample S is employed, the shape of the sample S is not substantially limited.

  In the present embodiment, the measurement is performed using the scanning probe microscope while the sample S is held by the scanning probe microscope sample holder 1 (hereinafter also simply referred to as the sample holder 1) described below. There is a big feature. Hereinafter, the configuration of the sample holder 1 will be described with reference to FIGS.

[Sample holder]
As shown in FIG. 4, the sample holder 1 in the present embodiment is a sample holder that can freely fix a sample S for a scanning probe microscope that scans in-plane. And it mainly comprises the following configuration.
・ Base 2 that contacts the sample stage MS of the scanning probe microscope
A sample pressing surface 3 having an opening 31 that exposes a part of the sample S upward when the sample S is pressed.
A pressing member 4 that presses the sample S against the sample pressing surface 3

(Base)
The base 2 of the sample holder 1 in this embodiment is to be grounded to the sample stage MS of the scanning probe microscope. The grounding here refers to contact when placing the sample holder 1 on the sample stage MS. Of course, it may be simply placed on the sample stage MS, or may be appropriately engaged with a member constituting the sample stage MS.
Hereinafter, the base 2 will be described with reference to FIG. 5A and 5B are schematic views showing the base 2 in the sample holder 1 of the present embodiment, where FIG. 5A is a top view, FIG. 5B is a side view, and FIG. 5C is a bottom view.

  The base 2 in the sample holder 1 in the present embodiment is a portion that serves as a driving body of the sample holder 1. In this case, the shape of the base 2 is a substantially cylindrical shape (hereinafter, “abbreviated” is omitted), and a disk-shaped sample pressing surface 3 having an opening 31 is disposed above the cylinder. In the lower part, the sample stage MS is grounded to the main surface on which an object is placed. In this example, the sample pressing surface 3 is disposed above the cylinder, while the lower portion is completely opened, and the sample stage MS is grounded at the cylindrical side surface portion. Four notches 21 directed downward are formed in the cylindrical side surface portion. A groove 22 for fitting a disk-shaped fixing member 42 (described later), which is one of the pressing members 4, is formed on the inner peripheral side of the cylindrical side surface portion.

  There are no particular limitations on the material of the members constituting the base 2 (driving body) and the sample holder 1, but it is preferable to select a metal such as iron or aluminum having sufficient strength, an alloy thereof, or a composite material. By doing so, deformation of the driving body due to a load caused by the biasing of an elastic member 41 (described later) which is one of the pressing members 4 is effectively suppressed, and as a result, exposed upward from the opening 31. It is possible to effectively maintain a state in which the portion of the sample S (exposed surface SE, measurement surface) is parallel to the scanning surface.

(Sample pressing surface)
Hereinafter, the sample pressing surface 3 will be described with reference to FIG. FIG. 5A is a schematic top view of the sample pressing surface 3 in the sample holder 1 of the present embodiment. 5 (b) and 5 (c) are schematic views in which the sample pressing surface 3 is attached to the base 2 and the sample S is placed on the sample holder 1, (b) is a top view thereof, and (c) is its top view. It is a bottom view.
The sample pressing surface 3 of the sample holder 1 in the present embodiment has an opening 31 that exposes a part of the sample S upward when the sample S is pressed. In this example, the sample pressing surface 3 is disposed on the inner side of the base 2 (the driving body of the sample holder 1) above the cylinder.

  The shape of the opening 31 in the sample pressing surface 3 is not particularly limited, and may be, for example, a circular shape in a plan view, or may be a slit shape as shown in FIG. At that time, as shown in FIG. 6 (a), two half-moon-shaped plates are prepared, which are fixed above the cylindrical base 2, and have a slit shape as shown in FIG. 6 (b). An opening 31 may be provided.

  Further, the size of the opening 31 is such that the sample S is pressed from the bottom to the top of the surface having the opening 31 in the sample holder 1 so that the sample S is bridged over the opening 31 (FIG. 6C). There is no particular limitation as long as only a part of the sample S can be exposed upward from the opening 31 (FIG. 6B).

However, in view of being subjected to measurement using a scanning probe microscope, the sample S itself needs only a very small size. For this reason, the opening 31 itself is also very small. On the other hand, because of the relationship of pressing the sample S against the sample pressing surface 3 with the pressing member 4 described later, the sample S is larger in the elastic member 41 that is one of the pressing members 4 and is the main force of pressing than the opening 31. Is highly preferable, and the portion exposed upward from the opening 31 can be surely made the same surface as the sample pressing surface 3. Therefore, it is very preferable to make the width of the elastic member 41 larger than the minimum width of the opening 31.
The width of the elastic member 41 is the outer diameter in plan view when the elastic member 41 is a coiled spring or balloon, and indicates the minimum width of the plate spring when the elastic member 41 is a leaf spring. .

  Here, the surface (sample pressing surface 3) having at least the opening 31 in the sample holder 1 is preferably configured to be conductive and connectable to a measuring device electrode in a scanning probe microscope. This preferred example will be described with reference to FIG. FIG. 13 is a diagram showing a state of measuring in-plane distribution information of electrical characteristics on the exposed surface of the sample. FIG. 13A is a preferred example of this embodiment, and at least the opening 31 of the sample holder 1 is formed. FIG. 4B is a schematic side view showing an example in which the surface having conductivity is configured to be connectable to the measuring device electrode in the scanning probe microscope, whereas FIG. It is a figure which shows a mode that it mounts and the in-plane distribution information of an electrical property is measured.

  Among scanning probe microscopes, a scanning spreading resistance microscope (SSRM) and a scanning capacitance microscope (SCM) are in-plane distribution information (for example, in-plane) of electrical characteristics in a minute region. Therefore, in the semiconductor field where miniaturization is progressing in recent years, it has become an indispensable tool for observing the carrier concentration distribution of devices. In addition, since electrical characteristics in a minute region can be obtained as two-dimensional information, it has begun to be applied to various materials as well as semiconductor materials.

  Thus, when measuring the in-plane distribution information of the electrical characteristics, there is a great advantage in adopting the structure of the sample holder 1 shown in FIG. If the sample S is placed on a conductive surface as shown in FIG. 13B and the in-plane distribution information of the electrical characteristics is measured, the surface from the front surface to the back surface of the sample S (open arrow portion). Continuity cannot be ensured, and charge-up (charging) may occur. However, in FIG. 13A, it is only necessary to ensure conduction between the probe MP and the surface having the opening 31, that is, on the exposed surface SE of the sample S, and it is not necessary to ensure conduction in the thickness direction of the sample S. Then, it becomes possible to reduce the risk of charge-up. This is particularly effective when the sample S has poor conductivity.

  At this time, it is sufficient that at least the sample pressing surface 3 of the sample holder 1 is made conductive. In that case, the sample pressing surface 3 is connected to a measuring device electrode (not shown). On the other hand, the base 2 connected to the sample pressing surface 3 may be conductive. In that case, a measuring device electrode may be provided for the sample stage MS, and the base 2 may be connected to the measuring device electrode.

(Pressing member)
The pressing member 4 of the sample holder 1 in this embodiment presses the sample S against the sample pressing surface 3, and mainly includes the following members.
-Elastic member 41 urged toward the specimen pressing surface 3
A fixing member 42 that fixes the elastic member 41 in a state where the sample S is pressed in the sample holder 1 and is engageable with the base 2.
An underlay member 43 that presses the sample S against the sample pressing surface 3 by urging the elastic member 41

The elastic member 41 will be described with reference to FIG. FIG. 7 is a schematic side view showing the elastic member 41 and the fixing member 42 in the sample holder 1 of the present embodiment. FIG. 7A shows a case where the elastic member 41 is a dome-shaped spring. ) Shows a case where the elastic member 41 is a coiled spring.
The elastic member 41 is not particularly limited as long as it can be biased in either direction, but if it is excessively biased, the load on the sample S becomes excessive and the sample S is damaged or deformed. Therefore, a material having moderate elasticity such as a spring or a balloon can be used. Examples of the spring include a coiled spring, a dome-shaped spring, and a leaf spring.

The fixing member 42 will be described with reference to FIG. FIG. 8 is a schematic view showing a state in which the fixing member 42 is fitted into the base 2 (driving body), and (a) is a side view (repost) of the base 2 in the sample holder 1 of the present embodiment. ) Is a top view of the fixing member 42.
The fixing member 42 is not particularly limited as long as it can be engaged with the groove 22 of the base 2. For example, a disk may be used in accordance with the sample holder 1 having a cylindrical shape. As this disk, you may employ | adopt what formed the protrusion 421 by notching the part corresponding to the leg | foot of the base 2 (FIG.8 (b)). By doing so, the fixing member 42 can be engaged with the groove 22 of the base 2. Specifically, as shown in FIG. 4, the sample S, the underlay member 43 (described later), and the elastic member 41 are inserted into the sample holder 1 in this order from the top, and finally the fixing member 42 is inserted. The diameter of the fixing member 42 has a size obtained by adding the depth of the groove 22 to the inner diameter of the sample holder 1. At this time, since the portion corresponding to the foot of the base 2 is notched in the fixing member 42, the protrusion 421 of the fixing member 42 is fitted from the notch 21 below the sample holder 1 (FIG. 8B). Thus, the fixing member 42 can be fitted into the sample holder 1 smoothly. Then, with the elastic member 41 pressing the sample S against the sample pressing surface 3 through the underlay member 43, the fixing member 42 is rotated in the circumferential direction, and the portion of the fixing member 42 where the notch 21 is not provided is the groove 22. Then, the fixing member 42 is engaged with and fixed to the base 2 (that is, the main body of the sample holder 1).

  The underlay member 43 is not limited in shape and material as long as it can be fitted into the sample holder 1 and the sample S can be pressed against the sample pressing surface 3 by the urging of the elastic member 41.

  Incidentally, the underlay member 43 and the elastic member 41 may be integrated. However, the underlay member 43 can follow the shape of the back surface of the sample S when it is a separate body. This will be described with reference to FIG. FIG. 9 is a schematic side view showing a state in which the sample S is installed in the sample holder 1 of the present embodiment, and FIG. FIG. 9B shows a case where the curved sample S is employed.

As shown in FIG. 9A, even if the surface of the sample S is inclined with respect to the back surface, the underlay member 43 presses the sample S in a state that closely follows the shape of the back surface of the sample S. It becomes possible to press against the surface 3. In other words, even if the surface is inclined with respect to the back surface of the sample S, it is only necessary that the surface of the sample S can be relatively disposed on a horizontal plane. Can be pressed against the sample pressing surface 3, and no inconvenience occurs.
As shown in FIG. 9B, when the surface of the sample S is curved, the sample S is pressed against the sample pressing surface 3 by the elastic member 41 and the underlay member 43 depending on the material of the sample S. And some curvature is corrected to a flat surface. If the sample S is, for example, a resin-containing material, the biasing load by the elastic member 41 is often larger than the resistance to deformation of the resin-containing material, and thus the above correction is sufficiently possible. .
That is, if the underlay member 43 is present, and preferably if the underlay member 43 exists separately from the elastic member 41, the sample S is more reliably pressed against the sample pressing surface 3, and the sample S parallel to the sample pressing surface 3 is obtained. The exposed surface SE can be obtained.

  In addition, in order to make the sample holder 1 compact, it is preferable to arrange the above-mentioned members constituting the pressing member 4 in a portion surrounded by the base 2. In the above specific example, it is preferable to adopt a configuration in which the pressing member 4 can be accommodated inside the sample holder 1.

  Further, as shown in FIG. 14, a female screw 23 is provided in place of the groove 22 in the base 2, and the outer edge of the fixing member 42 is processed into the shape of the male screw 422, and is attached below the fixing member 42. A configuration in which the fixing member 42 is moved in the vertical direction by turning the handle 423 may be adopted. FIG. 14 is a schematic view showing another aspect of the fixing member 42 and the base 2 in the sample holder 1 of the present embodiment, in which (a) is an enlarged side view of the fixing member 42 and the base 2, and (b) is 4 is a bottom view of the fixing member 42 and the base 2. FIG. The dotted line is the rotation direction of the handle 423. With this configuration, the degree to which the sample S is pressed against the sample pressing surface 3 can be manually finely adjusted. In this case, the pressing member 4 may be configured only by the fixing member 42, but it is preferable to provide the elastic member 41 and the underlay member 43 because damage to the sample S can be easily reduced.

1-2. Pressing Step In this step, the sample S is pressed against the surface of the sample holder 1 having the opening 31 to expose a part of the sample S upward from the opening 31. By doing so, the main surface of the sample stage MS and the exposed surface SE can be made parallel, and as a result, the state where the exposed surface SE is made parallel to the scanning surface can be effectively maintained.
At this time, both the ground contact surface MSF and the exposed surface SE of the sample S when the sample holder 1 is grounded to the horizontal sample stage MS are preferably horizontal surfaces.

1-3. Scanning Step In this step, the sample holder 1 is grounded to the sample stage MS while the sample S is pressed, and the main surface of the sample stage MS (the grounding surface MSF in this embodiment) and the exposed surface SE of the sample S are mutually connected. The exposed surface SE of the sample S is scanned with a scanning probe microscope in parallel. As a specific scanning method, an operation relating to a known scanning probe microscope may be performed, and various known measurements may be appropriately selected.

The above process is implemented and the sample S for scanning probe microscopes is measured. The above contents can be summarized as follows.
"A method of measuring a sample with a scanning probe microscope,
With a scanning probe microscope, press the sample against the surface of the sample holder that has an opening to expose a part of the sample from the opening and correct the sample so that the exposed surface is parallel to the scanning surface. A method for measuring a sample using a scanning probe microscope, which scans an exposed surface of the sample. "
It should be noted that a known process may be adopted as appropriate for processes other than those described above.

<2. Advantages of the embodiment>
According to the present embodiment, in various measurements using a scanning probe microscope, the measurement surface can be kept parallel to the scanning surface of the probe MP with respect to the sample S having various shapes, and measurement can be performed with high accuracy.

There are also the following effects. For example, in order to solve the problem of the present invention, it is conceivable that both the front and back surfaces of the sample S are processed by polishing or the like to eliminate the inclination of the sample S. However, the sample S for the scanning probe microscope is extremely small, and it is difficult to say that processing is easy. Moreover, if the sample S is damaged during processing, the sample S must be prepared again, and a great deal of time is spent on preparations before measurement.
On the other hand, according to the present embodiment, by simply pressing the sample S from the bottom against the sample pressing surface 3, the exposed portion (exposed surface SE) of the sample S toward the upper side from the opening 31 is separated from the sample pressing surface 3. It is possible to have the same plane, and thus parallel to the scanning plane. As a result, it is possible to greatly reduce the time and labor for preparing various measurements using a scanning probe microscope.

<3. Modification>
The technical scope of the present invention is not limited to the above-described embodiments, and includes various modifications and improvements as long as the specific effects obtained by the constituent elements of the invention and combinations thereof can be derived.

  For example, in the present embodiment, the sample holder 1 including the pressing member 4 is used. However, the sample stage MS may include the elastic member 41. In this case, the sample holder 1 only needs to include the base 2 (driving body) and the sample pressing surface 3. Specifically, the sample S is arranged in the sample holder 1 so as to be sandwiched between the sample pressing surface 3 and the underlay member 43 immediately below the opening 31 of the sample pressing surface 3 in the cylindrical sample holder 1. To do. In this state, the base 2 is grounded to the sample stage MS so that the underlay member 43 is disposed directly above the elastic member 41 provided on the sample stage MS, and the sample stage MS and the base 2 are engaged with each other. Engage and fix at (not shown). By doing so, the exposed surface SE from the opening 31 can be made parallel to the sample stage MS and the sample pressing surface 3 even without the elastic member 41 and thus the fixing member 42 in the sample holder 1, and in parallel to the scanning surface. can do.

  Further, although the elastic member 41 is exemplified as the configuration of the pressing member 4, if the sample S is not fragile and a constant load may be applied to the sample S, a non-elastic member (for example, a push rod) is used instead of the elastic member 41. Any material can be used as long as it can be in a state of pressing the sample S when it is stored in the sample holder 1 by the fixing member 42.

  Further, in this embodiment, the underlay member 43 is provided. If the elastic member 41 itself has a function as the underlay member 43 when the elastic member 41 is biased toward the sample S, for example, In the case of a leaf spring or the like that can replace the plate-like member as the underlay member 43, the underlay member 43 may not be provided.

  Hereinafter, this embodiment will be described. The technical scope of the present invention is not limited to the following examples.

Example 1
In this embodiment, as shown in FIG. 4, the sample S is placed on the sample holder 1 described in the present embodiment, and the sample holder 1 in a state where the sample S is pressed against the sample pressing surface 3 is grounded to the sample stage MS. I let you.
The sample holder 1 in this example has a cylindrical shape as shown in FIG. 5, and the opening 31 of the sample pressing surface 3 has a slit shape. Further, as the sample S, a polyimide resin film was used.

A portion of the sample S (exposed surface SE) exposed upward from the opening 31 of the sample holder 1 is scanned with the probe MP using an AFM apparatus (NS-III, D5000 system) manufactured by DI. The average surface roughness Ra was determined. As a result at that time, FIG. 10 shows a bird's-eye view showing the surface (unevenness) of the sample S (XY: 1 scale 0.2 μm, Z: 1 scale 10 nm), and Table 1 shows Ra values.
As can be seen from FIG. 10, the parallelism of the sample S does not appear to be affected, and it can be measured with high accuracy.

(Comparative Example 1)
In this example, the sample holder 1 is not used, and the sample S is directly fixed to the sample stage MS of the AFM apparatus with a double-sided tape. Other than that, it measured by the method similar to Example 1, and calculated | required Ra. As a result at that time, FIG. 11 shows a bird's-eye view showing the surface (unevenness) of the sample S, and Table 1 shows Ra values.
FIG. 11 shows that an image different from that in Example 1 is obtained. It can also be seen that the calculated Ra value also increases. From these results, it can be seen that in this example, the influence that the surface of the sample S is not parallel to the scanning direction of the probe MP is reflected deeply.

(Comparative Example 2)
In this example, the result obtained in Comparative Example 1 was corrected by the inclination correction function mounted on the AMF apparatus. As a result at that time, FIG. 12 is a bird's-eye view showing the surface (unevenness) of the sample S, and Table 1 shows numerical values of the average surface roughness Ra.
FIG. 12 itself shows a state similar to that of FIG. However, on the other hand, it can be seen that the calculated Ra is smaller than the value of the first embodiment. This is because the tilt correction function installed in the above AMF apparatus takes into account the small waviness problem and the relationship between the aspect ratio of the probe MP and the surface roughness of the sample S, and the measurement results. This is thought to be due to the unambiguous correction.

(Summary)
As a result of the above, in the present embodiment, in various measurements using a scanning probe microscope, the measurement surface can be kept parallel to the scanning surface of the probe MP for various shapes of the sample S and can be measured with high accuracy. I found out that

1 ......... Sample holder 2 ......... Base 21 ... Notch 22 ... Groove 23 ... Female screw 3 ......... Sample pressing surface 31 ... Opening 4 ......... Pressing member 41 ... Elastic member 42 ... Fixed Member 421 ... Protruding 422 ... Male screw 423 ... Handle 43 ... Underlay member 100 ... Sample holder S ... Sample SE ... Exposed surface MS ... Sample stage MSF ... Grounding surface MP ... Probe

Claims (10)

A method of measuring a sample with a scanning probe microscope,
A pressing step of pressing a sample against a surface having an opening in the sample holder to expose a part of the sample upward from the opening;
A scanning step in which the sample holder is grounded to the sample stage while the sample is pressed, and the main surface of the sample stage and the exposed surface of the sample are parallel to each other, and the exposed surface of the sample is scanned with a scanning probe microscope;
A method for measuring a sample using a scanning probe microscope.   The method for measuring a sample using a scanning probe microscope according to claim 1, wherein a ground plane and an exposed surface of the sample are both horizontal when the sample holder is grounded to a horizontal sample stage.   The sample using the scanning probe microscope according to claim 1, wherein in-plane distribution information of electrical characteristics on an exposed surface of the sample is measured after enabling at least a surface having the opening of the sample holder to be conductive. Measuring method. A sample holder for fixing a sample for a scanning probe microscope,
A scanning probe microscope sample stage and a grounding base;
A sample pressing surface having an opening that exposes a part of the sample upward when the sample is pressed;
A pressing member that presses the sample against the sample pressing surface;
Have
A sample holder for a scanning probe microscope, wherein the base and the sample pressing surface are configured such that a main surface of the sample stage and the sample pressing surface are parallel to each other.   The sample holder for a scanning probe microscope according to claim 4, wherein a grounding surface and the sample pressing surface when the base is grounded to a sample stage are parallel to each other.   The sample holder for a scanning probe microscope according to claim 4, wherein the pressing member is disposed in a portion surrounded by the base.   The pressing member includes an elastic member that urges toward the sample pressing surface, and a member that fixes the elastic member in a state where the sample is pressed in the sample holder, and is a fixing member that is freely engageable with the base. A sample holder for a scanning probe microscope according to any one of claims 4 to 6.   The sample holder for a scanning probe microscope according to claim 7, wherein the pressing member further includes an underlay member that presses the sample against the sample pressing surface by urging the elastic member.   The scanning probe microscope according to claim 4, wherein at least a surface of the sample holder having the opening is configured to be conductive and connectable to a measuring device electrode in the scanning probe microscope. Sample holder. A method of measuring a sample with a scanning probe microscope,
With a scanning probe microscope, press the sample against the surface of the sample holder that has an opening to expose a part of the sample from the opening and correct the sample so that the exposed surface is parallel to the scanning surface. A method for measuring a sample using a scanning probe microscope, which scans an exposed surface of the sample.