JP2018051636A - Soft sheet manufacturing method and soft sheet polishing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a soft sheet manufacturing method and a soft sheet polishing device which can manufacture a soft sheet including a polishing pad with high quality and efficiency by polishing a soft sheet to be polished, with high accuracy.SOLUTION: A polishing pad polishing device 100 comprises: a soft sheet holding surface plate 20 that holds a polishing pad P onto a polishing side surface of a surface plate main body 22; a polishing roll 40 that relatively moves while rotating with respect to the soft sheet holding surface plate 20; a rotationally driving part that rotationally drives the polishing roll 40; a relatively moving/driving part 13 that relatively moves the soft sheet holding surface plate 20 and the polishing roll 40; and a decompressing pump 60 that decompresses the surface plate main body 22. The surface plate main body 22 is formed of a three-dimensional porus body, where the surface plate main body 22 is decompressed by the decompressing pump 60 so that the polishing pad P is suctioned and held on the polishing side surface.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a soft sheet manufacturing method and a soft sheet polishing apparatus capable of manufacturing a soft sheet including a polishing pad with high quality and efficiency by polishing a soft sheet to be polished with high accuracy.

  As is well known, in a substrate polishing apparatus that polishes a substrate such as a wafer, it is widely practiced to polish the substrate by pressing and relatively moving the substrate against a polishing pad attached to a surface plate ( For example, see Patent Document 1.)

A polishing pad used in such substrate polishing needs to ensure high flatness according to the polishing quality of the substrate.
Moreover, it is not limited to a polishing sheet, When manufacturing a soft sheet | seat including plastics and rubber | gum with high quality, it is necessary to grind | polish the to-be-polished soft sheet | seat used as material with high precision.

  Then, various grinding | polishing apparatuses aiming at manufacturing the soft sheet | seat with uniform thickness and high flatness by grind | polishing a to-be-polished soft sheet | seat with high precision are disclosed (for example, patent document 2). reference.).

  In the sheet material polishing apparatus described in Patent Document 2, for example, the inside of a vacuum box having a large number of pores formed in the upper part as shown in FIG. 3 is evacuated, and the sheet to be polished is sucked through the pores. Then, the polishing accuracy of the soft sheet is improved by polishing the held sheet to be polished.

JP-A-9-155721 JP 2000-158303 A

  However, in the sheet polishing apparatus disclosed in Patent Document 2, since the sheet to be polished is sucked through a large number of pores, a concave portion is formed by suction on the polishing surface of the sheet to be polished. Since the concave portion is restored to the original position and protrudes, it may be difficult to ensure sufficient flatness for the soft sheet.

  Therefore, there is a demand for a soft sheet manufacturing method and a soft sheet polishing apparatus that can manufacture a soft sheet including a polishing pad with high quality and efficiency by polishing the soft sheet to be polished with high accuracy.

  The present invention has been made in view of such problems, and by polishing a soft sheet to be polished with high accuracy, it is possible to manufacture a soft sheet including a polishing pad with high quality and efficiency. It is an object of the present invention to provide a soft sheet manufacturing method and a soft sheet polishing apparatus.

In order to solve the above problems, the present invention proposes the following means.
Invention of Claim 1 is a soft sheet manufacturing method, Comprising: The inside of the surface plate main body formed of the three-dimensional porous body is pressure-reduced, The to-be-polished soft sheet arrange | positioned on the grinding | polishing side surface of the said surface plate main body And polishing the soft sheet to be polished to produce a soft sheet by relatively moving the rotated polishing roll and the soft soft sheet held on the surface plate main body. And

  The invention according to claim 6 is a soft sheet polishing apparatus having a surface plate body, a soft sheet holding surface plate for holding a soft sheet on the polishing side of the surface plate body, and the soft sheet holding surface plate A polishing roll that is capable of relative movement while rotating, a rotation drive unit that rotationally drives the polishing roll, a relative movement drive unit that relatively moves the soft sheet holding surface plate and the polishing roll, A pressure reducing means for decompressing the inside of the surface plate body, and the surface plate body is formed of a three-dimensional porous body, and is disposed on the polishing side surface by decompressing the inside of the surface plate body by the pressure reducing means. It is configured to suck and hold the formed soft sheet.

According to the soft sheet manufacturing method and the soft sheet polishing apparatus according to the present invention, the inner surface of the platen body formed by the three-dimensional porous body is decompressed, and the soft sheet to be polished is disposed on the polishing side surface of the platen body 22. Therefore, the soft sheet to be polished can be easily and stably held.
Also, by adsorbing and holding the soft sheet to be polished on the polishing side of the surface plate body, air bubbles are surely removed from between the soft sheet to be polished and the surface plate body, and in this state, the polishing roll and the soft sheet to be polished are relative to each other. Since the soft sheet to be polished is moved and polished, the soft sheet after polishing is prevented from being uneven, and the soft sheet to be polished can be polished with high accuracy.
As a result, a high-quality soft sheet can be produced efficiently, and as a result, productivity when producing the soft sheet can be improved.

In this specification, the three-dimensional porous body refers to a three-dimensional network structure in which a large number of holes are opened on the surface, and fluid (air or the like) can flow in any direction by voids formed inside. . In addition, the three-dimensional network structure may have regularity formed on the base material forming the voids or the three-dimensional network structure in addition to the voids irregularly formed, such as sponge or sponge.
In addition, for example, when air is sucked (reduced pressure) from a suction part formed in a specific part, the air flows from a preset part (for example, a specific surface or the entire surface excluding the suction part). However, it is preferable that the inside of the surface plate body can be maintained in a decompressed state.

  The invention described in claim 2 is the method for producing a flexible sheet according to claim 1, wherein porous ceramics are used as the three-dimensional porous body.

  The invention described in claim 7 is the soft sheet polishing apparatus according to claim 6, wherein the three-dimensional porous body is formed of porous ceramics.

According to the soft sheet manufacturing method and the soft sheet polishing apparatus according to the present invention, since the three-dimensional porous body is made of porous ceramics, deformation due to polishing pressure or the like is suppressed, and the soft sheet to be polished is stabilized. Can be polished.
In addition, it is possible to suppress the wear and deterioration of the surface plate body due to secular change, and to ensure stable quality over a long period of time.

  Invention of Claim 3 is a soft sheet manufacturing method of Claim 1 or 2, Comprising: The said surface plate main body is hold | maintained at a stone surface plate base, and the said to-be-polished soft sheet is grind | polished, It is characterized by the above-mentioned. To do.

  Invention of Claim 8 is a soft sheet grinding | polishing apparatus of Claim 6 or 7, Comprising: The said soft sheet holding | maintenance surface plate is equipped with the stone surface plate base part which hold | maintains the said surface plate main body. Features.

According to the soft sheet manufacturing method and the soft sheet polishing apparatus according to the present invention, the surface plate body is held on the solid stone surface plate base to polish the soft sheet to be polished, so that the surface plate body is firmly held. High damping ability can be ensured, and the influence of polishing quality due to external vibration can be suppressed.
As a result, it is possible to efficiently improve the polishing quality of the soft sheet.

  Invention of Claim 4 is a soft sheet manufacturing method of any one of Claim 1 to 3, Comprising: The said surface plate main body and the said polishing roll are co-processed, It is characterized by the above-mentioned. .

  The invention according to claim 9 is the soft sheet polishing apparatus according to any one of claims 6 to 8, wherein the surface plate body and the polishing roll are co-processed. To do.

According to the soft sheet manufacturing method and the soft sheet polishing apparatus according to the present invention, since the surface plate main body and the polishing roll are co-processed, the interval between the surface plate main body and the polishing roll is maintained uniformly, and the interval varies. Can be suppressed.
As a result, the polishing accuracy of the soft sheet can be improved.

  Invention of Claim 5 is a soft sheet manufacturing method of any one of Claim 1 to 4, Comprising: Based on the relative distance of the said grinding | polishing roll and the said to-be-polished soft sheet | seat surface, the said constant value is provided. The to-be-polished soft sheet is polished while adjusting the distance between the board body and the polishing roll.

  A tenth aspect of the invention is the soft sheet polishing apparatus according to any one of the sixth to ninth aspects, wherein the distance measuring means measures the relative distance between the polishing roll and the surface of the soft sheet to be polished. And an interval adjusting means for adjusting an interval between the platen body and the polishing roll, and based on the relative distance between the polishing roll and the surface of the soft sheet to be polished measured by the distance measuring means. The soft sheet to be polished is configured to be polished while adjusting the distance between the board body and the polishing roll.

  According to the soft sheet manufacturing method and the soft sheet polishing apparatus according to the present invention, the soft sheet to be polished is polished while adjusting the distance between the surface plate body and the polishing roll based on the relative distance from the surface of the soft sheet to be polished. The soft sheet to be polished can be efficiently polished into a soft sheet having a desired thickness.

  According to the soft sheet manufacturing method and the soft sheet polishing apparatus according to the present invention, the soft sheet to be polished can be polished with high accuracy, and a high-quality soft sheet can be efficiently manufactured.

It is a front view explaining schematic structure of the polishing pad polisher concerning one embodiment of the present invention. It is a top view explaining the schematic structure of the polishing pad polisher concerning one embodiment of the present invention. It is a side view explaining the schematic structure of the polishing pad polisher concerning one embodiment of the present invention. It is a figure explaining schematic structure of the polishing pad holding surface plate which concerns on one Embodiment of this invention, and is a longitudinal cross-sectional view shown by arrow IV-IV in FIG. It is a top view explaining the schematic structure of the stone surface plate base which comprises the polishing pad holding surface plate which concerns on one Embodiment of this invention. It is a longitudinal section explaining the schematic structure of the polishing roll which constitutes the polishing pad polisher concerning one embodiment of the present invention. It is a flowchart explaining the outline of the polishing pad manufacturing method which concerns on one Embodiment of this invention. It is a conceptual diagram explaining the outline of operation | movement of the polishing pad polishing apparatus which concerns on one Embodiment of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
1 to 3 are diagrams illustrating a schematic configuration of a polishing pad polishing apparatus according to an embodiment of the present invention.
1 to 3, reference numeral 100 is a polishing pad polishing apparatus (soft sheet polishing apparatus), reference numeral 20 is a polishing pad holding surface plate (soft sheet holding surface plate), reference numeral 40 is a polishing roll, and reference numeral P is polishing. A pad (a soft sheet to be polished) is shown.

  As shown in FIGS. 1 to 3, the polishing pad polishing apparatus (soft sheet polishing apparatus) 100 is, for example, a polishing pad holding constant for holding a polishing apparatus body 10 and a polishing pad (soft sheet to be polished) P to be polished. Panel (soft sheet holding surface plate) 20, polishing roll drive unit 30, polishing roll 40, laser displacement sensor (distance measuring means) 50, decompression pump (decompression means) 60, suction means 65, cooling water A supply unit (not shown) and a controller (not shown) are provided.

  The polishing pad polishing apparatus 100 moves the polishing roll 40 relative to the polishing pad P held on the polishing pad holding surface plate 20 while rotationally driving the polishing roll 40 around the axis O1 in the direction of the arrow R1, so that the polishing pad By polishing the soft sheet (P), a finished polishing pad (soft sheet, not shown) is manufactured.

  As shown in FIGS. 1, 2, and 3, the polishing apparatus body 10 includes, for example, a polishing apparatus body frame 11, a surface plate moving carriage 12, and a surface plate moving carriage drive unit (relative movement drive unit) 13. I have.

  The polishing apparatus main body frame 11 includes, for example, a frame main body 111 formed in a rectangular shape, and a rail 112 disposed on the upper portion of the frame main body 111, and a surface plate moving carriage 12 is disposed on the rail 112.

The surface plate moving trolley 12 includes a trolley main body 121 and drive wheels 122 that are disposed below the trolley main body 121 and are rotatable with respect to the rail 112 so that the trolley main body 121 can move along the rail 112. ing.
A polishing pad holding surface plate 20 is attached to the upper portion of the surface plate moving carriage 12.

  The surface plate moving carriage drive unit (relative movement drive unit) 13 includes, for example, a motor (rotation drive unit) 131 and a ball screw, and the ball screw includes a screw body 132 and a screw receiving unit 133. doing.

  The screw body 132 has a first end connected to the motor 131 and a second end connected to a bearing (not shown) provided on the frame body 111. By rotating the motor 131, the arrow R2 It can be rotated in the direction.

  The screw receiving portion 133 is attached to, for example, the lower portion of the surface plate moving carriage 12 and has a plurality of balls that can be circulated to reduce frictional resistance with the screw main body 132. The screw main body 132 is mounted so as to be relatively movable in the direction of the axis O2 and rotatable about the axis O2.

  With such a configuration, by rotating the motor (rotation drive unit) 131 in the arrow R2 direction, the surface plate moving carriage 12 can be reciprocated in the arrow T1 direction.

Hereinafter, the schematic configuration of the polishing pad holding surface plate 20 according to the embodiment will be described with reference to FIGS. 4 and 5.
FIG. 4 is a longitudinal sectional view illustrating a schematic configuration of the polishing pad holding surface plate 20 according to the embodiment, and FIG. 5 illustrates a schematic configuration of a stone surface plate base 21 constituting the polishing pad holding surface plate 20. FIG.

The polishing pad holding surface plate (soft sheet holding surface plate) 20 is arranged on the upper portion of the surface plate moving carriage 12 as shown in FIGS.
Further, as shown in FIG. 4, the polishing pad holding surface plate 20 includes, for example, a stone surface plate base 21 and a surface plate body 22 disposed on the upper surface of the stone surface plate base 21.

  As shown in FIG. 5, the stone surface plate base 21 is formed on the top surface of the stone surface plate base 21 and has a rectangular edge 211 surrounding the outer periphery of the stone surface plate base 21, and inward of the edge 211. The reduced pressure flow for circulating the reduced pressure air defined by the plurality of grooves extending in the width direction of the formed polishing pad holding surface plate 20 and the plurality of grooves formed orthogonal to (crossing) the plurality of recesses. A plurality of truncated convex portions 212 formed between the passage 21U and the decompression flow passage 21U and projecting upward and having a flat top portion, and a decompression portion formed at the center of the upper surface of the stone surface base 21 And a suction hole 21H.

  In this embodiment, the stone surface plate base 21 is made of a material having low air permeability and high damping capacity such as granite. In addition, the material of the stone surface base 21 is not limited to granite and can be arbitrarily set.

The decompression suction hole 21H has, for example, one end opened in the decompression flow path 21U and the other end opened below the stone surface plate base 21, and the decompression pump (decompression means) 60 is connected to the other end of the decompression suction hole 21H. Is connected, and the air 60V in the decompression flow path 21U can be sucked toward the decompression pump 60 to decompress the inside of the decompression flow path 21U.
As the decompression pump (decompression unit) 60, a known decompression pump such as a vacuum pump can be used.

  The edge portion 211 is formed, for example, flush with the flat portion of the truncated convex portion, supports the outer periphery of the lower surface of the surface plate main body 22, and is coated with an epoxy resin 25 on the upper surface, so that the stone surface plate The base 21 and the platen main body 22 are bonded together, and the space between the stone platen base 21 and the platen main body 22 is sealed at the edge 211 to suppress the inflow of air from the outside into the pressure-reducing channel 21U. The state can be maintained.

  As shown in FIG. 5, the truncated convex portion 212 includes, for example, an upright wall portion that is rectangular in plan view and is formed by the decompression flow path 21 </ b> U, and a flat top portion that is positioned above the upright wall portion. The surface plate main body 22 is held at the top.

Further, the truncated convex portion 212 has the spacer 24 arranged on the upper surface, the periphery of the spacer 24 is filled with the epoxy resin 25, the surface plate body 22 is bonded via the epoxy resin 25, and The board base 21 adheres and holds the surface plate main body 22.
Here, the spacer 24 ensures a sufficient adhesive force by securing the filling thickness of the epoxy resin 25.

The surface plate body 22 is formed of, for example, a three-dimensional porous body.
Here, the three-dimensional porous body has, for example, a sponge-like three-dimensional network structure, and air passes through the gap formed in the three-dimensional network structure in the air in any direction. It is possible to circulate. Note that whether the three-dimensional network structure has regularity or irregularity can be arbitrarily set.

In this embodiment, for example, porous ceramics made of alumina (Al ₂ O ₃ ) -based ceramics are used as the three-dimensional porous body.
The porous ceramics preferably has, for example, a thermal expansion coefficient (linear expansion coefficient) of 1 to 5 × 10 ⁻⁶ / K, a porosity of about 40%, and an average pore diameter of about 20 μm.

By adopting such a configuration, it is possible to adsorb and hold the polishing pad (soft sheet to be polished) P on the polishing side surface 22F by reducing the pressure inside the surface plate body 22.
Further, it is possible to prevent bubbles from remaining between the polishing pad (soft polishing sheet) P and the surface plate body 22.

  In addition, with such a configuration, the air in the decompression flow path 21U of the stone surface plate base 21 is used for decompression in a state where the polishing pad (soft polishing sheet) P is adsorbed to the upper surface (polishing side surface) 22F. By sucking through the suction hole 21H, when the inside of the surface plate body 22 is depressurized, air is sucked from the four side surfaces of the surface plate body 22 except the stone surface plate base 21 side (lower surface side). In addition, it is possible to maintain the reduced pressure inside the surface plate body 22 in a state where the polishing pad P is held without sealing the four side surfaces, and the polishing pad (soft sheet to be polished) P is used as the polishing side surface 22F. It can be stably adsorbed and held.

  As shown in FIGS. 1 to 3, the polishing roll drive unit 30 includes, for example, a base portion 31 that is in a predetermined positional relationship with the polishing apparatus main body 10, and a polishing roll interval adjustment unit that is disposed above the base portion 31. (Spacing adjusting means) 32, a bearing block 33 that is disposed above the polishing roll spacing adjusting section 32 and in which the rotating shaft 44 of the polishing roll 40 is inserted to rotatably support the polishing roll 40, and transmission means (not shown) And a polishing roll drive motor (rotation drive unit, not shown) connected to the polishing roll 40 through the rotation roller, and the polishing roll 40 is driven to rotate about the axis O1.

  The polishing roll interval adjusting section (interval adjusting means) 32 includes fine movement means such as a ball screw, for example, and moves the polishing roll 40 in the vertical direction (arrow T2 direction) with high accuracy.

In this embodiment, the left and right polishing roll interval adjusting units (interval adjusting means) 32 are connected by, for example, an optical link, and the polishing roll 40 moves in the vertical direction in synchronization with the left and right sides of the axis O1. It is like that.
By using the name configuration in this way, the polishing roll interval adjusting unit 32 can accurately adjust the interval between the polishing side surface 22F of the surface plate body 22 and the surface of the polishing roll 40.

  As shown in FIGS. 1 to 3, the laser displacement sensors (distance measuring means) 50 are, for example, three (plural) laser displacement sensors 51 arranged in the width direction orthogonal to the moving direction of the surface plate main body 22. 52 and 53 are provided.

  The laser displacement sensors 51, 52, 53 irradiate the surface of the polishing pad P with a laser beam and measure the time during which the laser beam is reflected, so that the laser displacement sensors 51, 52, 53 to the polishing pad P are measured. It is designed to measure distance.

  The measured distances from the laser displacement sensors 51, 52, 53 to the polishing pad P are sent to a control unit (not shown), and the control unit calculates the distance between the surface of the polishing roll 40 and the polishing pad P. It is like that.

  Further, the control unit calculates and indicates the adjustment amount (movement amount in the direction of the arrow T2) in the polishing roll interval adjustment unit (interval adjustment unit) 32 based on the calculated interval between the polishing roll 40 and the surface of the polishing pad P. It is supposed to be.

The cooling water supply unit (cooling water supply means, not shown) supplies cooling water to, for example, the vicinity of the polishing portion (sliding contact portion) of the polishing pad P adsorbed and held by the polishing roll 40 and the surface plate body 22. The heat generated by polishing is released.
As the cooling water supply means, for example, various well-known cooling water supply units such as a form for circulating the cooling water and a form for discharging the supplied cooling water out of the system (for example, tap water) can be used. is there.

Next, a schematic configuration of the polishing roll 40 will be described with reference to FIG.
FIG. 6 is a longitudinal sectional view illustrating a schematic configuration of the polishing roll 40.
As shown in FIG. 6, the polishing roll 40 includes a roll body 41 formed in a cylindrical shape, an end plate 42 disposed on the first end side of the roll body 41, and a second end of the roll body 41. An end plate 43 disposed on the side, a rotation shaft 44, and a screw conveyor 45 formed in a spiral shape around the rotation shaft 44 are provided. Further, diamond abrasive grains (not shown) are electrodeposited on the surface of the body portion 41.

The rotating shaft 44 passes through the end plate 42 and the end plate 43 and is disposed from the first end side to the second end side of the roll body portion 41.
The rotating shaft 44 extends in the axial direction from the first end surface thereof, and has a hole 44A that opens in the first end side in the roll body portion 41 and extends in the axial direction from the second end surface, and the second end in the roll body portion 41. And a hole 44B opened to the side. Note that the hole 44A and the hole 44B do not communicate with each other within the rotating shaft 44.

Then, when the polishing roll 40 is rotated in the direction of the arrow R1 around the axis O1, cooling water flows into the roll body 41 from the first end surface of the rotating shaft 44 through the hole 44A. The surface of the roll body 41 is cooled by moving the inside of the roll body 41 from the first end side to the second end side.
Then, the cooling water moves into the rotary shaft 44 through the hole 44B, and is then discharged out of the system from the second end face of the rotary shaft 44.

Moreover, as shown in FIGS. 1 to 3, the polishing roll 40 sucks dust generated when the polishing pad P is polished by the suction means 65.
As shown in FIGS. 1 to 3, the suction means 65 includes, for example, a suction hood 651 and a suction blower 652.
The suction hood 651, for example, covers the outside of the polishing roll 40 from above and has an opening formed below, so that the polishing roll 40 of the polishing pad P held by the surface plate body 22 can be slidably contacted. Yes.

Here, the gap between the opening formed below and the polishing pad (soft sheet to be polished) P is, for example, about 10 mm.
The suction hood 651 is connected to a suction blower 652 through a suction duct.

  As the suction blower 652, a known suction means can be applied. By operating the suction blower 652, dust generated by the polishing roll 40 being polished is collected by the suction hood 651, and suction air is collected. Along with 65V, the suction blower 652 is sucked through a suction duct.

The control unit (not shown) is connected to, for example, the polishing roll drive unit 30, a laser displacement sensor (distance measuring means) 50, a decompression pump (decompression means) 60, a suction means 65, and a cooling water supply unit (not shown). Then, based on a preset procedure, the rotational drive of the polishing roll 40 and the movement of the surface plate moving carriage 12 are controlled, and the polishing roll is based on the measured value of the laser displacement sensor (distance measuring means) 50 as described above. 40 is moved in the direction of arrow T2.
The control unit (not shown) controls the decompression pump 60, the suction means 65, and the cooling water supply unit (not shown).

Next, with reference to FIG. 7, the manufacturing method of the polishing pad by the polishing pad polishing apparatus 100 will be described. In the manufacture of the polishing pad by the polishing pad polishing apparatus 100, the polishing pad (soft sheet to be polished) P is polished to obtain a finished polishing pad (not shown).
FIG. 7 is a flowchart for explaining an outline of a polishing pad manufacturing method according to an embodiment.

(1) First, the surface plate body 22 not holding the polishing pad (soft polishing sheet) P and the polishing roll 40 are polished and co-processed (S01).
By co-processing the surface plate main body 22 and the polishing roll 40, when the surface plate main body 22 is moved in the direction of the arrow T1, the interval between the polishing roll 40 and the surface plate main body 22 becomes constant at any location.

(2) Next, the surface plate body 22 co-processed with the polishing roll 40 is sucked by the vacuum pump 60, and the polishing pad (soft material to be polished) P is adsorbed and held on the polishing side surface 22F of the surface plate body 22 (S02). ).

(3) Next, the polishing pad 40 is rotated relative to the surface plate body 22 while being rotationally driven to polish the polishing pad (soft polishing sheet) P (S03).
In S03, polishing is performed until the polishing pad (soft sheet to be polished) P reaches a predetermined thickness.

  Hereinafter, with reference to FIG. 8, polishing of the polishing pad (soft sheet to be polished) P by the polishing pad polishing apparatus 100 will be described. FIG. 8 is a conceptual diagram illustrating an outline of the operation of the polishing pad polishing apparatus 100 according to one embodiment.

(1) First, the polishing pad (soft sheet to be polished) P is disposed on the polishing side surface 22F of the surface plate body 22.
(2) The decompression pump 60 is operated to suck the inside of the surface plate body 22, and the polishing pad (soft material to be polished) P is adsorbed and held on the polishing side surface 22 </ b> F of the surface plate body 22.
At this time, the surface of the polishing roll 40 and the polishing pad (soft polishing sheet) P are set at a predetermined interval.
(3) The polishing roll 40 is rotated in the direction of the arrow R1, and the screw body 132 of the surface plate moving carriage driving unit (relative movement driving unit) 13 is rotated in the direction of the arrow R2, so that the surface plate moving carriage 12 is moved to the arrow T1. Move back and forth in the direction.
(4) The polishing roll 40 is lowered in the direction of arrow T2, and the polishing roll 40 is slidably contacted with the polishing pad P to polish the polishing pad P.
Further, based on the displacement detected by the laser displacement sensor 50, the polishing roll 40 is moved in the direction of the arrow T2, and the polishing pad (soft material to be polished) P is polished until the thickness of the polishing pad becomes a finished polishing pad. .
In this way, a finished polishing pad is manufactured from the polishing pad (soft sheet to be polished) P.

  According to the polishing pad manufacturing method and the polishing pad polishing apparatus 100 according to the embodiment, the inside of the surface plate body 22 formed of the three-dimensional porous body is decompressed and disposed on the polishing side surface 22F of the surface plate body 22. Since the polishing pad (soft polishing sheet) P is adsorbed and held, the polishing pad (soft polishing sheet) P can be held easily and stably.

In addition, according to the polishing pad manufacturing method and the polishing pad polishing apparatus 100 according to the embodiment, the polishing pad (soft material to be polished) P is adsorbed and held on the polishing side surface 22F of the surface plate body 22, so Air bubbles are reliably removed from between the polishing soft sheet) P and the surface plate body 22, and in this state, the polishing roll 40 and the polishing pad (soft polishing sheet) P are moved relative to each other to polish the polishing pad (soft polishing sheet) P. Therefore, the occurrence of unevenness on the polished polishing pad (soft sheet) P is suppressed, and the polishing pad (soft sheet to be polished) P can be polished with high accuracy.
As a result, a high-quality polishing pad (soft sheet) can be efficiently manufactured, and as a result, productivity in manufacturing the polishing pad (soft sheet) can be improved.

According to the polishing pad manufacturing method and the polishing pad polishing apparatus 100 according to the embodiment, since the three-dimensional porous body is porous ceramic, deformation due to polishing pressure or the like is suppressed, and the polishing pad (soft sheet to be polished) ) P can be stably polished.
Moreover, it is possible to suppress the wear and deterioration of the surface plate body 22 due to secular change, and to ensure stable quality over a long period of time.

According to the polishing pad manufacturing method and polishing pad polishing apparatus 100 according to the embodiment, the polishing pad (soft sheet to be polished) P is polished by holding the surface plate main body 22 on the solid stone surface plate base 21. While the board body 22 is firmly held, high damping ability can be secured, and the influence of the polishing quality of the polishing pad (soft sheet) due to external vibration can be suppressed.
As a result, the polishing quality of the polishing pad (soft sheet) can be improved efficiently.

According to the polishing pad manufacturing method and the polishing pad polishing apparatus 100 according to the embodiment, since the surface plate body 22 and the polishing roll 40 are co-processed, the space between the surface plate body 22 and the polishing roll 40 is uniform. Thus, variation in polishing quality can be suppressed.
As a result, the polishing accuracy of the polishing pad (soft sheet) can be improved.

  According to the polishing pad manufacturing method and the polishing pad polishing apparatus 100 according to one embodiment, the surface plate main body 22 and the polishing roll 40 are based on the relative distance between the polishing roll 40 and the surface of the polishing pad (soft polishing target sheet) P. Since the polishing pad (soft sheet to be polished) P is polished while adjusting the distance between the two, the polishing pad (soft sheet to be polished) P can be efficiently polished into a polishing pad (soft sheet) having a desired thickness. .

Note that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the invention.
That is, the configuration of the soft sheet polishing apparatus can be arbitrarily set within the scope of the object of the present invention.

For example, in the above embodiment, the platen body 22 is made of alumina (Al with a thermal expansion coefficient (linear expansion coefficient) of 1 to 5 × 10 ⁻⁶ / K, a porosity of about 40%, and an average pore diameter of about 20 μm. _The case of being formed of porous ceramics made of ₂ O ₃ ) -based ceramics has been described. In addition to alumina (Al ₂ O ₃ ) -based ceramics having properties other than those described above, zirconia, silicon carbide, silicon nitride, aluminum nitride Other types of porous ceramics such as can be arbitrarily set.

  The three-dimensional porous body is not limited to porous ceramics, and a three-dimensional porous body made of various metal materials such as aluminum and stainless steel and other materials can also be used.

  In the above embodiment, the case where the polishing pad P is polished and manufactured as the soft soft sheet to be polished has been described. However, instead of the polishing pad P, the soft soft target made of plastics, vinyl, rubber or the like is used. The sheet may be polished, and the material form of the polished soft sheet can be arbitrarily set.

  Moreover, in the said embodiment, although the polishing pad holding | maintenance surface plate (soft sheet holding | maintenance surface plate) 20 demonstrated the case provided with the stone surface plate base 21, it sets arbitrarily whether the stone surface plate base 21 is provided. can do.

  Moreover, although the said embodiment demonstrated the case where the truncated convex part 212 of planar view rectangle was formed by the pressure reduction flow path 21U formed of the groove | channel orthogonally arranged by the stone surface plate base 21, pressure reduction The form of the flow path 21U and the truncated convex portion 212 and whether the truncated convex portion 212 is arranged can be arbitrarily set.

  Moreover, in the said embodiment, although the case where the grinding roll 40 and the surface plate main body 22 were co-processed was demonstrated, whether the grinding roll 40 and the surface plate main body 22 are co-processed can be set arbitrarily.

  Moreover, in the said embodiment, although the case where the polishing pad holding | maintenance surface plate 20 moved with respect to the polishing roll 40 was demonstrated, which of the polishing roll 40 the polishing pad holding | maintenance surface plate 20 moves moves both. Can be set arbitrarily.

  In the above embodiment, the case where the polishing roll 40 is moved up and down based on the measurement result of the laser displacement sensor (distance measuring means) 50 has been described, but whether or not the distance measuring means including the laser displacement sensor 50 is used. About can be set arbitrarily.

  Moreover, in the said embodiment, although the case where the polishing roll 40 was provided with the diamond abrasive grain electrodeposited was demonstrated, it replaced with the polishing roll electrodeposited with the diamond abrasive grain, and abrasive grains other than diamond were used. You may use the polishing roll by which sheet-like abrasives, such as the polishing roll distributed on the surface, and sandpaper, were stuck.

  According to the soft sheet manufacturing method and the soft sheet polishing apparatus according to the present invention, a high-quality soft sheet can be manufactured by polishing the soft sheet to be polished with high accuracy, so that it is industrially applicable.

O1 axis (polishing roll)
O2 axis (screw body)
P Polishing pad (soft sheet to be polished)
13 Polishing pad holding surface plate drive unit (relative movement drive unit)
20 Polishing pad holding surface plate (soft sheet holding surface plate)
21 stone surface plate base 212 truncated convex portion 21U decompression flow path 22 surface plate main body 22F polishing side surface 32 polishing roll interval adjusting portion (interval adjusting means)
50, 51, 52, 53 Laser displacement sensor (distance measuring means)
60 Pressure reducing pump (pressure reducing means)
65 Suction Device 100 Polishing Pad Polishing Device (Soft Sheet Polishing Device)

Claims (10)

Depressurize the inside of the platen body formed by the three-dimensional porous body, and suck and hold the polished soft sheet placed on the polishing side of the platen body,
A method for producing a soft sheet, comprising: producing a soft sheet by polishing the rotated soft sheet by relatively moving a rotated polishing roll and a soft soft sheet held on the platen body. The soft sheet manufacturing method according to claim 1,
A method for producing a flexible sheet, comprising using porous ceramics as the three-dimensional porous body. The soft sheet manufacturing method according to claim 1 or 2,
A soft sheet manufacturing method comprising polishing the soft sheet to be polished while holding the base plate body on a stone base plate base. The soft sheet manufacturing method according to any one of claims 1 to 3,
The method for producing a flexible sheet, wherein the surface plate main body and the polishing roll are co-processed. The soft sheet manufacturing method according to any one of claims 1 to 4,
A soft sheet manufacturing method comprising polishing the soft sheet to be polished while adjusting a distance between the main body and the polishing roll based on a relative distance between the polishing roll and the surface of the soft sheet to be polished. A soft sheet holding surface plate that has a surface plate body and holds a soft sheet on the polishing side of the surface plate body;
A polishing roll capable of relative movement while rotating with respect to the soft sheet holding surface plate,
A rotation drive unit for rotating the polishing roll;
A relative movement drive unit that relatively moves the soft sheet holding surface plate and the polishing roll;
Decompression means for decompressing the interior of the platen body,
With
The platen body is formed of a three-dimensional porous body,
A soft sheet polishing apparatus configured to suck and hold the soft sheet disposed on the polishing side surface by decompressing the inside of the platen body by the decompression means. The soft sheet polishing apparatus according to claim 6,
Three-dimensional porous material
A soft sheet polishing apparatus characterized by being made of porous ceramics. The soft sheet polishing apparatus according to claim 6 or 7,
The flexible sheet holding surface plate is
A soft sheet polishing apparatus comprising a stone surface plate base for holding the surface plate body. The soft sheet polishing apparatus according to any one of claims 6 to 8,
The soft sheet polishing apparatus, wherein the surface plate main body and the polishing roll are co-processed. The soft sheet polishing apparatus according to any one of claims 6 to 9,
A distance measuring means for measuring a relative distance between the polishing roll and the surface of the soft sheet to be polished;
An interval adjusting means for adjusting an interval between the platen body and the polishing roll;
With
Based on the relative distance between the polishing roll and the surface of the soft sheet to be polished measured by the distance measuring means, the soft sheet to be polished is polished while adjusting the distance between the surface plate body and the polishing roll. A soft sheet polishing apparatus characterized by being made.

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