JP2017202589A - Dividing tool and using method for dividing tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dividing tool that is able to securely and efficiently divide a plate-like object whose dividing initial point is formed in an annular shape, and to provide a method for using the dividing tool.SOLUTION: According to the invention, a dividing tool for dividing a plate-like object whose dividing initial point is formed in an annular shape, into inside and outside is provided, the dividing tool comprising: an inside pressing member that presses the inside of the dividing initial point formed in the annular shape; an outside pressing member that presses the outside of the dividing initial point formed in the annular shape; and a coupling member that couples the inside pressing member and the outside pressing member, the inside pressing member being attached to the coupling member so as to freely advance or retract, and the leading end of the inside pressing member being urged so as t project in a pressing direction beyond the leading end of the outside pressing member in a non-pressed state. A using method for the dividing tool is also provided, the method comprising at least: a flexible sheet disposition step in which a plate-like object whose dividing initial point is formed in an annular shape is disposed on a flexible sheet; and a diving step in which while the inside of the dividing initial point formed in the annular shape on the plate-like object is pressed by the inside pressing member, the outside thereof is pressed by the outside pressing member.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a dividing tool that divides a plate-like object having a dividing starting point formed into an annular shape into an inner side and an outer side, and a method of using the dividing tool.

  A wafer in which a plurality of devices such as ICs, LSIs, LEDs, SAW devices, power devices, etc., are defined by dividing lines and formed on the surface is divided into individual devices by dividing starting points formed by a laser processing apparatus. It is used for electric devices such as personal computers and lighting equipment (see, for example, Patent Document 1).

  In addition, when a circular member is cut out from plate-like glass, sapphire, lithium tantalate (LT), lithium niobate (LN), silicon carbide, etc., a laser processing apparatus capable of forming the division starting point in an annular shape is used. The

  As the laser processing apparatus, as shown in the above-mentioned Patent Document 1, a type that forms a division starting point by irradiating a laser beam having an absorptive wavelength to a workpiece and performing ablation processing; A type in which a condensing point of a laser beam having a wavelength that is transmissive to an object is positioned and irradiated inside the workpiece, and a modified layer forming process is performed to form a division starting point (see, for example, Patent Document 2) .), And further, a condensing point of a laser beam having a wavelength that is transmissive to the workpiece is positioned at a required position, from the front surface to the back surface, and from the pore and the amorphous surrounding the pore There is a type (for example, see Patent Document 3) in which a division starting point is formed by performing a process for forming a shield tunnel.

  In particular, when forming an annular split starting point as a split starting point on a substrate such as a glass plate and separating the inner side and the outer side of the split starting point, split the shield tunnel in which a fragile layer from the front surface to the back surface is formed The starting point is preferred.

JP-A-10-305420 Japanese Patent No. 3408805 JP 2014-2221483 A

  However, even if it is a case where an annular division starting point is formed by a shield tunnel and separated to cut out a circular part, the inner side and the outer side of the annular division starting point are in close contact with each other in a curved line, There is a problem that it is difficult to divide the two efficiently and reliably, it is necessary to rely on the manual work of an expert, and the processing efficiency is poor.

  The present invention has been made in view of the above-mentioned facts, and a main technical problem thereof is a dividing tool that can reliably and efficiently divide a plate-like object whose dividing starting point is formed in an annular shape, and a method of using the dividing tool. It is to provide.

  In order to solve the above-mentioned main technical problem, according to the present invention, a splitting tool for splitting a plate-like object whose split starting point is formed in an annular shape into an inner side and an outer side, the inner side of the annular starting point formed in an annular shape An inner pressing member that presses the outer pressing member, an outer pressing member that presses the outer side of the annularly divided division starting point, and a connecting member that connects the inner pressing member and the outer pressing member. A split tool is provided that is attached to the connecting member so as to be able to advance and retreat, and is biased so as to protrude in the pressing direction from the tip of the outer pressing member when the tip of the inner pressing member is not pressed.

  The inner pressing member may be configured to be attached to the connecting member while being urged in the pressing direction by an expansion / contraction member, and the outer pressing member is formed on the outer side around the inner pressing member. You may comprise so that it may be arranged individually. Furthermore, a plurality of the inner pressing members can be mounted on the connecting member at a predetermined interval, and a plurality of the outer pressing members can be mounted corresponding to the inner pressing member.

  Further, according to the present invention, there is provided a method for using the above-described dividing tool, the flexible sheet disposing step for disposing on the flexible sheet a plate-like object in which the division starting point is formed in an annular shape, There is provided a method of using a splitting tool comprising at least a splitting step in which an inner side of a split starting point formed in an annular shape is pressed by the inner pressing member and an outer side is pressed by the outer pressing member. The dividing step may be performed by expanding the flexible sheet at the time of pressing by the inner pressing member and the outer pressing member.

  According to the dividing tool and the method of using the dividing tool according to the present invention, the dividing tool includes an inner pressing member that presses the inner side of the annular starting point formed in an annular shape, and an outer side of the annular starting point formed in an annular shape. An outer pressing member that presses, and a connecting member that connects the inner pressing member and the outer pressing member, the inner pressing member being attached to the connecting member so as to be able to advance and retreat, and a tip of the inner pressing member Is configured to be biased so as to protrude in the pressing direction from the tip of the outer pressing member in a non-pressing state, thereby bringing the inner pressing member into contact with the inner side of the annular division starting point first. By pressing and further pressing, the outer pressing member presses the region outside the annular division starting point, and shear stress acts on the annular dividing starting point to form the inner side of the plate-like object in which the annular dividing starting point is formed. The outer area and the outer area It can be divided into.

The exploded view of the division tool comprised according to this invention, and a whole perspective view. Explanatory drawing for demonstrating the process of forming a division | segmentation starting point in the plate-shaped object divided | segmented with the division | segmentation tool of this invention. Explanatory drawing for demonstrating the method of using a division | segmentation tool for this invention. FIG. 6 shows another embodiment configured in accordance with the present invention.

  Hereinafter, a dividing tool constructed according to the present invention and a method of using the dividing tool will be described with reference to the accompanying drawings.

  FIG. 1 (a) shows the components in an exploded manner in order to explain the structure of the split tool 1 of the present invention. The dividing tool 1 has a rectangular shape in a plan view, and is attached to a connecting member 2 in which an outer pressing member 3 is disposed on the lower surface side, and a through hole portion 2a formed at the center of the connecting member 2 so as to be freely advanced and retracted. It is generally composed of a columnar inner pressing member 4 to be held, and a gripping member 9 disposed on the upper surface side of the connecting member 2 and having a gate shape.

  The outer pressing member 3 is disposed at each of the four corners on the lower surface side of the connecting member 2 and presses an outer region of a plate-like object described later. In addition, the inner pressing member 4 is provided with a coil spring 7 as an expansion / contraction member on the shaft portion 41, and a rear end portion is inserted into the through hole portion 2a formed in the connecting member 2 from the lower surface side. 2, the female screw portion 81 of the fixing member 8 and the male screw portion 42 formed at the rear end portion of the shaft portion 41 are screwed together. With such a configuration, the outer pressing member 3 and the inner pressing member 4 are connected via the connecting member 2. Since the outer diameter of the fixing member 8 is set to be larger than the inner diameter of the through hole portion 2a, the fixing member 8 functions as a retaining member for the inner pressing member 4 (see FIG. 1B).

  A pressing portion 43 having a diameter larger than that of the shaft portion 41 is formed on the distal end side of the inner pressing member 4, and presses an inner region of a division starting point formed in an annular shape of a plate-like object described later. The coil spring 7 is held by a pressing portion 43 having a diameter larger than that of the shaft portion 41 and the lower surface of the connecting member 2 and has a function of urging the inner pressing member 4 downward in the drawing. In the non-pressing state where the dividing tool 1 is not pressing the plate-like object, the lower end of the inner pressing member 4, that is, the lower end of the pressing portion 43 is configured to protrude below the lower end of the outer pressing member 3. Yes. Furthermore, the size of the lower surface (pressing surface) of the pressing portion 43 is preferably set to be slightly smaller than the area of the inner region of the dividing starting point formed in a circular shape of a plate-like object to be described later. To prevent it from occurring, it is not preferable to be too small. The outer pressing member 3 and the inner pressing member 4 are made of acrylic resin or the like so as not to cause scratches, cracks, or the like on the glass plate, sapphire plate, or the like constituting the plate-like object that is the divided body. Is preferred.

  Laser processing for forming a division starting point for cutting out a circular member having a diameter of 25 mm from a plate-like object 10 made of a glass plate divided by the division tool of the present invention will be described with reference to FIG. The plate-like object 10 shown in FIG. 2A is a square with a side of 50 mm, and its thickness is 1 mm. As the laser processing apparatus for forming the division starting point, for example, the well-known laser processing apparatus disclosed in Patent Document 3 described above can be used. However, since the main part of the present invention is not configured, the entire configuration is described. Is omitted. In addition, the dimension of the plate-shaped object as a to-be-processed object and the circular member to cut out is not limited to this, It can set arbitrarily.

  When performing laser processing on the plate-like object 10, the plate-like object 10 is placed and held and fixed to holding means (not shown) of a laser processing apparatus (entire drawing is omitted). The laser processing apparatus includes a laser beam irradiating unit 20, and the laser beam irradiating unit 20 includes a condenser 22 including a condenser lens (not shown) that irradiates a workpiece with a laser beam. The holding means can be moved relative to the light collector 22 in the X-axis direction and the Y-axis direction in the figure, and is simply moved linearly in the X-axis direction and the Y-axis direction. In addition, the holding means can be moved in a circular orbit by combining movements in the X-axis direction and the Y-axis direction, and an annular division starting point can be formed in combination with laser beam irradiation. It is possible. In addition, the laser processing apparatus can form a division starting point having an arbitrary shape for a plate-shaped object by storing processing data information in advance in a control unit (not shown).

  As shown in the drawing, first, before forming the annular dividing starting point 10a, the holding means is linearly moved in the X-axis direction and the Y-axis direction so as to intersect perpendicularly at the center of the annular dividing starting point 10a. A linear division starting point 10b is formed. After the linear division start point 10b is formed, the holding means is then irradiated with a laser beam while moving in a circle in a horizontal plane formed in the X-axis direction and the Y-axis direction. Form. Thus, laser processing is performed so that the linear division start point 10b is divided into four equal parts with the annular division start point 10a as the center.

The laser processing is performed under the following processing conditions, for example, and the condensing point of a laser beam having a wavelength that is transmissive to the workpiece is positioned at a required position from the front surface to the back surface. Finally, it is a process for forming a shield tunnel as a fragile portion composed of a pore and an amorphous material surrounding the pore.
Plate-shaped object: Square shape with a side of 50 mm, thickness of 1 mm
Wavelength: 1030 nm
Average output: 3W
Repetition frequency: 50 kHz
Pulse width: 10 ps
Spot diameter: φ10μm
Numerical aperture of condenser lens
/ Refractive index of glass plate: 0.05 to 0.2
Processing feed rate: 500 mm / sec Shield tunnel: φ1 μm pore, φ10 μm amorphous

  By performing the laser processing described above, it is possible to obtain the plate-like object 10 on which the division starting points 10a and 10b as shown in FIG. 2 are formed.

  When the plate-like object 10 on which the division starting points 10a and 10b are formed is obtained, the plate-like object 10 is placed on the flexible sheet 30 as shown in FIG. Sheet placement step). In FIG. 3A, for convenience of explaining that the inner pressing member 4 is positioned on the plate-like object 10, the connecting member 2 and the outer pressing member 3 are partially cut out and are shown on the outer side. The outer pressing area 52 pressed by the pressing member 3 is indicated by hatching. The flexible sheet 30 has a thickness of about 1 to 3 mm and is stretchable, and is set so that a plate-like object pressed from above can sink appropriately.

  If the plate-like object 10 is placed on the flexible sheet 30, the operator grasps the holding member 9 of the dividing tool 1 described above, and the pressing portion 43 of the inner pressing member 4 of the dividing tool 1 is moved to the plate-like object 10. The four outer pressing members 3 are positioned in the outer pressing area 52 of the outer portion divided into four at the linear dividing starting point 10b. At this time, since the pressing portion 43 of the inner pressing member 4 protrudes below the tip of the outer pressing member 3 in the non-pressing state, it contacts the plate-like object 10 before the tip of the outer pressing member 3 ( (See FIG. 3 (b)).

  When the operator presses the pressing portion 43 against the inner pressing region 50 located at the center of the plate-like object 10 and further presses against the elastic force of the coil spring 7 which is an elastic member, the outer pressing member 3 becomes the plate-like object. It abuts on the outer pressing area 52 of the ten division starting points 10a. If the outer pressing member 3 comes into contact with the outer pressing region 52 of the plate-like object 10, the dividing tool 1 is further pushed downward. The flexible sheet 30 on which the plate-like object 10 is placed is made of a material having flexibility such as urethane having a thickness of about 1 to 3 mm, and the inner pressing region 50 of the annular dividing starting point 10a is a pressing portion. While being pressed by 43, the outer pressing region 52 is pressed by the outer pressing member 3 and sinks into the flexible sheet 30. At that time, the four corners of the flexible sheet 30 are expanded toward the outside, and the degree of close contact between the inner side and the outer side at the division starting point 10a is eased in the division process, and the plate-like object 10 is divided. The dividing step is completed without causing any chipping or the like at the dividing starting point 10a serving as a boundary (see FIGS. 3C and 3D), and a desired circular member can be cut out.

  In this embodiment, although the example which cuts out one circular member from one plate-shaped object was shown, this invention is not limited to this. Other embodiments will be described below with reference to FIG.

  As shown in FIG. 4 (a), four annular starting points 100a and linear dividing starting points 100b and 100c are formed on a plate-like object 100 made of a single glass material, and four circular members are cut out. it can. The plate-like object 100 has a square shape in a plan view, one side is formed with 100 mm, and the circular member is set with a diameter of 25 mm as in the above-described embodiment. The plate-like object 100 includes four annular dividing starting points 100a, a linear dividing starting point 100b formed in a direction perpendicular to the center of a circular region formed by the annular dividing starting points 100a, and the four regions. Are divided using a laser processing apparatus so as to form a linear division starting point 100c orthogonal to the center of the plate-like object 100. Furthermore, in this embodiment, as shown in FIG. 4B, a divided tool 1 ′ having a shape in which four divided tools 1 in the above-described embodiment are connected adjacently is prepared. The configuration of the dividing tool 1 'is basically the same as that of the dividing tool 1 described above, and parts having the same functions are denoted by the same numerals with a' and a detailed description thereof is omitted. To do. Below, the method of dividing | segmenting a circular member from the plate-shaped object 100 using the division | segmentation tool 1 'is demonstrated.

  The plate-like object 100 on which the above-described division starting points are formed is placed on a flexible sheet 30 ′ prepared according to the dimensions of the plate-like object 100. Then, if the plate-like object 100 is placed on the flexible sheet 30 ′, the operator grips the grip member 9 ′ and is formed at the distal end portion of the inner pressing member 4 ′ as in the above-described embodiment. The pressed portion 43 'is positioned in the inner region 50' of the four annular dividing starting points 100a. Since the pressing portion 43 ′ is set so as to protrude below the outer pressing member 3 ′ in the non-pressing state, the pressing portion 43 ′ contacts the plate-like object 100 before the outer pressing member 3 ′. The operator pushes the dividing tool 1 'further downward against the elastic force of the coil spring 7' while bringing the pressing portion 43 'into contact with the annular dividing starting point 100a, so that the outer pressing member 3' is annular. The plate-like object 100 is divided into a circular shape with the division starting points 100a to 100c as the starting points, and the outer region surrounding the annular dividing starting point 100a is pushed downward, abutting against the pressing region 52 'formed around the dividing starting point 100a. The member is cut out.

  As shown in FIG. 3A, when a circular member is cut out from one plate-like object 10 using one annular division starting point 10a as a division starting point, the entire lower surface of the outer pressing member 3 is formed of the division starting point 10a. In the other embodiment shown in FIG. 4, the region straddling a plurality of adjacent outer regions in the plate-like object 100 is a pressing region 52 ′, and the region is a single outer pressing member 3 ′. It comes to press with. As a result, the dividing tool 1 ′ can press the pressing region 52 ′ of the plate-like object 100 with the nine outer pressing members 3 ′ and simultaneously divide and cut out the four circular members.

  The present invention is not limited to the above-described two embodiments. For example, the number of circular members divided and cut out from one plate-like object is set to six, nine, etc. Can be set. In the two embodiments described above, the division starting point for cutting out the circular member is shown as the annular division starting point. However, the present invention is not limited to this, and can be an elliptical division starting point. As long as it is, the shape is not limited. Furthermore, in the above-described embodiment, an example has been shown in which a gripping member is provided and the operator pushes the split tool into the plate-like object from above, but the present invention is not limited thereto, and the gripping member is discarded and connected to a press machine or the like It is also possible to set a plate to be attached and mechanically pushed in. In particular, when a large number of annular members are cut out from a plate-like object, it is effective to attach them to a press machine. And the press part formed in the front-end | tip part of an inner side press member can also be set as the structure which can be replaced | exchanged according to the magnitude | size and shape of the cyclic | annular member cut out.

Further, in the above-described embodiment, as laser processing for forming the division starting point, a condensing point of a laser beam having a wavelength transmissive to the workpiece is positioned at a required position from the front surface to the back surface, and the pores and the Although a process of forming a shield tunnel as a fragile part made of amorphous surrounding the pores is adopted, the present invention is not limited to this, and a collection of laser beams having wavelengths that are transmissive to the workpiece. Laser processing that forms a modified layer as a fragile portion by irradiating a light spot at a predetermined position inside the plate-like object may be used. In that case, for example, the following processing conditions can be set.
Wavelength: 1342nm
Average output: 0.18W
Repetition frequency: 80 kHz
Spot diameter: φ1μm
Processing feed rate: 180 mm / sec

  In addition, when forming a modified layer as a division start point, in order to make it a more fragile division start point, laser processing is performed a plurality of times while changing the focal point position in the depth direction along the division start point planned line. You may decide to do it. Moreover, although the example which presses the circumference | surroundings of a cyclic | annular division | segmentation starting point with the four outer side press members was shown in embodiment mentioned above, this invention is not limited to this. For example, the division starting point 10b is formed so that the outside of the annular division starting point 10a of the plate-like object 10 shown in FIG. 2 is divided into two regions or three regions, and two or three outer pressing members are formed. It is good also as an individual.

1: Dividing tool 2: Connecting member 3: Outer pressing member 4: Inner pressing member 7: Coil spring 8: Fixed member 9: Holding member 10, 100: Glass plate (plate-like object)
20: Laser beam irradiation means 30, 30 ': Flexible sheet

Claims (6)

A dividing tool that divides a plate-like object having an annular starting point into an inner side and an outer side,
An inner pressing member that presses the inside of the annularly formed dividing starting point, an outer pressing member that presses the outer side of the annularly dividing starting point, and a connecting member that connects the inner pressing member and the outer pressing member; With
The inner pressing member is mounted so as to be able to move forward and backward with respect to the connecting member, and the tip of the inner pressing member is biased so as to protrude in the pressing direction from the tip of the outer pressing member in a non-pressing state. tool.   The split tool according to claim 1, wherein the inner pressing member is attached to the connecting member while being urged in a pressing direction by an elastic member.   4. The split tool according to claim 1, wherein four outer pressing members are arranged on the outer periphery around the inner pressing member. 4.   The division tool according to claim 1 or 2, wherein a plurality of the inner pressing members are attached to the connecting member at a predetermined interval, and a plurality of the outer pressing members are attached to correspond to the inner pressing member. A method of using the dividing tool according to any one of claims 1 to 4,
A flexible sheet disposing step of disposing on the flexible sheet a plate-like object in which the starting point of the division is formed in an annular shape;
A splitting step of splitting by pressing the outside with the outer pressing member while pressing the inner side of the split starting point formed annularly on the plate-like object;
How to use a split tool consisting of at least   The method of using a dividing tool according to claim 5, wherein the dividing step is performed by expanding a flexible sheet at the time of pressing by the inner pressing member and the outer pressing member.