JP2017132237A - Liquid discharge head, liquid discharge unit and device discharging liquid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid discharge head that suppresses variance in liquid discharge characteristics caused as a pressure wave attenuates slower in a common liquid chamber when continuously discharging a liquid by high-frequency driving.SOLUTION: A liquid discharge head comprises: an actuator substrate 20 where a plurality of individual liquid chambers 6 to which a nozzle 4 communicates are formed and which includes a piezoelectric element 11 pressurizing liquid in the individual chambers 6; a common liquid chamber member 70 where a common liquid chamber 10 communicating with the plurality of individual liquid chambers 6 is formed; and a holding substrate 50 which is arranged between the actuator substrate 20 and the common liquid chamber member 70, and has an opening part 51 as a through hole forming a part of a flow passage from the common liquid chamber 10 to the individual liquid chamber 6, a slit cavity part 56 being provided along the opening part 51 of the holding substrate 50 and a damper 55 being provided at a part of a wall surface of the opening part 51.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a liquid discharge head, a liquid discharge unit, and an apparatus for discharging liquid.

  In the liquid discharge head, when the liquid in the individual liquid chamber is pressurized and discharged, vibration is applied to a part of the wall surface of the common liquid chamber in order to attenuate the pressure fluctuation transmitted from the individual liquid chamber to the common liquid chamber. Some damper members are arranged to be damped.

  Conventionally, a reservoir serving as a common liquid chamber is formed by a protective substrate bonded to the surface of the flow path forming substrate on the pressure generating element side, and vibration is attenuated on the surface of the protective substrate opposite to the flow path forming substrate. What bonded the compliance board | substrate to perform is known (patent document 1).

JP 2007-301736 A

  However, in the configuration disclosed in Patent Document 1, since a compliance substrate that performs vibration damping is arranged on the surface opposite to the flow path forming substrate, the pressure wave generated in the individual liquid chamber is not compliant. It takes time to reach the substrate and be attenuated.

  Therefore, when the drive frequency increases, the pressure wave due to the next discharge is repeatedly propagated before the pressure wave is attenuated in the common liquid chamber, and the liquid discharge characteristics vary due to the pressure fluctuation in the common liquid chamber. May occur.

  The present invention has been made in view of the above problems, and an object thereof is to reduce variations in liquid ejection characteristics.

In order to solve the above-described problem, a liquid discharge head according to the present invention includes:
A nozzle plate formed with a plurality of nozzles for discharging liquid;
An actuator substrate including pressure generating means for forming a plurality of individual liquid chambers that communicate with the nozzle and pressurizing the liquid in the individual liquid chambers;
A common liquid chamber member that forms a common liquid chamber that communicates with the plurality of individual liquid chambers;
A holding substrate that is disposed between the actuator substrate and the common liquid chamber member, covers the pressure generating means, and has a through hole serving as a flow path from the common liquid chamber to the individual liquid chamber;
A part of the wall surface of the through hole of the holding substrate is a damper that can be reversibly deformed,
A cavity formed in the holding substrate is provided on the opposite side of the through hole with the damper interposed therebetween.

  According to the present invention, it is possible to reduce variations in liquid ejection characteristics.

FIG. 3 is a cross-sectional explanatory diagram in a direction along the nozzle arrangement direction of the liquid ejection head according to the first embodiment of the present invention. FIG. 2 is a schematic sectional view in a direction orthogonal to a nozzle arrangement direction along the line AA in FIG. 1. It is a principal plane top view in the state which excluded the frame member and common liquid chamber member which follow the BB line of FIG. FIG. 6 is a plan view of a principal part in a state where a frame member and a common liquid chamber member of a liquid ejection head according to a second embodiment of the present invention are excluded. FIG. 10 is a plan view of a main part in a state in which a frame member and a common liquid chamber member of a liquid ejection head according to a third embodiment of the present invention are excluded, and an explanatory diagram for explaining a change in compliance in the common liquid chamber longitudinal direction. FIG. 10 is a schematic cross-sectional view in a direction orthogonal to a nozzle arrangement direction of a liquid ejection head according to a fourth embodiment of the present invention. FIG. 10 is a schematic cross-sectional view in a direction orthogonal to a nozzle arrangement direction of a liquid ejection head according to a fifth embodiment of the present invention. It is a disassembled perspective explanatory drawing of the liquid discharge head which concerns on 6th Embodiment of this invention. It is a cross-sectional explanatory drawing along the direction orthogonal to the nozzle arrangement direction. It is principal part expanded sectional explanatory drawing of FIG. It is a principal part sectional view similarly along a nozzle arrangement direction. It is principal part plane explanatory drawing of an example of the apparatus which discharges the liquid which concerns on this invention. It is principal part side explanatory drawing of the apparatus. It is principal part plane explanatory drawing of the other example of the liquid discharge unit which concerns on this invention. It is front explanatory drawing of the further another example of the liquid discharge unit which concerns on this invention.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. A liquid discharge head according to a first embodiment of the present invention will be described with reference to FIGS. 1 is a cross-sectional explanatory view of the head in the direction along the nozzle arrangement direction, FIG. 2 is a schematic cross-sectional view in the direction orthogonal to the nozzle arrangement direction along the line AA in FIG. 1, and FIG. It is a principal plane plan view in the state where a frame member and a common liquid chamber member along line B were removed. The hatching in FIG. 3 is for easy understanding and does not show a cross section.

  The liquid discharge head includes a nozzle plate 1, a flow path plate 2, a vibration plate 3, a piezoelectric element 11 that is a pressure generating element (pressure generating means), a holding substrate 50, a common liquid chamber member 70, and a housing. 80, a driving IC 500, and the like.

  Note that the entire members interposed between the nozzle plate 1 and the holding substrate 50 such as the flow path plate 2, the vibration plate 3, and the piezoelectric element 11 are collectively referred to as “actuator substrate 20”. However, the present invention is not limited to the case where an independent member is formed as the actuator substrate 20 and then joined to the nozzle plate 1 or the holding substrate 50.

  The nozzle plate 1 is provided with two nozzle rows in which a plurality of nozzles 4 for discharging liquid are arranged. The number of nozzle rows is not limited to two, and may be one row or three or more rows.

  The flow path plate 2, together with the nozzle plate 1 and the vibration plate 3, forms an individual liquid chamber 6 that communicates with the nozzle 4, a fluid resistance portion 7 that communicates with the individual liquid chamber 6, a liquid introduction portion 8, and the like. In the individual liquid chamber 6, the common liquid formed by the common liquid chamber member 70 through the fluid resistance portion 7 and the liquid introduction portion 8, the opening 9 of the diaphragm 3, and the opening 51 serving as the flow path of the holding substrate 50. Liquid is supplied from the chamber 10.

  The vibration plate 3 forms a deformable vibration region 30 that forms a part of the wall surface of the individual liquid chamber 6.

  A piezoelectric element 11 is provided integrally with the vibration region 30 on the surface of the vibration plate 3 opposite to the individual liquid chamber 6 in the vibration region 30, and the vibration region 30 and the piezoelectric element 11 constitute a piezoelectric actuator. .

  The piezoelectric element 11 is configured by sequentially laminating a lower electrode 13, a piezoelectric layer (piezoelectric body) 12, and an upper electrode 14 from the vibration region 30 side.

  Here, by applying a voltage between the upper electrode 14 and the lower electrode 13 of the piezoelectric element 11 from the driving IC (also referred to as a driver IC) 500, the piezoelectric layer 12 expands in the electrode stacking direction, that is, the electric field direction, Shrink in a direction parallel to the vibration region 30. At this time, since the lower electrode 13 side is constrained by the vibration region 30, a tensile stress is generated on the lower electrode 13 side of the vibration region 30, and the vibration region 30 bends toward the individual liquid chamber 6 side and applies the internal liquid. By pressurizing, the liquid is discharged from the nozzle 4.

  The holding substrate 50 is formed with an opening 51 which is a through hole that becomes a part of a flow path from the common liquid chamber 10 to the individual liquid chamber 6. Further, the holding substrate 50 is formed with a recess 52 that covers and accommodates the piezoelectric element 11 and an opening 53 that accommodates the drive IC 500. The opening 51 is a slit-shaped through hole extending in the nozzle arrangement direction.

  The holding substrate 50 is interposed between the actuator substrate 20 and the common liquid chamber member 70 and forms a part of the wall surface of the common liquid chamber 10.

  The common liquid chamber member 70 is provided with a supply port 71 that supplies liquid to the common liquid chamber 10 from the outside at the center in the nozzle arrangement direction.

  As shown in FIG. 1, the common liquid chamber 10 has a constricted portion 10 a in which the height of both end portions in the nozzle arrangement direction (height in the stacking direction) gradually decreases. The narrowed portion 10a can be formed by making the width in the direction perpendicular to the nozzle arrangement direction narrower than the central portion in the nozzle arrangement direction, and making the height and width smaller (narrower) than the central portion in the nozzle arrangement direction. Can also be formed

  In the present embodiment, a slit-like cavity 56 is provided along the opening 51 of the holding substrate 50, and the wall surface of the opening 51 is a reversibly deformable damper 55. At this time, the cavity 56 becomes a damper chamber disposed on the opposite side of the opening 51 with the damper 55 interposed therebetween.

  Here, the damper 55 forms a wall surface on the side opposite to the piezoelectric element 11 side (the concave portion 52 side) which is the pressure generating means side in a direction orthogonal to the nozzle arrangement direction. The hollow portion 56 is a through hole (through groove) penetrating the holding substrate 50 in the thickness direction, and the openings on both sides are closed by the actuator substrate 20 and the common liquid chamber member 70, respectively.

  Further, in the nozzle arrangement direction, the length of the region where the cavity portion 56 is disposed is equal to or longer than the length of the opening portion 51 which is a through hole, and the entire wall surface of the opening portion 51 is used as the damper 55.

  In the liquid discharge head configured as described above, by driving the piezoelectric element 11, the piezoelectric element 11 is deformed with the deformation of the vibration region 30, and the liquid in the individual liquid chamber 6 is pressurized as described above. Then, the liquid is discharged from the nozzle 4.

  At this time, the pressure wave generated in the individual liquid chamber 6 propagates from the opening 51 of the holding substrate 50 into the common liquid chamber 10 through the fluid resistance portion 7, the liquid introduction portion 8, and the opening 9. In this case, since the damper 55 is disposed on the wall surface of the opening 51 of the holding substrate 50 close to the individual liquid chamber 6, the pressure 51 propagating to the common liquid chamber 10 serves as the inlet 51 of the common liquid chamber 10. Is attenuated.

  The effect of the damper pressure attenuation on the pressure wave generated from the individual liquid chamber 6 by the driving of the piezoelectric actuator is generated earlier as the distance from the generation source to the damper is shorter, so that the damper is disposed on the other wall surface. The attenuation effect can be exhibited efficiently.

  As a result, even when high frequency driving is performed, the pressure wave can be quickly attenuated, and variations in liquid ejection characteristics can be reduced.

  Further, since the damper 55 forms a wall surface on the opposite side to the pressure generating means side in the direction orthogonal to the nozzle arrangement direction, even if the damper 55 is damaged, the damper 55 can be used as an electric part such as the piezoelectric element 11 or wiring. The liquid can be surely prevented from entering.

  Here, an example of a method for creating the damper 55 of the holding substrate 50 in the present embodiment will be described.

  The function of the holding substrate 50 in the present embodiment is to maintain the strength of the actuator substrate 20, to secure a flow path for liquid supply from the common liquid chamber 10 to the individual liquid chamber 6 by the opening 51, and to the opening The pressure wave generated by the liquid discharge is attenuated by the damper 55 on the wall surface 51.

  Therefore, for example, the thickness of the holding substrate 50 is set to 300 μm with respect to the thickness of the flow path plate 2 of 100 μm. When a silicon wafer is used as the material of the holding substrate 50, the thickness is preferably 500 μm or less for the microfabrication by the MEMS method, photolithography, and etching, and the strength of the actuator substrate 20 is maintained. In addition, it is considered that a thickness more than double the formation of the individual liquid chamber 6 is preferable.

  In the processing of the holding substrate 50, the concave portion 52 is formed on one surface by photolithography and etching, and then the opening portion 51 and the cavity portion 56 are formed on the other surface by photolithography and etching again, thereby forming the damper 55. .

  In the present embodiment, the thickness of the damper 55 (the width in the direction orthogonal to the nozzle arrangement direction) is 50 μm, and the width of the cavity 56 is 50 μm. The damper 55 has such a size and thickness that the upper and lower sides of the cavity portion 56 are blocked by the bonding surface in consideration of the positional deviation when the common liquid chamber member 70 and the holding substrate 50 are bonded.

  Further, as shown in FIG. 3, the damper 55 is extended so as to be parallel to the opening 51 in the longitudinal direction (nozzle arrangement direction: X1-X2 direction) of the common liquid chamber 10, and the boundary condition is set at the end in the row. It is made longer than the opening 51 so as not to cause a difference in effect.

  Thereby, the damper 55 can be installed in the row.

  The damper 55 is made of the same silicon material as that forming the individual liquid chamber 6, and has a natural period equivalent to the short-period pressure fluctuation generated in the individual liquid chamber 6, thereby reducing the short-period pressure fluctuation. Can be absorbed.

  Here, the short-term pressure fluctuation means that the pressure fluctuation having the same period as the natural vibration period Tc is generated by the vibration of the liquid in the individual liquid chamber 6 by driving. On the other hand, long-term pressure fluctuation means pressure fluctuation in which the pressure rebounds from the damper of the common liquid chamber 10 by driving.

  In addition, as described above, the damper 55 can absorb the pressure fluctuation with a short period, and the damper 55 can absorb the pressure as the shaking is larger. However, if the material is soft, the damper 55 has a damper function because it does not respond to the pressure fluctuation with a short period. Absent. Therefore, resonance occurs when the damper 55 has the same natural period as the short-period pressure fluctuation. In other words, it is possible to increase the efficiency of the damper function by shaking greatly while responding to a short cycle.

  Next, a liquid discharge head according to a second embodiment of the present invention will be described with reference to FIG. FIG. 4 is a plan view of an essential part in a state in which the same housing as in FIG. 3 and the common liquid chamber member are removed.

  In the present embodiment, a plurality of ribs 57 are provided in a direction orthogonal to the nozzle arrangement direction in the nozzle arrangement direction, and the cavity portion 56 of the first embodiment is partitioned into a plurality of regions 56A. The ribs 57 may be provided entirely or partially in the thickness direction of the holding substrate 50. The rib 57 is connected to the damper 55.

  Note that the provision of the entire region means that the region 56A is separated from the adjacent region 56A by the rib 57, and the provision of the region 56A means that the rib 57 exists between the region 56A and the adjacent region 56A. A gap is provided and communicates through the gap.

  Thereby, damage to the damper 55 can be prevented.

  The ribs 57 are provided between the individual liquid chambers 6 and 6 in the nozzle arrangement direction, that is, corresponding to the openings 9 and 9 of the diaphragm 3.

  Thereby, it is possible to prevent the damper from being destroyed while maintaining the damper function against the pressure fluctuation generated in the individual liquid chamber 6.

  Next, a liquid ejection head according to a third embodiment of the present invention will be described with reference to FIG. FIG. 5A is a schematic plan view of a main part in a state in which the housing and the common liquid chamber member similar to those in FIG. 3 are removed, and FIG. 5B is an explanatory diagram for explaining a change in compliance in the longitudinal direction of the common liquid chamber. .

  Since the narrowed portion 10a having a reduced height is provided at both ends of the common liquid chamber 10 in the nozzle arrangement direction, the compliance at each position in the nozzle arrangement direction in the common liquid chamber 10 is not uniform. Specifically, as shown in FIG. 4B, the compliance becomes smaller toward the end of the common liquid chamber 10. The presence of the supply port 71 is also one of the factors that cause non-uniform compliance, and the compliance is high because there is no top surface of the common liquid chamber 10.

  That is, the compliance of the common liquid chamber 10 has a relationship of region A1 <A2 <A3.

  Therefore, the compliance of the damper 55 is set so that the sum of the compliance for each position in the nozzle arrangement direction of the common liquid chamber 10 and the compliance for each position of the damper 55 approaches each of the regions A1, A2, and A3.

  Specifically, the arrangement of the ribs 57 in the nozzle arrangement direction is set to intervals L1, L2, and L3 (L1> L2> L3).

  That is, in the region A1 where the compliance of the common liquid chamber 10 is the smallest, the interval between the ribs 57 is relatively increased (the width of the damper 55 in the region A1 in the nozzle arrangement direction is increased) to increase the compliance of the damper 55. doing. On the other hand, in the region A2 where the compliance of the common liquid chamber 10 is intermediate, the interval between the ribs 57 is made shorter than the region A1, and the compliance of the damper 55 is made smaller than the region A1. Further, in the region A3 having the highest compliance corresponding to the supply port portion 71, the interval between the ribs 57 is made shorter than that in the region A2, and the compliance of the damper 55 is made the smallest.

  As described above, since at least three or more ribs are provided so that the rib interval is narrowed toward the end in the nozzle arrangement direction, the entire common liquid chamber (the common liquid chamber 10 and the opening 51 are aligned). Can be made uniform in the row.

  Next, a liquid ejection head according to a fourth embodiment of the invention will be described with reference to FIG. FIG. 6 is a schematic sectional view of the head in a direction orthogonal to the nozzle arrangement direction.

  In the present embodiment, the cavity 56 is a recess that opens to the actuator substrate 20 side, and the opening on the actuator substrate 20 side is closed by the actuator substrate 20.

  Thereby, a bonding region with the common liquid chamber member 70 can be secured in the vicinity of the cavity 56 of the holding substrate 50.

  Next, a liquid ejection head according to a fifth embodiment of the invention will be described with reference to FIG. FIG. 7 is a schematic sectional view of the head in a direction orthogonal to the nozzle arrangement direction.

  In this embodiment, the cavity 56 is a recess that opens to the common liquid chamber member 70 side, and the opening on the common liquid chamber member 70 side is closed by the common liquid chamber member 70.

  Next, a liquid ejection head according to a sixth embodiment of the present invention will be described with reference to FIGS. 8 is an exploded perspective view of the liquid discharge head, FIG. 9 is a cross-sectional view along the direction perpendicular to the nozzle arrangement direction, FIG. 10 is an enlarged cross-sectional view of the main part of FIG. 9, and FIG. FIG.

  In addition, the part which overlaps with the structure of 1st Embodiment is also demonstrated.

  The liquid discharge head includes a nozzle plate 1, a flow path plate 2, a diaphragm 3 that is a wall surface member, a piezoelectric element 11 that is a pressure generating element (pressure generating means), a holding substrate 50, and a wiring such as an FPC. A member 60 and a common liquid chamber member 70 also serving as a frame member are provided.

  The nozzle plate 1 is formed with a plurality of nozzles 4 for discharging liquid. Here, the configuration is such that four nozzle rows in which the nozzles 4 are arranged are arranged, but the present invention is not limited to this.

  The flow path plate 2, together with the nozzle plate 1 and the vibration plate 3, form an individual liquid chamber 6 that communicates with the nozzle 4, a fluid resistance portion 7 that communicates with the individual liquid chamber 6, and a liquid introduction portion 8 that communicates with the fluid resistance portion 7. .

  The liquid introducing portion 8 communicates with the common liquid chamber 10 formed by the common liquid chamber member 70 through the opening 9 of the diaphragm 3 and the opening 51 serving as the flow path of the holding substrate 50.

  The vibration plate 3 forms a deformable vibration region 30 that forms a part of the wall surface of the individual liquid chamber 6. A piezoelectric element 11 is provided integrally with the vibration region 30 on the surface of the vibration plate 3 opposite to the individual liquid chamber 6 in the vibration region 30, and a piezoelectric actuator is configured by the vibration region 30 and the piezoelectric element 11. Yes.

  The piezoelectric element 11 is configured by sequentially laminating a lower electrode 13, a piezoelectric layer (piezoelectric body) 12, and an upper electrode 14 from the vibration region 30 side. An insulating film 21 is formed on the piezoelectric element 11.

  The lower electrode 13 serving as a common electrode of the plurality of piezoelectric elements 11 is connected to the common electrode power supply wiring pattern 121 via the common wiring 15. As shown in FIG. 9, the lower electrode 13 is one electrode layer formed across all the piezoelectric elements 11 in the nozzle arrangement direction.

  Further, the upper electrode 14 serving as an individual electrode of the piezoelectric element 11 is connected to a drive IC (driver IC) 500 serving as a drive circuit unit via an individual wiring 16. The individual wiring 16 and the like are covered with an insulating film 22.

  The driver IC 500 is mounted on the actuator substrate 20 by a method such as flip chip bonding so as to cover the region between the rows of piezoelectric element rows.

  The driver IC 500 mounted on the actuator substrate 20 is connected to the individual electrode power supply wiring pattern 101 to which a drive waveform (drive signal) is supplied.

  The wiring provided in the wiring member 60 is electrically connected to the driver IC 500, and the other end side of the wiring member 60 is connected to the control unit on the apparatus main body side.

  A holding substrate 50 covering the piezoelectric element 11 on the actuator substrate 20 is bonded to the vibration substrate 3 side of the actuator substrate 20 with an adhesive.

  The holding substrate 50 has an opening 51 that is a through hole that becomes a part of a flow path that passes through the common liquid chamber 10 and the individual liquid chamber 6 side, a recess 52 that houses the piezoelectric element 11, and an opening that houses the driver IC 500. A portion 53 is provided. The opening 51 is a slit-shaped through hole extending in the nozzle arrangement direction.

  The holding substrate 50 is interposed between the actuator substrate 20 and the frame member 70 that is a common liquid chamber member, and forms a part of the wall surface of the common liquid chamber 10.

  The common liquid chamber member 70 forms a common liquid chamber 10 that supplies a liquid to each individual liquid chamber 6. The common liquid chamber 10 is provided corresponding to each of the four nozzle rows. In addition, a liquid of a required color is supplied to the common liquid chamber 10 via the supply port 71 from the outside.

  A damper member 90 is joined to the common liquid chamber member 70. The damper member 90 includes a deformable damper 91 that forms a part of the wall surface of the common liquid chamber 10, and a damper plate 92 that reinforces the damper 91.

  The common liquid chamber member 70 is bonded to the outer peripheral portion of the nozzle plate 1 and the holding substrate 50 with an adhesive, and accommodates the actuator substrate 20 and the holding substrate 50 to constitute a frame of this head.

  And the nozzle cover member 45 which covers a peripheral part of the nozzle plate 1 and a part of outer peripheral surface of the common liquid chamber member 70 is provided.

  Also in this embodiment, the wall surface of the opening 51 of the holding substrate 50 is formed by the damper 55, and the cavity 56 serving as a damper chamber is provided on the opposite side of the opening 51 across the damper 55.

  Thereby, even when high-frequency driving is performed, variations in liquid ejection characteristics can be reduced.

  In other words, in the present embodiment, there are two dampers for the head, the damper 91 on the common liquid chamber 10 side and the damper 55 on the holding substrate 50 side. Here, short period vibration can be reduced by using the damper 55 as a silicon material, and long period (low frequency) vibration can be suppressed by using the damper 91 as a Ni film / resin film. Therefore, variations in liquid ejection characteristics can be reduced more reliably.

  Next, an example of an apparatus for ejecting liquid according to the present invention will be described with reference to FIGS. FIG. 12 is an explanatory plan view of a main part of the apparatus, and FIG.

  This apparatus is a serial type apparatus, and the carriage 403 reciprocates in the main scanning direction by the main scanning moving mechanism 493. The main scanning movement mechanism 493 includes a guide member 401, a main scanning motor 405, a timing belt 408, and the like. The guide member 401 spans the left and right side plates 491A and 491B and holds the carriage 403 so as to be movable. The carriage 403 is reciprocated in the main scanning direction by the main scanning motor 405 via the timing belt 408 spanned between the driving pulley 406 and the driven pulley 407.

  A liquid discharge unit 440 in which the liquid discharge head 404 and the head tank 441 according to the present invention are integrated is mounted on the carriage 403. The liquid discharge head 404 of the liquid discharge unit 440 discharges, for example, yellow (Y), cyan (C), magenta (M), and black (K) liquids. The liquid ejection head 404 is mounted with a nozzle row composed of a plurality of nozzles arranged in the sub-scanning direction orthogonal to the main scanning direction, and the ejection direction facing downward.

  The liquid stored in the liquid cartridge 450 is supplied to the head tank 441 by the supply mechanism 494 for supplying the liquid stored outside the liquid discharge head 404 to the liquid discharge head 404.

  The supply mechanism 494 includes a cartridge holder 451 that is a filling unit for mounting the liquid cartridge 450, a tube 456, a liquid feeding unit 452 including a liquid feeding pump, and the like. The liquid cartridge 450 is detachably attached to the cartridge holder 451. Liquid is fed from the liquid cartridge 450 to the head tank 441 by the liquid feeding unit 452 via the tube 456.

  This apparatus includes a transport mechanism 495 for transporting the paper 410. The transport mechanism 495 includes a transport belt 412 serving as transport means, and a sub-scanning motor 416 for driving the transport belt 412.

  The conveyance belt 412 adsorbs the paper 410 and conveys it at a position facing the liquid ejection head 404. The transport belt 412 is an endless belt and is stretched between the transport roller 413 and the tension roller 414. The adsorption can be performed by electrostatic adsorption or air suction.

  The transport belt 412 rotates in the sub-scanning direction when the transport roller 413 is rotationally driven by the sub-scanning motor 416 via the timing belt 417 and the timing pulley 418.

  Further, on one side of the carriage 403 in the main scanning direction, a maintenance / recovery mechanism 420 that performs maintenance / recovery of the liquid ejection head 404 is disposed on the side of the transport belt 412.

  The maintenance / recovery mechanism 420 includes, for example, a cap member 421 for capping the nozzle surface (surface on which the nozzle is formed) of the liquid ejection head 404, a wiper member 422 for wiping the nozzle surface, and the like.

  The main scanning movement mechanism 493, the supply mechanism 494, the maintenance / recovery mechanism 420, and the transport mechanism 495 are attached to a housing including the side plates 491A and 491B and the back plate 491C.

  In this apparatus configured as described above, the paper 410 is fed and sucked onto the transport belt 412, and the paper 410 is transported in the sub-scanning direction by the circular movement of the transport belt 412.

Therefore, the liquid ejection head 404 is driven in accordance with the image signal while moving the carriage 403 in the main scanning direction, thereby ejecting liquid onto the stopped paper 410 to form an image.

  Thus, since this apparatus includes the liquid ejection head according to the present invention, a high-quality image can be stably formed.

  Next, another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 14 is an explanatory plan view of the main part of the unit.

  The liquid discharge unit includes a casing portion composed of side plates 491A and 491B and a back plate 491C, a main scanning moving mechanism 493, a carriage 403, and a liquid among the members constituting the liquid discharge device. The discharge head 404 is configured.

  Note that a liquid discharge unit in which at least one of the above-described maintenance and recovery mechanism 420 and the supply mechanism 494 is further attached to, for example, the side plate 491B of the liquid discharge unit may be configured.

  Next, still another example of the liquid discharge unit according to the present invention will be described with reference to FIG. FIG. 15 is an explanatory front view of the unit.

  This liquid discharge unit includes a liquid discharge head 404 to which a flow path component 444 is attached, and a tube 456 connected to the flow path component 444.

  The flow path component 444 is disposed inside the cover 442. A head tank 441 may be included instead of the flow path component 444. In addition, a connector 443 that is electrically connected to the liquid ejection head 404 is provided above the flow path component 444.

  In the present application, the liquid to be ejected is not particularly limited as long as it has a viscosity and surface tension that can be ejected from the head, and the viscosity becomes 30 mPa · s or less at room temperature, normal pressure, or by heating and cooling. It is preferable. More specifically, solvents such as water and organic solvents, colorants such as dyes and pigments, functional materials such as polymerizable compounds, resins, and surfactants, and biocompatible materials such as DNA, amino acids, proteins, and calcium. , Edible materials such as natural pigments, solutions, suspensions, emulsions, and the like. These include, for example, inkjet inks, surface treatment liquids, components of electronic devices and light emitting devices, and formation of electronic circuit resist patterns It can be used in applications such as liquids for use, three-dimensional modeling material liquids, and the like.

  As energy generation sources for discharging liquid, piezoelectric actuators (laminated piezoelectric elements and thin film piezoelectric elements), thermal actuators using electrothermal transducers such as heating resistors, electrostatic actuators consisting of a diaphragm and counter electrode are used. To be included.

  The “liquid ejection unit” is a unit in which functional parts and mechanisms are integrated with a liquid ejection head, and includes an assembly of parts related to liquid ejection. For example, the “liquid discharge unit” includes a combination of at least one of a head tank, a carriage, a supply mechanism, a maintenance / recovery mechanism, and a main scanning movement mechanism with a liquid discharge head.

  Here, the term “integrated” refers to, for example, a liquid discharge head, a functional component, and a mechanism that are fixed to each other by fastening, adhesion, engagement, etc., and one that is held movably with respect to the other. Including. Further, the liquid discharge head, the functional component, and the mechanism may be configured to be detachable from each other.

  For example, there is a liquid discharge unit in which a liquid discharge head and a head tank are integrated. Also, there are some in which the liquid discharge head and the head tank are integrated by being connected to each other by a tube or the like. Here, a unit including a filter may be added between the head tank and the liquid discharge head of these liquid discharge units.

  In addition, there is a liquid discharge unit in which a liquid discharge head and a carriage are integrated.

  In addition, there is a liquid discharge unit in which the liquid discharge head and the scanning movement mechanism are integrated by holding the liquid discharge head movably on a guide member that constitutes a part of the scanning movement mechanism. In some cases, a liquid discharge head, a carriage, and a main scanning movement mechanism are integrated.

  Also, there is a liquid discharge unit in which a cap member that is a part of the maintenance / recovery mechanism is fixed to a carriage to which the liquid discharge head is attached, and the liquid discharge head, the carriage, and the maintenance / recovery mechanism are integrated. .

  In addition, there is a liquid discharge unit in which a tube is connected to a liquid discharge head to which a head tank or a flow path component is attached, and the liquid discharge head and a supply mechanism are integrated. The liquid from the liquid storage source is supplied to the liquid discharge head via this tube.

  The main scanning movement mechanism includes a guide member alone. The supply mechanism includes a single tube and a single loading unit.

The “apparatus for ejecting liquid” includes an apparatus that includes a liquid ejection head or a liquid ejection unit and that ejects liquid by driving the liquid ejection head. The apparatus for ejecting a liquid includes not only an apparatus capable of ejecting a liquid to an object to which the liquid can adhere, but also an apparatus for ejecting the liquid into the air or liquid.

  This “apparatus for discharging liquid” may include means for feeding, transporting, and discharging a liquid to which liquid can adhere, as well as a pre-processing apparatus and a post-processing apparatus.

  For example, as a “liquid ejecting device”, an image forming device that forms an image on paper by ejecting ink, a powder is formed in layers to form a three-dimensional model (three-dimensional model) There is a three-dimensional modeling apparatus (three-dimensional modeling apparatus) that discharges a modeling liquid onto the powder layer.

  Further, the “apparatus for ejecting liquid” is not limited to an apparatus in which significant images such as characters and figures are visualized by the ejected liquid. For example, what forms a pattern etc. which does not have a meaning in itself, and what forms a three-dimensional image are also included.

  The above-mentioned “applicable liquid” means that the liquid can be attached at least temporarily and adheres and adheres, or adheres and penetrates. Specific examples include recording media such as paper, recording paper, recording paper, film, and cloth, electronic parts such as electronic substrates and piezoelectric elements, powder layers (powder layers), organ models, and test cells. Yes, unless specifically limited, includes everything that the liquid adheres to.

  The material of the above-mentioned “material to which liquid can adhere” is not limited as long as liquid such as paper, thread, fiber, fabric, leather, metal, plastic, glass, wood, ceramics can be adhered even temporarily.

  In addition, the “device for ejecting liquid” includes a device in which the liquid ejection head and the device to which the liquid can adhere move relatively, but is not limited thereto. Specific examples include a serial type apparatus that moves the liquid discharge head, a line type apparatus that does not move the liquid discharge head, and the like.

  In addition, as the “device for ejecting liquid”, other than the above, a treatment liquid coating apparatus that ejects a treatment liquid onto a sheet in order to apply the treatment liquid to the surface of the sheet for the purpose of modifying the surface of the sheet, There is an injection granulation apparatus that granulates raw material fine particles by spraying a composition liquid in which raw materials are dispersed in a solution through a nozzle.

  Note that the terms “image formation”, “recording”, “printing”, “printing”, “printing”, “modeling” and the like in the terms of the present application are all synonymous.

DESCRIPTION OF SYMBOLS 1 Nozzle plate 2 Channel plate 3 Vibrating plate 4 Nozzle 6 Individual liquid chamber 11 Piezoelectric element 20 Actuator substrate 50 Holding substrate 51 Opening (through hole)
55 Damper 56 Cavity (Damper Room)
57 Rib 70 Common liquid chamber member 403 Carriage 404 Liquid discharge head 430 Liquid discharge unit

Claims (9)

A nozzle plate formed with a plurality of nozzles for discharging liquid;
An actuator substrate including pressure generating means for forming a plurality of individual liquid chambers that communicate with the nozzle and pressurizing the liquid in the individual liquid chambers;
A common liquid chamber member that forms a common liquid chamber that communicates with the plurality of individual liquid chambers;
A holding substrate that is disposed between the actuator substrate and the common liquid chamber member, covers the pressure generating means, and has a through hole serving as a flow path from the common liquid chamber to the individual liquid chamber;
A part of the wall surface of the through hole of the holding substrate is a damper that can be reversibly deformed,
A liquid discharge head, wherein a cavity formed in the holding substrate is provided on the opposite side of the through hole with the damper interposed therebetween. The liquid ejection head according to claim 1, wherein the damper forms a wall surface opposite to the pressure generating unit side in a direction orthogonal to the nozzle arrangement direction. 3. The liquid ejection head according to claim 1, wherein the cavity is closed by the actuator substrate and the common liquid chamber member in a thickness direction of the holding substrate. 4. The liquid ejection head according to claim 1, wherein, in a nozzle arrangement direction, a length of the region in which the hollow portion is disposed is equal to or longer than a length of the region in which the through hole is disposed. . In the nozzle arrangement direction, a rib that divides the cavity into a plurality of regions is provided,
The liquid discharge head according to claim 1, wherein the rib is connected to the damper. The liquid ejection head according to claim 5, wherein at least three or more ribs are provided at intervals that become narrower toward an end portion in a nozzle arrangement direction.   A liquid discharge unit comprising the liquid discharge head according to claim 1. A head tank for storing liquid to be supplied to the liquid discharge head, a carriage on which the liquid discharge head is mounted, a supply mechanism for supplying liquid to the liquid discharge head, a maintenance / recovery mechanism for maintaining and recovering the liquid discharge head, and the liquid The liquid discharge unit according to claim 7, wherein at least one of a main scanning movement mechanism that moves the discharge head in a main scanning direction and the liquid discharge head are integrated.   An apparatus for discharging a liquid, comprising the liquid discharge head according to claim 1 or the liquid discharge unit according to claim 7 or 8.

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