JP2017125527A - Flow passage structure and manufacturing method of flow passage structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To position a member forming a flow passage structure with high accuracy and fix the member to a predetermined position.SOLUTION: A flow passage structure includes: a first member 110 having a first recessed part 120, which forms a liquid chamber 511 for storing a liquid with a lid member 440, and a first hole 111 formed at a bottom surface 141 of the first recessed part 120 and serving as a liquid passage; and a second member 210 having a contact surface 220 which contacts with the bottom surface 141, and a second hole 211 exposing the first hole 111 and serving as a liquid passage. The first member 110 has a first inner wall surface 121 which determines a position of the second member 210 in a direction along the bottom surface 141.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a flow channel structure applicable to a valve unit and the like, and a method for manufacturing the flow channel structure.

  For example, there is known an ink jet recording apparatus that ejects liquid (ink) as a droplet (ink droplet) onto a recording medium such as paper or a recording sheet and performs printing on the recording medium.

  In such an ink jet recording apparatus, ink is supplied from a liquid storage means such as an ink tank to an ink jet recording head via a supply pipe such as a tube, and the ink supplied from the liquid storage means is supplied to the ink jet recording head. Some are ejected as ink droplets from nozzle openings. Further, there has been proposed an apparatus in which a valve unit which is a pressure adjusting valve is provided in the middle of the ink flow path so that the ink supplied from the liquid storage means is supplied to the ink jet recording head at a predetermined pressure. (For example, patent document 1).

  The valve unit includes a valve seat and a valve body. When the valve body comes into contact with the valve seat, the ink flow path is closed, and when the valve body is separated from the valve seat, the ink flow path is opened. It comes to speak. Such opening and closing (separation contact) between the valve seat and the valve body is performed by the pressure of the downstream flow path.

  In such a valve unit, the valve seat and the valve body repeatedly open and close (separate contact), whereby ink accumulates in a region where the valve seat and the valve body abut (hereinafter referred to as a contact region), Ink leakage may occur. For this reason, in the valve unit described in Patent Document 1, water repellent treatment is applied to the contact area of the valve seat to suppress ink accumulation. Specifically, the water repellent resin eluted from the seal member adheres to the contact area of the valve seat by bringing the valve body, which has a sealing member containing the water repellent resin in the contact area, into contact with the valve seat. Water repellent treatment is applied to the contact area of the valve seat.

JP2013-132894A

  The valve unit and the members (valve seat, valve body, seal member, etc.) constituting the valve unit are flow path structures that form ink flow paths. The flow path structure is required to have high accuracy and high density as in the ink jet recording head.

  However, Patent Document 1 does not disclose a method for aligning a member (seal member) for performing a water-repellent treatment with high accuracy and fixing it to a predetermined position, and cannot perform alignment with high accuracy. There is a fear. For example, when the flow path structure is a member (seal member) for performing a water repellent treatment, if the member (seal member) for performing the water repellent treatment is not fixed at a predetermined position, There is a possibility that ink is deposited on the contact area without being processed. In addition, when a plurality of members having holes serving as channels are assembled to form a channel structure, the holes may not communicate with each other or the holes may be blocked unless the plurality of members are fixed at predetermined positions. There is a risk that. Moreover, when these members are fixed to each other, proper fixing is difficult as the members and the holes are small.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A flow channel structure according to this application example is a first part that forms a liquid chamber that stores liquid with a lid member, and a liquid channel that is formed on the bottom surface of the concave part. A first member having a plurality of holes, a second member having a contact surface that contacts the bottom surface, and a second hole that exposes the first hole and serves as the flow path. One member has the contact part which determines the position of the said 2nd member in the direction along the said bottom face, It is characterized by the above-mentioned.

  The bottom surface of the first member contacts the contact surface of the second member and determines the position of the second member relative to the first member in a direction intersecting the bottom surface. Furthermore, the contact portion of the first member contacts the second member and determines the position of the second member with respect to the first member in the direction along the bottom surface.

  In this application example, the second member is aligned with the first member in a self-aligning manner by the components (bottom surface, contact portion) of the first member. Therefore, for example, the second member can be aligned with respect to the first member with high accuracy or simply without using an alignment apparatus.

  Application Example 2 In the flow channel structure according to the application example described above, an adhesive that fixes the first member and the second member may be provided between the bottom surface and the contact surface. preferable.

  When the second member is fixed to the first member with an adhesive, the influence of external force or heat acting on the second member is smaller than when the second member is fixed to the first member by a method such as heat welding or heat caulking. Therefore, when the second member is fixed to the first member, the positional deviation of the second member with respect to the first member is reduced, and the second member can be fixed to the first member with high accuracy.

  Application Example 3 In the flow channel structure according to the application example, at least one of the first member and the second member further has a diameter of the first hole or the second hole as it approaches the bottom surface. It is preferable to have a taper part which enlarges.

  When a tapered portion that increases the diameter of the first hole or the second hole as it approaches the bottom surface, a new space is formed by the tapered portion, for example, an extra portion protruding from between the second member and the first member. The adhesive can be accommodated and the extra adhesive can be retained in the new space formed by the tapered portion. Accordingly, the excess adhesive that protrudes does not easily flow from the tapered portion toward the first hole or the second hole, and the excess adhesive that protrudes causes a part of the first hole or the second hole to flow. The problem of blocking can be suppressed.

  Application Example 4 A flow channel structure according to this application example includes a recess that forms a liquid chamber that stores liquid with a lid member, and a first channel that is formed on the bottom surface of the recess and serves as the liquid channel. A first member having a plurality of holes, a second member having a contact surface that contacts the bottom surface, and a second hole that exposes the first hole and serves as the flow path. At least one of the one member and the second member further includes a tapered portion that increases the diameter of the first hole or the second hole as it approaches the bottom surface.

  When a tapered portion that increases the diameter of the first hole or the second hole as it approaches the bottom surface is provided, a new space is formed by the tapered portion. The new space holds an unnecessary component (for example, excess adhesive that protrudes) that blocks a part of the first hole or the second hole, and the unnecessary component becomes the first hole or the second hole. It becomes difficult to move to the side of the second hole. For example, it is possible to suppress a problem that an unnecessary component closes a part of the first hole or the second hole.

  Application Example 5 In the flow channel structure according to the application example, it is preferable that the first member further includes a contact portion that determines a position of the second member in a direction along the bottom surface.

  The bottom surface of the first member contacts the contact surface of the second member and determines the position of the second member relative to the first member in a direction intersecting the bottom surface. The contact portion of the first member contacts the second member, and determines the position of the second member relative to the first member in the direction along the bottom surface. Therefore, the second member is aligned with the first member in a self-aligning manner by the components (bottom surface, contact portion) of the first member. Therefore, for example, without using the alignment apparatus, the second member can be aligned with high accuracy or simply with respect to the first member as compared with the alignment using the alignment apparatus.

  Application Example 6 In the flow channel structure according to the application example, the second member includes a first side surface and a second side surface that intersect the contact surface with the contact surface interposed therebetween, and Preferably, the first side surface defines the second hole, the second side surface defines the outer shape of the second member, and the abutting portion abuts on the second side surface.

The first side surface is an inner wall surface of the second hole that defines the diameter of the second hole. The second side surface is an outer wall surface that defines the outer shape of the second member, and is wider than the first side surface. When the contact portion of the first member is brought into contact with the second side surface (the outer wall surface of the second member), the position of the second member relative to the first member in the direction along the bottom surface can be controlled with high accuracy.
Furthermore, since the second side surface is wider than the first side surface, the area of the portion where the first member and the second member contact each other is larger than when the contact portion of the first member contacts the first side surface. The second member can be arranged (fixed) on the first member more stably.

  Application Example 7 In the flow channel structure according to the application example, the second member includes a first side surface and a second side surface that intersect the contact surface with the contact surface interposed therebetween, and Preferably, the first side surface defines the second hole, the second side surface defines the outer shape of the second member, and the abutting portion abuts on the first side surface.

The second side surface is an outer wall surface that defines the outer shape of the second member. The first side surface is an inner wall surface of the second hole that defines the diameter of the second hole, and is narrower than the second side surface. By bringing the contact portion of the first member into contact with the first side surface (the inner wall surface of the second hole), the position of the second member with respect to the first member in the direction along the bottom surface can be controlled with high accuracy. it can.
Furthermore, since the first side surface is narrower than the second side surface, the area of the portion where the first member and the second member abut is reduced compared to the case where the second side surface abuts on the first side surface, and thus more compact. The second member can be disposed (fixed) on the first member.

  Application Example 8 In the flow channel structure according to the application example, the second member further includes a water-repellent surface at a portion where the second hole can be closed by contacting the valve member. Is preferred.

  The second hole is closed by the valve member coming into contact with the second member. A portion of the valve member that contacts the second member is provided with a water repellent surface and repels liquid. Therefore, it is difficult for liquid (solid component in the liquid) to be deposited on the portion of the valve member that contacts the second member.

  Application Example 9 In the flow channel structure according to the application example described above, the length of the contact portion is the same as the length of the second member or the length of the second member in the direction orthogonal to the bottom surface. Is also preferably short.

  Since the length of the contact portion of the first member is the same as the length of the second member or shorter than the length of the second member in the direction orthogonal to the bottom surface, the contact portion of the first member should be thinned. Can do.

  Application Example 10 In the flow channel structure according to the application example described above, a valve member that comes into contact with the second member, an axis that is fixed to the valve member and passes through the first hole and the second hole, And an elastic member that changes the position of the shaft to bring the valve member into contact with the second member.

The position of the shaft (position of the valve member) is changed by the elastic member, and the second hole (liquid channel) formed in the second member is opened and closed by bringing the valve member into contact with the second member. be able to. That is, the flow path structure including the valve member, the shaft, and the elastic member has a function as an on-off valve that opens and closes the liquid flow path.
Further, since the water repellent surface is formed at the portion of the second member where the valve member is separated and abutted, the liquid (component in the liquid) is difficult to deposit on the portion of the second member where the valve member is abutted and abutted. The flow path is stably opened and closed.

  Application Example 11 In the flow channel structure according to the application example described above, the concave portion has an inner wall surface disposed so as to surround the bottom surface, and the inner wall surface has an opening of the concave portion as the distance from the bottom surface increases. It is preferable to have a guide portion that is inclined so as to be wide.

The inner wall surface of the recess has a guide portion that is inclined so that the opening of the recess becomes wider as the distance from the bottom surface increases. That is, the guide part which has the inclined surface between the opening of a recessed part and the bottom face is provided so that the opening of a recessed part may become wide and a bottom face becomes narrow.
Since the opening of the recess is wide, it is easier to insert the second member into the recess than when the opening of the recess is narrow. Further, the inserted second member moves along the inclined slope (guide portion) and is guided to the bottom surface.
Therefore, by providing the guide portion, the second member can be easily arranged so as to come into contact with the bottom surface of the first member.

  Application Example 12 In the flow channel structure according to the application example, the first hole is disposed inside the second hole in a plan view, and the second member is the contact surface at the contact surface. It is preferable that the opening on the contact surface side of the second hole is fixed to the first member and wider than the opening on the contact surface side of the first hole.

  In plan view, the first hole is disposed inside the second hole, and the second hole is wider than the first hole. Therefore, compared with the case where the second hole is narrower than the first hole, the flow resistance of the liquid flowing through the second hole is reduced, and the liquid easily flows through the second hole.

  Application Example 13 In the flow channel structure according to the application example, it is preferable that the contact portion covers at least a part of a surface of the second member opposite to the contact surface.

  Since the contact portion covers at least part of the surface of the second member opposite to the contact surface, the contact portion covers at least part of the surface of the second member opposite to the contact surface. The second member can be more strongly fixed to the first member than when the cover is not covered.

  Application Example 14 A manufacturing method of a flow channel structure according to this application example includes a first member having a recess, a first hole formed in a bottom surface of the recess, and a contact surface that contacts the bottom surface. And a second member having a second hole that exposes the first hole, and determining a position of the second member in a direction along the bottom surface Forming a contact portion to be formed inside the recess, placing the second member on the first member so as to contact the contact portion, and the first member and the second member. And a fixing step.

  A contact portion that determines the position of the second member is formed inside the recess of the first member, the second member is disposed on the first member so as to contact the contact portion, and the first member and the second member are By fixing, the position of the second member relative to the first member in the direction along the bottom surface is determined in a self-aligning manner, and the first member is aligned with the first member with high accuracy. The member and the second member can be fixed.

  Application Example 15 In the method for manufacturing a flow channel structure according to the application example, the contact member is deformed after the placing step, and the surface of the second member opposite to the contact surface. It is preferable to have a step of covering at least a part of

  After the second member is disposed on the first member, the contact portion is deformed, and when the contact portion covers at least a part of the surface of the second member opposite to the contact surface, the contact portion is The second member can be more firmly fixed to the first member than when the second member does not cover at least a part of the surface opposite to the contact surface.

FIG. 2 is a schematic plan view of the ink jet recording apparatus according to the first embodiment. FIG. 3 is a schematic cross-sectional view of a recording head and a valve unit. FIG. 2 is a schematic cross-sectional view of a head body. The schematic sectional drawing which expanded the principal part of the valve unit when the ink flow path is closed. The schematic sectional drawing which expanded the principal part of the valve unit when the ink flow path is opened. 1 is a schematic cross-sectional view of a flow channel structure according to Embodiment 1. FIG. 3 is a process flow illustrating a method for manufacturing a flow channel structure according to the first embodiment. The schematic sectional drawing which shows the state of the flow-path structure after passing through the main processes shown in FIG. The schematic sectional drawing which shows the state of the flow-path structure after passing through the main processes shown in FIG. The schematic sectional drawing which shows the state of the flow-path structure after passing through the main processes shown in FIG. FIG. 4 is a schematic cross-sectional view of a flow channel structure according to a second embodiment. FIG. 5 is a schematic cross-sectional view of a flow channel structure according to Embodiment 3. 9 is a process flow showing a method for manufacturing a flow channel structure according to Embodiment 3. The schematic sectional drawing which shows the state of the flow-path structure after passing through the main processes shown in FIG. The schematic sectional drawing which shows the state of the flow-path structure after passing through the main processes shown in FIG. The schematic sectional drawing which shows the state of the flow-path structure after passing through the main processes shown in FIG. FIG. 6 is a schematic cross-sectional view of an on-off valve in a valve open state according to Embodiment 4. FIG. 6 is a schematic cross-sectional view of an on-off valve in a valve closing state according to Embodiment 4. FIG. 6 is a schematic cross-sectional view of a flow channel structure according to Modification 1. FIG. 10 is a schematic cross-sectional view of a flow channel structure according to Modification 2.

  Embodiments of the present invention will be described below with reference to the drawings. Such an embodiment shows one aspect of the present invention and does not limit the present invention, and can be arbitrarily changed within the scope of the technical idea of the present invention. In each of the following drawings, the scale of each layer or each part is made different from the actual scale so that each layer or each part can be recognized on the drawing.

(Embodiment 1)
<Printer overview>
FIG. 1 is a schematic plan view of an ink jet recording apparatus (hereinafter referred to as a printer) according to the first embodiment.
As shown in FIG. 1, the printer 1 includes a main body frame 2 having a substantially rectangular shape. A medium support member 3 that supports a recording medium (not shown) extends in the main body frame 2 along the longitudinal direction (main scanning direction) of the main body frame 2. On the medium support member 3, a recording medium such as paper is fed along the short side direction (sub-scanning direction) of the main body frame 2 by a paper feed mechanism (not shown). A bar-shaped guide shaft 4 extending along the main scanning direction is installed above the medium support member 3 in the main body frame 2.
In the following description, the main scanning direction is the X direction, the sub-scanning direction is the Y direction, and the thickness direction of the printer 1 orthogonal to the X direction and the Y direction is the Z direction. Further, the tip side of the arrow indicating the direction in the figure is the “(+) direction”, and the base end side is the “(−) direction”.
In addition, the planar view in this application corresponds to seeing from a X direction. Furthermore, the Y direction and the Z direction are examples of a “direction along the bottom surface”. The X direction is an example of a “direction perpendicular to the bottom surface”.

  A carriage 5 is supported on the guide shaft 4 so as to be capable of reciprocating in the X direction along the guide shaft 4. The carriage 5 is connected to a carriage motor 7 provided on the main body frame 2 via an endless timing belt 6 that is hung between a pair of pulleys 6 a provided on the main body frame 2. Thus, the carriage 5 is reciprocated along the guide shaft 4 by driving the carriage motor 7.

  An ink jet recording head (hereinafter referred to as a recording head) 20 and a valve unit 50 are mounted on the carriage 5.

  As will be described in detail later, a plurality of nozzle openings 334 (see FIG. 2) are provided on the surface of the recording head 20 facing the medium support member 3, and pressure generation (not shown) provided in the recording head 20 is generated. By driving the means, ink droplets are ejected from the respective nozzle openings 334 onto the recording medium fed onto the medium supporting member 3, thereby printing on the recording medium.

A tank holder 9 is provided on the X (+) direction side of the main body frame 2, and a plurality of ink tanks 8 as liquid storage means are detachably mounted on the tank holder 9. In the present embodiment, two ink tanks 8 are provided. Each ink tank 8 stores different types (colors) of ink.
Ink is an example of “liquid”.

  Each ink tank 8 mounted on the tank holder 9 is connected to the valve unit 50 via a supply pipe 10 such as a tube. The ink of each color stored in each ink tank 8 is pressurized by a pressure pump (not shown), and is pressurized and supplied to the valve unit 50 via the supply pipe 10.

  A maintenance unit 11 for performing maintenance such as cleaning of the recording head 20 is provided in the home position area of the carriage 5 disposed on the X (+) direction side in the main body frame 2. The maintenance unit 11 includes a cap 12 for contacting the recording head 20 so as to surround each nozzle opening 334 of the recording head 20 and receiving ink ejected from each nozzle opening 334 by flushing. And a suction pump (not shown) capable of sucking the inside of 12.

  Then, the cap 12 is sucked by a suction pump while the cap 12 is in contact with the recording head 20 so as to surround each nozzle opening 334 of the recording head 20, thereby increasing the viscosity of ink or bubbles from each nozzle opening 334. A so-called cleaning process for forcibly discharging the gas into the cap 12 is performed.

<Overview of recording head>
FIG. 2 is a schematic cross-sectional view of the recording head and the valve unit. FIG. 3 is a schematic cross-sectional view of the head body.
Hereinafter, the outline of the recording head 20 will be described with reference to FIGS. 2 and 3.

  As shown in FIG. 2, the recording head 20 includes a head main body 30 that ejects ink droplets, and a flow path member 40 that supplies ink to the head main body 30. Since two different types of ink are supplied to one recording head 20, two valve units 50 are fixed to the flow path member 40.

  As shown in FIG. 3, the head body 30 includes an actuator unit 31, a case 32 that can accommodate the actuator unit 31 therein, a flow path unit 33 that is fixed to one surface of the case 32, and the other surface of the case 32. And a wiring board 34 fixed to the board.

  The actuator unit 31 includes a piezoelectric actuator forming member 311 in which a plurality of piezoelectric actuators are arranged in parallel along the direction in which the nozzle openings 334 are arranged, and a distal end (one end) side of the piezoelectric actuator forming member 311 is a free end. The base end (other end) side has a fixed plate 312 fixed as a fixed end.

  The piezoelectric actuator forming member 311 is formed by laminating the piezoelectric material 313, the electrode forming material 314, and the electrode forming material 315 alternately. In the piezoelectric actuator forming member 311, for example, a plurality of slits are formed by a wire saw or the like, and the piezoelectric actuators are arranged in parallel by cutting the tip portion side into a comb-like shape.

  Here, the region fixed to the fixing plate 312 of the piezoelectric actuator forming member 311 is an inactive region that does not contribute to vibration, and is between the electrode forming material 314 and the electrode forming material 315 constituting the piezoelectric actuator forming member 311. When a voltage is applied, only the tip side region that is not fixed to the fixing plate 312 vibrates. The distal end surface of the piezoelectric actuator forming member 311 is fixed to the vibration plate 331.

  Each piezoelectric actuator of the actuator unit 31 is connected to a circuit board 318 such as a COF on which a driving circuit 317 such as a driving IC for driving the piezoelectric actuator is mounted.

The flow path unit 33 includes a flow path forming substrate 330, a vibration plate 331, and a nozzle plate 332.
A plurality of pressure generation chambers 333 are arranged in parallel on the flow path forming substrate 330, and a nozzle plate 332 having a nozzle opening 334 corresponding to each pressure generation chamber 333 and a vibration plate 331 on both sides of the flow path forming substrate 330. And is sealed. In this embodiment, two rows in which the pressure generation chambers 333 are arranged in parallel are provided. The flow path forming substrate 330 is formed with a manifold 336 that communicates with each pressure generation chamber 333 via an ink supply path 335 and serves as a common ink chamber for the plurality of pressure generation chambers 333 for each column. .

In addition, the tip of the piezoelectric actuator forming member 311 is fixed to each region of the vibration plate 331 facing each pressure generating chamber 333.
A compliance portion 337 is provided in a region corresponding to the manifold 336 of the vibration plate 331. The compliance unit 337 absorbs the pressure change by the deformation of the compliance unit 337 when a pressure change occurs in the manifold 336, and plays a role of constantly maintaining the pressure in the manifold 336.

  The case 32 is provided with an ink introduction path 321 for supplying ink from the valve unit 50 to the manifold 336. In the present embodiment, a total of two ink introduction paths 321 are provided, one for each manifold 336. The ink supplied from the ink tank 8 to the ink introduction path 321 via the valve unit 50 is supplied to the manifold 336 and distributed to each pressure generation chamber 333 via the ink supply path 335.

  The case 32 is provided with accommodating portions 322 corresponding to the rows of pressure generating chambers 333. In the present embodiment, two accommodating portions 322 are provided, and the actuator unit 31 is fixed in each accommodating portion 322.

  Further, a wiring board 34 is provided on the opposite side of the case 32 from the flow path unit 33, and the other end of the circuit board 318 having one end connected to the actuator unit 31 is connected to the wiring board 34. .

  In such a head body 30, the volume of each pressure generating chamber 333 is changed by deformation of the piezoelectric actuator forming member 311 (piezoelectric actuator) and the vibration plate 331, and ink droplets are ejected from a predetermined nozzle opening 334. Yes.

  As shown in FIG. 2, the flow path member 40 has a valve unit 50 fixed to one surface and a head body 30 fixed to the other surface. Ink from the valve unit 50 is supplied to the head body 30 via the flow path member 40.

  Specifically, the flow path member 40 is provided with an ink communication path 41. A filter 42 for removing foreign matters such as dust and bubbles contained in the ink and a supply needle 43 provided on the filter 42 are provided on one surface where the ink communication path 41 opens. The supply needle 43 is inserted into a valve unit 50 described later in detail. Ink from the valve unit 50 passes through the inside of the supply needle 43, and foreign matter is removed by the filter 42, and then is supplied to the head body 30 through the ink communication path 41.

<Overview of valve unit>
FIG. 4 is an enlarged schematic cross-sectional view of the main part of the valve unit when the ink flow path is closed. FIG. 5 is an enlarged schematic cross-sectional view of the main part of the valve unit when the ink flow path is opened.
Next, the outline of the valve unit 50 will be described with reference to FIGS. 4 and 5.

The valve unit 50 is an on-off valve that is provided in the middle of the flow path of ink and opens and closes the flow path of ink.
As shown in FIGS. 4 and 5, in the valve unit 50, the lid member 440, the first member 110, and the film member 410 are sequentially arranged in the X direction. The lid member 440, the first member 110, and the film member 410 are made of resin. Furthermore, the film member 410 has flexibility. The lid member 440 and the film member 410 are bonded to the first member 110 by, for example, heat welding.
The film member 410 is an example of an “elastic member”.

The first member 110 has a first concave portion (empty portion) 120 on the lid member 440 side, and a second concave portion (empty portion) 130 on the film member 410 side. The first recess 120 and the second recess 130 are partitioned by a partition wall 140. The opening of the first recess 120 is sealed by the lid member 440, and the first recess 120 becomes the liquid chamber 511. The opening of the second recess 130 is sealed by the film member 410, and the second recess 130 becomes the pressure adjustment chamber 513.
The first recess 120 is an example of a “recess”.

The second member 210 is disposed on the surface 141 on the X (−) direction side of the partition wall 140. Further, the flow path structure 100 is formed by the first member 110 and the second member 210. Details of the channel structure 100 will be described later.
Note that the surface 141 on the X (−) direction side of the partition wall 140 is an example of a “bottom surface” and is hereinafter referred to as a bottom surface 141. The channel structure 100 is an example of a “channel structure”, and the valve unit 50 including the channel structure 100 is also an example of a “channel structure”.

A first hole 111 passing through the vicinity of the center of the partition 140 is formed in the partition 140, and a second hole 211 passing through the vicinity of the center of the second member 210 is formed in the second member 210. When viewed from the X direction, the first hole 111 overlaps the second hole 211, and the first hole 111 is disposed inside the second hole 211. The liquid chamber 511 and the pressure adjustment chamber 513 are communicated with each other through the first hole 111 and the second hole 211.
The second hole 211 exposes the first hole 111, and an ink flow path between the liquid chamber 511 and the pressure adjustment chamber 513 is formed by the first hole 111 and the second hole 211.

  The liquid chamber 511 is communicated with the ink tank 8 through the inflow path 515 and the supply pipe 10. The pressure adjustment chamber 513 communicates with the ink communication path 41 of the flow path member 40 via the outflow path 517. The ink stored in the ink tank 8 passes through the inflow path 515, the liquid chamber 511, the second hole 211, the first hole 111, the pressure adjustment chamber 513, and the outflow path 517. The recording head 20 is supplied.

Between the lid member 440 and the film member 410, a spring 430, a valve body 450, and a pressure receiving plate 420 are disposed in this order.
One end of the spring 430 is fixed to the valve body 450 (flange portion 462), and the other end of the spring 430 is fixed to the lid member 440.

The valve body 450 includes a shaft 460 and a valve member 470. The shaft 460 includes a main body portion 461 and a flange portion 462 that is thicker than the main body portion 461. The main body 461 passes through the first hole 111 and the second hole 211. That is, the main body 461 is disposed across the liquid chamber 511 and the pressure adjustment chamber 513. The flange portion 462 is disposed in the liquid chamber 511.
A valve member 470 is fixed to the surface of the flange portion 462 facing the second member 210. The valve member 470 (valve body 450) is fixed to the shaft 460.

  The end of the main body 461 is disposed so as to contact the pressure receiving plate 420. The pressure receiving plate 420 is made of a material harder than the film member 410 and is fixed near the center of the film member 410. The pressure receiving plate 420 has a role of appropriately biasing the force due to the displacement of the film member 410 to the valve body 450.

In the valve unit 50, the positions of the shaft 460 and the valve member 470 of the valve body 450 are changed by the displacement of the film member 410, and the valve member 470 comes into contact with and separates from the water repellent film 213 of the second member 210. .
As described above, the valve unit 50 includes the valve member 470 that comes into contact with the second member 210, the shaft 460 that is fixed to the valve member 470 and passes through the first hole 111 and the second hole 211, and the position of the shaft 460. And a film member 410 that causes the valve member 470 to come into contact with and separate from the second member 210.

  The ink stored in the ink tank 8 is pressurized and supplied to the liquid chamber 511. For this reason, the ink in the liquid chamber 511 is in a pressurized state. The pressure of ink supplied to the liquid chamber 511 acts on the shaft 460 of the valve body 450. Further, the pressure acting on the ink in the pressure adjusting chamber 513 and the force urged by the pressure receiving plate 420 act on the shaft 460 of the valve body 450. The position of the valve body 450 is controlled by the pressure acting on the ink in the liquid chamber 511, the pressure acting on the ink in the pressure adjustment chamber 513, the force biased from the pressure receiving plate 420, and the like. Move back and forth in the direction.

  As shown in FIG. 4, in a non-printing state in which ink is not ejected from the recording head 20 to the recording medium, the valve member 470 comes into contact with the second member 210, the second hole 211 is closed, and the pressure adjustment with the liquid chamber 511 is performed. The ink flow path to the chamber 513 is closed.

  In contrast, for example, when ink is consumed by ink ejection or external suction (for example, cleaning of the recording head 20) and the ink in the pressure adjustment chamber 513 decreases, the ink acts on the ink in the pressure adjustment chamber 513. The pressure decreases, the film member 410 is displaced toward the pressure adjusting chamber 513, and the pressure receiving plate 420 fixed to the film member 410 presses the shaft 460 of the valve body 450. Then, as shown in FIG. 5, the valve member 470 is separated from the second member 210, and the ink flow path between the liquid chamber 511 and the pressure adjustment chamber 513 is opened.

  When ink in a non-printing state or the like is not consumed, the ink flow path in the valve unit 50 is closed, so that the ink supplied under pressure from the ink tank 8 on the upstream side of the valve unit 50 50 is not supplied to the recording head 20 on the downstream side of 50.

  On the other hand, when ink for printing or cleaning is consumed, the ink in the pressure adjustment chamber 513 gradually decreases. As the ink in the pressure adjustment chamber 513 decreases, the pressure decreases and the pressure adjustment chamber becomes negative. As a result, the film member 410 is displaced in the direction in which the ink flow path is opened, and the ink is supplied from the liquid chamber 511 to the pressure adjustment chamber 513. In this way, the pressure-supplied ink from the ink tank 8 is supplied to the recording head 20 on the downstream side of the valve unit 50. When the negative pressure in the pressure adjustment chamber 513 is eliminated by the inflow of ink into the pressure adjustment chamber 513 of the valve unit 50, the ink flow path is closed, and the ink is supplied to the recording head 20. Stopped.

  During the printing operation, the valve body 450 is slightly opened according to the consumption of ink, and the pressure adjustment chamber 513 is sequentially replenished with ink. Further, the ink pressure fluctuation in the upstream liquid chamber 511 is limited to be within a certain range by opening and closing the valve body 450, and is separated from the ink pressure change in the downstream pressure adjustment chamber 513. It is. Therefore, even if a pressure change occurs upstream from the valve body 450, the downstream side is not affected. For this reason, the pressure acting on the ink in the pressure adjustment chamber 513 of the valve unit 50 is controlled within a certain range, so that the ink supply from the pressure adjustment chamber 513 to the recording head 20 is favorably performed.

  Thus, the valve unit 50 has a pressure adjustment function (flow pressure adjustment mechanism), and controls the flow pressure of the ink supplied to the recording head 20 within an appropriate range. In other words, the valve unit 50 is a valve device having a pressure adjustment function.

In the valve unit 50, it is important that the second member 210 is correctly arranged and fixed with respect to the first member 110. When the position of the second member 210 with respect to the first member 110 changes, for example, the second member 210 contacts the valve body 450, the valve body 450 does not operate correctly, and ink is not properly supplied to the recording head 20. Trouble occurs.
Since the present embodiment has an excellent configuration capable of easily and correctly arranging the second member 210 with respect to the first member 110, details thereof will be described below.

<Outline of flow channel structure>
FIG. 6 is a schematic cross-sectional view of the flow path structure in the region A surrounded by the two-dot chain line in FIG. That is, FIG. 6 is a schematic cross-sectional view of the flow channel structure 100 according to the present embodiment.
Next, the outline of the flow channel structure 100 according to the present embodiment will be described with reference to FIG.
As described above, the flow path structure 100 includes the first member 110 and the second member 210 and is a component that forms the ink flow path of the valve unit 50.

As shown in FIG. 6, the first member 110 has a first recess 120 having a bottom surface 141 and inner wall surfaces 121, 122, 123. The inner wall surfaces 121, 122, 123 are arranged so as to surround the bottom surface 141. The first inner wall surface 121 is disposed on the bottom surface 141 side, the third inner wall surface 123 is disposed on the lid member 440 side, and the second inner wall surface 122 is disposed between the first inner wall surface 121 and the third inner wall surface 123. ing. That is, the first recess 120 corresponds to a region (empty portion) surrounded by the bottom surface 141, the first inner wall surface 121, the second inner wall surface 122, and the third inner wall surface 123.
In other words, the first member 110 is formed in the first recess 120 that forms the liquid chamber 511 that stores ink between the first member 110 and the bottom surface 141 of the first recess 120, and serves as the ink flow path. The first inner wall surface 121 is an example of a “contact portion”, and the second inner wall surface 122 is an example of a “guide portion”.

The first inner wall surface 121 and the third inner wall surface 123 have a cylindrical shape, and the diameter of the third inner wall surface 123 is wider than the diameter of the first inner wall surface 121, and both are arranged to be orthogonal to the bottom surface 141. . The second inner wall surface 122 has a truncated cone shape that is wide on the third inner wall surface 123 side and narrowed on the first inner wall surface 121 side.
In other words, the inner wall surfaces 121, 122, and 123 arranged so as to surround the bottom surface 141 have a portion (second inner wall surface 122) that is inclined so that the opening becomes wider as the distance from the bottom surface 141 increases.

The second member 210 is a cylindrical member, and is disposed inside a region surrounded by the bottom surface 141 and the first inner wall surface 121. The second member 210 passes through the main body portion 212 disposed on the bottom surface 141 side, the water repellent film 213 disposed on the opposite side of the bottom surface 141, and the main body portion 212 and the water repellent film 213 to expose the first hole 111. And a second hole 211 to be made. As described above, the valve member 470 of the valve body 450 contacts the water repellent film 213 of the second member 210 and closes the second hole 211. In other words, the second member 210 has the water-repellent film 213 at a site where the second hole 211 can be closed when the valve member 470 comes into contact therewith.
The water repellent film 213 is an example of a “water repellent surface”.

  The water repellent film 213 has a liquid repellency (water repellency) with respect to ink more than the main body 212, and the surface of the second member 210 on which the valve member 470 separates and comes into contact (the side opposite to the bottom surface 141 of the main body 212). Surface). The water repellent film 213 may be formed on a surface other than the surface where the valve member 470 of the second member 210 is separated and brought into contact. For example, the water repellent film 213 may be formed so as to cover the entire body 212.

  The water repellent film 213 is not particularly limited as long as it has liquid repellency with respect to ink. For example, a metal film containing a fluorine-based polymer or a metal alkoxide molecular film having liquid repellency can be used. The water repellent film 213 made of a metal film containing a fluorine-based polymer can be formed, for example, by performing eutectoid plating directly on the surface of the main body 212. The water-repellent film 213 made of a metal alkoxide molecular film is formed, for example, by mixing a silane coupling agent such as alkoxysilane with a solvent such as thinner to form a metal alkoxide solution, and immersing the main body 212 in the metal alkoxide solution. Thus, a molecular film in which metal alkoxide is polymerized can be formed.

When the water repellent film 213 is provided on the surface of the second member 210 on which the valve member 470 comes into contact with and separates, the surface of the second member 210 on which the valve member 470 contacts and separates repels ink, thereby suppressing ink accumulation. . If ink accumulates on the surface of the second member 210 on which the valve member 470 contacts and separates, it is difficult to block the second hole 211 with the accumulated ink even if the valve member 470 contacts the second member 210. The trouble that becomes. Therefore, if the ink hardly accumulates on the surface of the second member 210 on which the valve member 470 comes into contact with and separates, such a problem is less likely to occur. By causing the valve member 470 to abut on the second member 210, the second member 210 is in contact with the second member 210. The hole 211 (the ink flow path between the liquid chamber 511 and the pressure adjusting chamber 513) can be properly closed.
Therefore, the valve unit 50 as the valve device operates stably.

  Moreover, the material which comprises the main-body part 212 of the 2nd member 210 is not specifically limited, For example, metal materials, such as a resin material and stainless steel (SUS), glass ceramics, a silicon single crystal substrate, etc. can be used. If the main body 212 is made of a material that swells with ink, the main body 212 does not swell uniformly, and the amount of swelling may vary. If the swelling amount of the main body 212 varies, it becomes difficult for the valve member 470 to be in close contact with the water repellent film 213, the sealing performance cannot be maintained, and ink leakage may occur. For this reason, it is preferable that the main-body part 212 of the 2nd member 210 is comprised with the material which is hard to swell with an ink.

The main body 212 of the second member 210 includes a contact surface 220 that contacts the bottom surface 141, and a first side surface 221 and a second side surface 222 that intersect the contact surface 220. The first side surface 221 is an inner wall surface of the second hole 211 penetrating the center of the main body 212, and a portion surrounded by the first side surface 221 becomes the second hole 211. The second side surface 222 is an outer wall surface of the second member 210.
In other words, the second member 210 has a first side surface 221 and a second side surface 222 that intersect the contact surface 220 across the contact surface 220, and the first side surface 221 has the second hole 211. The second side surface 222 defines the outer shape of the second member 210.

The bottom surface 141 of the first member 110 contacts the contact surface 220 of the second member 210 and determines the position of the second member 210 relative to the first member 110 in the direction orthogonal to the bottom surface 141. The first inner wall surface 121 of the first member 110 abuts on the second side surface 222 of the second member 210 and determines the position of the second member 210 relative to the first member 110 in the direction along the bottom surface 141.
That is, the first member 110 has a bottom surface 141 that determines the position of the second member 210 relative to the first member 110 in a direction orthogonal to the bottom surface 141, and the second member 210 relative to the first member 110 in the direction along the bottom surface 141. And a first inner wall surface 121 for determining the position.

  Since the second member 210 is aligned in a self-aligning manner by the components of the first member 110 (the bottom surface 141 and the first inner wall surface 121), the second member 210 can be compared with the first member 110 without using an alignment device. Thus, the second member 210 can be aligned with high accuracy or simply.

An adhesive 240 is disposed between the bottom surface 141 of the first member 110 and the contact surface 220 of the second member 210, and the second member 210 is fixed to the first member 110 by the adhesive 240. That is, the second member 210 is fixed to the first member 110 by the contact surface 220.
Note that the method of fixing the second member 210 to the first member 110 is not limited to the method of fixing by the adhesive 240, and is, for example, a method of fixing by welding by heat or vibration, or a method of, for example, heat caulking. Also good.

  Note that the method of fixing with the adhesive 240 reduces the influence of external force and heat acting on the second member 210 as compared with a method of fixing by welding by heat or vibration or a method of heat caulking. The positional deviation with respect to the first member 110 can be reduced, and the second member 210 can be fixed to the first member 110 with high accuracy.

The partition wall 140 is formed with a first hole 111 penetrating the vicinity of the center of the partition wall 140. As described above, when viewed from the X direction, the first hole 111 overlaps the second hole 211, and the first hole 111 is disposed inside the second hole 211. Furthermore, the opening on the contact surface 220 side of the second hole 211 is wider than the opening on the contact surface 220 side of the first hole 111. Therefore, the second hole 211 is wider than the first hole 111, and the flow resistance of the ink flowing through the second hole 211 is smaller than when the second hole 211 is narrower than the first hole 111. In addition, the ink easily flows in the second hole 211.
Furthermore, the first member 110 has a tapered portion 112 that increases the diameter of the first hole 111 as it approaches the bottom surface 141.

<Method for Manufacturing Channel Structure>
FIG. 7 is a process flow showing the manufacturing method of the flow channel structure according to the present embodiment. 8A to 8C are diagrams corresponding to FIG. 4 and are schematic cross-sectional views showing the state of the flow channel structure after the main steps shown in FIG. Further, in FIG. 8C, the valve body 450 is shown by a two-dot chain line.
Hereinafter, with reference to FIG. 7 and FIGS. 8A to 8C, a method for manufacturing the flow path structure 100 according to the present embodiment will be described.

As shown in FIG. 7, in the method of manufacturing the flow path structure 100 according to the present embodiment, the step of forming the first recess 120 in the first member 110 (Step S <b> 1) and the adhesive 240 in the first recess 120. A step of applying (step S2), a step of placing the second member 210 in the first recess 120 of the first member 110 (step S3), and a step of curing the adhesive 240 (step S4). .
Step S <b> 1 is an example of “a step of forming the contact portion inside the recess”. Steps S <b> 2 and S <b> 3 are an example of “a step of arranging the second member on the first member”. Step S4 is an example of a “step of fixing the first member and the second member”.

  As shown in FIG. 8A, in step S1, a thermoplastic resin is molded using a plurality of molds, and the first recess 120, the second recess 130, the first hole 111, the outflow passage 517, The first member 110 having the structure is formed. As the thermoplastic resin, polyolefin resin, polystyrene resin, polyacrylic resin, ABS resin, vinyl chloride resin, polycarbonate resin and the like can be used. In this embodiment, a polypropylene resin is used as the thermoplastic resin.

  The first recess 120 has a bottom surface 141, a first inner wall surface 121, a second inner wall surface 122, and a third inner wall surface 123. In the first recess 120, the first inner wall surface 121, the second inner wall surface 122, and the third inner wall surface 123 are sequentially arranged from the bottom surface 141 side, and the diameter of the third inner wall surface 123 is the diameter of the first inner wall surface 121. The second inner wall surface 122 is inclined so that the diameter of the second inner wall surface 122 increases as the distance from the bottom surface 141 increases. The tapered portion 112 is formed so that the diameter of the first hole 111 increases as it approaches the bottom surface 141.

  As shown in FIG. 8B, in step S2, a thermosetting adhesive 240 is applied to the bottom surface 141 of the first recess 120 using, for example, a seal dispenser.

In step S <b> 3, the second member 210 is inserted from the opening of the third inner wall surface 123 of the first recess 120. Specifically, the second member 210 is gripped, and the second member 210 is inserted from the opening of the third inner wall surface 123 in the direction (X direction) indicated by the arrow in the figure.
In addition, the direction (X direction) shown by the arrow in a figure is a direction where gravity acts.

  Since the force (gravity) in the X direction acts on the second member 210 inserted inside the third inner wall surface 123, the second member 210 moves in the X direction by its own weight. For this reason, the second member 210 slides on the second inner wall surface 122 and moves in the X direction, and is arranged in a region surrounded by the first inner wall surface 121 and the bottom surface 141. That is, the second member 210 is guided to the region surrounded by the first inner wall surface 121 and the bottom surface 141 by the second inner wall surface 122.

  Since the diameter of the third inner wall surface 123 is wider than the diameter of the first inner wall surface 121, the second member 210 can be easily inserted into the third inner wall surface 123. Since the second inner wall surface 122 guides the second member 210 to the region surrounded by the first inner wall surface 121 and the bottom surface 141, the second inner wall surface 122 is compared with the case where the second inner wall surface 122 is not provided. It can be easily arranged in a region surrounded by the first inner wall surface 121 and the bottom surface 141.

  When the first member 110 is vibrated after the second member 210 is inserted through the opening of the third inner wall surface 123, the second member 210 slides (moves) more smoothly on the second inner wall surface 122. Thus, the second member 210 can be more easily disposed in a region surrounded by the bottom surface 141 of the first recess 120 and the first inner wall surface 121.

When the second member 210 is disposed in a region surrounded by the bottom surface 141 and the first inner wall surface 121, the position of the second member 210 with respect to the first member 110 in the direction orthogonal to the bottom surface 141 is determined by the bottom surface 141. The position of the second member 210 relative to the first member 110 in the direction along 141 is determined by the first inner wall surface 121.
That is, since the second member 210 is aligned in a self-aligned manner by the components (the bottom surface 141 and the first inner wall surface 121) of the first member 110 without using the alignment device, the second member 210 is a device in the case of using the alignment device. The influence of the error is eliminated, and the alignment is performed with higher accuracy than the alignment using the alignment apparatus.

As shown in FIG. 8C, in step S4, for example, the second member 210 is pressed to spread the adhesive 240, and the adhesive 240 is placed between the bottom surface 141 of the partition wall 140 and the contact surface 220 of the second member 210. Deploy. In addition, since the adhesive 240 is also spread by the weight of the second member 210, the pressing of the second member 210 may be omitted.
Subsequently, heat treatment is performed on the adhesive 240, the adhesive 240 is cured, and the first member 110 and the second member 210 are fixed by the adhesive 240. As a result, the second member 210 is fixed to the first member 110 at the contact surface 220.

Due to the pressing of the second member 210 in step S4, the excessive adhesive 240 may protrude from the first side surface 221 as indicated by a broken line in the drawing. Excess adhesive 240 that protrudes from the first side surface 221 travels along the surface between the end of the second member 210 on the second hole 211 side and the end of the first member 110 on the first hole 111 side, The valve body 450 indicated by a two-dot chain line in the figure spreads to the side where it is arranged. If the excess adhesive 240 protruding from the first side surface 221 interferes with the valve body 450, the operation of the valve body 450 is hindered and the valve unit 50 malfunctions.
Hereinafter, a surface disposed between the end of the second member 210 on the second hole 211 side and the end of the first member 110 on the first hole 111 side is referred to as a moving surface of the adhesive 240.

  In the present embodiment, the moving surface of the adhesive 240 is composed of a flat surface (bottom surface 141) and a slope (tapered portion 112). When the moving surface of the adhesive 240 is configured by a flat surface (bottom surface 141) and a slope (tapered portion 112), the moving surface of the adhesive 240 is configured by only the flat surface (bottom surface 141). The moving surface can be widened, and the moving distance of the adhesive 240 on the moving surface of the adhesive 240 can be increased. Furthermore, when the inclined surface (tapered portion 112) is provided on the moving surface of the adhesive 240, the moving direction of the adhesive 240 intersects with the moving direction of the adhesive 240 as compared with the case where the moving surface of the adhesive 240 is configured by only a flat surface (bottom surface 141). The space in the direction (X direction) can be widened, and more adhesive 240 can be fastened (accommodated) on the moving surface of the adhesive 240. As a result, compared to the case where the moving surface of the adhesive 240 is configured only by a flat surface (bottom surface 141), the extra adhesive 240 is fastened to the moving surface of the adhesive 240, and the extra adhesive 240 is attached to the first member 110. It is possible to make it difficult to protrude from the end on the first hole 111 side.

  As described above, by providing the tapered portion 112 in the first hole 111, it is difficult for the excess adhesive 240 to protrude from the end of the first member 110 on the first hole 111 side, and the excess adhesive 240 is not removed from the valve body. The malfunction of the valve body 450 (valve unit 50) due to interference with 450 can be suppressed.

  As described above, with the manufacturing method according to the present embodiment, the second member 210 is aligned with the first member 110 with high accuracy, and the valve body 450 (valve unit 50) can operate normally. A simple channel structure 100 can be manufactured stably.

(Embodiment 2)
FIG. 9 is a diagram corresponding to FIG. 6 and a schematic cross-sectional view of the flow channel structure according to the second embodiment. In FIG. 9, the valve body 450 is illustrated by a two-dot chain line.
The valve unit according to the present embodiment and the valve unit 50 according to the first embodiment have the same flow path structure, and the others are the same.
Hereinafter, with reference to FIG. 9, the flow path structure 100 </ b> A according to the present embodiment will be described focusing on differences from the flow path structure 100 according to the first embodiment. Moreover, about the same component as Embodiment 1, the same code | symbol is attached | subjected and the overlapping description is abbreviate | omitted.

As shown in FIG. 9, the flow path structure 100A according to the present embodiment includes a first member 110A and a second member 210A.
110 A of 1st members are cylindrical members, and the 1st recessed part 120A, the 2nd recessed part 130, and the 1st hole 111A are formed. In the first member 110A, the shape of the first recess 120A and the shape of the first hole 111A are different from those of the first embodiment.

120 A of 1st recessed parts respond | correspond to the area | region (empty part) enclosed by 121 A of 1st inner wall surfaces, the bottom face 141A, the 4th inner wall face 124, and the bottom face 141B. In the first recess 120A, the second inner wall surface 122 and the third inner wall surface 123, which are components of the first recess 120 of the first embodiment, are omitted, and a bottom surface 141B and a fourth inner wall surface 124 are newly added. It has a configuration.
The fourth inner wall surface 124 is an example of a “contact portion”.

  The first inner wall surface 121 </ b> A corresponds to the first inner wall surface 121 of the first embodiment, and is longer in the X direction than the first inner wall surface 121 of the first embodiment. The bottom surface 141A corresponds to the bottom surface 141 of the first embodiment, and the length in the Z direction is shorter than the bottom surface 141 of the first embodiment.

  The fourth inner wall surface 124 faces the first inner wall surface 121A across the bottom surface 141A, and is disposed so as to be orthogonal to the bottom surface 141A, similarly to the first inner wall surface 121A. The length of the fourth inner wall surface 124 in the X direction is shorter than the length of the first inner wall surface 121A in the X direction.

The bottom surface 141B is disposed on the first hole 111A side with respect to the bottom surface 141A, and protrudes in the X (−) direction side as compared with the bottom surface 141A. Therefore, a step is formed between the bottom surface 141A and the bottom surface 141B, and the wall surface of the step between the bottom surface 141B and the bottom surface 141A becomes the fourth inner wall surface 124.
The fourth inner wall surface 124 and the bottom surface 141B form a cylindrical convex portion.

  111 A of 1st holes are formed so that the center vicinity of the cylindrical convex part formed with the 4th inner wall surface 124 and the bottom face 141B may be penetrated. 111 A of 1st holes respond | correspond to what deleted the taper part 112 from the 1st hole 111 of Embodiment 1. FIG. For this reason, 111 A of 1st holes are comprised by the surface along the X direction.

  The second member 210A is a cylindrical member having a second hole 211A near the center. The length (outer dimension) in the Z direction of the second member 210A is shorter than the length (outer dimension) in the Z direction of the second member 210 of the first embodiment. The length (thickness) in the X direction of the second member 210A is shorter (thin) than the length (thickness) in the X direction of the second member 210 of the first embodiment. Accordingly, the second member 210A is reduced in size and thickness as compared with the second member 210 of the first embodiment.

  The diameter of the second hole 211A of the second member 210A is substantially the same as the diameter of the cylindrical convex portion formed by the fourth inner wall surface 124 and the bottom surface 141B. The position of the second member 210A relative to the first member 110A is determined by fitting the second hole 211A into the cylindrical convex portion formed by the fourth inner wall surface 124 and the bottom surface 141B.

  The main body portion 212A of the second member 210A has a contact surface 220A that contacts the bottom surface 141A, and a first side surface 221A and a second side surface 222A that intersect the contact surface 220A. The first side surface 221A is an inner wall surface of the second hole 211A penetrating the center of the main body 212A, and a portion surrounded by the first side surface 221A becomes the second hole 211A, and the first side surface 221A is the second wall surface. A hole 211A is defined.

  When the second hole 211A is fitted into a cylindrical convex portion formed by the fourth inner wall surface 124 and the bottom surface 141B, the contact surface 220A of the second member 210A contacts the bottom surface 141A, and the second hole 211A. The first side surface 221 </ b> A is disposed so as to contact the fourth inner wall surface 124.

The bottom surface 141A of the first member 110A contacts the contact surface 220A of the second member 210A, and determines the position of the second member 210A with respect to the first member 110A in the direction orthogonal to the bottom surface 141A. The fourth inner wall surface 124 of the first member 110A abuts (fits) with the first side surface 221A of the second member 210A, and determines the position of the second member 210A relative to the first member 110A in the direction along the bottom surface 141A. .
The second member 210A does not use the alignment device, and is aligned in a self-aligning manner by the components (the bottom surface 141A and the fourth inner wall surface 124) of the first member 110A, thereby eliminating the influence of the device error of the alignment device. In addition, alignment can be performed with higher accuracy than when alignment is performed using an alignment apparatus.

The adhesive 240 is disposed between the contact surface 220A of the second member 210A and the bottom surface 141A of the first member 110A, and the first member 110A and the second member 210A are fixed by the adhesive 240.
In the first embodiment, the excess adhesive 240 protrudes from the first side surface 221 (the surface on the side where the valve body 450 is disposed), and may interfere with the valve body 450 when the amount of the excess adhesive 240 is large. was there.

  In the present embodiment, excess adhesive 240 is removed from the second side surface 222A (the surface on the side opposite to the surface (first side surface 221A) on which the valve body 450 is disposed) as shown by the broken line in the drawing. Stick out. Since the excess adhesive 240 protrudes to the side opposite to the side where the valve body 450 is disposed, there is no possibility of interfering with the valve body 450 even when the amount of the excess adhesive 240 is large.

  Further, the length of the fourth inner wall surface 124 in the X direction is the same as the length of the second member 210A in the X direction or shorter than the length of the second member 210A in the X direction. Therefore, the bottom surface 141B of the first member 110A does not protrude from the second member 210A to the X (−) direction side. Therefore, the bottom surface 141B of the first member 110A inhibits the contact between the valve member 470 of the valve body 450 and the water repellent film 213A of the second member 210A, and suppresses the problem that the second hole 211A is not blocked. Can do. Therefore, compared with the first embodiment, the second hole 211A can be normally opened and closed while the second member 210A is reduced in size and thickness.

(Embodiment 3)
<Outline of flow channel structure>
FIG. 10 is a diagram corresponding to FIG. 4 and a schematic cross-sectional view of the flow channel structure according to the third embodiment. The flow path structure 100B according to the present embodiment and the flow path structure 100 according to the first embodiment are different in the shape of the first recess, and the others are the same.
Hereinafter, with reference to FIG. 10, the flow path structure 100 </ b> B according to the present embodiment will be described focusing on differences from the flow path structure 100 according to the first embodiment. Moreover, about the same component as Embodiment 1, the same code | symbol is attached | subjected and the overlapping description is abbreviate | omitted.

  As shown in FIG. 10, the flow channel structure 100 </ b> B according to the present embodiment includes a first member 110 </ b> B and a second member 210. The first member 110B is formed with a first recess 120B, a second recess 130, a first hole 111, and an outflow path 517.

The first recess 120B has a first inner wall surface 121B, a bottom surface 141C, and a protrusion 150. The first concave portion 120B corresponds to a region (empty portion) surrounded by the first inner wall surface 121B, the bottom surface 141C, and the convex portion 150.
The convex portion 150 is an example of a “contact portion”.

  The first inner wall surface 121B corresponds to the first inner wall surface 121 of the first embodiment. The bottom surface 141C corresponds to the bottom surface 141 of the first embodiment. In other words, the first recess 120B has a configuration in which the second inner wall surface 122 and the third inner wall surface 123, which are components of the first recess 120 of the first embodiment, are omitted, and a convex portion 150 is newly added. ing.

  The convex portion 150 is disposed on the bottom surface 141C inside the first concave portion 120B, and projects from the bottom surface 141C to the X (−) direction side. The second member 210 is disposed in a region surrounded by the bottom surface 141 </ b> C and the convex portion 150.

  The bottom surface 141C of the first member 110B contacts the contact surface 220 of the second member 210, and determines the position of the second member 210 relative to the first member 110B in the direction orthogonal to the bottom surface 141C. The convex 150 abuts on the second side surface 222 of the second member 210 and determines the position of the second member 210 relative to the first member 110B in the direction along the bottom surface 141C.

  Since the second member 210 is aligned in a self-aligned manner by the components (the bottom surface 141C and the convex portion 150) of the first member 110B without using the alignment device, the influence of the device error of the alignment device is eliminated. Alignment can be performed with higher accuracy than when alignment is performed using an alignment apparatus.

  Further, the convex portion 150 covers a part of the water repellent film 213 of the second member 210. In other words, in the flow channel structure 100B according to the present embodiment, the convex portion 150 of the first member 110B is at least a part of the surface (water repellent film 213) opposite to the contact surface 220 of the second member 210. It has the structure which covers. The protrusion 150 covers at least a part of the water repellent film 213 of the second member 210, so that the second member 210 can be more strongly fixed to the first member 110B.

<Method for Manufacturing Channel Structure>
FIG. 11 is a process flow showing the flow path structure manufacturing method according to the present embodiment. 12A to 12C are schematic cross-sectional views showing the state of the flow channel structure after the main steps shown in FIG.
Next, the manufacturing method according to this embodiment will be described with reference to FIG. 11 and FIGS. 12A to 12C.

  As shown in FIG. 11, in the method of manufacturing the flow channel structure according to the present embodiment, the step of forming the first recess 120 </ b> B in the first member 110 </ b> B (Step S <b> 11), A step (step S2), a step of placing the second member 210 in the first recess 120B of the first member 110B (step S3), a step of curing the adhesive 240 (step S4), and the convex portion 150. And a step of performing a heat treatment (Step S12).

Step S11 is an example of “a step of forming the contact portion inside the recess”. Steps S <b> 2 and S <b> 3 are an example of “a step of arranging the second member on the first member”. Step S4 is an example of a “step of fixing the first member and the second member”. Step S12 is an example of “a step of deforming the contact portion to cover the surface of the second member opposite to the contact surface”. That is, in the flow path structure manufacturing method according to the present embodiment, after step S2 and step S3, which are examples of the “step of arranging the second member on the first member”, the “contact portion is deformed, Step S12 which is an example of “the step of covering the surface of the second member opposite to the contact surface” is included.
Since step S2, step S3, and step S4 are the same as those in the first embodiment, description thereof is omitted.

As shown in FIG. 12A, in step S11, a thermoplastic resin is molded using a plurality of molds, and the first recess 120B, the second recess 130, the first hole 111, the outflow passage 517, The 1st member 110B which has is formed. Further, in step S11, the convex portion 150 protruding in the X (−) direction from the bottom surface 141C is formed in the first concave portion 120B.
In step S <b> 3, the second member 210 is disposed in a region surrounded by the bottom surface 141 </ b> C and the convex portion 150.

As shown in FIG. 12B, the heat tool 250 includes a holder 251 and a heating element 252 that generates heat when energized. The holder 251 is configured of a material that supports the heating element 252 and easily transfers heat.
In step S <b> 12, the holder 251 (heat tool 250) is brought close to the convex portion 150 while adjusting the position of the heat tool 250 in a state where the heat generating body 252 (heat tool 250) generates heat.

With the convex portion 150 protruding from the second member 210 in the X (−) direction, the second member 210 is disposed in a region surrounded by the bottom surface 141C and the convex portion 150, and the holder 251 (heat tool 250) is convex. When approaching the part 150, the convex part 150 is selectively heated.
In step S12, the heat tool 250 is brought into contact with the convex portion 150, the convex portion 150 is selectively heated, and the convex portion 150 is thermally deformed. As a result, as shown in FIG. 12C, it is possible to form a convex portion 150 that contacts the second side surface 222 of the second member 210 and covers at least a part of the water repellent film 213 of the second member 210.
In addition to the heat tool 250, the convex portion 150 can be selectively heated by, for example, checking the convex portion 150 with laser light.

(Embodiment 4)
FIG. 13 is a schematic cross-sectional view of the on-off valve in a valve open state. FIG. 14 is a schematic cross-sectional view of the on-off valve in a closed state.
The printer 1 according to the first embodiment has a valve device (valve unit 50) that opens and closes an ink flow path between the ink tank 8 and the recording head 20. The valve device (valve unit 50) is for supplying ink to the recording head 20 as appropriate. When the ink is ejected from the recording head 20 and the ink pressure in the recording head 20 is lowered, the valve device is opened. 20 is an on-off valve that closes when ink is supplied to the recording head 20 and ink is supplied to the recording head 20 and the ink pressure in the recording head 20 increases.

The printer according to this embodiment includes another valve device (open / close valve 60) between the ink tank 8 and the valve unit 50. The other valve device (open / close valve 60) is for closing the ink flow path connected to the recording head 20 when performing choke cleaning.
That is, the printer according to the present embodiment has a configuration in which the on / off valve 60 is added to the printer 1 according to the first embodiment.

The outline of the newly added on-off valve will be described below with reference to FIGS. 13 and 14.
As shown in FIGS. 13 and 14, the on-off valve 60 includes a flow path structure 70 and a film member 90. The flow channel structure 70 includes a first member 71 and a second member 81.

  The first member 71 is a member formed of, for example, a thermoplastic resin, and includes a recess 72, a first hole 73, and an inflow path 61. The first hole 73 is connected to the inflow path 515 of the valve unit 50. The inflow path 61 is connected to the supply pipe 10.

The recess 72 has a bottom surface 74, a first inner wall surface 75, and a second inner wall surface 76. That is, the recess 72 corresponds to a region (empty portion) surrounded by the bottom surface 74, the first inner wall surface 75, and the second inner wall surface 76. The first inner wall surface 75 is disposed on the bottom surface 74 side, and the second inner wall surface 76 is disposed on the film member 90 side. The first hole 73 is formed so as to penetrate near the center of the bottom surface 74. In the first hole 73, a tapered portion 77 is formed on the bottom surface 74 side. Due to the taper portion 77, the diameter of the first hole 73 increases as it approaches the bottom surface 74.
The first inner wall surface 75 is an example of a “contact portion”.

The second member 81 includes a main body portion 82 disposed on the bottom surface 74 side, a water repellent film 83 disposed on the opposite side of the bottom surface 74, and a second hole 84 that penetrates the main body portion 82 and the water repellent film 83. Have. The main body 82 is made of a material that does not easily swell with ink, such as stainless steel (SUS). The water repellent film 83 may be any film that has liquid repellency with respect to ink. For example, a metal film containing a fluorine-based polymer or a metal alkoxide molecular film having liquid repellency may be used.
The second hole 84 is wider than the first hole 73, and the ink flows more easily in the second hole 84 than in the case where the second hole 84 is narrower than the first hole 73. .

  The second member 81 has a contact surface 85 that contacts the bottom surface 74 and a side surface 86 that contacts the first inner wall surface 75. The second member 81 is disposed in a region surrounded by the bottom surface 74 of the first member 71 and the first inner wall surface 75.

  The bottom surface 74 of the first member 71 is in contact with the contact surface 85 of the second member 81 and determines the position of the second member 81 relative to the first member 71 in the direction orthogonal to the bottom surface 74. The first inner wall surface 75 of the first member 71 is in contact with the side surface 86 of the second member 81 and determines the position of the second member 81 relative to the first member 71 in the direction along the bottom surface 74.

  The second member 81 is not self-aligned by the components (the bottom surface 74 and the first inner wall surface 75) of the first member 71 without using the alignment device, so that the influence of the device error of the alignment device is eliminated. In addition, alignment can be performed with higher accuracy than when alignment is performed using an alignment apparatus.

  An adhesive 240 is disposed between the bottom surface 74 of the first member 71 and the contact surface 85 of the second member 81, and the first member 71 and the second member 81 are bonded together by the adhesive 240. That is, the second member 81 is bonded to the first member 71 at the contact surface 85.

  The film member 90 is a synthetic resin film, for example, and has gas barrier properties and flexibility. The film member 90 is bonded to the concave portion 72 of the first member 71 in a state where atmospheric pressure is applied to the outer surface of the film member 90, and the liquid chamber 93 that stores ink is formed by the film member 90 and the concave portion 72.

The film member 90 of the on-off valve 60 is separated from the water repellent film 83 or contacts the water repellent film 83 by a member (not shown) or the like. Examples of the member (not shown) include an eccentric cam that selectively biases the film member 90, or a pressure chamber that communicates with the pump and selectively presses the film member 90.
As shown in FIG. 13, when the film member 90 is separated from the water repellent film 83 and the second hole 84 is opened, the ink flow path from the on-off valve 60 to the valve unit 50 is opened.

  As shown in FIG. 14, when the film member 90 bends in the direction of decreasing the volume of the liquid chamber 93, the film member 90 comes into contact with the water repellent film 83 and closes the second hole 84, the valve is opened from the opening / closing valve 60. The ink flow path leading to the unit 50 is closed.

  As described above, the on-off valve 60 is an on-off valve that opens and closes when the film member 90 comes into contact with and separates from the water repellent film 83. A water repellent film 83 is provided at a portion where the film member 90 is separated and contacted, and a portion where the film member 90 is separated and contacted repels ink, thereby suppressing ink accumulation. Accordingly, it is possible to suppress a problem that ink is deposited on a portion where the film member 90 is separated and abutted and it is difficult to block the second hole 84 by the film member 90.

  In the printer according to the present embodiment, the cap 12 abuts against the recording head 20 while the on-off valve 60 is closed, and the inside of the cap 12 is sucked by the suction pump. A negative pressure is accumulated in the ink flow path from the hole 84) to the nozzle opening 334 of the recording head 20. The opening / closing valve 60 is set to open at a predetermined stage where the negative pressure is sufficiently accumulated. By opening the on-off valve 60, the ink flows in from the upstream side in an attempt to eliminate the negative pressure accumulated in the flow path downstream of the second hole 84 in the liquid chamber 93, and the flow velocity is instantaneously increased. The flowed ink flows. As a result, bubbles and foreign matters remaining on the liquid chamber 93 and the downstream flow path are discharged from the nozzle openings 334 of the recording head 20 together with the ink.

  That is, in the printer according to the present embodiment, after the negative pressure is sufficiently accumulated in the ink flow path, the on-off valve 60 is opened, and the gas remaining in the ink flow path or the thickened ink is moved downstream. Execute the choke cleaning process to push out at once. For this reason, the printer according to the present embodiment can discharge more strongly the gas remaining in the ink flow path and the thickened ink than the printer according to the first embodiment.

  In this embodiment, the on-off valve 60 is provided at a location different from the valve unit 50, but the on-off valve 60 may be provided in the valve unit 50.

  The present invention is not limited to the above-described embodiments, and can be appropriately changed without departing from the spirit or idea of the invention that can be read from the claims and the entire specification. Various modifications other than the above-described embodiments are possible. Conceivable. Hereinafter, a modification will be described.

(Modification 1)
FIG. 15 is a diagram corresponding to FIG. 6 and a schematic cross-sectional view of a flow channel structure according to Modification 1.
In the flow channel structure 100C according to the present modification, the shape of the second hole 211B formed in the second member 210B is different from that of the first embodiment, and the others are the same as those of the first embodiment.
Hereinafter, this modification will be described with reference to FIG.

  As shown in FIG. 15, the flow path structure 100 </ b> C according to the present modification example includes a first member 110 and a second member 210 </ b> B. The second member 210B has a tapered portion 113 that increases the diameter of the second hole 211B as it approaches the bottom surface 141. This is the difference between this modification and the first embodiment.

  When the taper portion 113 is provided on the moving surface of the adhesive 240, the direction intersecting the moving direction (Z direction) of the adhesive 240 compared to the case where the moving surface of the adhesive 240 is configured only by the bottom surface 141 (plane). And a larger amount of the adhesive 240 can be secured to the moving surface of the adhesive 240. That is, as shown by a broken line in the figure, the excess adhesive 240 protruding from between the bottom surface 141 and the contact surface 220 remains in the taper portion 113 (between the bottom surface 141 and the first side surface 221), and the second It becomes difficult to move to the side of the first hole 111 (the side where the valve body 450 is disposed).

Furthermore, since the first member 110 has a tapered portion 112 that increases the diameter of the first hole 111 as it approaches the bottom surface 141, excess adhesive that protrudes from between the bottom surface 141 and the contact surface 220. 240 becomes difficult to move to the first hole 111 side (side on which the valve body 450 is disposed) also by the tapered portion 112.
Therefore, in the present modification, the adhesive 240 is less likely to move to the first hole 111 side (the side where the valve body 450 is disposed) compared to the first embodiment, and the adhesive 240 interferes with the valve body 450. The malfunction of the valve body 450 due to this can be more strongly suppressed.

Note that a configuration in which the tapered portion 113 is provided in the second hole 211B and the tapered portion 112 is not provided in the first hole 111 may be employed. If it is this structure, there can exist an effect equivalent to Embodiment 1. FIG.
That is, the first member 110 has a tapered portion 112 that increases the diameter of the first hole 111 as it approaches the bottom surface 141, and the tapered portion 113 that increases the diameter of the second hole 211B as it approaches the bottom surface 141. By having at least one of the structures formed on the two members 210B, the excess adhesive 240 protruding from between the bottom surface 141 and the contact surface 220 is less likely to interfere with the valve body 450, and the valve body 450 does not operate properly ( Malfunction of the valve unit 50) can be suppressed.

(Modification 2)
FIG. 16 is a diagram corresponding to FIG. 6 and a schematic cross-sectional view of a flow channel structure according to Modification 2. Hereinafter, the outline of the flow channel structure 100D according to the present modification will be described with reference to FIG.

As shown in FIG. 16, the flow path structure 100D according to the present modification includes a first member 110C and a second member 210C. The first member 110 </ b> C is formed with a first recess 120 </ b> C having a bottom surface 141 and a third inner wall surface 123. That is, the first recess 120 </ b> C has a configuration in which the first inner wall surface 121 and the second inner wall surface 122 are deleted from the first recess 120 of the first embodiment. A fitting recess 160 is provided on the bottom surface 141 of the first member 110C. A fitting convex portion 170 is provided on the contact surface 220 of the second member 210C.
The fitting recess 160 is an example of a “contact portion”.

The bottom surface 141 of the first member 110C contacts the contact surface 220 of the second member 210C, and determines the position of the second member 210C relative to the first member 110C in the direction orthogonal to the bottom surface 141. The fitting concave portion 160 of the first member 110C abuts (fits) the fitting convex portion 170 of the second member 210C, and determines the position of the second member 210C relative to the first member 110C in the direction along the bottom surface 141. .
Since the second member 210C is not self-aligned by the components (the bottom surface 141 and the fitting recess 160) of the first member 110C without using the alignment device, the influence of the device error of the alignment device is eliminated. Alignment can be performed with higher accuracy than when alignment is performed using an alignment apparatus.

  The fitting convex portion 170 is provided on the bottom surface 141 of the first member 110, the fitting concave portion 160 is provided on the contact surface 220 of the second member 210, and the fitting convex portion 170 of the first member 110C is the second member 210C. The second member 210 </ b> C can be aligned with respect to the first member 110 </ b> C in the direction along the bottom surface 141 by contacting the fitting recess 160.

  Furthermore, the present invention can be widely applied to all liquid ejecting apparatuses having a liquid ejecting head. For example, recording heads such as various ink jet recording heads used in image recording apparatuses such as printers, color material ejection heads used in the production of color filters such as liquid crystal displays, organic EL displays, FEDs (field emission displays), etc. The present invention can be applied to a flow path structure in an electrode material ejection head used for electrode formation, a bioorganic matter ejection head used for biochip production, and the like.

  DESCRIPTION OF SYMBOLS 100 ... Channel structure, 110 ... 1st member, 111 ... 1st hole, 112 ... Tapered part, 120 ... 1st recessed part, 121 ... 1st inner wall surface, 122 ... 2nd inner wall surface, 123 ... 3rd inside Wall surface, 130 ... second recess, 140 ... partition wall, 141 ... bottom surface, 210 ... second member, 211 ... second hole, 212 ... main body, 213 ... water-repellent film, 220 ... contact surface, 221 ... first Side surface, 222, second side surface, 240, adhesive, 410, film member, 420, pressure receiving plate, 430, spring, 440, lid member, 450, valve body, 460, shaft, 461, main body, 462, flange portion 470 ... Valve member, 511 ... Liquid chamber, 513 ... Pressure adjusting chamber, 515 ... Inflow passage, 517 ... Outflow passage.

Claims (15)

A first member having a recess that forms a liquid chamber that stores liquid with the lid member, and a first hole that is formed on the bottom surface of the recess and serves as a flow path for the liquid;
A second member having a contact surface that contacts the bottom surface, and a second hole that exposes the first hole and serves as the flow path;
Including
The flow path structure according to claim 1, wherein the first member has a contact portion that determines a position of the second member in a direction along the bottom surface.   The flow path structure according to claim 1, further comprising an adhesive that fixes the first member and the second member between the bottom surface and the contact surface.   The at least one of the first member and the second member further includes a tapered portion that increases the diameter of the first hole or the second hole as approaching the bottom surface. The flow channel structure according to the description. A first member having a recess that forms a liquid chamber that stores liquid with the lid member, and a first hole that is formed on the bottom surface of the recess and serves as a flow path for the liquid;
A second member having a contact surface that contacts the bottom surface, and a second hole that exposes the first hole and serves as the flow path;
Including
At least one of the first member and the second member further has a tapered portion that increases the diameter of the first hole or the second hole as it approaches the bottom surface. .   The flow path structure according to claim 4, wherein the first member further includes a contact portion that determines a position of the second member in a direction along the bottom surface. The second member has a first side surface and a second side surface intersecting the contact surface across the contact surface,
The first side surface defines the second hole;
The second side surface defines an outer shape of the second member;
The flow path structure according to claim 1, wherein the contact portion is in contact with the second side surface. The second member has a first side surface and a second side surface intersecting the contact surface across the contact surface,
The first side surface defines the second hole;
The second side surface defines an outer shape of the second member;
The flow path structure according to claim 1, wherein the contact portion is in contact with the first side surface.   The said 2nd member further has a water-repellent surface in the site | part which can obstruct | occlude the said 2nd hole when a valve member contact | abuts, The any one of Claims 1-7 characterized by the above-mentioned. Flow channel structure.   9. The flow path structure according to claim 8, wherein a length of the contact portion is equal to or shorter than a length of the second member in a direction orthogonal to the bottom surface. body. A valve member that contacts and separates from the second member;
An axis fixed to the valve member and passing through the first hole and the second hole;
An elastic member for changing the position of the shaft to separate and abut the valve member on the second member;
The flow path structure according to any one of claims 1 to 9, further comprising: The concave portion has an inner wall surface disposed so as to surround the bottom surface,
The flow path structure according to any one of claims 1 to 10, wherein the inner wall surface includes a guide portion that is inclined so that the opening of the concave portion becomes wider as the distance from the bottom surface increases. . In plan view, the first hole is disposed inside the second hole,
The second member is fixed to the first member at the contact surface,
The opening on the contact surface side of the second hole is wider than the opening on the contact surface side of the first hole. Channel structure.   The flow path structure according to claim 1, wherein the contact portion covers at least a part of a surface of the second member opposite to the contact surface. A first member having a recess and a first hole formed in the bottom surface of the recess;
A second member having a contact surface that contacts the bottom surface, and a second hole that exposes the first hole;
A flow path structure manufacturing method comprising:
Forming an abutting portion for determining a position of the second member in a direction along the bottom surface inside the concave portion;
Disposing the second member on the first member so as to contact the contact portion;
Fixing the first member and the second member;
The manufacturing method of the flow-path structure characterized by including.   15. The method according to claim 14, further comprising the step of deforming the contact portion and covering at least a part of a surface of the second member opposite to the contact surface after the arranging step. Manufacturing method of the flow path structure.

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