JP2017032009A - Xy-table device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an XY-table which can accurately move an XY-stage to a biaxial direction by enhancing the yawing rigidity of a pair of X-axis air bearing parts.SOLUTION: A pair of X-axis guide parts 2A, 2B which are extensively arranged in an X-axis direction while separating from each other in parallel on a base 1 in a Y-direction comprise: vertical air bearings 8 which make the X-axis table 3 vertically float and support by a gas with respect to the base table; and a suction force generation part 10 which sucks the X-axis table toward the base in a non-contact state. Then, a distance L1 at which a pair of the vertical air bearings are separated from each other in the Y-axis direction is set not shorter than a stroke L3 at which the XY-stage 6 which is guided on the X-axis table moves to the Y-axis direction.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an XY table device that moves in two axial directions (an X-axis direction and a Y-axis direction orthogonal to each other).

  As a linear guide device that can move with high accuracy in one axis direction, a pair is arranged on the base so as to be spaced apart in a direction perpendicular to the one axis direction and extend in one axis direction, and to support and guide the movable body. A hydrostatic air bearing, a suction force generating unit that is disposed in the vicinity of the pair of hydrostatic air bearings and sucks the movable body toward the base in a non-contact state, and a drive that drives the movable body in one axial direction There is known a static pressure air bearing linear guide device including a portion (for example, Patent Document 1). Here, the static pressure air bearing includes a horizontal air bearing that supports a horizontal direction perpendicular to one axial direction of the movable body, and a vertical air bearing that supports the movable body in the vertical direction.

When the apparatus of Patent Document 1 is configured to be stacked in two stages, an XY table apparatus that can move in two axial directions (X-axis direction and Y-axis direction orthogonal to each other) can be obtained.
The XY table device includes a pair of X-axis direction guide portions arranged on the base and extending in the X-axis direction of the lower shaft while being separated from each other in the Y-axis direction which is the upper shaft, and the pair of X-axis An X-axis table supported by the direction guide unit so as to be movable in the X-axis direction, an X-axis drive unit for driving the X-axis table in the X-axis direction, and extending in the Y-axis direction while being separated from each other in the X-axis direction A pair of Y-axis direction guide portions arranged on the X-axis table, an XY stage supported by the pair of Y-axis direction guide portions so as to be movable in the Y-axis direction, and driving the XY stage in the Y-axis direction. Y-axis drive unit. Here, the pair of X-axis direction guide portions are separated from each other in the Y-axis direction to support and guide the X-axis table by gas, and separated from each other in the Y-axis direction in the non-contact state. And a pair of Y-axis direction guide portions spaced apart from each other in the X-axis direction, and an air bearing portion that supports and guides the XY stage with gas. A suction force generator that sucks the XY stage toward the X-axis table in a non-contact state spaced apart in the X-axis direction.

Japanese Patent No. 4270192

By the way, the XY table device having the above-described configuration is configured such that the Y-axis direction stroke of the XY stage is longer than the distance in the Y-axis direction of the air bearing portions constituting the pair of X-axis direction guide portions. The center of gravity changes in the XY stage due to the movement toward one end or the other end. As described above, when the center-of-gravity variation occurs in the XY stage, the yawing rigidity of the pair of X-axis air bearing portions is lowered, and vibration may occur.
As described above, when the pair of X-axis direction guide portions vibrate due to the movement of the XY stage in the Y-axis direction, the XY stage cannot be moved in the two-axis direction with high accuracy. It cannot be used as a precision machine.

  Accordingly, the present invention has been made paying attention to the unsolved problems of the above-described conventional example, and by increasing the yawing rigidity of the pair of X-axis air bearing portions, the XY stage is moved in the biaxial direction with high accuracy, An object of the present invention is to provide an XY table device that can be used as a precision machine such as a semiconductor manufacturing / inspection device.

  In order to achieve the above object, an XY table apparatus according to an embodiment includes a base and a pair of base tables that are arranged to extend in the X-axis direction while being spaced apart from each other in parallel to the Y-axis direction. X-axis direction guide section, an X-axis table supported by a pair of X-axis direction guide sections so as to be movable in the X-axis direction, an X-axis drive section for driving the X-axis table in the X-axis direction, and an X-axis table A pair of Y-axis direction guide portions arranged in the Y-axis direction while being spaced apart from each other in parallel with the X-axis direction and supported by the pair of Y-axis direction guide portions so as to be movable in the Y-axis direction. The XY stage and a Y-axis drive unit that drives the XY stage in the Y-axis direction, and the pair of X-axis direction guide units vertically support the X-axis table that floats and supports the table in the vertical direction with gas. The X-axis table is sucked toward the base in a non-contact state with the air bearing. A suction force generating unit has a distance of a pair of vertical air bearings are spaced apart in the Y-axis direction, XY stage is set to more than the stroke of moving in the Y-axis direction.

  According to the XY table device of the present invention, the distance between the pair of vertical air bearings supporting the X-axis table movably in the X-axis direction is separated in the Y-axis direction, and the XY stage is in the Y-axis direction. Therefore, even if the XY stage moves to one end or the other end in the Y-axis direction, the center of gravity does not change and the yawing rigidity of the pair of X-axis direction guide portions increases. . Therefore, the XY table apparatus according to the present invention can move the XY stage in the biaxial direction with high accuracy by increasing the yawing rigidity of the pair of X-axis direction guide portions, and the semiconductor manufacturing / inspection apparatus, etc. Can be offered as a precision machine.

It is the figure which showed the XY table apparatus of 1st Embodiment which concerns on this invention by planar view. It is the figure which looked at the XY table apparatus of 1st Embodiment which concerns on this invention from the X-axis direction. It is the figure which looked at the XY table apparatus of 1st Embodiment which concerns on this invention from the Y-axis direction. It is a figure which shows the attraction | suction force generation part which comprises the XY table apparatus of 1st Embodiment which concerns on this invention. It is the figure which looked at the XY table apparatus of 2nd Embodiment which concerns on this invention from the X-axis direction. It is the figure which looked at the XY table apparatus of 3rd Embodiment which concerns on this invention from the X-axis direction.

Next, first to third embodiments according to the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the relationship between the thickness and the planar dimensions, the ratio of the thickness of each layer, and the like are different from the actual ones. Therefore, specific thicknesses and dimensions should be determined in consideration of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings.
In addition, the first to third embodiments shown below exemplify apparatuses and methods for embodying the technical idea of the present invention, and the technical idea of the present invention is the material of a component, The shape, structure, arrangement, etc. are not specified below. The technical idea of the present invention can be variously modified within the technical scope defined by the claims described in the claims.

[XY Table Device of First Embodiment]
1 to 4 show an XY table device according to a first embodiment of the present invention. In these drawings, the X-axis direction is a direction in the horizontal plane, and the Y-axis direction is in the X-axis direction in the horizontal plane. The Z-axis direction is a vertical direction perpendicular to the horizontal plane.
1 is a diagram showing the XY table device of the first embodiment in plan view, FIG. 2 is a diagram of the XY table device of the first embodiment viewed from the X-axis direction, and FIG. 3 is a diagram of the first embodiment. The figure which looked at the XY table apparatus from the Y-axis direction, FIG. 4 is a figure which shows the principal part of the XY table apparatus of 1st Embodiment.

  As shown in FIGS. 1 and 2, the XY table device of the first embodiment includes a base 1, a first X-axis direction guide 2A and a second X-axis direction guide 2B arranged on the base 1, and a base. An X-axis table 3 that moves on the table 1 in the X-axis direction, an X-axis drive unit 4 that drives the X-axis table 3 in the X-axis direction, a first Y-axis direction guide unit 5A disposed on the X-axis table 3, and A second Y-axis direction guide unit 5B, an XY stage 6 that moves on the X-axis table 3 in the Y-axis direction, and a Y-axis drive unit 7 that drives the XY stage 6 in the Y-axis direction are provided. Here, the X-axis drive unit 4 and the Y-axis drive unit 7 are linear motors.

As shown in FIG. 2, the first X-axis direction guide portion 2 </ b> A and the second X-axis direction guide portion 2 </ b> B extend in the X-axis direction while being spaced apart from each other in parallel to the Y-axis direction, and the Y-axis direction on the base 1. The X-axis table 3 is supported by the first X-axis direction guide portion 2A and the second X-axis direction guide portion 2B so as to be movable in the X-axis direction.
As shown in FIG. 3, the first Y-axis direction guide portion 5A and the second Y-axis direction guide portion 5B extend on the Y-axis direction and are arranged on the X-axis table 3 while being spaced apart from each other in parallel with the X-axis direction. The XY stage 6 is supported by the first Y-axis direction guide portion 5A and the second Y-axis direction guide portion 5B so as to be movable in the Y-axis direction.

Next, the first X-axis direction guide portion 2A and the second X-axis direction guide portion 2B that support the X-axis table 3 so as to be movable in the X-axis direction will be described.
As shown on the right side of FIG. 2, the first X-axis direction guide portion 2 </ b> A includes a vertical air bearing 8, a pair of horizontal air bearings 9 a and 9 b, and a suction force generator 10.
A guide rail 11 having an angular cross section extending in the X-axis direction is fixed to the upper surface of the base 1 on which the first X-axis direction guide portion 2A is provided.
Further, the guide fixing plate 3a fixed to the lower surface of the X-axis table 3 provided with the first X-axis direction guide portion 2A is opposed to each side surface of the guide rail 11 with a predetermined gap so as to sandwich the guide rail 11. Opposing portions 12 and 13 each having an opposing surface are provided in a protruding manner.

An air hole that blows out air horizontally toward the side surface of the guide rail 11 is provided on the surface of the facing portion 12 and 13 that faces the side surface of the guide rail 11, so that the side surface of the guide rail 11 and the facing portions 12 and 13 are disposed. A pair of horizontal air bearings 9a and 9b that support the horizontal direction of the X-axis table 3 are formed between the two.
Moreover, the air hole which blows off air is provided in the lower surface of the opposing part 12 of the outer side of a Y-axis direction among the opposing parts 12 and 13 arrange | positioned in the lower surface of the X-axis table 3, Therefore A vertical air bearing 8 is formed between the lower surface and the upper surface of the base 1.

As shown in FIG. 4, the suction force generation unit 10 includes a suction rail 15 made of a ferromagnetic material that is fixed to the upper surface of the base 1 with fixing bolts 14 and extends in the X-axis direction in parallel with the guide rail 11, A magnet holder 17 that is detachably fixed to the lower surface of the shaft table 3 (guide fixing plate 3 a) by a fixing bolt 16, and is embedded in the lower surface of the magnet holder 17 and has a predetermined gap with respect to the upper surface of the suction rail 15. And a permanent magnet 18 facing each other.
Further, the second X-axis direction guide portion 2B arranged on the left side in FIG. 2 is symmetric with respect to the first X-axis direction guide portion 2A in the Y-axis direction. The vertical air bearing 8, a pair of horizontal air bearings 9a and 9b, and a suction force generator 10 are provided.

Next, the first Y-axis direction guide portion 5A and the second Y-axis direction guide portion 5B that support the XY stage 6 so as to be movable in the Y-axis direction will be described.
As shown on the left side of FIG. 3, the first Y-axis direction guide portion 5 </ b> A includes a vertical air bearing 20, a pair of horizontal air bearings 21 a and 21 b, and a suction force generator 22.
A guide rail 23 having an angular cross section extending in the Y-axis direction is fixed to the upper surface of the X-axis table 3 provided with the first Y-axis direction guide portion 5A.
Further, a facing portion 24 having a facing surface facing each other with a predetermined gap on each side surface of the guide rail 23 so as to sandwich the guide rail 23 between the lower surface of the XY stage 6 provided with the first Y-axis direction guiding portion 5A. , 25 project from each other.

An air hole that blows out air horizontally toward the side surface of the guide rail 23 is provided in a surface of the facing portions 24 and 25 that faces the side surface of the guide rail 23. A pair of horizontal air bearings 21a and 21b that support the horizontal direction of the XY stage 6 are formed between the two.
Moreover, the lower surface of the opposing part 13 is provided in the lower surface of the opposing part 24 outside the X-axis direction of the opposing parts 24 and 25 arranged on the lower surface of the XY stage 6 by blowing air downward. A vertical air bearing 20 is formed between the X axis table 3 and the upper surface of the X-axis table 3.

The suction force generator 22 is fixed to the upper surface of the X-axis table 3 with a fixing bolt 26 and is made of a ferromagnetic material extending in the X-axis direction in parallel with the guide rail 23, and the lower surface of the XY stage 6. A magnet holding portion 29 that is detachably fixed to the fixing bolt 28 and a permanent magnet that is embedded in the lower surface of the magnet holding portion 29 and is opposed to the upper surface of the suction rail 27 with a predetermined gap. 30.
Further, the second Y-axis direction guide portion 5B, which is arranged on the right side in FIG. 3 and supports the XY stage 6 so as to be movable in the X-axis direction together with the first Y-axis direction guide portion 5A, is opposed to the lower surface of the XY stage 6. 31 is protruded, and an air hole that blows air downward is provided on the lower surface of the facing portion 31, so that the vertical air bearing 32 is provided between the lower surface of the facing portion 31 and the upper surface of the X-axis table 3. Is formed. In addition, a suction force generation unit 22 having the same structure as that of the first Y-axis direction guide unit 5A is disposed outside the vertical air bearing 32 in the X-axis direction.

Here, as shown in FIG. 2, the XY table device of the first embodiment includes a vertical air bearing 8 of the first X-axis direction guide portion 2A and a vertical air bearing 8 of the first X-axis direction guide portion 2A. The distance apart in the Y-axis direction is L1, and the horizontal air bearing 9a outside the Y-axis direction of the first X-axis direction guide portion 2A and the horizontal direction outside the Y-axis direction of the second X-axis direction guide portion 2B If the distance that the air bearing 9a is separated in the Y-axis direction is L2, and the stroke that the XY stage 6 moves in the Y-axis direction is L3,
L1> L3 (1)
L2> L3 (2)
The relationship is set.

Next, operations and effects of the XY table device according to the first embodiment having the above-described configuration will be described.
In the XY table device of the first embodiment, the X-axis table 3 is vertically moved with respect to the base 1 by the vertical air bearings 8 and the suction force generating unit 10 of the first and second X-axis direction guide portions 2A and 2B. It is supported in a floating manner and is supported in the horizontal direction by the horizontal air bearings 9a and 9b of the first and second X-axis direction guide portions 2A and 2B. The X-axis table 3 and the XY stage 6 are linearly moved in the X-axis direction by driving the X-axis drive unit 4, and the XY stage 6 is linearly moved in the Y-axis direction by driving the Y-axis drive unit 7.

  According to the XY table device of the first embodiment, the vertical air bearing 8 of the first X-axis direction guide portion 2A and the vertical air bearing 8 of the second X-axis direction guide portion 2B are separated in the Y-axis direction. Since the distance L1 is set larger than the stroke L3 in which the XY stage 6 moves in the Y-axis direction (L1> L3), the center of gravity does not change in the XY stage 6 when moving in the Y-axis direction. As described above, since the center of gravity does not fluctuate in the XY stage 6 that moves in the Y-axis direction, the yawing rigidity of the first and second X-axis direction guide portions 2A and 2B can be increased, and the XY stage 6 can be made highly accurate. It is possible to move in the X-axis direction and the Y-axis direction, and the XY table apparatus of the first embodiment can be a machine suitable as a precision machine such as a semiconductor manufacturing / inspection apparatus.

Further, the XY table device of the first embodiment includes a horizontal air bearing 9a on the outer side in the Y-axis direction of the first X-axis direction guide part 2A and a horizontal air on the outer side in the Y-axis direction of the second X-axis direction guide part 2B. The distance L2 at which the bearing 9a is separated in the Y-axis direction is also set larger than the stroke L3 in which the XY stage 6 moves in the Y-axis direction (L2> L3). The variation in the center of gravity does not occur, and the yawing rigidity of the first and second X-axis direction guide portions 2A and 2B can be further increased.
Here, a distance L1 where the pair of vertical air bearings 8 of the first and second X-axis direction guide portions 2A and 2B are separated in the Y-axis direction is greater than or equal to a stroke L3 in which the XY stage 6 moves in the Y-axis direction. If it is a distance (L1 ≧ L3), the XY stage 6 does not easily change in the center of gravity when moving in the Y-axis direction. The XY stage 6 also moves in the Y-axis direction at a distance L2 in which the pair of horizontal air bearings 9a outside the Y-axis direction of the first and second X-axis direction guide portions 2A and 2B are separated in the Y-axis direction. If the distance is equal to or longer than the stroke L3 to be performed (L2 ≧ L3), the center of gravity hardly changes in the XY stage 6 when moving in the Y-axis direction.

Further, since the vertical air bearings 8 of the first and second X-axis direction guide portions 2A and 2B are disposed outside the pair of horizontal air bearings 9a in the Y-axis direction, the first and second X-axis directions The distance in the Y-axis direction of the pair of guide rails 11 constituting the pair of horizontal air bearings 9a and 9b of the guide portions 2A and 2B is shortened. When the distance in the Y-axis direction of the pair of guide rails 11 is shortened, the change in bearing clearance between the pair of horizontal air bearings 9a and 9b due to thermal expansion due to temperature change is reduced. Bearing performance can be stabilized.
In addition, by configuring the suction rail 27 of the suction force generation unit 22 from a ferromagnetic material, it is possible to increase the suction force and reduce the weight in a small area. Further, since the suction rail 27 extends in a parallel direction outside the vertical air bearing 8, the suction rail 27 also serves to prevent foreign dust and dirt from adhering to the vertical air bearing 8. Have.
Further, since the magnet holding part 29 constituting the attractive force generating part 22 is detachably fixed to the lower surface of the XY stage 6 by a fixing bolt 28, the magnet is mounted on the XY stage 6 in a state where the load is mounted. The holding part 29 can be detached and the magnetic attraction force between the permanent magnet 30 embedded in the magnet holding part 29 and the attraction rail 27 can be easily finely adjusted.

[XY Table Device of Second Embodiment]
Next, FIG. 5 is the figure which looked at the XY table apparatus of 2nd Embodiment which concerns on this invention from the X-axis direction. The same components as those in the XY table device of the first embodiment shown in FIGS. 1 to 4 are denoted by the same reference numerals, and description thereof is omitted.
The XY table device of the second embodiment is different from the XY table device of the first embodiment in the first X-axis direction guide portion 2A.
That is, in the first X-axis direction guide portion 2A of the second embodiment, only the facing portion 12 protrudes from the guide fixing plate 3a provided on the lower surface of the X-axis table 3, and one of the guide rails 11 is projected to the facing portion 12. The side faces. And the air hole which blows air horizontally toward the side surface of the guide rail 11 in the surface which opposes the side surface of the guide rail 11 of the opposing part 12 is provided, and the horizontal direction air bearing which supports the horizontal direction of the X-axis table 3 9a is formed.

Accordingly, the first X-axis direction guide portion 2A of the second embodiment is formed by only the horizontal air bearing 9a as compared to the second X-axis direction guide portion 2B in which the pair of horizontal air bearings 9a and 9b is formed. Has been.
In the XY stage apparatus of the second embodiment, a pair of vertical air bearings 8 of the first and second X-axis direction guide portions 2A and 2B are separated in the Y-axis direction, similarly to the XY stage apparatus of the first embodiment. The distance L1 is a distance equal to or longer than the stroke L3 in which the XY stage 6 moves in the Y-axis direction (L1 ≧> L3), and a pair of horizontal in the Y-axis direction of the first and second X-axis direction guide portions 2A and 2B The distance L2 at which the directional air bearing 9a is separated in the Y-axis direction is also a distance equal to or longer than the stroke L3 in which the XY stage 6 moves in the Y-axis direction (L2 ≧ L3). As a result, the center of gravity does not change in the XY stage 6 that moves in the axial direction, and the yawing rigidity of the first and second X-axis direction guide portions 2A and 2B is increased, which is suitable as a precision machine such as a semiconductor manufacturing / inspection apparatus. An XY table device can be provided.

  Further, the XY stage apparatus of the second embodiment has a reduced number of horizontal air bearings 9b of the first X-axis direction guide portion 2A compared to the XY stage apparatus of the first embodiment. Thereby, the problem of the bearing clearance change of the horizontal air bearing 9b of the first X-axis direction guide portion 2A due to the thermal expansion of the temperature change is solved. Unlike the second embodiment, when the horizontal air bearing 9b of the first X-axis direction guide portion 2A is disposed inside the guide rail 11, the bearing clearance is eliminated and the air bearing does not function. As described above, the XY stage apparatus with stable bearing performance can be provided because this is effective particularly when the linear motor movable element generates heat and thermal expansion occurs on the bearing side.

[XY Table Device of Third Embodiment]
FIG. 6 is a view of the XY table device according to the third embodiment of the present invention as viewed from the X-axis direction. In the third embodiment, the same components as those in the XY table apparatus of the first embodiment shown in FIGS. 1 to 4 are denoted by the same reference numerals, and the description thereof is omitted.
The XY table device of the third embodiment is different from the XY table device of the first embodiment in the first X-axis direction guide portion 2A and the second X-axis direction guide portion 2B.
That is, in the first X-axis direction guide portion 2A and the second X-axis direction guide portion 2B of the third embodiment, only the facing portion 12 protrudes from the guide fixing plate 3b provided on the lower surface of the X-axis table 3, and this facing portion. 12, one side surface of the guide rail 11 is opposed. And the air hole which blows air horizontally toward the side surface of the guide rail 11 in the surface which opposes the side surface of the guide rail 11 of the opposing part 12 is provided, and the horizontal direction air bearing which supports the horizontal direction of the X-axis table 3 9a is formed.

Therefore, the first X-axis direction guide portion 2A and the second X-axis direction guide portion 2B of the third embodiment are compared to the first embodiment in which a pair of horizontal air bearings 9a and 9b are formed. Only the bearing 9a is formed.
Similarly to the XY stage apparatus of the first embodiment, the pair of vertical air bearings 8 of the first and second X-axis direction guide portions 2A and 2B are separated from each other in the Y-axis direction. The distance L1 is a distance equal to or longer than the stroke L3 in which the XY stage 6 moves in the Y-axis direction (L1 ≧> L3), and a pair of horizontal in the Y-axis direction of the first and second X-axis direction guide portions 2A and 2B The distance L2 at which the directional air bearing 9a is separated in the Y-axis direction is also a distance equal to or longer than the stroke L3 in which the XY stage 6 moves in the Y-axis direction (L2 ≧ L3). As a result, the center of gravity does not change in the XY stage 6 that moves in the axial direction, and the yawing rigidity of the first and second X-axis direction guide portions 2A and 2B is increased, which is suitable as a precision machine such as a semiconductor manufacturing / inspection apparatus. An XY table device can be provided.

  In the XY stage apparatus of the third embodiment, the horizontal air bearings 9b of the first X-axis direction guide part 2A and the second X-axis direction guide part 2B are reduced compared to the XY stage apparatus of the first embodiment. Yes. Thereby, the problem of the bearing clearance change of the horizontal air bearing 9b of the 1st X-axis direction guide part 2A and the 2nd X-axis direction guide part 2B by the thermal expansion of a temperature change is eliminated. Unlike the third embodiment, when the horizontal air bearings 9b of the first X-axis direction guide portion 2A and the second X-axis direction guide portion 2B are arranged inside the guide rail 11, the bearing clearance is eliminated and the air bearing does not function. As described above, the XY stage apparatus with stable bearing performance can be provided because this is effective particularly when the linear motor movable element generates heat and thermal expansion occurs on the bearing side.

DESCRIPTION OF SYMBOLS 1 Base 2A 1st X-axis direction guide part 2B 2nd X-axis direction guide part 3 X-axis table 3a, 3b Guide fixing plate 4 X-axis drive part 5A 1st Y-axis direction guide part 5B 2nd Y-axis direction guide part 6 XY stage 7 Y-axis drive unit 8 Vertical air bearings 9a, 9b A pair of horizontal air bearings 10 Suction force generating unit 11 Guide rail 3a Guide fixing plate 12, 13 Opposing unit 14 Fixing bolt 15 Suction rail 17 Magnet holding unit 18 Permanent magnet 20 Vertical Directional air bearings 21a, 21b Horizontal direction air bearing 22 Suction force generating part 23 Guide rails 24, 25 Opposing part 26 Fixing bolt 27 Suction rail 28 Fixing bolt 29 Magnet holding part 30 Permanent magnet 31 Opposing part 32 Vertical air bearing

Claims (6)

The base,
A pair of X-axis direction guide portions disposed on the base and extending in the X-axis direction while being spaced apart from each other in parallel to the Y-axis direction;
An X-axis table supported by the pair of X-axis direction guide portions so as to be movable in the X-axis direction;
An X-axis drive unit that drives the X-axis table in the X-axis direction;
A pair of Y-axis direction guide portions disposed on the X-axis table so as to extend in the Y-axis direction while being spaced apart from each other in parallel with the X-axis direction;
An XY stage supported by the pair of Y-axis direction guide portions so as to be movable in the Y-axis direction;
A Y-axis drive unit that drives the XY stage in the Y-axis direction,
The pair of X-axis direction guide portions are vertically air bearings that float and support the X-axis table in the vertical direction with gas relative to the base, and the X-axis table faces the base in a non-contact state. A suction force generator for sucking, and
An XY table apparatus, wherein a distance that the pair of vertical air bearings are separated in the Y-axis direction is set to be longer than a stroke in which the XY stage moves in the Y-axis direction. The pair of X-axis direction guide portions includes a horizontal air bearing that supports and guides a horizontal direction perpendicular to the X-axis direction of the X-axis table with gas.
2. The XY table apparatus according to claim 1, wherein a distance that the pair of horizontal air bearings are separated in the Y-axis direction is set to be not less than the stroke in which the XY stage moves in the Y-axis direction. .   The XY table apparatus according to claim 2, wherein the pair of vertical air bearings are disposed outside the horizontal air bearing in the Y-axis direction. A pair of guide rails projecting upward from the base and spaced apart from each other in the Y-axis direction and extending in the X-axis direction, and facing the rail side surfaces of the guide rails at a predetermined interval A counter part formed on the X-axis table,
The XY table apparatus according to claim 2, wherein the horizontal air bearing is provided between the rail side surface and the facing portion.   The XY table apparatus according to claim 4, wherein the vertical air bearing is formed by providing an air hole for blowing air toward the base on a lower surface of the facing portion.   The suction force generating unit is detachably fixed to a suction rail made of a ferromagnetic material disposed on the base and extending in parallel with the pair of X-axis direction guide units, and a lower surface of the X-axis table, The XY table device according to any one of claims 1 to 5, further comprising a permanent magnet facing the upper surface of the attraction rail with a predetermined gap therebetween.

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