JP2017054926A - Wiring board, semiconductor device and liquid crystal display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wiring board that has good reliability even when a copper wiring line is used and that can be easily manufactured.SOLUTION: A wiring board 100 includes a substrate 15 and a conductive wiring line 11 directly disposed on the substrate 15 and having a first conductive oxide layer 1, a copper alloy layer 2, and a second conductive oxide layer 3 stacked in this order with an equal line width. The first conductive oxide layer 1 and the second conductive oxide layer 3 are formed of a complex oxide containing indium oxide, zinc oxide and tin oxide and satisfy (N+N)/(N+N+N)<0.2 and N/N>1.1, where N, Nand Nrepresent numbers of atoms of indium, zinc and tin, respectively, included in the complex oxide. The copper alloy layer 2 comprises copper, a first metal element having a larger atomic weight than the atomic weight of copper and forming a solid solution with copper, and a second metal element having a larger atomic weight than the atomic weight of copper and not forming a solid solution with copper.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a wiring board, a semiconductor device, and a liquid crystal display device.

In a semiconductor device or a liquid crystal display device, it is required to reduce a resistance value of a conductive wiring that transmits a signal to a transistor, a diode, or a liquid crystal layer. For the conductive wiring, for example, a metal wiring with good conductivity such as aluminum (electric resistivity 2.65 × ⁻⁸ Ωcm), copper (electric resistivity 1.68 × 10 ⁻⁸ Ωcm) is used.

For example, in Patent Documents 1 and 2, copper wiring is used as the thin film transistor wiring, and indium tin oxide (ITO), indium zinc oxide (IZO), and indium tin are used for electrical connection in contact holes and terminal portions. A technique for laminating any composite oxide layer of zinc oxide (ITZO) on a copper wiring is disclosed.
In any of these techniques, after the copper wiring is formed, the composite oxide layer is laminated.
In patent document 1, IZO is laminated | stacked as a transparent conductive layer on the contact part of the wiring layer which is copper. As a result, the electrical resistance value of the contact portion does not increase, and copper in the wiring layer is not etched under acidic conditions when etching IZO, so that disconnection failure or the like does not occur (paragraph [ 0018]).
Patent Document 2 describes a composite oxide (metal oxide conductor) containing a tin oxide having an atomic weight ratio of tin to zinc of 1 or more as an oxide laminated on a copper wiring (paragraph [0041]). reference). Note that the metal oxide conductor in Patent Document 2 is a two-layer metal oxide conductor formed by sputtering in a non-oxidizing atmosphere and an oxidizing atmosphere.

  For example, Patent Document 3 discloses a metal wiring made of a copper layer sandwiched between oxide layers containing indium and zinc. The zinc oxide content is 10 wt% or more and less than 35 wt%.

  For example, the technique described in Patent Document 4 relates to a technique for improving migration resistance of copper. Patent Document 4 proposes a copper alloy containing 0.5 wt% to 4.0 wt% of zinc as a copper alloy. In Patent Document 4, in addition to zinc (Zn) which is an essential component, Be, B, Mg, Al, P, Si, Ti, Cr, Mn, Ni, Co, Zr, Ag, In, Sn, and Sb are included. It is described that one or two or more of them may be contained at 1.0 wt%.

For example, the technique described in Patent Document 5 is a technique for the purpose of preventing oxidation of copper. Patent Document 5 discloses a first layer of low electrical resistance composed of pure Cu or a Cu alloy containing Cu as a main component on a transparent conductive film, and pure Al or Al alloy formed on the first layer. A wiring film for a touch panel sensor having a two-layer laminated structure composed of is described.
The Cu alloy may contain at least one element selected from the group consisting of Ni, Zn, and Mn. Examples of the transparent conductive film include indium tin oxide (ITO) and indium zinc oxide (IZO) (see paragraph [0044]).

Japanese Patent No. 3955156 Japanese Patent No. 4224661 JP 2014-78700 A JP 62-146231 A International Publication No. 2014/196408

However, conventional wiring boards, semiconductor devices, and liquid crystal display devices using copper wiring have the following problems.
The technique described in Patent Document 1 uses copper instead of aluminum wiring in order to prevent the electrical resistance value from increasing due to the contact between ITO, which is a transparent conductive layer used in electronic equipment, and aluminum wiring. This technique uses wiring.
The technique described in Patent Document 2 is a technique related to improvement of contact resistance between a copper wiring and a metal oxide conductor.
For this reason, Patent Documents 1 and 2 do not disclose any technology relating to the improvement of the reliability of the copper wiring.
Aluminum has the characteristic that the oxide film on the surface is passivated and oxidation is difficult to proceed, whereas copper and copper alloys are not passivated. For this reason, oxidation progresses with time from the surface of copper or copper alloy toward the inside. In addition, since the copper oxide film does not have conductivity, there is a possibility that ohmic contact cannot be obtained when oxidation proceeds on the electrical mounting surface. Since the thickness of the copper oxide film increases with time, it becomes a serious problem for stable electrical mounting.
In addition, copper, like silver, is prone to migration, whiskers, void formation in the film, and the like, and has the disadvantage that it is difficult to use as electrical wiring for semiconductor devices. Furthermore, copper has low adhesion to a semiconductor substrate or a glass substrate and is easily peeled off.

In the technique described in Patent Document 2, the atomic ratio of tin to zinc in the composite oxide is 1 or more. However, in the composite oxide, when the number of tin atoms is larger than that of zinc, wet etching becomes difficult. There's a problem. For this reason, it becomes difficult to form a wiring in which a copper layer and a complex oxide layer are stacked by etching, and a copper layer forms a wiring having a narrow line width, and the complex oxide layer covers only the copper layer. It becomes difficult to form the wiring.
Patent Documents 1 and 2 do not disclose a wiring pattern having a three-layer structure of composite oxide layer / copper layer / composite oxide layer, and a multilayer stack of composite oxide layer / copper layer / composite oxide layer. A technique for forming a batch pattern by wet etching is not disclosed.

Patent Document 3 describes a metal wiring composed of a copper layer sandwiched between oxide layers containing indium and zinc and made of an etching composition by wet etching.
Patent Document 3 describes the amount of zinc oxide, but since there is no definition of an oxide containing indium, the atomic ratio between indium and zinc is not exactly known. If the oxide containing indium is the indium oxide (InO) exemplified in paragraph [0050], the atomic ratio N _Zn / (N _In in the oxide layer when the lower limit value of zinc oxide is 10% by weight. + N _Zn ) is about 15%.
However, in the oxide layer containing indium and zinc, when the atomic ratio is 15% or more, since the oxide layer has too much zinc oxide, the conductivity of the oxide deteriorates, and high-definition conductive wiring In electrical mounting, there is a problem that contact resistance increases.
Furthermore, an oxide layer containing a large amount of zinc oxide as in Patent Document 3 also has a problem of poor chemical resistance.
Patent Document 3 does not describe any countermeasure against copper migration.

  Patent Document 4 describes a highly conductive copper alloy having excellent migration resistance. However, as described above, copper or a copper alloy is not inactivated like aluminum. For this reason, the copper alloy in Patent Document 4 cannot avoid deterioration in reliability of electrical connection accompanying copper oxide film growth over time.

The copper oxidation prevention technology described in Patent Document 5 uses pure Al or an Al alloy as a surface layer, but pure Al or an Al alloy is inferior in chemical resistance, so that a wet process such as photolithography is performed after the formation of the conductive wiring. There is a problem that it is difficult to apply.
In addition, the structure in which the copper alloy layer is sandwiched between ITO, which is a composite oxide of indium oxide and tin oxide, is a conductive oxide, and a significant side etch enters the copper alloy layer by wet etching using an etchant. There is a problem that processing for thinning the wiring becomes difficult.

Recently, a pixel density required for a display device is 300 ppi (pixel per inch), and further 500 ppi or more. Such conductive wiring for use in a display device requires a thin line having a line width of 0.5 μm to 6 μm.
However, in a configuration in which copper or copper alloy is sandwiched between ITO, if a thin line is formed by laminating three layers of ITO / copper alloy layer / ITO and then performing a single photolithography process, as described above, There is a bug.
On the other hand, it is conceivable to perform a photolithography process for each thin line. In this case, it is necessary to align the thin line pattern of each layer for each layer. However, for example, if the alignment accuracy of the wiring pattern of one time (one layer) is ± 1.5 μm, the cumulative alignment error of three times (three layers) is ± 4.5 μm. Become. Such a cumulative alignment error is not allowed when, for example, a wiring having a line width of 0.5 μm to 6 μm is formed.
Therefore, with the technique described in Patent Document 5, it is difficult to thin the conductive wiring.

  As explained above, the pattern processability in wet etching is optimized by adjusting the content of tin oxide and zinc oxide contained in the conductive oxide based on indium oxide sandwiching the copper alloy layer The technology to do is not described in any of Patent Documents 1 to 5. Furthermore, none of Patent Documents 1 to 5 describes a technique for optimizing an additive element of a copper alloy in order to improve reliability in a configuration in which a copper alloy is sandwiched between conductive oxides.

  The present invention has been made in view of the above problems, and has a wiring board, a semiconductor device, and a liquid crystal display device that have good reliability and can be easily manufactured even when copper wiring is used. The purpose is to provide.

In order to solve the above-described problems, a wiring board according to a first aspect of the present invention is arranged directly or indirectly on a board and the first conductive oxide layer from the board side. , A copper alloy layer, and a conductive wiring in which the second conductive oxide layer is laminated in this order with the same line width, the first conductive oxide layer and the second conductive oxide The layer is formed of a composite oxide containing indium oxide, zinc oxide, and tin oxide, and the number of atoms of indium, zinc, and tin contained in the composite oxide is expressed as N _In , N _Zn , and N _Sn , respectively. When the atomic ratio of indium, zinc, and tin satisfies the following formulas (1) and (2),
(N _Zn + N _Sn ) / (N _In + N _Zn + N _Sn ) <0.2 (1)
N _Zn / N _Sn > 1.1 (2)
The copper alloy layer has an atomic weight larger than that of copper and copper, a first metal element that forms a solid solution with copper, an atomic weight larger than the atomic weight of copper, and does not form a solid solution with copper A second metal element.

  In the above wiring board, the copper alloy layer contains 0.2 at% or more and 3 at% or less of zinc as the first metal element, and the second metal element is 0.05 at% or more and 0.6 at% or less. % Or less may be included.

  In the wiring board, the second metal element is one or more metal elements selected from the group consisting of zirconium, niobium, molybdenum, cerium, neodymium, samarium, tin, antimony, hafnium, tantalum, tungsten, and bismuth. It may be.

In the wiring board, the atomic ratio of indium, zinc, and tin contained in the composite oxide may satisfy the following formula (3a).
N _Zn / (N _In + N _Zn + N _Sn ) <0.11 (3a)

  The wiring board may include a first black layer in a region covering the first conductive oxide layer in plan view on the substrate.

  The wiring board may include a second black layer in a region covering the second conductive oxide layer on the surface of the second conductive oxide layer opposite to the copper alloy layer. Good.

  In the wiring board, a plurality of the conductive wirings may be formed on the same surface and arranged in parallel at equal intervals in a plan view.

  In the wiring substrate in which a plurality of the conductive wirings are formed on the same surface and arranged in parallel at equal intervals in plan view, a color filter layer is formed in a region partially overlapping with the conductive wirings in plan view. May be.

  In the wiring board, a plurality of the conductive wirings are formed on the first surface, and are arranged at equal intervals and in parallel in a plan view, and the first surface is positioned in the stacking direction. On different second surfaces, they are arranged so as to overlap the first conductive wiring via an insulating layer, and are arranged in parallel and at equal intervals in a direction different from the arrangement direction of the first conductive wiring in a plan view. A second conductive wiring.

  A liquid crystal display device according to a second aspect of the present invention includes a first wiring board comprising the above wiring board in which a plurality of the conductive wirings are formed on the same plane and arranged in parallel in a plan view, and the conductive wiring Between the first wiring board and the second wiring board, a plurality of wirings are formed on the same surface, and the wiring board is formed of the above wiring board arranged in parallel at equal intervals in a plan view. And the conductive wiring in the first wiring board and the conductive wiring in the second wiring board are different from each other in a plan view.

  In the liquid crystal display device, one of the conductive wiring in the first wiring board and the conductive wiring in the second wiring board is used as a detection wiring, and the other is used as a driving wiring. A detection unit that detects a change in capacitance between the conductive wiring and the conductive wiring in the second wiring board, and performs touch sensing based on the change in capacitance detected by the detection unit. You may go.

  A semiconductor device according to a third aspect of the present invention is the above-described wiring board in which a plurality of the conductive wirings are formed on the same surface and arranged in parallel at equal intervals in a plan view, and the conductive wirings are the third wirings. A plurality of third conductive wirings that are formed on the surface and arranged in parallel with each other in a plan view, and a fourth surface that is different in position in the stacking direction from the third surface. A fourth wiring line arranged to overlap the third conductive wiring line and arranged in parallel and at equal intervals in a direction different from the arrangement direction of the third conductive wiring line in plan view A gate electrode, a source electrode, a drain electrode, and a channel layer that is a semiconductor are disposed between the substrate, the substrate in the third wiring substrate, and the third conductive wiring in the third wiring substrate. A plurality of transistors, and the third A wiring line that extends in a certain direction on the substrate and includes a branch portion that is electrically connected to the gate electrode, and the fourth conductive wiring is electrically connected to the source electrode. This is the source wiring to be connected.

  In the semiconductor device, the source electrode and the drain electrode are formed of the first conductive oxide layer, the copper alloy layer, and the second conductive oxide layer, similarly to the fourth conductive wiring. They may be stacked in this order with the same width.

  In the semiconductor device, the channel layer may be made of an oxide semiconductor containing two or more oxides of gallium oxide, indium oxide, zinc oxide, tin oxide, and germanium oxide.

  In the semiconductor device, the third conductive wiring is formed on the third surface at a position covering the channel layer in plan view, and has the same layer configuration as the third conductive wiring. An electrically independent light shielding layer may be provided.

  According to a fourth aspect of the present invention, there is provided a liquid crystal display device comprising: a first wiring board comprising the wiring board, wherein a plurality of the conductive wirings are formed on the same surface and arranged in parallel in a plan view; And a liquid crystal layer sandwiched between the first wiring substrate and the semiconductor device.

  In the liquid crystal display device according to the fourth aspect, the conductive wiring in the first wiring substrate, the third conductive wiring in the semiconductor device, the gate wiring in the semiconductor device, and the fourth in the semiconductor device. A pair of wirings consisting of one wiring selected from the wiring group consisting of the conductive wirings and one wiring selected from the other wirings of the wiring group have different arrangement directions in plan view. A detection unit that detects a change in capacitance between the pair of wirings, wherein one of the pair of wirings is a detection wiring and the other is a drive wiring, and the capacitance change detected by the detection unit is detected. Based on this, touch sensing may be performed.

  According to the wiring substrate, the semiconductor device, and the liquid crystal display device of the present invention, there is an effect that even if a copper wiring is used, it has good reliability and can be easily manufactured.

It is typical sectional drawing which shows an example of a structure of the wiring board of the 1st Embodiment of this invention. It is typical sectional drawing which shows an example of a structure of the wiring board of the modification (1st modification) of the 1st Embodiment of this invention. It is a block diagram which shows an example of a structure of the liquid crystal display device of the 2nd Embodiment of this invention. It is typical sectional drawing which shows an example of a structure of the principal part of the liquid crystal display device of the 2nd Embodiment of this invention. It is a typical top view of the wiring board of a 2nd embodiment of the present invention. It is AA sectional drawing in FIG. It is typical sectional drawing which shows an example of the structure of the wiring board of the 3rd Embodiment of this invention, and a liquid crystal display device. It is an enlarged view of the B section in FIG. It is CC sectional drawing in FIG. It is DD sectional drawing in FIG. It is typical sectional drawing which shows an example of a structure of the liquid crystal display device of the 4th Embodiment of this invention. It is an enlarged view of the E section in FIG. It is typical sectional drawing which shows an example of a structure of the liquid crystal display device of the 5th Embodiment of this invention. It is typical sectional drawing which shows an example of the wiring board of the 5th Embodiment of this invention.

Embodiments of the present invention will be described below with reference to the accompanying drawings. In all the drawings, even if the embodiments are different, the same or corresponding members are denoted by the same reference numerals, and common description is omitted.
In each drawing, the thicknesses of components, ratios of dimensions, and the like are exaggerated for ease of viewing. In each drawing, the shape of a component may be simplified or the number of components may be reduced for easy viewing.

[First Embodiment]
A wiring board according to a first embodiment of the present invention will be described.
FIG. 1 is a schematic cross-sectional view showing an example of the configuration of the wiring board according to the first embodiment of the present invention.

As shown in FIG. 1, the wiring substrate 100 of this embodiment includes a substrate 15 and conductive wiring 11.
The wiring board 100 can be used as various electronic devices or as a part of electronic devices. The wiring substrate 100 may be a semiconductor device including a semiconductor, for example. The wiring board 100 may be a part of a display device that is an electronic device that displays an image or video. For example, the wiring substrate 100 can be used for a display device such as a liquid crystal display device or an organic EL display device.

The substrate 15 is a substrate that does not substantially contain an alkali metal element such as sodium (Na) or potassium (K). Here, “substantially free” is defined as the content of alkali metal elements in the substrate being 1000 ppm or less.
For example, the substrate 15 may be a so-called alkali-free substrate among glass substrates. The alkali-free substrate has optical transparency. Examples of the alkali-free substrate include a substrate made of aluminosilicate glass.
For example, the substrate 15 may be a transparent resin substrate such as a polyester film or a polyimide film.
For example, the substrate 15 may be a silicon wafer.

Copper contained in the conductive wiring 11 to be described later may cause migration in the presence of alkali ions and moisture.
Since the substrate 15 does not substantially contain an alkali metal element, copper migration due to the alkali metal element contained in the substrate 15 can be suppressed.

The conductive wiring 11 is formed on the substrate 15. The conductive wiring 11 is configured by laminating a first conductive oxide layer 1, a copper alloy layer 2, and a second conductive oxide layer 3 in this order from the substrate 15 side.
Hereinafter, in order to describe the positional relationship on the substrate 15, the XYZ coordinate axes shown in FIG. 1 may be referred to. The X axis and the Y axis are two axes orthogonal to each other on a plane parallel to the surface of the substrate 15 in the plate thickness direction. The Z axis is an axis orthogonal to the X axis and the Y axis. The positive direction of the Z-axis is a direction from one surface 15a in the plate thickness direction of the substrate 15 toward the surface 15b on the opposite side.

In the example shown in FIG. 1, the first conductive oxide layer 1 is laminated on the surface 15 a of the substrate 15.
The copper alloy layer 2 is laminated on the surface of the first conductive oxide layer 1 opposite to the substrate 15.
The second conductive oxide layer 3 is laminated on the surface of the copper alloy layer 2 opposite to the first conductive oxide layer 1.

The planar view shape (shape seen from the Z-axis direction) of the conductive wiring 11 is not particularly limited. FIG. 1 shows, as an example, a stripe pattern in which a plurality of conductive wirings 11 extending in the Y-axis direction are arranged at intervals in the X-axis direction. Each conductive wiring 11 is parallel to each other. The arrangement interval of the conductive wirings 11 may be changed or may be equal.
The number of the conductive wirings 11 is three in the drawing, but may be four or more.
The line width of the conductive wiring 11 may be changed depending on the arrangement direction, or may be changed over the extending direction. FIG. 1 shows an example in which the line width of each conductive wiring 11 is constant in the extending direction and does not change in the arrangement direction.
For example, when the wiring substrate 100 is used in a display device such as a liquid crystal display device, the line width of the conductive wiring 11 may be 0.5 μm or more and 6 μm or less, and may exceed 6 μm.
For example, when the wiring substrate 100 is used in a semiconductor device, the conductive wiring 11 can have a submicron line width by using a semiconductor drawing apparatus or exposure apparatus.

Even when the line width changes in the extending direction of the conductive wiring 11 or when the line width is constant, the end face in the arrangement direction (X-axis direction) of the conductive wiring 11 is substantially orthogonal to the surface 15a. (Including the case where they are orthogonal). For this reason, in the conductive wiring 11, the line widths of the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 are equal to each other.
Here, “the line widths are equal to each other” means that, in a cross section (ZX plane) orthogonal to the extending direction of the conductive wiring 11, the variation in the distance from the central axis C of the conductive wiring 11 to the end surface in the X-axis direction is It is defined as being within a range of ± 0.4 μm between the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3.

  With such a configuration, the first conductive oxide layer 1 and the second conductive oxide layer 3 are in close contact with the entire surface of the copper alloy layer 2 in the stacking direction, and the copper alloy layer 2 has a layer thickness. Sandwiched in the direction. For this reason, the surface of the copper alloy layer 2 in the stacking direction is covered with the first conductive oxide layer 1 and the second conductive oxide layer 3.

  The conductive wiring 11 having the same line width of the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 has a single exposure process as will be described later. It can be formed by photolithography.

Both the first conductive oxide layer 1 and the second conductive oxide layer 3 are formed of a complex oxide (mixed oxide) containing indium oxide, zinc oxide, and tin oxide.
The amount of indium oxide in the first conductive oxide layer 1 (second conductive oxide layer 3) is set to be larger than that of zinc oxide and tin oxide in order to reduce electric resistance. Specifically, the atomic ratio of indium (In), zinc (Zn), and tin (Sn) makes indium 0.8 or more.
That is, the atomic ratio of indium, zinc, and tin in the first conductive oxide layer 1 (second conductive oxide layer 3) is the number of atoms of indium, zinc, and tin contained in the composite oxide. And N _In , N _Zn , and N _Sn (where N _In , N _Zn , and N _Sn > 0) are satisfied, the following formula (1) is satisfied.

(N _Zn + N _Sn ) / (N _In + N _Zn + N _Sn ) <0.2 (1)

  It will be described later that the first conductive oxide layer 1 (second conductive oxide layer 3) contains zinc oxide and tin oxide so as to have an atomic ratio in the range of the above formula (1). Since this leads to a reduction in the contact potential difference with the copper alloy layer 2, it also helps to improve the reliability of the conductive wiring 11.

  In order to further reduce the resistance value of the first conductive oxide layer 1 (second conductive oxide layer 3), in the first conductive oxide layer 1 (second conductive oxide layer 3) Indium may be 0.9 or more by atomic ratio of indium, zinc, and tin. That is, the following formula (1a) may be satisfied.

(N _Zn + N _Sn ) / (N _In + N _Zn + N _Sn ) <0.1 (1a)

When the conductive wiring 11 is formed by photolithography, the workability by wet etching deteriorates as the amount of tin oxide increases, and improves as the amount of zinc oxide increases.
Therefore, in the present embodiment, the atomic ratio of zinc and tin in the first conductive oxide layer 1 (second conductive oxide layer 3) satisfies the following formula (2).

N _Zn / N _Sn > 1.1 (2)

  In the first conductive oxide layer 1 (second conductive oxide layer 3), if the amount of zinc oxide increases too much, the specific resistance (electrical resistivity) increases. For this reason, the atomic ratio of zinc in the first conductive oxide layer 1 (second conductive oxide layer 3) may satisfy the following formula (3).

N _Zn / (N _In + N _Zn + N _Sn ) <0.15 (3)

  The smaller the atomic ratio of zinc, the smaller the specific resistance. In order to reduce the specific resistance of the conductive wiring 11, the atomic ratio of zinc in the first conductive oxide layer 1 (second conductive oxide layer 3) may satisfy the following formula (3a).

N _Zn / (N _In + N _Zn + N _Sn ) <0.11 (3a)

In the first conductive oxide layer 1 (second conductive oxide layer 3), when the atomic ratio of zinc is reduced, the atomic ratio of tin is reduced from the relationship of the above formula (2). However, if the amount of tin oxide is too low, it is difficult to obtain a low electrical resistance of the first conductive oxide layer 1 (second conductive oxide layer 3).
On the other hand, if the amount of tin oxide is too large, the processability of etching of the first conductive oxide layer 1 (second conductive oxide layer 3) is lowered. For this reason, the atomic ratio of tin in the first conductive oxide layer 1 (second conductive oxide layer 3) may satisfy the following formula (4).

0.01 <N _Sn / (N _In + N _Zn + N _Sn ) <0.08 (4)

  As described above, the workability of the first conductive oxide layer 1 (second conductive oxide layer 3) by wet etching varies depending on the relative amounts of zinc oxide and tin oxide. The workability of the first conductive oxide layer 1 (second conductive oxide layer 3) by wet etching is preferably the same as the workability of the copper alloy layer 2 by wet etching. If there is an excessive difference in workability by wet etching between the first conductive oxide layer 1 (second conductive oxide layer 3) and the copper alloy layer 2, one of them is selectively etched. In this case, it may be difficult to make the line widths between the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 equal.

  In order to reduce the variation in the line width between the first conductive oxide layer 1 (second conductive oxide layer 3) and the copper alloy layer 2, the first conductive oxide layer 1 (second The atomic ratio of zinc to indium in the conductive oxide layer 3) may satisfy the following formula (5). The atomic ratio of zinc to indium in the first conductive oxide layer 1 (second conductive oxide layer 3) more preferably satisfies the following formula (5a).

0.02 <N _Zn / N _In <0.2 (5)
0.02 <N _Zn / N _In <0.15 (5a)

  In order to reduce the specific resistance of the first conductive oxide layer 1 (second conductive oxide layer 3), the first conductive oxide layer 1 (second conductive oxide layer 3) The atomic ratio of tin in may satisfy the following formula (6).

0.005 <N _Sn / N _In <0.06 (6)

In the first conductive oxide layer 1 (second conductive oxide layer 3), the atomic ratio of tin to indium satisfies the above formula (6), whereby the first conductive oxide layer 1 The specific resistance of (second conductive oxide layer 3) can be reduced.
If the atomic ratio of tin exceeds 0.07, zinc is also added in the range of the above formulas (1) and (2), so the first conductive oxide layer 1 (second conductive oxide layer) The specific resistance of 3) becomes large.
By adjusting the addition amount of tin and zinc within the ranges of the above formulas (1), (3), (5), and (6), the specific resistance is about 5 × 10 ⁻⁴ Ωcm to 3 × 10 ^−4. It can be within the range of Ωcm.

  The first conductive oxide layer 1 (second conductive oxide layer 3) includes indium such as titanium (Ti), zirconium (Zr), magnesium (Mg), aluminum (Al), germanium (Ge), etc. A small amount of oxides of metal elements other than zinc and tin may be added.

The layer thicknesses of the first conductive oxide layer 1 and the second conductive oxide layer 3 may be set as appropriate based on the post-process of the wiring board 100 or the reliability conditions required for the wiring board 100. .
However, since the second conductive oxide layer 3 is located on the outermost surface of the conductive wiring 11, it is likely to receive an external force in a subsequent process at the time of manufacturing. For this reason, the layer thickness of the second conductive oxide layer 3 is preferably thicker than 30 nm.
The layer thickness of the first conductive oxide layer 1 may be, for example, 10 nm or more and 80 nm or less.
The layer thickness of the second conductive oxide layer 3 may be, for example, 30 nm or more and 100 nm or more.

The copper alloy layer 2 includes copper (Cu), a first metal element, and a second metal element.
The first metal element has an atomic weight larger than that of copper and forms a solid solution with copper.
The second metal element has an atomic weight greater than that of copper and does not form a solid solution with copper.
In this specification, “metal element” is used in a broad sense including so-called “metalloid”.
The solubility of metal elements as a solid can be estimated from their atomic radii, the ratio e / a (electron concentration) of the total number e of valence electrons to the total number of atoms a, or chemical affinity.
However, for convenience, it can be determined from a binary phase diagram of metal elements.
In this embodiment, whether or not the metal element forms a solid solution with copper is based on a binary phase diagram of copper and the metal element in a temperature range in consideration of the storage environment temperature of the wiring board 100 and the temperature range during use. Judgment. For example, -40 degreeC or more and 250 degrees C or less are mentioned as an example of the temperature range used for determination.
It is determined that the metal element forms a solid solution with copper when the crystal α in which the metal element is dissolved in less than 50 at% in the temperature range used for determination is formed at 90 at% or more. When the crystal α is not formed or less than 90 at%, it is determined that the metal element does not form a solid solution with copper.

Copper is a metal that has a problem in reliability because it easily causes migration and easily forms whiskers. A similar problem may occur in a copper alloy containing a large amount of copper.
When the present inventors select a metal element other than copper contained in a copper alloy, the metal element that can suppress the movement of copper within the grain (crystal grain) and the copper element at the grain boundary (grain boundary) We thought it important to select a metal element that can suppress movement.
As a result of repeated studies, the present inventors have found that depending on the type of copper alloy used for the copper alloy layer 2, migration of copper and the like can be suppressed.
Furthermore, it is preferable that the kind and addition amount of the metal element selected from these viewpoints are selected so that the electrical conductivity of the copper alloy thin film does not decrease too much.

In the copper alloy layer 2, the first metal element is mainly added to suppress the movement of copper within the grain.
As the metal element added to suppress the movement of copper, a metal element heavier than copper is effective. For this reason, the first metal element is selected from metal elements having an atomic weight greater than that of copper.
The addition amount of the first metal element in the copper alloy layer 2 may be 0.2 at% or more and 3 at% or less.
When the addition amount of the first metal element exceeds 3 at%, the conductivity of the copper alloy layer 2 is lowered.
If the amount of the first metal element added is less than 0.2 at%, the effect of suppressing the movement of copper is reduced.

Among the metal elements that can be dissolved in copper under the above temperature conditions, the metal elements that can be dissolved in 0.2 at% or more include, for example, manganese (Mn), nickel (Ni), zinc (Zn), gallium ( Ga), palladium (Pd), gold (Au), and the like.
These metal elements substitute for copper atoms in the copper grains to form a solid solution with copper. For this reason, the strength of the copper alloy is improved as compared with copper by solid solution strengthening.
The first metal element can be a metal element having a larger atomic weight than copper among such metal elements. As an example of a suitable metal element as the first metal element, one or more of zinc, gallium, palladium, and gold can be selected.
Among the above metal elements, zinc and gold are more preferable because the conductivity decreases as a copper alloy when added. In particular, zinc is more preferable because it is cheaper than gold.

In the copper alloy layer 2, the second metal element is mainly added to suppress the movement of copper at the grain boundary.
For example, the second metal element is zirconium, niobium (Nb), molybdenum (Mo), cerium (Ce), neodymium (Nd), samarium (Sm), tin, antimony (Sb), hafnium (Hf), tantalum ( One or more selected from the group consisting of Ta), tungsten (W), and bismuth (Bi) can be used.
Bismuth is preferable from the viewpoint of the atomic weight because it has an atomic weight three times or more that of copper. Bismuth does not dissolve in copper over a wide range of temperatures.
Antimony has an atomic weight approximately twice that of copper. Furthermore, antimony is particularly preferable from the viewpoint of sputtering deposition of a copper alloy because the sputtering rate when copper alloying is not much different from copper.

It is considered that the movement of copper at the grain boundary is easily accelerated in the presence of sodium, moisture, and the like. When stress such as stress is further applied to the copper thin film or the copper alloy thin film, the copper becomes easier to move.
In order to suppress such movement of copper, the present inventors considered that a different kind of metal element should be arranged as an anchor at the grain boundary. Different metal elements function as anchors because they are heavier than copper.
Since the second metal element does not form a solid solution with copper, the second metal element cannot be dissolved in the crystal α and distributed on the grain boundary. The second metal element precipitates on the grain boundary, thereby suppressing the movement of copper at the grain boundary and improving the mechanical strength of the copper alloy film.

The addition amount of the second metal element may be 0.05 at% or more and 0.6 at% or less.
When the addition amount of the second metal element exceeds 0.6 at%, the conductivity of the copper alloy layer 2 is lowered.
If the amount of the first metal element added is less than 0.05 at%, the effect of suppressing the movement of copper is reduced.

The layer thickness of the copper alloy layer 2 is not particularly limited.
For example, when the copper alloy layer 2 does not need to have light shielding properties, the thickness of the copper alloy layer 2 may be less than 100 nm.
When the thickness of the copper alloy thin film is 100 nm or more, the copper alloy thin film hardly transmits visible light. For this reason, the copper alloy layer 2 can be used as a light-shielding layer that shields visible light by setting the thickness of the copper alloy layer 2 to, for example, 100 nm to 300 nm.
Furthermore, in the case where the layer thickness of the copper alloy layer 2 is thicker than 300 nm, in addition to the light shielding property, the electric resistance can be further reduced.

Next, a method for manufacturing the wiring board 100 will be described.
First, on the substrate 15, the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 are continuously provided in this order in a range including at least a region where the conductive wiring 11 is formed. A film is formed (film formation process).
As the film formation apparatus, a vacuum apparatus such as a sputtering apparatus can be used. The continuous film formation in this step is performed without breaking the vacuum (maintaining the vacuum state in the apparatus).

  A composite oxide containing indium oxide, zinc oxide, and tin oxide (hereinafter referred to as a ternary composite oxide) is formed by sputtering. For example, a target having a thickness of about 7 mm is manufactured.

A target of mixed oxide of indium oxide and tin oxide called ITO is conductive. DC sputtering is more stable than RF sputtering at a high frequency and enables high-speed film formation. In addition, a DC power supply is less expensive than a high-frequency power supply. For this reason, ITO is often formed by DC sputtering.
It is more preferable that the ternary complex oxide for forming the first conductive oxide layer 1 and the second conductive oxide layer 3 is also formed by DC sputtering.
The ternary complex oxide can be formed in the same manner as ITO only by changing the target in an existing ITO film forming apparatus that performs DC sputtering.
In many cases, the copper alloy film is also formed by DC sputtering using a direct current power source. From this viewpoint, it is more preferable to form the ternary composite oxide film by DC sputtering.

  When performing DC sputtering, the target needs to be conductive. However, in a target obtained by sintering a mixed oxide of indium oxide, zinc oxide, and tin oxide, the total amount of zinc oxide and tin oxide is an atomic ratio represented by the left-side expression of the above formula (1). If it exceeds 0.2, the conductivity of the target will be greatly reduced. For this reason, when using DC sputtering, it is more preferable that it is 0.2 or less in the atomic ratio represented by the left-side formula of the above formula (1) in the target.

As an example of the atomic ratio of indium, zinc, and tin contained in the first conductive oxide layer 1, for example, N _In : N _Zn : N _Sn = 90: 8: 2 may be used.

Zinc may be used as the first metal element contained in the copper alloy layer 2, and antimony or bismuth may be used as the second metal element. In this case, as an example of the atomic ratio of copper, zinc and antimony, when the number of atoms of copper and antimony is N _Cu and N _{S b} , respectively, for example, N _Cu : N _Zn : N _Sb = 99.0: 0 .8: 0.2 may be set. As an example of the atomic ratio of copper, zinc, and bismuth, when the number of atoms of copper and bismuth is N _Cu and N _Bi , respectively, for example, N _Cu : N _Zn : N _Bi = 99.0: 0.8: 0 .2 may be used.

An example of the atomic ratio of indium, zinc, and tin contained in the second conductive oxide layer 3 may be N _In : N _Zn : N _Sn = 91: 7: 2.

  The layer thicknesses of the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 may be 30 nm, 200 nm, and 50 nm, respectively.

In this step, after the formation of the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3, heat treatment at 200 ° C. or higher may be performed. In this case, since the amorphous conductive oxide layer is crystallized, the reliability of the conductive wiring 11 can be further improved.
In this step, continuous film formation is performed without breaking the vacuum, so that each interface in the substrate 15, the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 is formed. It is possible to suppress the adhesion of moisture and the like. Therefore, it is possible to prevent a decrease in the reliability of the wiring board 100 due to the adhesion of moisture or the like during the film formation and contamination of the interface between layers.

After completion of the film formation step, the stacked body of the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 is patterned.
In the present embodiment, the stacked body of the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 is wet-etched collectively using a known photolithography technique. To perform patterning. For example, the laminated body of the above-described example may be processed into a striped thin line pattern having a line width of 4 μm and an interval of 21 μm.
With the above, a wiring substrate 100 as shown in FIG. 1 can be manufactured.

According to the wiring substrate 100 of the present embodiment, each surface in the thickness direction of the copper alloy layer 2 is covered with the first conductive oxide layer 1 and the second conductive oxide layer 3 that are in close contact with each other. It has been broken.
For this reason, each surface of the copper alloy layer 2 in the layer thickness direction is protected by the first conductive oxide layer 1 and the second conductive oxide layer 3. For this reason, chemical reaction such as copper migration or oxidation from the surface in the layer thickness direction is suppressed.

Since the first conductive oxide layer 1 and the second conductive oxide layer 3 are composed of a composite oxide containing indium oxide, zinc oxide, and tin oxide, they are conductive ceramics having high hardness.
The conductive wiring 11 has a three-layer structure in which the copper alloy layer 2 is sandwiched between the first conductive oxide layer 1 and the second conductive oxide layer 3, so that an electrically stable and strong mounting can be achieved. Is possible. For example, even if an external force is applied to the wiring substrate 100, the copper alloy layer 2 is sandwiched between the high-strength first conductive oxide layer 1 and the second conductive oxide layer 3, and thus the copper alloy Breakage of layer 2 is prevented.

Copper, copper alloys, or their oxides and nitrides have poor adhesion to transparent substrates such as glass, color filters (including a black layer described later), and the like. For this reason, if the copper alloy layer is brought into direct contact with the surface of the substrate 15, peeling may occur at the interface with the substrate 15.
The peeling of the copper alloy layer is likely to occur, for example, in a high-temperature and high-humidity environment or a manufacturing process involving heat treatment. For example, the copper alloy layer may be peeled off by a heat treatment in a manufacturing process in which a color filter is formed on a conductive wiring after the wiring board is formed.
In addition, copper, copper alloys, or their oxides and nitrides usually have unstable electrical connections and lack reliability. For example, copper oxide or copper sulfide formed over time on a copper surface is close to an insulator and causes a problem in electrical mounting.

However, since the conductive wiring 11 in the present embodiment is in close contact with the substrate 15 via the first conductive oxide layer 1, it is difficult to peel off from the substrate 15.
The first conductive oxide layer 1 has good adhesion to the substrate 15. Therefore, the first conductive oxide layer 1 is firmly fixed to the substrate 15 as compared with the case where the copper alloy layer 2 is directly laminated on the substrate 15, and is prevented from peeling off from the substrate 15. .
Further, the copper alloy layer 2 is formed by being sandwiched between the first conductive oxide layer 1 and the second conductive oxide layer 3 in continuous forming in a vacuum state. For this reason, since the surface of the copper alloy layer 2 is covered with the first conductive oxide layer 1 and the second conductive oxide layer 3, the progress of the chemical reaction can be suppressed. As a result, a state that can withstand electrical mounting can be maintained over time.

As described above, since the copper alloy layer 2 of the conductive wiring 11 is sandwiched between the first conductive oxide layer 1 and the second conductive oxide layer 3, the surface of the copper alloy layer 2 is exposed. Compared to the case, it has high reliability.
However, in the conductive wiring 11, the copper alloy layer 2 is not completely covered. For example, the copper alloy layer 2 is exposed at the end face in the line width direction of the conductive wiring 11. For example, if there is a pinhole or the like in the first conductive oxide layer 1 or the second conductive oxide layer 3, a part of the copper alloy layer 2 is exposed. For this reason, when migration is likely to occur in the copper alloy layer 2, copper may move from the exposed copper alloy layer 2, which may cause problems such as migration.

On the other hand, the copper alloy layer 2 of the conductive wiring 11 contains the first metal element. For this reason, the first metal element is dissolved in the crystal of the copper alloy in the copper alloy layer 2, and the first metal element having a larger atomic weight than the copper atom is substituted for the copper atom in the grain. The movement of copper in the grain is suppressed by the first metal element.
Since the first metal element brings about solid solution strengthening, the strength of the grains of the copper alloy layer 2 is improved.

Furthermore, the copper alloy layer 2 of the conductive wiring 11 contains a second metal element. For this reason, the second metal element having a larger atomic weight than the copper atom is deposited on the grain boundary of the crystal of the copper alloy in the copper alloy layer 2. Since the second metal element functions as an anchor at the grain boundary, the movement of copper at the grain boundary is suppressed.
By interposing the second metal element at the grain boundary, the mechanical strength of the copper alloy layer 2 as a whole is improved.

Thus, according to the wiring board 100 of the present embodiment, the copper alloy layer 2 itself hardly undergoes migration, and the mechanical strength is also improved. For this reason, coupled with being sandwiched between the first conductive oxide layer 1 and the second conductive oxide layer 3, the wiring board 100 has good reliability.
When the wiring substrate 100 is manufactured based on the numerical examples in the manufacturing method described above, the electrical characteristics of the conductive wiring 11 and the adhesion to the substrate 15 are, for example, at a high temperature and high humidity of a temperature of 85 ° C. and a humidity of 85%. In the reliability test which was left for 1000 hours, there was almost no change and it was good. After this reliability test, the conductive wiring 11 was observed, and no copper migration occurred. In the copper alloy layer 2, whiskers and voids were not formed.

The conductive oxides used for the first conductive oxide layer 1 and the second conductive oxide layer 3 are in the range of the atomic ratio of indium, zinc, and tin found by the present inventors as described above. Since zinc oxide and tin oxide are contained, the conductivity is good and the wet etching processability is good. Therefore, a conductive line 11 having a constant line width can be easily manufactured by a single wet etching of the stacked body of the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3. can do.
For this reason, the conductive wiring 11 can be thinned.

  As described above, the wiring board 100 of this embodiment has good reliability and can be easily manufactured even when copper wiring is used.

[First Modification]
Next, a wiring board according to a modification (first modification) of the first embodiment will be described.
FIG. 2 is a schematic cross-sectional view showing an example of the configuration of a wiring board according to a modification (first modification) of the first embodiment of the present invention.

As shown in FIG. 2, the wiring board 110 of this modification is configured by adding a first black layer 4 and a transparent resin layer 9 to the wiring board 100 of the first embodiment.
Hereinafter, a description will be given centering on differences from the first embodiment.

In the case of the wiring substrate 100 according to the first embodiment, when the substrate 15 is a transparent substrate, the first conductive oxide layer 1 has light transmittance. Therefore, when the substrate 15 is viewed from the front surface 15b, copper is used. The alloy layer 2 is visible. Furthermore, the light incident from the surface 15b is reflected by the copper alloy layer 2 and emitted from the surface 15b.
Depending on the use of the wiring board 100, it is not preferable that the copper alloy layer 2 is visible or that external light is reflected by the copper alloy layer 2.
In the wiring board 110 according to this modification, the first black layer 4 prevents the copper alloy layer 2 from being seen from the surface 15b side, and prevents external light incident from the surface 15b from being reflected by the copper alloy layer 2. Provided for. The first black layer 4 is disposed between the substrate 15 and the first conductive oxide layer 1 so as to cover the first conductive oxide layer 1 when viewed from the Z-axis direction.

The first black layer 4 is made of, for example, a colored resin in which a black color material is dispersed.
The reflectance of the first black layer 4 is adjusted to reflectivity, optical density, and color as necessary by appropriately selecting the type of color material, the content of color material, the type of base resin, the layer thickness, and the like. be able to.
For example, the reflectance of the first black layer 4 may be 7% or less. For example, when the wiring substrate 100 is used in a liquid crystal display device, the reflectance of the first black layer 4 is 3% or less in consideration of preventing re-reflection of light from the backlight unit and improving the visibility of the observer. More preferably.
For example, the optical density in the transmission measurement of the first black layer 4 may be set to 2 or less, giving priority to exposure and pattern alignment (alignment) in photolithography which will be described later.
For example, the reflectance of the first black layer 4 may be set so that the reflectance at the interface with the substrate 15 is 3% or less in consideration of the refractive index of the substrate 15.

The volume resistance of the first black layer 4 may be 10 ¹³ Ωcm or more.
What is necessary is just to determine the layer thickness of the 1st black layer 4 as needed. For example, the thickness of the first black layer 4 may be 0.2 μm or more and 3 μm or less.

Examples of the black color material used for the first black layer 4 include carbon, carbon nanotubes, a mixture of a plurality of organic pigments, and the like.
The color material used for the first black layer 4 may be formed using a mixture of a plurality of organic pigments for black color adjustment in addition to carbon.
For example, the color material used for the first black layer 4 contains carbon as a main color material, and may be used by adding an organic pigment such as blue or red. Here, the main coloring material means a coloring material that occupies 51% by mass or more of the entire coloring material.
In this case, the reflection color can be adjusted depending on the type and blending amount of the organic pigment such as blue or red.

When carbon is used for the black color material in the first black layer 4, the carbon concentration is 4% by mass with respect to the total solid content including the resin, the curing agent, and the pigment (hereinafter referred to as total solid content). It is good also as 50 mass% or less. For example, in a liquid crystal display device, in applications where the visibility of the copper alloy layer 2 in the display screen is suppressed, the carbon concentration relative to the total solid content may be about 40% by mass.
The carbon concentration may be a carbon amount exceeding 50% by mass, but if the carbon concentration exceeds 50% by mass with respect to the total solid content, the suitability of the coating film tends to decrease.
When the carbon concentration is less than 4% by mass, sufficient black color cannot be obtained, and the copper alloy layer 2 is easily visually recognized by the reflection of the underlying copper alloy layer 2.

The transparent resin layer 9 is formed so as to cover the surface 15 a of the substrate 15 and the conductive wiring 11.
The transparent resin layer 9 functions as an insulating protective film that seals the conductive wiring 11 and insulates the conductive wiring 11 from each other on the surface 15a.
The kind of resin that forms the transparent resin layer 9 is not particularly limited.

The wiring board 110 can be manufactured in the same manner as in the first embodiment except that the first black layer 4 and the transparent resin layer 9 are formed.
In order to manufacture the wiring substrate 110, before forming the first conductive oxide layer 1, the first black layer 4 is formed on the surface 15a in a range including at least a region where the conductive wiring 11 is to be formed. A uniform black layer is formed using a black coating solution.
Thereafter, a laminate of the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 is formed on the black layer in the same manner as in the first embodiment. To do.
Thereafter, similarly to the first embodiment, patterning is performed by wet-etching the stacked body and the uniform black layer using a photolithography technique.
Thus, a wiring pattern in which the first black layer 4 and the conductive wiring 11 are laminated in this order is formed on the substrate 15.
Thereafter, a resin for forming the transparent resin layer 9 is applied so as to cover each conductive wiring 11.
Thereafter, the applied resin is cured.
Thus, the wiring board 110 is manufactured.

Since the wiring board 110 of the present modification includes the conductive wiring 11 similar to that of the first embodiment, as in the first embodiment, it has good reliability even if a copper wiring is used, and is easy. Can be manufactured.
Furthermore, since the wiring board 110 includes the first black layer 4, the first conductive oxide layer 1 and the copper alloy layer 2 are covered with the first black layer 4 when viewed from the viewing direction 8. Is called. As a result, the copper alloy layer 2 can be prevented from being visually recognized when viewed from the surface 15b side of the substrate 15. Moreover, reflection of external light in the copper alloy layer 2 can be suppressed.
Furthermore, since the conductive wiring 11 is sealed by the transparent resin layer 9 in the wiring substrate 110, the reliability of the conductive wiring 11 can be further improved.

Copper, copper alloys, or oxides and nitrides thereof do not have good adhesion to the first black layer 4 in which the color material is dispersed in the resin.
However, in this modification, the first conductive oxide layer 1 is interposed between the copper alloy layer 2 and the first black layer 4. The adhesion between the first conductive oxide layer 1 and the first black layer 4 is higher than the adhesion between the copper alloy layer 2 and the first black layer 4. For this reason, compared with the case where the copper alloy layer 2 is in direct contact with the first black layer 4, the first conductive oxide layer 1 is more resistant to peeling from the first black layer 4.

[Second Embodiment]
Next, a wiring board and a liquid crystal display device according to a second embodiment of the present invention will be described.
FIG. 3 is a block diagram showing an example of the configuration of the liquid crystal display device according to the second embodiment of the present invention. FIG. 4 is a schematic cross-sectional view showing an example of the configuration of the main part of the liquid crystal display device according to the second embodiment of the present invention. FIG. 5 is a schematic plan view of a wiring board according to the second embodiment of the present invention. 6 is a cross-sectional view taken along line AA in FIG.

  As shown in FIG. 3, the liquid crystal display device 600 of the present embodiment includes a display unit 601 and a control unit 602 for controlling the display unit 601. The liquid crystal display device 600 may include a backlight (not shown).

As shown in FIG. 4, the display unit 601 includes a wiring substrate 200, a liquid crystal layer 60, and an array substrate 210 (wiring substrate). In the display unit 601, the wiring substrate 200, the liquid crystal layer 60, and the array substrate 210 are stacked in this order.
Hereinafter, the XYZ coordinate axes shown in FIG. 4 may be referred to in order to explain the positional relationship in each device portion of the display unit 601. The Z axis is the stacking direction of the wiring substrate 200, the liquid crystal layer 60, and the array substrate 210. The positive direction of the Z axis is a direction from the wiring board 200 toward the array board 210. The X axis and the Y axis are two axes orthogonal to each other and orthogonal to the Z axis. The XYZ coordinate axes are also illustrated in FIGS. 5 and 6 so as to represent the same positional relationship.

  As shown in FIGS. 5 and 6, the wiring board 200 includes a substrate 65, a conductive wiring 11, an insulating layer 19, and a conductive wiring 31. The substrate 65, the conductive wiring 11, the insulating layer 19, and the conductive wiring 31 are stacked in this order in the positive direction of the Z axis in the region where the insulating layer 19 is formed.

The substrate 65 is made of an alkali-free substrate.
As shown in FIG. 5, on the surface 65b (first surface) of the substrate 65, a plurality of conductive wirings 11 (first electrodes) having the same configuration as in the first embodiment with the X-axis direction as the arrangement direction. Conductive wirings) are arranged in parallel to each other at regular intervals. In the present embodiment, the conductive wiring 11 is used as a detection wiring for touch sensing.
Although FIG. 5 shows only 11 conductive wirings 11 for the sake of clarity, the number and interval of the conductive wirings 11 can be appropriately set according to the detection accuracy required for touch sensing and the resolution of touch sensing.

As shown in FIG. 6, the conductive wiring 11 has a stacked structure similar to that of the first embodiment. That is, in the conductive wiring 11, the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 are laminated in this order in the positive direction of the Z-axis direction.
However, the line widths of the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 can be appropriately set according to detection accuracy necessary for touch sensing described later. The line width of the conductive wiring 11 of the present embodiment may be 0.5 μm or more and 6 μm or less, and may exceed 6 μm, as in the first embodiment.
Each conductive wiring 11 is extended in the X-axis direction. The conductive wirings 11 are arranged in parallel to each other at equal intervals with the Y-axis direction as the arrangement direction. Each conductive wiring 11 is arranged in a rectangular area inside the substrate 65.

The insulating layer 19 is made of a transparent resin. As shown in FIG. 5, the insulating layer 19 is formed in a rectangular region covering each conductive wiring 11 except for one end portion in the X-axis direction of each conductive wiring 11. The interface 19a (see FIG. 6) of the insulating layer 19 on the substrate 65 side covers the surface of the second conductive oxide layer 3 of each conductive wiring 11 and the side surface of each conductive wiring 11 in the line width direction. .
In the insulating layer 19, a surface 19b (second surface) opposite to the interface 19a is a plane parallel to the surface 65b.
In each conductive wiring 11, a portion extending from the insulating layer 19 constitutes a terminal portion 10 a used for electrical mounting with a conductive portion 64 described later.
The volume resistance of the insulating layer 19 may be 10 ¹³ Ωcm or more.

A plurality of conductive wirings 31 are provided on the surface 65b and on the surface of the insulating layer 19 opposite to the surface in close contact with the conductive wiring 11. In the present embodiment, the conductive wiring 31 is used as a drive wiring for touch sensing.
Each conductive wiring 31 includes a first wiring portion 31a (second conductive wiring) and a second wiring portion 31b.

Each first wiring portion 31a is a wiring portion that extends in the X-axis direction so as to intersect the conductive wiring 11 at a right angle in plan view. Each first wiring portion 31 a has one end portion in the extending direction extending outside the insulating layer 19 and closely contacting the surface 65 b of the substrate 65.
The first wiring portions 31a are arranged in parallel to each other at equal intervals with the Y-axis direction as the arrangement direction. The interval between the first wiring portions 31a may be different from the interval in the arrangement direction of the conductive wires 11, but in the present embodiment, the interval is the same as the interval in the arrangement direction of the conductive wires 11. 5 and 6, the number of the conductive wirings 31 is thinned out as appropriate for easy viewing.
Each first wiring portion 31 a is a conductive wiring that is indirectly disposed on the substrate 65 via the conductive wiring 11 and the insulating layer 19.

  Each 2nd wiring part 31b is a wiring part for electrically connecting each 1st wiring part 31a to the electroconductive part 64 mentioned later. Each second wiring portion 31b extends from the end portion of the first wiring portion 31a extended on the surface 65b in the same direction as the extending direction from the insulating layer 19 of the conductive wiring 11 in the Y-axis direction. An end portion in the extending direction of each second wiring portion 31b extends to a position aligned with the terminal portion 10a in each conductive wiring 11 in the X-axis direction. An end portion in the extending direction of each second wiring portion 31b constitutes a terminal portion 10b used for electrical mounting with a conductive portion 64 described later.

  Each conductive wiring 31 has the same laminated structure as the conductive wiring 11 in the first embodiment. That is, as shown in FIG. 6, in the conductive wiring 31, the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 are in this order in the positive direction of the Z-axis direction. Laminated.

In order to manufacture the wiring substrate 200, the conductive wiring 11 is formed on the substrate 65 in the same manner as in the first embodiment, and then the insulating layer 19 is laminated on the surface 65 b and the conductive wiring 11. The insulating layer 19 may be formed by vacuum-depositing a transparent oxide or nitride, or by applying a transparent resin such as an acrylic resin. Furthermore, a laminated structure of a transparent resin and an inorganic film may be used.
Thereafter, a film forming process similar to that of the first embodiment is performed on the surfaces 65b and 19b.
Thereafter, the stacked body of the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 formed in this film forming step is patterned. This patterning is performed by the same photolithography technique as in the first embodiment. However, the wiring pattern of the conductive wiring 31 is used as the exposure pattern.

As shown in FIG. 4, the liquid crystal layer 60 is a liquid crystal that is horizontally aligned with respect to the respective substrate surfaces of a substrate 65 and a substrate 62 of an array substrate 210 described later.
The liquid crystal layer 60 is driven by a fringe electric field between a pixel electrode 61 on the array substrate 210 described later and a common electrode (not shown). The common electrode is disposed on the array substrate 210 via the insulating layer 23 below the pixel electrode 61 (on the positive side in the Z-axis direction).
In FIG. 4, illustration of a well-known alignment film, an optical film such as a polarizing plate, a common electrode, and a gate wiring and a source wiring connected to a driving TFT (thin film transistor) are omitted in the liquid crystal device.

In order to drive the liquid crystal layer 60, the array substrate 210 has a plurality of TFTs (not shown) arranged in a matrix.
The array substrate 210 includes a substrate 62, insulating layers 21, 22, 23, pixel electrodes 61, and conductive wiring 63.
The insulating layer 21 and the conductive wiring 63 are disposed on the surface 62 a facing the liquid crystal layer 60 in the thickness direction of the substrate 62. The insulating layers 22 and 23 and the pixel electrode 61 are stacked in this order on the insulating layer 21 in the negative direction in the Z-axis direction.

  The substrate 62 is made of an alkali-free substrate. A backlight (not shown) may be disposed at a position on the substrate 62 that faces the surface 62b opposite to the surface 62a.

Although the detailed illustration is omitted, the array substrate 210 includes various semiconductor elements and wirings formed by a semiconductor process.
The array substrate 210 includes at least a plurality of TFTs arranged in a matrix according to the pixel arrangement of the liquid crystal layer 60 in order to drive the liquid crystal layer 60. The source electrode and the gate electrode of each TFT are electrically connected to a video signal timing control unit 603 described later through the source wiring and the gate wiring, respectively. Each TFT operates based on a control signal from the video signal timing control unit 603 input through the source wiring and the gate wiring.
The array substrate 210 may include any one of functional elements such as a diode, a switching element, and a memory as another semiconductor element of the TFT.

A plurality of pixel electrodes 61 are formed corresponding to each pixel of the liquid crystal layer 60. Each pixel electrode 61 is electrically connected to a drive circuit including a TFT by a wiring not shown. A liquid crystal driving voltage is applied to each pixel electrode 61 when the TFT is driven based on a control signal from the video signal timing control unit 603.
When a driving voltage is applied to the pixel electrode 61, a fringe electric field is generated between the liquid crystal layer 60 and a common electrode (not shown), and the liquid crystal is driven. The voltage applied to the pixel electrode 61 for driving the liquid crystal is called a liquid crystal driving voltage. In the following description, the voltage applied to the conductive wiring for touch sensing drive may be referred to as touch drive voltage.

The conductive wiring 63 is formed in the same number as the terminal portions 10a and 10b in order to detect the electrostatic capacitance C1 between the conductive wiring 11 and the conductive wiring 31 in the wiring substrate 200. As shown in FIG. 3, the conductive wiring 63 is electrically connected to a touch sensing scanning signal control unit 604 of the control unit 602 described later.
The conductive wiring 63 has a stacked structure similar to that of the conductive wiring 11 in the first embodiment. That is, in the conductive wiring 63, the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 are laminated in this order in the negative direction of the Z-axis direction.
The wiring pattern, line width, etc. in plan view of each conductive wiring 63 are not particularly limited.

As shown in FIG. 4, the liquid crystal display device 600 is bonded with the liquid crystal layer 60 sandwiched between the wiring substrate 200 and the array substrate 210 described above. A seal portion 67 that seals the liquid crystal layer 60 is formed between the substrates 65 and 62 on the outer periphery of the liquid crystal layer 60.
The seal part 67 is made of, for example, an electrically insulating resin.

Inside the seal portion 67, a conductive portion 64 that electrically connects the terminal portion 10a, the terminal portion 10b (see FIG. 5) and the conductive wiring 63 may be disposed. Alternatively, electrical connection may be performed outside the seal portion 67 by extending the terminal portion 10a.
Since the surfaces of the terminal portions 10a and 10b and the conductive wiring 63 are composed of the second conductive oxide layer 3 with extremely easy ohmic contact, the electrical portions 64 are electrically connected to each other by the conductive portions 64 extending between the substrates 65 and 62. A connection is made.
Since the dimension is exaggerated in FIG. 4, the conductive portion 64 is drawn in a column shape, but the shape of the conductive portion 64 is not limited to the column shape.
As the conductive part 64, for example, various well-known conductors such as a conductive ball that covers a resin sphere with a metal film, a metal sphere such as a solder ball, and an anisotropic conductive film can be applied.

Since the number of the terminal portions 10a and 10b becomes enormous according to the number of pixels of the liquid crystal layer 60, the line width of the conductive wirings 11 and 63 becomes fine. However, the second conductive oxide layer 3 has a small contact resistance and is stable. Furthermore, the second conductive oxide layer 3 has a high mechanical strength. Therefore, the conductive wirings 11 and 63 having the second conductive oxide layer 3 on the surface are suitable for electrical connection in a fine structure with a narrow contact region.
In the electrical mounting of the wiring substrate 200 and the array substrate 210, the terminal portions 10a and 10b and the conductive wiring 63 are likely to be subjected to stress that may cause damage due to re-implementation of electrical mounting or malfunction during handling.
However, in the present embodiment, since the second conductive oxide layer 3 on the surfaces of the terminal portions 10a and 10b and the conductive wiring 63 is also a ceramic harder than a metal, the copper alloy layer 2 is protected and disconnection is prevented. it can.

  The conductive portion 64 electrically connects the conductive wires 11 and 63 facing each other between the substrates 65 and 62 in the Z-axis direction. For this reason, the conductive portion 64 can be easily disposed even in a narrow frame region on the outer periphery of the liquid crystal layer 60. As a result, the wiring of the liquid crystal display device 600 can be simplified, and the external shape and frame area of the liquid crystal display device 600 can be reduced.

  As shown in FIG. 3, the control unit 602 includes a video signal timing control unit 603, a touch sensing scanning signal control unit 604 (detection unit), and a system control unit 605 (detection unit).

The video signal timing control unit 603 sets a common electrode (not shown) to a constant potential and sends a signal to the source wiring 211 and the gate wiring 212 of the array substrate 210 of the display unit 601.
Signals sent from the source wiring 211 and the gate wiring 212 to the array substrate 210 are input to a driving circuit including TFTs, whereby liquid crystal based on a video signal is provided between the common electrode and each pixel electrode 61. A drive voltage is applied. In the liquid crystal layer 60, the liquid crystal molecules are driven in the pixels to which the liquid crystal driving voltage is applied, and an image is displayed according to the driving state of the liquid crystal molecules in each pixel.

The touch sensing scanning signal control unit 604 applies a touch drive voltage to the plurality of conductive wirings 31 serving as drive wirings with the plurality of conductive wirings 11 serving as detection wirings having a constant potential.
The touch sensing scanning signal control unit 604 detects a change in capacitance between the conductive wiring 31 and the conductive wiring 11 and performs touch sensing.

The system control unit 605 controls the video signal timing control unit 603 and the touch sensing scanning signal control unit 604 in order to perform liquid crystal driving and touch sensing.
The liquid crystal drive and the detection of the change in capacitance in touch sensing may be performed in a time division manner.
In liquid crystal driving using an active element (TFT), a liquid crystal driving voltage is applied to each pixel electrode via an active element to perform white display (video display). For example, after the white display, when the black display is not applied with the driving voltage (black state), the backlight unit may be turned off and the touch sensing drive may be performed during the black display period.
For example, the driving frequency of liquid crystal driving and touch sensing touch driving may be changed.
Alternatively, the S / N ratio of touch sensing can be improved by shifting the driving voltage pulse timing of either liquid crystal driving or touch driving so as not to interfere.

The liquid crystal display device 600 described above can perform image display on the display unit 601 by controlling the liquid crystal layer 60 of the display unit 601 by the control unit 602.
Furthermore, the liquid crystal display device 600 can perform touch sensing by including the conductive wirings 11 and 31 formed on the wiring substrate 200, the touch sensing scanning signal control unit 604, and the system control unit 605.

Here, the operation of touch sensing in the liquid crystal display device 600 will be briefly described.
Under the control of the system control unit 605, the touch sensing scanning signal control unit 604 performs a capacitance detection operation in a time division manner.
In the capacitance detection operation, the touch sensing scanning signal control unit 604 applies an AC rectangular wave or a DC rectangular wave to the conductive wiring 31, and a portion where the conductive wiring 31 and the conductive wiring 11 intersect in plan view (hereinafter, referred to as a plan view). , Each of which is referred to as an intersection).
For example, as indicated by an arrow T in FIG. 4, when a pointer such as a finger shakes on the surface 65a of the substrate 65, the capacitance C1 of the portion touched by the pointer changes. The touch sensing scanning signal control unit 604 sequentially scans the capacitance of the intersection, thereby specifying the position of the intersection touched by the pointer.
When a touch is detected, the touch sensing scanning signal control unit 604 sends position information of the touched intersection to the system control unit 605.

The wiring board 200 that is the wiring board of the liquid crystal display device 600 of the present embodiment includes the conductive wirings 11 and 31, and the array substrate 210 includes the conductive wiring 63, respectively.
Since each of the conductive wirings 11, 31, and 63 has the same laminated structure as that of the first embodiment, the wiring substrate 200 and the array substrate 210 are formed of a copper wiring similar to the conductive wiring 11 of the first embodiment. Even if it uses, it has favorable reliability and can be manufactured easily.

The wiring substrate 200 includes a plurality of conductive wires 11 that are first conductive wires and a plurality of first wiring portions 31 a that are second conductive wires via an insulating layer 19 on a substrate 65. The plurality of conductive wirings 11 and the plurality of first wiring portions 31a are arranged in parallel at equal intervals in different arrangement directions. For this reason, the conductive wirings 11 and 31 are conductive wirings suitable for touch sensing.
Since the conductive wirings 11 and 31 have high conductivity by using the copper alloy layer 2, low noise touch sensing is possible. Furthermore, since the conductive wirings 11 and 31 can prevent deterioration of the conductive performance over time due to migration, oxidation, etc., the touch sensing performance (sensitivity, S / N ratio, etc.) is stable over time.

  The liquid crystal display device 600 is an example in which the touch sensing detection wiring and the driving wiring are provided on one wiring board 200. In this case, since the relative positional relationship between the detection wiring and the drive wiring is determined in the process of manufacturing the wiring substrate 200, the position of the intersection of the detection wiring and the drive wiring can be easily positioned with respect to the substrate 65.

In the liquid crystal display device 600, touch sensing detection wiring and drive wiring are provided on the substrate 65, and conductive wiring 63 that electrically connects them to the touch sensing scanning signal control unit 604 is provided on the substrate 65 through the liquid crystal layer 60. It is provided on the substrate 62 facing each other. The connection between the conductive wirings 11 and 31 and the conductive wiring 63 is performed on the outer peripheral portion of the liquid crystal layer 60 by the conductive portion 64 extending between the substrates 65 and 62.
Therefore, the wiring of the liquid crystal layer 60 can be simplified and the size can be reduced.
Furthermore, since the conductive portion 64 is connected to the conductive wirings 11, 31, and 63 with low contact resistance and high reliability, the reliability of wiring connection between the wiring substrate 200 and the array substrate 210 can be improved.

[Third Embodiment]
Next, a wiring board, a semiconductor device, and a liquid crystal display device according to a third embodiment of the present invention will be described.
FIG. 7 is a schematic cross-sectional view showing an example of the configuration of the wiring board and the liquid crystal display device according to the third embodiment of the present invention. FIG. 8 is an enlarged view of a portion B in FIG. 9 is a cross-sectional view taken along the line CC in FIG. 10 is a cross-sectional view taken along the line DD in FIG.

As shown in FIG. 3, the liquid crystal display device 700 of this embodiment includes a display unit 701 instead of the display unit 601 of the liquid crystal display device 600 of the second embodiment. The liquid crystal display device 700 may include a backlight (not shown).
Hereinafter, a description will be given focusing on differences from the second embodiment.

As shown in FIG. 7, the display unit 701 includes a wiring substrate 300 (first wiring substrate), a liquid crystal layer 70, and an array instead of the wiring substrate 200, the liquid crystal layer 60, and the array substrate 210 in the second embodiment. A substrate 310 (wiring board, semiconductor device, second wiring board, third wiring board) is provided. In the display unit 701, the wiring substrate 300, the liquid crystal layer 70, and the array substrate 310 are stacked in this order.
Hereinafter, in order to describe the positional relationship in each device portion of the display unit 701, the XYZ coordinate axes (see FIG. 7) arranged in the same manner as in the second embodiment may be referred to.

In the wiring board 300, the conductive wiring 31 and the insulating layer 19 of the wiring board 200 in the second embodiment are deleted, and the first black layer 4, the second black layer 5, the color filter layers FR, FG, FB, And the transparent resin layer 12 is added and comprised.
Each conductive wiring 11 in the wiring board 300 of the present embodiment is used as a detection wiring in touch sensing, as in the second embodiment. Terminal portions 10a (not shown) of the respective conductive wirings 11 are electrically connected to wirings 702 (see FIG. 3) in the array substrate 310, which will be described later, by the same configuration as that of the second embodiment. As shown in FIG. 3, the wiring 702 is electrically connected to the touch sensing scanning signal control unit 604.

The first black layer 4 in the present embodiment has the same configuration as that of the first modification of the first embodiment. However, in the first black layer 4 of the present embodiment, the copper alloy layer 2 of the conductive wiring 11 can be seen from the surface 65a side which is the outer surface of the display unit 701, or external light incident from the surface 65a is reflected on the copper alloy layer 2. It is provided to prevent the light from being reflected by.
As shown in FIG. 8, the first black layer 4 of the present embodiment is a first black layer between the substrate 65 and the first conductive oxide layer 1 of the conductive wiring 11 as viewed from the Z-axis direction. It arrange | positions so that the conductive oxide layer 1 may be covered.

The second black layer 5 is provided to reduce the amount of reflected light due to light propagating inside the display unit 701 and to suppress noise light incident on the array substrate 310.
The second black layer 5 is arranged so as to sandwich the conductive wiring 11 with the first black layer 4. The second black layer 5 directly covers the second conductive oxide layer 3 of the conductive wiring 11. However, the second black layer 5 is not formed in a portion used for electrical connection in the terminal portion 10a, for example.
The line width of the second black layer 5 is equal to the line width of the conductive wiring 11.
The configuration of the second black layer 5 can be appropriately selected from the configurations possible for the first black layer 4 described in the first embodiment.
The reflectance of the second black layer 5 can be appropriately set based on the allowable amount of noise light.

The color filter layers FR, FG, and FB are resin filters colored in red, green, and blue, respectively.
The color filter layers FR, FG, and FB are disposed between the adjacent conductive wirings 11 on the surface 65 b of the substrate 65. The color filter layers FR, FG, and FB are disposed at positions that cover the red pixel, the green pixel, and the blue pixel in the liquid crystal layer 70, respectively.
The layer thicknesses of the color filter layers FR, FG, and FB are thicker than the height from the surface 65b to the surface of the second black layer 5, and each cover a part of the second black layer 5. The first black layer 4, the conductive wiring 11, and the second black layer 5 are covered with two color filter layers adjacent to each other in the Y-axis direction among the color filter layers FR, FG, and FB.

  The transparent resin layer 12 is a layered portion that has optical transparency and forms a surface of the wiring substrate 300 opposite to the substrate 65. The transparent resin layer 12 is laminated on the color filter layers FR, FG, and FB on the side opposite to the substrate 65.

The liquid crystal layer 70 is a horizontally aligned liquid crystal, similar to the liquid crystal layer 60 of the second embodiment, and is driven by a fringe electric field between a pixel electrode 71 on the array substrate 310 (to be described later) and a common electrode 72. The In FIG. 7, optical films such as alignment films and polarizing plates that are well-known in the liquid crystal device are not shown.

As shown in FIG. 7, the array substrate 310 includes a substrate 62 and insulating layers 21, 22, and 23 similar to the array substrate 210 of the second embodiment, a pixel electrode 71, and a common electrode 72.
Hereinafter, when referring to the relative position of the array substrate 310, for the sake of simplicity, the positive direction side in the Z-axis direction may be referred to as the lower side and the negative direction side may be referred to as the upper side, as illustrated in FIG.

As shown in FIG. 9, the pixel electrode 71 extends in the X-axis direction and is arranged for each pixel.
As shown in FIG. 10, the pixel electrode 71 is disposed on the upper surface 23 a (third surface) in the insulating layer 23 (the negative direction side in the Z-axis direction).
The common electrode 72 is disposed on the upper surface 22 a of the insulating layer 22 at a position facing the pixel electrode 71 through the insulating layer 23. Therefore, the common electrode 72 is disposed below the pixel electrode 71 (on the negative side in the Z-axis direction) with the insulating layer 23 interposed therebetween.

A TFT 73 that applies a driving voltage to the pixel electrode 71 is formed in the insulating layers 21 and 22. The same number of TFTs 73 as the pixels are formed.
Each TFT 73 includes a gate electrode 76, a source electrode 77, a drain electrode 78, and a channel layer 79.
The gate electrode 76 extends in the Y-axis direction on the surface 62 a of the substrate 62.

The channel layer 79 is disposed above the gate electrode 76 with the insulating layer 21 interposed therebetween.
The channel layer 79 may be formed of a silicon semiconductor such as polysilicon or amorphous silicon. The channel layer 79 is more preferably an oxide semiconductor. As the oxide semiconductor used for the channel layer 79, an oxide semiconductor such as IGZO is more preferable. IGZO is an oxide semiconductor containing two or more metal oxides of gallium, indium, zinc, tin, germanium, magnesium, and aluminum.

When a silicon semiconductor is used, dry etching is used for pattern formation of the channel layer 79. However, for example, if a conductive wiring containing copper or a copper alloy is formed in the gate wiring or the like, copper may diffuse into the silicon semiconductor in this dry etching process, and the semiconductor function may be damaged.
On the other hand, when an oxide semiconductor such as IGZO is used, wet etching can be used for pattern formation of the channel layer 79. Therefore, copper does not diffuse and contaminate the channel layer 79 in the pattern formation process of the channel layer 79.

By using an oxide semiconductor such as IGZO for the channel layer 79, the influence of coupling noise generated in dot inversion driving can be reduced.
An active element using an oxide semiconductor such as IGZO can process a rectangular signal driven by liquid crystal, which is a video signal, in an extremely short time (for example, 3 msec), and performs touch sensing in a voltage holding period after the rectangular signal is applied. Signal processing can be performed.
An oxide semiconductor such as IGZO has a memory property that can hold a voltage applied to a pixel electrode in liquid crystal display after application of a video signal. In other words, the liquid crystal drive voltage applied to the display pixel can be held after the liquid crystal drive voltage is applied as a rectangular signal.
For this reason, no new noise is generated during the voltage holding period after the rectangular signal is applied, and the influence of noise on touch sensing caused by liquid crystal driving can be further reduced.

Since an oxide semiconductor such as IGZO has a high electric withstand voltage, a liquid crystal can be driven at a high speed with a high voltage, which is advantageous for three-dimensional image display.
A transistor that uses an oxide semiconductor such as IGZO for a channel layer has high memory properties, and thus has an advantage that flicker (display flicker) hardly occurs even when the liquid crystal driving frequency is set to a low frequency of about 0.1 Hz to 60 Hz. The use of a transistor including an oxide semiconductor for the channel layer can realize not only an improvement in the S / N ratio of touch sensing but also a liquid crystal display device with low power consumption and less flicker.

A source electrode 77 and a drain electrode 78 are formed on the upper surface 21 a of the insulating layer 21 and the upper side of the channel layer 79 so as to face each other in the X-axis direction.
The source electrode 77 and the drain electrode 78 can employ a known configuration.
The source electrode 77 and the drain electrode 78 may have a stacked structure similar to that of the conductive wiring 11 in the first embodiment.

The stacked structure similar to the conductive wiring 11 in the first embodiment is particularly suitable when the channel layer 79 is an oxide semiconductor. This point will be briefly described.
An oxide semiconductor such as IGZO requires heat treatment at a high temperature of, for example, 300 ° C. to 700 ° C. in order to ensure reliability. At this time, when copper or a copper alloy is in direct contact with the surface of the oxide semiconductor, the copper contained in the copper or copper alloy reduces the surface of the oxide semiconductor or is contained in the copper or copper alloy. Copper diffuses into the semiconductor. This may impair the semiconductor function of an oxide semiconductor such as IGZO.
However, when the source electrode 77 and the drain electrode 78 have the same laminated structure as that of the conductive wiring 11 in the first embodiment, the copper alloy layer 2 has the first conductive oxide layer 1 and the second conductive property. Since it is sandwiched between the oxide layers 3, contact between the copper contained in the copper alloy layer 2 and the channel layer 79 is prevented. Thereby, even when the channel layer 79 is made of an oxide semiconductor such as IGZO, there is no possibility that the semiconductor function of the channel layer 79 is impaired.

When the source electrode 77 and the drain electrode 78 have the same stacked structure as that of the conductive wiring 11 in the first embodiment, the surface portion of the first conductive oxide layer 1 in contact with the channel layer 79 is oxygen-rich. May be formed.
Alternatively, a lanthanoid metal oxide is formed on the surface portion of the first conductive oxide layer 1 in contact with the channel layer 79 in order to promote the oxidation of the first conductive oxide layer 1. Also good. Alternatively, a lanthanoid metal oxide may be added to the surface portion of the first conductive oxide layer 1 in contact with the channel layer 79.
Lanthanoid-based oxides are stable oxides and can suppress reduction of oxide semiconductors such as IGZO.

As shown in FIG. 9, a gate wiring 75 extending in the Y-axis direction is formed in the vicinity of each TFT 73. The gate wiring 75 branches toward the gate electrode 76 in the vicinity of the TFT 73 and is electrically connected to the gate electrode 76.
As shown in FIG. 10, the gate wiring 75 is formed on the surface 62 a of the substrate 62 like the gate electrode 76.
In this embodiment, the gate electrode 76 and the gate wiring 75 have a three-layer structure of molybdenum / aluminum alloy / molybdenum in which an aluminum alloy is sandwiched between molybdenum.
When an aluminum alloy is employed, copper contamination from the end portions (corners and edge portions) of the gate electrode 76 and the gate wiring 75 to which heat treatment in a later process is added can be suppressed. Thereby, deterioration of the characteristics of the TFT 73 is prevented.
When the metal layers of the gate electrode 76 and the gate wiring 75 are formed of copper or the like, cracks due to thermal history may occur in the insulating layer 21 on the end portions thereof. Copper and copper oxide may diffuse through this crack. In the case of aluminum or an aluminum alloy, a stable non-conductive film is obtained as an aluminum oxide, so that contamination due to diffusion hardly occurs.

  The drain electrode 78 is electrically connected to the pixel electrode 71 through a via that penetrates the insulating layers 23 and 22.

As shown in FIG. 9, a source wiring 66 extending in the X-axis direction is formed in the vicinity of each TFT 73.
As shown in FIG. 10, the source wiring 66 is formed on the surface 21 a (fourth surface) of the insulating layer 21 and is electrically connected to the source electrode 77.

On the upper side of the channel layer 79, a light shielding pattern 84 (light shielding layer, conductive wiring) is laminated via insulating layers 22 and 23.
The light shielding pattern 84 is provided in order to prevent light traveling from the upper side of the array substrate 210 toward the channel layer 79 from entering the channel layer 79.
As an example of light traveling toward the channel layer 79, external light incident on the substrate 65, or such external light and a backlight (not shown) enter the display unit 701, and are internally reflected at each interface of the display unit 701. Light (re-reflected light).

As shown in FIG. 9, conductive wiring 74 (third conductive wiring, drive wiring) extending in the Y-axis direction is formed on the surface 23 a above each gate wiring 75 in the same manner as the gate wiring 75.
Each conductive wiring 74 is used as a drive wiring in touch sensing. Each conductive wiring 74 is electrically connected to the touch sensing scanning signal control unit 604 by a wiring 703 in the array substrate 310 (see FIG. 3).

Although a detailed cross-sectional configuration is not shown, in the array substrate 310, the gate wiring 75, the gate electrode 76, the source wiring 66, the light shielding pattern 84, and the conductive wiring 74 all have a stacked structure similar to that of the conductive wiring 11.
The light shielding pattern 84 and the conductive wiring 74 can be manufactured together by the same process.
Note that the conductive wiring 74 and the light shielding pattern 84 may be covered with a resin, an insulating inorganic oxide, or the like.
In the array substrate 310, the wirings 702 and 703 may have a stacked structure similar to that of the conductive wiring 11. However, the wirings 702 and 703 may have a laminated structure having a material and the number of layers different from those of the conductive wiring 11, or may be a conductive wiring having no laminated structure.

As shown in FIG. 3, the control unit 602 in the present embodiment performs the same control operation as in the second embodiment.
However, the video signal timing control unit 603 in the present embodiment sends a signal through the source wiring 66 and the gate wiring 75 instead of the source wiring 211 and the gate wiring 211 in the second embodiment.
The touch sensing scanning signal control unit 604 in the present embodiment is electrically connected to the wirings 702 and 703 instead of the plurality of conductive wirings 63 in the second embodiment. The touch sensing scanning signal control unit 604 detects the capacitance C <b> 2 between the conductive wiring 11 and the conductive wiring 74 via the wirings 702 and 703. The touch sensing scanning signal control unit 604 detects a change in capacitance between the conductive wiring 11 and the conductive wiring 74 and performs touch sensing.

  The liquid crystal display device 700 described above can perform color image display on the display unit 701 by controlling the liquid crystal layer 70 of the display unit 701 by the control unit 602.

Furthermore, the liquid crystal display device 700 includes the conductive wiring 11 formed on the wiring substrate 300, the conductive wiring 74 formed on the array substrate 310, the touch sensing scanning signal control unit 604, and the system control unit 605, thereby enabling touch. Sensing can be performed.
Since the conductive wirings 11 and 74 have the same configuration as that of the conductive wirings 11 and 31 of the second embodiment except that the relative positions in the Z-axis direction are different, touch sensing is performed similarly to the second embodiment. This is a suitable wiring.

In the display unit 701, a light shielding pattern 84 is disposed on the upper side of the TFT 73.
The light blocking pattern 84 can prevent light propagating in the display portion 701 from entering the TFT 73. For this reason, malfunctioning of the TFT 73 can be prevented, and deterioration in image quality can be prevented.
For example, in a liquid crystal display device having a high-definition pixel of 300 ppi or more, the relative size of the TFT with respect to the size of the pixel increases, so that light in the device is likely to enter the TFT. For this reason, by providing the light-shielding pattern 84, the malfunction caused by the incident light to the TFT 73 is reduced even in high definition, and the image quality can be prevented from deteriorating.

The display unit 701 of the present embodiment can be manufactured in substantially the same manner as the display unit 601 of the second embodiment.
The wiring substrate 300 that is the wiring substrate of the liquid crystal display device 700 of the present embodiment includes the conductive wiring 11. The array substrate 310 as the third wiring substrate includes a source wiring 66 and a conductive wiring 74.
Since these wirings all have the same laminated structure as that of the conductive wiring 11 of the first embodiment, the wiring board 300 and the array substrate 310 may be made of copper wiring as in the first embodiment. It has good reliability and can be manufactured easily.
Furthermore, in the array substrate 310, when the source electrode 77 and the drain electrode 78 have the same laminated structure, the source wiring 66, the source electrode 77, and the drain electrode 78 can be formed in the same layer by the same manufacturing process. , Making manufacturing easier.
In particular, in the case where the channel layer 79 is made of an oxide semiconductor such as IGZO, the manufacturing is facilitated in that wet etching can be used for the entire manufacturing process of the TFT 73.
Further, as described above, the copper alloy layer 2 can be prevented from directly touching an oxide semiconductor such as IGZO of the channel layer 79 by way of the first conductive oxide layer 1. Can be improved.

In the liquid crystal display device 700 of this embodiment, when an oxide semiconductor such as IGZO is used for the channel layer 79 of the TFT 73, the TFT 73 performs dot inversion driving at a low liquid crystal driving frequency, and at a touch driving frequency different from this. Touch sensing drive can be performed. In this way, the liquid crystal display device 700 can perform high-quality video display with low power consumption, and can perform highly accurate touch sensing. The touch drive frequency can be higher than the liquid crystal drive frequency.
Further, when adopting, for example, dot inversion driving as the liquid crystal driving method, a constant voltage for maintaining the voltage of the pixel electrode at a constant voltage (constant potential) by using IGZO with good memory characteristics for the channel layer 79. It is also possible to omit an auxiliary capacity (storage capacitor or storage capacitor) necessary for driving. In this case, the wiring structure of the array substrate can be simplified.

[Fourth Embodiment]
Next, a wiring board, a semiconductor device, and a liquid crystal display device according to a fourth embodiment of the present invention will be described.
FIG. 11 is a schematic cross-sectional view showing an example of the configuration of the liquid crystal display device according to the fourth embodiment of the present invention. FIG. 12 is an enlarged view of a portion E in FIG.

As shown in FIG. 3, the liquid crystal display device 800 of the present embodiment includes a display unit 801 instead of the display unit 701 of the liquid crystal display device 700 of the third embodiment. The liquid crystal display device 800 may include a backlight (not shown).
Hereinafter, a description will be given focusing on differences from the third embodiment.

As shown in FIG. 11, the display unit 801 includes a wiring substrate 400 (first wiring substrate), a liquid crystal layer 80, and an array instead of the wiring substrate 300, the liquid crystal layer 70, and the array substrate 310 in the third embodiment. A substrate 410 (wiring substrate, semiconductor device, second wiring substrate) is provided. In the display unit 801, the wiring substrate 400, the liquid crystal layer 80, and the array substrate 410 are stacked in this order.
In FIG. 11, illustration of an alignment film, an optical film such as a polarizing plate, a backlight unit, a semiconductor element such as a TFT, and wirings connected to the semiconductor element are omitted.
Hereinafter, in order to describe the positional relationship in each device portion of the display unit 801, the XYZ coordinate axes (see FIG. 11) arranged in the same manner as in the third embodiment may be referred to.

  The wiring board 400 is configured by adding a common electrode 13 (second conductive wiring, driving wiring) to the wiring board 300 in the third embodiment. As shown in FIG. 12, the conductive wiring 11 is sandwiched between the first black layer 4 and the second black layer 5 as in the third embodiment.

  Each conductive wiring 11 (first conductive wiring, detection wiring) in the wiring board 400 of the present embodiment is used as a detection wiring in touch sensing as in the third embodiment. Terminal portions 10a (not shown) of the respective conductive wirings 11 are electrically connected to wirings 702 (see FIG. 3) in the array substrate 410, which will be described later, by the same configuration as in the second embodiment. As shown in FIG. 3, the wiring 702 is electrically connected to the touch sensing scanning signal control unit 604.

As shown in FIG. 11, the common electrode 13 is maintained at a constant potential when a liquid crystal driving voltage is applied to a liquid crystal layer 80 described later, and is used as a common electrode when driving the liquid crystal.
In the present embodiment, the common electrode 13 is also used as a drive wiring in touch sensing. Therefore, the common electrode 13 has a stripe shape extending in the Y-axis direction so as to intersect the conductive wiring 11 at a right angle in plan view. The common electrode 13 is a transparent electrode and is formed wider than the conductive wiring 11.
The common electrodes 13 are arranged in parallel to each other at equal intervals with the X-axis direction as the arrangement direction. The arrangement pitch of the common electrodes 13 is equal to the pixel pitch in the X-axis direction.
The common electrode 13 is formed on the surface of the transparent resin layer 12 opposite to the color filter layers FR, FG, and FB.

The liquid crystal layer 80 is a vertically aligned liquid crystal of VA (Vertical Alignment) type, and has a normally closed polarizing plate configuration.
The liquid crystal layer 80 is driven by a liquid crystal driving voltage applied between a pixel electrode 81 of the array substrate 410 described later and the common electrode 13.

The array substrate 410 is provided with a pixel electrode 81 in place of the pixel electrode 71 in which the common electrode 72 and the conductive wiring 74 in the array substrate 310 of the third embodiment are omitted.
As with the array substrate 310, the array substrate 410 is formed by laminating the substrate 62 and the insulating layers 21, 22, and 23 in this order.
The pixel electrode 81 is disposed for each pixel on the insulating layer 23.

The array substrate 410 of this embodiment includes a plurality of TFTs arranged in a matrix according to the pixel arrangement of the liquid crystal layer 80 in order to drive at least the liquid crystal layer 80. The source electrode and the gate electrode of each TFT are electrically connected to the video signal timing control unit 603 through the source wiring and the gate wiring, respectively. Each TFT operates based on a control signal from the video signal timing control unit 603 input through the source wiring and the gate wiring. These TFT, source wiring, and gate wiring may be configured by the TFT 73, the source wiring 66, and the gate wiring 75 in the third embodiment, or may have different configurations.
The array substrate 410 may include any one of functional elements such as a diode, a switching element, or a memory as another semiconductor element of the TFT.

As shown in FIG. 3, the video signal timing control unit 603 in the present embodiment sets the common electrode 13 (see FIG. 11) to a constant potential, and connects the source wiring 211 and the gate wiring 212 of the array substrate 410 of the display unit 801. Send a signal.
A signal sent from the source wiring 211 and the gate wiring 212 to the array substrate 410 is input to a drive circuit including a TFT, and based on a video signal between the common electrode 13 and each pixel electrode 81. A liquid crystal driving voltage is applied. In the liquid crystal layer 80, the liquid crystal molecules are driven in the pixels to which the liquid crystal driving voltage is applied, and an image is displayed according to the driving state of the liquid crystal molecules in each pixel.

The touch sensing scanning signal control unit 604 in the present embodiment is electrically connected to the wirings 702 and 703 as in the third embodiment. The touch sensing scanning signal control unit 604 performs touch sensing by detecting the capacitance C3 between the conductive wiring 11 and the common electrode 13 via the wirings 702 and 703.
In the present embodiment, the liquid crystal driving frequency and the touch driving frequency can be made different by setting the common electrode 13 to a constant potential (for example, 0 V) and performing the dot inversion driving on the pixel electrode 81 side. Since the common electrode 13 functions as a shield film, the S / N ratio of touch sensing in the liquid crystal display device 800 is improved.

  The liquid crystal display device 800 described above can display a color image on the display unit 801 by controlling the liquid crystal layer 80 of the display unit 801 by the control unit 602.

Furthermore, the liquid crystal display device 800 can perform touch sensing by including the conductive wiring 11, the common electrode 13, the touch sensing scanning signal control unit 604, and the system control unit 605 formed on the wiring substrate 400. In the present embodiment, a touch drive voltage is applied to the conductive wiring 11, and the common electrode 13 is used as a touch signal detection wiring to perform touch sensing. The conductive wiring 11 is used as a touch drive wiring.
In the present embodiment, since the common electrode 13 also serves as a detection wiring for touch sensing, wiring dedicated to touch sensing can be reduced. In addition, the touch drive frequency can be made higher than the liquid crystal drive frequency. For example, the drive frequency of touch sensing can be in the range of 1 kHz to 100 kHz. The frame frequency (driving frequency) for driving the liquid crystal can be, for example, in the range of 0.1 Hz to 480 Hz when driven by an active element using an oxide semiconductor for the channel layer.

[Fifth Embodiment]
Next, a wiring board, a semiconductor device, and a liquid crystal display device according to a fifth embodiment of the present invention will be described.
FIG. 13: is typical sectional drawing which shows an example of a structure of the liquid crystal display device of the 5th Embodiment of this invention. FIG. 14 is a schematic cross-sectional view showing an example of a wiring board according to the fifth embodiment of the present invention.

As shown in FIG. 3, the liquid crystal display device 900 of the present embodiment includes a display unit 901 instead of the display unit 701 of the liquid crystal display device 700 of the third embodiment. The liquid crystal display device 900 may include a backlight (not shown).
Hereinafter, a description will be given focusing on differences from the third embodiment.

As shown in FIG. 13, the display unit 901 includes a wiring substrate 500 (first wiring substrate), a liquid crystal layer 90, and an array instead of the wiring substrate 300, the liquid crystal layer 70, and the array substrate 310 in the third embodiment. A substrate 510 (wiring board, semiconductor device, second wiring board) is provided. In the display unit 901, the wiring substrate 500, the liquid crystal layer 90, and the array substrate 510 are stacked in this order.
In FIG. 13, illustration of an alignment film, an optical film such as a polarizing plate, a backlight unit, a semiconductor element such as a TFT, and a wiring connected to the semiconductor element is omitted.
Hereinafter, in order to describe the positional relationship in each device portion of the display unit 901, the XYZ coordinate axes (see FIG. 13) arranged in the same manner as in the third embodiment may be referred to.

The wiring board 500 moves the laminated body of the conductive wiring 11 and the second black layer 5 of the wiring board 300 in the third embodiment to the surface 65a of the board 65, and replaces the first black layer 4 with the first black layer 4. 1 black layer 94.
The first black layer 94 is configured in the same manner as the first black layer 4 in the third embodiment, except that the first black layer 94 is disposed on the surface 65b of the second black layer 5.
The first black layer 94 is formed in a stripe shape extending in the X-axis direction at the boundary between the color filter layers FR, FG, and FB adjacent to each other in the wiring substrate 500.

The conductive wiring 11 and the second black layer 5 in the wiring substrate 500 are arranged at positions facing the first black layers 94 with the substrate 65 interposed therebetween.
As shown in FIG. 14, the first conductive oxide layer 1, the copper alloy layer 2, and the second conductive oxide layer 3 of the conductive wiring 11 are laminated in this order on the surface 65a.
Similar to the third embodiment, the second black layer 5 is laminated so as to cover the surface of the second conductive oxide layer 3 on the negative side in the Z-axis direction.
The first black layer 94 of the present embodiment is an example in the case where the first conductive oxide layer 1 is covered at a position away from the first conductive oxide layer 1 of the conductive wiring 11.

Each conductive wiring 11 in the wiring board 500 of the present embodiment is used as a detection wiring in touch sensing, as in the third embodiment. End portions of the respective conductive wirings 11 not shown in FIG. 13 are electrically connected to the touch sensing scanning signal control unit 604 via the wirings 902 shown in FIG.
The wiring 902 may or may not pass through the array substrate 510 described later. Alternatively, the wiring 902 and the touch sensing scanning signal control unit 604 may be electrically connected via a flexible substrate in which a copper wiring is formed on a polyimide film.

The liquid crystal layer 90 is an FFS (Fringe Field Switching) type horizontally aligned liquid crystal and has a normally closed polarizing plate configuration.
The liquid crystal layer 90 is driven by a liquid crystal drive voltage applied between a pixel electrode 91 and a common electrode 92 of the array substrate 510 described later.

The array substrate 510 is provided with a pixel electrode 91 and a common electrode 92 in place of the pixel electrode 71 and the common electrode 72 in which the conductive wiring 74 in the array substrate 310 of the third embodiment is omitted.
The pixel electrode 91 is disposed for each pixel on the insulating layer 23.
The common electrode 92 is kept at a constant potential when a driving voltage is applied to the liquid crystal layer 90, and is used as a common electrode when driving the liquid crystal.
In the present embodiment, the common electrode 92 is also used as a drive wiring or a detection wiring in touch sensing. Therefore, the common electrode 92 has a stripe shape extending in the Y-axis direction so as to intersect the conductive wiring 11 at a right angle in plan view. The common electrode 92 is a transparent electrode, and is formed to be as wide as the pixel opening width in the X-axis direction. The common electrodes 92 are arranged in parallel to each other at equal intervals with the X-axis direction as the arrangement direction. The arrangement pitch of the common electrodes 92 is equal to the pixel pitch in the X-axis direction. The common electrode 92 is formed on the surface 22 a of the insulating layer 22. The common electrode 92 is disposed in parallel with a gate wiring (not shown).

The array substrate 510 of this embodiment includes a plurality of TFTs arranged in a matrix according to the pixel arrangement of the liquid crystal layer 90 in order to drive at least the liquid crystal layer 90. The source electrode and the gate electrode of each TFT are electrically connected to the video signal timing control unit 603 through the source wiring and the gate wiring, respectively. Each TFT operates based on a control signal from the video signal timing control unit 603 input through the source wiring and the gate wiring. These TFT, source wiring, and gate wiring may be configured by the TFT 73, the source wiring 66, and the gate wiring 75 of the third embodiment, or may have different configurations.
The array substrate 510 may include any of functional elements such as a diode, a switching element, and a memory as another semiconductor element of the TFT.

As shown in FIG. 3, the video signal timing control unit 603 in this embodiment sets the common electrode 92 (see FIG. 13) to a constant potential, and connects the source wiring 211 and the gate wiring 212 of the array substrate 510 of the display unit 901. Send a signal.
Signals sent from the source wiring 211 and the gate wiring 212 to the array substrate 510 are input to a driving circuit including TFTs, and based on the video signal between the common electrode 92 and each pixel electrode 91. A liquid crystal driving voltage is applied. In the liquid crystal layer 90, the liquid crystal molecules are driven in the pixels to which the liquid crystal driving voltage is applied, and an image is displayed according to the driving state of the liquid crystal molecules in each pixel.

The touch sensing scanning signal control unit 604 according to the present embodiment applies a driving voltage to the common electrode 92 that also serves as a driving wiring, with the plurality of conductive wirings 11 serving as detection wirings having a constant potential.
The touch sensing scanning signal control unit 604 detects a change in capacitance between the common electrode 92 and the conductive wiring 11 and performs touch sensing.

  The liquid crystal display device 900 described above can display a color image on the display unit 901 by controlling the drive of the liquid crystal layer 90 of the display unit 901 by the control unit 602. In the present embodiment, the roles of the pixel electrode and the common electrode may be switched, and the common electrode may be used as a detection electrode (detection wiring) in touch sensing.

Furthermore, the liquid crystal display device 900 includes the conductive wiring 11 formed on the outer surface of the wiring substrate 500, the common electrode 92 formed on the array substrate 510, the touch sensing scanning signal control unit 604, and the system control unit 605. Touch sensing can be performed.
In the present embodiment, since the common electrode 92 also serves as a touch sensing drive wiring or detection wiring, the wiring dedicated to touch sensing can be reduced.

The conductive wiring 11 in the liquid crystal display device 900 is formed on the surface 62a of the substrate 62 which is the outer surface of the device. However, since the first black layer 4 is laminated on the second conductive oxide layer 3 of the conductive wiring 11, the color and light reflection of the copper alloy layer 2 are not visible from the viewing direction 8. Visibility is improved.
Since the conductive wiring 11 is located on the outer surface of the apparatus, it is susceptible to stress during use. However, since the conductive wiring 11 is formed with high strength by the first conductive oxide layer 1 and the second conductive oxide layer 3, the conductive wiring 11 is hardly damaged and is not easily disconnected.

  Note that the wiring board, the semiconductor device, and the liquid crystal display device described in the above embodiments can be used as various electronic devices or as device portions of various electronic devices. The wiring board, the semiconductor device, and the liquid crystal display device of the above-described embodiment are, for example, a mobile phone, a portable game device, a portable information terminal, a personal computer, an electronic book, a video camera, a digital still camera, a head mounted display, and a navigation system. , Sound playback devices (car audio, digital audio players, etc.), copiers, facsimiles, printers, printer multifunction devices, vending machines, automatic teller machines (ATMs), personal authentication devices, optical communication devices, etc. It can be used as a part of these electronic devices.

In the description of each of the above embodiments, the case where the liquid crystal layer is included is described as an example in which the liquid crystal layer has horizontal alignment (vertical alignment) and is driven by the FFS method (VA method). However, the alignment of the liquid crystal layer and the liquid crystal driving method are not limited to this.
Other liquid crystal driving methods include, for example, HAN (Hybrid-aligned Nematic) method, TN (Twisted Nematic) method, OCB (Optically Compensated Bend) method, CPA (Continuous Pinwheel Alignment) method, ECB (Electrically Controlled Birefringence). A method, a TBA (Transverse Bent Alignment) method, and the like can be appropriately selected and used. As the alignment of the liquid crystal layer, an appropriate alignment suitable for the selected driving method can be used.
In the FFS mode or VA mode, the liquid crystal layer can be normally black display.
In order to suppress burn-in in the liquid crystal display, the liquid crystal is driven by polarity inversion driving (AC inversion driving) that inverts the positive and negative voltages applied to the liquid crystal layer after a predetermined video display period. Yes. Polarity inversion drive methods include dot inversion drive that inverts pixels individually, horizontal line inversion drive that inverts in horizontal rows, column inversion drive that inverts in vertical columns, and one screen or block of screen units. There is a frame inversion drive for inversion. Such liquid crystal driving can be applied to the liquid crystal display device of the present invention.
As the liquid crystal material of the liquid crystal layer, for example, a high-purity material having an inherent low efficiency of 1 × 10 ¹³ Ωcm or more may be used. The liquid crystal used for the liquid crystal layer may be a liquid crystal having a negative dielectric anisotropy or a liquid crystal having a positive dielectric anisotropy.

  In the description of the above embodiments, the roles may be exchanged in the combination of wirings or electrodes described as being used as detection wirings and drive wirings used for touch sensing. That is, the wiring or electrode used as the detection wiring in each of the above embodiments may be used as the driving wiring, and the wiring or electrode used as the driving wiring may be used as the detection wiring.

In the description of each of the above embodiments, various combinations of detection wiring and driving wiring have been described. In the liquid crystal display device, wirings arranged on two surfaces having different heights in the stacking direction and arranged so as to intersect each other in plan view can be used as detection wirings and driving wirings for touch sensing. In this case, each wiring may be a conductive wiring having a laminated structure such as the conductive wiring 11 or may be a wiring having no laminated structure such as the conductive wiring 11.
For example, in the third embodiment, one wiring selected from the wiring group consisting of the conductive wiring 11 in the wiring substrate 300, the gate wiring 75 in the array substrate 310, and the source wiring 66 in the array substrate 310, and the wiring group A pair of wirings composed of one wiring selected from the other wirings may be arranged so that the arrangement directions thereof are different from each other in plan view, and the pair of wirings may be used as the detection wiring and the driving wiring.

In the description of each of the above embodiments, the wiring board includes a plurality of conductive wiring shapes, arrangement layers, uses, and the like in which the first conductive oxide layer, the copper alloy layer, and the second conductive oxide layer are stacked. An example of However, the shape of the conductive wiring used for the wiring board of the present invention, the use of the arrangement layer, etc. are not limited to the examples of the above embodiments.
For example, the plan view shape of the conductive wiring is not limited to a linear pattern, and may be a curved shape, a pad shape, or the like.
For example, the conductive wiring arrangement layer in the wiring board may be other than the above-described layers. Since the conductive wirings arranged in the same layer are formed by the same manufacturing process, conductive wirings for a plurality of uses may be mixed in the same layer.
For example, the conductive wiring may be used as a conductive wiring used for electrical connection between circuit elements. For example, the conductive wiring is not limited to a transistor, and may be used for a conductive portion of another semiconductor element. For example, the laminated structure of the conductive wiring may be used for an electrically floating floating pattern, a light shielding pattern called a frame located on four sides of the display area, an antistatic pattern, or the like.

  In each of the above embodiments, the example of the bottom gate structure has been described as the structure of the TFT formed on the wiring substrate and the semiconductor device. However, the structure of the transistor formed on the wiring substrate and the semiconductor device is not limited to this, and may be, for example, a multi-gate structure such as a dual gate structure or a top gate structure.

  The present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine suitably the component covering different embodiment.

1 1st electroconductive oxide layer 2 Copper alloy layer 3 2nd electroconductive oxide layers 4 and 94 1st black layer)
5 Second black layer 10a, 10b Terminal portion 11 Conductive wiring (first conductive wiring, detection wiring)
13 Common electrode (second conductive wiring, drive wiring)
15, 62, 65 Substrate 19, 21, 22, 23 Insulating layer 19a Interface 19b Surface (second surface)
21a Surface (fourth surface)
23a Surface (third surface)
31, 63 Conductive wiring 31a First wiring portion (second conductive wiring)
60, 70, 80, 90 Liquid crystal layer 61, 71, 81, 91 Pixel electrode 64 Conductive portion 65b Surface (first surface)
66 Source wiring (fourth conductive wiring)
72, 92 Common electrode 73 TFT
74 Conductive wiring (third conductive wiring, drive wiring)
75 Gate wiring 76 Gate electrode 77 Source electrode 78 Drain electrode 79 Channel layer 81 Pixel electrode 84 Light shielding pattern (conductive wiring, light shielding layer)
100, 110, 200, 300, 400, 500 Wiring board (first wiring board)
210 Array substrate (wiring substrate)
211 Source wiring 212 Gate wiring 310 Array substrate (wiring substrate, semiconductor device, second wiring substrate, third wiring substrate)
410, 510 Array substrate (wiring substrate, semiconductor device, second wiring substrate)
600, 700, 800, 900 Liquid crystal display devices 601, 701, 801, 901 Display unit 602 Control unit 604 Touch sensing scanning signal control unit (detection unit)
605 System control unit (detection unit)
C1, C2, C3, C4 Capacitance FR, FG, FB Color filter layer

Claims (17)

A substrate,
The first conductive oxide layer, the copper alloy layer, and the second conductive oxide layer are stacked in this order with the same line width from the substrate side, which is directly or indirectly disposed on the substrate. Conductive wiring,
With
The first conductive oxide layer and the second conductive oxide layer are:
Formed of a complex oxide containing indium oxide, zinc oxide, and tin oxide;
When the number of atoms of indium, zinc, and tin contained in the composite oxide is expressed as N _In , N _Zn , N _Sn , respectively,
The atomic ratio of indium, zinc, and tin satisfies the following formulas (1) and (2),
(N _Zn + N _Sn ) / (N _In + N _Zn + N _Sn ) <0.2 (1)
N _Zn / N _Sn > 1.1 (2)
The copper alloy layer is
With copper,
A first metal element having an atomic weight greater than that of copper and forming a solid solution with copper;
A second metal element having an atomic weight greater than that of copper and not forming a solid solution with copper;
including,
Wiring board. In the copper alloy layer,
Zinc is contained as the first metal element in an amount of 0.2 at% to 3 at%,
The second metal element is included at 0.05 at% or more and 0.6 at% or less.
The wiring board according to claim 1. The second metal element is
One or more metal elements selected from the group consisting of zirconium, niobium, molybdenum, cerium, neodymium, samarium, tin, antimony, hafnium, tantalum, tungsten, and bismuth,
The wiring board according to claim 1. The atomic ratio of indium, zinc, and tin contained in the composite oxide satisfies the following formula (3a):
The wiring board according to claim 1.
N _Zn / (N _In + N _Zn + N _Sn ) <0.11 (3a) In the region of the substrate covering the first conductive oxide layer in plan view, the first black layer is provided.
The wiring board according to claim 1. In the second conductive oxide layer, on the surface opposite to the copper alloy layer, a region that covers the second conductive oxide layer is provided with a second black layer,
The wiring board according to claim 1. The conductive wiring is
A plurality are formed on the same surface and arranged in parallel at equal intervals in a plan view.
The wiring board according to claim 1. In a plan view, a color filter layer is formed in a region partially overlapping with the conductive wiring,
The wiring board according to claim 7. The conductive wiring is
A plurality of first conductive wires formed on the first surface and arranged in parallel at equal intervals in plan view;
The second surface, which is different in position in the stacking direction from the first surface, is disposed so as to overlap the first conductive wiring with an insulating layer interposed therebetween, and the arrangement direction of the first conductive wiring in plan view Second conductive wirings arranged in parallel at equal intervals in different directions;
Comprising
The wiring board according to claim 1. A first wiring board comprising the wiring board according to claim 7;
A second wiring board comprising the wiring board according to claim 7;
A liquid crystal layer sandwiched between the first wiring board and the second wiring board;
With
The conductive wiring in the first wiring board and the conductive wiring in the second wiring board are different from each other in a plan view.
Liquid crystal display device. One of the conductive wiring in the first wiring board and the conductive wiring in the second wiring board is a detection wiring and the other is a driving wiring, and the conductive wiring and the second wiring in the first wiring board A detection unit that detects a change in capacitance between the conductive wiring and the wiring board;
With
Based on the change in capacitance detected by the detection unit, touch sensing is performed.
The liquid crystal display device according to claim 10. The wiring board according to claim 7, wherein a plurality of the conductive wirings are formed on a third surface, and are arranged at equal intervals and in parallel in a plan view, and the third conductive wirings The fourth surface is different in position in the stacking direction from the surface, and is disposed so as to overlap the third conductive wiring through an insulating layer, and in a direction different from the arrangement direction of the third conductive wiring in a plan view, etc. A third wiring board having fourth conductive wirings arranged in parallel and spaced apart from each other;
A plurality of transistors disposed between the substrate in the third wiring substrate and the third conductive wiring in the third wiring substrate and including a gate electrode, a source electrode, a drain electrode, and a channel layer which is a semiconductor When,
A gate wiring including a branching portion that extends in a certain direction on the substrate in the third wiring substrate and is electrically connected to the gate electrode;
With
The fourth conductive wiring is
A source wiring electrically connected to the source electrode;
Semiconductor device. The source electrode and the drain electrode are
Like the fourth conductive wiring, the first conductive oxide layer, the copper alloy layer, and the second conductive oxide layer were laminated in this order with the same width,
The semiconductor device according to claim 12. The channel layer is
It consists of an oxide semiconductor containing two or more oxides of gallium oxide, indium oxide, zinc oxide, tin oxide, and germanium oxide.
The semiconductor device according to claim 12. A light shielding layer formed on the third surface so as to cover the channel layer in a plan view and having the same layer configuration as the third conductive wiring and electrically independent from the third conductive wiring. With layers,
The semiconductor device according to claim 12. A first wiring board comprising the wiring board according to claim 7;
A semiconductor device according to claim 12,
A liquid crystal layer sandwiched between the first wiring board and the semiconductor device;
Comprising
Liquid crystal display device. Selected from the conductive group in the first wiring substrate, the third conductive wiring in the semiconductor device, the gate wiring in the semiconductor device, and the wiring group consisting of the fourth conductive wiring in the semiconductor device A pair of wirings consisting of one wiring and one wiring selected from the other wirings of the wiring group have different arrangement directions from each other in plan view,
A detection unit that detects a change in capacitance between the pair of wirings, with one of the pair of wirings being a detection wiring and the other being a driving wiring;
Based on the change in capacitance detected by the detection unit, touch sensing is performed.
The liquid crystal display device according to claim 16.

Images