JP2016135504A - Patterning method and patterning workpiece - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a patterning method capable of making difficult generation of pinholes on a remaining film even when the film formed in a translucent member is patterned by a laser beam, and a patterning workpiece.SOLUTION: A film 3 formed on a first surface 21 of a translucent member 2 is patterned by a laser beam L1 to form a patterning workpiece 1. In this case, from the position of the removed film 3, the laser beam L1 enters from the first surface 21 of the translucent member 2 to move toward a second surface 22. An elastic member 50 is disposed on the second surface 22, and no air layer is provided between the second surface 22 of the translucent member 2 and one surface 51 of the elastic member 50. Thus, the elastic member 50 functions as a reflection suppressor 4 (reflection suppression layer 5) for suppressing reflection of the laser beam L1 on the second surface 22. Thus, even when the laser beam L1 reaches the second surface 22, the laser beam L1 is difficult to be reflected, and enters the elastic member 50.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a patterning method for removing a film with a laser beam, and a patterning article manufactured by the patterning method.

  As a method of manufacturing an article with a predetermined film pattern formed on the base, a method is proposed in which a film is formed on the base by a method such as printing or vapor deposition, and then a part of the film is removed by irradiating the film with a laser beam. (See Patent Document 1).

JP 2000-296698 A

  However, in the case where the base is made of the translucent member 2 as in the article shown in FIG. 7A, the film 3 is formed in the film forming process shown in FIG. When the laser beam L1 is irradiated from the first surface 21 side of the translucent member 2 in the laser beam irradiation step, there is a problem that pinholes are easily generated in the remaining film 3. That is, when the laser beam L1 is irradiated and the laser beam L1 is incident on the translucent member 2 as shown in FIG. 7D, the laser beam L1 is incident on the second surface 22 (rear surface) of the translucent member 2. ) And the laser beam L1 having a high intensity reaches the region 30 where the film 3 should be left, and the pinhole 3a is generated. In particular, in the case where the second surface 22 of the translucent member 2 is provided with a convex portion 25 whose side surface 251 is an inclined surface, even when the laser beam L1 is irradiated vertically, the translucent member 2 is exposed. The incident laser beam L1 is reflected by the side surface 251 of the convex portion 25, reaches the region where the film 3 should be left, and a pinhole 3a is generated. Further, as shown in FIG. 8, even when the second surface 22 of the translucent member 2 is flat, when the laser beam L2 is irradiated while changing the posture of the translucent member 2, the laser beam L2 incident obliquely is irradiated. Is reflected by the second surface 22 and forms the pinhole 3b in the region 30 where the film 3 should be left.

  In view of the above problems, an object of the present invention is to provide a patterning method in which pinholes hardly occur in the remaining film even when the film formed on the translucent member is patterned by a laser beam, and to be manufactured by the patterning method. An object of the present invention is to provide a patterned processed article.

  In order to solve the above-described problems, a patterning method according to the present invention includes a film forming process for forming a film on a first surface of a translucent member, and irradiating the film with a laser beam from the first surface side. A laser irradiation step of removing a part of the film, and in the laser irradiation step, the second surface opposite to the first surface of the translucent member has the second surface on the second surface. A reflection suppressor that suppresses reflection of the laser beam is provided.

In the present invention, when the film formed on the first surface of the translucent member is patterned by the laser beam, the laser beam on the second surface is formed on the second surface opposite to the first surface of the translucent member. Since the reflection suppressing body that suppresses reflection is provided, even when the laser beam is incident on the translucent member and reaches the second surface of the translucent member, reflection on the second surface hardly occurs. For this reason, it is difficult for a high-intensity laser beam to reach the region where the film should be left, so that the occurrence of pinholes can be suppressed.

  In the present invention, it is possible to adopt a configuration in which the reflection suppressing body is a reflection suppressing layer that is stacked in close contact with the second surface. According to such a configuration, the refractive index difference at the interface on the second surface side of the translucent member is small as compared with the case where the second surface of the translucent member is in contact with the air layer. Therefore, the laser beam that has entered the translucent member is suppressed from being reflected from the second surface of the translucent member and is incident on the antireflection layer. Further, even when the laser beam is reflected on the opposite side of the translucent member of the reflection suppressing layer, it is reflected at a position far from the first surface of the translucent member. Also, on the opposite side of the translucent member of the reflection suppressing layer, even if the laser reflects, it does not reflect regularly but tends to scatter. Accordingly, it is difficult for a high intensity laser beam to reach the region where the film should be left, so that the generation of pinholes can be suppressed.

  In this case, the reflection suppression layer is, for example, a translucent elastic member that is stacked in close contact with the second surface.

  In the present invention, the elastic member includes a protruding portion that protrudes toward the translucent member on one surface, and the elastic member is configured such that the one surface is the second surface in a state where the protruding portion is crushed. It is preferable that it adheres closely. According to such a configuration, an air layer is unlikely to intervene between the second surface of the translucent member and the elastic member, so that reflection on the second surface is unlikely to occur.

  In the present invention, a support member provided on one surface with a protruding portion protruding toward the light transmissive member is prepared, and the elastic member is formed by the one surface of the support member and the light transmissive member. You may employ | adopt the structure elastically deformed between. According to such a configuration, an air layer is unlikely to intervene between the second surface of the translucent member and the elastic member, so that reflection on the second surface is unlikely to occur.

  In the present invention, the translucent member includes a convex portion whose side surface is an inclined surface on the second surface, and the translucent member has a surface on the translucent member side of the elastic member. It is preferable that the elastic member is pressed toward the elastic member so as to be in close contact with the convex portion. According to such a configuration, an air layer is unlikely to intervene between the second surface of the translucent member and the elastic member, so that reflection on the second surface is unlikely to occur.

  In the present invention, the translucent member includes a convex portion whose side surface is an inclined surface on the second surface, and the elastic member is a concave portion in which the convex portion is fitted on the surface of the translucent member. It is preferable to provide. According to such a configuration, an air layer is unlikely to intervene between the second surface of the translucent member and the elastic member, so that reflection on the second surface is unlikely to occur.

  In the present invention, the reflection suppressing body may be configured to be a translucent film laminated on the second surface.

In the present invention, for example, when the refractive index of the reflection suppressing layer is na and the refractive index of the translucent member is nb, the refractive indexes na and nb have the following relationship:
nb−0.3 ≦ na ≦ nb + 0.2
Meet. According to this configuration, since the difference in refractive index between the translucent member and the reflection suppressing layer is small, reflection on the second surface of the translucent member can be suppressed.

  In the present invention, the reflection suppressing body may be scattering irregularities formed on the second surface. According to such a configuration, reflection on the second surface of the translucent member is unlikely to occur.

  In the present invention, the translucent member is, for example, a translucent resin member.

  In the present invention, the film is, for example, a film including a vapor deposition film.

  In the present invention, it is possible to adopt a configuration in which the reflection suppressing body is removed after patterning and a configuration in which the reflection suppressing body is left without being removed after patterning.

  In the latter case, the patterned article is formed on the translucent member, the film patterned on the first surface of the translucent member, and the second surface opposite to the first surface of the translucent member. And a reflection suppressing body that suppresses reflection of the laser beam incident from the first surface side on the second surface.

  In the patterned processed article, the reflection suppressing body is, for example, a light-transmitting film laminated on the second surface.

  In the patterned article according to the present invention, the reflection suppressing body may be scattering irregularities formed on the second surface.

  In the present invention, when the film formed on the first surface of the translucent member is patterned by the laser beam, the laser beam on the second surface is formed on the second surface opposite to the first surface of the translucent member. Since the reflection suppressing body that suppresses reflection is provided, even when the laser beam is incident on the translucent member and reaches the second surface of the translucent member, reflection on the second surface hardly occurs. For this reason, it is difficult for a high-intensity laser beam to reach the region where the film should be left, so that the occurrence of pinholes can be suppressed.

It is explanatory drawing of the patterning method which concerns on Embodiment 1 of this invention. It is explanatory drawing of the patterning method which concerns on the modification 1 of Embodiment 1 of this invention. It is explanatory drawing of the patterning method which concerns on the modification 2 of Embodiment 1 of this invention. It is explanatory drawing of the patterning method which concerns on the modification 3 of Embodiment 1 of this invention. It is explanatory drawing of the patterning method which concerns on Embodiment 2 of this invention. It is explanatory drawing of the patterning method which concerns on Embodiment 3 of this invention. It is explanatory drawing of the patterning method which concerns on the reference example of this invention. It is explanatory drawing of the patterning method which concerns on another reference example of this invention.

  Embodiments of the present invention will be described with reference to the drawings.

[Embodiment 1]
FIG. 1 is an explanatory diagram of a patterning method according to Embodiment 1 of the present invention. FIG. 1A is a cross-sectional view of a patterned article, and FIGS. 1B to 1D are process cross-sectional views.

  The patterned processed article 1 shown in FIG. 1A has a plate-like translucent member 2 and a film 3 patterned on the first surface 21 of the translucent member 2. The translucent member 2 has a recess 210 formed on the first surface 21, and the film 3 is removed from the bottom of the recess 210. For this reason, the film 3 is formed so as to surround the recess 210. The translucent member 2 has a plurality of convex portions 25 on the second surface 22 whose side surfaces 251 are inclined surfaces.

The translucent member 2 is made of translucent resin such as polycarbonate or acrylic resin, glass or the like. In this embodiment, the translucent member 2 is made of polycarbonate. The film 3 is made of a coating film, a vapor deposition film, or a film obtained by combining a paint film and a vapor deposition film. In this embodiment, the film 3 is a vapor deposition film of a metal such as aluminum.

  The patterned article 1 is made of a decorative article whose surface (first surface 21) is decorated with the film 3, and light incident from the second surface 22 side is refracted by the convex portion 25, and is out of the first surface 21. The light is emitted from the bottom of the recess 210 from which the film 3 has been removed.

  Such a patterned article 1 is manufactured by the patterning method shown in FIGS. Specifically, after the translucent member 2 shown in FIG. 1B is manufactured by molding, a film 3 made of an aluminum film is formed on the first surface 21 by vapor deposition in the film forming step. In that case, the film | membrane 3 is formed in the edge of the bottom part of the recessed part 210 around the recessed part 210 using a mask vapor deposition method. On the other hand, a translucent elastic member 50 made of silicone resin, silicone rubber, urethane rubber or the like is prepared.

  Next, in the laser irradiation process shown in FIG. 1C, after the elastic member 50 is supported by the support member 9, the translucent member 2 is overlapped on the one surface 51 of the elastic member 50, and the translucent property of the elastic member 50 is reached. The one surface 51 on the member 2 side is brought into close contact with the second surface 22 of the translucent member 2. At that time, as indicated by an arrow F, the translucent member 2 is pressed toward the elastic member 50, and the one surface 51 on the translucent member 2 side of the elastic member 50 is securely adhered along the convex portion 25. It is preferable. According to this configuration, an air layer is unlikely to intervene between the second surface 22 of the translucent member 2 and the one surface 51 of the elastic member 50. In this state, the laser beam L1 is irradiated to the film 3 from the first surface 21 side of the translucent member 2, and a part of the film 3 is removed as shown in FIG. In this embodiment, the film 3 is removed by irradiating a portion of the film 3 formed at the bottom of the recess 210 with the laser beam L1.

Here, when the refractive index of the elastic member 50 is na and the refractive index of the translucent member 2 is nb, the refractive indexes na and nb have the following relationship:
nb−0.3 ≦ na ≦ nb + 0.2
Meet. In this embodiment, the translucent member 2 is polycarbonate, and the refractive index nb of the translucent member 2 is about 1.59. On the other hand, the elastic member 50 is made of silicone resin, and the refractive index na is 1.43. Therefore, the above conditional expression is satisfied.

  In such a patterning method, when the film 3 formed on the first surface 21 of the translucent member 2 is patterned by the laser beam L1, the laser beam is removed from the position where the film 3 is removed as shown in FIG. L1 enters from the first surface 21 of the translucent member 2 and travels toward the second surface 22. Here, the elastic member 50 is disposed on the second surface 22, and an air layer is unlikely to intervene between the second surface 22 of the translucent member 2 and the one surface 51 of the elastic member 50. For this reason, the elastic member 50 functions as the reflection suppression body 4 (reflection suppression layer 5) that suppresses the reflection of the laser beam L1 on the second surface 22. Accordingly, even when the laser beam L 1 reaches the second surface 22, the laser beam L 1 is not easily reflected by the second surface 22 and enters the elastic member 50.

  In particular, in this embodiment, the refractive index na of the elastic member 50 and the refractive index nb of the translucent member 2 satisfy the above equation, and the elastic member 50 and the translucent member 2 have the same refractive index. Yes. For this reason, even when the laser beam L 1 reaches the second surface 22, the laser beam L 1 is not easily reflected by the second surface 22 and enters the elastic member 50.

The laser beam L1 incident on the elastic member 50 reaches the other surface 52 of the elastic member 50, but the other surface 52 of the elastic member 50 is greatly separated from the second surface 22 of the translucent member 2. . Further, the laser beam L1 is only scattered even if it passes through the other surface 52 of the elastic member 50 or is reflected. For this reason, even if the laser beam L1 reaches the other surface 52 of the elastic member 50, it is difficult to reflect toward the region 30 where the film 3 is left. Therefore, it is difficult for the high-intensity laser beam L1 to reach the region 30 where the film 3 should be left, so that the generation of pinholes can be suppressed.

  Further, when the laser beam L2 is irradiated while changing the posture of the translucent member 2, the laser beam L2 is irradiated from an oblique direction, as indicated by a one-dot chain line, and therefore incident from the first surface 21 of the translucent member 2. Although the second laser beam L2 travels obliquely, the laser beam L2 is also difficult to be reflected by the second surface 22 of the translucent member 2 like the laser beam L1, and thus the film 3 is left in the region 30 where the film 3 should be left. The situation of reaching with high strength is unlikely to occur. Therefore, the generation of pinholes can be suppressed.

[Variation 1 of Embodiment 1]
FIG. 2 is an explanatory diagram of the patterning method according to the first modification of the first embodiment of the present invention. Since the basic configuration of this embodiment is the same as that of Embodiment 1, the same reference numerals are given to common portions, and detailed descriptions thereof are omitted.

  As shown in FIG. 2A, also in this embodiment, as in Embodiment 1, the translucent member 2 is formed on the second surface 22 with a plurality of convex portions 25 whose side surfaces 251 are inclined surfaces. Has been. In this embodiment, the concave portion 55 into which the convex portion 25 of the translucent member 2 is fitted is formed on the one surface 51 of the elastic member 50, and the side surface 551 of the concave portion 55 is inclined similarly to the side surface 251 of the convex portion 25. ing. Therefore, in the laser irradiation step shown in FIG. 2B, after the elastic member 50 is supported by the support member 9 and then the translucent member 2 is superimposed on the one surface 51 of the elastic member 50, the convexity of the translucent member 2 is increased. The part 25 is in a state of being fitted in the recess 55 of the elastic member 50. Therefore, since the one surface 51 of the elastic member 50 is in close contact with the second surface 22 of the translucent member 2, an air layer is formed between the second surface 22 of the translucent member 2 and the one surface 51 of the elastic member 50. Is difficult to intervene. At that time, as indicated by an arrow F, the translucent member 2 is pressed toward the elastic member 50, and the one surface 51 on the translucent member 2 side of the elastic member 50 is securely adhered along the convex portion 25. It is preferable.

  Then, the film 3 is irradiated with the laser beam L1 from the first surface 21 side of the translucent member 2, and a part of the film 3 is removed.

  Also in this embodiment, the elastic member 50 is disposed on the second surface 22 of the translucent member 2, as in the first embodiment, and the second surface 22 of the translucent member 2 and one surface of the elastic member 50. It is difficult for an air layer to intervene with 51. For this reason, the elastic member 50 functions as the reflection suppression body 4 (reflection suppression layer 5) that suppresses the reflection of the laser beam L1 on the second surface 22. Therefore, even when the laser beam L1 reaches the second surface 22, the laser beam L1 has the same effect as that of the first embodiment, such as being hardly reflected by the second surface 22. Further, the translucent member 2 includes the convex portion 25 whose side surface 251 is an inclined surface on the second surface 22, but the elastic member 50 is convex on the one surface 51 on the translucent member 2 side. A recess 55 into which the portion 25 is fitted is provided. For this reason, since the elastic member 50 is in close contact with the one surface 51 on the translucent member 2 side, an air layer is interposed between the second surface 22 of the translucent member 2 and the one surface 51 of the elastic member 50. Hard to do. For this reason, even when the laser beam L 1 reaches the second surface 22, the laser beam L 1 is not easily reflected by the second surface 22.

[Modification 2 of Embodiment 1]
FIG. 3 is an explanatory diagram of the patterning method according to the second modification of the first embodiment of the present invention. Since the basic configuration of this embodiment is the same as that of Embodiment 1, the same reference numerals are given to common portions, and detailed descriptions thereof are omitted.

In this embodiment, as shown in FIG. 3A, the one surface 51 of the elastic member 50 transmits light to a region from which the film 3 is removed (region irradiated with the laser beam L1 shown in FIG. 3B). A protruding portion 54 protruding toward the sex member 2 is formed. For this reason, as shown in FIG. 3B, when the elastic member 50 and the translucent member 2 are arranged so as to overlap the support member 9, one of the elastic members 50 is crushed. The direction 51 is in close contact with the second surface 22 of the translucent member 2. Further, as shown by an arrow F, the translucent member 2 is pressed toward the elastic member 50, and the one surface 51 on the translucent member 2 side of the elastic member 50 is securely adhered along the convex portion 25. According to such a configuration, an air layer is unlikely to be interposed between the second surface 22 of the translucent member 2 and the elastic member 50, so that reflection on the second surface 22 is unlikely to occur. Such a configuration may be applied when the concave portion 55 into which the convex portion 25 of the translucent member 2 is fitted is formed on the one surface 51 of the elastic member 50 as in the first modification of the first embodiment. .

[Modification 3 of Embodiment 1]
FIG. 4 is an explanatory diagram of a patterning method according to the third modification of the first embodiment of the present invention. Since the basic configuration of this embodiment is the same as that of Embodiment 1, the same reference numerals are given to common portions, and detailed descriptions thereof are omitted.

  In this embodiment, as shown in FIG. 4A, the one surface 91 of the support member 9 transmits light to a region from which the film 3 is removed (region irradiated with the laser beam L1 shown in FIG. 4B). A projecting portion 94 projecting toward the sex member 2 is formed. For this reason, as shown in FIG. 4B, when the elastic member 50 and the translucent member 2 are arranged so as to overlap the support member 9, the elastic member 50 is formed by the protrusion 94 in the region where the film 3 is removed. The one surface 51 of the transparent member 2 is in close contact with the second surface 22 of the translucent member 2. Further, as shown by an arrow F, the translucent member 2 is pressed toward the elastic member 50, and the one surface 51 on the translucent member 2 side of the elastic member 50 is securely adhered along the convex portion 25. According to such a configuration, an air layer is unlikely to be interposed between the second surface 22 of the translucent member 2 and the elastic member 50, so that reflection on the second surface 22 is unlikely to occur. Such a configuration may be applied when the concave portion 55 into which the convex portion 25 of the translucent member 2 is fitted is formed on the one surface 51 of the elastic member 50 as in the first modification of the first embodiment. .

[Other Modifications of Embodiment 1]
In the first embodiment, the support member 9 and the elastic member 50 are separate, but the support member 9 and the elastic member 50 may be integrated.

[Embodiment 2]
FIG. 5 is an explanatory diagram of the patterning method according to the second embodiment of the present invention. Fig.5 (a) is sectional drawing of a patterning processed article, FIG.5 (b)-(d) is process sectional drawing. Since the basic configuration of the present embodiment is the same as that of the first embodiment, common portions are denoted by the same reference numerals and detailed description thereof is omitted.

  Similar to the first embodiment, the patterned article 1 shown in FIG. 5A also has a plate-like light-transmitting member 2 and a film 3 patterned on the first surface 21 of the light-transmitting member 2. ing. The translucent member 2 is made of translucent resin, glass, or the like. In this embodiment, the translucent member 2 is made of a translucent resin such as polycarbonate. The film 3 is made of a coating film, a vapor deposition film, or a film obtained by combining a paint film and a vapor deposition film. In this embodiment, the film 3 is a vapor deposition film of a metal such as aluminum.

  In the translucent member 2, a plurality of convex portions 25 whose side surfaces 251 are inclined surfaces are formed on the second surface 22. Further, a light-transmitting film 58 is formed on the patterned article 1 so as to cover the second surface 22.

Such a patterned article 1 is manufactured by the patterning method shown in FIGS. Specifically, after manufacturing the translucent member 2 shown in FIG. 5B, in the film forming process, the film 3 made of an aluminum film is formed on the first surface 21 by vapor deposition. In that case, the film | membrane 3 is formed in the edge of the bottom part of the recessed part 210 around the recessed part 210 using a mask vapor deposition method. On the other hand, a translucent film 58 made of silicone resin or acrylic resin is formed on the second surface 22 of the translucent member 2 by a coating method or the like.

  Next, in the laser irradiation step shown in FIG. 5C, the film 3 is irradiated with the laser beam L1 from the first surface 21 side of the translucent member 2, and as shown in FIG. Remove some of the. In this embodiment, the film 3 is removed by irradiating a portion of the film 3 formed at the bottom of the recess 210 with the laser beam L1.

Here, when the refractive index of the translucent film 58 is na and the refractive index of the translucent member 2 is nb, the refractive indexes na and nb have the following relationship:
nb−0.3 ≦ na ≦ nb + 0.2
Meet. In this embodiment, the translucent member 2 is polycarbonate, and the refractive index nb of the translucent member 2 is about 1.59. On the other hand, the translucent film 58 is made of silicone resin, and the refractive index na is 1.43. Therefore, the above conditional expression is satisfied.

  In such a patterning method, when the film 3 formed on the first surface 21 of the translucent member 2 is patterned by the laser beam L1, the laser beam L1 is transmitted from the position where the film 3 is removed to the first of the translucent member 2. The light enters from the surface 21 and travels toward the second surface 22. Here, a translucent film 58 is formed on the second surface 22, and no air layer is interposed between the second surface 22 of the translucent member 2 and one surface 581 of the translucent film 58. For this reason, the translucent film 58 functions as the reflection suppressing body 4 (reflection suppressing layer 5) that suppresses the reflection of the laser beam L1 on the second surface 22. Therefore, even when the laser beam L 1 reaches the second surface 22, the laser beam L 1 is not easily reflected by the second surface 22 and enters the light-transmitting film 58.

  In particular, in this embodiment, the refractive index na of the translucent film 58 and the refractive index nb of the translucent member 2 satisfy the above formula, and the translucent film 58 and the translucent member 2 have the same refractive index. doing. For this reason, even when the laser beam L 1 reaches the second surface 22, the laser beam L 1 is not easily reflected by the second surface 22 and is incident on the translucent film 58.

  The laser beam L1 incident on the translucent film 58 reaches the other surface 582 of the translucent film 58, but the laser beam L1 is transmitted through the other surface 582 of the translucent film 58 or scattered even if reflected. Just do it. For this reason, even if the laser beam L1 reaches the other surface 582 of the translucent film 58, it is difficult to reflect toward the region 30 where the film 3 remains. Therefore, it is difficult for the high-intensity laser beam L1 to reach the region 30 where the film 3 should be left, so that the generation of pinholes can be suppressed.

  Further, when the laser beam L2 is irradiated while changing the posture of the translucent member 2, the laser beam L2 is irradiated from an oblique direction, as indicated by a one-dot chain line, and therefore incident from the first surface 21 of the translucent member 2. Although the second laser beam L2 travels obliquely, it is difficult for the laser beam L2 to reach the region 30 where the film 3 is to be left with a high intensity, similarly to the laser beam L1. Therefore, the generation of pinholes can be suppressed.

[Modification of Embodiment 2]
In the patterned processed article 1 shown in FIG. 5A, the translucent film 58 that functions as the reflection suppressing body 4 (reflection suppressing layer 5) remains on the second surface 22 of the translucent member 2. After the patterning, the light transmitting film 58 may be removed.

[Embodiment 3]
FIG. 6 is an explanatory diagram of the patterning method according to the third embodiment of the present invention. FIG. 6A is a cross-sectional view of a patterned article, and FIGS. 6B to 6D are process cross-sectional views. Since the basic configuration of the present embodiment is the same as that of the first embodiment, common portions are denoted by the same reference numerals and detailed description thereof is omitted.

  Similar to the first embodiment, the patterned article 1 shown in FIG. 6A also has a plate-like translucent member 2 and a film 3 patterned on the first surface 21 of the translucent member 2. ing. The translucent member 2 is made of translucent resin, glass, or the like. In this embodiment, the translucent member 2 is made of a translucent resin such as polycarbonate. The film 3 is made of a coating film, a vapor deposition film, or a film obtained by combining a paint film and a vapor deposition film. In this embodiment, the film 3 is a vapor deposition film of a metal such as aluminum. In the translucent member 2, a plurality of convex portions 25 whose side surfaces 251 are inclined surfaces are formed on the second surface 22.

  Here, in the second surface 22 of the translucent member 2, scattering irregularities 40 including a plurality of irregularities are formed in a region overlapping the region 30 where the film 3 remains in a plan view. In this embodiment, the scattering irregularities 40 are not formed in a region overlapping the region where the film 3 is removed in plan view.

  Such a patterned article 1 is manufactured by the patterning method shown in FIGS. Specifically, when the translucent member 2 shown in FIG. 6B is manufactured by molding, the unevenness 40 for scattering is formed on the second surface 22 in a region overlapping the region 30 where the film 3 is left in plan view. Form. In the film forming step, the film 3 made of an aluminum film is formed on the first surface 21 by vapor deposition. In that case, the film | membrane 3 is formed in the edge of the bottom part of the recessed part 210 around the recessed part 210 using a mask vapor deposition method.

  Next, in the laser irradiation step shown in FIG. 6C, the film 3 is irradiated with the laser beam L2 from the first surface 21 side of the translucent member 2, and as shown in FIG. Remove some of the. In this embodiment, the film 3 is removed by irradiating a portion of the film 3 formed at the bottom of the recess 210 with the laser beam L2 from an oblique direction.

  In such a patterning method, when the film 3 formed on the first surface 21 of the translucent member 2 is patterned by the laser beam L2, the laser beam L2 is transmitted from the position where the film 3 is removed to the first of the translucent member 2. The light enters from the surface 21 and travels toward the second surface 22. Here, the unevenness 40 for scattering is formed on the second surface 22 in a region overlapping the region 30 where the film 3 is left in plan view, and the unevenness 40 for scattering reflects the laser beam L2 on the second surface 22. It functions as a reflection suppressing body 4 that suppresses. Therefore, even when the laser beam L1 reaches the second surface 22, the laser beam L2 is not easily reflected by the second surface 22, and is only scattered. For this reason, even if the laser beam L2 reaches the second surface 22, it is difficult to reflect it toward the region 30 where the film 3 is left. Therefore, it is difficult for the high-intensity laser beam L2 to reach the region 30 where the film 3 should be left, so that pinholes can be prevented from occurring.

[Other embodiments]
In the first, second, and third embodiments, the convex portion 25 is formed on the second surface 22 of the translucent member 2. However, when the second surface 22 of the translucent member 2 is a flat surface, this is used. The invention may be applied.

  In the said Embodiment 1, 2, 3, although the translucent member 2 consisted of translucent resins, such as a polycarbonate, inorganic materials, such as glass, may be sufficient. Moreover, although the film | membrane 3 was a metal vapor deposition film, such as aluminum, the coating film formed by printing and transcription | transfer may be sufficient, and the film | membrane which combined the coating film and the vapor deposition film may be sufficient.

  In the first, second, and third embodiments, in the film forming process, the film 3 is formed around the concave portion 210 and at the edge of the bottom portion of the concave portion 210, but not formed in the central portion of the bottom portion of the concave portion 210. The film 3 may be formed on the entire first surface 21 of the translucent member 2.

  In the present invention, the configurations described in the first, second, and third embodiments may be combined. For example, a form corresponding to Embodiment 1 + Embodiment 2, Embodiment 1 + Embodiment 3, Embodiment 2 + Embodiment 3, Embodiment 1 + Embodiment 2 + Embodiment 3 is adopted. Also good.

1 .. Patterned article, 2 .. Translucent member, 3 .. Film, 4 .. Antireflection body, 5 .. Antireflection layer, 9 .. Support member, 21 .. First surface, 22. 2nd surface, 25 ... convex part, 40 ... scattering unevenness (reflection suppressing body), 50 ... elastic member (reflection suppressing body, reflection suppressing layer), 54 ... projecting part, 55 ... concave part, 58 ...・ Translucent film (reflection suppression body, reflection suppression layer), 94.. Protrusion, L 1, L 2.

Claims (15)

A film forming step of forming a film on the first surface of the translucent member;
A laser irradiation step of removing a part of the film by irradiating the film with a laser beam from the first surface side;
Have
In the laser irradiation step, a reflection suppressing body that suppresses reflection of the laser beam on the second surface is provided on the second surface of the translucent member opposite to the first surface. A patterning method.   The patterning method according to claim 1, wherein the reflection suppression body is a reflection suppression layer stacked in close contact with the second surface.   The patterning method according to claim 2, wherein the reflection suppression layer is a translucent elastic member that is stacked in close contact with the second surface. The elastic member includes a protruding portion that protrudes toward the translucent member on one surface,
The patterning method according to claim 3, wherein the elastic member has the one surface in close contact with the second surface in a state where the protruding portion is crushed. Preparing a support member provided on one surface with a protruding portion protruding toward the light transmissive member,
The patterning method according to claim 3, wherein the elastic member is elastically deformed between the one surface of the support member and the translucent member. The translucent member is provided with a convex portion whose side surface is an inclined surface on the second surface,
The said translucent member is pressed toward the said elastic member so that the surface by the side of the said translucent member of the said elastic member closely_contact | adheres along the said convex part. The patterning method according to any one of the above. The translucent member is provided with a convex portion whose side surface is an inclined surface on the second surface,
The patterning method according to claim 3, wherein the elastic member includes a concave portion into which the convex portion is fitted on a surface on the light transmitting member side.   The patterning method according to claim 2, wherein the reflection suppressing body is a translucent film laminated on the second surface. When the refractive index of the reflection suppressing layer is na and the refractive index of the translucent member is nb,
Refractive indexes na and nb have the following relationship:
nb−0.3 ≦ na ≦ nb + 0.2
The patterning method according to claim 2, wherein the patterning method is satisfied.   The patterning method according to claim 1, wherein the reflection suppressing body is scattering irregularities formed on the second surface.   The patterning method according to claim 1, wherein the translucent member is a translucent resin member.   The patterning method according to claim 1, wherein the film includes a vapor deposition film. A translucent member;
A film patterned on the first surface of the translucent member;
A reflection suppressor that is formed on the second surface opposite to the first surface of the translucent member and suppresses reflection of the laser beam incident from the first surface side on the second surface;
A patterned article characterized by comprising:   The patterned processing article according to claim 13, wherein the reflection suppressing body is a light-transmitting film laminated on the second surface.   The patterned processing article according to claim 13, wherein the reflection suppressing body is scattering unevenness formed on the second surface.

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