JP2016011242A - Ceramic member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a ceramic member by which a burr or a minute crack can be prevented from being generated around the supporting point when the ceramic member is produced.SOLUTION: The surface 201 of a base material 20 has a first ceramic coating film 22 and a second ceramic coating film 23. The second ceramic coating film 23 has an inclined part 222, the thickness of which becomes thinner gradually, and an opening 221, which is surrounded by the inclined part 222 and through which the surface of the first ceramic coating film 22 is exposed. In other words, when the second ceramic coating film 23 is formed, the first ceramic coating film 22-formed base material 20 is supported by the opening 221 through which the surface of the first ceramic coating film 22 is exposed. Consequently, since a supporting tool 30 can be prevented from being stuck firmly to the first ceramic coating film 22 by the second ceramic coating film 23, when the base material 20 is detached from the supporting tool 30 after CVD, a harmful burr or a minute crack can be prevented from being generated around the supporting point.

Description

  The present invention relates to a ceramic member in which a ceramic film is formed on a substrate.

Ceramic members in which a ceramic film is formed on a substrate by a CVD method are used in various fields because the substrate can be protected with the ceramic film. Ceramic parts that use graphite with excellent workability as the base material and whose surface is protected by a ceramic coating are used for semiconductor manufacturing equipment, single crystal pulling, etc., for the purpose of preventing reaction of the base material due to the ceramic coating and improving wear resistance. It is used in various fields such as equipment and structural ceramic parts.
However, in the CVD method, it is necessary to support the base material, and a ceramic coating cannot be formed at the support point, so that a portion where the base material is exposed is formed. When the substrate is exposed and used in a reactive environment, there is a problem that the support point portion is consumed and deteriorated. Various solutions have been made to solve such problems.

In Patent Document 1, a ceramic member is manufactured by supporting a ceramic substrate at the tip and forming a ceramic member coating on the ceramic substrate in a reaction furnace so as not to form an exposed support point of the substrate. At this time, it is described that a ceramic base material support having a core material made of graphite and a support film having a pyrolytic carbon layer interposed on a surface including at least a tip portion is used. Yes.
According to this ceramic substrate support, the ceramic substrate support has a graphite core, the surface of the graphite is coated with pyrolytic carbon, and the surface is further coated with the support coating. . Since pyrolytic carbon has no pores, when the support coating is coated, the support coating is not formed by penetrating into the pyrolytic carbon layer, thereby reducing the adhesive force between the support coating and the pyrolytic carbon layer. be able to.

  Therefore, when the ceramic substrate support is removed from the ceramic member and the ceramic substrate support having the ceramic member coating formed on the ceramic substrate, there is a gap between the pyrolytic carbon layer of the ceramic substrate support and the support coating (that is, determined). It is easily separated at Therefore, the ceramic substrate is exposed from the ceramic member, or the remaining amount of the support member coating of the ceramic substrate support on the surface of the ceramic member coating formed on the ceramic substrate is excessively large. It is described that it becomes difficult to do.

JP 2012-184152 A

  However, in the invention described in Patent Document 1, burrs of the ceramic coating are generated when the support is separated from the base material, and it tends to remain as harmful protrusions that cause scratches and particles. Further, a minute crack is generated when the support and the substrate are separated. The minute crack rarely reaches the base material of the ceramic member and causes the life of the ceramic member to be shortened. For this reason, a ceramic member free from burrs or minute cracks around the support point is desired.

An object of this invention is to provide the ceramic member which can prevent a burr | flash or a micro crack generate | occur | producing around the support point at the time of ceramic member manufacture in view of the said subject.

  The ceramic member of the present invention for solving the above-mentioned problems includes a base material, a first ceramic film formed on the surface of the base material, and a second ceramic formed on the surface of the first ceramic film. In the ceramic member comprising the coating, the second ceramic coating includes an opening from which the surface of the first ceramic coating is exposed, and surrounds the opening and from the surface of the second ceramic coating. And an inclined portion where the film thickness is gradually reduced to the interface with one ceramic coating.

According to the ceramic member of this invention, it has the 1st ceramic film formed in the surface of a base material, and the 2nd ceramic film formed in the surface of the 1st ceramic film.
For this reason, the base material is coated with at least one of the first ceramic film and the second ceramic film. That is, when the first ceramic film is formed, the portion where the first ceramic film is lost to support the substrate is changed by changing the position where the second ceramic film is supported. 2 ceramic coatings.

In addition, the second ceramic coating is a film that gradually surrounds the opening from which the surface of the first ceramic coating is exposed and the surface of the second ceramic coating from the surface of the second ceramic coating to the interface with the first ceramic coating. And a support region including an inclined portion having a reduced thickness.
That is, when the second ceramic coating is formed, a support region including an opening that is surrounded by the inclined portion and from which the surface of the first ceramic coating is exposed is formed by supporting with a support having a cover portion. Is done. This can prevent the support from being fixed to the first ceramic coating by the second ceramic coating, so when removing the substrate from the support after CVD, generation of harmful burrs around the support point, Generation of minute cracks can be prevented. Further, since the second ceramic film is formed so that the film thickness gradually decreases in the support region, the notch is not formed, and the generation of cracks from the opening can be prevented.

Furthermore, it is desirable that the ceramic member of the present invention has the following aspect.
(1) The area of the opening is 10% to 60% of the area of the support region.
Since the area of the opening is 10% or more of the area of the support region, it is possible to reliably prevent the support from being fixed to the first ceramic film of the substrate.
Further, since the area of the opening is 60% or less of the area of the support region, the area lacking the second ceramic coating can be reduced.

(2) The area of the opening is 30% to 50% of the area of the support region.
Since the area of the opening is 30% or more of the area of the support region, it is possible to more reliably prevent the support from being fixed to the first ceramic film of the base material.
Moreover, since the area of the opening is 50% or less of the area of the support region, the area lacking the second ceramic coating can be further reduced.

(3) The first ceramic coating and the second ceramic coating are SiC.
When the ceramic coating is SiC, there are the following merits. That is, since SiC is chemically stable, consumption of the base material can be prevented. Further, since SiC is a hard and wear-resistant ceramic material, it is possible to prevent the substrate from being worn or damaged.

(4) The base material is made of graphite.
Since graphite has a cleavage plane in the crystal, if the substrate is made of graphite, it can be easily processed, and ceramic members having various shapes can be obtained.

(5) The ceramic member is a component for a semiconductor manufacturing apparatus.
In the semiconductor manufacturing apparatus, when impurities are released from the ceramic member, the semiconductor is contaminated. The ceramic member of the present invention can be suitably used because harmful burrs and minute cracks are hardly formed around the support point.

  According to the present invention, the surface of the substrate has a first ceramic coating and a second ceramic coating, and the second ceramic coating comprises an opening through which the surface of the first ceramic coating is exposed, and A support region is provided that includes an inclined portion that surrounds the opening and gradually decreases in thickness from the surface of the second ceramic coating to the interface with the first ceramic coating. This can prevent the support from being fixed to the first ceramic coating by the second ceramic coating, so when removing the substrate from the support after CVD, generation of harmful burrs around the support point, Generation of minute cracks can be prevented. Further, since the second ceramic film is formed so that the film thickness gradually decreases in the support region, the notch is not formed, and the generation of cracks from the opening can be prevented.

(A) thru | or (C) is process drawing which shows the manufacturing method of the ceramic member which concerns on 1st Embodiment. (A) is a perspective view of a support tool, (B) is sectional drawing of the BB position in (A). (A)-(D) are the perspective view and sectional drawing which show the modification of a support tool. (A), (B) is sectional drawing and the bottom view of the site | part supported with the support tool, when forming a 2nd ceramic film. (A) thru | or (C) is process drawing which shows the manufacturing method of the ceramic member which concerns on 2nd Embodiment. It is the front view seen from VI direction in Drawing 5 (A).

  The ceramic member of the present invention is a ceramic member comprising a base material, a first ceramic film formed on the surface of the base material, and a second ceramic film formed on the surface of the first ceramic film. The second ceramic coating comprises: an opening from which the surface of the first ceramic coating is exposed; and an interface between the first ceramic coating from the surface of the second ceramic coating and surrounding the opening. And a support region including an inclined portion where the film thickness gradually decreases.

According to the ceramic member of this invention, it has the 1st ceramic film formed in the surface of a base material, and the 2nd ceramic film formed in the surface of the 1st ceramic film.
For this reason, the substrate is coated with at least one of the first ceramic coating and the second ceramic coating. When the first ceramic coating is formed, the portion where the first ceramic coating is lost to support the substrate is changed by changing the position where the second ceramic coating is supported. It can be covered with a ceramic coating, and at least one ceramic coating is coated.

In addition, the second ceramic coating has an opening from which the surface of the first ceramic coating is exposed and a thickness gradually surrounding the opening and from the surface of the second ceramic coating to the interface with the first ceramic coating. And a support region made of an inclined portion that becomes thinner.
That is, when the second ceramic coating is formed, a support region including an opening that is surrounded by the inclined portion and from which the surface of the first ceramic coating is exposed is formed by supporting with a support having a cover portion. Is done. This can prevent the support from being fixed to the first ceramic coating by the second ceramic coating, so when removing the substrate from the support after CVD, generation of harmful burrs around the support point, Generation of minute cracks can be prevented. Further, since the second ceramic film is formed so that the film thickness gradually decreases in the support region, the notch is not formed, and the generation of cracks from the opening can be prevented.

Furthermore, it is desirable that the ceramic member of the present invention has the following aspect.
(1) The area of the opening is 10% to 60% of the area of the support region.
Since the area of the opening is 10% or more of the area of the support region, it is possible to reliably prevent the support from being fixed to the first ceramic film of the substrate.
Further, since the area of the opening is 60% or less of the area of the support region, the area lacking the second ceramic coating can be reduced.

(2) The area of the opening is 30% to 50% of the area of the support region.
Since the area of the opening is 30% or more of the area of the support region, it is possible to more reliably prevent the support from being fixed to the first ceramic film of the base material.
Moreover, since the area of the opening is 50% or less of the area of the support region, the area lacking the second ceramic coating can be further reduced.

(3) The first ceramic coating and the second ceramic coating are SiC.
When the ceramic coating is SiC, there are the following merits. That is, since SiC is chemically stable, consumption of the base material can be prevented. Further, since SiC is a hard and wear-resistant ceramic material, it is possible to prevent the substrate from being worn or damaged.

(4) The base material is made of graphite.
Since graphite has a cleavage plane in the crystal, it is an easily machinable material. When the substrate is composed of graphite, it can be easily processed, and various shapes of ceramic members can be obtained.

(5) The ceramic member is a component for a semiconductor manufacturing apparatus.
In the semiconductor manufacturing apparatus, when impurities are released from the ceramic member, the semiconductor is contaminated. The ceramic member of the present invention can be suitably used because harmful burrs and minute cracks are hardly formed around the support point.
Examples of the semiconductor manufacturing apparatus component include, but are not limited to, semiconductor manufacturing apparatus components such as a susceptor, a wafer carrier, a heater, and an inner cylinder.

(First embodiment)
The manufacturing method of the ceramic member of this invention is demonstrated. In the method for producing a ceramic member of the present invention, the ceramic member 10 </ b> A is obtained by forming the first ceramic coating 22 and the second ceramic coating 23 on the substrate 20.
The step of forming the first ceramic coating 22 and the second ceramic coating 23 can be performed by a similar method. Since the CVD source gas is not supplied to the place where the support 30 is in close contact, the ceramic coating is not formed. For this reason, in the process of forming the 1st ceramic film 22, and the process of forming the 2nd ceramic film 23, the location which supports the base material 20 is changed. The substrate is coated with at least one of the first ceramic coating 22 and the second ceramic coating 23 by changing the supporting portion.

First, as shown in FIG. 1A, the base material 20 is supported by a support tool 30. The number of the support tools 30 is not particularly limited. If the center of gravity of the base material 20 can be lower than the support tool 30, even the single support tool 30 can stably form the first ceramic coating 22 by the CVD method. Also,
The first ceramic coating 22 can be formed by a CVD method by arranging the support portion 32 described later to have a sufficiently large area so that the center of gravity of the substrate 20 enters the support surface 322 of the support portion 32. it can.
Here, the case where the base material 20 is mounted substantially horizontally on a plurality of (three or more) support tools 30 will be described.

The substrate 20 is not particularly limited. For example, anything such as metal or ceramic can be used. Ceramic is suitable because it has heat resistance. Among them, ALN, Al ₂ O ₃ , graphite, BN, SiO ₂ , Si ₃ N _{4 and the} like can be used as the ceramic, and among them, graphite can be preferably used because it has excellent workability.
The shape of the base material 20 is not particularly limited. Since the ceramic member 10A is manufactured by forming the first ceramic coating 22 and the second ceramic coating 23 on the substrate 20, the substrate 20 is processed into the shape of the target ceramic member 10A. The ceramic member 10A is manufactured in various shapes according to the application. For example, any disk, ring, cylinder, plate, box, etc. may be used and there is no particular limitation.

As shown in FIGS. 2A and 2B, the support 30 has a columnar support body 31, for example, and contacts the surface 201 of the base material 20 at the center of the body upper surface 311. It has the support part 32 to do. The support portion 32 has an overall truncated cone shape and has a side surface 321 and a support surface 322. The support surface 322 has a planar shape with a certain area, but may have a shape with a sharp tip (conical shape).
A cover portion 33 is provided so as to protrude upward along the outer peripheral portion of the main body upper surface 311. The cover part 33 can be formed so as to surround the support part 32 concentrically, and the upper surface 331 is planar. The height of the cover portion 33 is lower than the height of the support portion 32.

That is, as shown in FIG. 2B, the support portion 32 protrudes above the upper surface 331 of the cover portion 33, and when the support portion 32 supports the base material 20, the base material 20 and the cover portion. A gap S is formed between the first and second members 33.
Further, the distance L between the outermost edge 323 in the support portion 32 and the outermost edge 332 in the cover portion 33 is 4 to 20 times the interval (S) of the gap S.

As for the support tool 30, the support tool main body 31, the support part 32, and the cover part 33 are integrally formed. For example, the support tool body 31, the support part 32, and the cover part 33 can be formed by shaving or molding with a die. Moreover, the support tool main body 31, the support part 32, and the cover part 33 can also be integrated by bonding with an adhesive or the like. Or the support part 32 can also be adhere | attached and formed in what formed the support tool main body 31 and the cover part 33 integrally.
As shown in FIGS. 3A and 3B, it is also possible to employ a support tool 30A in which the tip of the cover portion 33 has a sharp shape. Further, as shown in FIGS. 3C and 3D, it is also possible to employ a support 30B in which the support body 31 is formed in a quadrangular prism shape and the cover portion 33 is formed in a square shape. In any case, the shape of the support part 32 and the support part 32 projecting upward from the cover part 33 are the same.

As shown in FIG. 1B, a first ceramic film 22 (ceramic film 21) is formed on the surface of the base material 20 supported by the support 30 by a CVD method. At this time, the cover portion 33 of the support tool 30 restricts the flow of the raw material gas of the ceramic coating to the inside of the cover portion 33, and only a small amount of the raw material gas is generated from the interval S between the cover portion 33 and the base material 20. Inflow.
As a result, the first ceramic coating 22 is formed with an inclined portion 222 ′ that is inclined toward the base material 20 toward the support portion 32 side at a position where the upper surface 331 of the cover portion 33 of the support tool 30 faces. An opening 221 ′ where the first ceramic coating 22 is not formed is formed inside the inclined portion 222 ′.
In addition, by making the cover part 33 and the support part 32 concentric in a plan view, the deviation in the distance that the source gas reaches is small, and it is possible to equally prevent the base material 20 from being fixed regardless of the direction. .

  The first ceramic coating 22 and the second ceramic coating 23 are not particularly limited. Moreover, the combination is not limited. For example, SiC, TaC, TiN, etc. can be used. Since SiC has the same thermal expansion coefficient as graphite having excellent workability, it is difficult to peel off, is harder than graphite, and has corrosion resistance. Therefore, it is desirable to use SiC in combination with a graphite base material.

  Subsequently, as shown in FIG. 1C, the portion of the base material 20 supported by the support tool 30 is changed and placed on the support tool 30 again, and the second ceramic coating 23 (ceramic) is formed by the CVD method. The coating 21 is formed here, for example, the case where the upper and lower surfaces of the base material 20 are reversed and placed on the support 30. In addition, the base material 20 is rotated while the upper and lower surfaces are left as they are. It is also possible to change the support site by the support tool 30 in FIG.

Next, the ceramic member 10A manufactured as described above will be described. The ceramic member 10A is subjected to CVD twice, and has two ceramic coatings 21 (first ceramic coating 22 and second ceramic coating 23).
In the ceramic member 10 </ b> A manufactured in FIG. 1C, the base material 20 is covered with the first ceramic film 22 and the second ceramic film 23.
In the first ceramic coating 22, an inclined surface 222 ′ and an exposed portion 221 ′ are formed by the support 30 supported when the first ceramic coating 22 is formed.
The exposed portion 221 ′ and the inclined surface 222 ′ generated when the first ceramic coating 22 is formed are covered with the second ceramic coating 23.

Further, as shown in FIG. 4, the second ceramic coating 23 is not formed at and around the portion supported by the support 30 when the second ceramic coating 23 is formed, and the first ceramic coating 23 is formed. It has an opening 221 through which the coating 22 is exposed. Around the opening 221, an inclined portion 222 whose thickness gradually decreases from the surface of the second ceramic coating 23 to the interface 232 with the first ceramic coating 22 is formed. Since the thickness of the second ceramic coating 23 is gradually reduced in the inclined portion 222, the second ceramic coating 23 is not formed around the portion supported by the support tool 30. For this reason, when the ceramic member 10A obtained from the support 30 is separated, it is not fixed by the ceramic coating, and the generation of cracks or burrs can be suppressed. In addition, since the second ceramic film 23 is formed so that the film thickness gradually decreases in the support region, the notch is not formed, and generation of cracks from the opening 221 can be prevented.
Note that the opening 221 and the inclined portion 222 are not necessarily circular depending on the state of work, even when the cover portion 33 of the support 30 is circular, and may be decentered or deformed into an oval shape or the like.
The area of the opening 221 is 10% to 60% of the area of the support region. The second ceramic film 23 is not formed at a location where the support portion 322 contacts the support surface 322. Further, since the outermost edge 332 in the cover portion 33 prevents the CVD source gas from flowing into the periphery of the support portion 32, the outermost edge of the support region is positioned opposite to the outermost edge 332 in the cover portion 33. To do. For this reason, the ratio of the area of the opening 221 to the area of the support region is equal to or greater than the ratio of the area of the support surface 322 to the area surrounded by the outermost edge of the cover 33.
For this reason, the ratio of the area of the opening 221 to the area of the support region appropriately sets the size of the support surface 322 of the support 32 and ranges of conditions such as applicable gap interval, CVD pressure, and temperature. Among these, it can adjust by selecting suitably.

Next, the operation and effect of the ceramic member 10A of the first embodiment will be described.
10 A of ceramic members of 1st Embodiment support the base material 20 using the support tool 30, and change the position of the 1st ceramic film 22 and the support tool 30 on the surface of the base material 20 by CVD method in this state. A second ceramic coating 23 can be formed. At this time, the support tool 30 includes a support portion 32 that contacts the surface 201 of the base material 20 and a cover portion 33 that surrounds the support portion 32 so as to have a gap S with respect to the surface 201 of the base material 20.

For this reason, when the second ceramic coating 23 is formed, the cover portion 33 can prevent the CVD source gas from entering the support portion 32, and the support portion 32 and the first ceramic coating 22 are connected to the second ceramic coating 23. It is possible to prevent the ceramic film 23 from sticking. Moreover, since the cover part 33 is arrange | positioned so that it may have the clearance gap S between the base materials 20 in which the 1st ceramic film 22 was formed, the cover part 33 and the 1st ceramic film 22 are 2nd. Adherence to the ceramic coating 23 can be prevented.
For this reason, when the substrate 20 placed on the support 30 is removed after CVD, it is not fixed by the second ceramic coating 23, and harmful burrs are generated around the support point. Occurrence can be prevented. In addition, since the second ceramic film 23 is formed so that the film thickness gradually decreases in the support region, the notch is not formed, and generation of cracks from the opening 221 can be prevented.

Since the ceramic member of the first embodiment is manufactured using the support 30 in which the support portion 32 and the cover portion 33 are integrally formed, the base material 20 or the base material having the first ceramic coating 22 is used. When the base material 20 is inclined and placed when the 20 is placed on the support tool 30, the base material 20 comes into contact with the cover portion 33 first. For example, when the base material 20 is a flat surface, the support portion 32 comes into contact with the base material 20 only when the mounting surface formed by the tips of the plurality of (for example, three points) support portions 32 and the base material 20 become parallel. become able to.
For this reason, it is difficult to damage the tip of the support portion 32. Moreover, the space | interval of the clearance gap S of the base material 20 and the cover part 33 is securable.

According to the method for manufacturing a ceramic member of the first embodiment, when the distance between the support part 32 and the cover part 33 in the support 30 is four times or more the gap S, the raw material gas that has entered from the gap S is reduced. The contact point between the support portion 32 and the base material 20 can be made difficult to reach. For this reason, sticking of the support part 32 and the base material 20 can be made difficult to occur.
Further, when the distance L between the outermost edge 323 of the support portion 32 and the outermost edge 332 of the cover portion 33 in the support tool 30 is 20 times or less of the gap S, the second ceramic coating 23 is applied to the substrate 20. Since the opening 221 that is not formed can be reduced, that is, the area covered with the ceramic coating 21 can be increased, the substrate 20 can be easily protected.

  According to the method for manufacturing a ceramic member of the first embodiment, if the first ceramic coating 22 or the second ceramic coating 23 is SiC, there are the following merits. That is, since SiC is chemically stable, consumption of the base material 20 can be prevented. Further, since SiC is a hard and wear-resistant ceramic material, it is possible to prevent the substrate 20 from being worn or damaged.

  According to the ceramic member manufacturing method of the first embodiment, in the first CVD, the substrate 20 is made of graphite. Since graphite has a cleavage plane in the crystal, it is an easily machinable material. If the base material 20 is comprised with graphite, it can process easily and can obtain the ceramic member 10A of various shapes. In the second CVD, a base material made of graphite covered with the ceramic coating 21 (first ceramic coating 22) is used. Since graphite is a core material, it can be easily processed in the same manner, and various shapes of ceramic members 10A can be obtained.

  According to the manufacturing method of the ceramic member of the first embodiment, the exposure of the base material 20 can be prevented by changing the position of the support tool 30 with respect to the base material 20 and repeating the process a plurality of times. For example, when the base material 20 is graphite, in the first formation of the first ceramic coating 22, the base material 20 made of graphite is exposed in the vicinity where the support portion 32 comes into contact. However, by changing the position of the support tool 30, the second ceramic coating 23 is formed for the second time using the ceramic member 10 </ b> A, which is the substrate 20 on which the first ceramic coating 22 is formed, as a new substrate 20. . As a result, the exposed graphite substrate 20 can be covered with the second ceramic coating 23.

Next, the operation and effect of the ceramic member of the first embodiment will be described.
According to the ceramic member 10 </ b> A of the present embodiment, the first ceramic coating 22 formed on the surface of the substrate 20 and the second ceramic coating 23 formed on the surface of the first ceramic coating 22 are provided.
For this reason, the substrate 20 may be coated with at least one of the first ceramic coating 22 and the second ceramic coating 23. That is, when the first ceramic coating 22 is formed, the position at which the portion where the first ceramic coating 22 is lost to support the base material 20 is supported when the second ceramic coating 23 is formed is changed. Thus, the second ceramic coating 23 can be covered.

Further, the second ceramic coating 23 surrounds the opening 221 from which the surface of the first ceramic coating 22 is exposed, and the interface between the surface of the second ceramic coating 23 and the first ceramic coating 22. And an inclined portion 222 whose film thickness gradually decreases to 232.
That is, when the second ceramic coating 23 is formed, the base material 20 on which the first ceramic coating 22 is formed in the opening 221 surrounded by the inclined portion 222 and exposing the surface of the first ceramic coating 22. Support. Thereby, since it can prevent that the support tool 30 adheres to the 1st ceramic film 22 with the 2nd ceramic film 23, when removing the base material 20 from the support tool 30 after CVD, it is harmful to the circumference | surroundings of a support point. Generation of small burrs and generation of minute cracks can be prevented. In addition, since the second ceramic film 23 is formed so that the film thickness gradually decreases in the support region, the notch is not formed, and generation of cracks from the opening 221 can be prevented.

According to the ceramic member 10 </ b> A of the first embodiment, since the area of the opening 221 is 10% or more of the area of the inclined part 222, the support tool 30 is fixed to the first ceramic coating 22 of the base material 20. Can be reliably prevented.
Moreover, since the area of the opening part 221 is 60% or less of the area of a support area | region, the area which the 2nd ceramic coating film 23 lacks can be made small.

  According to the ceramic member 10A of the first embodiment, since the ceramic coating 21 is SiC, there are the following merits. That is, since SiC is chemically stable, consumption of the base material 20 can be prevented. Further, since SiC is a hard and wear-resistant ceramic material, it is possible to prevent the substrate 20 from being worn or damaged.

  According to the ceramic member 10A of the first embodiment, the base material 20 is made of graphite. Since graphite has a cleavage plane in the crystal, if the substrate 20 is made of graphite, it can be easily processed, and ceramic members 10A having various shapes can be obtained.

Hereinafter, Examples 1 to 3 and a comparative example according to the first embodiment will be described. In Examples 1-3 and the comparative example, the support part 32 in the support tool 30 at the time of manufacturing the ceramic member 10A is the same, and the cover part 33 is different. Examples 1 to 3 have cover portions 33 having different diameters, and the comparative example does not have the cover portion 33.
In Examples 1 to 3, graphite having the first ceramic coating 22 formed on the surface is used as the base material 20, and the second ceramic coating 23 is further formed thereon. In Examples 1 to 3, the formation of the second ceramic coating 23 will be described. However, if the base material 20 is only graphite, the manufacturing method of the first embodiment can be applied to the formation of the first ceramic coating 22. .

<Examples 1-3>
A base material 20 having a first ceramic film 23 on graphite is placed on three supports 30 and a ceramic film 21 made of SiC is formed using MTS (methyltrichlorosilane) as a source gas in a CVD furnace. did. Table 1 shows the relationship between the flat portion at the tip of the support portion 32, the cover portion 33, and the gap. Table 2 shows the support region, opening, adhesion, separation state, cracks, and burrs of the obtained ceramic member.
Moreover, the shape of the used support tool 30 is demonstrated below.
A support tool 30 having a circular flat portion (support surface 322) at the tip of the support portion 32 and having a ring-shaped cover portion 33 was used. The cover 33 is a rotating body (see FIG. 3A) with a sharp tip.
The base material 20 having the first ceramic coating 22 on graphite is provided with an inclined surface 222 ′ and an exposed portion 221 ′ formed on the support portion 32 when the first ceramic coating 22 is formed.

<Comparative example>
10 A of ceramic members were similarly formed using the support tool which consists only of the support parts 32 similar to Examples 1-3, and does not have a cover part.
Below, the measurement result of Examples 1-3 and a comparative example is shown.

  From the above results, by providing the cover portion 33 on the support 30, an inclined portion where the film thickness gradually decreases from the surface of the second ceramic coating to the interface with the first ceramic coating on the support portion of the ceramic member, It was confirmed that a support region composed of an opening through which the surface of the first ceramic coating was exposed was formed. Moreover, in Examples 1-3 which have a support area | region, isolation | separation was easy and there was no remarkable crack and a burr | flash, and the effect of this invention was confirmed. In particular, in Example 1 and Example 2, no further adhesion was confirmed, and it was found that cracks and burrs were not generated and it was further desirable.

(Second Embodiment)
Next, the manufacturing method and ceramic member of the ceramic member of 2nd Embodiment are demonstrated, using a figure.
In addition, suppose that the same code | symbol is attached | subjected to the site | part which is common in the manufacturing method and ceramic member 10A of the ceramic member of 1st Embodiment mentioned above, and the overlapping description is abbreviate | omitted.
As shown in FIGS. 5 (A), 5 (B), 5 (C), and 6, in the method for manufacturing a ceramic member according to the second embodiment, the first ceramic coating film in a state where the substrate 20 is leaned. 22 and a second ceramic coating 23 are formed.

As shown in FIG. 5 (A) and FIG. 6, the base material 20 is placed vertically and the lower end portion is supported by the support tool 40, and the upper end portion of the base material 20 is supported by the support tool 30.
The support tool 30 is the same as that used in the first embodiment. The support tool 40 has the same configuration as the support tool 30 and includes a support tool main body 41, a support part 42, and a cover part 43, but the cover part 43 surrounds the support part 42 and is an outer surface of the base material 20. To have a gap S. By providing the cover portion 43 in this manner, the surface of the base material 20 with which the tip of the cover portion 43 abuts after CVD is formed on the side surface of the base material 20 and two openings from the opening 422 and the inclined portion 421. A support area 420 is formed.

As shown in FIG. 5B, when the first ceramic coating 22 is formed, the exposed portion 221 ′ and the inclined surface 222 are formed on the portion supported by the support 30 in the same manner as described in the first embodiment. 'Is formed.
In addition, an exposed portion 421 ′ and an inclined surface 422 ′ are formed on the surface covered with the cover portion 43 at the portion supported by the support tool 40.

As shown in FIG. 5C, when the second ceramic coating 23 is formed, the substrate 20 is reversed or rotated so that the position supported by the support 30 changes. An opening 221 and an inclined portion 222 are formed in the portion supported by the support tool 30 in the same manner as described in the first embodiment.
In addition, a support region 420 including an opening 422 and an inclined portion 421 is formed at a portion supported by the support tool 40 over a plurality of surfaces covered with the cover portion 43, and is supported in the same manner as in the first embodiment. Since the tool 40 can be prevented from adhering to the first ceramic film 22 by the second ceramic film 23, when the substrate 20 is removed from the support tool 40 after CVD, harmful burrs are generated around the support point. The generation of minute cracks can be prevented. In addition, since the second ceramic film 23 is formed so that the film thickness is gradually reduced in the support region 420, the notch is not formed, and the occurrence of cracks from the opening 221 can be prevented.

  In the ceramic member 10B manufactured by such a method for manufacturing a ceramic member, the same operation and effect as the ceramic member 10A manufactured by the method for manufacturing a ceramic member of the first embodiment can be obtained.

The method for manufacturing a ceramic member and the ceramic members 10A and 10B of the present invention are not limited to the above-described embodiments, and appropriate modifications and improvements can be made.
For example, in the ceramic member manufacturing method described above, the ceramic coating 21 is formed twice by changing the position of the support 30 with respect to the substrate 20. In addition, the ceramic members 10 </ b> A and 10 </ b> B can be manufactured by changing the positions of the supports 30 and 40 with respect to the base material 20 and forming the ceramic coating 21 a plurality of times (three or more times). In this case, the number of ceramic coating layers corresponding to the number of times can be formed.

  Moreover, in each embodiment mentioned above, the case where the support part 32 and the cover part 33 of the support tool 30 were formed integrally was illustrated. In addition, for example, the cover portion 33 can be formed of another member. In this case, after mounting the base material 20 on the support part 32, the support tool which attaches the cover part 33 can be utilized.

  The ceramic member of the present invention can be used for a ceramic member in which a ceramic film is formed on a substrate. Moreover, it can utilize for positioning jigs, such as parts for semiconductor manufacturing apparatuses, parts for single crystal pulling apparatuses, and electronic parts.

10A, 10B Ceramic member 20 Base material 201 Surface 22 First ceramic coating 23 Second ceramic coating 221 Opening 232 Interface 222 Inclined portion

Claims (6)

A substrate;
A first ceramic coating formed on the surface of the substrate;
A ceramic member comprising: a second ceramic coating formed on a surface of the first ceramic coating;
The second ceramic coating gradually surrounds the opening from which the surface of the first ceramic coating is exposed and the surface of the second ceramic coating from the surface of the second ceramic coating to the interface with the first ceramic coating. A ceramic member comprising a support region comprising an inclined portion having a thin film thickness.   2. The ceramic member according to claim 1, wherein an area of the opening is 10% to 60% of an area of the support region.   3. The ceramic member according to claim 2, wherein an area of the opening is 30% to 50% of an area of the support region.   The ceramic member according to claim 1 or 2, wherein the first ceramic coating and the second ceramic coating are SiC.   The ceramic member according to any one of claims 1 to 4, wherein the base material is made of graphite.   The ceramic member according to claim 1, wherein the ceramic member is a component for a semiconductor manufacturing apparatus.

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