JP2016095925A - Atmospheric pressure plasma processing apparatus, method for atmospheric pressure plasma processing by use thereof, and method for atmospheric pressure plasma processing of conductive material powder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress the occurrence of arc discharge or abnormal electric discharge in a plasma-generation region to process a conductive material with stability.SOLUTION: An atmospheric pressure plasma processing apparatus 100 comprises: a first insulator tube 121 made of a first insulative material; a pair of electrodes 122 provided on the outer peripheral face of the first insulator tube 121 to be spaced apart from each other, a voltage being applied between the pair of electrodes 122; a second insulator tube 130 made of a second insulative material, which is inserted inside the first insulator tube 121 so as to spaced apart from the first insulator tube 121; a supplying part 190 for supplying a process gas into the second insulator tube 130; and a power-source part 180 for applying the voltage between the pair of electrodes 122. In the atmospheric pressure plasma processing apparatus, the power-source part 180 applies the voltage between the pair of electrodes 122 thereby to produce plasma of the process gas in the second insulator tube 130, and the plasma is used to process an object 1 to be processed.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an atmospheric pressure plasma processing apparatus, an atmospheric pressure plasma processing method using the apparatus, and an atmospheric pressure plasma processing method of a powder made of a conductive material.

  Conventionally, products imparted with conductivity using materials such as rubber or resin, or paints containing a conductive material such as carbon black have been manufactured. For example, products such as an antistatic film for electronic parts, wrapping paper, or a conductive sheet are manufactured using a conductive paint. Recently, it has been attempted to form a conductive circuit using a conductive paint.

  Carbon black is hydrophobic and has low wettability with water. For this reason, it is extremely difficult to stably disperse high concentration carbon black in a solvent. This is because there are very few hydrophilic functional groups present on the surface of carbon black, for example, hydrophilic functional groups such as carboxyl groups or hydroxy groups.

  Therefore, as a prior document disclosing a method for producing modified carbon black, which attempted to improve the dispersion performance of carbon black in water by oxidizing the carbon black and adding hydrophilic functional groups to the surface of the carbon black. JP-A-57-159856 (Patent Document 1).

  In the method for producing modified carbon black described in Patent Document 1, the surface of carbon black particles is oxidized by subjecting carbon black to low-temperature oxygen plasma treatment, for example, hydrophilic functional groups such as carboxyl groups or phenol groups. Are formed on the surface of the carbon black particles.

  As prior literatures that disclosed a treatment method for modifying the surface of an object to be treated by atmospheric pressure plasma treatment, Japanese Patent Laid-Open No. 5-202481 (Patent Document 2) and Japanese Patent Laid-Open No. 7-328427 (Patent Document 3). There is.

  In the in-tube atmospheric pressure glow plasma reaction method described in Patent Document 2, a mixed gas of a reactive gas and a rare gas is introduced from one end of an insulator tube provided with a pair of spiral parallel electrodes on the outer periphery. The glow discharge plasma is generated inside the tube under the atmospheric pressure to treat the circulating material inside the tube.

  In the atmospheric pressure plasma powder processing method described in Patent Document 3, an insulator tube is formed by providing an electrode pair consisting of a high-frequency electrode and a ground electrode connected to an AC power source on the outer periphery. A zone is provided, and a rare gas or a mixed gas of a rare gas and a reactive gas is introduced from a gas inlet at one end of the insulator tube, and the gas is discharged from a gas outlet connected to the other end of the insulator tube. By discharging and generating a glow discharge in the plasma reaction zone under atmospheric pressure, the granular material supplied to the plasma reaction zone is processed.

JP-A-57-159856 Japanese Patent Laid-Open No. 5-202481 JP-A-7-328427

  When a conductive material such as carbon black is processed by the atmospheric pressure plasma powder processing method described in Patent Document 3, arc discharge or abnormal discharge may occur in the plasma generation region. In this case, the conductive material cannot be processed stably.

  The present invention has been made in view of the above-described problems, and can suppress the occurrence of arc discharge or abnormal discharge in a plasma generation region and can stably process a conductive material. It is an object of the present invention to provide an apparatus, an atmospheric pressure plasma processing method using the apparatus, and an atmospheric pressure plasma processing method of a powder made of a conductive material.

  An atmospheric pressure plasma processing apparatus according to the present invention is provided with a first insulator tube made of a first insulating material and an outer peripheral surface of the first insulator tube spaced apart from each other, and a voltage is applied between them. A pair of electrodes that are inserted into the first insulator tube at a distance from the first insulator tube, a second insulator tube made of a second insulating material, and an inside of the second insulator tube A supply unit configured to supply a process gas; and a power supply unit configured to apply a voltage between the pair of electrodes. In the atmospheric pressure plasma processing apparatus, an object to be processed is processed by plasma of a process gas generated inside a second insulator tube by applying a voltage between a pair of electrodes by a power supply unit.

In one form of this invention, the 2nd insulator pipe | tube is provided so that attachment or detachment is possible.
In one form of this invention, the 2nd insulator pipe | tube is comprised with the said film-like 2nd insulating material. The atmospheric pressure plasma processing apparatus includes a mechanism for thermocompression bonding the second insulator tube, and a mechanism for cutting the second insulator tube at a thermocompression bonding portion of the second insulator tube thermocompression bonded by the thermocompression bonding mechanism. Further prepare.

  An atmospheric pressure plasma processing method according to the first aspect of the present invention is an atmospheric pressure plasma processing method in which an object to be processed is processed by the atmospheric pressure plasma processing apparatus described above. In the atmospheric pressure plasma processing method, a supply unit supplies a process gas to the inside of the second insulator tube, and a power source unit generates voltage inside the second insulator tube by applying a voltage between a pair of electrodes. And a process of processing an object to be processed by plasma of the processed gas.

In one embodiment of the present invention, the object to be processed is a powder.
In one embodiment of the present invention, the powder is made of a conductive material.

  The atmospheric pressure plasma processing method for a powder made of a conductive material based on the second aspect of the present invention is made of a conductive material in the atmospheric pressure plasma processing apparatus further comprising the thermocompression bonding mechanism and the cutting mechanism. This is an atmospheric pressure plasma processing method for powder made of a conductive material for processing powder. In the atmospheric pressure plasma processing method for powder made of a conductive material, the supply unit supplies the process gas into the second insulator tube and the process gas supply step, and then the second insulator tube. A step of supplying the powder into the inside, and a step of processing the powder with plasma of a process gas generated in the second insulator tube by applying a voltage between the pair of electrodes by the power supply unit; The thermocompression-bonding mechanism seals the powder by thermocompression-bonding the second insulator tube to form a thermocompression bonding portion, and the cutting mechanism thermocompresses the second insulator tube. A step of cutting the pack sealed with the powder by cutting at the portion.

  ADVANTAGE OF THE INVENTION According to this invention, generation | occurrence | production of the arc discharge or abnormal discharge in a plasma generation area | region can be suppressed, and a conductive material can be processed stably.

It is sectional drawing which shows the structure of the atmospheric pressure plasma processing apparatus which concerns on Embodiment 1 of this invention. It is a perspective view which shows the structure of the plasma processing part and power supply part in the atmospheric pressure plasma processing apparatus which concerns on Embodiment 1 of this invention. It is a perspective view which shows the structure of the atmospheric pressure plasma processing apparatus which concerns on Embodiment 2 of this invention. In the atmospheric pressure plasma processing apparatus which concerns on Embodiment 2 of this invention, it is a perspective view which shows the state in which the mechanism which sends a 2nd insulator pipe below is sending the 2nd insulator pipe below. In the atmospheric pressure plasma processing apparatus which concerns on Embodiment 2 of this invention, it is a perspective view which shows the state which the 3rd roller pair has thermocompression-bonded the 2nd insulator pipe | tube. In the atmospheric pressure plasma processing apparatus which concerns on Embodiment 2 of this invention, it is a perspective view which shows the state in which the supply part is supplying process gas to the inside of a 2nd insulator pipe | tube. In the atmospheric pressure plasma processing apparatus which concerns on Embodiment 2 of this invention, it is a perspective view which shows the state in which the supply part is supplying the powder which consists of an electroconductive material inside the 2nd insulator pipe | tube. It is a perspective view which shows the state which the 1st heating roller pair and the 2nd heating roller pair are thermocompression-bonding the 2nd insulator pipe | tube in the atmospheric pressure plasma processing apparatus which concerns on Embodiment 2 of this invention. In the atmospheric pressure plasma processing apparatus which concerns on Embodiment 2 of this invention, it is a perspective view which shows the state in which the mechanism which sends a 2nd insulator pipe below is sending the 2nd insulator pipe below. In the atmospheric pressure plasma processing apparatus which concerns on Embodiment 2 of this invention, the mechanism which cut | disconnects a 2nd insulator pipe | tube is a perspective view which shows the state which cut | disconnected the 2nd insulator pipe | tube in the thermocompression bonding part. In the atmospheric pressure plasma processing apparatus which concerns on Embodiment 2 of this invention, the mechanism which cut | disconnects a 2nd insulator pipe | tube is a perspective view which shows the state which cut | disconnected the 2nd insulator pipe | tube further in the thermocompression bonding part.

  Hereinafter, an atmospheric pressure plasma processing apparatus according to each embodiment of the present invention, an atmospheric pressure plasma processing method using the apparatus, and an atmospheric pressure plasma processing method of a powder made of a conductive material will be described with reference to the drawings. In the following description of the embodiments, the same or corresponding parts in the drawings are denoted by the same reference numerals, and the description thereof will not be repeated.

(Embodiment 1)
FIG. 1 is a cross-sectional view showing a configuration of an atmospheric pressure plasma processing apparatus according to Embodiment 1 of the present invention. FIG. 2 is a perspective view showing configurations of a plasma processing unit and a power supply unit in the atmospheric pressure plasma processing apparatus according to the first embodiment of the present invention.

  As shown in FIGS. 1 and 2, the atmospheric pressure plasma processing apparatus 100 according to the first embodiment of the present invention includes a plasma processing unit 110, a supply unit 190, a connection unit 160, a collection unit 170, and a power supply unit 180. With. The object to be processed in the present embodiment is a powder made of a conductive material such as carbon black. Specifically, for example, carbon black (Denka Black (registered trademark) manufactured by Denki Kagaku Kogyo Co., Ltd.) having a primary particle diameter of 48 nm can be used. However, the object to be processed is not limited to powder, but may be a solid or may be made of an insulating material.

  The plasma processing unit 110 is provided on the outer peripheral surface of the first insulator tube 121 made of the first insulating material and the first insulator tube 121 at intervals, and a voltage is applied between them. A discharge tube 120 having a pair of electrodes 122, and a second insulator tube 130 that is inserted into the first insulator tube 121 at a distance from the first insulator tube 121 and made of a second insulating material. .

  In the present embodiment, the first insulator tube 121 has a cylindrical shape, but the shape of the first insulator tube 121 is not limited to a cylinder and may be a cylinder. As the first insulating material, ceramics such as quartz or alumina can be used. In the present embodiment, the first insulator tube 121 has an outer diameter of 8 mm, an inner diameter of 5 mm, and is made of quartz.

  The pair of electrodes 122 includes a first electrode 122a and a second electrode 122b. The first electrode 122 a is connected to the first annular portion located on the upper end side of the first insulator tube 121 on the outer peripheral surface of the first insulator tube 121 and the first annular portion of the first insulator tube 121. It is comprised from the 1st spiral part extended toward a lower end side. The second electrode 122b is connected to the second annular portion located on the lower end side of the first insulator tube 121 on the outer peripheral surface of the first insulator tube 121, and to the second insulator. It is comprised from the 2nd spiral part extended toward an upper end side. The first spiral portion of the first electrode 122a and the second spiral portion of the second electrode 122b are provided at a distance from each other. The configuration of the pair of electrodes 122 is not limited to the above. For example, the pair of electrodes 122 may be configured by a pair of flat electrodes positioned so as to sandwich the first insulator tube 121 therebetween.

  The pair of electrodes 122 is electrically connected to the power supply unit 180 including the high-frequency power source 181, the first wiring 182, and the second wiring 183. Specifically, the first annular portion of the first electrode 122 a and the high frequency power source 181 are connected by the first wiring 182. The second annular portion of the second electrode 122b and the high frequency power source 181 are connected by the second wiring 183. The second electrode 122b is grounded. By the operation of the high frequency power supply 181, a high frequency high voltage is applied between the first electrode 122a and the second electrode 122b.

  The material constituting each of the first electrode 122a and the second electrode 122b may be any material having low electrical resistance, and a metal such as aluminum, tungsten, molybdenum, titanium, gold, silver, or copper can be used. Note that the first electrode 122a and the second electrode 122b may be covered with an insulating film made of an electrically insulating material such as epoxy resin, silicone resin, or fluorine resin. Thereby, it is possible to suppress the occurrence of abnormal discharge on the outer peripheral surface of the first insulator tube 121.

  In the present embodiment, the second insulator tube 130 has a cylindrical shape, but the shape of the second insulator tube 130 is not limited to a cylinder, and may be a cylindrical shape. The second insulator tube 130 is longer than the first insulator tube 121. As the second insulating material, a fluorine resin such as tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA), an epoxy resin, or a silicone resin can be used. In the present embodiment, the second insulator tube 130 has an outer diameter of 4 mm and an inner diameter of 3 mm, and is made of PFA.

  The second insulator tube 130 is arranged coaxially with the first insulator tube 121. A gas layer is formed between the first insulator tube 121 and the second insulator tube 130. In the present embodiment, the gas constituting the gas layer is air, but is not limited to air and may be any gas having a higher discharge start voltage than the process gas described later. When the gas layer is composed of a gas other than air, a gas supply unit (not shown) is provided between the first insulator tube 121 and the second insulator tube 130 to supply the gas constituting the gas layer.

  The lower part of the second insulator tube 130 is detachably connected to the supply unit 190. The upper part of the second insulator tube 130 is detachably connected to the connecting part 160. As a result, the second insulator tube 130 is detachably attached to the atmospheric pressure plasma processing apparatus 100. For example, the second insulator tube 130 is detachably attached to the atmospheric pressure plasma processing apparatus 100 by fitting both ends of the second insulator tube 130 into the through holes of two elastic members having a through hole. It has been.

  The supply unit 190 supplies process gas into the second insulator tube 130. As the process gas, a rare gas such as helium gas or argon gas can be used. In the present embodiment, the supply unit 190 includes a gas introduction unit 140 and a powder introduction unit 150.

  The gas introduction part 140 has a conical first body part 141, a cylindrical first neck part 142 connected to the upper part of the first body part 141 and having an opening at the upper end, and a tip projecting from the middle of the first neck part 142. A cylindrical first branch portion 143 having an opening is included. The upper part of the first neck part 142 extends in a trumpet shape. The process gas is supplied into the gas introduction unit 140 from the opening at the tip of the first branch 143. The gas inlet 140 is made of an insulating material such as glass.

  The powder introduction part 150 is positioned below the inside of the main body part 151, an inverted conical main body part 151 having an opening at the upper end, a cylindrical foot part 152 connected to the lower part of the main body part 151 and having an opening at the lower end. A first filter 153 that is in contact with the entire inner peripheral surface of the main body 151, and a first plug 154 that has a through hole in the center and closes the opening at the upper end of the main body 151.

  The foot 152 of the powder introduction unit 150 is inserted inside the first neck 142 of the gas introduction unit 140. A gap is formed between the outer peripheral surface of the foot 152 and the inner peripheral surface of the first neck 142. The opening at the upper end of the first neck 142 is closed by inserting the lower part of the main body 151.

  The lower portion of the second insulator tube 130 is inserted into the through hole of the first plug portion 154 so as to be removable. The lower end of the second insulator tube 130 reaches a space surrounded by the main body 151 of the powder introduction unit 150, the first filter 153, and the first plug 154.

  The main body 151 and the foot 152 are made of an insulating material such as glass, and are formed as a single body. The first filter 153 is made of an electrically insulating nonwoven fabric or the like, and allows the process gas to pass from the lower side to the upper side while supporting the powder 1 made of a conductive material from the lower side. The first plug portion 154 is made of an insulating material such as rubber or resin.

  The connecting portion 160 includes a cylindrical receiving portion 161 whose upper end is closed, a cylindrical slope portion 162 connected to the lower portion of the receiving portion 161 and extending obliquely downward, and a cylindrical delivery portion 163 extending vertically downward. . The connecting part 160 is made of an insulating material such as glass.

  An inclined plate portion connected to the slope portion 162 is located at the lower end of the receiving portion 161. The inclined plate portion is provided with a through hole. The upper part of the 2nd insulator pipe | tube 130 is penetrated by the through-hole of an inclination board part so that insertion / extraction is possible. The upper end of the second insulator tube 130 reaches the inside of the receiving part 161. An O-ring (not shown) is fitted between the second insulator tube 130 and the through hole of the inclined plate portion, and the connecting portions are kept airtight.

  The collection part 170 is connected to the upper part of the hemispherical second body part 171, the second body part 171, a cylindrical second neck part 172 having an opening at the upper end, and obliquely upward from the side part of the second body part 171. A cylindrical second branch portion 173 that protrudes and has an opening at the tip, a second plug portion 174 that has a through hole in the center and closes the opening at the upper end of the second neck portion 172, and in the middle of the second branch portion 173 A second filter 175 is provided. The upper part of the second neck part 172 extends in a trumpet shape. The second filter 175 blocks the inside of the second branch part 173 in the middle of the second branch part 173.

  The lower part of the delivery part 163 of the connecting part 160 is inserted into the through hole of the second plug part 174 so as to be removable. The lower end of the delivery part 163 is in a space surrounded by the second body part 171, the second neck part 172, the second branch part 173, the second filter 175, and the second plug part 174 of the collection part 170. Has reached.

  The second body 171, the second neck 172, and the second branch 173 are made of an insulating material such as glass and are formed as a single body. The second filter 175 is made of an electrically insulating nonwoven fabric or the like, and allows the process gas to pass while preventing the passage of the powder made of the conductive material. The second plug portion 174 is made of an insulating material such as rubber or resin.

Hereinafter, the operation of the atmospheric pressure plasma processing apparatus 100 according to the present embodiment will be described.
First, helium gas is introduced from the gas introduction unit 140. Specifically, from a gas supply source such as a gas cylinder (not shown) connected to the opening of the first branch part 143 of the gas introduction part 140, as shown by an arrow 10, for example, from helium gas at a flow rate of 2 L / min. A process gas is supplied. The process gas that has flowed into the first neck 142 from the inside of the first branch 143 descends through the gap between the outer peripheral surface of the foot 152 and the inner peripheral surface of the first neck 142, and the first body 141. , The flow direction is changed as indicated by the arrow 11 and flows into the foot portion 152 of the powder introducing portion 150.

  The process gas that has risen inside the foot portion 152 of the powder introducing portion 150 as shown by the arrow 12 rises inside the main body portion 151 as shown by the arrow 13 to move the first filter 153 from the lower side to the upper side. pass.

  The process gas that has passed through the first filter 153 and reached the space surrounded by the main body 151, the first filter 153, and the first plug portion 154 spouts the powder 1 made of a conductive material in this space. Then, the powder 1 made of a conductive material flows into the second insulator tube 130 as indicated by an arrow 14 in a state where the powder 1 is dispersed in the process gas. As described above, in the atmospheric pressure plasma processing apparatus 100 according to the present embodiment, the supply unit 190 supplies the process gas together with the powder 1 made of the conductive material into the second insulator tube 130.

  Next, the power supply unit 180 applies a voltage between the pair of electrodes 122 to generate plasma of a process gas inside the second insulator tube 130. Specifically, when the high-frequency power source 181 operates, for example, an AC voltage of 8 kV having a frequency of 40 kHz is applied between the first electrode 122a and the second electrode 122b. Thereby, electric charges are stored in the discharge tube 120.

  When the applied voltage of the high-frequency power source 181 is further increased, a minute partial discharge is generated due to distortion and concentration of the electric field. Electrons accelerated along the electric field collide with the second insulator tube 130 on the way from the cathode to the anode to emit secondary electrons, thereby causing an avalanche and increasing the number of electrons. A large amount of these electrons collide with the process gas inside the second insulator tube 130 and cause dielectric breakdown, so that plasma of the process gas is generated inside the second insulator tube 130. That is, the inside of the second insulator tube 130 is a plasma generation region. The inside of the second insulator tube 130 is maintained at a pressure of 0.8 atm or more and 1.2 atm or less, and atmospheric pressure plasma is generated inside the second insulator tube 130.

  The surface of the powder 1 made of a conductive material is modified by plasma of a process gas while passing through the inside of the second insulator tube 130. Specifically, a hydrophilic functional group such as a carboxyl group, a hydroxy group, or a phenol group is added to the surface of the powder 1 made of a conductive material.

  The process gas that has passed through the second insulator tube 130 together with the powder 2 made of the modified conductive material reaches the receiving portion 161 of the connecting portion 160 and then flows as shown by an arrow 15. The direction is changed, the interior of the slope portion 162 is lowered as indicated by the arrow 16, the interior of the delivery portion 163 is further lowered, and the interior of the second body portion 171 of the collecting portion 170 is indicated as indicated by the arrow 17. To reach.

  The process gas that has reached the inside of the second body portion 171 flows into the second branch portion 173 as indicated by an arrow 18 in a state where the powder 2 made of a conductive material is dispersed in the process gas. The process gas rising inside the second branch 173 passes through the second filter 175 from the lower side to the upper side. The powder 2 made of a conductive material dispersed in the process gas cannot pass through the second filter 175 and falls from the second branch portion 173 into the second trunk portion 171. The process gas that has passed through the second filter 175 is discharged from the opening of the second branch 173 as indicated by the arrow 19.

  As described above, in the atmospheric pressure plasma processing apparatus 100 according to the present embodiment, the surface of the powder 1 made of a conductive material can be modified. Note that the atmospheric pressure plasma processing apparatus 100 may further include a mechanism for supplying the powder 1 made of a conductive material to the powder introduction unit 150 as needed. In this case, the powder 1 made of a conductive material can be continuously surface-modified. As a result, it is possible to produce a large amount of the powder 2 made of the modified conductive material.

  In the atmospheric pressure plasma processing apparatus 100 according to the present embodiment, the inside of the second insulator tube 130 is used as a plasma generation region. A gas layer made of a gas having a discharge start voltage higher than that of the process gas is formed outside the second insulator tube 130. Therefore, compared to the case where the entire interior of the first insulator tube 121 is used as the plasma generation region without providing the second insulator tube 130, the electric field concentration in the second insulator tube 130 which is the plasma generation region is reduced. Can be relaxed.

  Thereby, it can suppress that the powder 1 which consists of an electroconductive material generate | occur | produces an arc discharge or abnormal discharge inside the 2nd insulator pipe | tube 130. FIG. As a result, the powder 1 made of a conductive material can be stably processed. Further, the discharge tube 120 can be prevented from being contaminated by the powder 1 made of a conductive material.

  Furthermore, when the second insulator tube 130 is provided so as to be removable from the atmospheric pressure plasma processing apparatus 100, the second insulator tube 130 is contaminated with the powder 1 made of a conductive material. After the second insulator tube 130 is removed from the atmospheric pressure plasma processing apparatus 100 and cleaned, it can be attached to the atmospheric pressure plasma processing apparatus 100 again. Alternatively, the dirty second insulator tube 130 can be replaced with another new second insulator tube 130.

  When the object to be processed is a solid material, the object to be processed may be modified while the object to be processed is stationary inside the second insulator tube 130. Specifically, the object to be processed is second-insulated by suspending the object to be processed from above with a string made of an insulating material or by supporting the object to be processed from below with a support made of an insulating material. The body tube 130 may be stationary.

  When processing a solid object to be processed in a stationary state, the atmospheric pressure plasma processing apparatus 100 only needs to include a plasma processing unit 110, a gas introduction unit 140, and a power supply unit 180. 150, the connection part 160, and the collection part 170 may not be included. That is, the supply unit 190 may be configured with only the gas introduction unit 140. In this case, the upper part of the first neck 142 of the gas introduction part 140 is connected to the lower part of the second insulator tube 130.

  Hereinafter, an atmospheric pressure plasma processing apparatus according to Embodiment 2 of the present invention will be described. Note that the atmospheric pressure plasma processing apparatus according to the second embodiment of the present invention is different from the atmospheric pressure plasma processing apparatus 100 according to the first embodiment mainly in the configuration relating to the second insulator tube, and therefore the description of the other configurations will be repeated. Absent.

(Embodiment 2)
FIG. 3 is a perspective view showing a configuration of an atmospheric pressure plasma processing apparatus according to Embodiment 2 of the present invention. As shown in FIG. 3, in the atmospheric pressure plasma processing apparatus 200 according to Embodiment 2 of the present invention, the second insulator tube 230 is made of a film-like second insulating material. As will be described later, the length of the second insulator tube 230 in the state before the start of the process of the atmospheric pressure plasma processing apparatus 200 is preferably twice or more compared to the length of the first insulator tube 121. .

  The atmospheric pressure plasma processing apparatus 200 cuts the second insulator tube 230 at a thermocompression bonding portion of the second insulator tube 230 thermocompression bonded by a mechanism for thermocompression bonding the second insulator tube 230 and a mechanism for thermocompression bonding. And a mechanism for

  The mechanism for thermocompression bonding the second insulator tube 230 is composed of three pairs of heating rollers that are located below the second insulator tube 230 and are provided so as to be able to contact and separate from each other. Specifically, the first heating roller pair 220 positioned immediately below the first insulator tube 121, the second heating roller pair 221 positioned below the first heating roller pair 220, and the second heating roller pair 221 A mechanism for thermocompression bonding the second insulator tube 230 is configured from the third heating roller pair 222 located immediately below.

  Each of the first heating roller pair 220, the second heating roller pair 221, and the third heating roller pair 222 includes a movable part and a heater for approaching or moving away from the second insulator tube 230. Each of the first heating roller pair 220 and the second heating roller pair 221 has a cylindrical shape. The rollers of the third heating roller pair 222 have a cylindrical shape in which a concave portion is provided in the central portion in the axial direction on the outer peripheral surface. Therefore, the thermocompression bonding portion of the second insulator tube 230 that is thermocompression bonded between the third heating roller pair 222 is not thermocompression bonded at the center in the width direction, and is open.

  The atmospheric pressure plasma processing apparatus 200 further includes a mechanism for sending the second insulator tube 230 downward. The mechanism for feeding the second insulator tube 230 downward is composed of three pairs of rollers provided so as to be able to contact and separate from each other. Specifically, the first roller pair 210 located above the first insulator tube 121, the second roller pair 211 located directly below the first heating roller pair 220, and the third heating roller pair 222 are located directly below. A mechanism for feeding the second insulator tube 230 downward from the third roller pair 212 located is configured.

  Each of the first roller pair 210, the second roller pair 211, and the third roller pair 212 includes a movable part for approaching or separating from the second insulator tube 230. Each of the first roller pair 210, the second roller pair 211, and the third roller pair 212 has a cylindrical shape with irregularities on the surface. This uneven structure has an anti-slip function.

  The atmospheric pressure plasma processing apparatus 200 further includes a mechanism for sandwiching the second insulator tube 230. The mechanism for sandwiching the second insulator tube 230 includes a sandwiching portion 240 provided so as to be able to contact and separate from each other, and a movable portion for approaching or separating from the second insulator tube 230. The clamping unit 240 is provided directly below the second roller pair 211.

  The mechanism for cutting the second insulator tube 230 includes a pair of blade portions 250 for cutting the second insulator tube 230 and a movable portion for approaching or separating from the second insulator tube 230. Including. The pair of blade portions 250 is provided directly below the third roller pair 212.

  The atmospheric pressure plasma processing apparatus 200 does not include the connecting portion 160 and the collecting portion 170, and a supply portion (not shown) is detachably connected to the upper portion of the second insulator tube 230. In the atmospheric pressure plasma processing apparatus 200 according to the present embodiment, the powder 1 made of a process gas and a conductive material is supplied into the second insulator tube 230 from above the second insulator tube 230.

Hereinafter, the operation of the atmospheric pressure plasma processing apparatus 200 according to the present embodiment will be described.
FIG. 4 is a perspective view showing a state in which the mechanism for feeding the second insulator pipe downward sends the second insulator pipe downward in the atmospheric pressure plasma processing apparatus according to Embodiment 2 of the present invention. As shown in FIG. 4, each of the first roller pair 210, the second roller pair 211, and the third roller pair 212 approaches the second insulator tube 230 by the movable portion and sandwiches the second insulator tube 230. By rotating as indicated by an arrow in the state, the second insulator tube 230 is sent downward. At this time, the second insulator tube 230 has a sheet shape.

  FIG. 5 is a perspective view showing a state in which the third roller pair is thermocompression bonding the second insulator tube in the atmospheric pressure plasma processing apparatus according to the second embodiment of the present invention. As shown in FIG. 5, after each of the first roller pair 210, the second roller pair 211, and the third roller pair 212 stops, the third roller pair 212 approaches the second insulator tube 230 by the movable portion. The thermocompression bonding part 231 is formed in the second insulator tube 230 by operating the heater with the second insulator tube 230 sandwiched therebetween. As described above, the center part in the width direction of the thermocompression bonding part 231 is not thermocompression bonded but is an opening.

  FIG. 6 is a perspective view showing a state in which the supply unit supplies the process gas to the inside of the second insulator tube in the atmospheric pressure plasma processing apparatus according to Embodiment 2 of the present invention. As shown in FIG. 6, after the first roller pair 210, the second roller pair 211, the third roller pair 212, and the third heating roller pair 222 are separated from the second insulator tube 230 by the movable portion, the supply is performed. The unit supplies the process gas into the second insulator tube 230 from above. Specifically, as shown by the arrow 20, the supply unit supplies the process gas into the second insulator tube 230 from above, so that the process gas is filled in the second insulator tube 230 and the second gas is supplied to the second insulator tube 230. The insulator tube 230 swells. Part of the process gas supplied to the inside of the second insulator tube 230 is discharged to the outside from the opening of the thermocompression bonding part 231 as indicated by an arrow 21. As a result, the inside of the second insulator tube 230 is maintained at a pressure of 0.8 to 1.2 atmospheres.

  FIG. 7 is a perspective view showing a state in which the supply unit supplies powder made of a conductive material into the second insulator tube in the atmospheric pressure plasma processing apparatus according to Embodiment 2 of the present invention. As shown in FIG. 7, in a state where the clamping unit 240 approaches the second insulator tube 230 by the movable unit and sandwiches the second insulator tube 230, the supply unit is placed inside the second insulator tube 230. Powder 1 made of a conductive material is supplied from above.

  Next, the power supply unit 180 applies a voltage between the pair of electrodes 122 to modify the powder 1 made of a conductive material by the plasma of the process gas generated in the second insulator tube 230. The surface of the powder 1 made of a conductive material is modified by plasma of a process gas while passing through the inside of the second insulator tube 230. The powder 2 made of the modified conductive material is received by the portion sandwiched between the sandwiching portions 240 and is contained in the second insulator tube 230.

  FIG. 8 is a perspective view showing a state in which the first heating roller pair and the second heating roller pair are thermocompression-bonding the second insulator tube in the atmospheric pressure plasma processing apparatus according to the second embodiment of the present invention. As shown in FIG. 8, after the modification of the powder 1 made of a conductive material is completed, each of the first heating roller pair 220 and the second heating roller pair 221 is moved to the second insulator tube 230 by the movable portion. By operating the heater in a state where the second insulator tube 230 is sandwiched between them, the thermocompression bonding portions 232 and 233 are formed in the second insulator tube 230. Thereafter, the sandwiching portion 240 is separated from the second insulator tube 230 by the movable portion. Thereby, the powder 2 made of the modified conductive material is sealed inside the second insulator tube 230 sealed by the thermocompression bonding part 232 and the thermocompression bonding part 233.

  FIG. 9 is a perspective view showing a state in which the mechanism for feeding the second insulator pipe downward sends the second insulator pipe downward in the atmospheric pressure plasma processing apparatus according to Embodiment 2 of the present invention. As shown in FIG. 9, each of the first roller pair 210 and the second roller pair 211 is indicated by an arrow in a state in which the second insulator tube 230 is sandwiched between the movable insulator and the second insulator tube 230. The second insulator tube 230 is sent downward.

  FIG. 10 is a perspective view showing a state in which the mechanism for cutting the second insulator tube cuts the second insulator tube at the thermocompression bonding portion in the atmospheric pressure plasma processing apparatus according to Embodiment 2 of the present invention. As shown in FIG. 10, when the mechanism for feeding the second insulator tube 230 downwards sends the second insulator tube 230 downwards and the thermocompression bonding part 232 passes between the blade parts 250, the blade part 250 is moved closer to the second insulator tube 230 by the movable portion, and the second insulator tube 230 is cut by the thermocompression bonding portion 232. Thereafter, the blade portion 250 is separated from the second insulator tube 230 by the movable portion.

  FIG. 11 is a perspective view showing a state in which the mechanism for cutting the second insulator tube further cuts the second insulator tube at the thermocompression bonding portion in the atmospheric pressure plasma processing apparatus according to Embodiment 2 of the present invention. . As shown in FIG. 11, the mechanism for feeding the second insulator tube 230 downward sends the second insulator tube 230 downward, and when the thermocompression bonding portion 233 passes between the blade portions 250, the blade portion 250 approaches the second insulator tube 230 by the movable portion, and the second insulator tube 230 is cut by the thermocompression bonding portion 233. Thereby, the pack in which the powder 2 made of the modified conductive material is sealed is cut off.

  By repeating the above steps, in the atmospheric pressure plasma processing apparatus 200 according to this embodiment, the powder 2 made of the modified conductive material becomes a pack filled with an inert gas (process gas). Obtained continuously. Therefore, the operation of handling the powder 2 made of the modified conductive material can be simplified, and the surroundings can be prevented from being soiled by the powder 2 made of the modified conductive material. In order to manufacture a large number of the packs continuously, the length of the second insulator tube 230 in the state before the start of the processing of the atmospheric pressure plasma processing apparatus 200 is 2 as compared with the length of the first insulator tube 121. It is preferable that it is more than twice.

  Also in the atmospheric pressure plasma processing apparatus 200 according to this embodiment, the powder 1 made of a conductive material can be prevented from generating an arc discharge or an abnormal discharge inside the second insulator tube 230. As a result, the powder 1 made of a conductive material can be stably processed.

  In addition, the said embodiment disclosed this time is an illustration in all the points, Comprising: It does not become a basis of limited interpretation. Therefore, the technical scope of the present invention is not interpreted only by the above-described embodiments, but is defined based on the description of the scope of claims. Further, all modifications within the meaning and scope equivalent to the scope of the claims are included.

  DESCRIPTION OF SYMBOLS 1 Powder which consists of electroconductive materials, 2 Powder which consists of modified electroconductive materials, 100,200 Atmospheric pressure plasma processing apparatus, 110 Plasma processing part, 120 Discharge tube, 121 1st insulator tube, 122 1 pair Electrode, 122a first electrode, 122b second electrode, 130, 230 second insulator tube, 140 gas introduction part, 141 first trunk part, 142 first neck part, 143 first branch part, 150 powder introduction part, 151 body part, 152 foot part, 153 first filter, 154 first plug part, 160 connecting part, 161 receiving part, 162 slope part, 163 delivery part, 170 collecting part, 171 second trunk part, 172 second neck part 173, second branch portion, 174 second plug portion, 175 second filter, 180 power supply portion, 181 high frequency power supply, 182 first wiring, 183 second wiring, 190 supply portion, 10 First roller pair, 211 Second roller pair, 212 Third roller pair, 220 First heating roller pair, 221 Second heating roller pair, 222 Third heating roller pair, 231, 232, 233 Thermocompression bonding section, 240 Part, 250 blade part.

Claims (7)

A first insulator tube made of a first insulating material;
A pair of electrodes that are spaced apart from each other on the outer peripheral surface of the first insulator tube and to which a voltage is applied between them;
A second insulator tube inserted into the first insulator tube at a distance from the first insulator tube and made of a second insulating material;
A supply unit for supplying a process gas into the second insulator tube;
A power supply unit for applying a voltage between the pair of electrodes,
An atmospheric pressure plasma processing apparatus for processing an object to be processed by plasma of the process gas generated inside the second insulator tube by applying a voltage between the pair of electrodes by the power supply unit.   The atmospheric pressure plasma processing apparatus according to claim 1, wherein the second insulator tube is detachably provided. The second insulator tube is composed of the film-like second insulating material;
A mechanism for thermocompression bonding the second insulator tube;
The atmospheric pressure plasma processing apparatus according to claim 1, further comprising a mechanism for cutting the second insulator tube at a thermocompression bonding portion of the second insulator tube thermocompression bonded by the thermocompression bonding mechanism. . An atmospheric pressure plasma processing method of processing an object to be processed in the atmospheric pressure plasma processing apparatus according to any one of claims 1 to 3,
Supplying the process gas into the second insulator tube by the supply unit;
An atmospheric pressure plasma processing method comprising: a step of processing an object to be processed by plasma of the process gas generated inside the second insulator tube by applying a voltage between the pair of electrodes by the power supply unit. .   The atmospheric pressure plasma processing method according to claim 4, wherein the object to be processed is powder.   The atmospheric pressure plasma processing method according to claim 5, wherein the powder is made of a conductive material. An atmospheric pressure plasma processing method for a powder made of a conductive material, wherein the powder made of a conductive material is processed by the atmospheric pressure plasma processing apparatus according to claim 3,
The supply unit supplying the process gas into the second insulator tube;
After the step of supplying the process gas, supplying the powder into the second insulator tube;
Treating the powder with plasma of the process gas generated inside the second insulator tube by applying a voltage between the pair of electrodes by the power supply unit;
A step of sealing the powder by forming a thermocompression bonding part by thermocompression bonding the second insulator tube, the thermocompression bonding mechanism;
The cutting mechanism includes: a step of cutting the second insulator tube at the thermocompression bonding portion to separate the pack sealed with the powder, and the atmospheric pressure of the powder made of a conductive material Plasma processing method.

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