JP2016058629A - Substrate housing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate housing container capable of suppressing occurrence of deflection in the substrate, and conveying the substrate while positioning stably in a substrate housing space, and to provide a substrate support auxiliary member for use in the substrate housing container.SOLUTION: A substrate housing container includes a substrate support auxiliary member 8 to be mounted on a side substrate support 5 and mounting a substrate, where the side substrate support 5 supports the substrate via the substrate support auxiliary member 8. The substrate support auxiliary member 8 has a planar part 81 against which the back surface of the substrate abuts, thus mounting the substrate, and a substrate positioning protrusion 82 connected with the planar part 81, protruding therefrom in a direction from the back surface toward the front surface of a substrate mounted on the planar part 81, and abutting against the periphery of the substrate mounted on the planar part 81, thus positioning the substrate in a direction along the front surface of the substrate mounted on the planar part 81.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a substrate storage container used when a substrate made of a semiconductor wafer or the like is stored, stored, transported, transported, or the like.

  2. Description of the Related Art Conventionally, as a substrate storage container for storing and transporting a substrate made of a semiconductor wafer, a structure including a container main body and a lid is known.

  The container main body has a cylindrical wall portion in which a container main body opening is formed at one end and the other end is closed. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates. The lid can be attached to and detached from the container body opening, and the container body opening can be closed.

  In the substrate storage space, a substrate support plate-like portion is provided on the wall so as to form a pair in the substrate storage space. The substrate support plate-like portion can support the edges of a plurality of substrates in a state where adjacent substrates are spaced apart and arranged in parallel when the container body opening is not closed by the lid. is there.

  A front retainer is provided in a portion of the lid that faces the substrate storage space when the container main body opening is closed. The front retainer can support the edges of the plurality of substrates when the container main body opening is closed by the lid. Further, the back substrate support portion is provided on the wall portion so as to be paired with the front retainer. The back side substrate support part can support the edges of a plurality of substrates. When the container body opening is closed by the lid, the back side substrate support unit supports a plurality of substrates in cooperation with the front retainer, thereby separating adjacent substrates at a predetermined interval. A plurality of substrates are held in parallel.

  When the substrate is thin, the substrate may be bent when the substrate is supported by the front retainer and the back substrate support portion. If the substrate is bent, there is a risk that when the fork is inserted under the substrate when the substrate is taken out from the substrate storage container, the fork may come into contact with the substrate W. In view of this, a substrate storage container having a member that suppresses bending of the substrate has been proposed (see Patent Documents 1 and 2).

JP 2013-120896 A JP 2012-195507 A

  However, in the substrate storage container described in the above publication, the substrate is not positioned when the substrate body opening is supported by the lid and the substrate is supported by the front retainer and the back substrate support. The substrate may crack.

  The present invention is capable of suppressing the occurrence of bending of a substrate and capable of transporting the substrate in a stably positioned state in the substrate storage space, and the substrate used in the substrate storage container An object is to provide a support auxiliary member.

  The present invention provides a container main body in which a substrate storage space capable of storing a plurality of substrates is formed, a container main body opening formed at one end thereof and communicating with the substrate storage space, and the container main body opening. A lid that is detachable and is arranged so as to make a pair in the substrate storage space with a lid capable of closing the container body opening, and when the container body opening is not closed by the lid, The adjacent substrates of the plurality of substrates are arranged on the side substrate support portion and the side substrate support portion capable of supporting the edge portions of the plurality of substrates in a state where the adjacent substrates are spaced apart and arranged in parallel. A substrate support auxiliary member, wherein the substrate is placed on the substrate support auxiliary member, and the side substrate support portion supports the substrate via the substrate support auxiliary member. The substrate support auxiliary member is A flat plate portion on which the back surface of the plate abuts and the substrate is placed; and the flat plate portion connected to the flat plate portion and extending from the back surface of the substrate placed on the flat plate portion toward the front surface A substrate positioning projection for positioning the substrate in a direction along the surface of the substrate placed on the flat plate portion by protruding from the flat plate portion and coming into contact with a peripheral edge portion of the substrate placed on the flat plate portion And a substrate storage container.

  Moreover, it is preferable that the said flat plate part protrudes rather than the said side board | substrate support part in the direction which goes to the center of the said board | substrate mounted in the said flat plate part. In addition, an edge relief recess that is recessed in a direction away from the center of the substrate placed on the flat plate portion is formed in the portion of the substrate positioning convex portion connected to the flat plate portion. Is preferred.

  Moreover, it is preferable that a buffer member capable of elastic deformation is present in the edge relief recess. Moreover, it is preferable that the said plate-shaped part has C shape along the peripheral part of the said board | substrate. Moreover, it is preferable that the said board | substrate positioning convex part has a shape in alignment with the peripheral part of the said board | substrate. Moreover, it is preferable that the said board | substrate support auxiliary member is fixed with respect to the said side board | substrate support part so that attachment or detachment is possible.

  Further, the present invention provides a container main body in which a substrate storage space capable of storing a plurality of substrates is formed inside, and a container main body opening that communicates with the substrate storage space at one end, and the container main body opening. When the container body opening is not closed by the lid, which is detachable with respect to the lid, and is arranged so as to make a pair in the substrate storage space. A side substrate support part capable of supporting the edges of the plurality of substrates in a state where adjacent substrates among the plurality of substrates are spaced apart and arranged in parallel. A substrate support auxiliary member placed on the side substrate support portion, the flat plate portion on which the back surface of the substrate comes into contact and the substrate is placed, and the flat plate portion connected to the flat plate portion. Surface from the back surface of the substrate placed on the substrate The substrate in a direction along the surface of the substrate placed on the flat plate-like portion by projecting from the flat plate-like portion in a direction toward and coming into contact with a peripheral edge portion of the substrate placed on the flat plate-like portion. A substrate positioning convex portion for positioning the substrate, wherein the substrate is placed on the flat plate portion, and the side substrate support portion supports the substrate via the flat plate portion.

  ADVANTAGE OF THE INVENTION According to this invention, it can suppress that bending arises in a board | substrate, and can be used in the board | substrate storage container which can be conveyed in the state which positioned the board | substrate stably in the board | substrate storage space, and the said board | substrate storage container. A substrate support auxiliary member can be provided.

FIG. 3 is an exploded perspective view showing a state in which the substrate W is stored in the substrate storage container 1 with the substrate support auxiliary member 8 removed from the substrate storage container 1 according to the first embodiment of the present invention. It is a perspective view which shows the state by which the board | substrate support auxiliary member 8 is being fixed to the board | substrate support plate-shaped part 5 of the container main body 2 of the board | substrate storage container 1 which concerns on 1st Embodiment of this invention. The perspective view seen from the position lower than FIG. 2 which shows the state by which the board | substrate support auxiliary member 8 is being fixed to the board | substrate support plate-shaped part 5 of the container main body 2 of the board | substrate storage container 1 which concerns on 1st Embodiment of this invention. It is. It is sectional drawing which shows the state by which the board | substrate support auxiliary member 8 is not being fixed to the board | substrate support plate-shaped part 5 of the board | substrate storage container 1 which concerns on 1st Embodiment of this invention. It is sectional drawing which shows the state by which the board | substrate support auxiliary member 8 is being fixed to the board | substrate support plate-shaped part 5 of the board | substrate storage container 1 which concerns on 1st Embodiment of this invention. It is a top view which shows the board | substrate support auxiliary member 8 of the board | substrate storage container 1 which concerns on 1st Embodiment of this invention. It is a top view which shows a mode that the board | substrate W was mounted in the board | substrate support auxiliary member 8 fixed to the board | substrate support plate-shaped part 5 of the board | substrate storage container 1 which concerns on 1st Embodiment of this invention. It is an expanded sectional view showing edge escape recess 821A of substrate supporting auxiliary member 8 of substrate storage container 1 concerning a 2nd embodiment of the present invention.

Hereinafter, a substrate storage container and a substrate support auxiliary member according to a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is an exploded perspective view showing a state in which a substrate W is stored in the substrate storage container 1 with the substrate support auxiliary member 8 removed from the substrate storage container 1 according to the first embodiment of the present invention. FIG. 2 is a perspective view showing a state where the substrate support auxiliary member 8 is fixed to the substrate support plate-like portion 5 of the container main body 2 of the substrate storage container 1 according to the first embodiment of the present invention. FIG. 3 shows a state in which the substrate support auxiliary member 8 is fixed to the substrate support plate-like portion 5 of the container body 2 of the substrate storage container 1 according to the first embodiment of the present invention, from a position lower than FIG. FIG. FIG. 4 is a cross-sectional view showing a state where the substrate support auxiliary member 8 is not fixed to the substrate support plate-like portion 5 of the substrate storage container 1 according to the first embodiment of the present invention. FIG. 5 is a cross-sectional view showing a state where the substrate support auxiliary member 8 is fixed to the substrate support plate-like portion 5 of the substrate storage container 1 according to the first embodiment of the present invention. FIG. 6 is a plan view showing the substrate support auxiliary member 8 of the substrate storage container 1 according to the first embodiment of the present invention. FIG. 7 is a plan view showing a state in which the substrate W is placed on the substrate support auxiliary member 8 fixed to the substrate support plate-like portion 5 of the substrate storage container 1 according to the first embodiment of the present invention.
In FIG. 2 and FIG. 3, for convenience of explanation, illustration of a handling member 9 and a top flange 236 described later is omitted.

  Here, for convenience of explanation, a direction from the container body 2 described later to the lid 3 (direction from the upper right to the lower left in FIG. 1) is defined as the front direction D11, and the opposite direction is defined as the rear direction D12. These are defined as the front-rear direction D1. Further, a direction (upward direction in FIG. 1) from the lower wall 24 to the upper wall 23, which will be described later, is defined as an upward direction D21, the opposite direction is defined as a downward direction D22, and these are defined as a vertical direction D2. . Further, a direction from the second side wall 26 to be described later to the first side wall 25 (a direction from the lower right to the upper left in FIG. 1) is defined as the left direction D31, and the opposite direction is defined as the right direction D32. Is defined as the left-right direction D3. In each drawing, description will be given with arrows indicating these directions.

  The substrate W (see FIG. 1 and the like) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin one used in the industry. The substrate W in the present embodiment is a silicon wafer having a diameter of 300 mm and a thickness of about 50 μm in the direction connecting the front surface W11 and the back surface W21.

  As shown in FIG. 1, the substrate storage container 1 includes a container body 2, a lid 3, a seal member 4, a substrate support plate-like portion 5 as a side substrate support portion, and a back side substrate support portion 6 ( 4), a front retainer (not shown), and a substrate support auxiliary member 8.

  The container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is formed so as to be surrounded by the wall portion 20. The substrate support plate-shaped portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1, a plurality of substrates W can be stored in the substrate storage space 27.

  The substrate support plate-like portions 5 are provided on the wall portion 20 so as to form a pair in the substrate storage space 27. When the container body opening 21 is not closed by the lid 3, the substrate support plate-like portion 5 abuts the edges of the plurality of substrates W to separate the adjacent substrates W at a predetermined interval. The edges of the plurality of substrates W can be supported in a state where they are aligned in parallel. A back side substrate support portion 6 is provided on the back side of the substrate support plate-like portion 5.

  The back substrate support 6 is provided on the wall 20 so as to form a pair with a front retainer (not shown) in the substrate storage space 27. The back side substrate support portion 6 can support the rear portions of the edges of the plurality of substrates W by contacting the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3. It is.

  The lid 3 can be attached to and detached from the opening peripheral edge 28 (FIG. 1 and the like) forming the container main body opening 21 and can close the container main body opening 21. The front retainer (not shown) is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3. The front retainer (not shown) is disposed inside the substrate storage space 27 so as to be paired with the back substrate support portion 6.

  The front retainer (not shown) supports the front part of the edges of the plurality of substrates W by contacting the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3. Is possible. The front retainer (not shown) supports adjacent substrates by supporting the plurality of substrates W in cooperation with the back substrate support 6 when the container body opening 21 is closed by the lid 3. A plurality of substrates W are held in a state where the Ws are separated from each other at a predetermined interval and are arranged in parallel.

  A pair of handling members 9 are provided so as to face the outer surfaces of the pair of side walls, respectively, along the outer surfaces of a pair of side walls 25 and 26 described later. The handling member 9 is detachably fixed to the side walls 25 and 26. Hereinafter, each part will be described in detail.

  The substrate storage container 1 is made of a resin such as a plastic material. Unless otherwise specified, examples of the resin of the material include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, and polybutylene. Thermoplastic resins such as terephthalate, polyether ether ketone, and liquid crystal polymer, and alloys thereof are used. When imparting conductivity to the resins of these molding materials, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added to the resins of these molding materials. Moreover, in order to raise rigidity, glass fiber, carbon fiber, etc. may be added to resin of these molding materials.

  As shown in FIG. 1 and the like, the wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-described materials. In the first embodiment, they are integrally formed of polycarbonate.

  The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a positional relationship facing the back wall 22 and have a substantially rectangular shape. Opening peripheral edge portion 28 is formed.

  The opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed. The container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

  As shown in FIG. 1, latch engaging recesses 231 </ b> A and 231 </ b> B that are recessed toward the outside of the substrate storage space 27 in the portions of the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge portion 28. , 241A, 241B are formed. A total of four latch engaging recesses 231A, 231B, 241A, 241B are formed near the left and right ends of the upper wall 23 and the lower wall 24, one each.

  As shown in FIGS. 1 to 3, ribs 235 </ b> A and 235 </ b> B are provided integrally with the upper wall 23 on the outer surface of the upper wall 23. The ribs 235A and 235B increase the rigidity of the container body 2. A top flange 236 is fixed to the central portion of the upper wall 23. The top flange 236 is a member that is a portion that is hung and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer conveyance system), a PGV (wafer substrate conveyance cart), or the like. 2 and 3, the top flange 236 is not shown for convenience of explanation.

  As shown in FIG. 4, the substrate support plate-like portions 5 are provided in the first side wall 25 and the second side wall 26, respectively, and are arranged in the substrate storage space 27 so as to form a pair in the left-right direction D3. . Specifically, the substrate support plate-like portion 5 includes a plate portion 51 and a plate portion support portion 52. The plate part 51 and the plate part support part 52 are integrally formed of resin. The plate part 51 has a plate-like arc shape. A total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, each including 25 plates. Adjacent plate portions 51 are arranged in a parallel positional relationship apart from each other at intervals of 10 mm to 12 mm in the vertical direction D2. In addition, although the thing of the substantially same shape as the board part 51 is also arrange | positioned above the board part 51 located on the top, this is the board | substrate which is located in the top and is inserted in the board | substrate storage space 27 It is a member that serves as a guide for insertion with respect to W.

  Further, the 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship facing each other in the left-right direction D3. Further, the 50 plate portions 51 and the members serving as two guides having substantially the same shape as the plate portion 51 have a positional relationship parallel to the inner surface of the lower wall 24. As shown in FIG. 4 and the like, convex portions 511 and 512 are provided on the upper surface of the plate portion 51. The board | substrate W supported by the board part 51 contacts only the protrusion end of the convex parts 511 and 512, and does not contact the board part 51 by a surface.

  The plate portion support portion 52 includes a first plate portion support portion 521, a second plate portion support portion 522, and a third plate portion support portion 523, which extend in the vertical direction D2. The 25 plate portions 51 provided on the first side wall 25 include a first plate portion support portion 521, a second plate portion support portion 522, and a third plate portion support portion 523 provided on the first side wall 25 side. It is connected to the. Similarly, the 25 plate portions 51 provided on the second side wall 26 include a first plate portion support portion 521, a second plate portion support portion 522, and a third plate portion provided on the second side wall 26 side. It is connected to the support part 523. By fixing the plate portion support portion 52 to the first side wall 25 and the second side wall 26, the substrate support plate-like portion 5 is fixed to the first side wall 25 and the second side wall 26, respectively.

  With the substrate support plate-like portion 5 having such a configuration, the plurality of substrates W in the state where the adjacent substrates W among the plurality of substrates W are separated from each other at a predetermined interval and in parallel with each other. Can be supported.

  As shown in FIG. 4 and the like, the back substrate support 6 has a wall substrate support 60. The wall portion substrate support portion 60 is formed integrally with the plate portion 51 at the rear end portion of the plate portion 51 of the substrate support plate-like portion 5. The back substrate support 6 is separate from the substrate support plate 5, that is, the wall substrate support 60 is formed separately from the plate 51 of the substrate support 5. Also good.

  The wall portion substrate support portions 60 are provided in a number corresponding to each substrate W that can be stored in the substrate storage space 27, specifically, 25 pieces. The wall part board | substrate support part 60 provided in the 1st side wall 25 and the 2nd side wall 26 has the positional relationship which makes a pair in the left-right direction D3. Moreover, the wall part board | substrate support part 60 provided in the 1st side wall 25 and the 2nd side wall 26 has the positional relationship which makes a pair with the front retainer (not shown) mentioned later in the front-back direction D1. . When the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the wall portion substrate support portion 60 holds the edge of the edge portion of the substrate W.

  The substrate support auxiliary member 8 is placed on the substrate support plate-like portion 5 and is integrally formed with the substrate support plate-like portion 5 and the back-side substrate support portion 6 (hereinafter referred to as “integrated support member”). Fixed. The substrate support auxiliary member 8 is mounted and used on a substrate support plate-like portion 5 as a side substrate support portion. The substrate W is placed on the substrate support auxiliary member 8, and the substrate support plate-like portion 5 supports the substrate via the substrate support auxiliary member 8.

  Specifically, as shown in FIG. 6, the substrate support auxiliary member 8 is made of the same resin as the substrate support plate-like portion 5 and the back-side substrate support portion 6, and includes the flat plate-like portion 81 and the substrate positioning. It has a convex part 82, a front notch 83, a rear notch 84, a rear locked part 85, and a side convex part 86. Since the substrate support auxiliary member 8 has a symmetrical shape in the left-right direction D3, only one will be described, and the description of the other will be omitted.

  As shown in FIG. 6, the flat plate-like portion 81 has a flat C-shape along the peripheral edge of the substrate W. The outer diameter of the substrate support auxiliary member 8, that is, the outer diameter of the flat plate portion 81 is slightly larger than the diameter of the substrate W, and the inner diameter of the substrate support auxiliary member 8, that is, the inner diameter of the flat plate portion 81 is 200 mm to 250 mm. Degree. For this reason, the peripheral edge portion of the back surface of the substrate W stored in the substrate storage container 1 is placed on the substrate support auxiliary member 8 in contact with the substrate W in the radial direction of about 25 mm to 50 mm. As a result, the substrate W is supported by the substrate support plate-like portion 5 via the flat plate-like portion 81 of the substrate support auxiliary member 8. Most of the central portion of the substrate W is not placed on the substrate support auxiliary member 8. Further, in the radial direction of the substrate W stored in the substrate storage container 1, the distance between the plate portions 51 of the substrate support plate-like portions 5 provided on the first side wall 25 and the second side wall 26 is the substrate support. It is larger than the inner diameter of the auxiliary member 8. For this reason, as shown in FIG. 7, the plate-like portion 81 is a substrate support plate as a side substrate support portion in a direction toward the center C (see FIG. 6) of the substrate W placed on the plate-like portion 81. It protrudes from the plate part 51 of the shaped part 5.

  The board positioning convex part 82 is integrally formed with the flat part 81 and connected thereto. The substrate positioning projection 82 protrudes from the upper surface of the flat plate portion 81 in the upward direction D21 that is a direction from the back surface W21 of the substrate W placed on the flat plate portion 81 to the front surface W11. The height of the substrate positioning convex portion 82 from the upper surface of the flat plate-like portion 81 is about 100 μm. In FIG. 7, for convenience of explanation, the height of the substrate positioning convex portion 82 and the thickness of the flat plate portion 81 in the vertical direction D2 are compared with the interval between the adjacent plate portions 51 in the vertical direction D2, and the like. It is emphasized and shown greatly. The substrate positioning convex portion 82 has a shape along the peripheral edge of the substrate W. Specifically, the substrate positioning convex portion 82 is a peripheral edge of the substrate W placed on the flat plate portion 81 over substantially the entire circumference from one end to the other end of the flat plate portion 81 having a C-shape. It exists along the part. When the diameter of the substrate W is 300 mm between the side surface W31 of the substrate W placed on the flat plate-like portion 81 and the substrate positioning convex portion 82, for example, approximately 0.5 mm to 1.0 mm. Clearance is secured. The substrate positioning convex portion 82 can contact the side surface W31 of the peripheral portion of the substrate W placed on the flat plate-like portion 81. By this contact, the substrate W is positioned in a direction along the surface W11 of the substrate W placed on the flat plate-like portion 81, that is, in a direction parallel to the front-rear direction D1 and the left-right direction D3.

  The front cutout 83 is formed on the outer periphery of the front portion of the flat plate portion 81 from the front end of the flat plate portion 81 having a C-shape toward the rear direction D12 at a central angle of the flat plate portion 81 by about 20 °. ing. The front notch 83 is configured by a notch that is recessed from the outer periphery of the flat plate-like portion 81 toward the inside of the flat plate-like portion 81 in the radial direction. The substrate positioning projection 82 does not exist in the portion of the substrate support auxiliary member 8 where the front cutout 83 is formed.

  The rear notch 84 is formed on the outer periphery of the rear portion of the flat plate portion 81 from the front end of the flat plate portion 81 having a C-shape toward the rear direction D12 at a central angle of the flat plate portion 81 by about 90 °. ing. The rear notch 84 is configured by a notch that is recessed from the outer periphery of the flat plate-like portion 81 inward in the radial direction of the flat plate-like portion 81. The substrate positioning projection 82 does not exist in the portion of the substrate support auxiliary member 8 where the rear cutout 84 is formed.

  The rear locked portion 85 is a rear portion of the flat plate-like portion 81 and is present on the rear side of the rear notch 84. The rear locked portion 85 protrudes toward the rear direction D12 at the rear portion of the flat plate-shaped portion 81, and a thin engagement groove 851 that is recessed toward the front direction D11 is formed. Engaging protrusions 221 (see FIG. 4 and the like) that are provided on the inner surface of the inner wall 22 of the container body 2 and project from the inner surface of the inner wall 22 toward the front direction D11 can engage with the engaging groove 851. is there. By this engagement, the rear portion of the substrate support auxiliary member 8 is fixed to the back wall 22 of the container body 2.

  The side convex portion 86 is a front portion of the flat plate-like portion 81 having a C-shape, and protrudes from the outer periphery of the portion in the rear direction D12 with respect to the front notch 83 and in the front direction D11 with respect to the rear notch 84. ing. The side protrusion 86 can be locked to the second plate portion support portion 522 as shown in FIG. 5 when the flat portion 81 is placed on the plate portion 51 of the substrate support plate portion 5. .

  As shown in FIG. 1, the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge 28 of the container body 2. The lid 3 can be attached to and detached from the opening peripheral edge 28 of the container main body 2, and the lid 3 can close the container main body opening 21 by attaching the lid 3 to the opening peripheral edge 28. . It is the inner surface of the lid 3 (the surface on the back side of the lid 3 shown in FIG. 1), at the position in the rearward direction D12 of the opening peripheral edge 28 when the lid 3 closes the container main body opening 21. An annular seal member 4 is attached to the surface facing the formed stepped portion surface (seal surface 281). The seal member 4 is made of various thermoplastic elastomers such as polyester and polyolefin that can be elastically deformed, fluorine rubber, silicon rubber, and the like. The seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3.

  When the lid 3 is attached to the opening peripheral edge 28, the seal member 4 is sandwiched between the seal surface 281 and the inner surface of the lid 3 and elastically deformed, and the lid 3 seals the container main body opening 21. Shuts down in a closed state. By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.

  The lid body 3 is provided with a latch mechanism. The latch mechanism is provided in the vicinity of both left and right ends of the lid 3, and as shown in FIG. 1, two upper latch portions 32A and 32B that can project in the upward direction D21 from the upper side of the lid 3, and the lid 3, two lower latch portions 32C and 32D that can project in the downward direction D22 from the lower side. The two upper latch portions 32A and 32B are disposed near the left and right ends of the upper side of the lid 3, and the two lower latch portions 32C and 32D are disposed near the left and right ends of the lower side of the lid 3. .

  An operation unit 33 is provided on the outer surface of the lid 3. By operating the operation portion 33 from the front side of the lid body 3, the upper latch portions 32A and 32B and the lower latch portions 32C and 32D can be protruded from the upper side and the lower side of the lid body 3, and from the upper side and the lower side. It can be made the state which does not project. The upper latch portions 32A and 32B protrude from the upper side of the lid 3 in the upward direction D21 and engage with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portions 32C and 32D The lid 3 is fixed to the opening peripheral edge portion 28 of the container body 2 by projecting in the downward direction D22 from the lower side and engaging with the latch engagement recesses 241A and 241B of the container body 2.

  A front retainer (not shown) is fixedly provided inside the lid body 30 of the lid 3. The front retainer (not shown) has a front retainer substrate receiving portion (not shown). Two front retainer substrate receiving portions (not shown) are arranged in pairs so as to form a pair with a predetermined interval in the left-right direction D3. The front retainer substrate receiving portions (not shown) arranged in pairs so as to form a pair in this way are provided in a state where 25 pairs are arranged in parallel in the vertical direction D2. When the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the front retainer substrate receiving portion (not shown) sandwiches and supports the edge of the edge portion of the substrate W.

Next, mounting and fixing of the substrate support auxiliary member 8 to the substrate support plate-like portion 5 and placement of the substrate W on the substrate support auxiliary member 8 will be described.
First, the opening portion of the substrate support auxiliary member 8 having a substantially C shape is oriented in the front direction D11, and the upper and lower surfaces of the flat plate-like portion 81 of the substrate support auxiliary member 8 are parallel to the front-rear direction D1 and the left-right direction D3. As an appropriate positional relationship, the substrate support auxiliary member 8 is inserted into the substrate storage space 27 of the container body 2. And it is located between the board part 51 adjacent to the up-down direction D2, or the board part 51, or the board part 51 of the board | substrate support plate-like part 5 located in the top, and the board located in the top As shown in FIG. 5, the engagement groove 851 of the rear locked portion 85 is positioned between the plate portion 51 disposed above the portion 51 and the substantially same shape as the rear wall of the container body 2. The engagement protrusions 221 of 22 are engaged. Further, by utilizing the elastic deformation of the substrate support auxiliary member 8, the pair of side projections 86 are respectively deformed by pressing in the rear direction D12 with respect to the second plate portion support portion 522. 522 is brought into contact with the rear part.

  As a result, as shown in FIG. 5, in the state where the flat plate-like portion 81 of the substrate support auxiliary member 8 is placed on the plate portion 51 of the substrate support plate-like portion 5, the rear portion of the substrate support auxiliary member 8 is the container body. The side portion of the substrate support auxiliary member 8 is fixed to the container body 2 via the substrate support plate portion 5. At this time, since the front support notch 83 and the rear notch 84 are formed in the substrate support auxiliary member 8, the convex portion 511 is disposed in the front notch 83, and the convex portion 512 is the rear notch. Arranged in the notch 84. As described above, the substrate support auxiliary member 8 is detachably fixed to the substrate support plate-like portion 5 as the side substrate support portion as shown in FIG.

  In this way, the substrate W is placed on the plate-like portion 81 of the substrate support auxiliary member 8 placed on the plate portion 51 of the substrate support plate-like portion 5. As shown in FIG. 6, the substrate W has a side surface W31 in a state where the peripheral portion of the back surface W21 of the substrate W is in contact with the upper surface of the flat plate-shaped portion 81 and the substrate positioning convex portion 82 faces the side surface W31 of the substrate W. The substrate W is placed on the flat plate-like portion 81 of the substrate support auxiliary member 8.

  At this time, the substrate positioning convex portion 82 can come into contact with the side surface W31 of the substrate W, and by this contact, the substrate W is positioned on the flat plate portion 81 in the direction perpendicular to the vertical direction D2. Is positioned by. Further, due to the weight of the substrate W itself, the substrate W is slightly bent and slightly deformed so that the center C of the substrate W protrudes downward D22. However, the end portion 811 of the flat plate-like portion 81 on the inner side in the radial direction of the substrate W abuts and supports the peripheral portion of the substrate W on the inner side in the radial direction of the substrate W so as to push up and support the substrate. Suppress W deflection. In FIG. 7, for convenience of explanation, the substrate W is shown in a state where it is not bent.

According to the substrate storage container 1 and the substrate support auxiliary member 8 according to the first embodiment having the above-described configuration, the following effects can be obtained.
As described above, the substrate storage container 1 is formed with a substrate storage space 27 in which a plurality of substrates W can be stored, and a container main body opening 21 that communicates with the substrate storage space 27 at one end. 2 and a lid 3 that can be attached to and detached from the container body opening 21 and can close the container body opening 21, and is arranged so as to make a pair in the substrate storage space 27. A side that can support the edges of the plurality of substrates W in a state where adjacent substrates W among the plurality of substrates W are spaced apart from each other and arranged in parallel when the opening 21 is not closed. A substrate support plate-like portion 5 as a substrate support portion and a substrate support auxiliary member 8 placed on the substrate support plate-like portion 5, wherein the substrate W is placed on the substrate support auxiliary member 8 and the substrate support plate-like shape The unit 5 supports the substrate W via the substrate support auxiliary member 8. The auxiliary supporting member 8, and a. The substrate support auxiliary member 8 includes a flat plate portion 81 on which the back surface W21 of the substrate W abuts and the substrate W is placed, and a back surface of the substrate W that is connected to the flat plate portion 81 and placed on the flat plate portion 81. 21 protrudes from the flat plate-like portion 81 in the direction from the surface 21 to the surface 11, and comes into contact with the peripheral portion of the substrate W placed on the flat plate-like portion 81, thereby along the surface of the substrate W placed on the flat plate-like portion 81. And a substrate positioning convex portion 82 for positioning the substrate W in the determined direction.

  The substrate support auxiliary member 8 includes a container main body 2 in which a substrate storage space 27 capable of storing a plurality of substrates W is formed, and a container main body opening 21 communicating with the substrate storage space 27 is formed at one end. The lid 3 is detachably attached to the container body opening 21 and is disposed so as to be paired with the lid 3 capable of closing the container body opening 21 in the substrate storage space 27. Side substrate support capable of supporting the edges of a plurality of substrates W in a state where adjacent substrates W of the plurality of substrates W are spaced apart and arranged in parallel when the substrate 21 is not closed The substrate support plate-like portion 5 of the substrate storage container 1 including the substrate support plate-like portion 5 as a part is placed. The substrate support auxiliary member 8 includes a flat plate portion 81 on which the back surface W21 of the substrate W abuts and the substrate W is placed, and a back surface of the substrate W that is connected to the flat plate portion 81 and placed on the flat plate portion 81. Projecting from the flat plate-like portion 81 in the direction from W21 to the front surface W11 and coming into contact with the peripheral edge of the substrate W placed on the flat plate-like portion 81, the surface W21 of the substrate W placed on the flat plate-like portion 81 A substrate positioning convex portion 82 for positioning the substrate W in the direction along. The substrate W is placed on the flat plate-like portion 81, and the substrate support plate-like portion 5 as the side substrate support portion supports the substrate W via the flat plate-like portion 81.

  With this configuration, the substrate W is supported by the flat plate portion 81 to suppress the bending of the substrate W, and the substrate is supported in the direction connecting the front surface W21 and the back surface W22 of the substrate W, that is, in the direction perpendicular to the vertical direction D2. The substrate W can be positioned with respect to the auxiliary member 8.

  Further, the flat plate-like portion 81 protrudes from the substrate support plate-like portion 5 as the side substrate support portion in the direction toward the center C of the substrate W placed on the flat plate-like portion 81.

  With this configuration, it is better to support the substrate W by the plate-like portion 81 of the substrate support auxiliary member 8 than when the substrate W is supported by the plate portion 51 of the substrate support plate-like portion 5 as the side substrate support portion. The portion of the substrate W closer to the center of the substrate W can be supported. Therefore, even if the substrate W is slightly bent and slightly deformed so that the center C of the substrate W protrudes in the downward direction D22 due to the weight of the substrate W itself, a flat plate shape inward in the radial direction of the substrate W. The end portion 811 of the portion 81 abuts and supports the peripheral portion of the substrate W in the radial inner side of the substrate W in a state of pushing up, so that bending of the substrate W can be suppressed. Therefore, when the fork (not shown) is inserted below the substrate W when the substrate W is taken out from the substrate storage container 1, trouble that the fork contacts the substrate W can be reduced.

  The flat plate portion 81 has a C shape along the peripheral edge of the substrate W. With this configuration, the flat plate-like portion 81 can support the peripheral edge portion of the back surface W21 of the substrate W.

  Further, the substrate positioning convex portion 82 has a shape along the peripheral edge of the substrate W. With this configuration, not only in the front-rear direction D1 and the left-right direction D3, but also in other directions and in the direction connecting the front surface W11 and the back surface W21 of the substrate W (direction perpendicular to the vertical direction D2), The substrate W can be positioned with respect to 8.

  The substrate support auxiliary member 8 is detachably fixed to the substrate support plate-like portion 5 as a side substrate support portion.

  With this configuration, the substrate support auxiliary member 8 is used as the side substrate support portion only when the thin substrate W is placed using the substrate support plate-like portion 5 as the side substrate support portion that has been conventionally used. The substrate support auxiliary member 8 can be used while being fixed to the substrate support plate-like portion 5. Accordingly, in one substrate storage container 1, the plate portion 51 on which the substrate support auxiliary member 8 is placed and the plate portion 51 on which the substrate support auxiliary member 8 is not placed can be mixed. And a thin substrate can be mixed and stored in one substrate storage container 1.

  Hereinafter, a substrate storage container according to a second embodiment of the present invention will be described with reference to FIG. FIG. 8 is an enlarged cross-sectional view showing an edge escape recess 821A of the substrate support auxiliary member 8 of the substrate storage container 1 according to the second embodiment of the present invention.

  The substrate support auxiliary member 8A of the substrate storage container according to the second embodiment differs from the substrate storage container 1 according to the first embodiment in that it has an edge escape recess 821A. About the structure of each part other than this, it is the same as that of the structure of each part of the substrate storage container 1 by 1st Embodiment. The same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 8, an edge relief recess 821 </ b> A is formed in the portion of the substrate positioning protrusion 82 connected to the flat plate-like portion 81. The edge relief recess 821 </ b> A is formed over the entire substrate positioning projection 82 along the circumferential direction of the flat plate-like portion 81. The edge relief recess 821A is recessed in the direction away from the center of the substrate WA placed on the plate-like portion 81 (right direction D32 in FIG. 8) parallel to the upper surface of the plate-like portion 81, and the edge relief recess 821A. In the cross section orthogonal to the circumferential direction of the flat plate-like portion 81 extending in the shape, it has a U-shape. The height of the edge relief recess 821A from the upper surface of the flat plate portion 81 is about 25 μm.

  The edge relief recess 821A has a buffer member 822A that can be elastically deformed. The buffer member 822A is filled in the edge relief recess 821A, and is made of, for example, rubber, foam such as sponge, or the like. The thin substrate WA is formed by scraping the side surface of a normal thickness substrate having a bevel shape from the back surface side. For this reason, as shown in FIG. 8, the side surface WA31 of the substrate WA has an inclination such that the diameter of the substrate WA increases as it approaches the back surface WA21 from the front surface WA11, and the back surface WA21 and the side surface WA31 have an acute angle. Is formed. When such an acute angle portion enters the edge escape recess 821A, the acute angle portion abuts against the buffer member 822A.

  According to the substrate storage container according to the second embodiment having the above configuration, the following effects can be obtained. As described above, at the portion of the substrate positioning convex portion 82 connected to the flat plate-like portion 81, the edge relief concave portion 821A that is depressed in the direction away from the center of the substrate WA placed on the flat plate-like portion 81 is formed. Has been.

  With this configuration, the side surface WA31 of the substrate WA is inclined so that the diameter of the substrate WA increases as it approaches the back surface WA21 from the front surface WA11, and even if an acute angle is formed between the back surface WA21 and the side surface WA31, Such an acute angle portion can enter the edge escape recess 821A. For this reason, it is possible to reduce the occurrence of cracks in the substrate WA due to the acute angle portion colliding with the substrate positioning convex portion 82.

  The edge relief recess 821A has a buffer member 822A that can be elastically deformed. With this configuration, when the side surface WA31 of the substrate WA has an inclination so that the diameter of the substrate WA increases as it approaches the back surface WA21 from the front surface WA11, an acute angle is formed between the back surface WA21 and the side surface WA31. When such an acute angle portion enters the edge escape recess 821A, the acute angle portion contacts the buffer member 822A. For this reason, a shock that a part of the inclined side surface WA31 is likely to collide strongly with the substrate positioning convex portion 82 can be buffered by the buffer member 822A. This can reduce the occurrence of cracks in the substrate WA.

  The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims. For example, in the second embodiment, the edge escape recess 821A includes the elastically deformable buffer member 822A, but the configuration is not limited thereto. For example, the elastically deformable buffer member 822A may not exist in the edge relief recess 821A.

  Further, the shape of the container main body, the lid body, and the substrate support auxiliary member, and the number and dimensions of the substrates that can be stored in the container main body are the container main body 2, the lid body 3, and the substrate support auxiliary member 8 in the present embodiment. It is not limited to the shape, the number of substrates W that can be stored in the container body 2, and the dimensions. For example, the diameter of the substrate W is 300 mm, but is not limited to this value. For example, the diameter of the substrate W may be 300 mm to 450 mm.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container body 3 Lid 5 Substrate support plate-like part (side board support part)
8 Substrate support auxiliary member 21 Container body opening 27 Substrate storage space 81 Flat plate portion 82 Substrate positioning convex portion 821A Edge relief concave portion 822A Buffer member C Center W Substrate W11 Front surface W21 Rear surface W31 Side surface

Claims (8)

A container main body in which a substrate storage space capable of storing a plurality of substrates is formed inside, and a container main body opening portion communicating with the substrate storage space is formed at one end portion;
A lid that can be attached to and detached from the container body opening, and can close the container body opening;
When the container main body opening is not closed by the lid, the adjacent substrates of the plurality of substrates are spaced apart from each other at a predetermined interval. In a parallel state, a side substrate support portion capable of supporting the edges of the plurality of substrates,
A substrate support auxiliary member placed on the side substrate support portion, wherein the substrate is placed on the substrate support auxiliary member, and the side substrate support portion supports the substrate via the substrate support auxiliary member. A substrate support auxiliary member,
The substrate support auxiliary member has a flat plate-like portion on which the back surface of the substrate abuts and the substrate is placed, and a surface connected from the flat plate-like portion to the front surface of the substrate placed on the flat plate-like portion. In the direction along the surface of the substrate placed on the flat plate-like portion by projecting from the flat plate-like portion in the direction toward and coming into contact with the peripheral edge of the substrate placed on the flat plate-like portion. A substrate storage container having a substrate positioning convex portion for positioning the substrate.   The substrate storage container according to claim 1, wherein the flat plate portion protrudes from the side substrate support portion in a direction toward the center of the substrate placed on the flat plate portion.   2. An edge relief recess that is recessed in a direction away from the center of the substrate placed on the flat plate portion is formed in the portion of the substrate positioning convex portion that is connected to the flat plate portion. Alternatively, the substrate storage container according to claim 2.   The substrate storage container according to claim 3, wherein the edge relief recess has an elastically deformable buffer member.   The said flat plate-shaped part is a substrate storage container in any one of Claims 1-4 which has C shape along the peripheral part of the said board | substrate.   The said substrate positioning convex part is a substrate storage container in any one of Claims 1-5 which has a shape in alignment with the peripheral part of the said board | substrate.   The substrate storage container according to claim 1, wherein the substrate support auxiliary member is detachably fixed to the side substrate support portion. A substrate storage space capable of storing a plurality of substrates is formed inside, and a container main body formed with a container main body opening communicating with the substrate storage space at one end is detachable from the container main body opening. A lid that can close the opening of the container body, and is arranged to make a pair in the substrate storage space, and when the opening of the container body is not closed by the lid, The side substrate support of a substrate storage container comprising: a side substrate support portion capable of supporting edges of the plurality of substrates in a state where adjacent substrates are spaced apart and arranged in parallel. A substrate support auxiliary member placed on the portion,
A flat plate-like portion on which the back surface of the substrate abuts and the substrate is placed; and the flat plate shape connected to the flat plate-like portion and extending from the back surface to the front surface of the substrate placed on the flat plate-like portion. Substrate positioning for positioning the substrate in a direction along the surface of the substrate placed on the flat plate-like portion by protruding from the portion and contacting the peripheral edge portion of the substrate placed on the flat plate-like portion A convex portion,
A substrate support auxiliary member, wherein the substrate is placed on the flat plate portion, and the side substrate support portion supports the substrate through the flat plate portion.

Images