JP2015227793A - Inspection device of optical components and inspection method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow a simple configuration to surely and correctly inspect an entire front surface of an optical component whose surface is not flat.SOLUTION: An inspection device A of an optical component comprises: a photographing unit 4 that photographs an inspected area of an inspection object Ls; an illumination unit 3 that irradiates illumination light so as to allow the photographing unit 4 to photographs a dark field image; a light emerging location change unit 5 that changes a light emerging location of the illumination light to a periphery direction with an axis passing through the inspected area as a center; and an anomaly detection unit 6 that generates an extraction image having a reflected part of surface reflection light and internal reflection leakage light deleted from a photographing image, and detects anomaly. The inspection device A is configured to photograph the inspected area as changing the light emerging location of the illumination light, to detect the anomaly on the basis of the extraction image for each light emerging location.

Description

  The present invention relates to an inspection apparatus for inspecting a defect of an optical component such as a lens and an inspection method thereof.

  An optical component such as a lens deteriorates its optical performance when there are defects such as scratches and deformation on the surface, and foreign matters such as dust and dust. Therefore, in the manufacture of the optical component and the manufacture of the optical device using the optical component, a screening inspection is performed to remove defective products such as defects and foreign matters.

  As an inspection apparatus for detecting defects on the surface of such an article, for example, there is a surface inspection apparatus described in JP-A-2002-181724. The surface inspection apparatus described in Japanese Patent Laid-Open No. 2002-181724 is an apparatus that detects defects such as scratches on the surface of a hard disk. The surface inspection apparatus includes an illuminating device that irradiates the surface area with illumination light from a plurality of different angles in the circumferential direction around the inspection target area, and a CCD camera (imaging unit) that images the surface area. Illuminate from an angle and take a picture. And it detects as a reflected light image reflected with defects, such as a crack, and detects a defect.

  Some hard disks have innumerable annular minute grooves (textures). This surface inspection device is for detecting defects on the surface of the hard disk on which this texture is formed, and a plurality of illumination lights are irradiated with illumination light so that a texture reflected light image is not detected, and a direction different from the texture. The defect is detected by detecting the reflected light image of the defect extending in the area. Further, the illumination light is irradiated so that the reflected light image of the texture is detected, and the defect is detected by detecting the reflected light image of the defect extending in the same direction as the texture.

JP 2002-181724 A

  In the surface inspection apparatus described in Japanese Patent Application Laid-Open No. 2002-181724, it is necessary to accurately align the position of the light source that irradiates illumination light and the texture, and it takes a lot of time and effort to prepare for the inspection. Further, the surface inspection apparatus described in Japanese Patent Laid-Open No. 2002-181724 has a configuration in which a defect is detected by detecting a reflected light image on a plane defect, but has a curved surface shape like a lens. If the surface inspection of the optical element is performed, the reflected light image (reflection) of the surface reflection light and the internal reflection leakage light becomes large, so that there is a possibility that the entire surface cannot be detected.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an optical component detection apparatus that can reliably and accurately inspect the entire surface of an optical component having a non-flat surface with a simple configuration.

  It is another object of the present invention to provide a method for detecting an optical component that can reliably and accurately inspect the entire surface of an optical component whose surface is not flat by a simple method.

  In order to achieve the above object, the present invention provides a photographing unit that images a region to be inspected of an inspection object, and illumination that irradiates the inspection region with illumination light so that the imaging unit can capture a dark field image. The illumination light from the captured image captured by the imaging unit, an emission position changing unit that changes the emission position of the illumination light with respect to the inspection region in a circumferential direction about an axis passing through the inspection region An extracted image in which the reflected portions of the surface reflected light and the internal reflection leakage light are deleted, and an abnormality detection unit that detects an abnormality from the extracted image, and changing the emission position of the illumination light, the inspection object Provided is an optical component inspection apparatus for photographing an area, generating the extracted image, and detecting an abnormality based on the extracted image for each emission position of the illumination light.

  According to this configuration, even if the illumination target is irradiated with illumination light on an object whose surface is not flat, and the illumination light is scattered (diffuse reflection) on the surface, the image of the scattered light is removed from the captured image. It is possible to accurately perform abnormalities such as surface defects and adhesion of foreign matter. Further, since photographing is performed by changing the irradiation position of the illumination light, the scattered light image is removed, and the surface abnormality is inspected, it is possible to inspect the entire surface of the inspected area.

  Accordingly, it is possible to accurately inspect abnormalities such as defects on the surface of an optical component having a non-flat surface and adhesion of foreign matters with a simple configuration and a simple operation.

  The said structure WHEREIN: The said illumination part may condense the said illumination light so that the irradiation area | region of the said illumination light may correspond with the said to-be-inspected area | region.

  In the above-described configuration, the illuminating unit includes a plurality of light emitting units that emit the illumination light arranged in a circumferential direction around the central axis of the inspection object, and the emission position changing unit is the illuminating unit. The light may be emitted from a light emitting portion selected from the plurality of light emitting portions.

  In the above configuration, the emission position changing unit may rotationally drive the illumination unit so that the light output unit that emits the illumination light rotates about the central axis of the inspection object.

  In the above configuration, the emission position changing unit may rotate the inspection object around a central axis.

  In the above configuration, when the inspection target surface of the inspection target area is a convex surface or a concave surface, the illumination unit is configured to inspect the inspection target with respect to a tangential plane at a point that intersects the optical axis of the inspection target surface. You may make it irradiate from the same side as a thing.

  In the above configuration, the abnormality detection unit combines a plurality of images obtained by deleting the reflected portions of the surface reflected light and the internal reflection leakage light of the illumination light from the plurality of captured images captured by changing the emission position. An abnormality may be detected.

  In the above-described configuration, the emission position changing unit changes the emission position so as to irradiate the illumination light so as not to overlap the reflected part of the surface reflected light and internal reflection leakage light of the illumination light of the immediately preceding captured image. You may make it do.

  The said structure WHEREIN: You may provide the polarization process part which is arrange | positioned in the front surface of the said imaging part and switches the polarization state of the light reflected by the surface of the said to-be-inspected area | region.

  In order to achieve the above object, the present invention provides a light output step for emitting the illumination light condensed on the inspection object, and a light emission position of the illumination light in a circumferential direction around the central axis of the inspection object. An emission position changing step to be changed, a shooting step for shooting the inspection region of the inspection object, and an extracted image obtained by deleting the reflected portion of the surface reflected light and the internal reflection leakage light of the illumination light from the taken captured image An abnormality detection step of detecting an abnormality from the extracted image, capturing the inspection area while changing the emission position of the illumination light, generating the extraction image, and for each emission position of the illumination light An optical component inspection method for detecting an abnormality based on the extracted image is provided.

  In the above-described configuration, the emission position changing step is stopped every time the emission position of the illumination light is moved in the circumferential direction around the central axis of the inspection object, and the imaging step is performed in a state where the emission position is stopped. You may make it image | photograph a to-be-inspected area | region.

  ADVANTAGE OF THE INVENTION According to this invention, the detection apparatus of the optical component which can test | inspect the whole surface of the optical component whose surface is not flat with a simple structure reliably and correctly can be provided.

According to the present invention, it is possible to provide a method for detecting an optical component that can reliably and accurately inspect the entire surface of an optical component whose surface is not flat by a simple method.
be able to.

1 is a schematic layout diagram of a surface inspection apparatus which is an example of an optical component inspection apparatus according to the present invention. It is a side view which shows the arrangement | positioning state of the surface inspection apparatus shown in FIG. It is a top view which shows the arrangement | positioning state of an illumination part. It is a block diagram of an example of the surface detection apparatus concerning this invention. It is a flowchart which shows the operation | movement of abnormality detection of the inspection apparatus of the optical component concerning this invention. It is a picked-up image when the illumination light from the 1st light emission part of the inspection apparatus of the optical component concerning this invention is irradiated. It is a picked-up image when the illumination light from the 2nd light emission part of the inspection apparatus of the optical component concerning this invention is irradiated. It is a picked-up image when the illumination light from the 3rd light emission part of the inspection apparatus of the optical component concerning this invention is irradiated. It is a side view which shows the arrangement | positioning state of the surface inspection apparatus which is another example of the inspection apparatus of the optical component concerning this invention. It is a top view which shows the arrangement | positioning state of an illumination part. FIG. 8 is a block diagram of the optical component inspection apparatus shown in FIG. 7. It is a flowchart which shows the operation | movement of abnormality detection of the inspection apparatus of the optical component concerning this invention. It is a flowchart which shows the operation | movement of abnormality detection of the inspection apparatus of the optical component concerning this invention. It is a perspective view which shows the arrangement | positioning state of the surface inspection apparatus which is another example of the inspection apparatus of the optical component concerning this invention. It is a schematic block diagram of the inspection apparatus of the optical component shown in FIG. It is a top view of a molded lens.

  An optical component inspection apparatus according to the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 is a schematic arrangement view of an example of an optical component inspection apparatus according to the present invention, FIG. 2 is a side view showing an arrangement state of the optical component inspection apparatus shown in FIG. 1, and FIG. It is a top view which shows a state. The optical component inspection apparatus A is a surface inspection apparatus that inspects the surface of a lens of a digital camera module used in a mobile phone or the like and the presence or absence of foreign matter attached to the surface. As shown in FIGS. 1 and 2, an optical component inspection apparatus A includes a housing 1, an inspection stage 2 that is attached to the housing 1 and holds a test lens Ls that is an example of an optical component, and a test lens Ls. And an imaging unit 4 that is an imaging unit that images the surface of the lens Ls to be examined.

  As shown in FIG. 1, the housing 1 includes a rectangular parallelepiped base 10 and a column 11 projecting from the base 10. A level adjusting unit (not shown) is provided on the bottom surface of the base 10 so that the base 10 (the upper surface thereof) can be adjusted to be horizontal or at an arbitrary angle with respect to the horizontal. Yes.

  The support 11 is erected vertically from the upper surface of the base 10. By adjusting the upper surface of the base 10 to be horizontal, the support column 11 becomes vertical. The column 11 includes an illumination holding unit 111 that holds the illumination unit 3 and an imaging unit holding unit 112 that holds the imaging unit 4. The illumination holding unit 111 and the imaging unit holding unit 112 are provided to be slidable along the column 11. The illumination holding unit 111 and the imaging unit holding unit 112 include a fixing mechanism (not shown) configured to fix the illumination holding unit 111 and the imaging unit holding unit 112 to the support column 11.

  Thereby, it is possible to adjust the illumination unit 3 and the imaging unit 4 to be close to or away from the test lens Ls so as to be optimal positions for the surface inspection of the test lens Ls. And when performing a surface test | inspection, by fixing with a fixing mechanism, position shift can be suppressed and a surface test | inspection can be performed accurately. In the present embodiment, both the illumination holding unit 111 and the imaging unit holding unit 112 are slidable, but both may be fixed, or one of them may be fixed.

  The inspection stage 2 is a holding table for holding the test lens Ls when the surface of the test lens Ls that is an inspection target is inspected. The inspection stage 2 is fixed to the support 11. The inspection stage 2 is fixed to the support 11 so as to be parallel to the base 10, and the inspection stage 2 can be made horizontal by arranging the base 10 so as to be horizontal. Although not shown, the inspection stage 2 includes a holding unit that can hold / release the inspection object (the lens Ls to be tested).

  The holding part may be one that holds and holds the side of the inspection object using a spring or the like, or holds the inspection object on the inspection stage 2 by sucking air. May be. Further, the inspection object may be directly held, or the inspection object attached to the optical device or jig on which the inspection object is assembled may be held.

  The imaging unit 4 is a so-called digital camera that photographs the lens Ls irradiated with illumination light from the illumination unit 3 and includes an imaging element such as a CCD or a CMOS. The imaging unit 4 is arranged so that the optical axis coincides with the optical axis of the test lens Ls.

  In the optical component inspection apparatus A of the present embodiment, the imaging unit 4 is arranged so that the optical axis of the imaging unit 4 overlaps the optical axis of the lens Ls to be tested, but the present invention is not limited to this. The positions of the imaging unit 4 and the test lens Ls are not particularly limited as long as a dark field image of the surface (test region) of the test lens Ls irradiated with the illumination light from the illumination unit 3 can be captured. However, when the test lens Ls has a convex surface with a large curvature, the test lens Ls is displaced from the optical axes of the imaging unit 4 and the test lens Ls, or the optical axis of the imaging unit 4 and the optical axis of the lens 3 are different. If the imaging unit 4 is arranged so as to intersect at a predetermined angle, there may be a portion where imaging cannot be performed on the surface of the test lens Ls. Therefore, it is preferable that the imaging unit 4 be arranged so that the optical axis coincides with the optical axis of the lens 3.

  As shown in FIG. 1, the illumination unit 3 includes an annular support stay 30 and three light emitting units (a first light emitting unit 31a, a second light emitting unit 31b, and a third light emitting unit 31c) attached to the support stay 30. ). The support stay 30 is held by the illumination holding unit 111.

  The first light output unit 31a, the second light output unit 31b, and the third light output unit 31c are a light source (for example, an LED element) of illumination light and a light collecting unit that condenses light from the light source so as to become parallel light or substantially parallel light. It has the structure provided with the optical member (lens). In addition, the structure of a light emission part is not limited to this. For example, as the light source, in addition to the LED, a light emitting element by a discharge, a laser light emitting element, or the like may be used.

  The illumination unit 3 is configured to check illumination light from the same side as the imaging unit 4 with respect to the test lens Ls in order to capture a dark field image of the surface of the test lens Ls by the imaging unit 4. As shown in FIG. 1, the imaging unit 4 photographs the lens Ls to be inspected through the through hole in the center portion of the support stay 30. In the optical component inspection apparatus A, the center of the circular tube of the support stay 30 is disposed so as to overlap the lens Ls to be tested and the optical axis of the imaging unit 4.

  As shown in FIG. 3, the first light output part 31 a, the second light output part 31 b, and the third light output part 31 c are arranged on the support stay 30 side by side at equal intervals in the circumferential direction. The optical axis C2a of the first light output part 31a, the optical axis C2b of the second light output part 31b, and the optical axis C2c of the third light output part 31c intersect at the center of the lens Ls to be measured in plan view. .

  Moreover, the 1st light emission part 31a, the 2nd light emission part 31b, and the 3rd light emission part 31c are arrange | positioned at the support stay 30 so that a light emission surface may face a lens. The angles of the three light output portions 31a, 31b, and 31c with respect to the lens Ls to be measured will be described with reference to FIG. Hereinafter, the three light output portions 31a, 31b, and 31c are attached to the support stay 30 at the same angle, and will be described as the second light output portion 31b as a representative.

  As shown in FIG. 2, the second light exit portion 31 b is attached to the support stay 30 so that the light exit surface faces downward. The test lens Ls is a lens having a convex surface, and the second light output portion 31b is supported by the lower portion of the support stay 30 so that the angle of the optical axis C2b with respect to the tangent L1 of the apex portion of the convex surface is an angle θ. Moreover, the irradiation area of the illumination light of the second light output part 31b is irradiated so as to coincide with the entire surface of the lens Ls to be tested (the entire area to be inspected). Note that the irradiation region may be adjusted to be larger than the entire inspection region so that the irradiation light emitted from the second light output unit 31b can irradiate the entire inspection region.

  In addition, the second light output portion 31b is rotatably supported by the support stay 30 so that the angle θ between the optical axis C2b and the tangent line L1 can be changed. The 2nd light emission part 31b is attached so that rotation is possible so that angle (theta) can be changed. Thereby, it is possible to adjust the illumination light from the second light output part 31b so as to accurately irradiate the test lens Ls. Further, even when the support stay 30 approaches or separates from the inspection stage 2, it can be adjusted so that the illumination light is accurately irradiated to the lens Ls to be tested.

  Further, the second light output portion 31b is supported so as to be rotatable along the support stay 30 (in the horizontal direction in the present embodiment). In this way, by allowing the second light output portion 31b to be rotated in the horizontal direction, the irradiation region of the irradiation light can be finely adjusted in the direction along the upper surface of the inspection stage 2, and the irradiation light can be inspected. It is possible to accurately irradiate the region to be inspected.

  And if the angle of the 2nd light emission part 31b is adjusted so that irradiation light may be correctly irradiated to a test object, the 2nd light emission part 31b will be fixed firmly so that it may not move to the support stay 30. In addition, the same operation | movement is also performed in the 1st light emission part 31a and the 3rd light emission part 31c, and the irradiated light radiate | emitted from each light emission part is correctly irradiated to the to-be-tested lens Ls which is a test subject. In addition, in the optical component inspection apparatus A according to the present embodiment, an example having three light emitting units is described, but the present invention is not limited to this. In addition, although they are arranged at equal intervals in the circumferential direction, the present invention is not limited to this. Details of the positions of the three light emitting portions 31a, 31b, and 31c will be described later.

  Next, a schematic configuration of an optical component inspection apparatus A according to the present invention will be described with reference to the drawings. FIG. 4 is a block diagram of an example of the surface detection apparatus according to the present invention. As shown in FIG. 4, in addition to the illumination unit 3 and the imaging unit 4 as described above, the optical component inspection apparatus A includes an emission position changing unit 5, an abnormality detection unit 6, a control unit 7, and a storage unit. 8 and.

  As shown in FIG. 4, the emission position changing unit 5 is connected to the control unit 7, the first light emitting unit 31 a, the second light emitting unit 31 b, and the third light emitting unit 31 c. In accordance with an instruction from the control unit 7, the emission position changing unit 5 is configured so that one or more of the first light emission unit 31 a, the second light emission unit 31 b, and the third light emission unit 31 c emit illumination light. The light emission part 31a, the 2nd light emission part 31b, and the 3rd light emission part 31c are driven. The emission position changing unit 5 supplies power necessary for irradiation as driving of the first light emitting unit 31a, the second light emitting unit 31b, and the third light emitting unit 31c. The emission position changing unit 5 may include a power supply circuit, or a switching circuit that switches a light output unit that supplies power from a separately provided power supply circuit.

  The imaging unit 4 is connected to the control unit 7 and performs imaging of the surface of the lens Ls to be tested in accordance with an instruction from the control unit 7. The imaging unit 4 sends the captured image to the abnormality detection unit 6. The abnormality detection unit 6 is connected to the control unit 7, and detects abnormalities such as defects on the surface of the lens Ls and foreign matters from the captured image acquired from the imaging unit 4 in accordance with an instruction from the control unit 7. The imaging unit 4 uses a dark field image as a captured image, and the illumination light is scattered and displayed brightly in an abnormal portion such as a defect on the surface of the lens Ls or a foreign object in the captured image. The abnormality detection unit 6 detects the presence / absence, shape, size, and the like of the abnormality by detecting an image of scattered light from the captured image.

  When the imaging unit 4 captures a surface having a curvature like the lens Ls to be detected, the angle of illumination light incident on the surface varies depending on the curved surface. Therefore, in the captured image, the surface reflected light reflected by the surface of the test lens Ls and the reflected light inside the test lens Ls are directed to the imaging unit 4, and reflection of reflected light and reflection of internal reflection leakage light are reflected. Occur. In the dark field image, the reflection is displayed brightly, and an abnormality in the reflection portion cannot be detected. Therefore, the abnormality detection unit 6 includes an image extraction unit 61 that deletes a reflected portion from the acquired captured image and generates an extracted image, and a detection unit 62 that detects an abnormality from the extracted image.

  The image extraction unit 61 and the detection unit 62 extract a reflected image based on a captured image acquired from the imaging unit 4 and detect an abnormality, and have a configuration including an image processing circuit (function). Yes. When the image extraction unit 61 generates an extracted image excluding the reflected images of the surface reflection light and the internal reflection leakage light, and the detection unit 62 detects an abnormality based on the extracted image, the detection unit 62 detects the abnormality Is transmitted to the control unit 7.

  The storage unit 8 is connected to the control unit 7. The storage unit 8 includes a semiconductor memory such as a ROM, a RAM, and a flash memory, and a physical storage device such as a hard disk and an optical disk. The storage unit 8 stores data such as various data processed by the control unit 7.

  The control unit 7 is a circuit that controls the optical component inspection apparatus A. The control unit 7 is a circuit including an arithmetic processing unit such as an MPU or a CPU, and has a configuration capable of performing a plurality of processes. Moreover, you may have the structure which performs a process by operating a processing program as needed.

  The emission position changing unit 5, the abnormality detecting unit 6, and the control unit 7 each include an electronic circuit, and some or all of them may include a common circuit. That is, the emission position changing unit 5, the abnormality detecting unit 6, and the control unit 7 may be configured with one chip, or a part thereof may be configured with one chip. Furthermore, the configuration may be such that all these functions are processed by the operation of the processing program.

  Next, detection of abnormalities such as defects on the surface of the lens Ls, foreign matter, etc. will be described with reference to the drawings. FIG. 5 is a flowchart showing an abnormality detection operation of the surface inspection apparatus according to the present invention. 6A to 6C are captured images when illumination light is irradiated from each of the three light output portions of the optical component inspection apparatus shown in FIG. FIGS. 6A to 6C are schematic diagrams illustrating positions where the reflected image of the surface reflection light and the reflection image of the internal reflection leakage light are generated. 6A to 6C are diagrams in which reflection of surface reflection light and reflection of internal reflection leakage light are generated with the optical axis of the lens Ls to be detected interposed therebetween for convenience of explanation. Is different. Further, in FIGS. 6A to 6C, the dark field image portion is hatched, and the reflection portion is white.

  FIG. 6A is a schematic diagram illustrating a state in which the surface of the lens Ls to be examined is photographed by irradiating illumination light from the first light output unit 31a. Since the surface on which the surface inspection of the lens Ls is to be performed is a convex surface having a curvature, the reflected light on the surface is captured by the imaging unit 4 as a reflection. As shown in FIG. 6A, when the illumination light from the first light output unit 31a is irradiated from above on the lens Ls in plan view, a reflection due to surface reflection occurs in a portion where the illumination light is incident. (Outlined portion in FIG. 6A).

  Further, in the case of an optical component that transmits light, such as the lens Ls to be tested, internal reflection occurs in which light is reflected on the surface or side surface opposite to the surface to be inspected. Reflected light due to internal reflection appears on the opposite side across the center of incident illumination light from the lens Ls to be examined (the white area in FIG. 6A). As shown in FIG. 6A, reflection due to surface reflection appears in a narrow area, and reflection due to internal reflection occurs in a wide area. Further, as shown in FIGS. 6B and 6C, the generation position and the size of the reflected image change depending on the emission position of the illumination light of the light output portion with respect to the test lens Ls.

  In order to suppress a decrease in detection accuracy of anomaly due to such reflected light reflection, the optical component inspection apparatus A according to the present invention performs surface inspection in the following procedure. It is assumed that the insertion of the test lens Ls into the optical component inspection apparatus A and the alignment of the illumination unit 3 and the imaging unit 4 have already been completed.

  The control unit 7 determines a light output unit that irradiates the test lens Ls with illumination light (here, the first light output unit 31a), and transmits information on the determined light output unit to the emission position change unit 5 (step S101). ). The emission position changing unit 5 operates the first light emitting unit 31a to emit illumination light from the first light emitting unit 31a to the lens Ls to be tested (step S102). Note that, as described above, the emission position changing unit 5 selects a light output unit that supplies power, and electrically switches the light output unit that emits illumination light.

  The imaging unit 4 captures an image of a surface that is an inspection region of the lens Ls irradiated with illumination light from the first light output unit 31a (step S103). The imaging unit 4 is an object that performs imaging in accordance with instructions from the control unit 7. In addition, when the control part 7 sends the imaging | photography instruction | indication to the imaging part 4, it may be immediately after transmitting the information of a light emission part to the output position change part 5, and may be after a fixed time passes. Alternatively, information indicating that the light emitting unit has been operated may be acquired from the emission position changing unit 5, and after the information is acquired, an imaging instruction may be issued to the imaging unit 4.

  The imaging unit 4 is a digital camera and sends captured image data to the abnormality detection unit 6. When the image extraction unit 61 of the abnormality detection unit 6 acquires the captured image data, the extracted image (in FIG. 6A, the white portion in FIG. 6A) from which the reflection of the surface reflection light and the internal reflection light is deleted from the captured image (in FIG. A shaded portion is extracted (step S104). Note that the control unit 7 may pass information on the light emitting unit that was operating at the time of image capturing to the abnormality detection unit 6. By obtaining the information of the light emitting unit, the image extracting unit 61 can make a prediction as to where in the captured image the reflection has occurred, and quickly generate an extracted image from which the reflection has been deleted. Can do.

  The image data from which the reflection is deleted is sent to the detection unit 62, and the detection unit 62 detects defects such as scratches and abnormalities such as foreign matter (step S105). The image sent to the detection unit 62 is a dark field image, and if there is a defect or a foreign substance, an image floating in the dark field image is generated. The detection unit 62 detects the floating image as an abnormality, and when the abnormality detection unit 6 detects the abnormality, the control unit 7 transmits information indicating that there is an abnormality.

  The control unit 7 checks whether there is information from the abnormality detection unit 6 indicating that an abnormality has been detected (step S106). If no abnormality is detected (No in step S106), the control unit 7 checks whether or not the abnormality has been detected using all the light emitting units (step S109). If the abnormality detection is not performed using all the light emitting units (No in step S109), the control unit 7 selects the next light emitting unit (here, the second light emitting unit 31b) (step S110). Then, the information of the selected light emitting unit (here, the second light emitting unit 31b) is transmitted to the emission position changing unit 5 (return to step S102).

  When abnormality detection is performed using all the light emitting parts (Yes in step S109), the control unit 7 determines that there is no abnormality on the surface of the lens Ls to be tested (step S111).

  In addition, when the control unit 7 confirms that information indicating that an abnormality has been detected in step S106 (Yes in step S106), the control unit 7 detects abnormality such as the shape and size of the abnormality. It is acquired from the unit 6 and it is determined from the abnormality information whether the abnormality is acceptable as a product (step S107). In the case of the test lens Ls, there may be no optical problem even if a defect or a foreign substance is attached. For example, even if there are minute defects or foreign matters formed on the outer edge portion of the inspection target surface of the test lens Ls, the optical performance of the test lens Ls is not easily impaired. As described above, when it is determined that the abnormality does not affect the optical performance (the allowable range) (Yes in step S107), the control unit 7 determines whether or not all the light emitting units are used ( Step S109). The following operations are as described above.

  When the detected abnormality affects the optical performance (exceeds the allowable range) (in the case of step S107), the control unit 7 determines that there is an abnormality in the lens Ls during surface inspection (step S107). S108). When an abnormality is detected, the control unit 7 may notify that the abnormality has been detected by the lens Ls by a method such as sound, video, or light, or the lens to be automatically detected. Ls may be assigned with an abnormality and without an abnormality.

  By following the procedure as described above, the optical component inspection apparatus A can take an image while switching the light emitting portions that emit light from the three light emitting portions, and can inspect the abnormality from the images. . As shown in FIGS. 6A to 6C, the position of reflection of the surface reflection light and the reflection of the internal reflection leakage light is switched by switching the light output part. In this way, it is possible to inspect the abnormality on the entire surface of the lens Ls to be detected by switching the reflection position and detecting the abnormality from the extracted image from which the reflection part is deleted. Note that the number of light emitting portions and the position of the light emitting portions are determined so that the portions that reflect the reflected light from the surface and the reflected light from the internal reflection are not always generated when the inspection is performed by switching the light emitting portions. .

  In the optical component inspection apparatus A described above, the illumination unit 3 is arranged so that the center of the support stay 30 overlaps the optical axis C1 of the test lens Ls, that is, in plan view, the support stay 30 and the test lens. It is arranged so that Ls and the center coincide. However, the present invention is not limited to this, and the center may be shifted in a plan view. By shifting the center of the support stay 30 and the lens Ls to be examined in plan view, the reflection of the surface reflection light and the internal reflection leakage light when the light emission part is switched and the illumination light is irradiated does not overlap even if rotated. Can be. By utilizing this, the surface treatment apparatus A can accurately inspect abnormalities on the entire surface. At this time, the surface treatment apparatus A may be capable of moving either the support stay 30 or the inspection stage 2 in a direction along the surface while maintaining parallelism.

  Moreover, in the surface treatment apparatus A of this embodiment, although all the three light emission parts are set as the same structure, it is not limited to this. For example, it is good also as a structure which radiate | emits the light of a different wavelength (color), it is good also as a structure from which brightness | luminance differs, and it is good also as a structure from which an irradiation area | region differs. Moreover, you may make it utilize a different element (for example, LED element, a laser light emitting element, a discharge lamp) for a light source.

  In this way, a plurality of light emitting parts are irradiated with illumination light from different angles and directions to the inspection object (the lens Ls in this case), and foreign matter is removed from the image obtained by removing the reflection from the imaging part that images the inspection object. Therefore, the surface of the inspection object can be inspected without being affected by reflection.

(Second Embodiment)
Another example of the optical component inspection apparatus according to the present invention will be described with reference to the drawings. FIG. 7 is a side view showing an arrangement state of a surface inspection apparatus as another example of the optical component inspection apparatus according to the present invention, FIG. 8 is a plan view showing an arrangement state of an illumination unit, and FIG. FIG. 7 is a block diagram of the optical device inspection apparatus shown in FIG. The optical component inspection apparatus B shown in FIGS. 7 to 9 is the same as the optical component inspection apparatus A except that the illumination unit 3b and the illumination position changing unit 5b are different. For this reason, in the optical component inspection apparatus B, substantially the same parts as those in the optical component inspection apparatus A are denoted by the same reference numerals, and detailed description of the same parts is omitted.

  As shown in FIGS. 7 and 8, the illumination unit 3 b of the optical component inspection apparatus B includes a single light output unit 31 and a rotation drive unit 32 that rotatably supports the light output unit 31. The light exit part 31 has the same configuration as each of the three light exit parts of the surface inspection part A.

  The rotation drive unit 32 is a drive unit for rotating the light output unit 31 around the lens Ls in a plan view. The rotation drive unit 32 includes an annular support rail 320, a slide groove 321 formed on the lower surface of the support rail 320, and a rotation unit 322 slidably engaged with the slide groove 321. Yes. The support rail 320 is arranged so that the center of the test lens Ls overlaps with the lens Ls in plan view, and is parallel to the inspection stage 2. The sliding groove 321 is formed on the lower surface of the support rail 320 so as to make a circle around the ring, and is connected around the circle.

  The rotating portion 322 includes a convex portion that can be engaged with the sliding groove 321. By engaging the convex portion with the sliding groove 321, dropping from the support rail 320 is suppressed. The rotating unit 322 rotates around the lens Ls in plan view by sliding along the sliding groove 321. The rotating unit 322 holds the light output unit 31 so that the light output surface faces the lens Ls to be detected. Since the test lens Ls is arranged at the center portion of the support rail 320 in plan view, the light exit surface of the light exit unit 31 remains on the test lens Ls even if the rotation unit 322 rotates and the position is changed. Opposite. Note that the rotation unit 322 may include a rotation mechanism that rotates the light output unit 31 so as to rotate the optical axis of the illumination light in the vertical (vertical) direction and the horizontal (horizontal) direction. Thereby, even when the center of the circular locus of the rotation part 322 and the center of the test lens Ls do not overlap with each other in plan view, the illumination light can be accurately irradiated onto the surface of the test lens Ls.

  As shown in FIG. 9, the illumination unit 3 b of the optical component inspection apparatus B shown in the present embodiment includes a drive unit 323. The driving unit 323 is a driving mechanism that applies a rotational driving force to the rotating unit 322. Examples of the driving unit 323 include a unit that generates a magnetic force between the support rail 320 and the rotating unit 322 and is driven by the magnetic force, but is not limited thereto, and the rotating unit 322 is not limited thereto. It is possible to widely adopt a configuration that can adjust the amount of movement (for example, the central angle during movement).

  The drive unit 323 adjusts the amount of movement of the rotating unit 321 in accordance with an instruction from the emission position changing unit 5b. That is, the emission position changing unit 5b sends information on the amount of movement of the rotation unit 321 to the drive unit 323, and the drive unit 323 moves the rotation unit 321 based on the information.

  Further, as shown in FIG. 9, the image extraction unit 61 is connected to the storage unit 8, and the image extraction unit 61 deletes the reflection of the surface reflection light and the reflection of the internal reflection leakage light from the captured image. Is transmitted to the storage unit 8 and stored in the storage unit 8. Note that the image data stored in the storage unit 8 is used by the control unit 7 to determine the next position of the light output unit 31 and to determine whether or not the entire inspection area of the lens Ls to be inspected is abnormal. Is done.

  Next, the operation of the surface inspection apparatus according to the present embodiment will be described with reference to the drawings. FIG. 10 is a flowchart showing an abnormality detection operation of the optical component inspection apparatus according to the present invention. FIG. 10 shows an abnormality detection operation when the optical component inspection apparatus B shown in FIG. 7 is used. The flowchart shown in FIG. 10 is configured as steps S201, S203, and S204 instead of steps S101, S109, and S110 in the flowchart of FIG. 5, and a new step S202 is provided between steps S104 and S105. It has. In the description of the abnormality detection of the present embodiment, detailed description of the same part as the flowchart of FIG. 5 is omitted.

  The control unit 7 confirms the position of the lens Ls to be detected, determines the position of the light output unit 31 so that the illumination light is accurately irradiated, and moves the rotating unit 322 using the drive unit 323 to move the light output unit. 31 is moved to the determined position (step S201). In addition, when the determined position is set as the initial position of the light emitting unit 31 and the lens Ls to be inspected is replaced, the emission position changing unit 5b may move the light emitting unit 31 to the initial position. By doing in this way, it is also possible to omit the step of determining the position of the light emitting unit 31.

  Thereafter, the illumination light is emitted (step S102), photographed (step S103), and the reflection of the surface reflection light and the internal reflection leakage light is deleted (step S104). The image extraction unit 61 transmits the image data from which the reflection is deleted to the storage unit 8, and the storage unit 8 stores the image data (step S202). Further, abnormality is detected from the image data from which the reflection is deleted by the detection unit 62 (step S105), and it is determined whether or not there is an abnormality (step S106). When there is no abnormality (No in step S106), the control unit 7 determines the entire abnormality of the target surface (here, the surface of the lens Ls) from the image from which the reflection stored in the storage unit 8 is deleted. Is checked (step S203).

  When it is determined that the entire target surface has not been inspected (No in step S203), the control unit 7 determines the changed position of the light emitting unit 31, and transmits the changed position information to the emission position changing unit 5b. . Then, the emission position changing unit 5b drives the driving unit 323 to move the rotation unit 322 and change the position where the illumination light of the light output unit 31 is emitted (step S204). After changing the position where the illuminating unit 31 emits the illumination light, the illumination light is emitted again (step S102). In addition, although it is set as the structure which stops the illumination light radiate | emitted from the light emission part 31 here, you may move the rotation part 322 (light emission part 31) in the state irradiated with the illumination light. Thus, by rotating in the irradiation state, it is possible to adjust in real time so that the irradiation light is accurately irradiated onto the surface of the lens Ls.

  The control unit 7 determines the moving position of the light emitting unit 31 based on the image from which the reflection stored in the storage unit 8 is deleted so that the deleted portion becomes a dark field region. .

  An abnormality is detected (step S106), and if the abnormality is within the allowable range (Yes in step S107), it is determined whether the entire target surface has been inspected (step S203). When it is confirmed that the entire target surface has been inspected (Yes in step S203), the control unit 7 determines that there is no abnormality on the surface of the lens Ls to be tested (step S111).

  As described above, the optical component inspection apparatus B includes one light output portion 31 and rotates the light output portion 31 around the lens Ls to be inspected in plan view. Surface inspection can be performed in a state in which illumination light is irradiated to the lens Ls from different angles. Thereby, the number of light emission parts can be reduced. Further, the amount of movement of the rotating unit 322 (light emitting unit 31) may be determined based on the image data as described above, or a small amount of movement is set as one unit, and the unit of movement is determined. You may make it be a movement amount. Thus, by adjusting the amount of movement, the emission position of the illumination light can be moved to the optimum position. Further, for simplification of control, the amount of movement of the drive unit 323 is determined in advance, and the rotation unit 322 is moved by the determined amount of movement by instructing movement from the emission position changing unit 5b. You may make it do.

  Moreover, in this embodiment, although it is set as the structure which the rotation part 322 rotates along an annular | circular shaped rail, it is not limited to this. For example, the light emitting portion 31 may be fixed to an annular member, and the annular member itself may be rotated. In addition, the optical component inspection apparatus B of the present embodiment is configured to rotate one light-emitting unit 31, but two or more light-emitting units 31 may be rotated.

  In the present embodiment, after the light emitting unit 31 is moved, the subject lens Ls is photographed when the light exiting unit 31 is stopped and stopped. However, the present invention is not limited to this, and the light-emitting unit 31 is moved at a constant speed, and when the light-emitting unit 31 reaches a predetermined position (position determined by the control unit 7), an image is taken by the imaging unit 4. It may be. Further, it may be configured to move at a constant speed, capture a moving image, and detect an abnormality in real time based on the data of the moving image.

(Modification)
In the optical component inspection apparatus B of the present embodiment, the illumination unit 3b is driven to rotate the light output unit 31 around the lens Ls to be examined in plan view. Any configuration may be used as long as the irradiation direction of the illumination light emitted from the light exit unit 31 is changed with respect to the test lens Ls, and the test lens Ls may be rotated. Moreover, the structure which rotates both the illumination part 3b and the to-be-tested lens Ls may be sufficient.

(Third embodiment)
Still another example of the optical component inspection apparatus according to the present invention will be described with reference to the drawings. FIG. 11 is a flowchart showing an abnormality detection operation of the optical component inspection apparatus according to the present invention. In the present embodiment, abnormality detection is performed in different steps, and the configuration of the surface inspection apparatus is the same as that of the optical component inspection apparatus B. Therefore, in the description of the present embodiment, the description will be made by referring to FIGS. Further, the flowchart shown in FIG. 11 is configured such that steps S301 and S302 are arranged between step S202 and step S105 of the flowchart shown in FIG. 10, and step S203 is omitted. Therefore, the newly changed steps will be mainly described, and the other steps will be described as necessary.

  In the inspection apparatus B for optical components shown in the present embodiment, the position where the illumination light of the light emitting unit 31 is emitted is changed, and an image obtained by taking a photograph of the lens Ls to be tested is stored in the storage unit 8 and synthesized. An abnormality is detected based on the above.

  The test lens Ls is irradiated with illumination light to capture an image, and an image in which reflection of surface reflected light and internal reflection leakage light is deleted from the captured image is stored in the storage unit 8. The control unit 7 is configured to be able to perform image processing, and synthesizes an image from which the reflection stored in the storage unit 8 has been deleted (step S301). When the image is captured for the first time, the image is not combined and the reference image data for performing the image combination is generated.

  The control unit 7 determines whether or not the combined image includes the entire inspection area (step S302). When the synthesized image does not include the entire inspection area (No in step S302), the control unit 7 determines the change position of the light emitting unit 31, and sends the changed position information to the emission position changing unit 5b. Send. Then, the emission position changing unit 5b drives the driving unit 323 to move the rotation unit 322 and change the position where the illumination light of the light output unit 31 is emitted (step S204). The subsequent operation is as described above.

On the other hand, when the synthesized image includes the entire inspection region (Yes in step S302), the control unit 7 sends the synthesized image to the detection unit 62 of the abnormality detection unit 6, and the detection unit 62 detects an abnormality. Is detected (step S105). It is determined whether or not an abnormality has been detected (step S106). If an abnormality has been detected (Yes in step S106), the control unit 7 determines whether or not the abnormality is within an allowable range (step S107). When no abnormality is found (No in Step S106) or when the abnormality is within the allowable range (Yes in Step S107), the control unit 7 determines that there is no abnormality (Step S111). If the abnormality exceeds the allowable range (No in step S107), the control unit 7 determines that there is an abnormality (step S108).

  With such a configuration, it is possible to ensure that the surface where the abnormality is detected is the entire surface of the inspected region, and to suppress overlooking of the abnormality. In addition, the number of times of photographing can be reduced by adjusting the emission position of the illumination light (position of the light emission part 31) so as to reduce the overlapping part of the images, and the labor and time required for the inspection can be reduced accordingly. It is. Furthermore, since the abnormality is detected only once, it is possible to reduce the labor and time of the entire inspection process. In the present embodiment, the optical component inspection apparatus B configured to rotate one light output unit 31 is used. However, the device includes a plurality of light output units and switches the light output unit that emits illumination light. Even if the optical component inspection apparatus A is used, the same configuration can be obtained.

(Fourth embodiment)
Still another example of the optical component inspection apparatus according to the present invention will be described with reference to the drawings. FIG. 12 is a perspective view showing an arrangement state of a surface inspection device as another example of the optical component inspection device according to the present invention, and FIG. 13 is a schematic block diagram of the optical component inspection device shown in FIG. The optical component inspection apparatus C shown in FIGS. 12 and 13 is the same as the optical component inspection apparatus A except that the polarization adjustment unit 9 is provided. Therefore, in the description of the optical component inspection apparatus C, the same reference numerals are given to substantially the same parts as those of the optical component inspection apparatus A, and detailed description of the same parts is omitted.

  Depending on the shape, nature, and the like of the test lens Ls, there may be a portion (special portion) that is photographed as an image that is not abnormal but floats higher than other portions. If there is such a unique portion, the abnormality detection unit 6 may determine that the unique portion is abnormal, and accurate determination may be difficult.

  Therefore, the optical component inspection apparatus C shown in FIGS. 12 and 13 includes a polarization adjusting unit 9. The polarization adjusting unit 9 includes a polarizing element 91 disposed in front of the photographing unit of the imaging unit 4 and a polarizing element driving unit 92 that adjusts the polarization direction of the polarizing element 91. In addition, in the optical component inspection apparatus C of the present embodiment, the light emitted from the first light emitting unit 31a, the second light emitting unit 31b, and the third light emitting unit 31c is reflected light at a singular part with a predetermined polarization. Like light.

  The polarizing element 91 is an element that transmits light in a predetermined polarization direction (in other words, blocks light in a predetermined polarization direction). Examples of such an element include, but are not limited to, a polarizing plate and a combination of a polarizing plate and liquid crystal. The polarizing element driving unit 92 is for adjusting the polarization direction of light transmitted through the polarizing element 91. In the case where only the polarizing plate is used as the polarizing element 91, the polarizing element driving unit 92 may include a rotation mechanism that rotates the polarizing element 91 itself. In the case of a configuration using liquid crystal, a configuration in which a voltage applied to the liquid crystal is adjusted to adjust a polarization direction of transmitted light can be given. A device that can adjust the polarization direction of the light transmitted through the polarizing element 91 can be widely used.

  In the optical component inspection apparatus C, the light having the same polarization direction as that of the light reflected by the singular part by the polarizing element 91 is blocked and is prevented from entering the imaging unit 4. Thereby, it is possible to prevent reflection of a specific portion (that is, predetermined reflected light).

  From this, by adjusting (polarizing) the polarization direction of the light transmitted to the imaging unit 4 using the polarization adjusting unit 9, it is possible to suppress detection of the light reflected by the specific portion of the lens Ls to be detected as abnormal. Is possible

  Such an optical component inspection apparatus C has a great effect when performing a surface inspection of an optical component such as the molded lens Ls2 shown in FIG. The molded test lens Ls2 is formed by injecting resin into a mold and lowering it. As shown in FIG. 14, the molded lens Ls <b> 2 is formed with an injection portion for injecting a resin having a part of a planar shape instead of a perfect circle shape in plan view. And the scattered light reflected by this injection | pouring part differs in the polarization direction from the reflected light in the surface. In this way, by suppressing the transmission of the scattered light reflected by the injection unit by the polarization adjusting unit 9, the influence of the scattered light at the injection unit can be omitted from the captured image.

  Since the polarization direction of the illumination light emitted from the first light emission unit 31a, the second light emission unit 31b, and the third light emission unit 31c is determined in advance, the control unit 7 emits the illumination light to the illumination position changing unit 5. Information on the light exiting unit is transmitted, and similar information is also transmitted to the polarization element driving unit 92. The polarization element driving unit 92 adjusts the polarization direction that is transmitted through the polarization element 91 so as to block the light in the polarization direction determined for each light output unit.

  Thus, the accuracy of the surface inspection can be improved by suppressing the scattered light reflected by the singular portion (more specifically, the portion other than the region to be inspected) from entering the imaging unit 4.

(Other embodiments)
As described above, when the surface of the object to be inspected (test lens Ls) has a convex shape having a curvature, the image captured by the imaging unit 4 is an image of the surface reflected light of the illumination light and the internal reflection leakage light. Is included. By making this image small, it is possible to inspect the entire surface with a small number of imaging. As shown in FIG. 2, when the angle formed by the tangent line L1 of the portion of the surface of the lens Ls that intersects the optical axis C1 and the optical axis C2 of the light exiting portion 31 (31b) is an angle θ, the reflection is caused by the angle θ. The size of changes. Although depending on the curvature of the surface of the test lens Ls, the angle θ is preferably within a range of 15 ° on the test lens Ls side and the opposite side across the tangent line.

  In each of the above-described embodiments, the test lens Ls having the convex curvature surface as the surface is used as the test object. However, the present invention is not limited to this, and the lens is a lens having the concave curvature surface as the surface. May be. The curvature surface may be a spherical surface or an aspherical surface. Further, the optical component is not limited to a lens, and an optical component in which reflection of surface reflected light and / or internal reflected leakage light occurs when a surface is photographed with a dark field image is an object to be inspected. It is also possible. With the optical component inspection apparatus according to the present invention, it is possible to accurately and reliably detect defects such as scratches and distortions, and adhesion of foreign matters such as dust and dust, even in optical components that cause reflection. is there.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to this content. The embodiments of the present invention can be variously modified without departing from the spirit of the invention.

A, B, C Optical component inspection device 1 Case 10 Base 11 Support column 111 Illumination holding unit 112 Imaging unit holding unit 2 Inspection stage 3, 3b Illumination unit 31 Light output unit 31a First light output unit 31b Second light output unit 31c 3 Light exit unit 32 Rotation drive unit 320 Support rail 321 Slide groove 322 Rotation unit 4 Imaging unit 5 Output position change unit 6 Abnormality detection unit 61 Image extraction unit 62 Detection unit 7 Control unit 8 Storage unit 9 Polarization adjustment unit 91 Polarization element 92 Polarization element driver

Claims (11)

An imaging unit for imaging the inspection area of the inspection object;
An illumination unit that irradiates illumination light to the region to be inspected so that the imaging unit can capture a dark field image;
An emission position changing unit that changes an emission position of the illumination light with respect to the inspection area in a circumferential direction around an axis passing through the inspection area;
An anomaly detection unit that generates an extracted image obtained by deleting the reflected part of the surface reflected light and internal reflection leakage light of the illumination light from the captured image captured by the imaging unit, and detects an abnormality from the extracted image. An inspection device for optical components,
An optical component that captures an image of the inspection area while changing the emission position of the illumination light, generates the extracted image, and detects an abnormality based on the extracted image for each emission position of the illumination light. Inspection equipment.   The optical part inspection apparatus according to claim 1, wherein the illumination unit condenses the illumination light so that an illumination area of the illumination light coincides with the inspection area. The illumination unit is arranged by arranging a plurality of light output units that emit the illumination light in a circumferential direction centered on a central axis of the inspection object,
The optical component inspection apparatus according to claim 1, wherein the emission position changing unit emits light from a light output unit selected from a plurality of light output units of the illumination unit.   3. The optical component according to claim 1, wherein the emission position changing unit rotationally drives the illumination unit so that the light emission unit that emits the illumination light rotates about a central axis of the inspection object. Inspection device.   The optical part inspection apparatus according to claim 1, wherein the emission position changing unit rotates the inspection object around a central axis. When the inspection target surface of the region to be inspected is a convex surface or a concave surface,
The said illumination part irradiates the said illumination light from the same side as the said test target object with respect to the tangent plane in the point which cross | intersects the optical axis of the said test target surface. Optical component inspection equipment.   The abnormality detection unit detects an abnormality after synthesizing a plurality of images obtained by deleting the reflected portion of the surface reflected light and internal reflection leakage light of the illumination light from a plurality of captured images photographed by changing the emission position. The optical component inspection apparatus according to any one of claims 1 to 6.   2. The emission position changing unit changes the emission position so as to irradiate the illumination light so as not to overlap with a reflected portion of surface reflected light and internal reflection leakage light of the illumination light of a previous captured image. The inspection apparatus for optical components according to claim 7.   The optical component inspection apparatus according to claim 1, further comprising a polarization processing unit that is disposed in front of the imaging unit and switches a polarization state of light reflected by a surface of the inspection region. . A light exiting process for emitting the illumination light focused on the inspection object;
An emission position changing step of changing the emission position of the illumination light in a circumferential direction centered on the central axis of the inspection object;
An imaging process for imaging the inspection area of the inspection object;
An inspection of an optical component comprising: an anomaly detection step for generating an extracted image in which the reflected portions of the reflected surface light and the internal reflection leakage light of the illumination light are deleted from the captured image, and detecting an anomaly from the extracted image A method,
An optical component that captures an image of the inspection area while changing the emission position of the illumination light, generates the extracted image, and detects an abnormality based on the extracted image for each emission position of the illumination light. Inspection method. Each time the emission position changing step moves the emission position of the illumination light in the circumferential direction around the center axis of the inspection object,
The optical component inspection method according to claim 10, wherein the imaging step images the inspection area in a state where the emission position is stopped.

Images