JP2015101739A - Apparatus for manufacturing laminated structure of molten layers, method for manufacturing laminated structure of molten layers, and laminated structure of molten layers - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a laminated structure of molten layers, capable of producing molten layers of various shapes having a porous structure while suppressing warpage.SOLUTION: The method for manufacturing a laminated structure of molten layers comprises the steps of: forming a thin layer 35a of a first powder material; irradiating the thin layer 35a of the first powder material with an energy beam to form a first molten layer 35b; forming a thin layer 35a of a second powder material above the first molten layer 35b; and heating the thin layer 35a of the second powder material by an energy beam so that it is not fusion-bonded to the first molten layer 35b, thereby forming a second molten layer 35c on the first molten layer 35b.

Description

  The present invention relates to an apparatus for manufacturing a laminated structure of molten layers, a method for manufacturing a laminated structure of molten layers, and a laminated structure of molten layers.

  In recent years, the use of the porous metal thin layer as a metal electrode for a battery or a current collector has been studied. In particular, a porous metal thin layer made of titanium has been found to be effective for medical use and dental use, and various production techniques have been studied.

  Techniques for forming a porous metal thin layer include a technique for forming a large number of holes in a metal thin layer by punching or etching, and a technique for forming and sintering a metal powder thinly (Patent Document 1, Non-Patent Documents 1 and 2). ), A technique for sintering metal fibers by spark plasma sintering (SPS (Spark Plasma Sintering)) (Non-Patent Document 3), and the like have been studied.

  However, both of these techniques can produce only one porous metal thin layer at a time, and are inefficient. Moreover, it is difficult to produce porous metal thin layers having various shapes.

JP 2002-317207 A Z.S.Rak and J.Walter:"Porous titanium foil by tape casting technique ", J. Mate. Proc. Tech., 175 (2006) 358-363 Ogasawara Tadaji, Tada Kenichi, Higashi Kazuomi, Onishi Takashi: "Development of Ti Sheet Materials Using Binder" Separation and Powder Metallurgy, 49-9 (2002) 829-833 Y. Tamaki, W.S. Lee, Y. Kataoka and T. Miyazaki: "A modified Porous Titanium Sheet prepared by Plasma-Activated Sintering for Biomedical Applications", J. Tissue Engineering, (2010) 5-

  By the way, a powder layered modeling method using a powder layered modeling apparatus is known as a technique for manufacturing a three-dimensional modeled object by stacking solidified thin layers of various shapes.

  In the conventional powder additive manufacturing method, a base material is formed on a lifting platform, a thin layer of powder material is sequentially stacked on the base material, and is selectively melted and solidified by an energy beam to form a final object. A solidified thin layer corresponding to the slice shape is formed and laminated to produce a three-dimensional structure.

  In the conventional powder additive manufacturing method, the solidified thin layer is fixed to the substrate in order to prevent the solidified thin layer from warping. Further, the laminated solidified thin layers are fixed to each other in order to integrate them and to ensure the strength of the three-dimensional structure. Therefore, it is difficult to easily separate the solidified thin layers. Even if it can be separated, the solidified thin layer formed does not have a porous structure including a large number of voids inside.

  Thus, there has been no example of forming a porous structure thin film by a powder sintering method using an energy beam or by a powder layered manufacturing method.

  The present invention has been created in view of the above-described problems, and a manufacturing apparatus for a laminated structure of a welded layer that can produce a melt layer of various shapes having a porous structure while suppressing warpage, and A method for producing a laminated structure of a weld layer is provided.

  In order to solve the above problems, according to one aspect of the present invention, a heating energy beam emitting means for emitting an energy beam for heating a thin layer of the powder material and a thin layer of the first powder material are formed, A thin layer of the first powder material is melted by an energy beam to form a first melt layer, a thin layer of the second powder material is formed on the first melt layer, and melted with the first melt layer. An apparatus for manufacturing a laminated structure of a molten layer, comprising: a control unit that heats a thin layer of the second powder material with the energy beam so as not to wear and forms the second molten layer on the first molten layer Is provided.

  According to another aspect of the present invention, a step of forming a thin layer of the first powder material and a step of forming the first molten layer by irradiating the thin layer of the first powder material with an energy beam. Forming a thin layer of the second powder material on the first molten layer, and heating the thin layer of the second powder material by the energy beam so as not to be fused with the first molten layer. And a step of forming the second molten layer on the first molten layer. A method for producing a laminated structure of weld layers is provided.

  According to another aspect of the present invention, there is provided a laminated structure of molten layers, wherein a plurality of molten layers are laminated, and each of the molten layers has a porous structure and can be separated from each other. Is done.

  According to the present invention, a thin layer of the second powder material is formed on the first molten layer, and the thin layer of the second powder material is heated by an energy beam so as not to be fused with the first molten layer. A second molten layer is formed on the first molten layer.

  Since the energy beam can be scanned, the second molten layer having various shapes can be formed.

  In addition, when a thin layer of the second powder material is formed on the first molten layer and the second molten layer is formed by irradiating the thin layer of the second powder material with an energy beam, Since the thin layer of the second powder material is warmed by heat, the temperature difference between the second molten layer formed by heating and the peripheral region can be reduced. Thereby, even if it does not use a base material, the curvature of a 2nd molten layer can be suppressed.

  Moreover, since the second molten layer is formed by heating the thin layer of the second powder material with an energy beam so as not to be fused with the first molten layer, the second molten layer can be easily formed from the first molten layer. Can peel.

  Further, since the thin layer of the second powder material is not heated so that the powder material is sufficiently melted, it melts to such an extent that the shape of the powder particles can be understood, and there are a large number of the inside of the second melt layer formed thereby. Vacancies remain.

  As described above, according to the present invention, various shapes of molten layers having a porous structure can be produced while suppressing warpage.

It is a figure which shows the structure of the manufacturing apparatus of the laminated structure of the molten layer which concerns on embodiment of this invention. It is a figure which shows a laser beam emission part among the manufacturing apparatuses of the laminated structure of the molten layer which concerns on embodiment of this invention. (A) is a top view which shows the structure of a thin layer formation part among the manufacturing apparatuses of the laminated structure of the molten layer which concerns on embodiment of this invention, (b) is a cross section which follows the II line of (a). FIG. 3 is a view showing a laser beam emitting portion disposed above the thin layer forming portion. It is sectional drawing (the 1) which shows the 1st control method of the controller of the thin layer formation part which concerns on embodiment of this invention. It is sectional drawing (the 2) which shows the 1st control method of the controller of the thin layer formation part which concerns on embodiment of this invention. It is sectional drawing which shows the modification of the 1st control method which concerns on embodiment of this invention. It is sectional drawing which shows the 2nd control method of the controller of the thin layer formation part which concerns on embodiment of this invention. It is sectional drawing which shows the 3rd control method of the controller of the thin layer formation part which concerns on embodiment of this invention. It is sectional drawing which shows the modification of the 3rd control method which concerns on embodiment of this invention. It is the photograph which observed the molten layer produced with the manufacturing method of the laminated structure of the molten layer which concerns on 1st Example of this invention. It is the photograph which observed the molten layer produced with the manufacturing method of the laminated structure of the molten layer which concerns on 2nd Example of this invention. It is the photograph which observed the molten layer produced with the manufacturing method of the laminated structure of the molten layer which concerns on 3rd Example of this invention.

  Embodiments of the present invention will be described below with reference to the drawings.

(1) Configuration of Manufacturing Device for Molten Layer Laminated Structure FIG. 1 is a diagram showing a configuration of a manufacturing device for a laminated structure of molten layers according to an embodiment of the present invention. In the following explanation, the two terms “melting” and “sintering” are used. However, “melting” does not completely melt the target powder particles, but allows the shape of the powder particles to be confirmed. It is used in the same meaning as “sintering” in the sense of melting.

  As a heating energy beam source for emitting a heating energy beam for heating a thin layer of powder material, there are a laser light source for emitting laser light, an electron beam source for emitting electron beams and other particle beams, and other particle beam sources. Although applicable to the present invention, a description will be given below using a laser light source.

  The manufacturing apparatus includes a chamber (decompression vessel) 101 that can be depressurized by connecting an exhaust device 12 to an exhaust port 11, a laser beam emitting unit 102 installed in the chamber 101, and a thin layer that forms a thin layer of powder material. Surface temperature of the powder material or the like being heated in the thin layer forming unit 103 from the layer forming unit 103, the control unit 104 installed outside the chamber 101, and the infrared transmission window 13 provided on the container wall of the chamber 101 And an infrared temperature detector 14 for detecting.

  The laser beam emitting unit 102 may be installed outside the chamber 101. In this case, a laser beam transmission window is provided on the partition wall of the chamber 101.

  The control unit 104 of the manufacturing apparatus performs control to form a thin layer of the powder material, irradiate the thin layer of the powder material with laser light, sinter the powder material, and form a molten layer having a porous structure. . In this case, a melt layer having a desired shape can be formed by selectively irradiating a thin layer of powder material with laser light.

  Below, the detail of each part in this manufacturing apparatus is demonstrated.

(I) Configuration of Laser Light Emitting Unit 102 FIG. 2 is a diagram showing a configuration of the laser light emitting unit 102 in the manufacturing apparatus for the laminated structure of the molten layer according to the embodiment of the present invention.

  The laser beam emitting unit 102 includes a laser light source 23, optical systems 21 and 22, and an XYZ driver 24.

The laser light source 23 is mainly a YAG laser light source that emits a laser beam having a wavelength of about 1,000 nm, or a fiber laser light source, but considering not only the wavelength absorption rate of the powder material but also cost performance, The wavelength used can be changed as appropriate. For example, a high output CO ₂ laser light source that emits laser light having a wavelength of about 10,000 nm may be used.

  The optical system 21 includes galvanometer mirrors (X mirror and Y mirror) 21a and 21b, and the optical system 22 includes a lens. The X mirror 21a and the Y mirror 21b respectively scan the laser light in the X direction and the Y direction by changing the emission angle of the laser light. Further, the lens moves in the Z direction according to the movement of the laser light scanned in the X direction and the Y direction, and adjusts the focal length of the laser light to the surface of the thin layer of the powder material.

  The XYZ driver 24 sends out a control signal for operating the X mirror 21a, the Y mirror 21b, and the lens in response to a control signal from the control unit 104.

  When another energy beam source is used as the heating energy beam source instead of the laser beam, the optical system can be appropriately changed according to the energy beam source. For example, in the case of an electron beam source, an electromagnetic lens and a deflection system can be used.

(Ii) Configuration of Thin Layer Forming Unit 103 FIG. 3A is a top view showing the configuration of the thin layer forming unit 103. FIG. FIG. 3B is a cross-sectional view taken along the line II in FIG. 3A, and in addition to the thin layer forming portion 101, the laser beam emitting portion 102 disposed above the thin layer forming portion 101 is also shown. Yes. In FIGS. 3A and 3B, the chamber is omitted.

  In the thin layer forming section 103, as shown in FIGS. 3A and 3B, the thin layer forming container 31 in which the thin layer 35a of the powder material is heated by laser light irradiation and the both sides thereof are installed. First and second powder material storage containers 32a and 32b are provided. In order to prevent oxidation and nitridation of the powder material, the thin layer forming unit 103 is installed in a chamber 101 that can be decompressed.

  Furthermore, in order to heat and heat the powder material accommodated in each container 31, 32a, 32b and the thin layer in the container 31, it has a heater, a light source for heating, and other heating means. The heating means may be built in each container 31, 32a, 32b, or may be provided around each container 31, 32a, 32b.

  In the thin layer forming container 31, a thin layer 35a of the powder material is formed on the part table (second lifting table; lifting platform) 33a, and the thin layer 35a of the powder material is heated by laser light irradiation to heat the substrate. The layer 35b and the porous thin layer 35c are formed. The base table 33a and the porous thin layer 35c can be stacked by sequentially moving the part table 33a downward.

  In the first and second powder material storage containers 32a and 32b, the powder material 35 is stored on the first and second feed tables (first and third lifting tables) 34aa and 34ba. When one of the first and second powder material storage containers 32a and 32b is set as the supply side, the other is set as a side for storing the powder material remaining after the thin layer of the powder material is formed.

  Support shafts 33b, 34ab and 34bb are attached to the part table 33a and the first and second feed tables 34aa and 34ba, respectively. The support shafts 33b, 34ab, and 34bb are connected to a drive device (not shown) that moves the support shafts 33b, 34ab, and 34bb up and down.

  The driving device is controlled by a control signal from the control unit 104. The first or second feed table 34aa or 34ba on the powder material supply side is raised to supply the powder material 35, and the second or first feed table 34ba or 34aa on the storage side is lowered to form a thin layer. The remaining powder material 35 is stored.

  Further, a recoater 36 is provided which moves over the entire area of the upper surface of the thin layer forming container 31 and the first and second powder material storage containers 32a and 32b. The recoater 36 scrapes the powder material protruding from the upper surface of the powder material storage container 32a or 32b by raising the first or second feed table 34aa or 34ba on the powder material supply side to form a thin layer. It is transported to the container 31 and stored on the part table 33a while leveling the surface of the powder material to form a thin layer 35a of the powder material. The thickness of the thin layer 35a of the powder material is determined by the descending amount of the part table 33a. Then, the surplus powder material after forming the thin layer of the powder material is transported to the powder material storage container 32b or 32a on the storage side, and stored on the second or first feed table 34ba or 34aa.

  Such movement of the recoater 36 is controlled by a control signal from the control unit 104.

(Powder material)
Examples of the powder material 35 that can be used include metal powder materials and ceramic powder materials.

  Examples of the metal powder material include aluminum (Al) (melting point: 660 ° C.), an aluminum alloy, or a mixture of at least one of aluminum and an aluminum alloy and another metal.

Some aluminum alloys contain at least one of Si, Mg, Cu, Mn, and Zn, for example, in aluminum (Al). In addition, the mixture of at least one of aluminum or aluminum alloy and another metal includes at least one of aluminum (Al) or aluminum alloy, and a group consisting of Mg, Cu, Ni, Cu ₃ P, and CuSn. There is a mixture of at least one selected at an appropriate ratio. This is because Mg uses a reducing action, and Ni improves wettability.

  The average particle diameter of the powder material is not particularly limited mainly with respect to the lower limit, but may be any size as long as fluidity can be maintained. Otherwise, the cohesiveness of the powder becomes strong and it becomes difficult to form a thin layer of a thinner powder material. Moreover, mainly regarding the upper limit, the average particle diameter of the powder material affects the film thickness of the molten layer after melting, and therefore it is necessary to determine this point in consideration.

  In addition to aluminum or aluminum alloy, titanium (melting point 1668 ° C) or titanium alloy (for example, 64 titanium, melting point 1540-1650 ° C), nickel (melting point 1450 ° C), platinum (melting point 1768 ° C) ), Gold (melting point 1064.2 ° C), copper (melting point 1083 ° C), magnesium (melting point 649 ° C), tungsten (melting point 3400 ° C), molybdenum (melting point 2610 ° C), or alloys of these metals, stainless steel (SUS304, melting point 1400 ~ 1450 ° C.), metal powders such as cobalt chromium or inconel (melting point: 1370-1425 ° C.) can be used.

  Further, as the powder material 35, a material obtained by mixing the above-described metal powder material with a laser absorber such as a metal, a pigment, or a dye capable of absorbing a laser beam having a specific wavelength to be used may be used.

Ceramic powder materials include alumina (melting point 2054 ° C), silica (melting point 1550 ° C), zirconia (melting point 2700 ° C), magnesia (melting point 2800 ° C), boron nitride (BN; melting point 2700 to 3000 ° C), silicon nitride ( Si ₃ N ₄ ; melting point 1900 ° C.), silicon carbide (SiC; melting point 2600 ° C.) and the like can be used.

(Iii) Configuration and Function of Control Unit The control unit 104 includes a controller of the laser beam emitting unit 102 and a controller of the thin layer forming unit 103.

(Controller of laser beam emitting unit 102)
The controller of the laser beam emitting unit 102 sends a control signal to the XYZ driver and performs the following control.

  That is, based on the scanning line set for the formation region of the base heating layer (melted layer) 35b and the molten layer 35c having a porous structure, the angles of the X mirror 21a and the Y mirror 21b are changed to emit laser light. While scanning, the laser light source 23 is appropriately turned ON / OFF. During this time, the lens is constantly moved so that the laser beam is focused on the surface of the thin layer of the powder material in accordance with the movement of the laser beam. In this way, the laser light is selectively irradiated to a specific region and heated on the thin layer of the powder material. By controlling the power applied to the laser light source, the heated base heating layer 35b and a part of each powder are interconnected to form a molten layer 35c having a porous structure.

(Controller of thin layer forming unit 103)
The controller of the thin layer forming unit 103 controls the raising and lowering of the part table 33a, the first and second feed tables 34aa, 34ba, and the movement of the recoater 36, and also controls heating by a heater, a heating light source, and other heating means. To do.

  With reference to FIG. 3 to FIG. 5, three kinds of control methods for forming the molten layer 35c having a porous structure will be described.

(First control method)
The controller of the thin layer forming unit 103 first evacuates the chamber and keeps the pressure at 10 ⁻² Pa or less.

  Next, the recoater 36 shown in FIG. 3B is disposed on the upper surface edge of the first powder material storage container 32a. In addition, the controller removes moisture in the powder material during additive manufacturing, so that the temperature of the powder material is maintained at or above the saturated vapor pressure temperature or vaporization temperature of water, such as the heaters 31 and 32a, Control the heating means of 32b.

  The formation of the base heating layer 35b and the molten layer 35c may be controlled so as to continue in a reduced pressure atmosphere after removing oxygen, nitrogen and moisture, or the reduced pressure atmosphere is replaced with an inert gas such as argon. However, it may be controlled to be performed in an inert gas atmosphere.

  Next, in order to form a buffer layer, the first feed table 34aa on which the powder material 35 is placed is raised, and the powder material 35 is projected onto the first powder material storage container 32a. Further, the part table 33a is lowered by one thin layer. Further, the second feed table 34ba is lowered to such an extent that the powder material remaining after forming the thin layer 35a of the powder material 35 is sufficiently stored.

  Next, the recoater 36 is moved to the right to scrape off the powder material 35 protruding on the first powder material storage container 32a and transport it to the thin layer forming container 31. And it accommodates in the thin layer formation container 31, leveling the surface, and forms the thin layer 35a of the powder material of the 1st layer on the part table 33a (FIG. 4 (a)). The remaining powder material 35 is transported to the second powder material storage container 32b by moving the recoater 36 further to the right and stored on the second feed table 34ba.

  Next, in order to form a buffer layer, the second feed table 34ba on which the powder material 35 is placed is raised, and the part table 33a is lowered by one thin layer. Further, the first feed table 34aa is lowered to such an extent that the powder material 35 remaining after the formation of the thin layer is sufficiently stored.

  Next, the recoater 36 is moved to the left to scrape off the powder material 35 protruding on the second powder material storage container 32 b and transport it to the thin layer forming container 31. Then, it is stored in the thin layer forming container 31 while leveling the surface, and the thin layer 35a of the second layer of powder material is formed on the thin layer 35a of the first layer of powder material of the part table 33a (see FIG. 4 (a)). The remaining powder material 35 is transported to the first powder material storage container 32a by moving the recoater 36 further to the left side, and stored on the first feed table 34aa. The thin layer 35a of the fifth powder material is formed in the same manner.

  Next, in order to form a base heating layer (first molten layer), a third layer 35a of powder material is formed on the second layer 35a in the same manner as the first layer. (FIG. 4B). In this case, the descending amount of the part table 33a corresponds to one layer of the thin layer 35a of the powder material. The thickness of the laser beam energy depends on the role of the underlying heating layer that preheats the thin layer 35a of the powder material 35 to be a molten layer formed on the underlying heating layer. It is sufficient that the thickness is not less than a thickness sufficient for heating to a desired temperature.

  Thereafter, as shown in FIG. 4B, the mirrors 21a and 21b and the lenses of the optical systems 21 and 22 are controlled by the controller of the laser beam emitting unit 102 based on the slice data (drawing pattern) of the underlying heating layer to be manufactured. The third layer powder material thin layer 35a is heated by selectively irradiating the laser beam while controlling the movement of the substrate, thereby forming a heated base heating layer 35b.

  At this time, the laser output is set to about 10-50% of the maximum laser output when forming the molten layer 35c. In addition, since the base heating layer 35b has a role of storing heat and preheating the thin layer 35a of the fourth layer of powder material that becomes the molten layer 35c formed above, the temperature of the base heating layer 35b (T ( K)) is lower than the melting temperature (Tm (K)) of the powder material, but is kept within a certain temperature range, for example, T = 0.35 × Tm to 0.80 × Tm.

  Next, in order to form a molten layer (second molten layer) 35c having a porous structure, a thin layer of the fourth layer of powder material is formed on the third underlying heating layer 35b in the same manner as the second layer. A layer 35a is formed (FIG. 5A). In this case, the descending amount of the part table 33a corresponds to the thickness of the thin layer 35a of the powder material 35 to be formed. Depending on the laser output and the scanning speed of the laser light, for example, the average particle size of the powder particles About 2 to 10 times the diameter. That is, among the thin layer 35a of the powder material 35, at least the thickness of one or two of the average particle diameters of the powder particles on the surface is sintered, and the unsintered powder particle layer or the mutual bond is formed. Thick enough to leave a layer of weak powder particles.

  After that, as shown in FIG. 5A, based on the slice data (drawing pattern) of the molten layer 35c to be produced, the controller of the laser beam emitting unit 102 uses the mirrors 21a, 21b and lenses of the optical systems 21, 22 The laser beam is selectively irradiated while controlling the movement of the fourth layer, and the thin layer 35a of the fourth layer of powder material is heated to form the molten layer 35c.

  At this time, regarding the laser output and the scanning speed of the laser beam, the powder material melts at a thickness of one or two powder particles from the surface of the thin layer 35a of the fourth layer powder material. The conditions are such that the particle shape can be confirmed and a part of each powder is interconnected to form a mass of powder material.

The energy E (J / m ² ) per unit area required for producing the molten layer 35c by the laser beam is expressed by the following equation.

E = k ・ (Tm-T) ・ t ・ C ・ ρ ・ τ / α
Here, k: proportional constant (a value of about 0.2 to 5.0), Tm: melting point of powder material (K), T: preheating temperature (K), t: melt thickness (m) ((1.0-2) × do), do: average particle size of powder particles (m), C: packing ratio of powder material (approximately 0.5), ρ: density of metal (kg / m ³ ), τ: specific heat of metal (J / kg · K), α: Absorption rate of the laser.

  By such heating, for example, vacancies remain as 5 to 10% of the entire volume of the molten layer 35c as through holes.

  In the molten layer 35c, the peripheral region is preheated by the heated base heating layer 35b, and the temperature difference between the molten layer 35c and the peripheral region is reduced. Thereby, the curvature of the molten layer 35c can be suppressed. Alternatively, although the lower part is weakly bonded to the underlying heating layer 35b, it is difficult to warp, and the warping of the molten layer 35c can be further suppressed.

  Further, at the boundary between the lower surface of the molten layer 35c and the upper surface of the base heating layer 35b, a layer in which the powder particles are weakly bonded or not is left unsintered as shown in FIG. Since the thin layer 35a0 of the fourth layer of powder material remains, the bond between the molten layer 35c and the underlying base heating layer 35b is weak. As a result, the molten layer 35c can be easily peeled off from the underlying heating layer 35b later.

  After that, as shown in FIG. 5B, the molten layer 35c is taken out from the thin layer forming container 31 together with the base heating layer 35b. Then, after the powder around the base heating layer 35b and the molten layer 35c is removed, as shown in FIG. 5 (c), the molten layer 35c is peeled from the base heating layer 35b to produce a single molten layer 35c. Is done.

  As described above, according to the manufacturing apparatus of the laminated structure of the molten layer provided with the controller that performs the first control method according to the present embodiment, the warp of the molten layer 35c can be suppressed without using a base material. The molten layer 35c can be easily peeled off from the adjacent base heating layer 35b to produce a molten layer 35c having a porous structure.

  Further, since the heating energy beam can be selectively applied to the thin layer of the powder material, porous thin layers having various shapes can be produced.

  Also, unlike the techniques of Non-Patent Documents 1 and 2, a thin layer of powder material can be heated and sintered in a vacuum or in an inert gas atmosphere with a dense and uniform distribution of powder particles. The surface oxidation of the powder particles can be suppressed, the porous thin layer can be prevented from becoming brittle, and the uniformity of the strength of the porous thin layer can be ensured.

  Further, since it is not necessary to use a carbon die as in Non-Patent Document 3, carbonization of the porous thin layer can be prevented and high quality can be ensured.

  Further, unlike the manufacturing method by punching, it is not necessary to use a mold, so that productivity can be improved and production cost can be reduced.

(Second control method)
In the first control method, the molten layer 35c having a porous structure is formed in contact with the base heating layer 35b immediately above the single base heating layer (first molten layer) 35b. In the second control method, the first control is performed. Unlike the method, as shown in FIG. 7A, a plurality of base heating layers (molten layers) 35b are formed from the lower layer so that adjacent layers are in contact with each other while increasing the laser output sequentially. The laser output is gradually increased according to the total number of layers of the plurality of base heating layers 35b, starting from about 10-50% of the maximum laser output when forming the base heating layer 35b to the maximum laser output.

  Then, after forming the plurality of base heating layers 35b, as shown in FIG. 7B, a molten layer 35c having a porous structure is formed on the top base heating layer 35b in the same manner as in the first control method. Form.

  By the way, when forming the molten layer 35c on the base heating layer 35b, if the base heating layer 35b is a single layer, the temperature difference between the base heating layer 35b and the surroundings becomes large, so the base heating layer 35b itself warps, and therefore The molten layer 35c formed on the base heating layer 35b also takes over the shape and warps.

  As in the second control method, a plurality of base heating layers 35b are sequentially formed from the lower layer while increasing the laser output, so that the temperature difference between the base heating layer 35b and the surroundings can be kept small, and the base heating layer 35b. Can be formed. For this reason, warpage of each base heating layer 35b itself can be suppressed, so that the molten layer 35c formed on the uppermost base heating layer 35b can also suppress warpage.

(Third control method)
In the first and second control methods, one molten layer 35c is formed on one or more underlying heating layers (first molten layer or molten layer) 35b. In the third control method, Unlike the first and second control methods, as shown in FIG. 8A, a plurality of layers of molten layers 35c are formed on one or a plurality of underlying heating layers (melted layers) 35b. Each molten layer 35c is formed in the same manner as in the first control method. The upper molten layer 35c is formed so as to be included in the formation region of the lower molten layer 35c. In order to allow preheating to be uniformly distributed from the lower molten layer 35c to the upper molten layer 35c. It is. In FIG. 8A, the number of layers is three, but is not limited to this.

  Each of the plurality of laminated molten layers 35c is adjacent to the adjacent molten layer 35c because the bonding between the lower molten layer 35c or the underlying heating layer 35b is weaker than the bonding between the powder particles inside the molten layer 35c. Alternatively, the molten layer 35c and the base heating layer 35b can be easily separated.

  Thus, according to the manufacturing apparatus of the laminated structure of the molten layer provided with the controller that performs the third control method according to the present embodiment, the laminated structure of the molten layer provided with the controller that performs the first or second control method. In addition to the same effects as those of the manufacturing apparatus, a plurality of molten layers 35c can be efficiently formed at a time.

  When forming a plurality of melt layers 35c, as shown in FIG. 9, melt layers 35c0 and 35c1 having different thicknesses can be stacked. In this case, the laser output may be appropriately changed according to the thickness.

(2) Description of Manufacturing Method for Laminated Structure of Molten Layer Next, a manufacturing method for the laminated structure of the molten layer using the apparatus for manufacturing the laminated structure of the molten layer will be described.

  First, before forming a thin layer of powder material, oxygen, nitrogen and moisture are removed from the powder material in a reduced pressure atmosphere.

  Next, the porous thin layer manufacturing method is performed according to the first to third control methods based on the controller of the thin layer forming unit 103 described above. The manufacturing method of the laminated structure of the molten layer by the first control method is shown in FIGS. 4A, 4B, 5A to 5C, and FIG. 6, and the molten layer is laminated by the second control method. The manufacturing method of the structure is shown in FIGS. 7A and 7B, and the manufacturing method of the laminated structure of the molten layer by the third control method is shown in FIGS. 8A to 8C.

  The detailed description of the manufacturing method of the laminated structure of the molten layer, which overlaps with the description of the first to third control methods, is omitted. The steps after the step of forming the thin layer of the powder material may be continued in a reduced pressure atmosphere after removing oxygen, nitrogen and moisture, or the reduced pressure atmosphere is replaced with an inert gas such as argon. You may carry out in an active gas atmosphere.

  The laminated structure of the molten layers 35b and 35c completed by the manufacturing method of the laminated structure of the molten layer is buried in the powder material in the thin layer forming container 31, and is taken out after the powder material is removed. The laminated structure of the extracted molten layers 35b and 35c is shown in FIG. 5B for the method of manufacturing the laminated structure of the molten layer by the first control method. As shown in FIG. 6, when an unsintered powder material is sandwiched between the molten layers 35b and 35c, the molten layers 35b and 35c can be separated and taken out from the thin layer forming container 31, respectively. The manufacturing method of the laminated structure of the molten layer by the second control method is the same as that shown in FIG. 5B except that a plurality of molten layers 35b are formed. FIG. 8B shows a manufacturing method of the laminated structure of the molten layer by the third control method.

  Further, the molten layer 35c is peeled off from the molten layer 35b, or the molten layers 35c and 35c are peeled off to obtain a molten layer 35c having a porous structure. At this time, the bonded layers 35b and 35c, or 35c and 35c are bonded to each other weaker than the bonding of the powder particles inside the layers 35b and 35c, so that each molten layer 35c is easily separated without being damaged. be able to. The manufacturing method of the laminated structure of the molten layer by the first control method is shown in FIG. The manufacturing method of the laminated structure of the molten layer by the second control method is based on FIG. FIG. 8C shows a manufacturing method of the laminated structure of the molten layer by the third control method.

  As described above, according to the manufacturing method of the laminated structure of the molten layer of the present embodiment, the molten layer is manufactured according to the first to third control methods described above. The effect corresponding to the manufacturing apparatus of the laminated structure of the molten layer provided with the controller which performs a method can be acquired.

(3) Examples (i) First Example In the first example, as a powder material, a powder material of titanium alloy (Ti-6Al4V) having a particle size of 150 μm or less and an average particle size of about 80 μm (trade name Tailp-150, Osaka Titanium) was used.

The stacking pitch (thickness of the thin layer of powder material) was 0.2 mm, the laser output was 200 W, and the scanning speed was 2 m / sec. The scanning pitch was 0.08 mm, and laser irradiation was performed four times in the x direction, the y direction, the x direction, and the y direction on the same region of the thin layer of the powder material. The amount of heat applied per time is 1.25 MJ / m ² . The preheating zone is from the thin layer of the powder material of the first layer to the laminated thickness of 4 mm (thin layer of the powder material of the twentieth layer), and the laser output is 80 W (40%) for each thin layer. And 200 W (100%) in about 6 W increments and irradiated with laser light.

  After lamination, the powder adhered by sintering was removed with a blaster and each thin layer was peeled off to obtain a sufficiently flexible porous titanium foil having a thickness of about 120 μm.

  FIGS. 10A and 10B are photographs in which the irradiated surface (upper surface) and the rear surface (lower surface) of the manufactured molten layer are observed. The arrangement of the laser light irradiation surface (upper surface) and the rear surface (lower surface) is shown in FIG.

  According to observation, in the molten layer, it is more difficult to specify the shape of the powder particles on the laser light irradiation surface than on the back surface. That is, the laser beam irradiation surface has a higher degree of sintering and a wider melting area than the back surface. This can be determined that the bonding between adjacent layers on the lower surface of the molten layer is weaker than the bonding between the powder particles inside the molten layer. For this reason, peeling of adjacent molten layers can be performed easily. In this embodiment, it is not necessary to distinguish between the porous layer and the underlying heating layer, but the preheating region melting layer may correspond to the underlying heating layer. The same applies to the following embodiments.

(Ii) Second Example In this example, as a powder material, a titanium alloy (Ti-6Al4V) powder material (trade name Tailop-150, manufactured by Osaka Titanium) was obtained by screening through a sieve having a mesh width of 70 μm. A powder material having a particle size of 50 μm to 70 μm and an average particle size of about 60 μm was used.

The stacking pitch (thickness of the thin layer of powder material) was 0.2 mm, the laser output was 200 W, and the scanning speed was 2 m / sec. The scanning pitch was 0.08 mm, and laser irradiation was performed four times in the x direction, the y direction, the x direction, and the y direction on the same region of the thin layer of the powder material. The amount of heat applied per time is 1.25 MJ / m ² . The preheating zone is from the thin layer of the powder material of the first layer to the laminated thickness of 4 mm (thin layer of the powder material of the twentieth layer), and the laser output is 80 W (40%) for each thin layer. And 200 W (100%) in about 6 W increments and irradiated with laser light.

  After lamination, the powder adhered by sintering was removed with a blaster, and each thin layer was peeled off to obtain a sufficiently flexible porous titanium foil having a thickness of about 100 μm.

  FIGS. 11A and 11B are photographs in which the irradiated surface (upper surface) and the back surface (lower surface) of the manufactured molten layer are observed. The arrangement of the laser light irradiation surface (upper surface) and the rear surface (lower surface) is shown in FIG.

  According to observation, in the second embodiment, as in the case of the first embodiment, the bonding with the adjacent layer on the lower surface of the molten layer is weaker than the bonding between the powder particles inside the molten layer. Therefore, it is possible to easily separate the adjacent molten layers.

(Iii) Third Example In this example, a powder material of titanium alloy (Ti-6Al4V) having a particle size of 45 μm or less and an average particle size of 35 μm (trade name Tairop-45, manufactured by Osaka Titanium) was used as the powder material. .

The stacking pitch (thickness of the thin layer of powder material) was 0.2 mm, the laser output was 200 W, and the scanning speed was 2 m / sec. The scanning pitch was 0.1 mm, and laser irradiation was performed four times in the x direction, y direction, x direction, and y direction on the same region of the thin layer of the powder material. The amount of heat applied per time is 1 MJ / m ² . The preheating zone is from the thin layer of the powder material of the first layer to the laminated thickness of 4 mm (thin layer of the powder material of the twentieth layer), and the laser output is 80 W (40%) for each thin layer. And 200 W (100%) in about 6 W increments and irradiated with laser light.

  After lamination, the powder adhered by sintering was removed with a blaster, and each thin layer was peeled off to obtain a sufficiently flexible porous titanium foil having a thickness of about 30-40 μm.

  FIGS. 12A and 12B are photographs obtained by observing the laser light irradiation surface (upper surface) and the back surface (lower surface) of the manufactured molten layer. The arrangement of the laser light irradiation surface (upper surface) and the rear surface (lower surface) is shown in FIG.

  According to observation, also in the third example, as in the case of the first example, the bonding with the adjacent layer on the lower surface of the molten layer is weaker than the bonding between the powder particles inside the molten layer. Therefore, it is possible to easily separate the adjacent molten layers.

  Although the present invention has been described in detail with the embodiments, the scope of the present invention is not limited to the examples specifically shown in the above embodiments, and the above embodiments within the scope of the present invention are not deviated. Variations in form are within the scope of this invention.

  For example, in the first to third embodiments, the stacking pitch (thickness of the thin layer of powder material) is 0.2 mm, the laser output is 200 W, the scanning speed is 2 m / sec, and the scanning pitch is 0.1 mm. Although the laser irradiation is performed four times in the x direction, the y direction, the x direction, and the y direction with respect to the same region of the thin layer of the powder material, the present invention is not limited thereto. Various changes can be made.

  In the first to third embodiments, as the powder material, a titanium alloy having a particle size of 45 μm or less and an average particle size of about 35 μm, a titanium alloy having a particle size of 70 μm or less and an average particle size of about 60 μm, a particle size of 150 μm or less and the average particle size Although a titanium alloy having a thickness of about 80 μm is used, the material and the particle size can be appropriately changed depending on the application.

  Moreover, although the manufacturing apparatus of the laminated structure of the molten layer shall be provided with the lifting platform, the manufacturing apparatus which is not provided with the lifting platform is also included in the scope of the present invention. In a manufacturing apparatus that does not include a lifting platform, in order to form a thin layer of powder material on the laminated structure of the molten layer that gradually increases, a powder material supply means and a means for moving the powder material are provided, and the laminated thickness of the molten layer Accordingly, it is necessary to provide means for moving the optical system itself upward or adjusting the focal point of the optical system.

  Below, based on embodiment mentioned above, this invention was put together as an additional remark.

(Appendix 1)
An energy beam emitting means for heating for emitting an energy beam for heating the thin layer of the powder material;
Forming a thin layer of the first powder material, melting the thin layer of the first powder material by the energy beam to form a first molten layer, and forming a second powder material on the first molten layer; Control to form a thin layer and to form the second molten layer on the first molten layer by heating the thin layer of the second powder material by the energy beam so as not to be fused with the first molten layer An apparatus for producing a laminated structure of molten layers comprising:

(Appendix 2)
The apparatus for manufacturing a laminated structure of molten layers according to appendix 1, wherein the second molten layer has a porous structure.

(Appendix 3)
The apparatus for manufacturing a laminated structure of a molten layer according to appendix 1, wherein the first molten layer and the second molten layer are detachable.

(Appendix 4)
The first melt layer is lower than the melting point (Tm (K)) of the powder material and is heated to a temperature range of 0.35 × Tm to 0.80 × Tm. manufacturing device.

(Appendix 5)
4. The laminated layer according to any one of appendices 1 to 3, wherein the second molten layer heats at least the surface of the powder material to a melting point (Tm (K)) or more of the powder material. Structure manufacturing equipment.

(Appendix 6)
The apparatus for manufacturing a laminated structure of a melted layer according to appendix 1, further comprising a lifting platform on which a thin layer of the powder material is formed.

(Appendix 7)
The apparatus for manufacturing a laminated structure of a molten layer according to appendix 6, wherein the apparatus includes a decompression container that houses the lifting platform.

(Appendix 8)
The apparatus for manufacturing a laminated structure of a molten layer according to appendix 1, wherein the powder material is a metal powder or a ceramic powder.

(Appendix 9)
Forming a thin layer of a first powder material;
Forming a first molten layer by irradiating an energy beam to a thin layer of the first powder material;
Forming a thin layer of a second powder material on the first molten layer;
Heating the thin layer of the second powder material with the energy beam so as not to be fused with the first molten layer, and forming the second molten layer on the first molten layer. A method for producing a laminated structure of a molten layer.

(Appendix 10)
The method for producing a laminated structure of a molten layer according to appendix 9, wherein the second molten layer has a porous structure.

(Appendix 11)
The method for producing a laminated structure of a molten layer according to appendix 9, wherein the first molten layer and the second molten layer are detachable.

(Appendix 12)
The laminated structure of the molten layer according to appendix 9, wherein the first molten layer is heated to a temperature range of 0.35 × Tm to 0.80 × Tm, which is lower than the melting point (Tm (K)) of the powder material. Production method.

(Appendix 13)
The method for manufacturing a laminated structure of a molten layer according to appendix 9, wherein the second molten layer heats at least the surface of the powder material to a melting point (Tm (K)) or more of the powder material.

(Appendix 14)
The method for manufacturing a laminated structure of a molten layer according to appendix 9, wherein a thin layer of the powder material is formed on a lifting platform.

(Appendix 15)
The method for producing a laminated structure of a molten layer according to appendix 9, wherein the thin layer of the powder material is formed in a reduced pressure environment or in an inert gas atmosphere.

(Appendix 16)
The method for producing a laminated structure of a molten layer according to appendix 9, wherein the powder material is a metal powder or a ceramic powder.

(Appendix 17)
A laminated structure of molten layers, wherein a plurality of molten layers are laminated, and each of the molten layers has a porous structure and can be separated from each other.

  11 ... Exhaust port, 12 ... Exhaust device, 21, 22 ... Optical system, 21a ... Galvanometer mirror (X mirror), 21b ... Galvanometer mirror (Y mirror), 23 ... Laser light source (energy beam source for heating), 24 ... XYZ Driver, 31 ... Thin layer forming container, 32 ... Powder material storage container, 32a ... First powder material storage container, 32b ... Second powder material storage container, 33a ... Part table (second lift table; lift platform), 33b, 34b, 34ab, 34bb ... support shaft, 34a ... feed table, 34aa ... first feed table (first lifting table), 34ba ... second feed table (third lifting table), 35 ... powder material, 35a ... powder material Thin layer, 35a0 ... thin layer of unsintered powder material, 35b ... underlying heating layer (first molten layer or molten layer), 35c, 35c0, 35c1 ... molten layer having a porous structure (second molten layer or molten layer) Layer), 36 ... recoater, 101 ... chamber, 102, 102a, 102b ... laser light Morphism unit, 103 ... thin layer forming unit, 104 ... controller (control unit).

Claims (8)

An energy beam emitting means for heating for emitting an energy beam for heating the thin layer of the powder material;
Forming a thin layer of the first powder material, melting the thin layer of the first powder material by the energy beam to form a first molten layer, and forming a second powder material on the first molten layer; Control to form a thin layer and to form the second molten layer on the first molten layer by heating the thin layer of the second powder material by the energy beam so as not to be fused with the first molten layer An apparatus for producing a laminated structure of molten layers comprising:   The said 2nd molten layer has a porous structure, The manufacturing apparatus of the laminated structure of the molten layer of Claim 1 characterized by the above-mentioned.   The apparatus for producing a laminated structure of a molten layer according to claim 1, wherein the first molten layer and the second molten layer are detachable. Forming a thin layer of a first powder material;
Irradiating the thin layer of the first powder material with an energy beam to form a first molten layer;
Forming a thin layer of a second powder material on the first molten layer;
Heating the thin layer of the second powder material with the energy beam so as not to be fused with the first molten layer, and forming the second molten layer on the first molten layer. A method for producing a laminated structure of a molten layer.   The method for manufacturing a laminated structure of a molten layer according to claim 4, wherein the second molten layer has a porous structure.   The method for producing a laminated structure of molten layers according to claim 4, wherein the first molten layer and the second molten layer are detachable.   The method for producing a laminated structure of a molten layer according to claim 4, wherein the powder material is a metal powder or a ceramic powder.   A laminated structure of molten layers, wherein a plurality of molten layers are laminated, and each of the molten layers has a porous structure and can be separated from each other.

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