JP2015198221A - Peeling device of plate-like body and method thereof, and method of manufacturing plate-like body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a peeling device of a plate-like body capable of effectively peeling the plate-like body from a plate-like body holding member and a method thereof, and a method of manufacturing the plate-like body.SOLUTION: In a first peeling process, a fluid 16 is injected from a nozzle 14 and an edge portion G3 of a glass plate G is peeled from a holding surface 12 of an adsorption sheet 10. An injection direction of the fluid 16 is a direction pointed to a holding surface 12A at a position separated from a boundary portion 22 between the holding surface 12 and the edge portion G3, and is set to a direction intersecting the holding surface 12. In a second peeling process, the injection of the fluid 16 is stopped first. Then fluid 20 is injected from a nozzle 18 and the entire glass plate G is peeled from the holding surface 12. An injection direction of the fluid 20 is a direction pointed to a boundary face 24 between the holding surface 12 and the glass plate G, and is set to a direction parallel to the holding surface 12.

Description

  The present invention relates to a plate-like body peeling apparatus and method, and a plate-like body manufacturing method.

  In Patent Document 1, a glass plate (plate-like body) whose rear surface is sucked and held on the holding surface of the suction sheet (plate-like body holding member) is peeled from the suction sheet using a plurality of suction pads and high-pressure water. A peeling device is disclosed. This peeling device peels the glass plate polished by the polishing device from the suction sheet and conveys it to the cleaning device by the transfer device.

  The glass plate in the polishing apparatus is polished by a polishing tool in a state where the glass plate is adsorbed and held on the adsorption sheet via a liquid used for improving the adsorbability between the glass plate and the adsorption sheet. The polished glass plate is carried out of the polishing apparatus while being adsorbed and held on the adsorbing sheet, and is peeled off from the adsorbing sheet by the peeling apparatus.

  The peeling apparatus of patent document 1 adsorbs and holds the surface of a glass plate with a plurality of suction pads, and then jets high-pressure water toward the interface between the glass plate and the suction sheet, and the edge of the glass plate is removed from the suction sheet. Separate. Then, the high pressure water is further supplied to the interface between the edge of the separated glass plate and the suction sheet, and the suction pad is peeled in the peeling direction (direction away from the suction sheet) while gradually releasing the suction of the glass plate to the suction sheet. Move gradually. Thereby, the glass plate is peeled from the adsorption sheet.

  Similarly, Patent Document 2 discloses a peeling apparatus that peels a glass plate after polishing from a film body (plate-shaped body holding member) using a fluid (water and air, water alone, or air alone). ing. According to Patent Document 2, fluid is ejected to the boundary between the edge of the glass plate and the film body, and the glass plate is peeled from the film body by the impact force.

  The high-pressure water disclosed in Patent Document 1 and the fluid disclosed in Patent Document 2 are ejected from a plurality of nozzles arranged along the edge of the glass plate. These nozzles are provided independently, and the ejection direction is adjusted for each nozzle. For this reason, the nozzle is supported by a jig having a plurality of joint portions, and the injection direction is finely adjusted using the plurality of joint portions of the jig. Further, depending on the jetting direction of the nozzle, that is, depending on the collision position of the high pressure water or fluid on the plate body holding member and the glass plate, the peeling speed of the glass plate, the damage of the glass plate, and the damage of the plate body holding portion. Greatly affects. For this reason, the fine adjustment of the nozzle injection direction performed by the jig is very delicate and requires skilled work.

JP 2007-185725 A JP 2004-122351 A

  By the way, the peeling apparatus disclosed in Patent Documents 1 and 2 has a problem that the nozzle injection direction deviates from the normal position because the joint portion of the jig gradually moves by continuous use. For this reason, there is a problem that the adjustment of the injection direction of the nozzles must be periodically performed, that is, the peeling device must be periodically stopped, and thus the glass plate cannot be peeled efficiently. .

  Further, in the peeling devices disclosed in Patent Documents 1 and 2, since the fluid ejected from the nozzle may directly collide with the edge of the glass plate, the edge of the glass plate is damaged by the impact force of the fluid. There was a case.

  This invention is made | formed in view of such a situation, and can peel a plate-shaped body efficiently from a plate-shaped body holding member, without damaging the edge of a plate-shaped body with the impact force of a fluid. It is an object of the present invention to provide a plate-like body peeling apparatus and method, and a plate-like body manufacturing method.

  The present invention has been made based on the following findings.

  In order to efficiently peel the plate-like body from the plate-like body holding member in a short time without damaging the edge of the plate-like body by the impact force of the fluid ejected from the nozzle, the following first condition In order to peel the plate body from the plate body holding member efficiently and in a short time without damaging the plate body holding member due to the impact force of the fluid ejected from the nozzle, It has been found that the second condition is required.

  In order to satisfy the first condition, the fluid is allowed to collide with the holding surface (the holding surface holding the plate-like body) of the plate-like body holding member while avoiding the fluid directly colliding with the edge of the plate-like body. It is necessary to supply the fluid whose ejection direction has been changed on the holding surface to the boundary between the edge of the plate-like body and the holding surface. That is, the fluid is ejected from the direction intersecting the holding surface toward the holding surface at a position separated from the boundary between the holding surface and the edge of the plate-like body. Thereby, the first condition can be satisfied. On the other hand, if the fluid is ejected from the direction parallel to the holding surface toward the interface between the holding surface and the plate-like body, the second condition can be satisfied.

  Therefore, in order to achieve the above object, an aspect of the present invention provides a plate-like body peeling apparatus for peeling a plate-like body held on a holding surface of a plate-like body holding member from the holding surface. First fluid ejecting means for ejecting a first fluid from a direction intersecting the holding surface toward the holding surface at a position separated from a boundary portion between the holding surface and an edge of the plate-like body. A plate-like body peeling apparatus is provided.

  According to one aspect of the present invention, the plate-like body can be efficiently peeled from the plate-like body holding member without damaging the edge of the plate-like body by the impact force of the first fluid.

  In one embodiment of the present invention, a second fluid ejecting unit that ejects a second fluid toward an interface between the holding surface and the plate-like body, and the first fluid ejected from the first fluid ejecting unit. It is preferable to include control means for injecting, stopping the injection of the first fluid after a predetermined time has elapsed, and injecting the second fluid from the second fluid injection means.

  In one aspect of the present invention, it is preferable that an ejection direction of the second fluid by the second fluid ejection unit is set in a direction parallel to the holding surface.

  According to another aspect of the present invention, in order to achieve the object, the plate-like body peeling method for peeling the plate-like body held on the holding surface of the plate-like body holding member from the holding surface, A first fluid is ejected from the direction intersecting the holding surface toward the holding surface at a position separated from a boundary portion between the holding surface and the edge of the plate-like body, and the plate is discharged from the holding surface. A first peeling step for peeling the edge of the body, and after stopping the jetting of the first fluid, parallel to the holding surface toward the interface between the holding surface and the plate-like body And a second peeling step of ejecting a second fluid from the direction to peel the plate-like body from the holding surface.

  Furthermore, one aspect of the present invention is a method for producing a plate-like body having a plate-like body peeling step of peeling the plate-like body held on the holding surface of the plate-like body holding member from the holding surface. In the peeling step, the first fluid is ejected from the direction intersecting the holding surface toward the holding surface at a position separated from the boundary between the holding surface and the edge of the plate-like body, A first peeling step of peeling the edge of the plate-like body from the holding surface; and after stopping the ejection of the first fluid, the holding toward the interface between the holding surface and the plate-like body A second peeling step of ejecting a second fluid from a direction parallel to the surface to peel off the plate-like body from the holding surface. .

  According to one aspect of the present invention, in the first peeling step, the first fluid is ejected from the first fluid ejecting means, and the edge of the plate-like body is peeled from the holding surface of the plate-like body holding member. The ejection direction of the first fluid is a direction toward the holding surface at a position separated from the boundary between the holding surface and the edge of the plate-like body, intersects the holding surface, and more preferably plate-shaped. It is set in the direction toward the body edge. As a result, the fluid whose ejection direction has been changed on the holding surface enters the interface between the edge of the plate and the holding surface from the boundary, so that the edge of the plate is damaged by the impact force of the fluid. The edge part of a plate-shaped object can be efficiently peeled from a holding surface, without making it.

  Next, in the second peeling step, first, the ejection of the first fluid is stopped. Thereby, damage to the holding surface due to the first fluid continuously colliding with the holding surface can be suppressed. Next, the second fluid is ejected from the second fluid ejecting means, and the entire plate-like body is peeled off from the holding surface of the plate-like body holding member. The ejection direction of the second fluid is a direction toward the interface between the holding surface and the plate-like body, and is set in a direction parallel to the holding surface. Thereby, since the 2nd fluid is efficiently supplied to the interface of a holding surface and a plate-shaped object, a plate-shaped object can be efficiently peeled in a short time.

  The injection and stop of the first and second fluids are time-controlled by a control means provided in the first and second fluid supply pipes, for example, for opening and closing an electromagnetic valve.

  As described above, the present invention is characterized in that, based on the above knowledge, the first fluid ejecting means for peeling only the edge of the plate-like body and the second fluid ejecting for peeling the plate-like body whose edge is peeled off. And means.

  Further, since the ejection directions of the first and second fluids are uniform directions, periodic fine adjustment of the ejection direction, which is unavoidable in the case of one nozzle, is unnecessary. Thereby, since it is not necessary to stop a peeling apparatus regularly, peeling of a plate-shaped object can be implemented efficiently and the operation rate of a peeling apparatus improves.

  In one embodiment of the present invention, the first fluid and the second fluid are preferably liquids.

  According to one aspect of the present invention, the liquid enters the interface between the holding surface of the plate-like member holding member and the plate-like member. Thereby, since the reattachment of the plate-like body to the holding surface is prevented by the liquid, the plate-like body can be reliably peeled off. In addition, since the ejection direction of the second fluid is set in a direction parallel to the holding surface, the liquid can be reliably supplied to the interface that gradually moves away from the second fluid ejection means. That is, the liquid can be efficiently supplied to the interface without using a high-pressure fluid in which compressed air and liquid are mixed. Furthermore, since compressed air is not used, that is, no air compressor is required, the fluid supply device is simplified.

  In one aspect of the present invention, the first fluid ejecting unit and the second fluid ejecting unit include a fluid supply pipe disposed along an edge of the plate-like body, and an axial direction of the fluid supply pipe. It is preferable that a plurality of nozzles provided along the line is provided.

  According to one aspect of the present invention, by using a liquid as a fluid, a liquid supply pipe such as a square pipe is disposed as it is along the edge of the plate-like body, and a plurality of nozzles are directly provided on the liquid supply pipe. A fluid ejecting means having a simple configuration can be provided.

  In one embodiment of the present invention, a plate is held on the holding surface of the plate-like body holding portion along the periphery or a part of the periphery of the plate-like body, and the first fluid is directed toward the plate. Are preferably injected.

  According to one aspect of the present invention, the first fluid is ejected toward the plate, and the first fluid whose ejection direction is changed by the plate is the holding surface of the plate-like body holding member and the edge of the plate-like body. The edge of the plate-like body is peeled off. Since the holding surface is protected by the plate when the first fluid is supplied, damage to the holding surface due to the collision of the first fluid can be prevented.

  In one aspect of the present invention, it is preferable that the first fluid ejecting unit and the second fluid ejecting unit are disposed below the plate-like body holding member.

  According to one aspect of the present invention, a plate-like body holding member whose holding surface is directed downward is targeted, and in this case, the first fluid is jetted obliquely upward. The plate-like body separated by the second fluid falls from the plate-like body holding member by its own weight and is collected.

  In one aspect of the present invention, it is preferable that the first fluid ejecting unit and the second fluid ejecting unit are disposed above the plate-like body holding member.

  According to one aspect of the present invention, a plate-like body holding member whose holding surface is directed upward is targeted, and in this case, the first fluid is jetted obliquely downward. The plate-like body separated by the second fluid is adsorbed and collected by an adsorbing means such as an adsorbing pad.

  As described above, according to the plate-like body peeling apparatus and method and the plate-like body manufacturing method of the present invention, the plate-like body holding member is obtained without damaging the edge of the plate-like body due to the impact force of the fluid. The plate-like body can be efficiently peeled off.

(A), (B), (C), (D) is the conceptual diagram which showed the 1st peeling method of the plate-shaped object which concerns on this invention with time. (A), (B), (C) is the conceptual diagram which showed the 2nd peeling method of the plate-shaped object based on this invention with time. (A) is a side view of the peeling device of the embodiment, (B) is a side view of the polishing device, (C) is a side view showing a state where the glass plate is peeled by the peeling device. Top view of the glass plate sucked and held on the holding surface of the suction sheet The perspective view which showed the principal part structure of the peeling apparatus of embodiment 5 is a longitudinal sectional view of the main part of FIG. (A) is a principal part enlarged sectional view which showed the state by which the edge part of the glass plate was peeled from the adsorption sheet by the peeling apparatus, (B) is the non-polishing surface of a glass plate peeled from the adsorption sheet by the peeling apparatus. The principal part expanded sectional view which showed the state Block diagram showing the configuration of the fluid supply device

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a plate-like body peeling apparatus and method and a plate-like body manufacturing method according to the present invention will be described with reference to the accompanying drawings.

  1 (A), (B), (C), and (D) are conceptual diagrams showing the first peeling method of the plate-like body according to the present invention over time, and FIGS. B) and (C) are conceptual views showing the second peeling method of the plate-like body according to the present invention over time.

  Hereinafter, in the manufacturing process of the glass plate (plate-like body) G, an example in which the plate-like body peeling method and the apparatus of the present invention are applied to the glass plate peeling step provided on the downstream side of the glass plate polishing step will be described. . In this example, the non-polished surface G1 of the glass plate G is adsorbed and held on the flat holding surface 12 of the adsorbing sheet (plate-like body holding member) 10, and in this state, the polished surface G2 (of the non-polished surface G1) The facing surface) is polished in the glass plate polishing step. Thereafter, the non-polished surface G1 of the glass plate G is peeled from the holding surface 12 of the suction sheet 10 in the glass plate peeling step.

  The first peeling method shown in FIG. 1 is a peeling method in a form in which the upper surface (non-polished surface G1) of the glass plate G is sucked and held on the holding surface 12 of the suction sheet 10 as shown in FIG. . According to the first peeling method, as shown in FIG. 1 (B), first, a fluid (first fluid) 16 is ejected obliquely upward from a nozzle (nozzle of a first fluid ejecting means) 14 to form glass. The edge G3 of the plate G is peeled off from the holding surface 12 as indicated by an arrow a (first peeling step). Next, the injection of the fluid 16 is stopped, and the fluid (second fluid) 20 is ejected from the nozzle (nozzle of the second fluid ejecting means) 18 as shown in FIG. The upper surface of the plate G is peeled off as indicated by an arrow b, and the entire upper surface is peeled off (second peeling step). The peeled glass plate G falls from the suction sheet 10 due to its own weight and is collected by the collection unit. That is, the peeling apparatus of FIG. 1 to which the first peeling method is applied has a form in which the nozzles 14 and 18 are disposed below the suction sheet 10. Although the nozzle 18 is provided in FIG. 1, the upper surface of the glass plate G can be peeled from the holding surface 12 even with only the fluid 16 ejected from the nozzle 14. By providing the nozzle 18, the upper surface of the glass plate G can be peeled off from the holding surface 12 by the fluid 20 ejected from the nozzle 18 in a short time. Therefore, it is preferable to provide the nozzle 18.

  The second peeling method shown in FIG. 2 is a peeling method in a form in which the lower surface (non-polished surface G1) of the glass plate G is sucked and held on the holding surface 12 of the suction sheet 10 as shown in FIG. . According to the second peeling method, as shown in FIG. 2B, first, the fluid 16 is jetted obliquely downward from the nozzle 14, and the edge G3 of the glass plate G is moved to the same direction as the arrow a (FIG. 1B). As shown in FIG. Next, the injection of the fluid 16 is stopped, and as shown in FIG. 2C, the fluid 20 is injected from the nozzle 18 so that the lower surface of the glass plate G extends from the holding surface 12 to the same as the arrow b (FIG. 1C). And the entire lower surface is peeled off. The peeled glass plate G is recovered by adsorbing the upper surface thereof to an adsorbing means (not shown) such as an adsorbing pad. That is, the peeling apparatus of FIG. 2 to which the second peeling method is applied has a configuration in which the nozzles 14 and 18 are arranged above the suction sheet 10. Although the nozzle 18 is provided also in FIG. 2, the lower surface of the glass plate G can be peeled from the holding surface 12 even with only the fluid 16 ejected from the nozzle 14. By providing the nozzle 18, the lower surface of the glass plate G can be peeled off from the holding surface 12 by the fluid 20 ejected from the nozzle 18 in a short time. Therefore, it is preferable to provide the nozzle 18.

  As described above, the plate-like body peeling method of the present invention is such that the upper surface of the glass plate G is sucked and held by the holding surface 12 of the lower surface of the suction sheet 10 (see FIG. 1), and the lower surface of the glass plate G is sucked. The present invention can also be applied to a form (see FIG. 2) in which the sheet 10 is held by suction on the holding surface 12 on the upper surface.

  Further, in the peeling method shown in FIGS. 1 and 2, since the injection of the fluid 16 is stopped before the injection of the fluid 20, the holding surface 12A is caused by the fluid 16 continuously colliding with the holding surface 12A. Damage can be suppressed.

<Nozzles 14 and 18>
The direction in which the fluid 16 is ejected by the nozzle 14 as indicated by an arrow c in FIGS. 1B and 2B is a position spaced laterally from the boundary 22 between the holding surface 12 and the edge G3 of the glass plate G. The direction toward the holding surface 12 </ b> A intersects the holding surface 12 and is set in the direction toward the edge G <b> 3 of the glass plate G. As a result, the fluid 16 whose injection direction has been changed on the holding surface 12A enters the interface 24 between the edge G3 of the glass plate G and the holding surface 12 from the boundary portion 22, so that the edge G3 is moved to the fluid 16. The holding surface 12 can be efficiently peeled without being damaged by the impact force.

  In addition, the spray angle of the fluid 16 is preferably 15 to 55 degrees with respect to the holding surface 12 of the suction sheet 10, and more preferably 20 to 30 degrees. Moreover, the jet direction of the fluid 16 is set to a direction toward the edge G3 of the glass plate G. In other words, as shown in FIG. 1 (D), the direction in which the nozzle 14 is inclined is set to the opposite side of the glass plate G, the reflecting member 15 is installed between the nozzle 14 and the holding surface 12A, and the fluid reflected by the reflecting member 15 You may set so that 16 may collide with 12 A of holding surfaces, and it may be supplied to the boundary part 22 of the holding surface 12 and the edge part G3 of the glass plate G. FIG.

  On the other hand, the ejection direction of the fluid 20 by the nozzle 18 as indicated by the arrow d in FIGS. 1C and 2C is a desired direction, preferably parallel to the holding surface 12 toward the interface 24. Is set to Thereby, since the fluid 20 is efficiently supplied to the interface 24, the whole glass plate G can be efficiently peeled from the adsorption sheet 10 in a short time. The direction parallel to the holding surface 12 is not limited to the case where the angle with respect to the holding surface 12 is 0 degrees, and includes 0 to 10 degrees.

  The fluids 16 and 20 ejected from the nozzles 14 and 18 are not particularly limited, and may be a high-pressure fluid obtained by mixing a liquid and compressed air, but is preferably a liquid such as water. In the peeling process, since the liquid enters the interface 24, reattachment of the glass plate G to the holding surface 12 can be prevented. Thereby, the glass plate G can be peeled reliably. In addition, since the ejection direction of the fluid 20 is set in a direction parallel to the holding surface 12, the liquid can be reliably supplied to the interface 24 moving away from the nozzle 18 even if the fluid is a liquid. That is, the liquid can be efficiently supplied to the interface 24 without using a high-pressure fluid in which compressed air and liquid are mixed. In addition, since no compressed air is used, that is, no air compressor is required, the fluid supply device is simplified. In addition, when the fluids 16 and 20 are liquid, it is preferable to set the injection pressure to 0.5 to 0.7 MPa in consideration of damage to the glass plate G and the holding surface 12A.

<Glass plate G>
The glass plate G is a thin (0.1-2.5 mm) glass plate used for FPD (Flat Panel Display) such as a plasma display, a liquid crystal display, and an organic EL display. Moreover, the glass plate G is manufactured to the glass plate G which satisfy | filled the flatness requested | required as a glass plate for FPD by grind | polishing the grinding | polishing surface G2 in the said glass plate grinding | polishing process. In addition, the shape of the glass plate G is a rectangular shape, and the size can be exemplified from the fifth generation (length 1000 mm × width 1200 mm to height 1100 mm × width 1300 mm) to the tenth generation (length 2880 mm × width 3130 mm).

<Adsorption sheet 10>
The adsorbing sheet 10 is a self-adsorbing porous member, but a liquid such as glycerin is applied to the holding surface 12 to enhance the adsorbing property with the glass plate G. One glass sheet G may be adsorbed and held on one adsorbing sheet 10, or two or more glass plates G may be adsorbed and held on one adsorbing sheet 10. The material of the porous member is not particularly limited, and examples thereof include polyurethane, polyvinyl chloride, polyethylene terephthalate, and polypropylene. Furthermore, although glycerol was illustrated as a liquid, it is not limited to this, Water, the polyhydric alcohol containing glycerol (glycerin, polyethylene glycol, ethylene glycol, propylene glycol, diethylene glycol etc.), and the mixture of water and a polyhydric alcohol It can be illustrated.

[Configuration of Peeling Device 30 and Polishing Device 32]
FIG. 3A is a side view of the peeling device 30 according to the embodiment, FIG. 3B is a side view of a polishing device 32 disposed in the front stage of the peeling device 30, and FIG. FIG. 4 is a side view showing a state where the glass plate G is peeled off by the peeling device 30.

  The polishing device 32 polishes the polishing surface G <b> 2 of the glass plate G adsorbed and held on the adsorbing sheet 10 by pressing the polishing pad 36 against the polishing pad 36 and rotating it. In the polishing method, the pressure fluid is supplied between the carrier 38 of the polishing head 34 and the suction sheet 10, and the pressure of the pressure fluid is transmitted to the glass plate G through the suction sheet 10. The polishing surface G2 is pressed against the polishing pad 36 with an in-plane uniform pressure. Then, the carrier 38 is rotated (including rotation and revolution) by the rotation shaft 40, and the polishing pad 36 is rotated as necessary to polish the polishing surface G2 of the glass plate G. This polishing method is an example.

  FIG. 4 is a plan view of the glass plate G sucked and held on the holding surface 12 of the suction sheet 10.

  The adsorption sheet 10 adsorbs the four plates 42 that are pressed against the polishing pad 36 (see FIG. 3B) together with the glass plate G. The plate 42 is called a dummy plate, surrounds the periphery of the glass plate G with a predetermined gap, and prevents the polishing pressure from concentrating on the edge of the polishing surface of the glass plate G. The plate 42 is formed of a material that is substantially the same as the thickness of the glass plate G and that is not worn by polishing by the polishing pad 36, and examples thereof include stainless steel, iron, aluminum, polyethylene, and polyurethane. In FIG. 4, the plate 42 is disposed along the four sides of the glass plate G, but the plate 42 may be disposed on at least one side.

  The glass plate G whose polishing surface G2 has been polished by the polishing device 32 of FIG. 3B is conveyed to the peeling device 30 by the movement indicated by the arrow e of the polishing head 34, and is peeled from the suction sheet 10 by the peeling device 30. .

  FIG. 5 is a perspective view showing a main part structure of the peeling device 30, and FIG. 6 is a vertical sectional view of the main part of FIG.

  As shown in FIG. 5, a plurality of nozzles 14 are provided along the axial direction of a straight square pipe 44 that supplies the fluid 16. A plurality of nozzles 18 are provided along the axial direction of the square pipe 46 that supplies the fluid 20. As shown in FIG. 6, the square pipe 44 and the square pipe 46 are fixed through L-shaped brackets 48 provided on the sides of the square pipe 44 so that their axes are parallel to each other. Although the square pipes 44 and 46 are shown as pipes for supplying fluid, the shape is not limited to a square shape, and may be a cylinder.

  As shown in FIG. 5, the square pipes 44 and 46 are arranged so as to face the long sides facing the glass plate G conveyed to the peeling device 30 (along the long sides), and each of the plurality of nozzles 14 and 18 is long. Arranged at predetermined intervals along the side. In addition, you may arrange | position the square pipes 44 and 46 and the nozzles 14 and 18 facing the short side which the glass plate G opposes. Further, the nozzle 14 and the square pipe 44 constitute the first fluid ejecting means of the present invention, and the nozzle 18 and the square pipe 46 constitute the second fluid ejecting means of the present invention.

  The arrangement positions of the nozzles 14 and 18 are not limited to positions along two opposing sides of the glass plate G, but may be positions along one side or positions along four sides. Further, the nozzles 14 and 18 may be arranged to be inclined with respect to the side of the glass plate G.

  By using a liquid as the fluids 16 and 20, the square pipes 44 and 46 can be arranged as they are along the sides (edges) of the glass plate G. Therefore, a plurality of nozzles 14 and 18 are attached to the square pipes 44 and 46, respectively. It is possible to provide a fluid ejecting means having a simple configuration which is simply provided directly.

  The square pipe 44 is fixed to the upper part of the leg part 50 of the peeling apparatus 30 as shown in FIG. A travelable shuttle 52 is disposed below the peeling device 30 and between the pair of leg portions 50. A sheet 54 made of a cushioning member such as rubber is attached to the upper surface of the shuttle 52, and the glass plate G peeled from the suction sheet 10 is dropped onto the sheet 54 by its own weight and collected by the shuttle 52. The collected glass plate G is transported to the carry-in section of the next process by the shuttle 52.

  On the other hand, as shown in FIG. 6, a receiving plate 56 on which the plate 42 is placed is attached to the upper surface of the square pipe 46.

  The glass plate G is peeled off by the fluid 16 ejected from the nozzle 14 and the fluid 20 ejected from the nozzle 18 in the state of FIG.

[Operation of the peeling device 30]
FIG. 7A shows a state in which the long edge G3 of the glass plate G is peeled from the holding surface 12 of the suction sheet 10 by the fluid (liquid) 16 ejected from the nozzle 14 of the peeling device 30. FIG. 7B is an enlarged cross-sectional view of the main part, and the non-polished surface G1 of the upper surface of the glass plate G is held by the holding surface 12 of the suction sheet 10 by the fluid (liquid) 20 ejected from the nozzle 18 of the peeling device 30. It is the principal part expanded sectional view which showed the state which peels from.

  First, as shown in FIG. 7A, fluid 16 (see FIG. 1B) is ejected from the nozzle 14 in the direction of the arrow c, and the edge G3 of the glass plate G is peeled from the holding surface 12 of the suction sheet 10. The ejection direction of the fluid 16 is set to the direction described in FIG. Therefore, as shown in FIG. 7A, the fluid 16 ejected from the nozzle 14 is ejected toward the plate 42 sucked and held by the holding surface 12A, and the fluid 16 whose ejection direction has been changed by the plate 42 is retained. It is supplied to the boundary portion 22 between the surface 12 and the edge portion G3 of the glass plate G. Thereby, since it permeates into the interface between the edge portion G3 of the glass plate G and the holding surface 12 from the boundary portion 22, the edge portion G3 is not damaged from the holding surface 12 by the impact force of the fluid 16. Can be efficiently peeled off. Further, since the holding surface 12A is protected by the plate 42 when the edge G3 is peeled off, damage to the holding surface 12A due to the collision of the fluid 16 can be prevented.

  Next, when the edge part G3 peels, the injection of the fluid 16 is stopped.

  Here, an example of the fluid supply apparatus will be described. FIG. 8 is a block diagram showing the configuration of the fluid supply device 60.

  The fluid supply device 60 has a supply system 70 that increases the filtered water, which is a fluid, by a pressure-intensifying pump 62 and supplies the filtered water to the two square pipes 44 via a relief valve 64, an electromagnetic valve 66, and a manual valve 68, A supply system 76 that supplies the two square pipes 46 via a relief valve 64, an electromagnetic valve 72, and a manual valve 74 is provided. Moreover, the control means 78 which opens and closes the electromagnetic valves 66 and 72 by time control is provided. In FIG. 8, the nozzles 14 and 18 are not shown in order to avoid complexity of the drawing.

  According to the fluid supply device 60, the injection and stop of the fluid 16 are performed by controlling the time by the control means 78 that opens and closes the electromagnetic valves 66 and 72. Further, according to the fluid supply device 60, the manual valves 68 and 74 can be opened and closed with the electromagnetic valves 66 and 72 opened.

  Next, as shown in FIG. 7B, the fluid 20 is ejected from the nozzle 18 to peel the entire glass plate G from the holding surface 12 of the suction sheet 10. The ejection direction of the fluid 20 is set to the direction described in FIG. Thereby, since the fluid 20 is efficiently supplied to the interface between the holding surface 12 and the glass plate G, the glass plate G can be efficiently peeled in a short time.

  The peeled glass plate G falls on the sheet 54 as shown in FIG. 3C, and is then recovered and carried out to the next process. Moreover, if the glass plate G whole peels, the injection of the fluid 20 will be stopped. The injection and stoppage of the fluid 20 are performed by time-controlling by the control means 78 that opens and closes the electromagnetic valve 72 of FIG.

  As described above, the peeling device 30 according to the embodiment includes the nozzle 14 that peels only the edge G3 of the glass plate G and the nozzle 18 that completely peels the glass plate G from which the edge G3 is peeled. It is a feature. Since the ejection directions of the fluids 16 and 20 by the nozzles 14 and 18 are uniformly determined, periodic fine adjustment of the ejection direction, which is unavoidable in the case of one nozzle, is unnecessary. Thereby, since it is not necessary to stop the peeling apparatus 30 regularly in order to maintain one nozzle, the peeling of the glass plate G can be carried out efficiently and the operating rate of the peeling apparatus 30 is improved.

  3 to 7, the glass plate G polishing method and the glass plate G peeling method in the form shown in FIG. 1 (the adsorbing sheet 10 is on the top and the glass plate G is on the bottom) have been described. The peeling device and the peeling method of the present invention can be applied to the polishing method of the glass plate G and the peeling method of the glass plate G in the form shown in FIG. .

[Industrial applicability]
In the embodiment, the glass plate G is exemplified as the plate-like body to be peeled. However, the present invention is not limited to this, and the plate-like body peeling method of the present invention and the plate-like body made of metal or resin can The apparatus and the manufacturing method of a plate-shaped body can be applied.

  G ... Glass plate, G1 ... Non-polished surface, G2 ... Polished surface, G3 ... Edge, 10 ... Adsorption sheet, 12 ... Holding surface, 12A ... Holding surface, 14 ... Nozzle, 15 ... Reflecting member, 16 ... Fluid, 18 DESCRIPTION OF SYMBOLS ... Nozzle, 20 ... Fluid, 22 ... Interface, 24 ... Interface, 30 ... Stripping device, 32 ... Polishing device, 34 ... Polishing head, 36 ... Polishing pad, 38 ... Carrier, 40 ... Rotating shaft, 42 ... Plate, 44 ... Square pipe, 46 ... Square pipe, 48 ... Bracket, 50 ... Leg, 52 ... Shuttle, 54 ... Seat, 56 ... Receiver plate, 60 ... Fluid supply device, 62 ... Intensification pump, 64 ... Relief valve, 66 ... Electromagnetic valve 68 ... Manual valve 70 ... Supply system 72 ... Electromagnetic valve 74 ... Manual valve 76 ... Supply system 78 ... Control means

Claims (10)

In the plate-like body peeling apparatus for peeling the plate-like body held on the holding surface of the plate-like body holding member from the holding surface,
First fluid ejecting means for ejecting a first fluid from a direction intersecting the holding surface toward the holding surface at a position separated from a boundary portion between the holding surface and an edge of the plate-like body. A peeling device for a plate-like body, comprising: Second fluid ejecting means for ejecting a second fluid toward the interface between the holding surface and the plate-like body;
Control means for ejecting the first fluid from the first fluid ejecting means, stopping the ejection of the first fluid after a predetermined time has elapsed, and ejecting the second fluid from the second fluid ejecting means. When,
The peeling apparatus of the plate-shaped object of Claim 1 provided with.   The plate-like body peeling apparatus according to claim 2, wherein an ejection direction of the second fluid by the second fluid ejecting unit is set in a direction parallel to the holding surface.   The plate-like body peeling apparatus according to claim 2 or 3, wherein the first fluid and the second fluid are liquids.   The first fluid ejecting means and the second fluid ejecting means include a fluid supply pipe disposed along an edge of the plate-like body, and a plurality of the fluid supply pipes provided along the axial direction of the fluid supply pipe. The peeling apparatus of the plate-shaped body of Claim 2, 3 or 4 provided with a nozzle. A plate is held along the periphery or part of the periphery of the plate-like body on the holding surface of the plate-like body holding member,
The plate-like body peeling apparatus according to claim 2, wherein the first fluid is sprayed toward the plate.   The plate-like body peeling apparatus according to any one of claims 2 to 6, wherein the first fluid ejecting means and the second fluid ejecting means are disposed below the plate-like body holding member.   The plate-like body peeling apparatus according to any one of claims 2 to 6, wherein the first fluid ejecting means and the second fluid ejecting means are disposed above the plate-like body holding member. In the peeling method of the plate-like body that peels the plate-like body held on the holding surface of the plate-like body holding member from the holding surface,
A first fluid is ejected from a direction intersecting the holding surface toward the holding surface at a position spaced from a boundary portion between the holding surface and an edge of the plate-like body, and the first fluid is ejected from the holding surface. A first peeling step of peeling the edge of the plate-like body;
After stopping the ejection of the first fluid, the second fluid is ejected from the direction parallel to the holding surface toward the interface between the holding surface and the plate-like body, A second peeling step for peeling the plate-like body;
A plate-like body peeling method comprising: In the method for producing a plate-like body having a plate-like body peeling step of peeling the plate-like body held on the holding surface of the plate-like body holding member from the holding surface,
The peeling step includes
A first fluid is ejected from a direction intersecting the holding surface toward the holding surface at a position spaced from a boundary portion between the holding surface and an edge of the plate-like body, and the first fluid is ejected from the holding surface. A first peeling step of peeling the edge of the plate-like body;
After stopping the ejection of the first fluid, the second fluid is ejected from the direction parallel to the holding surface toward the interface between the holding surface and the plate-like body, A second peeling step for peeling the plate-like body;
A method for producing a plate-like body comprising:

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