JP2015185184A5

JP2015185184A5 -

Info

Publication number: JP2015185184A5
Application number: JP2014059542A
Authority: JP
Filing date: 2014-03-24
Publication date: 2017-04-06
Anticipated expiration: 2034-03-24

Claims

An information storage device for writing and storing digital data in an information recording medium,
A data input unit for inputting digital data to be stored;
A unit data generation unit that generates a plurality of unit data by dividing the digital data by a predetermined bit length unit;
A unit bit matrix generation unit that generates a unit bit matrix by arranging data bits constituting individual unit data in a two-dimensional matrix;
A unit bit graphic pattern generation unit that generates a unit bit graphic pattern by converting the unit bit matrix into a geometric pattern arranged in a predetermined bit recording area;
A unit recording graphic pattern generation unit that generates a unit recording graphic pattern by adding an alignment mark to the unit bit graphic pattern;
A drawing data generation unit for generating drawing data for drawing the unit recording graphic pattern;
A beam exposure apparatus that performs beam exposure using an electron beam or laser light on a substrate serving as an information recording medium based on the drawing data;
A patterning apparatus for generating an information recording medium on which a physical structure pattern corresponding to the drawing data is formed by performing a patterning process on the exposed substrate;
With
The beam exposure apparatus has a function of performing beam exposure on the surface of the resist layer with respect to a substrate having a layer to be molded and a resist layer covering the layer to be molded;
A development processing unit in which the patterning apparatus performs a process in which the substrate is impregnated with a developer having a property of dissolving the exposed portion or the non-exposed portion of the resist layer, and a part thereof is left, and the resist layer And an etching processing section for performing etching on the layer to be molded using the remaining portion as a mask.

The information storage device according to claim 1 ,
The unit bit figure pattern generation unit converts any one of individual bits “1” and individual bits “0” constituting the unit bit matrix into individual bit figures consisting of closed regions,
The drawing data generation unit generates drawing data indicating the contour lines of the individual bit figures,
An information storage apparatus, wherein the beam exposure apparatus performs beam exposure on an inner portion of the contour line of each of the bit figures.

The information storage device according to claim 1 or 2 ,
An information storage device, wherein the patterning device forms a physical structure pattern having a concavo-convex structure including a concave portion indicating one of the bits “1” and a bit “0” and a convex portion indicating the other.

The information storage device according to claim 3 ,
An information storage device, wherein the patterning device forms a physical structure pattern having an additional layer made of a light-reflective or light-absorbing material on the surface of one or both of the concave portion and the convex portion.

The information storage device according to claim 1 or 2 ,
An information storage device characterized in that the patterning device forms a physical structure pattern having a network structure composed of through holes indicating one of the bits "1" and bit "0" and a non-hole portion indicating the other. .

In the information storage device according to any one of claims 1 to 5 ,
The unit data generation unit divides the digital data into unit data composed of (m × n) bits,
The unit bit matrix generation unit generates a unit bit matrix consisting of m rows and n columns,
The unit bit figure pattern generation unit associates individual bits constituting the unit bit matrix with lattice points arranged in a matrix of m rows and n columns, and on the lattice point corresponding to the bit “1” or the bit “0”. A unit bit figure pattern is generated by arranging a bit figure of a predetermined shape on an information storage device.

The information storage device according to claim 6 ,
The unit bit graphic pattern generation unit generates a unit bit graphic pattern arranged in a rectangular bit recording area,
A unit recording graphic pattern generation unit is arranged in a rectangular unit recording area including the bit recording area and the alignment mark by adding an alignment mark outside the rectangular bit recording area. Generate unit pattern graphic pattern
A drawing data generation unit generates a drawing pattern including a plurality of unit recording graphic patterns by arranging the rectangular unit recording areas in a two-dimensional matrix, and draws the drawing pattern. An information storage device that generates drawing data.

The information storage device according to claim 7 ,
The unit recording graphic pattern generation unit adds a total of two sets of alignment marks arranged near the outside of the two diagonal corners of the four corners of the rectangular bit recording area. An information storage device characterized by generating a graphic pattern.

The information storage device according to claim 7 ,
The unit recording graphic pattern generation unit generates a unit recording graphic pattern by adding a total of three sets of alignment marks arranged near the outside of the four corners of the rectangular bit recording area. In addition, the information storage device is characterized in that the arrangement pattern of the three sets of alignment marks is made different for the unit recording graphic patterns adjacent to each other.

The information storage device according to claim 8 or 9 ,
The unit recording graphic pattern generation unit sets a specific unit recording area as a reference unit recording area, and for the reference unit recording area, a unit recording graphic using a reference alignment mark different from other unit recording areas An information storage device characterized by generating a pattern.

In the information storage device in any one of Claims 1-10 ,
A data input unit, unit data generation unit, unit bit matrix generation unit, unit bit graphic pattern generation unit, unit recording graphic pattern generation unit, and drawing data generation unit are configured by incorporating a program into a computer. An information storage device characterized by that.

A data input unit, a unit data generation unit, a unit bit matrix generation unit, a unit bit graphic pattern generation unit, a unit recording graphic pattern generation unit, and a drawing data generation unit in the information storage device according to claim 1 As a program that allows the computer to function.

An information reading device for reading digital data stored in an information recording medium using the information storage device according to claim 1,
An image capturing device that captures an image of an image capturing area that forms part of the recording surface of the information recording medium and captures the obtained captured image as image data;
A captured image storage unit for storing the captured image;
A bit recording area recognition unit for recognizing individual bit recording areas by detecting an alignment mark from the captured image stored in the captured image storage unit;
A unit bit matrix recognition unit for recognizing a unit bit matrix based on a pattern in the bit recording area;
A scanning control unit that performs control to change a shooting target area by the image shooting device so that shot images of all bit recording areas to be read are obtained;
A unit for generating unit data from each unit bit matrix recognized by the unit bit matrix recognition unit, and by synthesizing the individual unit data, a data restoration unit for restoring the digital data to be stored;
An information reading device comprising:

An information reading device for reading digital data stored in an information recording medium using the information storage device according to claim 10 ,
An image capturing device that captures an image of an image capturing area that forms part of the recording surface of the information recording medium and captures the obtained captured image as image data;
A captured image storage unit for storing the captured image;
A bit recording area recognition unit for recognizing individual bit recording areas by detecting an alignment mark from the captured image stored in the captured image storage unit;
A unit bit matrix recognition unit for recognizing a unit bit matrix based on a pattern in the bit recording area;
A scanning control unit that performs control to change a shooting target area by the image shooting device so that shot images of all bit recording areas to be read are obtained;
A unit for generating unit data from each unit bit matrix recognized by the unit bit matrix recognition unit, and by synthesizing the individual unit data, a data restoration unit for restoring the digital data to be stored;
With
The image photographing apparatus has a function of photographing a photographing target area having a size that can include at least one unit recording area,
The scanning control unit controls the image photographing apparatus to adjust a photographing target region so that a photographed image of a region including a reference unit recording region is obtained based on a reference alignment mark. An information reading apparatus characterized by performing control for sequentially moving an imaging target area in accordance with an arrangement pitch of recording areas.

The information reading apparatus according to claim 13 or 14 ,
An information reading apparatus comprising: a captured image storage unit; a bit recording area recognition unit; a unit bit matrix recognition unit; a scan control unit; and a data restoration unit.

15. A program for causing a computer to function as a captured image storage unit, a bit recording area recognition unit, a unit bit matrix recognition unit, a scanning control unit, and a data restoration unit in the information reading apparatus according to claim 13 or 14 .

An information reading method for reading digital data stored in an information recording medium by a predetermined information storage method,
The predetermined information storage method is:
A data input stage in which a computer inputs digital data to be stored;
A unit data generation step in which the computer generates a plurality of unit data by dividing the digital data by a predetermined bit length unit;
A unit bit matrix generation stage in which a computer generates a unit bit matrix by arranging data bits constituting individual unit data in a two-dimensional matrix; and
A unit bit graphic pattern generating step in which the computer generates the unit bit graphic pattern by converting the unit bit matrix into a geometric pattern arranged in a predetermined bit recording area;
A unit recording graphic pattern generation stage for generating a unit recording graphic pattern by adding an alignment mark to the unit bit graphic pattern;
A drawing data generation stage for generating drawing data for drawing the unit recording graphic pattern;
A beam exposure step of performing beam exposure using an electron beam or laser light on a substrate serving as an information recording medium based on the drawing data;
A patterning step of generating an information recording medium on which a physical structure pattern corresponding to the drawing data is formed by performing a patterning process on the exposed substrate;
Have
The information reading method includes:
Using an image capturing device, an image capturing stage that captures an image of an image capturing area that forms a part of the recording surface of the information recording medium and captures the captured image as image data;
A computer stores a captured image storing the captured image;
A bit recording area recognition step for recognizing individual bit recording areas by detecting alignment marks from the captured image stored in the captured image storage step;
A unit bit matrix recognition stage for recognizing a unit bit matrix based on a pattern in the bit recording area;
A data restoration stage for restoring digital data as a storage target by generating unit data from each unit bit matrix recognized in the unit bit matrix recognition stage by a computer and synthesizing the individual unit data;
Have
In the image photographing step, the information reading method is characterized in that the computer performs control to change the photographing target region by the image photographing device so that the photographed images for all the bit recording regions to be read can be obtained. .