JP2015022175A - 硬化性樹脂組成物、及びそのパターン硬化膜 - Google Patents
硬化性樹脂組成物、及びそのパターン硬化膜 Download PDFInfo
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- JP2015022175A JP2015022175A JP2013150819A JP2013150819A JP2015022175A JP 2015022175 A JP2015022175 A JP 2015022175A JP 2013150819 A JP2013150819 A JP 2013150819A JP 2013150819 A JP2013150819 A JP 2013150819A JP 2015022175 A JP2015022175 A JP 2015022175A
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- acrylate
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- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 17
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- 125000000962 organic group Chemical group 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 3
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- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 7
- GTYRFVGHYNRSKT-UHFFFAOYSA-N 3-benzylpyrrole-2,5-dione Chemical compound O=C1NC(=O)C(CC=2C=CC=CC=2)=C1 GTYRFVGHYNRSKT-UHFFFAOYSA-N 0.000 description 7
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 7
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Images
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Abstract
Description
(1) アルカリ可溶性樹脂、ラジカル重合性単量体及び光重合開始剤を含む硬化性樹脂組成物において、該アルカリ可溶性樹脂が、下記式(1)で表される構成単位を有する樹脂であり、該光重合開始剤の最大吸収波長は230nm〜360nmの範囲であることを特徴とする硬化性樹脂組成物。なお、アルカリ可溶性樹脂は下記式(1)で表される構成単位を主鎖中に有することが好ましい。
(2) 上記アルカリ可溶性樹脂が下記式(2)で表される単量体を含む単量体成分を重合する工程を含む製造方法により得られることを特徴とする(1)に記載の硬化性樹脂組成物。
(3) 上記光重合開始剤が、α−アミノケトン系化合物であることを特徴とする(1)または(2)に記載の硬化性樹脂組成物。
(4) 上記光重合開始剤の配合量はアルカリ可溶性樹脂とラジカル重合性単量体の総量に対し、0.5〜35質量%であることを特徴とする(1)〜(3)のいずれかに記載の硬化性樹脂組成物。
(5) (1)〜(4)のいずれかに記載の硬化性樹脂組成物により形成されることを特徴とするパターン硬化膜。
(6) パターン硬化膜の垂直方向の断面において、上底幅R1が下底幅R2以下であることを特徴とする(5)に記載のパターン硬化膜。
(7) (5)または(6)に記載のパターン硬化膜を有することを特徴とする表示装置用部材。
(8) (5)または(6)に記載のパターン硬化膜を有することを特徴とする表示装置。
よって、カラーフィルター用レジストには、着色レジスト(赤色,緑色,青色の各画素やブラックマトリクス形成用のレジスト)、フォトスペーサー用レジスト、保護膜用透明レジスト、層間絶縁膜用レジストなど、カラーフィルターを構成する各部位に対応したレジストがある。
(A)アルカリ可溶性樹脂
本発明のアルカリ可溶性樹脂は、式(1)で表される構成単位を主鎖中に有することを特徴とするアルカリ可溶性樹脂であり、密着性、硬化性、乾燥再溶解性などカラーフィルターを作製する際の製版性に寄与する基本性能や、耐熱性や透明性などカラーフィルターの信頼性や分光特性に寄与する基本性能に優れる。
上記アルカリ可溶性樹脂における式(1)で表される構成単位のRは、水素原子、または炭素数が1〜30の有機基を表す。上記のように、本発明の構成成分であるアルカリ可溶性樹脂の各性能の発現は、主鎖中のテトラヒドロフラン環、及びテトラヒドロフラン環の両隣にあるメチレン基に起因するため、Rは、目的や用途に合わせて、適宜選択すればよい。
(B)ラジカル重合性単量体
ラジカル重合性単量体は、電磁波(赤外線、紫外線、X線等)、電子線などの活性エネルギー線の照射等により重合するラジカル重合性不飽和基を有する低分子化合物であり、本発明の硬化性樹脂組成物に硬化性を付与する。ラジカル重合性単量体は、ラジカル重合性不飽和基を同一分子内にひとつだけ有する単官能性のラジカル重合性単量体と、2個以上有する多官能性のラジカル重合性単量体に分類することができ、硬化性の点で多官能性のラジカル重合性単量体が好ましい。このようなラジカル重合性単量体としては、従来公知のものが使用でき、目的、用途に応じて1種または2種以上を適宜選択すればよい。
(C)光重合開始剤
本発明の硬化性樹脂組成物は、最大吸収波長が230nm〜360nmの範囲である光重合開始剤を1種または2種以上含む。また、必要に応じて従来公知の光増感剤、光ラジカル重合促進剤等を1種または2種以上添加することも好ましい。
例えば、他の光重合開始剤の含有割合は、上記α−アミノケトン系化合物と他の光重合開始剤の合計質量に対して、好ましくは5質量%〜40質量%であり、より好ましくは5質量%〜30質量%であり、さらに好ましくは5質量%〜20質量%である。このような範囲であれば、さらに耐熱性、基板密着性に優れ、テーパー形状のパターン硬化膜を形成し得る硬化性樹脂組成物を得ることができる。
(D)溶媒
溶媒は、粘度を下げ取扱い性を向上する、乾燥により塗膜を形成する、色材の分散媒とする、等のために使用する、硬化性樹脂組成物中の各成分を溶解、或いは分散できる低粘度の有機溶媒或いは水である。
色材は、本発明の硬化性樹脂組成物を着色して、さらに硬化性着色樹脂組成物とするものであり、従来公知の顔料、染料が使用できるが、耐久性の点では顔料(有機顔料、無機顔料)が好ましい。表示画面の輝度の点では染料が好ましい。
(F)その他の成分
本発明の硬化性樹脂組成物は、各用途の目的や要求特性に応じて、フィラー、アルカリ可溶性樹脂以外のバインダー樹脂、分散剤、耐熱向上剤、現像助剤、可塑剤、重合禁止剤、紫外線吸収剤、酸化防止剤、艶消し剤、消泡剤、レベリング剤、帯電防止剤、分散剤、スリップ剤、表面改質剤、揺変化剤、揺変助剤、シラン系やアルミニウム系、チタン系などのカップリング剤、キノンジアジド化合物、多価フェノール化合物、カチオン重合性化合物、酸発生剤等の上記成分以外の成分が配合されても良い。以下に、本発明の硬化性樹脂組成物をカラーフィルター用レジストとして使用する場合に好適なその他の成分について説明する。
<本発明の構成成分であるアルカリ可溶性樹脂以外のバインダー樹脂>
カラーフィルター用レジストの多様な特性のバランス調整や、レジストの低コスト化等のために、本発明の構成成分である特定のアルカリ可溶性樹脂以外のバインダー樹脂を使用することができる。このようなバインダー樹脂としては、具体的には、例えば、(メタ)アクリル酸/(メタ)アクリル酸エステル共重合体、(メタ)アクリル酸/芳香族ビニル共重合体、(メタ)アクリル酸/(メタ)アクリル酸エステル/芳香族ビニル共重合体、(メタ)アクリル酸/(メタ)アクリル酸エステル共重合体/N置換マレイミド共重合体、(メタ)アクリル酸/芳香族ビニル/N置換マレイミド共重合体、(メタ)アクリル酸/(メタ)アクリル酸エステル/ポリスチレンマクロモノマー共重合体などの(メタ)アクリル酸共重合体;(メタ)アクリル酸共重合体の側鎖にラジカル重合性不飽和基を導入したもの;エポキシ樹脂に(メタ)アクリル酸を付加しさらに多塩基酸無水物を反応させたようなビニルエステル型のアルカリ可溶性樹脂などが挙げられる。
<分散剤>
分散剤は、本発明の硬化性樹脂組成物に色材を加え感光性着色樹脂組成物とする場合には、上記成分とともに配合するのが望ましい成分である。分散剤とは、色材への相互作用部位と分散媒(溶媒やバインダー樹脂)への相互作用部位とを有し、色材の分散媒への分散を安定化する働きを持つものであり、一般的には、樹脂型分散剤(高分子分散剤)、界面活性剤(低分子分散剤)、色素誘導体に分類される。このような分散剤としては、従来公知の分散剤を使用することができる。
<耐熱向上剤>
本発明の硬化性樹脂組成物は、耐熱性や強度向上のために、N−(アルコキシメチル)メラミン化合物、2個以上のエポキシ基やオキセタニル基を有する化合物を添加することができる。特に、フォトスペーサー用レジスト、保護膜用透明レジストや層間絶縁膜用レジストとする場合には、これらの使用が好ましい。
<レベリング剤>
本発明の硬化性樹脂組成物は、レベリング性向上のために、レベリング剤を添加することができる。レベリング剤としては、フッ素系、シリコン系の界面活性剤が好ましい。
<カップリング剤>
本発明の硬化性樹脂組成物は、密着性向上のために、カップリング剤を添加することができる。カップリング剤としては、シラン系のカップリング剤が好ましく、具体的にはエポキシ系、メタクリル系、アミノ系のシランカップリング剤が挙げられ、中でもエポキシ系のシランカップリング剤が好ましい。
<現像助剤>
本発明の硬化性樹脂組成物は、現像性向上のために、(メタ)アクリル酸、酢酸、プロピオン酸などのモノカルボン酸類;マレイン酸、フマル酸、コハク酸、テトラヒドロフタル酸、トリメリット酸などの多価カルボン酸類;無水マレイン酸、無水コハク酸、テトラヒドロフタル酸無水物、トリメリット酸無水物などの、カルボン酸無水物類などを、現像助剤として添加することができる。
本発明のパターン硬化膜は、テーパー形状を有することが好ましい。図1、図2に示す通り、本発明では、パターン硬化膜の垂直方向の断面において、上底幅(上底の長さ)をR1、下底幅(下底の長さ)をR2とし、R2/R1≧1をテーパー形状、R2/R1<1を逆テーパー形状と定義する。パターン硬化膜の垂直方向の断面において、上底幅R1が下底幅R2以下である1以上(テーパー形状)が好ましく、より好ましくは1〜1.5であり、より好ましくは1〜1.4であり、さらに好ましくは1〜1.3であり、特に好ましくは1〜1.25である。このような範囲のパターン硬化膜は、強度や基板密着性に優れ、液晶層への気泡の混入を防いで、表示装置の表示性能の向上に寄与し得る。
パターン硬化膜の形状が上記範囲外の逆テーパーであると、ITOを蒸着させる際、断線したり、空気をかみやすくなる為、液晶内へ空気が混入し色むら等の原因になり得る。なお、パターン硬化膜の形状が、曲線や変形している形状など複雑な場合は、断面積が最も小さい方向の断面において、上底幅(上底の長さ)と下底幅(下底の長さ)を計測する。なお、長さを計測する以外にも、形状評価の指標として面積を計測する場合は特定の上部の面積S1、下部の面積S2とし、S2/S1≧1である形状が好ましい。
実施例における評価方法は以下のとおりである。
(1)重量平均分子量:Mw
GPC(HLC−8220GPC、東ソー社製)にてTHFを溶離液とし、カラムにTSKgel SuperHZM−N(東ソー社製)を用いて測定し、標準ポリスチレン換算にて算出した。
(2)固形分
製造例で調製した共重合体溶液をアルミカップに約0.3gはかり取り、アセトン約1gを加えて溶解させた後、常温で自然乾燥させた。その後、熱風乾燥機(商品名:PHH−101、エスペック株社製)を用い、140℃で3時間乾燥した後、デシケータ内で放冷し、重量を測定した。その重量減少量から、ポリマー溶液の固形分(樹脂)の重量を計算した。
(3)酸価
製造例で調製した共重合体溶液を1.5g精秤し、アセトン90gと水10gの混合溶媒に溶解させ、0.1NのKOH水溶液で滴定した。滴定は、自動滴定装置(商品名:COM−555、平沼産業社製)を用いて行い、固形分濃度から、ポリマー1g当たりの酸価を求めた(mgKOH/g)。
(4)現像残渣
現像後、感光性樹脂組成物のとけ残りの有無を目視観察にて評価した。
(5)現像速度
現像した際、パターンが形成可能な最短時間を現像速度とした。
(6)パターンの密着性
5から20μmの1μm刻みのラインアンドスペースフォトマスクで形成されたパターンの欠損の有無を目視にて観察し、欠損が見られたパターンを形成したラインアンドスペースフォトマスクの幅を記録した。また、欠損が見られなかった場合は○とした。
(7)パターンの幅および高さ
パターンの幅および高さは、レーザー顕微鏡(商品名「VK−9700」、キーエンス社製)を用いて測定した。15μmのラインアンドスペースフォトマスクで形成したパターンを測定した。
(8)パターンの形状
パターンの形状はFE−SEM(商品名「S-4800」、日立製作所製)を用いて測定した。15μmのラインアンドスペースフォトマスクで得られたパターンをガラス面の水平方向から測定を行い、パターン上底幅をR1、パターン下底幅をR2としたとき、R2/R1が1以上をテーパー型、1未満を逆テーパー型とした。
[製造例1]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、(α−アリルオキシメチル)アクリル酸メチル(AMA-M)15g、メタクリル酸(MAA)25g、ベンジルメタクリレート(BzMA)60g、t−ブチルパーオキシ−2−エチルヘキサノエート(商品名「パーブチル(登録商標)O」、日本油脂社製、以下PBOともいう)2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−メルカプトプロピオン酸(β−MPA)2.3g、プロピレングリコールメチルエーテルアセテート(PGMEA)18gを投入し、撹拌混合した。
[製造例2]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA25g、シクロヘキシルメタクリレート(CHMA)60g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例3]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA25g、CHMA60g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA3.5g、PGMEA18gを投入し、撹拌混合した。
[製造例4]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA25g、CHMA60g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA1g、PGMEA18gを投入し、撹拌混合した。
[製造例5]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA30.5g、CHMA54.5g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例6]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA14g、CHMA71g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA1.4g、PGMEA18gを投入し、撹拌混合した。
[製造例7]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA13g、CHMA72g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2g、PGMEA18gを投入し、撹拌混合した。
[製造例8]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA36g、CHMA49g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.6g、PGMEA18gを投入し、撹拌混合した。
[製造例9]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、アクリル酸(AA)21g、CHMA64g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例10]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M30g、MAA25g、CHMA45g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例11]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA25g、t−ブチルメタクリレート(tBuMA)60g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例12]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA25g、ジシクロペンタニルメタクリレート(DCPMA)60g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例13]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA25g、メチルメタクリレート(MMA)60g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例14]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、AMA-M15g、MAA25g、スチレン(ST)60g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例15]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、MAA25g、CHMA75g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例16]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、ベンジルマレイミド(BzMI)15g、MAA25g、CHMA60g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例17]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、BzMI15g、MAA25g、DCPMA60g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
[製造例18]
反応槽として冷却管を付けたセパラブルフラスコを準備した。他方、モノマー滴下槽中に、モノマー組成物として、ジメチル−2,2‘−[オキシビス(メチレン)]ビス−2−プロペノエート(MD)15g、MAA25g、CHMA60g、PBO2gを投入し、撹拌混合した。また、連鎖移動剤滴下槽中に、連鎖移動剤溶液として、β−MPA2.3g、PGMEA18gを投入し、撹拌混合した。
β‐MPA:β−メルカプトプロピオン酸
AMA-M:(α−アリルオキシメチル)アクリル酸メチル
BzMI:ベンジルマレイミド
MD:ジメチル−2,2'−[オキシビス(メチレン)]ビス−2−プロペノエート
MAA:メタクリル酸
AA:アクリル酸
BzMA:ベンジルメタクリレート
CHMA:メタクリル酸シクロヘキシル
tBuMA:t−ブチルメタクリレート
DCPMA:ジシクロペンタニルメタクリレート
MMA:メタクリル酸メチル
ST:スチレン
GMA:メタクリル酸グリシジル(グリシジルメタクリレート)
Mw:最終的に得られた重合体の重量平均分子量
DPHA:ジペンタエリスリトールヘキサアクリレート(商品名、共栄社化学社製)
[実施例1]
バインダー樹脂として上記共重合体溶液(A−1)10.7g(すなわち、樹脂4.1g)、分散剤としてDISPERBYK-2001 2.2g(不揮発分1.0g:ビックケミ―・ジャパン製以下BYK2001と表す)、色材としてC.I.ピグメントレッド254(Irgaphor Red BT−CF:チバスペシャリティケミカルズ製、以下PR254と表す)4.4g、C.I.ピグメントレッド177(Cromophtal Red A3B:チバスペシャリティケミカルズ製、以下PR177と表す)1.9gをマヨネーズ瓶にはかり取り、不揮発分濃度が20重量%となるようPGMEAで希釈した。これに径1.0mmのジルコニアビーズ50gを加え、フタをした。これをペイントシェーカーで3時間振とうして分散処理を行った。この分散液に多官能モノマーとしてジペンタエリスリトールヘキサアクリレート(共栄社化学社製、以下DPHAと表す)2.8g、および光重合開始剤として2−メチル−1−[4−(メチルチオ)フェニル]−2−モルホリノ−プロパン−1−オン(商品名「IRGACURE(登録商標)907」、BASFジャパン社製、以下Irg907と表す)0.5gと2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタノン−1(商品名「IRGACURE(登録商標)369」、BASFジャパン社製、以下Irg369と表す)1.0gを加え、不揮発分濃度が20重量%となるようにPGMEAで希釈した。ジルコニアビーズを除去した後、孔径1.0μmのフィルタでろ過し、感光性樹脂組成物を調製した。
[実施例2〜14]
感光性樹脂組成物の組成を表2に示す組成とした以外は、実施例1と同様にしてラインアンドスペースパターンを形成し、実施例1と同様の評価に供した。結果を表2、表3に示す。
[比較例1〜4]
感光性樹脂組成物の組成を表3に示す組成とした以外は、実施例1と同様にしてラインアンドスペースパターンを形成し、実施例1と同様の評価に供した。結果を表4に示す。
表2、表3及び表4の結果より、下記のことが確認された。
まず実施例1〜14及び比較例1は、アルカリ可溶性樹脂の共重合成分として(α−アリルオキシメチル)アクリル酸メチル(AMA−M)を用いた例であるが、実施例1〜14と比較例1との比較により、光重合開始剤の最大吸収波長が230〜360nmであるIrg907、Irg369を使用している実施例1〜14の優位性(特に密着性、現像速度、形状)を確認できる。
実施例1〜14及び比較例2、4,5,6は、光重合開始剤として光重合開始剤の最大吸収波長が230〜360nmであるIrg907、Irg369を用いた例であるが、実施例1〜14と比較例2,4,5,6との比較により、アルカリ可溶性樹脂の共重合成分として(α−アリルオキシメチル)アクリル酸メチル(AMA−M)を使用している実施例1〜14の優位性(特に密着性、現像速度、形状)を確認できる。
また、パターン硬化膜の形状について、実施例1〜14はテーパー形状となっており液晶層への気泡の混入を防いで、表示装置の表示性能の向上に寄与し得る。
Claims (8)
- 前記光重合開始剤が、α−アミノケトン系化合物であることを特徴とする請求項1または2に記載の硬化性樹脂組成物。
- 前記光重合開始剤の配合量はアルカリ可溶性樹脂とラジカル重合性単量体の総量に対し、0.5〜35質量%であることを特徴とする請求項1〜3のいずれかに記載の硬化性樹脂組成物。
- 請求項1〜4のいずれかに記載の硬化性樹脂組成物により形成されることを特徴とするパターン硬化膜。
- パターン硬化膜の垂直方向の断面において、上底幅R1が下底幅R2以下であることを特徴とする請求項5に記載のパターン硬化膜。
- 請求項5または6に記載のパターン硬化膜を有することを特徴とする表示装置用部材。
- 請求項5または6に記載のパターン硬化膜を有することを特徴とする表示装置。
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