JP2014232009A5 - - Google Patents
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- JP2014232009A5 JP2014232009A5 JP2013111978A JP2013111978A JP2014232009A5 JP 2014232009 A5 JP2014232009 A5 JP 2014232009A5 JP 2013111978 A JP2013111978 A JP 2013111978A JP 2013111978 A JP2013111978 A JP 2013111978A JP 2014232009 A5 JP2014232009 A5 JP 2014232009A5
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- lens group
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- reflecting mirror
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- 230000003287 optical Effects 0.000 claims description 23
- 238000005259 measurement Methods 0.000 claims description 12
Description
（１）請求項１に記載の発明による光学系は、参照光と被検平面で反射された測定光とが干渉することで形成される干渉縞に基づいて被検平面の形状を測定する面形状測定装置に用いられ、測定光を、光束径を拡大した平行光に変換して被検平面へ導く光学系であって、被検平面から遠い順に、全体として正の屈折力を有するレンズ群と、レンズ群の透過光を反射すると共に平行光に変換し、被検平面に入射させる凹面反射鏡と、からなり、レンズ群のうち測定光の集光点に最も近いレンズは、ペッツバール和を補正するための凹レンズであることを特徴とする。
（２）請求項７に記載の発明による光学系は、光を反射する平面から近い順に、全体として正の屈折力を有するレンズ群と、レンズ群を透過した光を反射することにより平行光を平面に入射させる凹面反射鏡とを有し、レンズ群のうち、レンズ群を透過した光の集光点に最も近いレンズは、ペッツバール和を補正するための凹レンズであることを特徴とする。
（３）請求項９に記載の発明による面形状測定装置は、参照光と被検平面で反射された測定光とが干渉することで形成される干渉縞に基づいて被検平面の形状を測定する面形状測定装置であって、請求項１〜８のいずれか一項に記載の光学系を備えることを特徴とする。
(1) The optical system according to the first aspect of the present invention is a surface for measuring the shape of the test plane based on interference fringes formed by interference between the reference light and the measurement light reflected by the test plane. An optical system that is used in a shape measuring device, converts measurement light into parallel light with an enlarged light beam diameter and guides it to a test plane, and a lens group having a positive refractive power as a whole in order from the test plane. And a concave reflecting mirror that reflects the transmitted light of the lens group and converts it into parallel light and makes it incident on the plane to be examined, and the lens closest to the measurement light condensing point in the lens group has a Petzval sum. It is a concave lens for correction.
(2) The optical system according to the seventh aspect of the invention is configured to reflect parallel light by reflecting a lens group having a positive refractive power as a whole and light transmitted through the lens group in order from the plane reflecting light. A concave reflecting mirror that is incident on a plane, and the lens closest to the condensing point of the light transmitted through the lens group is a concave lens for correcting the Petzval sum.
(3) The surface shape measuring apparatus according to the ninth aspect of the invention measures the shape of the test plane based on the interference fringes formed by the interference between the reference light and the measurement light reflected by the test plane. It is a surface shape measuring apparatus which is provided, Comprising: The optical system as described in any one of Claims 1-8 is provided.
Claims (9)
前記被検平面から遠い順に、全体として正の屈折力を有するレンズ群と、前記レンズ群の透過光を反射すると共に平行光に変換し、前記被検平面に入射させる凹面反射鏡と、からなり、
前記レンズ群のうち前記測定光の集光点に最も近いレンズは、ペッツバール和を補正するための凹レンズであることを特徴とする光学系。 It is used in a surface shape measuring device that measures the shape of the test plane based on interference fringes formed by interference between the reference light and the measurement light reflected by the test plane. An optical system that converts the light into expanded parallel light and guides it to the plane to be examined.
A lens group having a positive refractive power as a whole, in order from the test plane, and a concave reflecting mirror that reflects the transmitted light of the lens group and converts it into parallel light and makes it incident on the test plane. ,
In the optical system, the lens closest to the condensing point of the measurement light in the lens group is a concave lens for correcting Petzval sum.
前記レンズ群のうち前記凹面反射鏡に最も近いレンズは、前記ペッツバール和を補正するための凹レンズであることを特徴とする光学系。 The optical system according to claim 1.
An optical system, wherein a lens closest to the concave reflecting mirror in the lens group is a concave lens for correcting the Petzval sum.
以下の条件式（１）を満足することを特徴とする光学系。
Ｐｓｕｍ：前記光学系のペッツバール和
Ｎ：前記レンズ群を構成するレンズの総数
ｎｊ：前記レンズ群におけるｊ番目のレンズの屈折率
ｆｊ：前記レンズ群におけるｊ番目のレンズの焦点距離
ｆｍ：前記凹面反射鏡の焦点距離 The optical system according to claim 1 or 2,
An optical system characterized by satisfying the following conditional expression (1).
P sum : Petzval sum of the optical system N: Total number of lenses constituting the lens group n j : Refractive index of the j-th lens in the lens group f j : Focal length of the j-th lens in the lens group f m : Focal length of the concave reflecting mirror
前記測定光を前記レンズ群の光軸方向に反射して前記レンズ群に導く反射部材をさらに備えることを特徴とする光学系。 In the optical system according to any one of claims 1 to 3,
An optical system further comprising a reflecting member that reflects the measurement light in the optical axis direction of the lens group and guides the measurement light to the lens group.
前記測定光を前記レンズ群の光軸方向に反射して前記レンズ群に導く第１反射部材と、
前記レンズ群を透過した測定光を反射して前記凹面反射鏡に導く第２反射部材と、
をさらに備えることを特徴とする光学系。 In the optical system according to any one of claims 1 to 3,
A first reflecting member that reflects the measurement light in the optical axis direction of the lens group and guides it to the lens group;
A second reflecting member that reflects measurement light transmitted through the lens group and guides it to the concave reflecting mirror;
An optical system further comprising:
前記レンズ群に対して前記凹面反射鏡の反対側に配置された反射部材をさらに備え、
前記測定光は、前記凹面反射鏡の中心部に形成された穴を通過して前記レンズ群に入射され、前記レンズ群を透過した後、前記反射部材で反射されて前記凹面反射鏡に導かれることを特徴とする光学系。 In the optical system according to any one of claims 1 to 3,
A reflection member disposed on the opposite side of the concave reflecting mirror with respect to the lens group;
The measurement light passes through a hole formed in the center of the concave reflecting mirror, enters the lens group, passes through the lens group, is reflected by the reflecting member, and is guided to the concave reflecting mirror. An optical system characterized by that.
前記レンズ群のうち、前記レンズ群を透過した光の集光点に最も近いレンズは、ペッツバール和を補正するための凹レンズであることを特徴とする光学系。Among the lens groups, the lens closest to the condensing point of the light transmitted through the lens group is a concave lens for correcting Petzval sum.
以下の条件式（１）を満足することを特徴とする光学系。An optical system characterized by satisfying the following conditional expression (1).
ＰP ｓｕｍsum ：前記光学系のペッツバール和: Petzval sum of the optical system
Ｎ：前記レンズ群を構成するレンズの総数N: Total number of lenses constituting the lens group
ｎn ｊj ：前記レンズ群におけるｊ番目のレンズの屈折率: Refractive index of the j-th lens in the lens group
ｆf ｊj ：前記レンズ群におけるｊ番目のレンズの焦点距離: Focal length of the j-th lens in the lens group
ｆf ｍm ：前記凹面反射鏡の焦点距離: Focal length of the concave reflecting mirror
請求項１〜８のいずれか一項に記載の光学系を備えることを特徴とする面形状測定装置。
A surface shape measuring device that measures the shape of the test plane based on interference fringes formed by interference between reference light and measurement light reflected by the test plane,
Surface shape measuring apparatus comprising the optical system according to any one of claims 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013111978A JP6251982B2 (en) | 2013-05-28 | 2013-05-28 | Optical system and surface shape measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013111978A JP6251982B2 (en) | 2013-05-28 | 2013-05-28 | Optical system and surface shape measuring device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014232009A JP2014232009A (en) | 2014-12-11 |
| JP2014232009A5 true JP2014232009A5 (en) | 2016-07-14 |
| JP6251982B2 JP6251982B2 (en) | 2017-12-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013111978A Active JP6251982B2 (en) | 2013-05-28 | 2013-05-28 | Optical system and surface shape measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6251982B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2017616B1 (en) * | 2016-10-13 | 2018-04-20 | Miele & Cie | Apparatus for detecting condensation and sterilizer with such apparatus |
| NL2017617B1 (en) * | 2016-10-13 | 2018-04-20 | Miele & Cie | Sterilizer apparatus with measurement chamber having orifice |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60166913A (en) * | 1983-10-07 | 1985-08-30 | Sankyo Seiki Mfg Co Ltd | High resolving power lens for uniform speed scanning |
| US5155554A (en) * | 1990-12-20 | 1992-10-13 | General Signal Corporation | Large aperture reflective interferometer for measuring convex spherical surfaces |
| JP3455264B2 (en) * | 1993-12-28 | 2003-10-14 | ペンタックス株式会社 | Interferometer |
| JPH11108624A (en) * | 1997-10-03 | 1999-04-23 | Nikon Corp | Method and device for measuring surface shape, and for measuring wave front aberration |
| JP2009145724A (en) * | 2007-12-17 | 2009-07-02 | Canon Inc | Projection optical system and exposure device with the same |
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- 2013-05-28 JP JP2013111978A patent/JP6251982B2/en active Active
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