JP2014217980A - Paste printing device and paste printing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a paste printing device and a paste printing method which can prevent paste from remaining on a substrate with a mask after supplying the paste and can prevent occurrence of print failure.SOLUTION: A plate-like member 14 having an approximately equal thickness to a substrate 2M with a mask is made in contact with an upper surface of a carrier jig 13, on which the substrate 2M with the mask is mounted on an upper surface, by including the substrate 2M with the mask in an opening part 14h formed on the plate-like member 14. Then, a blade 15a of a paste extrusion head 15 is slid on the substrate 2M with the mask and the plate-like member 14, and paste Pst is supplied in a pattern hole 3h of the substrate 2M with the mask mounted on the carrier jig 13.

Description

  The present invention provides a paste printing apparatus and paste printing for supplying a paste to a substrate with a mask in which a film-like mask having a pattern hole formed is attached to the substrate, and printing the paste on the substrate through the pattern hole of the mask It aims to provide a method.

  Conventionally, as a method for printing a paste on a substrate, a film-like mask provided with a pattern hole is pasted on the substrate, the paste is supplied to the substrate with the mask and the paste is pushed into the pattern hole, and then the mask A method of peeling a mask from an attached substrate is known. A paste printing apparatus for executing such a printing method of paste makes a paste on a substrate with a mask by bringing the inner edge of the opening of the plate-like member into contact with the substrate with a mask and sliding a squeegee within the opening of the plate-like member. (For example, Patent Document 1).

JP-A-4-173385

  However, in the above-described conventional paste printing apparatus, the inner edge of the opening of the plate-shaped member is in contact with the substrate with the mask. There is a possibility that the residual paste remains on the substrate with the mask, and the residual paste adheres to the paste in the pattern hole of the mask, resulting in a printing failure.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a paste printing apparatus and a paste printing method in which no paste remains on a substrate with a mask after the paste is supplied, and printing defects can be prevented.

  The paste printing apparatus according to claim 1, wherein the paste is supplied to a substrate with a mask in which a film-like mask in which pattern holes are formed is attached to the substrate, and the paste is applied to the substrate through the pattern holes of the mask. A paste printing apparatus for printing a paste, comprising a carrier jig to which the substrate with a mask is attached on an upper surface and a thickness substantially the same as the substrate with a mask, and including the substrate with a mask in a formed opening. The sliding member is slid on the plate-like member that is in contact with the upper surface of the carrier jig, the substrate with the mask attached to the carrier jig, and the plate-like member that is in contact with the carrier jig. Paste supplying means for supplying paste into the pattern hole of the substrate with mask attached to the carrier jig.

  The paste printing apparatus according to claim 2 is the paste printing apparatus according to claim 1, wherein an extending direction of the sliding member is relative to a direction orthogonal to a traveling direction of the sliding member in a plan view. Leaning.

  The paste printing apparatus according to claim 3 is the paste printing apparatus according to claim 1 or 2, wherein the plate-like member is adsorbed through an adsorption hole opened in the upper surface of the carrier jig. An adsorption mechanism for bringing the plate-like member into close contact with the upper surface of the carrier jig is provided.

  The paste printing apparatus according to claim 4 is the paste printing apparatus according to any one of claims 1 to 3, wherein the paste supply means presses the paste from between the two sliding members facing each other. The paste press-out head.

  The paste printing method according to claim 5, wherein the paste is supplied to a substrate with a mask in which a film-like mask in which pattern holes are formed is attached to the substrate, and the paste is applied to the substrate through the pattern holes of the mask. A paste printing method for printing a paste, wherein a plate-like member having substantially the same thickness as the substrate with a mask is formed on the upper surface of a carrier jig to which the substrate with a mask is attached. A plate-shaped member contacting step of bringing the masked substrate into contact with the opened opening, and supplying the paste on the substrate with the mask attached to the carrier jig and the plate-shaped member contacting the carrier jig A paste supplying step of supplying a paste into the pattern hole of the substrate with mask attached to the carrier jig by sliding a sliding member of the means.

  In the present invention, since the plate-like member having substantially the same thickness as the substrate with mask is included in the opening and brought into contact with the upper surface of the carrier jig, the paste supply means The sliding member slides on the plate-like member and the masked substrate having the same height, and supplies the paste into the pattern holes of the masked substrate. For this reason, even after the plate member is removed after the paste is supplied, the paste does not remain on the masked substrate, and the occurrence of printing defects can be prevented.

The side view of the paste printing apparatus in one embodiment of this invention (A) Exploded perspective view (b) Perspective view of a part of a paste printing apparatus according to an embodiment of the present invention The perspective view of a part of paste printing device in one embodiment of the present invention The top view of the paste printing apparatus in one embodiment of this invention 1 is a side view of a part of a paste printing apparatus according to an embodiment of the present invention. The block diagram which shows the control system of the paste printing apparatus in one embodiment of this invention The side view of the paste printing apparatus in one embodiment of this invention (A) (b) (c) Side view of main part of paste printing apparatus in one embodiment of the present invention The perspective view of a part of paste printing device in one embodiment of the present invention The partial expanded side view of the paste printing apparatus in one embodiment of this invention (A) (b) The partial expanded side view of the paste printing apparatus in one embodiment of this invention (A) (b) The partial expanded side view of the board | substrate with a mask by which the paste was printed by the paste printing apparatus in one embodiment of this invention

  Embodiments of the present invention will be described below with reference to the drawings. A paste printing apparatus 1 shown in FIG. 1 has a mask-equipped substrate 2M (FIGS. 2A and 2B) in which a film-like mask 3 in which pattern holes 3h are formed is attached to the upper surface (printed surface 2a) of the substrate 2. Is also a device that supplies the paste Pst to the upper surface thereof as a printing object and prints the paste Pst on the substrate 2 through the pattern holes 3h of the mask 3. In the present embodiment, for convenience of explanation, the direction perpendicular to the paper surface of FIG. 1 is defined as the X-axis direction, and the left-right direction of FIG. 1 is defined as the Y-axis direction. Further, the vertical direction of the paper surface of FIG.

  In FIG. 1, the paste printing apparatus 1 includes a moving table 11 on a base 10, and the holding table 12 is moved up and down by the moving table 11. On the upper surface of the holding table 12, a rectangular carrier jig 13 is clamped by a pair of clamp members 12C (arrow A shown in FIG. 2B) and held. A masked substrate 2M is detachably attached to the upper surface of the carrier jig 13 via an adhesive sheet 13S (FIGS. 2A and 2B).

  Here, the substrate with mask 2 </ b> M is attached in such a posture that each side is parallel to the side of the carrier jig 13. Therefore, in a state where the carrier jig 13 is held on the upper surface of the holding table 12, each side of the masked substrate 2M has a posture parallel to the X axis or the Y axis (FIGS. 2A and 2B). )).

  In FIG. 3, above the holding table 12, a metal plate member 14 having four sides supported by a rectangular frame member 14W is installed in a horizontal posture. The plate-like member 14 has a shape extending in a horizontal plane, and an opening portion 14h having a size and shape (here, rectangular) capable of including the masked substrate 2M is formed at the center thereof. . In the present embodiment, as shown in FIG. 3, the opening 14h of the plate-like member 14 is brought into contact with the carrier jig 13 with the plate-like member 14 including the masked substrate 2M in the opening 14h. And a size and shape (a size and shape that is slightly larger than the mask-equipped substrate 2M) in which the gap between each inner side of the opening 14h and each side of the mask-equipped substrate 2M is minimized. However, the shape and size of the opening 14h of the plate-like member 14 are not particularly limited as long as the substrate with mask 2M can be included.

  In FIG. 1, a paste pressing head 15 is provided above a plate-like member 14 so as to be movable by a head moving means 16. The head moving means 16 drives the first ball screw 16a extending in the Y-axis direction above the plate-like member 14 by the first motor 16b to move the paste pressing head 15 in the horizontal direction and extends in the Z-axis direction. The second ball screw 16c is driven by the second motor 16d to move the paste pressing head 15 in the vertical direction.

  In FIG. 1, the paste press-out head 15 accommodates the paste Pst therein, and two blades 15a (disposed at the lower end facing the Y-axis direction (that is, the moving direction of the paste press-out head 15)). Sliding member). The two blades 15a extend in a direction inclined in a horizontal plane with respect to a direction (X-axis direction) orthogonal to the traveling direction of the paste press-out head 15 (FIG. 4). The two blades 15a are inclined downward toward the lower portion of the center portion of the paste press-out head 15, and the tip portions thereof are close to each other and have a predetermined distance d in the horizontal direction (Y-axis direction). (FIG. 5). The paste pressure head 15 is provided with paste pressure means 15b such as a cylinder. The paste pressure head 15 pressures the paste Pst from between the two blades 15a by the operation of the paste pressure means 15b. .

  2A, 2 </ b> B, and 3, a plurality of suction holes 13 </ b> K are provided at positions surrounding the adhesive sheet 13 </ b> S of the carrier jig 13, and these suction holes 13 </ b> K are formed by the carrier jig 13. While being held by the holding table 12, it is connected to the vacuum suction device 17 through a plurality of connection holes 12K formed in the holding table 12 and a vacuum pipe line 17L connected to these connection holes 12K (FIG. 5).

  The vacuum suction device 17 supplies a vacuum pressure to each suction hole 13K of the carrier jig 13 via the vacuum pipe line 17L and the connection hole 12K, and generates a suction force on the upper surface of the carrier jig 13, thereby generating a carrier jig. The plate-like member 14 brought into contact with 13 is sucked and brought into close contact with the carrier jig 13. As described above, the connection hole 12K, the vacuum pipe line 17L, and the vacuum suction device 17 suck the plate member 14 through the suction hole 13K opened on the upper surface of the carrier jig 13 to thereby remove the plate member 14 from the carrier jig 13. The adsorbing mechanism 18 is configured to be in close contact with the upper surface (FIG. 5). Each suction hole 13 </ b> K of the carrier jig 13 is provided at a position where the vicinity of the inner edge of the opening 14 h of the plate-like member 14 can be sucked when the plate-like member 14 contacts the carrier jig 13. Yes.

  In FIG. 6, the lifting and lowering of the holding table 12 is performed when the control device 20 provided in the paste printing apparatus 1 controls the operation of the moving table 11, and the movement of the paste pressing head 15 in the horizontal direction and the vertical direction is controlled by the control device 20. Is performed by controlling the operation of the head moving means 16. In addition, the operation of pressing the paste Pst by the paste pressing head 15 is performed by the control device 20 controlling the operation of the paste pressing means 15b, and the operation of bringing the plate member 14 into close contact with the carrier jig 13 by the suction mechanism 18. The control device 20 controls the operation of the vacuum suction device 17.

  Next, a procedure (paste printing method) for printing the paste Pst on the masked substrate 2M by the paste printing apparatus 1 will be described. First, the control device 20 carries the carrier jig 13 to which the substrate with mask 2M is attached from the outside by carrying-in means (not shown) and holds it on the upper surface of the holding table 12 (FIG. 2B. Carrier jig holding step). . Then, the holding table 12 is raised by the control of the moving table 11, and the upper surface of the carrier jig 13 is made to be the lower surface of the plate member 14 so that the masked substrate 2 </ b> M is included in the opening 14 h of the plate member 14. Contact is made (arrow B shown in FIG. 7).

  In the state where the carrier jig 13 is in contact with the plate-like member 14 in this way, the two sides L (FIG. 4) and the plate facing the Y-axis direction of the masked substrate 2M attached to the carrier jig 13. The two inner sides facing the Y-axis direction of the opening 14h of the shaped member 14 are in a direction (X-axis direction) perpendicular to the sliding direction of the paste press-out head 15 (and hence the blade 15a) in plan view. In parallel.

  When the plate-like member 14 is brought into contact with the carrier jig 13, the control device 20 controls the operation of the vacuum suction device 17, and the plate-like member 14 brought into contact with the upper surface of the carrier jig 13 is sucked into the carrier jig 13. 13 (plate-shaped member contact process). Then, by controlling the operation of the head moving means 16, the blade 15a of the paste press-out head 15 is brought into contact with one side of both regions sandwiching the opening 14h on the plate-like member 14 in the Y-axis direction (FIG. 8). (A) and Fig. 9. Arrow C shown in the figure, blade contact step). In this state, the blade 15a of the paste press-out head 15 is inclined (angled) with respect to the two side L facing the Y-axis direction of the masked substrate 2M (FIG. 4). .

  When the control device 20 brings the blade 15a of the paste press-out head 15 into contact with the plate-like member 14, the control device 20 moves the paste press-out head 15 in the facing direction (Y-axis direction) of the blade 15a while maintaining the state. The blade 15a is slid on the masked substrate 2M and the plate-like member 14 (arrow D shown in FIG. 8B and FIG. 4), and the two blades 15a of the paste press-out head 15 are slid during the sliding. The paste Pst is discharged from between the two, and the paste Pst is supplied to the masked substrate 2M through the opening 14h of the plate member 14. Then, when the blade 15a reaches the other end side of both regions sandwiching the opening 14h on the plate-like member 14 in the Y-axis direction, the movement of the paste press-out head 15 is stopped (FIG. 8 (c)). Then, the pressing of the paste Pst from the paste pressing head 15 is stopped. Thus, the paste Pst is supplied to the upper surface (printed surface 2a) of the substrate 2 through the pattern hole 3h of the mask 3 (paste supply step).

  While the paste supplying process is being performed, the paste pressure-out head 15 pushes the paste Pst into the pattern hole 3h of the mask 3 of the masked substrate 2M (FIG. 10), but is almost the same as the masked substrate 2M. The plate-like member 14 having a thickness encloses the substrate with mask 2M in the opening 14h and is in contact with the upper surface of the carrier jig 13. The plate-like member 14 and the substrate with mask 2M are almost the same height. Therefore, the blade 15a of the paste press-out head 15 extends from one of the two side edges L facing the Y-axis direction of the substrate with mask 2M to the inner edge of the opening 14h of the plate-like member 14 facing this. Transfer smoothly (FIG. 11 (a) → FIG. 11 (b)). For this reason, since the inner edge of the opening 14h of the plate-like member 14 is in contact with the upper surface of the masked substrate 2M as in the prior art, the paste Pst accumulated in the stepped portion is attached to the mask after the plate-like member 14 is removed. There is no problem of remaining on the substrate 2M.

  Further, as described above, the blade 15a of the paste press-out head 15 is inclined (angled) with respect to the two side edges L facing the Y-axis direction of the substrate with mask 2M. When transferring from the plate-like member 14 onto the masked substrate 2M, the process proceeds with an angle with respect to the side of the masked substrate 2M. For this reason, even if the inner edge of the opening 14h of the plate-like member 14 is located outside the side of the masked substrate 2M, the blade 15a is not caught on the side of the masked substrate 2M, and smooth printing is performed. Is possible.

  Further, as described above, the suction holes 13K of the carrier jig 13 are positions where the vicinity of the inner edge of the opening 14h of the plate-like member 14 can be sucked when the plate-like member 14 comes into contact with the carrier jig 13. Therefore, when the blade 15a of the paste pressing head 15 slides on the upper surface of the plate member 14 and moves to the inner edge of the opening 14h of the plate member 14, the plate member 14 is moved by the blade 15a. It is prevented from being turned up.

  In the paste supplying step, the paste Pst discharged from the paste pressing head 15 is pushed into the pattern hole 3h of the masked substrate 2M (FIG. 12A). When the paste supplying process is completed, the control device 20 releases the contact state of the plate member 14 with the carrier jig 13 by the suction mechanism 18, lowers the holding table 12, and removes the carrier jig 13 from the plate member 14. Separate. Then, after releasing the clamp of the carrier jig 13 by the clamp member 12C, the substrate with mask 2M is unloaded from the paste printing apparatus 1 by unillustrated unloading means. Thereby, the printing of the paste Pst per sheet of the substrate with mask 2M is completed.

  When the masked substrate 2M is carried out from the paste printing apparatus 1 as described above, the mask 3 is peeled off from the masked substrate 2M. Thereby, the printing of the paste Pst on the upper surface (printed surface 2a) of the substrate 2 is completed (FIG. 12B).

  As described above, in the paste printing apparatus 1 and the paste printing method in the present embodiment, the plate-like member 14 having substantially the same thickness as the masked substrate 2M has the masked substrate 2M in the opening 14h. Since it is included and brought into contact with the upper surface of the carrier jig 13, the sliding member (blade 15 a) of the paste pressing head 15, which is a paste supply means, has a plate-like member 14 and the same height. The paste Pst is supplied into the pattern holes 3h of the substrate with mask 2M by sliding on the substrate with mask 2M. For this reason, even after the plate-like member 14 is removed after the supply of the paste Pst, the paste Pst does not remain on the masked substrate 2M, and the occurrence of printing defects can be prevented.

  Provided are a paste printing apparatus and a paste printing method in which no paste remains on a substrate with a mask after the paste is supplied and the occurrence of printing defects can be prevented.

DESCRIPTION OF SYMBOLS 1 Paste printing apparatus 2 Substrate 2M Substrate with mask 3 Mask 3h Pattern hole 13 Carrier jig 13K Suction hole 14 Plate-like member 14h Opening 15 Paste press head (paste supply means)
15a Blade (sliding member)
18 Adsorption mechanism Pst paste

Claims (5)

A paste printing apparatus for supplying a paste to a substrate with a mask in which a film-like mask in which pattern holes are formed is attached to the substrate, and printing the paste on the substrate through the pattern holes of the mask,
A carrier jig to which the substrate with mask is attached on the upper surface;
A plate-like member having substantially the same thickness as the substrate with mask, including the substrate with mask in a formed opening, and contacting the upper surface of the carrier jig;
The pattern hole of the substrate with mask attached to the carrier jig by sliding a sliding member on the substrate with mask attached to the carrier jig and the plate member in contact with the carrier jig A paste printing apparatus comprising paste supply means for supplying paste therein.   2. The paste printing apparatus according to claim 1, wherein an extending direction of the sliding member is inclined with respect to a direction orthogonal to a traveling direction of the sliding member in a plan view.   An adsorption mechanism for adhering the plate member to the upper surface of the carrier jig by adsorbing the plate member through an adsorption hole opened on the upper surface of the carrier jig. Item 3. The paste printing apparatus according to Item 1 or 2.   4. The paste printing apparatus according to claim 1, wherein the paste supply unit includes a paste press-out head that presses out the paste from between the two sliding members facing each other. A paste printing method for supplying a paste to a substrate with a mask in which a film-like mask in which pattern holes are formed is attached to a substrate, and printing the paste on the substrate through the pattern holes of the mask,
A plate-like member having substantially the same thickness as the substrate with the mask is included on the upper surface of the carrier jig on which the substrate with the mask is attached, and the substrate with the mask is included in an opening formed in the plate-like member. A plate-shaped member contact step to be brought into contact;
The substrate with mask attached to the carrier jig by sliding the sliding member of the paste supplying means on the substrate with mask attached to the carrier jig and the plate member in contact with the carrier jig. And a paste supplying step of supplying a paste into the pattern hole.

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