JP2014025789A - Inspection jig and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection jig obtained through a novel idea for narrowing a contact pitch compared with a conventional one, and a method for manufacturing the inspection jig.SOLUTION: A slit 33b is provided at a wall part 33a between two guide hole parts 33 (two adjacent guide hole parts 33) each slidably supporting each of tip side cylindrical parts 19 of two adjacent first plungers 1. The slit 33b extends over the total length of the guide hole parts 33 in the longitudinal direction (Z-axial direction) of the first plungers 1 with its width smaller than the outer diameter of the tip side cylindrical parts 19 of the first plungers 1. Preferably, the central position of the slit 33b in the width direction (X-axial direction) and the central position of the tip side cylindrical parts 19 in the same direction match each other. The slit 33b communicates the two adjacent guide hole parts 33 with each other.

Description

  The present invention relates to an inspection jig used for inspecting a device under test such as a semiconductor integrated circuit, and a manufacturing method thereof.

  When an inspection object such as a semiconductor integrated circuit is inspected, a contact probe is generally used to electrically connect the inspection object and an inspection substrate on the measuring instrument side.

  15A and 15B are front sectional views of an inspection jig 900 in which a conventional contact probe 800 is supported by an insulating support 831. FIG. 15A is a standby state (spring release state), and FIG. 15B is a Kelvin measurement state (spring compression). Status). In the drawing, the first plunger 801 and the second plunger 802 of each contact probe 800 are shown in a non-sectional view.

  The inspection jig 900 shown in this figure is for Kelvin measurement. Kelvin measurement is to measure electrical characteristics by bringing a current supply probe and a voltage monitoring probe into contact with an electrode of an inspection object 5, for example, an electrode bump 5a (as described below, Patent Document 1 or 2). In the inspection jig 900, one of two contact probes 800 having the same configuration is used as a current supply probe, and the other is used as a voltage monitoring probe.

  Each contact probe 800 includes a first plunger 801, a second plunger 802, a spring 803, and a tube 804. The first plunger 801 is a connection part to the inspection object 5, and the second plunger 802 is a connection part to the inspection substrate 6 (connected to a measuring device (not shown)). The flange portion 812 of the first plunger 801 has a disk shape larger in diameter than the distal end side cylindrical portion 824, and is used for retaining the contact probe 800 in the state shown in FIG. Provided to align the protruding length of the portion 824. The distal end surface of the distal end side cylindrical portion 824 has a divided mountain shape (in this case, divided into 8), and apexes of the mountain exist on the outer periphery at equal angular intervals from the center.

  In the contact probe 800 shown in FIG. 15, the flange portion 812 protrudes toward the adjacent contact probe 800, and therefore the tip side cylindrical portions 824 of the adjacent contact probes 800 cannot be placed close to each other. For this reason, the contact pitch described below cannot be reduced.

  FIG. 16A is a view taken along arrow AA ′ of FIG. FIG. 16B is a BB ′ cross-sectional view of FIG. FIG. 17 is an enlarged view of the periphery of the distal end of the first plunger 801 of FIG. With reference to these drawings, the contact pitch P1 of the adjacent contact probes 800 will be described.

The contact pitch P1 is expressed by the following equation.
P1 = E + (F × 2) + (G × 2) + (H × 2) Equation 1
E: Minimum thickness of the insulating support 831 F: Gap between the insulating support 831 and the side surface of the flange portion 812 G: Radial difference between the flange portion 812 and the tip side cylindrical portion 824 H: Side surface of the tip side cylindrical portion 824 ( The distance from the adjacent tip side cylindrical part 824 to the apex of the peak on the tip surface. * The distance is a distance along the direction connecting adjacent contact probes 800. Although it may become zero depending on the rotation angle of the distal end side cylindrical part 824, it is set to the maximum distance (state of FIG. 16A) here.

  As described above, the protrusion of the flange portion 812 directly affects the contact pitch P1 and hinders narrowing of the pitch. Of the above lengths E to H, E and F cannot be set to zero by design (there is a lower limit value that cannot be further reduced).

JP 2008-45986 A JP 2010-38837 A

In the Japanese Patent Application No. 2011-7332, the present applicant has already proposed a contact probe capable of narrowing the contact pitch as compared with the prior art (FIGS. 18 to 20). In this contact probe, the flange portion 714 has a non-cylindrical shape so that it does not protrude to the adjacent contact probe side, thereby reducing the distance between the tip side cylindrical portions 719 of the adjacent contact probes. Further, by utilizing the anti-rotation effect of the flange portion 714, the contact portion 719a of the tip side cylindrical portion 719 of the adjacent contact probe is held at an angle such that the peaks are at the shortest distance. With these ideas, a contact pitch P2 represented by the following equation is realized.
P2 = E + (F × 2) ... Formula 2
E: Minimum thickness of the insulating support 731 F: Clearance between the insulating support 731 and the side surface of the distal end side cylindrical portion 719

  The contact pitch P2 shown in Formula 2 is narrower by ΔP = (G × 2) + (H × 2) than the conventional contact pitch P1 shown in Formula 1. Here, as described above, the lengths E and F cannot be made smaller than a predetermined lower limit value, and thus a device from another viewpoint is necessary for further narrowing the pitch.

  The present invention has been made in view of such a situation, and an object of the present invention is to provide an inspection jig and a method for manufacturing the same, which are newly devised to narrow the contact pitch as compared with the prior art.

One embodiment of the present invention is an inspection jig. This inspection jig is
A plurality of contact probes; and an insulating support that supports the plurality of contact probes in parallel.
Each contact probe biases the first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate, and the first and second plungers in a direction away from each other. And a spring
The insulating support has a plurality of through-hole portions in which the plurality of contact probes respectively extend inward,
Each through hole includes a guide hole that slidably guides the tip of the first plunger of each contact probe,
A connecting portion extending in the length direction of the first plunger with a width smaller than the outer diameter of the tip end portion of the first plunger is provided on a wall portion between two adjacent adjacent guide hole portions. The two guide holes communicate with each other.

  The two guide holes may be close to each other as long as they do not overlap each other.

  The inner surface of the connecting portion may be a part of the side surface of the round hole.

  The insulating support is formed with a first insulating support having the guide hole formed therein, and a storage hole for communicating with each guide hole from the axial direction and storing a part of each contact probe. A combination with the second insulating support may also be used.

Another aspect of the present invention is a method for manufacturing an inspection jig. This method
A plurality of large-diameter through-holes that do not overlap each other are formed in the insulator, and a small-diameter through-hole that partially overlaps both of two adjacent large-diameter through-holes is formed between the two large-diameter through-holes. Forming an insulating support of 1;
Inserting a contact probe into each of the plurality of through holes of the second insulating support;
Assembling the first insulating support to the second insulating support so that a portion of each contact probe protruding from the second insulating support passes through each large-diameter through hole. .

  It should be noted that any combination of the above-described constituent elements, or a conversion of the expression of the present invention between systems or the like is also effective as an aspect of the present invention.

  According to the present invention, it is possible to realize an inspection jig and a method for manufacturing the same, which are newly devised to narrow the contact pitch as compared with the conventional case.

It is a front sectional view of inspection jig 30 concerning a 1st embodiment of the present invention, (A) is a standby state (spring release state), and (B) is a Kelvin measurement state (spring compression state). HH 'sectional drawing of FIG. 1 (A) (spring open state). (A) is a GG 'arrow line view of FIG. 1 (B). (B) is JJ 'sectional drawing of FIG. 1 (B). (C) is the figure which looked at the 1st plunger 1 from the front-end | tip direction. FIG. 2 is an enlarged view of the periphery of the tip of the first plunger 1 of FIG. 1. The enlarged view which expanded FIG. 3 (A) for dimension description. FIG. 6 is an explanatory diagram of a state when adjacent tip side cylindrical portions 19 in FIG. 5 are closest to each other. FIG. 6 is an enlarged view for explaining more detailed dimensions in FIG. 5. The shape explanatory view of the 2nd layer 31b of insulating support 31. The figure which looked at the 1st layer 31a of the insulating support body 31 used with the test jig | tool which concerns on the 2nd Embodiment of this invention from the Z-axis direction. It is explanatory drawing of the test | inspection jig | tool which concerns on the 3rd Embodiment of this invention, (A) is a standby state (spring release state), (B) is a Kelvin measurement state (spring compression state), (C) is ( KK 'sectional drawing of B). It is explanatory drawing of the test | inspection jig | tool which concerns on the 4th Embodiment of this invention, (A) is a standby state (spring release state), (B) is a Kelvin measurement state (spring compression state). (A) is a front end peripheral part enlarged view of the 1st plunger 1 in the inspection jig concerning a 5th embodiment of the present invention. FIG. 4B is a side view of the distal end portion of the first plunger 1. The front sectional view in the Kelvin measurement state (spring compression state) of the inspection jig concerning a 6th embodiment of the present invention. (A) is an AA 'arrow line view of FIG. (B) is BB 'sectional drawing of FIG. It is a front sectional view of an inspection jig 900 in which a conventional contact probe 800 is supported by an insulating support 831. (A) is a standby state (spring release state), and (B) is a Kelvin measurement state (spring compression state). (A) is an AA 'arrow line view of FIG. 15 (B). (B) is BB 'sectional drawing of FIG. 15 (B). FIG. 16 is an enlarged view of the periphery of the distal end of the first plunger 801 in FIG. 15. Enlarged view of the periphery of the tip of the inspection jig of Japanese Patent Application No. 2011-7332. CC 'arrow line view of FIG. DD 'sectional drawing of FIG.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or equivalent component, member, etc. which are shown by each drawing, and the overlapping description is abbreviate | omitted suitably. In addition, the embodiments do not limit the invention but are exemplifications, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention.

  1A and 1B are front sectional views of an inspection jig 30 according to the first embodiment of the present invention, in which FIG. 1A is a standby state (spring release state), and FIG. 1B is a Kelvin measurement state (spring compression state). Indicates. FIG. 2 is a cross-sectional view taken along the line HH ′ of FIG. In these drawings, the first and second plungers 1 and 2 of each contact probe 100 are shown in a non-sectional view. FIG. 3A is a GG ′ arrow view of FIG. FIG. 3B is a cross-sectional view taken along the line JJ ′ of FIG. FIG. 3C is a view of the first plunger 1 as seen from the distal direction. FIG. 4 is an enlarged view of the periphery of the distal end of the first plunger 1 of FIG. FIG. 5 is an enlarged view of FIG. 3A enlarged for explaining the dimensions. FIG. 6 is an explanatory diagram of a state in which the adjacent front end side cylindrical portions 19 in FIG. 5 are closest to each other. FIG. 7 is an enlarged detailed view for explaining dimensions in FIG.

  The inspection jig 30 of this embodiment is for Kelvin measurement, and one of two contact probes 100 having the same configuration is used as a current supply probe and the other as a voltage monitoring probe. Three orthogonal axes (X-axis) in which the axial direction of the contact probe 100 is the Z-axis direction, the direction in which a flange portion 14 described later projects is the X-axis direction, and the direction perpendicular to both the Z-axis direction and the X-axis direction is the Y-axis direction. , Y axis, Z axis) are defined as shown in FIG.

  The contact probe 100 includes a first plunger 1, a second plunger 2, a coil spring 3 as a spring, and a tube 4 coaxially. The first plunger 1 is a connection part with the inspection object 5. The second plunger 2 is a connection part with the inspection substrate 6. The tube 4 which is a conductive metal body such as copper or a copper alloy slidably holds the first and second plungers 1 and 2, and is proximal to the first and second plungers 1 and 2. And the coil spring 3 are housed inside. For example, a coil spring 3 formed of a general conductive metal material such as a piano wire or a stainless steel wire has a first and second plunger so as to urge the first and second plungers 1 and 2 away from each other. The first and second plungers 1 and 2 are provided with respect to the first and second plungers 1 and 2, and a contact force between the inspection object 5 and the inspection substrate 6 is applied thereto. The inspection object 5 is, for example, a semiconductor integrated circuit in which electrodes are arranged at a predetermined interval, and in the illustrated case, electrode bumps 5a are arranged at a predetermined interval. The inspection substrate 6 has electrode pads (not shown) connected to the measuring instrument side at predetermined intervals corresponding to the electrode bumps 5a.

  The first plunger 1, which is a conductive metal body such as copper or copper alloy, has a base end side cylindrical portion 11, a first small diameter portion 12, a second small diameter portion 13, and a flange portion 14 in order from the base end side. And a third small diameter portion 17 and a distal end side cylindrical portion 19. Similarly, the second plunger 2, which is a conductive metal body such as copper or a copper alloy, has a proximal end side cylindrical portion 21, a small diameter portion 22, and a distal end side cylindrical portion 29 in order from the proximal end side. The coil spring 3 is provided between the end surfaces of the base end side cylindrical portions 11 and 21 of the first and second plungers 1 and 2 and applies an urging force in the separating direction to each end surface. The cylindrical tube 4 has ring portions 401 and 402 that are recessed inward in a ring shape on the side surfaces of two intermediate portions with different axial directions to prevent the first and second plungers 1 and 2 from being pulled out.

  In the first plunger 1, the base end side cylindrical portion 11 has a larger diameter than the inner diameter of the throttle portion 401. The columnar first small-diameter portion 12 has a smaller diameter than the inner diameter of the throttle portion 401. The throttle part 401 is located within the existence range of the first small diameter part 12 in the axial direction. Therefore, the base end side cylindrical portion 11 is caught by the throttle portion 401, and the first plunger 1 is prevented from coming off from the tube 4. The columnar second small diameter portion 13 has a larger diameter than the inner diameter of the throttle portion 401, and a part thereof is always located inside the tube 4.

  As shown in FIGS. 3B and 3C, the flange portion 14 has, for example, a substantially rhombus shape when the side surface of the disk having a diameter larger than that of the distal end side cylindrical portion 19 is viewed from the axial direction (Z direction). The shape is cut into four sides. In the example of this figure, the side surface portions 14a and 14b corresponding to the apexes at both ends in the X direction of the flange portion 14 as viewed from the axial direction are not cut and are arc surfaces. In other words, the flange portion 14 has side surfaces 141 to 144 that are four planes, and a region surrounded by the side surfaces 141 to 144 (and an extension surface that is the same plane as those) has a substantially rhombus shape when viewed from the axial direction. This is the shape. As shown in FIG. 1 (A), the flange portion 14 is narrower than the distal end side cylindrical portion 19 and within the existing width of the distal end side cylindrical portion 19 when viewed from the X direction. It does not extend outward (in a direction perpendicular to the axial direction) from the side surface of the cylindrical portion 19. On the other hand, as shown in FIG. 2, when viewed from the Y direction, the width is wider than the distal end side cylindrical portion 19 and extends outwardly (in a direction perpendicular to the axial direction) from the side surface of the distal end side cylindrical portion 19. To do). That is, as shown in FIG. 3C, the flange portion 14 extends outward from the side portions 19b and 19c of the side surface of the distal end side cylindrical portion 19 when viewed from the axial direction, but excludes the portions 19b and 19c. It does not extend outward from the part. As shown in FIG. 3C, the range of the portions 19b and 19c in which the flange portion 14 extends outward when viewed from the axial direction on the side surface of the distal end side cylindrical portion 19 is the central angle when viewed from the axial direction. It is preferable that θ is within 90 °. Moreover, the flange part 14 is good to extend so that a width | variety may become narrow, so that it may go to a X direction from a central axis seeing from an axial direction.

  The columnar third small-diameter portion 17 has a proximal end continuous with the distal end side end surface of the flange portion 14. The distal end side cylindrical portion 19 has a larger diameter than the outer diameter of the tube 4, and therefore the interval between the adjacent distal end side cylindrical portions 19, 19 is narrower than the interval between the tubes 4, 4. The distal end of the distal end side cylindrical portion 19 is a contact portion 19 a that contacts the electrode bump 5 a of the inspection object 5. The contact portion 19a has a divided mountain shape (here, eight divisions), and has apexes at the outer periphery at equiangular intervals (here, 45 ° intervals) from the center. 3A and 3C, the ridge line of the mountain (ridge line of the convex portion) is illustrated, while the illustration of the valley line is omitted.

  In the second plunger 2, the base end side cylindrical portion 21 is larger in diameter than the inner diameter of the throttle portion 402. The columnar small diameter portion 22 has a smaller diameter than the inner diameter of the throttle portion 402. The throttle part 402 is located within the existence range of the small diameter part 22 in the axial direction. Therefore, the base end side cylindrical portion 21 is caught by the throttle portion 402, and the second plunger 2 is prevented from coming off from the tube 4. The distal end side cylindrical portion 29 is larger in diameter than the inner diameter of the throttle portion 402, and the proximal end side is partially located inside the tube 4. The distal end of the distal end side cylindrical portion 29 is a contact portion 29 a that comes into contact with an electrode pad (not shown) of the inspection substrate 6. The contact portion 29a has a conical shape, for example.

  The inspection jig 30 includes an insulating support 31 having through-hole portions 32 at a predetermined interval for arranging a plurality of contact probes 100 in parallel, and the contact probes 100 are inserted and arranged in the respective through-hole portions 32. . Specifically, the first plunger 1, the second plunger 2, the coil spring 3, and the tube 4 that are integrally assembled to constitute the contact probe 100 are inserted and disposed in the through hole portion 32 of the insulating support 31. To do. The insulating support 31 has a structure divided into a first layer 31 a and a second layer 31 b in order to incorporate the contact probe 100 into the through-hole portion 32.

  The first guide hole portion 33 formed in the first layer 31 a of the through hole portion 32 is a round hole having a slightly larger diameter than the distal end side cylindrical portion 19 of the first plunger 1. The front end side cylindrical portion 19 is slidably supported. The second guide hole portion 34 formed at the lower end portion of the second layer 31b of the through hole portion 32 is a round hole having a slightly larger diameter than the distal end side cylindrical portion 29 of the second plunger 2, and is a second plan. The cylindrical part 29 at the front end side of the jar 2 is slidably supported. An intermediate hole portion 35 (housing hole portion) formed in a portion of the second hole 31 excluding the second guide hole portion 34 of the through hole portion 32 is smaller in diameter than the first guide hole portion 33 and is smaller than the tube 4. It has a slightly larger diameter and is widened in the X direction as shown in FIG. 2 near the boundary with the first layer 31a (space for moving the flange portion 14). The first guide hole portion 33 engages with the flange portion 14 to restrict the contact probe 100 from coming off. The second guide hole portion 34 has a smaller diameter than the tube 4 and engages with one end of the contact probe 100 to restrict the tube 4 from coming out.

  As shown in FIGS. 1 (A), 1 (B), 3 (A) and 4, the front end side cylindrical portion 19 of two first plungers 1 and 1 adjacent to each other so as to contact one bump electrode 5a. , 19 are slidably supported on the wall 33a between the two first guide hole portions 33, 33 (two adjacent first guide hole portions 33, 33). 33b is provided. The slit 33b has a width K (FIG. 3A) smaller than the outer diameter of the distal end side cylindrical portion 19 of the first plunger 1 and is a first guide in the longitudinal direction (Z-axis direction) of the first plunger 1. It extends over the entire length of the hole 33. The center position in the width direction (X-axis direction) of the slit 33b and the center position in the same direction of the distal end side cylindrical portion 19 preferably coincide with each other. Two adjacent first guide hole portions 33 communicate with each other through the slit 33b.

In the inspection jig 30, adjacent contact probes 100, 100 are portions of the side surface of the distal end side cylindrical portion 19 where the flange portion 14 does not extend outward when viewed from the axial direction (reference numerals 19 b, 19 c in FIG. 3C). Parts other than the part shown) face each other. In the present embodiment, the contact pitch P4 between adjacent contact probes 100, 100 is expressed by the following equation (see FIGS. 3A, 4 and 5).
P4 = E3 + (F × 2) Equation 3
E3: Distance between the side surfaces of the two first guide hole portions 33, 33 when it is assumed that there is no slit 33b. F: Clearance between the first guide hole portion 33 and the side surface of the tip side cylindrical portion 19

Since E3 in Formula 3 can be made smaller than the minimum thickness E (Formula 1 and Formula 2) in the manufacturing technology of the insulating support 31, the contact pitch P4 in the present embodiment is expressed by Formula 1 and Formula 2. The contact pitches P1 and P2 shown in FIG. However, as shown in FIG. 6, even when the adjacent tip side cylindrical portions 19, 19 are closest to each other, it is necessary that they do not come into contact with each other (P6 below has a positive value). The closest pitch P6 is expressed by the following equation.
P6 = P4-F2 × 2 Formula 4
P4: Normal contact pitch (Formula 3)
F2: Movement distance when the distal end side cylindrical portion 19 at the center of the first guide hole 33 is closest to the adjacent distal end side cylindrical portion 19 (FIG. 5).

Ｒ１：先端側円柱部１９の半径
Ｒ２：第１のガイド孔部３３の半径
Ｋ：スリット３３ｂの幅 F2 in Equation 4 is obtained by the following equation (see also FIG. 7).

R1: Radius R2 of the front end side cylindrical portion 19: Radius K of the first guide hole portion 33: Width of the slit 33b

When F2 of Formula 5 is applied to Formula 4, it becomes as follows. That is, K is set so that P6> 0.

  The flow of manufacturing the inspection jig 30 is as follows. First, a plurality of large-diameter through-holes (corresponding to the first guide hole 33) that do not overlap each other are formed in the insulator, and small-diameter through-holes (in the slit 33b) that partially overlap with both adjacent two large-diameter through-holes. The first layer 31a of the insulating support 31 is formed between the two large-diameter through holes. On the other hand, as shown in FIG. 8, the second layer 31b of the insulating support 31 is formed. In FIG. 8, the main hole 311 accommodates the proximal end sides of the first and second plungers 1, 2 shown in FIG. 1, the coil spring 3, and the tube 4. The flange hole portions 312 and 313 having a predetermined depth that are continuous with the main hole portion 311 on both sides in the X direction of the main hole portion 311 are smaller in diameter than the main hole portion 311 and viewed from the axial direction of the flange portion 14. A space where the portion extending outward from the side surface of the front end side cylindrical portion 19 moves in the Z direction is secured. As a processing order, first, after processing the hole portions 312 and 313 for the flange, the main hole portion 311 is processed. Subsequently, the contact probe 100 is inserted into each of the plurality of through holes (the plurality of intermediate hole portions 35 and the guide hole portion 34) of the second layer 31b of the insulating support member 31, and the insulating support member of each contact probe 100 is inserted. The first layer 31a of the insulating support 31 is assembled to the second layer 31b so that the portion of the 31 protruding from the second layer 31b penetrates each first guide hole 33.

  When the inspection jig 30 is used for inspection, the inspection jig 30 is positioned and placed on the inspection substrate 6, and as a result, the coil spring 3 is contracted by a predetermined length and the tip side cylinder of the second plunger 2. The contact portion 29 a of the portion 29 is in elastic contact with the electrode pad of the inspection substrate 6. In a state where there is no inspection object 5 such as a semiconductor integrated circuit, the first plunger 1 moves in the protruding direction until the flange portion 14 is regulated by the first guide hole portion 33, and The amount of protrusion is the maximum. By disposing the inspection object 5 so as to face the insulating support 31 of the inspection jig 30 at a predetermined interval, the distal end side cylindrical portion 19 is retracted and the coil spring 3 is further compressed. As a result, the distal end side The cylindrical portion 19 is in elastic contact with the electrode bump 5a of the inspection object 5. In this state, the inspection object 5 is inspected.

  According to the present embodiment, the following effects can be achieved.

(1) The contact pitch can be reduced as compared with the conventional case by providing a new device in which a slit 33b is provided in the wall 33a between two adjacent first guide hole portions 33.

(2) Since adjacent contact probes 100 face each other in the side surface of the tip side cylindrical portion 19 where the flange portion 14 does not extend outward when viewed from the axial direction, compared to the case of a conventional cylindrical flange. This makes it possible to narrow the contact pitch.

(3) Since the flange portion 14 prevents the first plunger 1 from rotating, the contact portion 19a of the tip side cylindrical portion 19 of the adjacent contact probe 100 is held at an angle such that the apexes of the peaks are the shortest distance. it can. This is also advantageous in that the contact pitch is narrowed compared to the conventional case.

  FIG. 9 is a view of the first layer 31a of the insulating support 31 used in the inspection jig according to the second embodiment of the present invention as seen from the Z-axis direction. The inspection jig of the present embodiment is different from that of the first embodiment in that the inner surface of the slit 33b is a part of the side surface of the round hole in the first layer 31a of the insulating support 31. And match in other respects. Since the inner surface of the slit 33b is a part of the side surface of the round hole, a general general-purpose drill can be used for processing the slit 33b as well as other through holes.

  FIG. 10 is an explanatory diagram of an inspection jig according to a third embodiment of the present invention, where (A) is a standby state (spring release state), (B) is a Kelvin measurement state (spring compression state), ( C) is a cross-sectional view taken along the line KK ′ of FIG. The inspection jig of the present embodiment is different from that of the first embodiment in that the tube 4 is eliminated, and is identical in other points. That is, the first plunger 1 of the contact probe 300 has the base end side cylindrical portion 11, the first small diameter portion 12, and the second small diameter portion 13 of the first embodiment shown in FIG. The base end side cylindrical portion 411 is replaced with a rod-shaped portion 412 having a smaller diameter from the center portion of the base end side end surface of the base end side cylindrical portion 411 in the axial direction. The coil spring 3 abuts on the edge portion of the base end side end surface of the base end side cylindrical portion 411. The rod-like portion 412 extends inside the coil spring 3. The second plunger 2 of the contact probe 300 replaces the proximal-side cylindrical portion 21 and the small-diameter portion 22 of the first embodiment with a proximal-side cylindrical portion 421 having substantially the same diameter as the tube 4, and thus a proximal-side cylindrical portion. In this configuration, a rod-shaped portion 422 having a smaller diameter is protruded in the axial direction from the central portion of the base end side end surface of 421. The coil spring 3 abuts on the edge portion of the base end side end surface of the base end side cylindrical portion 421. The rod-like portion 422 extends inside the coil spring 3. The coil spring 3 has a smaller diameter than the first distal end side cylindrical portion 19 and applies a biasing force in the separating direction to the proximal end surfaces of the proximal end cylindrical portions 411 and 421. The first plunger 1, the second plunger 2, and the coil spring 3 constitute a contact probe 300. The arrangement of the plurality of contact probes 300 may be the same as in the first embodiment.

  11A and 11B are explanatory diagrams of an inspection jig according to the fourth embodiment of the present invention, in which FIG. 11A is a standby state (spring release state), and FIG. 11B is a Kelvin measurement state (spring compression state). . The inspection jig of the present embodiment is different from that of the first embodiment shown in FIG. 1 and the like in that the flange portion 14 of the first plunger 1 of the contact probe 400 is eliminated. Match in terms of. In this case, the throttle portion 401 of the tube 4 has a function to prevent the first plunger 1 from coming off upward, and the ability to prevent the flange from pulling out is weaker than that of the flange portion 14. There is no problem in applying the product upside down and not using it.

  FIG. 12A is an enlarged view of the periphery of the distal end of the first plunger 1 in the inspection jig according to the fifth embodiment of the present invention. FIG. 12B is a side view of the distal end portion of the first plunger 1. The inspection jig of the present embodiment is similar to that of the first embodiment shown in FIG. It differs in that it is cut in two planes that are oblique to the axial direction and that are inclined in opposite directions in a direction different from this diagonal, and that has a ridge line at the center of the cut surface. Match on a point.

  FIG. 13 is a front sectional view of the inspection jig in the Kelvin measurement state (spring compression state) according to the sixth embodiment of the present invention. FIG. 14A is a view taken in the direction of arrows AA ′ in FIG. FIG. 14B is a cross-sectional view taken along the line BB ′ of FIG. 13 (coil spring omitted).

  The inspection jig according to the present embodiment has a tip-side semi-cylindrical portion 190 in which the tip-side columnar portion 19 of the first plunger 1 has a semicircular cross section, as compared with the first embodiment shown in FIG. Accordingly, the shape of the guide hole 33 is changed from a round hole to a semicircular cross section. The tip of the tip-side semi-cylindrical portion 190 is cut away obliquely with respect to the axial direction. The adjacent tip-side semi-cylindrical portions 190 are arranged so that the arc sides face each other and the inclined surfaces cut out obliquely are back to back. The slit 33b extends not only to the first layer 31a but also to the second layer 31b of the insulating support 31 (not only between the adjacent first guide hole portions 33 but also between the adjacent intermediate hole portions 35). Also extends).

  Further, the base end side cylindrical portion 11 of the first plunger 1 has the same diameter as the front end side semi-cylindrical portion 190, extends from the front end side semi-cylindrical portion 190 to the base end side, and has a shape including the tube 4. That is, a hole 197 is formed over a predetermined depth from the base end side end surface of the base end side cylindrical portion 11, and the base end side cylindrical portion 21 of the coil spring 3 and the second plunger 2 is formed in the hole 197. To position. The hole portion 197 has an opening side that is reduced in diameter by, for example, caulking, that is, the base end of the base end side cylindrical portion 11 of the first plunger 1 is caulked to form a caulking portion 11d, and the second plunger 2 is prevented from coming off the base end side cylindrical portion 21. The guide hole 34 has a smaller diameter than the proximal end side cylindrical portion 11 of the first plunger 1 and a larger diameter than the distal end side cylindrical portion 29 of the second plunger 2. The coil spring 3 is provided between the end surface of the base end side cylindrical portion 21 of the second plunger 2 and the bottom surface of the hole portion 197, and applies an urging force in the separating direction to each end surface. The first plunger 1, the second plunger and the coil spring 3 constitute a contact probe 500.

  FIG. 13 shows a state in which the inspection jig of the present embodiment is set on the inspection substrate 6 (terminals are not shown). When the inspection substrate 6 is brought into contact with the lower surface of the second layer 31b of the insulating support 31, the upward movement is prevented when the base end side cylindrical portion 11 of the first plunger 1 comes into contact with the first layer 31a. Thus, the coil spring 3 is compressed, whereby the second plunger 2 is elastically contacted with a terminal (not shown) of the inspection substrate 6, and the first plunger 1 is outside (upward) of the insulating support 31. It is urged toward.

  In the present embodiment, the first plunger 1 rotates by making the guide hole portion 33 of the first layer 31a of the insulating support 31 semicircular in accordance with the cross-sectional shape of the tip side semicylindrical portion 190. It is possible to prevent the first plunger 1 from coming off from the second layer 31b of the insulating support 31.

  The present invention has been described above by taking the embodiment as an example. However, it is understood by those skilled in the art that various modifications can be made to each component and each processing process of the embodiment within the scope of the claims. By the way. Hereinafter, modifications will be described.

  The pair of contact probes for Kelvin measurement need not have the same shape. For example, the contact probe for supplying current may have a larger diameter than that for voltage monitoring.

  The use of the contact probe and the socket is not limited to the Kelvin measurement, and the same number of electrode bumps 5a as the contact probe may exist.

DESCRIPTION OF SYMBOLS 1 1st plunger 2 2nd plunger 3 Coil spring 4 Tube 5 Inspection object 5a Electrode bump 6 Inspection board 14 Flange part 19,29 Tip side cylindrical part 30 Inspection jig 31 Insulation support body 100 Contact probe

Claims (5)

A plurality of contact probes; and an insulating support that supports the plurality of contact probes in parallel.
Each contact probe biases the first and second plungers, one for connection with the inspection object and the other for connection with the inspection substrate, and the first and second plungers in a direction away from each other. And a spring
The insulating support has a plurality of through-hole portions in which the plurality of contact probes respectively extend inward,
Each through hole includes a guide hole that slidably guides the tip of the first plunger of each contact probe,
A connecting portion extending in the length direction of the first plunger with a width smaller than the outer diameter of the tip end portion of the first plunger is provided on a wall portion between two adjacent adjacent guide hole portions. An inspection jig in which two guide holes communicate with each other.   The inspection jig according to claim 1, wherein the two guide holes are close to each other without overlapping each other.   The inspection jig according to claim 1, wherein an inner surface of the connecting portion is a part of a side surface of the round hole.   The insulating support is formed with a first insulating support having the guide hole formed therein, and a storage hole for communicating with each guide hole from the axial direction and storing a part of each contact probe. The inspection jig according to any one of claims 1 to 3, wherein the inspection jig is combined with a second insulating support. A plurality of large-diameter through-holes that do not overlap each other are formed in the insulator, and a small-diameter through-hole that partially overlaps both of two adjacent large-diameter through-holes is formed between the two large-diameter through-holes. Forming an insulating support of 1;
Inserting a contact probe into each of the plurality of through holes of the second insulating support;
Assembling the first insulating support to the second insulating support so that a portion of each contact probe protruding from the second insulating support passes through each large-diameter through hole. , Inspection jig manufacturing method.

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