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JP2014000733A - Liquid discharge head - Google Patents

Liquid discharge head Download PDF

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Publication number
JP2014000733A
JP2014000733A JP2012137919A JP2012137919A JP2014000733A JP 2014000733 A JP2014000733 A JP 2014000733A JP 2012137919 A JP2012137919 A JP 2012137919A JP 2012137919 A JP2012137919 A JP 2012137919A JP 2014000733 A JP2014000733 A JP 2014000733A
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liquid discharge
liquid
substrate
bump
discharge head
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Junji Tatsumi
玔二 å·œ
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Canon Inc
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Canon Inc
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Abstract

PROBLEM TO BE SOLVED: To decrease variation in impact positions of ink drops discharged from a discharge port by narrowing the interval between a liquid discharge head and a recording medium, in order to enable printing with high picture quality.SOLUTION: In the inner lead bonding between a recording element substrate for ink discharge and a TAB tape, an insulation member composed of the same material as an adhesion layer for improvement of the adhesion between an orifice plate and the recording element substrate is formed on the recording element substrate.

Description

本発明は、むンク等の蚘録液を吐出しお蚘録動䜜を行う液䜓吐出装眮に適甚される液䜓吐出ヘッドに関するものである。   The present invention relates to a liquid discharge head applied to a liquid discharge apparatus that performs a recording operation by discharging a recording liquid such as ink.

埓来の液䜓吐出装眮は、蚘録メディアに察しおむンクを吐出し付着させお蚘録を行う蚘録装眮であり、次のような特城を有する。すなわち、高速に蚘録を行うこずができる、様々な蚘録メディアに察しお蚘録が可胜である、蚘録時における隒音がほずんど生じない、ランニングコストが安いなどである。このため、プリンタ、ワヌドプロセッサ、ファクシミリ、耇写機などの蚘録機構を担う装眮ずしお広く採甚されおいる。このような液䜓吐出装眮に搭茉されるむンクゞェト蚘録ヘッドは、むンクを吐出する方匏ずしお、ピ゚ゟ玠子などの電気機械倉換玠子によっおむンクを加圧し、むンク滎を吐出させるものがある。たた発熱抵抗䜓を有する電気熱倉換玠子によっおむンクを加熱し、膜沞隰の䜜甚によりむンク滎を吐出させるものなどが知られおいる。   A conventional liquid ejecting apparatus is a recording apparatus that performs recording by ejecting and adhering ink to a recording medium, and has the following characteristics. That is, recording can be performed on various recording media that can be recorded at high speed, noise during recording hardly occurs, and running cost is low. For this reason, it is widely adopted as an apparatus that bears a recording mechanism such as a printer, a word processor, a facsimile machine, and a copying machine. An ink jet recording head mounted on such a liquid ejecting apparatus is one that ejects ink droplets by pressurizing ink with an electromechanical conversion element such as a piezo element as a method for ejecting ink. Also known is an ink that heats ink by an electrothermal conversion element having a heating resistor and ejects ink droplets by the action of film boiling.

たた、䞊述したむンクの吐出方匏においお、電気熱倉換玠子を甚いるものは、発熱抵抗䜓が配列された液䜓吐出基板に察しお平行にむンク滎を吐出させる方匏゚ッゞシュヌタヌ方匏があり。さらには、発熱抵抗䜓が配列された液䜓吐出基板に察しお垂盎にむンク滎を吐出させる方匏サむドシュヌタヌ方匏ずがある。   Among the ink ejection methods described above, those using electrothermal conversion elements include a method (edge shooter method) in which ink droplets are ejected in parallel to a liquid ejection substrate on which heating resistors are arranged. Furthermore, there is a method (side shooter method) in which ink droplets are ejected perpendicularly to a liquid ejection substrate on which heating resistors are arranged.

図は、䞀般的なサむドシュヌタヌ方匏の液䜓吐出ヘッドの構成を瀺したものである。図は、図の−断面を瀺したものである。図に瀺すように、シリコン基板の䞭倮にむンク䟛絊口が長穎の圢状で開いおおり、この基板䞊には耇数の発熱抵抗䜓がほが等間隔でむンク䟛絊口の䞡偎に䞊んでいる。このような発熱抵抗䜓を圢成した基板を蚘録玠子基板ず呌ぶ。   FIG. 5A shows a configuration of a general side shooter type liquid discharge head. FIG.5 (b) shows the BB cross section of Fig.5 (a). As shown in FIG. 5, an ink supply port 104 is opened in the shape of an elongated hole in the center of the silicon substrate 101, and a plurality of heating resistors 108 are formed on both sides of the ink supply port 104 at substantially equal intervals on this substrate. Are lined up. The substrate 101 on which such a heating resistor 108 is formed is called a recording element substrate.

蚘録玠子基板の倖郚には発熱抵抗䜓に電力を䟛絊するための倖郚配線が蚘録玠子基板䞊の䞡端に蚭眮されおいる倖郚取り出し電極パッドず結線されおいる。そしお、蚘録玠子基板䞊に耇数の吐出口を有するオリフィスプレヌトを圢成する。ここで、蚘録玠子基板䞊にオリフィスプレヌトを圢成する際に、蚘録玠子基板ずオリフィスプレヌトの密着力を向䞊させる目的で、密着局を圢成する。密着局を圢成した埌オリフィスプレヌトを圢成し、図に瀺すような液䜓吐出基板が完成する。   Outside the recording element substrate 101, external wiring for supplying power to the heating resistor 108 is connected to external extraction electrode pads 102 provided at both ends on the recording element substrate. Then, an orifice plate 105 having a plurality of discharge ports 106 is formed on the recording element substrate 101. Here, when the orifice plate 105 is formed on the recording element substrate 101, the adhesion layer 109 is formed for the purpose of improving the adhesion between the recording element substrate and the orifice plate. After forming the adhesion layer 109, the orifice plate 105 is formed, and the liquid discharge substrate 100 as shown in FIG. 5A is completed.

このような構成の液䜓吐出ヘッドにおける倖郚配線ず電極パッドを結線する方法ずしお、電極パッド䞊にバンプを圢成し、このバンプず電気配線基板の配線を接合する方法が知られおいる。このような方匏は  実装法ず呌ばれおいる。バンプの圢成方法ずしおは、特蚱文献にある、金属補のボヌルを圢成し電極パッドに接合するこずで、バンプを圢成する方法があり、特蚱文献には、電極パッドにめっき法を甚いおバンプを圢成する方法が述べられおいる。   As a method for connecting the external wiring and the electrode pad 102 in the liquid discharge head having such a configuration, a method is known in which a bump 103 is formed on the electrode pad and the bump and the wiring of the electric wiring substrate 200 are joined. Such a method is called a TAB (Tape Automated Bonding) mounting method. As a method of forming the bump 103, there is a method of forming a bump by forming a metal ball and bonding it to the electrode pad 102, which is disclosed in Patent Document 1, and in Patent Document 2, a plating method is used for the electrode pad. A method of forming bumps using the method is described.

電気配線基板は、ポリむミドテヌプ䞊に銅箔を接着剀により接着し、パタヌニングし、銅箔をリヌドずするこずで、液䜓吐出基板のバンプず電気接続するのが䞀般的である。この電気配線基板をテヌプず呌び、テヌプの窓郚䞀般的にはデバむスホヌルず呌ばれおいるから液䜓吐出基板に䌞びるリヌドをむンナヌリヌドず呌んでいる。このむンナヌリヌドずバンプを接合するこずで、倖郚配線ずの結線を行う。   The electrical wiring substrate 200 is generally electrically connected to the bumps 103 of the liquid discharge substrate 100 by bonding a copper foil 203 onto the polyimide tape 201 with an adhesive 202, patterning, and using the copper foil 203 as a lead. It is. This electrical wiring substrate 200 is called a TAB tape, and a lead extending from the window portion (generally called a device hole) of the TAB tape 200 to the liquid discharge substrate 100 is called an inner lead 204. By joining the inner lead 204 and the bump 103, connection with external wiring is performed.

このように実装した埌、ディスペンサヌを甚いおバンプずむンナヌリヌドの接続郚分に封止剀、を塗垃し、これを熱によっお硬化させる。これにより、電気接続郚の封止を行い、電気接続郚の信頌性を向䞊させる。なお、図は、電気接続郚の説明のために䞊封止剀を透芖した図ずなっおいる。   After the TAB mounting as described above, the sealants 400 and 401 are applied to the connection portion between the bump 103 and the inner lead 204 using a dispenser, and are cured by heat. Thereby, the electrical connection part is sealed and the reliability of the electrical connection part is improved. FIG. 5A is a perspective view of the upper sealant 400 for explaining the electrical connection portion.

たた、液䜓吐出基板は、支持郚材にそれぞれのむンク䟛絊口、及びが連通するように接着剀により接着される。支持郚材は、液䜓吐出基板の電極パッド面に察しお、電気配線基板がほが氎平に接続できるように段郚を蚭け、接着剀により、電気配線基板を接着固定しおいる。   The liquid discharge substrate 100 is bonded to the support member 300 with an adhesive 107 so that the ink supply ports 104 and 302 communicate with each other. The support member 300 is provided with a step portion 301 so that the electric wiring substrate 200 can be connected substantially horizontally to the surface of the electrode pad 102 of the liquid discharge substrate 100, and the electric wiring substrate 200 is bonded and fixed by an adhesive 205. Yes.

なお、蚘録に甚いられるむンクは、支持郚材に蚭けられるむンク䟛絊口を介しお、蚘録玠子基板のむンク䟛絊口からオリフィスプレヌトに䟛絊され、吐出口から吐出する。   The ink used for recording is supplied from the ink supply port 104 of the recording element substrate 101 to the orifice plate 105 via the ink supply port 302 provided in the support member 300 and discharged from the discharge port 106.

特開−号公報JP 2003-025587 A 特開−号公報JP 2004-296497 A

埓来構成の液䜓吐出ヘッドにおいおは、テヌプのむンナヌリヌドず蚘録玠子基板の電気配線面の瞁郚の角で電気的に短絡゚ッゞショヌトが起こらないように、蚘録玠子基板ずテヌプに高䜎差を぀ける必芁がある。しかし䞀方で、録ヘッドずしおの印字品䜍を良奜なものにするためには、むンク吐出口ず蚘録メディアの間隔を狭くするこずが望たしい。   In the liquid discharge head having the conventional configuration, the recording element substrate and the inner edge 204 of the TAB tape 200 and the corner 110 of the edge of the electric wiring surface of the recording element substrate 101 are not electrically short-circuited. It is necessary to make a difference in the height of the TAB tape. However, on the other hand, in order to improve the print quality as a recording head, it is desirable to narrow the interval between the ink discharge port 106 and the recording medium.

たた、䞊述した液䜓吐出ヘッドには、近幎の液䜓吐出装眮に芁求される、写真印刷に代衚される高画質化に察応した改良が必芁である。高画質化においおは、吐出口ず蚘録メディアの間隔を狭めるこずにより、吐出口から吐出されるむンク滎の着匟䜍眮のばら぀きをより枛少させるこずができる。しかし゚ッゞショヌトを防止するため、実装時に液䜓吐出基板の固定面からバンプ頂䞊たでの高さず、液䜓吐出基板の固定面からテヌプの固定面たでの高さの関係を図ずする必芁があった。   In addition, the liquid discharge head described above needs to be improved in response to high image quality typified by photographic printing, which is required for recent liquid discharge apparatuses. In high image quality, it is possible to further reduce variations in landing positions of ink droplets ejected from the ejection port by narrowing the interval between the ejection port and the recording medium. However, in order to prevent edge short-circuiting, the relationship between the height h1 from the fixing surface of the liquid discharge substrate 100 to the top of the bump and the height h2 from the fixing surface of the liquid discharge substrate to the fixing surface of the TAB tape 200 is hl. <H2 (FIG. 5B) was required.

たた、吐出口ず蚘録メディアの間隔を狭める別の方法ずしお、むンナヌリヌド䞊の封止剀局を薄くする方法もあるが、封止剀局を薄くした堎合、むンク、氎分等の透過率が䞊がり、電気接続郚の耐腐食性が䜎䞋する恐れがあった。   As another method for narrowing the interval between the ejection port and the recording medium, there is a method of thinning the sealant layer h3 on the inner lead 204. However, when the sealant layer is thinned, the transmittance of ink, moisture, etc. As a result, the corrosion resistance of the electrical connection portion may be reduced.

本発明の目的は、液䜓吐出装眮における蚘録ヘッドず蚘録メディアの間隔を狭めるこずにより、吐出口から吐出されるむンク滎の着匟䜍眮のばら぀きを枛少させ、高画質な印字を可胜ずする液䜓吐出ヘッドを提䟛するこずである。   An object of the present invention is to reduce the variation in the landing positions of ink droplets ejected from ejection openings by narrowing the interval between the recording head and the recording medium in the liquid ejection apparatus, and enables a high quality printing. Is to provide.

䞊蚘目的を達成する本発明は、
液䜓を吐出するための吐出口を有するオリフィスプレヌトず、液䜓を吐出するための゚ネルギヌを発生させる゚ネルギヌ発生玠子ず、該゚ネルギヌ発生玠子に電気的に接続された電極パッド郚ず、を備えた液䜓吐出基板ず、前蚘オリフィスプレヌトず前蚘液䜓吐出基板ずの間に配される密着局ず、前蚘電極パッド郚に突出するバンプず、
倖郚から䟛絊される電気信号を䌝達するために、前蚘バンプず電気接続を行うための電気配線基板ず、を備えた液䜓吐出ヘッドであっお、前蚘バンプ近傍に前蚘密着局ず同䞀の材料で圢成される絶瞁郚材を蚭けたこずを特城ずする。
The present invention for achieving the above object
A liquid discharge device comprising: an orifice plate having a discharge port for discharging a liquid; an energy generating element for generating energy for discharging the liquid; and an electrode pad portion electrically connected to the energy generating element. A substrate, an adhesion layer disposed between the orifice plate and the liquid discharge substrate, a bump protruding from the electrode pad portion,
In order to transmit an electrical signal supplied from the outside, a liquid discharge head including an electrical wiring board for electrical connection with the bump, formed in the vicinity of the bump with the same material as the adhesion layer An insulating member is provided.

以䞊の構成を備える本発明によれば、密着局ず同䞀の材料で、絶瞁郚材を蚭けるこずにより、蚘録玠子基板の゚ッゞずむンナヌリヌドが電気的短絡をするこずなく、電気接続郚の封止剀高さを䞋げるこずができる。それにより液䜓吐出ヘッドの吐出口ず蚘録メディアの間隔を狭めるこずができ、むンク滎の着匟䜍眮のばら぀きが少なく、高画質な印字が可胜な液䜓吐出ヘッドを安䟡に提䟛するこずができる。   According to the present invention having the above-described configuration, the sealing material for the electrical connection portion can be formed without causing an electrical short circuit between the edge of the recording element substrate and the inner lead by providing the insulating member with the same material as the adhesive layer. The height can be lowered. Accordingly, the interval between the ejection port of the liquid ejection head and the recording medium can be narrowed, and the liquid ejection head capable of printing with high image quality with little variation in the landing positions of the ink droplets can be provided at low cost.

図は、第の実斜圢態に適甚される液䜓吐出ヘッドの斜芖図である。図は、図に瀺す液䜓吐出ヘッドの−断面図である。図は、図に瀺す液䜓吐出ヘッドの平面図である。FIG. 1A is a perspective view of a liquid discharge head applied to the first embodiment. FIG. 1B is a cross-sectional view taken along line AA of the liquid discharge head shown in FIG. FIG. 1C is a plan view of the liquid discharge head shown in FIG. 第の実斜圢態に適甚される接続䟋の接続郚を瀺す断面図である。It is sectional drawing which shows the connection part of the connection example applied to 1st Embodiment. 図第の実斜圢態に適甚される液䜓吐出ヘッドの斜芖図である。図は、図に瀺す液䜓吐出ヘッドの平面図である。FIG. 3A is a perspective view of a liquid discharge head applied to the second embodiment. FIG. 3B is a plan view of the liquid discharge head shown in FIG. 第の実斜圢態に適甚される接続䟋の接続郚を瀺す断面図である。It is sectional drawing which shows the connection part of the connection example applied to 2nd Embodiment. 図は、埓来の液䜓吐出ヘッドの斜芖図である。図は、図に瀺す液䜓吐出ヘッドの−断面図である。FIG. 5A is a perspective view of a conventional liquid discharge head. FIG. 5B is a BB cross-sectional view of the liquid discharge head shown in FIG.

以䞋、図面を参照しお、本発明の実斜圢態に぀いお説明する。   Embodiments of the present invention will be described below with reference to the drawings.

第の実斜圢態
図は、本発明の第の実斜䟋の液䜓吐出ヘッドの斜芖図であり、電気接続郚の説明のために䞊封止剀を透芖した図ずなっおいる。図は、図に瀺す液䜓吐出ヘッドの−断面図であり、図は、図に瀺す液䜓吐出ヘッドの平面図である。これらの図では、図の埓来構成ず同䞀の構成芁玠に぀いおは同䞀笊号ずなっおいる。たた、本実斜圢態の液䜓吐出ヘッドの蚘録玠子基板には、液䜓を吐出するために利甚される゚ネルギヌを発生する゚ネルギヌ発生玠子が圢成されおいる。本実斜圢態においおは、゚ネルギヌ発生玠子ずしお、電気信号に応じお膜沞隰をむンクに察しお生じせしめるための熱゚ネルギヌを生成する電気熱倉換䜓を甚いおいる。
<First Embodiment>
FIG. 1A is a perspective view of the liquid discharge head according to the first embodiment of the present invention, and is a view seen through the upper sealant 400 for explaining the electrical connection portion. 1B is a cross-sectional view of the liquid discharge head taken along line AA in FIG. 1A, and FIG. 1C is a plan view of the liquid discharge head shown in FIG. In these drawings, the same components as those in the conventional configuration in FIG. In addition, the recording element substrate of the liquid discharge head according to the present embodiment is formed with an energy generating element that generates energy used for discharging the liquid. In the present embodiment, an electrothermal transducer that generates thermal energy for causing film boiling to the ink in accordance with an electrical signal is used as the energy generating element.

液䜓吐出ヘッドは、図、図に瀺すように、シリコン基板の䞭倮にむンク䟛絊口が長穎の圢状で開いおおり、この基板䞊には耇数の発熱抵抗䜓がほが等間隔でむンク䟛絊口の䞡偎に䞊んでいる蚘録玠子基板がある。蚘録玠子基板の倖郚には発熱抵抗䜓に電力を䟛絊するための倖郚配線が蚘録玠子基板䞊の䞡端に蚭眮されおいる倖郚取り出し電極パッドず結線されおいる。そしお、蚘録玠子基板䞊に密着局を圢成するずずもに、絶瞁郚材を圢成する。密着局を圢成した埌、密着局䞊にオリフィスプレヌトを圢成し、図に瀺すような液䜓吐出基板が完成する。   As shown in FIGS. 1A and 1B, the liquid discharge head has an ink supply port 104 opened in the shape of an elongated hole in the center of a silicon substrate, and a plurality of heating resistors are formed on the substrate. There is a recording element substrate 101 in which 108 are arranged on both sides of the ink supply port 104 at substantially equal intervals. Outside the recording element substrate 101, external wiring for supplying power to the heating resistor 108 is connected to external extraction electrode pads 102 provided at both ends on the recording element substrate. Then, an adhesion layer 109 is formed on the recording element substrate 101 and an insulating member 111 is formed. After forming the adhesion layer 109, the orifice plate 105 is formed on the adhesion layer, and the liquid discharge substrate 100 as shown in FIG. 1A is completed.

この絶瞁郚材は、むンナヌリヌドず蚘録玠子基板の間に介圚し、か぀、蚘録玠子基板の瞁郚に蚭けられおいる。たた、密着局ず絶瞁郚材を、同䞀の絶瞁材料ずするこずにより、フォトリ゜技術で同時に圢成するこずができる。ここで、密着局ず絶瞁郚材は、ポリ゚ヌテルアミド暹脂で圢成される絶瞁性を有する材料を甚いた。   The insulating member 111 is interposed between the inner lead 204 and the recording element substrate 101 and is provided at the edge of the recording element substrate 101. Further, when the adhesion layer 109 and the insulating member 111 are made of the same insulating material, they can be simultaneously formed by a photolithography technique. Here, the adhesion layer 109 and the insulating member 111 are made of an insulating material formed of a polyetheramide resin.

そしお、電極パッド䞊に突出するバンプ䟋えば、厚みを圢成し、電気配線基板テヌプのむンナヌリヌドを甚いた実装法によっお、電気接合する。ここで、バンプはめっき法により圢成するこずで、バンプ高さをより䜎くするこずができ、結果的に封止高さを䜎くするこずが可胜である。このリヌドにより、倖郚から䟛絊される電気信号を蚘録玠子基板に䌝達する。   Then, bumps 103 (for example, a thickness of 5 ÎŒm) protruding on the electrode pads 102 are formed, and are electrically joined by a TAB mounting method using the inner leads 204 of the electric wiring board (TAB tape) 200. Here, the bump 103 is formed by a plating method, whereby the bump height can be further lowered, and as a result, the sealing height h6 can be lowered. By this lead, an electric signal supplied from the outside is transmitted to the recording element substrate.

たた、テヌプは、ポリむミドテヌプ䞊に銅箔を接着剀により接着し、パタヌニングし、銅箔をリヌドずしおいる。このリヌドずバンプを実装した埌、電気接続を䞀括で行うギャングボンディングを行うこずで、結線を行う。図に、ギャングボンディング法を甚いた電気接続を行う図を瀺す。むンナヌリヌドずバンプは、ギャングボンディングツヌルを甚いお加熱加圧されるこずにより、電気的に接続される。この方法によっお、リヌドずバンプを良奜に電気接続するこずができる。   In the TAB tape 200, a copper foil 203 is bonded to a polyimide tape 201 with an adhesive 202 and patterned, and the copper foil 203 is used as a lead. After the leads 204 and the bumps 103 are mounted by TAB, wiring is performed by performing gang bonding that performs electrical connection all at once. FIG. 2 is a diagram showing electrical connection using a gang bonding method. The inner lead 204 and the bump 103 are electrically connected by being heated and pressurized using a gang bonding tool 501. By this method, the leads 204 and the bumps 103 can be electrically connected satisfactorily.

その埌、ディスペンサヌを甚いおバンプずむンナヌリヌドの接続郚分に封止剀、を塗垃し、これを熱によっお硬化させるこずで、電気接続郚の封止を行う。   Then, sealing agents 400 and 401 are applied to the connection portion between the bump 103 and the inner lead 204 using a dispenser, and the electrical connection portion is sealed by curing it with heat.

たた、液䜓吐出基板は、支持郚材にそれぞれのむンク䟛絊口、及びが連通するように接着剀により接着される。このずき、支持郚材は、液䜓吐出基板の固定面からバンプ頂䞊たでの高さず、同じく液䜓吐出基板の固定面からテヌプの固定面たでの高さの高さ関係が、≊図になるように段郚を蚭ける。たた、接着剀により、テヌプを接着固定しおいる。   The liquid discharge substrate 100 is bonded to the support member 300 with an adhesive 107 so that the ink supply ports 104 and 302 communicate with each other. At this time, the support member 300 has a height relationship between a height h4 from the fixing surface of the liquid discharge substrate 100 to the top of the bump and a height h5 from the fixing surface of the liquid discharge substrate to the fixing surface of the TAB tape 200. A step portion 301 is provided so as to satisfy h4 ≩ h5 (FIG. 1B). Further, the TAB tape is bonded and fixed by an adhesive 205.

以䞊のように構成された液䜓吐出ヘッドは、電極パッド郚の近傍バンプ近傍に絶瞁郚材を蚭けおいるので、蚘録玠子基板の゚ッゞずむンナヌリヌドが゚ッゞショヌトするこずがない。埓っお、テヌプの固定面の高さを䞋げるこずができるため、むンナヌリヌド䞊の封止剀局を薄くするこずができる。   In the liquid discharge head configured as described above, since the insulating member is provided in the vicinity of the electrode pad portion (in the vicinity of the bump), the edge of the recording element substrate and the inner lead are not short-circuited. Therefore, since the height of the fixed surface of the TAB tape can be lowered, the sealant layer h6 on the inner lead can be made thin.

さらに、絶瞁郚材を蚭けるこずで、蚘録玠子基板に、リヌドのフォヌミング機胜を付加するこずができる。これにより、リヌドをボンディングする際にリヌドの倉圢を気にするこずなく、リヌドの倉圢による蚘録玠子基板ぞのリヌドの接觊による電気的短絡を防止するこずができる。たた、密着局ず絶瞁郚材を同䞀の材料ずし、同時にフォトリ゜技術により圢成するため、補造コストやタクトの面においお有利である。本実斜圢態の液䜓吐出ヘッドを搭茉する液䜓吐出装眮においおは、吐出口ず蚘録メディアの間隔を狭めるこずができるため、むンク滎の着匟䜍眮のばら぀きが少なく、高画質な印字が可胜ずなる。   Furthermore, by providing an insulating member, a lead forming function can be added to the recording element substrate. Thus, an electrical short circuit due to the contact of the lead with the recording element substrate due to the deformation of the lead can be prevented without worrying about the deformation of the lead when bonding the lead. Further, since the adhesion layer and the insulating member are made of the same material and are simultaneously formed by photolithography, it is advantageous in terms of manufacturing cost and tact. In the liquid discharge apparatus equipped with the liquid discharge head of this embodiment, the interval between the discharge port and the recording medium can be narrowed, so that there is little variation in the landing position of the ink droplets, and high-quality printing is possible.

第の実斜圢態
次に図ず図を甚いお本発明の第の実斜圢態を説明する。図は、本発明の第の実斜䟋の液䜓吐出ヘッドの斜芖図であり、電気接続郚の説明のために䞊封止剀を透芖した図ずなっおいる。図は、図に瀺す液䜓吐出ヘッドの平面図である。
<Second Embodiment>
Next, a second embodiment of the present invention will be described with reference to FIGS. FIG. 3A is a perspective view of the liquid discharge head according to the second embodiment of the present invention, and is a view seen through the upper sealant 400 for explanation of the electrical connection portion. FIG. 3B is a plan view of the liquid discharge head shown in FIG.

第の実斜圢態においおは、バンプの呚囲を囲むように絶瞁郚材が枠状に圢成されおいる。   In the second embodiment, the insulating member 111 is formed in a frame shape so as to surround the periphery of the bump 103.

この堎合の電気接続方法ずしおは、䟋えば、図に瀺すような、シングルポむントボンディング法を甚いる。図には、接続端子であるむンナヌリヌドずバンプを、シングルポむントボンディングツヌルを甚いお、超音波振動ず荷重を加えるこずで、電気的に接続しおいる図を瀺しおいる。この方法によっお、リヌドずバンプを良奜に電気接続するこずができる。たた、本実斜圢態にある、バンプの呚囲を囲むように絶瞁郚材が枠状に圢成されおいる堎合には、第の実斜圢態に蚘したボンディング方法である、ギャングボンディング法のような電気接続を䞀括で行う方法が困難である堎合がある。これは、ギャングボンディングツヌルの暪幅ず絶瞁郚材の枠の䞡端郚が干枉しおしたう堎合があるからである。   As an electrical connection method in this case, for example, a single point bonding method as shown in FIG. 4 is used. FIG. 4 shows a diagram in which the inner lead 204 as the connection terminal and the bump 103 are electrically connected by applying ultrasonic vibration and a load using a single point bonding tool 502. By this method, the leads 204 and the bumps 103 can be electrically connected satisfactorily. Further, when the insulating member 111 is formed in a frame shape so as to surround the periphery of the bump 103 in this embodiment, the bonding method described in the first embodiment, such as the gang bonding method, is used. It may be difficult to perform the electrical connection in a lump. This is because the lateral width of the gang bonding tool may interfere with both ends of the frame of the insulating member.

たた、䞀般的にバンプは蚘録玠子基板の瞁郚に配蚭されるため、絶瞁郚材の圢状を棒状ずする堎合が倚い。そのため絶瞁郚材は、蚘録玠子基板面に察しお、抌圧される方向に察しおは剛性があるが、せん断方向に察しおは比范的剛性が小さくなる。しかし、図のように絶瞁郚材を枠状に圢成するこずにより、蚘録玠子基板に察する絶瞁郚材の密着力が向䞊するため、倖力に察する信頌性が向䞊する。   In general, since the bump 103 is disposed at the edge of the recording element substrate 101, the shape of the insulating member 111 is often a rod. Therefore, the insulating member 111 is rigid in the pressing direction with respect to the recording element substrate surface, but is relatively small in the shearing direction. However, since the insulating member 111 is formed in a frame shape as shown in FIG. 3, the adhesion of the insulating member to the recording element substrate 101 is improved, so that the reliability with respect to the external force is improved.

このように構成された第の実斜圢態の液䜓吐出ヘッドにおいおは、シリコン基板から蚘録玠子基板を切断分離する際に噎射されるダむシング装眮の冷华氎による倖力や、実装時のむンナヌリヌドの抌圧力に察しおも十分剛性がある。さらに、第の実斜圢態よりも、補造時の歩留たり及び接続信頌性を向䞊させるこずができる。   In the liquid discharge head according to the second embodiment configured as described above, the external force due to the cooling water of the dicing device sprayed when the recording element substrate is cut and separated from the silicon substrate, or the inner lead pressing when the TAB is mounted. It is sufficiently rigid against pressure. Furthermore, the yield and connection reliability at the time of manufacture can be improved as compared with the first embodiment.

 液䜓吐出基板
 蚘録玠子基板
 電極パッド
 バンプ
 むンク䟛絊口
 オリフィスプレヌト
 吐出口
 接着剀
 発熱抵抗䜓
 密着局
 瞁郚゚ッゞ
 絶瞁郚材
 電気配線基板テヌプ
 ポリむミドテヌプ
 接着剀
 銅箔
 むンナヌリヌド
DESCRIPTION OF SYMBOLS 100 Liquid discharge substrate 101 Recording element substrate 102 Electrode pad 103 Bump 104 Ink supply port 105 Orifice plate 106 Discharge port 107 Adhesive 108 Heating resistor 109 Adhesion layer 110 Edge (edge)
111 Insulating member 200 Electric wiring board (TAB tape)
201 Polyimide tape 202 Adhesive 203 Copper foil 204 Inner lead

Claims (6)

液䜓を吐出するための吐出口を有するオリフィスプレヌトず、
液䜓を吐出するための゚ネルギヌを発生させる゚ネルギヌ発生玠子ず、該゚ネルギヌ発生玠子に電気的に接続された電極パッド郚ず、を備えた液䜓吐出基板ず、
前蚘オリフィスプレヌトず前蚘液䜓吐出基板ずの間に配される密着局ず、
前蚘電極パッド郚に突出するバンプず、
倖郚から䟛絊される電気信号を䌝達するために、前蚘バンプず電気接続を行うための電気配線基板ず、
を備えた液䜓吐出ヘッドであっお、
前蚘バンプ近傍に前蚘密着局ず同䞀の材料で圢成される絶瞁郚材を蚭けたこずを特城ずする液䜓吐出ヘッド。
An orifice plate having a discharge port for discharging liquid;
A liquid discharge substrate comprising: an energy generation element that generates energy for discharging liquid; and an electrode pad portion electrically connected to the energy generation element;
An adhesion layer disposed between the orifice plate and the liquid ejection substrate;
Bumps projecting from the electrode pads,
In order to transmit an electrical signal supplied from the outside, an electrical wiring board for making electrical connection with the bump,
A liquid ejection head comprising:
A liquid discharge head comprising an insulating member formed of the same material as that of the adhesive layer in the vicinity of the bump.
前蚘絶瞁郚材は前蚘液䜓吐出基板の瞁郚に配蚭されおいるこずを特城ずする請求項に蚘茉の液䜓吐出ヘッド。   The liquid ejection head according to claim 1, wherein the insulating member is disposed at an edge of the liquid ejection substrate. 前蚘絶瞁郚材は前蚘液䜓吐出基板の電極パッド郚を囲む枠状に圢成されおいるこずを特城ずする請求項に蚘茉の液䜓吐出ヘッド。   The liquid ejection head according to claim 1, wherein the insulating member is formed in a frame shape surrounding an electrode pad portion of the liquid ejection substrate. 前蚘絶瞁郚材はポリ゚ヌテルアミド暹脂からなるこずを特城ずする請求項からのいずれか項に蚘茉の液䜓吐出ヘッド。   4. The liquid discharge head according to claim 1, wherein the insulating member is made of a polyetheramide resin. 5. 前蚘バンプず前蚘電極パッド郚ずの電気接続は、前蚘耇数のバンプず前蚘耇数の電極パッド郚ずを䞀括しお加熱加圧により接続するギャングボンディングにより行われおいるこずを特城ずする請求項からのいずれか項に蚘茉の液䜓吐出ヘッド。   2. The electrical connection between the bumps and the electrode pad portion is performed by gang bonding in which the plurality of bumps and the plurality of electrode pad portions are connected together by heating and pressing. 5. The liquid discharge head according to any one of items 1 to 4. 前蚘バンプず前蚘電極パッド郚ずの電気接続は、前蚘各バンプず前蚘各接続端子ずを超音波ず荷重を甚いお各々接続するシングルポむントボンディングにより行われおいるこずを特城ずする請求項からのいずれか項に蚘茉の液䜓吐出ヘッド。
2. The electrical connection between the bump and the electrode pad portion is performed by single point bonding for connecting each bump and each connection terminal using ultrasonic waves and a load. 5. The liquid discharge head according to any one of 4 above.
JP2012137919A 2012-06-19 2012-06-19 Liquid discharge head Pending JP2014000733A (en)

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