JP2014000733A - Liquid discharge head - Google Patents
Liquid discharge head Download PDFInfo
- Publication number
- JP2014000733A JP2014000733A JP2012137919A JP2012137919A JP2014000733A JP 2014000733 A JP2014000733 A JP 2014000733A JP 2012137919 A JP2012137919 A JP 2012137919A JP 2012137919 A JP2012137919 A JP 2012137919A JP 2014000733 A JP2014000733 A JP 2014000733A
- Authority
- JP
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- Prior art keywords
- liquid discharge
- liquid
- substrate
- bump
- discharge head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000007788 liquid Substances 0.000 title claims abstract description 66
- 239000000758 substrate Substances 0.000 claims abstract description 60
- 239000000463 material Substances 0.000 claims abstract description 5
- 239000010410 layer Substances 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000007599 discharging Methods 0.000 claims description 6
- 238000009429 electrical wiring Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 229920002614 Polyether block amide Polymers 0.000 claims description 2
- 239000012790 adhesive layer Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 238000009413 insulation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 27
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- WABPQHHGFIMREM-OIOBTWANSA-N lead-204 Chemical compound [204Pb] WABPQHHGFIMREM-OIOBTWANSA-N 0.000 description 8
- 239000000565 sealant Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000011889 copper foil Substances 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
æ¬çºæã¯ãã€ã³ã¯çã®èšé²æ¶²ãååºããŠèšé²åäœãè¡ãæ¶²äœååºè£ 眮ã«é©çšãããæ¶²äœååºãããã«é¢ãããã®ã§ããã   The present invention relates to a liquid discharge head applied to a liquid discharge apparatus that performs a recording operation by discharging a recording liquid such as ink.
åŸæ¥ã®æ¶²äœååºè£ 眮ã¯ãèšé²ã¡ãã£ã¢ã«å¯ŸããŠã€ã³ã¯ãååºãä»çãããŠèšé²ãè¡ãèšé²è£ 眮ã§ãããæ¬¡ã®ãããªç¹åŸŽãæãããããªãã¡ãé«éã«èšé²ãè¡ãããšãã§ãããæ§ã ãªèšé²ã¡ãã£ã¢ã«å¯ŸããŠèšé²ãå¯èœã§ãããèšé²æã«ãããéšé³ãã»ãšãã©çããªããã©ã³ãã³ã°ã³ã¹ããå®ããªã©ã§ããããã®ãããããªã³ã¿ãã¯ãŒãããã»ããµããã¡ã¯ã·ããªãè€åæ©ãªã©ã®èšé²æ©æ§ãæ ãè£ çœ®ãšããŠåºãæ¡çšãããŠããããã®ãããªæ¶²äœååºè£ çœ®ã«æèŒãããã€ã³ã¯ãžã§ãèšé²ãããã¯ãã€ã³ã¯ãååºããæ¹åŒãšããŠãããšãŸçŽ åãªã©ã®é»æ°æ©æ¢°å€æçŽ åã«ãã£ãŠã€ã³ã¯ãå å§ããã€ã³ã¯æ»Žãååºããããã®ãããããŸãçºç±æµæäœãæãã黿°ç±å€æçŽ åã«ãã£ãŠã€ã³ã¯ãå ç±ããèæ²žéš°ã®äœçšã«ããã€ã³ã¯æ»Žãååºããããã®ãªã©ãç¥ãããŠããã   A conventional liquid ejecting apparatus is a recording apparatus that performs recording by ejecting and adhering ink to a recording medium, and has the following characteristics. That is, recording can be performed on various recording media that can be recorded at high speed, noise during recording hardly occurs, and running cost is low. For this reason, it is widely adopted as an apparatus that bears a recording mechanism such as a printer, a word processor, a facsimile machine, and a copying machine. An ink jet recording head mounted on such a liquid ejecting apparatus is one that ejects ink droplets by pressurizing ink with an electromechanical conversion element such as a piezo element as a method for ejecting ink. Also known is an ink that heats ink by an electrothermal conversion element having a heating resistor and ejects ink droplets by the action of film boiling.
ãŸããäžè¿°ããã€ã³ã¯ã®ååºæ¹åŒã«ãããŠã黿°ç±å€æçŽ åãçšãããã®ã¯ãçºç±æµæäœãé åãããæ¶²äœååºåºæ¿ã«å¯ŸããŠå¹³è¡ã«ã€ã³ã¯æ»Žãååºãããæ¹åŒïŒãšããžã·ã¥ãŒã¿ãŒæ¹åŒïŒããããããã«ã¯ãçºç±æµæäœãé åãããæ¶²äœååºåºæ¿ã«å¯ŸããŠåçŽã«ã€ã³ã¯æ»Žãååºãããæ¹åŒïŒãµã€ãã·ã¥ãŒã¿ãŒæ¹åŒïŒãšãããã   Among the ink ejection methods described above, those using electrothermal conversion elements include a method (edge shooter method) in which ink droplets are ejected in parallel to a liquid ejection substrate on which heating resistors are arranged. Furthermore, there is a method (side shooter method) in which ink droplets are ejected perpendicularly to a liquid ejection substrate on which heating resistors are arranged.
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  FIG. 5A shows a configuration of a general side shooter type liquid discharge head. FIG.5 (b) shows the BB cross section of Fig.5 (a). As shown in FIG. 5, an
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  After the TAB mounting as described above, the
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  The ink used for recording is supplied from the
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  In the liquid discharge head having the conventional configuration, the recording element substrate and the
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  In addition, the liquid discharge head described above needs to be improved in response to high image quality typified by photographic printing, which is required for recent liquid discharge apparatuses. In high image quality, it is possible to further reduce variations in landing positions of ink droplets ejected from the ejection port by narrowing the interval between the ejection port and the recording medium. However, in order to prevent edge short-circuiting, the relationship between the height h1 from the fixing surface of the
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  As another method for narrowing the interval between the ejection port and the recording medium, there is a method of thinning the sealant layer h3 on the
æ¬çºæã®ç®çã¯ãæ¶²äœååºè£ 眮ã«ãããèšé²ããããšèšé²ã¡ãã£ã¢ã®ééãçããããšã«ãããååºå£ããååºãããã€ã³ã¯æ»Žã®ç匟äœçœ®ã®ã°ãã€ããæžå°ãããé«ç»è³ªãªå°åãå¯èœãšããæ¶²äœååºããããæäŸããããšã§ããã   An object of the present invention is to reduce the variation in the landing positions of ink droplets ejected from ejection openings by narrowing the interval between the recording head and the recording medium in the liquid ejection apparatus, and enables a high quality printing. Is to provide.
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The present invention for achieving the above object
A liquid discharge device comprising: an orifice plate having a discharge port for discharging a liquid; an energy generating element for generating energy for discharging the liquid; and an electrode pad portion electrically connected to the energy generating element. A substrate, an adhesion layer disposed between the orifice plate and the liquid discharge substrate, a bump protruding from the electrode pad portion,
In order to transmit an electrical signal supplied from the outside, a liquid discharge head including an electrical wiring board for electrical connection with the bump, formed in the vicinity of the bump with the same material as the adhesion layer An insulating member is provided.
以äžã®æ§æãåããæ¬çºæã«ããã°ãå¯çå±€ãšåäžã®ææã§ãçµ¶çžéšæãèšããããšã«ãããèšé²çŽ ååºæ¿ã®ãšããžãšã€ã³ããŒãªãŒãã黿°çç絡ãããããšãªãã黿°æ¥ç¶éšã®å°æ¢å€é«ããäžããããšãã§ãããããã«ããæ¶²äœååºãããã®ååºå£ãšèšé²ã¡ãã£ã¢ã®ééãçããããšãã§ããã€ã³ã¯æ»Žã®ç匟äœçœ®ã®ã°ãã€ããå°ãªããé«ç»è³ªãªå°åãå¯èœãªæ¶²äœååºããããå®äŸ¡ã«æäŸããããšãã§ããã   According to the present invention having the above-described configuration, the sealing material for the electrical connection portion can be formed without causing an electrical short circuit between the edge of the recording element substrate and the inner lead by providing the insulating member with the same material as the adhesive layer. The height can be lowered. Accordingly, the interval between the ejection port of the liquid ejection head and the recording medium can be narrowed, and the liquid ejection head capable of printing with high image quality with little variation in the landing positions of the ink droplets can be provided at low cost.
以äžãå³é¢ãåç §ããŠãæ¬çºæã®å®æœåœ¢æ ã«ã€ããŠèª¬æããã   Embodiments of the present invention will be described below with reference to the drawings.
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<First Embodiment>
FIG. 1A is a perspective view of the liquid discharge head according to the first embodiment of the present invention, and is a view seen through the
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ç·ãèšé²çŽ ååºæ¿äžã®äž¡ç«¯ã«èšçœ®ãããŠããå€éšåãåºã黿¥µãããïŒïŒïŒãšçµç·ãããŠããããããŠãèšé²çŽ ååºæ¿ïŒïŒïŒäžã«å¯çå±€ïŒïŒïŒã圢æãããšãšãã«ãçµ¶çžéšæïŒïŒïŒã圢æãããå¯çå±€ïŒïŒïŒã圢æããåŸãå¯çå±€äžã«ãªãªãã£ã¹ãã¬ãŒãïŒïŒïŒã圢æããå³ïŒïŒïœïŒã«ç€ºããããªæ¶²äœååºåºæ¿ïŒïŒïŒã宿ããã
  As shown in FIGS. 1A and 1B, the liquid discharge head has an
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  The insulating
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æ³ã«ãã£ãŠã黿°æ¥åãããããã§ããã³ãïŒïŒïŒã¯ãã£ãæ³ã«ãã圢æããããšã§ããã³ãé«ããããäœãããããšãã§ããçµæçã«å°æ¢é«ãïœïŒãäœãããããšãå¯èœã§ããããã®ãªãŒãã«ãããå€éšããäŸçµŠããã黿°ä¿¡å·ãèšé²çŽ ååºæ¿ã«äŒéããã
  Then, bumps 103 (for example, a thickness of 5 Όm) protruding on the
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  In the
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  Then, sealing
ãŸããæ¶²äœååºåºæ¿ïŒïŒïŒã¯ãæ¯æéšæïŒïŒïŒã«ããããã®ã€ã³ã¯äŸçµŠå£ïŒïŒïŒãåã³ïŒïŒïŒãé£éããããã«æ¥çå€ïŒïŒïŒã«ããæ¥çãããããã®ãšããæ¯æéšæïŒïŒïŒã¯ãæ¶²äœååºåºæ¿ïŒïŒïŒã®åºå®é¢ãããã³ãé äžãŸã§ã®é«ãïœïŒãšãåããæ¶²äœååºåºæ¿ã®åºå®é¢ããããŒãïŒïŒïŒã®åºå®é¢ãŸã§ã®é«ãïœïŒã®é«ãé¢ä¿ããïœïŒâŠïœïŒïŒå³ïŒïŒïœïŒïŒã«ãªãããã«æ®µéšïŒïŒïŒãèšããããŸããæ¥çå€ïŒïŒïŒã«ãããããŒããæ¥çåºå®ããŠããã
  The
以äžã®ããã«æ§æãããæ¶²äœååºãããã¯ã黿¥µãããéšã®è¿åïŒãã³ãè¿åïŒã«çµ¶çžéšæãèšããŠããã®ã§ãèšé²çŽ ååºæ¿ã®ãšããžãšã€ã³ããŒãªãŒãããšããžã·ã§ãŒãããããšããªããåŸã£ãŠãããŒãã®åºå®é¢ã®é«ããäžããããšãã§ãããããã€ã³ããŒãªãŒãäžã®å°æ¢å€å±€ïœïŒãèãããããšãã§ããã   In the liquid discharge head configured as described above, since the insulating member is provided in the vicinity of the electrode pad portion (in the vicinity of the bump), the edge of the recording element substrate and the inner lead are not short-circuited. Therefore, since the height of the fixed surface of the TAB tape can be lowered, the sealant layer h6 on the inner lead can be made thin.
ããã«ãçµ¶çžéšæãèšããããšã§ãèšé²çŽ ååºæ¿ã«ããªãŒãã®ãã©ãŒãã³ã°æ©èœãä»å ããããšãã§ãããããã«ããããªãŒãããã³ãã£ã³ã°ããéã«ãªãŒãã®å€åœ¢ãæ°ã«ããããšãªãããªãŒãã®å€åœ¢ã«ããèšé²çŽ ååºæ¿ãžã®ãªãŒãã®æ¥è§Šã«ãã黿°çç絡ã鲿¢ããããšãã§ããããŸããå¯çå±€ãšçµ¶çžéšæãåäžã®ææãšããåæã«ãã©ããªãœæè¡ã«ãã圢æããããã補é ã³ã¹ããã¿ã¯ãã®é¢ã«ãããŠæå©ã§ãããæ¬å®æœåœ¢æ ã®æ¶²äœååºããããæèŒããæ¶²äœååºè£ 眮ã«ãããŠã¯ãååºå£ãšèšé²ã¡ãã£ã¢ã®ééãçããããšãã§ãããããã€ã³ã¯æ»Žã®ç匟äœçœ®ã®ã°ãã€ããå°ãªããé«ç»è³ªãªå°åãå¯èœãšãªãã   Furthermore, by providing an insulating member, a lead forming function can be added to the recording element substrate. Thus, an electrical short circuit due to the contact of the lead with the recording element substrate due to the deformation of the lead can be prevented without worrying about the deformation of the lead when bonding the lead. Further, since the adhesion layer and the insulating member are made of the same material and are simultaneously formed by photolithography, it is advantageous in terms of manufacturing cost and tact. In the liquid discharge apparatus equipped with the liquid discharge head of this embodiment, the interval between the discharge port and the recording medium can be narrowed, so that there is little variation in the landing position of the ink droplets, and high-quality printing is possible.
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<Second Embodiment>
Next, a second embodiment of the present invention will be described with reference to FIGS. FIG. 3A is a perspective view of the liquid discharge head according to the second embodiment of the present invention, and is a view seen through the
第ïŒã®å®æœåœ¢æ
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  In the second embodiment, the insulating
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  As an electrical connection method in this case, for example, a single point bonding method as shown in FIG. 4 is used. FIG. 4 shows a diagram in which the
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  In general, since the
ãã®ããã«æ§æããã第ïŒã®å®æœåœ¢æ ã®æ¶²äœååºãããã«ãããŠã¯ãã·ãªã³ã³åºæ¿ããèšé²çŽ ååºæ¿ãåæåé¢ããéã«åŽå°ããããã€ã·ã³ã°è£ 眮ã®å·åŽæ°Žã«ããå€åããå®è£ æã®ã€ã³ããŒãªãŒãã®æŒå§åã«å¯ŸããŠãåååæ§ããããããã«ã第ïŒã®å®æœåœ¢æ ããããè£œé æã®æ©çãŸãåã³æ¥ç¶ä¿¡é Œæ§ãåäžãããããšãã§ããã   In the liquid discharge head according to the second embodiment configured as described above, the external force due to the cooling water of the dicing device sprayed when the recording element substrate is cut and separated from the silicon substrate, or the inner lead pressing when the TAB is mounted. It is sufficiently rigid against pressure. Furthermore, the yield and connection reliability at the time of manufacture can be improved as compared with the first embodiment.
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DESCRIPTION OF
111 Insulating
Claims (6)
æ¶²äœãååºããããã®ãšãã«ã®ãŒãçºçããããšãã«ã®ãŒçºççŽ åãšã該ãšãã«ã®ãŒçºççŽ åã«é»æ°çã«æ¥ç¶ããã黿¥µãããéšãšããåããæ¶²äœååºåºæ¿ãšã
åèšãªãªãã£ã¹ãã¬ãŒããšåèšæ¶²äœååºåºæ¿ãšã®éã«é ãããå¯çå±€ãšã
åèšé»æ¥µãããéšã«çªåºãããã³ããšã
å€éšããäŸçµŠããã黿°ä¿¡å·ãäŒéããããã«ãåèšãã³ããšé»æ°æ¥ç¶ãè¡ãããã®é»æ°é ç·åºæ¿ãšã
ãåããæ¶²äœååºãããã§ãã£ãŠã
åèšãã³ãè¿åã«åèšå¯çå±€ãšåäžã®ææã§åœ¢æãããçµ¶çžéšæãèšããããšãç¹åŸŽãšããæ¶²äœååºãããã An orifice plate having a discharge port for discharging liquid;
A liquid discharge substrate comprising: an energy generation element that generates energy for discharging liquid; and an electrode pad portion electrically connected to the energy generation element;
An adhesion layer disposed between the orifice plate and the liquid ejection substrate;
Bumps projecting from the electrode pads,
In order to transmit an electrical signal supplied from the outside, an electrical wiring board for making electrical connection with the bump,
A liquid ejection head comprising:
A liquid discharge head comprising an insulating member formed of the same material as that of the adhesive layer in the vicinity of the bump.
2. The electrical connection between the bump and the electrode pad portion is performed by single point bonding for connecting each bump and each connection terminal using ultrasonic waves and a load. 5. The liquid discharge head according to any one of 4 above.
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JP2012137919A JP2014000733A (en) | 2012-06-19 | 2012-06-19 | Liquid discharge head |
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JP2012137919A JP2014000733A (en) | 2012-06-19 | 2012-06-19 | Liquid discharge head |
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2012
- 2012-06-19 JP JP2012137919A patent/JP2014000733A/en active Pending
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