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JP2014074380A5 - - Google Patents

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Publication number
JP2014074380A5
JP2014074380A5 JP2012222878A JP2012222878A JP2014074380A5 JP 2014074380 A5 JP2014074380 A5 JP 2014074380A5 JP 2012222878 A JP2012222878 A JP 2012222878A JP 2012222878 A JP2012222878 A JP 2012222878A JP 2014074380 A5 JP2014074380 A5 JP 2014074380A5
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JP
Japan
Prior art keywords
limit value
current limit
dry vacuum
vacuum pump
value
Prior art date
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Application number
JP2012222878A
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Japanese (ja)
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JP2014074380A (en
JP6050081B2 (en
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Publication date
Application filed filed Critical
Priority claimed from JP2012222878A external-priority patent/JP6050081B2/en
Priority to JP2012222878A priority Critical patent/JP6050081B2/en
Priority to TW102132161A priority patent/TWI601881B/en
Priority to KR1020130113674A priority patent/KR101707267B1/en
Priority to CN201710586825.XA priority patent/CN107237752B/en
Priority to CN201310460434.5A priority patent/CN103711697B/en
Publication of JP2014074380A publication Critical patent/JP2014074380A/en
Publication of JP2014074380A5 publication Critical patent/JP2014074380A5/ja
Publication of JP6050081B2 publication Critical patent/JP6050081B2/en
Application granted granted Critical
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Claims (8)

少なくとも１つのポンプユニットと、
前記ポンプユニットを制御する制御装置とを備えたドライ真空ポンプ装置であって、
前記ポンプユニットは、
ドライ真空ポンプと、
前記ドライ真空ポンプを駆動するモータと、
前記モータの回転速度を制御するインバータとを備え、
前記制御装置は、前記インバータの出力電流制限値を第１の電流制限値から第２の電流制限値に切り替える機能を有し、前記第１の電流制限値は前記インバータが前記モータに連続的に流すことができる電流の最大値である連続定格電流値であり、前記第２の電流制限値は前記連続定格電流値を超える値であることを特徴とするドライ真空ポンプ装置。 At least one pump unit;
A dry vacuum pump device comprising a control device for controlling the pump unit,
The pump unit is
A dry vacuum pump,
A motor for driving the dry vacuum pump;
An inverter for controlling the rotation speed of the motor,
The control device has a function of switching the output current limit value of the inverter from a first current limit value to a second current limit value, and the first current limit value is continuously applied to the motor by the inverter. The dry vacuum pump device is characterized in that it is a continuous rated current value that is a maximum value of a current that can flow, and the second current limit value is a value that exceeds the continuous rated current value. 前記制御装置は、前記インバータが前記第１の電流制限値に相当する電流を出力しているときに、前記ドライ真空ポンプの回転速度が所定の目標回転速度から低下したら、前記インバータの出力電流制限値を前記第１の電流制限値から前記第２の電流制限値に切り替えることを特徴とする請求項１に記載のドライ真空ポンプ装置。   When the rotational speed of the dry vacuum pump decreases from a predetermined target rotational speed when the inverter outputs a current corresponding to the first current limiting value, the control device limits the output current of the inverter. The dry vacuum pump device according to claim 1, wherein the value is switched from the first current limit value to the second current limit value. 前記制御装置は、前記ポンプの回転速度が前記目標回転速度に復帰していることを検出すると、前記インバータの出力電流制限値を前記第２の電流制限値から前記第１の電流制限値に切り替えることを特徴とする請求項２に記載のドライ真空ポンプ装置。 When detecting that the rotation speed of the pump has returned to the target rotation speed, the control device switches the output current limit value of the inverter from the second current limit value to the first current limit value. The dry vacuum pump device according to claim 2 . 前記制御装置は、前記第２の電流制限値に相当する電流の出力時間が所定のしきい値を超えた場合、前記インバータの出力電流制限値を前記第２の電流制限値から前記第１の電流制限値に切り替えることを特徴とする請求項２に記載のドライ真空ポンプ装置。 When the output time of the current corresponding to the second current limit value exceeds a predetermined threshold, the control device changes the output current limit value of the inverter from the second current limit value to the first current limit value. The dry vacuum pump device according to claim 2 , wherein the dry vacuum pump device is switched to a current limit value. 前記ポンプユニットの温度を測定する少なくとも１つの温度センサをさらに備えており、
前記制御装置は、前記温度センサによって測定された前記温度が所定のしきい値を超えると、前記インバータの出力電流制限値を前記第２の電流制限値から前記第１の電流制限値に切り替えることを特徴とする請求項１に記載のドライ真空ポンプ装置。 Further comprising at least one temperature sensor for measuring the temperature of the pump unit;
The control device switches the output current limit value of the inverter from the second current limit value to the first current limit value when the temperature measured by the temperature sensor exceeds a predetermined threshold value. The dry vacuum pump device according to claim 1. 前記少なくとも１つの温度センサは、前記ドライ真空ポンプのポンプケーシングの温度を測定する温度センサ、前記ドライ真空ポンプの軸受の温度を測定する温度センサ、前記モータの温度を測定する温度センサ、前記ドライ真空ポンプのポンプロータの温度を測定する温度センサ、前記ドライ真空ポンプの吸気ガスの温度を測定する温度センサ、および前記ドライ真空ポンプの排気ガスの温度を測定する温度センサから選択されることを特徴とする請求項５に記載のドライ真空ポンプ装置。 The at least one temperature sensor includes a temperature sensor that measures a temperature of a pump casing of the dry vacuum pump, a temperature sensor that measures a temperature of a bearing of the dry vacuum pump, a temperature sensor that measures a temperature of the motor, and the dry vacuum. It is selected from a temperature sensor that measures the temperature of the pump rotor of the pump, a temperature sensor that measures the temperature of the intake gas of the dry vacuum pump, and a temperature sensor that measures the temperature of the exhaust gas of the dry vacuum pump. The dry vacuum pump device according to claim 5 . 前記ドライ真空ポンプ装置の外部に設けられた外部指令装置からの指令に従って、前記インバータの出力電流制限値を前記第１の電流制限値から前記第２の電流制限値に切り替えることを特徴とする請求項１に記載のドライ真空ポンプ装置。   The output current limit value of the inverter is switched from the first current limit value to the second current limit value in accordance with a command from an external command device provided outside the dry vacuum pump device. Item 2. The dry vacuum pump device according to Item 1. 前記少なくとも１つのポンプユニットは、大気圧の気体を排出するメインポンプユニットと真空圧の気体を排出するブースターポンプユニットであり、
前記ドライ真空ポンプ装置に供給される電力が予め設定された値を超えないように、前記メインポンプと前記ブースターポンプとを運転することを特徴とする請求項１乃至７のいずれか一項に記載のドライ真空ポンプ装置。 The at least one pump unit is a main pump unit that discharges atmospheric pressure gas and a booster pump unit that discharges vacuum pressure gas,
The main pump and the booster pump are operated so that the power supplied to the dry vacuum pump device does not exceed a preset value. Dry vacuum pump device.
JP2012222878A 2012-10-05 2012-10-05 Dry vacuum pump device Active JP6050081B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012222878A JP6050081B2 (en) 2012-10-05 2012-10-05 Dry vacuum pump device
TW102132161A TWI601881B (en) 2012-10-05 2013-09-06 Dry vacuum pump device and control device using the dry vacuum pump
KR1020130113674A KR101707267B1 (en) 2012-10-05 2013-09-25 Dry vacuum pump apparatus and control apparatus for the same
CN201310460434.5A CN103711697B (en) 2012-10-05 2013-09-30 Dry vacuum pump apparatus and in control device used in the dry vacuum pump
CN201710586825.XA CN107237752B (en) 2012-10-05 2013-09-30 Dry vacuum pump apparatus and vacuum pumping system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012222878A JP6050081B2 (en) 2012-10-05 2012-10-05 Dry vacuum pump device

Publications (3)

Publication Number Publication Date
JP2014074380A JP2014074380A (en) 2014-04-24
JP2014074380A5 true JP2014074380A5 (en) 2015-10-15
JP6050081B2 JP6050081B2 (en) 2016-12-21

Family

ID=50404956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012222878A Active JP6050081B2 (en) 2012-10-05 2012-10-05 Dry vacuum pump device

Country Status (4)

Country Link
JP (1) JP6050081B2 (en)
KR (1) KR101707267B1 (en)
CN (2) CN103711697B (en)
TW (1) TWI601881B (en)

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