JP2013205019A5 - - Google Patents
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- Publication number
- JP2013205019A5 JP2013205019A5 JP2012070583A JP2012070583A JP2013205019A5 JP 2013205019 A5 JP2013205019 A5 JP 2013205019A5 JP 2012070583 A JP2012070583 A JP 2012070583A JP 2012070583 A JP2012070583 A JP 2012070583A JP 2013205019 A5 JP2013205019 A5 JP 2013205019A5
- Authority
- JP
- Japan
- Prior art keywords
- extending
- support
- physical quantity
- base
- extension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001514 detection method Methods 0.000 claims 10
- 230000005484 gravity Effects 0.000 claims 1
Claims (8)
前記基部に継ぎ手部を介して接続された可動部と、
前記基部と前記可動部とに固定されている物理量検出素子と、
前記基部から第１固定部まで延出している第１支持部と、
前記基部から第２固定部まで延出している第２支持部と、
を含み、
前記可動部の厚み方向に沿った平面視において、
前記可動部の少なくとも一部を挟む位置に前記第１支持部と前記第２支持部とが配置され、
前記第１支持部は、
前記基部よりも前記基部から前記可動部に向かう方向である第１方向に位置している第１折返し部と、
前記基部から前記第１折返し部まで、延出している第１延出部と、
前記第１折返し部から、前記第１折返し部よりも前記第１方向に対し反対向きの第２方向に位置している前記第１固定部まで、延出している第２延出部と、
を有し、
前記第１延出部は、前記第２延出部側に曲がった構造部を有しており、
前記第２延出部は、前記第１延出部側に曲がった構造部を有しており、
前記第２支持部は、
前記基部よりも前記第１方向に位置している第２折返し部と、
前記基部から前記第２折返し部まで、延出している第３延出部と、
前記第２折返し部から、前記第２折返し部よりも前記第２方向に位置している前記第２固定部まで、延出している第４延出部と、
を有し、
前記第３延出部は、前記第４延出部側に曲がった構造部を有しており、
前記第４延出部は、前記第３延出部側に曲がった構造部を有している、物理量検出デバイス。 The base,
A movable part connected to the base part via a joint part;
A physical quantity detection element fixed to the base and the movable part;
A first support portion extending from the base portion to the first fixed portion;
A second support portion extending from the base portion to the second fixed portion;
Including
In a plan view along the thickness direction of the movable part ,
The first support part and the second support part are arranged at a position sandwiching at least a part of the movable part,
The first support part is
A first folded portion located in a first direction which is a direction from the base toward the movable portion rather than the base ;
A first extending portion extending from the base portion to the first folded portion;
A second extending portion extending from the first folded portion to the first fixed portion located in a second direction opposite to the first direction than the first folded portion;
Have
The first extension part has a structure part bent toward the second extension part side,
The second extension part has a structure part bent toward the first extension part side,
The second support part is
A second folded portion located in the first direction with respect to the base portion;
A third extending portion extending from the base portion to the second folded portion;
A fourth extending portion extending from the second folded portion to the second fixed portion located in the second direction rather than the second folded portion;
Have
The third extension part has a structure part bent toward the fourth extension part side,
The fourth extension part is a physical quantity detection device having a structure part bent toward the third extension part.
前記第１延出部の前記第２延出部側に曲がった構造部の側面である第１側面と、前記第２延出部の前記第１延出部側に曲がった構造部の側面である第２側面とは、それぞれ平坦な面であり、且つ、対向して配置されており、
前記第３延出部の前記第４延出部側に曲がった構造部の側面である第３側面と、前記第４延出部の前記第３延出部側に曲がった構造部の側面である第４側面とは、それぞれ平坦な面であり、且つ、対向して配置されている、物理量検出デバイス。 In claim 1,
A first side surface which is a side surface of the structure portion bent toward the second extension portion of the first extension portion, and a side surface of the structure portion bent toward the first extension portion of the second extension portion. A certain second side surface is a flat surface and is disposed to face each other.
A third side surface that is a side surface of the third extending portion bent toward the fourth extending portion side, and a side surface of the structure portion bent toward the third extending portion side of the fourth extending portion. A certain 4th side is a physical quantity detection device which is a flat surface, respectively, and is arranged facing .
前記第１支持部および前記第２支持部のうち少なくとも一方、または前記基部から延出している連結部と、
前記連結部から第３固定部まで延出している第３支持部と、
前記連結部から第４固定部まで延出している第４支持部と、
をさらに含み、
前記平面視において、
前記連結部は、前記可動部と間隙を介して前記第１方向に位置し、
前記第３支持部は、曲がった構造部を有しており、
前記第４支持部は、曲がった構造部を有している、物理量検出デバイス。 In claim 1 or 2,
At least one of the first support part and the second support part, or a connecting part extending from the base part;
A third support portion extending from the connecting portion to a third fixed portion;
A fourth support portion extending from the connecting portion to a fourth fixed portion;
Further including
In the plan view,
The connecting part is located in the first direction with a gap between the movable part,
The third support part has a bent structure part ,
The fourth support part is a physical quantity detection device having a bent structure part .
前記第２延出部は、
前記第１方向と交差する第３方向に延出している部分を有し、
前記第４延出部は、
前記第３方向に対し反対向きの第４方向に延出している部分を有し、
前記第３支持部は、
前記第２方向に延出している部分を有し、
前記第４支持部は、
前記第２方向に延出している部分を有している、物理量検出デバイス。 In claim 3 ,
Before Symbol the second extending portion,
It has a portion extends in a third direction intersecting the front Symbol first direction,
The fourth extending portion,
It has a portion extends in the fourth direction opposite to the previous SL third direction,
The third support portion,
Has a portion that is pre SL extending in the second direction,
The fourth supporting portion,
Before SL has a portion that extends in the second direction, the physical quantity detection device.
前記平面視において、前記第１固定部、前記第２固定部、前記第３固定部、および前記第４固定部に囲まれた範囲内に、重心がある、物理量検出デバイス。 In claim 3 or 4,
Prior Kitaira plane view, the first fixing portion, the second fixing portion, the third fixing portion, and within the range surrounded by the fourth fixing unit, there is a center of gravity, the physical quantity detection device.
前記第１支持部の厚さは、前記第１支持部の幅よりも大きく、
前記第２支持部の厚さは、前記第２支持部の幅よりも大きい、物理量検出デバイス。 In any one of Claims 1 thru | or 5,
The thickness of the first support part is larger than the width of the first support part,
The physical quantity detection device, wherein the thickness of the second support part is larger than the width of the second support part.
前記物理量検出デバイスを収容するパッケージと、
を含む、物理量検出器。 The physical quantity detection device according to any one of claims 1 to 6,
A package containing the physical quantity detection device;
Including a physical quantity detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012070583A JP5950087B2 (en) | 2012-03-27 | 2012-03-27 | Physical quantity detection device, physical quantity detector, and electronic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012070583A JP5950087B2 (en) | 2012-03-27 | 2012-03-27 | Physical quantity detection device, physical quantity detector, and electronic device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013205019A JP2013205019A (en) | 2013-10-07 |
| JP2013205019A5 true JP2013205019A5 (en) | 2015-05-07 |
| JP5950087B2 JP5950087B2 (en) | 2016-07-13 |
Family
ID=49524279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012070583A Expired - Fee Related JP5950087B2 (en) | 2012-03-27 | 2012-03-27 | Physical quantity detection device, physical quantity detector, and electronic device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5950087B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106771358A (en) * | 2016-11-30 | 2017-05-31 | 西安交通大学 | A kind of full quartz resonance accelerometer of miniature differential formula |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19719779A1 (en) * | 1997-05-10 | 1998-11-12 | Bosch Gmbh Robert | Acceleration sensor |
| JP2004530134A (en) * | 2001-05-15 | 2004-09-30 | ハネウェル・インターナショナル・インコーポレーテッド | Accelerometer strain reduction structure |
| JP4905574B2 (en) * | 2010-03-25 | 2012-03-28 | 株式会社豊田中央研究所 | Laminated structure with moving parts |
| JP5825258B2 (en) * | 2010-06-21 | 2015-12-02 | 大日本印刷株式会社 | Mechanical quantity sensor |
-
2012
- 2012-03-27 JP JP2012070583A patent/JP5950087B2/en not_active Expired - Fee Related
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