JP2013111513A - Nozzle inspection device, spray coating device mounted with the same, and nozzle inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suitably determine abnormality of a two-liquid nozzle which mixes and jets liquid and gas, and the degree of deterioration.SOLUTION: A nozzle inspection device 200 includes measurement sections 211, 212, and a determination section 232, and inspects whether a two-liquid nozzle 110 mixing and jetting the liquid and gas is abnormal. The measurement sections 211, 212 measure information associated with at least one of the pressure and flow rate of the liquid supplied to the two-liquid nozzle 110. The determination section 232 determines whether the two-liquid nozzle 110 is abnormal and the degree of deterioration based upon quantities of variation of the information measured by the measurement sections 211, 212 from an average value of the information detected in a predetermined time.

Description

  The present invention relates to a nozzle inspection apparatus, a spray film forming apparatus on which the nozzle inspection apparatus is mounted, and a nozzle inspection method. More specifically, the present invention relates to a technique for determining abnormality of a two-fluid nozzle that mixes and injects liquid and gas.

  A transparent conductive film is often used as a transparent electrode for a solar cell that absorbs sunlight and converts it into electrical energy, or a liquid crystal display element that transmits light from a backlight light source because of its transparency and conductivity. .

  As the transparent conductive film material, indium tin oxide (hereinafter also referred to as ITO), fluorine-doped tin oxide (hereinafter also referred to as FTO), zinc oxide doped with aluminum or gallium, or the like is used.

  Among these, the ITO film has a low specific resistance and can be easily etched, and is widely used for transparent electrodes of liquid crystal display elements. However, indium used in the ITO film is expensive due to resource limitations. On the other hand, FTO is not as low in resistivity as ITO, but it is excellent in heat resistance, has little influence on resources, and is often used for solar cells. In addition, zinc oxide doped with aluminum or gallium is inexpensive, but currently has a problem of high specific resistance.

  Examples of means for forming these transparent conductive films include a sputtering method requiring a reduced pressure atmosphere, a vapor deposition method, a thermal CVD method capable of forming a film at normal pressure, and a spray pyrolysis method. For example, an ITO film is formed by sputtering to form a film having a low specific resistance. However, a sputtering apparatus for forming a reduced-pressure atmosphere is generally expensive, so there is a problem that the manufacturing cost is high, and the film is formed at normal pressure. It is desirable to establish a means.

  In order to solve such a problem, a thermal CVD method, a spray pyrolysis method, or the like that does not require a reduced pressure atmosphere has been proposed.

  In the thermal CVD method, it is not necessary to form a reduced-pressure atmosphere, but when forming a transparent conductive film, it is necessary to use a highly toxic special high-pressure gas or the like as a source gas. For this reason, in order to ensure safety, there exists a subject that an apparatus cost becomes high and manufacturing cost becomes high.

  On the other hand, a film forming method called a spray pyrolysis method has been proposed in which a mist of a raw material solution is sprayed on a heating substrate and a thin film is formed by thermal decomposition / chemical reaction of a solute. In this spray pyrolysis method, film formation is possible using a safe raw material solution at normal pressure, and the apparatus can be simply configured. Therefore, various methods such as JP-A-2005-116391 (Patent Document 1) can be used. Technology has been reported. Further, as reported in Japanese Patent Application Laid-Open No. 2011-143320 (Patent Document 2) and Japanese Patent Application Laid-Open No. 4-224065 (Patent Document 3), the spray method is also used for cleaning and cooling.

JP-A-2005-116391 JP 2011-143320 A JP-A-4-224065 JP-A-7-112254

  It is desirable that the film forming process can be executed stably. However, if a nozzle spray abnormality occurs during the film formation process, the uniformity of film thickness and film characteristics is impaired, and the processed substrate or the like is wasted or the process itself must be interrupted. There is a fear.

  JP-A-7-112254 (Patent Document 4) and the like are known as a method for detecting nozzle clogging, which is one of such nozzle abnormalities. In Japanese Patent Laid-Open No. 7-112254 (Patent Document 4), in a spray nozzle that controls the liquid flow rate constant by adjusting the opening of the flow rate adjustment valve in the liquid path, the pressure and flow rate adjustment of the liquid supplied to the nozzle A method is disclosed in which an abnormal value of a nozzle is detected by storing a normal value for each valve opening and comparing it with a measured value.

  As an abnormality in the spraying of the nozzle, there is an intermittent spraying in which the spraying is intermittent in addition to clogging in which solid substances adhere to the nozzle and restrict the flow of liquid and air. Further, there is a backflow of air that enters the liquid path of the nozzle. Possible causes of these abnormalities are nozzle corrosion and wear. In particular, when corrosive fluid is sprayed in a heated atmosphere, the progress of corrosion of the nozzle is relatively fast, so the liquid flow rate during spraying may change, or the seal may be incomplete due to corrosion of the seal part. As a result, there is a possibility that the atomizing air leaks into the liquid path. In such a state, spray from the nozzle becomes intermittent, and air may flow back to the liquid path.

  In addition, spraying may be intermittent due to changes in the shape of the gas-liquid mixing part and the outlet of the nozzle due to corrosion, wear, or adhesion of solid matter. However, the conventional technique has a problem that it cannot be detected until a large abnormality such as nozzle clogging occurs. In addition, there is a problem that the degree of intermittentness of nozzle spray cannot be quantitatively evaluated.

  The present invention has been made to solve such a problem, and an object of the present invention is to appropriately determine the degree or abnormality of nozzle deterioration in a two-fluid nozzle that mixes and injects liquid and gas. It is to be.

  The nozzle inspection apparatus according to the present invention includes a measurement unit and a determination unit, and inspects a two-fluid nozzle that mixes and injects a liquid and a gas. The measurement unit measures information related to at least one of the pressure and flow rate of the liquid supplied to the two-fluid nozzle. For the information measured by the measurement unit, the determination unit determines the degree of deterioration or abnormality of the two-fluid nozzle based on the amount of variation in each information from the average value of the information detected at a predetermined time. The presence or absence of is determined.

  Preferably, the nozzle inspection device further includes a calculation unit for calculating an index representing the intermittentness of the spray, which is defined as an average value of the magnitude of the fluctuation amount at a predetermined time.

  Preferably, the determination unit determines the degree of deterioration or the presence / absence of abnormality of the two-fluid nozzle by comparing the index with a reference value.

  Preferably, the determination unit acquires an index corresponding to each spray condition when the spray condition of the two-fluid nozzle is changed. The determination unit compares the change pattern of the index with respect to the change of the spray condition with the reference pattern of the index corresponding to the type of abnormality that can occur in the two-fluid nozzle, thereby determining the type of abnormality occurring in the two-fluid nozzle. judge.

Preferably, the spraying condition is the pressure of the gas supplied to the two-fluid nozzle.
Preferably, the measurement unit is configured to be able to measure information at a frequency of 20 Hz or more.

  A spray film forming apparatus according to the present invention inspects a two-fluid nozzle, a liquid supply unit for supplying liquid to the two-fluid nozzle, a gas supply unit for supplying gas to the two-fluid nozzle, and the two-fluid nozzle. A nozzle inspection device. The nozzle inspection device measures information related to at least one of the pressure and flow rate of liquid supplied to the two-fluid nozzle, and information detected in information at a predetermined time with respect to information measured by the measurement unit. And a determination unit for determining the degree of deterioration of the two-fluid nozzle or the presence / absence of an abnormality based on the magnitude of the fluctuation amount of each information from the average value.

  Preferably, the determination unit determines the degree of deterioration of the two-fluid nozzle or the presence / absence of an abnormality while the film forming process is being performed in the spray film forming apparatus.

  Preferably, the nozzle inspection device further includes a calculation unit for calculating an index representing the intermittentness of the spray, which is defined as an average value of the magnitude of the fluctuation amount at a predetermined time. The determination unit acquires an index corresponding to each spray condition when the spray condition of the two-fluid nozzle is changed when the spray film forming apparatus is in an offline state. The determination unit compares the change pattern of the index with respect to the change of the spray condition with the reference pattern of the index corresponding to the type of abnormality that can occur in the two-fluid nozzle, thereby determining the type of abnormality occurring in the two-fluid nozzle. judge.

  The nozzle inspection method according to the present invention is a method for inspecting a two-fluid nozzle that jets mixed liquid and gas. The method includes a step of measuring information related to at least one of a pressure and a flow rate of liquid supplied to the two-fluid nozzle, and for each piece of information from an average value of information detected at a predetermined time with respect to the measured information. Determining the degree of deterioration of the two-fluid nozzle or the presence or absence of abnormality based on the magnitude of the fluctuation amount.

  Preferably, the method further includes a step of calculating an index representing the intermittentness of the spray, which is defined as an average value of the magnitude of the fluctuation amount at a predetermined time. The step of determining can generate an index corresponding to each spray condition when the spray condition of the two-fluid nozzle is changed, and a change pattern of the index corresponding to the change of the spray condition in the two-fluid nozzle. Determining the type of abnormality occurring in the two-fluid nozzle by comparing with a reference pattern of an index corresponding to the type of abnormality.

  ADVANTAGE OF THE INVENTION According to this invention, in the two fluid nozzle which mixes and injects a liquid and gas, it becomes possible to determine appropriately the grade of deterioration or abnormality of a nozzle.

1 is an overall block diagram of a spray film forming apparatus having a two-fluid nozzle including a nozzle inspection apparatus according to an embodiment of the present invention. It is a figure which shows an example of the spray film-forming apparatus which has a some nozzle. It is a figure which shows an example of the time change of a hydraulic pressure when spraying using the nozzle. It is a figure which shows an example of the time change of a hydraulic pressure when spraying using the nozzle. It is a figure which shows an example of the time change of a hydraulic pressure when spraying using the nozzle. It is a figure which shows the comparison of the parameter using the variation | change_quantity of the hydraulic pressure in the nozzles A-C. It is a functional block diagram for demonstrating abnormality determination control in a nozzle test | inspection apparatus. 5 is a flowchart for explaining details of abnormality determination processing executed by the nozzle inspection apparatus in the first embodiment. It is a figure which shows an example of the fluctuation pattern of the parameter | index P about the nozzle D at the time of changing supply air pressure. It is a figure which shows an example of the fluctuation pattern of the parameter | index P about the nozzle E at the time of changing supply air pressure. 10 is a flowchart for explaining details of an abnormality factor determination process executed by the nozzle inspection apparatus in the second embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are denoted by the same reference numerals and description thereof will not be repeated.

[Configuration of spray deposition system]
FIG. 1 is an overall block diagram of a spray film forming apparatus (hereinafter, also simply referred to as “film forming apparatus”) 100 having a two-fluid nozzle provided with a nozzle inspection apparatus 200 according to an embodiment of the present invention.

  With reference to FIG. 1, the film forming apparatus 100 includes a two-fluid nozzle 110, a nozzle inspection apparatus 200, a liquid supply unit 300, and a gas supply unit 400.

  The two-fluid nozzle 110 is a nozzle that mixes a liquid and a gas, atomizes the liquid, and jets it. The types of nozzles that atomize the liquid are mainly one-fluid nozzles that supply only pressurized liquid to the nozzles, two-fluid nozzles that supply liquid and pressurized gas to the nozzles, and ultrasonic atomization. There are ultrasonic nozzles. Among them, the two-fluid nozzle that has a simple structure that does not require electricity and can generate fine mist is suitable for averaging the decrease in the substrate temperature due to the heat of vaporization of the liquid. In the present embodiment, as an example of such a two-fluid nozzle, a case in which BIMV8002S of a two-fluid nozzle manufactured by Ikeuchi is used will be described as an example.

  A liquid to be sprayed is supplied from the liquid supply unit 300 to the two-fluid nozzle 110 and a gas such as compressed air is supplied from the gas supply unit 400. The two-fluid nozzle 110 mixes and sprays the supplied liquid and gas.

  FIG. 1 shows a configuration in which only one two-fluid nozzle is shown, but FIG. 2 shows a case where spraying over a wide range such as a large solar cell panel is required. As described above, a plurality of two-fluid nozzles (110A to 110D in FIG. 2) arranged in a single row or in a staggered arrangement are generally used.

  Then, for example, a film forming liquid is sprayed onto the substrate 130 which is an object to be subjected to the film forming process. At this time, the substrate 130 on which the film formation process is performed is transferred by the transfer roller 120, and the film formation process is uniformly performed over the entire surface of the substrate 130.

  Referring to FIG. 1 again, the gas supply unit 400 supplies compressed air from an air supply source (not shown) to the two-fluid nozzle 110. The gas supply unit 400 includes a pressure gauge 410, a flow meter 420, a regulator 430, and an air supply valve 440.

  The air supply valve 440 switches between supply and stop of air from the air supply source. The regulator 430 adjusts the pressure of the air supplied from the air supply source to a desired pressure (for example, 0.1 to 0.6 MPa).

  The pressure gauge 410 and the flow meter 420 are provided in the air supply path from the regulator 430 to the two-fluid nozzle 110. The pressure gauge 410 and the flow meter 420 detect the pressure and flow rate of air supplied to the two-fluid nozzle 110, respectively, and output the detected values to a control device or recording device (not shown).

  The liquid supply unit 300 supplies the liquid (for example, pure water in the present embodiment) 340 stored in the pressure adjustment tank 320 to the two-fluid nozzle 110 via the liquid supply valve 333. The liquid supply valve 333 switches between supplying and stopping the liquid 340 to the two-fluid nozzle 110.

  The pressure of the liquid 340 supplied to the two-fluid nozzle 110 depends on the water head difference that is the difference between the two-fluid nozzle 110 and the liquid level of the liquid 340 in the pressure adjustment tank 320, and the gas pressure in the pressure adjustment tank 320. It is determined.

  The pressure adjustment tank 320 is provided with a liquid replenishing valve 321 for replenishing the liquid 340, a liquid level confirmation tube 323 for liquid level confirmation, and a pressure gauge 322. While confirming the liquid level with the liquid level confirmation tube 323, the liquid replenishing valve 321 is replenished with the liquid 340 so that a desired water head difference is obtained.

  The pressure in the pressure adjustment tank 320 is adjusted by supplying compressed air from an air supply source (not shown) into the pressure adjustment tank 320. Specifically, when pressurizing the tank, the pressurizing valve 313 is opened, and air is supplied into the pressure adjusting tank 320 while adjusting the pressure of the supplied air using the regulator 312.

  On the other hand, when the tank is depressurized, the compressed air adjusted by the regulator 311 is discharged to the atmosphere through the ejector 310 to generate a vacuum state, and the pressure of the discharged air is reduced while adjusting using the regulator 315. The valve 314 is opened. As a result, the air in the tank is released and the pressure is reduced. Note that the pressure may be reduced using a vacuum pump instead of the ejector.

  The pressure in the pressure adjustment tank 320 can be set within the range of, for example, −80 kPa to +0.5 MPa by performing the above-described pressurization or decompression operation while confirming the instruction of the pressure gauge 322 provided in the pressure adjustment tank 320. To adjust the desired pressure.

  In the present embodiment, in order to measure the average flow rate of the liquid for a predetermined time, a configuration in which a liquid bottle 330 filled with the liquid 340 is additionally disposed on the electronic balance 331 is provided. The liquid bottle 330 is coupled to a liquid supply path connecting the pressure adjustment tank 320 and the liquid supply valve 333 via a switching valve 332.

  When measuring the average flow rate, the switching valve 332 is switched so that the liquid in the liquid bottle 330 is supplied to the two-fluid nozzle 110. Then, the water head difference is adjusted by the amount of the liquid 340 to the liquid bottle 330 and the air pressure supplied by the regulator 430 is adjusted, and then the liquid is sprayed for a predetermined time by the two-fluid nozzle. At this time, the amount of the liquid 340 released from the liquid bottle 330 is measured by the indicated value of the electronic balance 331 before and after spraying. Thereby, the average flow rate of the liquid sprayed for a predetermined time can be accurately measured.

  Note that this additional configuration for measuring the average flow rate is not essential and optional, and the function as a liquid supply unit can be exhibited without these devices.

  In such a film forming apparatus, if the film forming process is continued, continuous spraying is not performed due to the adhesion of foreign matter to the nozzle and air leakage or backflow due to corrosion or wear of the nozzle. May cause intermittent spraying. If it does so, the film | membrane pressure produced | generated will become non-uniform | heterogenous in the target object in which a film-forming process is performed, and there exists a possibility of leading to a deterioration of quality or a malfunction. Therefore, it is desired to appropriately inspect and determine such nozzle abnormality.

  Therefore, the film forming apparatus 100 of the embodiment shown in FIG. 1 further includes a nozzle inspection apparatus 200 for determining an abnormality of the two-fluid nozzle 110 used.

  The nozzle inspection apparatus 200 includes a flow meter 211, a pressure gauge 212, a recording meter 220, and a signal processing unit (for example, a personal computer) 230.

  The flow meter 211 and the pressure gauge 212 are provided in series in the liquid supply path from the liquid supply unit 300 to the two-fluid nozzle 110. The flow meter 211 and the pressure gauge 212 detect the flow rate and pressure of the liquid 340 supplied from the liquid supply unit 300 to the two-fluid nozzle 110, respectively. Then, the flow meter 211 and the pressure gauge 212 output the detected value to the recorder 220 and the signal processing unit 230.

  In the film forming apparatus having a plurality of nozzles as shown in FIG. 2, it is more desirable that the flow meter 211 and the pressure gauge 212 are provided in each nozzle. However, it may be provided for each specific number of nozzles (for example, one for every three nozzles) due to limitations on manufacturing cost, installation space, and the like.

  Further, when the liquid supply unit 300 is provided with detectors corresponding to the flow meter 211 and the pressure gauge 212, signals relating to the flow rate and pressure from the detector in the liquid supply unit 300 can be received, The total 211 and the pressure gauge 212 may be omitted.

  The recorder 220 receives the signals detected by the flow meter 211 and the pressure gauge 212 and displays the flow rate and pressure of the liquid supplied to the two-fluid nozzle 110 on a recording paper or a display screen. Further, these detection values may be stored as digital data.

  Since fluctuations in general hydraulic pressure and flow rate of the two-fluid nozzle are 1 Hz to several tens Hz, it is desirable that the flow meter 211, the pressure gauge 212, and the recorder 220 have a response of at least 20 Hz or more.

  In the nozzle inspection apparatus 200 shown in FIG. 1, the signals detected by the flow meter 211 and the pressure gauge 212 are output to the signal processing unit 230 via the recorder 220. The detection value may be output to the recorder 220 and the signal processing unit 230 in parallel.

  The detailed function of the signal processing unit 230 will be described later with reference to FIG. 9, but generally, the signal measured by the flow meter 211 and the pressure gauge 212 during a predetermined time is calculated from the average value of the measured values. The degree of deterioration in the two-fluid nozzle 110 being used is calculated by calculating the magnitude (absolute value) of the fluctuation amount of each measurement value and comparing a parameter representing the magnitude of the fluctuation amount with a predetermined reference. Or the presence or absence of abnormality is determined. Then, the determination result is displayed to notify the user of the occurrence of abnormality.

[Embodiment 1]
Next, a nozzle abnormality determination method will be described.

  First, FIG. 3 to FIG. 3 show examples of changes in fluid pressure (also referred to as fluid pressure) when spraying is performed experimentally for a predetermined time using three nozzles A to C having different usage times. As shown in FIG.

Here, the nozzle A is an unused nozzle, the nozzle B is a nozzle after being used for a film formation process for a short period, and the nozzle C is a nozzle after being used for a film formation process for a long time. For the nozzles B and C, the liquid used for spraying in the film forming process is a corrosive aqueous solution containing SnCl ₄ , NH ₄ F, and HCl. The material of the nozzle was Hastelloy having corrosion resistance.

  In the experiment, pure water was used as the liquid to be sprayed, the water head difference was −500 mm, the liquid bottle was opened to the atmosphere, the air pressure was 0.3 MPa, and the sampling period of the recorder was 10 ms.

  Referring to FIG. 3, spraying using nozzle A, which is an unused nozzle, was in a good spray state with no visible spraying. However, as shown in FIG. 3, a minute fluid pressure fluctuation of about several Hz was confirmed.

  Next, referring to FIG. 4, although nozzle B is not shown, a significant difference from the unused nozzle A was not found in the evaluation using the flow rate according to the conventional technique, but the state of spraying was visually confirmed. In, the intermittent spraying was confirmed. As shown in FIG. 4, the fluid pressure at the time of spraying is not much different from that of the nozzle A in the amplitude of fluctuation itself, but the fluctuation cycle is shortened to about a dozen Hz. Was confirmed.

  After the experiment, when the film formation process was performed using the nozzle B, the generated film thickness and film characteristics were not significantly different from those when the film was formed using a new unused nozzle. It was confirmed.

  Referring to FIG. 5, the nozzle C used for the film formation process for a long period of time was reduced by about 20% in comparison with the unused nozzle A in the evaluation using the flow rate according to the conventional technique. Furthermore, the film thickness generated in the actual film formation process is thinner than that in the case of using a normal nozzle, and is no longer usable for film formation.

  As for the hydraulic pressure, as shown in FIG. 5, the amplitude of the fluctuation from the average value is larger than that of the nozzles A and B, and the fluctuation cycle is also shorter than that of the normal nozzle A. .

  Although not shown in the figure, the time change similar to FIGS. 3 to 5 was measured for the liquid flow rate instead of the liquid pressure, and it was confirmed that the same change as the liquid pressure was shown.

  As described above, by taking into account the fluctuations (amplitude, period) of the liquid pressure and the liquid flow rate in a state where spraying is continued for a predetermined time under a certain spraying condition, the deterioration is brought to an unusable level. It was confirmed that the abnormal state can be determined not only for the advanced nozzle but also for the nozzle having a deteriorated state such as the nozzle B that cannot be found visually.

  FIG. 6 shows the maximum value, the minimum value, the difference between the maximum value and the minimum value of the hydraulic pressure when the nozzles A to C are sprayed continuously for about 30 seconds in the above experiment, and the following. An example of the value of the index P to be described is shown.

  The index P is obtained by calculating an average value of the measured values for a predetermined time, and further averaging the difference between the measured value at each measurement time and the average value. That is, it means the area between the measured waveform per unit time and the center line (average value) of fluctuation, and is expressed by the following equation.

Here, n represents the total number of data measured, and Sx represents the xth measurement value.
As shown in FIG. 6, in the measurement example, the comparison of the maximum values does not indicate the difference between these nozzles. Further, regarding the difference between the minimum value and the maximum value and the minimum value, a tendency of change in the overall numerical value can be found, but a significant difference between the nozzle A and the nozzle B is the difference between the nozzle A, B and the nozzle C. Not as significant as the significant difference between them.

  On the other hand, when evaluated by the index P, the difference between the nozzles changes relatively linearly with respect to the usage frequency (degradation degree), and the degree of deterioration is the most among these parameters. Is recognized as having been properly expressed.

  Therefore, in the present embodiment, this index P is used as an index indicating the intermittentness of spraying to determine the presence / absence of nozzle abnormality and the degree of deterioration.

  FIG. 7 is a functional block diagram for explaining abnormality determination control in the nozzle inspection apparatus 200 shown in FIG.

  Referring to FIGS. 1 and 7, nozzle inspection apparatus 200 includes a measuring unit 210 composed of flow meter 211 and pressure gauge 212 as shown in FIG. 1, and an input unit typically represented by recorder 220. And a signal processing unit 230. The signal processing unit 230 includes a calculation unit 231, a determination unit 232, a display output unit 233, and a storage unit 234. Each functional block included in the signal processing unit 230 is realized by hardware or software processing.

  As described above, the flow meter 211 and the pressure gauge 212 respectively measure the flow rate and pressure of the liquid supplied from the liquid supply unit 300 to the two-fluid nozzle 110, and the measurement values (detection values) FL and PR are recorded on the recorder 220. Output to.

  The recorder 220 records or displays the measurement values received from the flow meter 211 and the pressure gauge 212 and outputs the measurement values FL and PR to the calculation unit 231 of the signal processing unit 230.

  The computing unit 231 computes the index P obtained by the above formula based on the measured values during a predetermined time, and outputs the computation result to the determining unit 232.

  The determination unit 232 receives the index P calculated by the calculation unit 231 and compares it with a reference value (or reference map) REF calculated in advance through experiments or the like and stored in the storage unit 234. Then, the determination unit 232 determines the presence / absence of an abnormality in the two-fluid nozzle and the degree of deterioration based on the comparison. Then, abnormality information ABN indicating the determination result is output to the display output unit 233.

  The display output unit 233 receives the abnormality information ABN from the determination unit 232 and displays the abnormality content on a display device (not shown) included in the display output unit 233 based on the abnormality information ABN. Although not shown in FIG. 7, the abnormality content may be displayed on a display device outside the signal processing unit 230, and information regarding the abnormality may be output to another control device for further processing. Also good.

  FIG. 8 is a flowchart for explaining details of the abnormality determination process executed by the nozzle inspection apparatus 200 in the first embodiment. Each step shown in FIG. 8 and FIG. 11 to be described later is realized by hardware or software processing in the nozzle inspection apparatus 200.

  Referring to FIGS. 1 and 8, nozzle inspection apparatus 200 performs spraying by two-fluid nozzle 110 in step (hereinafter, step is abbreviated as S) 100 under predetermined predetermined conditions. It is determined whether or not This determination may be performed based on, for example, an operation for starting an inspection by the user. Alternatively, although not shown, the determination may be made automatically based on the operation mode and various setting parameters in the film forming apparatus 100.

  If spraying is not executed under the predetermined conditions (NO in S100), it is not necessary to perform the abnormality determination, and therefore nozzle inspection apparatus 200 skips the subsequent steps and ends the process.

  If spraying is being performed under the predetermined conditions (NO in S100), the process proceeds to S110, and nozzle inspection apparatus 200 uses fluid meter 211 and pressure gauge 212 to supply two fluids from liquid supply unit 300. The flow rate and pressure of the liquid supplied to the nozzle 110 are respectively measured. Note that it is not essential that both the flow rate and the pressure are measured, and only one of them may be measured.

  Next, the nozzle inspection apparatus 200 calculates | requires the parameter | index P showing the discontinuity of spraying by calculation based on a measured value in S120. In step S130, the nozzle inspection apparatus 200 determines whether the calculated index P is smaller than a predetermined reference value.

  If index P is smaller than the reference value (YES in S130), the process proceeds to S140, and nozzle inspection device 200 determines that the state of two-fluid nozzle 110 being used is good. Thereafter, the process proceeds to S150.

  On the other hand, if index P is equal to or greater than the reference value (NO in S130), the process proceeds to S145, and nozzle inspection device 200 determines that the state of two-fluid nozzle 110 being used is abnormal. Then, the process proceeds to S150.

  In S150, based on the determination in S140 or S145, the presence or absence of abnormality and the degree of deterioration such as the index P are displayed on the display device. In addition to this, an audible alarm such as an abnormal alarm may be output.

  By performing control according to the above processing, the degree of deterioration and abnormality in the two-fluid nozzle can be quantitatively determined. By executing such inspection during regular maintenance, it is possible to evaluate and manage the progress of nozzle deterioration, and to perform maintenance such as nozzle replacement at an appropriate time. Thereby, preventing the spray abnormality accompanying the deterioration of the nozzle in the film forming process in advance can prevent the yield from being deteriorated due to poor quality or malfunction.

  Further, by selecting a condition during the film forming process as the predetermined condition in step S100 of the flowchart of FIG. 8, not only the maintenance timing at which the apparatus is in an offline state but also an abnormal condition in the online state in which the apparatus is in operation. It is also possible to determine the presence or absence.

[Embodiment 2]
In Embodiment 1 mentioned above, the structure which determines the presence or absence of abnormality by calculating the parameter | index P when spraying is performed on a specific condition was demonstrated.

  In the second embodiment described below, based on the variation pattern of the index P when the pressure of the air supplied from the gas supply unit 400 is changed and the pressure of the air is changed under predetermined spray conditions. A configuration for identifying the type of abnormality occurring in the nozzle will be described.

  In addition, about this determination process, since it will be in a spray state in order to change the pressure of the supplied air, it is difficult to determine when the device is online as in the first embodiment, and in an offline state. It can be judged.

  9 and 10 are diagrams for explaining the outline of the abnormality factor determination process in the second embodiment. For the nozzle D and the nozzle E, the hydraulic pressure when the supply air pressure (spraying air pressure) is changed and The index P for the liquid flow rate is plotted. The nozzle D is an example when a nozzle assembly failure occurs, and the nozzle E is an example when an air leak occurs.

  As shown in FIG. 9 and FIG. 10, a characteristic liquid pressure and liquid flow index P (intermittent) with respect to a change in supply air pressure is recognized depending on the type of abnormality of the nozzle. Then, a variation pattern of the index P corresponding to a specific abnormality is obtained in advance as a reference pattern by experiment or the like, and the variation pattern of the index P measured by the inspection apparatus is compared with this reference pattern, thereby causing the nozzle P. The type of abnormality that can be identified.

  FIG. 11 is a flowchart for explaining details of the abnormality factor determination process executed by the nozzle inspection apparatus 200 in the second embodiment.

  Referring to FIGS. 1 and 11, nozzle inspection apparatus 200 initializes the spray conditions in two-fluid nozzle 110, specifically, the supply air pressure supplied from, for example, gas supply unit 400 in S 200. Here, the initialization means, for example, setting to the minimum value in the adjustable range of the supply air pressure.

  And the nozzle test | inspection apparatus 200 starts spraying on the set spray conditions (S210), and each measures the liquid pressure and the liquid flow rate in the predetermined time during spraying using the pressure gauge 212 and the flowmeter 211 (S210). S220).

  In S230, nozzle inspection apparatus 200 calculates an index P representing intermittentness based on the measured values for each of the hydraulic pressure and the liquid flow rate. And the nozzle test | inspection apparatus 200 stops spraying (S240), and memorize | stores the calculated parameter | index P (S250).

  Thereafter, the nozzle inspection apparatus 200 determines whether or not the spray conditions can be changed in S260. Specifically, it is determined whether or not the supply air pressure has reached the maximum value within the adjustable range.

  If the spraying condition can be changed (YES in S260), the process proceeds to S290, and nozzle inspection apparatus 200 changes the supply air pressure that is the spraying condition by a predetermined increment (for example, 0.1 MPa). And a process is returned to S210 and the nozzle test | inspection apparatus 200 performs the process of S210-S250 on the changed spray conditions.

  As described above, when the spray conditions are changed, the processes of S210 to S250 are repeated, and when the spray conditions reach the maximum value in the adjustable range and cannot be changed (NO in S260), the process proceeds to S270. And the nozzle test | inspection apparatus 200 produces | generates the fluctuation pattern of the parameter | index P with respect to the change of spray conditions like FIG. 9 and FIG. 10 using the memorize | stored parameter | index P. FIG. The nozzle inspection apparatus 200 compares the obtained variation pattern of the index P with the reference pattern of the index P corresponding to each type of abnormality, thereby determining whether there is an abnormality in the two-fluid nozzle 110 and when there is an abnormality. Identify the type of abnormality.

  Thereafter, in S280, the nozzle inspection apparatus 200 displays the determination result and notifies the user of information regarding abnormality (deterioration) of the two-fluid nozzle 110.

  By performing control according to the above processing, it is possible to quantitatively determine an abnormality in the two-fluid nozzle and to specify the type of the abnormality.

  In the above description, the air pressure supplied from the gas supply unit is changed as a parameter as the spray condition. However, other conditions such as the flow rate of the supply air may be changed as a parameter.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  The nozzle inspection apparatus and the nozzle inspection method in the present invention can be used as a maintenance apparatus for an apparatus using a two-fluid nozzle such as a spray film forming apparatus.

  DESCRIPTION OF SYMBOLS 100 Film-forming apparatus, 110,110A-D Two-fluid nozzle, 120 Conveyance roller, 130 Substrate, 200 Nozzle inspection apparatus, 210 Measurement unit, 211,420 Flow meter, 212,322,410 Pressure gauge, 220 Recorder, 230 Signal processing unit, 231 calculation unit, 232 determination unit, 233 display output unit, 234 storage unit, 300 liquid supply unit, 310 ejector, 311, 312, 315, 430 regulator, 313 pressurization valve, 314 pressure reduction valve, 320 pressure adjustment tank , 321 Liquid replenishment valve, 323 Liquid level confirmation tube, 330 Liquid bottle, 331 Electronic balance, 332 Switching valve, 333 Liquid supply valve, 340 Liquid, 400 Gas supply unit, 440 Air supply valve.

Claims (11)

A nozzle inspection device for inspecting a two-fluid nozzle that mixes and jets liquid and gas,
A measuring unit for measuring information on at least one of a pressure and a flow rate of the liquid supplied to the two-fluid nozzle;
About the information measured by the measurement unit, the degree of deterioration or abnormality of the two-fluid nozzle based on the amount of variation of the information from the average value of the information detected at a predetermined time A nozzle inspection device comprising: a determination unit for determining the presence or absence of the nozzle.   2. The nozzle inspection device according to claim 1, further comprising a calculation unit configured to calculate an index representing the intermittentness of the spray, which is defined as an average value of the magnitude of the fluctuation amount at the predetermined time.   The nozzle inspection apparatus according to claim 2, wherein the determination unit determines a degree of deterioration or presence / absence of abnormality of the two-fluid nozzle by comparing the index with a reference value. The determination unit obtains the index corresponding to each spray condition when the spray condition of the two-fluid nozzle is changed,
The determination unit generates the change pattern of the indicator with respect to the change of the spray condition by comparing the reference pattern of the indicator corresponding to the type of abnormality that may be generated in the two-fluid nozzle. The nozzle inspection apparatus according to claim 2, wherein the type of abnormality that is present is determined.   The nozzle inspection apparatus according to claim 4, wherein the spraying condition is a pressure of the gas supplied to the two-fluid nozzle.   The nozzle inspection device according to claim 1, wherein the measurement unit is configured to be able to measure the information at a frequency of 20 Hz or more. A two-fluid nozzle;
A liquid supply unit for supplying liquid to the two-fluid nozzle;
A gas supply unit for supplying gas to the two-fluid nozzle;
A nozzle inspection device for inspecting the two-fluid nozzle,
The nozzle inspection device includes:
A measuring unit for measuring information on at least one of a pressure and a flow rate of the liquid supplied to the two-fluid nozzle;
For the information measured by the measuring unit, the deterioration of the two-fluid nozzle is determined based on the magnitude of the variation amount of each information from the average value of the information detected in the information at a predetermined time. A spray film forming apparatus including a determination unit for determining the degree or presence of abnormality.   The spray film forming apparatus according to claim 7, wherein the determination unit determines the degree of deterioration of the two-fluid nozzle or the presence / absence of an abnormality while a film forming process is being performed in the spray film forming apparatus. The nozzle inspection device includes:
A calculation unit for calculating an index representing the intermittentness of the spray, which is defined as an average value of the magnitude of the fluctuation amount at the predetermined time;
The determination unit acquires the index corresponding to each spray condition when the spray condition of the two-fluid nozzle is changed when the spray film forming apparatus is in an offline state,
The determination unit generates the change pattern of the indicator with respect to the change of the spray condition by comparing the reference pattern of the indicator corresponding to the type of abnormality that may be generated in the two-fluid nozzle. The spray film forming apparatus according to claim 7, wherein the type of abnormality that is present is determined. A method for inspecting a two-fluid nozzle that mixes and jets liquid and gas,
Measuring information relating to at least one of pressure and flow rate of the liquid supplied to the two-fluid nozzle;
For the measured information, the degree of deterioration of the two-fluid nozzle or the presence / absence of an abnormality is determined based on the magnitude of the amount of change in the information from the average value of the information detected at a predetermined time. And a method comprising: Further comprising the step of calculating an index representing the intermittentness of the spray, which is defined as an average value of the magnitude of the fluctuation amount at the predetermined time,
The step of determining includes
Obtaining the index corresponding to each spray condition when changing the spray condition of the two-fluid nozzle;
The type of abnormality occurring in the two-fluid nozzle by comparing the change pattern of the index with respect to the change in the spraying condition with the reference pattern of the index corresponding to the type of abnormality that may occur in the two-fluid nozzle. The method of claim 10 comprising: determining.

Images