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JP2013029528A - Air flow measurement device - Google Patents

Air flow measurement device Download PDF

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JP2013029528A
JP2013029528A JP2012245218A JP2012245218A JP2013029528A JP 2013029528 A JP2013029528 A JP 2013029528A JP 2012245218 A JP2012245218 A JP 2012245218A JP 2012245218 A JP2012245218 A JP 2012245218A JP 2013029528 A JP2013029528 A JP 2013029528A
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bypass channel
sub
bypass
point
air
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JP5454655B2 (en
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Takashi Enomoto
崇 榎本
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Denso Corp
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Denso Corp
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Abstract

PROBLEM TO BE SOLVED: To provide an air flowmeter capable of reducing a disturbance of air generated as part of air flowing in a bypass channel 5 flows backward to a sub-bypass channel 6.SOLUTION: In a channel formation body, a bypass channel 5 in which part of air sucked in an engine is taken in and a sub-bypass channel 6 in which part of the air flowing in the bypass channel 5 is taken are formed, and in the sub-bypass channel 6, a chip type sensor part is arranged. At an intake 6a of the sub-bypass channel 6, a straightening plate 14 is arranged which straightens the direction of a forward flow and the direction of a backflow. Since the straightening plate 14 forms a passage of the forward flow and a passage of the backflow at the intake 6a of the sub-bypass channel 6, a disturbance due to a collision between the forward flow and backflow is reducible and detection precision of the sensor part becomes stable.

Description

本発明は、センサ部に薄膜式(チップ式)の流量検出素子を用いた空気流量測定装置に関する。   The present invention relates to an air flow rate measuring apparatus using a thin film type (chip type) flow rate detecting element in a sensor unit.

従来、自動車用エンジンの吸入空気量を測定するエアフロメータ(熱式流量計)には、高精度、高応答の市場要求から、センサ部にチップ式の流量検出素子を用いたものが知られている。しかし、チップ式の流量検出素子は、例えば、シリコン基板に設けられたダイヤフラム上に薄膜抵抗体(発熱抵抗体、流量検出抵抗体等)を形成するため、空気中に含まれるダスト等の衝突によって基板上の薄膜抵抗体がダメージを受ける恐れがある。
そこで、センサ部にチップ式の流量検出素子を用いる場合は、空気流路にダストを分離する機能が必要となり、その分離能力の高さから慣性分離方式が多く採用されている(特許文献1参照)。
Conventionally, air flow meters (thermal flow meters) that measure the intake air volume of automobile engines have been known to use a chip-type flow rate detection element in the sensor unit due to market requirements for high accuracy and high response. Yes. However, the chip-type flow rate detection element, for example, forms a thin film resistor (a heating resistor, a flow rate detection resistor, etc.) on a diaphragm provided on a silicon substrate. The thin film resistor on the substrate may be damaged.
Therefore, when a chip-type flow rate detection element is used for the sensor unit, a function of separating dust in the air flow path is required, and an inertial separation method is often employed because of its high separation capability (see Patent Document 1). ).

この慣性分離方式を採用したエアフロメータの一例を図9に示す。
このエアフロメータは、ダクト100の内部を流れる空気の流れ方向と略平行に形成されるバイパス流路110と、このバイパス流路110から分岐するサブバイパス流路120とを有し、このサブバイパス流路120にセンサ部の流量検出素子(センサチップ)130を配置している。この構成によれば、ダクト100の上流から流れてくる空気中にダストが含まれている場合でも、そのダストの多くは、慣性の作用により、バイパス流路110を通り抜けて下流側へ流れるため、バイパス流路110からサブバイパス流路120へダストが流れ込むことを抑制できる。その結果、サブバイパス流路120に配置した流量検出素子130にダストが衝突することを抑制できるので、流量検出素子130の薄膜抵抗体がダメージを受けることを回避できる。
An example of an air flow meter that employs this inertia separation system is shown in FIG.
This air flow meter has a bypass passage 110 formed substantially parallel to the flow direction of air flowing inside the duct 100, and a sub-bypass passage 120 branched from the bypass passage 110. A flow rate detection element (sensor chip) 130 of the sensor unit is arranged on the path 120. According to this configuration, even when dust is contained in the air flowing from the upstream of the duct 100, most of the dust flows to the downstream side through the bypass flow path 110 due to the inertial action. It is possible to suppress dust from flowing from the bypass channel 110 into the sub bypass channel 120. As a result, it is possible to prevent dust from colliding with the flow rate detection element 130 disposed in the sub-bypass channel 120, so that the thin film resistor of the flow rate detection element 130 can be prevented from being damaged.

特開2008−309623号公報JP 2008-309623 A

ところが、慣性分離方式のエアフロメータでは、バイパス流路110の途中からサブバイパス流路120が分岐して形成されるため、バイパス流路110の出口に向かう空気の一部が、バイパス流路110からサブバイパス流路120へ取り込まれる空気の流れに影響を受ける。つまり、バイパス流路110を流れる空気(特に、サブバイパス流路120の入口近くを流れる空気)には、バイパス流路110からサブバイパス流路120へ取り込まれる空気の流れ方向に引き込まれる力が働く。このため、バイパス流路110を流れる空気の一部が、バイパス流路110の出口側の上壁面に衝突して、出口側上部の圧力が上昇することで、バイパス流路110の出口より排出されない一部の空気がサブバイパス流路120へ逆流する。   However, in the inertial separation type air flow meter, since the sub-bypass channel 120 is formed by branching from the middle of the bypass channel 110, a part of the air toward the outlet of the bypass channel 110 is separated from the bypass channel 110. The flow of air taken into the sub-bypass channel 120 is affected. That is, a force drawn in the flow direction of the air taken from the bypass flow path 110 into the sub bypass flow path 120 acts on the air flowing through the bypass flow path 110 (particularly, the air flowing near the inlet of the sub bypass flow path 120). . For this reason, a part of the air flowing through the bypass channel 110 collides with the upper wall surface on the outlet side of the bypass channel 110, and the pressure on the upper side of the outlet side is increased, so that the air is not discharged from the outlet of the bypass channel 110. A part of the air flows backward to the sub-bypass channel 120.

上記の結果、図9に示す様に、バイパス流路110の入口側からサブバイパス流路120へ取り込まれる空気(図中矢印aで示す)と、バイパス流路110の出口側からサブバイパス流路120へ逆流する空気(図中矢印bで示す)とが衝突することにより、空気の流れに乱れが発生し、その乱れが流量検出素子130の検出精度を低下させる要因となっている。
本発明は、上記事情に基づいて成されたもので、その目的は、バイパス流路の出口から排出されない一部の空気がサブバイパス流路へ逆流することによる空気の乱れを低減できる空気流量測定装置を提供することにある。
As a result of the above, as shown in FIG. 9, the air (indicated by the arrow a in the figure) taken from the inlet side of the bypass channel 110 into the sub-bypass channel 120 and the sub-bypass channel from the outlet side of the bypass channel 110. When air that flows backward to 120 (indicated by an arrow b in the figure) collides with the air, turbulence occurs in the air flow, and the turbulence causes a reduction in detection accuracy of the flow rate detection element 130.
The present invention has been made based on the above circumstances, and its purpose is to measure the air flow rate that can reduce air turbulence caused by a part of the air not discharged from the outlet of the bypass flow path flowing back to the sub bypass flow path. To provide an apparatus.

(請求項1の発明)
本発明は、ダクトの内部を流れる空気の一部を取り込むバイパス流路と、このバイパス流路から分岐して形成され、バイパス流路を流れる空気の一部を取り込むサブバイパス流路と、このサブバイパス流路に配置される流量測定用のセンサチップを有するセンサ部と、このセンサ部より出力されるセンサ情報を基に、サブバイパス流路を流れる空気の流量を測定する空気流量測定装置であって、バイパス流路に対してサブバイパス流路の入口が形成される部分より上流側のバイパス流路からサブバイパス流路へ流れ込む空気の流れを順流と呼び、サブバイパス流路の入口が形成される部分より下流側のバイパス流路からサブバイパス流路へ流れ込む空気の流れを逆流と呼ぶ時に、サブバイパス流路の入口には、順流の向きと逆流の向きとを整流する整流板が配置されていることを特徴とする。
(Invention of Claim 1)
The present invention includes a bypass passage that takes in part of the air flowing inside the duct, a sub-bypass passage that is formed by branching from the bypass passage and takes in a part of air that flows through the bypass passage, An air flow measurement device that measures the flow rate of air flowing through a sub-bypass channel based on a sensor unit having a sensor chip for measuring a flow rate disposed in the bypass channel and sensor information output from the sensor unit. The flow of air flowing from the bypass channel upstream of the portion where the inlet of the sub bypass channel is formed to the bypass channel to the sub bypass channel is called forward flow, and the inlet of the sub bypass channel is formed. When the flow of air flowing into the sub-bypass channel from the bypass channel on the downstream side is called a reverse flow, the direction of the forward flow and the direction of the reverse flow are adjusted at the sub-pass channel inlet Wherein the current plate that is disposed.

上記の構成によれば、サブバイパス流路の入口が形成される部分より下流側のバイパス流路からサブバイパス流路へ流れ込む空気の流れ(逆流)が発生しても、サブバイパス流路の入口に配置した整流板によって逆流の向きと順流の向きとを整流できる。つまり、整流板によって、サブバイパス流路の入口に順流の通り道と逆流の通り道とを形成できる。これにより、整流板が配置されている部分を通り過ぎた後、順流と逆流とをスムーズに合流させることができるので、結果的に順流と逆流との衝突による乱れを低減でき、センサ部の検出精度が安定する。   According to said structure, even if the flow (backflow) of the air which flows in into a sub bypass channel from the bypass channel downstream from the part in which the inlet of a sub bypass channel is formed generate | occur | produces, the inlet of a sub bypass channel It is possible to rectify the direction of the reverse flow and the direction of the forward flow by the rectifying plate arranged in the position. In other words, a forward flow path and a reverse flow path can be formed at the inlet of the sub-bypass flow path by the current plate. As a result, the forward flow and the reverse flow can be smoothly merged after passing through the portion where the rectifying plate is disposed, so that the disturbance due to the collision between the forward flow and the reverse flow can be reduced as a result, and the detection accuracy of the sensor unit Is stable.

(請求項2の発明)
請求項1に記載した空気流量測定装置において、バイパス流路に対するサブバイパス流路の上流側の入口端部をA点、下流側の入口端部をB点とし、且つ、A点を起点として形成されるサブバイパス流路の壁面をA点側壁面、B点を起点として形成されるサブバイパス流路の壁面をB点側壁面と呼ぶ時に、整流板は、A点側壁面とB点側壁面との中間位置よりB点側壁面に寄った位置に配置されていることを特徴とする。
上記の構成によれば、整流板によって形成される逆流の通り道より順流の通り道を広く形成できるので、多くの順流をサブバイパス流路に取り入れることができる。
(Invention of Claim 2)
2. The air flow rate measuring device according to claim 1, wherein the upstream inlet end of the sub-bypass channel relative to the bypass channel is defined as point A, the downstream inlet end is defined as point B, and the point A is defined as a starting point. When the wall surface of the sub-bypass channel formed is referred to as the A-point side wall surface, and the wall surface of the sub-bypass channel formed starting from the B point is referred to as the B-point side wall surface, It is arrange | positioned in the position which approached the B point side wall surface rather than the intermediate position.
According to the above configuration, since the forward flow path can be formed wider than the reverse flow path formed by the rectifying plate, a large amount of forward flow can be taken into the sub-bypass channel.

(請求項3の発明)
請求項1または2に記載した空気流量測定装置において、バイパス流路に対するサブバイパス流路の上流側の入口端部をA点、下流側の入口端部をB点と呼ぶ時に、バイパス流路の中心からA点までの距離よりB点までの距離の方が大きく設定されていることを特徴とする。
空気と共にバイパス流路に取り込まれたダストは、慣性の作用により、そのままバイパス流路を通り抜けようとするため、バイパス流路の中心からA点までの距離よりB点までの距離の方が大きく設定されることで、そのB点を起点として形成されるサブバイパス流路の壁面にダストが衝突する確率は小さくなる。その結果、バイパス流路からサブバイパス流路に流れ込むダストをより少なくできるので、サブバイパス流路に配置されるセンサチップにダストが衝突することを低減でき、センサチップがダメージを受けることを回避できる。
(Invention of Claim 3)
The air flow rate measuring device according to claim 1 or 2, wherein when the inlet end on the upstream side of the sub-bypass channel with respect to the bypass channel is referred to as point A and the inlet end on the downstream side is referred to as point B, The distance from the center to the point A is set to be larger than the distance from the point B.
Dust taken into the bypass flow path together with air tends to pass through the bypass flow path as it is due to inertia, so the distance from the center of the bypass flow path to point A is set larger than the distance from point A As a result, the probability that the dust collides with the wall surface of the sub-bypass channel formed from the point B as a starting point is reduced. As a result, since dust flowing from the bypass channel into the sub-bypass channel can be reduced, it is possible to reduce dust from colliding with the sensor chip disposed in the sub-bypass channel, and to avoid damaging the sensor chip. .

エアフロメータを吸気ダクトに取り付けた状態を示す断面図である。It is sectional drawing which shows the state which attached the air flow meter to the intake duct. (a)エアフロメータを上流側から見た正面図、(b)エアフロメータの側面図、(c)エアフロメータを下流側から見た背面図である。(A) The front view which looked at the air flow meter from the upstream side, (b) The side view of an air flow meter, (c) The back view which looked at the air flow meter from the downstream side. (a)センサ部による流量計測の原理を説明する温度分布図、(b)センサ部に使用されるセンサチップの断面図である。(A) Temperature distribution diagram illustrating the principle of flow rate measurement by the sensor unit, (b) a cross-sectional view of a sensor chip used in the sensor unit. 上流側温抵抗体の検出温度と下流側温抵抗体の検出温度との温度差DThと、空気の流量および流れ方向との相関を示すグラフである。It is a graph which shows the correlation with the temperature difference DTh of the detection temperature of an upstream temperature resistor, and the detection temperature of a downstream temperature resistor, and the flow volume and flow direction of air. バイパス出口側流路に逆流抑制板を配置した一例を示す断面図である(実施例1)。It is sectional drawing which shows an example which has arrange | positioned the backflow suppression board in the bypass exit side flow path (Example 1). サブバイパス出口側流路の入口に整流板を配置した一例を示す断面図である(実施例2)。It is sectional drawing which shows an example which has arrange | positioned the baffle plate in the inlet_port | entrance of a sub bypass outlet side flow path (Example 2). バイパス流路に対するサブバイパス流路の分岐部(入口)の形状を示す断面図である(実施例3)。(Example 3) which is sectional drawing which shows the shape of the branch part (inlet) of the sub bypass flow path with respect to a bypass flow path. バイパス出口側流路を形成する流路形成ボディの壁面に空気排出孔を形成した一例を示す断面図である(実施例4)。(Example 4) which is an example which formed the air discharge hole in the wall surface of the flow-path formation body which forms a bypass exit side flow path. 従来技術に係るエアフロメータの断面図である。It is sectional drawing of the air flow meter which concerns on a prior art.

本発明を実施するための最良の形態を以下の実施例により詳細に説明する。
なお、以下に説明する4つの実施例のうち、実施例2は本発明が適用されたものであるのに対し、実施例1,実施例3および実施例4はいずれも本発明が適用されていない参考例である。
The best mode for carrying out the present invention will be described in detail with reference to the following examples.
Of the four embodiments described below, the second embodiment is the one to which the present invention is applied, while the first, third, and fourth embodiments all have the present invention applied thereto. There is no reference example.

この実施例1は、例えば、自動車用エンジンの吸入空気量を測定するエアフロメータ1に本発明の空気流量測定装置を適用した一例を説明する。
エアフロメータ1は、図1に示す様に、吸気ダクト2に取り付けられるセンサハウジング3と、このセンサハウジング3の内部に組み込まれるセンサ部4とを有する。
吸気ダクト2は、エンジンの吸気ポート(図示せず)に接続される吸気通路の一部を形成するもので、例えば、吸気通路の最上流に配置されるエアクリーナの出口パイプ、あるいは、この出口パイプの下流側に接続される吸気管等である。
センサハウジング3は、図2に示す様に、吸気ダクト2に固定されるフランジ部3aと、エンジンの運転状態を制御するECU(図示せず)との電気的接続を行うコネクタ部3bと、吸気ダクト2の内部に挿入される流路形成ボディ3c等が形成されている。
In the first embodiment, for example, an example in which the air flow measuring device of the present invention is applied to an air flow meter 1 that measures an intake air amount of an automobile engine will be described.
As shown in FIG. 1, the air flow meter 1 includes a sensor housing 3 attached to the intake duct 2 and a sensor unit 4 incorporated in the sensor housing 3.
The intake duct 2 forms part of an intake passage connected to an intake port (not shown) of the engine. For example, an outlet pipe of an air cleaner arranged at the uppermost stream of the intake passage, or the outlet pipe An intake pipe or the like connected to the downstream side.
As shown in FIG. 2, the sensor housing 3 includes a flange portion 3a fixed to the intake duct 2, a connector portion 3b that electrically connects an ECU (not shown) that controls the operating state of the engine, an intake air A flow path forming body 3c and the like inserted into the duct 2 are formed.

流路形成ボディ3cには、吸気ダクト2の内部を図1の左側(エアクリーナ側)から右側(エンジン側)に向かって流れる空気、つまり、エンジンに吸入される空気の一部を取り込むバイパス流路5と、このバイパス流路5を流れる空気の一部を取り込むサブバイパス流路6とが形成されている。
バイパス流路5は、空気を取り込む入口5aから空気を排出する出口5bまで略直線的に、且つ、吸気ダクト2を流れる空気の流れ方向と略平行に形成されている。このバイパス流路5は、流路断面形状が円形であり、且つ、バイパス流路5の出口側は、流路断面積が出口5bに向かって次第に減少するテーパ状に形成されている。また、バイパス流路5の出口側には、後述する逆流抑制板7が配置されている。
In the flow path forming body 3c, a bypass flow path that takes in the air flowing from the left side (air cleaner side) to the right side (engine side) of FIG. 5 and a sub-bypass channel 6 for taking in part of the air flowing through the bypass channel 5 are formed.
The bypass flow path 5 is formed substantially linearly from the inlet 5 a that takes in air to the outlet 5 b that discharges air, and substantially parallel to the flow direction of the air flowing through the intake duct 2. The bypass channel 5 has a circular channel cross-sectional shape, and the outlet side of the bypass channel 5 is formed in a tapered shape in which the channel cross-sectional area gradually decreases toward the outlet 5b. Further, a backflow suppression plate 7 to be described later is disposed on the outlet side of the bypass flow path 5.

サブバイパス流路6は、バイパス流路5を流れる空気の流れ方向と直交する所定の方向(図1の上下方向)をY−Y方向と呼ぶ時に、バイパス流路5に対するY−Y方向の一方側(図示上側)にバイパス流路5から分岐するサブバイパス流路6の入口6aが形成され、バイパス流路5の出口5bの周囲に形成される環状の出口6bに通じている。このサブバイパス流路6は、バイパス流路5より流路長が長く、且つ、流路途中で方向が大きく変化する曲がり部を有して形成されている。
また、サブバイパス流路6の入口6aは、バイパス流路5に対する上流側の入口端部をA点、下流側の入口端部をB点と呼ぶ時に、バイパス流路5の中心線O−OからA点までの距離より、B点までの距離の方が大きく設定されている(図1参照)。つまり、サブバイパス流路6の入口開口面は、バイパス流路5の出口側に傾いて形成されている。
The sub-bypass channel 6 is one of the Y-Y directions relative to the bypass channel 5 when a predetermined direction (vertical direction in FIG. 1) orthogonal to the flow direction of the air flowing through the bypass channel 5 is referred to as a Y-Y direction. An inlet 6a of the sub-bypass channel 6 branched from the bypass channel 5 is formed on the side (the upper side in the figure), and communicates with an annular outlet 6b formed around the outlet 5b of the bypass channel 5. The sub-bypass channel 6 has a longer channel length than the bypass channel 5 and is formed with a bent portion whose direction changes greatly in the middle of the channel.
In addition, the inlet 6a of the sub-bypass channel 6 is a center line OO of the bypass channel 5 when the upstream inlet end with respect to the bypass channel 5 is referred to as point A and the downstream inlet end is referred to as point B. The distance to point B is set larger than the distance from point A to point A (see FIG. 1). That is, the inlet opening surface of the sub bypass channel 6 is formed to be inclined toward the outlet side of the bypass channel 5.

センサ部4は、図3(b)に示す様に、例えば、シリコン製のセンサ基板8に設けられるダイヤフラム9の表面上に薄膜抵抗体(発熱抵抗体10と側温抵抗体11、12)を形成したセンサチップ13と、発熱抵抗体10の発熱温度を制御すると共に、側温抵抗体11、12の抵抗値を基に、空気の流量と流れ方向に応じたセンサ信号を出力する回路部(図示せず)とを有し、図1に示す様に、センサチップ13がサブバイパス流路6の曲がり部に配置されている。
発熱抵抗体10は、サブバイパス流路6を流れる空気の温度よりも一定温度高い基準温度に通電制御される。
側温抵抗体11、12は、発熱抵抗体10の上流側に近接して配置される側温抵抗体(以下、上流側温抵抗体11と呼ぶ)と、発熱抵抗体10の下流側に近接して配置される側温抵抗体(以下、下流側温抵抗体12と呼ぶ)とを有している。
As shown in FIG. 3B, the sensor unit 4 includes, for example, a thin film resistor (a heating resistor 10 and side temperature resistors 11, 12) on the surface of a diaphragm 9 provided on a sensor substrate 8 made of silicon. A circuit unit that controls the heat generation temperature of the formed sensor chip 13 and the heat generation resistor 10 and outputs a sensor signal corresponding to the flow rate and flow direction of air based on the resistance values of the side temperature resistors 11 and 12 ( As shown in FIG. 1, the sensor chip 13 is disposed at the bent portion of the sub-bypass channel 6.
The heating resistor 10 is energized and controlled to a reference temperature that is higher than the temperature of the air flowing through the sub-bypass channel 6 by a certain temperature.
The side temperature resistors 11 and 12 are close to the side temperature resistor (hereinafter referred to as the upstream side temperature resistor 11) disposed close to the upstream side of the heating resistor 10 and the downstream side of the heating resistor 10. Side temperature resistors (hereinafter referred to as downstream temperature resistors 12).

このセンサ部4による空気流量の計測原理について説明する。
発熱抵抗体10が基準温度に通電制御されると、発熱抵抗体10の発熱による温度分布が生じる。ここで、サブバイパス流路6に空気の流れが発生していない時は、図3(a)に破線グラフで示す様に、発熱抵抗体10の位置を中心として上流側と下流側とで温度分布が左右対称となるため、上流側温抵抗体11で検出される温度と、下流側温抵抗体12で検出される温度とが等しくなる。
これに対し、例えば、サブバイパス流路6に順流方向の空気流が生じると、図3(a)に実線グラフで示す様に、発熱抵抗体10の下流側(図示右側)へ片寄った温度分布が生じるため、上流側温抵抗体11の検出温度より、下流側温抵抗体12の検出温度の方が高くなる。
The principle of measuring the air flow rate by the sensor unit 4 will be described.
When the heating resistor 10 is energized and controlled to the reference temperature, a temperature distribution due to the heat generated by the heating resistor 10 occurs. Here, when there is no air flow in the sub-bypass channel 6, as shown by the broken line graph in FIG. 3A, the temperature is increased between the upstream side and the downstream side around the position of the heating resistor 10. Since the distribution is symmetrical, the temperature detected by the upstream temperature resistor 11 is equal to the temperature detected by the downstream temperature resistor 12.
On the other hand, for example, when a forward air flow is generated in the sub-bypass channel 6, as shown by a solid line graph in FIG. 3A, the temperature distribution is shifted to the downstream side (right side in the drawing) of the heating resistor 10. Therefore, the detected temperature of the downstream temperature resistor 12 is higher than the detected temperature of the upstream temperature resistor 11.

一方、サブバイパス流路6に逆流方向の空気流が生じると、発熱抵抗体10の上流側(図示左側)へ片寄った温度分布が生じるため、下流側温抵抗体12の検出温度より、上流側温抵抗体11の検出温度の方が高くなる。
これにより、上流側温抵抗体11の検出温度と下流側温抵抗体12の検出温度との間に温度差DThが生じるため、この温度差DThに応じて、上流側温抵抗体11と下流側温抵抗体12の抵抗値がそれぞれ変化し、この抵抗値の変化により生じる電位差が増幅されて、センサ信号(例えばアナログ電圧)としてECUへ出力される。なお、センサ信号は、アナログ電圧を周波数値に変換して出力することも出来る。図4は、上流側温抵抗体11の検出温度と下流側温抵抗体12の検出温度との温度差DThと、空気の流量および流れ方向との相関を示すグラフである。
On the other hand, when an air flow in the reverse flow direction is generated in the sub-bypass channel 6, a temperature distribution that is shifted toward the upstream side (the left side in the drawing) of the heating resistor 10 is generated, so that the upstream side of the detected temperature of the downstream temperature resistor 12. The detected temperature of the temperature resistor 11 is higher.
As a result, a temperature difference DTh occurs between the detected temperature of the upstream temperature resistor 11 and the detected temperature of the downstream temperature resistor 12, so that the upstream temperature resistor 11 and the downstream side correspond to this temperature difference DTh. The resistance value of the temperature resistor 12 changes, and the potential difference caused by the change of the resistance value is amplified and output to the ECU as a sensor signal (for example, analog voltage). The sensor signal can also be output by converting an analog voltage into a frequency value. FIG. 4 is a graph showing the correlation between the temperature difference DTh between the detected temperature of the upstream temperature resistor 11 and the detected temperature of the downstream temperature resistor 12, and the flow rate and flow direction of air.

次に、逆流抑制板7について説明する。
サブバイパス流路6の入口6aが形成される部分より下流側のバイパス流路5をバイパス出口側流路と呼ぶ時に、このバイパス出口側流路には、バイパス出口側流路を逆流してサブバイパス流路6へ流れ込む空気の流れを抑制する逆流抑制板7が配置されている。この逆流抑制板7は、図5に示す様に、Y−Y方向と直交する平面(Y−Y方向と直交し、且つ、バイパス流路5を流れる空気の流れ方向に沿った平面)と平行に配置されると共に、バイパス出口側流路のY−Y方向の略中心またはY−Y方向の中心より一方側(バイパス出口上部と呼ぶ)に寄って配置されている。
また、バイパス流路5を流れる空気の流れ方向に沿った逆流抑制板7の長さは、バイパス出口側流路の長さと略同じである。つまり、逆流抑制板7の上流端は、バイパス流路5を流れる空気の流れ方向において、サブバイパス流路6の下流側の入口端部B点と略同じ位置であり、逆流抑制板7の下流端は、バイパス流路5の出口開口面と略同じ位置である。但し、逆流抑制板7の下流端は、バイパス流路5の出口開口面より外側へ突き出ていても良い。
Next, the backflow suppression plate 7 will be described.
When the bypass flow path 5 on the downstream side of the portion where the inlet 6a of the sub bypass flow path 6 is formed is called a bypass outlet side flow path, the bypass outlet side flow path is reversely flown to the bypass outlet side flow path. A backflow suppression plate 7 that suppresses the flow of air flowing into the bypass flow path 6 is disposed. As shown in FIG. 5, the backflow suppression plate 7 is parallel to a plane orthogonal to the YY direction (a plane orthogonal to the YY direction and along the flow direction of air flowing through the bypass flow path 5). And arranged closer to one side (referred to as the upper part of the bypass outlet) than the center in the YY direction or the center in the YY direction of the flow path on the bypass outlet side.
Further, the length of the backflow suppressing plate 7 along the flow direction of the air flowing through the bypass flow path 5 is substantially the same as the length of the bypass outlet side flow path. In other words, the upstream end of the backflow suppression plate 7 is substantially in the same position as the inlet end B point on the downstream side of the sub bypass flow path 6 in the flow direction of the air flowing through the bypass flow path 5. The end is substantially the same position as the outlet opening surface of the bypass channel 5. However, the downstream end of the backflow suppression plate 7 may protrude outward from the outlet opening surface of the bypass flow path 5.

(実施例1の作用および効果)
本実施例のエアフロメータ1は、バイパス出口側流路に配置した逆流抑制板7により、バイパス出口上部へ向かう空気の流れが抑制されて、バイパス出口上部の流路壁面に衝突する空気量を低減できる。これにより、バイパス出口上部の圧力上昇を抑えることができるので、バイパス流路5の出口5bから排出されない空気が少なくなり、バイパス出口側流路を逆流してサブバイパス流路6へ流れ込む空気の流れを低減できる。その結果、バイパス流路5の上流側からサブバイパス流路6へ取り込まれる空気(順流)と、バイパス出口上部からサブバイパス流路6へ流れ込む空気(逆流)との衝突による乱れを低減できるので、センサ部4の検出精度が安定する。
(Operation and Effect of Example 1)
In the air flow meter 1 of the present embodiment, the air flow toward the upper part of the bypass outlet is suppressed by the backflow suppression plate 7 arranged in the bypass outlet side flow path, and the amount of air colliding with the flow path wall surface of the upper part of the bypass outlet is reduced. it can. As a result, an increase in pressure at the upper part of the bypass outlet can be suppressed, so that the amount of air that is not discharged from the outlet 5b of the bypass flow path 5 decreases, and the flow of air that flows back into the sub bypass flow path 6 through the bypass outlet side flow path Can be reduced. As a result, it is possible to reduce turbulence due to collision between the air taken into the sub-bypass channel 6 from the upstream side of the bypass channel 5 (forward flow) and the air flowing into the sub-bypass channel 6 from the upper part of the bypass outlet (back flow). The detection accuracy of the sensor unit 4 is stabilized.

また、バイパス流路5に対するサブバイパス流路6の入口開口面が、バイパス流路5の出口側に傾いて形成されている。つまり、図1に示した様に、バイパス流路5の中心線O−OからA点までの距離よりB点までの距離の方が大きく設定されている。この構成によれば、空気と共にバイパス流路5に取り込まれたダストは、慣性の作用により、そのままバイパス流路5を通り抜けようとするため、B点を起点として形成されるサブバイパス流路6の壁面にダストが衝突する確率は小さくなる。その結果、バイパス流路5からサブバイパス流路6に流れ込むダストをより少なくできるので、サブバイパス流路6に配置されるセンサチップ13にダストが衝突することを低減でき、基板上の薄膜抵抗体(発熱抵抗体10、上流側温抵抗体11、下流側温抵抗体12等)がダメージを受けることを回避できる。   Further, the inlet opening surface of the sub-bypass channel 6 with respect to the bypass channel 5 is formed to be inclined toward the outlet side of the bypass channel 5. That is, as shown in FIG. 1, the distance from the center line OO of the bypass flow path 5 to the point A is set to be larger than the distance from the point B to the point A. According to this configuration, the dust taken into the bypass flow path 5 together with the air tends to pass through the bypass flow path 5 as it is due to the inertial action, so that the sub bypass flow path 6 formed starting from the point B is used. The probability of dust colliding with the wall surface is reduced. As a result, since dust flowing into the sub-bypass channel 6 from the bypass channel 5 can be reduced, it is possible to reduce dust from colliding with the sensor chip 13 disposed in the sub-bypass channel 6, and the thin film resistor on the substrate It is possible to avoid damage to the heating resistor 10, the upstream temperature resistor 11, the downstream temperature resistor 12, and the like.

この実施例2は、本発明が適用された一実施形態で、サブバイパス流路6の入口6aに整流板14を配置した一例である。
なお、流路形成ボディ3cに形成される流路構成(バイパス流路5とサブバイパス流路6の構成)およびセンサ部4の構成は実施例1と同じである。
整流板14は、図6に示す様に、サブバイパス流路6の入口開口面(実施例1に記載したA点とB点との間に形成される開口面)よりサブバイパス流路6の内部に入り込んで配置され、且つ、A点を起点として形成されるサブバイパス流路6の壁面をA点側壁面6c、B点を起点として形成されるサブバイパス流路6の壁面をB点側壁面6dと呼ぶ時に、A点側壁面6cとB点側壁面6dとの中間位置よりB点側壁面6dに寄った位置に配置されている。
Example 2 is an example in which the present invention is applied, and is an example in which a rectifying plate 14 is disposed at the inlet 6 a of the sub-bypass channel 6.
The flow path configuration (the configuration of the bypass flow path 5 and the sub bypass flow path 6) formed in the flow path forming body 3c and the configuration of the sensor unit 4 are the same as those in the first embodiment.
As shown in FIG. 6, the rectifying plate 14 is formed from the inlet opening surface (the opening surface formed between the points A and B described in the first embodiment) of the sub bypass channel 6. The wall surface of the sub-bypass channel 6 formed from the point A is the side wall surface 6c of the sub-bypass channel 6 that is disposed inside and is formed with the point A as the starting point, and the wall surface of the sub-bypass channel 6 that is formed with the point B as the starting point. When referred to as a wall surface 6d, it is disposed at a position closer to the B-point side wall surface 6d than an intermediate position between the A-point side wall surface 6c and the B-point side wall surface 6d.

上記の構成によれば、バイパス出口上部の流路壁面に衝突した空気の一部がサブバイパス流路6へ逆流しても、サブバイパス流路6の入口6aに配置した整流板14によって逆流の向きと順流の向きとを整流できる。つまり、整流板14によって、サブバイパス流路6の入口6aに順流の通り道と逆流の通り道とを形成できる。これにより、整流板14が配置されている部分を通り過ぎた後、順流と逆流とをスムーズに合流させることができるので、順流と逆流との衝突による乱れを低減でき、センサ部4の検出精度が安定する。
また、整流板14は、A点側壁面6cとB点側壁面6dとの中間位置よりB点側壁面6dに寄った位置に配置することで、整流板14によって形成される逆流の通り道より順流の通り道を広く形成できるため、多くの順流をサブバイパス流路6に取り入れることができる。
According to the above configuration, even if a part of the air colliding with the flow path wall surface above the bypass outlet flows backward to the sub bypass flow path 6, the flow is reversed by the rectifying plate 14 disposed at the inlet 6 a of the sub bypass flow path 6. The direction and the direction of the forward flow can be rectified. That is, the rectifying plate 14 can form a forward flow path and a reverse flow path at the inlet 6 a of the sub bypass flow path 6. Thereby, after passing the portion where the rectifying plate 14 is disposed, the forward flow and the reverse flow can be smoothly merged, so that the disturbance due to the collision between the forward flow and the reverse flow can be reduced, and the detection accuracy of the sensor unit 4 can be improved. Stabilize.
Further, the rectifying plate 14 is arranged at a position closer to the B-point side wall surface 6d than an intermediate position between the A-point side wall surface 6c and the B-point side wall surface 6d, so that it flows forward from the reverse flow path formed by the rectifying plate 14. Since a wide passage can be formed, a lot of forward flows can be taken into the sub-bypass channel 6.

この実施例3に示すエアフロメータ1は、図7に示す様に、サブバイパス流路6の入口端部B点が、サブバイパス流路6のA点側壁面6cに向かって突き出た位置に設けられ、且つ、A点側壁面6cとB点側壁面6dとの間隔が、B点からサブバイパス流路6の内部へ入り込んだ直後に大きく形成されていることを特徴とする。なお、バイパス流路5の中心線O−O(図1参照)からA点までの距離よりB点までの距離の方が大きく設定されることは、実施例1および2と同じである。   As shown in FIG. 7, the air flow meter 1 shown in the third embodiment is provided at a position where the inlet end B point of the sub bypass flow path 6 protrudes toward the side wall surface 6 c of the sub bypass flow path 6. In addition, the distance between the point A side wall surface 6c and the point B side wall surface 6d is large immediately after entering the inside of the sub-bypass channel 6 from the point B. The distance from the center line OO (see FIG. 1) of the bypass flow path 5 to the point A is set to be larger than the distance from the point B as in the first and second embodiments.

上記の構成によれば、A点側壁面6cとB点側壁面6dとの間隔が一定の場合(つまり、B点がA点側壁面6cに向かって突き出ていない場合)と比較した時に、シミュレーションによる検証の結果、サブバイパス流路6へ逆流する空気の量を低減できることが分かった。
また、A点側壁面6cとB点側壁面6dとの間隔が、B点からサブバイパス流路6の内部へ入り込んだ直後に大きく形成されることにより、図示矢印cで示す様に、サブバイパス流路6へ逆流した空気がB点側壁面6dに沿って流れることが確認された。これにより、バイパス流路5の入口側からサブバイパス流路6へ流れ込む順流と、バイパス流路5の出口側からサブバイパス流路6へ流れ込む逆流との衝突が抑制されるので、サブバイパス流路6を流れる空気の乱れを低減でき、センサ部4の検出精度が安定する。
According to said structure, when compared with the case where the space | interval of the A point side wall surface 6c and the B point side wall surface 6d is constant (that is, when B point does not protrude toward the A point side wall surface 6c), it is a simulation. As a result of verification, it has been found that the amount of air flowing back to the sub-bypass channel 6 can be reduced.
Further, the distance between the point A side wall surface 6c and the point B side wall surface 6d is formed to be large immediately after entering the inside of the sub bypass flow path 6 from the point B, and as shown by the arrow c in the drawing, It was confirmed that the air flowing backward to the flow path 6 flows along the B-point side wall surface 6d. Thereby, the collision between the forward flow flowing into the sub bypass flow channel 6 from the inlet side of the bypass flow channel 5 and the reverse flow flowing into the sub bypass flow channel 6 from the outlet side of the bypass flow channel 5 is suppressed. The turbulence of the air flowing through 6 can be reduced, and the detection accuracy of the sensor unit 4 is stabilized.

この実施例4に示すエアフロメータ1は、バイパス出口側流路を形成する流路形成ボディ3cの壁面に空気排出孔15を形成した一例である。
空気排出孔15は、図8に示す様に、バイパス出口側流路のY−Y方向の一方側(バイパス出口上部)の流路壁面に形成され、図示矢印で示す様に、バイパス出口上部に向かって流れる空気の一部を、空気排出孔15から流路形成ボディ3cの外部へ排出できる。これにより、バイパス出口上部の圧力上昇を抑えることができるので、バイパス出口側流路を逆流してサブバイパス流路6へ流れ込む空気の流れを低減できる。その結果、バイパス流路5の上流側からサブバイパス流路6へ取り込まれる空気(順流)と、バイパス出口上部からサブバイパス流路6へ流れ込む空気(逆流)との衝突による乱れを低減できるので、センサ部4の検出精度が安定する。
The air flow meter 1 shown in the fourth embodiment is an example in which the air discharge hole 15 is formed on the wall surface of the flow path forming body 3c that forms the bypass outlet side flow path.
As shown in FIG. 8, the air discharge hole 15 is formed in the flow passage wall surface on one side in the YY direction of the bypass outlet side flow passage (the upper portion of the bypass outlet). Part of the air flowing toward the outside can be discharged from the air discharge hole 15 to the outside of the flow path forming body 3c. Thereby, since the pressure rise of the bypass outlet upper part can be suppressed, the flow of the air which flows back into the sub bypass flow path 6 through the bypass outlet side flow path can be reduced. As a result, it is possible to reduce turbulence due to collision between the air taken into the sub-bypass channel 6 from the upstream side of the bypass channel 5 (forward flow) and the air flowing into the sub-bypass channel 6 from the upper part of the bypass outlet (back flow). The detection accuracy of the sensor unit 4 is stabilized.

1 エアフロメータ(空気流量測定装置)
2 吸気ダクト(ダクト)
4 センサ部
5 バイパス流路
6 サブバイパス流路
7 逆流抑制板
8 センサ基板(基板)
9 ダイヤフラム
10 発熱抵抗体(薄膜抵抗体)
11 上流側温抵抗体(薄膜抵抗体)
12 下流側温抵抗体(薄膜抵抗体)
13 センサチップ
14 整流板
15 空気排出孔
1 Air flow meter (air flow measuring device)
2 Air intake duct (duct)
4 Sensor part 5 Bypass flow path 6 Sub-bypass flow path 7 Backflow suppression plate 8 Sensor substrate (substrate)
9 Diaphragm 10 Heating resistor (thin film resistor)
11 Upstream temperature resistor (thin film resistor)
12 Downstream temperature resistor (thin film resistor)
13 Sensor chip 14 Current plate 15 Air exhaust hole

Claims (3)

ダクトの内部を流れる空気の一部を取り込むバイパス流路と、
このバイパス流路から分岐して形成され、前記バイパス流路を流れる空気の一部を取り込むサブバイパス流路と、
このサブバイパス流路に配置される流量測定用のセンサチップを有するセンサ部と、
このセンサ部より出力されるセンサ情報を基に、前記サブバイパス流路を流れる空気の流量を測定する空気流量測定装置であって、
前記バイパス流路に対して前記サブバイパス流路の入口が形成される部分より上流側の前記バイパス流路から前記サブバイパス流路へ流れ込む空気の流れを順流と呼び、前記サブバイパス流路の入口が形成される部分より下流側の前記バイパス流路から前記サブバイパス流路へ流れ込む空気の流れを逆流と呼ぶ時に、
前記サブバイパス流路の入口には、順流の向きと逆流の向きとを整流する整流板が配置されていることを特徴とする空気流量測定装置。
A bypass flow path for taking in part of the air flowing inside the duct;
A sub-bypass channel that is formed by branching from the bypass channel and takes in a part of the air flowing through the bypass channel;
A sensor unit having a sensor chip for flow rate measurement disposed in the sub-bypass channel;
Based on the sensor information output from the sensor unit, an air flow rate measuring device that measures the flow rate of air flowing through the sub-bypass channel,
The flow of air flowing from the bypass channel upstream of the portion where the inlet of the sub bypass channel is formed to the bypass channel to the sub bypass channel is referred to as forward flow, and the inlet of the sub bypass channel When the flow of air flowing into the sub-bypass channel from the bypass channel on the downstream side of the portion where is formed is called a reverse flow,
An air flow rate measuring device characterized in that a rectifying plate for rectifying the direction of forward flow and the direction of reverse flow is arranged at the inlet of the sub-bypass channel.
請求項1に記載した空気流量測定装置において、
前記バイパス流路に対する前記サブバイパス流路の上流側の入口端部をA点、下流側の入口端部をB点とし、且つ、前記A点を起点として形成される前記サブバイパス流路の壁面をA点側壁面、前記B点を起点として形成される前記サブバイパス流路の壁面をB点側壁面と呼ぶ時に、
前記整流板は、前記A点側壁面と前記B点側壁面との中間位置より前記B点側壁面に寄った位置に配置されていることを特徴とする空気流量測定装置。
In the air flow rate measuring device according to claim 1,
The wall surface of the sub-bypass channel formed with the upstream inlet end of the sub-pass channel relative to the bypass channel as point A, the downstream inlet end as point B, and the point A as a starting point When the wall surface of the sub-bypass channel formed starting from the point B is referred to as the point B side wall surface,
The air flow measuring device, wherein the rectifying plate is disposed at a position closer to the B point side wall surface than an intermediate position between the A point side wall surface and the B point side wall surface.
請求項1または2に記載した空気流量測定装置において、
前記バイパス流路に対する前記サブバイパス流路の上流側の入口端部をA点、下流側の入口端部をB点と呼ぶ時に、前記バイパス流路の中心から前記A点までの距離より前記B点までの距離の方が大きく設定されていることを特徴とする空気流量測定装置。
In the air flow rate measuring device according to claim 1 or 2,
When the inlet end on the upstream side of the sub bypass channel with respect to the bypass channel is referred to as point A and the inlet end on the downstream side is referred to as point B, the distance B from the center of the bypass channel to the point A An air flow rate measuring apparatus characterized in that the distance to the point is set larger.
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CN106908110A (en) * 2016-09-06 2017-06-30 美新微纳传感系统有限公司 Flow sensing module with bypass
US10520343B2 (en) 2014-09-26 2019-12-31 Hitachi Automotive Systems, Ltd. Thermal flowmeter

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JP6118700B2 (en) * 2013-09-30 2017-04-19 日立オートモティブシステムズ株式会社 Thermal flow meter

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JP2008309623A (en) * 2007-06-14 2008-12-25 Denso Corp Air flow rate measuring device

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JP2003315116A (en) * 2002-04-18 2003-11-06 Denso Corp Flow measuring device
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JP2008309623A (en) * 2007-06-14 2008-12-25 Denso Corp Air flow rate measuring device

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Publication number Priority date Publication date Assignee Title
US10520343B2 (en) 2014-09-26 2019-12-31 Hitachi Automotive Systems, Ltd. Thermal flowmeter
CN106908110A (en) * 2016-09-06 2017-06-30 美新微纳传感系统有限公司 Flow sensing module with bypass

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