JP2013021270A - Film for manufacturing semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a film for manufacturing a semiconductor device having a separator laminated only on one surface of a film, for the back surface of a flip-chip semiconductor, being formed on the back surface of a semiconductor element connected in flip-chip onto an object to be attached, wherein, after the film is attached to the semiconductor element, it is identified whether or not the separator is removed.SOLUTION: In the film for manufacturing a semiconductor device having a separator laminated only on one surface of a film, for the back surface of a flip-chip semiconductor, being formed on the back surface of a semiconductor element connected in flip-chip onto an object to be attached, the reflectance of the separator in the wavelength of 400-700 nm is 30% or more and 100% or less.

Description

  The present invention relates to a film for manufacturing a semiconductor device. The flip chip type semiconductor back film provided in the semiconductor device manufacturing film is used for protecting the back surface of a semiconductor element such as a semiconductor chip and improving the strength.

  In recent years, there has been a further demand for thinner and smaller semiconductor devices and their packages. Therefore, a flip chip type semiconductor device in which a semiconductor element such as a semiconductor chip is mounted on a substrate by flip chip bonding (flip chip connection) is widely used as a semiconductor device and its package. The flip chip connection is fixed in such a manner that the circuit surface of the semiconductor chip faces the electrode forming surface of the substrate. In such a semiconductor device or the like, the back surface of the semiconductor chip may be protected by a protective film to prevent the semiconductor chip from being damaged.

JP 2008-166451 A JP 2008-006386 A Japanese Patent Laid-Open No. 2007-261035 JP 2007-250970 A JP 2007-158026 A Japanese Patent Laid-Open No. 2004-221169 JP 2004-214288 A JP 2004-142430 A JP 2004-072108 A JP 2004-063551 A

  The present inventors examined a method for attaching a film to the back surface of a semiconductor chip. As a result, invented a method for attaching a flip chip type semiconductor back film to the back surface of a semiconductor chip using a film for manufacturing a semiconductor device in which a separator is laminated only on one side of the flip chip type semiconductor back film. It came to. Specifically, the method includes (1) cutting a semiconductor device manufacturing film in accordance with the shape of the back surface of a semiconductor element (for example, a semiconductor chip), and (2) cutting the semiconductor device on the back surface of the semiconductor element. A step of attaching a film and (3) peeling the separator from the film for manufacturing a semiconductor device attached to the back surface of the semiconductor element. However, in the step (3), it may happen that the separator is not properly peeled off. If the separator is not peeled off and is used for manufacturing a semiconductor device, there is a possibility that a problem that a laser mark to be performed later cannot be performed satisfactorily occurs.

  The present invention has been made in view of the above problems, and its purpose is only on one surface of a film for flip chip type semiconductor back surface to be formed on the back surface of a semiconductor element flip chip connected on an adherend. Another object of the present invention is to provide a film for manufacturing a semiconductor device in which a separator is laminated, and the film for manufacturing a semiconductor device can be discriminated whether or not the separator is peeled off after being attached to a semiconductor element.

  The inventors of the present application have studied to solve the above-described conventional problems, and as a result, the reflectance of the separator at a wavelength of 400 to 700 nm is set within a certain range, thereby manufacturing a semiconductor device after being attached to a semiconductor element. From the film, it was found that the separator was peeled off, and the present invention was completed.

  That is, in the film for manufacturing a semiconductor device according to the present invention, the separator is laminated only on one surface of the flip chip type semiconductor back film for forming on the back surface of the semiconductor element flip chip connected on the adherend. A film for manufacturing a semiconductor device, wherein a reflectance of the separator at a wavelength of 400 to 700 nm is 30% or more and 100% or less.

  According to the said structure, since the reflectance in the wavelength of 400-700 nm of the said separator is 30% or more and 100% or less, when it is not 30% or more and 100% or less, it can determine with the separator having peeled. Therefore, it is possible to identify whether the separator has been peeled off after being attached to the semiconductor element.

  The said structure WHEREIN: It is preferable that the difference of the reflectance in the wavelength of 400-700 nm of the said separator and the reflectance in the wavelength of 400-700 nm of the said film for flip chip type semiconductor back is 5% or more. By setting the difference in reflectance to 5% or more, it can be more reliably recognized that the reflectance has changed, or that the reflectance of the separator is no longer 30% or more and 100% or less.

  The said structure WHEREIN: It is preferable that the said separator is colored. When the separator is colored, the reflectance of the separator is easily set to 30% or more and 100% or less.

  The said structure WHEREIN: It is preferable that the coloring agent is added to the said separator. When the separator is colored by the addition of the colorant, it is possible to suppress the colorant from moving from the interface between the separator and the film for semiconductor back surface to the film for semiconductor back surface.

  The said structure WHEREIN: It is preferable that both surfaces of the said separator are peeling-processed. When both sides of the separator have been peeled off, the film is wound after being applied to only one surface of the film for semiconductor back surface, and then the other surface of the film for semiconductor back surface to which the separator has been applied when rewinding. The separator in contact can be reliably peeled off.

  The said structure WHEREIN: It is preferable that the said separator is peeled by the silicone type release agent. When the separator is subjected to a release treatment with a silicone release agent, the separator can be peeled off from the film for semiconductor back surface without being heavyly peeled even after roll storage.

The said structure WHEREIN: The peeling force with the film for semiconductor back surfaces in the surface by which the film for semiconductor back surfaces of the said separator is laminated | stacked is A, For the semiconductor back surface in the surface by which the film for semiconductor back surfaces of the said separator is not laminated | stacked When the peel strength from the film is B,
0.001 ≦ A−B ≦ 0.04 [N / 50 mm]
It is preferable to satisfy. If the said formula is satisfy | filled, it can peel, without the surface by which the film for semiconductor back surfaces is laminated | stacked, and the separator B surface adhering.

It is a cross-sectional schematic diagram which shows an example of the film for semiconductor device manufacture which concerns on this embodiment. It is a cross-sectional schematic diagram which shows the manufacturing method of the semiconductor device at the time of using the film for semiconductor device manufacture shown in FIG. It is a cross-sectional schematic diagram which shows the manufacturing method of the semiconductor device at the time of using the film for semiconductor device manufacture shown in FIG.

  One embodiment of the present invention will be described with reference to FIG. 1, but the present invention is not limited to these examples. FIG. 1 is a schematic cross-sectional view showing an example of a film for manufacturing a semiconductor device according to this embodiment. Note that in this specification, parts unnecessary for description are omitted in the drawings, and there are parts illustrated in an enlarged or reduced manner for ease of description.

(Film for semiconductor device manufacturing)
As shown in FIG. 1, a semiconductor device manufacturing film 40 is a flip chip type semiconductor back film (hereinafter sometimes referred to as “semiconductor back film”) 2 on one side (the lower side in FIG. 1). Only the separator 42 is laminated. The separator 42 is peeled off from the semiconductor back surface film 2 after being attached to the semiconductor chip together with the semiconductor back surface film 2.

  In the semiconductor device manufacturing film 40 according to the present embodiment, the reflectance of the separator 42 at a wavelength of 400 to 700 nm is 30% or more and 100% or less. When the reflectance is not 30% or more and 100% or less, it can be determined that the separator is peeled off. Therefore, it is possible to identify whether or not the separator has been peeled off after being attached to the semiconductor chip.

  In the film 40 for manufacturing a semiconductor device, the difference between the reflectance of the separator 42 at a wavelength of 400 to 700 nm and the reflectance of the film for semiconductor back surface 2 at a wavelength of 400 to 700 nm, that is, (reflectance of the separator 42) − (semiconductor back surface). The reflectance of the film 2 is preferably 5% or more. The difference in reflectance is more preferably 5% or more and 75% or less, and further preferably 7% or more and 75% or less. By setting the difference in reflectance to 5% or more, it can be more reliably recognized that the reflectance has changed, or that the reflectance of the separator is no longer 30% or more and 100% or less.

(Flip chip type film for semiconductor backside)
The film 2 for semiconductor back surface has a film-like form. The film 2 for a semiconductor back surface is usually in an uncured state (including a semi-cured state) and is thermally cured after being attached to a semiconductor chip (details will be described later).

  The reflectance of the film 2 for semiconductor back surface at a wavelength of 400 to 700 nm is preferably 1% or more and 25% or less, more preferably 1% or more and 23% or less, and more preferably 1% or more and 20% or less. Further preferred. By setting the reflectance to 25% or less, the difference in reflectance from the separator 42 can be increased.

  Here, the film for semiconductor back surface may be a single layer or a laminated film in which a plurality of layers are laminated, but when the film for semiconductor back surface is a laminated film, the reflectance is 1% or more as a whole of the laminated film. It may be within a range of 25% or less. The said reflectance of the film for semiconductor back surfaces can be controlled by coloring using the coloring material (coloring agent) mentioned later. In addition, the reflectance in the wavelength 400-700 of the film for semiconductor back surfaces can be measured according to the method as described in an Example.

  The film for semiconductor back surface is preferably formed of at least a thermosetting resin, and more preferably formed of at least a thermosetting resin and a thermoplastic resin. By forming it with at least a thermosetting resin, the film for semiconductor back surface can effectively exhibit the function as an adhesive layer.

  Examples of the thermoplastic resin include natural rubber, butyl rubber, isoprene rubber, chloroprene rubber, ethylene-vinyl acetate copolymer, ethylene-acrylic acid copolymer, ethylene-acrylic acid ester copolymer, polybutadiene resin, and polycarbonate resin. , Thermoplastic polyimide resins, polyamide resins such as 6-nylon and 6,6-nylon, phenoxy resins, acrylic resins, saturated polyester resins such as PET (polyethylene terephthalate) and PBT (polybutylene terephthalate), polyamideimide resins, or fluorine Examples thereof include resins. A thermoplastic resin can be used individually or in combination of 2 or more types. Of these thermoplastic resins, an acrylic resin that has few ionic impurities and high heat resistance and can ensure the reliability of the semiconductor element is particularly preferable.

  The acrylic resin is not particularly limited, and is linear or branched having 30 or less carbon atoms (preferably 4 to 18 carbon atoms, more preferably 6 to 10 carbon atoms, and particularly preferably 8 or 9 carbon atoms). And polymers having one or more esters of acrylic acid or methacrylic acid having an alkyl group as a component. That is, in the present invention, acrylic resin has a broad meaning including methacrylic resin. Examples of the alkyl group include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, t-butyl group, isobutyl group, pentyl group, isopentyl group, hexyl group, heptyl group, and 2-ethylhexyl group. Octyl group, isooctyl group, nonyl group, isononyl group, decyl group, isodecyl group, undecyl group, dodecyl group (lauryl group), tridecyl group, tetradecyl group, stearyl group, octadecyl group and the like.

  Further, the other monomer for forming the acrylic resin (a monomer other than an alkyl ester of acrylic acid or methacrylic acid having an alkyl group with 30 or less carbon atoms) is not particularly limited. For example, acrylic acid , Methacrylic acid, carboxyethyl acrylate, carboxypentyl acrylate, itaconic acid, maleic acid, fumaric acid or crotonic acid-containing monomer, such as maleic anhydride or itaconic anhydride, etc. ) 2-hydroxyethyl acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate, 8-hydroxyoctyl (meth) acrylate, (meta ) Acrylic acid 10-hydroxyde , Hydroxyl group-containing monomers such as 12-hydroxylauryl (meth) acrylic acid or (4-hydroxymethylcyclohexyl) -methyl acrylate, styrene sulfonic acid, allyl sulfonic acid, 2- (meth) acrylamide-2-methylpropane Sulfonic acid, methacrylamidopropane sulfonic acid, sulfopropyl (meth) acrylate or sulfonic acid group-containing monomer such as (meth) acryloyloxynaphthalene sulfonic acid or the like, or phosphoric acid group content such as 2-hydroxyethyl acryloyl phosphate And monomers. In addition, (meth) acrylic acid means acrylic acid and / or methacrylic acid, and (meth) of the present invention has the same meaning.

  Examples of the thermosetting resin include an epoxy resin, a phenol resin, an amino resin, an unsaturated polyester resin, a polyurethane resin, a silicone resin, and a thermosetting polyimide resin. A thermosetting resin can be used individually or in combination of 2 or more types. As the thermosetting resin, an epoxy resin containing a small amount of ionic impurities that corrode semiconductor elements is particularly suitable. Moreover, a phenol resin can be used suitably as a hardening | curing agent of an epoxy resin.

  The epoxy resin is not particularly limited. For example, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, brominated bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol AF type epoxy. Bifunctional epoxy such as resin, biphenyl type epoxy resin, naphthalene type epoxy resin, fluorene type epoxy resin, phenol novolac type epoxy resin, orthocresol novolak type epoxy resin, trishydroxyphenylmethane type epoxy resin, tetraphenylolethane type epoxy resin Epoxy resin such as resin, polyfunctional epoxy resin, hydantoin type epoxy resin, trisglycidyl isocyanurate type epoxy resin or glycidylamine type epoxy resin It can be used.

  As the epoxy resin, among the above examples, novolak type epoxy resin, biphenyl type epoxy resin, trishydroxyphenylmethane type epoxy resin, and tetraphenylolethane type epoxy resin are particularly preferable. This is because these epoxy resins are rich in reactivity with a phenol resin as a curing agent and are excellent in heat resistance and the like.

  Further, the phenol resin acts as a curing agent for the epoxy resin, for example, a novolac type phenol resin such as a phenol novolac resin, a phenol aralkyl resin, a cresol novolac resin, a tert-butylphenol novolac resin, a nonylphenol novolac resin, Examples include resol-type phenolic resins and polyoxystyrenes such as polyparaoxystyrene. A phenol resin can be used individually or in combination of 2 or more types. Of these phenol resins, phenol novolac resins and phenol aralkyl resins are particularly preferred. This is because the connection reliability of the semiconductor device can be improved.

  The mixing ratio of the epoxy resin and the phenol resin is preferably such that, for example, the hydroxyl group in the phenol resin is 0.5 equivalent to 2.0 equivalents per equivalent of epoxy group in the epoxy resin component. More preferred is 0.8 equivalent to 1.2 equivalent. That is, if the blending ratio of both is out of the above range, sufficient curing reaction does not proceed and the properties of the cured epoxy resin are likely to deteriorate.

  The content of the thermosetting resin is preferably 5% by weight or more and 90% by weight or less, and more preferably 10% by weight or more and 85% by weight or less, based on all resin components in the film for semiconductor back surface. More preferably, it is 15 wt% or more and 80 wt% or less. By making the content 5% by weight or more, heat resistance can be maintained. In addition, when the film for semiconductor back surface is attached to the semiconductor chip before the resin sealing step, the film for semiconductor back surface can be sufficiently cured when the sealing resin is thermally cured. A flip-chip type semiconductor device without peeling can be manufactured by securely bonding and fixing to the back surface of the element. On the other hand, when the content is 90% by weight or less, warpage of the package (PKG: flip chip type semiconductor device) can be suppressed.

  The thermosetting acceleration catalyst for epoxy resin and phenol resin is not particularly limited, and can be appropriately selected from known thermosetting acceleration catalysts. A thermosetting acceleration | stimulation catalyst can be used individually or in combination of 2 or more types. As the thermosetting acceleration catalyst, for example, an amine curing accelerator, a phosphorus curing accelerator, an imidazole curing accelerator, a boron curing accelerator, a phosphorus-boron curing accelerator, or the like can be used.

  The semiconductor back film is preferably formed of a resin composition containing an epoxy resin and a phenol resin, or a resin composition containing an epoxy resin, a phenol resin and an acrylic resin. Since these resins have few ionic impurities and high heat resistance, the reliability of the semiconductor element can be ensured.

  It is important that the film 2 for semiconductor back surface has adhesiveness (adhesion) to the back surface (circuit non-formed surface) of the semiconductor wafer. The film for semiconductor back surface 2 can be formed of, for example, a resin composition containing an epoxy resin as a thermosetting resin. In order to crosslink the semiconductor back film 2 to some extent in advance, it is preferable to add a polyfunctional compound that reacts with the functional group at the molecular chain end of the polymer as a crosslinking agent. Thereby, the adhesive property under high temperature can be improved and heat resistance can be improved.

  The adhesive strength (23 ° C., peeling angle 180 °, peeling speed 300 mm / min) of the film for semiconductor back surface to the semiconductor element is preferably in the range of 0.5 N / 20 mm to 15 N / 20 mm, and 0.7 N / 20 mm to 10 N / 20 mm. The range of is more preferable. By setting it to 0.5 N / 20 mm or more, it is stuck to the semiconductor element with excellent adhesion, and the occurrence of floating or the like can be prevented. On the other hand, it can peel easily from the separator 42 by setting it as 15 N / 20mm or less.

  The crosslinking agent is not particularly limited, and a known crosslinking agent can be used. Specifically, for example, an isocyanate crosslinking agent, an epoxy crosslinking agent, a melamine crosslinking agent, a peroxide crosslinking agent, a urea crosslinking agent, a metal alkoxide crosslinking agent, a metal chelate crosslinking agent, a metal salt Examples thereof include a system crosslinking agent, a carbodiimide crosslinking agent, an oxazoline crosslinking agent, an aziridine crosslinking agent, and an amine crosslinking agent. As the crosslinking agent, an isocyanate crosslinking agent or an epoxy crosslinking agent is suitable. Moreover, the said crosslinking agent can be used individually or in combination of 2 or more types.

  Examples of the isocyanate-based crosslinking agent include lower aliphatic polyisocyanates such as 1,2-ethylene diisocyanate, 1,4-butylene diisocyanate, and 1,6-hexamethylene diisocyanate; cyclopentylene diisocyanate, cyclohexylene diisocyanate, Cycloaliphatic polyisocyanates such as isophorone diisocyanate, hydrogenated tolylene diisocyanate, hydrogenated xylene diisocyanate; 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 4,4'- Aromatic polyisocyanates such as diphenylmethane diisocyanate and xylylene diisocyanate, and the like, and other trimethylolpropane / tolylene diisocyanate trimer adducts [Japan Polyurethane Industry Co., Ltd.] , Trade name "Coronate L"], trimethylolpropane / hexamethylene diisocyanate trimer adduct [Nippon Polyurethane Industry Co., Ltd. under the trade name "Coronate HL"], and the like are also used. Examples of the epoxy-based crosslinking agent include N, N, N ′, N′-tetraglycidyl-m-xylenediamine, diglycidylaniline, 1,3-bis (N, N-glycidylaminomethyl) cyclohexane, 1,6-hexanediol diglycidyl ether, neopentyl glycol diglycidyl ether, ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, sorbitol polyglycidyl ether, glycerol polyglycidyl ether , Pentaerythritol polyglycidyl ether, polyglycerol polyglycidyl ether, sorbitan polyglycidyl ether, trimethylolpropane poly In addition to lysidyl ether, adipic acid diglycidyl ester, o-phthalic acid diglycidyl ester, triglycidyl-tris (2-hydroxyethyl) isocyanurate, resorcin diglycidyl ether, bisphenol-S-diglycidyl ether, epoxy in the molecule Examples thereof include an epoxy resin having two or more groups.

  In addition, the usage-amount in particular of a crosslinking agent is not restrict | limited, According to the grade to bridge | crosslink, it can select suitably. Specifically, the amount of the crosslinking agent used is, for example, usually 7 parts by weight or less (for example, 0.05 parts by weight) with respect to 100 parts by weight of the polymer component (particularly, the polymer having a functional group at the molecular chain end). ~ 7 parts by weight). When the amount of the crosslinking agent used is more than 7 parts by weight based on 100 parts by weight of the polymer component, the adhesive force is lowered, which is not preferable. From the viewpoint of improving cohesive strength, the amount of crosslinking agent used is preferably 0.05 parts by weight or more with respect to 100 parts by weight of the polymer component.

  In the present invention, instead of using a cross-linking agent or using a cross-linking agent, it is possible to carry out a cross-linking treatment by irradiation with an electron beam or ultraviolet rays.

  The film for semiconductor back surface is preferably colored. Thereby, the reflectance in wavelength 400-700nm can be made low. As a result, the difference in reflectance with the separator can be increased. Further, excellent marking properties and appearance can be exhibited, and a semiconductor device having an added-value appearance can be obtained. Thus, since the colored film for semiconductor back surface has excellent marking properties, the film for semiconductor back surface is applied to the surface of the semiconductor element or the non-circuit surface side of the semiconductor device using the semiconductor element. Accordingly, by using various marking methods such as a printing method and a laser marking method, marking can be performed and various information such as character information and graphic information can be given. In particular, by controlling the coloring color, it is possible to visually recognize information (character information, graphic information, etc.) given by marking with excellent visibility. Further, since the film for semiconductor back surface is colored, the dicing tape and the film for semiconductor back surface can be easily distinguished, and workability and the like can be improved. Further, for example, as a semiconductor device, it is possible to color-code according to products. Although it does not restrict | limit especially as a color which is exhibited by coloring, For example, it is preferable that they are dark colors, such as black, blue, and red, and it is especially preferable that it is black.

In the present embodiment, the dark, ^basically, L ^* a * ^{b * L} defined by the color system ^* is 60 or less (0 to 60) [preferably 50 or less (0 to 50) More preferably, it means a dark color of 40 or less (0 to 40)].

Also, black and ^basically, L ^* a * ^{b * L} defined by the color system ^* is 35 or less (0 to 35) [preferably 30 or less (0 to 30), more preferably 25 This means a black color which is (0-25) below. In black, a ^* and b ^* defined in the L ^* a ^* b ^* color system can be appropriately selected according to the value of L ^* . As a ^* and b ^* , for example, both are preferably −10 to 10, more preferably −5 to 5, particularly in the range of −3 to 3 (among others 0 or almost 0). Is preferred.

In the present embodiment, L ^* , a ^* , and b ^* defined by the L ^* a ^* b ^* color system are color difference meters (trade name “CR-200” manufactured by Minolta Co .; color difference meter). It is calculated | required by measuring using. The L ^* a ^* b ^* color system is a color space recommended by the International Commission on Illumination (CIE) in 1976, and is a color space called the CIE 1976 (L ^* a ^* b ^* ) color system. It means that. The L ^* a ^* b ^* color system is defined in JIS Z 8729 in the Japanese Industrial Standard.

  When coloring the film for semiconductor back surface, a color material (colorant) can be used according to the target color. As such a color material, various dark color materials such as a black color material, a blue color material, and a red color material can be suitably used, and a black color material is particularly suitable. As the color material, any of a pigment, a dye and the like may be used. Color materials can be used alone or in combination of two or more. As the dye, any form of dyes such as acid dyes, reactive dyes, direct dyes, disperse dyes, and cationic dyes can be used. Also, the form of the pigment is not particularly limited, and can be appropriately selected from known pigments.

  In particular, when a dye is used as a coloring material, the dye is dissolved or uniformly dispersed in the semiconductor back film, so that it is easy to produce a semiconductor back film having a uniform or almost uniform color density. can do. Therefore, when a dye is used as the coloring material, the film for semiconductor back surface can make the coloring concentration uniform or substantially uniform, and can improve the marking property and appearance.

  Although it does not restrict | limit especially as a black color material, For example, it can select suitably from an inorganic black pigment and a black dye. In addition, as a black color material, a color material mixture in which a cyan color material (blue-green color material), a magenta color material (red purple color material) and a yellow color material (yellow color material) are mixed. It may be. Black color materials can be used alone or in combination of two or more. Of course, the black color material can be used in combination with a color material other than black.

  Specifically, as the black color material, for example, carbon black (furnace black, channel black, acetylene black, thermal black, lamp black, etc.), graphite (graphite), copper oxide, manganese dioxide, azo pigment (azomethine) Azo black, etc.), aniline black, perylene black, titanium black, cyanine black, activated carbon, ferrite (nonmagnetic ferrite, magnetic ferrite, etc.), magnetite, chromium oxide, iron oxide, molybdenum disulfide, chromium complex, complex oxide black Examples thereof include dyes and anthraquinone organic black dyes.

  In the present invention, as the black color material, C.I. I. Solvent Black 3, 7, 22, 27, 29, 34, 43, 70, C.I. I. Direct Black 17, 19, 19, 22, 32, 38, 51, 71, C.I. I. Acid Black 1, 2, 24, 26, 31, 48, 52, 107, 109, 110, 119, 154C. I. Black dyes such as Disperse Black 1, 3, 10, and 24; I. Black pigments such as CI Pigment Black 1 and 7 can also be used.

  Examples of such a black color material include a product name “Oil Black BY”, a product name “OilBlack BS”, a product name “OilBlack HBB”, a product name “Oil Black 803”, a product name “Oil Black 860”, The product name “Oil Black 5970”, the product name “Oil Black 5906”, the product name “Oil Black 5905” (manufactured by Orient Chemical Co., Ltd.) and the like are commercially available.

  Examples of the color material other than the black color material include a cyan color material, a magenta color material, and a yellow color material. Examples of cyan color materials include C.I. I. Solvent Blue 25, 36, 60, 70, 93, 95; I. Cyan dyes such as Acid Blue 6 and 45; I. Pigment Blue 1, 2, 3, 15, 15: 1, 15: 2, 15: 3, 15: 3, 15: 4, 15: 5, 15: 6, 16, 16, 17 17: 1, 18, 22, 25, 56, 60, 63, 65, 66; I. Bat Blue 4; 60, C.I. I. And cyan pigments such as CI Pigment Green 7.

  In the magenta color material, examples of the magenta dye include C.I. I. Solvent Red 1, 3, 8, 23, 24, 25, 27, 30, 30, 49, 52, 58, 63, 81, 82, 83, 84, the same 100, 109, 111, 121, 122; I. Disper thread 9; I. Solvent Violet 8, 13, 13, 21, and 27; C.I. I. Disperse violet 1; C.I. I. Basic Red 1, 2, 9, 9, 13, 14, 15, 17, 17, 18, 22, 23, 24, 27, 29, 32, 34, the same 35, 36, 37, 38, 39, 40; I. Basic Violet 1, 3, 7, 10, 14, 15, 21, 21, 25, 26, 27, 28 and the like.

  In the magenta color material, examples of the magenta pigment include C.I. I. Pigment Red 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 11, 12, 13, 14, 15, 16, 17, 18, 19, 21, 21, 22, 23, 30, 31, 32, 37, 38, 39, 40, 41, 42, 48: 1, 48: 2, 48: 3, 48: 4, 49, 49: 1, 50, 51, 52, 52: 2, 53: 1, 54, 55, 56, 57: 1, 58, 60, 60: 1, 63, 63: 1, 63: 2, 64, 64: 1, 67, 68, 81, 83, etc. 87, 88, 89, 90, 92, 101, 104, 105, 106, 108, 112, 114, 122, 123, 139, 144, 146 147, 149, 150, 151, 163, 166, 168, 170, 171, 172, 175, 176, 177, 178, 179, 184, 185 187, 190, 193, 202, 206, 207, 209, 219, 222, 224, 238, 245; I. C.I. Pigment Violet 3, 9, 19, 23, 31, 32, 33, 36, 38, 43, 50; I. Bat red 1, 2, 10, 13, 15, 23, 29, 35 and the like.

  Examples of yellow color materials include C.I. I. Solvent Yellow 19, 44, 77, 79, 81, 82, 93, 98, 103, 104, 112, 162 and the like yellow dyes; C.I. I. Pigment Orange 31 and 43; C.I. I. Pigment Yellow 1, 2, 3, 4, 5, 6, 7, 10, 10, 12, 13, 14, 15, 15, 16, 17, 23, 24, 34, 35, 37, 42, 53, 55, 65, 73, 74, 75, 81, 83, 93, 94, 95, 97, 98, 100, 101, 104, 108, 109, 110, 113, 114, 116, 117, 120, 128, 129, 133, 138, 139 147, 150, 151, 153, 154, 155, 156, 167, 172, 173, 180, 185, 195; I. Examples thereof include yellow pigments such as Vat Yellow 1, 3 and 20.

  Various color materials such as a cyan color material, a magenta color material, and a yellow color material can be used alone or in combination of two or more. When two or more kinds of various color materials such as a cyan color material, a magenta color material, and a yellow color material are used, the mixing ratio (or blending ratio) of these color materials is not particularly limited, and each color material. It can be selected as appropriate according to the type and the target color.

  When coloring the film 2 for semiconductor back surfaces, the coloring form in particular is not restrict | limited. For example, the film for semiconductor back surface may be a single layer film-like material to which a colorant is added. Further, it may be a laminated film in which at least a resin layer formed of a thermosetting resin and a colorant layer are laminated. In addition, when the film 2 for semiconductor back surfaces is a laminated film of a resin layer and a colorant layer, the film 2 for semiconductor back surface of the laminated form has a laminated form of resin layer / colorant layer / resin layer. It is preferable. In this case, the two resin layers on both sides of the colorant layer may be resin layers having the same composition or may be resin layers having different compositions.

  The film for semiconductor back surface 2 can be appropriately mixed with other additives as necessary. Examples of other additives include fillers (fillers), flame retardants, silane coupling agents, ion trapping agents, bulking agents, antioxidants, antioxidants, and surfactants.

  The filler may be either an inorganic filler or an organic filler, but an inorganic filler is suitable. By blending a filler such as an inorganic filler, it is possible to impart conductivity to the film for semiconductor back surface, improve thermal conductivity, adjust the elastic modulus, and the like. The film for semiconductor back surface 2 may be conductive or non-conductive. Examples of the inorganic filler include silica, clay, gypsum, calcium carbonate, barium sulfate, alumina, beryllium oxide, silicon carbide, silicon nitride, and other ceramics, aluminum, copper, silver, gold, nickel, chromium, lead. , Various inorganic powders made of metal such as tin, zinc, palladium, solder, or alloys, and other carbon. A filler can be used individually or in combination of 2 or more types. Among them, silica, particularly fused silica is suitable as the filler. In addition, it is preferable that the average particle diameter of an inorganic filler exists in the range of 0.1 micrometer-80 micrometers. The average particle diameter of the inorganic filler can be measured by, for example, a laser diffraction type particle size distribution measuring apparatus.

  The blending amount of the filler (particularly inorganic filler) is preferably 80 parts by weight or less (0 to 80 parts by weight), particularly 0 to 70 parts by weight with respect to 100 parts by weight of the organic resin component. It is preferable that

  Examples of the flame retardant include antimony trioxide, antimony pentoxide, and brominated epoxy resin. A flame retardant can be used individually or in combination of 2 or more types. Examples of the silane coupling agent include β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropylmethyldiethoxysilane, and the like. A silane coupling agent can be used individually or in combination of 2 or more types. Examples of the ion trapping agent include hydrotalcites and bismuth hydroxide. An ion trap agent can be used individually or in combination of 2 or more types.

  The film for semiconductor back surface 2 is a resin composition obtained by mixing, for example, a thermosetting resin such as an epoxy resin, a thermoplastic resin such as an acrylic resin as necessary, and a solvent or other additives as necessary. It can be formed using conventional methods of preparing the product and forming it into a film-like layer. Specifically, for example, the resin composition is applied onto the separator 42 to form a resin layer (or adhesive layer), or the resin composition is applied onto a resin layer forming sheet (such as release paper). A film-like layer (adhesive layer) is formed as a film for a semiconductor back surface by a method of coating to form a resin layer (or adhesive layer), and transferring (transferring) it onto the separator 42. Can do. The resin composition may be a solution or a dispersion.

  In addition, when the film 2 for semiconductor back surfaces is formed with the resin composition containing thermosetting resins, such as an epoxy resin, the film for semiconductor back surfaces is a thermosetting resin in the step before applying to a semiconductor element. It is an uncured or partially cured state. In this case, after application to the semiconductor element, the thermosetting resin in the film for semiconductor back surface is completely or almost completely cured. Specifically, when the semiconductor back surface film 2 is attached to the semiconductor element before the flip chip bonding step, the thermosetting in the semiconductor back surface film is performed when the sealing material is cured in the flip chip bonding step. The curing resin is completely or almost completely cured. Moreover, when sticking the film 2 for semiconductor back surfaces to a semiconductor element after a flip chip bonding process, for example, by heat processing performed after laser marking etc. (reflow process performed after laser marking), the semiconductor back surface The thermosetting resin in the film is completely or almost completely cured.

Thus, even if the film for semiconductor back surface contains a thermosetting resin, since the thermosetting resin is in an uncured or partially cured state, the gel fraction of the film for semiconductor back surface is particularly limited. For example, it can be appropriately selected from the range of 50% by weight or less (0% by weight to 50% by weight), preferably 30% by weight or less (0% by weight to 30% by weight), particularly 10% by weight. The following (0 to 10% by weight) is preferable. The measuring method of the gel fraction of the film for semiconductor back surface can be measured by the following measuring method.
<Method for measuring gel fraction>
About 0.1 g from the film for semiconductor back surface is sampled and weighed accurately (weight of the sample). After wrapping the sample in a mesh-like sheet, it is immersed in about 50 ml of toluene at room temperature for 1 week. Thereafter, the solvent-insoluble matter (the contents of the mesh sheet) is taken out from toluene and dried at 130 ° C. for about 2 hours. The solvent-insoluble matter after drying is weighed (weight after immersion / drying), and the following formula (a) From this, the gel fraction (% by weight) is calculated.
Gel fraction (% by weight) = [(weight after immersion / drying) / (weight of sample)] × 100 (a)

  In addition, the gel fraction of the film for semiconductor back surfaces can be controlled by the heating temperature, the heating time, etc., in addition to the type and content of the resin component, the type and content of the crosslinking agent.

  In the present invention, when the film for semiconductor back surface is a film-like product formed of a resin composition containing a thermosetting resin such as an epoxy resin, it can effectively exhibit adhesion to a semiconductor element.

  In the process of manufacturing a semiconductor device, since water is used, the film for the backside of the semiconductor may absorb moisture, resulting in a moisture content higher than the normal state. When heated in such a high water content state, water vapor may accumulate at the bonding interface between the semiconductor back surface film 2 and the semiconductor element, and floating may occur. Therefore, as a film for semiconductor back surface, by providing a core material with high moisture permeability on both sides, water vapor diffuses and this problem can be avoided. From such a viewpoint, a multilayer structure in which a film for semiconductor back surface is formed on one or both surfaces of the core material may be used as the film for semiconductor back surface. Examples of the core material include a film (for example, a polyimide film, a polyester film, a polyethylene terephthalate film, a polyethylene naphthalate film, and a polycarbonate film), a resin substrate reinforced with glass fibers or plastic non-woven fibers, a silicon substrate, a glass substrate, or the like. Is mentioned.

  Although the thickness (total thickness in the case of a laminated film) of the film 2 for semiconductor back surface is not specifically limited, For example, it can select suitably from the range of about 2 micrometers-200 micrometers. Further, the thickness is preferably about 4 μm to 160 μm, more preferably about 6 μm to 100 μm, and particularly preferably about 10 μm to 80 μm.

  The tensile storage elastic modulus at 23 ° C. in the uncured state of the film 2 for semiconductor back surface is preferably 1 GPa or more (for example, 1 GPa to 50 GPa), more preferably 2 GPa or more, and particularly preferably 3 GPa or more. Is preferred. When the tensile storage modulus is 1 GPa or more, when the semiconductor chip is placed on the support together with the semiconductor back film and the semiconductor back film is transported, the semiconductor back film is the support. It is possible to effectively suppress or prevent the sticking to. When the semiconductor back film 2 is formed of a resin composition containing a thermosetting resin, as described above, the thermosetting resin is usually in an uncured or partially cured state. The elastic modulus at 23 ° C. of the film for use is usually the elastic modulus at 23 ° C. when the thermosetting resin is uncured or partially cured.

  Here, the film for semiconductor back surface 2 may be a single layer or a laminated film in which a plurality of layers are laminated. In the case of a laminated film, the tensile storage modulus at 23 ° C. in the uncured state is a laminated film. It may be in the range of 1 GPa or more (for example, 1 GPa to 50 GPa) as a whole. In addition, the tensile storage modulus (23 ° C.) of the film for semiconductor back surface in the uncured state is the type of resin component (thermoplastic resin, thermosetting resin) and the content thereof, the type of filler such as silica filler, It can be controlled by its content. When the semiconductor back film 2 is a laminated film in which a plurality of layers are laminated (when the semiconductor back film has a laminated form), the laminated form may be, for example, a wafer adhesive layer and a laser. A laminated form composed of a mark layer can be exemplified. In addition, between such a wafer adhesive layer and a laser mark layer, other layers (intermediate layer, light blocking layer, reinforcing layer, colored layer, substrate layer, electromagnetic wave blocking layer, heat conducting layer, adhesive layer, etc.) ) May be provided. The wafer adhesive layer is a layer that exhibits excellent adhesion (adhesiveness) to the wafer, and is a layer that contacts the back surface of the wafer. On the other hand, the laser mark layer is a layer that exhibits excellent laser marking properties, and is a layer that is used when laser marking is performed on the back surface of a semiconductor chip.

  The tensile storage modulus was determined by preparing an uncured film 2 for a semiconductor back surface and using a dynamic viscoelasticity measuring device “Solid Analyzer RS A2” manufactured by Rheometric Co. : 10 mm, sample length: 22.5 mm, sample thickness: 0.2 mm, frequency: 1 Hz, heating rate: 10 ° C./min, measured under a nitrogen atmosphere at a predetermined temperature (23 ° C.), It was set as the value of the obtained tensile storage elastic modulus.

  Further, the light transmittance (visible light transmittance) of visible light (wavelength: 400 nm to 800 nm) in the film 2 for semiconductor back surface is not particularly limited, but is, for example, in the range of 20% or less (0% to 20%). It is preferably 10% or less (0% to 10%), particularly preferably 5% or less (0% to 5%). If the visible light transmittance of the film 2 for semiconductor back surface is larger than 20%, the semiconductor element may be adversely affected by the passage of light. The visible light transmittance (%) depends on the type and content of the resin component of the film 2 for semiconductor back surface, the type and content of colorant (pigment, dye, etc.), the content of inorganic filler, etc. Can be controlled.

  The visible light transmittance (%) of the film 2 for semiconductor back surface can be measured as follows. That is, a single film for semiconductor back surface 2 having a thickness (average thickness) of 20 μm is produced. Next, the film for semiconductor back surface 2 was irradiated with visible light having a wavelength of 400 nm to 800 nm [apparatus: visible light generator manufactured by Shimadzu Corporation (trade name “ABSORPTION SPECTRO PHOTOMETR”)] at a predetermined intensity and transmitted. Measure the intensity of visible light. Furthermore, the value of visible light transmittance can be determined from the intensity change before and after the visible light passes through the semiconductor back film 2. In addition, the visible light transmittance (%; wavelength: 20 μm) of the film 2 for semiconductor back surface is determined by the value of the visible light transmittance (%; wavelength: 400 nm to 800 nm) of the film 2 for semiconductor back surface that is not 20 μm thick. 400 nm to 800 nm) can also be derived. Further, in the present invention, the visible light transmittance (%) in the case of the film for semiconductor back surface 2 having a thickness of 20 μm is obtained, but the film for semiconductor back surface according to the present invention is limited to a film having a thickness of 20 μm. is not.

  Moreover, as the film 2 for semiconductor back surfaces, the one where the moisture absorption rate is lower is preferable. Specifically, the moisture absorption rate is preferably 1% by weight or less, more preferably 0.8% by weight or less. By making the moisture absorption rate 1% by weight or less, the laser marking property can be improved. Further, for example, in the reflow process, generation of voids between the film 2 for semiconductor back surface and the semiconductor element can be suppressed or prevented. In addition, the said moisture absorption is the value computed by the weight change before and behind leaving the film 2 for semiconductor back surfaces in the atmosphere of temperature 85 degreeC and relative humidity 85% RH for 168 hours. When the film for semiconductor back surface 2 is formed of a resin composition containing a thermosetting resin, the moisture absorption rate is under an atmosphere of a temperature of 85 ° C. and a relative humidity of 85% RH with respect to the film for semiconductor back surface after thermosetting. Means the value when left for 168 hours. Moreover, the said moisture absorption rate can be adjusted by changing the addition amount of an inorganic filler, for example.

  Moreover, as the film 2 for semiconductor back surfaces, it is preferable that the ratio of volatile components is small. Specifically, the weight reduction rate (weight reduction ratio) of the film 2 for semiconductor back surface after the heat treatment is preferably 1% by weight or less, and more preferably 0.8% by weight or less. The heat treatment conditions are, for example, a heating temperature of 250 ° C. and a heating time of 1 hour. By making the weight reduction rate 1% by weight or less, the laser marking property can be improved. For example, in the reflow process, it is possible to suppress or prevent the occurrence of cracks in the flip chip type semiconductor device. The weight reduction rate can be adjusted, for example, by adding an inorganic substance that can reduce the generation of cracks during lead-free solder reflow. In addition, when the film 2 for semiconductor back surfaces is formed with the resin composition containing a thermosetting resin, the said weight reduction rate is the heating temperature 250 degreeC with respect to the film for semiconductor back surfaces after thermosetting, heating time 1 hour. Means the value when heated under the conditions of

  As for the said film 2 for semiconductor back surfaces, the separator 42 is laminated | stacked only on one side. It is preferable that the film 2 for a semiconductor back surface is wound in a roll shape in a state of being laminated on the separator 42, that is, in the form of a film 40 for manufacturing a semiconductor device. Thereby, the surface of the film 2 for semiconductor back surface on which the separator 42 is not laminated is brought into contact with the separator 42 located on the surface side (the back surface of the separator 42), and the film for semiconductor back surface is protected until practical use. can do. In particular, the film 2 for semiconductor back surface is bonded to the semiconductor element after being cut in accordance with the shape of the back surface of the semiconductor element to be bonded. Therefore, it is more preferable that the semiconductor device manufacturing film 40 is cut into a predetermined width in accordance with the width (longitudinal width or lateral width) of the semiconductor element and wound in a roll shape in the form of a strip-shaped semiconductor back surface film. .

(Separator)
Examples of the separator 42 include paper-based substrates such as paper; fiber-based substrates such as cloth, non-woven fabric, felt, and net; metal-based substrates such as metal foil and metal plate; plastics such as plastic films and sheets. Base materials: Rubber base materials such as rubber sheets; Foams such as foam sheets, and laminates thereof [particularly, laminates of plastic base materials and other base materials, or plastic films (or sheets) An appropriate thin leaf body such as a laminated body] can be used. In the present invention, a plastic substrate such as a plastic film or sheet can be suitably used as the substrate. Examples of the material in such a plastic material include, for example, olefin resins such as polyethylene (PE), polypropylene (PP), and ethylene-propylene copolymer; ethylene-vinyl acetate copolymer (EVA), ionomer resin, ethylene- (Meth) acrylic acid copolymer, ethylene- (meth) acrylic acid ester (random, alternating) copolymer such as ethylene copolymer; polyethylene terephthalate (PET), polyethylene naphthalate (PEN), Polyester such as polybutylene terephthalate (PBT); Acrylic resin; Polyvinyl chloride (PVC); Polyurethane; Polycarbonate; Polyphenylene sulfide (PPS); Amide resin such as polyamide (nylon) and wholly aromatic polyamide (aramid); Ether ether ketone (PEEK); polyimides; polyetherimides; polyvinylidene chloride; ABS (acrylonitrile - butadiene - styrene copolymer); cellulosic resins; silicone resins; and fluorine resins. The separator 42 may be a single layer or two or more types. The separator 42 is cut in accordance with the shape of the surface of the semiconductor element together with the semiconductor back surface film 2 in the state of the semiconductor device manufacturing film 40 and then attached to the semiconductor element together with the semiconductor back surface film 2. Then, it peels from the film 2 for semiconductor back surfaces before or after a reflow process. In addition, as a manufacturing method of the separator 42, it can form by a conventionally well-known method.

  The separator 42 is preferably peeled on both sides. When both surfaces of the separator 42 are peeled, the separator 42 can be wound in a roll shape in a state where the separator 42 is laminated only on one surface of the film for semiconductor back surface.

  Examples of the release agent used for the release treatment include a fluorine release agent, a long-chain alkyl acrylate release agent, and a silicone release agent. Of these, silicone release agents are preferred. When the separator 42 is subjected to a release treatment with a silicone release agent, the separator can be easily peeled from the film for semiconductor back surface.

Further, the separator 42 has a peeling force with the film 2 for the semiconductor back surface on the surface of the separator 42 on the side where the film 2 for the semiconductor back surface is laminated, and A on the side where the film 2 for the semiconductor back surface of the separator 42 is not laminated. When the peeling force with the film 2 for semiconductor back surface on the surface is B,
0.001 ≦ A−B ≦ 0.04 [N / 50 mm]
It is preferable to satisfy. If the said formula is satisfy | filled, it can peel, without the surface by which the film for semiconductor back surfaces is laminated | stacked, and the separator B surface adhering.

  The peeling force A and the peeling force B can be obtained by using a separator, a film for semiconductor back surface, and a laminator, and laminating at a temperature of 60 degrees and then peeling at a speed of 300 mm / min with a tensile tester.

  Although the thickness in particular of the separator 42 is not restrict | limited, 25-300 micrometers is preferable, 30-200 micrometers is more preferable, 35-100 micrometers is further more preferable.

  As described above, the reflectance of the separator 42 at a wavelength of 400 to 700 nm is 30% or more and 100% or less. The method of setting the reflectance to 30% or more and 100% or less is not particularly limited, but the separator 42 is preferably colored. When the separator 42 is colored, the coloring form is not particularly limited. For example, the separator 42 may be a film-like material to which a colorant is added, and a plastic sheet and a colorant layer (for example, a printing layer). ) And at least a laminated film. Especially, it is preferable that the separator 42 is a single layer film-like material to which a colorant is added. It is because it can suppress that a coloring agent transfers to the film 2 for semiconductor back surfaces from the interface of the separator 42 and the film 2 for semiconductor back surfaces. Although it does not restrict | limit especially as a color which is exhibited by coloring, The color which can make the reflectance in wavelength 400-700 nm high is preferable. As such a color, for example, white, yellow, red, blue, and green are preferable, and white is particularly preferable. The separator 42 may contain other additives (filler, plasticizer, anti-aging agent, antioxidant, surfactant, flame retardant, etc.) as long as the effects of the present invention are not impaired. Good.

  When the separator 42 is colored, a color material (coloring agent) can be used according to the target color. As the color material, any of a pigment, a dye and the like may be used. Color materials can be used alone or in combination of two or more. As the dye, any form of dyes such as acid dyes, reactive dyes, direct dyes, disperse dyes, and cationic dyes can be used. Also, the form of the pigment is not particularly limited, and can be appropriately selected from known pigments.

  In addition, as thickness (the total thickness of the thickness of the film 2 for semiconductor back surfaces 2, and the separator 42) of the film 40 for semiconductor device manufacture, it can be set to 30 micrometers-400 micrometers, for example, and it is set as 48 micrometers-168 micrometers. It is preferable.

(Manufacturing method of semiconductor device manufacturing film)
A method for manufacturing a film for manufacturing a semiconductor device according to the present embodiment will be described using the film for manufacturing a semiconductor device 40 shown in FIG. 1 as an example. First, the separator 42 can be formed by a conventionally known film forming method. Examples of the film forming method include a calendar film forming method, a casting method in an organic solvent, an inflation extrusion method in a closed system, a T-die extrusion method, a co-extrusion method, and a dry lamination method. At this time, a colorant is added as necessary. Next, the peeling process which apply | coats a mold release agent to the single side | surface or both surfaces of the separator 42 is performed as needed.

  Next, the forming material for forming the film 2 for semiconductor back surface is applied onto the release paper so that the thickness after drying becomes a predetermined thickness, and further dried under predetermined conditions (in the case where thermosetting is necessary, for example) If necessary, heat-treat and dry) to form a coating layer. By transferring this coating layer onto the separator 42, a semiconductor device manufacturing film 40 in which the separator 42 is laminated only on one surface of the semiconductor back surface film 2 is obtained. In addition, after apply | coating the forming material for forming the film 2 for semiconductor back surfaces directly on the separator 42, it dries on predetermined conditions (When thermosetting is required, it heat-processes as needed. The film 40 for manufacturing a semiconductor device can also be obtained by drying. In addition, when heat-curing when forming the film 2 for semiconductor back surfaces, it is important to perform heat-curing to such an extent that it will be in the state of partial hardening, However Preferably heat-curing is not performed.

  The film 40 for manufacturing a semiconductor device can be suitably used for manufacturing a semiconductor device including a flip chip bonding process. That is, the semiconductor back surface film 2 provided in the semiconductor device manufacturing film 40 is used for manufacturing a flip chip mounted semiconductor device in a state or a form adhered to the back surface of the semiconductor chip.

(Semiconductor wafer)
The semiconductor wafer is not particularly limited as long as it is a known or commonly used semiconductor wafer, and can be appropriately selected from semiconductor wafers of various materials. In the present invention, a silicon wafer can be suitably used as the semiconductor wafer.

(Method for manufacturing semiconductor device)
A method for manufacturing a semiconductor device according to the present embodiment will be described below with reference to FIGS. 2 and 3 are schematic cross-sectional views showing a method for manufacturing a semiconductor device when the film for manufacturing a semiconductor device shown in FIG. 1 is used.

  The semiconductor device manufacturing method can manufacture a semiconductor device using the semiconductor device manufacturing film 40. Specifically, a step of sticking a semiconductor wafer on a dicing tape, a step of dicing the semiconductor wafer, a step of picking up a semiconductor element obtained by dicing, and flipping the semiconductor element onto an adherend A step of chip-connecting, a step of adhering a film for manufacturing a semiconductor device 40 in accordance with the shape of the back surface of the semiconductor element, to the back surface of the semiconductor element, and a semiconductor attached to the back surface of the semiconductor element And a step of peeling the separator 42 from the device manufacturing film 40.

[Mounting process]
First, as shown in FIG. 2A, a semiconductor wafer 4 is attached to a conventionally known dicing tape 3 provided with a pressure-sensitive adhesive layer 32 on a base material 31, and this is fixed (mounting step). . The dicing tape 3 is attached to the back surface of the semiconductor wafer 4. The back surface of the semiconductor wafer 4 means a surface opposite to the circuit surface (also referred to as a non-circuit surface or a non-electrode forming surface). Although the sticking method is not specifically limited, the method by pressure bonding is preferable. The crimping is usually performed while pressing with a pressing means such as a crimping roll.

[Dicing process]
Next, as shown in FIG. 2B, the semiconductor wafer 4 is diced. As a result, the semiconductor wafer 4 is cut into a predetermined size and divided into pieces (small pieces), whereby the semiconductor chip 5 is manufactured. Dicing is performed according to a conventional method from the circuit surface side of the semiconductor wafer 4, for example. Further, in this step, for example, a cutting method called full cut that cuts up to the dicing tape 3 can be adopted. It does not specifically limit as a dicing apparatus used at this process, A conventionally well-known thing can be used.

  In addition, when expanding the dicing tape 3, the expanding can be performed using a conventionally known expanding apparatus. The expanding device has a donut-shaped outer ring that can push down the dicing tape 3 through the dicing ring, and an inner ring that has a smaller diameter than the outer ring and supports the dicing tape 3. By this expanding process, it is possible to prevent adjacent semiconductor chips from coming into contact with each other and being damaged in a pickup process described later.

[Pickup process]
In order to collect the semiconductor chip 5 bonded and fixed to the dicing tape 3, the semiconductor chip 5 is picked up and peeled off from the dicing tape 3 as shown in FIG. The pickup method is not particularly limited, and various conventionally known methods can be employed. For example, a method of pushing up the individual semiconductor chips 5 from the base 31 side of the dicing tape 3 with a needle and picking up the pushed-up semiconductor chips 5 with a pick-up device can be mentioned.

[Flip chip connection process]
As shown in FIG. 2D, the picked-up semiconductor chip 5 is fixed to an adherend such as a substrate by a flip chip bonding method (flip chip mounting method). Specifically, the semiconductor chip 5 is always placed on the adherend 6 such that the circuit surface (also referred to as a surface, a circuit pattern formation surface, an electrode formation surface, etc.) of the semiconductor chip 5 faces the adherend 6. Fix according to law. For example, the bump 51 formed on the circuit surface side of the semiconductor chip 5 is brought into contact with a bonding conductive material (solder or the like) 61 attached to the connection pad of the adherend 6 while pressing the conductive material. By melting, it is possible to secure electrical continuity between the semiconductor chip 5 and the adherend 6 and fix the semiconductor chip 5 to the adherend 6 (flip chip bonding step). At this time, a gap is formed between the semiconductor chip 5 and the adherend 6, and the air gap distance is generally about 30 μm to 300 μm. After the flip chip bonding (flip chip connection) of the semiconductor chip 5 on the adherend 6, the facing surface and the gap between the semiconductor chip 5 and the adherend 6 are cleaned, and a sealing material (sealing) is placed in the gap. It is important to seal by filling with a stop resin or the like.

  As the adherend 6, various substrates such as a lead frame and a circuit substrate (such as a wiring circuit substrate) can be used. The material of such a substrate is not particularly limited, and examples thereof include a ceramic substrate and a plastic substrate. Examples of the plastic substrate include an epoxy substrate, a bismaleimide triazine substrate, and a polyimide substrate.

  In the flip chip bonding process, the material of the bump or the conductive material is not particularly limited, and examples thereof include a tin-lead metal material, a tin-silver metal material, a tin-silver-copper metal material, and a tin-zinc metal. Materials, solders (alloys) such as tin-zinc-bismuth metal materials, gold metal materials, copper metal materials, and the like.

  In the flip chip bonding process, the conductive material is melted to connect the bumps on the circuit surface side of the semiconductor chip 5 and the conductive material on the surface of the adherend 6. The temperature is usually about 260 ° C. (for example, 250 ° C. to 300 ° C.).

  In this step, it is preferable to clean the facing surface (electrode forming surface) and the gap between the semiconductor chip 5 and the adherend 6. The cleaning liquid used for the cleaning is not particularly limited, and examples thereof include an organic cleaning liquid and an aqueous cleaning liquid.

  Next, a sealing step for sealing the gap between the flip-chip bonded semiconductor chip 5 and the adherend 6 is performed. The sealing step is performed using a sealing resin. Although it does not specifically limit as sealing conditions at this time, Usually, the thermosetting of the sealing resin is performed by heating at 175 ° C. for 60 seconds to 90 seconds, but the present invention is not limited thereto, For example, it can be cured at 165 ° C. to 185 ° C. for several minutes.

  The sealing resin is not particularly limited as long as it is an insulating resin (insulating resin), and can be appropriately selected from sealing materials such as known sealing resins. Is more preferable. As sealing resin, the resin composition containing an epoxy resin etc. are mentioned, for example. Examples of the epoxy resin include the epoxy resins exemplified above. Moreover, as a sealing resin by the resin composition containing an epoxy resin, in addition to an epoxy resin, a thermosetting resin other than an epoxy resin (such as a phenol resin) or a thermoplastic resin may be included as a resin component. Good. In addition, as a phenol resin, it can utilize also as a hardening | curing agent of an epoxy resin, As such a phenol resin, the phenol resin illustrated above etc. are mentioned.

  Here, the semiconductor device manufacturing film 40 is cut in accordance with the shape of the back surface of the semiconductor chip 5. This cutting can be performed by using a punching blade such as a Thomson blade or a laser.

  Next, as shown in FIG. 3A, the semiconductor cut so that the back surface of the semiconductor chip 5 and the film 2 for semiconductor back surface become a bonding surface on the back surface of the semiconductor chip 5 which is flip-chip bonded. The device manufacturing film 40 is attached. This sticking can be performed by using an adsorption collet.

  Next, as shown in FIG. 3B, the separator 42 is peeled from the semiconductor device manufacturing film 40 attached to the back surface of the semiconductor chip 5.

  Next, it is inspected whether or not the separator 42 is peeled off from the semiconductor device manufacturing film 40. In this inspection process, the semiconductor chip 5 from which the separator 42 should be peeled is irradiated with a light beam having a wavelength of 400 to 700 nm from the back surface side of the semiconductor chip 5. If the reflected light is 30% or more and 100% or less, it is determined that the separator 42 is not peeled off. As described above, since the reflectance of the separator 42 at a wavelength of 400 to 700 nm is 30% or more and 100% or less, if the reflected light is 30% or more and 100% or less, it is determined that the separator 42 is not peeled off. Because it can. On the other hand, if the reflected light is not 30% or more and 100% or less, it is determined that the separator 42 is peeled off. When the separator 42 is peeled off, the light beam is reflected by the semiconductor back surface film 2 attached to the back surface of the semiconductor chip 5. Therefore, if the reflected light is not 30% or more and 100% or less, it can be determined that the separator 42 is peeled off. Here, the difference between the reflectance of the separator 42 at a wavelength of 400 to 700 nm and the reflectance of the film for a semiconductor back surface at two wavelengths of 400 to 700 nm is preferably 5% or more. If the difference in reflectance is 5% or more, the reflectance detected when the separator 42 is peeled off and the reflectance detected when the separator 42 is not peeled off are greatly different. This is because it can be determined whether or not 42 is peeled off.

The semiconductor device manufactured by using the semiconductor device manufacturing film 40 (flip chip mounting semiconductor device) has a semiconductor back film stuck to the back surface of the semiconductor chip, so that various markings can be seen with excellent visibility. Can be applied. In particular, even if the marking method is a laser marking method, marking can be performed with an excellent contrast ratio, and various information (character information, Zuken information, etc.) applied by laser marking can be seen well. is there. In addition, when performing laser marking, a well-known laser marking apparatus can be utilized. As the laser, various lasers such as a gas laser, a solid laser, and a liquid laser can be used. Specifically, the gas laser is not particularly limited, and a known gas laser can be used, but a carbon dioxide laser (CO ₂ laser), an excimer laser (ArF laser, KrF laser, XeCl laser, XeF laser). Etc.) are preferred. The solid laser is not particularly limited, and a known solid laser can be used, but a YAG laser (Nd: YAG laser or the like) and a YVO ₄ laser are preferable.

  In addition, after carrying out laser marking to the film 2 for semiconductor back surfaces, you may perform heat processing (the reflow process performed after carrying out laser marking) as needed. Although it does not specifically limit as this heat processing conditions, Usually, it can be set as the heating for 5 seconds-50 seconds at 210-270 degreeC.

  In the semiconductor device manufacturing method described above, after the sealing step for sealing the gap between the flip chip bonded semiconductor chip 5 and the adherend 6 is performed, the semiconductor device is formed on the back surface of the semiconductor chip 5. The case where the film 40 for manufacture was stuck was demonstrated. However, in this invention, the timing which affixes the film for semiconductor device manufacture on the back surface of a semiconductor chip is not limited to this example, For example, before the said sealing process (for example, after flip chip bonding) It is good also as sticking. In addition, when sticking the film for semiconductor device manufacture on the back surface of the semiconductor chip before the sealing step, the timing of peeling the separator is not particularly limited, and is before the sealing step. It may be after the sealing step. Further, before the sealing step, a film for manufacturing a semiconductor device is attached to the back surface of the semiconductor chip, and when the separator is peeled off before the sealing step, whether or not the separator is peeled off is determined. The timing to inspect is not particularly limited, and may be before the sealing step or after the sealing step.

  Since the semiconductor device manufactured using the film for manufacturing a semiconductor device of the present invention is a semiconductor device mounted by a flip chip mounting method, it is thinner and smaller than a semiconductor device mounted by a die bonding mounting method. It has become a shape. For this reason, it can use suitably as various electronic devices and electronic components, or those materials and members. Specifically, as an electronic device using the flip-chip mounted semiconductor device of the present invention, a so-called “mobile phone” or “PHS”, a small computer (for example, a so-called “PDA” (personal digital assistant)), a so-called "Notebook PC", so-called "Netbook (trademark)", so-called "wearable computer", etc.), "mobile phone" and small electronic devices integrated with a computer, so-called "digital camera (trademark)", so-called "digital" Mobile devices such as video cameras, small TVs, small game devices, small digital audio players, so-called “electronic notebooks”, so-called “electronic dictionaries”, so-called “electronic books” electronic device terminals, small digital-type watches, etc. Type electronic devices (portable electronic devices), but of course It may be an electronic device other than a mobile type (such as a setting type) (for example, a so-called “disc top PC”, a flat-screen TV, a recording / playback electronic device (hard disk recorder, DVD player, etc.), a projector, a micromachine, etc.) . Examples of materials and members of electronic components or electronic devices / electronic components include so-called “CPU” members, members of various storage devices (so-called “memory”, hard disks, etc.), and the like.

  Hereinafter, preferred embodiments of the present invention will be described in detail by way of example. However, the materials, blending amounts, and the like described in the examples are not intended to limit the scope of the present invention only to them, but are merely illustrative examples, unless otherwise specified. In each example, all parts are based on weight unless otherwise specified.

Example 1
<Preparation of separator>
A 25 μm thick polyethylene terephthalate film having a heavy release surface and a 25 μm thick polyethylene terephthalate film having a light release surface were prepared. Next, these two polyethylene terephthalate films were laminated via a white ink and an adhesive layer to obtain a separator. In addition, the said heavy peeling surface says the surface which requires peeling force rather than the said light peeling surface.

<Production of film for manufacturing semiconductor devices>
Acrylate ester-based polymer (trade name “Paracron W-197CM” manufactured by Negami Kogyo Co., Ltd.) containing ethyl acrylate-methyl methacrylate as a main component: 100 parts of epoxy resin (trade name “Epicoat 1004” JER Corporation) 113 parts, phenol resin (trade name “Millex XLC-4L” manufactured by Mitsui Chemicals, Inc.): 121 parts, spherical silica (trade name “SO-25R”, manufactured by Admatex Co., Ltd.): 246 parts, dye 1 ( Product name “OIL GREEN 502” manufactured by Orient Chemical Industry Co., Ltd .: 5 parts, Dye 2 (trade name “OIL BLACK BS” manufactured by Orient Chemical Industry Co., Ltd.): 5 parts are dissolved in methyl ethyl ketone, and the solid content concentration is 23 A solution of the adhesive composition to be 6% by weight was prepared.

  This adhesive composition solution was applied onto the heavy release surface of the separator and then dried at 130 ° C. for 2 minutes to produce a semiconductor back film A having a thickness (average thickness) of 20 μm.

  The obtained film was slit to a width of 10 mm and wound up to prepare a semiconductor device manufacturing film A in which a separator was laminated only on one surface of the semiconductor back surface film.

(Example 2)
<Production of film for manufacturing semiconductor devices>
Acrylate ester-based polymer (trade name “Paracron W-197CM” manufactured by Negami Kogyo Co., Ltd.) containing ethyl acrylate-methyl methacrylate as a main component: 100 parts of epoxy resin (trade name “Epicoat 1004” JER Corporation) 113 parts, phenol resin (trade name “Millex XLC-4L” manufactured by Mitsui Chemicals, Inc.): 121 parts, spherical silica (trade name “SO-25R”, manufactured by Admatex Co., Ltd.): 246 parts, dye 1 ( Product name “OIL GREEN 502” manufactured by Orient Chemical Industry Co., Ltd .: 10 parts, Dye 2 (trade name “OIL BLACK BS” manufactured by Orient Chemical Industry Co., Ltd.): 10 parts are dissolved in methyl ethyl ketone, and the solid content concentration is 23 A solution of the adhesive composition to be 6% by weight was prepared.

  This adhesive composition solution was applied on the heavy release surface of the separator (white) prepared in the same manner as in Example 1, and then dried at 130 ° C. for 2 minutes to obtain a thickness (average thickness) of 20 μm. A film B for semiconductor back surface was prepared.

  The obtained film was slit to a width of 10 mm and wound up to prepare a film for manufacturing a semiconductor device in which a separator was laminated only on one surface of the film for semiconductor back surface.

(Example 3)
<Production of film for manufacturing semiconductor devices>
Acrylate ester-based polymer (trade name “Paracron W-197CM” manufactured by Negami Kogyo Co., Ltd.) containing ethyl acrylate-methyl methacrylate as a main component: 100 parts of epoxy resin (trade name “Epicoat 1004” JER Corporation) Manufactured): 32 parts, phenol resin (trade name “Millex XLC-4L” manufactured by Mitsui Chemicals): 35 parts, spherical silica (trade name “SO-25R” manufactured by Admatex Co., Ltd.): 90 parts, dye 2 ( Trade name “OIL BLACK BS” manufactured by Orient Chemical Co., Ltd.): 2 parts were dissolved in methyl ethyl ketone to prepare an adhesive composition solution having a solid content concentration of 23.6% by weight.

  This adhesive composition solution was applied on the heavy release surface of the separator (white) prepared in the same manner as in Example 1, and then dried at 130 ° C. for 2 minutes to obtain a thickness (average thickness) of 20 μm. A film C for semiconductor back surface was prepared.

  The obtained film was slit to a width of 10 mm and wound up to prepare a film for manufacturing a semiconductor device in which a separator was laminated only on one surface of the film for semiconductor back surface.

(Comparative Example 1)
<Production of film for manufacturing semiconductor devices>
Acrylate ester-based polymer (trade name “Paracron W-197CM” manufactured by Negami Kogyo Co., Ltd.) containing ethyl acrylate-methyl methacrylate as a main component: 100 parts of epoxy resin (trade name “Epicoat 1004” JER Corporation) Manufactured): 32 parts, phenol resin (trade name “Millex XLC-4L” manufactured by Mitsui Chemicals): 35 parts, spherical silica (trade name “SO-25R” manufactured by Admatex Co., Ltd.): 90 parts, dye 2 ( Trade name “OIL BLACK BS” manufactured by Orient Chemical Co., Ltd.): 1 part was dissolved in methyl ethyl ketone to prepare a solution of an adhesive composition having a solid content concentration of 23.6% by weight.

  This adhesive composition solution was applied on the heavy release surface of the separator (white) prepared in the same manner as in Example 1, and then dried at 130 ° C. for 2 minutes to obtain a thickness (average thickness) of 20 μm. A film D for semiconductor back surface was prepared.

  The obtained film was slit to a width of 10 mm and wound up to prepare a film for manufacturing a semiconductor device in which a separator was laminated only on one surface of the film for semiconductor back surface.

(Measurement of physical properties of film for semiconductor backside)
About the film for semiconductor back surfaces (film A for semiconductor back surface to film D for semiconductor back surface) produced in Examples and Comparative Examples, visible light transmittance (%), moisture absorption rate (% by weight), weight reduction rate (% by weight), The tensile storage elastic modulus (GPa) and the reflectance (%) were measured. The measurement results are shown in Table 1.

<Measurement method of visible light transmittance>
Visible light (wavelength: 380 nm to 750 nm) transmittance of the film for semiconductor back surface (film A for semiconductor back surface to film D for semiconductor back surface) (thickness: 20 μm) produced in Examples and Comparative Examples was measured. The measurement was performed by irradiating the film for the backside of the semiconductor with no separator laminated with visible light, and measuring the intensity of the transmitted visible light using a spectrophotometer (Spectrophotometer “ABSORPTION SPECTRO PHOTOMETR” manufactured by Shimadzu Corporation). The visible light transmittance (%) was determined from the change in intensity before and after the transmission of visible light.

<Measurement method of moisture absorption rate>
The film for semiconductor back surface (film A for semiconductor back surface to film D for semiconductor back surface) produced in Examples and Comparative Examples was left in a constant temperature and humidity chamber at a temperature of 85 ° C. and a humidity of 85% RH for 168 hours. The water absorption rate (% by weight) was determined from the rate of weight loss before and after standing.

<Measurement method of weight loss rate>
The film for semiconductor back surface (film A for semiconductor back surface to film C for semiconductor back surface) produced in Examples and Comparative Examples was left in a dryer at a temperature of 250 ° C. for 1 hour, and the weight before and after being left (weight loss) ) To determine the weight reduction rate (% by weight).

<Measurement method of elastic modulus>
The elastic modulus of the film for the backside of the semiconductor was measured in the tensile mode using a dynamic viscoelasticity measuring device “Solid Analyzer RSA2” manufactured by Rheometric Co., Ltd., sample width: 10 mm, sample length: 22.5 mm, sample thickness : 0.2 mm, frequency: 1 Hz, rate of temperature increase: 10 ° C./min, measured in a nitrogen atmosphere at a predetermined temperature (23 ° C.), and the obtained tensile storage modulus E ′ was obtained.

<Measurement method of reflectance>
The reflectance was measured using a reflectance measuring device (X-rite) at a wavelength of 400 to 700 nm at 10 nm intervals.

(Separator reflectance measurement)
About the separator of Examples 1-3, the reflectance (%) was measured. As described above, the reflectance at a wavelength of 400 to 700 nm was measured at 10 nm intervals using a reflectance measuring device (X-rite) as described above. The measurement results are shown in Table 1. Further, Table 1 also shows the difference in reflectance (%) between the reflectance of the separator and the film for the semiconductor back surface, that is, (the reflectance of the separator) − (the reflectance of the film for the semiconductor back surface).

(Separator peeling detectability)
Visible light was irradiated before and after separation of the separator, and it was evaluated whether or not it was possible to detect that the separator was peeled off by measuring the lightness with a lightness measuring device “manufactured by KEYENCE”. The results are shown in Table 2.

(Measurement of peel force)
About the film for semiconductor device manufacture of Examples 1-3 and the comparative example 1, peeling force A (N / 50mm) with the film for semiconductor back surfaces in the surface by which the film for semiconductor back surfaces of a separator is laminated | stacked, and separator The peeling force B (N / 50 mm) with the film for semiconductor back surface on the surface on which the film for semiconductor back surface was not laminated was measured. The peeling force A and the peeling force B were obtained by laminating a separator subjected to silicone release treatment and a film for semiconductor back surface at a temperature of 60 degrees using a laminator and peeling at a speed of 300 mm / min with a peeling tester. . The results are shown in Table 2. Table 2 also shows the difference between the peeling force A and the peeling force B, that is, (peeling force A) − (peeling force B).

DESCRIPTION OF SYMBOLS 2 Flip chip type film for semiconductor back surface 4 Semiconductor wafer 40 Film for manufacturing semiconductor device 42 Separator 5 Semiconductor chip 51 Bump formed on circuit surface side of semiconductor chip 5 6 Adhered body 61 Adhered to connection pad of adherend 6 Worn conductive material for bonding

Claims (7)

A film for manufacturing a semiconductor device in which a separator is laminated only on one surface of a flip chip type semiconductor back film for forming on the back surface of a semiconductor element flip-chip connected on an adherend,
The film for manufacturing a semiconductor device, wherein the separator has a reflectance of 30% to 100% at a wavelength of 400 to 700 nm.   2. The semiconductor device according to claim 1, wherein a difference between a reflectance of the separator at a wavelength of 400 to 700 nm and a reflectance of the flip chip type semiconductor back film at a wavelength of 400 to 700 nm is 5% or more. Production film.   The film for manufacturing a semiconductor device according to claim 1, wherein the separator is colored.   The film for manufacturing a semiconductor device according to claim 3, wherein a colorant is added to the separator.   The film for manufacturing a semiconductor device according to claim 1, wherein both sides of the separator are subjected to a peeling treatment.   The film for manufacturing a semiconductor device according to claim 5, wherein the separator is subjected to a release treatment with a silicone release agent. A peeling force with the film for semiconductor back surface on the surface of the separator on the side where the film for semiconductor back surface is laminated, and peeling with the film for semiconductor back surface on the surface of the separator with no film for semiconductor back surface laminated. When the force is B,
0.001 ≦ A−B ≦ 0.04 [N / 50 mm]
The film for manufacturing a semiconductor device according to claim 1, wherein: