JP2013084823A - Transfer robot and vacuum device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transfer robot having a plurality of transfer mechanisms, provided with a technique for improving throughput and reducing in height the transfer robot and a vacuum device having the transfer robot arranged therein.SOLUTION: A transfer robot includes: first to third driving shafts 11 to 13 which are concentrically arranged about a rotation axis O and rotatably provided independently of each other within a horizontal plane; an upper transfer mechanism 1A which expands and contracts by being driven by the first driving shaft 11; a lower left transfer mechanism 2L which is arranged below the upper transfer mechanism 1A and expands and contracts by being driven by the second driving shaft 12; and a lower right transfer mechanism 2R which is arranged at the same height position as the lower left transfer mechanism 2L below the upper transfer mechanism 1A and expands and contracts by being driven by the third driving shaft 13. The lower left transfer mechanism 2L and the lower right transfer mechanism 2R are arranged on both sides of a substrate transfer direction P across the first to third driving shafts 11 to 13.

Description

  The present invention relates to a transfer apparatus that transfers a transfer object such as a substrate, and more particularly to a transfer robot technique suitable for a vacuum apparatus in a semiconductor manufacturing apparatus or the like.

Conventionally, as this kind of transfer robot, one provided with two transfer mechanisms each having a substrate mounting portion is known in order to improve throughput.
However, when two transport mechanisms are provided, it is necessary to arrange the transport mechanisms up and down in order to avoid contact between the transport mechanisms, and as a result, there is a problem that the height of the vacuum device in which the transport robot is disposed is increased. There is.

  The present invention has been made in order to solve the above-described problems of the prior art, and an object of the present invention is to improve throughput in a transfer robot having a plurality of transfer mechanisms, An object of the present invention is to provide a technique for reducing the height of a vacuum device to be arranged.

In order to achieve the above object, the present invention provides first, second, and third arms for extending and retracting arms that are concentrically arranged around a predetermined rotation axis and are independently rotatable in a horizontal plane. And a first transport mechanism that is driven by the first drive shaft and expands and contracts to transport the first transport unit along the transported material transport direction, and is different from the first transport mechanism. A second transport mechanism which is disposed at a height position and which expands and contracts by being driven by the second drive shaft, and transports a second transport unit along the transported material transport direction; and the first transport It is arranged on the same side as the second transport mechanism at a different height position with respect to the mechanism, and is expanded and contracted by being driven by the third drive shaft, so that the third transport unit extends along the transported object transport direction. And a third transport mechanism for transporting the second transport device. When, with the third transport mechanism is the first to third transfer robot disposed on opposite sides of the transport conveying direction across the drive shaft.
The present invention is also effective when the second and third transport mechanisms are disposed at the same height position.
The present invention is also effective when the second and third transport mechanisms are disposed below the first transport mechanism.
In this invention, it has the auxiliary drive shaft for rotation arrange | positioned concentrically with the said 1st-3rd drive shaft, and it makes it rotate by rotation of the said 1st-3rd drive shaft and the said auxiliary drive shaft. It is also effective when configured as described above.
In the present invention, the first transport mechanism is an upper transport mechanism disposed above the second and third transport mechanisms, the upper drive arm fixed to the first drive shaft, An upper auxiliary drive arm fixed to the auxiliary drive shaft, and a first upper driven arm and a second upper driven arm that are rotatably connected to the distal ends of the upper drive arm and the upper auxiliary drive arm in a horizontal plane, respectively. A first upper parallel crank mechanism comprising: a second upper driven arm; a third upper driven arm rotatably coupled to both ends of the second upper driven arm in a horizontal plane; 4 upper driven arms, a fifth upper driven arm rotatably connected to the distal ends of the third upper driven arm and the fourth upper driven arm in a horizontal plane, And a second upper parallel crank mechanism having an upper transport portion attached to the distal end portion of the driven arm, and the second transport mechanism includes the first to third drive shafts and the auxiliary drive shaft. The lower left side transport mechanism disposed on the lower left side in the transport direction of the transported object, the lower left side drive arm fixed to the second drive shaft, and the lower left side auxiliary fixed to the auxiliary drive shaft A drive arm, and a first lower left driven arm and a second lower left driven arm, which are rotatably connected to the tip of the lower left drive arm and the lower left auxiliary drive arm in a horizontal plane, respectively. A lower left parallel crank mechanism, a second lower left driven arm, a third lower left driven arm rotatably connected to both ends of the second lower left driven arm in a horizontal plane, and a fourth of A lower left follower arm, a fifth lower left follower arm rotatably connected to the distal ends of the third lower left follower arm and the fourth lower left follower arm in a horizontal plane, and the fifth lower left follower arm. A second lower left side parallel crank mechanism having a lower left side transport part attached to the tip of the side driven arm, and the third transport mechanism are connected to the first to third drive shafts and the auxiliary drive shaft. On the other hand, a lower right transport mechanism disposed on the lower right side in the transport direction of the transport object, the lower right drive arm fixed to the second drive shaft, and the right fixed to the auxiliary drive shaft A lower auxiliary drive arm, a first lower right driven arm and a second lower right side, which are rotatably connected to the distal ends of the lower right drive arm and the lower right auxiliary drive arm in a horizontal plane, respectively. A first lower right parallel clan comprising a driven arm A second lower right follower arm, a third lower right follower arm and a fourth lower right follower arm rotatably connected in the horizontal plane at both ends of the second lower right follower arm, respectively, A lower right follower arm, a fifth lower right follower arm rotatably connected to the distal ends of the third lower right follower arm and the fourth lower right follower arm in a horizontal plane, This is also effective when a second lower right parallel crank mechanism having a lower right transport unit attached to the tip of the fifth lower right driven arm is provided.
In the present invention, it is also effective when the first transport unit has two placement units.
Moreover, this invention is a vacuum apparatus which has a vacuum chamber and one of the said conveyance robots provided in the said vacuum chamber.

In the case of the present invention, first, second, and third drive shafts for arm expansion and contraction that are concentrically arranged around a predetermined rotation axis and are independently rotatable in a horizontal plane, The first transport mechanism that is driven by the drive shaft and expands and contracts to transport the first transport unit along the transported material transport direction and the first transport mechanism are disposed at different height positions with respect to the first transport mechanism. A second transport mechanism that is driven by the two drive shafts to expand and contract, and transports the second transport unit along the transported material transport direction, and the second transport at a height position different from the first transport mechanism. A third transport mechanism that is arranged on the same side as the mechanism, is expanded and contracted by being driven by the third drive shaft, and transports the third transport unit along the transported material transport direction. The transport mechanism and the third transport mechanism are carried across the first to third drive shafts. Since the first to third drive shafts are arranged concentrically and are rotatably provided in the horizontal plane, the first to third transport mechanisms are mutually connected. It can be expanded and contracted simultaneously without contact.
As a result, according to the present invention, the throughput is improved by simultaneously transporting a plurality of transported objects, and the heights of the transport robot and the vacuum apparatus in which the transport robot and the vacuum apparatus are disposed by disposing the two transport mechanisms in the vertical direction Can be kept low.
Furthermore, according to the present invention, since the first to third transport mechanisms can be independently extended and contracted, the size of the vacuum device in which the transport robot is arranged can be reduced, and between the transport mechanisms. Vibration can be suppressed, and this allows accurate conveyance of the conveyed product.

  ADVANTAGE OF THE INVENTION According to this invention, in the conveyance robot which has several conveyance mechanism, while improving a throughput, the technique which suppresses the height and magnitude | size of a conveyance robot and the vacuum apparatus which arrange | positions this can be provided low.

(A): Plan view showing the configuration of the embodiment of the transfer robot according to the present invention (b): Front view showing the configuration of the transfer robot Top view showing the upper transfer mechanism of the transfer robot Top view showing the lower transfer mechanism of the transfer robot A top view showing the extension operation of the upper transfer mechanism of the transfer robot (part 1) Plan view showing the extension operation of the upper transfer mechanism of the transfer robot (part 2) Top view showing the extension operation of the upper transfer mechanism of the transfer robot (part 3) Top view showing extension operation of lower left side transfer mechanism of transfer robot (Part 1) Plan view showing the extension operation of the lower left side transfer mechanism of the transfer robot (part 2) Top view showing the extension operation of the lower left side transfer mechanism of the transfer robot (part 3) Top view showing extension operation of lower right side transfer mechanism of transfer robot (Part 1) Top view showing extension operation of lower right side transfer mechanism of transfer robot (Part 2) Top view showing the extension operation of the lower right side transfer mechanism of the transfer robot (part 3) FIG. 2 is a plan view showing the extension operation of the lower left side transfer mechanism and the lower right side transfer mechanism of the transfer robot (part 1). FIG. 2 is a plan view showing the extension operation of the lower left transfer mechanism and the lower right transfer mechanism of the transfer robot (part 2). Top view showing extension operation of lower left side transfer mechanism and lower right side transfer mechanism of the transfer robot (part 3) (A) (b): Top view which shows expansion | extension operation | movement of the upper left conveyance mechanism of the conveyance robot, the lower left conveyance mechanism of a lower conveyance mechanism, and a lower right conveyance mechanism (the 1) FIG. 2 is a plan view showing the extension operation of the lower left side transfer mechanism and the lower right side transfer mechanism of the upper transfer mechanism and the lower transfer mechanism of the transfer robot (part 2).

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1A is a plan view showing the configuration of the embodiment of the transfer robot according to the present invention, and FIG. 1B is a front view showing the configuration of the transfer robot.
FIG. 2 is a plan view showing an upper transfer mechanism of the transfer robot, and FIG. 3 is a plan view showing a lower transfer mechanism of the transfer robot.

  As shown in FIGS. 1A and 1B, the transfer robot 1 of the present invention transfers a substrate 10 as a transfer object in, for example, a vacuum chamber (not shown). It has a mechanism 1A and a lower transport mechanism 1B shown in FIG.

  Here, the upper transport mechanism 1A is disposed on the upper side of the lower transport mechanism 1B, and corresponds to a first transport mechanism. The lower transport mechanism 1B includes a lower left transport mechanism 2L corresponding to the second transport mechanism and a lower right transport mechanism 2R corresponding to the third transport mechanism.

As shown in FIGS. 2 and 3, in the present embodiment, the first and second concentric shafts to which the rotational power in the clockwise direction or the counterclockwise direction is transmitted from an independent drive source (not shown), respectively. And third drive shafts 11, 12, 13 and an auxiliary drive shaft 14.
Here, the first, second and third drive shafts 11 to 13 are for arm drive, and the auxiliary drive shaft 14 is for robot turning.

  As shown in FIG. 2, the upper transport mechanism 1 </ b> A includes an upper drive arm 21, an upper auxiliary drive arm 22, a first upper driven arm 31, and a second upper driven arm 32 that extend linearly. The first upper parallel crank mechanism 4 is provided.

Here, the upper drive arm 21 is connected to the first drive shaft 11, and the upper auxiliary drive arm 22 is connected to the auxiliary drive shaft 14.
At the other end (front end) of the upper drive arm 21, one end (base end) of the first upper follower arm 31 extends horizontally around the support shaft A above the upper drive arm 21. It is attached to be freely rotatable.

Further, one end portion (base end portion) of the second upper driven arm 32 is attached to the other end portion (front end portion) of the upper auxiliary drive arm 22 so as to support the support shaft B below the upper auxiliary drive arm 22. It is mounted so as to be rotatable in the horizontal direction as the center.
Further, the other end portion (tip portion) of the second upper driven arm 32 is attached below the first upper driven arm 31 so as to be rotatable in the horizontal direction around the support shaft C.

In the case of the present embodiment, the inter-axis distance between the support shafts AC is set to be the same as the inter-axis distance between the rotation shaft O and the support shaft B. The inter-axis distance between the support shafts BC is set to be the same as the inter-axis distance between the rotation shaft O and the support shaft A.
The inter-axis distance between the support shafts AC and the inter-axis distance between the rotation shaft O and the support shaft B are made shorter than the inter-axis distance between the support shaft BC and the inter-axis distance between the rotation shaft O and the support shaft A. It is configured.

A second upper parallel crank mechanism 5 is connected to a tip end portion, that is, an operation side end portion of the first upper parallel crank mechanism 4.
The second upper parallel crank mechanism 5 includes a first upper driven arm 31, a third upper driven arm 33, a fourth upper driven arm 34, and a first first parallel crank mechanism 4. It is comprised by the support part (5th upper driven arm) 41 of the upper end effector 40 which is a conveyance part.

  Here, one end portion (base end portion) of the third upper driven arm 33 is located above the first upper driven arm 31 at the end portion on the upper drive arm 21 side of the first upper driven arm 31. However, it is attached so as to be rotatable in the horizontal direction around the above-mentioned support shaft A.

  Further, one end portion (base end) of the fourth upper driven arm 34 is provided above the first upper driven arm 31 at the end portion of the first upper driven arm 31 on the second upper driven arm 32 side. Part) is attached so as to be rotatable in the horizontal direction around the above-mentioned support shaft C.

  Further, the other end portions (tip portions) of the third and fourth upper driven arms 33 and 34 are located below the support portion 41 of the upper end effector 40 between the same axes as the interaxial distance between the support shafts AC. It is attached so as to be rotatable in the horizontal direction around the supporting shafts D and E provided at positions having a distance.

  In the present embodiment, the first upper driven arm 31 includes a gear box configured such that the upper drive arm 21 and the fourth upper driven arm 34 are rotated in opposite directions and at the same angle. A transmission mechanism 35 is provided.

That is, the power of the upper drive arm 21 is transmitted through the power transmission mechanism 35 of the first upper driven arm 31 so that the fourth upper driven arm 34 rotates in the opposite direction at the same angle as the upper drive arm 21. It is configured.
With such a configuration, the support shafts D and E at the operation tip of the second upper parallel crank mechanism 5 travel straight along the substrate transport direction (conveyed material transport direction) P and pass on the rotary shaft O. It is like that.

  The upper end effector 40 according to the present embodiment is provided with substrate mounting portions 42 and 43 for mounting the substrate 10 at the downstream end in the substrate transport direction P with respect to the support shafts D and E, respectively. Yes.

  On the other hand, as shown in FIGS. 1B and 3, the lower transport mechanism 1 </ b> B has a lower left transport mechanism 2 </ b> L provided on both sides of a straight line extending in the substrate transport direction P from the rotation axis O, that is, here on the left side. And a lower right transport mechanism 2R provided on the right side.

  The lower left transport mechanism 2L includes a lower left drive arm 51, a lower left auxiliary drive arm 52, a first lower left driven arm 61, and a second lower left driven arm 62, each extending linearly. A first lower left parallel crank mechanism 6 is provided.

Here, the lower left drive arm 51 is connected to the second drive shaft 12, and the lower left auxiliary drive arm 52 is connected to the auxiliary drive shaft 14.
The operating range of the lower left drive arm 51 is controlled so as to be positioned on the left side with respect to a straight line that passes through the rotation axis O and extends in parallel with the substrate transport direction P. The lower left auxiliary drive arm 52 is provided so as to extend downstream in the substrate transport direction P with respect to the rotation axis O.

  At the other end (front end) of the lower left drive arm 51, one end (base end) of the first lower left driven arm 61 is centered on the support shaft F above the lower left drive arm 51. It is attached so as to be rotatable in the horizontal direction.

Further, one end (base end) of the second lower left driven arm 62 is supported below the lower left auxiliary drive arm 52 at the other end (tip) of the lower left auxiliary drive arm 52. It is attached so as to be rotatable in the horizontal direction around the axis G.
Further, the other end portion (tip portion) of the second lower left driven arm 62 is attached below the first lower left driven arm 61 so as to be rotatable in the horizontal direction around the support shaft H.

In the case of the present embodiment, the inter-axis distance between the support shafts FH is set to be the same as the inter-axis distance between the rotation shaft O and the support shaft G. The inter-axis distance between the support shafts GH is set to be the same as the inter-axis distance between the rotation shaft O and the support shaft F.
The inter-axis distance between the support shafts FH and the inter-axis distance between the rotation shaft O and the support shaft G are shorter than the inter-axis distance between the support shafts GH and the inter-axis distance between the rotation shaft O and the support shaft F. It is configured.

A second lower left parallel crank mechanism 7 is connected to the tip of the first lower left parallel crank mechanism 6, that is, the operation side end.
The second lower left parallel crank mechanism 7 includes a first lower left driven arm 61, a third lower left driven arm 63, and a fourth lower left driven arm 64 of the first lower left parallel crank mechanism 6. And a support portion (fifth lower left driven arm) 71L of the lower left end effector 70L, which is the second transport portion.

  Here, one end of the third lower left driven arm 63 (on the upper left of the first lower left driven arm 61) is located at the end of the first lower left driven arm 61 on the lower left drive arm 51 side. The base end portion) is attached so as to be rotatable in the horizontal direction around the above-described support shaft F.

  Also, one end of the fourth lower left driven arm 64 is located above the first lower left driven arm 61 at the end of the first lower left driven arm 61 on the second lower left driven arm 62 side. The portion (base end portion) is attached so as to be rotatable in the horizontal direction around the support shaft H described above.

  Furthermore, the other end portions (tip portions) of the third and fourth lower left driven arms 63 and 64 have the same inter-axis distance between the support shafts FH below the support portion 71L of the lower left end effector 70L. It is attached so as to be rotatable in the horizontal direction around the support shafts I and J provided at positions separated by the distance between the shafts. The third and fourth lower left side driven arms 63 and 64 are configured such that the respective support shafts I and J are positioned on the straight line side extending through the rotation axis O and parallel to the substrate transport direction P.

  In the present embodiment, the first lower left driven arm 61 has a gear box configured such that the rotation directions of the lower left drive arm 51 and the fourth lower left driven arm 64 are opposite and at the same angle. A power transmission mechanism 65 is provided.

  That is, the power of the lower left drive arm 51 is transmitted through the power transmission mechanism 65 of the first lower left driven arm 61, and the fourth lower left driven arm 64 is opposite to the lower left drive arm 51 in the opposite direction. It is configured to rotate.

In the case of the present embodiment, the inter-axis distance between the support shafts KM is set to be the same as the inter-axis distance between the rotation shaft O and the support shaft L. The inter-axis distance between the support shafts LM is set to be the same as the inter-axis distance between the rotation shaft O and the support shaft K.
The inter-axis distance between the support shafts IJ and the inter-axis distance between the support shafts HF are configured to be shorter than the inter-axis distance between the support shafts FI and the inter-axis distance between the support shafts HJ.

On the other hand, in the present embodiment, the distance between the support shaft FI and the support shaft HJ is shorter than the distance between the rotation shaft O and the support shaft F and the distance between the support shafts GH. The distance between the axes is set as follows.
With this configuration, when the lower left transport mechanism 2L is operated along the substrate transport direction P, each member does not contact the first to third drive shafts 11 to 13 and the auxiliary drive shaft 14. It has become.

  The lower left side end effector 70L of the present embodiment is a substrate placement unit for placing the substrate 10 on the distal end portion of the support portion 71L located on the downstream side in the substrate transport direction P with respect to the support shafts I and J described above. 72L is provided.

  On the other hand, the lower right transport mechanism 2R of the present embodiment includes a lower right drive arm 81, a lower right auxiliary drive arm 82, a first lower right driven arm 91, The first lower right parallel crank mechanism 8 is composed of two lower right driven arms 92.

Here, the lower right drive arm 81 is connected to the third drive shaft 13, and the lower right auxiliary drive arm 82 is connected to the auxiliary drive shaft 14.
The operation range of the lower right drive arm 81 is controlled so as to be positioned on the right side with respect to a straight line passing through the rotation axis O and extending in parallel with the substrate transport direction P. The lower right auxiliary drive arm 82 is provided so as to extend upstream of the rotation axis O in the substrate transport direction P.

  At the other end (front end) of the lower right drive arm 81, one end (base end) of the first lower right driven arm 91 is supported above the lower right drive arm 81. It is attached so as to be rotatable in the horizontal direction around K.

In addition, one end portion (base end portion) of the second lower right driven arm 92 is connected to the other end portion (tip portion) of the lower right auxiliary drive arm 82. It is attached so as to be rotatable in the horizontal direction around the support shaft L at the bottom.
Further, the other end portion (tip portion) of the second lower right driven arm 92 is attached below the first lower right driven arm 91 so as to be rotatable in the horizontal direction around the support shaft M. .

In the case of the present embodiment, the inter-axis distance between the support shafts KM is set to be the same as the inter-axis distance between the rotation shaft O and the support shaft L. The inter-axis distance between the support shafts LM is set to be the same as the inter-axis distance between the rotation shaft O and the support shaft K.
It should be noted that the inter-axis distance between the support shafts KM and the inter-axis distance between the rotation shaft O and the support shaft L are shorter than the inter-axis distance between the support shafts LM and the inter-axis distance between the rotation shaft O and the support shaft K. It is configured.

A second lower right parallel crank mechanism 9 is connected to the front end of the first lower right parallel crank mechanism 8, that is, the operation side end.
The second lower right parallel crank mechanism 9 includes a first lower right driven arm 91, a third lower right driven arm 93, and a fourth right lower arm of the first lower right parallel crank mechanism 8. The lower driven arm 94 and a support portion (fifth lower right driven arm) 71R of the lower right end effector 70R, which is a third transport unit, are configured.

  Here, one end of the third lower right driven arm 93 is located above the first lower right driven arm 91 at the end of the first lower right driven arm 91 on the lower right drive arm 81 side. The end portion (base end portion) is attached so as to be rotatable in the horizontal direction around the support shaft K described above.

  The fourth lower right driven arm 94 is located above the first lower right driven arm 91 at the end of the first lower right driven arm 91 on the second lower right driven arm 92 side. One end portion (base end portion) is attached so as to be rotatable in the horizontal direction around the support shaft M described above.

  Furthermore, the other end portions (tip portions) of the third and fourth lower right driven arms 93 and 94 have an inter-axis distance between the support shafts MK below the support portion 71R of the lower right end effector 70R. It is attached so as to be rotatable in the horizontal direction around the support shafts N and Q provided at positions separated by the same inter-axis distance. The third and fourth lower left side driven arms 93 and 94 are configured such that the respective support shafts Q and N are positioned on the straight side that passes through the rotation axis O and extends in parallel with the substrate transport direction P.

  In the present embodiment, the first lower right driven arm 91 is configured such that the rotation directions of the lower right drive arm 81 and the fourth lower right driven arm 94 are opposite and at the same angle. A power transmission mechanism 95 including a gear box is provided.

  That is, the power of the lower right drive arm 81 is transmitted via the power transmission mechanism 95 of the first lower right driven arm 91, and the fourth lower right driven arm 94 has the same angle as the lower right drive arm 81. It is configured to rotate in the opposite direction.

In this embodiment, the inter-axis distance between the support shafts NQ and the inter-axis distance between the support shafts MK are configured to be shorter than the inter-axis distance between the support shafts MN and the inter-axis distance between the support shafts KQ. Has been.
On the other hand, the inter-axis distance between the support shaft MN and the support shaft KQ is shorter than the inter-axis distance between the rotation shaft O and the support shaft K and the inter-axis distance between the support shafts LM. The distance is set.

  With this configuration, when the lower right transport mechanism 2R is operated along the substrate transport direction P, each member does not contact the first to third drive shafts 11 to 13 and the auxiliary drive shaft 14. It is like that.

  In the present embodiment, the first lower left parallel crank mechanism 6 of the lower left transport mechanism 2L and the first lower right parallel crank mechanism 8 of the lower right transport mechanism 2R are respectively corresponding arms. The distance between the axes is the same.

  Further, the second left lower parallel crank mechanism 7 of the lower left transport mechanism 2L and the second lower right parallel crank mechanism 9 of the lower right transport mechanism 2R have the same arm-to-axis distance. It is comprised so that it may become.

  The lower right end effector 70R according to the present embodiment places the substrate 10 on the distal end portion of the support portion 71R located on the downstream side in the substrate transport direction P with respect to the support shafts N and Q described above. A portion 72R is provided.

  Here, in the lower right end effector 70R, the distance between the substrate platform 72 and the rotation axis O is equal to the distance between the substrate platform 72L and the rotation axis O in the lower left end effector 70L. The length of the support portion 71R for P is configured to be longer than the length of the support portion 71L of the lower left side end effector 70L.

  Further, in the present embodiment, as shown in FIG. 1B, the lower left side transport mechanism 2L and the lower left end effector 70L have the same height position as the lower left end effector 70R. The shape and arrangement of each member of the lower right transport mechanism 2R are determined.

Hereinafter, the operation of the present embodiment will be described.
First, a case where the upper transport mechanism 1A is extended from the home position shown in FIGS. 1A and 1B will be described with reference to FIGS.

In this case, as shown in FIG. 4, only the first drive shaft 11 is driven, and the upper drive arm 21 is rotated clockwise by a predetermined angle.
Thus, the first upper parallel crank mechanism 4 and the second upper parallel crank mechanism 5 are urged and moved in the substrate transport direction P by the rotational power of the upper drive arm 21 connected to the first drive shaft 11. As shown in FIG. 5, the upper end effector 40 is disposed on the downstream side in the substrate transport direction P with respect to the rotation axis O.
On the other hand, the lower transport mechanism 1B remains stationary because no power is applied.

And by the above operation | movement, as shown in FIG. 6, only the upper side conveyance mechanism 1A can be expanded.
As shown in FIG. 1B, since each member of the upper transport mechanism 1A is provided at a position higher than the lower transport mechanism 1B, the upper transport mechanism 1A and the lower transport mechanism 1B do not contact each other.

  On the other hand, when the upper transport mechanism 1A is returned to the home position, the first drive shaft 11 is rotated by a predetermined angle in the counterclockwise direction, and the first upper parallel crank mechanism 4 and the second upper upper mechanism 1A of the upper transport mechanism 1A are rotated. This can be done by moving the parallel crank mechanism 5 to the upstream side in the substrate transport direction P.

Next, a case where the lower transport mechanism 1B is extended from the home position shown in FIGS. 1A and 1B will be described with reference to FIGS.
7 to 9 show the extending operation of the lower left transport mechanism 2L of the lower transport mechanism 1B.

In this case, as shown in FIG. 7, only the second drive shaft 12 is rotated by a predetermined angle in the clockwise direction.
Thereby, the first lower left parallel crank mechanism 6 and the second lower left parallel crank mechanism 7 are urged in the substrate transport direction P by the rotational power of the lower left drive arm 51 connected to the second drive shaft 12. As shown in FIG. 8, the lower left side end effector 70 </ b> L is disposed downstream of the rotation axis O in the substrate transport direction P.

On the other hand, the lower right transport mechanism 2R of the upper transport mechanism 1A and the lower transport mechanism 1B remains stationary because no power is applied thereto.
And by the above operation, as shown in FIG. 9, only the lower left transport mechanism 2L of the lower transport mechanism 1B can be extended.

  As shown in FIGS. 1A and 1B, each member of the lower left side transport mechanism 2L of the lower side transport mechanism 1B is provided at a position lower than the upper side transport mechanism 1A, and the right side with the rotation axis O interposed therebetween. Since it is located on the side opposite to the lower transport mechanism 2R, the lower left transport mechanism 2L does not contact the upper transport mechanism 1A and the lower right transport mechanism 2R.

  On the other hand, when returning the lower left side transport mechanism 2L of the lower side transport mechanism 1B to the home position, the second drive shaft 12 is rotated counterclockwise by a predetermined angle, and the first lower left side of the lower left side transport mechanism 2L. This can be done by moving the parallel crank mechanism 6 and the second lower left parallel crank mechanism 7 to the upstream side in the substrate transport direction P.

  In the case of the present embodiment, the distance between the axes of the third lower left driven arm 63 and the fourth lower left driven arm 64 is the distance between the left lower drive arm 51 and the second lower left driven arm 62. Since it is shorter, the lower left end effector 70L moves so as to draw a curve.

10 to 12 show the extending operation of the lower right transport mechanism 2R of the lower transport mechanism 1B.
In this case, as shown in FIG. 10, only the third drive shaft 13 is rotated by a predetermined angle in the counterclockwise direction.

  Thus, the first lower right parallel crank mechanism 8 and the second lower right parallel crank mechanism 9 are moved in the substrate transport direction P by the rotational power of the lower right drive arm 81 connected to the third drive shaft 13. 11, the lower right end effector 70 </ b> R is disposed on the downstream side in the substrate transport direction P with respect to the rotation axis O, as shown in FIG. 11.

On the other hand, the lower left transport mechanism 2L of the upper transport mechanism 1A and the lower transport mechanism 1B remains stationary because no power is applied thereto.
By the above operation, as shown in FIG. 12, only the lower right transport mechanism 2R of the lower transport mechanism 1B can be extended.

  As shown in FIGS. 1A and 1B, each member of the lower right transport mechanism 2R of the lower transport mechanism 1B is provided at a position lower than the upper transport mechanism 1A, and sandwiches the rotation axis O therebetween. Since it is located on the side opposite to the lower left transport mechanism 2L, the lower right transport mechanism 2R does not contact the upper transport mechanism 1A and the lower left transport mechanism 2L.

  On the other hand, when returning the lower right transport mechanism 2R of the lower transport mechanism 1B to the home position, the third drive shaft 13 is rotated clockwise by a predetermined angle, and the first right of the lower right transport mechanism 2R is turned on. This can be done by moving the lower parallel crank mechanism 8 and the second lower right parallel crank mechanism 9 upstream in the substrate transport direction P.

  In the case of the present embodiment, the inter-axis distance between the third lower right driven arm 93 and the fourth lower right driven arm 94 is such that the lower right drive arm 81 and the second lower right driven arm 92. Therefore, the lower right end effector 70R moves so as to draw a curve.

13 to 15 show the extending operation of the lower left transport mechanism 2L and the lower right transport mechanism 2R of the lower transport mechanism 1B.
In this case, as shown in FIG. 13, the second drive shaft 12 is rotated clockwise by a predetermined angle, and the third drive shaft 13 is rotated counterclockwise by a predetermined angle.

Thereby, the first lower left parallel crank mechanism 6 and the second lower left parallel crank mechanism 7 are urged in the substrate transport direction P by the rotational power of the lower left drive arm 51 connected to the second drive shaft 12. To be moved.
The first lower right parallel crank mechanism 8 and the second lower right parallel crank mechanism 9 are moved in the substrate transport direction P by the rotational power of the lower right drive arm 81 connected to the third drive shaft 13. Moves when energized.

With the above operation, as shown in FIG. 14, both the lower left end effector 70 </ b> L and the lower right end effector 70 </ b> R are disposed downstream of the rotation axis O in the substrate transport direction P.
On the other hand, the upper transport mechanism 1A remains stationary because no power is applied thereto.
As described above, according to the present embodiment, as shown in FIG. 15, the lower left transport mechanism 2L and the lower right transport mechanism 2R of the lower transport mechanism 1B can be extended simultaneously.

  On the other hand, when returning the lower left conveyance mechanism 2L and the lower right conveyance mechanism 2R of the lower conveyance mechanism 1B to the home position, as described above, the second drive shaft 12 is rotated counterclockwise by a predetermined angle. At the same time, the third drive shaft 13 can be rotated by a predetermined angle in the clockwise direction.

FIGS. 16A, 16B, and 17 show the extending operation of the upper left transport mechanism 1A and the lower left transport mechanism 2L and the lower right transport mechanism 2R of the lower transport mechanism 1B.
In this case, as shown in FIGS. 16A and 16B, the first drive shaft 11 is rotated clockwise by a predetermined angle, and the second drive shaft 12 is rotated clockwise by a predetermined angle. Further, the third drive shaft 13 is rotated by a predetermined angle in the counterclockwise direction.

  As a result, the rotational force of the upper drive arm 21 connected to the first drive shaft 11 causes the first upper parallel crank mechanism 4 and the second upper parallel crank mechanism 5 to move in the substrate transport direction P in the upper transport mechanism 1A. The upper end effector 40 is disposed downstream of the rotation axis O in the substrate transport direction P.

  In addition, the first lower left parallel crank mechanism 6 and the second lower left parallel crank mechanism 7 are formed on the substrate in the lower transport mechanism 1B by the rotational power of the lower left drive arm 51 connected to the second drive shaft 12. The first lower right parallel crank mechanism 8 and the second lower right side are driven by the rotational power of the lower right side drive arm 81 connected to the third drive shaft 13 while being urged and moved in the transport direction P. The parallel crank mechanism 9 is urged and moved in the substrate transport direction P.

With the above operation, as shown in FIG. 17, both the lower left end effector 70 </ b> L and the lower right end effector 70 </ b> R are disposed downstream of the rotation axis O in the substrate transport direction P.
As described above, according to the present embodiment, as shown in FIG. 15, the upper left transport mechanism 1A and the lower left transport mechanism 2L and the lower right transport mechanism 2R of the lower transport mechanism 1B can be simultaneously extended.

On the other hand, when returning the upper left transport mechanism 1A and the lower left transport mechanism 2L and the lower right transport mechanism 2R of the lower transport mechanism 1B to the home position, as described above, the first drive shaft 11 is rotated counterclockwise. The second drive shaft 12 can be rotated by a predetermined angle in the counterclockwise direction, and the third drive shaft 13 can be rotated in the clockwise direction by a predetermined angle.
On the other hand, when the transfer robot 1 is turned, the first to third drive shafts 11 to 13 and the auxiliary drive shaft 14 may be simultaneously rotated in the same direction at the same angle in the home position state.

  As described above, in the present embodiment, the first to third drive shafts 11 for extending and retracting the arm that are concentrically arranged around the rotation axis O and are independently rotatable in a horizontal plane. To 13 and the upper transport mechanism 1A that expands and contracts by being driven by the first drive shaft 11 and transports the upper end effector 40 along the substrate transport direction P, and is disposed below the upper transport mechanism 1A. The left lower transport mechanism 2L that is driven by the second drive shaft 12 to expand and contract and transport the lower left end effector 70L along the substrate transport direction P, and the lower left transport mechanism 2L below the upper transport mechanism 1A. A lower right transport mechanism 2R that is driven by the third drive shaft 13 to expand and contract and transport the lower right end effector 70R along the substrate transport direction P. In addition, since the lower left transport mechanism 2L and the lower right transport mechanism 2R are disposed on both sides of the substrate transport direction P across the first to third drive shafts 11 to 13, the upper transport mechanism 1A, the lower left transport mechanism 2L and the lower right transport mechanism 2R can be simultaneously expanded and contracted without contacting each other.

  As a result, according to the present embodiment, throughput is improved by simultaneously transporting a plurality of substrates 10, and two pairs of transport mechanisms (upper transport mechanism 1A and lower transport mechanism 1B) are arranged in the vertical direction. Accordingly, the height of the transfer robot 1 and the vacuum device in which the transfer robot 1 is disposed can be kept low.

  Furthermore, according to the present embodiment, the upper transport mechanism 1A, the lower left transport mechanism 2L, and the lower right transport mechanism 2R can be independently expanded and contracted, so that the size of the vacuum device in which the transport robot 1 is disposed is large. Can be reduced, and vibrations between the upper transport mechanism 1A, the lower left transport mechanism 2L, and the lower right transport mechanism 2R can be suppressed, thereby enabling accurate substrate transport.

The present invention is not limited to the above-described embodiment, and various changes can be made.
For example, in the above embodiment, the upper transport mechanism 1A is provided as the first transport mechanism, and the lower left transport mechanism 2L and the lower right transport mechanism 2R are provided as the second and third transport mechanisms. The invention is not limited to this, and the second and third transport mechanisms may be arranged above the first transport mechanism.

  Furthermore, in the above-described embodiment, two placement units are provided in the upper conveyance mechanism 1A, and the placement units are provided in the lower left conveyance mechanism 2L and the lower right conveyance mechanism 2R. However, the present invention is not limited thereto. Instead, one or three or more mounting portions can be provided in each transport mechanism.

DESCRIPTION OF SYMBOLS 1 ... Conveyance robot 1A ... Upper side conveyance mechanism (1st conveyance mechanism)
1B: Lower transport mechanism 2L: Lower left transport mechanism (second transport mechanism)
2R ... Lower right transport mechanism (third transport mechanism)
4 ... 1st upper parallel crank mechanism 5 ... 2nd upper parallel crank mechanism 6 ... 1st lower left parallel crank mechanism 7 ... 2nd lower left parallel crank mechanism 8 ... 1st lower right parallel crank mechanism 9 ... Second lower right parallel crank mechanism 10 ... Substrate (conveyed object)
DESCRIPTION OF SYMBOLS 11 ... 1st drive shaft 12 ... 2nd drive shaft 13 ... 3rd drive shaft 14 ... Auxiliary drive shaft 21 ... Upper drive arm 22 ... Upper auxiliary drive arm 31 ... 1st upper driven arm 32 ... 2nd Upper driven arm 33 ... third upper driven arm 34 ... fourth upper driven arm 40 ... upper end effector (first transport unit, upper transport unit)
51 ... Lower left drive arm 52 ... Lower left auxiliary drive arm 61 ... First lower left driven arm 62 ... Second lower left driven arm 63 ... Third lower left driven arm 64 ... Fourth lower left driven arm 70L ... Lower left side end effector (second transfer unit, lower left transfer unit)
70R ... lower right side end effector (third conveying unit, lower right conveying unit)
81 ... lower right side drive arm 82 ... lower right side auxiliary drive arm 91 ... first lower right side driven arm 92 ... second lower right side driven arm 93 ... third lower right side driven arm 94 ... fourth Lower right driven arm P ... substrate transport direction (transport object transport direction)

Claims (7)

First, second, and third drive shafts for arm expansion and contraction that are concentrically arranged around a predetermined rotation axis and that are independently rotatable in a horizontal plane;
A first transport mechanism that is driven by the first drive shaft to expand and contract, and transports the first transport unit along the transported material transport direction;
The second transport mechanism is disposed at different height positions with respect to the first transport mechanism, is driven by the second drive shaft to expand and contract, and transports the second transport unit along the transported object transport direction. A transport mechanism of
It is arranged on the same side as the second transport mechanism at a different height position with respect to the first transport mechanism, is driven by the third drive shaft and expands and contracts, and a third transport unit is transported by the transport A third transport mechanism for transporting along the object transport direction,
A transfer robot in which the second transfer mechanism and the third transfer mechanism are arranged on both sides of the transfer object transfer direction with the first to third drive shafts interposed therebetween.   The transfer robot according to claim 1, wherein the second and third transfer mechanisms are arranged at the same height position.   The transfer robot according to claim 1, wherein the second and third transfer mechanisms are disposed below the first transfer mechanism.   The auxiliary drive shaft for turning is arranged concentrically with the first to third drive shafts, and is configured to turn by the rotation of the first to third drive shafts and the auxiliary drive shaft. The transfer robot according to any one of claims 1 to 3. The first transport mechanism is an upper transport mechanism disposed above the second and third transport mechanisms,
The upper drive arm fixed to the first drive shaft, the upper auxiliary drive arm fixed to the auxiliary drive shaft, and the distal ends of the upper drive arm and the upper auxiliary drive arm are rotatable in a horizontal plane, respectively. A first upper parallel crank mechanism comprising a connected first upper driven arm and a second upper driven arm;
The second upper driven arm, the third upper driven arm and the fourth upper driven arm that are rotatably connected in the horizontal plane at both ends of the second upper driven arm, and the third upper driven arm. A fifth upper driven arm rotatably coupled to the distal ends of the driven arm and the fourth upper driven arm in a horizontal plane; and an upper transport unit attached to the distal end of the fifth driven arm. A second upper parallel crank mechanism,
The second transport mechanism is a lower left transport mechanism disposed on the lower left side in the transported material transport direction with respect to the first to third drive shafts and the auxiliary drive shaft,
The lower left drive arm fixed to the second drive shaft, the lower left auxiliary drive arm fixed to the auxiliary drive shaft, and the tip of the lower left drive arm and the lower left auxiliary drive arm are respectively in a horizontal plane. A first lower left parallel crank mechanism comprising a first lower left driven arm and a second lower left driven arm rotatably connected at
The second lower left driven arm, the third lower left driven arm and the fourth lower left driven arm that are rotatably connected in the horizontal plane at both ends of the second lower left driven arm, A fifth lower left driven arm rotatably connected to the distal ends of the third lower left driven arm and the fourth lower left driven arm in a horizontal plane; and a distal end of the fifth lower left driven arm. A second lower left side parallel crank mechanism having a lower left side conveying section attached thereto;
The third transport mechanism is a lower right transport mechanism disposed on the lower right side in the transported material transport direction with respect to the first to third drive shafts and the auxiliary drive shaft,
A lower right drive arm fixed to the second drive shaft, a lower right auxiliary drive arm fixed to the auxiliary drive shaft, and a tip of the lower right drive arm and the lower right auxiliary drive arm A first lower right parallel crank mechanism comprising a first lower right driven arm and a second lower right driven arm that are rotatably coupled in a horizontal plane,
The second lower right driven arm and a third lower right driven arm and a fourth lower right driven arm that are rotatably connected in a horizontal plane at both ends of the second lower right driven arm, respectively. An arm, a fifth lower right driven arm rotatably connected to the distal ends of the third lower right driven arm and the fourth lower right driven arm in a horizontal plane, and the fifth right The transport robot according to claim 4, further comprising: a second lower right parallel crank mechanism having a lower right transport unit attached to a tip portion of the lower driven arm.   The transfer robot according to claim 1, wherein the first transfer unit includes two placement units. A vacuum chamber;
The vacuum apparatus which has the conveyance robot of any one of Claim 1 thru | or 6 provided in the said vacuum chamber.

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