JP2012203294A - Polarization element unit and polarization light irradiation apparatus - Google Patents
Polarization element unit and polarization light irradiation apparatus Download PDFInfo
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Abstract
Description
本発明は、ワィヤーグリッド偏光素子を利用した偏光素子ユニットおよびこの偏光素子ユニットを使用して、液晶表示素子の配向膜や、紫外線硬化型液晶を用いた視野角補償フィルムの配向層などの配向膜の光配向、あるいは、３Ｄ映像を現出させる３Ｄ映像表示装置用に使用される位相差フィルムを製造するための偏光光照射装置に関する。 The present invention relates to a polarizing element unit using a wire grid polarizing element and an alignment film of a liquid crystal display element, an alignment layer of a viewing angle compensation film using an ultraviolet curable liquid crystal, and the like using this polarizing element unit. The present invention relates to a polarized light irradiation apparatus for producing a retardation film used for a 3D video display device that displays a photo-alignment of a film or a 3D video.
液晶パネルの配向膜や、３Ｄ映像を現出させるための位相差フィルム（以下３Ｄ用フィルム）の配向層などの配向処理に関し、配向膜に紫外線領域の偏光光を照射することにより配向を行なう技術が採用されるようになってきている。以下、上記光により配向を行う配向膜や配向層を設けたフィルムのことを総称して光配向膜と呼ぶ。光配向膜は、液晶パネルの大型化と共に大型化しており、それと共に光配向膜に偏光光を照射する偏光光照射装置も大型化している。
上記光配向膜において、例えば３Ｄ用フィルムは、帯状で長尺のワークであり、配向処理後所望の長さに切断し使用する。最近は、パネルの大きさに合わせて大きくなり、その幅は１０００ｍｍ〜１５００ｍｍ程度である。このような帯状の長い光配向膜に対して光配向を行うために、棒状ランプとワイヤーグリッドの偏光素子を組み合せた偏光光照射装置が提案されている（例えば特許文献１参照）。
A technique for aligning an alignment film by irradiating polarized light in the ultraviolet region with respect to an alignment process of an alignment film of a liquid crystal panel or an alignment layer of a retardation film (hereinafter referred to as 3D film) for displaying a 3D image. Has been adopted. Hereinafter, a film provided with an alignment film or alignment layer that performs alignment with light is generally referred to as a photo-alignment film. The photo-alignment film has been enlarged along with the enlargement of the liquid crystal panel, and the polarized light irradiation apparatus for irradiating the photo-alignment film with polarized light has also been enlarged.
In the photo-alignment film, for example, the 3D film is a strip-like and long work, and is used after being cut into a desired length after the alignment treatment. Recently, it has become larger according to the size of the panel, and its width is about 1000 mm to 1500 mm. In order to perform photo-alignment on such a strip-like long photo-alignment film, there has been proposed a polarized light irradiation device in which a rod-shaped lamp and a wire grid polarizing element are combined (for example, see Patent Document 1).
特許文献１にも記載されているように、ワイヤーグリッド偏光素子は、大型のものが作れない。そのため、このような偏光光照射装置においては、偏光素子として、複数のワイヤーグリッド偏光素子をフレーム内に並べた、偏光素子ユニットを使用する。そして、偏光素子ユニットには、各偏光素子のグリッドの方向を平行にそろえるための偏光素子回転移動手段が設けられる。
特許文献１には、偏光素子回転移動手段として、ワイヤーグリッド偏光子の対向する２辺のエッジ側面を、ワイヤーグリッド偏光素子の平面と平行な方向に押す３個のねじを備え、１個のねじを支点とし、２個のねじを押し引きしてワイヤーグリッド偏光素子を光軸の周りを回転移動させる機構が示されている。
As described in Patent Document 1, a large-sized wire grid polarizing element cannot be made. Therefore, in such a polarized light irradiation apparatus, a polarizing element unit in which a plurality of wire grid polarizing elements are arranged in a frame is used as the polarizing element. The polarizing element unit is provided with a polarizing element rotating / moving means for aligning the grid directions of the polarizing elements in parallel.
Patent Document 1 includes, as a polarizing element rotation moving means, three screws that push the opposite edge side surfaces of a wire grid polarizer in a direction parallel to the plane of the wire grid polarizing element. A mechanism for rotating the wire grid polarization element around the optical axis by pushing and pulling two screws is shown.
上記の特許文献１に示されている偏光素子回転移動手段は、同公報の図７に示されるように、矩形状のワイヤーグリッド偏光素子の対向する２辺のうち、一方の辺に２個のねじが突き当てられ、他方の辺に１個のねじが突き当てられる。そして、一方の辺に突き当てられている２個のねじを押し引きすることにより、ワイヤーグリッド偏光素子は、他方の辺に突き当てられているねじを支点として、偏光素子の平面内で回転移動する。
すなわち、ワイヤーグリッド偏光素子は、一方の辺を２個のねじで、他方の辺を１個のねじで挟まれている。そのため、２個のねじで押し引きして偏光素子を回転させると、偏光素子の、一方の辺のねじが押している部分と、他方の辺のねじが当たって支点となっている部分には力が加わった状態になる。
上記したように、ワイヤーグリッド偏光素子の基材はガラスであり、上記のように力が加わると歪みが生じる。ワイヤーグリッド偏光素子が歪むと、そこから出射する偏光光の偏光軸が回転する。このことにより、光照射面における偏光光の偏光軸のばらつきが大きくなる可能性がある。
As shown in FIG. 7 of the publication, the polarizing element rotating / moving means shown in the above-mentioned Patent Document 1 includes two pieces on one side of two opposing sides of the rectangular wire grid polarizing element. A screw is abutted and one screw is abutted on the other side. Then, by pushing and pulling the two screws abutted on one side, the wire grid polarizing element rotates and moves in the plane of the polarizing element with the screw abutted on the other side as a fulcrum To do.
That is, the wire grid polarizing element is sandwiched between two screws on one side and one screw on the other side. Therefore, when the polarizing element is rotated by pushing and pulling with two screws, force is applied to the part of the polarizing element that is pressed by the screw on one side and the part that is the fulcrum by the screw on the other side. Will be added.
As described above, the base material of the wire grid polarizing element is glass, and distortion occurs when force is applied as described above. When the wire grid polarization element is distorted, the polarization axis of the polarized light emitted therefrom rotates. This may increase the variation in the polarization axis of the polarized light on the light irradiation surface.
本発明は上述した問題点を解決するものであって、ワイヤーグリッド偏光素子を並べて構成された偏光ユニットの各偏光素子を、光軸の周りを回転させる偏光素子回転移動手段を備えた偏光素子ユニットおよび偏光光照射装置において、ワイヤーグリッド偏光素子を回転させるときに、偏光素子に力を加えず歪が生じないようにすることを目的とする。 The present invention solves the above-described problems, and a polarizing element unit including a polarizing element rotating / moving unit that rotates each polarizing element of a polarizing unit configured by arranging wire grid polarizing elements around an optical axis. And in a polarized light irradiation apparatus, when rotating a wire grid polarizing element, it aims at applying distortion to a polarizing element and preventing distortion.
上記課題を本発明においては、次のように解決する。
（１）複数のワイヤーグリッド偏光素子を、各々の端部が上記光源からの光が通過する方向に重なるようにフレーム内に並べて配置し、上記フレームに並べて配置した個々のワイヤーグリッド偏光素子を、該ワイヤーグリッド偏光素子の平面内で回転移動させる回転移動手段を設ける。そして、この回転移動手段を、ワイヤーグリッド偏光素子の、一辺だけを押しひきして回転させるように構成する。
具体的には、偏光素子ユニットのフレームにピンを設け、このピンに嵌り合う孔を形成した偏光子支持部材に、ワイヤーグリッド偏光子の一辺に取り付ける。このピンには偏光子支持部材が回転可能に取り付けられる（嵌め合わされる）。そして、上記偏光子支持部材のエッジ側面を、上記ピンを挟んで、ワイヤーグリッド偏光素子の平面と平行な方向に押す２個のねじを設ける。すなわち、フレームに取り付けた２個のねじが、偏光子支持部材の側面を、ピンを挟んで、ワイヤーグリッド偏光素子の平面と平行な方向に押すように構成する。
そして、２個のねじを押し引きすることにより、偏光子支持部材はピンを支点として回転移動し、これにより、偏光子支持部材に固定されたワイヤーグリッド偏光素子も該ワイヤーグリッド偏光素子の平面内で回転移動する。
（２）上記（１）において、ワイヤーグリッド偏光素子は、隣り合う偏光素子の端部を、上記光源からの光が通過する方向に間隔をあけて配置する。
（３）線状の光源からの光を偏光素子により偏光して出射する光照射部を備え、該光照射部からの偏光光を配向膜に対して照射する偏光光照射装置の上記偏光素子として、前記（１）または（２）偏光素子ユニットを用いる。
In the present invention, the above problem is solved as follows.
(1) A plurality of wire grid polarizing elements are arranged in a frame so that each end overlaps in a direction in which light from the light source passes, and individual wire grid polarizing elements arranged in the frame are arranged. A rotation moving means for rotating the wire grid polarization element in a plane is provided. And this rotational movement means is comprised so that only one side of a wire grid polarizing element may be pushed and rotated.
Specifically, a pin is provided on the frame of the polarizing element unit, and attached to one side of the wire grid polarizer on a polarizer support member having a hole that fits into the pin. A polarizer support member is rotatably attached (fitted) to this pin. Then, two screws are provided to push the edge side surface of the polarizer support member in a direction parallel to the plane of the wire grid polarization element with the pin interposed therebetween. That is, the two screws attached to the frame are configured to push the side surface of the polarizer support member in a direction parallel to the plane of the wire grid polarization element with the pin interposed therebetween.
Then, by pushing and pulling the two screws, the polarizer support member rotates around the pin as a fulcrum, so that the wire grid polarization element fixed to the polarizer support member is also within the plane of the wire grid polarization element. Rotate to move.
(2) In said (1), a wire grid polarizing element arrange | positions the edge part of an adjacent polarizing element at intervals in the direction through which the light from the said light source passes.
(3) As a polarizing element of a polarized light irradiation apparatus that includes a light irradiation unit that polarizes and emits light from a linear light source by a polarizing element, and irradiates the alignment film with polarized light from the light irradiation unit The (1) or (2) polarizing element unit is used.
本発明においては、以下の効果を得ることができる。
（１）ワイヤーグリッド偏光素子の、一辺だけを押し引きして回転させるようにしたので、回転時に偏光素子には力が加わらずひずみが生じない。
このため、出射する偏光光の偏光軸の回転を防ぐことができ、光照射面における偏光軸のばらつきが大きくなることがない。
（２）ワイヤーグリッド偏光素子の端部が重なるように並べて配置したので、偏光素子を回転させても偏光素子間に隙間ができず、無偏光光が漏れることがない。また、隣り合う偏光素子は、光源からの光が通過する方向に間隔を有して重なるように配置されているので、偏光素子を回転させても、偏光素子の周辺部が、こすれあうことがない。
In the present invention, the following effects can be obtained.
(1) Since the wire grid polarizing element is rotated by pushing and pulling only one side, no force is applied to the polarizing element during rotation, and no distortion occurs.
For this reason, rotation of the polarization axis of the emitted polarized light can be prevented, and variations in the polarization axis on the light irradiation surface do not increase.
(2) Since the end portions of the wire grid polarizing elements are arranged so as to overlap with each other, a gap is not formed between the polarizing elements even when the polarizing elements are rotated, and unpolarized light does not leak. In addition, since the adjacent polarizing elements are arranged so as to overlap with each other in the direction in which the light from the light source passes, even if the polarizing elements are rotated, the peripheral portion of the polarizing elements may be rubbed. Absent.
図１は本発明の実施例の偏光光照射装置の全体の概略構成を示す図、図２は図１の光照射部をＡ−Ａ断面で切断した側面断面図である。
本発明の偏光光照射装置は、例えばパターン化位相差フィルムを製造するために用いられるものであって、図１に示すように、集光部材４０を備えた光出射部１０と、光出射部１０からの光をストライプ状に整形するマスク４５とを備えた光照射部１００と、光照射部１００のランプに電力を供給する電源部７０と、電源部７０を始めとして光照射装置全体の動作を制御する制御部６０から構成されている。
マスク４５の下側には、図２に示すように、搬送手段５０が設けられ、搬送手段５０により被照射物Ｗが搬送され、被照射物Ｗに光照射部１００から出射する光が照射される。
なお、図１、図２には、光出射部１０から出射する光を偏光光に変える偏光素子ユニット５５がマスク４５の光入射側に設けられているが、これについては後述する。
FIG. 1 is a diagram showing an overall schematic configuration of a polarized light irradiation apparatus according to an embodiment of the present invention, and FIG. 2 is a side sectional view of the light irradiation part of FIG.
The polarized light irradiation apparatus of the present invention is used for manufacturing, for example, a patterned retardation film. As shown in FIG. 1, a light emitting unit 10 including a light collecting member 40 and a light emitting unit, as shown in FIG. 10 includes a light irradiation unit 100 including a mask 45 for shaping light from 10 in a stripe shape, a
As shown in FIG. 2, a conveying unit 50 is provided below the mask 45, and the irradiation object W is conveyed by the conveying unit 50, and the irradiation object W is irradiated with light emitted from the light irradiation unit 100. The
1 and 2, a polarizing element unit 55 that converts light emitted from the light emitting unit 10 into polarized light is provided on the light incident side of the mask 45, which will be described later.
上記光出射部１０は、複数の光源素子２１よりなる光源素子列２０と、この光源素子列２０からの光を、光源素子２１が並ぶ一方向に伸びる線状に集光する集光部材（シリンドリカル集光ミラー）４０とから構成され、これらがランプハウス１１内に収納されている。
ランプハウス１１の集光部材４０の下方には、集光部材４０の長手方向に沿って一方向に伸びる光出射用開口１２Ａが形成されている。
光出射部１０には、光源素子２１が一方向（図２において紙面に垂直な方向。以下、この方向を「Ｘ方向」ともいう。）に並ぶよう配置され、これらにより光源素子列２０が構成される。光源素子列２０における各光源素子２１は、ショートアーク型放電ランプ３０と、この放電ランプ３０を取り囲むよう配置された、当該放電ランプ３０からの光を反射するリフレクタ（楕円ミラー）２２とを有する。
The light emitting unit 10 includes a light source element array 20 composed of a plurality of
A light emitting opening 12 </ b> A extending in one direction along the longitudinal direction of the light collecting member 40 is formed below the light collecting member 40 of the lamp house 11.
In the light emitting unit 10, the
放電ランプ３０としては、例えば波長２７０〜４５０ｎｍの紫外光を高い効率で放射する超高圧水銀ランプを用いることができる。この放電ランプ３０は、発光部およびこの発光部の両端に連続するロッド状の封止部を有する発光管を備え、発光管内には、一対の電極３５が対向して配置されていると共に、水銀、希ガスおよびハロゲンが封入されている。このような放電ランプ３０においては、一対の電極間の電極間距離が例えば０．５〜２．０ｍｍ、水銀の封入量が例えば０．０８〜０．３０ｍｇ／ｍｍ３である。
リフレクタ２２は、その光軸Ｃを中心とする回転放物面状の光反射面２３を有するパラボラミラーにより構成されており、該リフレクタ２２は、その光軸Ｃが放電ランプ３０における発光管３１の管軸上に位置し、かつ、その焦点Ｆが放電ランプ３０における電極間の輝点に位置されるよう配置されている。
集光部材４０は、Ｘ方向に垂直な断面が放物線状の光反射面４１を有するシリンドリカルパラボラミラーにより構成されており、その長手方向はＸ方向に沿って伸び、その焦点ｆが被照射物Ｗの表面上に位置するよう配置されている。
この集光部材４０は、例えば、ワークへの光照射（露光）に必要な波長の紫外光のみを反射させ、不要な可視光および赤外光を透過させる波長選択コーティングが施されたコールドミラーであってもよい。
As the discharge lamp 30, for example, an ultra-high pressure mercury lamp that emits ultraviolet light having a wavelength of 270 to 450 nm with high efficiency can be used. The discharge lamp 30 includes a light-emitting portion and a light-emitting tube having a rod-shaped sealing portion that is continuous at both ends of the light-emitting portion. A pair of electrodes 35 are disposed in the light-emitting tube so as to face each other. , Rare gas and halogen are enclosed. In such a discharge lamp 30, the distance between the pair of electrodes is, for example, 0.5 to 2.0 mm, and the amount of mercury enclosed is, for example, 0.08 to 0.30 mg / mm 3 .
The reflector 22 is configured by a parabolic mirror having a rotary parabolic light reflecting surface 23 centered on the optical axis C. The reflector 22 has an optical axis C of the arc tube 31 in the discharge lamp 30. It is located on the tube axis, and its focal point F is disposed at the bright spot between the electrodes in the discharge lamp 30.
The condensing member 40 is constituted by a cylindrical parabolic mirror having a parabolic light reflecting surface 41 having a cross section perpendicular to the X direction, the longitudinal direction of which extends along the X direction, and the focal point f is the irradiation object W. It is arrange | positioned so that it may be located on the surface of.
The condensing member 40 is, for example, a cold mirror provided with a wavelength selective coating that reflects only ultraviolet light having a wavelength necessary for light irradiation (exposure) to a workpiece and transmits unnecessary visible light and infrared light. There may be.
マスク４５は、Ｘ方向に長尺な矩形の板状のものであって、集光部材４０の下方において、当該集光部材４０による反射光の光軸Ｌに対して垂直な平面に沿って配置されている。このマスク４５は、それぞれＸ方向に垂直な方向（図２において左右方向。以下、この方向を「Ｙ方向」ともいう。）に伸びる線状の多数の遮光部および多数の透光部がＸ方向に交互に並ぶよう配置されてなるものである。
被照射物Ｗは、例えば図２に示すようにローラー５１を有する搬送手段５０によってＹ方向に搬送され、マスク４５は、被照射物Ｗに対して離間して配置される。マスク４５と被照射物Ｗとの間の最小ギャップＧは、例えば５０〜１０００μｍである。
The mask 45 has a rectangular plate shape that is long in the X direction, and is disposed below the light collecting member 40 along a plane perpendicular to the optical axis L of the light reflected by the light collecting member 40. Has been. The mask 45 has a large number of linear light-shielding portions and a large number of light-transmitting portions extending in a direction perpendicular to the X direction (left and right direction in FIG. 2; hereinafter, this direction is also referred to as “Y direction”). Are arranged alternately.
For example, as shown in FIG. 2, the object to be irradiated W is transported in the Y direction by a transport unit 50 having a roller 51, and the mask 45 is disposed separately from the object W to be irradiated. The minimum gap G between the mask 45 and the irradiation object W is, for example, 50 to 1000 μm.
図３、図４、図５に本発明の実施例の偏光素子ユニットの構成を示す。図３（ａ）は、偏光素子ユニットを光入射側から見た平面図、図３（ｂ）は、（ａ）のＡ−Ａ断面図、図４は図３（ａ）のＢ−Ｂ断面図、図５は、偏光素子ユニットの各構成要素を分解して示した斜視図である。
従来例と同様に、偏光素子ユニット５５は、フレーム２内に、複数の四角形状のワイヤーグリッド偏光素子１（以下ＷＧ偏光素子）が並べて構成されている。また、偏光素子ユニット５５は、集光部材４０による反射光の光軸Ｌに対して垂直な平面に沿って配置されている。
図３−図５に示すように、それぞれの四角形状のＷＧ偏光素子１は、その一辺を偏光素子支持部材３により支持されている。図４、図５に示すように偏光素子支持部材３はＬ字形状であり、ＷＧ偏光素子１はそのＬ字の横棒（図５のＷＧ偏光素子を支持する台３ｃ）の上に接着剤９で固定されている。
3, 4 and 5 show the configuration of the polarizing element unit of the embodiment of the present invention. 3A is a plan view of the polarizing element unit as viewed from the light incident side, FIG. 3B is a cross-sectional view taken along line AA in FIG. 3A, and FIG. 4 is a cross-sectional view taken along line BB in FIG. FIG. 5 and FIG. 5 are exploded perspective views showing components of the polarizing element unit.
As in the conventional example, the polarizing element unit 55 is configured by arranging a plurality of rectangular wire grid polarizing elements 1 (hereinafter referred to as WG polarizing elements) in the frame 2. The polarizing element unit 55 is arranged along a plane perpendicular to the optical axis L of the reflected light from the light collecting member 40.
As shown in FIGS. 3 to 5, each rectangular WG polarizing element 1 is supported by a polarizing element support member 3 on one side. As shown in FIGS. 4 and 5, the polarizing element support member 3 is L-shaped, and the WG polarizing element 1 has an adhesive on the L-shaped horizontal bar (the table 3c for supporting the WG polarizing element in FIG. 5). 9 is fixed.
偏光素子支持部材３には、後述するフレーム２に設けた円柱状のピン４に嵌り合う貫通孔（ピン用貫通孔）３ａが形成されている。ピン用貫通孔３ａの径はピン４の径よりもやや大きい。このピン用貫通孔３ａの両脇には、偏光素子支持部材３をフレーム２に対して固定するための貫通孔（固定ねじ用貫通孔）３ｂが形成されている。
フレーム２は、底板２ｂと側板２ａとを備える。底板２ｂにはフレーム２に並べる偏光素子支持部材３の数（即ちＷＧ偏光素子１の数）だけ、円柱状のピン４が等間隔に並べて配置されている。また、このピン４の両脇には、偏光素子支持部材３を固定するためのねじ孔（固定ねじ用ねじ孔）２ｃが形成されている（図５参照）。
また、フレーム２の側板２ａには、ピン４の両脇に相当する位置に貫通するねじ孔２ｄが、偏光素子支持部材の数に対応した数だけ形成されている。このねじ孔２ｄは、偏光素子支持部材３を回転移動するためのねじ５ａ，５ｂを取り付けるために用いる。
The polarizing element support member 3 is formed with a through hole (pin through hole) 3a that fits into a cylindrical pin 4 provided in the frame 2 described later. The diameter of the pin through hole 3 a is slightly larger than the diameter of the pin 4. On both sides of the pin through-hole 3a, through-holes (fixing screw through-holes) 3b for fixing the polarizing element support member 3 to the frame 2 are formed.
The frame 2 includes a bottom plate 2b and a side plate 2a. On the bottom plate 2b, as many polarizing pins 4 as the number of polarizing element support members 3 arranged on the frame 2 (that is, the number of WG polarizing elements 1) are arranged at equal intervals. Further, screw holes (fixed screw screw holes) 2c for fixing the polarizing element support member 3 are formed on both sides of the pin 4 (see FIG. 5).
Further, the side plate 2a of the frame 2 is formed with screw holes 2d penetrating to positions corresponding to both sides of the pin 4 in a number corresponding to the number of polarizing element support members. The screw hole 2d is used to attach screws 5a and 5b for rotating the polarizing element support member 3.
なお、ピン４の形状は必ずしも円柱形状である必要はなく、要するに偏光素子支持部材３をピン４を軸として回転可能に支持できる構造であれば、その他の形状であってもよい。図６にピンのその他の形状例を示す。
図６（ａ）（ｃ）はピンの上面図、（ｂ）（ｃ）は斜視図を示し、同図（ａ）（ｂ）はピン４を円柱形状と円錐台形状を組み合わせた形状とした例である。また、同図（ｃ）（ｄ）は、同図（ａ）（ｂ）に示すピンにおいて、ピンの軸に垂直な方向の上下の２曲面をそれぞれ２つの平面で切り欠いた例である。
図３−図５に示すように、隣り合う２枚のＷＧ偏光子１は、隙間から無偏光光が漏れないように、入射する光の光軸方向に対して、周辺部が上下に重なり合うように設ける。そのため、隣り合う偏光素子支持部材３は、ＷＧ偏光素子１を固定する台３ｃの部分が、光軸方向に対して高さが異なる。
後述するように、各ＷＧ偏光素子１は回転させて位置を調整するが、この時、隣り合うＷＧ偏光素子１の周辺部が、こすれあわないようにしなければならない。そこで、図３、図４に示すように、隣り合うＷＧ偏光素子１が数ミリの間隔を有して重なるように、偏光素子支持部材のＷＧ偏光素子を支持する台の高さを設計している。
ＷＧ偏光素子１の、偏光素子支持部材２を取り付けた辺に対向する辺には、ＷＧ偏光素子１が自重により下方にたわむのを防ぐための偏光素子たわみ防止板７が接着剤９により取り付けられている。
偏光素子たわみ防止板７は、偏光素子支持部材３と同様、ＷＧ偏光素子１を固定する台を有するＬ字形状であり（図３、図４参照）、各ＷＧ偏光素子１を回転させる際には、フレーム２の底板２ｂ上を滑って移動する。
In addition, the shape of the pin 4 does not necessarily need to be a cylindrical shape, and may be any other shape as long as the polarizing element support member 3 can be rotatably supported around the pin 4 as an axis. FIG. 6 shows another example of the shape of the pin.
FIGS. 6A and 6C are top views of the pins, FIGS. 6B and 6C are perspective views, and FIGS. 6A and 6B show the pins 4 in a shape combining a cylindrical shape and a truncated cone shape. It is an example. FIGS. 7C and 7D are examples in which two upper and lower curved surfaces in a direction perpendicular to the pin axis are cut out by two planes in the pins shown in FIGS.
As shown in FIG. 3 to FIG. 5, the two adjacent WG polarizers 1 have their peripheral portions overlapping vertically with respect to the optical axis direction of the incident light so that unpolarized light does not leak from the gap. Provided. Therefore, the adjacent polarizing element support members 3 have different heights with respect to the optical axis direction in the portion of the base 3c that fixes the WG polarizing element 1.
As will be described later, each WG polarizing element 1 is rotated to adjust the position. At this time, it is necessary to prevent the peripheral portions of adjacent WG polarizing elements 1 from rubbing. Therefore, as shown in FIGS. 3 and 4, the height of the stage that supports the WG polarizing element of the polarizing element supporting member is designed so that the adjacent WG polarizing elements 1 overlap each other with a spacing of several millimeters. Yes.
A polarizing element deflection preventing plate 7 for preventing the WG polarizing element 1 from bending downward due to its own weight is attached to the side of the WG polarizing element 1 opposite to the side where the polarizing element support member 2 is attached by an adhesive 9. ing.
Like the polarizing element support member 3, the polarizing element deflection preventing plate 7 has an L shape having a base for fixing the WG polarizing element 1 (see FIGS. 3 and 4), and is used when each WG polarizing element 1 is rotated. Moves slidingly on the bottom plate 2b of the frame 2.
各偏光素子支持部材（ＷＧ偏光素子）３を、光軸の周りに回転させる機構について説明する。
フレーム２の底板２ｂに設けたピン４に、偏光素子支持部材３のピン用貫通孔３ａを差し込む。偏光素子支持部材３をピン４に差し込んだ時に、偏光素子支持部材３とフレーム２の側板２ａとの間に数ミリのギャップ８ａ（隙間）が形成されるように設計しておく。ピン用貫通孔３ａの径はピン４の径よりもやや大きいので、偏光素子支持部材３は、ピン４を回転軸として、側板２ａとのギャップ８ａの分だけ回転する。
フレーム２の側板２ａに形成している２個のねじ孔２ｄのそれぞれに、偏光素子支持部材３の回転用のねじ５ａ、ねじ５ｂを取り付ける。取り付けた２個のねじ５ａとねじ５ｂの先端は、偏光子支持部材３のエッジ側面を、ピン４を挟むようなかたちで、ＷＧ偏光素子１の平面（光が入出射する面）と平行な方向に押す。
A mechanism for rotating each polarizing element support member (WG polarizing element) 3 around the optical axis will be described.
The pin through hole 3 a of the polarizing element support member 3 is inserted into the pin 4 provided on the bottom plate 2 b of the frame 2. When the polarizing element support member 3 is inserted into the pin 4, a gap 8a (gap) of several millimeters is formed between the polarizing element support member 3 and the side plate 2a of the frame 2. Since the diameter of the pin through-hole 3a is slightly larger than the diameter of the pin 4, the polarizing element support member 3 rotates about the pin 4 as the rotation axis by the gap 8a with the side plate 2a.
Screws 5a and 5b for rotating the polarizing element support member 3 are attached to the two screw holes 2d formed in the side plate 2a of the frame 2, respectively. The tips of the two screws 5a and 5b that are attached are parallel to the plane of the WG polarizing element 1 (the surface on which light enters and exits) in such a manner that the edge side surface of the polarizer support member 3 sandwiches the pin 4. Push in the direction.
図７は、ＷＧ偏光素子を回転移動させる具体的な手順を示す図である。
図７（ａ）の状態から、図７（ｂ）に示すように、ねじ５ａをフレーム２の側板２ａから抜く方向に移動し、ねじ５ｂをフレーム２の側板２ａに押し込むように移動すると、ＷＧ偏光素子１はその平面内で右周りに回転する。反対に図７（ｃ）に示すように、ねじ５ａをフレーム２の側板２ｂに押し込むように移動し、ねじ５ｂをフレーム２の側板２ａから抜く方向に移動すると、ＷＧ偏光素子１はその平面内で左周りに回転する。
なお、偏光素子支持部材３とは反対側に取り付けている偏光素子たわみ防止板７と、フレーム２の側板２ａとの間にも、数ミリのギャップ（隙間）８ｂが形成されるようにして（図３、図４参照）、ＷＧ偏光子１の回転が妨げられないようにしておく。これにより偏光素子たわみ防止板７は、ＷＧ偏光素子１を回転移動させるとき、フレーム２の底板２ｂ上を滑って移動することができる。
ＷＧ偏光素子１を必要な位置まで回転させたら、固定ねじ６ａ，６ｂを締めて、偏光素子支持部材３が回転しないように固定する。
なお、偏光素子支持部材３が回転しないように固定する手段としては、上記固定ねじ６ａ，６ｂを設ける代わりに、例えば偏光素子支持部材３を回転させるためのねじ５ａ，５ｂに回り止めを設けて、ＷＧ偏光素子１を必要な位置まで回転させたらねじ５ａ，５ｂが回転しないように回り止めをする等、その他の手段を用いることもできる。
FIG. 7 is a diagram showing a specific procedure for rotating the WG polarizing element.
When the screw 5a is moved in the direction of removing from the side plate 2a of the frame 2 and the screw 5b is pushed into the side plate 2a of the frame 2 from the state of FIG. The polarizing element 1 rotates clockwise in the plane. On the other hand, as shown in FIG. 7 (c), when the screw 5a is moved so as to be pushed into the side plate 2b of the frame 2 and the screw 5b is moved in the direction of removing from the side plate 2a of the frame 2, the WG polarizing element 1 is moved in the plane. To rotate counterclockwise.
In addition, a gap (gap) 8b of several millimeters is formed between the polarizing element deflection preventing plate 7 attached to the side opposite to the polarizing element support member 3 and the side plate 2a of the frame 2 (see FIG. 3 and FIG. 4), and the rotation of the WG polarizer 1 is not disturbed. Accordingly, the polarizing element deflection preventing plate 7 can slide on the bottom plate 2b of the frame 2 when the WG polarizing element 1 is rotated.
When the WG polarizing element 1 is rotated to a required position, the fixing screws 6a and 6b are tightened to fix the polarizing element support member 3 so as not to rotate.
As means for fixing the polarizing element support member 3 so as not to rotate, instead of providing the fixing screws 6a and 6b, for example, a screw 5a and 5b for rotating the polarizing element support member 3 is provided with a detent. When the WG polarizing element 1 is rotated to a required position, other means such as preventing rotation of the screws 5a and 5b may be used.
このようにして、フレーム２内に並べた複数のＷＧ偏光子１を回転させて、各ＷＧ偏光素子１のグリッドの方向が揃うように位置を調整する。ワイヤーグリッド偏光素子１の一辺だけを偏光素子支持部材３を介して押しひきして回転するので、回転時に偏光素子には力が加わらずひずみが生じない。したがって、出射する偏光光の偏光軸の回転を防ぐことができ、光照射面における偏光軸のばらつきが大きくなることがない。
なお、上記実施例においては、光源素子２１として、ショ−トアーク型放電ランプを例にして説明した。しかし、光源素子２１として紫外線を放射するＬＥＤを使用しても良い。また、線上の光照射部を形成するのに、複数の光源素子を一方向に並べることに代えて、１本の一方向に長い棒状の放電ランプを配置しても良い。
In this way, the plurality of WG polarizers 1 arranged in the frame 2 are rotated to adjust the positions so that the grid directions of the WG polarization elements 1 are aligned. Since only one side of the wire grid polarizing element 1 is pushed through the polarizing element support member 3 and rotated, no force is applied to the polarizing element and no distortion occurs during rotation. Therefore, rotation of the polarization axis of the emitted polarized light can be prevented, and variations in the polarization axis on the light irradiation surface do not increase.
In the above embodiment, a short arc type discharge lamp has been described as an example of the
１ ワイヤーグリッド偏光素子（ＷＧ偏光素子）
２ フレーム
２ａ 側板
２ｂ 底板
２ｃ 固定ねじ用ねじ孔
２ｄ ねじ孔
３ 偏光素子支持部材
３ａ ピン用貫通孔
３ｂ 固定ねじ用貫通孔
３ｃ 偏光素子を支持する台
４ ピン
５ａ，５ｂ ねじ
６ａ，６ｂ 固定ねじ
７ 偏光素子たわみ防止板
８ａ，８ｂ ギャップ
９ 接着剤
１０ 光出射部
１１ ランプハウス
２０ 光源素子列
２１ 光源素子
２２ リフレクタ（楕円ミラー）
３０ ショートアーク型放電ランプ
４０ 集光部材
４５ マスク
５０ 搬送手段
５５ 偏光素子ユニット
６０ 制御部
７０ 電源部
１００ 光照射部
Ｗ 被照射物
1 Wire grid polarizing element (WG polarizing element)
2 Frame 2a Side plate 2b Bottom plate 2c Fixing screw screw hole 2d Screw hole 3 Polarizing element support member 3a Pin through hole 3b Fixing screw through hole 3c Base 4 supporting polarizing element Pins 5a, 5b Screws 6a, 6b Fixing screw 7 Polarizing element deflection preventing plates 8a and
30 Short Arc Type Discharge Lamp 40 Condensing Member 45 Mask 50 Conveying Means 55
Claims (3)
複数のワイヤーグリッド偏光素子を、各々の端部が上記光源からの光が通過する方向に重なるようにフレーム内に並べて配置し、
上記フレームには、並べて配置した個々のワイヤーグリッド偏光素子を、該ワイヤーグリッド偏光素子の平面内で回転移動させる回転移動手段が設けられ、
上記回転移動手段は、
フレームに設けたピンと、
矩形状に整形されたワイヤーグリッド偏光子の１辺を固定するとともに、上記ピンに回転可能に嵌り合う孔を形成した偏光子支持部材と、
上記偏光子支持部材のエッジ側面を、上記ピンを挟んで、ワイヤーグリッド偏光素子の平面と平行な方向に押す２個のねじとを備え、
上記２個のねじを押し引きにより、上記ピンを支点として、上記偏光子支持部材に固定されたワイヤーグリッド偏光素子が、該ワイヤーグリッド偏光素子の平面内で回転移動する
ことを特徴とする偏光素子ユニット。 A polarizing element unit that polarizes light from a light source,
A plurality of wire grid polarization elements are arranged side by side in the frame so that each end overlaps the direction in which the light from the light source passes,
The frame is provided with rotational movement means for rotating and moving individual wire grid polarization elements arranged side by side within the plane of the wire grid polarization element,
The rotational movement means is
A pin provided on the frame;
While fixing one side of the wire grid polarizer shaped in a rectangular shape, a polarizer support member formed with a hole that fits rotatably on the pin;
Two screws that push the edge side surface of the polarizer support member in a direction parallel to the plane of the wire grid polarization element across the pin,
The polarizing element characterized in that the wire grid polarizing element fixed to the polarizer support member rotates and moves within the plane of the wire grid polarizing element with the pin as a fulcrum by pushing and pulling the two screws. unit.
ことを特徴とする請求項１に記載の偏光素子ユニット。 2. The polarizing element unit according to claim 1, wherein the wire grid polarizing element has end portions of adjacent polarizing elements arranged at intervals in a direction in which light from the light source passes.
上記偏光素子として、請求項１または請求項２の偏光素子ユニットを用いた
ことを特徴とする偏光光照射装置。
A polarized light irradiation apparatus that includes a light irradiation unit that polarizes and emits light from a linear light source by a polarizing element, and irradiates the alignment film with polarized light from the light irradiation unit,
A polarized light irradiation apparatus using the polarizing element unit according to claim 1 or 2 as the polarizing element.
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