JP2012141094A - Flexible heat sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thin, lightweight and flexible heat sheet with an easy structure and a suppressed manufacturing cost, the heat sheet maintaining performance thereof even when repeating bending thereof.SOLUTION: The flexible heat sheet includes a plurality of spacer members and a hydraulic fluid inside a bag-shaped film-made sheet having grooves on an inner side of at least one side surface. An inner surface formed with the grooves, of the bag-shaped film-made sheet is plasma-processed to enhance its affinity with the hydraulic fluid, thereby enhancing movement efficiency of the hydraulic fluid. Water may be used as the hydraulic fluid.

Description

  The present invention relates to a heat pipe that can efficiently dissipate heat energy from a heat source and dissipate heat even at a position away from the heat source, and in particular, can be reduced in thickness and weight, and in the vertical direction. The present invention relates to a flexible heat sheet having a deformable flexibility.

  Electronic components mounted on various electric devices such as personal computers, AVs, and home appliances generate heat during use. When an electronic component is excessively heated, its performance deteriorates, so that the operation of the electric device becomes unstable and causes a failure. Therefore, it is essential to take measures against heat generated by the electronic components, and measures to dissipate heat by a fan or the like are taken.

Due to the recent high performance of various electrical devices, the amount of heat generated by electronic components has further increased, and electronic components have been mounted at a high density to reduce the thickness and weight of electrical devices, increasing the heat generation density. . That is, the electronic component may generate an excessive temperature rise more than before, and may be exposed to a high temperature by heat generated by other electronic components. That is, a heat dissipating component that efficiently dissipates heat generated by the electronic component mounted on the electric device is essential. The heat generation density of the CPU, which is characteristic as a high heat generation component, exceeded 60 W / cm ^2, which is said to be the limit of air cooling in 2004, and it is difficult to cope with conventional heat pipes processed with metal, and a new heat pipe that can cope with this Is desired. As one of them, there is a demand for a heat pipe having a housing made of a resin excellent in adhesiveness or workability at a contact surface between a heat pipe and a semiconductor such as CPU. Conventionally, in order to efficiently dissipate high heat generating devices, there are limitations on the mounting surface, such as mounting high heat generating devices at positions where heat dissipation effect is high. From this point of view, a flexible heat dissipating component that can mount the mounting position of the electronic device without being constrained by the heat dissipating component is strongly desired.

  For example, in a personal computer, in order to dissipate heat generated from a central processing unit (CPU) or the like, heat dissipation measures using a heat pipe using a metal pipe container such as copper are taken (see Patent Document 1). Further, in recent electronic devices that have been made thinner, lighter, and smaller, a heat dissipation measure is taken with a sheet-like heat pipe that is thin and excellent in flexibility (see Patent Document 2).

  In a general heat pipe structure, the working medium (hydraulic fluid) evaporates at one end close to the heat generating part to become vapor, and this vapor is in close contact with the heat radiating part through the fluid flow path in the heat pipe. Move to the other end. The vapor of the working fluid that has moved to the heat radiating portion is cooled and condensed to return to the liquid, and again moves to the other end that is in close contact with the heat generating portion. By repeating the movement of the working fluid by evaporation and condensation, the heat generated in the heat generating part of the electronic device can be efficiently cooled by the heat radiating part. The heat pipe pipe has a capillary structure called a wick, and the working medium is continuously recirculated by the capillary force of the wick.

JP 2008-196787 A JP 2001-165854 A

  Since the heat pipe of patent document 1 forms the container using metal with good heat conductivity, such as copper, it can transfer heat efficiently. However, it is difficult to reduce the weight of a metal pipe container, and there is a problem that the degree of freedom in shape and flexibility are poor. Therefore, the mounting position of the electronic device is limited in the position of the heat pipe, and when there is a gap between the mounting of the electric device and a gap is generated between the heat pipe, it is difficult to easily correct the mounting position. There is a problem that contact heat conduction cannot be secured.

  In the sheet-like heat pipe of Patent Document 2, since the container is formed into a sheet shape using a film material, the sheet-like heat pipe is thin, lightweight, flexible, and can be used for a movable part. However, this sheet-like heat pipe is a container formed by laminating two films of metal foil or the like with a sealant layer. Therefore, when repeatedly bent, the sealing performance deteriorates, and gas such as air is discharged into the container. Phenomenon that flows into the interior tends to occur. As a result, there is a problem that a predetermined pressure cannot be maintained inside the container, the performance of the heat pipe is greatly deteriorated, and it is difficult to guarantee sufficient reliability.

  Further, the sheet-like heat pipe described above uses a wick to recirculate the working medium. As this wick, a metal mesh wire, a porous metal sintered body, or a container provided with a fine groove structure to give a capillary force is known. However, when a wick is used, the structure becomes complicated, so that stable mass production in a sheet form is difficult. Moreover, since quality control is difficult, there exists a problem which becomes expensive. In addition, the wick is liable to be contaminated inside the container, and the reflux performance is likely to be deteriorated.

  Further, in the above heat pipe, a heat exchange medium such as Freon gas is used, which is expensive. If these heat pipes are used in places where high-efficiency heat exchange is required in a narrow area, such as an electronic device such as a PC, this is sufficient, but for example, when used for a snow melting device on a road or roof, A heat pipe having a large area is required, and the cost of the conventional heat pipe is high, which is an obstacle to practical use in these fields.

  The present invention has been made paying attention to the above-described problems, and provides a flexible heat sheet that is thin, lightweight, flexible, can maintain its performance even after repeated bending, has a simple structure, and is inexpensive. For the purpose.

  In order to achieve the above object, the flexible heat sheet according to the first aspect of the present invention is a bag-like film in which one or two types of flexible film-like sheets are stacked and sealed in a bag shape. The sheet is enclosed within the bag-shaped film sheet and moved between a heat absorbing portion and a heat radiating portion provided in the vicinity of opposite ends on the bag-shaped film sheet to transfer thermal energy. A working medium, a plurality of grooves formed along the moving direction of the working medium, formed on the inner surface of at least one of the bag-like film sheet, and disposed inside the bag-like film sheet; A plurality of spacers for maintaining a flow path through which the working medium moves, and a portion having at least the plurality of grooves of the bag-like film sheet is for increasing the surface tension of the working medium. Wherein the surface treatment is applied.

  In this way, by performing surface treatment on the groove portion formed on the inside of at least one surface of the bag-like film sheet, the wettability of the groove surface is improved and the working medium can be efficiently refluxed. . In addition, since the working medium is refluxed by the groove, the quality control can be easily performed. Furthermore, since the spacer is provided on the inner surface of the bag-like film sheet, the flow path of the working medium can be maintained even when the internal pressure inside the film sheet is low.

  The flexible heat sheet according to the second aspect of the present invention is characterized in that a plurality of the spacers are arranged along the groove. Thus, since the spacer is provided along the groove, the spacer functions as a guide for guiding the working medium, thereby enabling more efficient heat transfer.

The flexible heat sheet according to the third aspect of the present invention is characterized in that the inside of the bag-shaped film sheet is depressurized to an atmospheric pressure or lower. Thereby, it becomes possible to improve the heat exchange efficiency in the vicinity of normal temperature.

The flexible heat sheet according to the fourth aspect of the present invention is such that, even if the film-like sheet depressurizes the bag-like film sheet to an atmospheric pressure or less, the movement path of the working medium is formed by the spacer. It is characterized by having possible rigidity. Thereby, it becomes possible to maintain the inside of a bag-shaped film sheet in a reduced pressure state while maintaining the flexibility of the film.

  In the flexible heat sheet according to the fifth aspect of the present invention, at least part or all of the surface of the bag-shaped film sheet on which the groove is formed is irradiated with plasma to increase the surface affinity. It is characterized by being processed. By irradiating with plasma, the wettability with the working fluid on the film sheet surface is improved, and the surface tension can be increased.

  The flexible heat sheet according to the sixth aspect of the present invention is characterized in that the working medium is made of water. By using water as a working medium without using chlorofluorocarbon or the like, which may cause environmental damage, a flexible sheet that is easy to leak and fill can be provided. When water is used in this way, when the operating temperature is lower than 100 ° C., it is necessary to keep the inside of the flexible heat sheet at atmospheric pressure or lower, and in the present invention, in order to prevent the internal pressure from becoming atmospheric pressure, Therefore, the flow path through which the working medium moves is maintained.

  The flexible heat sheet according to the seventh aspect of the present invention is a thin heat transfer made of a material having a high thermal conductivity at least at the position of the heat absorption part and the heat radiation part of the outer surface of the sheet on which the groove of the film sheet is formed. A feature is provided.

The flexible heat sheet according to an eighth aspect of the present invention is an elongated spacer member in which the spacer extends along the groove and has notches at regular intervals, and the spacer member is at least the bag-shaped film sheet. It has the flexibility which bends in the up-down direction. By using an elongated spacer member extending along the groove in this way, it is possible to increase the efficiency of transferring the working medium in a reduced pressure state that withstands atmospheric pressure outside the flexible heat sheet and operates at 100 ° C. or lower. In addition, the flexibility of the flexible heat sheet can be maintained by providing the spacer member with flexibility in the vertical direction.

The flexible heat sheet according to a ninth aspect of the present invention is characterized in that a plurality of the spacer members are provided, and the plurality of spacer members are connected by thin holding members having flexibility.

The flexible heat sheet according to the tenth aspect of the present invention is characterized in that the heat transfer section is formed by vacuum-depositing a metal material on a desired film outer surface. The heat transfer portion that is vacuum-deposited can reduce the heat resistance of the heat generating portion or the heat radiating portion, and can more effectively suppress the leakage of the working fluid.

The flexible heat sheet according to another aspect of the present invention includes a bag-shaped film sheet in which one or two types of flexible film-shaped sheets are stacked and sealed in a bag shape, and the bag-shaped film-made sheet. A working medium that is sealed inside the sheet and moves between a heat absorbing portion and a heat radiating portion provided in the vicinity of opposing ends on the bag-shaped film sheet, and transfers heat energy; and the bag-shaped film A flexible thin plate-like member enclosed in a sheet, a plurality of grooves formed on at least one surface of the thin plate-like member and provided along a moving direction of the working medium, and the thin plate A plurality of spacers that are disposed between the sheet-like member and the bag-shaped film sheet, and maintain a flow path through which the working medium moves;
And at least a portion of the thin plate-like member having the plurality of grooves is subjected to a surface treatment for increasing the surface energy of the grooves.

The flexible heat sheet according to still another aspect of the present invention includes a bag-like film sheet in which one or two types of flexible film-like sheets are stacked and sealed in a bag shape, and the bag-like film. A working medium encapsulated inside a sheet-made sheet and moved between a heat-absorbing part and a heat-radiating part provided in the vicinity of opposing ends on the sheet-like film-like sheet, and the bag-like film Formed on at least one inner surface of at least one sheet-made sheet and at least one surface of a flexible thin plate-like member enclosed in the bag-shaped film sheet, and provided along the moving direction of the working medium A plurality of grooves, and a plurality of spacers arranged between the bag-shaped film sheet and the thin plate-like member and maintaining a flow path through which the working medium moves, and the bag-shaped film sheet And a portion having at least the plurality of grooves of said thin plate-like member, characterized in that the surface treatment to increase the surface tension of the working medium is applied.

  According to the present invention, it is possible to use, for example, water as a heat exchange medium, and it is thin, lightweight and flexible, maintains its performance even after repeated bending, has a simple structure, and has a low manufacturing cost. A sheet can be obtained.

It is a front view which shows the flexible heat sheet which concerns on one Embodiment of this invention. (A) is sectional drawing of the short direction of the flexible heat sheet | seat shown in FIG. 1, (b) is the partially expanded sectional view which expanded a part of flexible sheet | seat shown in (a), (c) is (b). It is a partially expanded sectional view which shows the state by which the working medium was enclosed with the flexible heat sheet | seat shown in FIG. Sectional drawing of the elongate direction of the flexible heat sheet | seat shown in FIG. It is a figure which shows an example of the internal block diagram of the flexible heat sheet which concerns on this invention. It is a perspective view which shows the spacer part structure which comprises the flexible heat sheet which concerns on this invention. It is a perspective view for demonstrating the other Example of the spacer of this invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 shows the appearance of a flexible heat sheet according to an embodiment of the present invention, FIG. 2 (a) is a cross-sectional view of the flexible heat sheet shown in FIG. 1, and FIG. 2 (b) is FIG. FIG. 2C is a partially enlarged cross-sectional view showing a state where a heat exchange working medium (working fluid) is put in FIG. 2B. 3 is a cross-sectional view in the longitudinal direction, and FIG. 4 is a view showing the internal structure of the flexible sheet in FIG.

  As shown in FIGS. 1 to 3, the flexible heat sheet 10 according to the present embodiment has a bag-like film sheet shape, and a working medium 29 for heat exchange is enclosed therein. . The bag-shaped film sheet 19 is produced by superimposing rectangular film sheets 17a and 17b and thermally welding the peripheral portions 13a, 13b, and 13c indicated by diagonal lines with, for example, a heat bar.

  The film sheets 17a and 17b are preferably formed of a synthetic resin sheet having a sealing property and a certain flexibility. For example, polyethylene terephthalate (PET) can be used. Here, “certain flexibility” means that a reduced-pressure space below atmospheric pressure is maintained between the bag-shaped film sheet 19 and an internal spacer (described later) even when the pressure is reduced to atmospheric pressure. And a certain degree of flexibility that can flexibly deform at least the plane of the bag-like film sheet in the vertical direction. Further, the “sealing performance” refers to a sealing performance to such an extent that when the water or other working medium is vaporized (evaporated), the gas does not leak to the outside and the gas does not enter from the outside.

In this embodiment, as shown in the partially enlarged view of FIG. 2B, a groove 20 is formed on the inner surface of one side of the bag-shaped film sheet 19. A liquid working medium 29 moves along the groove 20 in the direction of the heat source (in the direction of the heat absorbing portion) by capillary force. The working medium 29 evaporates by receiving heat energy from the heat source in the vicinity of the heat absorbing portion. The evaporated working medium 29 moves in the bag-shaped film sheet 19 toward the cooling unit, and is cooled by the cooling unit to release (dissipate) thermal energy and condense (liquefy). In this way, heat exchange by the working medium 29 and heat exchange by heat radiation are repeated, so that the heat energy from the heat source is moved toward the cooling unit, and the heat source can be efficiently cooled.
In this embodiment, the groove 20 is provided only on one side of the bag-shaped film sheet, but the groove 20 may be provided on both surfaces of the inner surface of the bag-shaped film sheet.

2 (b) and 2 (c), the groove 20 has a V-shaped cross section, but the bottom surface of the groove may be a horizontal U-shaped groove or a semicircular shape, It does not matter if it is a cross section that fills the entire groove. The groove cross-sectional area is preferably about 0.03 to 0.5 mm ² . As the cross-sectional area, shape, width, and depth of the groove, optimum values and shapes can be appropriately used in consideration of the heat load of the flexible heat sheet, the working medium, the capillary force, and the like.

Further, the groove 20 of the bag-like film sheet 19 is subjected to surface treatment such as plasma treatment. By this surface treatment, the contact angle between the sheet and the working fluid at the groove interface becomes an acute angle, the surface tension of the inner surface of the groove 20 becomes strong, and the working medium 29 can be actively moved. This phenomenon is due to the fact that the surface energy of the film sheets 17a and 17b is increased by the plasma treatment, so that when the hydraulic fluid 29 touches the surface, a force acts in the direction of lower energy. The plasma treatment in the present invention is performed, for example, in an atmosphere of Ar, N ₂ , O ₂ , CF ₄ or a mixed gas thereof. The film sheet 17a is placed in the gas atmosphere. In this state, the gas is turned into plasma by the microwave of 1000 to 6000 W, and the energy of the surface of the groove 20 is increased. Thereby, the contact angle with the working fluid in the groove 20 becomes an acute angle, and the surface tension is greatly improved. The treatment of the groove 20 is not limited to the plasma treatment, and other methods may be adopted as long as the treatment can improve the surface tension such as metal plating with high surface energy and improve the surface tension.

  A heat transfer member 15 made of a high thermal conductivity material having a low thermal resistance, such as a metal plate, is attached to a part of the outer surface side of the film sheet 17a in which the groove 20 is formed. The heat transfer member 15 does not necessarily have to be provided on the entire outer surface, but is attached at least to the positions of the heat absorbing portion and the heat radiating portion. Further, it is desirable that the heat transfer member 15 can maintain the flexibility of the film, for example, by depositing a thin film metal (such as stainless steel) on the entire outer surface of the 17a.

  In the conventional heat pipe, in order to increase efficiency, the working fluid is vaporized (evaporated) and condensed (liquefied) as a working fluid at a relatively low temperature of 100 ° C. or less, which is a normal operating temperature of about 50 ° C., such as CFC gas. (Phase change) is used. However, in this invention, it is set as the structure which can use water as a hydraulic fluid. By using water as the working medium, it is possible to reduce the cost, and it can be easily applied to the leakage and filling of the working fluid, can be adapted to the environment, and can be installed on large areas such as roads and roofs. Become. This makes it possible to expand the field of use such as a heat melting snow sheet.

  As shown in FIG. 4, the bag-shaped film sheet 19 is provided with a plurality of spacers 25 between both film sheets 17a and 17b. This maintains the inside of the bag-like film sheet in a reduced pressure state lower than the atmospheric pressure, and has a function of securing a space (fluid channel 27) in the bag-like film sheet. As described above, since the working fluid preferably undergoes a phase change of evaporation / condensation at a relatively low temperature of about room temperature to about 50 degrees as described above, the internal pressure of the bag-shaped film sheet is reduced to an atmospheric pressure or less. It is desirable.

In particular, when water is used as the working fluid, it is desirable to evaporate the working fluid at 100 ° C. or less by reducing the internal space of the bag-shaped film sheet from atmospheric pressure. If the internal pressure is reduced below the atmospheric pressure in this way, the bag-like sheet is contracted by the atmospheric pressure because it has flexibility, and not only the fluid flow path 27 cannot be maintained, but also the vapor inside the sheet. Becomes atmospheric pressure, and operation at 100 ° C. or lower becomes impossible. Therefore, especially when water is used as the working fluid, in order to maintain a reduced pressure in the internal space in the sheet, a flexible sheet having a certain rigidity is used to form a bag-like film sheet, It is desirable to provide a spacer for keeping a predetermined space.

  The plurality of spacers are desirably arranged in alignment with the direction in which the working medium flows. In the present embodiment, as shown in FIG. 3, long spacer members 25 that are continuous in the longitudinal direction are arranged at regular intervals. As shown in FIG. 5, the spacer member 25 is provided with notches 30 at regular intervals. The notch 30 allows the long spacer member 25 to be deformed in the vertical direction along the direction perpendicular to the direction in which the hydraulic fluid flows (the direction of the arrow B shown in FIGS. 4, 5, and 6). It is provided to ensure the flexibility of the film heat sheet. Therefore, the shape of the notch can be appropriately selected as a shape that allows the long space member to be deformed in the vertical direction.

  As can be seen from FIG. 5 and the like, the continuous long spacer member 25 is connected by a plurality of holding members 23. The holding member 23 is preferably made of a strong material that is thin and elastic, such as a steel wire. The holding member 23 can keep the intervals between the plurality of spacer members 25 constant and can deform the film heat sheet in the vertical direction along the same direction as the moving direction of the working medium 29 (arrow B direction). To. Since the holding member 23 crosses the fluid flow path 27, it is desirable to make it as thin as possible so that the fluid flow path 27 is not shielded as much as possible.

  The plurality of spacer members 25 and the holding member 23 are preferably arranged in a direction perpendicular to the plurality of spacer members 25 by arranging the plurality of spacer members 25 in parallel with the moving direction of the working medium. With this configuration, the fluid flow path 27 through which the working medium 29 circulates is formed. The plurality of spacer members 25 and the plurality of holding members 23 are preferably formed of an elastic material. In this embodiment, the spacer member 25 uses a plastic resin, and the holding member 23 is a thin steel wire as a reinforcement. I use it. The spacer member 25 is preferably treated by water repellent treatment so that the hydraulic fluid does not stay.

As described above, the holding member 23 and the spacer member 25 are combined as shown in FIG. 3, the bag-like film sheet 19 is enclosed along the longitudinal direction, and the working medium 29 is used to fill the bag-like film sheet 19. Then, the flexible heat sheet 10 according to the present embodiment shown in FIG. 1A can be formed by welding the opened peripheral edge portion 13d. In addition, although the example which used water as the working medium 29 in this embodiment was demonstrated, you may use a well-known hydraulic fluid as long as it is a hydraulic fluid with good tolerance with resin, without being limited to water.

  Further, as the spacers, a plurality of short spacer members 33 may be arranged along the fluid flow path 27 as shown in FIG. The spacer may be disposed by adhering the spacer to one film-like sheet, but a short spacer made of plastic or the like is formed in the hole by making a hole of about 0.5 mm in depth using a laser beam or the like on the film surface. It is desirable that the member 33 is fixed by being protruded from the inner surface of the film by about several mm toward the inside by inserting the member 33. The spacer is not limited to these shapes, and may be any shape that does not hinder the two-dimensional flexibility (described later) of the flexible heat sheet as described above.

  The flexible heat sheet 10 of this embodiment can adjust the application temperature range by adjusting the internal pressure of the bag-shaped film sheet 19 and can be applied from room temperature to 100 degrees. Since the plurality of spacer members 25 are provided inside the bag-shaped film sheet 19, the internal pressure is maintained even if the internal pressure of the bag-shaped film sheet 19 is reduced, and the operation by the maintenance fluid channel 27 is performed. The medium 29 can be refluxed.

Furthermore, by providing the plurality of spacer members 25 with the cutout portions 30 at regular intervals, it can be bent in the vertical direction (short direction) perpendicular to the long direction of the bag-like film sheet 17. Furthermore, since the plurality of holding members 23 made of a reinforcing member having flexibility are installed at regular intervals along the short direction of the bag-shaped film sheet 17, the plurality of spacer members 25 are connected and fixed. It is also possible to bend the bag-shaped film sheet 17 along a direction parallel to the longitudinal direction. In addition, the characteristic which can be bent and deformed in the direction parallel to and perpendicular to the longitudinal direction of the bag-like film sheet 17 is referred to as two-dimensional flexibility in the present specification.

Bag-like film sheets include resin film, synthetic resin film, metal foil, composite film of metal foil and resin, composite film of metal foil and rubber, composite film of metal foil and high electrothermal film, inorganic filler or metal It can be formed using at least one selected from the group consisting of a resin film filled with powder, or a rubber filled with inorganic filler or metal powder.
Moreover, it is good also as a structure which provides a groove | channel and uses a wick together, and encloses a wick in a bag-like film sheet.

  As described above, since the flexible heat sheet 10 of the present embodiment is flexible, even if the mounting position of the electronic device has a slight difference in the mounting position of the heat dissipation component, sufficient contact can be achieved by bending the flexible heat sheet 10. Heat conduction can be ensured. In addition, it is possible to secure sufficient contact heat conduction by bending even the slight displacement of the heat contact surface that occurs during mounting of the electronic device and the heat dissipation component.

  Furthermore, the surface treatment of the groove 20 improves the surface of the groove 20 and improves the wettability. Therefore, as shown in FIG. Is done effectively. Moreover, the thin film metal 15 is vapor-deposited on the outer surface of the bag-like film sheet 17a on the same side where the groove 20 is molded, so that the heat of the heat generating member can be efficiently conducted to the flexible heat sheet 10 of the present invention. That is, when the heat of the heat generating member is conducted to the flexible heat sheet 10, the working medium 29 enclosed inside evaporates. Then, the evaporated working medium 29 moves toward the other end portion, is condensed and returns to the liquid phase again, and returns to the other end portion again by the groove 20. That is, the working medium 29 can be recirculated efficiently.

  In this way, the working medium 29 is recirculated by the groove 20, and the quality control becomes easy and mass production is easy. Therefore, the flexible heat sheet 10 with reduced manufacturing cost can be provided.

  In the above-described embodiment, the example in which the groove 20 for moving the hydraulic fluid by capillary force is provided on one or both surfaces of the inner surface of the bag-like film sheet is described. However, the present invention is not limited to this configuration. For example, instead of providing the groove 20 on the inner surface of the bag-shaped film sheet, a thin flexible plate having the groove 20 having the same function. It is also possible to configure the member to be inserted into a bag-like film sheet. The groove 20 can be provided on only one side or both sides of the thin plate member. When a plate-like member is inserted into a bag-shaped film sheet, a spacer member and a reinforcing member are provided between the surface side where the groove 20 is formed (both when grooves are provided on both sides) and the film sheet. It is desirable. Such a thin plate member having flexibility can be formed of a material such as resin or metal.

Note that the features of the above-described embodiment of the present invention can be applied as appropriate without being limited to the embodiment, and various modifications can be adopted without being limited to the above-described embodiment.
For example, the plurality of spacer members are formed in series, but may not be formed in series as long as the fluid flow path is reliably formed.

DESCRIPTION OF SYMBOLS 10 Flexible heat sheet 13a, 13b, 13c, 13d Peripheral part 15 Thin film metal 17a, 17b Film sheet 19 Bag-shaped film sheet 20 Groove 23 Holding member 25, 33 Spacer member 27 Fluid flow path 29 Working medium 30 Notch

Claims (21)

A bag-shaped film sheet in which one or two types of flexible film-shaped sheets are stacked and sealed in a bag shape;
A working medium encapsulated inside the bag-shaped film sheet, moving between a heat absorbing portion and a heat radiating portion provided in the vicinity of opposing ends on the bag-shaped film sheet, and transferring thermal energy;
A plurality of grooves formed on the inner surface of at least one of the bag-shaped film sheets and provided along the moving direction of the working medium;
A plurality of spacers arranged inside the bag-shaped film sheet and maintaining a flow path through which the working medium moves; and
With
The flexible heat sheet, wherein at least a portion of the bag-shaped film sheet having the plurality of grooves is subjected to a surface treatment for increasing the surface energy of the groove forming portion.   The flexible heat sheet according to claim 1, wherein the plurality of spacers are arranged in alignment along the groove.   The flexible heat sheet according to claim 1, wherein the bag-shaped film sheet is depressurized to an atmospheric pressure or lower.   The said film-like sheet | seat is equipped with the rigidity which can form the movement path of the said working medium with the said spacer, even if it pressure-reduces the said bag-like film-made sheet | seat to atmospheric pressure or less. 4. The flexible heat sheet according to any one of 3 above.   5. A part or all of a surface of the bag-shaped film sheet on which at least the groove is formed is irradiated with plasma so that the surface energy is increased. The flexible heat sheet as described in 1.   The flexible sheet according to any one of claims 1 to 5, wherein the working medium is made of water.   7. A thin heat transfer portion made of a material having a high thermal conductivity is provided at least at the position of the heat absorbing portion and the heat radiating portion of the outer surface of the sheet on which the groove of the film sheet is formed. The flexible heat sheet of any one of these.   The spacer is an elongated spacer member that extends along the groove and has notches at regular intervals, and the spacer member has at least flexibility to bend in the vertical direction of the bag-like film sheet. The flexible sheet according to any one of claims 1 to 7.   The flexible heat sheet according to claim 8, wherein a plurality of the spacer members are provided, and the plurality of spacer members are connected by a thin holding member having flexibility.   The flexible heat sheet according to claim 7, wherein the heat transfer part is formed by vacuum-depositing a metal material on a desired film outer surface. A bag-shaped film sheet in which one or two types of flexible film-shaped sheets are stacked and sealed in a bag shape;
A working medium encapsulated inside the bag-shaped film sheet, moving between a heat absorbing portion and a heat radiating portion provided in the vicinity of opposing ends on the bag-shaped film sheet, and transferring thermal energy;
A thin plate-like member having flexibility enclosed in the bag-shaped film sheet;
A plurality of grooves formed on at least one surface of the thin plate-like member and provided along a moving direction of the working medium;
A plurality of spacers arranged between the thin plate-like member and the bag-shaped film sheet to maintain a flow path in which the working medium moves;
With
A surface of the thin plate-like member having the plurality of grooves is subjected to a surface treatment for increasing the surface energy of the grooves.   The flexible heat sheet according to claim 11, wherein the plurality of spacers are arranged along the groove.   The flexible heat sheet according to claim 11 or 13, wherein the bag-shaped film sheet is depressurized to an atmospheric pressure or lower.   12. The film-like sheet has rigidity capable of forming a movement path of the working medium by the spacer even when the bag-like film sheet is depressurized to an atmospheric pressure or lower. 14. The flexible heat sheet according to any one of 13 above.   15. A part or all of a surface of the thin plate-like member on which the groove is formed is irradiated with plasma so as to be surface-treated so as to increase the surface energy. The flexible heat sheet of any one of Claims.   The flexible sheet according to claim 11, wherein the working medium is made of water.   17. A thin heat transfer portion made of a material having a high thermal conductivity is provided at least at the position of the heat absorbing portion and the heat radiating portion on the outer surface of the sheet on which the groove of the film sheet is formed. The flexible heat sheet of any one of these.   The spacer is an elongated spacer member that extends along the groove and has notches at regular intervals, and the spacer member has at least flexibility to bend in the vertical direction of the bag-like film sheet. The flexible sheet according to any one of claims 11 to 17.   The flexible heat sheet according to claim 18, wherein a plurality of the spacer members are provided, and the plurality of spacer members are connected by a thin holding member having flexibility.   The flexible heat sheet according to any one of claims 17 to 19, wherein the heat transfer part is formed by vacuum-depositing a metal material on a desired film outer surface. A bag-shaped film sheet in which one or two types of flexible film-shaped sheets are stacked and sealed in a bag shape;
A working medium encapsulated inside the bag-shaped film sheet, moving between a heat absorbing portion and a heat radiating portion provided in the vicinity of opposing ends on the bag-shaped film sheet, and transferring thermal energy;
Formed on at least one inner surface of the bag-shaped film sheet and at least one surface of a flexible thin plate-like member enclosed in the bag-shaped film sheet, in the moving direction of the working medium A plurality of grooves provided along,
A plurality of spacers arranged between the bag-shaped film sheet and the thin plate-like member to maintain a flow path in which the working medium moves;
With
The flexible heat sheet, wherein the bag-shaped film sheet and the thin plate-shaped member have at least a portion having the plurality of grooves, and are subjected to a surface treatment for increasing the surface tension of the working medium. .

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