JP2012073225A - Foreign matter detector and method for detecting foreign matter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To securely detect foreign matter even if it is extremely small, while reducing cost necessary for detecting foreign matters having conductivity.SOLUTION: The foreign matter detector comprises: a micro wave radiation part 3 which performs heating treatment of irradiating a resin film 20 formed of a non-conductive material with micro waves Wm to selectively make a conductive foreign matter X contained in the resin film 20 generate heat; a thermo camera 4 for imaging the resin film 20 and detecting temperature of each part of the resin film 20; and a processing part 6 which controls the heating treatment by the micro wave radiation part 3 and imaging of the resin film 20 (detecting of temperature at each part of the resin film 20) by the thermo camera, and which analyzes an imaging result of the thermo camera 4 as a temperature detection result and detects that the foreign matter X exists at a heat generating area where heat is generated by the heating processing.

Description

  The present invention relates to a foreign object detection device and a foreign object detection method for detecting a foreign object in a detection target body.

  As this kind of foreign matter detecting device, “foreign matter of metallic species such as Al, Ni, etc. present in“ film (film resin layer) containing conductive particles (spherical particles) such as Cu, Au ”at high density, JP-A-2003-65966 discloses a foreign matter inspection apparatus configured to be able to optically detect a resin type lump foreign matter. This foreign matter inspection apparatus optically transfers a foreign object (black foreign matter) existing in a film resin layer in a subject to be inspected, and a feed mechanism that continuously moves the subject to be inspected with a film resin layer attached to a film base layer. A first optical detection unit that detects the first optical detection unit, a second optical detection unit that optically detects foreign matter (white foreign matter) present in the film resin layer in the inspection target, and image signals from both optical detection units. And an inspection / analysis unit for inspecting / analyzing foreign matter by image processing based on the image processing. In addition, both optical detection units are configured to include a light source and an imaging device (line sensor or TDI (Time Delay and Integration) sensor).

  When the film resin layer is inspected by the foreign substance inspection apparatus, the optical inspection unit moves the inspection object along the longitudinal direction by rotating the conveyance pinch roller and conveys the inspection object from the light source to the inspection object. The film resin layer is imaged by an imaging device in a state where light is irradiated. At this time, image signals are output from the imaging devices of both optical detection units to the inspection / analysis unit. In response to this, the inspection / analysis unit performs image processing on the image signals from both imaging apparatuses to inspect / analyze the foreign matter. At this time, the presence or absence of black foreign matter (black foreign matter) is inspected by inspecting and analyzing the image signal from the imaging device in the first optical detection unit, and the image from the imaging device in the second optical detection unit. The presence / absence of white foreign matter (white foreign matter) is inspected by inspecting and analyzing the signal. Thereby, the presence or absence of a foreign substance is inspected without destroying the film resin layer to be inspected.

JP 2003-65966 A (page 4-9, FIG. 1-21)

  However, the conventional foreign matter inspection apparatus has the following problems. That is, in a conventional foreign matter inspection apparatus, a film base material having light transmissivity is obtained by capturing an image of an object to be inspected while a film resin layer is bonded to the film base material layer, and inspecting and analyzing the image signal. A configuration in which black or white foreign matter is present in the layer is employed. In this case, the object to be inspected by this kind of foreign substance inspection apparatus is disclosed in the above-mentioned publication as “film used for connecting an electrode of a semiconductor element to an electrode on an electronic circuit board such as a liquid crystal display device ( In addition to “film resin layer”, various films such as “insulating film used for electronic parts such as batteries and capacitors to insulate adjacent conductors” exist.

  When an insulating film as described above is an object to be inspected, it is a very important inspection item whether or not “contaminating foreign matter” that causes a decrease in insulating ability is present in the film. However, although the conventional foreign matter inspection apparatus can inspect whether a black foreign matter or a white foreign matter exists, it is specified whether the foreign matter is a conductive foreign matter. It has become difficult. Accordingly, in the conventional foreign matter inspection apparatus, even if the foreign matter is black or white even if it is a non-conductive foreign matter that does not cause a decrease in the insulation capacity, it is a defect that the foreign matter is present by analysis of the image signal. Inspected to be film. For this reason, the conventional foreign matter inspection apparatus has a problem that the yield of film production is deteriorated.

  Moreover, in the conventional foreign material inspection apparatus, the structure which test | inspects whether a black or white foreign material exists in a film base material layer by analyzing the image signal imaged with the imaging device is employ | adopted. In this case, when an insulating film is an object to be inspected, even if it is a very small foreign object, if the foreign object has conductivity, there is a possibility that the insulation capacity may be reduced. Must be detected reliably. However, in order to optically detect a very small foreign object (detected by analyzing an image signal), an imaging device with high resolution is required. Therefore, the conventional foreign matter inspection apparatus not only requires an expensive imaging device to reliably detect extremely small foreign matter, but also analyzes a large amount of information in a short time from a high-resolution imaging device. In addition, an expensive analysis device with high analysis capability (high calculation speed) is required, which makes it difficult to reduce the inspection cost.

  Furthermore, in the conventional foreign material inspection apparatus, the structure which test | inspects whether the black or white foreign material exists in the film resin layer which has a light transmittance is employ | adopted. Therefore, in the conventional foreign matter inspection apparatus, for example, when a black foreign matter is present in the black film resin layer or when a white foreign matter is present in the white film resin layer, the foreign matter can be detected. There is also the problem that it has become difficult.

  The present invention has been made in view of such problems, and a foreign object detection device and a foreign object that can reliably detect even a very small foreign object while reducing the cost required to detect a conductive foreign object. The main purpose is to provide a detection method.

  In order to achieve the above object, the foreign object detection device according to claim 1 performs a heat generation process for performing a heat generation process for selectively generating heat from a conductive foreign substance contained in a detection object formed of a non-conductive material. A temperature detection unit that detects the temperature of each part in the detection target body, a control unit that controls the heat generation processing by the heat generation processing unit and the temperature detection of each part in the detection target body by the temperature detection unit, An analysis detection unit that analyzes a temperature detection result of the temperature detection unit and detects that the foreign matter is present in a heat generation portion that has generated heat by the heat generation process;

  Further, the foreign matter detection device according to claim 2 is the foreign matter detection device according to claim 1, further comprising a thermo camera that images the detection target body as the heat detection unit, and the analysis detection unit is provided on the thermo camera. The imaging result is analyzed as the temperature detection result, and it is detected that the foreign matter is present in the heat generation part.

  Furthermore, the foreign matter detection device according to claim 3 is the foreign matter detection device according to claim 1 or 2, wherein the detection object formed in a band shape with the non-conductive material is arranged along a longitudinal direction according to control of the control unit. And a transport mechanism for transporting and transporting.

  In addition, the foreign matter detection device according to claim 4 includes a heat generation processing unit that performs heat generation processing for selectively generating heat in the conductive foreign matter contained in the detection target body formed of a nonconductive material, and a temperature. The heat-sensitive recording material that changes color according to the heat-sensitive recording material has at least a heat-sensitive portion disposed on the surface portion, and the surface portion of the heat-sensitive portion is brought into contact with the detection object that has been subjected to the heat generation process. A heat-sensitive part that performs heat-sensitive heat treatment for changing the color of the part of the detection object that is in contact with the heat-generating part; an optical camera that images the surface part of the heat-sensitive part; A control unit for controlling the thermal treatment by the optical unit and the imaging of the thermal unit by the optical camera, and analyzing the imaging result of the optical camera to obtain a discoloration site in the thermal recording material. And a analytical detection unit for detecting said foreign substance to the site of the detection object is present to respond.

  Further, the foreign object detection device according to claim 5 is the foreign object detection device according to claim 4, wherein the detection object formed in a band shape with the non-conductive material runs along the longitudinal direction according to the control of the control unit. The heat-sensitive heat treatment unit is formed in a roll shape with the heat-sensitive recording material reversibly discolored according to the temperature disposed at least on the peripheral surface, and the heat generation process is performed. In addition, a heat-sensitive roll is provided as the heat-sensitive part, the heat-sensitive roll being arranged so that the peripheral surface is in contact with the detection object and rotated in accordance with the conveyance of the detection object by the conveyance mechanism.

  Further, a foreign object detection device according to a sixth aspect is the foreign object detection device according to the fifth aspect, further comprising a cooling unit that cools the peripheral surface that has been imaged by the optical camera.

  The foreign matter detection device according to claim 7 is the foreign matter detection device according to any one of claims 1 to 6, wherein the heat generation processing unit is a microwave irradiation unit that irradiates the detection object with microwaves, The electron beam irradiation unit irradiates the detection target body with an electron beam and the high frequency magnetic field generation unit that generates a high frequency magnetic field around the detection target body.

  Furthermore, the foreign matter detection device according to claim 8 is the foreign matter detection device according to claim 7, wherein the heat generation processing unit is configured to include the microwave irradiation unit, and the microwave irradiation unit has a different frequency. The detection object is irradiated with a plurality of types of microwaves.

  The foreign matter detection device according to claim 9 is the foreign matter detection device according to claim 7, wherein the heat generation processing unit includes the high frequency magnetic field generation unit, and the high frequency magnetic field generation unit has a different frequency. A plurality of types of high-frequency magnetic fields are generated around the detection object.

  Furthermore, the foreign matter detection device according to claim 10 is the foreign matter detection device according to any one of claims 1 to 9, wherein a marking portion is provided for marking the portion that is specified as the foreign matter is present in the detection target body so as to be specified. I have.

  The foreign matter detection method according to claim 11 performs a heat generation process for selectively generating heat in a conductive foreign substance contained in a detection object formed of a non-conductive material, and the heat generation process. And detecting the temperature of each part in the detection target body that has performed the above, and analyzing the temperature detection result to detect that the foreign matter is present in the heat generation portion that has generated heat by the heat generation processing.

  Furthermore, the foreign object detection method according to claim 12 is the foreign object detection method according to claim 11, wherein the detection target object that has performed the heat generation process is imaged by a thermo camera, and the imaging result of the thermo camera is detected by the temperature detection. As a result of the analysis, it is detected that the foreign matter is present in the heat generating portion.

  In addition, the foreign matter detection method according to claim 13 performs a heat generation process for selectively heating the conductive foreign matter contained in the detection object formed of the nonconductive material, and according to the temperature. The surface portion in the heat sensitive portion where the heat-sensitive recording material to be discolored is disposed at least on the surface portion is brought into contact with the detection target body that has performed the heat generation process to come into contact with the heat generation portion of the detection target body in the thermal recording material The detection corresponding to the discoloration part in the thermosensitive recording material is performed by performing heat-sensitive heat treatment for changing the part and imaging the surface part of the thermosensitive part with an optical camera and analyzing the imaging result of the optical camera. It detects that the said foreign material exists in the site | part of a target object.

  Furthermore, the foreign matter detection method according to claim 14 is the foreign matter detection method according to any one of claims 11 to 13, wherein the detection target body is irradiated with a microwave, and the detection target body is an electron beam. Or the high frequency magnetic field generating process for generating a high frequency magnetic field around the detection object is executed as the heat generation process.

  The foreign matter detection apparatus according to claim 1, wherein the heat generation processing unit performs heat generation processing for selectively generating heat in the conductive foreign matter contained in the detection target body formed of a nonconductive material, and the temperature detection unit. Detects the temperature of each part in the detection object, and the analysis detection part analyzes the temperature detection result of the temperature detection part, and detects that there is a foreign object in the heat generation part that has generated heat by the heat generation process. Further, in the foreign matter detection method according to claim 11, a heat generation process for selectively generating heat is performed on the conductive foreign matter contained in the detection object formed of the nonconductive material, and the heat generation process is performed. While detecting the temperature of each part in the executed detection target object, the temperature detection result is analyzed, and it is detected that a foreign substance exists in the heat generation part that has generated heat by the heat generation process.

  Therefore, according to the foreign matter detection device according to claim 1 and the foreign matter detection method according to claim 11, the inside of the film resin layer is analyzed by analyzing the image signal obtained by imaging the film resin layer to be detected by the optical imaging device. Unlike conventional foreign matter inspection devices that detect foreign matter, it is possible not only to easily detect “conductive foreign matter” that generates heat due to heat generation processing, but also to foreign matter generated by heat generation processing and surroundings of foreign matters. By identifying the presence or absence of foreign matter based on the presence or absence of a sufficiently wide region (heating part) including the region, even if the temperature of each part of the detection target is detected at a certain wide pitch, it is possible to reliably detect extremely small foreign matter. It is possible to detect the temperature detection unit that detects the temperature of each part of the detection target object at a narrow pitch, and to process a large amount of data in a short time. Results analytical detection of the stomach capacity is not required, it is possible to sufficiently reduce the cost required for the detection of the foreign matter.

  According to the foreign matter detection device according to claim 2 and the foreign matter detection method according to claim 12, the detection result is analyzed by analyzing the imaging result of the thermo camera as a temperature detection result and detecting the presence of the foreign matter in the heat generation part. Since the temperature of each part can be detected in a non-contact manner with respect to the body, foreign objects can be detected without damaging the detection target body, and the foreign object generated by the heat generation process and the surrounding area of the foreign object are included. By identifying the presence or absence of a foreign substance based on the presence or absence of a sufficiently wide area (heating part), it is possible to reliably detect even a very small foreign object with a relatively low resolution thermo camera. In addition, as a result of eliminating the need for an analysis detection unit having a high processing capacity capable of processing a large amount of data in a short time, the cost required for detecting foreign matter can be further reduced.

  According to the foreign object detection device of claim 3, the detection target body is made stationary by including a transport mechanism that transports the detection target body formed in a strip shape with a non-conductive material along the longitudinal direction. Compared with a configuration that performs heat generation processing and temperature detection by the temperature detection unit in a state where the detection target body is run by the transport mechanism, the heat generation processing and temperature detection are performed while the detection target body is running, thereby detecting a long and long detection target. It is possible to complete the detection of a foreign object for the entire body in a short time.

  5. The foreign matter detection apparatus according to claim 4, wherein the heat generation processing section performs heat generation processing for selectively generating heat in the conductive foreign matter contained in the detection target body formed of a non-conductive material, and the heat treatment processing section. The heat sensitive recording material whose color changes depending on the temperature is brought into contact with the detection target object on which the heat generation processing has been performed by contacting at least the surface part of the heat sensitive part where the heat sensitive recording material is disposed on the surface part. The optical camera images the surface part of the thermal part, the analysis detection part analyzes the imaging result of the optical camera, and the detection object corresponding to the color change part in the thermal recording material is executed. It is detected that a foreign object exists in the part.

  In the foreign matter detection method according to claim 13, a heat generation process for selectively generating heat from the conductive foreign matter contained in the detection target body formed of a non-conductive material is performed, and in accordance with the temperature. Sensation of changing the color of the part of the thermal recording material in contact with the heat generating part of the detection target by bringing the surface part in the thermal part where the heat sensitive recording material to be discolored is disposed at least on the surface part into contact with the target to be heated. Executes heat treatment and images the surface part of the heat sensitive part with an optical camera and analyzes the imaging result of the optical camera to detect the presence of foreign matter in the part of the detection target corresponding to the discolored part in the thermal recording material To do.

  Therefore, according to the foreign matter detection device according to claim 4 and the foreign matter detection method according to claim 13, the image signal in the film resin layer is analyzed by analyzing the image signal obtained by imaging the film resin layer to be detected by the optical imaging device. Unlike conventional foreign matter inspection devices that detect foreign matter, it is possible not only to easily detect “conductive foreign matter” that generates heat due to heat generation processing, but also to foreign matter generated by heat generation processing and surroundings of foreign matters. By identifying the presence / absence of a foreign substance based on the presence / absence of a sufficiently wide area (discolored part) in contact with the area (heating part), even a very small foreign substance can be reliably detected by a relatively low resolution optical camera. As a result, a high-resolution imaging device and a high-throughput analysis detector that can process a large amount of data in a short time are not required. Cost can be sufficiently reduced. In addition, since the optical camera is less expensive than a configuration in which the presence or absence of a heat generating part is specified by a thermo camera, for example, the cost required for detecting a foreign object can be further reduced.

  According to the foreign object detection device of claim 5, while including a transport mechanism that transports the detection target body formed in a strip shape with a non-conductive material along the longitudinal direction, the heat-sensitive part is in accordance with the temperature. The heat-sensitive recording material that is reversibly discolored is disposed at least on the peripheral surface, is formed in a roll shape, and the peripheral surface is in contact with the detection target body on which heat generation processing has been performed. Compared to a configuration that performs heat generation, heat treatment, and imaging of the heat sensitive part with an optical camera while the detection target is stationary by providing a heat sensitive roll as a heat sensitive part that can be rotated to be transported. Then, while the detection target body is caused to travel by the transport mechanism, the heat generation process, heat-sensitive processing, and imaging of the heat-sensitive roll by the optical camera are executed, thereby the foreign object targeting the entire long detection target body in a belt shape It can be completed quickly detect.

  According to the foreign matter detection device of the sixth aspect, the cooling unit that cools the peripheral surface that has been imaged by the optical camera is provided. Since it is possible to reset to the color before the color change by one cycle per one rotation, it is possible to sufficiently increase the foreign matter detection accuracy based on the presence or absence of the color change part.

  In the foreign matter detection device according to claim 7, the heat generation processing unit includes a microwave irradiation unit that irradiates the detection target object with microwaves, an electron beam irradiation unit that irradiates the detection target object with an electron beam, and a periphery of the detection target object. The high-frequency magnetic field generating unit generates a high-frequency magnetic field. In the foreign matter detection method according to claim 14, a microwave irradiation process for irradiating the detection target object with microwaves, an electron beam irradiation process for irradiating the detection target object with an electron beam, and a high-frequency magnetic field around the detection target object One of the generated high-frequency magnetic field generation processes is executed as a heat generation process.

  Therefore, according to the foreign matter detection device according to claim 7 and the foreign matter detection method according to claim 14, since the foreign matter can be heated without contact with the detection target body during the heat generation process, the detection target body is damaged. The foreign matter can be detected without any trouble.

  According to the foreign object detection device of claim 8, the heat generation processing unit is configured to include a microwave irradiation unit, and the microwave irradiation unit irradiates the detection target body with a plurality of types of microwaves having different frequencies. Thus, various foreign substances having different sizes and compositions can be reliably detected.

  According to the foreign object detection device of claim 9, the heat generation processing unit is configured to include a high frequency magnetic field generation unit, and the high frequency magnetic field generation unit has a plurality of types of high frequency magnetic fields having different frequencies around the detection target body. By generating it, various foreign substances having different sizes and compositions can be reliably detected.

  In addition, according to the foreign object detection device of claim 10, the detection of the presence of foreign matter after the completion of the detection process is provided by providing a marking unit for marking the portion identified as foreign matter in the detection target. Without discarding all of the target objects as defective products, it is possible to identify a portion where foreign matter exists based on the marking for specifying the defective portion, and discard only the portion where foreign matter exists. For this reason, the yield of manufacture of a detection target body can fully be improved.

1 is a configuration diagram illustrating a configuration of a foreign object detection device 1. FIG. It is explanatory drawing for demonstrating for demonstrating "a heat-generating part." It is a top view of the resin film 20 of the state which attached | subjected the defect location identification mark M. FIG. It is a block diagram which shows the structure of 1 A of foreign material detection apparatuses. It is explanatory drawing for demonstrating another "heat-generating part." It is explanatory drawing for demonstrating a "discoloration site | part."

  Hereinafter, embodiments of a foreign object detection device and a foreign object detection method will be described with reference to the accompanying drawings.

  The foreign object detection device 1 shown in FIG. 1 is configured to be able to detect a conductive foreign object X (see FIGS. 2 and 3) for a resin film 20 (an example of “detection object (inspection object)”). This is a non-destructive detection device, and includes a transport mechanism 2, a microwave irradiation unit 3, a thermo camera 4, a marking unit 5, and a processing unit 6. In this case, as an example, the resin film 20 is an insulating film used for various electronic components such as a battery and a capacitor to insulate between adjacent conductors, and is a resin material such as polypropylene or polyethylene (“non-conductive” An example of “material” is formed into a long band shape and wound into a fabric. On the other hand, as shown in FIG. 1, the transport mechanism 2 is configured so that the feeding-side roll 20 a around which the resin film 20 is wound (the roll around which the resin film 20 before the detection process is wound) is wound around the winding-side roll 20 b (detection). The resin film 20 is made to run in the direction of the arrow B along the longitudinal direction by being wound on a roll around which the treated resin film 20 is wound.

  Specifically, the transport mechanism 2 includes, as an example, a motor 2a that rotates the winding-side roll 20b according to a control signal S2 from the processing unit 6. The “conveying mechanism” may be configured to include not only the motor 2a for rotating the winding side roll 20b but also a motor (not shown) for rotating the feeding side roll 20a. Moreover, in FIG. 1, in order to make an understanding about the structure of the foreign material detection apparatus 1 easy, the conveyance mechanism 2 of the structure which linearly travels the resin film 20 toward the winding side roll 20b from the delivery side roll 20a is shown. Although illustrated, the actual “conveying mechanism” includes a guide roller for changing the traveling direction of the resin film 20 and reducing vibration generated during traveling, and a desired tension with respect to the resin film 20. A tension mechanism or the like is provided for imparting.

  The microwave irradiation unit 3 is disposed between the feeding side roll 20a and the winding side roll 20b. The microwave irradiation unit 3 is an example of a “heat generation processing unit”, and in accordance with a control signal S3 from the processing unit 6, a microwave Wm (electromagnetic wave within a wavelength range of 100 μm to 1 m: as an example: The foreign matter X is selectively heated by irradiation with electromagnetic waves having a wavelength of 1000 μm (an example of “microwave irradiation processing” as “heat generation processing”). Note that the process of “heating the foreign matter X selectively” not only includes the process of “heating only the foreign matter X (not causing the resin material of the resin film 20 to generate heat)”, but also “heating the foreign matter X. In this case, the process of “the resin film 20 slightly generates heat” is included.

  The thermo camera 4 is an example of a temperature detection unit, and is disposed between the microwave irradiation unit 3 and the winding-side roll 20b, and is controlled by the microwave irradiation unit 3 in accordance with a control signal S4 from the processing unit 6. The temperature of each part in the resin film 20 is detected by imaging the resin film 20 irradiated with the microwave Wm, and the imaging data Da (infrared image data as an example) is sent to the processing unit 6 as a “temperature detection result”. Output. As an example, the marking unit 5 includes an inkjet nozzle (not shown), and is disposed between the thermo camera 4 and the take-up roll 20b, and in accordance with the control signal S5 from the processing unit 6, the resin film 20 has a defective portion. The identification mark M (see FIG. 3) is printed (an example of a process of “marking a specified region when a foreign object is present”).

  The processing unit 6 controls the foreign object detection device 1 as a whole. Specifically, the processing unit 6 corresponds to a “control unit”, controls the transport mechanism 2 (motor 2a) to transport the resin film 20, and controls the microwave irradiation unit 3 to the resin film 20. Irradiate the microwave Wm (execute the “microwave irradiation process” as the “heat generation process”), and control the thermo camera 4 to image the resin film 20 (detect the temperature of each part in the resin film 20). ). The processing unit 6 corresponds to an “analysis detection unit”, and analyzes the imaging data Da from the thermo camera 4 (an example of the “imaging result of the thermo camera” as the “temperature detection result”) to thereby obtain a resin film. 20, the heat generating part that generates heat by the irradiation of the microwave Wm is specified, and it is specified that the foreign substance X having conductivity exists in the specified heat generating part. Further, when the processing unit 6 specifies that the foreign material X exists in the resin film 20, the processing unit 6 controls the marking unit 5 to print the defect location specifying mark M on the resin film 20.

  When the foreign matter X is detected by the foreign matter detection device 1, the end portion of the resin film 20 is pulled out from the feeding side roll 20a around which the resin film 20 is wound, and the winding side roll 20b fixed to the motor 2a is pulled out. set. Next, a process start switch of an operation unit (not shown) is operated. At this time, the processing unit 6 first outputs a control signal S2 to the transport mechanism 2 (motor 2a) to start transporting the resin film 20. At this time, the motor 2a rotates the take-up roll 20b, so that the resin film 20 is drawn out from the take-up roll 20a and taken up by the take-up roll 20b. It is made to travel in the direction of arrow B along the longitudinal direction and is conveyed from the feeding side roll 20a toward the winding side roll 20b.

  Next, the processing unit 6 starts to irradiate the resin film 20 with the microwave Wm by outputting the control signal S3 to the microwave irradiating unit 3. Further, the processing unit 6 outputs a control signal S4 to the thermo camera 4 so that the resin film 20 irradiated with the microwave Wm by the microwave irradiation unit 3 is imaged. Thus, when a predetermined time has elapsed since the microwave Wm was irradiated (when a predetermined time has elapsed since the “heat generation process” was performed: the resin film from the irradiation position of the microwave Wm to the imaging position of the thermo camera 4 The imaging data Da obtained by imaging the resin film 20 at the time when the time required for transporting 20 has elapsed is sequentially output from the thermo camera 4.

  In this case, when the conductive foreign matter X exists in the resin film 20, the foreign matter X receives the microwave Wm from the microwave irradiation unit 3 and generates heat. Further, when the foreign matter X in the resin film 20 generates heat, the heat generated in the foreign matter X is transferred to the resin material (the base material of the resin film 20) around the foreign matter X within the “predetermined time”. To do. For this reason, when the foreign matter X exists in the resin film 20 and the microwave Wm is irradiated to the existence site of the foreign matter X, not only the foreign matter X but also the foreign matter X and the foreign matter X are shown in FIG. The temperature of the surrounding area Aa is higher than the temperature of the surrounding area (around the area Aa).

  Therefore, the processing unit 6 analyzes the imaging data Da output from the thermo camera 4 as a temperature detection result (temperature detection result) of each part in the resin film 20, so that it is within the imaging range of the thermo camera 4 (resin film It is determined whether or not a part having a higher temperature than the surroundings (that is, a part that generates heat by irradiation with the microwave Wm: “heating part”) exists in a part of the longitudinal direction of 20. In addition, when the processing unit 6 determines that the heat generation site exists, the processing unit 6 specifies that the foreign material X that generates heat upon receiving the microwave Wm, that is, the conductive foreign material X exists in the heat generation site. In this case, as described above, when the foreign matter X exists in the resin film 20 and the foreign matter X is irradiated with the microwave Wm, not only the foreign matter X but also the temperature of the area Aa around the foreign matter X is It becomes hotter than the surroundings. Therefore, even if the foreign matter X present in the resin film 20 is extremely small, the relatively low resolution thermo camera 4 (a “temperature detection unit” for detecting the temperature of each part in the resin film 20 at a certain degree of wide pitch). (Example) makes it possible to sufficiently specify the heat generation site.

  On the other hand, when it is specified that the foreign object X exists, the processing unit 6 outputs a control signal S5 to the marking unit 5, thereby, as shown in FIG. M is printed (an example of a process of “marking a specified part when a foreign object is present”). Thereafter, the processing unit 6 applies the microwave Wm to the resin film 20 and the thermo camera 4 until all the resin films 20 wound around the feeding side roll 20a are wound around the winding side roll 20b. Continue to perform imaging. Further, the processing unit 6 analyzes the imaging data Da output from the thermo camera 4 to determine the presence or absence of the foreign matter X. When the processing unit 6 identifies that the foreign matter X exists, the processing unit 6 controls the marking unit 5 to identify the defective portion. Mark M is printed. Thereby, the detection process of the “conductive foreign matter X” for the resin film 20 is completed.

  As described above, in the foreign object detection apparatus 1, the microwave irradiation unit 3 irradiates the resin film 20 with the microwave Wm, so that the conductive foreign substance X included in the resin film 20 is selectively heated. The temperature of each part in the resin film 20 is detected by imaging the resin film 20 with the thermo camera 4 and the processing unit 6 detects the imaging result of the thermo camera 4 (temperature detection result: in this example, imaging) Data Da) is analyzed, and it is detected that the foreign matter X is present in the heat generating portion that has generated heat by the above “heat generation processing”. Further, in the foreign matter detection method by the foreign matter detection device 1, the “heat generation process” for selectively heating the conductive foreign matter X contained in the resin film 20 is executed and the “heat generation process” is executed. The temperature of each part in the resin film 20 is detected by imaging the resin film 20 with the thermo camera 4, and the imaging result of the thermo camera (temperature detection result: imaging data Da in this example) is analyzed to obtain “heat generation processing”. It detects that the foreign material X exists in the heat-generating part which generated heat | fever.

  Therefore, according to the foreign matter detection device 1 and the foreign matter detection method using the foreign matter detection device 1, the foreign matter in the film resin layer is analyzed by analyzing the image signal obtained by imaging the film resin layer to be detected by the optical imaging device. Unlike the conventional foreign matter inspection apparatus to detect, not only can “conductive foreign matter X” that generates heat by “heat generation processing (in this example, irradiation with microwave Wm)” be easily detected, The temperature of each part in the resin film 20 is determined by specifying the presence or absence of the foreign matter X based on the presence or absence of the foreign matter X generated by the heat generation process and the sufficiently large region (heating portion) including the region Aa around the foreign matter X. Even if it is detected at a certain wide pitch, it is possible to reliably detect even a very small foreign matter X, and the temperature of each part in the resin film 20. As a result of eliminating the need for a temperature detection unit that detects at a narrow pitch and a high-performance “analysis detection unit” that can process a large amount of data in a short time, the cost required to detect foreign matter X can be sufficiently reduced. .

  Further, according to the foreign matter detection device 1 and the foreign matter detection method by the foreign matter detection device 1, the imaging result of the thermocamera 4 (in this example, the imaging data Da) is analyzed as a “temperature detection result” to generate a heat generation site. By detecting the presence of the foreign matter X, the temperature of each part can be detected in a non-contact manner with respect to the resin film 20, so that the foreign matter X can be detected without damaging the resin film 20, and heat generation processing is performed. By specifying the presence or absence of the foreign matter X based on the presence or absence of the foreign matter X that has generated heat and the sufficiently large area (heating part) including the surrounding area of the foreign matter X, the thermocamera 4 having a relatively low resolution is extremely small. Since foreign matter X can be reliably detected, a high-resolution imaging device and a high-processing “analysis detection unit” capable of processing a large amount of data in a short time Essential to become a result, it is possible to further reduce the cost required for the detection of the foreign matter.

  Furthermore, according to the foreign matter detection device 1, the resin film 20 is stopped by providing the transport mechanism 2 that transports the resin film 20 formed in a strip shape of a non-conductive material along the longitudinal direction. Compared to a configuration in which “heating processing (for example, irradiation of microwave Wm)” and “temperature detection by the temperature detection unit” (imaging by the thermo camera 4) is performed, the transport mechanism 2 causes the resin film 20 to be removed. By executing “heat generation processing” and “temperature detection (imaging by the thermo camera 4)” while running, detection of the foreign matter X targeting the entire belt-like long resin film 20 is completed in a short time. Can do.

  In the foreign matter detection apparatus 1, a “heat generation processing unit” is configured by the microwave irradiation unit 3 that irradiates the resin film 20 with the microwave Wm. Further, in the foreign matter detection method by the foreign matter detection device 1, “microwave irradiation processing” for irradiating the resin film 20 with the microwave Wm is executed as “heat generation processing”. Therefore, according to the foreign matter detection device 1 and the foreign matter detection method using the foreign matter detection device 1, the foreign matter X can be heated in a non-contact manner with respect to the resin film 20 during the “heat generation process”, and thus the resin film 20 is damaged. The foreign matter X can be detected without any problem.

  Moreover, according to this foreign material detection apparatus 1, the marking part 5 which marks the site | part specified that the foreign material X exists in the resin film 20 so that identification is possible (in this example, the defect location identification mark M is printed) was provided. Thus, after the detection process is completed, the part where the foreign substance X exists is specified based on the defective part specifying mark M without discarding all of the resin film 20 where the foreign substance X exists as a defective product. It is possible to discard only the part where the exists. For this reason, the yield of manufacture of the resin film 20 can fully be improved.

  Next, another embodiment of the foreign object detection device and the foreign object detection method will be described with reference to the accompanying drawings. In addition, about the component similar to the foreign material detection apparatus 1 mentioned above, the same code | symbol is attached | subjected and the overlapping description is abbreviate | omitted.

  A foreign matter detection apparatus 1A shown in FIG. 4 is a non-destructive detection apparatus that can detect the foreign matter X without destroying the resin film 20 in the same manner as the foreign matter detection apparatus 1 described above. The irradiation unit 3, the marking unit 5, the processing unit 6, the thermal roll 11, the cleaner 12, the cooling unit 13, and the optical camera 14 are configured.

  The heat-sensitive roll 11 is an example of a “heat-sensitive part”, and a heat-sensitive recording material that reversibly discolors according to temperature is disposed on the peripheral surface to be formed into a roll shape and irradiated with a microwave Wm. The peripheral surface is in contact with the resin film 20 and is pivotally supported by a support member (not shown) so as to be rotatable in accordance with the conveyance of the resin film 20 by the conveyance mechanism 2, so that the microwave irradiation unit 3 and the take-up roll 20 b Arranged between. In this case, the heat-sensitive recording material disposed on the peripheral surface of the heat-sensitive roll 11 is, for example, white at normal temperature (for example, 25 ° C.), and the temperature is increased over a predetermined temperature (for example, 100 ° C.). It is composed of a coloring type reversible thermosensitive material that turns black when applied. In the thermal roll 11, a material that does not generate heat due to irradiation with the microwave Wm is used as the above-described thermal recording material, and a material that does not generate heat due to irradiation with the microwave Wm also as a part other than the thermal recording material (for example, Resin material).

  The cleaner 12 is configured by a brush as an example, and removes dust attached to the peripheral surface of the thermal roll 11. In this foreign matter detection apparatus 1A, the above-mentioned heat-sensitive roll 11, the support member that pivotally supports the heat-sensitive roll 11, and the cleaner 12 constitute a “heat-sensitive part”. The cooling unit 13 is disposed so as to face the peripheral surface of the thermal roll 11, and in accordance with a control signal S13 from the processing unit 6, a part (peripheral surface of the thermal roll 11) that has been imaged by the optical camera 14 as described later. Cooling. In this case, as described above, the thermal recording material that reversibly discolors according to the temperature is disposed on the peripheral surface of the thermal roll 11. Accordingly, the portion of the peripheral surface of the heat-sensitive roll 11 that has changed color as the temperature increases (in this example, changed to black) is cooled by the cooling unit 13 together with its surroundings (around the portion that has changed color). The heat-sensitive recording material disposed on the peripheral surface of the roll 11 is changed to the same color (white in this example) as that at normal temperature (returned to the original white). The optical camera 14 is disposed between the heat-sensitive roll 11 and the take-up roll 20b, and images the peripheral surface of the heat-sensitive roll 11 according to a control signal S14 from the processing unit 6 to obtain image data Db (for example, Monochrome image data) is output to the processing unit 6.

  When the foreign object X is detected by the foreign object detection device 1A, the motor 2a of the transport mechanism 2 is wound in accordance with the control signal S2 from the processing unit 6 in the same manner as the foreign object X detection process by the foreign object detection device 1 described above. By rotating the side roll 20b, the resin film 20 is drawn out and taken up on the take-up side roll 20b. Thereby, the resin film 20 is made to run along the longitudinal direction, and is conveyed in the direction of arrow B toward the winding side roll 20b from the supply side roll 20a. Next, the processing unit 6 starts to irradiate the resin film 20 with the microwave Wm by outputting the control signal S3 to the microwave irradiating unit 3. In addition, the processing unit 6 outputs a control signal S14 to the optical camera 14 to image the peripheral surface of the thermal roll 11. As a result, a predetermined time has elapsed since the microwave Wm was applied to the resin film 20 (a predetermined time has elapsed since the “heating process” was performed: the circumference of the thermal roll 11 from the irradiation position of the microwave Wm. Imaging data Db obtained by imaging the thermal roll 11 in contact with the resin film 20 (the time required for the resin film 20 to be conveyed to a position in contact with the surface) is sequentially output from the optical camera 14.

  At this time, when the foreign matter X exists in the resin film 20, the foreign matter X is heated by the irradiation of the microwave Wm, and as shown in FIG. 5, the foreign matter X and the region Ab1 around the foreign matter X are Within the “predetermined time”, the temperature is higher than the surrounding area (around the area Ab1). Further, the foreign matter detection apparatus 1A employs a configuration in which the thermal roll 11 is rotated in accordance with the conveyance of the resin film 20 in a state where the peripheral surface on which the thermal recording material is disposed is in contact with the resin film 20. . For this reason, the resin film 20 is conveyed in the direction of the arrow B shown in FIG. 4, and the portion (foreign matter X and the surrounding region Ab) whose temperature is increased by the irradiation with the microwave Wm is in contact with the peripheral surface of the thermal roll 11. In some cases, as shown in FIG. 6, the heat-sensitive recording material in the region Ab <b> 2 in contact with the heat-generating portion of the resin film 20 turns black (an example of “heat-sensitive”).

  Therefore, the processing unit 6 analyzes the imaging data Db output from the optical camera 14, and thereby, within the imaging range by the optical camera 14 (part of the peripheral surface of the thermal roll 11) It is determined whether or not there is a portion (region Ab2: discolored portion) that has changed color in contact with the heat generation portion of the resin film 20 due to irradiation with the microwave Wm. In addition, when the processing unit 6 determines that a discolored part exists, the foreign substance X that generates heat by receiving the microwave Wm at the corresponding part of the resin film 20 in contact with the discolored part, that is, a conductive foreign substance. Specify that X exists. In this case, as described above, when the foreign matter X exists in the resin film 20 and the foreign matter X is irradiated with the microwave Wm, the temperature of not only the foreign matter X but also the region Ab1 around the foreign matter X is It becomes hotter than the surroundings. For this reason, on the peripheral surface of the heat-sensitive roll 11, a sufficiently large region Ab2 in contact with the foreign matter X and the region Ab1 changes color according to the temperature. Therefore, even when the foreign matter X present in the resin film 20 is extremely small, the discoloration portion (region Ab2) can be reliably specified by the optical camera 14 having a relatively low resolution.

  On the other hand, when it is specified that the foreign object X exists, the processing unit 6 outputs a control signal S5 to the marking unit 5, thereby, as shown in FIG. M is printed. Further, when the discolored portion that has changed to black due to the rotation of the heat-sensitive roll 11 reaches the position of the cooling unit 13 when it contacts the heat generating portion and reaches the position of the cooling unit 13, the heat-sensitive recording material disposed on the peripheral surface becomes the cooling unit. It is cooled by cooling with 13 and turns white. Thereafter, the processing unit 6 irradiates the resin film 20 with the microwave Wm and heats the optical camera 14 until all the resin films 20 wound around the feeding side roll 20a are wound around the winding side roll 20b. The imaging of the roll 11 is continuously executed. Further, the processing unit 6 analyzes the imaging data Db output from the optical camera 14 to determine the presence or absence of the foreign matter X. When the processing unit 6 identifies that the foreign matter X exists, the processing unit 6 controls the marking unit 5 to identify the defective portion. Mark M is printed. Thereby, the detection process of “contaminating foreign matter X” with the resin film 20 as a countermeasure is completed.

  Thus, in this foreign matter detection apparatus 1A, the microwave irradiating unit 3 irradiates the resin film 20 with the microwave Wm, whereby the conductive foreign matter X contained in the resin film 20 is selectively heated. “Heat treatment” (in this example, the heat sensitive roll (the heat sensitive roll 11, the supporting member of the heat sensitive roll 11, and the cleaner 12) ”is the resin film on which the heat generating roll 11 is subjected to the“ heat treatment ”. 20, a “heat-sensitive heat treatment” is performed in which the portion of the heat-sensitive recording material of the heat-sensitive roll 11 in contact with the heat-generating portion of the resin film 20 is discolored, and the optical camera 14 images the surface portion of the heat-sensitive roll 11, and the processing unit 6 shows an imaging result of the optical camera 14 (in this example, imaging data Db), and a foreign matter is detected on the portion of the resin film 20 corresponding to the discolored portion in the heat-sensitive recording material. There is detected to be present.

  Further, in the foreign matter detection method by the foreign matter inspection apparatus 1A, a “heat generation process” for selectively heating the conductive foreign matter X contained in the resin film 20 by irradiating the resin film 20 with the microwave Wm is performed. The surface portion (peripheral surface) of the heat-sensitive roll 11 in which the heat-sensitive recording material that changes color according to temperature is disposed at least on the surface portion is brought into contact with the resin film 20 on which “exothermic treatment” has been performed. “Heat-sensitive heat treatment” for changing the color of the part of the resin film 20 in contact with the heat-generating part is performed, and the surface part of the heat-sensitive roll 11 is imaged by the optical camera 14, and the imaging result of the optical camera 14 (in this example) Then, the imaging data Db) is analyzed, and it is detected that the foreign matter X is present in the portion of the resin film 20 corresponding to the discolored portion in the thermosensitive recording material.

  Therefore, according to the foreign matter detection device 1A and the foreign matter detection method by the foreign matter detection device 1A, the foreign matter in the film resin layer is analyzed by analyzing the image signal obtained by imaging the film resin layer to be detected by the optical imaging device. Unlike the conventional foreign matter inspection apparatus to detect, not only can “conductive foreign matter X” that generates heat by “heat generation processing (in this example, irradiation with microwave Wm)” be easily detected, By specifying the presence / absence of the foreign matter X based on the presence / absence of the foreign matter X generated by the heat generation process and the sufficiently large region Ab2 (discoloration portion) in contact with the region Ab1 (heating portion) around the foreign matter X, An extremely small foreign object X can be reliably detected by the low-resolution optical camera 14, and a high-resolution imaging device or a large amount of data can be quickly detected. Results "analytical detection portion" of the high throughput that can be treated is not required, it is possible to sufficiently reduce the cost required for the detection of the foreign matter X. Further, since the optical camera 14 is less expensive than the thermo camera 4 in the foreign object detection device 1 described above, the cost required for detecting the foreign object X can be further reduced.

  In addition, according to the foreign matter detection device 1A, the transport mechanism 2 that transports the resin film 20 formed in a strip shape with a non-conductive material by traveling along the longitudinal direction is provided, and the “heat treatment part” has a temperature A heat-sensitive recording material that reversibly discolors in response to the film is disposed at least on the peripheral surface to form a roll, and the peripheral surface comes into contact with the resin film 20 on which “exothermic treatment” has been performed. The heat-sensitive roll 11 disposed so as to be able to rotate in accordance with the transport of the resin film 20 is provided as a “heat-sensitive part”, so that the resin film 20 remains stationary while “heat generation treatment (for example, irradiation of microwave Wm)” ”,“ Thermal processing (processing in which the thermal part is brought into contact with the resin film 20) ”, and a configuration in which imaging of the“ thermal part ”by the optical camera 14 is performed, the transport mechanism 2 causes the resin While running the rumm 20, “exothermic treatment”, “thermal processing (in this example, processing to bring the thermal roll 11 into contact with the resin film 20), and imaging of the thermal roll 11 with the optical camera 14, Thus, the detection of the foreign matter X for the entire long resin film 20 can be completed in a short time.

  In addition, according to the foreign matter detection device 1A, the cooling unit 13 that cools the peripheral surface that has been imaged by the optical camera 14 is provided, so that the discolored portion that is discolored in contact with the heat generating portion in the resin film 20 is heated. 11 can be reset at a cycle of once per rotation and returned to the color before the color change, so that the detection accuracy of the foreign matter X based on the presence or absence of the color change part can be sufficiently increased.

  In this foreign matter detection apparatus 1A, the “heat generation processing unit” is configured by the microwave irradiation unit 3 that irradiates the resin film 20 with the microwave Wm. Furthermore, in the foreign matter detection method by the foreign matter detection device 1A, the “microwave irradiation process” for irradiating the resin film 20 with the microwave Wm is executed as the “heat generation process”. Therefore, according to the foreign matter detection method by this foreign matter detection device 1A and foreign matter detection device 1A, in the same way as the foreign matter detection method by foreign matter detection device 1A and foreign matter detection device 1A described above, the resin film 20 is used in the “heating process”. In contrast, since the foreign matter X can be heated without contact, the foreign matter X can be detected without damaging the resin film 20.

  Furthermore, according to the foreign matter detection device 1A, the marking portion 5 is provided for marking the portion specified as the foreign matter X in the resin film 20 so as to be specified (in this example, the defect location specifying mark M is printed). Thus, in the same manner as the foreign matter detection apparatus 1 described above, after the detection process is completed, the portion where the foreign matter X exists is used for identifying the defective portion without discarding all of the resin film 20 containing the foreign matter X as defective products. Since it can identify based on the mark M and discard only the site | part which the foreign material X exists, the yield of manufacture of the resin film 20 can fully be improved.

  The configuration of the foreign matter detection device and the foreign matter detection method are not limited to the configuration of the foreign matter detection devices 1 and 1A and the detection method thereof. For example, the foreign object detection device 1 configured to image the surface of the resin film 20 irradiated with the microwave Wm with the thermo camera 4 has been described as an example, but the surface irradiated with the microwave Wm and the image is captured with the thermo camera 4. The surfaces are not limited to the same surface, and a configuration and a method for imaging the back surface of the surface irradiated with the microwave Wm with the thermo camera 4 may be employed. Moreover, although the foreign material detection apparatus 1A of the structure which contacts the surrounding surface of the thermal roll 11 to the back surface side of the surface irradiated with the microwave Wm in the resin film 20 was described as an example, the peripheral surface of the thermal roll 11 is contacted. The surface is not limited to the back surface side of the surface irradiated with the microwave Wm, and a configuration and a method in which the peripheral surface of the thermal roll 11 is brought into contact with the same surface as the surface irradiated with the microwave Wm can also be adopted.

  Moreover, although the structure provided with the thermo camera 4 as a "temperature detection part" and the example which detects the temperature of each part by imaging with the thermo camera 4, it replaced with the thermo camera 4 and, for example, several temperature is demonstrated. A sensor (as an example, a thermocouple) can also be used. Specifically, a temperature sensor array in which a plurality of temperature sensors are arranged in a line or matrix is arranged as a “temperature detection unit”, and “exothermic processing” by the “exothermic processing unit” is completed. The temperature of each part of the “detection target body” is detected by bringing the temperature sensor array into contact with or in close proximity to the “body”, and the sensor signal output from the temperature sensor array is detected as “temperature detection”. It is possible to adopt a configuration and method for analyzing as a “result” and detecting that “foreign matter” is present in “a heat generating part generated by heat generation processing”. Even when such a configuration and method are employed, the same effects as those of the foreign object detection device 1 and the foreign object detection method by the foreign object detection device 1 can be obtained.

  Further, by irradiating the resin film 20 as the “detection object” with the microwave Wm, the foreign matter detection devices 1 and 1A for detecting only the “conductive foreign matter X” that generates heat by the irradiation of the microwave Wm, and Although the foreign matter detection method has been described, the configuration of the “foreign matter detection device” and the “foreign matter detection method” are not limited to this. For example, an electron beam irradiation unit (not shown) that irradiates the resin film 20 with an electron beam instead of the microwave irradiation unit 3 in the foreign matter detection device 1 or 1A described above is disposed as a “heat generation processing unit”. An example of “electron beam irradiation process”, which is another example of “heat generation process”, by selectively radiating “contaminating foreign matter X” by irradiating the resin film 20 with an electron beam by the electron beam irradiation unit ) Can be employed (not shown). According to the foreign object detection device and the foreign object detection method adopting such a configuration, in the same way as the foreign object detection method by the foreign object detection device 1A and the foreign object detection device 1A described above, the resin film 20 is applied to the heat generation process. On the other hand, since the foreign matter X can be generated without contact, the foreign matter X can be detected without damaging the resin film 20.

  Further, a high-frequency magnetic field generation unit that generates a high-frequency magnetic field in the range of 100 kHz to 3 GHz in the transport path of the resin film 20 by the transport mechanism 2 instead of the microwave irradiation unit 3 in the foreign matter detection device 1 or 1A described above is referred to as “heating process”. In addition, the resin film 20 formed in a band shape with a non-conductive material is transported while traveling along the longitudinal direction, and a high-frequency magnetic field is generated in the transport path of the resin film 20 to transport the resin film 20. A configuration and a method for performing a process of selectively heating the “conductive foreign matter X” by exposing the film to a high-frequency magnetic field (an example of a “high-frequency magnetic field generation process” which is still another example of the “heat generation process”) It can be employed (not shown). According to the foreign object detection device and the foreign object detection method adopting such a configuration, in the same way as the foreign object detection method by the foreign object detection device 1A and the foreign object detection device 1A described above, the resin film 20 is applied to the heat generation process. On the other hand, since the foreign matter X can be generated without contact, the foreign matter X can be detected without damaging the resin film 20.

  On the other hand, the “foreign matter” included in the “detection object” differs in the frequency of the microwave that suitably generates heat and the frequency of the high-frequency magnetic field that preferably generates heat depending on the size and composition. Therefore, in the foreign object detection apparatus including the “microwave irradiation unit” as the “heat generation processing unit” and the foreign object detection method for executing the “microwave irradiation process” as the “heat generation process”, a plurality of types of micros with different frequencies are used. It is preferable to irradiate the “detection object” with a wave. Further, in the foreign object detection apparatus including the “high-frequency magnetic field generation unit” as the “heat generation processing unit” and the foreign object detection method for executing the “high-frequency magnetic field generation process” as the “heat generation process”, a plurality of types of high-frequency waves with different frequencies are used. It is preferable to generate a magnetic field around the “detection target”. By adopting such a configuration, various “foreign substances” having different sizes and compositions can be reliably detected.

  As for the above-mentioned “plurality of types of microwaves having different frequencies”, a plurality of types of microwaves having different frequencies are emitted from a plurality of irradiation sources, and the plurality of types of microwaves are used as “detection objects”. A configuration / method for simultaneous (or sequential) irradiation and a plurality of microwaves having different frequencies from one irradiation source (for example, by sweeping the frequency) and a plurality of types of microwaves Any of a configuration and a method for sequentially irradiating a wave to a “detection target” can be employed. Similarly, for “a plurality of types of high-frequency magnetic fields having different frequencies”, a plurality of types of high-frequency magnetic fields having different frequencies are generated simultaneously (or sequentially) around the “detection target” by a plurality of magnetic field generation sources. Either a configuration / method to be generated, or a configuration / method to sequentially generate a plurality of types of high-frequency magnetic fields having different frequencies by a single magnetic field generation source around the “detection target” can be employed.

  Further, the configuration / method of detecting the foreign matter X while the belt-shaped resin film 20 is set as a “detection target” and the resin film 20 is caused to travel by the transport mechanism 2 has been described. It is also possible to detect whether or not the foreign material X is contained in an insulating sheet (an example of a short “inspection object”: not shown) that has been cut. Specifically, in a state where the insulating sheet is stationary, any one of the above-described various “heat generation processes” is executed, and thereafter, the insulating sheet is imaged by the thermo camera 4, and the imaging result of the thermo camera 4 (described above) (Similar data to the captured image data Da) can be analyzed, and a configuration / method for detecting that the foreign matter X is present in the heat generation portion that has generated heat by the “heat generation processing” can be employed.

  Even in the case of adopting such a configuration / method, unlike the conventional foreign matter inspection apparatus, not only the “conductive foreign matter X” that generates heat by “heat generation processing” can be easily detected, By identifying the presence or absence of the foreign matter X based on the presence or absence of the foreign matter X generated by the “heat generation process” and a sufficiently wide area (heat generation part) including the surrounding area of the foreign matter X, the relatively low-resolution thermo camera 4 As a result, it is possible to reliably detect even a very small foreign object X, and a high-resolution imaging device and a high-performance “analysis detection unit” capable of processing a large amount of data in a short time are eliminated. It is possible to sufficiently reduce the cost required for the detection.

  In addition, in a state where the insulating sheet is stationary, after performing any of the above-mentioned various “exothermic treatments”, a “heat-sensitive part (for example, thermal paper)” is brought into contact with the insulating sheet (“thermal treatment”). After that, the “thermosensitive part” is imaged by the optical camera 14 and the imaging result of the optical camera 14 (data similar to the above-described imaging data Db) is analyzed. It is possible to employ a configuration / method for detecting the presence of the foreign matter X in the portion of the insulating sheet corresponding to the discolored portion in “Recording material)”.

  Even in the case of adopting such a configuration / method, unlike the conventional foreign matter inspection apparatus, not only the “conductive foreign matter X” that generates heat by “heat generation processing” can be easily detected, Relatively low resolution by identifying the presence or absence of the foreign matter X based on the presence or absence of the foreign matter X generated by the “heat generation process” and a sufficiently large region (discolored portion) in contact with the surrounding region (heating portion) of the foreign matter X The optical camera 14 can reliably detect even a very small foreign object X, and there is no need for a high-resolution imaging device or a high-performance “analysis detection unit” that can process a large amount of data in a short time. As a result, the cost required for detecting the foreign matter X can be sufficiently reduced. Further, for example, since the optical camera 14 is less expensive than the thermo camera 4, the cost required for detecting the foreign matter X can be further reduced.

  Further, the foreign object detection devices 1 and 1A including the processing unit 6 corresponding to the “control unit” and the “analysis detection unit” have been described as examples. However, the “control unit” and the “analysis detection unit” A configuration provided separately and independently can also be employed.

DESCRIPTION OF SYMBOLS 1,1A Foreign object detection apparatus 2 Conveyance mechanism 2a Motor 3 Microwave irradiation part 4 Thermo camera 5 Marking part 6 Processing part 11 Thermal roll 12 Cleaner 13 Cooling part 14 Optical camera 20 Resin film 20a Feeding side roll 20b Winding side roll Aa, Ab1, Ab2 area Da, Db Imaging data M Defective point identification mark S2-S5, S13, S14 Control signal Wm Microwave X Foreign object

Claims (14)

  A heat generation processing unit that performs a heat generation process for selectively generating heat from a foreign substance having conductivity contained in a detection object formed of a non-conductive material, and a temperature detection that detects the temperature of each part of the detection object The heat generation processing by the heat generation processing unit, the control unit for controlling the detection of the temperature of each part in the detection target body by the temperature detection unit, and the temperature detection result of the temperature detection unit is analyzed, the heat generation processing A foreign matter detection apparatus comprising: an analysis detection unit that detects that the foreign matter is present in a heat generation portion generated by heat. As the heat detection unit, comprising a thermo camera that images the detection object,
The foreign matter detection device according to claim 1, wherein the analysis detection unit analyzes an imaging result of the thermo camera as the temperature detection result and detects that the foreign matter is present in the heat generation portion.   The foreign object detection device according to claim 1, further comprising a transport mechanism that transports the detection object formed in a strip shape of the nonconductive material along the longitudinal direction according to control of the control unit.   A heat generation processing unit for performing heat generation processing to selectively generate heat from a foreign substance having conductivity contained in a detection object formed of a non-conductive material, and at least a surface portion of a heat-sensitive recording material that changes color according to temperature A portion of the thermosensitive recording material that is in contact with the heat generating portion of the detection target body by bringing the surface portion of the heat sensitive portion into contact with the detection target body that has the heat sensitive portion disposed thereon A heat-sensitive part for performing heat-sensitive heat treatment to change the color, an optical camera for imaging the surface portion of the heat-sensitive part, the heat-generating process by the heat-generating part, the heat-sensitive part by the heat-sensitive part, and the optical camera by the optical camera A control unit that controls imaging of the thermosensitive part and an imaging result of the optical camera are analyzed, and the part of the detection object corresponding to the discolored part in the thermosensitive recording material is analyzed. There foreign matter detecting device comprising an analysis detection unit for detecting a present. A transport mechanism that transports the detection object formed in a strip shape with the non-conductive material along the longitudinal direction according to the control of the control unit;
The heat-sensitive portion is arranged on the detection target body on which the heat-sensitive recording material that is reversibly discolored according to temperature is disposed at least on the peripheral surface to form a roll and the heat generation process is performed. The foreign object detection device according to claim 4, further comprising, as the heat-sensitive portion, a heat-sensitive roll that is in contact with the heat-sensitive roller and is rotatably arranged in accordance with the conveyance of the detection object by the conveyance mechanism.   The foreign object detection device according to claim 5, further comprising a cooling unit that cools the peripheral surface that has been imaged by the optical camera.   The heat generation processing unit includes a microwave irradiation unit that irradiates the detection object with a microwave, an electron beam irradiation unit that irradiates the detection object with an electron beam, and a high frequency that generates a high-frequency magnetic field around the detection object. The foreign matter detection device according to claim 1, wherein the foreign matter detection device is configured by any one of the magnetic field generation units.   The foreign object detection according to claim 7, wherein the heat generation processing unit is configured to include the microwave irradiation unit, and the microwave irradiation unit irradiates the detection object with a plurality of types of microwaves having different frequencies. apparatus.   The heat generation processing unit includes the high-frequency magnetic field generation unit, and the high-frequency magnetic field generation unit generates a plurality of types of the high-frequency magnetic fields having different frequencies around the detection target body. Foreign object detection device.   The foreign object detection device according to claim 1, further comprising a marking unit that marks a part that is specified as being present when the foreign object is present in the detection object.   A heat generation process for selectively generating heat in a foreign object having conductivity contained in the detection target body formed of a non-conductive material is performed, and the temperature of each part in the detection target body that has performed the heat generation process is determined. A foreign matter detection method that detects the presence of the foreign matter in a heat generation part that generates heat by the heat generation process while detecting the temperature detection result.   The detection target body that has performed the heat generation process is imaged by a thermo camera, and the imaging result of the thermo camera is analyzed as the temperature detection result to detect that the foreign matter is present in the heat generation portion. Foreign object detection method.   A heat-sensitive recording material that selectively generates heat from conductive foreign substances contained in the detection target formed of a non-conductive material is executed, and a heat-sensitive recording material that changes color according to temperature is disposed at least on the surface. Performing a heat-sensitive heat treatment to change the portion of the heat-sensitive recording material in contact with the heat generation portion of the detection target body by bringing the surface portion of the heat-sensitive portion into contact with the detection target body that has performed the heat generation processing, and The surface portion of the heat sensitive part is imaged by an optical camera, and the imaging result of the optical camera is analyzed to detect that the foreign matter is present in the portion of the detection target corresponding to the discolored portion in the heat sensitive recording material. Foreign object detection method.   Any of a microwave irradiation process for irradiating the detection object with microwaves, an electron beam irradiation process for irradiating the detection object with an electron beam, and a high-frequency magnetic field generation process for generating a high-frequency magnetic field around the detection object The foreign object detection method according to claim 11, wherein the method is executed as the heat generation process.

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