JP2011204905A - Electric processing device and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stably perform electric processing on a thin film solar cell in a short time.SOLUTION: An electric processing device for a thin film solar cell contains a material having a property of adsorbing water and includes: a probe unit used to perform the electric processing on the thin film solar cell; and a suction mechanism of reducing a pressure of a processing object area where the probe unit performs the processing in contact with the thin film solar cell when performing the electric processing on the thin film solar cell using the probe unit.

Description

  The present invention relates to an electrical processing apparatus and method, and can be applied to, for example, electrical processing such as inspection for the presence or absence of a short circuit between solar cells constituting a thin film solar cell and removal of a short circuit.

  A thin-film solar cell is formed by laminating a light-transmitting substrate side electrode, a photoelectric conversion semiconductor layer, and a back electrode on a light-transmitting glass substrate of about 1 m in length and width, and having a certain interval (usually several tens of μm to It is manufactured through a grooving step of forming solar cells constituting the thin film solar cell in a constant width (usually about several mm to 10 mm) with a constant width (about 100 μm). In this manufacturing process, a short circuit part may arise between adjacent photovoltaic cells, or a short circuit part may arise between the board | substrate side electrode and back surface electrode of the same photovoltaic cell. Also, pinholes are formed in the photoelectric conversion semiconductor layer during the manufacturing process, or impurities are mixed, so that the same solar cell cells or the substrate side electrode and the back electrode of the same solar cell Short-circuits often occur.

  Therefore, conventionally, in the manufacturing process of a thin film solar cell, the presence or absence of the short-circuited portion is inspected, and a current is concentrated on the short-circuited portion by applying a reverse bias voltage to the detected short-circuited portion. A step of removing the short-circuit portion by scattering the conductive portion of the short-circuit portion or oxidizing and insulating the short-circuit portion.

  Methods such as detection processing, removal processing, and characteristic measurement of the short-circuit portion of the thin-film solar cell are disclosed in Patent Documents 1 and 2. Patent Document 2 performs characteristics measurement and characteristic improvement of a solar battery cell by applying a voltage to the solar battery cell, and Patent Document 1 discloses a probe that can contact the surface of the solar battery cell. Yes.

  Thin-film solar cells, as described above, apply a transparent conductive thin film such as zinc oxide, indium tin oxide, and tin oxide to the glass plate that will be the substrate to form the substrate-side electrode, and then determine the characteristics of polycrystalline silicon oxide on it. A small amount of substances are mixed, and photoelectric conversion semiconductor layers are stacked as a P layer, an I layer, and an N layer, respectively. The uppermost layer is provided with a silver thin layer or the like as a back electrode. Excitation light such as sunlight passes through the transparent conductive thin film that is the substrate-side electrode from the glass substrate side, reaches each layer of silicon oxide, and is photoexcited to generate a potential difference between the upper substrate-side electrode and the back electrode.

  In recent years, copper, indium, gallium, selenium, etc. are used as photoexcitation materials in addition to silicon oxide films, and the back electrode does not require light transmission, so many conductive materials other than silver are used. It is done.

  On the other hand, as the substrate-side electrode, there are limited conductive materials that can be used because light transmittance is required. Among them, zinc oxide is a wide-gap semiconductor with a forbidden band width of about 3.37 eV in addition to having good resistivity and light transmittance as the purpose of the solar cell electrode, such as aluminum, gallium, chlorine, Doping with fluorine reduces the resistance, and zinc oxide is excellent in resistance in a reducing atmosphere. Furthermore, zinc oxide has features such as low cost raw materials, and its usefulness is high.

JP 09-186212 A U.S. Pat. No. 4,166,918

  However, the electrical characteristics of the thin-film solar cell when the above-described zinc oxide is used for the substrate-side electrode, for example, when a voltage is applied between solar cells scribed by grooves, the leakage current value becomes a constant value. A series of instabilities may be found, such as the transition time until convergence fluctuates. The cause of this is thought to be that the instability of electrical characteristics has been caused by the impurity levels inside the solar cells, the crystal grain boundaries, and the junction between other thin film stacks. .

  Due to the instability of the electrical characteristics of the thin film solar cell, it takes a long time for the processing in the inspection process and the removal process of the short-circuit portion described above in the manufacturing process of the thin film solar cell. In some cases, the accuracy deteriorated.

  Therefore, there is a demand for an electrical processing apparatus and method that can stably perform electrical processing of thin film solar cells and the like in a short time.

  The electrical processing apparatus of the first aspect of the present invention comprises (1) a probe unit used for electrical processing of a thin film solar cell, and (2) when performing the electrical processing on the thin film solar cell using the probe unit. The probe unit includes a suction mechanism that depressurizes a region to be processed in contact with the thin-film solar cell.

  The electrical processing method of the second aspect of the present invention is (1) an electrical processing method for performing electrical processing on a thin film solar cell, and (2) when performing the electrical processing on the thin film solar cell using a probe unit. In addition, the probe unit is configured to depressurize a region to be processed in which processing is performed in contact with the thin film solar cell.

  ADVANTAGE OF THE INVENTION According to this invention, the electrical treatment of a thin film solar cell can be performed stably in a short time.

1 is a schematic side view of an electric processing apparatus according to a first embodiment. It is explanatory drawing shown about the structure of the experimental sample of the electrical property of the thin film conductive electrode of zinc oxide. It is the graph shown about the experimental result of the electrical property of the thin film conductive electrode of zinc oxide. It is a schematic sectional drawing of the electric processing apparatus which concerns on 1st Embodiment. It is a schematic side view of the electric processing apparatus which concerns on 2nd Embodiment. It is a perspective view which carries out the vacuum sweep of the thin film solar cell with the suction nozzle which concerns on 2nd Embodiment. It is a schematic side view of the electric processing apparatus which concerns on 3rd Embodiment. It is a perspective view of the probe unit which concerns on 3rd Embodiment. It is a schematic top view of the probe unit board | substrate and suction cover which concern on 3rd Embodiment. It is a schematic sectional drawing of the electric processing apparatus of the deformation | transformation embodiment which concerns on 1st Embodiment. It is a perspective view of the probe unit board | substrate of the deformation | transformation embodiment which concerns on 3rd Embodiment.

(A) First Embodiment Hereinafter, a first embodiment of an electric processing apparatus and method according to the present invention will be described in detail with reference to the drawings.

(A-1) About electrical characteristics of thin film solar cell First, the experimental result of the electrical characteristic of the thin film solar cell which used the above-mentioned zinc oxide for a board | substrate side electrode used as the process target in the electrical processing apparatus and method of this invention. Will be described.

  Until now, zinc oxide has been shown to have a high water contact angle and a surface that is difficult to wet with water. However, in recent years, the same materials as zinc oxide, such as aluminum oxide and titanium oxide, are Fourier transform infrared. From the results of spectroscopic analysis and near-infrared absorption measurement, there is a view that the interaction with water molecules is strong and the amount of water molecules adsorbed is large.

  In the electrical processing such as measurement of characteristics of a thin-film solar cell, the present inventors are affected by moisture adsorbed on the substrate-side electrode (made of a coating film of zinc oxide fine particles) using zinc oxide as described above. As a result of the examination under the prediction, the adsorbed moisture has a capacitance, and the voltage applied for measurement is charged to the adsorbed moisture. It came to think that the characteristic to be obtained could not be obtained stably.

  Next, experimental results regarding the electrical characteristics of the zinc oxide thin film conductive electrode, which were performed based on the above-described prediction, will be described.

  FIG. 2 is an explanatory diagram showing the configuration of an experimental sample regarding the electrical characteristics of a zinc oxide thin film conductive electrode.

  As shown in FIG. 2, two thin film conductive electrodes 220-1 and 220-2 coated with zinc oxide having a thickness of about 400 nm separated and insulated by an 80 μm groove 230 are formed on a glass plate 210. Have been prepared.

  The experimental apparatus shown in FIG. 2 applies a direct current of 80 V between the thin film conductive electrodes 220-1 and 220-2 by a power source (not shown). Further, the current value (leakage current value) between the thin film conductive electrodes 220-1 and 220-2 is measured when a voltage is applied by an inspection device (not shown). This is the same as the leakage current measurement in the actual inspection process of the thin film solar cell and the inspection for measuring the insulation resistance between the cells.

  FIG. 3 shows an applied voltage waveform in an experiment in which a voltage is applied between the thin film conductive electrodes 220-1 and 220-2 shown in FIG. 2, and a leakage current waveform when a voltage is applied.

  FIG. 3A shows the result of a leakage current measurement experiment between the thin-film conductive electrodes 220-1 and 220-2 after being left for 24 hours in the first environment (23 ° C., 40% RH). FIG. 3B shows the result of a leakage current measurement experiment between the thin-film conductive electrodes 220-1 and 220-2 after being left for 24 hours in the second environment (23 ° C., 80% RH). .

  Comparing the leakage current values shown in the center of each of FIGS. 3A and 3B, the leakage current value in FIG. 3A shows a stable leakage current value of about several μA immediately after voltage application. FIG. 3B shows that the leakage current does not converge for a long time.

  According to the experimental results shown in FIG. 3, the thin film conductive electrodes 220-1 and 220-2 behave as if the water adsorbed on zinc oxide, which is the main component, has a capacitance, and depend on the applied voltage. This supports the expectation that the electric charge will be charged to the adsorbed moisture, and therefore factors such as the adsorption state and adsorbed amount of the adsorbed moisture affect the stability of the electrical characteristics, and the leakage current is the intrinsic leakage current value. It shows that this is the cause of the difference in time until convergence.

  In other words, when the above experimental results are considered side by side, the electrical characteristics are unstable in the solar cell using the thin film layer structure mainly composed of a material having a large moisture adsorption ability such as zinc oxide. One of the reasons is that the thin film layer using a material with high water adsorption ability such as zinc oxide, which has been considered to be hydrophobic in the past, may impair the electrical stability due to the adsorbed water. It is something to make.

  As described above, in order to stabilize the electrical characteristics of the thin film solar cell using the zinc oxide thin film conductive electrode, an adsorbed moisture removing process for removing the adsorbed moisture of the thin film solar cell is required.

  As a method for removing the adsorbed moisture of the thin film solar cell, a method of heating the solar cell substrate is conceivable. However, the solar cell device generally has a large area exceeding one square meter, and the heating process is performed using such a solar cell substrate. When applied to a battery substrate, the arrangement and cost of a heating source for a large-area substrate, the energy required for heating, etc., and the fact that it takes a long time to raise the temperature of the entire substrate, it is difficult to obtain a uniform heating state There are many problems.

  As another method for removing the adsorbed moisture of the thin film solar cell, it is conceivable to blow an air flow on the entire surface of the thin film solar cell or an area where electric treatment is to be performed. In addition to the limit, dust other than the adsorbed moisture existing on the solar cell substrate is scattered, and for example, scribing residue may be mixed between other cells, causing irregular conduction and causing cell failure. In addition, by blowing an air flow on the thin film solar cell, the adsorbed moisture released by the air flow is sent in the outflow direction of the air flow to cause new adsorption, or the air flow containing the adsorbed moisture diffuses throughout the substrate. However, when they are re-adsorbed, adsorbed moisture is unevenly distributed on the substrate. When they are re-adsorbed, the solar cells and electrodes are shipped in a non-uniformly deteriorated state. There is a risk that is. Furthermore, in recent years, the use of soft materials due to the development of new materials and the blowing of air currents on solar cells that are becoming thinner have the potential to cause physical damage and are expected to be promising. I can't. For diffusion of adsorbed moisture and dust, it is conceivable to control the flow direction of the air flow to be constant. However, in a base-side measuring device having a large area such as a solar cell substrate, a huge blowing air flow is used. Since the rectifying plate provided inside is controlled, the apparatus is inevitably increased in size and cost.

  Further, as will be described later, removal of the adsorbed moisture adsorbed inside each layer of the thin film solar cell other than the adsorbed moisture on the surface of the thin film solar cell is still not achieved by the above methods.

  Therefore, the improved method of electrical processing equipment used for the above-mentioned measurement of thin film solar cell characteristics, short-circuit removal, etc. is due to the measurement method or the processing method during electrical processing, especially improvement of the probe unit, etc. Therefore, the solution of the above-mentioned problem, which is the object of the present invention, is achieved by a suction mechanism that can efficiently remove the adsorbed moisture of the thin-film solar cell. And by the suction mechanism, the adsorbed moisture of the above-mentioned thin film solar cell and the similar adsorbed moisture of the photoelectric conversion layer lower the water vapor pressure by reducing the pressure. Bring. Although some of these effects can be expected, for example, by blowing airflow, etc., desorption of moisture adsorbed on the surface of each layer of the thin film solar cell forms a considerably dried airflow and each layer. If a strong flow velocity that can cut off the intermolecular cohesive force (for example, van Der Waals adsorption force) acting between the material particles to be adsorbed and the adsorbed moisture particles is prepared, a certain degree of effect can be expected. Although removal of adsorbed moisture on the surface of such a thin film solar cell can be expected to some extent, adsorbed moisture present inside each layer of the thin film solar cell cannot be eliminated by such airflow as described above. This is because the adsorbed moisture existing inside them occupies a large part in the formation of the floating electric capacity inside each layer as described above.

(A-2) Configuration and Operation of the First Embodiment FIG. 1 is a schematic side view of the electric processing apparatus 1 of the first embodiment.

  The electric processing apparatus 1 includes a probe unit 10, a processing target battery transfer mechanism 20, and a suction mechanism 30. The electrical processing apparatus 1 uses the probe unit 10 to electrically connect to the thin film solar cell B to be processed, and performs predetermined electrical processing (for example, the above-described short-circuit inspection processing and removal processing). is there. The thin-film solar cell B uses the aforementioned zinc oxide substrate-side thin-film electrode.

  Although not shown in FIG. 1, the electrical processing apparatus 1 performs electrical processing on the thin-film solar cell B, such as a control unit that controls the operation of each unit and a drive source that operates the probe unit 10. Other configurations necessary for this purpose are also included.

  The processing target battery transport mechanism 30 includes a transport motor, a transport conveyor, and the like, and transports the thin-film solar battery B to an electrical processing position under the control of a control unit (not shown) to cause electrical processing by the probe unit 10. The thin film solar cell B is transported to the next step after completion of the processing.

  The probe unit 10 has a probe unit substrate 11 to which a plurality of probe pins (terminals) 12 are attached.

  The probe unit 10 can move up and down relatively with respect to the thin-film solar cell B under the control of a control unit (not shown). The probe unit 10 is at an upper standby position when the processing target battery transport mechanism 20 is carried into and out of a predetermined inspection processing position, and is not hindered in transporting the thin-film solar battery B. The probe unit 10 brings the probe pin 12 into contact with the electrode of the thin film solar cell B and electrically connects it to the thin film solar cell B during electrical processing.

  About the structure of the probe unit board | substrate 11 and the probe pin 12, the thing similar to what electrically processes the existing thin film solar cell is provided. Note that the number and position of the probe pins 12 provided on the probe unit substrate 11 are provided as necessary corresponding to the electrodes provided on the thin film solar cell B that is in contact and electrically connected.

  The suction mechanism 30 depressurizes at least an area where the thin film solar cell B is subjected to electrical processing before the thin film solar cell B is processed by the probe unit 10, thereby removing adsorbed moisture.

  In the electric processing apparatus 1, when the thin film solar cell B is carried in, first, the vacuum mechanism as described above is performed by the suction mechanism 30, and then the electric processing by the probe unit 10 is performed.

  The suction mechanism 30 includes a suction source 31 and a housing 32.

  The casing 32 is attached so as to cover the processing target battery transport mechanism 20 and makes the thin film solar cell B transported on the processing target battery transport mechanism 20 substantially sealed. The casing 32 is preferably made of a material having high hermeticity or rigidity, and here it is made of SUS because of its corrosion resistance. However, for example, a metal or resinous material (for example, plastic or rubber) is used. Etc.) may be used.

  Further, the housing 32 is provided with a carry-in port for carrying in the thin-film solar cell B on the processing target battery carrying mechanism 20 and a carry-out port for carrying out, and the thin film carried into the housing 32. In order to keep the solar cell B in a substantially sealed state, an opening / closing mechanism is provided at the carry-in port and the carry-out port. The opening / closing mechanism may be simplified or omitted depending on other configurations, such as control of pressure reduction.

  The probe unit substrate 11 is provided with a drive mechanism 112 that moves the probe unit 10 up and down, and the drive mechanism 112 may be fixed to the upper inner surface of the housing 32 as shown in FIG.

  A control unit, a power source and the like (not shown) of the main body of the electric processing apparatus 1 and the probe unit substrate 11 are connected by a cable 111. As shown in FIG. 1, the cable 111 is connected to the main body side of the electric processing apparatus 1 through a hole 323 provided in the housing 32. Note that the gap between the hole 323 and the cable 111 is filled with caulking or the like, but the sealing property may be secured by other methods. Further, it is desirable that the cable 111 has a sufficient length that does not hinder the vertical movement of the probe unit substrate 11.

  FIG. 4 is a schematic cross-sectional view of the electric processing apparatus 1. In FIG. 4, the probe unit 10 and the suction source 31 are not shown.

  As shown in FIGS. 1 and 4, on the side surface of the casing 32, in the vicinity of the conveyance path in which the thin film solar cell B of the processing target battery conveyance mechanism 20 is conveyed, in the horizontal direction (direction along the conveyance path). A slit 321 is provided. In addition, an opening 322 is provided in the upper part of the housing 32, and the suction source 31 is connected to the opening 322. In the housing 32, the position of the opening 322 is not limited, but the vicinity of the position where the thin film solar cell B is subjected to the decompression process (in the example of FIG. 1, the vicinity of the upper part of the probe unit 10) is the decompression process. It can be done efficiently.

  The suction source 31 is for sucking the inside of the housing 32 under reduced pressure from the opening 322 of the housing 32. As the suction source 31, a known device that performs vacuum suction applicable to this purpose can be used.

  When the inside of the housing 32 is depressurized by the suction source 31, external air is introduced into the housing 32 through a gap provided between the housing 32 and the thin-film solar cell B, such as the slit 321, thereby generating an air flow. Arise. The adsorbed moisture desorbed from each surface of the thin film conductive electrode and the thin film solar cell B is excluded by this air flow, and the adsorbed moisture is efficiently removed from the housing 32.

  The suction pressure of the suction source 14 can be adjusted, and a known method can be applied as the control method. The vacuum suction pressure by the suction source 14 is appropriately controlled depending on the process.

  Further, the suction by the suction source 14 is started at an appropriate timing depending on the process and the like, for example, the suction is started before the electrical processing for the thin film solar cell B is started.

(A-3) Effects of the First Embodiment According to the first embodiment, the following effects are obtained.

  In the electric processing apparatus 1, by providing the suction mechanism 30, the adsorbed moisture is removed from the thinned solar cell B in the decompressed region, and the electrical stability when the thin film solar cell B is electrically processed is maintained. be able to. In the thin film solar cell using the zinc oxide electrode having the characteristics as shown in FIG. 3 described above, the time required for electrical processing on the thin film solar cell B can be shortened and the processing accuracy can be improved.

  And after performing the inspection process by the electric processing apparatus 1, the same characteristics as when the inspection process is performed by the electric processing apparatus 1 are maintained for the products subjected to the sealing process, and the quality accuracy of the thin film solar cell product is improved. Can be made.

  In the first embodiment, the suction mechanism 30 is provided mainly for the purpose of decompressing the thin film solar cell B. However, not only the adsorbed moisture desorbed by suction but also the surface of the thin film solar cell B is provided. The attached dust can also be removed, and the electrical characteristics of the thin film solar cell B can be further stabilized.

(B) Second Embodiment Hereinafter, a second embodiment of the electric processing apparatus and method according to the present invention will be described in detail with reference to the drawings.

(B-1) Configuration and Operation of Second Embodiment FIG. 5 is a schematic side view of an electric processing apparatus 1A that processes the solar battery cell of the second embodiment.

  In the electrical processing apparatus 1A according to the second embodiment, the suction mechanism 30 according to the first embodiment is merely replaced with the suction mechanism 30A, and thus detailed description other than the suction mechanism 30A is omitted.

  The suction mechanism 30 </ b> A of the second embodiment includes a suction source 31, a suction nozzle 34, and a tube 35.

  As shown in FIG. 5, the suction mechanism 30A is disposed on the transport path of the processing target battery transport mechanism 20 in front of the probe unit 10 in the transport direction, and the thin film solar cell B is carried into the electric processing apparatus 1A. First, the decompression process similar to that of the first embodiment is performed by the suction mechanism 30A. Thereafter, the thin film solar cell B is transported to the position of the probe unit 10 by the processing target battery transport mechanism 20 and electrical processing is performed by the probe unit 10. In FIG. 5, the position where the pressure reducing process is performed by the suction mechanism 30 </ b> A on the conveyance path and the position where the electrical processing is performed by the probe unit 10 are described as different positions, but the position where the pressure reducing process is performed is not limited. For example, after the decompression process by the suction mechanism 30A for the stationary thin film solar cell B, the probe unit 10 may be moved to the same position and processed at the same position. When the decompression process and the electrical process are performed on the thin-film solar battery B at the same position, the probe unit 10 and the suction mechanism 30A need not be hindered from interfering with each other.

  The suction mechanism 30 </ b> A includes a suction source 31, a suction nozzle 34 for sweeping the thin-film solar cell B under reduced pressure, and a tube 35 that connects the suction source 31.

  FIG. 6 is a perspective view showing how the thin film solar cell B is swept under reduced pressure by the suction nozzle 34.

  Although the shape and size of the suction nozzle 34 are not limited, as shown in FIGS. 5 and 6, the suction nozzle 341 (opening) having a length substantially the same as one side of the rectangular thin film solar cell B is provided. To get good results.

  In FIG. 5 and FIG. 6, the suction source 31 sucks the portion where the probe pin 12 comes into contact with the thin film solar cell B and performs processing through the suction nozzle 34 under reduced pressure. The suction source 31 can be the same as that in the first embodiment.

  In FIG. 5, the area below the suction port 341 of the suction nozzle 34 in each surface of the thin film solar cell B is in a substantially sealed state, and the suction moisture 31 is sucked under reduced pressure to promote and remove adsorbed moisture. .

  In the suction mechanism 30A, the suction nozzle 34 is disposed above the upper surface of the thin film solar cell B by a driving mechanism (not shown), and the thin film solar cell B is swept under reduced pressure. As shown in FIG. 6, when the suction port 341 has substantially the same length as one side of the thin film solar cell B, the entire region of the thin film solar cell B can be obtained by scanning the suction nozzle 34 once in one direction. Can be swept.

  In FIG. 6, the scanning direction of the suction nozzle 34 is not limited as long as the entire thin film solar cell B can be swept, and the scanning direction, the suction port direction, the number of times of scanning, and the like are not limited. For example, as shown in FIG. 6, the suction nozzle 34 may be linearly scanned once, or the tube 35 may be rotated about an axis. 5 and 6, the thin film solar cell B is described as having a rectangular plate shape. However, when the thin film solar cell B has another shape (for example, a triangle or a round shape), suction is performed. All of the thin film solar cells B can be swept by combining a series of scans of the nozzles 34.

  In addition, although the material of the suction nozzle 34 is not limited, it is preferable to use a material having high airtightness and rigidity. Here, SUS is used for corrosion resistance, but other materials such as metal and resinous materials are also used. (For example, plastic, rubber, etc.) may be used. The material of the tube 35 is not limited, but it is desirable to use a flexible material that is highly airtight and does not interfere with the operation of the suction nozzle 34. For example, rubber or the like can be used.

  The suction pressure of the suction source 31 can be adjusted, and a known method can be applied as the control method. The vacuum suction pressure by the suction source 31 is appropriately controlled depending on the process and the like.

  For example, in the electrical processing apparatus 1A, by knowing in advance the tact time required for the decompression process of the thin film solar cell B by experiments or the like, the decompression process is completed within a predetermined time (a process for bringing the thin film solar cell B into an electrically stable state) The suction pressure by the suction source 31 and the operation speed of the suction nozzle 34 may be adjusted. With respect to the suction pressure by the suction source 31 and the scanning of the suction nozzle 34, for example, data obtained by programming a series of operation contents in advance in a control unit (not shown) can be stored and operated according to the program.

  The timing at which suction is started by the suction mechanism 30A is appropriately selected depending on the target thin film solar cell B and the process.

(B) Effects of the Second Embodiment In the second embodiment, the following effects are obtained in addition to the effects of the first embodiment.

  In the suction mechanism of the first embodiment, the thin-film solar battery B is in a substantially sealed state by the casing 32 that covers the processing target battery transport mechanism 20, but in the second embodiment, the thin-film solar battery B by the suction nozzle 34. Therefore, it is sufficient to reduce the pressure only in the suction nozzle 34.

Thereby, in 2nd Embodiment, the structure used for an attraction | suction mechanism can be reduced in size, such as being able to use the suction source with the pressure attracted smaller than 1st Embodiment, and cost can be reduced.

  Furthermore, in the first embodiment, when processing a substrate with a large area like a solar cell under reduced pressure, a rectifying plate or the like is arranged depending on the size of the apparatus to control turbulence to avoid turbulent flow. However, in the second embodiment, since only the air flow in the suction nozzle 34 needs to be managed, the structure in the suction nozzle 34 can be configured more simply.

(C) Third Embodiment Hereinafter, a third embodiment of the electric processing apparatus and method according to the present invention will be described in detail with reference to the drawings.

(C-1) Configuration and Operation of Third Embodiment FIG. 7 is a schematic side view of an electric processing apparatus 1B that processes the solar battery cell of the third embodiment.

  The electrical processing apparatus 1B includes a probe unit 10B and a processing target battery transfer mechanism 20. Note that the processing target battery transport mechanism 20 is the same as that in the first embodiment, and thus description thereof is omitted.

  In the first embodiment, the electric processing device 1 is provided with the suction mechanism 30 to dry the thin film solar cell B. However, in the electric processing device 1B of the third embodiment, the probe unit 10B itself sucks. It has a mechanism. Hereinafter, the third embodiment will be described focusing on differences from the first embodiment.

  The probe unit 10 </ b> B includes a probe unit substrate 11, a suction nozzle 13, and a suction source 14. Note that the probe unit substrate 11 is substantially the same as that of the first embodiment, and a detailed description thereof will be omitted.

  FIG. 8 is a perspective view of the probe unit 10B.

  The suction nozzle 13 includes a suction cover 131 that covers the rectangular probe unit substrate 11 from above, and a cylindrical suction duct 132 that is attached to an opening provided on the upper surface of the suction cover 131. Although not shown in FIG. 8, the suction duct 132 is connected to the suction source 14 as shown in FIG.

  The suction source 14 sucks the portion where the probe pin 12 contacts the thin film solar cell B through the suction nozzle 13 under reduced pressure. As the suction source 14, an existing device for performing vacuum suction can be applied.

  In FIG. 7, the portion of the surface of the thin-film solar cell B that is in contact with the probe pin 12 and is subjected to electrical processing is brought into a substantially sealed state by the suction nozzle 13, and the suction source 14 performs vacuum suction. As a result, air is generated when outside air is introduced into the suction cover 131 through a gap provided between the suction cover 131 and the thin film solar cell B. The adsorbed moisture desorbed from each surface of the thin film conductive electrode and the thin film solar cell B is excluded by this air flow, and the adsorbed moisture is efficiently removed.

  Although the material of each part of the suction nozzle 13 is not limited, it is desirable to use a material having high airtightness and rigidity. Here, SUS is used for corrosion resistance. Material (for example, plastic, rubber, etc.) may be used.

  Between the side surface and upper surface of the probe unit substrate 11 and the inner surface of the suction cover 131, as shown in FIG. Further, it is desirable that the lower end of the suction cover 131 is provided with a gap that allows air to flow to the suction source 14 side when the probe unit 10B is lowered. Further, the lower end of the suction cover 131 needs to be at a position that does not interfere when the probe unit 10B is lowered and connected to the thin film solar cell B.

  FIG. 9 is a schematic top view of the suction cover 131 and the probe unit substrate 11. In FIG. 9, illustration of the suction duct 132 and the like is omitted.

  As described above, the suction cover 131 and the probe unit substrate 11 need to be fixed with a gap that allows an air flow to the suction source 14 side. Although the fixing method is not limited, in the third embodiment, a plurality of fasteners 133 (for example, bolts and pins) are provided between the side surface of the probe unit substrate 11 and the inner surface of the suction cover 131 as shown in FIG. It is fixed by. By arranging the fastener 133, it is possible to prevent the airflow toward the suction source 14 from being disturbed while fixing the space between the suction cover 131 and the probe unit substrate 11.

  A control unit, a power source and the like (not shown) of the main body of the electric processing apparatus B1 and the probe unit substrate 11 are connected by a cable 111. As shown in FIG. 8, the cable 111 is connected to the main body side of the electric processing apparatus 1 </ b> B through a hole 134 provided in the suction cover 131. Note that the gap between the hole 134 and the cable 111 is filled with caulking or the like. The cable 111 has a sufficient length that does not hinder the vertical movement of the probe unit 10B.

  The suction pressure of the suction source 14 can be adjusted, and a known method can be applied as the control method. The vacuum suction pressure by the suction source 14 is appropriately controlled depending on the process.

  Further, by knowing in advance the tact time required for the decompression process by the suction source 14 by experiments or the like, the decompression process is completed within a predetermined time (the process for bringing the thin-film solar cell B into an electrically stable state is completed) The suction pressure by the suction source 14 may be adjusted.

(C-2) Effects of Third Embodiment In the third embodiment, the following effects can be obtained in addition to the effects of the first embodiment.

  In the suction mechanism of the third embodiment, it is sufficient to reduce the pressure only in the suction nozzle 13 as in the second embodiment. Thereby, in 3rd Embodiment, the structure used for an attraction | suction mechanism can be reduced in size, such as being able to use the suction source with the smaller pressure to attract | suck similarly to 2nd Embodiment, and cost can be reduced. . In the third embodiment, as in the second embodiment, only the airflow in the suction nozzle 13 needs to be managed.

  In the suction mechanism of the third embodiment, since the suction nozzle and the probe unit are integrated, it is not necessary to provide a mechanism for driving an independent suction nozzle as in the second embodiment. Can be configured.

(D) Other Embodiments The present invention is not limited to the above-described embodiments, and may include modified embodiments as exemplified below.

(D-1) In the electric processing apparatus of each of the above embodiments, when the thin film solar cell B is subjected to a decompression process, the thin film solar cell B is vibrated using an ultrasonic wave generation source or the like, thereby removing dust. Can be performed more efficiently.

(D-2) In the first embodiment, an airflow when performing a suction process by providing a rectifying plate in the housing 32 so that the airflow can be dispersed in all regions of the thin-film solar cell B. May be controlled.

  FIG. 10 is a cross-sectional view when a rectifying plate 324 is provided in the housing 32 of the electric processing apparatus according to the first embodiment.

  As shown in the example of FIG. 10, the rectifying plate 324 may be arranged so that the airflow entering from each slit 321 is directed toward the thin film solar cell B. Note that the best mode is selected as appropriate for the size and shape of the current plate 324 and the position and orientation of the current plate in the housing 32. Further, even if the thin film solar cell B moves on the processing target battery transport mechanism 20 using a movable rectifying plate whose direction of the control unit can be operated by a control unit (not shown), the air current is always transferred to the thin film solar cell. You may make it direct in the direction of the battery B.

(D-3) In 1st Embodiment, the width | variety and length of the slit 321 provided in the housing | casing 32 are not limited, The hole of another shape may be sufficient instead of the shape of a slit. Specifically, for example, a plurality of circular or square holes may be arranged side by side.

  Further, a filter may be arranged so that external dust does not enter through the slit 321 (or a hole corresponding to the slit 321).

(D-4) In 2nd Embodiment, in order that the suction nozzle 13 sweeps all the areas | regions of the thin film solar cell B, it demonstrated as what the suction nozzle 13 scans, but the thin film solar cell B side is processed. Scanning may be performed by the target battery transport mechanism 20.

(D-5) In the second embodiment, the electrical processing by the probe unit 10 is performed after sweeping by the suction nozzle 13, but it may be performed in parallel with the same period. . For example, the suction nozzle 13 may sweep the thin film solar cell B flowing on the processing target battery transport mechanism 20, and the electrical processing by the probe unit 10 may be started from the area where the sweep is completed. Thereby, the processing time with respect to the thin film solar cell B can be shortened.

  In this case, when the thin film solar cell B flows on the processing target battery transport mechanism 20, the suction nozzle 13 is placed at a position where the sweep on the thin film solar cell B is performed without operating the suction nozzle 13. It may be fixed. At that time, the positional relationship between the suction nozzle 13 and the probe unit 10 and the transport by the processing target battery transport mechanism 20 so that the electrical processing by the probe unit 10 can be started from the region where the sweep by the suction nozzle 13 is completed. It is desirable to adjust the speed and timing. Thereby, since it is not necessary to provide a driving source for operating the suction nozzle 13 itself, a suction mechanism can be easily constructed. (D-6) In the third embodiment, it has been described that an existing probe unit substrate 11 can be applied. However, in the probe unit substrate 11, one or a plurality of air holes are provided in a region where the probe pins 12 are not arranged. (Through holes) may be provided.

  FIG. 11 is a perspective view of the probe unit substrate 11 provided with a vent hole in a region where the probe pins 12 are not arranged.

  As shown in FIG. 11, the efficiency of suction by the suction source 31 can be improved by providing a plurality of vent holes 113 in the probe unit substrate 11. Note that the shape, size, number, and the like of the air holes 113 can be determined by optimizing them appropriately in accordance with the process, the form of the target solar cell, and other conditions.

(D-7) In each of the above embodiments, the example in which the electric processing apparatus of the present invention is applied to a thin-film solar cell has been described. However, other embodiments having a material that adsorbs water (for example, zinc oxide) are used. It can be applied to circuits.

  DESCRIPTION OF SYMBOLS 1 ... Electric processing apparatus, 10 ... Probe unit, 11 ... Probe unit board | substrate, 12 ... Probe pin, 20 ... Processing object battery conveyance mechanism, 30 ... Suction mechanism, 31 ... Suction source, 32 ... Housing | casing, 321 ... Slit, 322 ... opening, B ... thin film solar cell.

Claims (7)

A probe unit used for electrical processing of a thin film solar cell;
A suction mechanism for depressurizing a region to be processed in which the probe unit comes into contact with the thin film solar cell when performing the electrical treatment on the thin film solar cell using the probe unit; Electric processing equipment. The suction mechanism is
A casing provided with an intake port for covering the entire thin-film solar cell in the electric processing device and sucking outside air in the vicinity of the arrangement position of the thin-film solar cell;
The electric processing apparatus according to claim 1, further comprising: a suction source that sucks air in the housing. The suction mechanism is
A suction nozzle covering a part of the processing target area;
A suction source for sucking air in the suction nozzle;
The electroprocessing apparatus according to claim 1, further comprising: a driving mechanism that scans the suction nozzle or the thin-film solar cell so that at least the processing target region is swept by the suction nozzle.   The electrical processing apparatus according to claim 3, wherein the electrical processing by the probe unit is started from a region of the processing target region where sweeping by the suction nozzle is completed. The suction mechanism is
A suction nozzle covering at least the probe unit;
A suction source for sucking air in the suction nozzle,
The probe unit is
One or more terminals in contact with the thin film solar cell;
A substrate for supporting the terminal,
The electroprocessing apparatus according to claim 1, wherein the substrate is provided with one or a plurality of vent holes.   The said thin film solar cell which the said electrical processing apparatus performs the said electrical processing equips with the electrode using zinc oxide, The electrical processing apparatus in any one of Claims 1-5 characterized by the above-mentioned. An electrical processing method for performing electrical processing on a thin film solar cell,
When the electrical treatment is performed on the thin-film solar cell using a probe unit, a region to be treated in which the probe unit is brought into contact with the thin-film solar cell to reduce the pressure is reduced.

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