JP2011129927A - Nanoimprint mold conveyance device and transfer method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a nanoimprint mold conveyance device of a transfer device that can perform continuous processing and damages neither a mold nor a body to be transferred. <P>SOLUTION: The conveyance device 3 includes rollers 21a and 21b, which are wound with a conveyance belt 13. When the rollers 21a and 21b rotate in A1 and A2 directions, the conveyance belt 13 moves in B direction to convey the body 9 to be transferred. A belt 11 is provided over the conveyance device 3. The belt 11 is wound around rollers 23a and 23b, and moves in B direction as the rollers 23a and 23b move in C1 and C2 directions. A plurality of molds 15 are provided on a surface of the belt 11. For transfer, while the conveyance belt 13 and belt 11 are moved in B direction, molds 15 are lowered using an actuator and pressed against the body 9 to be transferred, thereby continuously forming a transfer shape. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a nanoimprint mold conveying device and a transfer method using the transfer device of a transfer device that transfers a shape onto a substrate such as a semiconductor using a nanoimprint technology.

Conventionally, photolithography is known as a technique for transferring a circuit pattern shape onto a semiconductor substrate.
In photolithography, a resist, which is a photosensitive agent, is applied onto a semiconductor substrate, the pattern shape is transferred by exposure through a photomask, and then the desired pattern shape is transferred onto the semiconductor substrate by removing the resist. Technology.

On the other hand, in recent years, there is an increasing demand for cost reduction and high accuracy of semiconductor substrates.
However, photolithography has a wide range of processes, poor productivity, and the required dimensional accuracy is approaching the wavelength of the light source used for exposure due to the miniaturization of the transfer shape. Low cost and high accuracy are becoming difficult.

  Therefore, a technique called nanoimprint has recently attracted attention as a technique that can replace photolithography.

  Nanoimprint is a technology that performs pattern shape transfer with an imprint mold, that is, a mold. The mold on which the transfer shape is formed is pressed against the surface of the transferred object such as a resist, and the surface of the transferred object is pressed in the pressed state. By curing, a transfer shape is formed on the transfer target.

  Compared to photolithography, nanoimprint is attracting attention as a low-cost, high-precision technology because the structure of the apparatus is simple and high accuracy can be realized.

  Here, the mold for nanoimprint is conventionally formed on a flat plate, and the shape is transferred by pressing the flat plate against the surface of the transfer target.

On the other hand, such a transfer apparatus cannot perform continuous processing and has poor productivity. Therefore, a mold is provided on the surface of a cylindrical roller, and the shape is continuously transferred onto the transfer target while rotating the mold. An apparatus has been developed, and the following is known (Patent Document 1).
JP 2001-198979 A

However, in the cylindrical roller, the contact between the transfer object and the mold is a line contact.
For this reason, when the continuous treatment is performed, the contact time is short, and the mold and the transfer target are separated before the transfer target is cured, and the transfer shape on the transfer target may be destroyed.

  Therefore, until the transfer body is cured, the rotation of the roller must be stopped while the mold and the transfer body are in contact with each other, and continuous processing cannot be actually performed.

In addition, when separating the mold from the transfer object, the mold cannot be separated vertically from the transfer object because the cylindrical mold cannot be separated vertically.
Therefore, in the case of a transfer shape having a large aspect ratio, there has been a problem that the mold and the transfer target are damaged during separation.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a nanoimprint mold conveyance device for a transfer device that can be continuously processed and does not damage a mold or a transfer target.

  A first invention is a nanoimprint mold transport device used in a nanoimprint transfer device that forms a transfer shape on a transfer target by pressing a mold having a transfer shape on the transfer target, A belt provided opposite to the surface on which the transfer object is placed and continuously movable; a mold having a transfer shape provided on a surface of the belt facing the transfer object; and the mold And a pressing means for pressing the transfer target body.

The belt is wound around a pair of first rollers and is continuously moved by rotation of the pair of first rollers. The belt may have a structure in which plate-like members are joined together, and the roller may have a polygonal prism shape.
The belt has an annular structure in which a plurality of plate-like members are connected in a plane parallel to a surface on which the transferred object is placed, and the mold conveying device attaches the belt to the transferred object. Rotating means for rotating in a plane parallel to the surface to be placed may be provided, and the belt may be continuously moved by rotating the belt by the rotating means.

  The pressing means is an actuator capable of moving the mold up and down substantially vertically with respect to the transferred body, and the mold is lowered by the actuator so that the mold is on the surface of the transferred body. The mold is divided into a plurality of parts, and the actuator is provided on the belt for each of the divided molds, and the divided individual molds are independent of the actuators. May be movable up and down.

  According to a second aspect of the present invention, there is provided a conveying device that conveys the transfer object, a belt that is provided to face a surface of the conveying device on which the transfer object is placed, and that is movable in a conveying direction of the conveying device; Using the nanoimprint transfer device provided on a surface of the belt facing the transport device and having a mold having a transfer shape, and pressing means for pressing the mold against the transfer target, A transfer method for transferring onto a transfer object, wherein the mold is pressed against the transfer object using the pressing means while moving the belt in the transport direction of the transfer object. It is a transfer method characterized by continuously transferring the shape onto the transfer target.

The belt is wound around a pair of first rollers and is continuously moved by rotation of the pair of first rollers. The belt may have a structure in which plate-like members are joined together, and the roller may have a polygonal prism shape.
The belt has an annular structure in which a plurality of plate-like members are connected in a plane parallel to a surface on which the transferred body of the transport device is placed, and the belt is mounted with the transferred body. The belt may move by rotating in a plane parallel to the surface to be placed.

  The pressing means is an actuator capable of moving the mold up and down substantially vertically with respect to the transferred body, and the mold is lowered by the actuator so that the mold is on the surface of the transferred body. The mold is divided into a plurality of parts, and the actuator is provided on the belt for each of the divided molds, and the divided individual molds are independent of the actuators. May be movable up and down.

  In the present invention, the transfer device includes a belt having a mold on the surface, and the mold is brought into contact with the surface of the transfer object while transferring the belt in the transfer direction of the transfer object. Makes surface contact with the transferred object.

  Therefore, the contact time between the mold and the transfer object can be increased compared to the case where a cylindrical mold is used, so that the transfer object can be cured during the contact between the mold and the transfer object, and continuous processing becomes possible. , Productivity is improved.

Further, according to the present invention, the transfer device separates the mold from the transfer target substantially vertically.
Therefore, it is possible to prevent the mold and the transferred body from being damaged during the separation.

Side view showing the transfer device 1 Enlarged sectional view of the vicinity of the boundary between the transfer device 3 and the mold transfer device 5 in FIG. Modified example of FIG. Enlarged sectional view showing the operation of the transfer device 1 during transfer Enlarged sectional view showing the operation of the transfer device 1 during transfer Enlarged sectional view showing the operation of the transfer device 1 during transfer Enlarged sectional view showing the operation of the transfer device 1 during transfer The figure which shows the mold conveyance apparatus 5a The figure which shows the modification at the time of transcription | transfer of the transfer apparatus 1 Side sectional view showing the transfer device 1a Side view showing transfer device 1b 11 is an enlarged cross-sectional view near the boundary between the transfer device 3 and the mold transfer device 5b in FIG. 11 is an enlarged cross-sectional view near the boundary between the transfer device 3 and the mold transfer device 5b in FIG. Side view showing transfer device 1c 14 is an enlarged cross-sectional view near the boundary between the transfer device 3 and the mold transfer device 5c in FIG. 14 is an enlarged cross-sectional view near the boundary between the transfer device 3 and the mold transfer device 5c in FIG. Side view showing transfer device 1d G direction arrow view of FIG. Side view showing transfer device 1e G2 direction arrow view of FIG. 19 is an enlarged cross-sectional view near the roller 61a in FIG. 19 is an enlarged cross-sectional view near the roller 61b in FIG.

DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail based on the drawings.
FIG. 1 is a side view showing the transfer apparatus 1 according to the first embodiment, and FIG. 2 is an enlarged cross-sectional view of the vicinity of the boundary between the conveying apparatus 3 and the mold conveying apparatus 5 in FIG.
FIG. 3 is a modification of FIG.

As shown in FIG. 1, the transfer device 1 has a transport device 3.
The conveying device 3 includes cylindrical rollers 21a and 21b, and a belt-shaped conveying belt 13 is wound around the rollers 21a and 21b.
The rollers 21a and 21b and the conveyor belt 13 constitute the conveyor device 3.

The rollers 21a and 21b are pivotally supported by a frame or the like (not shown) and can rotate in the directions A1 and A2 in FIG.
That is, when the rollers 21a and 21b rotate in the A1 and A2 directions, the conveyor belt 13 moves in the B direction.

The conveyance belt 13 is a belt that conveys the transfer target 9, and the long transfer target 9 is placed on the upper surface.
In other words, the conveyance device 13 conveys the transfer medium 9 in the B direction by moving the conveyance belt 13 in the B direction.

The transfer body 9 is a semiconductor substrate or the like and has a structure in which a resist 9a as a photosensitive agent is applied on a substrate 9b such as silicon as shown in FIG.
In the first embodiment, the resist 9a is a resin having a property of being softened by heat.

On the other hand, as shown in FIGS. 1 and 2, a belt-like belt 11 is further provided above the conveying device 3 so as to face the conveying belt 13.
In addition, cylindrical rollers 23 a and 23 b are provided above the conveying device 3.
The belt 11 is wound around rollers 23a and 23b.
The belt 11 is a member corresponding to the belt described in claim 1.

The rollers 23a and 23b are pivotally supported by a frame or the like (not shown) and can rotate in the C1 and C2 directions, respectively.
That is, when the rollers 23a and 23b rotate in the C1 and C2 directions, the surface of the belt 11 that faces the conveying belt 13 moves in the B direction.
The belt 11 and the rollers 23a and 23b constitute a mold conveying device 5.

As shown in FIG. 2, a plurality of molds 15 are provided on a surface of the belt 11 facing the conveyance belt 13 via a plurality of actuators 17.
A transfer shape 19 is provided on the surface of the mold 15.

The mold 15 is a member that transfers the transfer shape 19 onto the resist 9a. The transfer shape 19 is, for example, a pattern shape of a semiconductor substrate.
The material constituting the mold 15 is preferably a material that can easily be finely processed and can withstand abrasion and shear during transfer.

  Examples of the material satisfying such conditions include silicon, titanium, aluminum, nickel, copper, silicon carbide, silicon nitride, glass, diamond, diamond-like carbon, cubic boron nitride, resin, and a compound and alloy containing these. Can be mentioned.

On the other hand, as in the first embodiment, in the case where the resist 9a is a resin having a property of being softened by heat, the resist 15a is heated at the time of transfer, as will be described later. receive.
Therefore, the material constituting the mold 15 is further required to have heat resistance.

  Therefore, among the above materials, it is desirable to use silicon, titanium, aluminum, nickel, copper, silicon carbide, silicon nitride, glass, diamond, diamond-like carbon, cubic boron nitride, compounds containing these, alloys, and the like.

The actuator 17 is a drive member for moving the mold 15 and can move the mold 15 in the directions D1 and D2 in FIG.
Therefore, when the actuator 17 lowers the mold 15 in the direction D1, the mold 15 can be pressed almost vertically onto the resist 9a, and the pressed mold 15 transfers the transfer shape 19 onto the resist 9a.

On the other hand, when the mold 15 is pressed against the resist 9a, the actuator 17 raises the mold 15 in the D2 direction, so that the mold 15 can be separated substantially vertically onto the resist 9a.
As shown in FIG. 3, the actuator 17 can tilt the mold 15 in the directions E1 and E2 of FIG. 2 so that the surface of the mold 15 forms an angle θ with respect to the surface of the resist 9a. However, the reason for the inclination will be described later.

Further, as shown in FIGS. 1 and 2, a heating unit 33, a cooling unit 37, and a heat insulating unit 35 are provided in the space surrounded by the conveyance belt 13 and in the lower part of the mold conveyance body 5. .
The heating unit 33, the cooling unit 37, and the heat insulating unit 35 are provided in the vicinity of the back surface of the transport belt 13 on which the transfer target 9 is placed.

The heating unit 33, the cooling unit 37, and the heat insulating unit 35 are devices for soft-curing the resist 9a. Of these, the heating unit 33 is provided at a location near the roller 21b.
The heating unit 33 is, for example, an electric heater.

On the other hand, the cooling unit 37 is provided at a location near the roller 21a.
The cooling unit 37 is, for example, an electric or water-cooled cooler.

  A heat insulating unit 35 is provided between the heating unit 33 and the cooling unit 37 so that heat does not move between the heating unit 33 and the cooling unit 37.

That is, the heating unit 33 heats the conveyance belt 13, whereby the substrate 9b of the transfer target 9 is heated, and the heated substrate 9b heats the resist 9a.
As described above, since the resist 9a is a resin having a property of being softened by heat, the resist 9a is softened when heated.
That is, the heating unit 33 indirectly heats and softens the resist 9a.

On the other hand, the cooling unit 37 cools the transport belt 13, thereby cooling the substrate 9 b of the transfer target 9, and the cooled substrate 9 b cools the resist 9 a.
That is, the cooling unit 37 indirectly cools and hardens the resist 9a.

Here, the heating unit 33 is provided near the roller 21b, the cooling unit 37 is provided near the roller 21a, and the transfer medium 9 is conveyed in the B direction.
Accordingly, the transfer body 9 transported on the transport device 3 is first heated by the heating unit 33 and then cooled by the cooling unit 37.

Next, an operation when the transfer apparatus 1 performs transfer on the transfer target 9 will be described.
4 to 7 are enlarged sectional views showing the operation of the transfer device 1 during transfer.

First, an operator or a transport mechanism (not shown) places the transfer medium 9 on the transport belt 13 of the transport device 3.
The rollers 21a and 21b of the transport device 3 rotate in directions A1 and A2 in FIG. 1, respectively, and transport the transport belt 13 and the transfer target 9 placed on the transport belt 13 in the B direction at a constant speed.

  At the same time, the rollers 23a and 23b of the mold conveying device 5 rotate in the directions C1 and C2 in FIG. 1, so that the surface of the belt 11 facing the conveying belt 13 is in the B direction at a speed substantially equal to that of the conveying belt 13. Moving.

As shown in FIG. 4, when the transfer target 9 conveyed to the transfer device 3 reaches the upper part of the heating unit 33, the resist 9 a of the transfer target 9 is indirectly heated by the heat generated by the heating unit 33. The
The heated resist 9a is softened and becomes transferable.

When the resist 9a is in a transferable state, as shown in FIG. 5, the softened mold 15a on the resist 9a is lowered in the direction D1 by the actuator 17a and is pressed almost vertically onto the resist 9a.
The pressed mold 15a transfers the transfer shape 19a onto the resist 9a.

  Here, since the conveyor belt 13 and the belt 11 are moved in the B direction at substantially the same speed, the resist 9a and the pressed mold 15a are integrated with each other in the B direction without shifting their relative positions. Moving.

  When pressing, similar to the mold 15 shown in FIG. 3, the mold 15a may be inclined in the E1 and E2 directions and pressed against the surface of the resist 9a with an angle θ.

  Such a pressing method is effective when there is a risk of air bubbles being trapped between the mold 15a and the resist 9a and causing defects in the transferred shape due to bubbles when pressed vertically.

As shown in FIG. 6, when the resist 9 a further moves in the B direction and the portion pressed by the mold 15 a passes above the cooling unit 37, the cooling unit 37 indirectly cools the resist 9 a of the transfer body 9. Is done.
The cooled resist 9a is eventually cured, and the transfer shape 19a is fixed on the resist 9a.

In FIG. 6, an adjacent portion of the resist 9 a that is pressed by the mold 15 a is heated and softened by the heating unit 33.
Accordingly, the mold 15b provided adjacent to the mold 15a is lowered in the direction D1 by the actuator 17b and presses the resist 9b to transfer the transfer shape 19b.

When the resist 9a is cured, as shown in FIG. 7, the mold 15a is lifted substantially perpendicular to the direction D2 by the actuator 17a and separated from the resist 9a.
A transfer shape 25a that is substantially equal to the transfer shape 19a is transferred onto the resist 9a.

  Thus, since the mold 15a rises substantially vertically and separates from the resist 9a, the possibility of damage to the mold 15a and the transfer target 9 during the separation is lower than when a cylindrical mold is used. .

When the mold 15a is separated from the resist 9a, the actuator 17a is not separated substantially vertically, but the actuator 17a tilts the mold 15a in the directions E1 and E2 in FIG. It is also possible to separate them.
Thus, the separation force required at the time of peeling can be reduced by separating with an angle θ.
However, as described above, since there is a concern that the pattern shape is affected as the angle θ increases, it must be taken into consideration.

On the other hand, in FIG. 7, the portion of the resist 9a that is pressed by the mold 15b is cooled by the cooling unit 33 and hardened.
Moreover, the adjacent part of the part pressed by the mold 15b is heated by the heating part 33, and is softened.

  Thereafter, while the conveying belt 13 and the belt 11 move in the B direction at substantially the same speed, the mold is pressed to the heated and softened portion of the resist 9a, the transferred shape is transferred, cooled and cured. The mold separates from the part.

The above operation is continuously performed until the transfer of the transfer body 9 to the surface of the resist 9a is completed.
When the transfer is completed, the transfer target 9 is wound on a roll (not shown), or is transported to the next step by another transport device (not shown).

As described above, in the transfer apparatus 1, the molds and the resist 9 a are provided on the belt 11 and the conveyance belt 13 that are provided to face each other, and contact and separate during the movement of the belt 11 and the conveyance belt 13.
That is, since each mold and the resist 9a are in surface contact, the contact time between each mold and the resist 9a is longer than when a cylindrical mold is used.

  Therefore, a series of transfer operations such as softening the resist 9a, transferring the shape by pressing the mold onto the resist 9a, curing the resist 9a, and separating the mold from the resist 9a can be performed continuously.

  The maximum time that each mold can contact the resist 9a is determined by the distance between the roller 23a and the roller 23b, and the longer the distance, the longer the time that can be contacted.

  Here, the modification of 1st Embodiment is demonstrated easily. FIG. 8 is a view showing the mold conveying device 5a, and FIG. 9 is a view showing a modification of the transfer device 1 during transfer.

In the mold conveying device 5 in FIG. 1, the belt-like belt 11 is wound around the cylindrical rollers 23a and 23b. However, like the mold conveying device 5a shown in FIG. 8, the belt 13a is replaced with the plate-like member 14. A connected structure may be used.
Moreover, when it is set as such a shape, the shape of a roller may not be cylindrical, but may be a prismatic shape such as rollers 24a and 24b.

By adopting such a shape, it is possible to hold a structure that is vulnerable to bending.
For example, a structure such as an actuator or a thick and brittle mold can be used.
In FIG. 8, the rollers 24a and 24b are octagonal in cross section in the axial direction, but may be polygons other than octagons.

Next, in the transfer apparatus 1 in FIG. 1, the transfer shape is continuously formed on one long transfer target 9, but the transfer target 9 need not be long.
For example, as shown in FIG. 9, the short-form transfer target 10 may be transferred by a plurality of transfer devices 3 and transferred simultaneously to these.

Specifically, as shown in FIG. 9, a transfer device 43 a that is a robot arm places a plurality of transfer objects 10 placed on a shelf 41 a on a transfer device 3.
The transferred object 10 is conveyed in the B direction on the conveying device 3, and the shape is transferred by the mold 15 provided on the belt 11 of the mold conveying device 5 that is also moving in the B direction.

The transferred object 10 whose shape has been transferred is moved to the shelf 41b by the transfer device 43b, which is a robot arm, at the end of the transport device 3.
Thereafter, the transfer target 10 is transported to the next process (not shown) as necessary.

  As described above, according to the first embodiment, the transfer device 1 includes the transport device 3 for transporting the transfer target 9 and the belt 11 provided to face the transport device 3. When the apparatus 3 transports the transfer target 9 in the B direction, the belt 11 also moves in the B direction, and the mold 15 provided on the surface is pressed by the transfer target 9 to transfer the transfer shape 19.

  Accordingly, the contact between the transfer target 9 and the mold 15 is a surface contact, and the contact time between the transfer target 9 and the mold 15 is longer than when a cylindrical mold is used. Can do.

  In addition, according to the first embodiment, after the transfer, the mold 15 is separated from the transfer target 9 substantially vertically, so that the mold 15 and the transfer target 9 can be prevented from being damaged during the separation.

  Next, a second embodiment will be described. FIG. 10 is a side sectional view showing the transfer apparatus 1a according to the second embodiment.

  Note that, in the second embodiment, elements having the same functions as those of the transfer device 1 according to the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  In the transfer device 1a according to the second embodiment, an exposure unit 35a and light shielding units 33a and 37a are provided in place of the heating unit 33, the cooling unit 37, and the heat insulating unit 35 in the transfer device 1 according to the first embodiment. Yes.

  In the first embodiment, a resin having a property of being softened by heat is used as the resist 9a. However, a photocurable resin that is cured by light instead of heat may be used as the resist 9a.

  In such a case, as shown in FIG. 10, it is necessary to provide the exposure part 35a immediately below the part where the molds 15b, 15c and the resist 9a contact, and to provide the light shielding parts 33a, 37a in the other parts.

The exposure unit 35a is a part provided with a light source such as a halogen lamp or a mercury lamp, and these light sources irradiate ultraviolet rays or the like toward the resist 9a.
Since the resist 9a is a photocurable resin that is cured by light, the resist 9a is cured by being irradiated.
The light shielding portions 33a and 37a are portions that block light.

  For example, in FIG. 10, the molds 15b and 15c are in contact with the resist 9a at the upper part of the exposure part 35a. In this state, the molds 15b and 15c of the resist 9a are irradiated with light from the exposure part 35a. The portion in contact with is cured, and the transferred shape is fixed.

In addition, in order for the light from the exposure part 35a to be irradiated to the resist 9a, the conveyance belt 13 and the board | substrate 9b need to be comprised with a transparent material.
In order to prevent external stray light and the like from exposing the resist 9a before transfer, it is desirable that the entire transfer device 1a be covered with a dark box or the like (not shown).

As described above, according to the second embodiment, the transfer device 1 a includes the transport device 3 that transports the transfer target 9 and the belt 11 that is provided to face the transport device 3. When 3 conveys the transfer target 9 in the B direction, the belt 11 also moves in the B direction, and the molds 15 b and 15 c provided on the surface are pressed by the transfer target 9 to transfer the transfer shape 19.
Accordingly, the same effects as those of the first embodiment are obtained.

According to the second embodiment, since the photocurable resin that is cured by light is used as the resist 9a of the transfer target 9, the material constituting the molds 15b and 15c is necessarily required to have heat resistance. Not.
Therefore, the choice of the material which comprises the molds 15b and 15c becomes wider.

  Next, a third embodiment will be described. FIG. 11 is a side view showing a transfer device 1b according to the third embodiment, and FIGS. 12 and 13 are enlarged sectional views in the vicinity of the boundary between the transfer device 3 and the mold transfer device 5b in FIG.

  Note that, in the third embodiment, elements having the same functions as those of the transfer apparatus 1 according to the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  In the transfer device 1b according to the third embodiment, the belt 45 is provided with a mold 45 directly.

As shown in FIGS. 11 and 12, a mold 45 is provided on the surface of the belt 11.
An actuator 49 is provided in the space surrounded by the belt 11, and a pressing plate 47 is provided on the actuator 49.

The pressing plate 47 is provided in the vicinity of the back surface of the surface of the belt 11 that faces the conveyor belt 13.
The actuator 49 is held by a frame or the like (not shown).

The actuator 49 is a drive member that moves the pressing plate 47, and can move the pressing plate in the directions D1 and D2 in FIG.
The pressing plate 47 is a flat member.

When the actuator 49 moves the pressing plate 47 in the direction D1, the belt 11 is pressed by the pressing plate 47 as shown in FIG. 13, and the portion in contact with the pressing plate 47 presses the resist 9a.
Therefore, the mold 45 and the resist 9a are in surface contact.

  Accordingly, when the actuator 49 moves the pressing plate 47 in the D1 direction while continuously moving the belt 11 and the conveying belt 13 in the B direction in FIG. 13, the belt 11 pressed by the pressing plate 47 causes the transferred body 9 to move. The transfer shape of the mold 45 is continuously transferred onto the resist 9a.

  Since the contact area between the mold 45 and the resist 9a is determined by the area of the pressing plate 47, the contact area can be arbitrarily adjusted by changing the area of the pressing plate 47.

  Further, since the belt 11 moves in the B direction, the belt 11 is eventually separated from the resist 9a.

  That is, the closer the distance between the belt 11 and the transport belt 13 is, the smaller the angle α1 formed by the belt 11 and the resist 9a is. On the contrary, the further the distance is, the larger the angle α1 is.

The smaller the angle α1, the more vertically the belt 11 is separated from the resist 9a. Therefore, it is desirable that the angle α1 is as small as possible.
Here, a desirable angle is, for example, 30 degrees or less.

When the belt 11 is separated from the resist 9a at an angle α1 as in the third embodiment, it is desirable that the material constituting the mold 45 be an elastic body.
Examples of such materials include silicon, titanium, aluminum, nickel, copper, and resin.

  As described above, according to the third embodiment, the transfer device 1 b includes the transport device 3 that transports the transfer target 9 and the belt 11 provided to face the transport device 3. When 3 conveys the transfer target 9 in the B direction, the belt 11 also moves in the B direction, and the mold 45 provided on the surface is pressed by the transfer target 9 to transfer the transfer shape 19.

  Accordingly, the same effects as those of the first embodiment are obtained.

In the third embodiment, the transfer device 1b can arbitrarily set the angle α1 formed by the belt 11 and the conveyance belt 13 when the belt 11 is separated from the resist 9a.
Therefore, the mold 45 can be separated from the resist 9a substantially vertically, and the mold 45 and the resist 9a can be prevented from being damaged during the separation.

  Furthermore, according to the third embodiment, since the mold 45 is directly provided on the belt 11, unlike the first embodiment, it is not necessary to provide a plurality of actuators on the belt 11, and the structure is simpler. It is.

Next, a fourth embodiment will be described.
FIG. 14 is a side view showing a transfer device 1c according to the fourth embodiment, and FIGS. 15 and 16 are enlarged sectional views in the vicinity of the boundary between the transfer device 3 and the mold transfer device 5c in FIG.

  In the fourth embodiment, elements having the same functions as those of the transfer device 1b according to the third embodiment are denoted by the same reference numerals, and description thereof is omitted.

  In the fourth embodiment, the roller 51a is provided in the third embodiment. When the belt 11 is pulled into the gap between the roller 51a and the conveyance belt 13, the roller 51a presses the belt 11 against the resist 9a. To do.

  As shown in FIG. 14, in the transfer device 1c, a plurality of rollers such as rollers 51a and 51b are further provided between the rollers 23a and 23b.

The rollers 51 a and 51 b are provided so that the axial direction is perpendicular to the direction B, which is the transport direction, and close to the transport belt 13, and further provided in contact with the belt 11.
Further, the distance between the rollers 51 a and 51 b and the conveyance belt 13 is substantially equal to the sum of the thicknesses of the belt 11 and the transfer target 9.

As shown in FIG. 15, when the roller 23b is rotated in the C2 direction, the belt 11 moves in the E1 direction.
Here, since the roller 51a is provided close to the conveyance belt 13, the belt 11 is drawn into the gap between the roller 51a and the resist 9a.

In addition, since the distance between the rollers 51a and 51b and the conveying belt 13 is substantially equal to the sum of the thicknesses of the belt 11 and the transfer target 9, the gap between the resist 9a and the roller 51a is substantially equal to the thickness of the belt 11. Will be equal.
Accordingly, the drawn belt 11 is pressed against the resist 9a by the roller 51a, and the shape of the mold 45 provided on the surface is transferred to the resist 9a.

  On the other hand, when the transfer is completed, the belt 11 is separated from the resist 9a. However, as shown in FIG. 16, when the belt 11 moves to the roller 23a side from the roller 51b, the belt 11 moves in the E2 direction. Will rise.

Here, the angle α2 when the belt 11 is separated from the resist 9a varies depending on the distance between the roller 23a and the conveyance belt 13.
That is, the closer the distance between the roller 23a and the conveyance belt 13, the smaller the angle α2 formed by the belt 11 and the resist 9a.

As the angle α2 is smaller, the belt 11 is more vertically separated from the resist 9a. Therefore, it is desirable that the angle α2 is as small as possible.
Here, a desirable angle is, for example, 30 degrees or less.

As described above, according to the fourth embodiment, the transfer device 1c includes the roller 51a, and the belt 11 is drawn into the gap between the roller 51a and the conveyance belt 13, whereby the mold 45 on the belt 11 is pressed against the resist 9a. Is done.
Therefore, the same effects as those of the third embodiment are obtained.

  Further, according to the fourth embodiment, the roller 51a presses the belt 11 against the resist 9a, so that an actuator is unnecessary, and the structure is further simplified as compared with the third embodiment.

Next, a fifth embodiment will be described.
FIG. 17 is a side view showing a transfer device 1d according to the fifth embodiment, and FIG. 18 is a view in the direction of the arrow G in FIG.
Note that in the fifth embodiment, elements that perform the same functions as those of the transfer device 1 according to the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  In the fifth embodiment, unlike the first to fourth embodiments, the belt 11a has a structure that rotates in a plane parallel to the surface on which the transfer body 9 is placed.

  As shown in FIGS. 17 and 18, the transfer device 1 d has a transport device 3, and a belt 11 a is provided facing the surface of the transport device 3 on which the transfer target 9 is provided.

As shown in FIG. 18, the belt 11a has a structure in which a plurality of flat plate-like members 12 are connected, and can be rotated in the H direction of FIG. 18 by a rotating means (not shown) such as a motor.
As shown in FIG. 17, a plurality of molds 15 are provided on the surface of the plate-like member 12 facing the conveying device 3 via a plurality of actuators.

That is, the belt 11a rotates in a plane parallel to the surface on which the transfer body 9 is placed.
And the plate-shaped member 12 in the upper part of the conveying apparatus 3 moves to a B direction by the rotation which concerns.

  Note that the structure of the mold 15 and the transfer method are the same as those in the first embodiment, and a description thereof will be omitted.

As described above, according to the fifth embodiment, the transfer device 1d includes the belt 11a, and the mold 15 provided on the surface of the belt 11a facing the transfer target 9 is pressed against the resist 9a. Transcription.
Accordingly, the same effects as those of the first embodiment are obtained.

  In addition, according to the fifth embodiment, the belt 11a rotates in a plane parallel to the surface on which the transfer target 9 is placed, so that the uneven surface side of the mold 15 always faces downward. That is, it is possible to reduce the risk of foreign matter entering the mold irregularities.

Next, a sixth embodiment will be described.
FIG. 19 is a side view showing a transfer apparatus 1e according to the sixth embodiment, and FIG. 20 is a view taken in the direction of arrow G2 in FIG.
21 is an enlarged cross-sectional view in the vicinity of the roller 61a in FIG. 19, and FIG. 22 is an enlarged cross-sectional view in the vicinity of the roller 61b in FIG.

  Note that in the sixth embodiment, elements that perform the same functions as those of the transfer device 1d according to the fifth embodiment are denoted by the same reference numerals, and descriptions thereof are omitted.

  A transfer device 1e according to the sixth embodiment uses a roller 61a as a mold pressing unit in the transfer device 1d according to the fifth embodiment.

As shown in FIGS. 19 and 20, a plurality of rollers such as rollers 61 a and 61 b are provided so as to be in contact with the back surface of the surface of the belt 11 a that faces the conveyance belt 13.
A gap between a plurality of rollers such as the rollers 61 a and 61 b and the conveyance belt 13 is substantially equal to the sum of the thicknesses of the belt 11 a and the transfer target 9.

In other words, the belt 11 a is sandwiched between a plurality of rollers such as rollers 61 a and 61 b and the transport belt 13.
Accordingly, as shown in FIG. 21, the belt 11 a rotates in the H direction of FIG. 20, thereby moving in the E1 direction of FIG. 21 and being drawn into the gap between the roller 61 a and the conveyance belt 13.

At this time, since the distance between the roller 61a and the conveyance belt 13 is substantially equal to the sum of the thicknesses of the belt 11a and the transfer target 9, the gap between the resist 9a and the roller 61a is equal to the thickness of the belt 11a. Almost equal.
Accordingly, the belt 11a is pressed in the F1 direction by the roller 61a and is in close contact with the resist 9a.
Then, the shape of the mold 45 is transferred to the resist 9a.

  On the other hand, when the transfer is completed, the mold 45 is separated from the resist 9a. However, as shown in FIG. 22, when the belt 45a moves to the left side of the roller 61b, the belt 11a moves in the E2 direction, and therefore rises in the F2 direction.

Here, the angle α3 when the belt 11a is separated from the resist 9a can be arbitrarily set by changing the distance between the belt 11a and the transport belt 13.
That is, the closer the distance between the belt 11a and the conveyor belt 13, the smaller the angle α3.

As the angle α3 is smaller, the belt 11a is more vertically separated from the resist 9a. Therefore, it is desirable that the angle α3 is as small as possible.
Here, a desirable angle is, for example, 30 degrees or less.

Thus, according to the sixth embodiment, the transfer device 1e has the roller 61a, and the belt 11a is drawn into the gap between the roller 61a and the conveyance belt 13, whereby the mold 45 on the belt 11a is pressed against the resist 9a. Is done.
Accordingly, the same effects as those of the fifth embodiment are obtained.

According to the sixth embodiment, the angle α3 formed by the belt 11a and the transport belt 13 when separating the belt 11a from the resist 9a can be arbitrarily set.
Therefore, the mold 45 can be separated from the resist 9a substantially vertically, and the mold 45 and the resist 9a can be prevented from being damaged during the separation.

  Furthermore, according to the sixth embodiment, since the roller 61a is provided as the pressing means for the mold 45, a driving device such as an actuator is unnecessary, and the structure is simpler than that of the fifth embodiment.

  As mentioned above, although embodiment of this invention was described referring an accompanying drawing, the technical scope of this invention is not influenced by embodiment mentioned above. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

  For example, in the first embodiment, the heating unit 33, the cooling unit 37, and the heat insulating unit 35 are provided inside the space surrounded by the conveyor belt 13. However, the heating unit 33, the cooling unit 37, and the heat insulating unit 35 are provided in the space surrounded by the belt 11. Alternatively, the resist 9a may be indirectly heated and cooled by heating and cooling the mold 15.

  Similarly, in the second embodiment, the exposure unit 33 a and the light shielding units 35 a and 37 a are provided in the space surrounded by the conveyance belt 13, but may be provided in the space surrounded by the belt 11.

DESCRIPTION OF SYMBOLS 1 ......... Transfer apparatus 3 ......... Conveyance apparatus 5 ......... Mold conveyance apparatus 9 ......... Transfer object 11 ......... Belt 13 ......... Conveyance belt 15 ......... Mold 17 ......... Actuator 19 ......... Transfer shape 21a ... Roller 23a ... Roller 31 ......... Curing device 33 ......... Heating unit 33a ... Exposure unit 35 ...... Heat insulation unit 37 ......... Cooling unit 45 ......... Mold 47 ……… Pressing plate 49 ………… Actuator 51a …… Roller 61a …… Roller

Claims (10)

A nanoimprint mold transport device used in a nanoimprint transfer device that forms a transfer shape on the transfer body by pressing a mold having a transfer shape on the transfer body,
A belt provided facing the surface on which the transfer object is placed and continuously movable;
A mold provided on a surface of the belt facing the transfer target, and having a transfer shape;
A pressing means for pressing the mold against the transferred body;
A mold imprinting device for nanoimprinting, comprising: The belt is
The nanoimprint mold conveying device according to claim 1, wherein the nanoimprint mold conveying device is wound around a pair of first rollers and continuously moved by rotation of the pair of first rollers. The belt is
It has an annular structure in which a plurality of plate-like members are connected in a plane parallel to the surface on which the transferred body is placed,
The mold conveying device comprises a rotating means for rotating the belt in a plane parallel to a surface on which the transfer body is placed,
2. The nanoimprint mold conveying device according to claim 1, wherein the belt is continuously moved by rotating the belt by the rotating means. The pressing means is an actuator capable of moving the mold up and down substantially vertically with respect to the transferred body, and the mold is lowered by the actuator so that the mold is on the surface of the transferred body. Pressed almost vertically
The mold is divided into a plurality of pieces,
The actuator is provided on the belt for each of the divided molds,
2. The nanoimprint mold conveying device according to claim 1, wherein each of the divided molds can be moved up and down independently by the actuator. The belt has a structure in which plate-like members are joined together,
3. The nanoimprint mold conveying apparatus according to claim 2, wherein the roller has a polygonal prism shape. A transport device for transporting the transfer object;
A belt provided opposite to a surface on which the transfer target body of the transport device is placed and movable in the transport direction of the transport device;
A mold provided on a surface of the belt facing the conveying device and having a transfer shape;
A pressing means for pressing the mold against the transferred body;
A transfer method for transferring the transferred shape onto the transfer object using a nanoimprint transfer device comprising:
While the belt is moved in the transfer direction of the transfer body, the transfer shape is continuously transferred onto the transfer body by pressing the mold against the transfer body using the pressing means. A transfer method characterized by the above. The belt is
The transfer method according to claim 6, wherein the transfer method is wound around a pair of first rollers and continuously moves by rotation of the pair of first rollers. The belt is
It has an annular structure in which a plurality of plate-like members are connected in a plane parallel to the surface on which the transferred body of the transfer device is placed,
The transfer method according to claim 6, wherein the belt is moved by rotating the belt in a plane parallel to a surface on which the transfer target is placed. The pressing means is an actuator capable of moving the mold up and down substantially vertically with respect to the transferred body, and the mold is lowered by the actuator so that the mold is on the surface of the transferred body. Pressed almost vertically
The mold is divided into a plurality of pieces,
The actuator is provided on the belt for each of the divided molds,
The transfer method according to claim 6, wherein each of the divided molds can be moved up and down independently by the actuator. The belt has a structure in which plate-like members are joined together,
The transfer method according to claim 7, wherein the roller has a polygonal prism shape.

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