JP2011033089A

JP2011033089A - Mass damper

Info

Publication number: JP2011033089A
Application number: JP2009178250A
Authority: JP
Inventors: Shintaro Miyachi; 慎太郎宮地; Shinichi Yonemoto; 伸一米本
Original assignee: Kurashiki Kako Co Ltd
Current assignee: Kurashiki Kako Co Ltd
Priority date: 2009-07-30
Filing date: 2009-07-30
Publication date: 2011-02-17
Anticipated expiration: 2029-07-30
Also published as: JP5439082B2

Abstract

PROBLEM TO BE SOLVED: To prevent the enlargement of the size of a mass damper AMD which is constituted by storing a mass member 4 in a case 1 attached to an object D through a plate spring 6 so as to be reciprocated, and to easily secure a clearance between the mass member 4 and the case 1 even if the mass damper AMD is erected for use. SOLUTION: A peripheral wall 10 of the case 1 is divided into three in a movement direction (axis X) of the mass member 4, and outer peripheral parts of the two plate springs 6 are held between divided peripheral wall members 10a-10c. The peripheral wall members 10a and 10c at an axial X-direction one end side and the other end side are the same. When the AMD is erected for use, a spacer member 10d is interposed at the one end of the axial X direction of the peripheral wall 10. A thickness of the spacer member 10d corresponds to the deflection of the plate spring 6 deflected by receiving the mass of the mass member 4 when the AMD is erected. COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は例えば精密機器等に取り付けて、その振動を減殺するためのマスダンパに関し、特にマス部材を収容するケースの構造に係る。 The present invention relates to a mass damper that is attached to, for example, a precision instrument and attenuates vibration thereof, and particularly relates to a structure of a case that accommodates a mass member.

従来よりこの種のマスダンパとして、例えば特許文献１に開示されているように、マス部材（可動質量）及びばね部材からなる付加振動系の固有振動数を制振対象物（構造体）に合わせて適切に調整し、その振動、特に共振を打ち消すような反力を発生させるようにしたもの（動吸振器）や、マス部材をアクチュエータにより駆動して、センサにより検出される対象物の振動を打ち消すような制御力を発生させるようにしたもの（アクティブ・マスダンパ、以下、ＡＭＤと略称する）が知られている。 Conventionally, as this type of mass damper, for example, as disclosed in Patent Document 1, the natural frequency of an additional vibration system composed of a mass member (movable mass) and a spring member is matched with the object to be controlled (structure). Appropriately adjusted to generate a reaction force that cancels the vibration, especially resonance (dynamic vibration absorber), or mass member is driven by an actuator to cancel the vibration of the object detected by the sensor There is known an active mass damper (hereinafter abbreviated as AMD) that generates such a control force.

また、本願の出願人は、空気ばね式の除振台上に載置した除振対象物にＡＭＤを取り付けて、簡易的にアクティブな除振制御を行うことについて既に特許出願をしている（特許文献２を参照）。この出願におけるＡＭＤの特徴は、段落００１５〜００１７に記載されているように、マス部材をその移動方向に或る程度以上、離れた２点で各々板ばねにより支持するとともに、その移動方向が上下方向になるようにして、即ち「立てて」使用する場合にマス部材の重量を支持するためのコイルバネを別途、設けたことにある。 Moreover, the applicant of this application has already applied for a patent about performing active vibration isolation control simply by attaching AMD to the vibration isolation object mounted on the air spring type vibration isolation table ( (See Patent Document 2). As described in paragraphs 0015 to 0017, the feature of AMD in this application is that the mass member is supported by two leaf springs at two points apart from each other in the moving direction, and the moving direction is up and down. A coil spring is separately provided to support the weight of the mass member when it is used in the direction, that is, when it is used “standing”.

これは、一般的にＡＭＤの性能を広い周波数域に亘って高めるためには、マス部材及びばね部材からなる付加振動系の固有振動数をできるだけ低くしたいところ、そのためにマス部材を重くし、板ばねを柔らかくすると、ＡＭＤを「立てて」使用するときにマス部材の重力による下方への変位が大きくなってしまうからである。このように大きな変位を見越してケースとのクリアランスを大きめに設定することは、ＡＭＤの小型化にとって好ましいことではない。 In general, in order to improve the performance of AMD over a wide frequency range, it is desired to reduce the natural frequency of the additional vibration system composed of the mass member and the spring member as much as possible. This is because if the spring is softened, the downward displacement due to the gravity of the mass member becomes large when the AMD is used “standing”. Setting a large clearance with respect to the case in anticipation of such a large displacement is not preferable for miniaturization of AMD.

特開２００２ー６１７０３号公報Japanese Patent Laid-Open No. 2002-61703 特開２００８−２６１４３１号公報JP 2008-261431 A

ところが、前記後者の従来例のようにコイルばねを追加する場合でも、ばね定数を十分に低くするために柔らかなコイルばねを用いるのであれば、その自由長がかなり長いものを用いなくてはならず、やはり小型化には不利になる。また、板ばねに加えてコイルばねを設けるのはコストの面でも好ましいことではない。 However, even when a coil spring is added as in the latter conventional example, if a soft coil spring is used in order to sufficiently reduce the spring constant, one having a considerably long free length must be used. It is also disadvantageous for miniaturization. Also, providing a coil spring in addition to the leaf spring is not preferable in terms of cost.

斯かる点に鑑みて本発明の目的は、「立てて」使用する場合でもマス部材とケースとの間に所要のクリアランスを容易に確保することができ、しかもそのケースの大型化を招くことのないマスダンパを提供することにある。 In view of such points, the object of the present invention is to ensure a required clearance between the mass member and the case even when used in an “upright” manner, and to increase the size of the case. There is no mass damper to provide.

前記の目的を達成すべく本発明では、マスダンパを「立てた」ときに、板ばねの撓みによってマス部材が下方に変位することに対応して、このマス部材とケースとのクリアランスを簡単に調整できるように収容室の周壁を分割したものである。 In order to achieve the above object, according to the present invention, when the mass damper is "standing", the clearance between the mass member and the case is easily adjusted in response to the mass member being displaced downward by the bending of the leaf spring. The peripheral wall of the storage chamber is divided so that it can be made.

すなわち、請求項１の発明は、制振対象物に取り付けるケースの内部に、ばね部材を介して所定方向に往復移動可能にマス部材を収容してなるマスダンパが対象であり、そのケースにおいてマス部材を収容する収容室が、当該マス部材の移動方向に延びる筒状の周壁を有し、前記ばね部材は、その周壁の筒軸方向に離間した２箇所においてそれぞれ外周部が当該周壁に、また内周部は前記マス部材に取り付けられた板ばねからなるものとする。 That is, the invention of claim 1 is a mass damper in which a mass member is accommodated inside a case attached to a vibration suppression object so as to be reciprocally movable in a predetermined direction via a spring member. The housing chamber has a cylindrical peripheral wall extending in the moving direction of the mass member, and the spring member has an outer peripheral portion on the peripheral wall and an inner portion at two locations spaced in the cylindrical axis direction of the peripheral wall. The peripheral portion is made of a leaf spring attached to the mass member.

そして、前記収容室の周壁は、前記板ばねの取り付け位置を境に筒軸方向に３分割し、こうして分割した周壁部材の間に前記板ばねの外周部を挟持するとともに、筒軸方向一端側の周壁部材と他端側の周壁部材とでは筒軸方向の長さを異ならせ、その長さの差分を、筒軸を上下方向に向けて配置したときに前記マス部材の重量を受けて撓む前記板ばねの撓み量に対応付ける構成とした。 The peripheral wall of the storage chamber is divided into three in the cylinder axial direction with the attachment position of the leaf spring as a boundary, and the outer peripheral portion of the leaf spring is sandwiched between the divided peripheral wall members, and one end side in the cylinder axial direction The peripheral wall member at the other end and the peripheral wall member at the other end are made to have different lengths in the cylinder axis direction, and the difference in length is flexed by receiving the weight of the mass member when the cylinder axis is arranged in the vertical direction. The configuration is such that it corresponds to the amount of bending of the leaf spring.

斯かるケースの構造によって前記のマスダンパにおいては、マス部材の収容室の周壁を板ばねの取り付け位置を境に３分割し、筒軸方向（マス部材の移動方向）両端側の２つの周壁部材の長さを所要量、異ならせているので、それらの位置を入れ替えることによってマス部材の移動方向の両端面と、これに対向する収容室の端壁面との間隔、即ちマス部材の移動方向におけるケースとのクリアランスを調整することができる。 Due to the structure of the case, in the mass damper, the peripheral wall of the mass member housing chamber is divided into three with the attachment position of the leaf spring as a boundary, and the two peripheral wall members on both ends in the cylinder axis direction (movement direction of the mass member) Since the lengths are different from each other, the distance between the both end surfaces of the mass member in the moving direction and the end wall surface of the storage chamber facing this by changing the positions, that is, the case in the moving direction of the mass member And the clearance can be adjusted.

具体的にはマスダンパを「立てて」、即ちマス部材の移動方向が略上下方向になるように、例えば筒軸方向一端側を下側にして配置するときには、この一端側に長い方の周壁部材を配置する。こうすると短い方の周壁部材との長さの差分だけ、周壁における板ばねの取付位置が高くなるから、その板ばねの撓みによってマス部材が下方に変位しても、当該マス部材の下端面と対向する収容室の下端壁面との間に所要のクリアランスを確保することができる。 Specifically, when the mass damper is "standing", that is, when the mass member is arranged with the one end side in the tube axis direction on the lower side so that the moving direction of the mass member is substantially in the vertical direction, the longer peripheral wall member on this one end side Place. This increases the attachment position of the leaf spring on the peripheral wall by the difference in length with the shorter peripheral wall member, so that even if the mass member is displaced downward due to bending of the leaf spring, the lower end surface of the mass member A required clearance can be secured between the lower end wall surfaces of the opposing storage chambers.

尚、そのような作用を十分に得るためには長い方と短い方との周壁部材の長さの差分を、マス部材の重量を受けた板ばねの撓み量と略同じか或いはそれよりも少し長くすることが好ましいが、それよりも少しだけ短くても構わない。 In order to obtain such an effect sufficiently, the difference in the length of the peripheral wall member between the longer side and the shorter side is approximately equal to or slightly less than the amount of deflection of the leaf spring that receives the weight of the mass member. Although it is preferable to make it long, it may be slightly shorter than that.

一方で、前記のマスダンパを横倒しにしてマス部材の移動方向、即ちそれを収容する収容室の周壁の筒軸方向が略水平になるように配置するときには、その筒軸方向における前記一端側に短い方の周壁部材を配置すればよい。すなわち、このときには板ばねの撓みが生じないことから、前記のように「立てた」ときに比べると、マス部材の位置は周壁に対し相対的にその筒軸方向の他端側寄りになる。よって、この他端側に長い方の周壁部材を配置することにより、マス部材の他端面と対向する収容室の他端壁面とのクリアランスを適切なものとすることができる。 On the other hand, when the mass damper is laid down so that the moving direction of the mass member, i.e., the cylindrical axis direction of the peripheral wall of the storage chamber for storing the mass member is substantially horizontal, it is short on the one end side in the cylindrical axis direction. What is necessary is just to arrange | position the surrounding wall member. That is, since the leaf spring does not bend at this time, the position of the mass member is relatively closer to the other end side in the cylinder axis direction than the peripheral wall as compared with the case of “standing” as described above. Therefore, by arranging the longer peripheral wall member on the other end side, the clearance between the other end wall surface of the storage chamber facing the other end surface of the mass member can be made appropriate.

言い換えると、そうしてマスダンパを横倒しにした板ばねの撓みのない状態で、マス部材の両端面と対向する収容室の両端壁面との間隔が適値になるように、予め２つの周壁部材の長さを設定しておけばよく、そうすることで、前記のようにマスダンパを「立てた」ときも横倒しにしたときも、２つの周壁部材の位置を入れ替えるだけで簡単に、マス部材の移動方向におけるケースとのクリアランスを維持することができる。 In other words, the two peripheral wall members are preliminarily set so that the distance between the opposite end surfaces of the mass member and the opposite end wall surfaces of the accommodating chamber becomes an appropriate value in a state in which the mass damper is turned sideways and the leaf spring is not bent. It is only necessary to set the length, so that the mass member can be moved simply by exchanging the positions of the two peripheral wall members, even when the mass damper is “standing” or lying on its side as described above. The clearance with the case in the direction can be maintained.

より好ましい構造として、前記筒軸方向一端側及び他端側の周壁部材のうち、筒軸方向に長い一方の周壁部材をさらに分割し、他方の周壁部材と同じ長さの部材と、両者の長さの差分のスペーサ部材とによって構成してもよい（請求項２）。 As a more preferable structure, among the peripheral wall members on the one end side and the other end side in the cylindrical axis direction, one peripheral wall member that is long in the cylindrical axis direction is further divided into a member having the same length as the other peripheral wall member, and the length of both A spacer member having a difference in thickness may be used.

こうすれば、マス部材の重さや板ばねの柔らかさを変更するときにも、スペーサ部材の長さを変えることで対応可能になるし、薄いスペーサ部材を幾つか準備しておけば、機器にマスダンパを取り付ける現場での調整も可能になる。部材の数が増えることに伴うコストの増大は、一端側及び他端側の周壁部材が共通化されることで抑制される。 In this way, when changing the weight of the mass member and the softness of the leaf spring, it becomes possible to cope with it by changing the length of the spacer member. It is also possible to make adjustments at the site where mass dampers are installed. The increase in cost accompanying the increase in the number of members is suppressed by making the peripheral wall members on one end side and the other end side common.

また、前記のようなマスダンパに用いる板ばねの具体的な構造として、好ましいのは、環状の内周部及び外周部と、それらの中間を周方向に延びて一端部が前記内周部に、また他端部が前記外周部にそれぞれ連続する複数の連繋部と、からなるものであり（請求項３）、このような構造の板ばねは、その撓みが比較的大きいときでも、周方向に長い連繋部に生じる歪みは比較的小さくなるから、耐久性を確保するのに有利である。 Moreover, as a specific structure of the leaf spring used for the mass damper as described above, it is preferable that an annular inner peripheral portion and an outer peripheral portion, and an intermediate portion between them extend in the circumferential direction and one end portion thereof is in the inner peripheral portion. Further, the other end portion is composed of a plurality of connecting portions that are respectively continuous with the outer peripheral portion (Claim 3), and the leaf spring having such a structure is provided in the circumferential direction even when its deflection is relatively large. Since the distortion generated in the long connecting portion is relatively small, it is advantageous for ensuring the durability.

但し、そうした構造の板ばねではそれが撓むとともに捻れて、内周部及び外周部の間に捻れモーメントが生じることになるから、２つの板ばねを相互に裏返しに配設し、それぞれの捻れモーメントを相殺させることが好ましい。 However, in a leaf spring having such a structure, it is bent and twisted, and a torsional moment is generated between the inner peripheral part and the outer peripheral part. Is preferably offset.

また、前記のような構造を採用するマスダンパとして好ましいのは、所謂アクティブ・タイプのものであり、具体的にはそのケースに、収容室内において前記マス部材を周壁の筒軸方向に往復動させ、その反力を当該ケースを介して制振対象物に作用させるように、アクチュエータが設けられているものである（請求項４）。 Further, the mass damper adopting the above-described structure is preferably a so-called active type, and specifically, in the case, the mass member is reciprocated in the cylindrical axis direction of the peripheral wall in the housing chamber, An actuator is provided so that the reaction force acts on the object to be controlled via the case (claim 4).

すなわち、ＡＭＤの場合は付加振動系の固有振動数ができるだけ低くなるように、マス部材を重く、板ばねは柔らかくしたいところ、こうすると「立てた」ときの板ばねの撓みが大きくなりやすい。また、ＡＭＤはアクチュエータを内蔵する分、大型化しやすい。それ故にＡＭＤにおいて、前記した本発明の作用効果が特に有効なものとなるのである。 That is, in the case of AMD, it is desired to make the mass member heavy and the leaf spring soft so that the natural frequency of the additional vibration system is as low as possible. In this case, the bending of the leaf spring when it is “standing” tends to increase. Also, AMD is easy to increase in size because of the built-in actuator. Therefore, in AMD, the above-described effects of the present invention are particularly effective.

そうしてＡＭＤに本発明を適用するのであれば、アクチュエータとして永久磁石を備えた電磁式のアクチュエータを採用し、その永久磁石を前記マス部材に一体的に取り付けることが好ましい（請求項４）。こうすれば、アクチュエータの中で比較的質量の大きな永久磁石をマス部材の一部として利用することができ、小型化を図る上で有利になる。 If the present invention is applied to AMD, it is preferable that an electromagnetic actuator provided with a permanent magnet is adopted as the actuator, and the permanent magnet is integrally attached to the mass member. If it carries out like this, a permanent magnet with comparatively large mass can be utilized as a part of mass member in an actuator, and it will become advantageous when aiming at size reduction.

以上、説明したように本発明に係るマスダンパによると、マス部材を収容するケースの周壁を、板ばねの取り付け位置を境に分割するとともに、マス部材の移動方向である筒軸方向の両端側の２つの周壁部材の長さを所要の長さ、異ならせているので、その２つの周壁部材を入れ替えることにより、マス部材の移動方向におけるケースとのクリアランスを簡単に調整することができる。よって、ケースの大型化を招くことなく、マスダンパを「立てて」使用する場合でも横倒しにする場合でも、適切なクリアランスを確保することができる。 As described above, according to the mass damper according to the present invention, the peripheral wall of the case that accommodates the mass member is divided at the attachment position of the leaf spring, and the both end sides in the cylinder axis direction, which is the moving direction of the mass member, are divided. Since the two peripheral wall members have different lengths as required, the clearance between the mass member in the moving direction can be easily adjusted by exchanging the two peripheral wall members. Therefore, an appropriate clearance can be secured regardless of whether the mass damper is used “standing” or lying down without causing an increase in the size of the case.

本発明に係るＡＭＤの一使用態様を示す模式図である。It is a schematic diagram which shows one usage aspect of AMD which concerns on this invention. ＡＭＤの構造を示す拡大断面図である。It is an expanded sectional view showing the structure of AMD. ＡＭＤを筒軸方向の一側から見てそのケース(a)と、内部のセンサ、マス部材、リニアモータ、板ばね等(b)と、をそれぞれ示す斜視図である。It is a perspective view which shows the case (a) which looks at AMD from the one side of a cylinder axis direction, an internal sensor, a mass member, a linear motor, a leaf | plate spring, etc. (b), respectively. 軸線Ｘに沿って見た板ばねの単品図である。2 is a single item view of a leaf spring as viewed along an axis X. FIG. ＡＭＤを「立てて」使用するときの図２相当図である。FIG. 3 is a view corresponding to FIG. 2 when AMD is used “standing”.

以下、本発明の実施形態を図面に基づいて詳細に説明する。尚、以下の好ましい実施形態の説明は本質的に例示に過ぎず、本発明、その適用物或いはその用途を制限することを意図するものではない。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the following description of preferable embodiment is only an illustration essentially, and is not intending restrict | limiting this invention, its application thing, or its use.

図１には、本発明に係るマスダンパの一使用態様を示し、図の例では走査型電子顕微鏡（ＳＥＭ）である精密機器Ｄ（制振対象物）が除振台Ａの定盤ａ１上に載置され、その本体部分ｄ１から上方に延びる鏡塔ｄ２の頂部にマスダンパが配設されて、図示しないブラケット等により固定されている。図の例では除振台Ａは、機器Ｄの搭載される定盤ａ１を例えば３、４個の空気ばねユニットａ２，ａ２，…によって弾性的に支持する、所謂パッシブタイプのものである。 FIG. 1 shows one use mode of a mass damper according to the present invention. In the example of the figure, a precision device D (an object to be controlled) which is a scanning electron microscope (SEM) is placed on a surface plate a1 of a vibration isolation table A. A mass damper is disposed on the top of the mirror tower d2 that is placed and extends upward from the main body part d1, and is fixed by a bracket (not shown). In the example shown in the figure, the vibration isolation table A is a so-called passive type in which the surface plate a1 on which the device D is mounted is elastically supported by, for example, three or four air spring units a2, a2,.

一方、マスダンパは所謂アクティブタイプのもので（以下、ＡＭＤと略称する）、そのケース１には一体的に加速度センサ２が配設され、これにより検出される機器Ｄの加速度（振動状態）を示す信号が、コントローラ３に入力されるようになっている。以下に説明するようにＡＭＤのケース１にはマス部材４及びリニアモータ５が収容されており、そのリニアモータ５がコントローラ３からの制御指令を受けて作動すると、マス部材４が往復駆動されて、その反力が機器Ｄに付加されるようになる。 On the other hand, the mass damper is a so-called active type (hereinafter abbreviated as AMD), and an acceleration sensor 2 is integrally provided in the case 1 to indicate the acceleration (vibration state) of the device D detected thereby. A signal is input to the controller 3. As will be described below, the AMD case 1 contains a mass member 4 and a linear motor 5. When the linear motor 5 operates in response to a control command from the controller 3, the mass member 4 is reciprocated. The reaction force is applied to the device D.

機器ＤがＳＥＭである場合、その鏡塔ｄ２には構造的に水平方向の共振が生じやすく、これにより電子銃やレンズの位置が微妙にずれてしまうという問題がある。そこで、図示のように鏡塔ｄ２の頂部に、即ち、局所的に振幅の大きくなる箇所にＡＭＤを取り付け、これにより発生する制御力によって鏡塔ｄ２の揺れを抑えることにより、ＳＥＭの性能を十分に発揮させることができる。 When the device D is an SEM, the mirror tower d2 is structurally susceptible to horizontal resonance, which causes a problem that the positions of the electron gun and the lens are slightly shifted. Therefore, as shown in the figure, an AMD is attached to the top of the mirror tower d2, that is, a portion where the amplitude is locally increased, and the control force generated thereby suppresses the shaking of the mirror tower d2, thereby sufficiently improving the performance of the SEM. Can be demonstrated.

−マスダンパの構造−
この例ではケース１はアルミ合金製であり、図２、３に拡大して示すように全体として図の左右方向に長い四角筒状で、その筒軸（軸線Ｘ）の方向に延びる断面矩形状の周壁１０と、その一端を閉じる矩形状のブロック１１と、他端を閉じる矩形状の蓋部材１２とによって、マス部材４及びリニアモータ５の収容室１ａを区画している。図３(a)にのみ示すが、ケース１は、その４隅に軸線Ｘ方向の他端側から挿入された長尺のボルト１３，１３，…によって組み立てられている。また、筒軸方向一端（図２，３の左端）側の矩形ブロック１１には加速度センサ２が配設されている。 -Structure of mass damper-
In this example, the case 1 is made of an aluminum alloy, and as shown in an enlarged view in FIGS. The mass member 4 and the accommodation chamber 1a of the linear motor 5 are partitioned by the peripheral wall 10, a rectangular block 11 that closes one end thereof, and a rectangular lid member 12 that closes the other end. Although only shown in FIG. 3 (a), the case 1 is assembled by long bolts 13, 13,... Inserted at the four corners from the other end side in the axis X direction. Further, the acceleration sensor 2 is disposed in the rectangular block 11 on one end in the cylinder axis direction (left end in FIGS. 2 and 3).

この加速度センサ２は、詳細は図示しないが、円筒状のハウジング内にその筒軸（図では軸線Ｘと合致）の延びる方向に移動可能に錘を収容するとともに、この錘の移動方向の一側に隣接させて圧電素子を配設したものであり、錘から受ける押圧力に応じて圧電素子の発生する電圧を増幅して出力する。加速度センサ２のハウジングはアルミ合金製であり、圧電素子を囲んで静電シールドを構成している。また、ハウジング外周の略中央には矩形状のフランジ２ａが形成されている。 Although not shown in detail, the acceleration sensor 2 accommodates a weight in a cylindrical housing so as to be movable in a direction in which the cylinder axis (in the figure, coincides with the axis X) extends, and one side in the movement direction of the weight. A piezoelectric element is disposed adjacent to the piezoelectric element, and a voltage generated by the piezoelectric element is amplified and output according to the pressing force received from the weight. The housing of the acceleration sensor 2 is made of an aluminum alloy, and surrounds the piezoelectric element to constitute an electrostatic shield. In addition, a rectangular flange 2a is formed at the approximate center of the outer periphery of the housing.

そして、そのフランジ２ａが挿入されるように前記矩形ブロック１１には、軸線Ｘ方向の一側に開口する断面矩形状の収容孔１１ａが形成されるとともに、この収容孔１１ａの開口を塞ぐように一側から肉厚の矩形板１１ｂが組み付けられている。一方、矩形ブロック１１の他端面には収容孔１１ａに連通して、加速度センサ２のハウジングに対応する丸穴が開口しており、ここに一側から挿入された加速度センサ２の他端側がマス部材４及びリニアモータ５の収容室１ａに向かって突出している。そうして加速度センサ２を包含する矩形ブロック１１は圧肉に形成され、二重の静電シールドとして機能する。 The rectangular block 11 is formed with a housing hole 11a having a rectangular cross section that opens to one side in the axis X direction so that the flange 2a is inserted, and the opening of the housing hole 11a is closed. A thick rectangular plate 11b is assembled from one side. On the other hand, a round hole corresponding to the housing of the acceleration sensor 2 is opened on the other end surface of the rectangular block 11 so as to communicate with the accommodation hole 11a, and the other end side of the acceleration sensor 2 inserted from one side is a mass. The member 4 and the linear motor 5 protrude toward the accommodation chamber 1a. Thus, the rectangular block 11 including the acceleration sensor 2 is formed in a compact manner and functions as a double electrostatic shield.

一方でマス部材４は、その重量を確保しやすい鉄製であり、図２の他、図３(b)等にも示すように全体としては円柱状であるが、前記のように収容室１ａ内に突出する加速度センサ２の他端側を包囲するよう、軸線Ｘ方向の一側に開口する円形断面の凹部４ａを有している。この凹部４ａを取り囲む周壁の先端、即ち図の左端には締結リング４１がねじ留めされていて、後述する板ばね６の内周部を挟持している。また、マス部材４の反対側の端面（図の右端面）には、以下に述べるリニアモータ５のヨーク５０の一端面が接合され、ボルト４２により締結されている。 On the other hand, the mass member 4 is made of iron that is easy to secure its weight, and is generally cylindrical as shown in FIG. 2 as well as in FIG. A recess 4a having a circular cross section that opens on one side in the axis X direction is provided so as to surround the other end of the acceleration sensor 2 protruding in the direction of the axis X. A fastening ring 41 is screwed to the front end of the peripheral wall surrounding the recess 4a, that is, the left end in the figure, and sandwiches an inner peripheral portion of a leaf spring 6 described later. Further, one end surface of a yoke 50 of the linear motor 5 described below is joined to an end surface (right end surface in the figure) on the opposite side of the mass member 4 and fastened by a bolt 42.

−リニアモータ−
リニアモータ５においては、前記のようにマス部材４と一体化されたヨーク５０等が被駆動側で、これが駆動側のボビン５１等と非接触状態で組み合わされており、それらの間に作用する電磁力によって軸線Ｘ方向に往復移動されるようになる。この例ではヨーク５０は鉄製であり、リニアモータ５のハウジングを兼ねて有底円筒状に形成され、軸線Ｘ方向の他側（図２の右側）に向かって開放している。 -Linear motor-
In the linear motor 5, the yoke 50 or the like integrated with the mass member 4 as described above is combined with the driven side bobbin 51 or the like in a non-contact state, and acts between them. The electromagnetic force causes a reciprocal movement in the direction of the axis X. In this example, the yoke 50 is made of iron, is formed in a bottomed cylindrical shape that also serves as the housing of the linear motor 5, and is open toward the other side in the axis X direction (the right side in FIG. 2).

そうして軸線Ｘ方向の他側に向かって開放するヨーク５０の筒壁部の先端、即ち図２の右端には締結リング５２がねじ留めされていて、後述する板ばね６の内周部を挟持している。すなわち、この実施形態では、前記のように一体化されているマス部材４とヨーク５０とが、軸線Ｘ方向に離れた２枚の板ばね６，６によってケース１の周壁１０（収容室１ａの周壁）に取り付けられており、軸線Ｘ方向に移動可能に、また、軸線Ｘに直交する方向には殆ど移動しないようになっている。 A fastening ring 52 is screwed to the tip of the cylindrical wall portion of the yoke 50 that opens toward the other side in the axis X direction, that is, the right end in FIG. It is pinched. That is, in this embodiment, the mass member 4 and the yoke 50 integrated as described above are formed by the two leaf springs 6 and 6 separated in the direction of the axis X by the peripheral wall 10 of the case 1 (of the housing chamber 1a). It is attached to the peripheral wall) and is movable in the direction of the axis X, and hardly moves in the direction perpendicular to the axis X.

また、前記ヨーク５０の筒壁部内には円盤状の磁石５３とポールピース５４とが同軸状に配設されて、ヨーク５０の底部にその中央を貫通するボルト５５によって取り付けられている。このヨーク５０の底部には、磁石５３及びポールピース５４を囲むよう周方向に間隔を空けて複数のねじ穴が形成され、ここには前記のようにマス部材４と締結するためのボルト４２，…がねじ込まれている。 A disc-shaped magnet 53 and a pole piece 54 are coaxially arranged in the cylindrical wall portion of the yoke 50 and are attached to the bottom of the yoke 50 by a bolt 55 penetrating the center thereof. A plurality of screw holes are formed in the bottom portion of the yoke 50 at intervals in the circumferential direction so as to surround the magnet 53 and the pole piece 54. Here, the bolts 42 for fastening with the mass member 4 as described above, ... is screwed.

前記磁石５３及びポールピース５４は該略同径で且つ同程度の厚みを有する比較的厚肉の円盤状であり、それを外周側から包囲するボビン５１の筒壁部との間には所定のクリアランスが確保されている。すなわち、駆動側のボビン５１は樹脂材によって、軸線Ｘ方向一側（図の左側）に開口する有底円筒状に形成され、その筒壁部に電線が巻き付けられて電磁コイル５６が構成されている。この筒壁部が磁石５３及びポールピース５４を外周側から包囲するとともに、それ自体は外周側からヨーク５０の筒壁部に包囲されている。 The magnet 53 and the pole piece 54 have a relatively thick disk shape having the same diameter and the same thickness, and a predetermined gap is provided between the magnet 53 and the pole piece 54 and the cylindrical wall portion of the bobbin 51 surrounding the outer periphery. Clearance is secured. That is, the drive-side bobbin 51 is formed of a resin material into a bottomed cylindrical shape that opens to one side in the axis X direction (left side in the figure), and an electromagnetic coil 56 is formed by winding an electric wire around the cylindrical wall portion. Yes. The cylindrical wall portion surrounds the magnet 53 and the pole piece 54 from the outer peripheral side, and itself is surrounded by the cylindrical wall portion of the yoke 50 from the outer peripheral side.

また、ボビン５１の底壁部は、図の例では比較的厚肉の円盤状とされ、その軸線Ｘ方向の端面（図の右端面）には円形の台座部が形成されて、円柱状の中間部材５７を介してケース１の蓋部材１２にねじ留めされている。つまり、リニアモータ５において駆動側であるボビン５１がケース１の蓋部材１２に固定されており、被駆動側にあるヨーク５０、磁石５３及びポールピース５４を含めてマス部材４を軸線Ｘ方向に駆動し、その反力（制御力）をケース１に伝えるようになっている。 Further, the bottom wall portion of the bobbin 51 has a relatively thick disk shape in the illustrated example, and a circular pedestal portion is formed on the end surface in the axis X direction (the right end surface in the drawing). It is screwed to the lid member 12 of the case 1 via the intermediate member 57. That is, in the linear motor 5, the bobbin 51 on the driving side is fixed to the lid member 12 of the case 1, and the mass member 4 including the yoke 50, the magnet 53 and the pole piece 54 on the driven side is moved in the direction of the axis X Driven to transmit the reaction force (control force) to the case 1.

そうしてリニアモータ５の被駆動側（ヨーク５０、磁石５３及びポールピース５４）が締結リング５２と共にマス部材４に一体化されているため、ＡＭＤの振動系におけるマス（質量）を確保しやすい。そうして一体化されているヨーク５０、磁石５３及びポールピース５４に２つの締結リング４１，５２も含めて、以下、この実施形態では「マス部材４等」或いは単に「マス」とも呼ぶものとする。 Then, since the driven side (yoke 50, magnet 53 and pole piece 54) of the linear motor 5 is integrated with the mass member 4 together with the fastening ring 52, it is easy to secure mass (mass) in the vibration system of AMD. . In this embodiment, the yoke 50, the magnet 53, and the pole piece 54 that are integrated with each other and the two fastening rings 41 and 52 are hereinafter referred to as “mass member 4 etc.” or simply “mass”. To do.

そして、一般にＡＭＤにおいてはマスが大きく、ばねが柔らかいほどに固有振動数が低くなって、制御力によるアクティブ制振の効果が広い周波数域に亘って得られるようになるから、この実施形態では前記のようにしてマスの質量をできるだけ大きくするとともに、これをケース１に対して軸線Ｘ方向に移動可能に取り付ける板ばね６，６は、できるだけ柔らかなものとなるよう、以下のように構成している。 In general, in AMD, the mass is large, the softer the spring, the lower the natural frequency, and the effect of active vibration suppression by the control force can be obtained over a wide frequency range. As described above, the mass of the mass is increased as much as possible, and the leaf springs 6 and 6 attached to the case 1 so as to be movable in the direction of the axis X are configured as follows so as to be as soft as possible. Yes.

すなわち、この実施形態では板ばね６は薄板をプレス成型したもので、マスの移動方向である軸線Ｘ方向に見て図４に示すように、その外形が正方形状とされ、中央に丸穴６ａが開口している。この丸穴６ａを取り囲む板ばね６の内周部は円環状で、マス部材４又はヨーク５０と締結リング４１，５２との間に挟持されて、マス部材４等に取り付けられる。板ばね６の内周部には周方向に略等間隔を空けて、マス部材４又はヨーク５０と締結リング４１，５２とを連結するねじの挿入孔６ｂ，６ｂ，…が形成されている。 That is, in this embodiment, the leaf spring 6 is formed by press-molding a thin plate. As shown in FIG. 4, the outer shape of the leaf spring 6 is a square shape when viewed in the direction of the axis X, which is the moving direction of the mass. Is open. An inner peripheral portion of the leaf spring 6 surrounding the round hole 6a is annular, and is sandwiched between the mass member 4 or the yoke 50 and the fastening rings 41 and 52 and attached to the mass member 4 or the like. Screw insertion holes 6b, 6b,... For connecting the mass member 4 or the yoke 50 and the fastening rings 41, 52 are formed in the inner peripheral portion of the leaf spring 6 at substantially equal intervals in the circumferential direction.

一方、板ばね６の外周部にはその４隅においてそれぞれ、ケース１を組み立てるためのボルト１３の挿入孔６ｃ，６ｃ，…が形成されており、以下に述べるようにケース１の周壁１０を分割した周壁部材１０ａ，１０ｂ，１０ｃの間に挟持されて、ケース１の周壁１０に取り付けられる。 On the other hand, insertion holes 6c, 6c,... For bolts 13 for assembling the case 1 are formed at the four corners on the outer periphery of the leaf spring 6, and the peripheral wall 10 of the case 1 is divided as described below. The peripheral wall members 10 a, 10 b, and 10 c are attached to the peripheral wall 10 of the case 1.

そうしてマス部材４等及びケース周壁１０にそれぞれ取り付けられる板ばね６の内周部及び外周部の中間には、概ね円周方向に延びていて一端部が前記内周部に、また他端部が前記外周部にそれぞれ連繋する３つの連繋部６ｄ，６ｄ，…が周方向に略等間隔に形成されている。板ばね６が軸線Ｘ方向に撓むときに、３つの連繋部６ｄ，６ｄ，…はそれぞれの長手方向に撓むことになるので、板ばね６の撓み量が大きくても、連繋部６ｄ，６ｄ，…に生じる歪みは比較的小さくて済み、その耐久性を確保する上で有利な構造と言える。 Thus, in the middle of the inner peripheral portion and the outer peripheral portion of the leaf spring 6 attached to the mass member 4 and the case peripheral wall 10 respectively, it extends substantially in the circumferential direction, with one end portion on the inner peripheral portion and the other end. Three connecting portions 6d, 6d,... That are connected to the outer peripheral portion are formed at substantially equal intervals in the circumferential direction. When the leaf spring 6 bends in the direction of the axis X, the three connecting portions 6d, 6d,... Bend in the longitudinal direction, so even if the amount of bending of the leaf spring 6 is large, the connecting portions 6d, The distortion generated in 6d,... Can be relatively small, and can be said to be an advantageous structure for ensuring its durability.

一方で、そうして板ばね６が軸線Ｘ方向に撓むときには、その軸線Ｘの周りに内周部及び外周部が相互に捻れてモーメントを生じることになるが、この実施形態では、図３(b)に示すように２つの板ばね６，６が、軸線Ｘ方向に見て相互に裏返しになるように配設されており、このことで、それぞれの捻れモーメントが相殺されるようになる。 On the other hand, when the leaf spring 6 is bent in the direction of the axis X, the inner peripheral portion and the outer peripheral portion are twisted with respect to each other around the axis X to generate a moment. In this embodiment, FIG. As shown in (b), the two leaf springs 6 and 6 are arranged so as to be reversed with respect to each other when viewed in the direction of the axis X, so that the respective torsional moments are offset. .

−ケース周壁の分割構造−
次に、この実施形態の主たる特徴であるＡＭＤのケース１の構造、特にその周壁１０の分割構造について説明する。図２に明らかなように、マス部材４やリニアモータ５の収容室１ａは、軸線Ｘ方向に延びる周壁１０の一端（図の左端）が矩形ブロック１１により閉ざされる一方、他端（図の右端）は蓋部材１２により閉ざされている。 -Case peripheral wall division structure-
Next, the structure of the AMD case 1, which is the main feature of this embodiment, particularly the divided structure of the peripheral wall 10 will be described. As apparent from FIG. 2, the storage chamber 1a of the mass member 4 and the linear motor 5 has one end (the left end in the figure) of the peripheral wall 10 extending in the axis X direction closed by the rectangular block 11, while the other end (the right end in the figure). ) Is closed by the lid member 12.

そして、図２の他、図３(a)にも示すように周壁１０は、２つの板ばね６，６がそれぞれ取り付けられる位置を境に軸線Ｘ方向に３つの周壁部材１０ａ，１０ｂ，１０ｃに分割され、さらに、図示のようにＡＭＤを横倒しにするときには、軸線Ｘ方向の他端（図２，３(a)の右端）、即ち周壁１０と蓋部材１２との間にスペーサ部材１０ｄが介挿されるようになっている。 In addition to FIG. 2, as shown in FIG. 3A, the peripheral wall 10 is divided into three peripheral wall members 10a, 10b, and 10c in the direction of the axis X with the positions where the two leaf springs 6 and 6 are respectively attached. Further, when the AMD is laid down as shown in the figure, the spacer member 10d is interposed between the other end in the axis X direction (the right end in FIGS. 2 and 3 (a)), that is, between the peripheral wall 10 and the lid member 12. It is supposed to be inserted.

そうして分割された３つの周壁部材１０ａ〜１０ｃのうち、軸線Ｘ方向の一端側及び他端側のもの、即ち一端側の周壁部材１０ａと他端側の周壁部材１０ｃとは同じものである。また、これらに挟まれる周壁部材１０ｂは軸線Ｘ方向に長く、図の例ではマス部材４及びヨーク５０を合わせたのと略同じ長さを有している。さらに、スペーサ部材１０ｄの軸線Ｘ方向の長さは、軸線Ｘを上下方向に向けて、即ちＡＭＤを「立てて」使用するときに（図５を参照）、マス部材４等の重量を受けて撓む板ばね６，６の下方への撓み量に相当するものとされている。 Of the three peripheral wall members 10a to 10c thus divided, the one on the one end side and the other end side in the axis X direction, that is, the one end side peripheral wall member 10a and the other end side peripheral wall member 10c are the same. . Further, the peripheral wall member 10b sandwiched between them is long in the direction of the axis X, and in the example shown in the figure, has the same length as that of the mass member 4 and the yoke 50 combined. Furthermore, the length of the spacer member 10d in the direction of the axis X is determined by receiving the weight of the mass member 4 or the like when the axis X is directed in the vertical direction, that is, when the AMD is used "standing" (see FIG. 5). It corresponds to the downward deflection amount of the leaf springs 6 and 6 that are bent.

斯かる構造により、この実施形態では前記スペーサ部材１０ｄの介挿する位置を、軸線Ｘ方向の一端側、他端側のいずれかに入れ替えることで、以下に述べるようにマス部材４等の軸線Ｘ方向の両端（具体的には、一端側の締結リング４１及び他端側の締結リング５２のそれぞれの外端）と、これに対向する収容室１ａの端壁面（具体的には、矩形ブロック１１及び蓋部材１２のそれぞれが収容室１ａに臨む面）との間隔、即ちマス部材４等の移動方向におけるケース１とのクリアランスを容易に調整することができる。 With this structure, in this embodiment, the position where the spacer member 10d is inserted is changed to one of the one end side and the other end side in the axis X direction, so that the axis line X of the mass member 4 and the like is described below. Both ends in the direction (specifically, the outer ends of the fastening ring 41 on one end side and the fastening ring 52 on the other end side), and the end wall surface (specifically, the rectangular block 11) of the storage chamber 1a facing this. And the clearance between the cover member 12 and the case 1 in the moving direction of the mass member 4 or the like can be easily adjusted.

すなわち、前記した図２のようにＡＭＤを横倒しにして、マス部材４等の移動方向である軸線Ｘが水平になるように配置するとき、マス部材４等の重量は板ばね６，６に対し略平行に作用することになるので、中立位置において撓みが生じることはない。そこで、この状態では図示のように軸線Ｘ向の他端にスペーサ部材１０ｄを介挿し、このときにマス部材４等の両端とそれぞれ対向する収容室１ａの両端壁面との間隔が適値になるように、予め各周壁部材１０ａ〜１０ｃ及びスペーサ部材１０ｄの寸法を設定しておく。 That is, when the AMD is laid sideways as shown in FIG. 2 so that the axis X as the moving direction of the mass member 4 is horizontal, the mass of the mass member 4 etc. Since it acts substantially in parallel, no bending occurs in the neutral position. Therefore, in this state, as shown in the figure, the spacer member 10d is inserted at the other end in the direction of the axis X, and at this time, the distance between the both ends of the mass member 4 and the opposite wall surfaces of the accommodating chamber 1a is an appropriate value. As described above, the dimensions of the peripheral wall members 10a to 10c and the spacer member 10d are set in advance.

そして、図５に示すようにＡＭＤを「立てて」、即ち軸線Ｘ方向の一端側が下側になって、軸線Ｘが略上下方向を向くようにして配置すると、マス部材４等の重量を受けて板ばね６，６が撓み、マス部材４等が下方に、即ち軸線Ｘ方向の一端側に変位することになるが、このときにはスペーサ部材１０ｄを入れ替えて、図示のように周壁１０の一端、矩形ブロック１１との間に介挿する。 Then, as shown in FIG. 5, when the AMD is “standing”, that is, when the one end side in the direction of the axis X is directed downward and the axis X is directed substantially in the vertical direction, the weight of the mass member 4 or the like is received. The plate springs 6 and 6 are bent and the mass member 4 and the like are displaced downward, that is, one end side in the axis X direction. At this time, the spacer member 10d is replaced, and one end of the peripheral wall 10 as shown in FIG. It is inserted between the rectangular blocks 11.

そうすると、そのスペーサ部材１０ｄの分、即ち、マス部材４等の重量を受けて板ばね６，６の撓む分量だけ、周壁１０における板ばね６，６の取付位置が高くなるから、前記のように板ばね６，６の撓みによってマス部材４等が下方に変位しても、このマス部材４等の下端（締結リング４１の一端）と対向する収容室１ａの下端壁面（矩形ブロック１１の他端面）との間隔は、前記横倒しにしたとき（図２参照）と同じ適切なクリアランスに保たれるのである。 Then, the mounting position of the leaf springs 6 and 6 on the peripheral wall 10 is increased by the amount of the spacer member 10d, that is, the amount of deflection of the leaf springs 6 and 6 due to the weight of the mass member 4 and the like. Even if the mass member 4 or the like is displaced downward due to the bending of the leaf springs 6 and 6, the lower end wall surface (other than the rectangular block 11) of the accommodating chamber 1a facing the lower end (one end of the fastening ring 41) of the mass member 4 etc. The distance from the end face is maintained at the same appropriate clearance as when the cover is laid down (see FIG. 2).

したがって、この実施形態に係るＡＭＤによると、上述したようにマス部材４等を収容するケース１の周壁１０を分割して、その軸線Ｘ方向の一端側、他端側のいずれかに所定寸法のスペーサ部材１０ｄを介挿するようにしたので、ＡＭＤを「立てて」使用するときと横倒しにするときとの双方で、スペーサ部材１０ｄの介挿位置を入れ替えるだけで簡単に、また、ケース１の大型化を招くことなく、マス部材４等の移動方向におけるケース１とのクリアランスが適切なものとなる。 Therefore, according to the AMD according to this embodiment, the peripheral wall 10 of the case 1 that accommodates the mass member 4 and the like is divided as described above, and a predetermined dimension is provided on one end side or the other end side in the axis X direction. Since the spacer member 10d is inserted, it is easy to change the insertion position of the spacer member 10d both when the AMD is "standing" and when it is laid down. The clearance with the case 1 in the moving direction of the mass member 4 and the like is appropriate without increasing the size.

そのスペーサ部材１０ｄの厚み（軸線Ｘ方向の長さ）を変更すれば、マス部材４等の重さや板ばね６の柔らかさが変わっても対応可能である。具体的にスペーサ部材１０ｄの厚みは、前記したようにマス部材４等の重量を受けた板ばね６，６の撓み分とするか、これよりも少し長くすることが好ましいが、少しだけなら短くてもよい。また、薄いスペーサ部材を幾つか準備しておけば、機器ＤにＡＭＤを取り付ける現場での調整も可能になる。 If the thickness (length in the direction of the axis X) of the spacer member 10d is changed, it is possible to cope with changes in the weight of the mass member 4 and the softness of the leaf spring 6. Specifically, the thickness of the spacer member 10d is preferably the amount of bending of the leaf springs 6 and 6 that has received the weight of the mass member 4 or the like, as described above, or a little longer than this, but if it is a little, the thickness is short. May be. Moreover, if several thin spacer members are prepared, the adjustment in the field where AMD is attached to the apparatus D is also attained.

そのような発明の効果は、実施形態のようなＡＭＤに限らずパッシブ・タイプのマスダンパでも得られるが、ＡＭＤの場合は、その振動系の固有振動数をできるだけ低くしたいという要求があり、そのためにマス部材４等を重くし、板ばね６を柔らかくすれば、自ずと「立てて」使用するときのマス部材４等の変位が大きくなりやすい。しかも、ＡＭＤはリニアモータ５等を内蔵するため大型化しやすい。よって、大型化を招くことなく、マス部材４等とケース１とのクリアランスを確保できる、という発明の効果はＡＭＤにおいて特に有効なものと言える。 The effect of such an invention can be obtained not only by AMD as in the embodiment but also by a passive type mass damper. However, in the case of AMD, there is a demand for making the natural frequency of the vibration system as low as possible. If the mass member 4 or the like is made heavier and the leaf spring 6 is made softer, the displacement of the mass member 4 or the like when used in an “upright” manner tends to increase. Moreover, since the AMD incorporates the linear motor 5 and the like, it is easy to increase the size. Therefore, it can be said that the effect of the invention that the clearance between the mass member 4 and the like 1 and the case 1 can be secured without causing an increase in size is particularly effective in AMD.

尚、この実施形態ではＡＭＤの周壁１０を分割するとともに、スペーサ部材１０ｄを介挿するようにしているが、これに限るものではなく、例えば周壁部材１０ａ、１０ｃの軸線Ｘ方向の長さをスペーサ部材１０ｄの分、異ならせ、ＡＭＤを「立てて」使用するときと横倒しにして使用するときとで、それらを入れ替えるようにしてもよい。 In this embodiment, the peripheral wall 10 of the AMD is divided and the spacer member 10d is inserted. However, the present invention is not limited to this. For example, the length of the peripheral wall members 10a and 10c in the axis X direction is set as the spacer. They may be changed by the amount of the member 10d, and the AMD may be switched between when “standing” the AMD and when using it while lying down.

また、この実施形態のＡＭＤには、機器Ｄの振動状態を検出するための加速度センサ２が備えられているが、これはＡＭＤとは別に例えば機器Ｄに直接、配置することもできる。振動状態を検出するためのセンサは加速度センサ２に限らず、例えば速度センサや変位センサを用いることもできる。 Moreover, although the acceleration sensor 2 for detecting the vibration state of the apparatus D is provided in AMD of this embodiment, this can also be arrange | positioned directly in the apparatus D separately from AMD, for example. The sensor for detecting the vibration state is not limited to the acceleration sensor 2, and for example, a speed sensor or a displacement sensor can be used.

さらに、ＡＭＤを取り付ける制振対象物はＳＥＭでなくてもよいのは勿論であり、これを空気ばね式の除振台Ａ上に載置することにも限定されない。除振台Ａの空気ばねユニットａ２，ａ２，…は、除振対象物にその振動を減殺するような制御力を付加するアクチュエータとして用いることもできる。 Furthermore, it is needless to say that the damping object to which the AMD is attached is not an SEM, and is not limited to being placed on the air spring type vibration isolation table A. The air spring units a 2, a 2,.

本発明は、機器等の振動を抑制するためのマスダンパの小型化、低コスト化に貢献するものであり、産業上の利用可能性は高い。 The present invention contributes to downsizing and cost reduction of a mass damper for suppressing vibrations of equipment and the like, and has high industrial applicability.

Ｄ機器（制振対象物）
Ｘ軸線（ケースの筒軸）
１ＡＭＤのケース
１ａマス部材等の収容室
１０周壁
１０ａ〜１０ｃ周壁部材
１０ｄスペーサ部材
２加速度センサ
３コントローラ
４マス部材
５リニアモータ（電磁式アクチュエータ）
５３磁石
６板ばね
６ｄ連繋部 D equipment (object to be controlled)
X axis (Cylinder shaft of the case)
DESCRIPTION OF SYMBOLS 1 AMD case 1a Accommodating chamber for mass members, etc. 10 Peripheral walls 10a to 10c Peripheral wall members 10d Spacer member 2 Acceleration sensor 3 Controller 4 Mass member 5 Linear motor (electromagnetic actuator)
53 Magnet 6 Leaf Spring 6d Connecting Portion

Claims

A mass damper that houses a mass member in a predetermined direction via a spring member inside a case to be attached to a vibration suppression object,
The storage chamber for storing the mass member in the case has a cylindrical peripheral wall extending in the moving direction of the mass member,
The spring member is composed of a leaf spring in which an outer peripheral portion is attached to the peripheral wall and an inner peripheral portion is attached to the mass member, respectively, at two locations spaced in the cylindrical axis direction of the peripheral wall.
The peripheral wall is divided into three in the cylinder axis direction with the attachment position of the leaf spring as a boundary, and the outer peripheral portion of the leaf spring is sandwiched between the divided peripheral wall members,
The circumferential wall member on one end side in the cylinder axis direction and the circumferential wall member on the other end side have different lengths in the cylinder axis direction. A mass damper corresponding to the amount of bending of the leaf spring that bends in response to the weight of the member.

One of the peripheral wall members on the one end side and the other end side in the cylindrical axis direction is composed of a relatively long member having the same length as the other peripheral wall member and a spacer member having a difference in length between the two members. The mass damper according to claim 1.

The two leaf springs each have an inner circumferential portion and an outer circumferential portion formed in an annular shape, and an intermediate portion extending in the circumferential direction. One end portion is continuous with the inner circumferential portion and the other end portion is continuous with the outer circumferential portion. Consisting of multiple connected parts
The mass damper according to claim 1, wherein the two leaf springs are disposed so as to be reversed with respect to each other when viewed in the cylinder axis direction of the peripheral wall.

The actuator is provided in the case so that the mass member is reciprocated in the cylindrical axis direction of the peripheral wall in the accommodating chamber, and the reaction force is applied to the vibration suppression object through the case. One of the mass dampers 1 to 3.

The mass damper according to claim 4, wherein the actuator is an electromagnetic actuator including a permanent magnet, and the permanent magnet is integrally attached to the mass member.