JP2010507801A - ガラス基板の品質検査装置及びその検査方法 - Google Patents
ガラス基板の品質検査装置及びその検査方法 Download PDFInfo
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- JP2010507801A JP2010507801A JP2009534472A JP2009534472A JP2010507801A JP 2010507801 A JP2010507801 A JP 2010507801A JP 2009534472 A JP2009534472 A JP 2009534472A JP 2009534472 A JP2009534472 A JP 2009534472A JP 2010507801 A JP2010507801 A JP 2010507801A
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- 239000000758 substrate Substances 0.000 title claims abstract description 107
- 239000011521 glass Substances 0.000 title claims abstract description 104
- 238000007689 inspection Methods 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000005286 illumination Methods 0.000 claims abstract description 41
- 238000012546 transfer Methods 0.000 claims abstract description 12
- 230000004069 differentiation Effects 0.000 claims abstract description 7
- 238000012545 processing Methods 0.000 claims description 11
- 238000011065 in-situ storage Methods 0.000 claims description 4
- 229910052724 xenon Inorganic materials 0.000 claims description 4
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical group [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 4
- 230000003252 repetitive effect Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 abstract description 6
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 238000007740 vapor deposition Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 14
- 239000010409 thin film Substances 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 7
- 238000001514 detection method Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 240000005611 Agrostis gigantea Species 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/69—Arrangements or methods for testing or calibrating a device
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nonlinear Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
Abstract
Description
2 ガラス基板
10 照明部
11 スリット
20 映像処理部
30 制御部
Claims (8)
- 移送ユニットを介して工程設備に供給する際、そのガラス基板が移送される状態で、インサイチュ検査方式により波形発生有無をリアルタイムに検査するか、又はガラス基板が停止されている際にリアルタイムで波形発生有無を検査する検査ユニットを構成するにおいて、
前記検査ユニットは、
ガラス基板の表面を透過する照明を照射する照明部と、
前記照明部からガラス基板に照明を透過させる際に、前記ガラス基板を透過する照明から発生するガラス基板の表面の影映像を撮影する映像処理部と、
前記映像処理部から撮影した影映像からガラス基板の表面に対する波形発生有無を検査する制御部と、
を含んで構成されることを特徴とするガラス基板の品質検査装置。 - 前記照明部は、キセノンランプであることを特徴とする請求項1に記載のガラス基板の品質検査装置。
- 前記ガラス基板を透過して生成される基板表面の影映像がより鮮明に現れるように、前記照明部の前方には、照明の照射方向をガラス基板だけに局限させるスリットを結合構成することを特徴とする請求項1に記載のガラス基板の品質検査装置。
- 前記スリットを介してガラス基板だけに照射される照明の照射角度は、18〜22゜の範囲内であることを特徴とする請求項3に記載のガラス基板の品質検査装置。
- ガラス基板に所定角度で照明を照射し、ガラス基板の表面に対する影映像を獲得する段階と
前記獲得された影映像を波形化する段階と、
前記波形化した影映像を微分アルゴリズムで微分して等間隔に分割する段階と、
前記微分を介して等間隔に分割した影映像にガラス基板の平坦度に対する基準値の境界条件を適用する段階と、
前記適用された境界条件を脱する映像が存在するか否かを検出して波形発生を判断する段階と、
前記判断の結果、波形が発生した場合にその波形種類を選別する段階と、
を含むことを特徴とするガラス基板の品質検査方法。 - 前記波形種類の選別は、
境界条件を脱する微分化された影映像の等間隔をカウンタし、
前記カウントされた個数から境界条件を脱する影映像の全体等間隔の幅が狭ければストリーク状の波形として選別することを特徴とする請求項5に記載のガラス基板の品質検査方法。 - 前記波形種類の選別は、
境界条件を脱する微分化された影映像の等間隔をカウンタし、
前記カウントされた個数から境界条件を脱する影映像の全体等間隔の幅が広ければシクバンド状の波形として選別することを特徴とする請求項5に記載のガラス基板の品質検査方法。 - 前記波形種類の選別は、
境界条件を脱する微分化された影映像の等間隔をカウンタし、
前記カウントされた個数から境界条件を脱する影映像の全体等間隔の幅が繰り返しの周期を有する場合、コード状の波形として選別することを特徴とする請求項5に記載のガラス基板の品質検査方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2006-0105240 | 2006-10-27 | ||
KR20060105240A KR100838655B1 (ko) | 2006-10-27 | 2006-10-27 | 유리기판의 품질 검사장치 및 그 검사방법 |
PCT/KR2007/002633 WO2008050941A1 (en) | 2006-10-27 | 2007-05-30 | Quality tester of glass board and method thereof |
Publications (2)
Publication Number | Publication Date |
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JP2010507801A true JP2010507801A (ja) | 2010-03-11 |
JP4971456B2 JP4971456B2 (ja) | 2012-07-11 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009534472A Active JP4971456B2 (ja) | 2006-10-27 | 2007-05-30 | ガラス基板の品質検査装置及びその検査方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4971456B2 (ja) |
KR (1) | KR100838655B1 (ja) |
CN (1) | CN101542359B (ja) |
TW (1) | TWI329200B (ja) |
WO (1) | WO2008050941A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR200461687Y1 (ko) | 2010-09-09 | 2012-07-30 | (주)쎄미시스코 | 다단의 기판 투입 게이트를 가지는 기판 품질 검사장치 |
WO2022224636A1 (ja) * | 2021-04-22 | 2022-10-27 | 日立造船株式会社 | 検査装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100953204B1 (ko) * | 2008-05-19 | 2010-04-15 | (주)쎄미시스코 | 기판의 품질 검사장치 및 그 검사방법 |
WO2011099404A1 (en) * | 2010-02-15 | 2011-08-18 | Ricoh Company, Ltd. | Transparent object detection system and transparent flat plate detection system |
CN103185662B (zh) * | 2011-12-30 | 2015-09-09 | 信义汽车玻璃(深圳)有限公司 | 汽车钢化玻璃水波纹检测支架和系统、以及检测方法 |
KR101316039B1 (ko) * | 2012-05-02 | 2013-10-10 | (주)쎄미시스코 | 수광장치와 이를 이용한 기판 품질검사장치 |
KR20240028785A (ko) | 2022-08-25 | 2024-03-05 | 주식회사 큐빅셀 | 유리기판의 단면 검사 장치 및 이를 이용한 검사 방법 |
Citations (6)
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JPS6312250B2 (ja) * | 1980-05-27 | 1988-03-18 | Nippon Sheet Glass Co Ltd | |
JPH0283438A (ja) * | 1988-09-21 | 1990-03-23 | Nissan Motor Co Ltd | 透明板表面の付着物等評価装置 |
JPH04232446A (ja) * | 1990-06-25 | 1992-08-20 | Saint Gobain Vitrage Internatl | ガラスの光学的品質の測定方法と装置 |
JPH07306152A (ja) * | 1994-03-16 | 1995-11-21 | Sekisui Chem Co Ltd | 光学的歪検査装置 |
JP2001201429A (ja) * | 2000-01-18 | 2001-07-27 | Mitsubishi Chemicals Corp | 検査基体の欠陥検査方法および装置 |
JP2002310925A (ja) * | 2001-04-18 | 2002-10-23 | Corning Japan Kk | 板材検査方法および板材検査装置 |
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JPH05272949A (ja) * | 1992-03-30 | 1993-10-22 | Nippon Sheet Glass Co Ltd | ガラス板表面評価方法 |
JPH08136239A (ja) * | 1994-11-11 | 1996-05-31 | Adomon Sci Kk | 検査装置及び検査方法 |
JP3668294B2 (ja) * | 1995-08-22 | 2005-07-06 | オリンパス株式会社 | 表面欠陥検査装置 |
JP4385419B2 (ja) * | 1998-11-30 | 2009-12-16 | 株式会社ニコン | 外観検査方法及び外観検査装置 |
KR20010055184A (ko) * | 1999-12-09 | 2001-07-04 | 구자홍 | 유리기판의 패턴 검사용 광학 장치 |
JP2004219108A (ja) * | 2003-01-09 | 2004-08-05 | Dainippon Printing Co Ltd | 着色膜の膜厚ムラ検査方法及び装置 |
JP2005083906A (ja) * | 2003-09-09 | 2005-03-31 | Asahi Kasei Engineering Kk | 欠陥検出装置 |
-
2006
- 2006-10-27 KR KR20060105240A patent/KR100838655B1/ko active IP Right Grant
-
2007
- 2007-05-30 JP JP2009534472A patent/JP4971456B2/ja active Active
- 2007-05-30 CN CN2007800397368A patent/CN101542359B/zh active Active
- 2007-05-30 WO PCT/KR2007/002633 patent/WO2008050941A1/en active Application Filing
- 2007-05-31 TW TW96119422A patent/TWI329200B/zh not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6312250B2 (ja) * | 1980-05-27 | 1988-03-18 | Nippon Sheet Glass Co Ltd | |
JPH0283438A (ja) * | 1988-09-21 | 1990-03-23 | Nissan Motor Co Ltd | 透明板表面の付着物等評価装置 |
JPH04232446A (ja) * | 1990-06-25 | 1992-08-20 | Saint Gobain Vitrage Internatl | ガラスの光学的品質の測定方法と装置 |
JPH07306152A (ja) * | 1994-03-16 | 1995-11-21 | Sekisui Chem Co Ltd | 光学的歪検査装置 |
JP2001201429A (ja) * | 2000-01-18 | 2001-07-27 | Mitsubishi Chemicals Corp | 検査基体の欠陥検査方法および装置 |
JP2002310925A (ja) * | 2001-04-18 | 2002-10-23 | Corning Japan Kk | 板材検査方法および板材検査装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR200461687Y1 (ko) | 2010-09-09 | 2012-07-30 | (주)쎄미시스코 | 다단의 기판 투입 게이트를 가지는 기판 품질 검사장치 |
WO2022224636A1 (ja) * | 2021-04-22 | 2022-10-27 | 日立造船株式会社 | 検査装置 |
Also Published As
Publication number | Publication date |
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TW200819736A (en) | 2008-05-01 |
WO2008050941A1 (en) | 2008-05-02 |
JP4971456B2 (ja) | 2012-07-11 |
CN101542359B (zh) | 2012-11-07 |
KR100838655B1 (ko) | 2008-06-16 |
KR20080037927A (ko) | 2008-05-02 |
TWI329200B (en) | 2010-08-21 |
CN101542359A (zh) | 2009-09-23 |
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