JP2010237095A - Capacitive humidity sensor and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent damage to and corrosion of a wire bonding section and an IC substrate by shock, and to improve sealing properties of a reference section in a capacitive humidity sensor for adhering and fixing a sensor chip substrate having a sensor and the reference section and the IC substrate to the same support substrate and in a method of manufacturing the capacity type moisture sensor. <P>SOLUTION: A protective member for covering the periphery of the sensor is provided on the sensor chip substrate; the support substrate is covered with a sealing resin by excluding a region surrounded by the protective member; the sensor is exposed to an atmosphere by the region surrounded by the protective member; and the reference section, a pad, a continuity wire, and the IC substrate are sealed outside the region surrounded by the protective member. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a capacitive humidity sensor using a polymer moisture sensitive film as a dielectric, and a method for manufacturing the same.

  As a humidity sensor used for humidity change measurement, there is a capacitance type humidity sensor using a polymer moisture sensitive film whose dielectric constant changes according to the amount of absorbed or released moisture as a dielectric. The capacitive humidity sensor includes a sensor unit including the polymer moisture-sensitive film and a pair of electrodes that are covered with the polymer moisture-sensitive film and detects capacitance thereof, and a pad unit provided at a pair of electrode ends. Can be electrically connected to an external circuit by wire bonding. Such a capacitive humidity sensor is described in Patent Document 1, for example.

JP 2008-107166 A

  In the conventional structure, the polymer moisture-sensitive film and the bonding wire are exposed, and there is a problem that the bonding wire is vulnerable to impact and corrosion. In particular, in a structure in which a control IC as an external circuit is provided on the same support substrate as the sensor unit, there is a desire to seal the entire substrate in order to protect the control IC and the wire bonding unit from damage or corrosion due to impact. It was necessary to expose the polymer moisture-sensitive film of the sensor part to the atmosphere, and sufficient sealing was not performed.

  In addition, the capacitive humidity sensor includes a sensor unit that changes in capacitance according to humidity and a reference unit that maintains a constant capacitance regardless of humidity on the same substrate. There is a type that converts the difference into voltage and outputs it. With this type, when the polymer moisture-sensitive film of the sensor part is exposed to the atmosphere with the substrate surface exposed, there is a possibility that the sealing property of the reference part cannot be sufficiently obtained.

  The present invention relates to a capacitive humidity sensor in which a sensor chip substrate having a sensor portion and a reference portion and an IC substrate are bonded and fixed to the same support substrate, and a manufacturing method thereof. Further, the present invention aims to improve the sealing performance of the reference portion.

  The present invention secures a space for exposing the sensor part to the atmosphere inside the protective member by providing a protective member surrounding the outer periphery of the sensor part, and seals components other than the sensor part with a resin material outside the protective member. It was completed by paying attention to the fact that it can be stopped.

  That is, the present invention includes a sensor unit whose capacitance changes according to humidity, a reference unit whose capacitance does not change regardless of humidity, and a plurality of pad units which are output terminals of the sensor unit and the reference unit. A sensor chip substrate and an IC substrate that is electrically connected to the plurality of pad portions via a conductive wire, converts a capacitance difference between the sensor portion and the reference portion into a voltage, and outputs the voltage on the same support substrate. In the capacitive humidity sensor formed by bonding and fixing, a protective member that covers the outer periphery of the sensor unit is provided on the sensor chip substrate, and the support substrate is covered with a sealing resin except for a region surrounded by the protective member, The sensor portion is exposed to the atmosphere in a region surrounded by the protective member, and the reference portion, the pad portion, the conductive wire, and the IC substrate are sealed. It is practical that the surface height of the sealing resin matches the surface height of the protective member.

  Moreover, according to the aspect of the manufacturing method, the present invention is a sensor unit whose capacitance changes according to humidity, a reference unit whose capacitance does not change regardless of humidity, and an output terminal of the sensor unit and the reference unit. A large number of sensor chip substrates having a plurality of pad portions are prepared, and a protective member that covers the outer periphery of the sensor portion is formed on each sensor chip substrate, and a capacitance difference between the sensor portion and the reference portion is converted into a voltage. Preparing a large number of IC substrates to be output, preparing a single support substrate having a large number of sensor areas defined by dicing lines, and for each sensor area on the upper surface of the support substrate, A step of bonding and fixing the sensor chip substrate on which the protective member is formed and the IC substrate in a pair, and a process of electrically connecting the pad portion of the sensor chip substrate and the IC substrate by a conductive wire And a mold having a recess that defines a cavity for resin injection, and the mold is in a state where the recess of the mold is in contact with the upper surface of the protective member provided on the sensor chip substrate. A step of fixing to the upper surface of the support substrate, and a molten sealing resin is injected into a cavity formed between the concave surface of the mold and the upper surface of the support substrate outside the region surrounded by the protective member. And a step of removing the mold, and a step of cutting the support substrate along a dicing line. It is preferable that the mold is fixed to the support substrate in a state in which a release sheet is mounted in the recess of the mold.

  According to another aspect, the sensor unit includes a sensor unit that changes capacitance according to humidity, a reference unit that does not change capacitance regardless of humidity, and a plurality of pad units that are output terminals of the sensor unit and the reference unit. A plurality of sensor chip substrates, a process of forming a protective member covering the outer periphery of the sensor unit on each sensor chip substrate, and an IC substrate that converts a capacitance difference between the sensor unit and the reference unit into a voltage and outputs the voltage A plurality of steps, a step of preparing a single support substrate having a large number of sensor areas defined by dicing lines, and a sensor in which the protective member is formed for each sensor area on the upper surface of the support substrate. A step of bonding and fixing the chip substrate and the IC substrate in a pair, a step of electrically connecting the pad portion of the sensor chip substrate and the IC substrate by a conductive wire, and a step of A step of providing an outer frame that defines a cavity for resin injection at the peripheral edge of the surface, and a molten sealing resin on the outer side of the region surrounded by the protective member within the outer frame. The method includes a step of injecting and curing until the upper surface and the surface height coincide with each other, a step of removing the outer frame, and a step of cutting the support substrate along a dicing line.

  The protective member is preferably formed of any one of a resin material, silicon, and glass.

  According to the present invention, the space for exposing the sensor unit is secured by the protection member, and the support substrate is covered with the sealing resin outside the protection member. Therefore, the components other than the sensor unit provided on the support substrate are provided. Can be sealed. Thereby, damage and corrosion due to impact of the wire bonding part and the IC substrate can be prevented, and furthermore, a capacitive humidity sensor excellent in sealing performance of the reference part and a manufacturing method thereof can be obtained.

It is sectional drawing (sectional drawing which follows the II line | wire of FIG. 2) which shows the main structures of the capacitive humidity sensor to which this invention is applied. It is a top view which shows the same capacity type humidity sensor. It is a top view which shows the parallel plate structure common to the sensor part and reference | standard part of the same capacity | capacitance type | mold humidity sensor. It is sectional drawing which shows 1 process of the manufacturing process of the capacitive humidity sensor by 1st Embodiment of this invention. It is sectional drawing which shows the next process of FIG. It is sectional drawing which shows the next process of FIG. It is sectional drawing which shows the next process of FIG. It is sectional drawing which shows the next process of FIG. It is sectional drawing which shows 1 process of the manufacturing process of the capacitive humidity sensor by 2nd Embodiment of this invention. FIG. 10 is a cross-sectional view showing the next step of FIG. 9. It is sectional drawing which shows the next process of FIG. FIG. 12 is a cross-sectional view showing a next step of FIG. 11. It is sectional drawing which shows the next process of FIG. It is sectional drawing which shows the next process of FIG.

  1 and 2 are a cross-sectional view and a plan view showing a main configuration of a capacitive humidity sensor 100 according to the present invention. The capacitive humidity sensor 100 is a polymer film humidity sensor that uses a polymer moisture-sensitive material whose dielectric constant changes according to the amount of moisture absorbed or released as a dielectric. The capacitive humidity sensor 100 includes a sensor chip substrate 10 and an IC substrate 50 that are bonded and fixed on a single support substrate 1.

  For example, the sensor chip substrate 10 made of silicon includes a sensor unit 20 in which the capacitance C20 varies depending on humidity, a reference unit 30 that holds a constant capacitance C30 regardless of humidity, and the sensor unit 20 and the reference unit. A plurality of pad portions 40 serving as 30 output terminals are formed.

  The sensor unit 20 and the reference unit 30 have the same parallel plate structure including the lower electrode film 11, the polymer moisture sensitive film 12, and the upper electrode film 13 formed by the same process using the same material. This parallel plate structure is shown in FIG. The lower electrode film 11, the polymer moisture sensitive film 12, and the upper electrode film 13 are sequentially stacked on the sensor chip substrate 10 from the lower electrode film 11 and have substantially the same circular shape in plan view. The lower electrode film 11 and the upper electrode film 13 are made of an electrode material such as Al, for example, and the film thicknesses thereof are uniform. The polymer moisture sensitive film 12 is made of polyimide and has a uniform film thickness. The distance d between the lower electrode film 11 and the upper electrode film 13 is equal to the film thickness of the polymer moisture sensitive film 12, and the capacitance C accumulated between the lower electrode film 11 and the upper electrode film 13 is the polymer moisture sensitive film. It is determined by the dielectric constant ε of the film 12, the distance d between the lower electrode film 11 and the upper electrode film 13, and the facing area S (C = εS / d).

  The upper electrode film 13 is provided with a large number of openings 13a through which the polymer moisture sensitive film 12 is exposed. The large number of openings 13a are arranged in a region facing the lower electrode film 11 at predetermined intervals in the left-right and up-down directions, and have a planar rectangular shape. The number, the planar shape, and the formation position of the openings 13a are arbitrary. A cross section taken along line II in FIG. 3 is shown in FIG.

In the reference portion 30, a non-moisture permeable protective film 14 that blocks moisture exchange with the atmosphere is formed on the upper electrode film 13, and the opening 13 a of the upper electrode film 13 is covered by the non-permeable protective film 14. ing. The moisture impermeable protective film 14 is made of, for example, a silicon nitride film (SiNx film) or an Al ₂ O ₃ / SiO ₂ laminated film. Since the polymer moisture-sensitive film 12 is covered with the upper electrode film 13 and the moisture-impermeable protective film 14 and is not exposed to the atmosphere, the polymer moisture-sensitive film 12 is not exposed to the atmosphere even if the humidity (water content) in the atmosphere changes. The amount of water does not change, and the dielectric constant ε does not change. As a result, a constant capacitance (reference capacitance) C30 is held between the lower electrode film 11 and the upper electrode film 13.

  In one sensor unit 20, the moisture-impermeable protective film 14 covers only the upper electrode film 13, and a large number of openings 13 a provided in the upper electrode film 13 are not covered with the moisture-impermeable protective film 14. Since the polymer moisture sensitive film 12 is exposed to the atmosphere through the large number of openings 13a, the amount of moisture absorbed or released changes according to the humidity (moisture amount) in the atmosphere, and the dielectric constant ε changes. To do. As a result, the capacitance (sensor capacitance) C20 between the lower electrode film 11 and the upper electrode film 13 changes.

  The plurality of pad portions 40 are wiring conductors that connect the pads 40a provided at the ends of the wiring conductor extended from the upper electrode film 13 of the sensor portion 20 and the lower electrode films 11 of the sensor portion 20 and the reference portion 30 respectively. The pad 40b is provided at the end of the wiring conductor branched from the line 40, and the pad 40c is provided at the end of the wiring conductor extended from the upper electrode film 13 of the reference portion 30. The plurality of pad portions 40 are not covered with the moisture-impermeable protective film 14.

  For example, the IC substrate 50 made of silicon is electrically connected to the sensor unit 20 and the reference unit 30 of the sensor chip substrate 10 via a plurality of pad units 40, and the difference ΔC = C20− between the sensor capacitance C20 and the reference capacitance C30. A control circuit (control IC) that converts C30) into a voltage and outputs the voltage is formed. The pad portion of the control circuit and the plurality of pad portions 40 of the sensor chip substrate 10 are electrically connected by a conductor wire 51. The IC substrate 50 is grounded to the support substrate 1 by a conductor wire 52 (FIG. 1).

The capacitive humidity sensor 1 having the overall configuration includes a protection member 60 that covers the outer periphery of the sensor unit 20 on the sensor chip substrate 10, and the support substrate 1 is sealed except for a closed region surrounded by the protection member 60. Sealed with resin 61. The sealing resin 61 completely forms components provided on the support substrate 1 other than the sensor unit 20, that is, the reference unit 30 and the pad unit 40 on the sensor chip substrate 10, the entire IC substrate 50, and the conductor wires 51 and 52. Covering. The surface height of the sealing resin 61 matches the surface height of the protective member 60. For example, an epoxy resin containing SiO ₂ filler is used for the sealing resin 61, and any of a resin material, silicon, or glass is used for the protective member 60. The protection member 60 of the present embodiment is formed in a disk shape having an inner peripheral surface having a diameter larger than the diameter of the sensor portion 20 having a planar circular shape.

  By providing the protective member 60, a space for exposing the sensor unit 20 to the atmosphere can be secured in an area surrounded by the protective member 60, and the components other than the sensor unit 20 are sealed by exposing the sensor unit 20. Can be both. The sealing resin 61 improves the sealing performance of the reference portion 30 of the sensor chip substrate 10 and damages the pad portion 40, the IC substrate 50, and the conductive wires 51 and 52 of the sensor chip substrate 10 due to corrosion or impact. Can be prevented.

  Next, with reference to FIGS. 4-8, 1st Embodiment of the manufacturing method of the capacitive humidity sensor by this invention is described. 4-8 is sectional drawing which shows the manufacturing process by 1st Embodiment. 4-8, the detailed structure of the sensor part 20 and the reference | standard part 30, and the pad part 40 are abbreviate | omitting illustration.

  First, a sensor unit 20 whose capacitance changes according to humidity, a reference unit 30 that holds a constant capacitance regardless of humidity, and a pad unit 40 that is an output terminal of the sensor unit 20 and the reference unit 30. A large number of sensor chip substrates 10 including the above are prepared, and a protective member 60 that covers the outer periphery of the sensor unit 20 is formed on each sensor chip substrate 10. The protection member 60 is formed of, for example, any one of a resin material, silicon, and glass. In addition, a large number of IC substrates 50 (FIGS. 1 and 2) on which a control circuit (control IC) that converts the capacitance difference ΔC between the sensor capacitor C20 and the reference capacitor C30 into a voltage and outputs the voltage are prepared. The number of sensor chip substrates 10 and IC substrates 50 to be prepared is the same.

  Next, as shown in FIG. 4, a large number of sensor chip substrates 10 and IC substrates 50 are bonded and fixed to the upper surface 1 a of a single support substrate 1. Dicing lines are set on the support substrate 10 in the left-right and up-down directions, and a pair of sensor chip substrates 10 and IC substrates 50 are provided in a large number of sensor areas defined by the dicing lines. For example, a resin adhesive is used for fixing the substrate.

  Subsequently, as shown in FIG. 4, in each sensor area, the pad portion 40 of the sensor chip substrate 10 and the pad portion of the IC substrate 50 are connected by the conductive wire 51, and the IC substrate 50 and the support substrate 1 are connected by the conductive wire. Connect at 52.

  Then, as shown in FIGS. 5 to 7, the support substrate 1 is sealed using a transfer mold method. In this sealing step, a mold 70 having a recess 70a that forms a cavity that defines a resin injection region and a release sheet 71 that facilitates release of the mold 70 are used.

  More specifically, as shown in FIG. 5, a release sheet 71 is mounted in the recess 70 a of the mold 70, and the mold 70 is placed on the support substrate 1 with the release sheet 71 facing the upper surface 1 a of the support substrate 1. Secure to. In this fixed state, the upper surface of the protection member 60 provided on the sensor chip substrate 10 contacts the recess 70a of the mold 70 via the release sheet 71, and the closed region (inner peripheral side) surrounded by the protection member 60 is gold. A cavity is formed between the mold 70 and the support substrate 1 in a region (outer peripheral side) that is closed by the mold 70 and is not surrounded by the protective member 60. When the mold 70 is fixed in this manner, as shown in FIG. 6, the molten sealing resin 61 is injected into the cavity formed between the mold 70 and the support substrate 1 outside the protective member 60. . The injected sealing resin 61 fills the outside of the protective member 60 to seal the IC substrate 50, the conductive wires 51 and 52, the pad portion 40 of the sensor chip substrate 10, and the reference portion 30, and is surrounded by the protective member 60. It does not enter the area. Then, when the sealing resin 61 is cured, the mold 70 is peeled off. Since the release sheet 71 is interposed between the sealing resin 60 and the mold 70, the mold 70 is easily released. FIG. 7 shows a state after the mold 70 is removed. The surface height of the sealing resin 61 matches the surface height of the protective member 60.

  When the mold 70 is removed, the support substrate 1 is cut along dicing lines as shown in FIG. 8 to obtain individual capacitive humidity sensors 100 (FIG. 1).

  Next, a second embodiment of the method for manufacturing a capacitive humidity sensor according to the present invention will be described with reference to FIGS. 9 to 14 are cross-sectional views illustrating manufacturing steps according to the second embodiment. 9-14, the detailed structure of the sensor part 20 and the reference | standard part 30, and the pad part 40 are abbreviate | omitting illustration.

  First, a sensor unit 20 whose capacitance changes according to humidity, a reference unit 30 that holds a constant capacitance regardless of humidity, and a pad unit 40 that is an output terminal of the sensor unit 20 and the reference unit 30. A large number of sensor chip substrates 10 including the above are prepared, and a protective member 60 that covers the outer periphery of the sensor unit 20 is formed on each sensor chip substrate 10. The protection member 60 is formed of, for example, any one of a resin material, silicon, and glass. In addition, a large number of IC substrates 50 (FIGS. 1 and 2) on which a control circuit (control IC) that converts the capacitance difference ΔC between the sensor capacitor C20 and the reference capacitor C30 into a voltage and outputs the voltage are prepared. The number of sensor chip substrates 10 and IC substrates 50 to be prepared is the same.

  Next, as shown in FIG. 9, a large number of sensor chip substrates 10 and IC substrates 50 are bonded and fixed to the upper surface 1 a of a single support substrate 1. Dicing lines are set on the support substrate 10 in the left-right and up-down directions, and a pair of sensor chip substrates 10 and IC substrates 50 are provided in a large number of sensor areas defined by the dicing lines. For example, a resin adhesive is used for fixing the substrate.

  Subsequently, as shown in FIG. 9, in each sensor area, the pad portion 40 of the sensor chip substrate 10 and the pad portion of the IC substrate 50 are connected by a conductive wire 51, and the IC substrate 50 and the support substrate 1 are connected by a conductive wire. Connect at 52. The steps so far are the same as in the first embodiment described above.

  After the wire bonding, as shown in FIG. 10, an outer frame 80 that defines a resin injection region is provided on the peripheral portion of the upper surface 1 a of the support substrate 1. Then, as shown in FIG. 11, the molten sealing resin 61 is injected into the outer frame 80 and outside the region surrounded by the protective member 60 using the resin dispenser 81. The sealing resin 61 is injected until the upper surface of the protective member 60 is flush with the surface height. When the sealing resin 61 is cured, the outer frame 80 is removed. FIG. 11 shows a state after the outer frame 80 is removed.

  When the outer frame 80 is removed, the support substrate 1 is cut along the dicing line as shown in FIG. 12, and individual capacitive humidity sensors 100 (FIG. 1) are obtained.

  According to the manufacturing method of the said 1st and 2nd embodiment, the space for exposing the sensor part 20 to atmosphere can be ensured by providing the protective member 60 which covers the outer periphery of the sensor part 20, Excluding this space. Components other than the support substrate 1 and the sensor unit 20 provided on the support substrate 1 can be resin-molded together. As a result, the manufacturing process becomes easy and the cost can be reduced.

  The embodiment having the sensor unit 20 and the reference unit 30 having a parallel plate structure in which the polymer moisture sensitive film 12 is sandwiched between the lower electrode film 11 and the upper electrode film 13 has been described. The present invention can also be applied to a capacitive humidity sensor having a structure including a polymer moisture-sensitive film and a pair of electrodes that are covered with the polymer moisture-sensitive film and detect capacitance thereof.

DESCRIPTION OF SYMBOLS 100 Capacitive humidity sensor 1 Support substrate 10 Sensor chip substrate 11 Lower electrode film 12 Polymer moisture sensitive film 13 Upper electrode film 14 Non-moisture permeable protective film 20 Sensor part 30 Reference part 40 Pad part 50 IC board 60 Protective member 61 Sealing Resin 70 Mold 71 Release sheet 80 Outer frame 81 Resin dispenser

Claims (7)

A sensor unit that includes a sensor unit that changes capacitance according to humidity, a reference unit that does not change capacitance regardless of humidity, and a plurality of pad units that are output terminals of the sensor unit and the reference unit. Capacitance formed by bonding and fixing an IC substrate that is electrically connected to the plurality of pad portions via wires, converts the capacitance difference between the sensor portion and the reference portion into a voltage, and outputs the voltage. Type humidity sensor,
A protective member is provided on the sensor chip substrate to cover the outer periphery of the sensor unit. The support substrate is covered with a sealing resin except for a region surrounded by the protective member, and the sensor is covered by the protective member. A capacitive humidity sensor characterized in that the reference part, the pad part, the conductive wire, and the IC substrate are sealed while exposing the part to the atmosphere. The capacitive humidity sensor according to claim 1, wherein the surface height of the sealing resin and the surface height of the protective member are matched. 2. The capacitive humidity sensor according to claim 1, wherein the protective member is formed of any one of a resin material, silicon, and glass. A large number of sensor chip substrates are provided with a sensor part whose capacitance changes according to humidity, a reference part whose capacitance does not change regardless of humidity, and a plurality of pad parts which are output terminals of the sensor part and the reference part. And forming a protective member covering the outer periphery of the sensor part on each sensor chip substrate;
Preparing a large number of IC substrates for converting the capacitance difference between the sensor unit and the reference unit into a voltage and outputting the voltage;
Providing a single support substrate having multiple sensor areas defined by dicing lines;
Bonding and fixing a pair of sensor chip substrate and the IC substrate on which the protective member is formed for each sensor area on the upper surface of the support substrate;
Electrically connecting the pad portion of the sensor chip substrate and the IC substrate by a conductive wire;
A mold having a recess that defines a cavity for resin injection is prepared, and the support substrate is placed in a state in which the recess of the mold is in contact with the upper surface of a protective member provided on the sensor chip substrate. Fixing to the upper surface of
Injecting and curing molten sealing resin into a cavity formed between the concave surface of the mold and the upper surface of the support substrate outside the region surrounded by the protective member;
Removing the mold;
Cutting the support substrate along a dicing line;
A method for manufacturing a capacitive humidity sensor, comprising: 5. The method of manufacturing a capacitive humidity sensor according to claim 4, wherein the mold is fixed to the support substrate in a state in which a release sheet is attached to a concave portion of the mold. A large number of sensor chip substrates are provided with a sensor part whose capacitance changes according to humidity, a reference part whose capacitance does not change regardless of humidity, and a plurality of pad parts which are output terminals of the sensor part and the reference part. And forming a protective member covering the outer periphery of the sensor part on each sensor chip substrate;
Preparing a large number of IC substrates for converting the capacitance difference between the sensor unit and the reference unit into a voltage and outputting the voltage;
Providing a single support substrate having multiple sensor areas defined by dicing lines;
Bonding and fixing a pair of sensor chip substrate and the IC substrate on which the protective member is formed for each sensor area on the upper surface of the support substrate;
Electrically connecting the pad portion of the sensor chip substrate and the IC substrate by a conductive wire;
A step of providing an outer frame defining a cavity for resin injection at the peripheral edge of the upper surface of the support substrate;
Injecting and curing molten sealing resin to the outside of the region surrounded by the protective member within the outer frame until the surface height matches the upper surface of the protective member; and
Removing the outer frame;
Cutting the support substrate along a dicing line;
A method for manufacturing a capacitive humidity sensor, comprising: 7. The method of manufacturing a capacitive humidity sensor according to claim 4, wherein the protective member is formed of any one of a resin material, silicon, and glass.

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