JP2010230489A - Angular velocity sensor - Google Patents

Abstract

An object of the present invention is to improve the sensitivity of an angular velocity sensor.
In order to achieve this object, the present invention provides a circuit unit 11 for outputting a drive signal and receiving a detection signal, and at least a part of the circuit unit vibrates in accordance with the input of the drive signal. A detection element 12 that outputs a detection signal as it is generated, and a flexible conductor 13 that electrically connects the detection element 12 and the circuit unit. The detection element 12 includes a base 12A and the base 12A. A central connection plate between the flexible conductor 13 and the detection element 12, and arms 12 </ b> B and 12 </ b> C connected to each other, and a back electrode (not shown) provided on the back surface of the base portion 12 </ b> A. 14, the concentrated connection plate 14 has a back terminal 14A connected to the flexible conductor on the back surface, and a surface terminal 14B connected to the back electrode of the detection element on the surface. It has a configuration that has .
[Selection] Figure 1

Description

  The present invention relates to an angular velocity sensor used for vehicle control, a car navigation device, camera shake correction of a digital camera, and the like.

  Conventionally, as shown in FIG. 5, this type of angular velocity sensor has a circuit unit 1 that outputs a drive signal and receives a detection signal, and at least a part of the circuit vibrates with the input of the drive signal and generates a Coriolis force. A detection element 2 for outputting a detection signal; a back electrode (not shown) provided on the back of the base of the detection element 2; and a flexible conductor 3 for electrically connecting the circuit unit 1; The flexible conductor 3 absorbs external impact and suppresses impact transmission to the detection element 2.

As prior art document information relating to this application, for example, Patent Document 1 is known.
JP 2008-151633 A

  Such a conventional angular velocity sensor has a problem of low sensitivity.

  That is, in the above-described conventional configuration, since the flexible conductor 3 plays a role of absorbing external impact, stress is concentrated between the flexible conductor 3 and the detection element 2 to improve electrical connection reliability. Concerns arise. Therefore, in order to ensure electrical connection reliability, it is necessary to secure a connection area between the back electrode (not shown) provided in the detection element 2 and the flexible conductor 3, and this connection area As the size increases, the area of the base 2A increases. As a result, the Coriolis force generated in the drive arm 2B shown in FIG. 6 is not easily transmitted to the detection arm 2C, and the sensitivity is low.

  Therefore, an object of the present invention is to improve the sensitivity of the angular velocity sensor.

  In order to achieve this object, the present invention provides a circuit unit for outputting a drive signal and receiving a detection signal, and at least a part of the circuit unit vibrates with the input of the drive signal, and the detection signal is generated when a Coriolis force is generated. And a flexible conductor that electrically connects the detection element and the circuit unit, the detection element having a base, an arm connected to the base, and a back surface of the base A concentrated connection plate is interposed between the flexible conductor and the detection element, and the concentrated connection plate is connected to the flexible conductor on the back surface. And having a front surface terminal connected to the back surface electrode of the detection element on the surface thereof.

  With this configuration, the flexible conductor that absorbs external impact and the concentrated connection plate are connected to each other at an area where electrical connection reliability can be secured at the back surface terminal of the concentrated connection plate, and the concentrated connection plate and the concentrated connection plate The area of the base of the detection element can be reduced by concentrating and electrically connecting with the detection element at the surface terminal of the central connection plate, and as a result, the sensitivity of the angular velocity sensor is improved. It can be done.

(Embodiment 1)
Hereinafter, an angular velocity sensor according to Embodiment 1 of the present invention will be described with reference to the drawings.

  As shown in FIG. 1, a circuit unit 11 that outputs a drive signal and receives a detection signal, and a detection element 12 that outputs a detection signal when Coriolis force is generated at least part of which vibrates with the input of the drive signal. And a flexible conductor 13 that electrically connects the detection element 12 and the circuit unit 11.

  As shown in FIG. 2, the detection element 12 has a base 12A, a driving arm 12B connected to the base 12A, a detection arm 12C, and a back electrode (not shown) provided on the back of the base 12A. ), And a concentrated connecting plate 14 is interposed between the flexible conductor 13 and the detecting element 12, and the back surface of the concentrated connecting plate 14 has the flexible conductor as shown in FIG. 13 is provided, and a surface terminal 14B connected to the back electrode (not shown) of the detection element 12 is provided on the surface of the concentrated connection plate 14 as shown in FIG. It is configured.

  Here, the area of the base 12A is reduced by adopting a configuration in which the sum of the areas of the back surface terminals 14A in the concentrated connection plate 14 is larger than the sum of the areas of the surface terminals 14B.

  In the present embodiment, as shown in FIG. 1, the front terminal 14 </ b> B (see FIG. 4) of the concentrated connection plate 14 and the back electrode (not shown) of the detection element 12 are connected by bumps 15. It was.

  Next, the operation of the angular velocity sensor will be described. First, the drive signal from the circuit unit 11 shown in FIG. 1 is transmitted to the back terminal 14A of the concentrated connection plate 14 shown in FIG. Then, the drive signal is transmitted from the front surface terminal 14B (see FIG. 4) electrically connected to the back surface terminal 14A inside the concentrated connection plate 14 to the back surface electrode (not shown) on the back surface of the base 12A of the detection element 12. Is transmitted. Thereafter, the drive signal is transmitted to the drive arm 12B electrically connected to the back electrode (not shown) via a wiring (not shown), and the drive arm 12B is input in accordance with the input of the drive signal. Performs drive vibration.

  When an angular velocity is applied to the angular velocity sensor, a Coriolis force is generated, and the driving vibration state of the driving arm 12B changes.

  This change in the driving vibration state is transmitted to the detection arm 12C via the base 12A, and a detection signal is output from the detection arm 12C.

  The detection signal is transmitted from the detection arm 12C to a back electrode (not shown) provided on the back surface of the base 12A through a wiring (not shown), and the concentrated connection is made from the back electrode (not shown). It is transmitted to the front surface terminal 14B (see FIG. 4) of the plate 14, transmitted from the front surface terminal 14B (see FIG. 4) to the back surface terminal 14A (see FIG. 3), and from the back surface terminal 14A (FIG. 3) to the flexible conductor. 13 is transmitted to the circuit unit 11 (see FIG. 1) to detect the occurrence of angular velocity.

  With such a configuration, the sensitivity of the angular velocity sensor can be improved.

  That is, the flexible conductor 13 that absorbs an external impact and the concentrated connection plate 14 are connected to each other at an area where electrical connection reliability can be secured by the back terminal 14A (see FIG. 3) of the concentrated connection plate 14. As a result, the electrical connection reliability is ensured, and the concentrated connection plate 14 and the detection element 12 are connected in a concentrated manner at the surface terminal 14B (see FIG. 4) of the concentrated connection plate 14, thereby the detection. The area of the base of the element 12 can be reduced, and as a result, the sensitivity of the angular velocity sensor can be improved.

  In the present embodiment, there are four drive arms 12B and two detection arms 12C. However, the present invention is not limited to this embodiment, and the drive arm 12B and the detection arm 12C include If it exists and they are connected through the base 12A, the effect of the present invention can be obtained.

  The angular velocity sensor of the present invention has an effect that sensitivity can be improved, and is useful in vehicle control, a car navigation device, camera shake correction of a digital camera, and the like.

Sectional drawing of the angular velocity sensor in Embodiment 1 of this invention Top view of angular velocity sensor in Embodiment 1 of the present invention The bottom view of the base part of the detection element of the angular velocity sensor in Embodiment 1 of this invention Top view of the base of the detection element of the angular velocity sensor according to Embodiment 1 of the present invention Sectional view of a conventional angular velocity sensor Top view of conventional angular velocity sensor

DESCRIPTION OF SYMBOLS 11 Circuit part 12 Detection element 12A Base 12B Drive arm 12C Detection arm 13 Flexible conductor 14 Concentrated connection board 14A Back surface terminal 14B Surface terminal

Claims (2)

A circuit unit for outputting a drive signal and receiving a detection signal;
A detection element that at least partially vibrates with the input of the drive signal and outputs a detection signal with the generation of Coriolis force;
A flexible conductor that electrically connects the detection element and the circuit unit;
With
The sensing element is a base;
An arm connected to this base;
Having a back electrode provided on the back of the base,
A concentrated connection plate is interposed between the flexible conductor and the detection element,
The central connection plate is
The back surface has a back terminal connected to the flexible conductor,
An angular velocity sensor having a front surface terminal connected to the back surface electrode of the detection element on the surface. The angular velocity sensor according to claim 1, wherein a sum of areas of the back surface terminals in the concentrated connection plate is larger than a sum of areas of the front surface terminals.

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