JP2010210172A - Temperature/humidity conditioner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a temperature/humidity conditioner capable of reducing work burden in maintenance of a humidification water storage section. <P>SOLUTION: In this temperature/humidity conditioning device, a humidifying section 6 has a humidification pan 12 detachably disposed in an air-conditioning chamber 2b for storing the humidification water, and a heat exchange enhancing section 16 disposed over the inside and outside of the humidification pan 12 at a position to be kept into contact with the air flowing from a processing chamber 2a to the air-conditioning chamber 2b, and constituted to generate heat pump phenomenon for evaporating working fluid sealed therein, inside of a part disposed outside of the humidification pan 12, and condensing the evaporated working fluid inside of a part disposed inside of the humidification pan 12. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a temperature and humidity control apparatus.

  Conventionally, a temperature and humidity control apparatus capable of adjusting the temperature and humidity in a room that accommodates an object to be processed to a target temperature and humidity is known, and an example of such a temperature and humidity control apparatus is described in Patent Document 1 below. Is disclosed.

  In the temperature and humidity control apparatus disclosed in Patent Document 1, a test chamber for storing a processing object in a test tank and an air conditioning chamber for adjusting the temperature and humidity of air to a target temperature and humidity are provided. In the air conditioning room, the temperature and humidity of the air are adjusted by the humidifier, heat absorber, and heater, and the temperature and humidity in the test room are adjusted by circulating the air between the air conditioner and the test room using a fan. It is supposed to be. And in this temperature control apparatus, the said humidification part heats the humidification water accommodation part which consists of a recessed part formed in the floor surface of the air-conditioning room in a test tank, and the humidification water accommodated in the humidification water accommodation part The heater is configured such that air is humidified by evaporating the humidified water with the heater.

JP 2008-202111 A

  However, in the configuration of Patent Document 1, since the humidified water storage portion is integrally formed on the floor surface of the test tank, maintenance such as cleaning of the humidified water storage section must be performed in the test tank. There is a problem that the maintenance work becomes complicated.

  This invention was made in order to solve said subject, The objective is to provide the temperature control apparatus which can reduce the work burden concerning the maintenance of a humidification water accommodating part. .

  In order to achieve the above object, a temperature and humidity control apparatus according to the present invention includes a processing chamber in which an object to be processed is stored, and an air conditioning chamber for adjusting the temperature and humidity of the air in the processing chamber to a target temperature and humidity. A processing tank, a blower that circulates air between the processing chamber and the air-conditioning chamber, a humidifying unit for humidifying the air in the air-conditioning chamber, and temperature of the air in the processing tank A humidity control apparatus including a temperature control unit for the humidification water storage unit configured to be detachably disposed in the air-conditioning chamber and configured to store humidification water, and the treatment chamber. The working fluid enclosed inside and outside the humidified water storage part at a position where the air flowing into the air-conditioning room comes into contact, and the side of the humidified water storage part disposed outside the humidified water storage part and the humidified water When evaporating inside one side of the side arranged inside the housing part Its evaporated working fluid to be having a heat exchange promoting unit configured to give rise to heat-pipe phenomenon of condensation inside the other side.

  In this temperature and humidity control apparatus, the humidified water storage section of the humidifying section is made of a container that is detachably disposed in the air conditioning chamber, so that the humidified water storage section is taken out from the air conditioning chamber to the outside of the treatment tank and the maintenance is performed. Can do. For this reason, compared with the case where the humidified water accommodating part is integrally formed on the floor surface of the test tank as in the prior art and the humidified water accommodating part must be maintained in the test tank, the humidified water accommodating part The work burden of maintenance can be reduced.

  By the way, when the humidified water storage part is formed by denting a part of the floor surface of the test tank as in the prior art, the air easily flows on the water surface in the humidified water storage part. Is adjusted to a high temperature and high humidity condition, that is, when the temperature in the tank is set higher than the temperature of the humidified water, the humidification of the air circulating in the tank is promoted. On the other hand, when the humidified water storage part is arranged in the air conditioning room at a position where the air flowing into the air conditioning room from the processing chamber contacts the outer surface, the air flowing into the air conditioning room is placed on the outer surface of the humidified water storage part. Since it flows in the direction along, the humidified water and the air flow are unlikely to come into contact with each other, and the humidification of the air is not easily promoted. However, in the present invention, the heat exchange facilitator configured to enclose the working fluid and cause the heat pipe phenomenon is contained in the humidified water at a position where the air flowing from the processing chamber to the air conditioning chamber contacts. Since the air flowing into the air conditioning chamber from the processing chamber is heated more than the humidified water stored in the humidified water storage unit, a heat pipe phenomenon occurs in the heat exchange promoting unit. The heat of the air that has flowed into the air conditioning chamber is conveyed to the humidified water by the heat exchange promoting unit, and the evaporation of the humidified water is promoted. The humidification of the humidified water by the heat transfer of the heat exchange promoting portion promotes the humidification of the air, and as a result, the air humidified due to the above-described air flowing in the direction along the outer surface of the humidified water accommodating portion. Can cover the bitterness.

  Furthermore, as a result of earnest study, the inventor of the present application has arranged a heat exchange promoting part that can cause a heat pipe phenomenon across two spaces having a temperature difference, and is arranged in a space on the high temperature side of the heat exchange promoting part. It has been found that the working fluid evaporates inside the portion, and the temperature at which the working fluid evaporates is approximately equal to the dew point of the space on the high temperature side. Therefore, in the present invention, when the temperature of the air flowing from the processing chamber to the air conditioning chamber rises in the process of raising the temperature in the processing chamber and a heat pipe phenomenon occurs in the heat exchange promoting portion, the humidified water accommodating portion in the heat exchange promoting portion. The working fluid evaporates at a portion disposed outside the chamber, and the temperature at the location where the working fluid evaporates becomes substantially equal to the dew point of the air in the processing chamber. Thereafter, when heat is transferred to the humidified water stored in the humidified water storage unit by the heat exchange promoting unit and the temperature of the humidified water rises to near the dew point of the air in the processing chamber, a heat pipe phenomenon occurs in the heat exchange promoting unit. No longer occurs and heat transfer is stopped. That is, in the present invention, the temperature of the humidified water stored in the humidified water storage unit can be maintained near the dew point of the air in the processing chamber, and the humidified water can be kept in a vaporizable state.

  In addition, when the heat exchange promotion part is not provided, those temperatures will eventually be in an equilibrium state due to heat exchange through the wall of the humidified water storage part between the humidified water and the air flowing into the air conditioning room from the processing chamber. However, since the heat exchange promoting portion as in the present invention is provided, the heat exchange between the air flowing from the processing chamber into the air conditioning chamber and the humidified water is performed quickly, so that the temperature of the humidified water is increased more quickly. The humidified water can be evaporated more quickly near the dew point of the air in the processing chamber.

  In addition, when the humidification of air is started by raising the temperature of the low-temperature humidified water to the dew point of the air in the processing chamber, or in order to keep the processing chamber in a high temperature and high humidity state, In order to maintain the temperature of the humidified water near the dew point of the processing chamber, it is conceivable to heat the humidified water with a heater. On the other hand, in the present invention, the heat of the air flowing from the processing chamber to the air conditioning chamber can be supplied to the humidified water by the heat exchange promoting unit, so that heating by such a heater is performed or by the heater. By reducing the amount of heating, the start of humidification of the air or the temperature of the humidified water can be maintained near the dew point of the processing chamber. For this reason, in this invention, the energy concerning the heating of humidification water by a heater, and its cost can be reduced.

  In the temperature control apparatus, an end portion of the heat exchange promoting portion disposed on the outside of the humidified water storage portion is lower than an end portion disposed on the inside of the humidified water storage portion. It may be arranged at a position.

  Even in the case where the end on the side arranged outside the humidified water storage part and the end on the side arranged inside the humidified water storage part in the heat exchange promoting part are arranged at the same height, When the temperature of the air is raised from the humidified water, the working fluid evaporates at the portion of the heat exchange promoting portion arranged outside the humidifying water storage portion and the vapor of the working fluid is out of the heat exchange promoting portion. The heat pipe phenomenon is caused by condensation at the portion arranged inside the humidified water storage unit, but the end of the heat exchange promotion unit on the side arranged outside the humidified water storage unit as in this configuration is humidified water. If it is arranged at a position lower than the end portion on the side arranged inside the housing part, the working fluid can be evaporated and condensed in the heat exchange promoting part more efficiently. The efficiency of heat transfer to the humidified water by the promotion unit can be improved. As a result, the humidified water can be heated more quickly to humidify the air.

  In the temperature and humidity control apparatus, a plurality of the heat exchange promotion units are provided in the humidified water storage unit, and portions of the heat exchange promotion units arranged outside the humidification water storage unit are respectively plate-shaped. And may be arranged in parallel with each other at a predetermined interval.

  If a plurality of heat exchange promoting portions are provided in the humidified water storage unit as in this configuration, the humidified water stored in the humidified water storage unit is compared to the case where only one heat exchange promoting unit is provided. The whole temperature can be raised more quickly. By the way, as a structure in which a plurality of heat exchange promotion parts are provided in this way, a structure in which a plurality of rod-like heat exchange promotion parts are provided so as to protrude from a predetermined wall part of the humidified water storage part is also conceivable. However, in this case, the air flow that contacts the wall of the humidified water storage section is in a turbulent state, and the air in the turbulent flow state is outside the humidified water storage section in each heat exchange promoting section. The amount of heat applied to the arranged parts will be different. On the other hand, as in the present configuration, portions of each heat exchange promoting portion arranged outside the humidifying water storage portion are each formed in a plate shape and are arranged in parallel with each other at a predetermined interval. If so, the air that flows into the air conditioning chamber from the processing chamber and contacts the outer surface of the humidified water storage unit is rectified by these heat exchange promotion units, and the amount of heat applied to each heat exchange promotion unit from the rectified air is made uniform Is done. As a result, the amount of heat transferred to the humidified water by each heat exchange promoting unit is made uniform, so that the entire humidified water stored in the humidified water storage unit can be heated more uniformly. Therefore, with this configuration, the entire humidified water stored in the humidified water storage unit can be heated more quickly and more uniformly.

  In the above-described temperature and humidity control apparatus, the heat exchange promoting part is provided through the wall of the humidified water storage part, and the wall provided with the heat exchange promoting part includes a heat insulating material. It is preferable.

  If the wall of the humidified water storage part provided with the heat exchange promoting part penetrating as in this configuration is provided with a heat insulating material, the temperature difference between the inside and outside of the humidified water storage part is reliably ensured across the wall part. The heat pipe phenomenon can be surely generated in the heat exchange promoting portion that penetrates the wall portion.

  In the above-described temperature control apparatus, the end on the side of the heat exchange promoting unit that is disposed outside the humidified water storage unit and the end of the side disposed inside the humidified water storage unit are the same. It may be arranged at a height.

  As in this configuration, the end on the side arranged outside the humidified water storage part and the end on the side arranged inside the humidified water storage part in the heat exchange promoting part are arranged at the same height. Even in the case where the temperature of the air in the processing chamber is raised above the humidified water, the working fluid evaporates at the portion of the heat exchange promoting portion arranged outside the humidifying water storage portion and the evaporated working fluid is heated. The heat pipe phenomenon that condenses in the portion arranged inside the humidification water storage part of the exchange promotion part occurs, heat is transferred from the air flowing from the processing chamber to the air conditioning room by this heat exchange promotion part to the humidification water, Increase in temperature of humidified water is promoted. Further, in this configuration, when the temperature in the processing chamber is lowered below the humidified water, the working fluid evaporates at the portion disposed inside the humidified water storage portion of the heat exchange promoting portion, and the evaporated working fluid The heat pipe phenomenon that condenses in the part of the heat exchange promoting part arranged outside the humidifying water accommodating part occurs, and the outside of the humidifying water accommodating part is generated from the humidified water stored in the humidifying water accommodating part by the heat exchange promoting part. Heat is transferred to the water, and the temperature drop of the humidified water is promoted. Therefore, in this configuration, when both the temperature and humidity of the processing chamber are increased, the humidification water is quickly heated using the temperature increase of the air in the processing chamber, and the humidification of the air by the humidifying unit is performed more quickly. In addition, when both the temperature and humidity of the processing chamber are lowered, the humidified water can be quickly lowered using the temperature drop of the air in the processing chamber, and the humidification of the air by the humidifying unit can be reduced more quickly.

  Further, the temperature and humidity control apparatus according to the present invention includes a processing chamber having a processing chamber in which an object to be processed is stored, and an air conditioning chamber for adjusting the temperature and humidity of the air in the processing chamber to a target temperature and humidity, A blower that circulates air between the processing chamber and the air-conditioning chamber, a humidifying portion for humidifying the air in the air-conditioning chamber, and a temperature control portion for adjusting the temperature of the air in the space in the processing tank; A humidity control apparatus comprising: the humidifying unit is detachably disposed in the air-conditioning chamber, and includes a humidifying water storage unit including a container for storing humidifying water, and the humidifying water storage unit is operated A fluid-sealed configuration, and a region near the outer surface of the humidified water storage unit where the air that has flowed from the processing chamber into the air-conditioning chamber is in contact with the humidified water storage unit. Evaporate in one of the areas closer to the inner surface and Issued working fluid is configured to give rise to heat-pipe phenomenon is condensed in the other region.

  In this temperature and humidity control apparatus, the humidifying water storage section of the humidification section is detachably disposed in the air conditioning room, so the work burden on the maintenance of the humidification water storage section is the same as that of the temperature control apparatus described above. Can be reduced. Further, in this temperature control apparatus, the humidifying water storage unit includes a working fluid sealed inside the humidifying water storage unit and a region near the outer surface where the air flowing into the air conditioning chamber from the processing chamber comes into contact with the humidifying water storage unit. Since it is configured to evaporate in one of the areas near the inner surface of the humidified water storage section and cause the heat pipe phenomenon in which the evaporated working fluid condenses in the other area, air conditioning from the processing chamber When the temperature of the air flowing into the chamber is higher than that of the humidified water stored in the humidified water storage unit, a heat pipe phenomenon occurs in the humidified water storage unit, and the heat of the air flowing into the air conditioning chamber is generated from the outer surface side of the humidified water storage unit. Evaporation of humidified water is promoted by being conveyed to the inner surface side. Thereby, humidification of the air is promoted, and as a result, it is possible to cover the difficulty of humidifying the air due to the air flowing in the direction along the outer surface of the humidified water accommodating portion.

  Moreover, in this structure, the temperature of the location where a working fluid evaporates among humidification water accommodation parts becomes substantially equal to the dew point of the air of a process chamber by the principle similar to the heat exchange promotion part of the above-mentioned temperature control humidity control apparatus. For this reason, when the temperature of the humidified water rises to the vicinity of the dew point of the air in the processing chamber by heat transfer by the humidified water storage unit, the heat pipe phenomenon does not occur in the humidified water storage unit, and the heat transfer is stopped. The temperature of the humidified water stored in the housing portion can be maintained near the dew point of the air in the processing chamber, so that the humidified water can be kept in a vaporizable state.

  In addition, since the humidified water storage unit is configured to cause a heat pipe phenomenon, heat exchange between the air flowing from the processing chamber into the air conditioning chamber and the humidified water is performed quickly, so that the temperature of the humidified water is further increased. It is possible to quickly bring the humidified water into a state where it can be evaporated near the dew point of the air in the processing chamber. In addition, since the humidified water can be heated using the heat of the air flowing from the processing chamber to the air-conditioning chamber by the heat transfer by the humidified water storage section where the heat pipe phenomenon occurs, the humidification by the heater is performed in the humidification section. Energy and cost for heating water can be reduced.

  In the above temperature and humidity control apparatus, the humidified water storage unit is disposed at a position where a gap is formed between a bottom surface thereof and a floor surface of the air conditioning chamber, and the bottom wall of the humidified water storage unit is the heat pipe. You may be comprised so that a phenomenon may arise.

  Moreover, in the said temperature control apparatus, the side wall of the said humidification water accommodating part may be comprised so that the said heat pipe phenomenon can produce.

  As described above, according to the present invention, it is possible to reduce the work burden on maintenance of the humidified water storage unit. Moreover, according to this invention, the energy concerning the heating of humidification water by a heater and its cost can be reduced.

It is a figure which shows the structure in the processing tank of the temperature control apparatus by 1st Embodiment of this invention. It is a longitudinal cross-sectional view of the humidification part used for the temperature control apparatus shown in FIG. It is a figure which shows the result of having experimented what kind of temperature the outer surface temperature of the location where the working fluid is evaporating in the heat pipe in which the heat pipe phenomenon has occurred. It is a figure which shows the structure of the humidification part vicinity of the temperature control apparatus by 2nd Embodiment of this invention. It is a longitudinal cross-sectional view of the humidification part of the temperature control apparatus by the 1st modification of 1st Embodiment of this invention. It is the figure which looked at the humidification part of the temperature control apparatus by the 2nd modification of 1st Embodiment of this invention from the process chamber side. It is sectional drawing along the VII-VII line of the humidification part shown in FIG. It is a figure which shows the structure of the humidification part vicinity of the temperature control humidity control apparatus by the 3rd modification of 1st Embodiment of this invention. It is a figure which shows the structure of the humidification part vicinity of the temperature control humidity control apparatus by the 4th modification of 1st Embodiment of this invention. It is a longitudinal cross-sectional view of the humidifying tray of the temperature control apparatus by the 1st modification of 2nd Embodiment of this invention. It is a longitudinal cross-sectional view of the humidification pan of the temperature control humidity control apparatus by the 2nd modification of 2nd Embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
First, with reference to FIG.1 and FIG.2, the structure of the temperature control apparatus by 1st Embodiment of this invention is demonstrated.

  The temperature control and humidity control apparatus according to the first embodiment sets a temperature and humidity in a processing chamber 2a, which will be described later, to a predetermined temperature and humidity, and allows a processing object stored in the processing chamber 2a to be stored in the predetermined temperature and humidity environment. Such a temperature control device includes an environmental test device, a constant temperature and humidity chamber, and the like. As shown in FIG. 1, the temperature control apparatus includes a processing tank 2, a blower unit 4, a humidification unit 6, and a temperature control unit 8.

  The processing tank 2 is formed in a box shape configured to be able to seal the internal space, and the processing tank 2 includes a processing chamber 2a and an air conditioning chamber 2b therein. The processing chamber 2a and the air conditioning chamber 2b are partitioned by a partition wall 2c, and an upper communication portion 2d for communicating the processing chamber 2a and the air conditioning chamber 2b is provided above the partition wall 2c, and the partition wall 2c. On the lower side, a lower communication portion 2e is provided for communicating the processing chamber 2a and the air conditioning chamber 2b.

  The processing chamber 2a is a space in which a processing object is stored, and the temperature and humidity in the processing chamber 2a are adjusted to a target temperature and humidity. An unillustrated air temperature detector for detecting the temperature of air is provided in the processing chamber 2a.

  The air conditioning chamber 2b is provided to adjust the temperature and humidity of the air in the processing chamber 2a to a target temperature and humidity, and the air blowing unit 4, the humidifying unit 6, and the temperature control unit 8 are installed in the air conditioning chamber 2b. ing.

  The ventilation part 4 is provided in the upper part of the air-conditioning room 2b. The blower unit 4 includes a fan that blows air, and circulates air between the processing chamber 2a and the air conditioning chamber 2b. The air blown by the blower 4 flows from the air conditioning chamber 2b to the processing chamber 2a through the upper communication portion 2d. Accordingly, the air in the processing chamber 2a flows into the air conditioning chamber 2b from the processing chamber 2a through the lower communication portion 2e. In this way, air circulates between the processing chamber 2a and the air conditioning chamber 2b.

  The humidification part 6 is provided in the lower part of the air conditioning chamber 2b, and humidifies the air in the air conditioning chamber 2b.

  Specifically, as shown in FIG. 2, the humidifying unit 6 includes a humidifying dish 12, a heater 14, a heat exchange promoting unit 16, and a humidified water temperature detecting unit 18.

  The humidifying tray 12 is a container for storing humidified water, and is included in the concept of the humidified water storage unit of the present invention. The humidifying tray 12 is detachably disposed in the air conditioning chamber 2b. Specifically, the humidifying tray 12 is placed on the floor surface 2g in the air conditioning chamber 2b and can be taken out of the processing tank 2 from the air conditioning chamber 2b. And the humidification dish 12 has the bottom wall 12a arrange | positioned on the floor surface 2g of the air-conditioning room 2b, and the side wall 12b each raised from the peripheral part of the bottom wall 12a. The humidifying tray 12 is disposed at a position where the air flowing into the air conditioning chamber 2b from the processing chamber 2a contacts one of the side walls 12c. The side wall 12c is included in the concept of the wall portion of the present invention. In this 1st Embodiment, the side wall 12c is arrange | positioned so that the lower side communication part 2e may be faced, and the air which flowed into the air-conditioning room 2b from the process chamber 2a through the lower side communication part 2e on the outer surface of the side wall 12c It hits almost vertically. Each side wall 12b (12c) of the humidifying tray 12 is composed of a heat insulating wall provided with a heat insulating material. Further, the humidifying dish 12 has an opening 12d in the upper part thereof, and the humidified water stored in the humidifying dish 12 can be evaporated through the opening 12d. And in the humidification part 6, air is humidified by evaporating this humidified water.

  The heater 14 is for heating and evaporating the humidified water stored in the humidifying tray 12, and a part of the heater 14 is disposed in the humidifying tray 12 so as to be immersed in the humidified water.

  The heat exchange promoting unit 16 promotes heat exchange between the air flowing from the processing chamber 2 a to the air conditioning chamber 2 b and the humidified water stored in the humidifying tray 12. This heat exchange promoting part 16 is composed of a straight rod-like heat pipe, and penetrates the side wall 12c of the humidifying dish 12 at a position where air flowing into the air conditioning room 2b from the processing chamber 2a comes into contact with the inside and outside of the humidifying dish 12. It is provided across.

  Specifically, a through hole 12f is formed in the side wall 12c of the humidifying tray 12, and the heat pipe of the heat exchange promoting portion 16 is fixed to the side wall 12c while being inserted into the through hole 12f. And the through-hole 12f is formed in the hole inclined so that the part located in the outer surface side of the side wall 12c may become lower than the part located in the inner surface side, The heat exchange promotion part inserted in this through-hole 12f 16 is arrange | positioned with the attitude | position inclined so that the edge part by the side arrange | positioned outside the humidification dish 12 may be located in a position lower than the edge part by the side arrange | positioned inside the humidification dish 12. FIG. And the part arrange | positioned in the humidification tray 12 among the heat exchange promotion parts 16 is immersed in humidification water. Further, the gap between the heat exchange promoting portion 16 inserted through the through hole 12f and the inner surface of the through hole 12f is blocked by a seal material (not shown) so that the humidified water does not leak out.

  A working fluid made of pure water is sealed inside the heat pipe of the heat exchange promoting unit 16. The heat pipe of the heat exchange promoting unit 16 is arranged outside the humidifying dish 12 when the temperature of the air in the processing chamber 2a flowing into the air conditioning chamber 2b is higher than the temperature of the humidifying water stored in the humidifying dish 12. The working fluid evaporates in the vicinity of the end portion on the other side, and the vapor of the evaporated working fluid condenses inside the vicinity of the end portion on the side disposed in the humidifying dish 12 to generate a heat pipe phenomenon. ing.

  The humidifying water temperature detecting unit 18 is provided in the humidifying dish 12 and detects the temperature of the humidifying water stored in the humidifying dish 12.

  The temperature adjustment unit 8 is provided in the air conditioning room 2b and adjusts the temperature of the air in the air conditioning room 2b. The temperature control unit 8 includes a heating unit 8a and a cooling unit 8b.

  The heating unit 8a heats air and is provided below the air blowing unit 4 in the air conditioning chamber 2b. The cooling unit 8b cools the air, and is constituted by, for example, a vapor compression refrigerator. The cooling unit 8b is provided below the heating unit 8a and above the humidifying unit 6 in the air conditioning chamber 2b. And in this temperature control part 8, based on the detection result by the said air temperature detection part, the temperature of air is adjusted by adjusting the heating capability of the heating part 8a, and the cooling capability of the cooling part 8b, respectively. Yes. The cooling unit 8b also serves as a dehumidifier, and adjusts the humidity of the air by adjusting the dehumidifying capability of the cooling unit 8b and the humidifying capability of the humidifying unit 6, respectively.

  Next, the operation of the temperature and humidity control apparatus according to the first embodiment of the present invention will be described.

  In the temperature and humidity control apparatus according to the first embodiment, based on the temperature of the air in the processing chamber 2a detected by the air temperature detector and the temperature of the humidified water detected by the humidified water temperature detector 18. The level of the temperature of the air in the processing chamber 2a and the temperature of the humidified water is determined.

  When the temperature of the air in the processing chamber 2a is lower than the temperature of the humidified water and the processing chamber 2a is set to a temperature higher than that of the humidifying water and the processing chamber 2a is humidified, for example, the processing chamber 2a is heated to a high temperature. In the case of adjusting to a high humidity condition, first, air is heated by the heating unit 8a in the air conditioning chamber 2b, and the heated air is sent to the processing chamber 2a by the blower unit 4 so that the temperature in the processing chamber 2a is increased. Is raised above the temperature of the humidified water. Then, the air in the processing chamber 2a whose temperature is higher than that of the humidified water flows into the air conditioning chamber 2b, hits the side wall 12c of the humidifying tray 12, and then flows upward along the side wall 12c in the air conditioning chamber 2b.

  At this time, a temperature difference occurs between the inside and outside of the humidifying pan 12 with the side wall 12c interposed therebetween, and accordingly, a heat pipe phenomenon occurs in the heat exchange promoting portion 16. Specifically, the working fluid evaporates inside the heat exchange promoting unit 16 in the vicinity of the end located on the outside of the humidifying tray 12, and the evaporated working fluid is humidified in the heat exchange promoting unit 16. Condensation occurs in the vicinity of the end portion on the side arranged in the dish 12, and evaporation and condensation of the working fluid occur inside the heat exchange promotion unit 16. Due to the occurrence of this heat pipe phenomenon, the heat of the air in the processing chamber 2a is supplied to the humidified water stored in the humidifying tray 12 via the heat exchange promoting portion 16 to heat the humidified water. Thereby, evaporation of humidification water is accelerated | stimulated and air is humidified.

  And in the heat exchange promotion part 16 in which the heat pipe phenomenon has occurred, the outer surface temperature of the portion where the working fluid is evaporated in the portion arranged outside the humidifying tray 12 flows into the air conditioning chamber 2b from the processing chamber 2a. Is substantially equal to the dew point of the air in the processing chamber 2a. This phenomenon has been found from the results of experiments conducted by the inventors of the present application to actually measure the temperature at the location where the working fluid of the heat pipe has evaporated. In this constant temperature and humidity chamber, the heat pipe is installed through the heat insulating wall so as to straddle the space inside the tank partitioned by the heat insulating wall and the space outside the tank. The heat pipe was completely heated and the heat pipe phenomenon occurred completely. In this experiment, the surface temperature of the part where the working fluid evaporates in the part of the heat pipe that is disposed in the tank is measured by a temperature sensor, and the temperature and relative humidity in the tank are measured on the device side of the constant temperature and humidity chamber. Furthermore, the dew point of the air in the tank was calculated from the measured temperature and relative humidity in the tank. The time course of these measurement results and calculation results is shown in FIG. From the results shown in FIG. 3, it can be seen that the outer surface temperature of the portion where the working fluid evaporates in the heat pipe in which the heat pipe phenomenon occurs is substantially equal to the dew point of the air in the tank, that is, the dew point of the space on the high temperature side. .

  As described above, after the outer surface temperature of the portion where the working fluid evaporates in the heat exchange promoting portion 16 becomes substantially equal to the dew point of the air in the processing chamber 2a, the heat exchange promoting portion 16 accumulates in the humidifying tray 12 as described above. When heat is transferred to the humidified water and the temperature of the humidified water rises to a temperature substantially equal to the dew point of the air in the processing chamber 2a, the heat pipe phenomenon does not occur in the heat exchange promoting part 16, and the heat transfer is stopped. The That is, the temperature of the humidified water is maintained in the vicinity of the dew point of the air in the processing chamber 2a by the function of the heat exchange promoting unit 16, and is kept in an evaporable state.

  In addition, when the humidification of the air is urgently, that is, when the humidity of the processing chamber 2a is rapidly increased, the humidification water is heated by the heater 14 in addition to the heat transfer by the heat exchange promoting unit 16 to evaporate the humidification water. Promote more.

  When the inside of the processing chamber 2a is adjusted to a high temperature and low humidity condition, that is, when the inside of the processing chamber 2a is set to a temperature higher than that of the humidified water and is set to a low humidity state, the air is heated by the heating unit 8a in the same manner as described above. Then, the temperature in the processing chamber 2a is raised to a temperature higher than the humidified water, and this is determined from the temperature detected by the air temperature detector and the temperature detected by the humidified water temperature detector 18. As described above, when the temperature in the processing chamber 2a is raised to a temperature higher than the humidified water, a heat pipe phenomenon occurs in the heat exchange promoting unit 16 as described above, and the humidified water is transported by the heat exchange promoting unit 16 as described above. Evaporation is promoted to humidify the air, but the air is dehumidified by the cooling unit 8b, and the air blown from the air conditioning chamber 2b to the processing chamber 2a is in a low humidity state. At this time, the heater 14 is not operated.

  When the processing chamber 2a is adjusted to a low temperature and high humidity condition, that is, when the processing chamber 2a is set to a temperature lower than the humidified water and the processing chamber 2a is set to a high humidity state, the cooling unit 8b Then, the temperature in the processing chamber 2a is lowered to a temperature lower than that of the humidified water, which is determined from the temperature detected by the air temperature detector and the temperature detected by the humidified water temperature detector 18. When the temperature of the air in the processing chamber 2a is lowered to a temperature lower than the temperature of the humidified water as described above, the heat pipe phenomenon does not occur in the heat exchange promoting part 16, and the heater 14 is operated. The humidified water is heated by the heater 14. Thereby, evaporation of humidified water is promoted, the air blown from the air conditioning chamber 2b to the processing chamber 2a is humidified, and the processing chamber 2a is brought into a high humidity state.

  Further, when the processing chamber 2a is adjusted to a low temperature and low humidity condition, that is, when the processing chamber 2a is set to a temperature lower than the humidified water and the processing chamber 2a is set to a low humidity state, In the same manner as described above, air is cooled by the cooling unit 8b and the temperature in the processing chamber 2a is lowered to a temperature lower than that of the humidified water. This is the detected temperature by the air temperature detecting unit and the detected temperature by the humidified water temperature detecting unit 18. It is judged from. And when the temperature of the air in the processing chamber 2a is lowered to a temperature lower than the temperature of the humidified water in this way, the heat pipe phenomenon does not occur in the heat exchange promoting part 16. Further, the heater 14 is not operated, and the humidified water is cooled by the air and the evaporation is suppressed, so that the air blown from the air conditioning chamber 2b to the processing chamber 2a is in a low humidity state.

  As described above, in the first embodiment, since the humidifying tray 12 of the humidifying unit 6 is detachably disposed in the air conditioning chamber 2b, the humidifying tray 12 is taken out from the air conditioning chamber 2b to the outside of the processing tank 2. Maintenance can be performed. For this reason, compared with the case where the humidification water accommodating part is integrally formed in the floor surface of a test tank like the conventional, and the maintenance of the humidification water accommodating part must be performed in a test tank, The workload for maintenance can be reduced.

  Further, when the humidified water storage portion is formed by recessing a part of the floor surface of the test tank as in the prior art, since air easily flows on the water surface in the humidifying dish 12, for example, in the tank Is adjusted to a high temperature and high humidity condition, that is, when the temperature in the tank is set higher than the temperature of the humidified water, humidification of the air circulating in the tank is promoted. On the other hand, when the humidifying tray 12 is disposed in the air conditioning chamber 2b at a position where the air flowing into the air conditioning chamber 2b from the processing chamber 2a contacts the outer surface of the side wall 12c, the air flowing into the air conditioning chamber 2b is Since it flows in the direction along the outer surface of the side wall 12c of the humidifying tray 12, it is difficult for the humidified water and the air flow to come into contact with each other, and the humidification of the air is not easily promoted. However, in 1st Embodiment, since the heat exchange promotion part 16 is provided so that it may straddle the inside and outside of the humidification dish 12 in the position where the air which flowed into the air-conditioning room 2b from the processing room 2a contacts, from the processing room 2a When the temperature of the air flowing into the air conditioning chamber 2 b is raised from the humidified water stored in the humidifying tray 12, a heat pipe phenomenon occurs in the heat exchange promoting unit 16, and the heat of the air flowing into the air conditioning chamber 2 b is heat exchange promoting unit 16. Is conveyed to the humidified water to promote the evaporation of the humidified water. Thereby, humidification of the air is promoted, and as a result, it is possible to cover the difficulty of humidifying the air due to the air flowing in the direction along the outer surface of the side wall 12c of the humidifying tray 12.

  Moreover, in 1st Embodiment, the outer surface temperature of the location where a working fluid evaporates in the part arrange | positioned outside the humidification dish 12 among the heat exchange promotion parts 16 in which the heat pipe phenomenon has arisen is the dew point of the air of the process chamber 2a. Therefore, when the heat is transferred to the humidified water stored in the humidifying tray 12 by the heat exchange promoting unit 16 and the temperature of the humidified water rises to near the dew point of the air in the processing chamber 2a, the heat exchange is promoted. The heat pipe phenomenon does not occur in the portion 16, and the heat transfer is stopped. Therefore, in the first embodiment, the temperature of the humidified water stored in the humidifying tray 12 can be maintained near the dew point of the air in the processing chamber 2a, and the humidified water can be kept in a vaporizable state.

  Moreover, since the heat exchange promotion part 16 as in the first embodiment is provided, heat exchange between the air in the processing chamber 2a and the humidified water is quickly performed, and thus the heat exchange promotion part 16 is not provided. Compared to the case, the temperature of the humidified water can be set earlier to the vicinity of the dew point of the air in the processing chamber 2a so that the humidified water can be evaporated more quickly.

  In the first embodiment, since the heat of the air in the processing chamber 2a can be supplied to the humidified water by the heat exchange promoting unit 16 to heat the humidified water, the heating amount by the heater 14 is reduced or the heating by the heater 14 is performed. Even when the operation is stopped, the humidification of the air can be started and the temperature of the humidified water can be maintained near the dew point of the processing chamber 2a. For this reason, in 1st Embodiment, the energy concerning the heating of humidification water by the heater 14, and its cost can be reduced.

  Moreover, in 1st Embodiment, the edge part by the side arrange | positioned outside the humidification dish 12 among the heat exchange promotion parts 16 is arrange | positioned in the position lower than the edge part by the side arrange | positioned inside the humidification dish 12. FIG. Therefore, compared with the case where the end part of the heat exchange promotion part 16 on the side arranged outside the humidifying dish 12 and the end part on the side arranged inside the humidifying dish 12 are arranged at the same height. Thus, the working fluid can be more efficiently circulated and evaporated in the heat exchange promoting portion 16. As a result, the efficiency of heat transfer to the humidified water by the heat exchange promoting unit 16 can be improved, and the humidified water can be heated more quickly to humidify the air.

  Moreover, in 1st Embodiment, since the side wall 12c of the humidification dish 12 provided so that the heat exchange promotion part 16 might penetrate consists of a heat insulation wall provided with the heat insulating material, the inside and outside of the humidification dish 12 on both sides of the side wall 12c Thus, the temperature difference can be reliably maintained, and the heat pipe phenomenon can be surely generated in the heat exchange promoting portion 16.

(Second Embodiment)
Next, with reference to FIG. 4, the temperature control apparatus by 2nd Embodiment of this invention is demonstrated.

  In the temperature and humidity control apparatus according to the second embodiment, unlike the first embodiment, the humidifying unit 6 does not include the heat exchange promoting unit 16, and the humidifying dish 12 itself can cause a heat pipe phenomenon. It is configured.

  Specifically, as shown in FIG. 4, the humidifying tray 12 of the humidifying unit 6 according to the second embodiment has a bottom wall 12 a and a side wall 12 b that are hollow, and a working fluid is enclosed therein. ing. And this humidification dish 12 is arrange | positioned so that attachment or detachment is possible in the air conditioning chamber 2b, and is mounted on the support member 30 installed on the floor surface 2g in the air conditioning chamber 2b. The humidifying tray 12 is supported by the support member 30 and is horizontally disposed at a position spaced upward from the floor surface 2g in the air conditioning chamber 2b.

  The support member 30 has a placement portion 30a and leg portions 30b. The placing portion 30a is a portion on which the humidifying tray 12 is placed, and is placed horizontally. The mounting portion 30a is made of a perforated plate or a net-like member, and is provided with a large number of holes 30c penetrating vertically. It is possible to vent up and down through each hole 30c of the mounting portion 30a. The leg portion 30b supports the mounting portion 30a in a state of being spaced upward from the floor surface 2g in the air-conditioning chamber 2b. The leg portions 30b are spaced apart from each other in the mounting portion 30a and end of the mounting portion 30a. It is attached to each of four locations located in the vicinity of the edge and horizontally supports the placement portion 30a on the floor surface 2g.

  The other configuration of the temperature control device according to the second embodiment is the same as the configuration of the temperature control device according to the first embodiment.

  And in the temperature control apparatus of this 2nd Embodiment, the temperature of the air in the process chamber 2a is lower than the temperature of the humidification water stored in the humidification dish 12, and the inside of the process chamber 2a is higher than humidification water. When the inside of the processing chamber 2a is humidified, air having a temperature higher than that of the humidified water flows from the processing chamber 2a to the air conditioning chamber 2b, and the air flows between the humidifying tray 12 and the partition wall 2c. While passing through and upward, it passes between the leg portions 30b of the support member 30 and also flows into the space below the placement portion 30a.

  Part of the air that has flowed into the space below the mounting portion 30a comes into contact with the bottom surface of the humidifying dish 12 through a large number of holes 30c provided in the mounting portion 30a. As a result, a heat pipe phenomenon occurs in the humidifying tray 12, and the working fluid evaporates in the area near the outer surface (bottom surface) of the humidifying tray 12 in the humidifying tray 12, particularly in the bottom wall 12a. The fluid condenses in a region near the inner surface of the humidifying dish 12 (the surface in contact with the humidifying water), and the circulation of evaporation and condensation of the working fluid occurs inside the humidifying dish 12. When this heat pipe phenomenon occurs, the heat of the air flowing from the processing chamber 2a to the air conditioning chamber 2b is transferred to the humidified water stored in the humidifying tray 12 by the humidifying tray 12, and the humidified water is heated. Thereby, evaporation of humidification water is accelerated | stimulated and the air of the air-conditioning room 2b is humidified.

  In the temperature and humidity control apparatus of the second embodiment, the operation other than the above when adjusting the temperature and humidity of the processing chamber 2a is the heat in the heat exchange promoting unit 16 in the temperature control and humidity apparatus of the first embodiment. The operation is the same as when the pipe phenomenon is replaced with the heat pipe phenomenon in the humidifying tray 12.

  As described above, in the second embodiment, since the humidifying tray 12 is detachably disposed in the air conditioning chamber 2b, the work load on the maintenance of the humidifying tray 12 is reduced as in the first embodiment. can do.

  And in this 2nd Embodiment, the heat pipe phenomenon in the humidification dish 12 acts similarly instead of the heat pipe phenomenon of the said heat exchange promotion part 16 in the said 1st Embodiment, The said 1st resulting from the heat pipe phenomenon The same effect as that of the embodiment can be obtained.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiments but by the scope of claims for patent, and further includes meanings equivalent to the scope of claims for patent and all modifications within the scope.

  For example, as in the first modification of the first embodiment shown in FIG. 5, the heat exchange promotion unit 16 may be arranged in a posture that extends horizontally. That is, the end of the heat exchange promoting unit 16 on the side arranged outside the humidifying dish 12 and the end of the side arranged inside the humidifying dish 12 may be arranged at the same height.

  Even if it is the structure like this 1st modification, when the temperature of the air of the process chamber 2a is set to the temperature higher than the temperature of humidification water, it is outside the humidification pan 12 in the heat exchange promotion part 16. The working fluid evaporates inside the portion on the arranged side, and the evaporated working fluid condenses inside the portion arranged in the humidifying tray 12 in the heat exchange promoting portion 16, and this phenomenon occurs. Heat is transferred from the air flowing from the processing chamber 2a to the air conditioning chamber 2b to the humidified water by the heat exchange promoting unit 16, and the temperature rise of the humidified water is promoted.

  Furthermore, in this first modified example, when the temperature in the processing chamber 2a is lowered, if the temperature of the air in the processing chamber 2a is set to a temperature lower than the temperature of the humidifying water, the humidifying dish in the heat exchange promoting part 16 A heat pipe phenomenon occurs in which the working fluid evaporates at a portion disposed inside the heat exchanger 12 and the evaporated working fluid condenses at a portion disposed outside the humidifying tray 12 in the heat exchange promoting portion 16. Heat is transferred to the outside from the humidified water stored in the humidifying tray 12 by the promoting unit 16, and the temperature drop of the humidified water is promoted. Therefore, in this first modification, when both the temperature and humidity of the processing chamber 2a are increased, the humidified water is quickly heated using the temperature increase of the air in the processing chamber 2a, and the humidification of the air by the humidifying unit 6 is performed. In the case where both the temperature and humidity of the processing chamber 2a are lowered, the temperature of the processing chamber 2a is used to quickly cool the humidified water, and the humidifying unit 6 humidifies the air. It can be reduced more quickly.

  Moreover, the several heat exchange promotion part 20 formed in plate shape may be provided in the side wall 12c of the humidification dish 12 like the 2nd modification of the said 1st Embodiment shown in FIG.6 and FIG.7. .

  Specifically, the heat exchange promoting unit 20 according to the second modified example includes a heat lane formed in a hollow flat plate shape, and a working fluid is sealed therein. A plurality of elongate through holes 12h extending in the vertical direction and penetrating the inside and outside of the humidifying dish 12 are formed at predetermined intervals in the horizontal direction on the side wall 12c of the humidifying dish 12 with which the air flowing into the air conditioning chamber 2b from the processing chamber 2a contacts. The heat lanes of the heat exchange promoting part 20 are respectively inserted into the through holes 12h so as to straddle the inside and outside of the humidifying dish 12. Thereby, the part arrange | positioned outside the humidification dish 12 among each heat exchange promotion part 20 and the part arrange | positioned in the humidification dish 12 are arrange | positioned in the standing attitude | position, and are mutually parallel and with a predetermined space | interval. They are arranged side by side in the horizontal direction.

  If a plurality of heat exchange promoting portions 20 are provided on the side wall 12c of the humidifying tray 12 that comes into contact with the air flowing into the air conditioning chamber 2b from the processing chamber 2a as in the second modification, the heat exchange promoting portion 1 Compared with the case where only one is provided, the entire humidified water stored in the humidifying tray 12 can be heated more quickly.

  By the way, as a structure which provides two or more heat exchange promotion parts, you may provide two or more so that the straight-bar-shaped heat exchange promotion part 16 like the said 1st Embodiment may protrude from the side wall 12c of the humidification dish 12. As shown in FIG. However, in this case, the air flow contacting the side wall 12c of the humidifying tray 12 is in a turbulent state, and is arranged outside the humidifying tray 12 in each heat exchange promoting portion 16 from the turbulent air. The amount of heat applied to the applied portions will be different.

  On the other hand, as in the second modified example, portions of each heat exchange promoting portion 20 arranged outside the humidifying dish 12 are each formed in a plate shape and arranged in parallel with each other at a predetermined interval. If this is done, the air that flows into the air conditioning chamber 2b from the processing chamber 2a and contacts the side wall 12c of the humidifying tray 12 is rectified by these heat exchange promoting portions 20, and the rectified air is passed to each heat exchange promoting portion 20 The amount of heat applied is made uniform. As a result, since the amount of heat transferred to the humidified water by each heat exchange promoting unit 20 is made uniform, the entire humidified water stored in the humidifying tray 12 can be heated more uniformly. Therefore, in this second modification, the entire humidified water stored in the humidifying tray 12 can be heated more quickly and more uniformly.

  Further, the surface on which the humidifying tray 12 is placed is not limited to the floor surface 2g in the air conditioning chamber 2b. For example, as in the third modification of the first embodiment shown in FIG. 8, the support member 40 is installed in the air conditioning chamber 2b, and the humidifying tray 12 is placed on the upper surface of the support member 40. Good. Therefore, the humidifying tray 12 may be disposed at a position shifted upward from the lower communication portion 2e while being lifted from the floor surface 2g of the air conditioning chamber 2b. In addition, as a supporting member which forms the mounting surface for mounting the humidification dish 12 in the position lifted from the floor surface 2g, it is not restricted to the trapezoid thing installed on the floor surface 2g, The air-conditioning room 2b is enclosed. A shelf shape fixed to the inner wall surface of the treatment tank 2 may be used.

  Moreover, like the 4th modification of the said 1st Embodiment shown in FIG. 9, the heat exchange promotion part 16 penetrates the bottom wall 12a of the humidifying tray 12, and is provided ranging over the inside and outside of the said humidifying tray 12. As shown in FIG. May be. In addition, the bottom wall 12a in this 4th modification is included in the concept of the wall part of this invention.

  Specifically, in the fourth modification, the humidifying tray 12 is placed on the support member 30 installed on the floor surface 2g in the air conditioning chamber 2b, so that the position is spaced upward from the floor surface 2g. The humidifying tray 12 is arranged in the. The bottom wall 12a of the humidifying tray 12 is provided with a plurality of through holes 12j extending vertically so as to be spaced apart from each other, and a heat exchange promoting portion 16 made of a heat pipe extends vertically in each through hole 12j. Each state is inserted and fixed.

  The support member 30 has a leg portion 30b and a placement portion 30e. The leg portion 30b is the same as the leg portion 30b of the support member 30 of the second embodiment, and horizontally supports the mounting portion 30e while being spaced upward from the floor surface 2g in the air conditioning chamber 2b. Yes. The mounting part 30e is formed in a flat plate shape, and the humidifying tray 12 is mounted thereon. Insertion holes 30f penetrating vertically are respectively provided at positions corresponding to the heat exchange promoting portions 16 projecting downward from the bottom wall 12a of the humidifying tray 12 in the placement portion 30e.

  And the part located in the exterior of the humidification dish 12 among each heat exchange promotion part 16 is penetrated by each insertion hole 30f of the mounting part 30e. That is, the part located in the exterior of the humidification pan 12 among each heat exchange promotion part 16 protrudes in the space below the mounting part 30e through the insertion hole 30f of the mounting part 30e. In the fourth modified example, when the air in the processing chamber 2a is heated to a temperature higher than the humidified water stored in the humidifying tray 12, and the air flows into the air conditioning chamber 2b, a part of the air is supported by the support member 30. It flows between the leg portions 30b and also flows into the space below the placement portion 30e, and comes into contact with each heat exchange promotion portion 16 protruding into the space below the placement portion 30e. As a result, a heat pipe phenomenon occurs in each heat exchange promoting portion 16, and the working fluid evaporates inside the portion of each heat exchange promoting portion 16 that protrudes downward from the bottom wall 12 a of the humidifying tray 12. The working fluid condenses inside the portion located in the humidifying tray 12 in each heat exchange promoting portion 16. In the case of the fourth modified example, the bottom wall 12a of the humidifying tray 12 is preferably a heat insulating wall provided with a heat insulating material in order to cause each heat exchange promoting portion 16 to reliably generate a heat pipe phenomenon. Further, the mounting portion 30e may be formed in a net shape or the like.

  Further, the humidified water storage section for storing the humidified water may have a shape other than the flat humidifying dish 12 described above. For example, a tank that contains humidified water inside and that has an opening that allows the humidified water to evaporate and dissipate outside the tank may be used as the humidified water containing portion. .

  Further, the side wall 12c (12b) and / or the bottom wall 12a of the humidifying tray 12 may not include a heat insulating material.

  Moreover, like the 1st modification of the said 2nd Embodiment shown in FIG. 10, the bottom wall 12a formed in the hollow shape of the humidification dish 12 protrudes in the space which accumulates humidified water from the upper surface side, and the inside The space may include an inner convex portion 12m connected to the space in the bottom wall 12a. As a result, when the heat pipe phenomenon shown in the second embodiment occurs in the humidifying tray 12, the working fluid condenses even in the inner convex portion 12 m, and the humidifying tray 12 with respect to the humidified water stored in the humidifying tray 12. Therefore, the heat transfer efficiency to the humidified water can be improved. Further, as in the second modification of the second embodiment shown in FIG. 11, the hollow bottom wall 12a of the humidifying tray 12 projects downward from the lower surface side in addition to the inner convex portion 12m. The inner space may include an outer convex portion 12n connected to the space in the bottom wall 12a. By the outer convex portion 12n, the heat of the air flowing into the air conditioning chamber 2b from the processing chamber 2a can be more efficiently applied to the bottom wall 12a of the humidifying tray 12. Moreover, the hollow bottom wall 12a of the humidifying tray 12 may not include the inner convex portion 12m but may include only the outer convex portion 12n.

  Further, when the humidifying tray 12 is configured so that the heat pipe phenomenon can occur, only a part of the humidifying tray may be configured so that the heat pipe phenomenon can occur. For example, only the bottom wall of the humidifying dish may be hollowed and the working fluid may be enclosed therein, or only the side wall of the humidifying dish may be hollowed and the working fluid may be enclosed therein.

  Further, when the humidifying tray 12 is configured so that the heat pipe phenomenon can occur, fins for promoting heat exchange may be provided so as to protrude outward from the humidifying tray 12, and heat exchange is promoted. The fins may be provided so as to protrude from the humidifying tray 12 to a space for storing the humidified water inside.

  Moreover, in the said 2nd Embodiment, the fan which ventilates upwards below the mounting part 30a of the supporting member 30 is installed, and the air which flowed below the mounting part 30a is ventilated upward with this fan. The air may strike the bottom surface of the humidifying tray 12 satisfactorily.

  In addition, the portion of the processing tank in which the processing chamber is provided and the portion in which the air conditioning chamber is provided are configured separately, and the processing chamber and the air conditioning chamber are connected by a duct. Air may be circulated through the duct with the air conditioning room.

  The working fluid may be a liquid other than pure water.

2 Processing tank 2a Processing chamber 2b Air-conditioning chamber 2g Floor (predetermined surface)
4 Blower 6 Humidifier 8 Temperature Controller 12 Humidifier (humidified water storage)
12a Bottom wall (wall)
12b Side wall 12c Side wall (wall part)
16, 20 Heat exchange promotion part

Claims (8)

A processing tank having a processing chamber in which a processing object is stored, an air conditioning chamber for adjusting the temperature and humidity of the air in the processing chamber to a target temperature and humidity, and air between the processing chamber and the air conditioning chamber A temperature and humidity control apparatus comprising a circulating air blowing unit, a humidifying unit for humidifying the air in the air-conditioned room, and a temperature adjusting unit for adjusting the temperature of the air in the processing tank,
The humidifying unit is detachably disposed in the air-conditioning chamber, and the humidifying water storage unit includes a humidifying water storage unit including a container for storing humidified water, and the humidified water storage unit at a position where the air flowing into the air-conditioning chamber from the processing chamber comes into contact. The working fluid, which is provided so as to straddle the inside and outside, is evaporated inside one side of the side disposed outside the humidified water storage unit and the side disposed inside the humidified water storage unit. And a heat exchange promoting unit configured to cause a heat pipe phenomenon in which the evaporated working fluid condenses inside the other side.   The end of the heat exchange promoting part on the side disposed outside the humidified water storage part is disposed at a position lower than the end on the side disposed inside the humidified water storage part. Item 2. The temperature and humidity control apparatus according to Item 1.   A plurality of the heat exchange promoting portions are provided in the humidified water storage portion, and portions of the heat exchange promoting portions arranged outside the humidified water storage portion are formed in a plate shape and are parallel to each other. And the temperature control apparatus of Claim 1 or 2 arrange | positioned along with the predetermined space | interval.   The said heat exchange promotion part is penetrated and provided in the wall part of the said humidification water accommodating part, The said wall part in which this heat exchange promotion part was provided is equipped with the heat insulating material. The temperature-control humidity control apparatus of Claim 1.   Of the heat exchange promoting part, the end part on the side arranged outside the humidified water storage part and the end part on the side arranged inside the humidified water storage part are arranged at the same height. The temperature control humidity control apparatus of Claim 1. Between a processing chamber in which a processing object is stored, an air conditioning chamber for adjusting the temperature and humidity of the air in the processing chamber to a target temperature and humidity, and between the processing chamber and the air conditioning chamber A temperature and humidity control apparatus comprising: a blower that circulates air; a humidifier that humidifies air in the air-conditioned room; and a temperature controller that regulates the temperature of the air in the processing tank. And
The humidifying unit is detachably disposed in the air-conditioning chamber, and has a humidifying water storage unit including a container for storing humidifying water,
The humidified water storage unit is configured to enclose a working fluid, and the sealed working fluid is close to the outer surface where the air that has flowed from the processing chamber to the air conditioning chamber in the humidified water storage unit contacts. The temperature control is configured to evaporate in any one of the region and the region closer to the inner surface of the humidified water storage portion and to cause a heat pipe phenomenon in which the evaporated working fluid condenses in the other region. Humidity control device.   The humidified water storage unit is disposed at a position where a gap is formed between a bottom surface of the humidified water storage unit and a floor surface of the air conditioning chamber, and the bottom wall of the humidified water storage unit is configured to generate the heat pipe phenomenon. The temperature and humidity control apparatus according to claim 6.   The temperature control apparatus according to claim 6, wherein a side wall of the humidified water storage unit is configured to cause the heat pipe phenomenon.

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