JP2010260225A - Thermoconductive molding and use thereof - Google Patents
Thermoconductive molding and use thereof Download PDFInfo
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- JP2010260225A JP2010260225A JP2009111845A JP2009111845A JP2010260225A JP 2010260225 A JP2010260225 A JP 2010260225A JP 2009111845 A JP2009111845 A JP 2009111845A JP 2009111845 A JP2009111845 A JP 2009111845A JP 2010260225 A JP2010260225 A JP 2010260225A
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- 238000000465 moulding Methods 0.000 title abstract 3
- 239000000843 powder Substances 0.000 claims abstract description 46
- 229910052582 BN Inorganic materials 0.000 claims abstract description 44
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 44
- 239000002245 particle Substances 0.000 claims abstract description 35
- 229920001296 polysiloxane Polymers 0.000 claims abstract description 34
- 239000011231 conductive filler Substances 0.000 claims description 35
- 239000000945 filler Substances 0.000 abstract description 8
- 238000002156 mixing Methods 0.000 abstract description 7
- 238000005520 cutting process Methods 0.000 abstract description 2
- 230000007423 decrease Effects 0.000 description 11
- 229920002379 silicone rubber Polymers 0.000 description 9
- 239000004945 silicone rubber Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 8
- 238000007259 addition reaction Methods 0.000 description 6
- 229920001971 elastomer Polymers 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 3
- 239000013500 performance material Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- HIHIPCDUFKZOSL-UHFFFAOYSA-N ethenyl(methyl)silicon Chemical compound C[Si]C=C HIHIPCDUFKZOSL-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910002012 Aerosil® Inorganic materials 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- -1 acetyl alcohols Chemical class 0.000 description 1
- 229920000800 acrylic rubber Polymers 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000006757 chemical reactions by type Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 150000002688 maleic acid derivatives Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Laminated Bodies (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
本発明は、熱伝導性に優れた熱伝導性成形体とその用途に関するものであり、特に電子部品用放熱部材として使用した際に、トランジスタ、サイリスタ、CPU(中央処理装置)等の発熱性電子部品を損傷させることなく、電子機器に組み込むことができる熱伝導性成形体に関するものである。 The present invention relates to a thermally conductive molded article having excellent thermal conductivity and its application, and particularly when used as a heat radiating member for an electronic component, a heat generating electron such as a transistor, a thyristor, or a CPU (central processing unit). The present invention relates to a thermally conductive molded body that can be incorporated into an electronic device without damaging the components.
トランジスタ、サイリスタ、CPU等の発熱性電子部品においては、使用時に発生する熱を如何に除去することが重要な問題となっている。従来、このような除熱方法としては、発熱性電子部品を電気絶縁性の放熱シートを介して放熱フィンや金属板に取り付け、熱を逃がすことが一般的に行われており、その放熱シートとしてはシリコーンゴムに熱伝導性フィラーを分散させたものが使用されている。 In heat-generating electronic components such as transistors, thyristors, and CPUs, it is an important problem how to remove heat generated during use. Conventionally, as such a heat removal method, a heat-generating electronic component is generally attached to a heat-radiating fin or a metal plate via an electrically insulating heat-dissipating sheet, and the heat is released. Uses a silicone rubber with a thermally conductive filler dispersed therein.
近年、電子部品内の回路の高集積化に伴いその発熱量も大きくなっており、従来にも増して高い熱伝導性を有する放熱シートが求められてきている。 In recent years, the amount of heat generated has increased with the high integration of circuits in electronic components, and there has been a demand for a heat dissipating sheet having higher thermal conductivity than before.
放熱シートの熱伝導性を向上させる従来技術としては、熱伝導性フィラーを高充填化する手法や異方性を示す熱伝導性フィラーを配向、配列させる手法が取られていたが、必ずしも高熱伝導を示すことはなかった(特許文献1〜4)。 Conventional techniques for improving the thermal conductivity of the heat-dissipating sheet include a method of highly filling the thermal conductive filler and a method of aligning and arranging the thermal conductive fillers exhibiting anisotropy. (Patent documents 1-4).
また従来の積層構成された熱伝導性成形体は平均粒子径が7μmの窒化ホウ素粉末が使用されており、シリコーンゴムへ熱伝導性フィラーを40体積%程度しか充填することはできず、低熱伝導であった(特許文献2)。 In addition, the conventional laminated heat conductive molded body uses boron nitride powder having an average particle size of 7 μm, and the silicone rubber can be filled with only about 40% by volume of the heat conductive filler. (Patent Document 2).
さらに熱伝導性フィラーとシリコーンゴムとで構成される複合材料中では特に熱伝導性フィラー同士の接触を通じて、熱は伝わりやすいが、平均粒子径が7μmの窒化ホウ素粉末を使用した場合、ゴム内での熱伝導性フィラーの緻密性は低く、熱伝導性フィラー同士が接触しにくいため、熱伝導率は3〜5W/mK程度であった(特許文献2)。 Furthermore, in the composite material composed of the heat conductive filler and the silicone rubber, heat is easily transmitted especially through contact between the heat conductive fillers. However, when boron nitride powder having an average particle diameter of 7 μm is used, Since the heat conductive fillers have low density and the heat conductive fillers hardly contact each other, the thermal conductivity was about 3 to 5 W / mK (Patent Document 2).
本発明の目的は、高い熱伝導性を有し、特に電子部品用放熱部材として好適な熱伝導性成形体を提供することである。 An object of the present invention is to provide a thermally conductive molded article having high thermal conductivity and particularly suitable as a heat radiating member for electronic parts.
本発明は、上記の課題を解決するために、以下の手段を採用する。
(1)窒化ホウ素粉末(A)の平均粒子径が25〜45μm、アスペクト比が15〜100であり、窒化ホウ素粉末(B)の平均粒子径が0.5〜5μm、アスペクト比が2〜10であり、窒化ホウ素粉末の(A):(B)の配合割合が質量比で5:5〜9:1の窒化ホウ素粉末を含む熱伝導性フィラー50〜75体積%含有してなるシリコーン積層体を、積層方向から切断することを特徴とする熱伝導性成形体。
(2)シリコーン積層体が、窒化ホウ素粉末を含む熱伝導性フィラー50〜60体積%含有してなるシリコーンシート(C)と窒化ホウ素粉末を含む熱伝導性フィラー65〜75体積%含有してなるシリコーンシート(D)を交互に積層したことを特徴とする前記(1)に記載の熱伝導性成形体。
(3)前記(1)又は前記(2)に記載の熱伝導性成形体からなることを特徴とする電子部品用放熱部材。
The present invention employs the following means in order to solve the above problems.
(1) The average particle diameter of the boron nitride powder (A) is 25 to 45 μm, the aspect ratio is 15 to 100, the average particle diameter of the boron nitride powder (B) is 0.5 to 5 μm, and the aspect ratio is 2 to 10 And a silicon laminate comprising 50 to 75% by volume of a thermally conductive filler containing boron nitride powder in which the mixing ratio of (A) :( B) in the boron nitride powder is 5: 5 to 9: 1 by mass ratio Is cut from the laminating direction.
(2) The silicone laminate contains a silicone sheet (C) containing 50 to 60% by volume of a heat conductive filler containing boron nitride powder and 65 to 75% by volume of a heat conductive filler containing boron nitride powder. The thermally conductive molded article according to (1), wherein the silicone sheets (D) are alternately laminated.
(3) A heat dissipating member for electronic parts, comprising the heat conductive molded body according to (1) or (2).
本発明によれば、高熱伝導性を示す熱伝導性成形体を提供することができる。 ADVANTAGE OF THE INVENTION According to this invention, the heat conductive molded object which shows high heat conductivity can be provided.
以下、本発明について詳細に説明する。
本発明で使用される熱伝導性フィラーとしては、酸化アルミニウム、酸化マグネシウム、窒化ホウ素、窒化アルミニウム、窒化珪素、炭化珪素等をあげることができる。これらのうち、窒化ホウ素は鱗片状粒子の長さ方向の熱伝導性が極めて高く、その特徴をうまく利用すれば高熱伝導性を付与することができるので、本発明には特に好適なものである。また、その窒化ホウ素粉末としては、粉末X線解析法による黒鉛指数(GI)が2.5以下の高結晶性のものが望ましい。
Hereinafter, the present invention will be described in detail.
Examples of the thermally conductive filler used in the present invention include aluminum oxide, magnesium oxide, boron nitride, aluminum nitride, silicon nitride, silicon carbide and the like. Among these, boron nitride has extremely high thermal conductivity in the length direction of the scaly particles, and high thermal conductivity can be imparted if the characteristics are utilized well, and is therefore particularly suitable for the present invention. . The boron nitride powder is preferably highly crystalline with a graphite index (GI) of 2.5 or less by powder X-ray analysis.
更に、本発明においては、絶縁性を損なわせない範囲で、アルミニウム、銅、銀、カーボンファイバー、カーボンナノチューブ等の導電性粉末を併用することもできる。 Furthermore, in the present invention, conductive powders such as aluminum, copper, silver, carbon fiber, and carbon nanotube can be used in combination as long as the insulating properties are not impaired.
本発明の熱伝導性成形体における熱伝導性フィラーの含有率は、全体積中の50〜75体積%、特に65〜70体積%であることが望ましい。熱伝導性フィラーの含有率が50体積%未満では熱伝導性成形体の熱伝導性が減少する傾向にある。また75体積%を越えると、成形体の機械的強度が損なわれる傾向にある。 The content of the heat conductive filler in the heat conductive molded body of the present invention is preferably 50 to 75% by volume, particularly 65 to 70% by volume in the entire volume. If the content rate of a heat conductive filler is less than 50 volume%, it exists in the tendency for the heat conductivity of a heat conductive molded object to reduce. If it exceeds 75% by volume, the mechanical strength of the molded product tends to be impaired.
本発明の窒化ホウ素粉末(A)は、平均粒子径が25〜45μmである必要があり、さらに平均粒子径は30〜40μmの範囲のものが好ましい。平均粒子径が45μmより大きくなると熱伝導性フィラーを緻密に充填することが困難となる傾向にある。反対に平均粒子径が25μmより小さくなると充填性が悪くなり、熱伝導性が減少する傾向にある。 The boron nitride powder (A) of the present invention must have an average particle diameter of 25 to 45 μm, and the average particle diameter is preferably in the range of 30 to 40 μm. When the average particle diameter is larger than 45 μm, it tends to be difficult to densely fill the heat conductive filler. On the other hand, when the average particle size is smaller than 25 μm, the filling property is deteriorated and the thermal conductivity tends to decrease.
本発明の窒化ホウ素粉末(B)は、平均粒子径が0.5〜5μmである必要があり、さらに平均粒子径は1〜3μmの範囲のものが好ましい。平均粒子径が5μmより大きくなると平均粒子径が25〜45μmの窒化ホウ素粉末の粒子と粒子径が近いため、充填性が悪くなる傾向にあり、熱伝導性が減少する傾向にある。反対に平均粒子径が0.5μmより小さくなると全体の熱伝導性材料の充填性が悪くなる傾向にあり、熱伝導性が減少する傾向にある。 The boron nitride powder (B) of the present invention must have an average particle diameter of 0.5 to 5 μm, and the average particle diameter is preferably in the range of 1 to 3 μm. When the average particle diameter is larger than 5 μm, the particle diameter is close to that of the boron nitride powder having an average particle diameter of 25 to 45 μm, so that the filling property tends to deteriorate and the thermal conductivity tends to decrease. On the other hand, when the average particle size is smaller than 0.5 μm, the filling property of the whole heat conductive material tends to deteriorate, and the heat conductivity tends to decrease.
本発明における平均粒子径は、島津製作所製「レーザー回折式粒度分布測定装置SALD−200」を用いて測定を行った。評価サンプルは、ガラスビーカーに50ccの純水と測定する熱伝導性粉末を5g添加して、スパチュラを用いて撹拌し、その後超音波洗浄機で10分間、分散処理を行った。分散処理を行った熱伝導性材料の粉末の溶液をスポイドを用いて、装置のサンプラ部に一滴ずつ添加して、吸光度が測定可能になるまで安定するのを待った。このようにして吸光度が安定になった時点で測定を行う。レーザー回折式粒度分布測定装置では、センサで検出した粒子による回折/散乱光の光強度分布のデータから粒度分布を計算する。平均粒子径は測定される粒子径の値に相対粒子量(差分%)を掛けて、相対粒子量の合計(100%)で割って求められる。なお、平均粒子径は粒子の平均直径である。 The average particle diameter in the present invention was measured using “Laser diffraction particle size distribution analyzer SALD-200” manufactured by Shimadzu Corporation. As an evaluation sample, 5 g of 50 cc of pure water and a heat conductive powder to be measured were added to a glass beaker, stirred using a spatula, and then subjected to a dispersion treatment for 10 minutes using an ultrasonic cleaner. The solution of the thermally conductive material powder that had been subjected to the dispersion treatment was added drop by drop to the sampler portion of the apparatus using a dropper, and waited until the absorbance became measurable. The measurement is performed when the absorbance becomes stable in this way. In the laser diffraction type particle size distribution measuring device, the particle size distribution is calculated from the data of the light intensity distribution of the diffracted / scattered light by the particles detected by the sensor. The average particle size is obtained by multiplying the value of the measured particle size by the relative particle amount (difference%) and dividing by the total relative particle amount (100%). The average particle diameter is the average diameter of the particles.
本発明の窒化ホウ素粉末(A)は、アスペクト比が15〜100である必要があり、さらにアスペクト比は30〜80の範囲のものが好ましい。アスペクト比が100より大きくなるとフィラーの充填性が悪くなる傾向にある。反対にアスペクト比が15より小さくなると樹脂中へ緻密に充填しづらくなり、熱伝導性が減少する傾向にある。 The boron nitride powder (A) of the present invention must have an aspect ratio of 15 to 100, and the aspect ratio is preferably in the range of 30 to 80. When the aspect ratio is greater than 100, the filler filling property tends to deteriorate. On the other hand, when the aspect ratio is smaller than 15, it becomes difficult to densely fill the resin, and the thermal conductivity tends to decrease.
本発明の窒化ホウ素粉末(B)は、アスペクト比が2〜10である必要があり、さらにアスペクト比は3〜8の範囲のものが好ましい。アスペクト比が10より大きくなるとフィラーの充填性が悪くなる傾向にある。反対にアスペクト比が2より小さくなると樹脂中へ緻密に充填しづらくなり、熱伝導性が減少する傾向にある。 The boron nitride powder (B) of the present invention needs to have an aspect ratio of 2 to 10, and the aspect ratio is preferably in the range of 3 to 8. When the aspect ratio is larger than 10, the filling property of the filler tends to deteriorate. On the contrary, when the aspect ratio is smaller than 2, it becomes difficult to densely fill the resin, and the thermal conductivity tends to decrease.
窒化ホウ素粉末のアスペクト比は窒化ホウ素粉末をガラススライド上に貼り付けた導電性カーボン両面テープ上に散布し、キーエンス製「3Dリアルサーフェスビュー顕微鏡VE−9800」を用いて、200個の粒子を観察し、その長径と短径の長さを測り、アスペクト比=長径/短径の計算式より算出する。 The aspect ratio of boron nitride powder was dispersed on conductive carbon double-sided tape with boron nitride powder affixed on a glass slide, and 200 particles were observed using Keyence's “3D Real Surface View Microscope VE-9800”. Then, the lengths of the major axis and the minor axis are measured and calculated from the calculation formula of aspect ratio = major axis / minor axis.
窒化ホウ素粉末(A)と窒化ホウ素粉末(B)の配合割合は質量比で5:5〜9:1である必要があり、さらに質量比で6:4〜8:2の範囲のものが好ましい。窒化ホウ素粉末(A)の割合が5より小さくなると、フィラーの充填性が悪くなる傾向にある。反対に窒化ホウ素粉末(A)の割合が9より大きくなると、フィラーが緻密に充填しづらくなり、熱伝導性が減少する傾向にある。 The mixing ratio of the boron nitride powder (A) and the boron nitride powder (B) needs to be 5: 5 to 9: 1 by mass ratio, and more preferably 6: 4 to 8: 2 by mass ratio. . When the proportion of the boron nitride powder (A) is less than 5, the filler filling property tends to be poor. On the other hand, when the ratio of the boron nitride powder (A) is greater than 9, the filler becomes difficult to be densely packed, and the thermal conductivity tends to decrease.
従来の技術である平均粒子径7μmの窒化ホウ素粉末を使用した際は困難であった熱伝導性フィラーの高充填化を、粒子径の大きい平均粒子径25〜45μmである窒化ホウ素粉末を充填した際の空隙部を平均粒子径0.5〜5μmである窒化ホウ素粉末で埋めることによって、より緻密に熱伝導性フィラーを充填することが可能となり、フィラーの充填量も従来の45体積%から75体積%まで上昇することが可能となる。 High filling of the thermally conductive filler, which was difficult when using boron nitride powder with an average particle diameter of 7 μm, which is a conventional technique, was filled with boron nitride powder with an average particle diameter of 25 to 45 μm having a large particle diameter. By filling the voids with boron nitride powder having an average particle diameter of 0.5 to 5 μm, it becomes possible to more precisely fill the thermally conductive filler, and the filler filling amount is from 45% by volume to 75% of the conventional amount. It becomes possible to rise to volume%.
シリコーン積層体は、熱伝導性フィラーとシリコーンゴムとの複合材料を薄板状に成形した未硬化体(以下グリーンシートと呼ぶ)を積層し、加熱硬化させることによって、未硬化のグリーンシート同士が接着し、硬化したシリコーン積層体となる。 Silicone laminates are made by laminating uncured bodies (hereinafter referred to as green sheets) formed from thin composite materials of heat-conductive filler and silicone rubber, and then curing them by heating to bond the uncured green sheets together. And a cured silicone laminate is obtained.
シリコーン積層体は、窒化ホウ素粉末を含む熱伝導性フィラーの含有率50〜60体積%であるグリーンシートAと窒化ホウ素粉末を含む熱伝導性フィラー含有率が65〜75体積%であるグリーンシートBを交互に積層することが好ましい。さらに窒化ホウ素粉末を含む熱伝導性フィラーの含有率53〜58体積%であるグリーンシートAと窒化ホウ素粉末を含む熱伝導性フィラー含有率が68〜73体積%であるグリーンシートBを交互に積層するものがより好ましい。グリーンシートAの窒化ホウ素粉末を含む熱伝導性フィラーの含有率が50体積%未満であると熱伝導性フィラーの充填量が少なくなり、熱伝導性が減少する傾向にある。グリーンシートAの窒化ホウ素粉末を含む熱伝導性フィラーの含有率が60体積%をこえると、グリーンシートBとの密着性が悪くなり、グリーンシート間の熱伝導性が減少する傾向にある。またグリーンシートBの窒化ホウ素粉末を含む熱伝導性フィラーの含有率が65体積%未満であると、熱伝導性フィラーの充填量が少なくなり、熱伝導性が減少する傾向にある。グリーンシートBの窒化ホウ素粉末を含む熱伝導性フィラーの含有率が75体積%をこえると、グリーンシートBの機械的強度が損なわれる傾向にある。 The silicone laminate includes a green sheet A having a thermal conductive filler content of 50-60% by volume containing boron nitride powder and a green sheet B having a thermal conductive filler content of 65-75% by volume containing boron nitride powder. Are preferably laminated alternately. Further, green sheets A having a thermal conductive filler content of 53 to 58% by volume containing boron nitride powder and green sheets B having a thermal conductive filler content of 68 to 73% by volume containing boron nitride powder are alternately laminated. More preferred is When the content of the thermally conductive filler containing the boron nitride powder of the green sheet A is less than 50% by volume, the amount of the thermally conductive filler filled decreases, and the thermal conductivity tends to decrease. When the content rate of the heat conductive filler containing the boron nitride powder of the green sheet A exceeds 60 volume%, adhesiveness with the green sheet B will deteriorate, and the heat conductivity between the green sheets tends to decrease. Moreover, when the content rate of the heat conductive filler containing the boron nitride powder of the green sheet B is less than 65 volume%, the filling amount of the heat conductive filler decreases, and the heat conductivity tends to decrease. When the content rate of the heat conductive filler containing the boron nitride powder of the green sheet B exceeds 75 volume%, the mechanical strength of the green sheet B tends to be impaired.
本発明のマトリックスとして使用されるゴムとしては、シリコーンゴム、ウレタンゴム、アクリルゴム、ブチルゴム、エチレンプロピレン共重合体、エチレン酢酸ビニル共重合体等をあげることができる。これらのうち、特にシリコーンゴムは成形体としたときの柔軟性、形状追随性、電子部品に接触させる際の発熱面への密着性、更には耐熱性が優れているので最適である。 Examples of the rubber used as the matrix of the present invention include silicone rubber, urethane rubber, acrylic rubber, butyl rubber, ethylene propylene copolymer, ethylene vinyl acetate copolymer and the like. Of these, silicone rubber is most suitable because it has excellent flexibility, shape followability, adhesion to a heat generating surface when it is brought into contact with an electronic component, and heat resistance.
シリコーンゴムの種類としては、ミラブル型シリコーンが代表的なものであるが、総じて所要の柔軟性を発現させることが難しい場合が多いので、高い柔軟性を発現させるためには付加反応型シリコーンが好適である。付加反応型液状シリコーンの具体例としては、分子量が数万である一分子中にビニル基とH−Si基の両方を有する一液反応型のオルガノポリシロキサン、または末端あるいは側鎖にビニル基を有するオルガノポリシロキサンと末端あるいは側鎖に2個以上のH−Si基を有するオルガノポリシロキサンとの二液性のシリコーンなどである。例えば東レ・ダウコーニング・シリコーン社製、商品名「SE−1885A/B」がある。 As a type of silicone rubber, millable type silicone is representative, but since it is often difficult to express the required flexibility as a whole, addition reaction type silicone is suitable for expressing high flexibility. It is. Specific examples of the addition reaction type liquid silicone include one liquid reaction type organopolysiloxane having both a vinyl group and an H-Si group in one molecule having a molecular weight of tens of thousands, or a vinyl group at a terminal or side chain. A two-part silicone of an organopolysiloxane having two or more H-Si groups at the terminal or side chain. For example, there is a product name “SE-1885A / B” manufactured by Toray Dow Corning Silicone.
グリーンシートの成形性を向上させるため、重量平均分子量が30万から80万であるビニル基をもつメチルビニルシリコーン生ゴムを添加することが好適である。分子量の大きいメチルビニルシリコーン生ゴムを添加することで、フィラーを高充填化することによる分子鎖の切断を防止し、高フィラー充填化でのグリーンシートの成形を可能にすることができる。例えばモメンティブ・パフォーマンス・マテリアルズ社製、商品名「SRH−32」がある。 In order to improve the moldability of the green sheet, it is preferable to add methyl vinyl silicone raw rubber having a vinyl group having a weight average molecular weight of 300,000 to 800,000. By adding a methyl vinyl silicone raw rubber having a large molecular weight, it is possible to prevent the molecular chain from being cut by filling the filler highly, and to enable the formation of a green sheet with a high filler filling. For example, there is a trade name “SRH-32” manufactured by Momentive Performance Materials.
また、本発明で使用される付加反応型液状シリコーンは、アセチルアルコール類、マレイン酸エステル類などの反応遅延剤、十〜数百μmのアエロジルやシリコーンパウダーなどの増粘剤、難燃剤、顔料などと併用することもできる。 The addition reaction type liquid silicone used in the present invention includes reaction retarders such as acetyl alcohols and maleates, thickeners such as 10 to several hundred μm aerosil and silicone powder, flame retardants, pigments, etc. Can also be used together.
熱伝導率は、TO−3型に裁断した試料(1mm)をトランジスタの内蔵されたTO−3型銅製ヒーターケース(有効面積6cm2)と銅板との間に挟み、初期厚みの10%が圧縮されるように荷重をかけてセットした後、トランジスタに電力15Wをかけて5分間保持し、ヒーターケースと放熱フィンとの温度差(℃)から、次の(1)式で算出される熱抵抗(℃/W)を(2)式で換算したものである。 Thermal conductivity, sandwiched between the TO-3 TO-3 type cut sample was (1mm) built of transistor type copper heater case (effective area 6 cm 2) and copper plates, 10% of the initial thickness compression After setting with a load, the transistor is applied with power 15W and held for 5 minutes, and the thermal resistance calculated by the following equation (1) from the temperature difference (° C.) between the heater case and the radiation fin (° C./W) is converted by equation (2).
熱抵抗(℃/W)=温度差(℃)/電力(W)・・・(1) Thermal resistance (° C / W) = Temperature difference (° C) / Power (W) (1)
熱伝導率(W/mK)={試料厚み(m)/{熱抵抗(℃/W)×試料面積(m2)・・・(2) Thermal conductivity (W / mK) = {sample thickness (m) / {thermal resistance (° C./W)×sample area (m 2 ) (2)
本発明の熱伝導性成形体の製造方法の一例を示すならば、付加反応型液状シリコーン及び窒化ホウ素粉末を室温下で混合し、さらにシリコーン生ゴムを追加し混合してコンパウンドを調整し、それをピストン式又はスクリュー式の押し出し機で押し出してグリーンシートに仮成形した後、それを積層し加熱硬化させた後、積層方向から所望の幅に切断する方法があげられる。 If an example of the manufacturing method of the heat conductive molded object of this invention is shown, an addition reaction type liquid silicone and boron nitride powder will be mixed at room temperature, and a silicone raw rubber will be added and mixed, and a compound may be adjusted, There is a method of extruding with a piston-type or screw-type extruder to temporarily form a green sheet, laminating and heat-curing it, and then cutting it to a desired width from the laminating direction.
本発明の熱伝導性成形体は、発熱性電子部品又は熱熱性電子部品の搭載された回路基板と冷却装置との間に挟みこんで使用されるものであるが、冷却装置にあらかじめ貼り付け一体化するなどして電子部品用放熱部材として供給することも可能である。冷却装置としては、例えばヒートシンク、放熱フィン、金属又はセラミックスのケース等があげられ、またはそのセラミックスとしては窒化アルミニウム、窒化ホウ素、炭化珪素、窒化珪素、酸化アルミニウム等があげられる。 The heat conductive molded body of the present invention is used by being sandwiched between a heat generating electronic component or a circuit board on which a thermothermal electronic component is mounted and a cooling device. For example, it can be supplied as a heat radiating member for electronic parts. Examples of the cooling device include a heat sink, a heat radiating fin, a metal or ceramic case, and examples of the ceramic include aluminum nitride, boron nitride, silicon carbide, silicon nitride, and aluminum oxide.
また、上記電子部品用放熱部材が使用される電子機器としては、パーソナルコンピューター、家庭用ゲーム機、電源、自動車、プロジェクター等をあげることができる。 In addition, examples of electronic devices in which the heat dissipating member for electronic parts is used include personal computers, home game machines, power supplies, automobiles, projectors, and the like.
実施例1〜10 比較例1〜8
表1に示される熱伝導性フィラーとA液(ビニル基を有するオルガノポリシロキサン)とB液(H−Si基を有するオルガノポリシロキサン)の二液性の付加反応型シリコーン(東レダウコーニング社製、商品名「SE−1885」)をA液対B液の混合比を表2、3、5に示す配合(体積%)で混合し、さらにこれにシリコーン生ゴム(モメンティブ・パフォーマンス・マテリアルズ社製、商品名「SRH−32」)を室温下で混合しコンパウンドを作製した。
Examples 1-10 Comparative Examples 1-8
Two-component addition reaction type silicone (manufactured by Toray Dow Corning Co., Ltd.) consisting of the thermally conductive filler shown in Table 1, solution A (organopolysiloxane having a vinyl group) and solution B (organopolysiloxane having an H-Si group) , Trade name “SE-1885”) is mixed with the mixing ratio (volume%) shown in Tables 2, 3, and 5 for the mixing ratio of A liquid to B liquid, and further, this is a silicone raw rubber (made by Momentive Performance Materials) , Trade name “SRH-32”) was mixed at room temperature to prepare a compound.
このコンパウンドをスリット(1mm×60mm)付きダイスの固定されたシリンダー構造金型内に充填し、ピストンで圧力をかけながらスリットから押し出して、熱伝導性フィラーとシリコーンゴムの複合材料の未硬化の薄板(グリーンシート)を作製した。 This compound is filled into a cylinder structure die fixed with a die having a slit (1 mm × 60 mm), extruded from the slit while applying pressure with a piston, and an uncured thin plate of a composite material of a heat conductive filler and silicone rubber (Green sheet) was produced.
この厚さ1mm、幅60mm、長さ120mmのグリーンシート25枚から縦横の長さが50mmの正方形となるようにカッターでグリーンシートを切り出した。そして、正方形のグリーンシート同士の各角を合わせつつ、50mmの高さになるまで50層積層した。その後、乾燥機を用いて150℃で22時間加熱硬化させて、シリコーン積層体を作製した。この1辺の長さが50mmの立方体であるシリコーン積層体をカッターでグリーンシートを重ねた面に対して垂直であり、その辺に対して平行に刃を下ろしながら切断し、本発明のシート状熱伝導性成形体(1mm)を作製した。 A green sheet was cut out from 25 green sheets having a thickness of 1 mm, a width of 60 mm, and a length of 120 mm with a cutter so as to form a square having a length and width of 50 mm. And 50 layers were laminated | stacked until it became a height of 50 mm, aligning each corner | angular of square green sheets. Then, it heat-cured for 22 hours at 150 degreeC using the dryer, and produced the silicone laminated body. This silicone layered body which is a cube with a length of 50 mm on one side is perpendicular to the surface on which the green sheets are stacked with a cutter, and is cut while lowering the blade parallel to the side, thereby forming the sheet-like shape of the present invention A thermally conductive molded body (1 mm) was produced.
表4の実施例11〜13に示すグリーンシートA及びBは、実施例1〜10と同様に表1に示される熱伝導性フィラーとA液(ビニル基を有するオルガノポリシロキサン)とB液(H−Si基を有するオルガノポリシロキサン)の二液性の付加反応型シリコーン(東レダウコーニング社製、商品名「SE−1885」)をA液対B液の混合比を表4に示す配合(体積%)で混合し、さらにこれにシリコーン生ゴム(モメンティブ・パフォーマンス・マテリアルズ社製、商品名「SRH−32」)を室温下で混合しコンパウンドを作製した。 The green sheets A and B shown in Examples 11 to 13 in Table 4 are the same as in Examples 1 to 10, and the thermally conductive filler, A liquid (organopolysiloxane having a vinyl group), and B liquid (shown in Table 1). A two-component addition reaction type silicone of H-Si group (organopolysiloxane) (trade name “SE-1885”, manufactured by Toray Dow Corning Co., Ltd.) having a mixing ratio of A to B in Table 4 ( In addition, a silicone raw rubber (manufactured by Momentive Performance Materials, trade name “SRH-32”) was mixed at room temperature to prepare a compound.
それぞれのコンパウンドをスリット(1mm×60mm)付きダイスの固定されたシリンダー構造金型内に充填し、ピストンで圧力をかけながらスリットから押し出して、熱伝導性フィラーとシリコーンゴムの複合材料の未硬化の薄板(グリーンシートA及びB)を作製した。 Each compound is filled into a cylinder structure mold in which a die with a slit (1 mm × 60 mm) is fixed, and is extruded from the slit while applying pressure with a piston, and an uncured composite material of a heat conductive filler and silicone rubber is uncured. Thin plates (green sheets A and B) were prepared.
グリーンシートA及びBを50mmの高さになるまで交互に積層した後、乾燥機を用いて150℃で22時間加熱硬化させて、シリコーン積層体を作製した。このシリコーン積層体をカッターで積層方向に垂直であり、その辺に対して平行に切断し、本発明のシート状熱伝導性成形体(1mm)を作製した。 The green sheets A and B were alternately laminated until reaching a height of 50 mm, and then heat-cured at 150 ° C. for 22 hours using a dryer to produce a silicone laminate. This silicone laminate was cut with a cutter perpendicular to the lamination direction and parallel to the sides to produce a sheet-like thermally conductive molded article (1 mm) of the present invention.
上記で得られたシート状熱伝導性成形体について、TO−3型に裁断し、熱伝導率を測定した。それらの結果を表2〜5に示す。なお、比較例5はシート状の熱伝導性成形体を作製することができなかった。 About the sheet-like heat conductive molded object obtained above, it cut | judged to TO-3 type | mold and measured thermal conductivity. The results are shown in Tables 2-5. In Comparative Example 5, a sheet-like thermally conductive molded body could not be produced.
表2〜表5の実施例と比較例から、本発明の熱伝導性成形体は、優れた熱伝導性を示している。
From the Examples and Comparative Examples in Tables 2 to 5, the thermally conductive molded body of the present invention exhibits excellent thermal conductivity.
Claims (3)
The heat radiating member for electronic components using the heat conductive molded object of Claim 1 or Claim 2.
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