JP2010132404A - Carrying carriage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily perform transfer work without hindering passage even in a relatively narrow space. <P>SOLUTION: This carrying carriage 500 carries a carrying object 600, and transfers the carrying object to inlet-outlet parts 310 and 320 arranged in a station 300, or transfer the carrying object from the inlet-outlet parts. The carrying carriage has a body 510 having a loading part being a space for loading the carrying object and a storage part being a space positioned under the loading part and storing so as to at least partially enclose the inlet-outlet parts from the side and opening toward the side, a traveling means 520 arranged in the body part, and transfer means 530 and 540 arranged above the loading part in the body and transferring the carrying object loaded in the loading part to the inlet-outlet parts or transferring the carrying object delivered from the inlet-outlet parts to the loading part in a state of storing the inlet-outlet parts in the storage part. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to the technical field of a transport carriage that transports an object to be transported such as a container in which various substrates or the like for manufacturing semiconductor devices are accommodated to a station such as a stocker.

  As this type of transport cart, there is a transport cart (PGV: Personal Guided Vehicle) that transports an object to be transported containing a semiconductor substrate or the like when operated by an operator. The transported object is transported and transferred (ie, unloaded) to a shelf for storing the transported object, a device for performing various operations such as manufacturing and inspection, and the like when the worker runs the transport cart. When transferring an object to be transferred, an operator operates a lever, a handle, or the like to drive a transfer portion provided on a transfer carriage such as a transfer arm, so that an operator can directly transfer the transferred object. Transfer is performed without lifting an object (see, for example, Patent Document 1).

Japanese Patent No. 4092783

  However, for example, a clean room for semiconductor manufacturing in which an object to be transported is transported by a transport cart has a relatively high construction cost, so it is difficult to secure a sufficiently large floor area. For this reason, the width of the passage where the transport carriage travels is relatively narrow, and when the transport carriage that is being transferred is present in the passage, the passage of workers and other transport carriages is hindered. There is a risk that it will be. That is, there is a technical problem that the transfer carriage being transferred may become an obstacle in the passage and cause a reduction in the efficiency of various operations.

  The present invention has been made in view of the above-described problems, for example, and provides a transport carriage that can easily perform transfer work without obstructing work and traffic even in a relatively small space. Is an issue.

  In order to solve the above-described problems, the transport cart of the present invention transports a transported object and is provided so as to protrude from the station, and the transported car is placed in a loading / unloading unit that loads or unloads the transported object at the station. A transport carriage for transferring a transferred object or transferring the transferred object from the loading / unloading unit, and being positioned below the stacking unit, which is a space for loading the transferred object, and A storage unit that is a space that stores at least partially enclose the storage part from the side, a main body that is open to the side, and traveling means provided in the main body, It is provided above the loading part in the main body part, and the transferred object loaded on the loading part is transferred to the loading / unloading part in a state where the loading / unloading part is housed in the housing part. Or before being issued from the entry / exit section And a transfer means for transferring the transported object in the stacking unit.

  According to the transport carriage of the present invention, for example, when an operator manually operates, the object to be transported is transported to and received from a station on a transport system that automatically transports a semiconductor substrate or the like. Alternatively, the object to be transported delivered from the station is transferred to the transport carriage and transported to another station or the like. Here, the “station” may be a mere storage place for storing the object to be transported, a work station capable of performing various operations on the object to be transported, a processing device, and a place for receiving goods. It may be an apparatus or a mechanism that also has a function of transporting or transferring a transported object that is different from a delivery location by a certain distance.

  In a transport system having a station, a transport object such as a FOUP (Front Opening Unified Pod) is transported by a transport vehicle such as a vehicle or OHT (Overhead Hoist Transport) that travels on a track such as a rail laid on a ceiling. Be transported. A conveyance vehicle conveys a to-be-conveyed object between the some stations provided along the track. However, the transport vehicle cannot transport an object to be transported when the operation of the system is stopped due to, for example, a failure or maintenance. In addition, it is not possible to transport the transported object to a place where no track is laid.

  On the other hand, the object to be transported is becoming larger and heavier as the diameter of the transported semiconductor substrate and the like increases. Specifically, for example, a FOUP for transporting a semiconductor substrate having a diameter of 450 mm has a length of 500 mm × width of 560 mm × height of 350 mm and a weight of 20 kg or more. For this reason, it is extremely difficult for one worker to carry the FOUP by himself / herself and carry it by himself / herself. Therefore, as described above, when the transported object cannot be transported by the transport vehicle in the system, various inconveniences may occur.

  However, the transport cart of the present invention can transport the object to be transported regardless of the operation of the system. That is, even when the transport system is stopped, the worker can easily transport the transported object. Further, even if the transport source or the transport destination is a place where the track is not laid, it is possible to transport the object to be transported.

  In particular, the transport carriage of the present invention is a storage unit that is a space for loading an object to be transported and a space that is positioned below the stacking unit and that accommodates at least a part of the loading / unloading unit from the side. And a main body portion that is open toward the side. Here, “side” is a concept including front, rear, left, and right directions (that is, each direction along the horizontal) with respect to the transport carriage, and in a broad sense, includes various directions other than the vertical direction. The main body portion is typically U-shaped, and is formed so as to have a relatively wide space such as a loading portion and a storage portion. The main body portion may be a combination of, for example, pipe-shaped frameworks, or may be a combination of plate-like structures.

  The main body portion is provided with traveling means such as a pulley, and is capable of traveling on the conveyance path when an operator performs an operation such as pushing or pulling. In addition, by providing a motor etc., you may be able to drive | work electrically. The transported object is transported by running the transport cart in a state where the transported object is loaded on the stacking unit in the main body.

  A transfer means is provided above the loading section in the main body, and when transferring the object loaded on the loading section to the loading / unloading section, the loading / unloading section is housed in the housing section. The transfer operation is performed. In addition, when transferring the object unloaded from the loading / unloading unit to the loading unit of the conveyance carriage, the transfer operation is performed in a state where the loading / unloading unit is housed in the housing unit. At the time of accommodation of the loading / unloading section, the loading / unloading section is stored inside the main body section through the opening of the main body section. Here, “accommodating” is not limited to a state in which the entire loading / unloading unit is covered by the main body, but includes a state in which the loading / unloading unit is partially surrounded by the main body.

  When the loading / unloading section is accommodated in the accommodating section in the main body, the transport carriage is brought closer to the station side. That is, the area occupied by the transport carriage in the transport path and the like can be reduced by the amount that the storage section accommodates the warehousing section. Therefore, when transferring a to-be-conveyed object, it can prevent effectively that a conveyance trolley obstructs the passage of an operator or another conveyance trolley.

  Furthermore, in the present invention, the transfer carriage is brought closer to the station side at the time of transfer, thereby realizing a preferable transfer of the object to be transferred. For example, considering the case where transfer is performed in a state where the storage / removal unit cannot be accommodated in the storage unit, the transfer means is required to move up and down and move in the horizontal direction in order to transfer the transferred object. End up. However, since the transfer cart according to the present invention can be transferred in a state where the loading / unloading portion is accommodated in the accommodating portion, it can be transferred only by the lifting operation. That is, the transported object can be transferred more easily by reducing the distance between the transport cart and the transported object.

  As described above, according to the transport carriage of the present invention, since the main body portion has the accommodating portion that accommodates the loading / unloading portion, it is easy without obstructing work and traffic even in a relatively small space. It is possible to perform transfer work.

  In one aspect of the transport carriage of the present invention, the transfer means includes gripping means for gripping the object to be transported, and lifting means for lifting the gripping means.

  According to this aspect, the transfer means has the gripping means, and the transfer is performed when the gripping means grips the object to be transported or releases the object being gripped. In addition to the gripping means, the transfer means includes lifting means, and when the transfer object is transferred, the gripping means is moved up and down (that is, moved up and down) by the lifting means. Thereby, the height of the gripping means can be adjusted to an appropriate height for transferring the object to be transported. Therefore, it is possible to reliably transfer the object to be transported.

  In another aspect of the transport carriage of the present invention, the transported object is provided below the stacking unit in the main body, and supports the transported object loaded on the stacking unit from below. Is further provided with a fall prevention means for preventing the machine from falling from the loading section.

  According to this aspect, the main body portion is provided with the fall prevention means, and the object to be transported loaded on the loading portion is prevented from falling. Specifically, the fall prevention means is provided below the stacking unit, and the transported object falls from the stacking unit by supporting the transported object loaded on the stacking unit from below. To prevent. Here, “support” means not only that the loaded transported object is always supported, but also that it is in a state of being supported for the first time when it is about to fall. That is, the fall prevention means may be such that it always comes into contact with the object to be transported loaded on the loading part, or it is such that the object to be transported that falls from the loading part is received on the lower side. It may be.

  Since the fall prevention means is provided, it is possible to prevent the transported object being transported from falling, so that the transported object can be transported more suitably. In particular, when a precise member or device that is vulnerable to impact, such as a semiconductor substrate, is transported, the above-described effects are remarkably exhibited.

  In the aspect further including the fall prevention means described above, the fall prevention means is provided in the housing portion, and does not interfere with housing the loading / unloading portion when the loading / unloading portion is housed in the housing portion. It may be configured to be stored at a location.

  If comprised in this way, since the fall prevention means is provided in the accommodating part located under the stacking part, it is reliably dropped by supporting the object to be transported that may fall during transportation from below. Can be prevented. Moreover, especially in this aspect, when a storage part is accommodated in a storage part, a fall prevention means is stored in the position which does not become a hindrance which accommodates a storage part. The fall prevention means is movable in response to, for example, an operation of a lever, a handle, etc., and is stored by an operator who operates the transport carriage. Alternatively, the storage unit may be detected and automatically stored.

  By storing the fall prevention means at the time of accommodation, it is possible to avoid that the accommodation of the loading / unloading unit is hindered by the presence of the fall prevention means. Therefore, it becomes possible to carry and transfer more suitably.

  In another aspect of the transport carriage of the present invention, the transfer means is rotatable with respect to the main body in a horizontal direction.

  According to this aspect, the direction of the transferred object can be changed as appropriate by rotating the transfer means in the direction along the horizontal with respect to the main body. That is, the direction of the object to be conveyed can be changed without rotating the main body in the conveyance carriage.

  In the above-described configuration, for example, even if the direction of the transport carriage is different between when the transferred object is transferred from the loading / unloading unit and when the transferred object is transferred to the loading / unloading unit, the direction of the transferred object is changed. Transfer can be completed without changing it. Further, when transferring the object to be transferred from the loading / unloading unit, the direction of the transfer means is finely adjusted in the case where the transfer means and the object to be transferred cannot be reliably transferred unless the directions are the same. It is possible. That is, the transfer operation can be performed more preferably.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<Transport system>
First, a configuration of a transport system including a station that is a transfer destination of a FOUP transported by a transport cart according to the present embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a top view schematically showing the overall configuration of the transport system, and FIG. 2 is a perspective view showing a specific configuration of the station.

  In FIG. 1, the transport system includes a track 100, a plurality of vehicles 200, a plurality of stations 300, and a transport path 400.

  The track 100 is laid on the ceiling, for example, and is made of a metal such as aluminum or stainless steel. Here, for convenience of explanation, the configuration of the track 100 is illustrated as being relatively simple. However, the actual track 100 has a complicated configuration, for example, having more branch points and junction points. May be.

  The vehicle 200 travels along the track 100 to convey the FOUP containing the semiconductor substrate and the like. That is, the FOUP is an example of the “conveyed object” in the present invention. The vehicle 200 is attached so as to be suspended from the track 100, and travels on the track 100 using, for example, a linear motor as power. Each of the vehicles 200 is controlled in operations such as traveling and transporting by a controller or the like (not shown). Here, for convenience of explanation, only two vehicles 200a and 200b are shown on the track 100, but typically more (for example, tens or hundreds) of vehicles 200 are provided. It is done.

  A plurality of stations 300 are provided along the track 100, and each FOUP can be stored. Further, it may be possible to perform various operations on members such as a semiconductor substrate accommodated in the FOUP.

  In FIG. 2, the station 300 includes a storage unit 310 and a storage unit 320 provided so as to protrude. The storage unit 310 includes, for example, a belt conveyor and stores the FOUP transferred from the transport carriage into the station 300. The unloading unit 320 has a belt conveyor or the like, similar to the unloading unit 310, unloads the FOUP in the station 300, and moves it to a position where it can be transferred to the transport carriage. The warehousing section 310 and the warehousing section 320 do not have to be provided separately as shown in FIG. In other words, the warehousing unit 310 may be configured to also serve as the function of the evacuation unit 320. Two or more warehousing units 310 and evacuation units 320 may be provided for each station 300.

  In addition, although illustration is abbreviate | omitted here, in addition to the warehousing part 310 and the leaving part 320 mentioned above, the station 300 is provided with the warehousing part and the leaving part which perform FOUP warehousing and unloading with respect to the vehicle 200. ing.

  Returning to FIG. 1, the conveyance path 400 is a path for the conveyance carriage to travel, and is provided so as to be sandwiched between the plurality of stations 300. For example, when the system is stopped and the vehicle 200 cannot travel, the transport carriage transports the FOUP by traveling along the transport path 400. In addition to the above-described transport, the transport path 400 also functions as a path for a worker who performs maintenance work or the like of the transport system.

<Transport cart>
Below, the conveyance trolley | bogie which concerns on this embodiment is demonstrated with reference to FIGS. 3-18.

<First Embodiment>
First, the structure of the conveyance trolley | bogie which concerns on 1st Embodiment is demonstrated with reference to FIG.3 and FIG.4. FIG. 3 is a perspective view showing the configuration of the transport cart when not loaded according to the first embodiment, and FIG. 4 is a perspective view showing the configuration of the transport cart when loaded according to the first embodiment. .

  In FIG. 3, the transport cart 500 according to the first embodiment includes a main body 510, a roller 520, an elevating unit 530, and a gripping unit 540.

  The main body 510 is a frame made of, for example, a metal such as aluminum or iron, and has a U-shape, thereby having a relatively large space inside. The internal space of the main body includes a stacking unit that is a space for loading a FOUP that is a transported object, and a storage unit that is a space for storing the storage unit 310 and the output unit 320 in the station 300. ing.

  The roller 520 is an example of the “traveling unit” in the present invention, and can rotate the transport cart 500 by rotating. The roller 520 here is configured to rotate when an operator performs an operation of pushing or pulling the transport carriage 500, but may be configured to be rotated by, for example, an electric motor or the like.

  The elevating part 530 is an example of the “elevating means” in the present invention, and a grip part 540 described later can be raised and lowered with respect to the main body part 510. By the raising / lowering operation by the raising / lowering part 530, the holding part 530 is adjusted to an appropriate height for holding the FOUP. A specific configuration of the elevating unit 530 will be described in detail later.

  The grip portion 540 is an example of the “grip means” in the present invention, and is capable of gripping the FOUP. When the FOUP is gripped by the grip portion 540, the FOUP is loaded on the transport carriage 500. A specific configuration of the grip portion 540 will be described in detail later.

  In FIG. 4, the FOUP 600 loaded on the transport carriage 500 is accommodated in the space inside the main body 510 while being gripped by the grip 540 as shown in the figure. In other words, the space in which the FOUP 600 is accommodated in the figure is the loading portion in the main body 510, and the space located below the FOUP 600 is the accommodation portion. The storage of the storage unit 310 and the storage unit 320 in the storage unit will be described in detail when the transfer operation is described.

  Next, a specific configuration of the above-described lifting unit 530 will be described with reference to FIGS. Here, FIGS. 5 to 7 are side views showing a specific configuration of the elevating unit in the transport carriage.

  In FIG. 5, the raising / lowering part 530 is provided with the raising / lowering handle 531a, the raising / lowering pinion 531b, and the raising / lowering rack 531c, for example. When raising and lowering, the operator operates the lifting handle 531a, whereby the lifting pinion 531b rotates and the lifting rack 531c moves up and down. As a result, the grip portion 540 attached to the lifting rack 531c is moved up and down.

  In FIG. 6, the raising / lowering part 530 may be comprised so that the raising / lowering handle 532a, the belt winding-up part 532b, and the raising / lowering belt 532c may be provided. In this case, when the operator operates the lifting handle 532a, the belt winding portion 532b rotates, and the lifting belt 532c is wound or unwound by the belt winding portion 532b. As a result, the grip portion 540 attached to the lifting belt 532c is raised and lowered.

  In FIG. 7, the elevating unit 530 may include an elevating handle 533a, an elevating drive unit 533b, an elevating belt 533c, an elevating support unit 533d, and a linear guide 533e. In this case, when the operator operates the lifting handle 533a, the lifting drive unit 533b is driven. As the elevating drive unit 533b is driven, the ascending support unit 533d moves up and down along the linear guide 533e. As a result, the grip portion 540 attached to the lift support portion 533d is lifted and lowered via the lift belt 532c.

  In addition, the structure of the raising / lowering part 530 mentioned here is only an example, and even when the raising / lowering part 530 which has a different structure is used, it is possible to implement | achieve the conveying cart 500 which concerns on this embodiment mentioned above.

  Next, a specific configuration of the grip part 540 driven by the above-described lifting part 530 will be described with reference to FIGS. Here, FIGS. 8 to 10 are partially enlarged views showing specific configurations of the gripping portions in the transport carriage.

  In FIG. 8, the grip part 540 includes, for example, a rotation drive part 541, two connection plates 542a and 542c, and two grip parts 543a and 543b. When gripping the FOUP 600, an operator operates a knob (not shown) or the like attached to the rotation drive unit 541 to drive the connection plates 542a and 542c, and accordingly, the grip units 543a and 543b are moved. Open and close. In the configuration shown in FIG. 8, the grip portions 543a and 543b are opened by turning the rotation drive portion 541 clockwise, and the grip portions 543a and 543b are closed by turning the rotation drive portion 541 counterclockwise.

  In FIG. 9, the grip portion 540 may include a rotation drive portion 541 having two guide grooves 544a and 544b, a grip portion 543a having a connection portion 545a, and a grip portion 543b having a connection portion 545b. . In this case, when a knob or the like attached to the rotation drive unit 541 is operated, the connection portions 545a and 545b move along the guide grooves 544a and 544b, and the grip portions 543a and 543b perform an opening / closing operation. In the configuration shown in FIG. 9, the grips 543a and 543b are closed by turning the rotation drive unit 541 clockwise, and the grips 543a and 543b are opened by turning the rotation drive unit 541 counterclockwise.

  In FIG. 10, the grip portion 540 may include four grip pinions 546a, 546b, 546c, and 546d that are meshed with each other, and two grip portions 547a and 547b. In this case, when a knob or the like attached to the grip pinion 546a is operated, the other grip pinions 546b, 546c, and 546d rotate, and the grip portions 547a and 547b perform an opening / closing operation. Note that the grip portions 547a and 547b in FIG. 10 are different from the grip portions 543a and 543b in FIG. 8 and FIG. In the configuration shown in FIG. 10, the grip portions 547a and 547b are opened by turning the grip pinion 546a to the right, and the grip portions 547a and 547b are closed by turning the grip pinion 546a to the left.

  In addition, the structure of the holding part 540 quoted here is only an example, and even when the holding part 540 which has a different structure is used, it is possible to implement | achieve the conveying cart 500 which concerns on this embodiment mentioned above.

  Next, an operation when the FOUP 600 of the transport cart 500 according to the first embodiment is transferred will be described with reference to FIGS. FIG. 11 is a perspective view showing the positional relationship between the transport cart and the station when the FOUP is received, and FIG. 12 is a side view showing the operation of the transport cart according to the first embodiment when the FOUP is transferred. is there. FIG. 13 is a side view showing the operation of the transport cart according to the comparative example when the FOUP is transferred, and FIG. 14 is a perspective view showing the positional relationship between the transport cart and the station when the FOUP is delivered. In FIGS. 11 to 14, for convenience of explanation, detailed members of the transport carriage shown in FIGS. 3 and 4 are omitted as appropriate, and the same applies to the subsequent drawings.

  11 and 12, when the FOUP 600 is stored in the transport cart 500 according to the first embodiment, the storage unit 310 is accommodated in the storage unit of the transport cart 500. That is, the main body 510 of the transport cart 500 is in a state of surrounding the warehousing unit 310 from the side. When the loaded FOUP 600 is transferred to the warehousing unit 310, as shown in FIG. 12, the lifting unit 530 is driven to lower the grip unit 540, and the FOUP 600 is placed on the warehousing unit 310. When transferring, the roller 520 is fixed so as not to rotate by a stopper or the like.

  In FIG. 13, suppose that the FOUP 600 is transferred by the transport cart 500a that cannot accommodate the warehousing unit 310, the transport cart 500a occupies a large space in the transport path 400 because the warehousing unit 310 cannot be accommodated. As a result, the space for a worker who operates the transport carriage 500a in the transport path 400 and the space for a worker who wants to pass through the transport path 400 in other work are extremely limited. Accordingly, in the case described above, various practical inconveniences such as a reduction in work efficiency may occur.

  On the other hand, as shown in FIGS. 11 and 12, the transport cart 500 according to the present embodiment stores the storage unit 310 in the main body 510 of the transport cart 500, so that the space of the transport path 400 is sufficiently maintained. be able to. Therefore, the transfer operation can be suitably performed even in a relatively narrow space.

  In the case shown in FIG. 13, the grip 540 in the transport carriage 500 a is required to move in the horizontal direction by the arm 550 in addition to the lifting operation by the lifting unit 530. Against this, since the transport carriage 500 according to the present embodiment is capable of transferring the FOUP 600 in a state where the warehousing unit 310 is accommodated, as long as the lifting operation in the lifting unit 530 is possible, The operation in the horizontal direction by the arm 550 may not be performed. Therefore, transfer of the FOUP 600 can be realized with a relatively simple configuration. In addition, the time required to transfer the FOUP 600 can be shortened.

  In FIG. 14, when the FOUP 600 is discharged from the transfer cart 500 according to the first embodiment, the output unit 320 is stored in the storage unit of the transfer cart 500. That is, the main body 510 of the transport cart 500 is in a state of surrounding the unloading unit 320 from the side. Therefore, the FOUP 600 can be suitably transferred as in the case of the warehousing shown in FIGS.

  As described above, according to the transport carriage 500 according to the first embodiment, the main body 510 has the accommodating portion that accommodates the warehousing portion 310 and the unloading portion 320, so that work can be performed even in a relatively small space. Transfer work can be easily performed without hindering traffic.

<Second Embodiment>
Next, a transport cart according to the second embodiment will be described with reference to FIGS. 15 and 16. FIG. 15 is a perspective view showing the configuration of the gripping part in the transport cart according to the second embodiment, and FIG. 16 is a perspective view showing the configuration of the transport cart according to the second embodiment. Note that the second embodiment is different from the first embodiment in the configuration of the gripping portion, and the other configurations are generally the same. Therefore, in the second embodiment, portions different from the first embodiment will be described in detail, and descriptions of other overlapping portions will be omitted as appropriate. 15 and FIG. 16, the same reference numerals are given to the same components as the components according to the first embodiment shown in FIG. 3 and FIG.

  In FIG. 15, in the transport carriage 500 according to the second embodiment, the grip portion 540 is formed in a shape as shown in the figure, and the grip portion 540 according to the first embodiment (see FIG. 8 to FIG. 10). In addition, the grip portion 540 itself is not provided with a drive point. When gripping the FOUP 600 with such a gripping portion 540, the gripping portion 540 is slid in the horizontal direction (that is, in the direction of the arrow in the figure), so that the clearance between the handle portion and the main body portion of the FOUP 600 is reduced. A part of the grip portion 540 is fitted.

  In FIG. 16, the transport carriage 500 according to the second embodiment can be realized with a relatively simple configuration, as described above, because it is not necessary to provide a driving portion in the grip portion 540 itself. That is, the FOUP 600 can be reliably transferred if the elevating unit 530 for elevating the grip unit 540 is provided.

  When the FOUP 600 is loaded, the transport carriage 500 is moved by the roller 520 so that the gripping unit 540 grips the FOUP 600. More specifically, first, the heights of the FOUP 600 and the gripping part 540 are adjusted by the elevating part 530, and then the transport carriage 500 travels to the FOUP 600 side by the roller 520 to grip the FOUP 600. Then, the lifting part 530 raises the grip part, so that the FOUP 600 is loaded on the transport cart 500. When the loaded FOUP 600 is received, the operation opposite to the above-described operation is performed, so that the FOUP 600 can be reliably transferred to the station 300.

  As described above, according to the transport cart 500 according to the second embodiment, the configuration of the transport cart can be simplified.

<Third Embodiment>
Next, a transport cart according to a third embodiment will be described with reference to FIGS. 17 and 18. FIG. 17 is a side view showing the configuration of the transport cart according to the third embodiment, and FIG. 18 is a side view showing the operation of the transport cart according to the third embodiment at the time of FOUP transfer. Note that the third embodiment differs from the first and second embodiments described above in that it includes a fall prevention unit, and the other configurations are generally the same. Therefore, in the third embodiment, portions different from those in the first and second embodiments will be described in detail, and description of other overlapping portions will be omitted as appropriate. 17 and 18, the same reference numerals are assigned to the same components as those according to the first embodiment shown in FIG. 11 and the like.

  In FIG. 17, the transport cart 500 according to the third embodiment includes a fall prevention unit 560 for preventing the loaded FOUP 600 from dropping in addition to the configurations of the first and second embodiments described above. ing.

  The fall prevention unit 560 is an example of the “fall prevention unit” in the present invention, and is provided below the loading unit in the main body 510. The fall prevention unit 560 is formed as a plate-like member, for example, and prevents the fall by supporting the loaded FOUP 600 from below.

  In FIG. 18, the fall prevention unit 560 is stored at a position that does not hinder accommodation when the warehousing unit 310 or the leaving unit 320 is accommodated in the accommodation unit. Specifically, the fall prevention hand portion 540 is movable in response to, for example, an operation of a lever, a handle, or the like, and does not come into contact with the warehousing portion 310 as shown in the drawing when the FOUP 600 is transferred. It is stored in the position.

  By storing the fall prevention unit 560 during accommodation, it is possible to avoid the accommodation of the warehousing unit 310 or the delivery unit 320 being hindered by the presence of the fall prevention unit 560. Therefore, it becomes possible to carry and transfer more suitably.

  As described above, according to the transport carriage 500 according to the third embodiment, the fall prevention unit 560 is provided, so that the FOUP 600 being transported can be prevented from falling. In particular, when a precise member or device that is vulnerable to impact, such as a semiconductor substrate, is transported, the above-described effects are remarkably exhibited.

<Fourth embodiment>
Next, the conveyance trolley | bogie which concerns on 4th Embodiment is demonstrated with reference to FIG.19 and FIG.20. FIG. 19 is a perspective view showing the configuration of the transport carriage according to the fourth embodiment, and FIG. 20 is a top view showing the arrangement of each station in the transport system. The fourth embodiment is different from the above-described embodiments in that the transferred FOUP can be rotated, and the other configurations are generally the same. Therefore, in the fourth embodiment, portions different from the first to third embodiments will be described in detail, and descriptions of other overlapping portions will be omitted as appropriate. 19 and 20, the same reference numerals are given to the same components as those according to the first embodiment shown in FIGS. 1 and 4.

  In FIG. 19, the transport cart 500 according to the fourth embodiment includes a turntable 570 that allows the elevating unit 530 and the gripping unit 540 to rotate. The turntable 570 is rotatable along the horizontal direction, and the orientation of the elevating unit 530 and the gripping unit 540 can be changed.

  The transport cart 500 according to the fourth embodiment further includes a rotation reinforcing bar 580. If the rotation reinforcing bar 580 is rotated and the direction thereof is changed, the direction of the opening of the main body 510 of the transport carriage 500 can be changed. That is, the direction in which the storage unit 310 and the output unit 320 are stored in the storage unit of the transport carriage 500 can be changed by 180 °. By combining the rotation reinforcing bar 580 and the rotation of the turntable 570 described above, it is possible to perform the transfer operation with respect to the FOUP 500 without being aware of the front and back of the transport carriage 500. The rotation reinforcing bar 580 is for maintaining the strength of the transport carriage 500, and may not be provided as long as the strength can be sufficiently secured.

  As shown in FIG. 20, the transport carriage 500 according to the fourth embodiment is remarkably effective when the transport path 400 is relatively narrow and the storage unit 310 and the storage unit 320 in each station 300 are arranged to face each other. Demonstrate. Specifically, when transferring the FOUP between the storage unit 310 and the output unit 320 facing each other, the transfer can be performed without rotating the transport carriage 500 (that is, only by moving it in parallel). The turntable 570 can also be used for adjusting the orientation of the gripping unit 540 and the FOUP 400 to be transferred.

  As described above, according to the transport cart 500 according to the fourth embodiment, the transfer operation of the FOUP 400 can be more suitably performed by including the turntable 570.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification. Moreover, it is included in the technical scope of the present invention.

It is a top view which shows roughly the whole structure of a conveyance system. It is a perspective view which shows the specific structure of a station. It is a perspective view which shows the structure of the conveyance trolley at the time of the unloading which concerns on 1st Embodiment. It is a perspective view which shows the structure of the conveyance trolley at the time of loading concerning 1st Embodiment. It is a side view (the 1) which shows the concrete structure of the raising / lowering part in a conveyance trolley. It is a side view (the 2) which shows the concrete structure of the raising / lowering part in a conveyance trolley. It is a side view (the 3) which shows the specific structure of the raising / lowering part in a conveyance trolley. It is the elements on larger scale (the 1) which shows the specific structure of the holding part in a conveyance trolley. It is the elements on larger scale (the 2) which shows the specific structure of the holding part in a conveyance trolley. It is the elements on larger scale (the 3) which shows the specific structure of the holding part in a conveyance trolley. It is a perspective view shown about the positional relationship of the conveyance trolley at the time of warehousing FOUP and a station. It is a side view which shows the operation | movement at the time of FOUP transfer of the conveyance trolley | bogie which concerns on 1st Embodiment. It is a side view which shows the operation | movement at the time of FOUP transfer of the conveyance trolley | bogie which concerns on a comparative example. It is a perspective view shown about the positional relationship of the conveyance trolley at the time of leaving FOUP and a station. It is a perspective view which shows the structure of the holding part in the conveyance trolley which concerns on 2nd Embodiment. It is a perspective view which shows the structure of the conveyance trolley which concerns on 2nd Embodiment. It is a side view which shows the structure of the conveyance trolley which concerns on 3rd Embodiment. It is a side view which shows the operation | movement at the time of FOUP transfer of the conveyance trolley | bogie which concerns on 3rd Embodiment. It is a perspective view which shows the structure of the conveyance trolley which concerns on 4th Embodiment. It is a top view which shows arrangement | positioning of each station in a conveyance system.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 100 ... Track, 200 ... Vehicle, 300 ... Station, 310 ... Warehousing part, 320 ... Delivery part, 400 ... Conveyance path, 500 ... Conveyance cart, 510 ... Main part, 520 ... Roller, 530 ... Lifting part, 531a, 532a, 533a ... Elevating handle, 531b ... Elevating pinion, 531c ... Elevating rack, 532b ... Belt winding part, 532c, 533c ... Elevating belt, 533b ... Elevating drive part, 533d ... Elevating support part, 533e ... Linear guide, 540 ... Gripping part , 541 ... Rotation drive part, 542 ... Connection plate, 543, 547 ... Grip part, 544 ... Guide groove, 545 ... Connection part, 546 ... Holding pinion, 550 ... Arm, 560 ... Fall prevention part, 570 ... Turntable, 580 ... Rotation reinforcement bar

Claims (5)

The transported object is transported and provided so as to protrude from the station, and the transported object is transferred to a loading / unloading unit that loads or unloads the transported object at the station, or from the loading / unloading unit. A transport carriage for transferring a transported object;
A loading portion that is a space for loading the object to be transported, and a storage portion that is positioned below the loading portion and that is a space for storing the storage portion so as to at least partially surround the side, A main body opened to the side,
Traveling means provided in the main body,
It is provided above the loading part in the main body part, and the transferred object loaded on the loading part is transferred to the loading / unloading part in a state where the loading / unloading part is housed in the housing part. Or a transfer means for transferring the object to be transferred discharged from the loading / unloading section to the stacking section. The transfer means is
Gripping means for gripping the object to be conveyed;
The conveying cart according to claim 1, further comprising elevating means for elevating and lowering the gripping means.   The body is provided below the stacking section in the main body, and the transported object loaded on the stacking section is supported from the lower side to prevent the transported object from dropping from the stacking section. The conveyance carriage according to claim 1 or 2, further comprising a fall prevention means.   The said fall prevention means is provided in the said accommodating part, and is accommodated in the position which does not become the hindrance which accommodates the said loading / unloading part, when accommodating the said loading / unloading part in the said accommodating part. Item 4. The carriage according to Item 3.   The transporting carriage according to any one of claims 1 to 4, wherein the transfer means is rotatable with respect to the main body portion in a direction along a horizontal direction.

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