JP2010179195A - Liquid applying apparatus and liquid applying method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make it possible to highly precisely and stably apply a coating liquid in stripe shape. <P>SOLUTION: An ink 20 is supplied from a coating liquid supply port 10 into a nozzle 1 by a pump or the like, and is distributed in a direction intersecting the coating direction at right angles by a coating liquid manifold 8 in the nozzle 1, thereafter, the ink 20 is discharged from the coating liquid discharge port 2. At the same time, a gas such as compressed air is supplied from a gas supply port 11 to the nozzle 1 by a compressor or the like, and is distributed to a direction intersecting the coating direction at right angles by a gas manifold 9 in the nozzle, thereafter the gas is discharged from a gas discharge prot 3. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a liquid application apparatus and method for applying a liquid such as ink to a predetermined position on an object to be applied.

  Conventionally, there is a photolithography method as a typical method for forming a fine stripe pattern coating film. As this method, a photosensitive material is formed on a material to be coated by a wet method (a method in which a liquid photosensitive agent is applied and dried) or a dry method (a method in which a film-like photosensitive film is attached). Then, a desired pattern coating film is formed through exposure, development and drying processes.

  Further, as a method for directly forming a pattern regardless of the photolithography method, there are an ink jet method, a screen printing method, a method of ejecting ink from a die, and the like.

  Among the above methods, the photolithography method can form a fine pattern with relatively high accuracy. However, the number of steps is large, and the apparatus to be used is very expensive. Since the material is discarded, there is a problem that the material cost increases.

  In addition, among the methods of forming directly without using the photolithography method, the inkjet method requires the production of a discharge mechanism using a piezo element for stably discharging the coating liquid from the nozzle of the thin tube, or the piezo element. Since a complicated control system for precisely driving the apparatus is required, there are many technical problems and a problem that the apparatus becomes very expensive.

  In addition, the screen printing method is suitable for mass production because the manufacturing equipment is relatively inexpensive and the number of processes is relatively small, but it is difficult to obtain a highly accurate pattern continuously for a long time due to deformation of the screen plate and changes over time. There is a problem.

  In recent years, therefore, there is an increasing expectation for a method for ejecting ink from a die.

  Next, problems in the conventional method for ejecting ink from a die will be described in detail with reference to FIGS.

  FIGS. 8A to 8E are explanatory views showing the discharge state of the coating liquid from the nozzles of the conventional method when performing stripe-shaped coating. In FIGS. The figure is a view seen from the nozzle side, and the lower figure is a view seen from the discharge port side. In FIG. 8, attention is paid to one coating liquid discharge port, and when actually trying stripe coating, a plurality of arrangements are arranged.

  In FIG. 8, 2 is a coating liquid discharge port, 4 is a liquid pool, 5 is a material to be coated, 13 is a coating liquid, 14 is a coated liquid, 21 is a nozzle, and 23 is a coating gap (surface on which a discharge port is provided). And the distance between the coated materials).

  In this conventional method, when the discharge is started, as shown in FIG. 8A, the coating liquid 13 is discharged from the coating liquid discharge port 2, and eventually, as shown in FIG. 8B, between the nozzle and the coated material. A liquid reservoir 4 is formed. When the liquid reservoir 4 is formed, a shearing force is applied to the liquid reservoir 4 by the relative running of the material to be coated 5 with respect to the nozzle 21 as shown in FIG.

  Here, when the coating liquid discharge port 2 is slit-shaped and discharged from the coating liquid discharge port 2 in a solid coating, the liquid pool 4 is formed while the droplets are connected in a direction orthogonal to the coating direction. The contact area between the nozzle 4 and the nozzle 21 is large, and the liquid reservoir 4 is relatively difficult to break against shearing force.

  On the other hand, the liquid reservoir 4 in the case of performing stripe-shaped coating has no connection in the direction orthogonal to the coating direction and is much smaller than that during solid coating. As shown in FIGS. 8D and 8E, the coating film is easily broken. In particular, when applying fine and thin stripes, it is necessary to reduce the discharge amount, and this tendency becomes remarkable. Similarly, when applying with a wide coating gap 23, this tendency becomes significant.

  FIGS. 9A to 9E are explanatory diagrams of a method for performing stable coating by preventing breakage with respect to the coating method shown in FIG. 8, in the case where the discharge amount is increased from the coating state shown in FIG. 9A and 9E are diagrams illustrating a discharge state of the coating liquid from the nozzle in FIG. 9, in which FIG. 9A is a diagram viewed from the nozzle side, and FIG. 9B is a diagram viewed from the discharge port side. .

  Note that in FIG. 9 as well, FIG. 8 pays attention to one coating liquid discharge port, and when actually trying striped coating, a plurality of these are arranged side by side. Moreover, in the following description, the same code | symbol is attached | subjected to the member corresponding to the already demonstrated member, and detailed description is abbreviate | omitted.

  As shown in FIG. 9, when the discharge amount is increased, a larger liquid reservoir 4 can be formed as compared with the method of FIG. 8, and as shown in FIG. 9B, the liquid reservoir 4 is placed between the nozzle and the material to be coated. Even when a shearing force is applied to the liquid reservoir 4 after forming the liquid reservoir 4, as shown in FIGS. 9C and 9D, the liquid reservoir 4 is difficult to break, and the coating film is interrupted as compared with the method of FIG. Difficult and stable application can be realized.

  However, in the method of FIG. 9, as shown in FIG. 10 (the view of the state shown in FIG. 9D as seen from the top surface of the nozzle), the liquid reservoir 4 becomes larger and also in the direction orthogonal to the application direction. As a result, the coating film 15 becomes thick and thick, and it is difficult to form a fine and thin stripe-shaped coating film.

  Patent Document 1 discloses a method of forming a stripe-shaped coating surface by supplying gas from the upstream side in the coating direction of the coating liquid discharge port 2 during coating.

  11 (a) and 11 (b) are explanatory diagrams of the method described in Patent Document 1 in which a stripe-shaped coating is performed while supplying gas from the upstream side in the coating direction to the coating liquid discharge port. (A) is a side view showing the nozzle portion, and (b) is an enlarged view of the nozzle tip.

In the method shown in FIG. 11, a comb-shaped portion having a peak / valley shape is formed at the tip of the nozzle 21 of the conventional method, and a discharge port for the coating liquid is provided in the peak portion 18 of the comb-shaped portion. By supplying the gas 17 from the gas supply port 11 of the trough portion 19 of the mold-shaped portion, wetting and spreading of the coating film 16 in the width direction is restricted, and the striped coating film 16 is formed.
JP 2003-80147 A

  However, the conventional method has the following problems.

  12 (a) and 12 (b) are explanatory views showing the discharge state of the coating liquid from the nozzle by the method shown in FIG. 11. In FIGS. 12 (a) and 12 (b), the upper diagram shows the side of the nozzle. The figure seen from the bottom is the figure seen from the discharge outlet side.

  As shown in FIG. 12 (a), the supplied gas 17 exerts a force for pushing the liquid reservoir 4 downstream in the application direction (coating material traveling direction). As a result, as shown in FIG. 12 (b). In addition, there is a problem that the liquid reservoir 4 is easily broken and the coating film is easily interrupted.

  In this method, since the width of the coating film is controlled by the pressure of the gas 17 to be supplied, it is necessary to supply the gas at a higher pressure in order to obtain a fine stripe-shaped coating film. Because of the strong flow of the gas 17, the force pushing the liquid reservoir 4 to the downstream side in the application direction (coating material traveling direction) further acts strongly, so that the tendency of the liquid reservoir 4 to break and the coating film to easily break is remarkable. It becomes.

  In addition, the larger the coating gap 23, the more the supplied gas flows into the area between the nozzle and the material to be coated. Similarly, the liquid reservoir 4 is pushed downstream in the coating direction (the material traveling direction). The force comes to work strongly, and the tendency that the liquid reservoir 4 is broken and the coating film is easily interrupted becomes remarkable.

  In addition, when applying with a small discharge amount to obtain a fine and thin stripe-shaped coating film, or when applying at a high application speed in order to increase productivity, the force for maintaining the liquid pool 4 becomes weaker. The tendency that the liquid reservoir 4 is broken by the force pushing the reservoir 4 downstream in the application direction (the traveling direction of the material to be coated), and the coating film is easily interrupted.

  Therefore, even in this method, it is difficult to stably form a fine stripe-shaped coating film at a high speed with a wide coating gap 23.

  In recent years, for example, in the field of flat panels, it has been desired to form fine and thin stripe patterns in a larger area with high productivity due to rapid progress of thinning and high definition of devices. In order to realize this by a method of ejecting ink as a coating liquid from a die, (1) the thickness of the material to be coated 5 increases as the area of the material to be coated 5 increases. It is necessary to be able to apply with a wide coating gap 23 so as not to come into contact with the substrate, (2) to be applied with a small amount of discharge to make a thin and high-definition pattern, and (3) to be able to be applied at high speed to increase productivity. .

  However, in the method of supplying a gas from the upstream side in the application direction to the application liquid discharge port 2 at the time of conventional application, in the case of conventional application with a wide application gap 23, small amount discharge, and high-speed application, the liquid reservoir 4 as described above. This is difficult to realize because the problem of fragility is more prominent.

  The present invention has been made in view of such a problem of the prior art, and provides a liquid coating apparatus and a liquid coating method capable of coating a coating liquid with high accuracy and stability in a stripe shape. The purpose is to do.

  In order to achieve the object, the invention according to claim 1 is characterized in that a gas is discharged to a position displaced from the center of the liquid discharge port on the same surface as a liquid discharge port for discharging the liquid and the installation surface of the liquid discharge port. A liquid application apparatus that applies a liquid to an object to be applied by the nozzle, and the nozzle is provided with the gas discharge port downstream of the liquid discharge port in the application direction. The liquid reservoir between the nozzle and the object to be coated can be stably formed.

  The invention according to claim 2 is provided with a plurality of the gas discharge ports, and the cross-sectional area of the gas discharge ports at both ends in the direction orthogonal to the application direction of the gas discharge ports is the same as that of the other gas discharge ports. It is characterized in that it is set so as to be larger than the cross-sectional area, and uniform coating can be realized up to both ends in the width direction orthogonal to the coating direction.

  Invention of Claim 3 provided the convex part in the both ends of the direction orthogonal to the application direction in the front end surface of the said nozzle, and to the both ends of the width direction orthogonal to the application direction Uniform application can be realized.

  Invention of Claim 4 discharges the gas containing the component which the solvent of the liquid to apply | coat vaporizes using the liquid application apparatus of Claim 1, and is characterized by the above-mentioned. Stable coating can be realized without drying.

  According to the present invention, by providing a gas discharge port on the downstream side in the application direction with respect to the liquid discharge port and discharging the gas, a liquid pool between the nozzle and the object to be coated can be stably formed. Thus, it can be applied in a stripe shape with high accuracy and stability.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
FIG. 1 is a configuration diagram of a liquid coating apparatus according to Embodiment 1 of the present invention.

  In the following description of the embodiment, an organic EL light emitting layer coating step will be described as an example.

  FIG. 1 is a side sectional view of the present liquid application device, FIG. 2 is a view of a nozzle in the present liquid application device as viewed from the discharge port direction (the direction of arrow A in FIG. 1), and FIG. FIGS. 4A to 4D are views seen from the upstream side (in FIG. 1, B :) in the direction (the relative traveling direction of the nozzle and the material to be coated at the time of application), and FIGS. Focusing on one of the coating liquid discharge ports, it is an explanatory view showing the discharge state of the coating liquid from the coating liquid discharge port, and the upper diagrams of FIGS. 4A to 4D are viewed from the side of the nozzle. FIGS. 1 and 3 are views as seen from the discharge port side. In FIGS. 1 to 3, a plurality of these are arranged.

  1-4, 1 is a nozzle, 2 is a coating liquid discharge port, 3 is a gas discharge port, 4 is a liquid reservoir, 5 is a material to be coated, 6 is a striped coating film (a fine and thin stripe) 8 is a manifold for coating liquid, 9 is a manifold for gas, 10 is a coating liquid supply port, 11 is a gas supply port, and 12 is both ends of the front end surface of the nozzle 1 in a direction orthogonal to the coating direction. , 20 is an ink that is a coating liquid, and 23 is a coating gap (a distance between the surface of the nozzle 1 where the coating liquid discharge port 2 is provided and the material to be coated 5).

  In the present embodiment, the configuration of the nozzle 21 of the conventional method shown in FIGS. 8 to 12 is different from that of the gas discharge port 3 in the coating liquid discharge port 2 when the nozzle 1 and the material 5 to be coated are applied. It is the structure provided in the downstream of the relative running direction (application | coating direction).

  A coating method in this liquid coating apparatus will be described.

  The liquid ink 20 is supplied to the nozzle 1 from the coating liquid supply port 10 by a pump (not shown) or the like, distributed by the coating liquid manifold 8 in the nozzle 1 in a direction perpendicular to the coating direction, and then coated. The liquid is discharged from the liquid discharge port 2.

  At the same time, a gas such as compressed air is supplied from the gas supply port 11 to the nozzle 1 by a compressor (not shown) or the like, and distributed in a direction perpendicular to the application direction by the gas manifold 9 in the nozzle 1. The gas is discharged from the gas discharge port 3.

  The discharged ink 20 forms a liquid pool 4 between the nozzle and the material to be coated (FIGS. 4A and 4B). The liquid reservoir 4 is applied with a shearing force by the relative running of the nozzle 1 and the material to be coated 5 by a drive mechanism (not shown) (FIG. 4C) and extends in the coating direction. However, due to the gas discharged from the gas discharge port 3, the liquid reservoir 4 is pushed to the upstream side in the application direction of the material 5 to be applied, and the force to sandwich the liquid reservoir 4 in the direction orthogonal to the application direction. 22 is added (FIG. 4 (d)).

  As a result, the liquid reservoir 4 is applied while preventing the liquid reservoir 4 from being pushed and broken to the downstream side in the application direction of the material 5 and preventing the liquid reservoir 4 from spreading in a direction perpendicular to the application direction. It becomes possible to do.

  As a result, the force for maintaining the liquid reservoir 4 is weak in the prior art, and the liquid reservoir 4 can be maintained even in a small amount of discharge where the liquid reservoir 4 was easily broken by a shearing force or in coating with a high coating speed. As shown in FIG. 4D, the state seen from the upper surface of the nozzle, a fine and thin stripe-shaped coating film 6 can be stably realized.

  Further, as described above, by the gas discharged from the gas discharge port 3, the force for pushing the liquid reservoir 4 upstream in the application direction and the force 22 for sandwiching the liquid reservoir 4 in the direction orthogonal to the application direction are applied. Thus, it is possible to obtain an effect of growing the liquid reservoir 4 in the direction of the material to be coated while suppressing the discharged ink 20 from spreading on the surface of the nozzle 1.

  As a result, since the liquid pool 4 can be formed with a wider coating gap 23 than in the past even with a small discharge amount, the fine and thin stripe-shaped coating film 6 can be formed with a wider coating gap 23 than in the prior art. Can be realized.

  Here, as shown in FIG. 3, by providing the convex portions 12 at both ends in the direction orthogonal to the coating direction on the surface of the nozzle 1 where the discharge port is provided, the gas discharged from the gas discharge port 3 is It can prevent flowing outside the direction orthogonal to the application direction. As a result, the liquid reservoir 4 at the end in the direction orthogonal to the application direction is also sandwiched in the direction orthogonal to the application direction and the force pushing upstream of the application direction, as with the other liquid reservoirs 4. The force 22 can be obtained, and uniform coating is realized from the center portion to both ends in the direction orthogonal to the coating direction.

  In the organic EL light emitting layer coating process, the material to be coated 5 is a glass substrate on which driving TFTs (thin film transistors) are formed. As an example of the setting conditions, the coating gap 23 is 30 to 200 μm. Yes, the diameter of the coating liquid discharge port 2 is 20 μm to 200 μm. The diameter of the gas discharge port 3 is 10 μm to 300 μm. Further, the distance (X in FIG. 2) in the direction orthogonal to the application direction between the coating liquid discharge port 2 and the gas discharge port 3 is 10 to 500 μm, and the distance in the application direction of the material 5 to be applied to the nozzle 1. (Y in FIG. 2) is 5 to 1000 μm.

  As for the application operation in the vicinity of the application end portion, it is preferable to stop the supply of the application liquid by a pump (not shown) or the like before the nozzle 1 reaches the application end position. As a result, extra ink 20 is ejected due to the influence of the residual pressure applied to the ink 20 inside the nozzle, thereby preventing application unevenness (for example, an increase in film thickness or an increase in application width) from occurring at the end of application. can do.

  Further, by increasing the coating gap 23 before the nozzle 1 reaches the coating end position, the residual pressure applied to the ink 20 inside the nozzle, the tip portion of the nozzle 1 and the material to be coated 5 at the coating end portion, It is possible to prevent coating unevenness (for example, increase in film thickness or increase in coating width) caused by unnecessarily spreading the liquid reservoir 4 between the two.

  The ink supply may be stopped by a pump (not shown) or the like, and the gas discharge from the gas discharge port 3 may be stopped at the same time. However, the gas discharge is stopped after a certain time after the ink supply is stopped. May be. By delaying the gas discharge stop in this way, the effect of quickly separating the liquid reservoir 4 existing in the nozzle 1 and the material to be coated 5 can be obtained, and the coating end position can be controlled with high accuracy, and the coating direction can be controlled. Thus, it is possible to reduce the variation in the coating end position in the orthogonal direction.

  In the ink 20 used in the coating process of the organic EL light-emitting layer, examples of the solute include polymer materials such as polyfluorene, polyarylene, polyarylene vinylene, alkoxybenzene, and alkylbenzene. Solvents include: A single or mixed solvent such as toluene, xylene, acetone, anisole, methyl ethyl ketone, methyl isobutyl ketone, cyclohexyl benzene and the like can be mentioned. The relative traveling speed of the nozzle 1 and the material to be coated 5 is 50 to 500 mm / s.

(Embodiment 2)
Further, as shown in FIGS. 6 and 7, the convex portions 12 are not provided at both ends in the direction orthogonal to the application direction on the surface of the nozzle 1 on which the discharge port is provided, but are orthogonal to the application direction. By making the cross-sectional area of the gas discharge ports 3 at both end portions in the direction larger than that of the other gas discharge ports 3, the gas discharge ports 3 are discharged from the gas discharge ports 3 provided at the ends in the direction orthogonal to the coating direction. The flow rate of the gas can be increased.

  As a result, while the gas flows out to the outside in the direction orthogonal to the application direction, the liquid reservoir 4 at the end in the same direction is also pushed to the upstream side in the application direction like the other liquid reservoirs 4. Thus, it is possible to obtain a force sandwiched in a direction orthogonal to the application direction, and uniform application from the center to both ends in the direction orthogonal to the application direction can be realized.

(Embodiment 3)
Further, the ink 20 can be prevented from drying by ejecting a gas containing a component obtained by vaporizing the solvent of the ink 20 from the gas ejection port 3. This prevents the occurrence of clogging of the nozzle 1 and the occurrence of foreign matter defects caused by contamination of the tip of the nozzle 1 (the surface provided with the discharge port) and dropping them onto the coated material 5. And stable coating can be realized.

  In the first to third embodiments, the cross-sectional shapes of the coating liquid discharge port 2 and the gas discharge port 3 have been described as circular. However, liquid ink (coating liquid) and gas can be stably discharged. The shape is not limited to a circle. In this case, the diameter of the discharge ports 2 and 3 described in the first embodiment may be considered as an equivalent diameter (4 × cross-sectional area / perimeter length).

  Further, in the first to third embodiments, it has been described that the liquid discharge and the gas discharge are started at the same time.

  For example, when the liquid reservoir 4 is formed at the coating start end and the relative running of the nozzle 1 and the material to be coated 5 is started and coating is performed, wetting and spreading at the nozzle tip in the application of the low-viscosity liquid. When the speed is high, it is possible to prevent the coating width at the start end from becoming unnecessarily wide by discharging the liquid after discharging the gas first.

  In addition, when the film thickness is thinly applied, the discharge amount is reduced, so that the discharged liquid is unnecessary due to the gas in the state where the liquid reservoir 4 is not yet formed (the state shown in FIG. 4A). It tends to be swept away upstream in the coating direction. Thus, by first discharging the liquid to form the liquid reservoir 4 and then discharging the gas, it is possible to prevent the occurrence of an uncoated portion at the coating start end.

  Further, the liquid application and the gas discharge are simultaneously started and the gas supply pressure is changed and the coating is performed (for example, the gas is discharged at a higher pressure than that at the time of steady application at the coating start end, and the nozzle 1 and the material to be coated are applied. When the relative running of 5 is started, the pressure is changed to a predetermined pressure at the time of steady application, or gas is started at a lower pressure than at the time of steady application until the liquid reservoir 4 is formed from the start of liquid discharge at the application start end. When the relative running of the nozzle 1 and the material to be coated 5 is started, the pressure is changed to a predetermined pressure at the time of steady application. It is also possible to obtain

  Hereinafter, the embodiment will be described in more detail.

Example 1
An example in which the first embodiment is implemented will be described.

  In the nozzle 1 shown in FIG. 1, the coating liquid discharge port 2 and the gas discharge port 3 are circular, the diameter of the coating liquid discharge port 2 is 20 to 300 μm, the diameter of the gas discharge port 3 is 10 to 300 μm, and the coating liquid discharge The distance (X in FIG. 2) in the direction orthogonal to the coating direction between the outlet 2 and the gas discharge port 3 is 10 to 500 μm, the coating liquid discharge ports 2 are 1000, the gas discharge ports 3 are 1001, and the coating liquid. The distance in the application direction (Y in FIG. 2) between the discharge port 2 and the gas discharge port 3 was 5 to 1000 μm, and the coating gap 23 was 30 to 200 μm.

  Furthermore, the gas is air, the gas supply pressure to the gas supply port 11 is 0.5 to 100 kPa, and the convexity of the end portions at both ends in the direction orthogonal to the coating direction on the surface on which the discharge ports 2 and 3 of the nozzle 1 are provided. The length of the portion 12 (Z in FIG. 3) is 20 to 190 μm, the width is 2 mm to 15 mm, polyfluorene type is used as the solute of the ink 20, cyclohexylbenzene is used as the solvent, and the ink 20 has a viscosity of 5 cps to 500 cps, temperature 20 ° C., discharge amount 0.2 to 100 nL / s.

  Further, the relative running speed of the nozzle 1 and the material to be coated 5 is 50 to 500 mm / s, the ejection of the ink 20 is started 20 msec after the gas ejection is started at the coating start end, and the position 13 mm before the coating end position. Then, the supply of the coating liquid by the pump is stopped, and a bank having a height of 1 to 100 μm and a width of 10 to 80 μm is provided at a pitch of 20 to 200 μm on the condition that the coating gap 23 is increased by 200 μm from a position 10 mm before the coating end position. In addition, a test for applying between the banks on the coated material 5 was performed.

  As a result, the ink could be stably applied without any interruption or protrusion under any condition.

(Example 2)
An example using the second embodiment will be described.

  In the nozzle 1 shown in FIGS. 6 to 7 without the convex portion 12 shown in FIG. 1, the coating liquid discharge port 2 and the gas discharge port 3 are circular, and the diameter of the coating liquid discharge port 2 is 20 to 300 μm. The diameter of the gas discharge ports 3 other than both ends orthogonal to the direction is 10 to 300 μm, and the cross-sectional area of the gas discharge ports 3 at both ends in the direction orthogonal to the application direction is orthogonal to the application direction. The distance in the direction perpendicular to the coating direction between the coating liquid discharge port 2 and the gas discharge port 3 is assumed to be 1.1 to 2 times the cross-sectional area of the gas discharge port 3 other than both ends of the gas (X in FIG. 2). 10 to 500 μm, 1000 coating liquid discharge ports 2, 1001 gas discharge ports 3, and a coating direction distance (Y in FIG. 2) between the coating liquid discharge port 2 and the gas discharge port 3 is 5 to 1000 μm, The coating gap 23 was 30 to 200 μm.

  The gas is air, the gas supply pressure to the gas supply port 11 is 0.5 to 100 kPa, polyfluorene system is used for the solute of the ink 20, cyclohexylbenzene is used for the solvent, and the ink 20 has a viscosity of 5 cps to 500 cps, temperature 20 degreeC and discharge amount were set to 0.2-100 nL / s.

  The relative running speed of the nozzle 1 and the material 5 to be coated is 50 to 500 mm / s, the discharge of the ink 20 is started 20 msec after the start of the gas discharge at the coating start end, and the pump is started at a position 13 mm before the coating end position. The ink supply is stopped and the coating gap 23 is provided at a pitch of 20 to 200 μm at a pitch of 1 to 100 μm and a width of 10 to 80 μm on the condition that the coating gap 23 is increased by 200 μm from a position 10 mm before the coating end position. A test was applied between the banks on the material 5.

  As a result, as in the case where the convex portion 12 of Example 1 was provided, the ink could be stably applied without any interruption or protrusion under any condition.

(Example 3)
An example using the third embodiment will be described.

  The gas discharged from the gas discharge port 3 is a gas obtained by mixing 0.1 to 0.5 vol% of cyclohexylbenzene, and in the nozzle 1 shown in FIG. 1, the coating solution discharge port 2 and the gas discharge port 3 are circular. The diameter of the coating liquid discharge port 2 is 20 to 300 μm, the diameter of the gas discharge port 3 is 10 to 300 μm, and the distance in the direction orthogonal to the coating direction between the coating liquid discharge port 2 and the gas discharge port 3 (in FIG. 2) X) is 10 to 500 μm, the coating liquid discharge port 2 is 1000, the gas discharge port 3 is 1001, and the distance in the coating direction between the coating liquid discharge port 2 and the gas discharge port 3 (Y in FIG. 2) is 5. ˜1000 μm, coating gap 23 is 30 to 200 μm, gas supply pressure to gas supply port 11 is 0.5 to 100 kPa, at both ends in a direction orthogonal to the application direction of the surface on which nozzle 1 discharge port is provided The length of the convex portion 12 (Z in FIG. 3) ) Was 20 to 190 μm, and the width was 2 mm to 15 mm.

  Polyfluorene series was used as the solute of the ink 20, cyclohexylbenzene was used as the solvent, and the ink 20 had a viscosity of 5 cps to 500 cps, a temperature of 20 ° C., and a discharge amount of 0.2 to 100 nL / s.

  The relative running speed of the nozzle 1 and the material to be coated 5 is 50 to 500 mm / s, the discharge of the liquid is started 20 msec after the start of the gas discharge at the application start end, and the pump is used at a position 13 mm before the application end position. A material to be coated on which a bank having a height of 1 to 100 μm and a width of 10 to 80 μm is provided at a pitch of 20 to 200 μm on the condition that the ink supply is stopped and the coating gap 23 is increased by 200 μm from a position 10 mm before the coating end position. 5 A test (application of 1000 sheets of the material 5 to be applied was continuously applied) was performed between the upper banks.

  As a comparative example, the same test (continuous application of 1000 coated materials 5) was performed when the gas discharged from the gas discharge port 3 was air.

  As a result, when air containing unmixed cyclohexylbenzene was discharged, 0.5% of foreign matter defects and coating defects due to nozzle clogging occurred in 1000 sheets, but 1000 sheets were mixed when cyclohexylbenzene was mixed. It was confirmed that the coating could be stably performed with no foreign matter defects or coating defects due to nozzle clogging.

Example 4
Another example using the first embodiment will be described.

  In the nozzle 1 shown in FIG. 1, the gas discharge port 3 is a square having an equivalent diameter of 10 to 300 μm and a coating width direction length: coating direction length = 1: 3. The diameter of the liquid discharge port 2 is 20 to 300 μm, the distance in the direction perpendicular to the coating direction between the coating liquid discharge port 2 and the gas discharge port 3 (X in FIG. 2) is 10 to 500 μm, and the coating liquid discharge port 2. 1000, the gas discharge port 3 is 1001, the distance in the coating direction between the coating liquid discharge port 2 and the gas discharge port 3 (Y in FIG. 2) is 5 to 1000 μm, and the coating gap 23 is 30 to 200 μm. .

  The gas was air, and the gas supply pressure to the gas supply port 11 was 0.5 to 100 kPa. Moreover, the length (Z in FIG. 3) of the convex part 12 in the both ends of the direction orthogonal to the application direction on the surface of the nozzle 1 provided with the discharge port was 20 to 190 μm, and the width was 2 mm to 15 mm.

  Polyfluorene series was used as the solute of the ink 20, cyclohexylbenzene was used as the solvent, and the ink 20 had a viscosity of 5 cps to 500 cps, a temperature of 20 ° C., and a discharge amount of 0.2 to 100 nL / s.

  The relative running speed of the nozzle 1 and the material to be coated 5 is 50 to 500 mm / s, the discharge of the liquid is started 20 msec after the start of the gas discharge at the application start end, and the pump is used at a position 13 mm before the application end position. The coating liquid supply is stopped, and a coating with a height of 1 to 100 μm and a width of 10 to 80 μm is provided at a pitch of 20 to 200 μm on the condition that the coating gap 23 is increased by 200 μm from a position 10 mm before the coating end position. A test was applied between the banks on the material 5.

  As a result, as in the case where the gas discharge port of Example 1 was circular, the ink could be stably applied without any interruption or protrusion under any condition.

  Since the present invention is low in production cost and can be applied with high accuracy, the present invention can be applied to a printing manufacturing process such as a high-definition display device having a line device structure such as an organic EL (Electro Luminescence) or a PDP (Plasma Display Panel). Applicable.

Side surface sectional drawing of the liquid application apparatus which is Embodiment 1 of this invention The figure which looked at the nozzle in the liquid application apparatus of Embodiment 1 from the discharge outlet direction The figure which looked at the nozzle in the liquid application apparatus of Embodiment 1 from the application direction upstream side (A)-(d) is explanatory drawing which shows the coating liquid discharge state from one coating liquid discharge port in the liquid coating apparatus of Embodiment 1. FIG. Plan view of nozzle in liquid application apparatus of embodiment 1 The figure which looked at the nozzle from the discharge outlet direction of the liquid application apparatus in Embodiment 2 of this invention The figure which looked at the nozzle in the liquid application apparatus of Embodiment 2 from the running direction upstream side (A)-(e) is explanatory drawing which looked at the discharge state of the coating liquid from the conventional nozzle from the nozzle side and discharge port side with respect to the application direction. (A)-(d) is explanatory drawing which looked at the discharge state of the coating liquid from the conventional nozzle from the nozzle side and the discharge port side. Plan view of nozzle in conventional liquid application device (A), (b) is a figure which shows the structure which performs stripe-form application | coating, supplying gas with the nozzle in the conventional liquid application apparatus. (A), (b) is explanatory drawing of the problem at the time of performing striped application by the nozzle of FIG.

DESCRIPTION OF SYMBOLS 1 Nozzle 2 Coating liquid discharge port 3 Gas discharge port 4 Liquid pool 5 Coating material 6 Striped coating film 7 Gas discharge port 8 with large cross-sectional area 8 Coating liquid manifold 9 Gas manifold 10 Coating liquid supply port 11 Gas supply port 12 Convex part 20 Ink 22 Force 23 for sandwiching the liquid reservoir 23 Coating gap

Claims (4)

A nozzle provided with a liquid discharge port for discharging liquid and a gas discharge port for discharging gas at a position shifted from the center of the liquid discharge port on the same plane as the installation surface of the liquid discharge port; A liquid application device for applying a liquid to an application object,
A liquid coating apparatus, wherein the gas ejection port is installed in the nozzle on the downstream side in the coating direction with respect to the liquid ejection port.   A plurality of the gas discharge ports are installed, and the cross-sectional area of the gas discharge ports at both ends in the direction orthogonal to the application direction of the gas discharge ports is larger than the cross-sectional areas of the other gas discharge ports. The liquid application apparatus according to claim 1, wherein the liquid application apparatus is set.   The liquid coating apparatus according to claim 1, wherein convex portions are provided at both end portions in a direction orthogonal to a coating direction on a tip surface of the nozzle.   A liquid coating method using the liquid coating apparatus according to claim 1, wherein a gas containing a component evaporated from a liquid solvent to be coated is ejected from the gas ejection port.

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