JP2010023249A - Printing apparatus and printing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a printing apparatus and a printing method which conduct printing with high accuracy and high reproducibility. <P>SOLUTION: A substrate stage 21 includes a main surface 21a which holds a glass substrate 22. A blanket support board 31 includes a surface 31a which holds a blanket 36 and the surface 31b of the backside thereof. An air balloon 38 applies pressure onto the surface 31b. The blanket support board 31 can elastically deform between a first condition wherein it flexes so that the distance H between the main surface 21a and the surface 31a may increase as it goes away from the fixed support end 31p supported in a fixed manner to a second condition wherein it extends so that the distance H may stay consistent. By applying pressure from the air balloon 38 with the position of the fixing board 41 maintained, the blanket support board 31 deforms from the first condition to the second condition, thereby making the blanket 36 contact the glass substrate 22. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a printing apparatus and a printing method.

  Regarding a conventional printing method, for example, Japanese Patent Application Laid-Open No. 11-58921 discloses an image forming method for completely eliminating ink film thickness unevenness (Patent Document 1). The image forming method disclosed in Patent Document 1 includes a coating process in which a resin is applied to a silicon resin surface to form a coating surface, and a relief plate formed in a predetermined shape is pressed against the coating surface to form a convex portion. A removal step of transferring and removing the resin, and a transfer step of transferring the resin remaining on the coated surface to the substrate.

  Japanese Patent Application Laid-Open No. 2004-249696 discloses an image forming method for eliminating the ink stringing phenomenon and obtaining a high-quality printed material close to photolithography (Patent Document 2). In the image forming method disclosed in Patent Document 2, an image line portion made of a resin repellent layer and a non-image line portion made of a parent resin layer are formed on a resin, and the resin is applied to the entire surface. Thereafter, only the resin on the resin-repellent layer is transferred onto a sheet provided with another resin-repellent layer, and further, this resin is transferred onto the substrate to form an image.

Japanese Patent Application Laid-Open No. 2008-132743 discloses a printing machine and a printing method for obtaining a high-dimensionally formed printed image for producing an electronic component or the like (Patent Document 3). The printing machine disclosed in Patent Document 3 is an offset printing machine, and is arranged behind a blanket holding plate, a blanket holding plate bonded to the blanket holding plate, and presses the blanket holding plate. And a balloon press for pressing the blanket to the substrate.
JP-A-11-58921 JP 2004-249696 A JP 2008-132743 A

  In order to form a fine pattern used in electronic parts such as a display member, an optical member, and a wiring board, a photolithography method using a photoresist is generally used. For example, in the formation of wiring patterns and elements in liquid crystal panel manufacturing, resist processing or etching by photolithography is used. However, since the photolithography method involves complicated steps such as resist coating, exposure, and development, enormous capital investment and a long processing tact are required. Therefore, a simpler process is required. ing.

  A printing method has been proposed as a simple process, and offset printing has been proposed as a representative method in the field of electronic components. The offset printing method is a method of forming an image on a substrate by transferring an ink pattern formed on a plate to an elastic sheet called a blanket and then transferring the ink pattern from the blanket to the substrate again. When using the offset printing method for patterning electronic components, there was a problem with pattern accuracy, but as disclosed in the above-mentioned patent document, pattern accuracy approaching that of the photolithography method by devising the printing plate, ink, transfer method, etc. Has come to be obtained.

  In general offset printing, a cylindrical rolling cylinder around which a blanket is wound is rotated and translated relative to the substrate or the printing plate while being synchronized with the rotation. Ink patterns are transferred between printing plates. On the other hand, in recent years, glass substrates used for flat panel displays have become larger, and uniform pattern formation has become important. When offset printing is performed on a substrate having such a large area, there is a problem in that blurring due to movement of the rolling cylinder occurs due to the rolling cylinder becoming large, and the positional accuracy is lowered. As a means for solving such a problem, use of a printing apparatus using a leaf spring-shaped blanket holding plate described below can be considered (Patent Document 3).

  FIG. 10 is a side view showing a printing apparatus using a leaf spring-like blanket holding plate. Referring to FIG. 10, a printing apparatus 100 includes a stage 101 that holds a substrate 102, a pressure plate 105 that is disposed on the stage 101, and a leaf spring-like shape that is disposed between the stage 101 and the pressure plate 105. And a blanket holding plate 104. The pressure plate 105 is rotatably supported on the rotation shaft 106. The blanket holding plate 104 has a fixed support portion at an end portion on the same side as the rotating shaft 106 of the pressure plate 105, and has a simple support portion at the opposite end portion. A blanket 103 and an air balloon 107 are provided on the lower surfaces of the blanket holding plate 104 and the pressure plate 105, respectively.

  In the printing apparatus 100, first, the blanket holding plate 104 is deformed by introducing air into the air balloon 107 and increasing the internal pressure (FIG. 10A). Next, the pressure plate 105 is rotated to further increase the internal pressure of the air balloon 107 and further deform the blanket holding plate 104. Thus, the blanket 103 is brought into contact with the substrate 102 while compressing the air balloon 107 (FIG. 10B). By rotating the pressure plate 105 until the blanket holding plate 104 is parallel to the substrate 102, pressurization of the substrate 102 by the blanket 103 is completed (FIG. 10C). By this pressurization, the ink pattern formed on the blanket 103 is transferred to the substrate 102.

  Although the transfer of the ink pattern from the blanket 103 to the substrate 102 has been described, the transfer of the ink pattern from the printing plate to the blanket 103 is performed in the same process.

  According to the printing apparatus 100 provided with such a leaf spring-like blanket holding plate 104, a pressurizing operation is performed by the deformation of the blanket holding plate 104 by the air balloon 107 and the rotation of the pressurizing plate 105. It is possible to eliminate error factors such as a shift due to movement of the lens and a synchronous shift between translation and rotation.

  As described above, the printing apparatus 100 is effectively used when the substrate has a large area. On the other hand, whether the substrate can be pressed uniformly and reproducibly by the leaf spring-like blanket holding plate 104 is crucial. It is a difficult issue. That is, in the printing apparatus 100, due to the rotation operation of the pressure plate 105, due to the pressure change of the air balloon 107 in the contact process of the blanket holding plate 104 and the substrate 102, or the shape change of the air balloon 107 due to the balloon pressure setting, Control of the printing pressure and sequential printing in one direction become difficult, resulting in a problem that printing accuracy and reproducibility are lowered. Hereinafter, problems that occur in the printing apparatus 100 will be described.

  First, the first problem will be described. FIG. 11 is a diagram schematically illustrating a state in which the blanket holding plate is deformed in the printing apparatus in FIG. 10.

  Referring to FIG. 11, in the drawing, it is assumed that the final pressure acting on substrate 102 is small and large, and the deformation of blanket holding plate 104 in each case is shown. The volume of the space A between the blanket holding plate 104 and the pressure plate 105 is Va, the volume of the space B between the blanket holding plate 104 and the substrate 102 is Vb, and the space between the pressure plate 105 and the substrate 102. When the volume of C is Vc, the relationship Vc = Va + Vb is established.

  When the final pressure acting on the substrate 102 is small, the volume Vc of the space C between the pressure plate 105 and the substrate 102 decreases as the pressure process proceeds from the initial state in the pressurization process by the rotation of the pressure plate 105. Along with this, the volume Va of the space A between the pressure plate 105 and the blanket holding plate 104 also decreases. Further, the air balloon 107 existing in the space A is compressed due to the decrease in the volume Va, the internal pressure thereof is increased, and as a result, a series of operations are performed in which the blanket holding plate 104 is deformed.

  When the final pressure acting on the substrate 102 is small, that is, when the initial swelling of the air balloon 107 is small, the deformation amount of the blanket holding plate 104 pressed from the air balloon 107 is relatively small, and the volume Va is small. On the other hand, when the final pressure is large, that is, when the initial inflation of the air balloon 107 is large, the blanket holding plate 104 pressed from the air balloon 107 is further deformed and the volume Va is increased. Although the volume Va is reduced and the blanket holding plate 104 is deformed by the rotation operation of the pressure plate 105, the final pressure acting on the substrate 102 is small in the deformation of the blanket holding plate 104 during the pressurization and the contact rate with the substrate. The case differs from the case where the final pressure is large. That is, when the final pressure acting on the substrate 102 is changed, there arises a problem that the pressing state of the substrate 102 in the pressurizing process is different.

  Such a problem is that as the volume Vc of the space C between the pressure plate 105 and the substrate 102 changes due to the rotation of the pressure plate 105, the volume Va of the space A changes, and the pressure change in the space A also changes. It is caused by complicated operations such as accompanying.

  Next, the second problem will be described. FIG. 12 is a diagram schematically showing changes in the contact area between the blanket and the substrate in the printing apparatus shown in FIG. Referring to FIG. 12, fixed support portion 108 and simple support portion 109 are shown at both ends of blanket holding plate 104.

  First, in the initial state, the air balloon 107 expands downward and the air balloon 107 and the blanket holding plate 104 come into contact with each other in the vicinity of the center of the blanket holding plate 104. By this contact, the blanket holding plate 104 is deformed, and the blanket 103 comes into contact with the substrate 102 in the state where the air balloon 107 and the blanket holding plate 104 are not in contact with each other near the fixed support portion 108 of the blanket holding plate 104. .

  Next, when the rotation operation of the pressure plate 105 proceeds, a pressure is applied to the substrate 102 by the air balloon 107 through the blanket holding plate 104 and the blanket 103 near the center of the substrate 102. At this time, in the vicinity of the fixed support portion 108, the substrate 102 is not pressurized or the applied pressure is greatly reduced. When the rotation operation of the pressure plate 105 further proceeds, the range of pressure applied to the substrate 102 extends from the vicinity of the center of the substrate 102 to both sides of the fixed support portion 108 and the simple support portion 109. As a result, also in the vicinity of the fixed support portion 108, the pressure is again applied to the substrate 102 by the air balloon 107, and the substrate 102 and the blanket 103 come into contact twice at the same location. As described above, the pressing point of the blanket holding plate 104 by the air balloon 107 is different from the pressing point of the substrate 102 by the blanket 103. In addition, in the rotating operation, the respective pressing points do not maintain a relative relationship, but move or expand, so that the above-mentioned contact occurs twice or the lateral load changes. Or Such a problem is significant when the final pressure acting on the substrate 102 is small.

  Further, in the initial state, the blanket 103 and the substrate 102 come into contact with each other in the vicinity of the center of the blanket holding plate 104, and the contact area moves on both sides of the fixed support portion 108 and the simple support portion 109 as the pressurizing plate 105 rotates. An operation such as spreading out also occurs. In this case, the blanket holding plate 104 receives a load in the lateral direction from the air balloon 107. The direction and magnitude of the lateral load vary depending on the position and area in contact with the air balloon 107. Such a problem is significant when the final pressure acting on the substrate 102 is large.

  As described above, in the printing apparatus 100 in FIG. 10, the printing accuracy is changed by changing the pressing operation due to the initial pressure, or when the pressing spreads from the central part of the substrate or is pressed twice near the fixed support part. Deterioration occurs. In addition, there is a problem that variation in positional accuracy increases due to receiving a non-uniform lateral load.

  SUMMARY OF THE INVENTION An object of the present invention is to solve the above-described problems, and to provide a printing apparatus and a printing method in which printing is performed with high accuracy and high reproducibility.

  A printing apparatus according to one aspect of the present invention includes a stage, a blanket holding plate, a fixing member, and a pressure applying member. The stage has a main surface that holds a flat plate. The blanket holding plate has a first surface facing the main surface and holding the blanket, and a second surface disposed on the back side of the first surface. The fixing member is disposed to face the second surface. The pressure applying member is disposed between the blanket holding plate and the fixing member, and applies pressure to the second surface. The blanket holding plate has a fixed support portion that is fixedly supported. The blanket holding plate has a first state in which the distance between the main surface and the first surface increases as the distance from the fixed support portion increases, and the distance between the main surface and the first surface is constant. Between the second state and the second state. With the position of the fixing member held, pressure is applied from the pressure applying member to the blanket holding plate, so that the blanket holding plate is deformed from the first state to the second state, and the blanket and the flat plate are in contact with each other. To do.

  In the present invention, the flat plate held on the main surface of the stage is a printing plate for transferring the ink pattern to the blanket or a substrate for transferring the ink pattern from the blanket.

  According to the printing apparatus configured as described above, since the pressure is applied from the pressure applying member to the blanket holding plate in a state where the position of the fixing member is held, the first state is deformed to the second state. The operation sequence (deformation process) of the blanket holding plate can be easily controlled. Thereby, the variation in the contact state between the blanket and the flat plate held on the main surface can be suppressed, and printing can be performed with high accuracy and high reproducibility.

  Preferably, the blanket holding plate has a support member provided on the opposite side of the fixed support portion with the first surface interposed therebetween. According to the printing apparatus configured as described above, the blanket holding plate can be supported so as to be deformable between the first state and the second state.

  Preferably, the printing apparatus further includes a movable member connected to the fixed member and movably supporting the support member. According to the printing apparatus configured as described above, the flat plate and the blanket can be brought into planar contact in the second state.

  Preferably, the movable member is formed of an elastic member. According to the printing apparatus configured as described above, the blanket holding plate can be held in the first state by applying the elastic force of the elastic member to the movable portion.

  Preferably, the elastic member is a spring. Preferably, the elastic member is an air cylinder. According to the printing apparatus configured as described above, the blanket holding plate can be held in the first state by applying the elastic force of the spring or the air cylinder to the movable portion.

  Preferably, the pressure applying member is a balloon whose volume is changed by sucking and exhausting gas. According to the printing apparatus configured as described above, pressure can be applied to the blanket holding plate by inflating the balloon.

  Preferably, the pressure applying member is a sealing member that forms an airtight space together with the bracket holding plate and the fixing member and has elasticity. According to the printing apparatus configured in this manner, the bracket holding plate, the fixing member, and the sealing member are integrated to form an airtight space, and therefore, more uniform pressure is applied to the second surface. Can do.

  Preferably, the sealing member is formed of a bellows. According to the printing apparatus configured as described above, a highly reliable sealing member can be easily configured.

  Preferably, the fixed support portion is provided at substantially the same height as the top surface of the flat plate held on the main surface. According to the printing apparatus configured as described above, the flat plate and the blanket can be sequentially brought into contact from the support portion side toward the side away from the support portion. Thereby, the lateral load (the load in the direction parallel to the top surface of the flat plate) acting on the flat plate can be appropriately controlled, and the printing system can be further improved.

  Preferably, the fixed support portion is provided at a position higher than the top surface of the flat plate held on the main surface. According to the printing apparatus configured as described above, when the pressure is applied to the blanket holding plate by the pressure applying member, interference between the blanket and the edge of the flat plate can be avoided more reliably.

  Preferably, pressure is applied to the blanket holding plate by introducing gas into the pressure applying member. According to the printing apparatus configured as described above, it is possible to uniformly apply pressure to the blanket holding plate with a simple configuration.

  Preferably, the magnitude of the pressure applied to the blanket holding plate is adjusted by adjusting the integrated flow rate of the gas introduced into the pressure applying member. According to the printing apparatus configured as described above, the final printing state can be appropriately controlled through the adjustment of the integrated gas flow rate.

  A printing method according to the present invention is a printing method using any one of the above-described printing apparatuses. In the printing method, the flat plate and the blanket are brought into contact in order from the support portion side to the side farther from the support portion by applying a pressure from the pressure applying member to the blanket holding plate by holding the flat plate on the main surface. A process. According to the printing method configured as described above, the transfer is sequentially performed in one direction from the support portion side to the side farther from the support portion, and therefore printing can be performed with high accuracy and high reproducibility.

  A printing apparatus according to another aspect of the present invention includes a stage having a main surface that holds a flat plate, a blanket holding plate that is disposed on the main surface and holds a blanket, and an opposite side of the stage with respect to the blanket holding plate. And a fixing member disposed on the surface. The volume of the space A between the blanket holding plate and the fixing member is Va, the volume of the space B between the blanket holding plate and the flat plate held on the stage is Vb, and the flat plate held on the fixing member and the stage is The relationship of Vc = Va + Vb is established when the volume of the space C between is Vc. In a state where the volume Vc is kept constant, by applying pressure to the inside of the space B, the blanket holding plate is deformed to increase the volume Vb, and the volume Va decreases as the volume Vb increases. The blanket held by the blanket holding plate comes into contact with the flat plate.

  According to the printing apparatus configured in this manner, the volume Vc of the space C between the fixed member and the flat plate held by the stage is kept constant, thereby performing printing with high accuracy and high reproducibility. Can do.

  As described above, according to the present invention, it is possible to provide a printing apparatus and a printing method in which printing is performed with high accuracy and high reproducibility.

  Embodiments of the present invention will be described with reference to the drawings. In the drawings referred to below, the same or corresponding members are denoted by the same reference numerals.

  FIG. 1 is a perspective view showing a printing apparatus according to an embodiment of the present invention. Referring to FIG. 1, a printing apparatus 10 in the present embodiment is an apparatus used for offset printing. The printing apparatus 10 is an apparatus that forms an image on the glass substrate 22 by transferring the ink pattern formed on the printing plate 27 to the blanket 36 and further transferring the ink pattern from the blanket 36 to the glass substrate 22.

  First, the structure of the printing apparatus 10 will be described. The printing apparatus 10 includes a substrate stage 21 and a printing plate stage 26, a fixed plate 41, a blanket holding plate 31, and an air balloon 38.

  The substrate stage 21 and the printing plate stage 26 are installed on the base 52 at a distance from each other. The base 52 is slidably provided on the rail 51. By sliding the base 52, the substrate stage 21 and the printing plate stage 26 move in the direction indicated by the arrow 53.

  The substrate stage 21 has a main surface 21 a that holds the glass substrate 22, and the printing plate stage 26 has a main surface 26 a that holds the printing plate 27. The main surface 21a and the main surface 26a are formed in a planar shape. Preferably, the glass substrate 22 and the printing plate 27 are formed on the same plane. The substrate stage 21 and the printing plate stage 26 are made of metal. The rail 51, the base 52, the substrate stage 21 and the printing plate stage 26 have a structure that exhibits sufficient rigidity against the pressure acting during printing.

  The printing plate 27 installed on the printing plate stage 26 may have any shape. The printing plate 27 may be a gravure offset printing plate using an intaglio plate or an offset printing plate using a flat plate having no irregularities.

  FIG. 2 is a side view showing the operation of the printing apparatus in FIG. In the figure, a process of transferring the ink pattern formed on the blanket 36 to the glass substrate 22 is typically shown.

  Referring to FIGS. 1 and 2, fixing plate 41 is provided at a position facing substrate stage 21 or printing plate stage 26 within a range in which substrate stage 21 and printing plate stage 26 can move. Yes. The fixed plate 41 is made of metal. The fixed plate 41 has a structure that exhibits sufficient rigidity with respect to the pressure acting during printing.

  Hereinafter, the operation in a state where the substrate stage 21 is positioned at a position facing the fixed plate 41 will be continued.

  The blanket holding plate 31 is disposed between the fixed plate 41 and the substrate stage 21. The blanket holding plate 31 has a surface 31 a that faces the substrate stage 21, and a surface 31 b that is disposed on the back side of the surface 31 a and faces the fixed plate 41.

  The blanket holding plate 31 has a flat plate shape. The blanket holding plate 31 has a fixed support end 31 p that is fixedly supported by the fixed wall 42. In the present embodiment, the fixed support end 31 p is fixed to a fixed wall 42 extending from the fixed plate 41. The fixed support end 31p is not limited to such a form, and may be fixed to a member provided separately from the fixed plate 41. The fixed support end 31p is fixed and supported at a height substantially equal to the top surface of the glass substrate 22 placed on the substrate stage 21. The fixed support end 31p is provided further outside the edge of the glass substrate 22 in the direction in which the top surface of the glass substrate 22 extends. The fixed support end 31p is arranged at a position shifted from the position facing the glass substrate 22 in the direction opposite to the simple support end 31.

  The blanket holding plate 31 further has a simple support end 31q that is simply supported by a shaft 32 as a support member. The simple support here means a general support method in which a bending moment does not act at the support point. The fixed support end 31p and the simple support end 31q are provided at both ends of the blanket holding plate 31 across the surface 31a and the surface 31b. In the present embodiment, the shaft 22 that simply supports the simple support end 31q is movably supported by a coil spring 46 as a movable member. The other end of the coil spring 46 is connected to the fixed plate 41. With such a configuration, the simple support end 31q is supported by the shaft 22 and the coil spring 46 so as to be movable in a direction connecting the fixed plate 41 and the substrate stage 21, and in the direction close to the fixed plate 41. It receives compressive force.

  The blanket holding plate 31 is formed from a leaf spring. The blanket holding plate 31 is curved so that the distance H between the main surface 21a and the surface 31a increases as it moves away from the fixed support end 31p (the state shown in FIG. 2A), the main surface 21a, It can be elastically deformed between a state (a state shown in FIG. 2C) extending so that the distance H to the surface 31a is constant. The blanket holding plate 31 is curved in a bow shape toward the simple support end 31q with the fixed support end 31p as a fixed support point, and is in a state of extending in a plane between the fixed support end 31p and the simple support end 31q. Elastically deformable between.

  The plate spring has a bending yield limit, and it is desirable that the plate spring forming the blanket holding plate 31 is thin so that it can easily follow the glass substrate 22 when air is introduced. Specifically, when a metal plate such as SUS having both strength and repeated bending resistance is used, when the length is 500 mm or less, the thickness is desirably 0.5 mm to 2 mm.

  A blanket 36 is bonded to the surface 31 a of the blanket holding plate 31. The blanket 36 is formed from a rubber-like sheet. The blanket 36 is required to be elastically deformable in order to repeatedly press the glass substrate 22. In addition, in order to transfer the ink pattern to the printing material, the water repellency of the ink is required to be higher than that of the printing material. Generally, a blanket whose surface is formed of silicone rubber is used.

  The air balloon 38 is provided between the fixed plate 41 and the blanket holding plate 36. The air balloon 38 is formed from a bag-like member that forms a sealed space. The air balloon 38 is provided in close contact with the fixed plate 41. An air tube 43 communicating with the internal space of the air balloon 38 is connected to the fixed plate 41. By sucking and exhausting air through the air tube 43, the volume of the air balloon 38 is increased or decreased. As the volume of the air balloon 38 increases, pressure is applied from the air balloon 38 to the surface 31b in a plane.

  Next, a method for forming an image on the glass substrate 22 using the printing apparatus 10 in FIG. 1 will be described.

  First, ink is applied to the printing plate 27 using a coating coater (not shown). For ink application, a slit coater may be used, or a bar coater may be used in accordance with the viscosity of the ink.

  The ink material is not particularly limited, and the main component is selected from, for example, a wiring material, a transparent electrode material, a resist, an insulating material, a coloring material, etc. depending on the application, and a generally known method for adjusting the surface tension or viscosity is applied. Can be used.

  After the ink is dried to the extent that it has tackiness, the printing plate 27 is placed on the printing plate stage 26, and the printing plate stage 26 is moved below the blanket 36. By supplying air to the air balloon 38 through the inlet of the air tube 43, the blanket holding plate 38 is deformed, and the blanket 36 and the printing plate 27 are brought into contact with each other. Next, the blanket 36 is sequentially peeled from the printing plate 27 by gradually releasing air from the air balloon 38. Thereby, the transfer of the ink pattern from the printing plate 27 to the blanket 36 is completed.

  Next, the substrate stage 21 on which the glass substrate 22 is installed is moved to below the blanket 36. In the same manner as described above, air is supplied to and discharged from the air balloon 38 to transfer the ink pattern from the blanket 36 to the glass substrate 22. Through the above steps, a desired image is formed on the glass substrate 22.

  Next, the operation of the printing apparatus 10 when transferring the ink pattern will be described. The operation of the printing apparatus 10 is the same when the ink pattern is transferred from the printing plate 27 to the blanket 36 and when the ink pattern is transferred from the blanket 36 to the glass substrate 22. Below, the time of ink pattern transfer from the blanket 36 to the glass substrate 22 will be typically described.

  FIG. 3 is a diagram schematically showing the operation of the printing apparatus in FIG. 2 and 3, in an initial state before supplying air to air balloon 38, blanket holding plate 31 is in an arcuate curved state. At this time, the blanket 36 and the glass substrate 22 are in a non-contact state (FIG. 2A).

  At the time of pressurization for supplying air to the air balloon 38, the expanding air balloon 38 deforms the blanket holding plate 31, and the deformed blanket holding plate 31 is further pressed toward the substrate stage 21. At this time, the blanket holding plate 31 is gradually deformed with the fixed support end 31p as a fulcrum so that the simple support end 31q is close to the substrate stage 21 while resisting the elastic force of the coil spring 46. As the integrated supply amount of air to the air balloon 38 increases, the pressure inside the air balloon 38 increases, and the contact area with the glass substrate 22 gradually increases due to the deformation of the blanket holding plate 31 accompanying this pressure increase. In this process, the equally distributed load applied to the blanket holding plate 31 can be gradually increased.

  In the present embodiment, the fixed support end 31p is fixedly supported at a height substantially equal to the height of the top surface of the glass substrate 22. With such a configuration, as the blanket holding plate 31 is deformed, the blanket 36 and the glass substrate 22 come into contact sequentially from the fixed support end 31p side to the simple support end 31q side.

  Finally, the blanket holding plate 31 is deformed so as to extend in a planar shape between the fixed support end 31p and the simple support end 31q, thereby bringing the blanket 36 and the glass substrate 22 into contact with each other. At this time, the coil spring 46 extends until the simple support end 31q is positioned at the same height as the fixed support end 31p (FIG. 2C). Thereafter, the contact pressure between the blanket 36 and the glass substrate 22 can be increased by further supplying air to the air balloon 38.

  The printing apparatus 10 according to the embodiment of the present invention described above includes a substrate stage 21 and a printing plate stage 26 as stages, a blanket holding plate 31, a fixing plate 41 as a fixing member, and a pressure applying member. As an air balloon 38. The substrate stage 21 and the printing plate stage 26 respectively have a main surface 21a and a main surface 26a for holding a glass substrate 22 and a printing plate 27 as flat plates, respectively. The blanket holding plate 31 is opposed to the main surfaces 21a and 26a and has a surface 31a as a first surface for holding the blanket 36 and a surface 31b as a second surface disposed on the back side of the surface 31a. The fixing plate 41 is disposed to face the surface 31b. The air balloon 38 is disposed between the blanket holding plate 31 and the fixed plate 41, and applies pressure to the surface 31b. The blanket holding plate 31 has a fixed support end 31p as a fixed support portion that is fixedly supported.

  The blanket holding plate 31 is curved in such a manner that the distance H between the main surfaces 21a and 26a and the surface 31a increases as the distance from the fixed support end 31p increases, and between the main surfaces 21a and 26a and the surface 31a. Can be elastically deformed between the second state extending so that the distance H is constant. With the position of the fixed plate 41 held, pressure is applied from the air balloon 38 to the blanket holding plate 31, so that the blanket holding plate 31 is deformed from the first state to the second state, The glass substrate 22 or the printing plate 27 comes into contact. Conversely, by reducing the pressure applied to the blanket holding plate 31 from the air balloon 38, the blanket holding plate 31 is deformed from the second state to the first state, and the blanket 36 and the glass substrate 22 or the printing plate 27 are peeled off. .

Subsequently, various modifications of the printing apparatus 10 in FIG. 1 will be described.
FIG. 4 is a perspective view showing a first modification of the printing apparatus in FIG. 4A and 4B, in this modification, an air cylinder 61 is provided instead of the coil spring 46 in FIG. 1, and the simple support end 31q is elastically supported by the air cylinder 61. It is supported by. According to such a configuration, the structure is complicated as compared with the coil spring 46, but the effect that it is difficult to be affected by the deterioration of the spring property can be obtained.

  Referring to FIGS. 4C and 4D, in this modification, in addition to the air cylinder 61, a bellows 63 is provided instead of the air balloon 38 in FIG. The bellows 63 has a bellows shape and can be expanded and contracted in a direction connecting the fixing plate 41 and the substrate stage 21. The bellows 63 has a cylindrical shape, and both sides of the opening end thereof are connected to the fixing plate 41 and the blanket holding plate 31, respectively. With such a configuration, the bellows 63 is integrated with the fixed plate 41 and the blanket holding plate 31 to form an airtight space into which air is introduced. There is no contact between the air balloon 38 and the blanket holding plate 31, and pressure can be uniformly applied by directly pressing the blanket holding plate 31 with air, and between the air balloon 38 and the blanket holding plate 31 during operation. Stick-slip can be prevented. Note that the combination of the movable member and the pressure applying member in the present invention is not limited to those described above, and may be, for example, a combination of a coil spring and a bellows.

  FIG. 5 is a side view showing a second modification of the printing apparatus in FIG. With reference to FIG. 5, in the present modification, the fixed support end 31 p is fixedly supported at a position higher than the top surface of the glass substrate 22 placed on the substrate stage 21. Even in such a configuration, by adjusting the distance between the fixed support end 31p and the glass substrate 22, the position where the blanket holding plate 31 is pressed by the air balloon 38, and the like, simple adjustment from the fixed support end 31p side is possible. The blanket 36 and the glass substrate 22 can be brought into contact with each other toward the support end 31q. Further, when the blanket holding plate 31 is deformed, local high-pressure pressing by the blanket 36 at the left edge of the glass substrate 22 can be avoided more reliably.

  FIG. 6 is a side view showing a third modification of the printing apparatus in FIG. Referring to FIG. 6, in this modification, the coil spring 46 in FIG. 1 is not provided, and the position of the simple support end 31q is fixed. By supplying air to the air balloon 38, the blanket holding plate 31 is deformed to extend in a planar shape on the top surface of the glass substrate 22, and along with this deformation, the blanket 36, the glass substrate 22, Touch. In this case, it is necessary to dispose the simple support end 31q further on the right side of the right end of the glass substrate 22 in order to bring them into uniform contact with each other. .

  In addition, the blanket holding plate 31 in the embodiment described in FIG. 1 and the first to third modifications may have an arcuate curved shape as an original shape.

  FIG. 7 is a perspective view showing a fourth modification of the printing apparatus in FIG. Referring to FIG. 7, in this modification, the printing apparatus 10 includes a horizontal rotation mechanism that rotates the fixed plate 41 and the fixed wall 42 about the central axis 71. With such a configuration, the fixing plate 41, the blanket holding plate 31, the blanket 36 and the air balloon 38 can be retracted from the glass substrate 22 installed on the substrate stage 21. Thereby, it becomes possible to observe the glass substrate 22 from above with a camera or the like at an appropriate timing.

  FIG. 8 is a side view showing a fifth modification of the printing apparatus in FIG. Referring to FIG. 8, in this modification, the substrate stage 21 is provided so as to be movable in the vertical direction (direction in which the substrate stage 21 and the fixed plate 41 are connected). With such a configuration, after the blanket 36 and the glass substrate 22 are brought into contact with each other, instead of gradually releasing air from the air balloon 38, the substrate stage 21 is moved downward, whereby the blanket 36 and the glass substrate 22 are moved. And peel.

  The fixed plate 41 may be provided so as to be movable in the vertical direction together with the blanket holding plate 31, the blanket 36 and the air balloon 38.

Next, functions and effects achieved by the printing apparatus 10 in FIG. 1 will be described.
FIG. 9 is a diagram schematically showing the printing apparatus in FIG. Referring to FIG. 9, in printing apparatus 10, the volume of space A between blanket holding plate 31 and fixed plate 41 is Va, and the volume of space B between blanket holding plate 31 and glass substrate 22 is Vb. When the volume of the space C between the fixed plate 41 and the glass substrate 22 is Vc, the relationship Vc = Va + Vb is established.

  In the present embodiment, air is supplied to the air balloon 38 with the position of the fixing plate 41 being fixed. That is, air is introduced into the space A while keeping the volume Vc of the space C constant, and the volume Vb of the space B is reduced while increasing the volume Va. Thereby, the blanket holding plate 31 is deformed along the glass substrate 22 through application of pressure to the space A. In the present embodiment, since the fixed end is further provided on the left side of the substrate end, the blanket 36 and the glass substrate 22 come into contact in order from the left end to the right end of the glass substrate 22. In addition, since a uniformly distributed load is applied to the back pressure of the blanket holding plate 31, the pressure applied to the glass substrate 22 is a uniform pressure. For this reason, the problem that the blanket 36 contacts the center part of the glass substrate 22 first, or the blanket 36 and the glass substrate 22 contact several times like the prior art does not arise.

That is, according to the printing apparatus 10 in FIG. 1, the following effects can be obtained.
1. The deformation of the blanket holding plate 31 is uniquely determined by the pressure inside the air balloon 38 (air introduction integrated flow rate), and has high reproducibility. It is also possible to control the final contact pressure between the blanket 36 and the glass substrate 22 by adjusting the integrated flow rate.
2. Due to the deformation of the blanket holding plate 31 only by introducing air to the air balloon 38, the blanket 36 sequentially contacts the glass substrate 22 in one direction from the left side to the right side, and is sequentially peeled in one direction from the right side to the left side. It becomes possible to do.
3. The pressure after contact between the blanket 36 and the glass substrate 22 is equivalent to the pressure acting from the air balloon 38, and the in-plane distribution becomes uniform.
4). In the case of the first modification, instead of the air balloon 38, the blanket holding plate 31, the fixing plate 41, and the bellows 63 are integrated to form an airtight space, whereby pressure is directly applied to the blanket holding plate 31, In-plane distribution variation and reproducibility degradation due to contact operation do not occur.

  For effect 1, the deformation amount of the blanket holding plate 31 and the printing pressure for the glass substrate 22 are determined according to the integrated flow rate of air to the air balloon 38. For this reason, the pressure reproducibility of the pressurizing process is high, and it is also possible to increase the printing pressure by introducing air after the entire contact is completed. Even when the final pressure is changed, the pressing operation process can be made the same, the first conventional problem is solved, and the object of the present invention is achieved.

  As for the effect 2, when the pressure is applied to the space A between the fixed plate 41 and the blanket holding plate 31 and the blanket holding plate 31 is deformed, the contact area between the blanket 36 and the glass substrate 22 gradually increases. If the fixed support end 31p is set to a height substantially equal to the top surface of the glass substrate 22, the step of sequentially bringing the blanket 36 and the glass substrate 22 into contact from the fixed support end 31p side to the simple support end 31q side can be easily realized. be able to. Further, if the pressure in the space A is reduced, the blanket 36 and the glass substrate 22 can be sequentially peeled from the simple support end 31q side to the fixed support end 31p side by a reverse operation to the pressurizing operation. The eye problem is solved and the object of the present invention is achieved.

  As for the effect 3, an equally distributed load from the air balloon 38 is applied to the glass substrate 22 through the blanket holding plate 31 and the blanket 36, and the in-plane distribution of pressure to the glass substrate 22 is improved.

  Regarding the effect 4, in particular, according to the embodiment in FIG. 4 in which the blanket holding plate 31 and the fixing plate 41 and the bellows 63 are integrated to form an airtight space, the pressure distribution and reproducibility to the glass substrate 22 are improved. .

  According to the printing apparatus 10 and the printing method in the embodiment of the present invention configured as described above, the fixed plate 41 and the blanket are held while the volume Vc of the space C between the fixed plate 41 and the glass substrate 22 is kept constant. With the configuration in which air is introduced into the space A between the holding plates 31, the operation sequence in which the blanket holding plate 31 is deformed can be determined only by the integrated flow rate of air with respect to the space A. Thereby, the blanket holding plate 31 can be deformed as intended, and a stable printing state can be obtained. Further, the lateral load acting on the glass substrate 22 and the printing plate 27 from the blanket 36 can be appropriately controlled by bringing the blanket 36 and the glass substrate 22 and the printing plate 27 into contact and peeling in one direction. For the above reasons, printing can be performed with high accuracy and high reproducibility.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  For example, in the present invention, if printing is performed by pressing an elastic body such as a blanket and a substrate, a printing method described in JP-A 2000-289320 other than offset printing (a functional resin-coated surface is formed on a silicon blanket). It is formed, and the intaglio or relief is pressed against the coating surface, the resin at the pressed portion is removed from the silicon blanket, and the remaining resin is transferred to the printing medium), flexographic printing, and the like.

It is a perspective view which shows the printing apparatus in embodiment of this invention. It is a side view which shows operation | movement of the printing apparatus in FIG. FIG. 2 is a diagram schematically illustrating the operation of the printing apparatus in FIG. 1. It is a perspective view which shows the 1st modification of the printing apparatus in FIG. It is a side view which shows the 2nd modification of the printing apparatus in FIG. It is a side view which shows the 3rd modification of the printing apparatus in FIG. It is a perspective view which shows the 4th modification of the printing apparatus in FIG. It is a side view which shows the 5th modification of the printing apparatus in FIG. It is the figure which represented the printing apparatus in FIG. 1 typically. It is a side view which shows the printing apparatus using a leaf | plate spring-shaped blanket holding board. It is the figure which represented typically a mode that a blanket holding plate deform | transforms in the printing apparatus in FIG. In the printing apparatus in FIG. 10, it is the figure which represented typically the change of the contact area of a blanket and a board | substrate.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 Printing apparatus, 21 Substrate stage, 21a, 26a Main surface, 22 Glass substrate, 26 Printing plate stage, 27 Printing plate, 31 Blanket holding plate, 31a, 31b Surface, 31p Fixed support end, 31q Simple support end, 32 Shaft, 36 blanket, 38 air balloon, 41 fixing plate, 46 coil spring, 61 air cylinder, 63 bellows.

Claims (15)

A stage having a main surface for holding a flat plate;
A blanket holding plate having a first surface facing the main surface and holding a blanket; and a second surface disposed on the back side of the first surface;
A fixing member disposed to face the second surface;
A pressure applying member that is disposed between the blanket holding plate and the fixing member and applies pressure to the second surface;
The blanket holding plate has a fixed support portion that is fixedly supported, and is curved so that the distance between the main surface and the first surface increases as the distance from the fixed support portion increases, Elastically deformable between a second state extending such that the distance between the main surface and the first surface is constant;
With the position of the fixing member held, by applying pressure from the pressure applying member to the blanket holding plate, the blanket holding plate is deformed from the first state to the second state, A printing device where the blanket and flat plate come into contact.   The printing apparatus according to claim 1, wherein the blanket holding plate includes a support member provided on the opposite side of the fixed support portion with the first surface interposed therebetween.     The printing apparatus according to claim 2, further comprising a movable member connected to the fixed member and movably supporting the support member.   The printing apparatus according to claim 3, wherein the movable member is formed of an elastic member.   The printing apparatus according to claim 4, wherein the elastic member is a spring.   The printing apparatus according to claim 4, wherein the elastic member is an air cylinder.   The printing apparatus according to claim 1, wherein the pressure applying member is a balloon whose volume changes as a gas is sucked and exhausted.   The printing apparatus according to any one of claims 1 to 7, wherein the pressure applying member is a sealing member that forms an airtight space together with the bracket holding plate and the fixing member and has elasticity.   The printing apparatus according to claim 8, wherein the sealing member is formed of a bellows.   The printing apparatus according to claim 1, wherein the fixed support portion is provided at substantially the same height as a top surface of a flat plate held on the main surface.   The printing apparatus according to claim 1, wherein the fixed support portion is provided at a position higher than a top surface of a flat plate held on the main surface.   The printing apparatus according to claim 1, wherein pressure is applied to the blanket holding plate by introducing a gas into the pressure applying member.   The printing apparatus according to claim 12, wherein the magnitude of the pressure applied to the blanket holding plate is adjusted by adjusting an integrated flow rate of the gas introduced into the pressure applying member. A printing method using the printing apparatus according to any one of claims 1 to 13,
Holding the flat plate on the main surface;
A step of bringing the flat plate and the blanket into contact with each other in order from the fixed support portion side to the side away from the fixed support portion by applying pressure to the blanket holding plate from the pressure applying member. . A stage having a main surface for holding a flat plate;
A blanket holding plate disposed on the main surface and holding a blanket;
A fixing member disposed on the opposite side of the stage with respect to the blanket holding plate,
The volume of the space A between the blanket holding plate and the fixing member is Va, the volume of the space B between the blanket holding plate and the flat plate held by the stage is Vb, and the fixing member and the stage Vc = Va + Vb is established, where Vc is the volume of the space C between the flat plate held by
In a state where the volume Vc is kept constant, by applying pressure to the inside of the space B, the blanket holding plate is deformed to increase the volume Vb, and the volume Va decreases as the volume Vb increases. The printing apparatus in which the blanket held on the blanket holding plate contacts the flat plate.

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