JP2009302375A - Slipperiness test device, and slipperiness test method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slip test device capable of correctly executing the evaluation of slipping of a vessel and a processing device, and to provide a slip test method. <P>SOLUTION: This slip test device 1 is used for evaluating slip between a positioning groove 24 and a positioning pin in a vessel 22, where three cross-sectionally V-shaped or cross-sectionally U-shaped positioning grooves 24 for fitting the positioning pin therein are formed on the bottom face thereof. The slip test device 1 is characterized by including: a measuring pin 7 fitted in any of the three-positioning grooves 24, and movable in the width direction and the vertical direction of the positioning groove 24; a movement part 4 for moving the measuring pin 7, in the width direction and the vertical direction of the positioning groove 24 for fitting the measuring pin 7 therein; and a measurement part measuring the maximum load imposed on the measuring pin 7, in fitting the measuring pin in the positioning groove 24, by shifting the top part of the measuring pin 7 from the deepest part 25 of the positioning groove 24. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a slip test apparatus and a slip test method.

  Conventionally, when a container (shipping box) containing an article such as a semiconductor wafer is placed on a predetermined position of a processing apparatus used for processing the article, positioning is performed using a mechanism called kinematic coupling. It was. In this mechanism, a cylindrical positioning pin having a substantially hemispherical tip is disposed in a triangular shape at a predetermined position on the processing apparatus side, and a positioning portion having a rectangular shape in plan view is provided on the bottom of the container side. It is provided at three locations so as to be substantially Y-shaped. This positioning part is formed with a V-shaped or U-shaped positioning groove having an inclined surface in the longitudinal direction, and the positioning pin is in contact with the two surfaces of the positioning part. It is configured to be. It is standardized by SEMI, which is a semiconductor-related standardization mechanism, that the position where the container is placed on the processing apparatus is uniquely determined by the fitting of the positioning pins and the positioning grooves (see Patent Document 1 and Non-Patent Document 1). .

  The inclined surface of such a positioning groove is formed longer in the width direction of the positioning groove than the diameter of the positioning pin, so that the positioning pin can be automatically centered at the deepest part of the positioning groove even if there is some deviation. It was. In addition, the longitudinal direction of the positioning groove is formed such that at least two positioning pins can come into contact with each other, and a container placed on one processing device is moved by another positioning pin provided on the transport device. While maintaining the positioning accuracy, it can be conveyed to another apparatus using a conveying apparatus.

  The container is automatically conveyed in the factory where the processing is performed mainly by the ceiling conveyance of the factory, and is placed at a predetermined position where the positioning pin of the processing apparatus is provided. In this way, when the container is lowered from the ceiling and placed on the processing apparatus, the container may be shifted from the normal position and placed on the processing apparatus due to the backlash of the transfer apparatus. At this time, if the slidability between the positioning pin on the processing device side and the positioning groove on the container side is poor, the positioning pin gets caught in the middle of the inclined surface of the positioning groove, and the automatic centripetalization becomes incomplete, and the container is It becomes impossible to position to the position. Therefore, there is a problem that the article cannot be stored in the container and the article cannot be taken out from the container, or the article is taken out from the container, and the article is damaged. In particular, when the container is empty, the mass is light, so that the slipping property is deteriorated and it is difficult to perform automatic centripetalization. In addition, the basic dimensions of these positioning pins and container positioning parts have been standardized, but the fine shapes and materials differ from manufacturer to manufacturer, and these points also cause problems when placing containers on processing equipment. It was.

Conventionally, evaluation to solve such problems has been made by preparing a test piece made of the material of the positioning part and the material of the positioning pin and examining the coefficient of friction by a measurement method prescribed by JIS, It was done by checking the amount of wear.
Japanese Patent Laid-Open No. 11-168136 SEMI E57 PROMISIONAL SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300-mmWAFER CARRIERS, “SEMI E57 (with PIC revisions)”, October 16, 1997. 1-7

  However, in the actual evaluation, only the sensory slipperiness evaluation is performed, in which the container is intentionally displaced on the positioning pin and then checked whether or not it slides to the automatic centripetal position without any problem. I didn't come. Therefore, in the conventional method, the slidability of the positioning pin and the positioning groove deteriorated due to the evaluation of the positioning pin of the new container and the new processing apparatus, the defect during the manufacture of the container and the processing apparatus, or the wear during use. It has been difficult to correctly determine whether the container or the processing apparatus is acceptable.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a slipperiness test apparatus and a slipperiness test method capable of correctly evaluating slipperiness of containers and processing apparatuses.

In order to achieve the above object, the present invention adopts the following configuration.
(1) A slip property testing apparatus for evaluating the slip property between a positioning groove and a positioning pin in a container having three positioning V-shaped or U-shaped positioning grooves on which a positioning pin is fitted. ,
A measuring pin that fits in any of the three positioning grooves and is movable in the width direction and the vertical direction of the positioning groove;
A moving part for moving the measuring pin in the width direction and the vertical direction of the positioning groove into which the measuring pin fits;
A slipping property testing apparatus comprising: a measuring unit that measures a maximum load applied to the measuring pin when the top of the measuring pin is shifted from the deepest part of the positioning groove and fitted into the positioning groove.

(2) The slip test apparatus according to (1), wherein the measurement pin is replaceable.
(3) The slip test apparatus according to (1) or (2), wherein the measurement pin is elastically supported in a vertical direction.
(4) The measurement pin is restricted from moving in the width direction of the positioning groove before the container is placed, and is movable in the width direction of the positioning groove after the container is placed. The slip test apparatus according to any one of (1) to (3).
(5) The slip test apparatus according to any one of (1) to (4), wherein a confirmation unit for confirming that the container is placed horizontally is provided.

(6) A slip property testing method for evaluating the slip property between the positioning groove and the positioning pin in a container having three positioning V-shaped or U-shaped positioning grooves for fitting the positioning pins on the bottom surface. ,
A step of fitting a measurement pin into one of the three positioning grooves and placing the container;
Moving the measurement pin in the width direction and the vertical direction of the positioning groove so as to be away from the positioning groove into which the measurement pin fits;
Moving the measurement pin in a vertical direction so as to contact the positioning groove;
And a step of measuring a maximum load until the measuring pin comes into contact with the positioning groove and starts moving in the width direction of the positioning groove.
(7) The slip test method according to (6), further comprising a confirmation step of confirming that the container is placed horizontally.
(8) The slip test method according to (6) or (7), wherein the measurement pin is attached according to the container.

  Here, as a container to be tested in the present invention, an article is housed in the container, and used for transportation, positioning, storage, etc., and positioning having a V-shaped or U-shaped positioning groove at the bottom. The container provided so that a part may become a substantially Y shape in three places is mentioned. Moreover, the container which formed the positioning part integrally in the container main body, the container which attached the positioning part as a separate body to the container main body, and both of them are the test objects. The material of the positioning part of the container to be tested is made of thermoplastic resin such as polybutylene terephthalate, polyethylene terephthalate, fluorine-containing resin, polyetheretherketone, polyetherimide, and also increases rigidity and conductivity. Therefore, those obtained by adding carbon fibers, glass fibers, carbon powder, carbon nanotubes, etc. to these thermoplastic resins can be mentioned. The positioning portion has a rectangular shape in plan view, and has a positioning groove in the longitudinal direction formed so that inclined surfaces having a V-shaped section or a U-shaped section face each other. The deepest part of the positioning groove is provided at the center of the positioning groove. The inclined surface of the positioning groove serves as a guide that guides the top of the positioning pin to the deepest portion of the positioning groove even when the container is displaced and placed on the positioning pin of the processing apparatus.

  The container to be tested may be either a sealed container that can be sealed by the container body and the lid, or an unsealed container such as a cassette or tray, and a flange gripped by the transfer robot is detachable on the upper surface of the container. It may be a container attached to the container. Further, the presence or absence of transparency of the container body and the lid is not particularly limited. The presence or absence of the locking mechanism is not particularly limited. Examples of the material of the container body and the lid include thermoplastic resins such as polycarbonate, cycloolefin polymer, and polyetherimide, and those obtained by blending these resins with additives that impart conductivity and ultraviolet absorption. Specific examples of the container include a shipping box such as a front open box type corresponding to a 300 mm wafer, a FOUP type, a FOSB type, and a top open box type corresponding to a 200 mm wafer. The container may be of a type that directly stores an article, or may be a type that stores an article in a fixed carrier and then stores the fixed carrier in a container, both of which are slippery according to the present invention. This is the container for the test.

  Articles stored in the container to be tested include semiconductor wafers (200 mm wafers, 300 mm wafers, 450 mm wafers, etc.), glass substrates, photomasks, aluminum disks, precision media that do not like contamination such as recording media substrates, and the like. Examples include parts that are transported in a factory by an automatic machine and that need to be accurately positioned and placed at a predetermined position such as a processing apparatus, and parts that require accurate removal. Moreover, in the case of a test, the goods may be accommodated in the container and may not be accommodated, and are selected as appropriate.

  According to the slip property test method using the slip property test apparatus of the present invention, it is possible to quantitatively confirm the slip property when positioning the container and the processing device. This can be performed correctly, and an index for improving the slipperiness of the positioning groove of the container and the positioning pin of the processing apparatus can be obtained. Further, regarding the slipping property at the time of positioning, it becomes possible to correctly discriminate the container or positioning pin in which some trouble has occurred compared with the standard product, so that defective products can be appropriately excluded.

Hereinafter, as an example of a container to be tested, a shipping box (hereinafter simply referred to as a container) containing a 300 mm wafer having a V-shaped positioning groove at a predetermined position at the bottom thereof will be described with reference to the drawings. Next, an embodiment of a slip test apparatus for evaluating the slip of a positioning groove of a container placed on the positioning pin of the present invention will be described.
As shown in FIGS. 1 to 4, the slip test apparatus 1 according to the embodiment of the present invention is provided with a positioning portion 23 having three positioning V-shaped positioning grooves 24 into which positioning pins 6 are fitted on the bottom surface. This is a slip test apparatus for evaluating the slip between the positioning groove 24 and the positioning pin 6 in the container 22. The slipperiness test apparatus 1 is fitted into any one of the three positioning grooves 24 and is movable in the width direction (X direction) and the vertical direction (Z direction) of the positioning groove 24, and the measurement pin 7 is moved in the width direction (X direction) and the vertical direction (Z direction) of the positioning groove 24 into which the measurement pin 7 is fitted. Further, as shown in FIG. 3, the slipperiness test apparatus 1 has a maximum load applied to the measuring pin 7 when the top of the measuring pin 7 is shifted from the deepest portion 25 of the positioning groove 24 and is fitted in the positioning groove 24 ( And a measuring unit 16 for measuring N).

In addition, the slip test apparatus 1 is provided with a displacement sensor 17 on the mounting portion 3 for confirming that the container 22 is placed horizontally. As shown in FIG. 4, the container 22 to be tested is provided with a sensing pad 28 corresponding to the displacement sensor 17 at the bottom. Further, the moving part 4 is provided with a measuring pin slip discrimination sensor 18 capable of detecting that the measuring pin 7 has reached the deepest part 25 of the positioning groove 24.
Here, “the top of the measuring pin 7 is shifted from the deepest portion 25 of the positioning groove 24 and fitted into the positioning groove 24” is described in detail in steps S4, S5, S8 of the slip test method described later. As described above, the measurement pin 7 is made to come into contact with the inclined surface 26 of the positioning groove 24.

  Further, in this embodiment, as shown in FIG. 1 or FIG. 2, positioning pins 6 for determining a position for placing the container 22 at a position defined by the SEMI standard E57 on the mounting portion 3 supported by the gantry 2. Three are fixed. The positioning pin 6 has a cylindrical shape, and the upper end of the positioning pin 6 is R-processed in the size and shape defined by SEMI standard E57. Examples of the material of the positioning pin 6 include SUS and aluminum. The surface of the positioning pin 6 may be subjected to various surface treatments such as chrome plating, alumite treatment, and nitrogen treatment as necessary. The upper end of the measurement pin 7 is also R-processed in the size and shape defined by the SEMI standard E57.

  As shown in FIG. 2, the moving unit 4 is provided with a linear slide mechanism 9 that can move in the width direction of the positioning groove and a linear slide mechanism 10 that can move in the vertical direction as shown in FIG. Yes. The linear slide mechanism 9 is provided with a positioning groove width direction moving dial 11 for adjusting the movement in the width direction of the positioning groove into which the measurement pin 7 of the linear slide mechanism 9 is fitted. The linear slide mechanism 10 is provided with a vertical movement dial 12 that adjusts the vertical movement of the linear slide mechanism 10, and a measuring unit 16 is fixed. As shown in FIGS. 1 and 3, the measuring unit 16 is connected to a display box 19 for displaying the load measured by the measuring unit 16 on the display unit 20 and printing on the printing unit 21 through a signal line 19a. ing. The measuring unit 16 is not particularly limited as long as the load can be measured, and examples thereof include a load cell.

  As shown in FIGS. 2 and 3, the measurement pin 7 is fixed on the support portion 8. As shown in FIG. 3, the support portion 8 is elastically supported in the vertical direction by the measurement portion 16 via a spring 13 (elastic body). Further, the measurement pin 7 is set so that the upper end thereof is about 1 to 10 mm above the load measurement position in a state where the container 22 is not placed. In such a configuration, when the container 22 is placed on the measurement pin 7, the spring 13 is compressed, and the measurement pin 7 is slightly lowered and positioned at the load measurement position of the measurement pin 7. Thus, by accurately positioning the load measurement position of the measurement pin 7, it is possible to accurately align the calibration pin 7 with the deepest portion 25 of the positioning groove at this position, In the later-described “step of moving the measuring pin in the width direction and the vertical direction of the positioning groove so as to move away from the positioning groove in which the measuring pin is fitted (step S4)”, the movement distance is accurately set. Can be adjusted.

  The support portion 8 is connected to the linear slide mechanism 10 so as to be movable in the width direction of the positioning groove into which the measurement pin 7 is fitted. However, the movement of the support groove 8 in the width direction of the positioning groove into which the measurement pin 7 is fitted is not described later except when the measurement pin 7 is loaded and the measurement pin 7 is lowered in the vertical direction. It is regulated by means (bearing 14 and position regulating V-groove 15).

As shown in FIG. 2, a bearing 14 is provided at the end of the support portion 8. Further, the linear slide mechanism 10 is provided with a position regulating V-groove 15 for fitting the bearing 14. The bearing 14 is connected to the support portion 8 by a cam mechanism (not shown) so as to be separated from the position regulating V-groove 15 as the support portion 8 is lowered. The bearing 14 and the position restriction V-groove 15 constitute a restriction means for restricting the movement of the support portion 8 in the width direction of the positioning groove into which the measurement pin 7 is fitted.
With this configuration, before the container 22 is placed, the support portion 8 has the bearing 14 fitted in the position regulating V groove 15 provided in the linear slide mechanism 10 so that the measurement pin 7 is fitted. Movement in the width direction is restricted, and a cam mechanism (not shown) works by a load when the container 22 is placed on the measurement pin 7, so that the bearing 14 is separated from the position restriction V groove 15, and the measurement pin 7 The restriction of the movement in the width direction of the positioning groove into which the pin is fitted is released, and the positioning groove can be moved in the width direction of the positioning groove in which the measurement pin 7 is fitted. That is, the measurement pin 7 fixed to the support portion 8 is measured before the container 22 is placed, and the movement of the positioning groove in which the measurement pin 7 is fitted is restricted in the width direction. The positioning pin can be moved in the width direction of the positioning groove. In this way, by restricting the movement of the measurement pin 7, it is possible to prevent the measurement pin 7 from inadvertently moving when the container 22 is placed on the measurement pin 7. The slip property test can be smoothly advanced, and the slip property can be more accurately evaluated.

  The displacement sensor 17 and the sensing pad 28 constitute a confirmation unit for confirming the inclination of the container 22, and when the inclination of the container 22 exceeds a predetermined range during the slip test, a notification is given by voice or a display panel. By doing so, the container 22 is provided in order to accurately take measures such as reloading the container 22. Examples of the displacement sensor 17 include a contact type and a photoelectric type. As the sensing pad 28, for example, it is integrally formed on the outer bottom surface of the container, is a protrusion provided as a separate member, or is a separate member integrally formed on the bottom plate attached to the bottom of the container It is a projection part provided as.

  The measurement pin slip discrimination sensor 18 is provided for confirming whether or not the measurement pin 7 has slid toward the deepest portion 25 of the positioning groove 24 of the container 22. The measuring unit 16 measures the load applied to 7. As a result, the load measurement is automatically stopped, and the measured load value is displayed or printed. Alternatively, when the moving unit 4 is automatically controlled, it is possible to perform control such as remeasurement. Examples of the measurement pin slip detection sensor 18 include a contact displacement sensor, a magnetic linear scale, and a photoelectric sensor.

Next, an example of the slip test method of the present invention shown in FIG. 6 will be described.
<S1: Step of fitting a measuring pin in one of the three positioning grooves and placing the container>
First, as shown in FIG. 4, the container 22 is placed on the measurement pin 7 of the slipperiness test apparatus 1. As a result, a load from the container 22 is applied to the measurement pin 7, the spring 13 (FIG. 3) is compressed, the measurement pin 7 and the support portion 8 are slightly lowered (about 5 mm), and the measurement pin 7 is loaded. It becomes the measurement height position and fits in the positioning groove 24. At this time, a cam mechanism (not shown) is interlocked with the lowering of the support portion 8, the support portion 8 moves about 3 to 5 mm to the right side of the drawing, and the bearing 14 (FIG. 2) is moved to the position regulating V groove 15 (FIG. 2). The support portion 8 and the measurement pin 7 are in a state of being movable in the width direction of the positioning groove 24 into which the measurement pin 7 is fitted. The container 22 is placed on the measurement pin 7 so that the positioning pins 6 fit into the three positioning grooves 24 of the container 22 one by one.

<S2: Confirmation process for confirming that the container is placed horizontally>
Next, it is confirmed that the container 22 is horizontally placed in a state where the container 22 is normally seated on the positioning pin 6 (the positioning pin 6 abuts on the deepest portions 25 of the three positioning grooves 24). This can be done depending on whether or not the sensing pad 28 in the state can be detected by the displacement sensor 17. The position information of the sensing pad 28 in a normally seated state is set as a zero point, and the seating abnormality of the container 22 being measured can be detected. For example, when the container 22 is tilted from the horizontal and the sensing pad 28 changes 0.1 mm or more from the reference value (the above-mentioned zero point), the displacement sensor 17 is set so that it cannot be detected. It can be considered abnormal seating. If abnormal seating of the container 22 is recognized, the process proceeds to step S3. If abnormal seating of the container 22 is not recognized, the process proceeds to step S4. Accordingly, it is possible to prevent a trouble in which the load on one side of the container 22 is uneven due to the container 22 being placed obliquely, and a more accurate evaluation of slipperiness can be performed. Further, the inclination confirmed by the confirmation unit may be notified by any method such as voice, display on a display panel, and printing.

<S3: Step of reloading the container>
The container whose inclination is confirmed in the step S2 is put on the slipperiness test apparatus again. After step S3, it is confirmed again in step S2 that the container 22 is placed horizontally.

<S4: A step of moving the measurement pin in the width direction and the vertical direction of the positioning groove so as to be away from the positioning groove into which the measurement pin is fitted>
The measuring pin 7 fitted in the positioning groove 24 is moved in the width direction and the vertical direction of the positioning groove 24 so as to be separated from the positioning groove 24. More specifically, as shown in FIG. 5A, in the vertical direction, the vertical movement dial 12 is manually operated to lower the linear slide mechanism 10 so that the top of the measurement pin 7 contacts the positioning portion 23. The measuring pin 7 is moved about 5 mm from the lower end of the positioning portion 23 to the position where it is not. Further, in the width direction of the positioning groove 24 into which the measurement pin 7 is fitted, the positioning groove width direction moving dial 11 is manually operated to move the linear slide mechanism 9 so that the top portion of the measurement pin 7 is moved to the positioning groove. It is shifted from the deepest portion 25 of 24 in the width direction of the positioning groove 24, preferably about 1 to 10 mm, more preferably about 2 to 8 mm.

<S5: Step of moving the measurement pin in the vertical direction so as to contact the positioning groove>
As shown in FIG. 5B, the linear slide mechanism 10 (FIG. 3) is operated by operating the vertical movement dial 12 (FIG. 3) so that the measurement pin 7 contacts the inclined surface 26 of the positioning groove 24. Is moved vertically.

<S6: A step of measuring the maximum load until the measuring pin is brought into contact with the positioning groove and moving in the width direction of the positioning groove into which the measuring pin is fitted>
As shown in FIG. 5C, the measurement pin 7 is brought into contact with the inclined surface 26 and further pushed up in the vertical direction. At this time, when the measuring pin 7 is fitted into the positioning groove 24, the maximum load (N) until the measuring pin 7 starts to move in the width direction of the positioning groove into which the measuring pin 7 is fitted is measured. Measurement is performed by the unit 16 (FIG. 3).
If the sliding resistance between the measuring pin 7 and the inclined surface 26 is large and does not move in the width direction when pushed up in the vertical direction, the container 22 is pushed up by the measuring pin 7 but is displaced. The sensor 17 can detect the abnormality.

<S7: Confirmation process for confirming that the container is placed horizontally>
Whether the container 22 is excessively inclined with respect to the horizontal direction is confirmed by the displacement sensor 17 and the sensing pad 28, and if an abnormal seating of the container 22 is confirmed, the process proceeds to step S8. When the inclination of the container 22 is within the allowable range, that is, when the abnormal seating of the container 22 is not recognized, the measurement signal of the maximum load (N) measured in step S6 is sent to the display box 19 (FIG. 4) through the signal line 19a. The obtained value is displayed on the display unit 20 of the display box 19 or printed by the printing unit 21. As a result, the measuring pin 7 is shifted too much in the width direction of the positioning groove 24 in which the measuring pin 7 is fitted, and the trouble that the container 22 is not in contact with the inclined surface 26 and the container 22 is tilted from the horizontal state is obviated. Can be prevented. And slip property can be measured more correctly. In addition, it is preferable to detect the seating abnormality of the container 22 based on whether or not the sensing pad 28 has changed by 0.1 mm or more from the reference value, as described above. Further, the inclination confirmed by the confirmation unit may be notified by any method such as voice, display on a display panel, and printing.

<S8: Step of resetting the movement distance in the width direction of the positioning groove into which the measurement pin is fitted>
The movement distance in the width direction of the positioning groove 24 in which the measurement pin 7 of the measurement pin 7 is fitted is reset. Thereafter, step S5 is performed again.

  By using the slip test apparatus of the present invention described above, it is possible to perform a test that can quantitatively confirm the slip performance when positioning the container and the processing apparatus, so that the container and the processing apparatus can be evaluated correctly. It is possible to obtain an index for improving the slipperiness of the positioning groove of the container and the positioning pin of the processing apparatus. Further, regarding the slipping property at the time of positioning, it becomes possible to correctly discriminate the container or positioning pin in which some trouble has occurred compared with the standard product, so that defective products can be appropriately excluded.

  According to the slip property test method of the present invention using this slip property test apparatus, the slip property at the time of positioning the container and the processing device can be quantitatively confirmed, so that the container and the processing device can be evaluated correctly. It is possible to obtain an index for improving the slipperiness of the positioning groove of the container and the positioning pin of the processing apparatus. Further, regarding the slipping property at the time of positioning, it becomes possible to correctly discriminate the container or positioning pin in which some trouble has occurred compared with the standard product, so that defective products can be appropriately excluded.

  In the slip test apparatus 1, the displacement sensor 17 and the sensing pad 28 are provided so that it can be confirmed whether or not the container 22 is excessively inclined with respect to the horizontal direction. Thereby, when the inclination of the container 22 is confirmed, a trouble that a load is applied to one side of the container 22 due to the container 22 being placed obliquely by placing the container again, or the measurement pin 7 is removed. It is possible to prevent the trouble that the container 22 is tilted from the horizontal state because it is shifted too much in the width direction of the positioning groove into which the measurement pin 7 is fitted and does not contact the inclined surface 26 or the inclined surface 27 well. Therefore, more accurate evaluation of slipperiness can be performed. In addition, although the displacement sensor 17 is provided in the mounting part 3 in this embodiment, it may be provided in another position.

  The measuring pin 7 is preferably exchangeable. For example, by exchanging with various materials, surface treatments, and spare pins processed into different shapes, it is possible to easily check the slipperiness between various processing apparatuses and containers, and to evaluate them correctly. Further, by attaching the measurement pin 7 according to the container 22, even when the shape and material of the positioning part 23 of the container 22 are changed, the slidability with various positioning pins can be correctly evaluated, and the shape and material of the positioning part The most suitable positioning pin can be selected.

  Further, in the slipperiness test apparatus 1, the positioning groove width direction moving dial 11 and the vertical direction moving dial 12 are manually operated, but not limited to this, it is mechanically moved at a constant speed by a rack and pinion, a motor or the like. It can also be a mechanism.

Next, a slip property test method using the slip property test apparatus 1 will be described in more detail using examples.
As the containers to be tested, the following four kinds of containers used as 300 mm wafer shipping boxes were prepared.
Container 1. PC shipping box, slidability modified PC is used for positioning part.
Container 2. Uses a PC shipping box and a PC with a surface that has been wrinkled.
Container 3. PC shipping box, PBT used for positioning part.
Container 4. PC shipping box, PC is used for the positioning part.
PC: Polycarbonate, PBT: Polybutylene terephthalate.

The following two types of pins were prepared as measurement pins.
Measuring pins SUS304 whose surface is electroless nickel plated.
Measuring pin 2. SUS304 without surface treatment.
SUS: Austenitic stainless steel.

  Each of the above four types of shipping boxes is subjected to a slip test using the above-mentioned two types of measuring pins to measure the maximum load, and the positioning portion and the measuring pin are caught when the container is placed on the measuring pins. The presence or absence of the condition was confirmed with a measuring pin slip sensor. A contact-type displacement sensor (model: D5VA, manufactured by OMRON Corporation) is used as a measuring pin slip discrimination sensor, and when there is a fluctuation of 0.1 mm or more from the reference zero point, “Yes”, 0.1 mm It was adjusted to be “none” when it was less than, and evaluated. The results are shown in Table 1.

  When the maximum load of the positioning part of the container exceeded 9N, troubles such as being caught in the middle of the deepest part of the positioning part occurred when the container was placed on the measurement pin. For this reason, when the slipperiness of the positioning part of a container exists in the range of 2N or more and 9N or less, it was confirmed that slipperiness is favorable. In this way, it was confirmed that the slipperiness of the positioning groove and the positioning pin of each container can be quantitatively measured, and correct evaluation of the slipperiness can be performed.

It is a front view showing one example of an embodiment of a slipperiness test device concerning the present invention. It is a top view which shows one example of embodiment of the slipperiness test apparatus which concerns on this invention. It is a side view which shows one embodiment of the slip test apparatus which concerns on this invention. It is the front view which mounted the container for a test on one example of a slip test device concerning the present invention. (A) is a partial enlarged view of the measurement pin and the periphery of the positioning portion showing a state where the measurement pin is moved by a predetermined distance from the positioning portion, and (b) is a state where the measurement pin is moved in the vertical direction. FIG. 4C is a partially enlarged view of the measurement pin and the periphery of the positioning portion shown in FIG. 5C, showing a state in which the measurement pin is moved by the load in the width direction and the vertical direction to reach the deepest portion. It is the elements on larger scale around a measurement pin and a positioning part. It is a flowchart which shows an example of the slip test method of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Sliding test device 4 Moving part 6 Positioning pin 7 Measuring pin 16 Measuring part 17 Displacement sensor (confirmation part)
22 Container 24 Positioning groove 25 Deepest part 28 Sensing pad (confirmation part)

Claims (8)

A slipperiness test apparatus for evaluating the slipperiness between the positioning groove and the positioning pin in a container having three positioning V-shaped or U-shaped positioning grooves for fitting the positioning pins on the bottom surface,
A measuring pin that fits in any of the three positioning grooves and is movable in the width direction and the vertical direction of the positioning groove;
A moving part for moving the measuring pin in the width direction and the vertical direction of the positioning groove into which the measuring pin fits;
A slipping property testing apparatus comprising: a measuring unit that measures a maximum load applied to the measuring pin when the top of the measuring pin is shifted from the deepest part of the positioning groove and fitted into the positioning groove.   The slip test apparatus according to claim 1, wherein the measurement pin is exchangeable.   The slip test apparatus according to claim 1 or 2, wherein the measuring pin is elastically supported in a vertical direction.   The measuring pin is restricted from moving in the width direction of the positioning groove before the container is placed, and is movable in the width direction of the positioning groove after the container is placed. The slipperiness test apparatus according to any one of claims 1 to 3.   The slipperiness test apparatus according to any one of claims 1 to 4, further comprising a confirmation unit that confirms that the container is placed horizontally. A slip property test method for evaluating the slip property between a positioning groove and the positioning pin in a container provided with three positioning V-shaped or U-shaped positioning grooves on a bottom surface for fitting a positioning pin,
A step of fitting a measurement pin into one of the three positioning grooves and placing the container;
Moving the measurement pin in the width direction and the vertical direction of the positioning groove so as to be away from the positioning groove into which the measurement pin fits;
Moving the measurement pin in a vertical direction so as to contact the positioning groove;
And a step of measuring a maximum load until the measuring pin comes into contact with the positioning groove and starts moving in the width direction of the positioning groove.   The slip test method according to claim 6, further comprising a confirmation step of confirming that the container is placed horizontally.   The slip test method according to claim 6 or 7, wherein the measurement pin is attached according to the container.

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