JP2009236759A - Test equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide test equipment which can input test signal to both first and second terminals of a device under test, further can prevent mixing of frequency component in signals output from plural devices under test so as to properly test these plural devices under test. <P>SOLUTION: This test equipment is characterized by including the plural devices under test (121-123) equipped with first and second terminals, plural first band-pass filters (111-113) connected to the first terminals of the plural devices under test, and plural second band-pass filters (131-133) connected to the second terminals of the plural devices under test, where the first band-pass filters, the plural devices under test and series-connected circuits of the first band-pass filters are multi-combined to be parallely-connected. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a test apparatus.

  FIG. 5 is a diagram illustrating a configuration example of a test apparatus (see, for example, Patent Document 1 below). The test apparatus performs tests of DUT (Device Under Test) 505 to 507. The signal generator 501 outputs a test signal having first to third frequency components to the bandpass filters 502 to 504. The band pass filter 502 passes only the test signal of the first frequency component and outputs it to the first DUT 505. The first DUT 505 receives the test signal of the first frequency component and outputs a signal. The band pass filter 503 passes only the test signal of the second frequency component and outputs it to the second DUT 506. The second DUT 506 receives the second frequency component test signal and outputs a signal. The band pass filter 504 passes only the test signal of the third frequency component and outputs it to the third DUT 507. The third DUT 507 receives the test signal of the third frequency component and outputs a signal. The adder 508 adds the output signals from the DUTs 505 to 507 and outputs the result. The digitizer 509 converts the output signal of the adder 508 from analog to digital and outputs it to the FFT processing unit 510. The FFT processing unit 510 performs a fast Fourier transform (FFT) on the digital signal and outputs a frequency component signal. The first frequency component signal is the output signal of the first DUT 505, the second frequency component signal is the output signal of the second DUT 506, and the third frequency component signal is the output of the third DUT 507. Signal. Based on the output signal of the FFT processing unit 510, the test results of the DUTs 505 to 507 can be determined.

JP 2000-329826 A

  The above test apparatus inputs test signals to the input terminals of the DUTs 505 to 507 and evaluates the output signals of the output terminals of the DUTs 505 to 507. However, a test in which a test signal is input to the output terminals of the DUTs 505 to 507 cannot be performed. That is, the above test apparatus can perform only one-way tests of DUTs 505 to 507.

  Moreover, DUT505-507 may generate a harmonic with respect to an input signal. Even if test signals having the first to third frequency components are input to the input terminals of the DUTs 505 to 507, only the test signals having the first to third frequency components are output from the output terminals of the DUTs 505 to 507, respectively. Not exclusively.

  For example, it is assumed that the second frequency component is twice the frequency of the first frequency component. The DUT 505 may generate double harmonics due to distortion characteristics. The double harmonic is the same frequency as the second frequency component. As a result, the second frequency component output from the adder 508 is a signal obtained by adding both the output signal from the first DUT 505 and the output signal from the second DUT 506. As a result, the output signal of the second DUT 506 cannot be correctly evaluated.

  An object of the present invention is to provide a test apparatus capable of performing a test by inputting a test signal to both the first terminal (input terminal) and the second terminal (output terminal) of the device under test. .

  Another object of the present invention is to provide a test apparatus capable of preventing a frequency component of output signals of a plurality of devices under test from being mixed and correctly testing the plurality of devices under test.

  The test apparatus of the present invention includes a plurality of devices under test having a first terminal and a second terminal, a plurality of first bandpass filters connected to the first terminals of the plurality of devices under test, A plurality of second band-pass filters connected to second terminals of the plurality of devices under test, wherein the first band-pass filter, the device under test and the first band-pass filter are connected in series. A plurality of connection circuits are connected in parallel.

  A test can be performed by inputting test signals to both the first terminal and the second terminal of the device under test. Further, it is possible to prevent the frequency components of the output signals of the plurality of devices under test from being mixed and to correctly test the plurality of devices under test.

(First embodiment)
FIG. 1 is a diagram showing a configuration example of a test apparatus according to the first embodiment of the present invention. The semiconductor wafer 101 includes three devices under test (DUT) 121 to 123 and band pass filters (BPF) 111 to 113 and 131 to 133 for testing the devices under test 121 to 123. Hereinafter, the device under test is referred to as a DUT. The test apparatus is an apparatus for testing the DUTs 121 to 123. The DUTs 121 to 123 are test target devices (semiconductor circuits). For example, the first DUT 121 is a transistor, the second DUT 122 is a resistor, and the third DUT 123 is a capacitor. The bandpass filters 111 to 113 and 131 to 133 are filters that can pass signals in both directions.

  The network analyzer 102 includes a first port P1, a second port P2, a signal generator 103, an FFT processing unit 104, and a digitizer 105. The signal generator 103 can output test signals having first to third frequency components. The digitizer 105 can convert an analog signal into a digital signal. The FFT processing unit 104 can perform a fast Fourier transform (FFT) on the digital signal and output a frequency component signal.

  The first band pass filter 111 is connected between the first port P 1 of the network analyzer 102 and the input terminal (first terminal) of the first DUT 121. The second band pass filter 131 is connected between the output terminal (second terminal) of the first DUT 121 and the second port P 2 of the network analyzer 102. The bandpass filters 111 and 131 pass only signals in the first frequency band. In the first frequency band, the center frequency is the first frequency (for example, 1 MHz), and the pass frequency band is, for example, 1 MHz.

  The first band pass filter 112 is connected between the first port P 1 of the network analyzer 102 and the input terminal (first terminal) of the second DUT 122. The second band pass filter 132 is connected between the output terminal (second terminal) of the second DUT 122 and the second port P 2 of the network analyzer 102. The bandpass filters 112 and 132 pass only the signal of the second frequency band. In the second frequency band, the center frequency is the second frequency (for example, 2 MHz), and the passing frequency band is, for example, 1 MHz.

  The first band pass filter 113 is connected between the first port P 1 of the network analyzer 102 and the input terminal (first terminal) of the third DUT 123. The second band pass filter 133 is connected between the output terminal (second terminal) of the third DUT 123 and the second port P 2 of the network analyzer 102. The bandpass filters 113 and 133 pass only signals in the third frequency band. In the third frequency band, the center frequency is the third frequency (for example, 3 MHz), and the pass frequency band is, for example, 1 MHz.

  Direct connection circuit of first band pass filter 111, DUT 121, and second band pass filter 131, direct connection circuit of first band pass filter 112, DUT 122, second band pass filter 132, and first band pass filter 113, the DUT 123, and the second band pass filter 133 are directly connected in parallel.

  The plurality of first band pass filters 111 to 113 have different pass frequency bands, and the plurality of second band pass filters 131 to 133 have different pass frequency bands. The first band pass filters 111 to 113 and the second band pass filters 131 to 133 connected to the same DUT 121 to 123 have the same pass frequency band.

  Next, an S parameter test method for the DUTs 121 to 123 on the semiconductor wafer 101 will be described. Hereinafter, a test method for outputting the test input wave signal A1 to the input terminals of the DUTs 121 to 123 will be described.

  First, the signal generator 103 in the network analyzer 102 outputs a test input wave signal A1 having a first frequency (for example, 1 MHz) from the port P1 to the bandpass filters 111 to 113. The band-pass filter 111 passes the test input wave signal A1 having the first frequency and outputs it to the first DUT 121. On the other hand, the band pass filters 112 and 113 block the test input wave signal A1 having the first frequency. The test input wave signal A1 having the first frequency does not reach the input terminals of the DUTs 122 and 123. The first DUT 121 receives the test input wave signal A1 having the first frequency and outputs an output signal to the bandpass filter 131. The bandpass filter 131 passes only the signal of the first frequency band (center frequency is 1 MHz, for example) among the output signals of the first DUT 121, and transmits the transmitted wave signal A3 to the second port P2 of the network analyzer 102. Output. In addition, the first DUT 121 outputs the reflected wave signal A2 in the first frequency band (center frequency is 1 MHz, for example) to the first port P1 of the network analyzer 102 via the bandpass filter 111. The digitizer 105 converts the reflected wave signal A2 and the transmitted wave signal A3 from analog to digital. The FFT processing unit 104 performs fast Fourier transform on the digital signals of the reflected wave signal A2 and the transmitted wave signal A3, and outputs a frequency component signal. The magnitudes of the first frequency components of the reflected wave signal A2 and the transmitted wave signal A3 are recorded as the magnitudes of the reflected wave signal A2 and the transmitted wave signal A3 as the measurement results of the first DUT 121, respectively.

  Next, the signal generator 103 in the network analyzer 102 outputs a test input wave signal A1 having a second frequency (for example, 2 MHz) from the port P1 to the bandpass filters 111 to 113. The band-pass filter 112 passes the test input wave signal A1 having the second frequency and outputs it to the second DUT 122. On the other hand, the bandpass filters 111 and 113 block the test input wave signal A1 having the second frequency. The test input wave signal A1 having the second frequency does not reach the input terminals of the DUTs 121 and 123. The second DUT 122 receives the test input wave signal A 1 having the second frequency and outputs an output signal to the band pass filter 132. The band-pass filter 132 passes only the signal of the second frequency band (center frequency is 2 MHz, for example) among the output signal of the second DUT 122, and transmits the transmitted wave signal A3 to the second port P2 of the network analyzer 102. Output. The second DUT 122 outputs the reflected wave signal A2 in the second frequency band (center frequency is, for example, 2 MHz) to the first port P1 of the network analyzer 102 via the bandpass filter 112. The digitizer 105 converts the reflected wave signal A2 and the transmitted wave signal A3 from analog to digital. The FFT processing unit 104 performs fast Fourier transform on the digital signals of the reflected wave signal A2 and the transmitted wave signal A3, and outputs a frequency component signal. The magnitudes of the second frequency components of the reflected wave signal A2 and the transmitted wave signal A3 are recorded as the magnitudes of the reflected wave signal A2 and the transmitted wave signal A3 as the measurement results of the second DUT 122, respectively.

  Next, the signal generator 103 in the network analyzer 102 outputs a test input wave signal A1 having a third frequency (for example, 3 MHz) from the port P1 to the bandpass filters 111 to 113. The band-pass filter 113 passes the test input wave signal A1 having the third frequency and outputs it to the third DUT 123. On the other hand, the band pass filters 111 and 112 block the test input wave signal A1 having the third frequency. The test input wave signal A1 having the third frequency does not reach the input terminals of the DUTs 121 and 122. The third DUT 123 receives the test input wave signal A1 having the third frequency, and outputs an output signal to the bandpass filter 133. The bandpass filter 133 passes only the signal of the third frequency band (center frequency is 3 MHz, for example) among the output signals of the third DUT 123, and transmits the transmitted wave signal A3 to the second port P2 of the network analyzer 102. Output. The third DUT 123 outputs the reflected wave signal A2 in the third frequency band (center frequency is 3 MHz, for example) to the first port P1 of the network analyzer 102 via the bandpass filter 113. The digitizer 105 converts the reflected wave signal A2 and the transmitted wave signal A3 from analog to digital. The FFT processing unit 104 performs fast Fourier transform on the digital signals of the reflected wave signal A2 and the transmitted wave signal A3, and outputs a frequency component signal. The magnitudes of the third frequency components of the reflected wave signal A2 and the transmitted wave signal A3 are recorded as the magnitudes of the reflected wave signal A2 and the transmitted wave signal A3 as the measurement results of the third DUT 123, respectively.

  Next, a test method for outputting the test input wave signal B1 to the output terminals of the DUTs 121 to 123 will be described.

  First, the signal generator 103 in the network analyzer 102 outputs a test input wave signal B1 having a first frequency (for example, 1 MHz) from the port P2 to the bandpass filters 131 to 133. The band-pass filter 131 passes the test input wave signal B 1 having the first frequency and outputs it to the first DUT 121. On the other hand, the band pass filters 132 and 133 block the test input wave signal B1 having the first frequency. The test input wave signal B1 having the first frequency does not reach the output terminals of the DUTs 122 and 123. The first DUT 121 receives the test input wave signal B 1 having the first frequency and outputs a signal to the band pass filter 111. The band pass filter 111 passes only the signal of the first frequency band (center frequency is 1 MHz, for example) of the output signal of the first DUT 121, and transmits the transmitted wave signal B3 to the first port P1 of the network analyzer 102. Output. Further, the first DUT 121 outputs the reflected wave signal B2 in the first frequency band (center frequency is 1 MHz, for example) to the second port P2 of the network analyzer 102 via the bandpass filter 131. The digitizer 105 converts the reflected wave signal B2 and the transmitted wave signal B3 from analog to digital. The FFT processing unit 104 performs fast Fourier transform on the digital signals of the reflected wave signal B2 and the transmitted wave signal B3, and outputs a frequency component signal. The magnitudes of the first frequency components of the reflected wave signal B2 and the transmitted wave signal B3 are recorded as the magnitudes of the reflected wave signal B2 and the transmitted wave signal B3 as the measurement results of the first DUT 121, respectively.

  Next, the signal generator 103 in the network analyzer 102 outputs a test input wave signal B1 having a second frequency (for example, 2 MHz) from the port P2 to the bandpass filters 131-133. The band pass filter 132 passes the test input wave signal B 1 having the second frequency and outputs it to the second DUT 122. On the other hand, the band pass filters 131 and 133 block the test input wave signal B1 having the second frequency. The test input wave signal B1 having the second frequency does not reach the output terminals of the DUTs 121 and 123. The second DUT 122 receives the test input wave signal B 1 having the second frequency and outputs a signal to the band pass filter 112. The band pass filter 112 passes only the signal of the second frequency band (center frequency is 2 MHz, for example) of the output signal of the second DUT 122, and transmits the transmitted wave signal B3 to the first port P1 of the network analyzer 102. Output. Further, the second DUT 122 outputs the reflected wave signal B2 in the second frequency band (center frequency is, for example, 2 MHz) to the second port P2 of the network analyzer 102 via the bandpass filter 132. The digitizer 105 converts the reflected wave signal B2 and the transmitted wave signal B3 from analog to digital. The FFT processing unit 104 performs fast Fourier transform on the digital signals of the reflected wave signal B2 and the transmitted wave signal B3, and outputs a frequency component signal. The magnitudes of the second frequency components of the reflected wave signal B2 and the transmitted wave signal B3 are recorded as the magnitudes of the reflected wave signal B2 and the transmitted wave signal B3 as the measurement results of the second DUT 122, respectively.

  Next, the signal generator 103 in the network analyzer 102 outputs a test input wave signal B1 having a third frequency (for example, 3 MHz) from the port P2 to the bandpass filters 131-133. The band-pass filter 133 passes the test input wave signal B 1 having the third frequency and outputs it to the third DUT 123. On the other hand, the band pass filters 131 and 132 block the test input wave signal B1 having the third frequency. The test input wave signal B1 having the third frequency does not reach the output terminals of the DUTs 121 and 122. The third DUT 123 receives the test input wave signal B 1 having the third frequency and outputs a signal to the band pass filter 113. The band pass filter 113 passes only the signal of the third frequency band (center frequency is 3 MHz, for example) of the output signal of the third DUT 123, and transmits the transmitted wave signal B3 to the first port P1 of the network analyzer 102. Output. The third DUT 123 outputs the reflected wave signal B2 in the third frequency band (center frequency is 3 MHz, for example) to the second port P2 of the network analyzer 102 via the bandpass filter 133. The digitizer 105 converts the reflected wave signal B2 and the transmitted wave signal B3 from analog to digital. The FFT processing unit 104 performs fast Fourier transform on the digital signals of the reflected wave signal B2 and the transmitted wave signal B3, and outputs a frequency component signal. The magnitudes of the third frequency components of the reflected wave signal B2 and the transmitted wave signal B3 are recorded as the magnitudes of the reflected wave signal B2 and the transmitted wave signal B3 as the measurement results of the third DUT 123, respectively.

  Next, the network analyzer 102 calculates S parameters S11 and S21 based on the input wave signal A1, the reflected wave signal A2, and the transmitted wave signal A3 according to the following equation.

S11 = √ (A2 / A1)
S21 = √ (A3 / A1)

  Next, the network analyzer 102 calculates S parameters S22 and S12 based on the input wave signal B1, the reflected wave signal B2, and the transmitted wave signal B3 according to the following equation.

S22 = √ (B2 / B1)
S12 = √ (B3 / B1)

  Next, the network analyzer 102 converts the S parameters S11, S21, S22, and S12 into Y parameters, and converts the Y parameters into element characteristics. The element characteristic is, for example, a capacitance-frequency characteristic, an inductance-frequency characteristic, or a resistance-frequency characteristic. Thereafter, the network analyzer 102 determines whether the element characteristics are within the standard for each frequency, and outputs a test result. In order to measure the frequency characteristics, for example, the above measurement is repeated while changing the frequency of 0.1 MHz to 4.1 Mz in 0.1 MHz steps.

  2A to 2C are graphs showing frequency characteristics of test results. 2A shows the measurement result of the first semiconductor chip in the semiconductor wafer 101, FIG. 2B shows the measurement result of the second semiconductor chip in the semiconductor wafer 101, and FIG. The measurement result of the 3rd semiconductor chip in the semiconductor wafer 101 is shown. The first frequency f <b> 1 indicates the test result of the first DUT (for example, transistor) 121. The second frequency f <b> 2 indicates the test result of the second DUT (for example, resistor) 122. The third frequency f3 indicates the test result of the third DUT (for example, capacity) 123. The upper limit value 201 indicates the standard upper limit value, and the lower limit value 202 indicates the standard lower limit value. If the test result is within the range between the upper limit value 201 and the lower limit value 202, the test is passed.

  In the first semiconductor chip shown in FIG. 2A, DUTs 121 to 123 pass the test. In the second semiconductor chip of FIG. 2B, DUTs 121 and 122 pass the test, and DUT 123 fails the test. In the third semiconductor chip shown in FIG. 2C, DUTs 121 to 123 pass the test.

  The order of the reflected wave signal and transmitted wave signal measurement methods is not limited to the above order, and may be another order.

  Further, the case where there are three DUTs 121 to 123 has been described as an example, but four or more may be used. In that case, the number of series connection circuits of the DUT and the two band pass filters may be increased.

  Moreover, although the case where DUT121-123 has 2 terminals was demonstrated to the example, this embodiment is applicable also when DUT121-123 is 3 terminals or more. In that case, a band pass filter may be connected to each terminal of the DUTs 121 to 123 in the same manner as described above.

  As described above, the signal generator 103 sequentially outputs signals having different frequencies. The signal generator 103 outputs signals to the first terminals (input terminals) of the plurality of DUTs 121 to 123 via the plurality of first band pass filters 111 to 113, and the processing unit 104 outputs the signals of the plurality of DUTs 121 to 123. The transmitted wave signals of the two terminals (output terminals) are input through the plurality of second band pass filters 131 to 133, or the reflected wave output signals of the first terminals of the plurality of DUTs 121 to 123 are input to the plurality of first Input through band-pass filters 111 to 113 and convert to frequency components. Further, the signal generator 103 outputs signals to the second terminals of the plurality of DUTs 121 to 123 via the plurality of second bandpass filters 131 to 133, and the processing unit 104 outputs the first of the plurality of DUTs 121 to 123. The transmitted wave signal of the terminal is input through the plurality of first band pass filters 111 to 113, or the reflected wave signal of the second terminal of the plurality of DUTs 121 to 123 is input to the plurality of second band pass filters 131 to 133. To convert to frequency components.

  When performing the above S-parameter test, the signal generator 103 outputs signals to the first terminals of the plurality of DUTs 121 to 123 via the plurality of first bandpass filters 111 to 113, and the processing unit 104 The transmitted wave signals of the second terminals of the plurality of DUTs 121 to 123 are input through the plurality of second bandpass filters 131 to 133 to be converted into frequency components, and reflected from the first terminals of the plurality of DUTs 121 to 123. A wave signal is input through a plurality of first bandpass filters 111 to 113 and converted into frequency components. Further, the signal generator 103 outputs signals to the second terminals of the plurality of DUTs 121 to 123 via the plurality of second bandpass filters 131 to 133, and the processing unit 104 outputs the first of the plurality of DUTs 121 to 123. Terminal transmitted wave signals are input through a plurality of first bandpass filters 111 to 113 and converted into frequency components, and reflected wave signals at second terminals of the plurality of DUTs 121 to 123 are converted into a plurality of second bands. Input through the pass filters 131 to 133 and convert to frequency components.

  As described above, according to the present embodiment, both the test for outputting the test input wave signal A1 to the input terminals of the DUTs 121 to 123 and the test for outputting the test input wave signal B1 to the output terminals of the DUTs 121 to 123 are performed. It can be carried out. That is, the test apparatus according to the present embodiment can perform a bidirectional test on the DUTs 121 to 123. By outputting the test input wave signal A1 to the input terminals of the DUTs 121 to 123, the characteristics on the input side of the DUTs 121 to 123 can be measured. Further, by outputting the test input wave signal B1 to the output terminals of the DUTs 121 to 123, the output side characteristics such as the output impedance of the DUTs 121 to 123 can be measured.

(Second Embodiment)
FIG. 3 is a diagram illustrating a configuration example of a test apparatus according to the second embodiment of the present invention. The final test substrate 301 includes three DUTs 121 to 123 and six band pass filters 111 to 113 and 131 to 133 as with the semiconductor wafer 101 of FIG. These configurations are the same as those in the first embodiment. The present embodiment (FIG. 3) has signal generators 311 to 313, signal synthesizers 314 and 315, and a spectrum analyzer 316 instead of the network analyzer 102 compared to the first embodiment (FIG. 1). Hereinafter, the points of the present embodiment different from the first embodiment will be described.

  The band pass filter 111 is connected between the input terminals of the signal synthesizer 314 and the first DUT 121. The band pass filter 112 is connected between the signal synthesizer 314 and the input terminal of the second DUT 122. The band pass filter 113 is connected between the input terminals of the signal synthesizer 314 and the third DUT 123.

  The band-pass filter 131 is connected between the output terminal of the first DUT 121 and the signal synthesizer 315. The band-pass filter 132 is connected between the output terminal of the second DUT 122 and the signal synthesizer 315. The band-pass filter 133 is connected between the output terminal of the third DUT 123 and the signal synthesizer 315.

  The bandpass filters 111 and 131 pass only signals in the first frequency band. In the first frequency band, the center frequency is the first frequency (for example, 1 MHz), and the pass frequency band is, for example, 100 kHz.

  The bandpass filters 112 and 132 pass only the signal of the second frequency band. In the second frequency band, the center frequency is the second frequency (for example, 2 MHz), and the pass frequency band is, for example, 100 kHz.

  The bandpass filters 113 and 133 pass only signals in the third frequency band. In the third frequency band, the center frequency is the third frequency (for example, 3 MHz), and the pass frequency band is, for example, 100 kHz.

  Next, a method of wafer test and final test of the semiconductor integrated circuit will be described. In this test, the input / output characteristics (gain, etc.) of the DUTs 121 to 123 are measured. By mounting a plurality of semiconductor chips on the final test board 301, it is possible to test a plurality of semiconductor chips with one final test board 301.

  When the DUTs 121 to 123 are nonlinear DUTs, the DUTs 121 to 123 output harmonic components with respect to the input signal. Even when the DUTs 121 to 123 are linear DUTs, when a large test signal is intentionally input, the DUTs 121 to 123 may output a harmonic component to the input signal.

  The first signal generator 311 outputs a test signal having a first frequency (for example, 1 MHz) for the first DUT 121 to the signal synthesizer 314. The second signal generator 312 outputs a test signal having a second frequency (eg, 2 MHz) for the second DUT 122 to the signal synthesizer 314. The third signal generator 313 outputs a test signal having a third frequency (for example, 3 MHz) for the third DUT 123 to the signal synthesizer 314. The signal synthesizer 314 synthesizes the output signals of the three signal generators 311 to 313 and outputs them to the three band pass filters 111 to 113. Test signals having first to third frequency components are input to the band pass filters 111 to 113.

  The band pass filter 111 passes only the test signal of the first frequency (for example, 1 MHz) and outputs it to the first DUT 121. The first DUT 121 receives the test signal having the first frequency and outputs an output signal to the band pass filter 131. As described above, the output signal of the first DUT 121 includes a fundamental wave component (for example, 1 MHz) and a harmonic component (for example, 2 MHz, 3 MHz, and 4 MHz) with respect to the input signal. The band pass filter 131 passes only the signal of the first frequency (for example, 1 MHz) among the output signals of the first DUT 121 and outputs the signal to the signal synthesizer 315.

  The band pass filter 112 passes only the test signal of the second frequency (for example, 2 MHz) and outputs it to the second DUT 122. The second DUT 122 receives the second frequency test signal and outputs an output signal to the bandpass filter 132. As described above, the output signal of the second DUT 122 includes a fundamental wave component (for example, 2 MHz) and a harmonic component (for example, 4 MHz, 6 MHz, and 8 MHz) with respect to the input signal. The band pass filter 132 passes only the signal of the second frequency (for example, 2 MHz) among the output signals of the second DUT 122 and outputs the signal to the signal synthesizer 315.

  The bandpass filter 113 passes only the test signal of the third frequency (for example, 3 MHz) and outputs it to the third DUT 123. The third DUT 123 receives the third frequency test signal and outputs an output signal to the bandpass filter 133. As described above, the output signal of the third DUT 123 includes a fundamental wave component (for example, 3 MHz) and a harmonic component (for example, 6 MHz, 9 MHz, and 12 MHz) with respect to the input signal. The band pass filter 133 passes only the signal of the third frequency (for example, 3 MHz) among the output signals of the third DUT 123 and outputs the signal to the signal synthesizer 315.

  The signal synthesizer 315 synthesizes the output signals of the bandpass filters 131 to 133 and outputs them to the spectrum analyzer 316. The spectrum analyzer 316 includes the digitizer 105 and the FFT processing unit 104 in FIG. 1, converts the output signal of the signal synthesizer 315 from analog to digital, and outputs a frequency component signal by fast Fourier transform. The signal of the first frequency is the output signal of the first DUT 121, the signal of the second frequency is the output signal of the second DUT 122, and the signal of the third frequency is the output signal of the third DUT 123. . Based on the output signal of the FFT processing unit 104, the test results of the DUTs 121 to 123 can be determined.

  For example, the DUT 121 may generate double harmonics (2 MHz) with respect to the first frequency (1 MHz) due to distortion characteristics. The double harmonic is the same frequency as the second frequency component (2 MHz). When the band pal filters 131 to 133 are not provided, the second frequency component output from the signal synthesizer 315 is a signal in which both the output signal of the first DUT 121 and the output signal of the second DUT 122 are combined. The output signal of the second DUT 122 cannot be correctly evaluated.

  According to the present embodiment, by providing the bandpass filters 131 to 133, when the DUTs 121 to 123 output harmonic components, the bandpass filters 131 to 133 can remove the harmonic components. Thereby, in the output signal of the signal synthesizer 315, signals corresponding to the DUTs 121 to 123 are separated into different frequencies, and are not mixed at the same frequency. As a result, the spectrum analyzer 316 can correctly evaluate the output signals of the three DUTs 121 to 123. This embodiment can prevent the frequency components of the output signals of the plurality of DUTs 121 to 123 from being mixed, and correctly test the plurality of DUTs 121 to 123.

  The signal synthesizers 314 and 315 may be provided outside or inside the final test board 301.

(Third embodiment)
FIG. 4 is a diagram illustrating a configuration example of a test apparatus according to the third embodiment of the present invention. In this embodiment (FIG. 4), signal dividers 401 to 403, a signal synthesizer 404, and a spectrum analyzer 405 are added to the second embodiment (FIG. 3). Hereinafter, the points of the present embodiment different from the second embodiment will be described.

  The signal divider 401 divides the output signal of the first DUT 121 and outputs the same signal as the output signal of the first DUT 121 to the bandpass filter 131 and the signal synthesizer 404. The signal divider 402 divides the output signal of the second DUT 122 and outputs the same signal as the output signal of the second DUT 122 to the bandpass filter 132 and the signal synthesizer 404. The signal divider 403 divides the output signal of the third DUT 123 and outputs the same signal as the output signal of the third DUT 123 to the bandpass filter 133 and the signal synthesizer 404. The operations of the bandpass filters 131 to 133, the signal synthesizer 315, and the spectrum analyzer 316 are the same as those in the second embodiment.

  The signal synthesizer 404 synthesizes the output signals of the signal dividers 401 to 403 and outputs them to the spectrum analyzer 405. The output signal of the signal synthesizer 404 includes the fundamental wave component and the harmonic component of the output signal of the DUTs 121 to 123. The spectrum analyzer 405 includes the digitizer 105 and the FFT processing unit 104 in FIG. 1, converts the output signal of the signal synthesizer 404 from analog to digital, and outputs a frequency component signal by fast Fourier transform. The spectrum analyzer 405 can analyze harmonics in addition to the fundamental wave output from the DUTs 121 to 123.

  The signal synthesizers 314, 315, and 404 may be provided outside or inside the final test board 301.

  The above-described embodiments are merely examples of implementation in carrying out the present invention, and the technical scope of the present invention should not be construed in a limited manner. That is, the present invention can be implemented in various forms without departing from the technical idea or the main features thereof.

  The embodiment of the present invention can be applied in various ways as follows, for example.

(Appendix 1)
A plurality of devices under test having a first terminal and a second terminal;
A plurality of first band-pass filters connected to first terminals of the plurality of devices under test;
A plurality of second band pass filters connected to second terminals of the plurality of devices under test;
A test apparatus, wherein a plurality of sets of series connection circuits of the first band-pass filter, the device under test, and the first band-pass filter are connected in parallel.
(Appendix 2)
The test apparatus according to claim 1, wherein the plurality of first band pass filters have different pass frequency bands, and the plurality of second band pass filters have different pass frequency bands.
(Appendix 3)
The test apparatus according to appendix 2, wherein the first band-pass filter and the second band-pass filter connected to the same device under test have the same pass frequency band.
(Appendix 4)
A signal generator for generating a signal;
A processing unit for converting the signal into a frequency component,
The signal generator outputs a signal to a first terminal of the plurality of devices under test via the plurality of first bandpass filters, and the processing unit outputs a signal of a second terminal of the plurality of devices under test. A transmitted wave signal is input through the plurality of second bandpass filters, or a reflected wave output signal of a first terminal of the plurality of devices under test is input through the plurality of first bandpass filters. To frequency components,
Further, the signal generator outputs a signal to a second terminal of the plurality of devices under test via the plurality of second bandpass filters, and the processing unit outputs a first of the plurality of devices under test. Terminal transmitted wave signals are input via the plurality of first bandpass filters, or reflected wave signals of the second terminals of the plurality of devices under test are input via the plurality of second bandpass filters. The test apparatus according to any one of appendices 1 to 3, wherein the test apparatus converts the frequency component into a frequency component.
(Appendix 5)
The signal generator outputs a signal to a first terminal of the plurality of devices under test via the plurality of first bandpass filters, and the processing unit outputs a signal of a second terminal of the plurality of devices under test. A transmitted wave signal is input through the plurality of second band pass filters and converted into frequency components, and a reflected wave signal at a first terminal of the plurality of devices under test is converted into the plurality of first band pass filters. Is converted to frequency components
Further, the signal generator outputs a signal to a second terminal of the plurality of devices under test via the plurality of second bandpass filters, and the processing unit outputs a first of the plurality of devices under test. Terminal transmitted wave signals are inputted through the plurality of first band pass filters and converted into frequency components, and reflected wave signals at the second terminals of the plurality of devices under test are converted into the plurality of second bands. The test apparatus according to appendix 4, wherein the test apparatus inputs the signal through a pass filter and converts it into a frequency component.
(Appendix 6)
The test apparatus according to appendix 4 or 5, wherein the signal generator sequentially outputs signals having different frequencies.
(Appendix 7)
A first signal synthesizer that synthesizes signals of a plurality of frequencies and outputs the signals to the first terminals of the plurality of devices under test via the plurality of first bandpass filters;
And a first processing unit that inputs the output signals of the second terminals of the plurality of devices under test through the plurality of second bandpass filters and converts them into frequency components. The test apparatus according to any one of?
(Appendix 8)
Further, a second signal synthesizer that inputs and synthesizes the output signals of the second terminals of the plurality of devices under test via the plurality of second bandpass filters and outputs the synthesized signals to the first processing unit. The test apparatus according to appendix 7, characterized by comprising:
(Appendix 9)
The test apparatus according to appendix 7 or 8, further comprising a second processing unit that inputs an output signal of a second terminal of the plurality of devices under test and converts the output signal into a frequency component.
(Appendix 10)
Furthermore, the apparatus further comprises a plurality of signal dividers for outputting output signals of the second terminals of the plurality of devices under test to the plurality of second bandpass filters and the second processing unit. The test apparatus described.

It is a figure which shows the structural example of the test apparatus by the 1st Embodiment of this invention. 2A to 2C are graphs showing frequency characteristics of test results. It is a figure which shows the structural example of the testing apparatus by the 2nd Embodiment of this invention. It is a figure which shows the structural example of the test apparatus by the 3rd Embodiment of this invention. It is a figure which shows the structural example of a test apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 Semiconductor wafer 102 Network analyzer 103 Signal generator 104 FFT processing part 105 Digitizer 111-113 Band pass filter 121-123 DUT
131-133 Band pass filter

Claims (5)

A plurality of devices under test having a first terminal and a second terminal;
A plurality of first band-pass filters connected to first terminals of the plurality of devices under test;
A plurality of second band pass filters connected to second terminals of the plurality of devices under test;
A test apparatus, wherein a plurality of sets of series connection circuits of the first band-pass filter, the device under test, and the first band-pass filter are connected in parallel.   The test apparatus according to claim 1, wherein the plurality of first band pass filters have different pass frequency bands, and the plurality of second band pass filters have different pass frequency bands.   3. The test apparatus according to claim 2, wherein the first band-pass filter and the second band-pass filter connected to the same device under test have the same pass frequency band. A signal generator for generating a signal;
A processing unit for converting the signal into a frequency component,
The signal generator outputs a signal to a first terminal of the plurality of devices under test via the plurality of first bandpass filters, and the processing unit outputs a signal of a second terminal of the plurality of devices under test. A transmitted wave signal is input through the plurality of second bandpass filters, or a reflected wave output signal of a first terminal of the plurality of devices under test is input through the plurality of first bandpass filters. To frequency components,
Further, the signal generator outputs a signal to a second terminal of the plurality of devices under test via the plurality of second bandpass filters, and the processing unit outputs a first of the plurality of devices under test. Terminal transmitted wave signals are input via the plurality of first bandpass filters, or reflected wave signals of the second terminals of the plurality of devices under test are input via the plurality of second bandpass filters. The test apparatus according to claim 1, wherein the test apparatus converts the frequency component into a frequency component. A first signal synthesizer that synthesizes signals of a plurality of frequencies and outputs the signals to the first terminals of the plurality of devices under test via the plurality of first bandpass filters;
And a first processing unit configured to input output signals of second terminals of the plurality of devices under test through the plurality of second bandpass filters and convert the signals into frequency components. The test apparatus according to any one of 1 to 3.

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