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JP2009224725A - Electronic component - Google Patents

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JP2009224725A
JP2009224725A JP2008070311A JP2008070311A JP2009224725A JP 2009224725 A JP2009224725 A JP 2009224725A JP 2008070311 A JP2008070311 A JP 2008070311A JP 2008070311 A JP2008070311 A JP 2008070311A JP 2009224725 A JP2009224725 A JP 2009224725A
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insulating layer
coil
end portions
electronic component
wall
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Takaomi Toi
孝臣 問井
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an electronic component that withstands a test performed under high temperature and high humidity. <P>SOLUTION: The electronic component 1 includes a chip 2 and four external electrodes 3-1 to 3-4. The chip 2 is configured such that: insulating layers 61 to 66 and coil patterns 41, 42, 51 and 52 are alternately laminated on a magnetic substrate 60; and a magnetic substrate 69 is bonded on the uppermost side of the laminated magnetic substrate 60. The electronic component includes thereinside the coils 4 and 5. Extraction end portions 41A and 42A (51A and 52A) of the coil patterns 41 and 42 (51 and 52) face each other on a front rim portion of the insulating layer 62; and extraction end portions 41B and 42B (51B and 52B) thereof face each other on a rear rim portion of the insulating layer 62. The extraction end portion 42A is formed with a horizontal section 43, a first wall 44 and second wall 45. The first wall 44 is a member used for preventing the insulating layer from being swollen largely to the side of the external electrode 3-1; and the second wall 45 is a member used for expanding a connection area to the external electrode 3-1. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

この発明は、コモンモードチョークコイル等の電子部品に関し、特に積層型の電子部品の構造に関するものである。   The present invention relates to an electronic component such as a common mode choke coil, and more particularly to the structure of a multilayer electronic component.

従来、この種の電子部品では、消費電力の低減化や高インダクタンス化を図るために、コイルの構造に工夫を凝らしている。
その一例として、コイルを並列にして、抵抗値を低くし、消費電力の低減化を図った電子部品がある(例えば、特許文献1参照)。
図13は、従来例の電子部品を示す分解斜視図である。
この電子部品100は、磁性体基板101上に、絶縁層やコイルで構成される積層体を形成し、その上に、接着層を介して磁性体基板102を貼り合わせた後、外部電極131〜134を外側に取り付けた構成となっている。
具体的には、概ね同一のコイルパターン111,112を並列に接続して成るコイル体110を絶縁層211,212間に形成し、コイル体110の引き出し端部113,114を外部電極131に接続すると共に、引き出し端部115,116を外部電極132に接続している。そして、概ね同一のコイルパターン121,122を並列に接続して成るコイル体120を絶縁層221,222間に形成し、その引き出し端部123,124を外部電極133に接続すると共に、引き出し端部125,126を外部電極134に接続している。
かかる構成により、コイル体110,120全体の断面積を大きくして、抵抗値の低減化を図っている。
Conventionally, in this type of electronic component, the structure of the coil has been devised in order to reduce power consumption and increase the inductance.
As an example, there is an electronic component in which coils are arranged in parallel to reduce resistance and reduce power consumption (see, for example, Patent Document 1).
FIG. 13 is an exploded perspective view showing a conventional electronic component.
In this electronic component 100, a laminated body composed of an insulating layer and a coil is formed on a magnetic substrate 101, and the magnetic substrate 102 is bonded thereon via an adhesive layer. 134 is attached to the outside.
Specifically, a coil body 110 formed by connecting substantially the same coil patterns 111 and 112 in parallel is formed between the insulating layers 211 and 212, and lead-out end portions 113 and 114 of the coil body 110 are connected to the external electrode 131. In addition, the leading end portions 115 and 116 are connected to the external electrode 132. Then, a coil body 120 formed by connecting substantially the same coil patterns 121 and 122 in parallel is formed between the insulating layers 221 and 222, and the leading end portions 123 and 124 are connected to the external electrode 133 and the leading end portion. 125 and 126 are connected to the external electrode 134.
With this configuration, the entire cross-sectional area of the coil bodies 110 and 120 is increased to reduce the resistance value.

特開2003−133135号公報JP 2003-133135 A

しかしながら、上記従来の電子部品では、次のような問題がある。
近年、自動車の電子化に伴い、このような電子部品が自動車のコイル等として多用されるようになってきている。そして、自動車に適用される電子部品には、高温高湿の条件に耐えうるか否かの高負荷試験が課せられ、この試験をパスする高い信頼性が要求されている。
しかし、上記した従来の電子部品では、コイル体110(120)の引き出し端部113,114(115,116、123,124、125,126)が絶縁層212(222)の上下に平行に配された構造になっている。このため、上記高負荷試験において、熱膨張率の大きな絶縁層212(222)が外部電極131〜134側に膨らんで、引き出し端部113,114(115,116、123,124、125,126)から剥がすように、外部電極131〜134を押圧する。この結果、外部電極131〜134と引き出し端部113,114(115,116、123,124、125,126)との接続性が悪化し、引き出し端部113,114(115,116、123,124、125,126)部分の直流抵抗の増加や断線が発生して、不良品が多発するおそれがある。
However, the conventional electronic component has the following problems.
In recent years, with the digitization of automobiles, such electronic components are increasingly used as automobile coils and the like. Electronic components applied to automobiles are subjected to a high load test as to whether or not they can withstand high temperature and high humidity conditions, and high reliability that passes this test is required.
However, in the above-described conventional electronic component, the leading end portions 113 and 114 (115, 116, 123, 124, 125, 126) of the coil body 110 (120) are arranged in parallel above and below the insulating layer 212 (222). It has a structure. For this reason, in the high load test, the insulating layer 212 (222) having a large coefficient of thermal expansion swells toward the external electrodes 131 to 134, and the leading end portions 113 and 114 (115, 116, 123, 124, 125, 126). The external electrodes 131 to 134 are pressed so as to be peeled off. As a result, the connectivity between the external electrodes 131 to 134 and the lead-out ends 113 and 114 (115, 116, 123, 124, 125, and 126) deteriorates, and the lead-out ends 113 and 114 (115, 116, 123, and 124). , 125, 126) increase in DC resistance or disconnection may occur, resulting in frequent occurrence of defective products.

この発明は、上述した課題を解決するためになされたもので、高温高湿の試験にも耐えうる高信頼性の電子部品を提供することを目的とする。   The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a highly reliable electronic component that can withstand a high temperature and high humidity test.

上記課題を解決するために、請求項1記載の発明は、第1の絶縁層上のコイルパターンとこのコイルパターン上の第2の絶縁層上に形成されたコイルパターンとを並列に接続して成り、且つこれらのコイルパターンの引き出し端部同士が第2の絶縁層の縁部で対向する第1のコイル体と、上記第1のコイル体の上方に積層された第3の絶縁層上のコイルパターンとこのコイルパターン上の第4の絶縁層上に形成されたコイルパターンとを並列に接続して成り、且つこれらのコイルパターンの引き出し端部同士が第4の絶縁層の縁部で対向する第2のコイル体と、上記第1及び第2のコイル体の対向する引き出し端部がそれぞれ接続された複数の外部電極とを備える電子部品であって、上記対向する引き出し端部の間に挟まれた絶縁層の奥部に、これらの引き出し端部に接続された各外部電極に平行で且つ当該対向する引き出し端部に垂直に接続された所定幅の第1の壁部を1つ以上設け、上記対向する引き出し端部の間に挟まれた絶縁層内に、先端部が当該絶縁層から露出した状態で、上記各外部電極と当該対向する引き出し端部とにそれぞれ垂直に接続された所定長さの第2の壁部を、複数列設すると共に、これら複数の第2の壁部の奥端部同士を、上記第1の壁部の幅方向両側部に接続した構成とする。
かかる構成により、電子部品を高温高湿の環境下におくと、第1及び第2コイル体の対向する引き出し端部間の絶縁層が外部電極部側に向かって膨張し、外部電極を押圧して、対向する引き出し端部から外すおそれがある。しかし、この発明では、対向する引き出し端部の間に挟まれた絶縁層の奥部に、これらの引き出し端部に接続された各外部電極に平行で且つ対向する引き出し端部に垂直に接続された所定幅の第1の壁部を1つ以上設けているので、外部電極側に膨張する絶縁層の長さが、外部電極から第1の壁部間に存在する絶縁層の長さになり、非常に短い。このため、当該絶縁層の膨張は非常に小さく、外部電極を押圧して引き出し端部から外す程の膨張は生じない。
また、この発明では、複数の矩形状の接触部が、引き出し端部と複数の第2の壁部とで構成されているので、その分外部電極との接続面積が大きくなり、これら引き出し端部と外部電極との強固な接続が可能となる。
In order to solve the above problems, the invention according to claim 1 is characterized in that a coil pattern on the first insulating layer and a coil pattern formed on the second insulating layer on the coil pattern are connected in parallel. And a first coil body in which the leading ends of these coil patterns are opposed to each other at the edge of the second insulating layer, and a third insulating layer stacked above the first coil body. The coil pattern and the coil pattern formed on the fourth insulating layer on the coil pattern are connected in parallel, and the leading ends of these coil patterns face each other at the edge of the fourth insulating layer An electronic component comprising a second coil body and a plurality of external electrodes to which the opposing lead ends of the first and second coil bodies are connected, respectively, between the opposing lead ends At the back of the sandwiched insulation layer One or more first wall portions having a predetermined width are provided in parallel to each external electrode connected to these lead-out end portions and perpendicularly connected to the opposite lead-out end portions. A second wall portion having a predetermined length that is vertically connected to each of the external electrodes and the opposing lead-out end portion in a state where the front end portion is exposed from the insulating layer. A plurality of rows are provided, and the back end portions of the plurality of second wall portions are connected to both widthwise side portions of the first wall portion.
With this configuration, when the electronic component is placed in a high-temperature and high-humidity environment, the insulating layer between the opposing drawing end portions of the first and second coil bodies expands toward the external electrode portion side, and presses the external electrode. Then, there is a risk of disconnecting from the opposite drawer end. However, according to the present invention, in the inner part of the insulating layer sandwiched between the opposing lead ends, the external electrodes connected to the lead ends are connected in parallel to and perpendicular to the opposing lead ends. Since one or more first wall portions having a predetermined width are provided, the length of the insulating layer that expands toward the external electrode is the length of the insulating layer that exists between the external electrode and the first wall portion. Very short. For this reason, the expansion of the insulating layer is very small, and does not expand so much as to press the external electrode and remove it from the lead end.
In the present invention, since the plurality of rectangular contact portions are constituted by the lead-out end portions and the plurality of second wall portions, the connection area with the external electrode is increased correspondingly, and these lead-out end portions Can be firmly connected to the external electrode.

以上詳しく説明したように、この発明の電子部品によれば、高温高湿の環境下においた場合でも、対向する引き出し端部に挟まれた部分の絶縁層の膨張が非常に小さく、外部電極を引き出し端部から外すことはないので、高温高湿の試験においても、高い接続信頼性を得ることができるという優れた効果がある。
また、外部電極との接続面積を大きくして、これら引き出し端部等と外部電極との強固な接続を可能にするので、接続信頼性をさらに高めることができるいう効果がある。
As described above in detail, according to the electronic component of the present invention, even when placed in a high-temperature and high-humidity environment, the expansion of the insulating layer in the portion sandwiched between the opposing drawer ends is very small, and the external electrode is Since it is not removed from the end of the drawer, there is an excellent effect that high connection reliability can be obtained even in a high temperature and high humidity test.
Further, since the connection area with the external electrode is increased and the lead-out end portion and the external electrode can be firmly connected, the connection reliability can be further improved.

以下、この発明の最良の形態について図面を参照して説明する。   The best mode of the present invention will be described below with reference to the drawings.

図1は、この発明の一実施例に係る電子部品の分解斜視図であり、図2は、外部電極を分離して示す電子部品の外観図である。
これらの図に示すように、この実施例の電子部品1は、コモンモードチョークコイルであり、チップ体2と4つの外部電極3−1,〜,3−4とを備えている。
FIG. 1 is an exploded perspective view of an electronic component according to one embodiment of the present invention, and FIG. 2 is an external view of the electronic component showing external electrodes separately.
As shown in these drawings, the electronic component 1 of this embodiment is a common mode choke coil, and includes a chip body 2 and four external electrodes 3-1 to 3-4.

チップ体2は、図1に示すように、磁性基板60上に、絶縁層とコイルパターンを交互に複数積層して形成し、磁性基板69を接着層67,68を介して最上位に貼り合わせた構成となっており、第1のコイル体としてのコイル体4と第2のコイル体としてのコイル体5を内部に有する。
具体的には、第1の絶縁層としての絶縁層61が磁性基板60の上に積層され、コイルパターン41が絶縁層61上に形成されている。さらに、第2の絶縁層としての絶縁層62がコイルパターン41の上に積層されて、コイルパターン42がこの絶縁層62上に形成され、絶縁層63がコイルパターン42上に積層されている。そして、絶縁層62に設けられたビアホール62aを通じて、コイルパターン41,42が電気的に接続されている。これにより、コイルパターン41,42でなる並列スパイラルのコイル体4が絶縁層内に形成される。
さらに、第3の絶縁層としての絶縁層64が絶縁層63の上に積層され、コイルパターン51が絶縁層64上に形成されている。そして、第4の絶縁層としての絶縁層65がコイルパターン51の上に積層されて、コイルパターン52がこの絶縁層65上に形成され、絶縁層66がコイルパターン52上に積層されている。そして、絶縁層65に設けられたビアホール65aを通じて、コイルパターン51,52が電気的に接続されている。これにより、コイルパターン51,52でなる並列スパイラルのコイル体5が絶縁層内に形成される。
As shown in FIG. 1, the chip body 2 is formed by alternately laminating a plurality of insulating layers and coil patterns on a magnetic substrate 60, and the magnetic substrate 69 is bonded to the top through adhesive layers 67 and 68. The coil body 4 as the first coil body and the coil body 5 as the second coil body are included inside.
Specifically, an insulating layer 61 as a first insulating layer is laminated on the magnetic substrate 60, and the coil pattern 41 is formed on the insulating layer 61. Further, an insulating layer 62 as a second insulating layer is laminated on the coil pattern 41, a coil pattern 42 is formed on the insulating layer 62, and an insulating layer 63 is laminated on the coil pattern 42. The coil patterns 41 and 42 are electrically connected through a via hole 62 a provided in the insulating layer 62. Thereby, the coil body 4 of the parallel spiral which consists of the coil patterns 41 and 42 is formed in an insulating layer.
Further, an insulating layer 64 as a third insulating layer is laminated on the insulating layer 63, and the coil pattern 51 is formed on the insulating layer 64. An insulating layer 65 as a fourth insulating layer is laminated on the coil pattern 51, a coil pattern 52 is formed on the insulating layer 65, and an insulating layer 66 is laminated on the coil pattern 52. The coil patterns 51 and 52 are electrically connected through a via hole 65 a provided in the insulating layer 65. Thereby, the coil body 5 of the parallel spiral which consists of the coil patterns 51 and 52 is formed in an insulating layer.

上記の如きコイル体4,5には、図2に示すように、先端がチップ体2の側面から露出した引き出し端部が設けられている。
具体的には、図1に示すように、コイル体4のコイルパターン41に、コイルパターン41の外側から引き出された引き出し端部41Aと内側から引き出された引き出し端部41Bとが設けられ、コイルパターン42に、コイルパターン42の外側から引き出された引き出し端部42Aと内側から引き出された引き出し端部42Bとが設けられている。そして、引き出し端部41A,42A同士が絶縁層62の前縁部(図1の手前側の縁部)で対向し、引き出し端部41B,42B同士が絶縁層62の後縁部(図1の奥側の縁部)で対向している。
同様に、コイル体5のコイルパターン51に、コイルパターン51の外側から引き出された引き出し端部51Aと内側から引き出された引き出し端部51Bとが設けられ、コイルパターン52に、コイルパターン52の外側から引き出された引き出し端部52Aと内側から引き出された引き出し端部52Bとが設けられている。そして、引き出し端部51A,52A同士が絶縁層65の前縁部で対向し、引き出し端部51B,52B同士が絶縁層65の後縁部で対向している。
As shown in FIG. 2, the coil bodies 4 and 5 as described above are provided with lead-out ends whose tips are exposed from the side surfaces of the chip body 2.
Specifically, as shown in FIG. 1, the coil pattern 41 of the coil body 4 is provided with a leading end 41 </ b> A drawn from the outside of the coil pattern 41 and a leading end 41 </ b> B drawn from the inside. The pattern 42 is provided with a leading end 42A drawn from the outside of the coil pattern 42 and a leading end 42B drawn from the inside. The leading end portions 41A and 42A face each other at the front edge portion (the edge portion on the near side in FIG. 1) of the insulating layer 62, and the leading end portions 41B and 42B face each other at the trailing edge portion (see FIG. 1). Opposite edges at the back).
Similarly, the coil pattern 51 of the coil body 5 is provided with a leading end 51 </ b> A that is drawn from the outside of the coil pattern 51 and a leading end 51 </ b> B that is drawn from the inside. A pull-out end 52A drawn from the inside and a pull-out end 52B drawn from the inside are provided. The leading end portions 51A and 52A face each other at the front edge portion of the insulating layer 65, and the leading end portions 51B and 52B face each other at the rear edge portion of the insulating layer 65.

ここで、各引き出し端部の構造について詳しく説明する。
図3は、絶縁層の縁部で対向する引き出し端部を示す斜視図であり、図4は、図1におけるコイルパターン52以降を透視して示す平面図であり、図5は、図4の矢視A−A断面図であり、図6は、図4の矢視B−B断面図である。
図4に示すように、この実施例の電子部品1では、4組の対向する引き出し端部41A,42A、41B,42B、51A,52A、51B,52Bがチップ体2の前面と後面とに配設されているが、引き出し端部41B,42B、51A,52A、51B,52Bの構造は、引き出し端部41A,42Aの構造と同様であるので、図3では、引き出し端部41A,42Aの構造についてのみ表示する。
Here, the structure of each drawer end will be described in detail.
FIG. 3 is a perspective view showing a leading end facing the edge of the insulating layer, FIG. 4 is a plan view showing through the coil pattern 52 and subsequent parts in FIG. 1, and FIG. FIG. 6 is a cross-sectional view taken along the line AA, and FIG. 6 is a cross-sectional view taken along the line BB in FIG.
As shown in FIG. 4, in the electronic component 1 of this embodiment, four sets of opposing drawer end portions 41A, 42A, 41B, 42B, 51A, 52A, 51B, 52B are arranged on the front surface and the rear surface of the chip body 2. Although the structure of the drawer end portions 41B, 42B, 51A, 52A, 51B, and 52B is the same as that of the drawer end portions 41A and 42A, the structure of the drawer end portions 41A and 42A is shown in FIG. Display only for.

図3に示すように、引き出し端部41Aは、水平なパターンで形成されているが、引き出し端部42Aは、櫛歯状の水平部43を有した形状を成している。
そして、第1の壁部44と第2の壁部45とが、このような引き出し端部41A,42Aの間の絶縁層62内に形成されている。
具体的には、図5及び図6に示すように、第1の壁部44は、絶縁層62が外部電極3−1側へ大きく膨張することを阻止するための部材であり、引き出し端部41A,42Aとに挟まれた状態で、絶縁層62の前面から距離Lだけ奥部に配設されている。また、第1の壁部44は、図6に示すように、外部電極3−1に平行で且つ引き出し端部41A,42Aに垂直に接続されている。
一方、第2の壁部45は、外部電極3−1との接続面積を拡張するための部材であり、図5及び図6に示すように、引き出し端部41A,42Aに挟まれた状態で、第1の壁部44よりも外部電極3−1側に配設され、先端部が絶縁層62から外部電極3−1側に露出している。これにより、第2の壁部45の先端部は、絶縁層62の前面で、引き出し端部42Aの水平部43や引き出し端部41Aの先端部と面一を成す。また、第2の壁部45は、図5に示すように、外部電極3−1に垂直で且つ且つ引き出し端部41A,42Aに垂直に接続されている。
このような6つの第2の壁部45が、外部電極3−1の幅方向に幅Wの間隔で列設され、3つの第1の壁部44に1つ置きに接続されている。詳しくは、図左から1番目と2番目との第2の壁部45の奥端部同士を、1つの第1の壁部44の幅方向両側部に接続し、同様に、3番目と4番目との第2の壁部45の奥端部同士、5番目と6番目の第2の壁部45の奥端部同士を、それぞれ第1の壁部44の幅方向両側部に接続した。
As shown in FIG. 3, the drawer end portion 41 </ b> A is formed in a horizontal pattern, but the drawer end portion 42 </ b> A has a shape having a comb-like horizontal portion 43.
And the 1st wall part 44 and the 2nd wall part 45 are formed in the insulating layer 62 between such drawer | drawing-out edge part 41A, 42A.
Specifically, as shown in FIGS. 5 and 6, the first wall portion 44 is a member for preventing the insulating layer 62 from greatly expanding toward the external electrode 3-1, and has a leading end portion. In a state of being sandwiched between 41A and 42A, the insulating layer 62 is disposed at a depth L from the front surface of the insulating layer 62. Further, as shown in FIG. 6, the first wall portion 44 is parallel to the external electrode 3-1 and is connected perpendicularly to the lead-out end portions 41 </ b> A and 42 </ b> A.
On the other hand, the second wall portion 45 is a member for expanding the connection area with the external electrode 3-1, and is sandwiched between the leading end portions 41A and 42A as shown in FIGS. The first wall portion 44 is disposed closer to the external electrode 3-1, and the tip end portion is exposed from the insulating layer 62 to the external electrode 3-1 side. Thereby, the front end portion of the second wall portion 45 is flush with the horizontal portion 43 of the leading end portion 42A and the leading end portion of the leading end portion 41A on the front surface of the insulating layer 62. Further, as shown in FIG. 5, the second wall portion 45 is connected to the external electrode 3-1 and also to the lead-out end portions 41 </ b> A and 42 </ b> A.
The six second wall portions 45 are arranged in the width direction of the external electrode 3-1 at an interval of the width W, and are connected to the three first wall portions 44 every other one. Specifically, the back end portions of the first and second second wall portions 45 from the left in the drawing are connected to both side portions in the width direction of one first wall portion 44, and similarly, the third and fourth portions are connected. The back end portions of the second and second wall portions 45 and the back end portions of the fifth and sixth second wall portions 45 are respectively connected to both sides in the width direction of the first wall portion 44.

そして、図2等に示すように、外部電極3−1〜3−4が、チップ体2の前面(図2の手前の面)や後面に露出している引き出し端部41A,42A、41B,42B、51A,52A、51B,52B、第2の壁部45にそれぞれ接続されている。このとき、図5に示すように、引き出し端部41A,42A及び第2の壁部45で構成される接触部が断面矩形状を成しているので、引き出し端部41A,42A等と外部電極3−1等との接続面積が極めて大きくなっている。   As shown in FIG. 2 and the like, the external electrodes 3-1 to 3-4 are exposed on the front surface (front surface in FIG. 2) and the rear surface of the chip body 2 and lead-out ends 41 </ b> A, 42 </ b> A, 41 </ b> B, 42B, 51A, 52A, 51B, 52B, and the second wall 45 are connected to each other. At this time, as shown in FIG. 5, since the contact portion constituted by the lead end portions 41A and 42A and the second wall portion 45 has a rectangular cross section, the lead end portions 41A and 42A and the external electrodes The connection area with 3-1 etc. is extremely large.

次に、電子部品1の製造方法を簡単に説明する。
まず、磁性基板60上に積層したポリイミド樹脂の絶縁層61上に、スパッタリングや蒸着等の薄膜形成法、あるいはスクリーン印刷等の厚膜形成法といった成膜技術によって、Ag膜層を形成した後、レジスト塗布,露光及び現像やエッチング等の一連のフォトリソグラフィ技術を用いて、引き出し端部41A,41Bを有したコイルパターン41を形成する。続いて、コイルパターン41上に、感光性ポリイミド樹脂を塗布し、露光及び現像を行うことで、ビアホール62aを有した絶縁層62を形成し、その上に、引き出し端部41B,42Bを有したコイルパターン42と絶縁層63とを順に積層することで、コイル体4を形成する。
しかる後、絶縁層63の上に、コイル体4と同様に、絶縁層64〜66とコイルパターン51,52とを交互に積層することで、コイル体5を形成する。
次に、絶縁層66上に熱硬化性ポリイミド樹脂の接着層67,68を形成して、磁性基板69を貼り合わせた後、真空中又は不活性ガス中で加熱及び加圧し、冷却することで、絶縁層61〜66とコイル体4,5とを磁性基板60,69で挟んだウエハを形成することができる。
そして、ウエハをチップ体2にダイシングした後、コイル体4の引き出し端部41A,42A、41B,42Bと接触するように外部電極3−1,3−2をチップ体2の側面に形成すると共に、コイル体5の引き出し端部51A,52A、51B,52Bと接触するように外部電極3−3,3−4をチップ体2の側面に形成する。
具体的には、Ag含む導電性ペーストの塗布や、Agのスパッタリングや蒸着等によって、引き出し端部41A,42A、41B,42B及び51A,52A、51B,52Bと対応する部分にAg膜を成膜する。そして、このAg膜上に、湿式電解メッキ等によって、Ni,Sn−Pb等の金属膜を形成する。
このようにして、チップ体2に外部電極3−1,〜,3−4を備えた電子部品1を製造することができる。
Next, a method for manufacturing the electronic component 1 will be briefly described.
First, an Ag film layer is formed on a polyimide resin insulating layer 61 laminated on the magnetic substrate 60 by a film forming technique such as a thin film forming method such as sputtering or vapor deposition, or a thick film forming method such as screen printing. The coil pattern 41 having the leading end portions 41A and 41B is formed using a series of photolithography techniques such as resist coating, exposure, development, and etching. Subsequently, a photosensitive polyimide resin was applied on the coil pattern 41, and exposure and development were performed to form an insulating layer 62 having a via hole 62a. On the insulating layer 62, lead-out end portions 41B and 42B were provided. The coil body 4 is formed by sequentially stacking the coil pattern 42 and the insulating layer 63.
Thereafter, similarly to the coil body 4, the insulating layers 64 to 66 and the coil patterns 51 and 52 are alternately stacked on the insulating layer 63 to form the coil body 5.
Next, adhesive layers 67 and 68 of thermosetting polyimide resin are formed on the insulating layer 66 and the magnetic substrate 69 is bonded together, and then heated and pressurized in a vacuum or in an inert gas and cooled. A wafer in which the insulating layers 61 to 66 and the coil bodies 4 and 5 are sandwiched between the magnetic substrates 60 and 69 can be formed.
Then, after dicing the wafer into the chip body 2, external electrodes 3-1 and 3-2 are formed on the side surfaces of the chip body 2 so as to be in contact with the lead-out ends 41A, 42A, 41B and 42B of the coil body 4. The external electrodes 3-3 and 3-4 are formed on the side surfaces of the chip body 2 so as to be in contact with the lead-out end portions 51A, 52A, 51B, and 52B of the coil body 5.
Specifically, an Ag film is formed on portions corresponding to the lead end portions 41A, 42A, 41B, 42B and 51A, 52A, 51B, 52B by applying a conductive paste containing Ag, sputtering or vapor deposition of Ag, or the like. To do. Then, a metal film such as Ni, Sn—Pb is formed on the Ag film by wet electrolytic plating or the like.
Thus, the electronic component 1 provided with the external electrodes 3-1, to 3-4 on the chip body 2 can be manufactured.

なお、この実施例では、コイル体4,5のコイルパターン41,42,51,52を形成する材料として、Agを用いた。しかし、導電性に優れたCu,Pd,Al等の金属や、これらの合金を用いることができる。
また、絶縁層61〜66として、感光性のポリイミド樹脂を用いた。しかし、ポリイミド樹脂以外に、エポキシ樹脂,ベンゾシクロプテン樹脂等の種々の樹脂材料、あるいはSiO2等のガラス、ガラスセラミクス、誘電体等を用いることができる。
また、磁性基板60,69は、比透磁率400以上のフェライト等で形成した。
また、外部電極3−1,〜,3−4を、薄膜AgとNiの膜とで形成したが、Ab−Pd,Cu,NiCr又はNiCu等の薄膜上にNi,Sn−Pb等の金属膜を用いて形成することもできる。
In this embodiment, Ag is used as a material for forming the coil patterns 41, 42, 51, 52 of the coil bodies 4, 5. However, metals such as Cu, Pd, and Al, which are excellent in conductivity, and alloys thereof can be used.
Moreover, photosensitive polyimide resin was used as the insulating layers 61-66. However, in addition to the polyimide resin, various resin materials such as epoxy resin and benzocycloptene resin, glass such as SiO2, glass ceramics, dielectrics, and the like can be used.
The magnetic substrates 60 and 69 were made of ferrite having a relative permeability of 400 or more.
Further, the external electrodes 3-1 to 3-4 are formed of a thin film Ag and a Ni film, but a metal film such as Ni, Sn-Pb or the like on a thin film such as Ab-Pd, Cu, NiCr or NiCu. It can also be formed using.

ところで、コイル体4,5の引き出し端部41A,42A、41B,42B及び51A,52A、51B,52Bは、上記の製造方法において形成されるが、これらがこの実施例の要部であるので、その形成過程を詳しく述べておく。
図7は、引き出し端部の形成過程を示す部分断面図である。
まず、図7の(a)に示すように、絶縁層61(又は絶縁層64)を磁性基板60(又は絶縁層63)上に積層する。しかる後、スパッタリングや蒸着等の薄膜形成法を用いて、Ag膜層を絶縁層61(又は絶縁層64)上に形成する。そして、図7の(b)に示すように、レジスト塗布,露光及び現像やエッチング等の一連のフォトリソグラフィ技術を用いて、平坦な引き出し端部41A(又は引き出し端部41B,51A,51B)を形成する。さらに、図7の(c)に示すように、感光性のポリイミド樹脂の絶縁層62(絶縁層65)を引き出し端部41A(又は引き出し端部41B,51A,51B)上に積層し、図7の(d)に示すように、フォトリソグラフィ技術を用いて、図の手前側と上下方向に開口する幅Wで長さLの矩形状ビアホール62b(又はビアホール65b)を3つ形成する。
なお、ビアホール62b(65b)の個数は、3個に限定されるものではないが、1個〜5個の間の個数が好ましい。また、ビアホール62b(65b)の幅Wは、引き出し端部42A(42B,52A,52B)の幅(図3の左右方向の距離)の約1/3〜1/10が好ましく、長さLは、引き出し端部42A(42B,52A,52B)の長さ(図3の前後方向の距離)の1/2以上であることが好ましい。
しかる後、薄膜形成法を用いて、Ag膜層を絶縁層62(又は絶縁層65)上に形成する。そして、図7の(e)に示すように、フォトリソグラフィ技術を用いて、引き出し端部42A(又は引き出し端部42B,52A,52B)の水平部43や第1の壁部44及び第2の壁部45を形成する。
このようにして、コイル体4,5の引き出し端部41A,42A、41B,42B、51A,52A、51B,52B、第1の壁部44及び第2の壁部45を絶縁層62,65の縁部に形成することができる。
By the way, the lead end portions 41A, 42A, 41B, 42B and 51A, 52A, 51B, 52B of the coil bodies 4, 5 are formed in the above manufacturing method, but these are the main parts of this embodiment. The formation process will be described in detail.
FIG. 7 is a partial cross-sectional view showing the process of forming the drawer end.
First, as shown in FIG. 7A, the insulating layer 61 (or insulating layer 64) is laminated on the magnetic substrate 60 (or insulating layer 63). Thereafter, an Ag film layer is formed on the insulating layer 61 (or the insulating layer 64) by using a thin film forming method such as sputtering or vapor deposition. Then, as shown in FIG. 7B, a flat lead end 41A (or lead end 41B, 51A, 51B) is formed using a series of photolithography techniques such as resist coating, exposure, development and etching. Form. Further, as shown in FIG. 7C, a photosensitive polyimide resin insulating layer 62 (insulating layer 65) is laminated on the leading end 41A (or the leading end 41B, 51A, 51B). As shown in FIG. 4D, three rectangular via holes 62b (or via holes 65b) having a width W and a length L that open in the vertical direction and the front side of the figure are formed by using a photolithography technique.
The number of via holes 62b (65b) is not limited to three, but is preferably between 1 and 5. Further, the width W of the via hole 62b (65b) is preferably about 1/3 to 1/10 of the width (the distance in the left-right direction in FIG. 3) of the leading end portion 42A (42B, 52A, 52B), and the length L is It is preferable that the length is equal to or more than ½ of the length (the distance in the front-rear direction in FIG. 3) of the leading end 42A (42B, 52A, 52B).
Thereafter, an Ag film layer is formed on the insulating layer 62 (or the insulating layer 65) by using a thin film forming method. Then, as shown in FIG. 7E, using the photolithography technique, the horizontal portion 43, the first wall portion 44, and the second portion of the leading end portion 42A (or the leading end portions 42B, 52A, and 52B) are used. A wall 45 is formed.
In this way, the lead end portions 41A, 42A, 41B, 42B, 51A, 52A, 51B, 52B, the first wall portion 44 and the second wall portion 45 of the coil bodies 4, 5 are connected to the insulating layers 62, 65. Can be formed on the edge.

次に、この実施例の電子部品1が示す作用及び効果について説明する。
図8は、従来型の引き出し端部を示す断面図であり、図9は、従来型の引き出し端部が示す作用を説明するための断面図である。
まず、図8に示すように、引き出し端部42Aを引き出し端部41Aと同様に平坦に形成して、従来型の引き出し端部を構成し、かかる引き出し端部41A,42Aを有する電子部品を高温高湿の環境下に置いた。すると、ポリイミド樹脂の絶縁層61〜63の熱膨張率が、Ag製の引き出し端部41A,42Aの熱膨張率よりも非常に大きいことから、図9に示すように、外部電極3−1側への絶縁層62の膨張の方が引き出し端部41A,42Aよりも長く伸びる。そして、絶縁層62の膨張による伸びは、外部電極3−1,3−2間の絶縁層62の全体の長さに対応する。このため、絶縁層62が、外部電極3−1(3−2)方向に長く伸びて、絶縁層62による押圧力Fが、矢印で示すように、外部電極3−1に加わる。この結果、外部電極3−1が変形して、引き出し端部41A,42Aから外れてしまうおそれがある。
Next, operations and effects of the electronic component 1 of this embodiment will be described.
FIG. 8 is a cross-sectional view showing a conventional drawer end, and FIG. 9 is a cross-sectional view for explaining the operation of the conventional drawer end.
First, as shown in FIG. 8, the drawer end portion 42A is formed flat like the drawer end portion 41A to constitute a conventional drawer end portion, and the electronic component having such drawer end portions 41A and 42A is heated at a high temperature. Placed in a humid environment. Then, since the thermal expansion coefficient of the insulating layers 61 to 63 of polyimide resin is much larger than the thermal expansion coefficient of the lead ends 41A and 42A made of Ag, as shown in FIG. 9, the external electrode 3-1 side The insulating layer 62 expands longer than the leading end portions 41A and 42A. The elongation due to the expansion of the insulating layer 62 corresponds to the entire length of the insulating layer 62 between the external electrodes 3-1 and 3-2. For this reason, the insulating layer 62 extends long in the direction of the external electrode 3-1 (3-2), and the pressing force F by the insulating layer 62 is applied to the external electrode 3-1, as indicated by an arrow. As a result, the external electrode 3-1 may be deformed and detached from the leading end portions 41A and 42A.

これに対して、この実施例の電子部品1では、図6に示したように、3つの第1の壁部44が、絶縁層62の前面から距離Lだけ奥部に配設され、第2の壁部45の奥端部同士に接続されている。このため、絶縁層62は、膨張時に、第1の壁部44から外部電極3−1,3−2迄の間の距離Lに対応して伸びるので、その伸びは、図8に示した従来型の引き出し端部が適用された絶縁層の伸びに比べて極めて短い。この結果、絶縁層62による押圧力が外部電極3−1にほとんど加わらず、この結果、外部電極3−1が引き出し端部41A,42Aから外れるおそれはない。
さらに、この実施例では、図5に示したように、引き出し端部41A,42A及び第2の壁部45を断面矩形状に形成して、外部電極3−1との接続面積を極めて大きくしているので、引き出し端部41A,42Aと外部電極3−1とが強固に接続されている。
On the other hand, in the electronic component 1 of this embodiment, as shown in FIG. 6, the three first wall portions 44 are disposed at the back by a distance L from the front surface of the insulating layer 62, and the second The back end portions of the wall portion 45 are connected to each other. For this reason, since the insulating layer 62 expands corresponding to the distance L between the first wall portion 44 and the external electrodes 3-1 and 3-2 at the time of expansion, the expansion is the same as the conventional one shown in FIG. It is extremely short compared to the elongation of the insulating layer to which the drawing end of the mold is applied. As a result, the pressing force by the insulating layer 62 is hardly applied to the external electrode 3-1, and as a result, there is no possibility that the external electrode 3-1 is detached from the leading end portions 41A and 42A.
Further, in this embodiment, as shown in FIG. 5, the lead-out end portions 41A and 42A and the second wall portion 45 are formed in a rectangular cross section, thereby greatly increasing the connection area with the external electrode 3-1. Accordingly, the lead-out end portions 41A and 42A and the external electrode 3-1 are firmly connected.

発明者等は、かかる効果を確認すべく、次のような実験を行った。
図10は、実験結果を示す線図である。
比透磁率600の磁性基板60,69を用い、その横,縦と厚みをそれぞれ1.0mm以下,2.0mm以下と25μm〜350μmに設定した。そして、これら磁性基板60,69を除く、絶縁層61〜66及びコイル体4,5の厚さを40μmに設定した。また、絶縁層61〜66としては、比誘電率が3の絶縁体を用いた。さらに、コイル体4,5の線路長を8.5mm〜11mmに設定し、各コイルパターン41(42,51,52)の線路幅と線路間隔とをそれぞれ23μm,15μmに設定した。
この実験では、まず、上記寸法及び上記材料の電子部品であって、図8に示した従来型の引き出し端部を有する電子部品を、温度70℃で湿度95%の高温高湿の環境下に、100時間〜1000時間の間、放置して、不良品の発生率を調べた。
すると、図10の不良品発生曲線S1で示すように、約500時間迄は、かかる高温高湿の環境下に放置しても、不良品は発生しなかったが、500時間を超えると、不良品発生率が急激に増加し、1000時間では、約55%にも達した。
次に、この実施例の電子部品1を上記寸法及び材料で作成し、温度70℃で湿度95%の高温高湿の環境下に、100時間〜1000時間の間、放置して、不良品の発生率を調べた。
すると、図10の不良品発生曲線S2で示すように、不良品発生率が、100時間〜1000時間の間「ゼロ」という極めて良好な結果を得、想定した効果を得ることができることを確認した。
The inventors conducted the following experiment in order to confirm this effect.
FIG. 10 is a diagram showing experimental results.
The magnetic substrates 60 and 69 having a relative magnetic permeability of 600 were used, and the horizontal, vertical, and thickness were set to 1.0 mm or less, 2.0 mm or less, and 25 μm to 350 μm, respectively. And the thickness of the insulating layers 61-66 and the coil bodies 4 and 5 except these magnetic substrates 60 and 69 was set to 40 micrometers. Further, as the insulating layers 61 to 66, an insulator having a relative dielectric constant of 3 was used. Furthermore, the line length of the coil bodies 4 and 5 was set to 8.5 mm to 11 mm, and the line width and the line interval of each coil pattern 41 (42, 51, 52) were set to 23 μm and 15 μm, respectively.
In this experiment, first, an electronic component having the above-mentioned dimensions and the above-described material and having the conventional drawer end shown in FIG. 8 is placed in a high-temperature and high-humidity environment at a temperature of 70 ° C. and a humidity of 95%. The sample was left for 100 hours to 1000 hours, and the occurrence rate of defective products was examined.
Then, as shown by the defective product generation curve S1 in FIG. 10, no defective product was generated even when left in such a high temperature and high humidity environment for up to about 500 hours. The generation rate of non-defective products increased rapidly, reaching about 55% in 1000 hours.
Next, the electronic component 1 of this example was made with the above-described dimensions and materials, and was left in a high-temperature and high-humidity environment with a temperature of 70 ° C. and a humidity of 95% for 100 hours to 1000 hours. The incidence was examined.
Then, as shown by the defective product generation curve S2 of FIG. 10, it was confirmed that the defective product occurrence rate was extremely good, “zero” between 100 hours and 1000 hours, and the expected effect could be obtained. .

なお、この発明は、上記実施例に限定されるものではなく、発明の要旨の範囲において種々の変形及び変更が可能である。
例えば、上記実施例では、図5及び図6に示したように、引き出し端部42Aに水平部43を設けると共に、3つの第1の壁部44を6対の第2の壁部45の奥端部間に1つ置きに接続した例を示したが、第1の壁部44は、第2の壁部の奥端部同士を接続していれば足りる。したがって、図11及び図12に示すように、長さLの第2の壁部45を、1つの引き出し端部42Aと引き出し端部41Aとの間に6つ列設し、1つの第1の壁部44を6つの第2の壁部45の奥端部全部に接続した構成の引き出し端部を備えた電子部品も、この発明の範囲に含まれる。
In addition, this invention is not limited to the said Example, A various deformation | transformation and change are possible in the range of the summary of invention.
For example, in the above embodiment, as shown in FIGS. 5 and 6, the horizontal portion 43 is provided at the drawer end portion 42 </ b> A, and the three first wall portions 44 are connected to the back of the six pairs of second wall portions 45. Although the example which connected every other edge part was shown, the 1st wall part 44 is enough if the back end parts of the 2nd wall part are connected. Accordingly, as shown in FIGS. 11 and 12, six second wall portions 45 each having a length L are arranged in a row between one drawing end portion 42A and one drawing end portion 41A. An electronic component that includes a drawer end having a configuration in which the wall 44 is connected to all the rear ends of the six second walls 45 is also included in the scope of the present invention.

この発明の一実施例に係る電子部品の分解斜視図である。It is a disassembled perspective view of the electronic component which concerns on one Example of this invention. 外部電極を分離して示す電子部品の外観図である。It is an external view of the electronic component which isolate | separates and shows an external electrode. 絶縁層の縁部で対向する引き出し端部を示す斜視図である。It is a perspective view which shows the drawer | drawing-out edge part which opposes at the edge part of an insulating layer. 図1におけるコイルパターン以降を透視して示す平面図である。FIG. 2 is a plan view showing a coil pattern and subsequent portions in FIG. 図4の矢視A−A断面図である。It is arrow AA sectional drawing of FIG. 図4の矢視B−B断面図である。It is arrow BB sectional drawing of FIG. 引き出し端部の形成過程を示す部分断面図である。It is a fragmentary sectional view showing a formation process of a drawer end part. 従来型の引き出し端部を示す断面図である。It is sectional drawing which shows the drawer | drawing-out edge part of the conventional type. 従来型の引き出し端部が示す作用を説明するための断面図である。It is sectional drawing for demonstrating the effect | action which the conventional drawer | drawing-out edge part shows. 実験結果を示す線図である。It is a diagram which shows an experimental result. 引き出し端部の一変形例を示す前断面図である。It is a front sectional view showing one modification of a drawer end. 図11に示す変形例の側断面図である。It is a sectional side view of the modification shown in FIG. 従来例の電子部品を示す分解斜視図である。It is a disassembled perspective view which shows the electronic component of a prior art example.

符号の説明Explanation of symbols

1…電子部品、 2…チップ体、 3−1〜3−4…外部電極、 4,5…コイル体、 41,42,51,52…コイルパターン、 41A,41B,42A,42B,51A,51B,52B,52B…引き出し端部、 43,43′…水平部、 44,44′…第1の壁部、 45…第2の壁部、 60,69…磁性基板、 61〜66…絶縁層、 62a,65a…ビアホール、 62b,65b…矩形状ビアホール、 67,68…接着層。   DESCRIPTION OF SYMBOLS 1 ... Electronic component, 2 ... Chip body, 3-1-3-4 ... External electrode, 4, 5 ... Coil body, 41, 42, 51, 52 ... Coil pattern, 41A, 41B, 42A, 42B, 51A, 51B , 52B, 52B ... drawer end, 43, 43 '... horizontal, 44, 44' ... first wall, 45 ... second wall, 60, 69 ... magnetic substrate, 61-66 ... insulating layer, 62a, 65a ... via hole, 62b, 65b ... rectangular via hole, 67, 68 ... adhesive layer.

Claims (1)

第1の絶縁層上のコイルパターンとこのコイルパターン上の第2の絶縁層上に形成されたコイルパターンとを並列に接続して成り、且つこれらのコイルパターンの引き出し端部同士が第2の絶縁層の縁部で対向する第1のコイル体と、
上記第1のコイル体の上方に積層された第3の絶縁層上のコイルパターンとこのコイルパターン上の第4の絶縁層上に形成されたコイルパターンとを並列に接続して成り、且つこれらのコイルパターンの引き出し端部同士が第4の絶縁層の縁部で対向する第2のコイル体と、
上記第1及び第2のコイル体の対向する引き出し端部がそれぞれ接続された複数の外部電極と
を備える電子部品であって、
上記対向する引き出し端部の間に挟まれた絶縁層の奥部に、これらの引き出し端部に接続された各外部電極に平行で且つ当該対向する引き出し端部に垂直に接続された所定幅の第1の壁部を1つ以上設け、
上記対向する引き出し端部の間に挟まれた絶縁層内に、先端部が当該絶縁層から露出した状態で、上記各外部電極と当該対向する引き出し端部とにそれぞれ垂直に接続された所定長さの第2の壁部を、複数列設すると共に、これら複数の第2の壁部の奥端部同士を、上記第1の壁部の幅方向両側部に接続した、
ことを特徴とする電子部品。
A coil pattern on the first insulating layer and a coil pattern formed on the second insulating layer on the coil pattern are connected in parallel, and the leading ends of these coil patterns are the second A first coil body facing at an edge of the insulating layer;
The coil pattern on the third insulating layer stacked above the first coil body and the coil pattern formed on the fourth insulating layer on the coil pattern are connected in parallel, and these A second coil body in which the drawn ends of the coil pattern face each other at the edge of the fourth insulating layer;
An electronic component comprising a plurality of external electrodes respectively connected to opposing leading ends of the first and second coil bodies,
In the inner part of the insulating layer sandwiched between the opposing lead-out end portions, a predetermined width connected in parallel to each external electrode connected to these lead-out end portions and perpendicular to the opposing lead-out end portions Providing one or more first walls,
A predetermined length that is vertically connected to each external electrode and the opposite leading end in an insulating layer sandwiched between the facing leading ends, with the tip portion exposed from the insulating layer. The second wall portions are arranged in a plurality of rows, and the back end portions of the plurality of second wall portions are connected to both sides in the width direction of the first wall portion,
An electronic component characterized by that.
JP2008070311A 2008-03-18 2008-03-18 Electronic component Pending JP2009224725A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011010491A1 (en) * 2009-07-23 2011-01-27 株式会社村田製作所 Switching power supply module having built-in coil

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011010491A1 (en) * 2009-07-23 2011-01-27 株式会社村田製作所 Switching power supply module having built-in coil
US8334747B2 (en) 2009-07-23 2012-12-18 Murata Manufacturing Co., Ltd. Coil-integrated switching power supply module
JP5310857B2 (en) * 2009-07-23 2013-10-09 株式会社村田製作所 Coil integrated switching power supply module

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