JP2009248050A - Ultrasonic cleaning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning device of which the slim design can be realized by miniaturizing a correction coil suitable for a high frequency current used in an ultrasonic cleaning device. <P>SOLUTION: In the ultrasonic cleaning device 10, cleaning an object to be cleaned, provided with at least an ultrasonic vibrator 2 giving ultrasonic vibration to a cleaning liquid 5 for cleaning a material to be cleaned and an ultrasonic generator 3 for vibrating the ultrasonic vibrator 2, and having the correction coil 1 inserted for forming a series resonance circuit 6 with the ultrasonic generator 3 and the ultrasonic vibrator 2, the above correction coil 1 possesses a troidal core with a slit. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an ultrasonic cleaning apparatus that cleans an object to be cleaned such as a semiconductor substrate or a glass substrate for a liquid crystal display using ultrasonic waves.

  In general, an ultrasonic cleaning apparatus is used for cleaning precision substrates such as semiconductor substrates and glass substrates for liquid crystal displays. The ultrasonic cleaning apparatus cleans an object to be cleaned by applying a high-frequency current generated by an ultrasonic oscillator to a cleaning liquid as ultrasonic vibration from an ultrasonic vibrator.

  In such an ultrasonic cleaning apparatus, an ultrasonic vibrator is installed at the bottom of the cleaning tank, and a high-frequency current generated by the ultrasonic oscillator is applied to the cleaning liquid as ultrasonic vibration by the ultrasonic vibrator. The ultrasonic vibrator is bonded to the nozzle, and the high frequency current generated by the ultrasonic oscillator is applied to the cleaning liquid supplied into the nozzle as ultrasonic vibration by the ultrasonic vibrator. Some of them are cleaned by spraying a cleaning liquid onto an object to be cleaned.

  Here, FIG. 5 is a block diagram showing a connection between a general ultrasonic oscillator and an ultrasonic transducer. The high-frequency current flows through the correction coil 51 through the main oscillation unit, the output unit, and the output transformer inside the ultrasonic oscillator 53, and further flows from the output cable 54 to the ultrasonic transducer 52.

  A circuit diagram of a general series resonance circuit formed of such an ultrasonic oscillator and an ultrasonic vibrator is shown in FIG. A current I65 flows through a resistor R62, an inductor L63 (corresponding to the correction coil 51), and a capacitor C64 (corresponding to the ultrasonic transducer 52) connected in series from the voltage source 61. At this time, the maximum current flows when the angular frequency ω = 1 / √LC. In general, the ultrasonic transducer 52 has a capacitive property. Therefore, in order to allow the maximum current to flow at a specific frequency, it is necessary to insert the correction coil 51 in series to form a series resonance circuit.

  However, since the high-frequency current generated by the ultrasonic oscillator flows in the correction coil used in the ultrasonic cleaning apparatus, an EI type ferrite core is used, which is large. In addition, in order to reduce the size of the correction coil, we considered using a toroidal core that is thinner than an EI type ferrite core. However, in an ultrasonic cleaning device, high-frequency current flows, so magnetic flux saturation occurs. There was a problem that it could not be used as a correction coil.

JP 2008-68221 A

  The present invention has been made in view of the above problems, and an object of the present invention is to provide an ultrasonic cleaning apparatus that can be slimly designed by downsizing a correction coil adapted to a high-frequency current used in the ultrasonic cleaning apparatus. The purpose is to provide.

  In order to achieve the above object, the present invention includes at least an ultrasonic vibrator that applies ultrasonic vibration to a cleaning liquid for cleaning an object to be cleaned, and an ultrasonic oscillator that vibrates the ultrasonic vibrator. In the ultrasonic cleaning apparatus having a correction coil inserted to form a series resonance circuit with the ultrasonic oscillator and the ultrasonic vibrator, the correction coil has a toroidal core with a slit. An ultrasonic cleaning apparatus for ultrasonically cleaning an object to be cleaned is provided.

  Thus, the present invention makes it difficult for magnetic flux saturation to occur by using a slit toroidal core for the correction coil, and it is possible to use a small correction coil in an ultrasonic cleaning apparatus that allows a high-frequency current to flow. Further, downsizing of the correction coil leads to a slim design of the ultrasonic cleaning device.

  In this case, the slit toroidal core of the correction coil is preferably a ferrite core. Further, the height of the slit toroidal core of the correction coil is preferably 30 mm or less (Claim 3), and the slit width of the slit toroidal core of the correction coil is preferably 2 mm or less (Claim). 4).

  Thus, by using a ferrite core for the slit toroidal core of the correction coil, the height can be reduced to 30 mm or less, and by further reducing the slit width of the slit toroidal core to 2 mm or less. Thus, it becomes possible to flow the high-frequency current used in the ultrasonic cleaning apparatus with more sure suppression of magnetic flux saturation.

  In the ultrasonic cleaning device according to the present invention, the use of a slit toroidal core in the correction coil makes it difficult for magnetic flux saturation to occur, and it is possible to use a small correction coil in an ultrasonic cleaning device that allows high-frequency current to flow. It becomes. Further, downsizing of the correction coil leads to a slim design of the ultrasonic cleaning device.

  As described above, conventionally, the correction coil used in the ultrasonic cleaning apparatus uses an EI type ferrite core, so that the height is as large as 50 mm, and when a thin toroidal core is used, magnetic flux saturation is achieved. Since this occurs and heat is generated, there is a problem that it cannot be used as a correction coil.

  In order to solve such problems, the present inventors have conducted extensive research. That is, even if a thin toroidal core is used to reduce the size of the correction coil used in the ultrasonic cleaning apparatus, magnetic flux saturation does not occur when a high-frequency current generated by an ultrasonic oscillator is applied. There is a need.

  Therefore, the present inventors can reduce the size of the correction coil by using a slit toroidal core in the correction coil of the ultrasonic cleaning device, making it difficult for magnetic flux saturation to occur even when a high-frequency current is passed. With this in mind, the present invention has been completed.

  Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings, but the present invention is not limited thereto.

First, FIG. 1 is a schematic view of an embodiment of an ultrasonic cleaning apparatus having a slitted toroidal core according to the present invention. In the ultrasonic cleaning apparatus 10, a cleaning tank 5 is filled with a cleaning liquid 5 for cleaning an object to be cleaned. An ultrasonic vibrator 2 for applying ultrasonic vibration to the cleaning liquid is installed on the bottom surface of the cleaning tank 4, and further, an ultrasonic oscillator 3 including the correction coil for vibrating the ultrasonic vibrator 2. have. In the series resonance circuit 6 formed by the ultrasonic oscillator 3 and the ultrasonic vibrator 2, the ultrasonic cleaning apparatus 10 having the correction coil 1 is provided.
The ultrasonic cleaning apparatus of the present invention is not limited to the cleaning tank type as described above, but an ultrasonic vibrator is bonded to the nozzle, and the high-frequency current generated by the ultrasonic oscillator is ultrasonically vibrated by the ultrasonic vibrator. As an example, the present invention can be applied to the cleaning liquid supplied into the nozzle and sprayed onto the object to be cleaned for cleaning.

  Here, the connection between the ultrasonic oscillator 3 and the ultrasonic transducer 2 can be the same as the conventional one. As shown in the block diagram of FIG. 2, the high-frequency current flows through the correction coil 21 through the main oscillation unit, output unit, and output transformer inside the ultrasonic oscillator 23, and further from the output cable 24 to the ultrasonic transducer 22. And flow.

  Further, as described above, the ultrasonic transducer generally has a capacitive property. Therefore, in order to allow the maximum current to flow at a specific frequency, it is necessary to insert a correction coil in series to form a series resonance circuit. As shown in the circuit diagram of FIG. 3, a current I35 flows through a resistor R32, an inductor L33 (corresponding to the correction coil 21), and a capacitor C34 (corresponding to the ultrasonic transducer 22) connected in series from the voltage source 31. Thus, in the present invention, a correction coil using a toroidal core with a slit is adopted as the correction coil 21.

  Next, FIG. 4 is a schematic view of an embodiment of a correction coil used in the ultrasonic cleaning apparatus according to the present invention. The correction coil 41 uses a toroidal core 42 with a slit. Also, using a ferrite core, the height H is 30 mm or less and the slit width W is 2 mm or less. In addition, in order to implement | achieve a predetermined inductance, the electric wire 43 is wound.

Thus, by using the slit toroidal core 42 for the correction coil 41, magnetic flux leaks from the slit portion of the core of the correction coil, so that the magnetic flux density in the core is reduced. Therefore, temperature rise is also suppressed and magnetic flux saturation is less likely to occur.
Therefore, when high-frequency current generated by the ultrasonic oscillator is passed through the correction coil, magnetic flux saturation is less likely to occur. By using the toroidal core 42 with a slit in the correction coil 41, the correction coil 41 can be downsized.

  Therefore, in the ultrasonic oscillator 3 of the ultrasonic cleaning apparatus 10 having the slitted toroidal core according to the present invention, the correction coil can be miniaturized by using the correction coil 1 having the slitted toroidal core, thereby reducing the size of the oscillator. The ultrasonic cleaning apparatus 10 can be slimmed.

  EXAMPLES Hereinafter, although an Example and a comparative example of this invention demonstrate this invention concretely, this invention is not limited to these.

(Example)
With respect to the correction coil used in the ultrasonic cleaning apparatus of the present invention as shown in FIG. A toroidal core with a slit having a height of 15 mm and a slit width of 0.3 mm was prepared. Further, in consideration of the case where an oscillator with an output of 50 W is used to drive a vibrator having a capacity of 3800 pF as an ultrasonic cleaning device, the number of turns of the correction coil is 95 T, and the inductance is 5.5 mH. A 40 kHz high frequency current 1 App was passed through the coil for 60 minutes.

  As a result, at a room temperature of 26 ° C., the temperature increase was 30 ° C., and magnetic flux saturation did not occur.

(Comparative example)
A toroidal core having no slits was prepared under the same conditions as in the example. At this time, the number of turns of the correction coil was 40 T, the inductance was 5.5 mH, and a 40 kHz high frequency current 0.5 App was supplied for 15 minutes.

As a result, at a room temperature of 26 ° C., the temperature increase was 60 ° C., and magnetic flux saturation occurred.
The output was 30W.

  As described above, as can be seen from the results of the example and the comparative example, when a toroidal core with a slit is used for the correction coil, magnetic flux saturation does not occur when a high-frequency current generated by the ultrasonic oscillator is passed through the correction coil. Thus, it can be seen that the coil can be miniaturized and the ultrasonic cleaning apparatus can be slimmed.

  The present invention is not limited to the above embodiment. The above embodiment is merely an example, and the present invention has the same configuration as that of the technical idea described in the claims of the present invention, and any device that exhibits the same function and effect is the present invention. It is included in the technical idea of the invention.

It is a figure which shows the outline of one Embodiment of the ultrasonic cleaning apparatus which concerns on this invention. It is a block diagram which shows a part of connection of the ultrasonic oscillator and ultrasonic transducer | vibrator of the ultrasonic cleaning apparatus which concerns on this invention. FIG. 3 is a circuit diagram of a series resonance circuit including an ultrasonic oscillator and an ultrasonic transducer of the ultrasonic cleaning apparatus according to the present invention. It is the schematic of one Embodiment of the correction | amendment coil used for the ultrasonic cleaning apparatus which concerns on this invention. It is a block diagram which shows a part of connection of a general ultrasonic oscillator and an ultrasonic transducer | vibrator. It is a circuit diagram of a general series resonance circuit.

Explanation of symbols

1, 21, 41, 51 ... correction coil, 2, 22, 52 ... ultrasonic transducer,
3, 23, 53 ... ultrasonic oscillator, 4 ... cleaning tank, 5 ... cleaning solution,
6 ... Series resonance circuit, 10 ... Ultrasonic cleaning device,
24, 54 ... output cable 31, 61 ... voltage source,
32, 62 ... resistor R, 33, 63 ... inductor L,
34, 64 ... capacitor C, 35, 65 ... current I,
42 ... Toroidal core with slit, 43 ... Electric wire,
H ... Height, W ... Slit width.

Claims (4)

  An ultrasonic vibrator that applies ultrasonic vibration to a cleaning liquid for cleaning an object to be cleaned; and an ultrasonic oscillator that vibrates the ultrasonic vibrator. An ultrasonic cleaning apparatus having a correction coil to be inserted to form a series resonant circuit, wherein the correction coil has a toroidal core with a slit, and ultrasonic cleaning for ultrasonically cleaning an object to be cleaned apparatus.   The ultrasonic cleaning apparatus according to claim 1, wherein the toroidal core with slits of the correction coil is a ferrite core.   The ultrasonic cleaning apparatus according to claim 1 or 2, wherein a height of the slit toroidal core of the correction coil is 30 mm or less.   The ultrasonic cleaning apparatus according to any one of claims 1 to 3, wherein a slit width of the toroidal core with slits of the correction coil is 2 mm or less.

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