JP2009119491A - Light beam splitting device, irradiation device, splitting method of light beam, method for manufacturing electronic device, and method for manufacturing precision component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light beam splitting device in which variation in a distribution rate due to change over time is suppressed, and to provide an irradiation device, a splitting method of a light beam, a method for manufacturing an electronic device and a method for manufacturing precision components. <P>SOLUTION: The light beam splitting device includes: a first array lens which is disposed on an optical path of the light beam; a second array lens which is disposed on an optical path on an exit side of the first array lens, divides the light beam to a plurality of the beams cooperatively with the first array lens, and makes the in-plane distribution of the energy intensity at the section of the light beam nearly uniform; a first condenser lens which is disposed on the optical path on an exit side of the second array lens, condenses the light beam emitted from the second array lens, and superposes the beams together, thereby shaping the light beam into the rectangular beam having nearly uniform in-plane distribution of the energy intensity: and a first dividing lens which is disposed on the optical path on the exit side of the first condenser lens, has a plurality of lenses provided in combination, and splits the beams for each light beam made incident on each of the plurality of the lenses. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a light beam branching device, an irradiation device, a light beam branching method, an electronic device manufacturing method, and a precision component manufacturing method.

In cutting, welding, surface treatment, measurement, and the like of various members, a light beam such as a laser beam is used from the viewpoint of stability and high-speed response.
In processing using such a light beam, for example, when the output of a laser oscillator is sufficient, energy can be used effectively by branching the laser beam and irradiating at multiple processing points. Has been done. For example, a technique has been proposed in which laser light is branched in time using a rotating mirror and irradiation is performed at a plurality of processing points (see Patent Document 1). Further, a technique has been proposed in which laser beams are simultaneously multi-branched using a branching mirror to perform irradiation at a plurality of processing points (see Patent Document 2).

However, in such a branching system, there is a possibility that the distribution rate may fluctuate due to changes with time. For example, the distribution ratio may vary due to damage to the electrode tube provided in the laser oscillator, fluctuation in the polarization component ratio due to contamination in the chamber, damage to the dielectric film provided in the branching mirror, and the like.
When the distribution rate fluctuates, the ratio of energy branched to each processing point changes, which may cause processing defects and quality variations.
JP-A-10-263868 JP 2007-1111749 A

  The present invention provides a light beam branching device, an irradiation device, a light beam branching method, an electronic device manufacturing method, and a precision component manufacturing method capable of suppressing a change in distribution rate due to a change with time.

  According to one aspect of the present invention, the first array lens provided on the optical path of the light beam, and provided on the optical path on the emission side of the first array lens, cooperate with the first array lens. A second array lens that divides the light beam into a plurality of beams and makes the in-plane distribution of energy intensity in the cross section of the light beam uniform, and an optical path on the emission side of the second array lens A first condenser lens that condenses and superimposes the light beams emitted from the second array lens to form a rectangular beam having a substantially uniform in-plane distribution of energy intensity, and the first condenser A first splitting lens that is provided on an optical path on the exit side of the lens and includes a plurality of lenses that are provided side by side, and is branched for each of the light beams incident on each of the plurality of lenses. Light beam splitting device is provided, characterized and.

  According to another aspect of the present invention, there is provided an emitting means for emitting a light beam, and the above-described light beam branching device provided on an optical path of the emitted light beam and for branching the light beam. There is provided an irradiation apparatus including the irradiation device.

  According to another aspect of the present invention, a light beam is incident on a first array lens and the light beam emitted from the first array lens is incident on a second array lens to emit the light. The beam is divided into a plurality of beams, and the in-plane distribution of energy intensity in the cross section of the light beam is made to be uniform, and the light beam emitted from the second array lens is incident on the first condenser lens and condensed. Then, by superimposing, the energy intensity is shaped into a rectangular beam having a substantially uniform in-plane distribution, and the shaped light beam is incident on a split lens having a plurality of lenses arranged side by side. A light beam branching method is provided, wherein the light beam is branched for each of the light beams incident thereon.

  According to another aspect of the present invention, there is provided an electronic device characterized in that a light beam is branched using the light beam branching device, and an irradiated object is irradiated with the branched light beam. A manufacturing method is provided.

  According to another aspect of the present invention, an electronic device is manufactured by branching a light beam by the light beam branching method and irradiating an irradiated object with the branched light beam. A method is provided.

  According to another aspect of the present invention, there is provided a precision component characterized in that a light beam is branched using the light beam branching device, and an irradiated object is irradiated with the branched light beam. A manufacturing method is provided.

  According to another aspect of the present invention, a precision component is manufactured by branching a light beam by the above-described light beam branching method and irradiating an irradiated object with the branched light beam. A method is provided.

  According to the present invention, there are provided a light beam branching device, an irradiation device, a light beam branching method, an electronic device manufacturing method, and a precision component manufacturing method capable of suppressing a change in distribution rate due to a change with time.

Hereinafter, embodiments of the present invention will be illustrated with reference to the drawings. In addition, in each drawing, the same code | symbol is attached | subjected to the same component and detailed description is abbreviate | omitted suitably.
FIG. 1 is a schematic configuration diagram for illustrating a light beam branching apparatus according to a first embodiment of the present invention. In FIG. 1, only a part of the light is shown to avoid complication of the drawing, and the others are omitted.
2 is a schematic diagram for illustrating an array lens, and FIG. 3 is a schematic diagram for illustrating a split lens.
FIG. 4 is a schematic graph for illustrating the substantially uniform energy intensity.

As shown in FIG. 1, the first array lens 2, the second array lens 3, the first condenser lens 4, the first split lens 5, Two split lenses 6, mirrors 7a and 7b, variable attenuators 8a and 8b, mirrors 9a and 9b, and second condenser lenses 10a and 10b are provided.
The light beam branching device 1 is provided on an optical path 23 formed by a light beam emitting means 20 and mirrors 21 and 22 for reflecting the emitted light beam and changing its direction by 90 °. ing. The irradiation device 24 including the light beam branching device 1 will be described later.

  Further, the diagram A shows the distribution of the energy intensity of the light beam on the incident surface of the first array lens 2, and the diagram B shows the distribution of the energy intensity of the light beam on the incident surface of the first split lens 5. Show. Line C shows the distribution of the energy intensity of the light beam on the condensing surfaces of the second condenser lenses 10a and 10b.

  That is, on the incident surface of the first array lens 2, the energy intensity distribution of the light beam has a Gaussian distribution (line A) or a mountain shape, and the incident surface of the first split lens 5 and the second condenser On the condensing surfaces of the lenses 10a and 10b, the energy intensity distribution of the light beam is substantially uniform (lines B and C).

  In general, in a beam cross section of a light beam (for example, laser light) emitted from a light beam emitting means (for example, a laser oscillator), the energy intensity distribution is a Gaussian distribution (line A). . It is difficult to branch such a light beam having a distribution at a predetermined ratio. In addition, for example, the distribution of energy intensity itself varies with changes in the light beam emitting means over time (for example, damage to the electrode tube or dirt in the chamber), and thus the distribution rate once set may vary. .

  As a result of the study, the present inventor has found that the in-plane distribution of the energy intensity of the light beam is made to be uniform and the shape of the beam cross section is rectangular when the light beam is branched, and is less susceptible to changes over time. Moreover, the knowledge that it becomes easy to branch to the ratio of the predetermined energy was obtained.

Therefore, in the present embodiment, by providing the first array lens 2, the second array lens 3, and the first condenser lens 4, the distribution of the energy intensity of the light beam as shown in the diagram B is substantially reduced. Uniformity is achieved and the beam cross-sectional shape is rectangular.
As shown in FIG. 2, the first array lens 2 has two cylindrical array lenses 2a and 2b arranged at a predetermined interval in a direction perpendicular to each other. Similarly, in the second array lens 3, the two cylindrical array lenses 3a and 3b are arranged at a predetermined interval in a direction perpendicular to each other.

  The light beam emitted from the emission means 20 is divided into a plurality of beams by the cylindrical array lens 2 a of the first array lens 2. At this time, on the incident surface of the first array lens 2 (the incident surface of the cylindrical array lens 2a), the energy intensity distribution of the light beam is a Gaussian distribution (line A) or a mountain shape. The light beam having such an intensity distribution is divided by the cylindrical array lenses 2a and 2b and the cylindrical array lenses 3a and 3b at the line segments (a) and (b) in FIG. Then, in each of the divided parts, the light beams are overlapped by the condenser lens 4 so that the energy intensity distribution is substantially uniformed as shown in (c) of FIG. That is, in the case shown in FIG. 4, the portions (e), (d), and (f) in FIG. 4 are overlapped, and the energy intensity distribution is made substantially uniform as shown in (c) in FIG. Is planned.

That is, the light beam emitted from the emitting means 20 is divided into a plurality of cross-sectional shapes of the light beam by the cooperation of the first array lens 2 and the second array lens 3, and the condenser lens 4 By condensing and superimposing again, the in-plane distribution of energy intensity in the cross section of the light beam can be made substantially uniform.
The first condenser lens 4 condenses the light beam emitted from the cylindrical array lens 3b of the second array lens 3 on the incident surface of the first split lens 5 so as to overlap.

As described above, an image in one cylindrical array lens 2 a is formed at the position of the first split lens 5 by one of the opposing cylindrical array lenses 3 a and the condenser lens 4. The image on one cylindrical array lens 2 b is also transferred onto the first split lens 5 by one of the opposing cylindrical array lenses 3 b and the condenser lens 4. As a result, the images in each of the cylindrical array lenses 2a and 2b are formed on the first splitting lens 5 and overlapped so that the beam has a rectangular cross-sectional shape and the in-plane distribution of energy intensity is substantially uniform. Shaped into a simple beam.
Since the in-plane distribution of the energy intensity of the incident light beam is made substantially uniform in this way, the light beam condensed on the incident surface of the first split lens 5 is also shown in the diagram B. In addition, the in-plane distribution of energy intensity is substantially uniform. Further, since the beam cross-sectional shape of the incident light beam is also rectangular, the beam cross-sectional shape of the light beam condensed on the incident surface of the first split lens 5 is also rectangular.
In this case, the positions of the cylindrical array lens 2 a and the first split lens 5 are conjugated with respect to the cylindrical array lens 3 a and the condenser lens 4. Therefore, a light beam having a rectangular cross-sectional shape and a substantially uniform energy intensity in-plane distribution can be transferred (imaging relationship, conjugate positional relationship) onto the first split lens 5.

  As shown in FIG. 3, the first split lens 5 and the second split lens 6 have a plurality of lenses (lens fragments) provided side by side. In this case, for example, it can be formed by joining a plurality of lenses, or cutting and rejoining one lens. When there is no joint allowance, there is only one image. However, if there is a joint allowance, the optical axis of each lens shifts, so that the light beam that has passed through each lens is condensed at a different position. And as the joining margin is larger, the optical axis of each lens is largely shifted, so that the distance between the condensing positions becomes larger. Note that the number of divisions (the number of lenses (lens fragments)) of the division lens illustrated in FIG. 3 is 2, but the number is not limited to this, and can be changed as appropriate.

  The light beams collected on the incident surface of the first divided lens 5 are divided without mixing, and enter each incident surface of the second divided lens 6. Thus, since the divided light beams do not mix with each other, the energy split ratio is constant even on the incident surface of the second split lens 6. For example, when there are two lenses attached to the split lens, the ratio is 1: 1. The divided light beams are separately collected by the second dividing lens 6 and are incident on the incident surfaces of the mirrors 7a and 7b.

  Here, the energy distribution rate is determined by the incident area of the light beam in each lens (lens fragment) of the first split lens 5. For example, as shown in FIG. 3, when a rectangular beam 11 is incident on the first split lens 5, if the areas of the beams 11 on both sides of the joint surface 12 are equal, energy is branched by 50%. If such an area increases, more energy is branched accordingly.

  The light beams incident on the mirrors 7a and 7b, which are direction changing means, are reflected to change their directions by 90 ° and enter the mirrors 9a and 9b via the variable attenuators 8a and 8b. The light beams incident on the mirrors 9a and 9b are further reflected and changed in direction by 90 °, and are condensed on the condensing surfaces 13a and 13b by the second condenser lenses 10a and 10b. In addition, the angle, the number, the arrangement, the form, and the like of the mirrors 7a, 7b, 9a, and 9b are not limited to those illustrated, and can be appropriately changed. Further, the mirrors 9a and 9b are not necessarily required. For example, the light beams reflected by the mirrors 7a and 7b can be incident on the second condenser lenses 10a and 10b.

  The variable attenuators 8a and 8b are for adjusting the light beam transmittance and the like. The variable attenuators 8a and 8b are provided with an attenuator capable of adjusting the light beam transmittance. A compensator as a compensation plate for correcting the optical path can also be provided. Further, the attenuator and the compensator are made of quartz or the like, and can be rotated in conjunction with each other in directions opposite to each other. The variable attenuators 8a and 8b are not necessarily required, but are preferably provided in order to easily adjust the energy amount at each branch destination.

  Further, the position of the first split lens 5 and the condensing position of the second condenser lenses 10a and 10b are set in a conjugate positional relationship. Therefore, the light beam incident on the first split lens 5 is condensed on the condensing positions (condensing surfaces 13a and 13b) of the second condenser lenses 10a and 10b, and the surface of the energy intensity as shown in the diagram C. A light beam having a substantially uniform internal distribution and a rectangular beam cross-sectional shape is transferred (image formation relationship, conjugate position relationship) onto the condensing surfaces 13a and 13b.

Further, the first split lens 5 and the condensing positions of the second condenser lenses 10a and 10b are conjugate to the second split lens 6 and the second condenser lenses 10a and 10b. , And so on.
More specifically, the upper half of the first split lens 5 (the left half in FIG. 1) and the condensing position of the second condenser lenses 10a and 10b are the upper half of the second split lens 6. And the second condenser lenses 10a and 10b are arranged in a conjugate positional relationship with the lower half lens (the right half in FIG. 1).
Similarly, the lower half lens (right half in FIG. 1) of the first split lens 5 and the condensing positions of the second condenser lenses 10a and 10b are the lower half lens of the second split lens 6. The second condenser lenses 10a and 10b have a conjugate positional relationship with the upper half lens (the left half in FIG. 1).
Here, if the condensing positions of the second condenser lenses 10a and 10b deviate from the conjugate positional relationship, the image (the image of the first divided lens 5) is blurred, and the condensing surface 13a. , The cross-sectional shape of the beam, which should have been a rectangle on 13b, is slightly rounded, and the energy intensity distribution becomes “mountain”. Therefore, at the position of the first split lens 5, even if the cross-sectional shape of the beam is rectangular and the in-plane distribution of energy intensity is substantially uniform, the beam cross-sectional shape and energy intensity distribution cannot be inherited. Become.
In the present embodiment, the first split lens 5 and the condensing positions of the second condenser lenses 10a and 10b are in relation to the second split lens 6 and the second condenser lenses 10a and 10b. Therefore, the in-plane distribution of the energy intensity at the position of the first split lens 5 is substantially uniform, and the light beam whose beam cross-sectional shape is rectangular is the condensing surface 13a, It is possible to transfer (image forming relationship, conjugate positional relationship) onto 13b.

  Here, examples of the light beam include laser light and ultraviolet light. As the laser light, for example, a solid laser whose medium is a solid (for example, a YAG laser), a liquid laser whose medium is a liquid (for example, a dye laser), and a gas laser whose medium is a gas (for example, a carbon dioxide laser) (Infrared), helium-neon laser (red), argon ion laser (visible, mainly blue or green), excimer laser (mainly ultraviolet), etc., semiconductor laser whose medium is a semiconductor, freedom close to the speed of light in vacuum Examples include a free electron laser generated when a magnetic field is applied to electrons to change the course.

  According to the present embodiment, the in-plane distribution of energy intensity is substantially uniform, and the cross-sectional shape of the beam is also rectangular. Therefore, the distribution ratio can be adjusted easily and accurately by changing the incident area. It can be carried out. Further, even if the distribution of the energy intensity of the light beam incident on the light beam splitter 1 fluctuates due to a change over time of the emitting means 20, the in-plane distribution of the energy intensity can be made substantially uniform, thereby suppressing the influence. can do.

  In addition, since the position of the first split lens 5 and the condensing position of the second condenser lenses 10a and 10b have a conjugate positional relationship, the light beam incident on the first split lens 5 is the first. It is possible to transfer a light beam which is condensed at the condensing positions of the second condenser lenses 10a and 10b, has a substantially uniform energy intensity in-plane distribution, and has a rectangular beam cross-sectional shape.

Next, the irradiation apparatus 24 provided with the light beam branching apparatus 1 will be illustrated.
As shown in FIG. 1, the irradiation device 24 includes a light beam emitting means 20, mirrors 21 and 22 for reflecting the emitted light beam and changing its direction by 90 °, and the light beam branching device 1. I have. The mirrors 21 and 22 are not necessarily required. For example, the light beam emitted from the emitting means 20 can be directly incident on the light beam branching apparatus 1.

FIG. 5 is a schematic configuration diagram for illustrating a light beam branching apparatus according to the second embodiment of the present invention.
In addition, the same code | symbol is attached | subjected to the part similar to what was illustrated in FIG. 1, and the description is abbreviate | omitted.
As shown in FIG. 5, the light beam branching device 1a includes a first array lens 2, a second array lens 3, a first condenser lens 4, a first split lens 5, a second split lens 6, A mirror 7c, mirrors 9a and 9b, and second condenser lenses 10a and 10b are provided.
The mirror 7c, which is the direction changing means, has a first reflecting surface 7c1 and a second reflecting surface 7c2, and the angle formed by the first reflecting surface 7c1 and the second reflecting surface 7c2 is 90 °. It has become. Note that the angle formed by the first reflecting surface 7c1 and the second reflecting surface 7c2 is not limited to that illustrated, but can be changed as appropriate.

  In the present embodiment, the variable attenuators 8a and 8b illustrated in FIG. 1 are omitted, but may be provided as appropriate. The second condenser lenses 10a and 10b are provided between the mirror 7c and the mirrors 9a and 9b. That is, the second condenser lenses 10 a and 10 b are provided on the light path on the emission side of the first split lens 5.

  However, even if the arrangement of the second condenser lenses 10a and 10b is different, the position of the first split lens 5 and the condensing position of the second condenser lenses 10a and 10b are in a conjugate positional relationship. Has been. Therefore, the light beam incident on the first split lens 5 is condensed on the condensing positions (condensing surfaces 13a and 13b) of the second condenser lenses 10a and 10b, and the in-plane distribution of energy intensity is substantially uniform. A light beam having a rectangular beam cross-section is transferred onto the condensing surfaces 13a and 13b.

Next, returning to FIG. 1, the irradiation device 24 is illustrated.
As shown in FIG. 1, the irradiation device 24 is provided with a light beam branching device 1, an emitting means 20, and mirrors 21 and 22. The light beam branching device 1 is provided on the optical path 23 of the light beam emitted from the emitting means 20.

The mirrors 21, 22 reflect the light beam emitted from the emitting means 20, change its direction by 90 °, and make it incident on the light beam branching device 1. The mirrors 21 and 22 are not necessarily required, and the light beam emitted from the emitting means 20 can be directly incident on the light beam branching apparatus 1. Further, the number, arrangement, angle, and the like of the mirrors 21 and 22 are not limited to those illustrated, and can be appropriately changed.
Further, a moving means 35 (see FIG. 9) that can place and hold an object to be irradiated can be provided on the portions that become the light condensing surfaces 13a and 13b, and is placed and held on the moving means 35. The irradiated surface of the irradiated object can also be the condensing surfaces 13a and 13b.

The emission unit 20 can be, for example, an excimer laser irradiation unit.
In this case, the excimer laser irradiation means emits an excimer laser oscillator that emits excimer laser light such as KrF (wavelength 248 nm) or ArF (wavelength 193 nm) or an excimer laser oscillator whose wavelength is 400 nm or less. An optical system for shaping the excimer laser beam (for example, a beam shaping lens, a diaphragm mask, a deflection mirror, an imaging lens, etc.) can be provided.

Next, the operation of the irradiation device 24 will be illustrated.
The light beam (for example, excimer laser beam) emitted from the emission unit 20 (for example, excimer laser irradiation unit) is reflected by the mirrors 21 and 22 so that the traveling direction thereof is changed by 90 °, and the light beam branching device. 1 is incident. The light beam incident on the light beam branching device 1 is shaped into a rectangular cross section by the first array lens 2, the second array lens 3, and the first condenser lens 4, and the surface of the energy intensity. The internal distribution is made substantially uniform.

  The light beams branched by the first split lens 5 are separately collected by the second split lens 6 and enter the incident surfaces of the mirrors 7a and 7b. The light beams incident on the mirrors 7a and 7b are reflected to change their directions by 90 ° and enter the mirrors 9a and 9b via the variable attenuators 8a and 8b. The light beams incident on the mirrors 9a and 9b are further reflected and changed in direction by 90 °, and are irradiated by a second condenser lens 10a and 10b and placed on the light collecting surfaces 13a and 13b (not shown). Condensed on the irradiated surface. In addition, when the moving means 35 (refer FIG. 9) which mounts and hold | maintains an irradiation object is provided, an irradiation position (condensing position) can be changed by moving an irradiation object.

  In this case, as described above, the position of the first split lens 5 and the condensing position (irradiation position) of the second condenser lenses 10a and 10b are in a conjugate positional relationship. A light beam having a substantially uniform in-plane distribution and a rectangular beam cross-sectional shape can be incident on the irradiation surface of the irradiation object. Further, the energy intensity of the light beam applied to the irradiation surface of the irradiated object can be adjusted by the variable attenuators 8a and 8b.

  Note that, for example, a mask or the like may be provided at the condensing position of the second condenser lenses 10a and 10b, and the shape formed on the mask may be transferred onto the irradiation surface of the irradiated object provided immediately below the mask. .

FIG. 6 is a schematic configuration diagram for illustrating an irradiation apparatus according to the third embodiment of the invention. In addition, the same code | symbol is attached | subjected to the part similar to what was illustrated in FIG. 1, and the description is abbreviate | omitted. In FIG. 6, only a part of the light is shown to avoid complication of the drawing, and the others are omitted.
As shown in FIG. 6, the irradiation device 24a includes the emitting means 20, the mirrors 21 and 22, the first array lens 2, the second array lens 3, the first condenser lens 4, and the first exemplified in FIG. One split lens 5, a second split lens 6, mirrors 7a and 7b, variable attenuators 8a and 8b, mirrors 9a and 9b, and second condenser lenses 10a and 10b are provided.

Furthermore, the third array lenses 25 and 31 are provided at the condensing positions of the second condenser lenses 10a and 10b, and the fourth array lenses 26, 32, and Condenser lenses 27a and 27b, relay lenses 28a and 28b, masks 29a and 29b, and reflective objective lenses 30a and 30b are provided.
Further, a moving means 35 (see FIG. 9) that can place and hold the irradiated object W (see FIG. 9) is provided on the portions to be the light collecting surfaces 13c and 13d. The irradiation surface of the object to be irradiated W placed and held is the condensing surfaces 13c and 13d.

Further, as illustrated in FIG. 1, the diagram A shows the distribution of the energy intensity of the light beam on the incident surface of the first array lens 2, and the diagram B shows the incident surface of the first split lens 5. 2 shows the distribution of the energy intensity of the light beam at. Line C shows the distribution of the energy intensity of the light beam on the incident surface of the third array lenses 25 and 31.
A line D shows the distribution of the energy intensity of the light beam on the incident surfaces of the masks 29a and 29b, and a line E shows the distribution of the energy intensity of the light beam on the incident surfaces of the reflective objective lenses 30a and 30b. Yes.

  That is, on the incident surface of the first array lens 2, the energy intensity distribution of the light beam is a Gaussian distribution (line A), the incident surface of the first split lens 5, and the third array lens 25. , 31, the incident surfaces of the masks 29a and 29b, and the incident surfaces of the reflective objective lenses 30a and 30b, the energy intensity distribution of the light beam is substantially uniform (lines B to E).

  Similar to the example illustrated in FIG. 2, the third array lenses 25 and 31 have two cylindrical array lenses 25 a, 25 b, 31 a, and 31 b arranged at a predetermined interval in a direction perpendicular to each other. . Similarly, in the fourth array lenses 26 and 32, the two cylindrical array lenses 26a, 26b, 32a, and 32b are arranged at a predetermined interval in a direction perpendicular to each other.

Then, the third array lenses 25 and 31, the fourth array lenses 26 and 32, and the third condenser lens 27 are used to reshape the cross section of the beam and make the distribution of the energy intensity uniform in the surface. Thus, the in-plane distribution of energy intensity on the irradiated surface (processing point) of the irradiated object is made more uniform.
That is, according to the present embodiment, the third array lenses 25 and 31 and the fourth array lenses 26 and 32 are arranged on the optical path for irradiating each irradiated object after the light beam is branched. A third condenser lens 27 is provided. Therefore, the in-plane uniformity of the energy intensity on the irradiated surface (processing point) of the irradiated object can be further improved.

  The third condenser lenses 27a and 27b and the relay lenses 28a and 28b collect the incident light beam and make it incident on the overlapping masks 29a and 29b. For this reason, the light beams condensed on the masks 29a and 29b also have a substantially uniform energy intensity distribution as shown in the diagram D, and the beam cross-sectional shape is also rectangular.

The masks 29a and 29b transmit a part of the incident light beam to shape the light beam into a predetermined size and shape. The light beam that has passed through the masks 29a and 29b is incident on the reflective objective lenses 30a and 30b. At this time, the in-plane distribution of energy intensity is substantially uniform on the incident surfaces of the reflective objective lenses 30a and 30b as shown in the diagram E.
Here, even if the transmission objective lens is used, the light beam transmitted through the masks 29a and 29b can be condensed on the irradiation surface of the irradiated object. However, if a transmission objective lens is used for condensing the irradiated object onto the irradiation surface, a so-called ghost (double image) may be generated, and the product quality may be deteriorated.

FIG. 7 is a schematic diagram for illustrating generation of a ghost (double image).
As shown in FIG. 7A, when the light beam is condensed on the irradiation surface of the object to be irradiated using the transmission objective lens, particularly when a UV laser is used, the surface of the transmission objective lens is microscopically viewed. Damage occurs and diffracted light is generated. When birefringence occurs, optical path division occurs.
When diffracted light or optical path splitting occurs, for example, as shown in FIG. 7B, a ghost (double image) is generated around the processed hole, and the processing accuracy may deteriorate. .

  Further, the light beam also has a wavelength spread, and there is a possibility that chromatic dispersion having a different focal length depending on the wavelength may occur. For example, in the case of a KrF excimer laser, there is a wavelength spread of about 0.5 nm during free run. Therefore, high-precision processing cannot be performed unless the light beam is focused on the irradiation surface of the irradiation object using a lens having an achromatic performance.

As a result of the study, the present inventor said that if a reflective objective lens that does not use a transmission lens is used, the processing accuracy can be greatly improved because there is no chromatic aberration and spherical aberration is also corrected on the optical axis. Obtained knowledge.
Here, the type of the reflective objective lens is not particularly limited. For example, a Schwarzschild (Schwarzschild) type or Offner type reflective objective lens can be used.

FIG. 8 is a schematic configuration diagram for illustrating a Schwarzschild (Schwarzschild) type reflection objective lens.
As shown in FIG. 8, the Schwarzschild (Schwarzschild) type reflection objective lenses 30a and 30b are provided so that the concave mirror 30c coated with the reflective film and the convex mirror 30d face each other, and enter from the opening 30e. The light beam is reflected by the convex mirror 30d and the concave mirror 30c and condensed on the condensing surfaces 13c and 13d.

FIG. 9 is a schematic perspective view for illustrating irradiation of an object to be irradiated.
In the figure, arrows X, Y, and Z indicate three directions orthogonal to each other, X and Y indicate a horizontal direction, and Z indicates a vertical direction.
As shown in FIG. 9, the portion that irradiates the irradiated object with the light beam includes the reflection objective lenses 30a and 30b for condensing the light beam on the irradiation surface (on the condensing surfaces 13c and 13d), and the object to be irradiated. A moving means 35 for placing the irradiated object W is provided.

  The moving means 35 can be, for example, an XY table or the like, and allows the irradiated object W to be moved in the XY direction (horizontal direction) in the drawing. In addition, a holding means (not shown) that holds the irradiation object W is provided on the mounting surface of the moving means 35. The holding means (not shown) can be, for example, an electrostatic chuck that uses electrostatic force, a vacuum chuck that uses vacuum force, or a mechanical chuck that can exhibit mechanical gripping force.

  A support base 34 is provided on the back side of the moving means 35, and a holding plate 33 for holding the reflective objective lenses 30 a and 30 b is provided on the upper surface of the support base 34. The reflective objective lenses 30 a and 30 b are attached to the holding plate 33 so that the reflective objective lenses 30 a and 30 b are held immediately above the moving means 35.

  A detection means 37 is provided on the upper surface of the holding plate 33 via a bracket 36. The detection unit 37 may be an optical detection unit such as a laser displacement meter, for example, and may be an upper surface (mounting surface) of the moving unit 35 or an irradiation surface (condensing surfaces 13a and 13b) of the irradiation object W. Detect vertical position. Based on the vertical position detected by the detection means 37, the Z direction (vertical direction) positions of the reflecting objective lenses 30a and 30b are adjusted by a moving means (not shown).

Next, the operation of the irradiation device 24a will be illustrated.
As described above, the light beam (for example, excimer laser beam) emitted from the emission unit 20 (for example, excimer laser irradiation unit) is incident on the light beam branching device 1, and the cross-sectional shape of the beam is shaped into a rectangle. Also, the in-plane distribution of energy intensity is made substantially uniform. Then, the direction is changed by mirrors 7 a and 7 b provided in the light beam branching device 1, and the light is condensed on the incident surfaces of the third array lenses 25 and 31.

  In this case, as described above, the position of the first split lens 5 and the condensing position of the second condenser lenses 10a and 10b (incident surface position of the third array lenses 25 and 31) are conjugate positions. Therefore, the light beam having a substantially uniform energy intensity in-plane distribution and a rectangular beam cross-sectional shape is transferred to the incident surfaces of the third array lenses 25 and 31. Moreover, the energy intensity of the light beam irradiated to the irradiated object can be adjusted by the variable attenuators 8a and 8b.

  Then, the light beam incident on the incident surfaces of the third array lenses 25 and 31 is shaped again by the third array lenses 25 and 31 and the fourth array lenses 26 and 32, and the energy of the cross section is changed. In-plane uniformity of the intensity distribution is achieved.

  The light beams emitted from the fourth array lenses 26 and 32 are collected by the third condenser lenses 27a and 27b and the relay lenses 28a and 28b and enter the masks 29a and 29b. The light beam incident on the masks 29a and 29b is shaped into a predetermined size and shape and is incident on the reflective objective lenses 30a and 30b. The light beams incident on the reflective objective lenses 30 a and 30 b are condensed on the irradiation surfaces (condensing surfaces 13 a and 13 b) of the irradiation object W held by the moving unit 35. And an irradiation position (condensing position) is changed by moving the to-be-irradiated object W horizontally as needed. The focal length can also be adjusted by moving the reflective objective lenses 30a and 30b in the Z direction (vertical direction).

FIG. 10 is a schematic configuration diagram for illustrating the connection of the irradiation devices.
In addition, the same code | symbol is attached | subjected to the part similar to what was illustrated in FIG.1, FIG.6 etc., and the description is abbreviate | omitted.
As shown in FIG. 10, when there is a margin in the output of the emitting means 20, a plurality of irradiation devices 24, 24a can be connected via optical means. That is, a plurality of light beam branching devices 24 and 24a and an optical means for connecting the plurality of light beam branching devices 24 and 24a may be provided.

The optical means includes, for example, mirrors 21 and 22 for reflecting the light beam emitted from the emission means 20 and changing its direction, transfer lenses 39a to 39d for transferring the light beam, and light from the emission means 20. Examples thereof include partial transmission mirrors 38a and 38b that branch the beam to the irradiation devices 24 and 24a.
The partial transmission mirrors 38a and 38b have a predetermined transmittance, reflect a part of the incident light beam to enter the irradiation device, and transmit the remaining light to another irradiation device. The mirrors 21 and 22 are total reflection mirrors. The transfer lenses 39a to 39d are lenses for collecting and transferring an incident light beam.
The optical means is not limited to those illustrated, and the number and arrangement of total reflection mirrors, partial transmission mirrors, transfer lenses, and the like can be changed as appropriate. Further, for example, it can be transferred using an optical fiber or the like, or can be branched to each irradiation device using the above-described array lens or split lens.

  In the present embodiment, the light beam splitter 1 is provided in each of the irradiation devices 24 and 24a. Therefore, for example, even if the distribution of the energy intensity of the light beam incident on each irradiation device 24, 24a fluctuates due to damage to the partially transmissive mirror, the transfer lens, etc. due to changes over time, the energy intensity distribution becomes substantially uniform. In addition, the irradiated object can be irradiated. Therefore, it is difficult to be affected by changes with time, and stable irradiation is possible.

Next, an example of a method for manufacturing an electronic device according to an embodiment of the present invention will be described.
As an electronic device manufacturing method, for example, a semiconductor device manufacturing method can be exemplified. Here, in the manufacturing process of a semiconductor device, a process of forming a pattern on a substrate (wafer) surface by film formation, resist coating, exposure, development, etching, resist removal, etc. in a so-called previous process, an inspection process, a cleaning process, and a heat treatment There are a process, an impurity introduction process, a diffusion process, a planarization process, and the like. In the so-called post-process, there are an assembly process such as dicing, mounting, bonding, and encapsulation, and a function and reliability inspection process.

  In these steps, for example, exposure using a KrF excimer laser, crystallization of an Si thin film by excimer laser annealing (ELA), activation of impurities by irradiating a high energy laser on the ion implantation surface, Impurity diffusion using an excimer laser, trench inspection using a laser, dicing using a laser, marking using a laser, appearance inspection using a laser, fine hole processing using a laser, and the like are performed.

The light beam branching device, the irradiation device, and the light beam branching method according to this embodiment can be applied to such a process, and a semiconductor device can be manufactured. Further, the present invention is not limited to the process described above, and can be applied to a process using a light beam.
For convenience of explanation, the method of manufacturing an electronic device according to the embodiment of the present invention has been described as a method of manufacturing a semiconductor device. However, the method is not limited to this. For example, repair of pixel defects using lasers in the manufacture of flat panel display devices, laser annealing, cutting glass, melting frit using lasers, forming electrodes on glass substrates using lasers, using lasers The present invention can also be applied to curing of color ink, formation of a contact electrode portion using a laser in manufacturing a solar cell, curing of a conductive adhesive using a laser, cutting of a photoelectric element using a laser, and the like. That is, it can be applied to various processing, processing, inspection, and the like using light beams in various electronic devices.

  In addition, since a known technique can be applied other than the light beam branching device, the irradiation device, and the light beam branching method described above, description thereof will be omitted.

Next, a method for manufacturing a precision component according to an embodiment of the present invention will be illustrated.
Examples of the method for producing precision parts include the production of various mechanical parts such as inkjet heads, photomasks, lenses, light guide plates, precision tools, molds, electrical parts, and optical parts. And in the manufacture of precision parts, when performing drilling, cutting, welding, soldering, heat treatment, surface modification, inspection, etc. using a light beam, the light beam branching device, irradiation device according to the present embodiment, A light beam branching method can be applied. In this case, the present invention is not limited to the illustrated example, and can be applied to a process using light beams of various precision parts.

In addition, since a known technique can be applied other than the light beam branching device, the irradiation device, and the light beam branching method described above, description thereof will be omitted.
The embodiment of the present invention has been illustrated above. However, the present invention is not limited to these descriptions.
As long as the features of the present invention are provided, those skilled in the art appropriately modified the design of the above-described embodiments are also included in the scope of the present invention.
For example, the shape, size, material, arrangement, and the like of each element included in the light beam splitter 1, 1a, the irradiation devices 24, 24a, etc. are not limited to those illustrated, but can be changed as appropriate.
Moreover, each element with which each embodiment mentioned above is combined can be combined as much as possible, and what combined these is also included in the scope of the present invention as long as the characteristics of the present invention are included.

1 is a schematic configuration diagram for illustrating a light beam branching apparatus according to a first embodiment of the present invention. It is a schematic diagram for illustrating an array lens. It is a schematic diagram for illustrating a split lens. It is a schematic graph for demonstrating substantially equalization of energy intensity. It is a schematic block diagram for illustrating the light beam branching apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic block diagram for illustrating the irradiation apparatus which concerns on the 3rd Embodiment of this invention. It is a schematic diagram for illustrating generation | occurrence | production of a ghost (double image). It is a schematic block diagram for illustrating a Schwarzschild (Schwarzschild) type reflection objective lens. It is a model perspective view for illustrating irradiation to a to-be-irradiated object. It is a schematic block diagram for illustrating the connection of an irradiation apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light beam splitter, 1a Light beam splitter, 2 1st array lens, 3 2nd array lens, 4 1st condenser lens, 5 1st split lens, 6 2nd split lens, 7a Mirror, 7b mirror, 7c mirror, 8a variable attenuator, 8b variable attenuator, 9a mirror, 9b mirror, 10a second condenser lens, 10b second condenser lens, 13a condensing surface, 13b condensing surface, 20 emitting means, 21 mirror , 22 Mirror, 23 Optical path, 24 Irradiation device, 24a Irradiation device, 25 Third array lens, 26, 28a Relay lens, 28b Relay lens, 30a Reflective objective lens, 30b Reflective objective lens, 32 Fourth array lens, 31 Third array lens, 35 moving means, 38a partial transmission mirror, 38b part Over-mirror, W object to be irradiated

Claims (18)

A first array lens provided on the optical path of the light beam;
An in-plane distribution of energy intensity in a cross section of the light beam, which is provided on an optical path on the emission side of the first array lens, divides the light beam into a plurality of beams in cooperation with the first array lens. A second array lens for bringing
A rectangular beam that is provided on the light path on the emission side of the second array lens and collects and superimposes the light beams emitted from the second array lens to form a substantially uniform in-plane distribution of energy intensity. A first condenser lens to be shaped;
A first split lens that is provided on an optical path on the output side of the first condenser lens and has a plurality of lenses provided side by side, and is branched for each light beam incident on each of the plurality of lenses;
An optical beam branching device comprising: A second condenser lens that is provided on the light path on the emission side of the first split lens and condenses the light beam;
2. The light beam branching apparatus according to claim 1, wherein the position of the first split lens and the condensing position of the second condenser lens are in a conjugate positional relationship. A second split lens provided on an optical path between the first split lens and the second condenser lens and having a plurality of lenses arranged side by side;
The condensing position of the first split lens and the second condenser lens is in a conjugate relationship with respect to the second split lens and the second condenser lens;
The light beam branching device according to claim 2.   4. The apparatus according to claim 3, further comprising a direction changing unit that is provided on an optical path between the second split lens and the second condenser lens and converts the direction of the light beam. Optical beam splitter.   The variable attenuator which was provided on the optical path of the output side of the said 1st division | segmentation lens, and was able to adjust the transmittance | permeability of the said light beam was further provided, The any one of Claims 1-4 characterized by the above-mentioned. Light beam splitter. Emitting means for emitting a light beam;
The light beam branching device according to any one of claims 1 to 5, wherein the light beam branching device is provided on an optical path of the emitted light beam and branches the light beam;
An irradiation apparatus comprising: A third array lens provided on the light path on the emission side of the light beam branching device;
A fourth array lens provided on the optical path on the emission side of the third array lens;
A reflective objective lens provided on the optical path on the exit side of the fourth array lens;
The irradiation apparatus according to claim 6, further comprising:   The irradiation apparatus according to claim 7, further comprising a mask provided on an optical path between the fourth array lens and the reflective objective lens.   The irradiation apparatus according to claim 8, further comprising a third condenser lens provided on an optical path between the fourth array lens and the mask.   The irradiation apparatus according to claim 9, further comprising a relay lens provided on an optical path between the third condenser lens and the mask.   The irradiation apparatus according to any one of claims 6 to 10, further comprising moving means for placing an object to be irradiated. A plurality of the light beam branching devices;
Optical means for causing the light beam emitted from the emission means to enter each of the plurality of light beam branching devices;
The irradiation apparatus according to any one of claims 6 to 11, further comprising: A light beam is incident on a first array lens and the light beam emitted from the first array lens is incident on a second array lens to divide the light beam into a plurality of beams and The in-plane distribution of energy intensity in the cross section is made closer to uniformity,
The light beam emitted from the second array lens is incident on the first condenser lens to be condensed and superposed to form a rectangular beam having a substantially uniform in-plane distribution of energy intensity,
A method of branching a light beam, wherein the shaped light beam is incident on a split lens having a plurality of lenses arranged side by side and branched for each of the light beams incident on each of the plurality of lenses. .   The light beam emitted from the first split lens is incident on a second condenser lens, and the light beam is condensed at a position conjugate with the position of the first split lens. 14. A method of branching a light beam according to 13.   6. A method of manufacturing an electronic device, comprising: branching a light beam using the light beam branching device according to claim 1; and irradiating an irradiated object with the branched light beam. .   15. A method of manufacturing an electronic device, comprising: branching a light beam by the light beam branching method according to claim 13; and irradiating an irradiated object with the branched light beam.   A method of manufacturing a precision part, comprising: branching a light beam using the light beam branching device according to any one of claims 1 to 5; and irradiating an irradiated object with the branched light beam. .   15. A method of manufacturing a precision part, comprising: branching a light beam by the light beam branching method according to claim 13; and irradiating an irradiated object with the branched light beam.

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