JP2009196776A - Storage cabinet and transportation system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a storage cabinet and a transportation system for stocking and delivering loads efficiently with a simple configuration, in regard to the storage cabinet and a transportation vehicle such as OHT between which stocking and delivering loads such as FOUP for accommodating various substrates for manufacturing a semiconductor element is conducted. <P>SOLUTION: The storage cabinet 10 includes a body unit that outlets/inlets H1, H2 having insides divided in a plurality of stages and capable of taking out and putting in the load 3 are provided at one stage of the stages, a plurality of placing parts capable of placing the loads respectively at each stage of the stages in the body unit, a vertically moving means 12 that can move vertically in a vertical space including an inner in/out position adjacent to the outlets/inlets H1, H2 in the body unit and that the loads are transferred from one placing part adjacent to the vertical space in each stage of the stages, and stocking and delivering ports P1, P2 that are arranged in an outer in/out position adjacent to the outlets/inlets H1, H2 outside of the body unit and that the loads are transferred from the vertically moving means 12 located at the inner in/out position and a transportation means 30 installed at outside of the body unit. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention includes, for example, a storage in which cargo is loaded and unloaded such as FOUP (Front Opening Unified Pod) that accommodates various substrates for manufacturing semiconductor elements with a transport vehicle such as a vehicle, and the storage. The present invention relates to the technical field of transport systems.

  This type of storage is provided with, for example, a plurality of shelves, and a carry-in port and a carry-out port, and through these carry-in ports and carry-out ports, loading and unloading of cassettes placed on or placed on a plurality of shelves is performed. (See Patent Document 1).

  In addition, there is a transport system in which the FOUP can be transferred to or from the conveyor by moving the load port up and down by a FOUP advance plate assembly (see Patent Document 2).

JP 2006-049454 A International Publication WO2007 / 091593

  However, according to the storage of Patent Document 1 described above, when the storage includes a large number of shelves, and a large number of cassettes can be accommodated or placed on the large number of shelves, a large number of cassettes are loaded and unloaded. Is carried out through only two ports, the carry-in port and the carry-out port, and therefore has a technical problem that the carrying efficiency is low.

  In addition, according to the transport system of Patent Document 2 described above, even when a single FOUP is quickly transferred to and from the conveyor when the lift distance of the load port is relatively long, a large number of FOUPs can be transferred. In transfer, the raising / lowering time increases in proportion to the number of loads, and there exists a technical subject that conveyance efficiency falls.

  The present invention has been made in view of the above-described problems, for example, a storage that enables efficient loading and unloading of cassettes, FOUPs, and the like with a simple configuration, and a transport system including such a storage. It is an issue to provide.

  In order to solve the above problems, the storage of the present invention is internally divided into a plurality of stages in the vertical direction, and an inlet / outlet capable of loading and unloading is provided in one of the plurality of stages. The main body and the plurality of stages in the main body are arranged so as to spread in two horizontal directions, and each of the loads can be accommodated or placed, and each of the loads can move horizontally between each other. A plurality of placement portions that are vertically movable in a vertically extending vertical space including an internal entrance position adjacent to the entrance / exit in the main body portion, and in each of the plurality of stages, the plurality of placement portions. And a vertical movement means for transferring the load to and from one mounting part adjacent to the vertical space, and an external entrance / exit position adjacent to the entrance / exit outside the main body part, The above in the access position With the mobile unit, together with the load through the doorway is transferred, between the transport means which is laid on the body outer, and a Goods Movement port where the load is transferred.

  According to the storage of the present invention, loading and unloading of cargo such as FOUP is performed with a transport vehicle such as a vehicle. The transport vehicle includes elevating means such as a hoist mechanism, and the elevating means includes holding means such as a gripper. The transport vehicle travels along a track, for example, and transports the load held by the holding means to the storage, a manufacturing device for manufacturing a semiconductor element, another storage, a stocker, or the like. The transport vehicle moves the load to or from the storage port or the storage port in the storage device by moving the load held by the holding unit or the holding unit by the lifting unit during loading / unloading. Included.

  The storage of the present invention is disposed above a processing apparatus such as a relatively short manufacturing apparatus. However, a space corresponding to the storage (that is, for arranging the storage) is required between the processing apparatus and the track. The present invention is also a storage that can effectively use a space that is not originally used, for example, above a processing apparatus.

  The storage of this invention is provided with a main-body part, a some mounting part, an up-and-down moving means, and a storage / exit port. The main body is, for example, a housing or a frame, and the inside is divided into a plurality of stages in the vertical direction. Here, “multiple stages” corresponds to, for example, the height of the interior, and in fact, the vertical length in the space above the processing apparatus described above. It is set larger than the height. In the present invention, for example, a group, a type, or the like is assigned to each stage, and a plurality of loads of a predetermined section can be stored in each stage. In particular, the present invention is a storage that can be efficiently loaded and unloaded when two loads are loaded or unloaded in succession, and when a load to be unloaded immediately after a load to be loaded is unloaded. . Further, such a storage may be called a stocker.

  An entrance / exit is provided in at least one of the plurality of stages. A position adjacent to the entrance / exit in the main body is set as an “internal entrance / exit position”, and a position adjacent to the entrance / exit outside the main body is set as an “external entrance / exit position”. Further, a vertically extending space including the internal access position is set as a “vertical space”.

  The plurality of placement units in each of the plurality of stages are arranged in a range extending in two horizontal directions, for example, one horizontal direction parallel to the track and one horizontal direction orthogonal to the track. The plurality of placement units include, for example, a roller conveyor including a plurality of rollers and a conveyor such as a belt conveyor. With these conveyors, the load is horizontally moved (that is, transported in the storage) between the plurality of placement units. Of the plurality of placement units, the placement unit adjacent to the vertical space is set as “one placement unit”.

  The vertical movement means is moved up and down in the vertical space, and is moved to a position corresponding to one mounting portion in each of a plurality of stages, for example. At this time, the load is transferred in the horizontal direction between the up-and-down moving means and the one mounting portion in any one of the steps.

  The loading / unloading port is arranged at the external loading / unloading position, and loads are transferred in the horizontal direction between the vertical movement means at the internal loading / unloading position in one stage or between the conveyance means. The conveyance means is provided along the outer wall of the main body part at a predetermined distance from the outer wall of the main body part, for example. The entry / exit port includes, for example, a mechanism for rotating a transfer surface on which a load is transferred from a transport vehicle, a mechanism for sliding, and a robot arm capable of transferring the load between the transfer surface and one placement unit. Or a conveyor that is the same as or different from the placement unit.

  In such a storage of the present invention, at the time of warehousing, for example, a load to be warehousing is transferred (warehousing) from the transport vehicle to the warehousing / unloading port. Next, the vertical movement means is moved to the internal loading / unloading position, and the load is transferred from the loading / unloading port to the vertical movement means. Next, the vertical movement means is moved to the vertical position corresponding to the stage to be stored. Next, the load is transferred from the up-and-down moving means to one mounting portion in the same stage. Then, the plurality of placement units are moved from the one placement unit to a desired placement unit in the same stage (that is, transported in the storage).

  At the time of delivery, for example, a load to be delivered is moved from a desired placement unit to one placement unit in the same stage (that is, transported in the storage). Next, if the vertical movement means is not in the vertical position corresponding to the stage storing the load to be delivered, the vertical movement means is moved to the vertical position corresponding to the stage storing the load to be delivered. The Next, when the load is horizontally moved to the vertical movement means by the one placing portion, the vertical movement means is moved to the internal entry / exit position. Next, the load is transferred from the vertically moving means to the loading / unloading port, and the load on the loading / unloading port is transferred (shipped) from the loading / unloading port to the transport vehicle.

  The warehousing operation and the warehousing operation described above are performed through one warehousing / unloading port. At the time of warehousing, for example, the load transferred (warehousing) from the transport vehicle is moved up and down from the warehousing port immediately after warehousing. Since the loading / unloading port becomes empty in a short time after loading, the loading time required for one load at the loading / unloading port is shortened. Also, at the time of delivery, for example, if the goods to be delivered on the up-and-down moving means are transferred from the entry / exit port to the transport vehicle immediately after being moved to the entry / exit port, the goods to be delivered will be slightly Since the loading / unloading port becomes empty in a short time, the unloading time required for one load at the loading / unloading port is shortened.

  Therefore, in the present invention, the first moving part in each of the vertical movement means and each of the plurality of stages to be transferred thereafter is for placing the loaded goods or the goods to be unloaded immediately after loading or just before unloading. Functions as a temporary entry / exit port. Thereby, since the original loading / unloading port only has to deliver and receive the load between the transport vehicle or the vertical movement means, the loading / unloading time required for one load at the original loading / unloading port is greatly reduced. .

  In addition, a plurality of loads can be continuously transferred to the vertical movement means by a plurality of placement units, and in each of the plurality of stages, the loaded load or the load to be unloaded is independently transported in the storage. Is done. For this reason, in the case of a series of loading / unloading in which a load to be unloaded after a load to be unloaded by a single transport vehicle is unloaded, and a continuous storage or unloading by a plurality of transport vehicles, The in-storage transport time for the load (that is, the loaded load and / or the load to be unloaded) is minimized.

  As described above, loads can be efficiently loaded and unloaded by shortening the loading and unloading times at the loading / unloading port and minimizing the transfer time in the storage.

  In addition, the storage of this invention may be provided with two or more entrance / exit ports, for example. When two entry / exit ports are provided, for example, one entry / exit port provided corresponding to the entrance / exit is used as a dedicated entry port, and the other entry / exit port provided corresponding to the other entrance / exit is used exclusively for delivery. Functions as a port. Thereby, a large number of loads can be received or delivered via a port dedicated to entry or delivery. Such two entry / exit ports may be provided side by side or adjacent to each other, or may be provided at both ends or in the vicinity thereof so as to be separated from each other.

  In one aspect of the storage of the present invention, each of the plurality of placement units is configured to be capable of horizontally moving the load between the plurality of placement units in each of the plurality of stages.

  According to this aspect, the plurality of placement units include, for example, a roller conveyor including a plurality of rollers and a conveyor such as a belt conveyor, and the load can be horizontally moved between these conveyors.

  In another aspect of the storage of the present invention, the main body further includes an internal movement unit capable of horizontally moving the load between the plurality of placement units in each of the plurality of stages.

  According to this aspect, each of the plurality of placement units can simply store or place a load, for example. The internal movement means includes, for example, a support unit that supports a load from the bottom instead of the placement unit, and a moving mechanism such as a robot arm that horizontally moves the support unit. Or you may provide the mechanism which moves a load between mounting parts by conveyor mechanisms, such as a roller conveyor and a belt conveyor. The internal movement means can horizontally move the load by horizontally moving the support portion between the plurality of placement portions by these mechanisms.

  In another aspect of the storage of the present invention, the up-and-down moving means is further configured to move the load horizontally with respect to the one placement unit.

  According to this aspect, in addition to the mechanism that moves up and down, the vertically moving means includes, for example, a mechanism that rotates a transfer surface on which a load is transferred from an entry / exit port, a mechanism that slides, and a load that is transferred to the transfer surface. A robot arm that can be transferred to and from the loading / unloading port, or a conveyor that is the same as or different from the placement unit is provided. The up-and-down moving means can horizontally move the load with respect to the one mounting portion in any one of the stages by these mechanisms.

  In another aspect of the storage of the present invention, each of the plurality of stages further includes an inner transfer means that horizontally moves the load between the vertical movement means and the one placement portion.

  According to this aspect, the up-and-down moving means can be moved up and down simply within the vertical space, for example. The inner transfer means includes, for example, a mechanism for rotating the transfer surface on which the load is transferred from the loading / unloading port, a mechanism for sliding, and a robot arm capable of transferring the load between the transfer surface and the loading / unloading port. Or a conveyor that is the same as or different from the placement unit. The inner transfer means can move the load horizontally with the one mounting portion in any of the stages by these mechanisms.

  According to this aspect, the internal movement means may be further configured to be able to horizontally move the load between the vertical movement means and the one placement portion in each of the plurality of stages.

  If comprised in this way, an internal moving means will be provided with a support part and a moving mechanism, for example. In this case, the internal movement means can horizontally move the load by horizontally moving the support section between the vertical movement means and the one placement section at any stage.

  In another aspect of the storage of the present invention, the loading / unloading port is configured to be able to move the load horizontally with respect to the transfer means.

  According to this aspect, the loading / unloading port includes, for example, a mechanism for rotating the transfer surface on which the load is transferred, a mechanism for sliding, and the transfer of the load between the transfer vehicle or the vertical movement means or the transfer means. A robot arm that can be transferred between the surface and the transport vehicle, or a conveyor that is the same as or different from the placement unit is provided. The entrance / exit port can horizontally move the load with the transporting means by such a mechanism.

  In another aspect of the storage of the present invention, the storage further includes an outer transfer unit that horizontally moves the load between the loading / unloading port and the transfer unit.

  According to this aspect, the loading / unloading port is, for example, a transfer surface for simply transferring a load. The outer transfer means is, for example, a mechanism that rotates the transfer surface, a mechanism that slides, a robot arm that can transfer a load between the transfer surface and the transfer means, or a conveyor that is the same as or different from the placement unit. Is provided. The outer transfer means can horizontally move the load between the outer transfer means and the transport means.

  In another aspect of the storage of the present invention, the transport means has a path extending along the side wall of the main body, and the entrance is separated from the side wall by a predetermined horizontal distance in the one stage. A plurality of loading / unloading ports are provided at the predetermined horizontal distance along the side wall corresponding to the entrance / exit.

  According to this aspect, a path | route is a movement path | route of the load conveyed, for example by a conveyor, and has a part extended along the side wall of a main-body part via the loading / unloading port. A plurality of entry / exit ports are provided in correspondence with a plurality of entrances / exits provided in one stage. For example, specifically, at least one entry / exit port among the plurality of entry / exit ports is used as a dedicated entry port, and at least one entry / exit port is excluded from the plurality of entry / exit ports excluding the entry / exit port. , Make it function as a port dedicated to shipping. In this case, the transport distance of the load in the storage is shortened, and the transport time in the storage is shortened in each of the plurality of stages. In addition, a plurality of loads are transferred at the same time between a plurality of loading / unloading ports and routes. Therefore, a large number of loads can be efficiently loaded and unloaded at the same time.

  In order to solve the above problems, a transport system according to the present invention includes the above-described storage and the transport unit.

  According to the transfer system of the present invention, for example, between a transfer means laid in a factory or the like for manufacturing a semiconductor element, and a storage box installed along the transfer means, via a loading / unloading port in the storage box. The load can be transferred.

  The transport system of the present invention includes, for example, the above-described storage and transport means. The storage has, for example, outer transfer means, and horizontally moves (that is, transfers) the load between the loading / unloading port and the transfer means. A conveyance means is conveyor mechanisms, such as a roller conveyor and a belt conveyor, for example, drives this conveyor mechanism, and conveys the load transferred from the loading / unloading port along a conveyance path.

  For example, at the time of transfer from the loading / unloading port to the transporting unit, first, driving of a portion adjacent to the loading / unloading port (hereinafter referred to as “transporting portion”) in the transporting unit is stopped. At this time, the load on the loading / unloading port is horizontally moved (that is, transferred) from the loading / unloading port to the transfer portion by the outer transfer means. Thereafter, driving of the transport portion is resumed by the transport means, and the load on the transport portion is transported downstream in the transport direction.

  At the time of transfer from the transfer means to the loading / unloading port, first, when the load is transferred from the upstream side in the transfer direction to the transfer portion by the transfer means, the drive of the transfer portion is stopped. At this time, the load on the transport portion is horizontally moved (that is, transferred) from the transport portion to the loading / unloading port by the outer transfer means. Thereafter, if there is a load to be transported, the transport unit resumes driving of the transport portion. In this manner, the load is quickly transferred between the loading / unloading port and the conveying means.

  Due to the transfer operation as described above, the load is quickly transferred between the loading / unloading port and the transfer means, so that the load transferred by the transfer means can be efficiently loaded and unloaded.

  In addition, although the conveyance system of this invention is provided with a storage, you may apply processing apparatuses, such as a manufacturing apparatus, instead of a storage.

  According to another aspect of the transport system of the present invention, the transport means supports the load on a path extending along a side wall of the main body and a portion of the path at a position adjacent to the loading / unloading port. And a rotation mechanism capable of rotating at least a portion of the support portion corresponding to a range for placing the load in a horizontal plane.

  According to this aspect, the transport means includes the path, the support part, and the rotation mechanism. In the route, for example, a portion at a position adjacent to the loading / unloading port is divided. The support portion can support the load on the divided portion. The rotation mechanism includes, for example, a turntable and can rotate the support portion by 90 degrees in a horizontal plane. For example, with respect to the transport means having such a rotation mechanism, as the support portion is rotated 90 degrees to the left in the horizontal plane, the load on the support portion is rotated 90 degrees to the left in the horizontal plane, and the movement direction of the load is changed. It is directed to the main body (in other words, entry / exit port). Thereafter, when the conveyor mechanism in the support portion is driven, the load on the transport means is moved to the loading / unloading port. By configuring the conveying means in this way, it can be transferred from the conveying means to the loading / unloading port through the shortest path.

  In addition, also in the conveyance system of this invention, it is possible to take the various aspects similar to the various aspects in the storage of this invention mentioned above.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  The configuration of the storage according to the embodiment will be described with reference to FIGS. 1 to 6.

  First, the outline | summary of the conveyance system which has the storage which concerns on embodiment is demonstrated with reference to FIG. FIG. 1 shows an appearance of a transport system including a storage according to the embodiment.

  In FIG. 1, the transport system 100 includes a rail 1, a vehicle 2, a stocker 10, a conveyor 30, and a controller 201. The rail 1 serves as a track for the vehicle 2 to travel. The controller 201 includes a processor, a memory, and the like as an example of a control unit, and is connected to each part of the transport system 100. In the semiconductor element manufacturing process, the controller 201 uses the vehicle 2 or the conveyor 30 and the FOUP 3 inside and outside the stocker 10. Transport and transfer are managed or controlled as will be described in detail later.

  The vehicle 2 is an OHT (Overhead Hoist Transport) (overhead traveling vehicle) driven by, for example, a linear motor as an example of a transport vehicle. The vehicle 2 travels along the rail 1 and conveys the FOUP 3 to the stocker 10, the manufacturing apparatus 101, the OHT buffer, a large stocker, or the like. The vehicle 2 has a hoist mechanism 2a, can hold the FOUP 3, and can move the held FOUP 3 up and down. In the present embodiment, the vehicle 2 transfers the FOUP 3 to / from the loading / unloading port P1 or P2 by vertical transfer by the hoist mechanism 2a.

  As an example of the “load” according to the present invention, the FOUP 3 can store a plurality of various substrates (not shown) therein. The FOUP 3 has a flange portion 4 held by the hoist mechanism 2a on the upper surface, and a recess (not shown) engaged with a positioning pin 11a described later on the bottom surface.

  The stocker 10 includes a main body portion 10a, loading / unloading ports P1 and P2, a slide mechanism 16, and an in-storage conveyance unit 20.

  FIG. 2 schematically shows the front of the storage of FIG. In FIG. 2, the main body 10a is equally divided into four stages F1 to F4 in the vertical direction. Among the four stages F1 to F4, in the uppermost stage F1, which is the “one stage” according to the present invention, one side surface (that is, the front surface in FIG. 1) has two openings H1 and a predetermined horizontal distance therebetween. H2 is provided. Each of the openings H1 and H2 is formed in a size that allows the FOUP 3 to be taken in and out of the main body 10a as an example of the “entrance / exit” according to the present invention. FIG. 3 schematically shows the top surface of the transport system of FIG. In FIG. 3, the two openings H1 and H2 are arranged along the rail 1 (that is, the alternate long and short dash line R1 in FIG. 3). In the main body 10a, an area IN1 or IN2 (that is, indicated by a one-dot chain line in FIG. 3) adjacent to the opening H1 or H2 is set as an example of the “internal access position” according to the present invention. A vertically extending space S1 or S2 (that is, indicated by a one-dot chain line in FIG. 2) including IN1 or IN2 (that is, indicated by a one-dot chain line in FIG. 3) is set as an example of the “vertical space” according to the present invention. Has been. The area adjacent to the opening H1 or H2 outside the main body 10a is set as an example of the “external entry / exit position” according to the present invention, and the entry / exit ports P1 and P2 are arranged in this area. .

  In this embodiment, the stocker 10 includes two entry / exit ports P1 and P2. With respect to the two loading / unloading ports P1 and P2, the loading / unloading port P1 is installed on the upstream side of the traveling direction D1 in the vehicle 2 and the conveying direction D2 on the conveyor 30, and the loading / unloading port P2 is installed on the downstream side thereof. The entry / exit ports P1 and P2 are shared by the vehicle 2 and the conveyor 30 and are used for entry / exit between the vehicle 2 and the stocker 10 and / or between the conveyor 30 and the stocker 10. Each loading / unloading port P <b> 1 and P <b> 2 has a transfer surface 11 for transferring the FOUP 3 between the vehicle 2 and the conveyor 30 at the center. Positioning pins 11 a are attached to the transfer surface 11. The positioning pin 11a is engaged with the recess of the FOUP 3 to be loaded / unloaded. In the conveyor 30, an area CV <b> 1 or CV <b> 2 (that is, indicated by a dashed line in FIG. 3) is set at a position adjacent to the entry / exit port P <b> 1 or P <b> 2.

  As an example of the “outer transfer means” according to the present invention, a plurality of slide mechanisms 16 are provided corresponding to the loading / unloading ports P1 and P2. The slide mechanism 16 includes, for example, a rotation band 17, a pair of rollers (not shown), and an actuator with respect to the loading / unloading port P1 or P2. The rotation band 17 is formed in a ring shape. The rotation band 17 and the pair of rollers are configured such that the ring-shaped rotation band 17 surrounds the pair of rollers. A part of the rotation band 17 (hereinafter referred to as “rotation band portion”) functions as the transfer surface 11. The slide mechanism 16 rotates the rotation band 17 by driving the actuator and rotating the pair of rollers. By this rotation, the slide mechanism 16 horizontally moves the FOUP 3 between the entry / exit port P1 or P2 and the area IN1 or IN2, and at the same time the entry / exit port P1 or P2 and an area CV1 or CV2 in the conveyor 30 described later. The FOUP 3 is moved horizontally between.

  The horizontal movement by the slide mechanism 16 will be described in detail with reference to FIG. Specifically, when the FOUP 3 is horizontally moved from the entry / exit port P1 or P2 to the area IN1 or IN2, the actuator rotates the pair of rollers to the right by a predetermined angle. With this rotation, when the rotation band 17 is rotated to the right by a predetermined distance, the rotation band portion functioning as the transfer surface 11 becomes a groove on the opening H1 or H2 side (that is, the arrow D4 in FIG. 3). Are drawn in order and arranged below the pair of rollers. As a result, the FOUP 3 on the transfer surface 11 (that is, the entry / exit port P1 or P2) is horizontally moved to the area IN1 or IN2 through the opening H1 or H2.

  When horizontally moving the FOUP 3 from the area IN1 or IN2 to the loading / unloading port P1 or P2, the actuator rotates the pair of rollers counterclockwise by a predetermined angle in accordance with the movement of the FOUP3 from the area IN1 or IN2. With this rotation, when the rotation band 17 is rotated left by a predetermined distance, the rotation band portion is sequentially pulled out from the groove on the opening H1 or H2 side (that is, the position indicated by the arrow D5 in FIG. 3). By being arranged above the pair of rollers, it functions as the transfer surface 11. As a result, the FOUP 3 from the area IN1 or IN2 is horizontally moved to the transfer surface 11 through the opening H1 or H2 and placed on the loading / unloading port P1 or P2. As this placement state, the recess of the FOUP 3 is engaged with the positioning pin 11 a of the transfer surface 11.

  On the other hand, when horizontally moving the FOUP 3 from the entry / exit port P1 or P2 to the area CV1 or CV2, the actuator rotates the pair of rollers counterclockwise by a predetermined angle. With this rotation, when the rotation band 17 is rotated left by a predetermined distance, the rotation band portion is sequentially drawn into the groove on the conveyor 30 side (that is, indicated by the arrow D5 in FIG. 3). It arrange | positions below a roller. As a result, the FOUP 3 on the transfer surface 11 (that is, the entry / exit port P1 or P2) is horizontally moved to the area CV1 or CV2.

  When the FOUP 3 is horizontally moved from the area CV1 or CV2 to the entry / exit port P1 or P2, the actuator rotates the pair of rollers to the right by a predetermined angle in accordance with the movement of the FOUP3 from the area CV1 or CV2. With this rotation, when the rotation band 17 is rotated to the right by a predetermined distance, the rotation band portion is sequentially pulled out from the groove on the conveyor 30 side (that is, the position indicated by the arrow D5 in FIG. 3). It functions as the transfer surface 11 by being arranged above the roller. As a result, the FOUP 3 from the area CV1 or CV2 is horizontally moved to the transfer surface 11 and placed on the loading / unloading port P1 or P2. As this placement state, the recess of the FOUP 3 is engaged with the positioning pin 11 a of the transfer surface 11.

  In FIG. 1 again, the in-storage transport unit 20 includes a plurality of placement units 21 and an elevating mechanism 12 in the main body 10a. The transport unit 20 in the storage cabinet controls the plurality of placement units 21 in a general manner, and transports the plurality of FOUPs 3 independently at each stage F1 to F4 (that is, transports in the storage cabinet), as well as a lifting mechanism. By moving 12 up and down, the plurality of FOUPs 3 are moved between the plurality of stages F1 to F4. In the present embodiment, two first placement portions 21a and 21d are set as an example of “one placement portion” according to the present invention for the plurality of placement portions 21 in each of the stages F1 to F4.

  The configuration of the in-storage transport unit 20 will be described in detail with reference to FIGS. 5 and 6. FIG. 5 shows an arrangement of a plurality of placement units according to the embodiment, and FIG. 6 shows a state after rotation of the plurality of placement units of FIG. 5 and 6 specifically correspond to the A1-A1 cross section in FIG. 2 and show a plurality of placement portions 21 arranged in the uppermost stage F1 of the stocker 10. FIG.

  In FIG. 5, the in-storage transport unit 20 performs the in-storage transport independently on each floor F <b> 1 to F <b> 4 by horizontally moving the FOUP 3 between the plurality of mounting units 21 by the plurality of mounting units 21. . The plurality of placement units 21 are arranged in two horizontal directions (that is, the horizontal direction and the vertical direction in FIG. 5) in the area C1 (that is, indicated by bold lines in FIG. 5) except for the spaces S1 and S2 in each floor F1 to F4. Six are arranged so as to spread. Each placement unit 21 is a rotation placement unit 21a to 21f, and of these six rotation placement units 21a to 21f, two rotation placement units adjacent to the space S1 or S2 are the first placement. The parts 21a and 21d are set respectively.

  In the present embodiment, the plurality of placement units 21 are arranged one by one in each of the spaces S1 and S2 in addition to the six placement units 21 in each stage F1 to F4. The two placement portions 21 arranged in the spaces S1 and S2 are rotary placement portions 21o and 21p common to the plurality of stages F1 to F4, and are moved up and down in the space S1 or S2 by the lifting mechanism 12. .

  The elevating mechanism 12 is provided in each of the spaces S1 and S2 as an example of the “vertical moving means” according to the present invention. The elevating mechanism 12 includes, for example, a pair of rails, a support portion 13 and an actuator (not shown) with respect to the space S1 or S2. The pair of rails are attached in the space S1 or S2 so that the longitudinal direction thereof is parallel to the vertical direction. The support part 13 supports the rotation mounting part 21o or 21p in the space S1 or S2. One end of the support portion 13 is fitted to a pair of rails. The elevating mechanism 12 drives the actuator to move the support portion 13 up and down along the pair of rails, thereby allowing each of the rotary placement portions 21o and 21p to move to the first placement portion 21a in each stage F1 to F4. Alternatively, it is independently moved to a position facing 21d (hereinafter simply referred to as “position corresponding to each stage F1 to F4”). The two rotary mounting parts 21o and 21p moved to positions corresponding to the respective stages F1 to F4 by the lifting mechanism 12 are independent of the FOUP 3 with the first mounting parts 21a or 21d in the respective stages F1 to F4. And move horizontally. Further, the two rotary mounting portions 21o and 21p moved to the position corresponding to the uppermost stage F1 (that is, the area IN1 or IN2) are connected to the loading / unloading port P1 or P2 through the opening H1 or H2. FOUP3 is horizontally moved independently.

  As shown in FIG. 5, when the two rotary mounting parts 21o and 21p are in the area IN1 or IN2, the eight mounting parts 21 (that is, the mounting parts 21a to 21f, 21o and 21p) are mutually connected. The FOUP 3 is moved horizontally between them. Each of the eight placement portions 21 includes a roller 23 and an actuator (not shown). The roller 23 is rotated by an actuator. The upper surface of the roller 23 functions as a placement surface on which the FOUP 3 is accommodated or placed. Regarding the horizontal movement of the FOUP 3, specifically, when the FOUP 3 is accommodated or placed on the placement portion 21b, when the roller 23 in the placement portion 21b is rotated to the right, the FOUP 3 is moved to the right of the placement portion 21b. It is moved horizontally to the adjacent placement portion 21c. In this case, when the roller 23 in the mounting portion 21b is rotated counterclockwise, the FOUP 3 is moved horizontally to the mounting portion 21e adjacent to the left of the mounting portion 21b. In addition, although each mounting part 21 performs the roller conveyor type movement by rotation of the roller 23, you may perform the belt conveyor type movement by rotation of a belt etc. in addition to this.

  Each of the eight placement units 21, that is, the eight rotary placement units 21a to 21f, 21o, and 21p, further includes a turntable 24 and an actuator (not shown), and the movement direction and posture of the FOUP 3 are set to 90. Rotate degrees. The turntable 24 is disposed below the roller 23 and fixes the roller 23 via a bearing (not shown). The turntable 24 is rotated 90 degrees in the horizontal plane by the actuator, and the roller 23 is rotated 90 degrees in the horizontal plane. Specifically, when the turntable 24 is rotated 90 degrees to the right in the eight rotary placement portions 21a to 21f, 21o, and 21p in the state of FIG. 5, the roller 23 is integrated as shown in FIG. Turns 90 degrees to the right. By this rotation, the moving direction and the posture of the FOUP 3 housed or placed in the rotary placement portions 21a to 21f, 21o, and 21p are rotated 90 degrees to the right. When the turntable 24 is rotated 90 degrees counterclockwise, the roller 23 is integrally rotated 90 degrees counterclockwise. By this rotation, the moving direction and posture of the FOUP 3 housed or placed in the rotary placement portions 21a to 21f, 21o, and 21p are rotated 90 degrees to the left.

  In FIG. 1 again, the conveyor 30 is an example of the “conveying means” according to the present invention, for example, paths R2 and R3, a plurality of conveyor portions 31, a rotating mechanism 32, a pair of support walls (not shown), and an actuator. And FOUP3 is conveyed along a path R2 or R3 (that is, indicated by a one-dot chain line in FIG. 1). Path | route R2 is extended along the side wall (namely, front surface in FIG. 1) of the main-body part 10a. The path R3 is a path branched at a right angle from the path R2 on the downstream side of the position corresponding to the side wall. The plurality of conveyor portions 31 are attached inside the pair of support walls so as to form a pair along the path R2 and on both sides of the path R2. Each of the plurality of conveyor portions 31 is, for example, a Caterpillar (registered trademark) type conveyor, and supports the FOUP 3 from the bottom surface as an example of the “support portion” according to the present invention. Each of the pair of conveyor portions 31 is configured to be capable of mounting one or two FOUPs 3. The conveyor 30 conveys the FOUP 3 in the conveying direction D2 or D3 along the path R2 or R3 by simultaneously rotating the pair of conveyor portions 31 on which the FOUP 3 is placed by driving the actuator. In this embodiment, in particular, the conveyor 30 horizontally moves the FOUP 3 to the loading / unloading port P1 or P2 by simultaneously rotating a pair of conveyor portions 31 rotated by a rotation mechanism 32 described later.

  In FIG. 3 again, in the present embodiment, the plurality of conveyor portions 31 are composed of a first conveyor portion 31a and a second conveyor portion 31b. About the 1st conveyor part 31a, the length along path | route R2 is set so that two FOUP3 can be mounted, and about the 2nd conveyor part 31b, this length is set so that one FOUP3 can be mounted. Yes.

  As shown in FIG. 3, a pair of second conveyor portions 31b are arranged in areas CV1 and CV2 (that is, shown in FIG. 3). A plurality of rotation mechanisms 32 are provided corresponding to the areas CV1 and CV2 (that is, a plurality of pairs of second conveyor portions 31b). The rotation mechanism 32 includes a turntable 32a or 32b and an actuator (not shown), and rotates the movement direction and posture of the FOUP 3 by 90 degrees. The turntable 32a or 32b is disposed below the pair of second conveyor portions 31b, and fixes the pair of second conveyor portions 31b via a fixing unit (not shown). FIG. 4 shows a state after the rotation of the rotation mechanism 32 of FIG. As shown in FIG. 4, the turntable 32a or 32b is rotated 90 degrees in the horizontal plane by the actuator, and the pair of second conveyor portions 31b are rotated 90 degrees in the horizontal plane.

  Specifically, when the turntable 32a or 32b in the state of FIG. 3 is rotated 90 degrees to the left, as shown in FIG. 4, the pair of second conveyor portions 31b are integrally rotated 90 degrees to the left, The longitudinal direction of the pair of second conveyor portions 31b is orthogonal to the path R2. In this case, the front surface of the FOUP 3 placed on the pair of second conveyor portions 31b is directed to the entry / exit port P1 or P2, and the FOUP 3 is located between the area CV1 or CV2 and the entry / exit port P1 or P2. It becomes possible to move horizontally. When the turntable 32a or 32b in the state of FIG. 4 is rotated 90 degrees to the right, as shown in FIG. 3, the pair of second conveyor portions 31b are integrally rotated 90 degrees to the right, The longitudinal direction of the two conveyor portions 31b is parallel to the path R2. In this case, the front surface of the FOUP 3 placed on the pair of second conveyor portions 31b is directed to the downstream side of the path R2, so that the FOUP 3 can be transported from the area CV1 or CV2 to the downstream side of the path R2. become.

As shown in FIG. 1, in addition to the areas CV1 and CV2 (that is, shown in FIG. 3), the rotation mechanism 32 is located at a position where the route R2 branches into the route R2 and the route R3 (that is, a one-dot chain line in FIG. 1). Is also arranged at a branch point PT1) indicated by. Specifically, when the turntable 32c is in the state shown in FIG. 1 at the branch point PT1, the transport direction of the FOUP 3 is maintained, and the FOUP 3 is transported along the route R2 downstream from the branch point PT1. When the turntable 32c in the state of FIG. 1 is rotated 90 degrees to the right, the pair of second conveyor portions 31b are integrally rotated 90 degrees to the right. In this case, the front surface of the FOUP 3 placed on the pair of second conveyor portions 31b is directed to the path R3, so that the FOUP 3 can be transported along the path R3.
(Incoming / outgoing operation between transport means and storage)

  Next, the loading / unloading operation between the transfer means and the storage in the transfer system according to the present embodiment will be described with reference to FIGS. 1, 3, and 5. In the following description, as an initial setting, the entry / exit port P1 functions as a dedicated port for entry and the entry / exit port P2 functions as a dedicated port for delivery.

  In FIG. 1, at the time of warehousing from the conveyor 30 to the stocker 10, first, the controller 201 has a FOUP 3 to be admitted to the stocker 10 on the upstream side of the area CV1 (that is, shown in FIG. 3) in the route R2. Is detected. Then, the FOUP 3 to be stored is transported toward the area CV1 by the conveyor 30 and placed on the pair of second conveyor portions 31b in the area CV1. Thereafter, the turntable 32a is rotated 90 degrees counterclockwise, and the pair of second conveyor portions 31b is rotated 90 degrees counterclockwise. Thereby, a pair of 2nd conveyor parts 31b will be in the state which can be moved horizontally (namely, transfer) between the transfer surfaces 11. FIG. Then, the FOUP 3 to be stored is transferred from the area CV1 to the transfer surface 11 in the storage port P1 in the horizontal direction (that is, storage) by the pair of second conveyor portions 31b rotated counterclockwise. In addition, with respect to the transfer surface 11, you may receive by the vertical transfer from the vehicle 2 which travels along the rail 1 (namely, shown with the dashed-dotted line R1 in FIG.3 and FIG.5).

  Subsequently, when the rotary mounting portion 21o is not in the area IN1 (that is, shown in FIG. 3) in the uppermost stage F1, the rotary mounting is performed by the lifting mechanism 12 in parallel or before and after the warehousing from the conveyor 30. The part 21o is moved up and down in the area IN1. Then, the FOUP 3 on the transfer surface 11 is horizontally moved by the slide mechanism 16 to the area IN1 through the opening H1. Then, the lifting mechanism 12 moves the rotary placement part 21o in the area IN1 up and down to a position corresponding to the stage F2 in which the received FOUP 3 is to be accommodated. Thereafter, the roller 23 in the rotary mounting unit 21o is rotated by the in-storage transport unit 20, and the FOUP 3 on the rotary mounting unit 21o is horizontally moved from the rotary mounting unit 21o to the first mounting unit 21a. The Then, the FOUP 3 on the first placement unit 21a is moved to the desired placement unit 21 (that is, transported in the storage). Thereby, a series of warehousing operations are completed.

  At the time of delivery from the stocker 10 to the conveyor 30, first, the FOUP 3 on the desired placement unit 21 is moved to the first placement unit 21d by the transport unit 20 in the storage unit (that is, transported in the storage unit). Is done. Subsequently, when there is no rotation mounting portion 21p at the position corresponding to the stage F2 on which the FOUP 3 to be discharged is mounted, the lifting mechanism 12 rotates and mounts it in parallel with or before and after the transfer in the storage. The placement portion 21p is moved up and down to a position corresponding to the step F2. Then, the roller 23 in the first placement unit 21d is rotated by the transport unit 20 in the storage, and the FOUP 3 on the first placement unit 21d is horizontally moved to the rotation placement unit 21p at a position corresponding to the stage F2. Is done. Then, the rotary mechanism 21p is moved up and down by the lifting mechanism 12 to the area IN2 (that is, shown in FIG. 3) in the uppermost stage F1. Then, the roller 23 in the rotary mounting part 21p is rotated by the transport unit 20 in the storage, and the FOUP 3 on the rotary mounting part 21p is transferred from the area IN2 to the transfer surface 11 in the loading / unloading port P2 through the opening H2. Moved horizontally.

  Subsequently, the controller 201 detects that the FOUP 3 is not placed on the pair of second conveyor portions 31b in the area CV2 (that is, shown in FIG. 3) of the route R2. Subsequently, when the pair of second conveyor portions 31b are not in a state orthogonal to the path R2, the turntable 32a is rotated 90 degrees counterclockwise, and the pair of second conveyor portions 31b is rotated 90 degrees counterclockwise. Thereby, a pair of 2nd conveyor parts 31b will be in the state which can horizontally move (namely, transfer) FOUP3 between the transfer surfaces 11. FIG.

  Thereafter, the FOUP 3 on the transfer surface 11 is transferred (i.e., delivered) in the horizontal direction by the slide mechanism 16 onto the pair of second conveyor portions 31b rotated counterclockwise. The FOUP 3 on the transfer surface 11 may be unloaded by vertical transfer by the vehicle 2 that travels along the rail 1 (that is, indicated by the alternate long and short dash line R1 in FIGS. 3 and 5).

  Subsequently, the turntable 32b is rotated 90 degrees to the right, and the pair of second conveyor portions 31b on which the delivered FOUP 3 is placed is rotated 90 degrees to the right. Thereby, a pair of 2nd conveyor parts 31b will be in the state which can convey FOUP3 from the area CV2 to the downstream of path | route R2. Thereby, a series of leaving operations are completed.

  Thus, according to the conveyance system 100 provided with the stocker 10 of this embodiment, the mounting part 21o or 21p moved up and down between the plurality of stages F1 to F4 by the lifting mechanism 12 via the loading / unloading port P1 or P2. Since the FOUP 3 is moved horizontally between the second conveyor portion 31b rotated by the rotation mechanism 32, the loading / unloading ports P1 and P2 can be in an empty state immediately after loading and immediately before loading. Moreover, since each in-stage F1 to F4 is independently transported in the storage, a plurality of FOUPs 3 can be transported in the storage in a short time. As a result, the warehousing time and the warehousing time required for one FOUP 3 at the warehousing / unloading ports P1 and P2 are shortened, and the transport time in the storage is shortened, so that the FOUP 3 can be efficiently loaded and unloaded.

  In the present embodiment, the conveyor 30 includes a plurality of conveyor portions 31, but a plurality of rollers may be provided instead of the plurality of conveyor portions 31.

  In the present embodiment, each of the plurality of placement units 21 has the same area, and one FOUP 3 can be accommodated or placed in one placement unit 21. For example, a plurality of FOUPs 3 can be accommodated. You may comprise the mounting part which can be accommodated or mounted.

  FIG. 7 is a cross-sectional view illustrating an arrangement of a plurality of placement units 121 included in the in-storage transport unit 120. In FIG. 7, the in-storage transport unit 120 includes two placement units 121 g and 121 h each having eight rollers 123. Each placement unit 21 shown in FIG. 5 accommodates or places one FOUP 3, whereas each of the two placement units 121g and 121h can accommodate or place a maximum of three FOUPs 3. . For example, the in-storage conveyance unit 120 moves the FOUP 3 from the placement unit 121b to the desired placement unit 121c. In this case, the conveyance path indicated by the arrow D7 is set as the shortest conveyance path. The set conveyance path is a path that reaches the desired placement unit 121c from the placement unit 121b via the placement unit 121h. When the FOUP 3 moves the placement unit 121h, the eight rollers 123 in the placement unit 121h are rotated at high speed to move the two placement units 21 (for example, the placement units 21b and 21c) shown in FIG. Travel time is shorter than when you do. Thereby, while being able to shorten the conveyance time of conveyance in a storage, more FOUP3 can be accommodated or mounted in the main-body part 110a.

  In the present embodiment, the plurality of placement units 21 are configured to be able to horizontally move the FOUP 3 between each other. However, apart from the plurality of placement units that house or place the FOUP 3, a plurality of placement units 21 An internal movement mechanism for horizontally moving the FOUP 3 may be provided.

  FIG. 8 is a cross-sectional view showing a plurality of placement units 421 and an internal movement mechanism 430 included in the in-storage transport unit 420. In FIG. 8, like the plurality of placement units 21 shown in FIG. 5, the placement unit 421 has eight placements arranged so as to spread in two horizontal directions (that is, the horizontal direction and the vertical direction in FIG. 8). Although each of the placement units 421a to 421f, 421o, and 421p includes the roller 23, each of the eight placement units 421a to 421f, 421o, and 421p has a FOUP3. It has a shelf 422 for receiving or mounting. The shelf 422 includes a plurality of shelf portions 423 so as to support both ends of the FOUP 3.

  As an example of the “internal movement means” according to the present invention, the internal movement mechanism 430 includes, for example, a support plate 431, a support plate slide part 432, a movement part 433, and a movement rail 434, in other words, by a robot arm. It has a movable configuration, and the FOUP 3 can be moved horizontally between the plurality of placement units 421 by lifting the FOUP 3 between the plurality of placement units 421. The support plate 431 is formed in a size that can be arranged between the pair of shelf portions 423 in each of the mounting portions 421a to 421f, 421o, and 421p, and when moving horizontally, instead of the pair of shelf portions 423, the FOUP3 (Specifically, the center portion of the FOUP 3) is supported from the bottom side. The support plate slide portion 432 can slide the support plate 431 in one horizontal direction (that is, the vertical direction in FIG. 8). For example, the support plate 431 disposed on the placement portion 421e (that is, a solid line in FIG. 8). Is slid (horizontal movement) to the placement portion 421o arranged in one horizontal direction of the placement portion 421e (that is, the downward direction in FIG. 8), and is placed on the placement portion 421o (ie, FIG. 8, a support plate 431) indicated by a two-dot chain line. Such a support plate slide part 432 is fixed to the upper surface of the moving part 433. The moving unit 433 moves along the moving rail 434 extending in one horizontal direction orthogonal to the sliding direction of the support plate slide unit 432 (that is, the left and right direction in FIG. 8), thereby moving the support plate slide unit 432 horizontally. . During the horizontal movement, the moving unit 434 moves the support plate slide unit 432 up and down. Specifically, for example, when moving the FOUP 3 accommodated or placed in any of the placement units 421, the movement unit 434 makes the height of the support plate 431 higher than the pair of shelf portions 423. Then, the support plate slide part 432 is raised. With this rise, the FOUP 3 is supported by the support plate 431 instead of the pair of shelf portions 423. Further, when the FOUP 3 supported by the support plate 431 is stored or placed on any of the placement units 421, the moving unit 434 makes the height of the support plate 431 lower than the pair of shelf portions 423. Then, the support plate slide part 432 is lowered. By this lowering, the FOUP 3 supported by the support plate 431 is transferred to the pair of shelf portions 423 in one of the placement portions 421.

  As described above, the support plate 431 is horizontally moved between the plurality of placement portions 421a to 421f, 421o, and 421p by the support plate slide portion 433 and the moving portion 434, so that the FOUP 3 is provided with the plurality of placement portions 421a to 421f. , 421o and 421p. Accordingly, the internal movement mechanism 430 can shorten the transport time for transport in the storage, as in the present embodiment.

  In addition, in this embodiment, although the slide mechanism 16 is provided as an outer transfer means, instead of the slide mechanism 16, the area IN1 or IN2 in the main body 10a and the area in the conveyor 30 are provided via the loading / unloading port P1 or P2. You may provide the mechanism to move between CV1 or CV2.

  FIG. 9 is a cross-sectional view showing the transfer mechanism 340 included in the stocker 310. In FIG. 9, the transfer mechanism 340 includes a support plate 341 and a moving unit 342. The support plate 341 supports the FOUP 3 from the bottom side. The moving unit 342 moves the support plate 341 in the vertical direction and the horizontal direction.

  The support plate 341 also functions as a transfer surface for transferring the FOUP 3 from or to the vehicle 2 when moved to the entry / exit port P31 or P32 (that is, indicated by a solid line in FIG. 9). . The plurality of rollers 323 in the areas IN31 and IN32 (that is, the placement portions 321o and 321p) are configured not to contact the moved support plate 341 (that is, indicated by a two-dot chain line in the area IN31 in FIG. 9). ing. Further, the pair of second conveyor portions 331b in the areas CV31 and CV32 are configured not to contact the moved support plate 341 (that is, indicated by a two-dot chain line in the area CV31 of FIG. 9).

  With such a configuration, the moving unit 342 moves the support plate 341 between the upper side and the lower side of the plurality of rollers 323 in the areas IN31 and IN32, so that the movement unit 342 is between the support plate 341 and the area IN31 or IN32. Thus, FOUP3 can be transferred. Further, the moving unit 342 moves the support plate 341 between the upper and lower portions of the pair of second conveyor portions 331b in the areas CV31 and CV32, so that the support plate 341 is moved between the support plate 341 and the area CV31 or CV32. , FOUP3 can be transferred. Thereby, the transfer mechanism 340 can transfer the FOUP 3 between the area IN31 or IN32 in the main body 310a and the area CV31 or CV32 in the conveyor 330.

  In addition, as shown in FIG. 10, it is also possible to construct the stocker 10 by building each stage of the stocker 10 in advance as stocker elements 10e independent of each other and stacking them in the desired number of stages. More specifically, as shown in FIG. 10A, for example, when the height L1 of the space between the rail 1 and the manufacturing apparatus 101 disposed below the rail 1 is relatively wide, the stocker element 10e ( That is, by stacking four stages (indicated by dotted lines in FIG. 10A), a four-stage stocker 10 similar to that shown in FIG. 1 can be constructed. Alternatively, as shown in FIG. 10B, for example, when the height L2 of the space between the rail 1 and the manufacturing apparatus 501 disposed below it is relatively narrow, the stocker element 10e (that is, FIG. 10). By stacking two stages (indicated by dotted lines in (b)), a two-stage, ie, relatively thin stocker 50 can be constructed. In any case, if the stocker element 10e is mass-produced, a stocker having a height suitable for a space of an arbitrary height can be easily constructed, which is very advantageous in practice.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification. It is included in the technical scope of the present invention.

It is a perspective view which shows the external appearance of a conveyance system provided with the storage which concerns on embodiment. It is a front view which shows the front of the storage of FIG. 1 typically. It is the upper side figure which looked at the conveyance system of Drawing 1 from the upper surface side. It is a top view which shows the state after the rotation of the rotation mechanism of FIG. It is sectional drawing which shows the arrangement | sequence of the some mounting part which concerns on embodiment. It is sectional drawing which shows the state after the rotation of the some mounting part of FIG. It is sectional drawing which shows the modification of the some mounting part of FIG. It is sectional drawing which shows an example of the internal movement means based on this invention. It is sectional drawing which shows an example of the outer transfer means based on this invention. It is a perspective view which shows the external appearance of the storehouse set formed by stacking a plurality of storehouses according to the present invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Rail, 2 ... Vehicle (ceiling traveling vehicle), 3 ... FOUP (load), 10 ... Stocker (storage), 12 ... Lifting mechanism, 16 ... Slide mechanism, 21 ... Loading part, 30 ... Conveyor, 32 ... Rotating mechanism, 100 ... conveying system

Claims (11)

The inside is divided into a plurality of stages in the vertical direction, and a main body part provided with an entrance capable of loading and unloading is provided in one of the plurality of stages,
In the main body portion, each of the plurality of stages is arranged so as to spread in two horizontal directions, and each of the loads can be accommodated or placed, and the loads can be horizontally moved between each other. A mounting section;
It is possible to move up and down in a vertically extending vertical space including an internal entrance position adjacent to the entrance / exit in the main body, and in each of the plurality of stages, one of the plurality of placement portions adjacent to the vertical space. Up-and-down moving means to which the load is transferred to and from the mounting portion;
The load is placed outside the main body portion at an external entrance / exit position adjacent to the entrance / exit, and the load is transferred to / from the vertical movement means at the internal entrance / exit position via the entrance / exit. A storage room, comprising: a loading / unloading port to which the load is transferred to / from a conveying means laid outside the unit.   2. The storage according to claim 1, wherein each of the plurality of placement units is configured to be able to horizontally move the load between the plurality of placement units in each of the plurality of stages.   2. The storage according to claim 1, further comprising an internal moving unit capable of horizontally moving the load between the plurality of placement units in each of the plurality of stages in the main body.   The storage according to any one of claims 1 to 3, wherein the up-and-down moving unit is further configured to be able to move the load horizontally with respect to the one placement unit.   4. The apparatus according to claim 1, further comprising an inner transfer unit that horizontally moves the load between the vertical movement unit and the one placement unit in each of the plurality of stages. 5. The vault described in.   The said internal movement means is further comprised in each of the said several stage so that the said load can be horizontally moved between the said up-and-down movement means and the said one mounting part. Vault.   The said storage port is comprised so that the said load can be horizontally moved between the said conveyance means, The storage warehouse as described in any one of Claim 1 to 6 characterized by the above-mentioned.   The storage according to any one of claims 1 to 6, further comprising outer transfer means for horizontally moving the load between the entry / exit port and the transport means. The conveying means has a path extending along the side wall of the main body,
A plurality of the entrances / exits are provided at a predetermined horizontal distance on the side wall in the one stage,
The storage according to any one of claims 1 to 8, wherein a plurality of the entry / exit ports are provided at the predetermined horizontal distance along the side wall corresponding to the entrance / exit. Warehouse. The storage according to any one of claims 1 to 9,
A transport system comprising the transport means. The conveying means is
A path extending along the side wall of the main body,
A support portion for supporting the load on a portion of the route at a position adjacent to the loading / unloading port;
The conveyance system according to claim 10, further comprising: a rotation mechanism capable of rotating in a horizontal plane at least a portion of the support portion corresponding to a range for placing the load.

Images