JP2009178658A - Pattern forming device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pattern forming device of a simple structure that can easily detect stagnant bubbles and remove the bubbles. <P>SOLUTION: A transparent tube 31 of an inverse-U shape is connected to an ink tank and a port PO of a droplet injecting head 30. A bubble collecting tube 32 is mounted on an upper part 31c of the tube 31 of the inverse-U shape. The bubbles B contained in metal ink F flowing in the upper part 31c of the tube of the inverse-U tube are led to and collected in the bubble collecting tube 32 and thus are not sent to the droplet injecting head 30. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a pattern forming apparatus.

Conventionally, it is known that a linear pattern is formed on a substrate by ejecting a function as droplets using an inkjet pattern forming apparatus (for example, Patent Document 1).
In general, this type of pattern forming apparatus includes a substrate mounted on a stage, a droplet discharge head that discharges a functional liquid containing a functional material as droplets onto the substrate, and a substrate (stage) and a droplet discharge head. It has a mechanism for relative movement in dimension. Then, the droplets discharged from the droplet discharge head are arranged at an arbitrary position on the substrate surface. At this time, for each of the droplets that are sequentially arranged on the substrate surface, the droplets are sequentially arranged so that the wetting and spreading ranges of the droplets overlap with each other, so that the linear pattern covered with the functional liquid without any gap on the substrate surface Can be formed.

By the way, bubbles are included in the functional liquid supplied from the ink reservoir to the droplet discharge head. When the bubbles are supplied to the ejection head, defects such as missing dots occur, and a linear pattern cannot be formed precisely.

Therefore, during the pattern formation, so that bubbles in the liquid do not supply the droplet discharge head,
Various devices have been proposed (for example, Patent Documents 2 and 3).
JP 2005-34835 A JP 2006-1200 JP JP 2006-198908 A

However, the devices shown in Patent Documents 2, 3 and the like have a complicated structure and a large size, and are not easily assembled. Moreover, even if the device is a transparent casing, it is difficult to visually recognize that bubbles remain in the device, and depending on the color of the functional liquid, it cannot be visually recognized that bubbles are retained. There was a problem that the countermeasures in case of being delayed.

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a pattern forming apparatus that has a simple structure and that can easily remove the bubbles easily by visually recognizing the retention of the bubbles. There is to do.

The pattern forming apparatus of the present invention supplies a functional liquid containing a functional material contained in a reservoir to a liquid droplet ejection head via a supply channel, and drops the functional liquid droplets on the liquid droplet ejection head. A pattern forming apparatus for discharging a substrate to form a pattern on the substrate, wherein a transparent inverted U-shaped conduit is provided in the supply channel provided between the reservoir and the droplet discharge head And a transparent bubble collecting conduit was branched at the top of the inverted U-shaped conduit, and the inner surface of the inverted U-shaped conduit and the bubble collecting conduit was made water repellent.

According to the pattern forming apparatus of the present invention, the functional liquid is supplied from the storage unit to the droplet discharge head via the supply channel. Bubbles contained in the functional liquid accumulate at the top of the inverted U-shaped pipe provided in the supply flow path and are not sent to the liquid droplet discharge head below. The bubbles accumulated at the top of the inverted U-shaped pipe are guided and collected by the bubble collecting pipe branched from the top. At this time, since the transparent inverted U-shaped pipe and the bubble collecting pipe have water repellency on the inner surface and bubbles do not easily come into contact with the inner surface of the pipe, the presence of bubbles accumulated in the pipe is easy. And the timing of the generation and removal of bubbles can be known with certainty.

In addition, the bubble collecting pipe branched from the top can be formed with a simple configuration that branches from the top of the inverted U-shaped pipe.
In this pattern forming apparatus, the functional material contained in the functional liquid may be silver fine particles.

According to this pattern forming apparatus, since the liquid containing silver fine particles is black, it is difficult to visually recognize the bubbles, but it is clearly visible.
In this pattern forming apparatus, the substrate may be a green sheet composed of ceramic particles having a support sheet attached to the lower surface and a resin.

According to this pattern forming apparatus, since the droplet discharge head discharges droplets without missing dots due to bubbles, a high-definition pattern can be formed on the green sheet.
In the pattern forming apparatus, a heating unit may be provided on the upstream side from the top of the inverted U-shaped pipe.

According to this pattern forming apparatus, when the functional liquid is heated, the gas dissolved in the functional liquid also expands and becomes bubbles, and is efficiently collected from the top to the bubble collecting conduit.
In this pattern forming apparatus, the tip opening of the bubble collecting pipe branched from the top on the inverted U-shaped pipe may be sealed with a rubber plug.

According to this pattern forming apparatus, the air bubbles guided to the air bubble collecting pipe are collected on the lower surface of the rubber plug with the tip opening sealed. Then, if the injection needle is inserted into the rubber stopper, the air bubbles collected on the lower surface of the rubber stopper can be removed. As a result, it is possible to prevent the bubbles from overflowing from the bubble collecting pipe line to the top side, causing the bubbles to flow to the discharge head, and inhibiting the supply of the functional liquid.

Hereinafter, an embodiment embodying the present invention will be described with reference to FIGS. FIG. 1 is a cross-sectional view of a circuit module comprising a ceramic multilayer substrate manufactured using the manufacturing method of the present invention.

In FIG. 1, a circuit module 10 includes a low temperature co-fired ceramics (LTCC) multilayer substrate 11 as a ceramic multilayer substrate, and a semiconductor chip 12 connected to the LTCC multilayer substrate 11.

The LTCC multilayer substrate 11 has a plurality of LTCC substrates 13. Each LTCC board 13 is
Each is a sintered body of a green sheet as a substrate, and has a thickness of several tens to several hundreds of μm. Each LTCC substrate 13 is formed with various internal elements 14 such as a resistance element, a capacitive element, and a coil element, and an internal wiring 15 electrically connected to each internal element 14. A via wiring 16 forming a thermal via structure is formed.

The internal element 14, the internal wiring 15, and the via wiring 16 are each a sintered body of metal fine particles such as silver or a silver alloy, and the droplet discharge device 20 as the pattern forming apparatus shown in FIG. 2.
It is formed by a wiring pattern forming method using

FIG. 2 is an overall perspective view illustrating the droplet discharge device 20.
In FIG. 2, the droplet discharge device 20 has a base 21 formed in a rectangular parallelepiped shape.
A pair of guide grooves 22 extending along the longitudinal direction (Y arrow direction) is formed on the upper surface of the base 21. Above the guide groove 22, a stage 23 that moves along the guide groove 22 in the Y arrow direction and the counter-Y arrow direction is provided.

The stage 23 mounts a green sheet 4G as a substrate before firing on its upper surface. The green sheet 4G placed on the stage 23 has a carrier film 4F as a support sheet attached to the back surface in a peelable manner.

The carrier film 4F is a film for supporting the green sheet 4G in the drawing process and various subsequent processes. For example, a plastic film excellent in peelability from the green sheet 4G and mechanical resistance in each process can be used. . Carrier film 4F
For example, a polyethylene terephthalate film, a polyethylene naphthalate film, a polyethylene film, or a polypropylene film can be used.

The green sheet 4G is a layer made of a glass ceramic composition containing glass ceramic powder, a binder, and the like. The film thickness of the green sheet 4G is several tens of μm when the capacitor element is formed as the circuit element 14 and is formed to be 100 μm to 200 μm in the other layers. The green sheet 4G is a state in which a glass ceramic composition slurried with a dispersion medium is applied onto a carrier film 4F using a sheet forming method such as a doctor blade method or a reverse roll coater, and the applied film can be handled. Obtained by drying.

As the dispersion medium, for example, a surfactant, a silane coupling agent, or the like can be used as long as it can uniformly disperse the glass ceramic powder.
The glass ceramic powder is a powder having an average particle diameter of 0.1 μm to 5 μm. For example, a glass composite ceramic obtained by mixing borosilicate glass with ceramic powder such as alumina or forsterite can be used. As the glass ceramic powder, ZnO-M
BaO, a crystallized glass ceramic using gO-Al2O3-SiO2 based crystallized glass
-Al2O3-SiO2 ceramic powder and Al2O3-CaO-SiO2-MgO-B
Non-glass ceramics using 2O3 ceramic powder or the like may be used.

The binder is an organic polymer that functions as a binder for the glass ceramic powder and can be easily decomposed and removed in a subsequent firing step. As the binder, for example, butyral,
Binder resins such as acrylic and cellulose can be used. Examples of the acrylic binder resin include alkyl (meth) acrylate, alkoxyalkyl (meth) acrylate, polyalkylene glycol (meth) acrylate, and cycloalkyl (meth).
A homopolymer of a (meth) acrylate compound such as acrylate can be used. Moreover, as an acrylic binder resin, it can be obtained from a copolymer obtained from two or more of the (meth) acrylate compounds, or from other copolymerizable monomers such as (meth) acrylate compounds and unsaturated carboxylic acids. Can be used.

The binder is, for example, an adipate ester plasticizer, dioctyl phthalate (DO
P), a dibutyl phthalate (DBP) phthalate ester plasticizer, and a plasticizer such as a glycol ester plasticizer may be contained.

A rubber heater H is disposed on the upper surface 23 a of the stage 23. The green sheet 4G placed on the stage 23 is heated to a predetermined temperature by the rubber heater H. The green sheet 4G placed on the stage 23 is positioned and fixed with respect to the stage 23, and conveys the green sheet 4G in the Y arrow direction and the counter-Y arrow direction.

As shown in FIG. 2, a gate-type guide member 25 is installed on the base 21 so as to straddle a direction orthogonal to the Y arrow direction (X arrow direction). On the upper side of the guide member 25, an ink tank 26 extending in the X arrow direction is disposed. The ink tank 26 as a storage part stores metal ink F (see FIG. 5) as a functional liquid. The metal ink F stored in the ink tank 26 is supplied at a predetermined pressure to a droplet discharge head (hereinafter simply referred to as discharge head) 30 provided on the carriage 29 via a supply tube T constituting a supply flow path. It is like that. Then, the metal ink F supplied to the ejection head 30 is supplied from the ejection head 30 to a droplet Fb (FIG. 5).
Reference) is discharged toward the green sheet 4G.

As the metal ink F, a dispersed metal ink in which metal fine particles as a functional material, for example, metal fine particles having a particle size of several nm are dispersed in a solvent can be used.
Examples of the metal fine particles used in the metal ink F include gold (Au), silver (Ag), and copper (
Cu), aluminum (Al), palladium (Pd), manganese (Mn), titanium (Ti
), Tantalum (Ta), nickel (Ni), and the like, oxides thereof, and superconductor fine particles. The particle diameter of the metal fine particles is preferably 1 nm or more and 0.1 μm or less. If it is larger than 0.1 μm, the discharge nozzle N of the discharge head 30 may be clogged. On the other hand, if it is smaller than 1 nm, the volume ratio of the dispersant to the metal fine particles increases, and the ratio of the organic matter in the resulting film becomes excessive.

The dispersion medium is not particularly limited as long as it can disperse the metal fine particles and does not cause aggregation. For example, in addition to aqueous solvents, alcohols such as methanol, ethanol, propanol, butanol, n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene, tetrahydronaphthalene, decahydronaphthalene , Hydrocarbon compounds such as cyclohexylbenzene,
Also, polyols such as ethylene glycol, diethylene glycol, triethylene glycol, glycerin, 1,3-propanediol, polyethylene glycol, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl Ether compounds such as ethyl ether, 1,2-dimethoxyethane, bis (2-methoxyethyl) ether, p-dioxane,
Further examples include polar compounds such as propylene carbonate, γ-butyrolactone, N-methyl-2-pyrrolidone, dimethylformamide, dimethyl sulfoxide, cyclohexanone, and ethyl lactate. Of these, water, alcohols, hydrocarbon compounds, and ether compounds are preferable and more preferable dispersion media in terms of fine particle dispersibility, dispersion stability, and ease of application to the droplet discharge method. Examples thereof include water and hydrocarbon compounds.

The metal ink F that has landed on the green sheet 4G evaporates part of the solvent or dispersion medium from the surface side. At this time, since the green sheet 4G is heated by the rubber heater H, evaporation of the solvent or the dispersion medium is promoted.

The metal ink F that has landed on the green sheet 4G thickens from the outer edge of the surface as it dries. That is, the solid content (particles) concentration in the outer peripheral portion is faster than the central portion and reaches the saturated concentration. Thicken from the outer edge. The thickened metal ink F at the outer edge stops (pins) its own wetting and spreading along the surface direction of the green sheet 4G. Even if the metal ink F in the pinned state is fixed to the green sheet 4G and overprinted, it is fixed to the green sheet 4G, and the outer diameter of the droplet Fb does not change. It is not attracted to the droplet Fb.

The guide member 25 is formed with a pair of upper and lower guide rails 28 extending in the X arrow direction over substantially the entire width in the X arrow direction. The pair of upper and lower guide rails 28 includes a carriage 2
9 is attached. The carriage 29 is guided by the guide rail 28 and moves in the X arrow direction and the counter X arrow direction. A droplet discharge head 30 as a droplet discharge head main body is mounted on the carriage 29.

3 is an exploded perspective view of a main part for explaining the mounting state of the ejection head 30 and the carriage 29, FIG. 4 is a perspective view of the ejection head 30 viewed from the green sheet 4G side, and FIG. The principal part sectional drawing which looked at from the Y direction is shown. FIG. 6 is a cross-sectional view of the main part when the ejection head 30 is viewed from the X direction. FIG. 7 shows an enlarged partial cross-sectional view of an inverted U-shaped conduit.

As shown in FIG. 3, the ejection head 30 has a rectangular parallelepiped shape in which the ejection head main body 30a is long in the Y direction, and a pair of ports P0 are provided on the upper surface 30b. Port P0 is connected to FIG.
As shown in FIG. 4, the metal ink F of the ink tank 26 supplied through the supply tube T
Is introduced into the discharge head main body 30a.

More specifically, the downstream end portion 31b of the inverted U-shaped conduit 31 is connected to the pair of ports P0 so as to be detachable. The inverted U-shaped conduit 31 has an inverted U-shape, and the bent portion (top 31c) is on the upper side, and the downstream end 31b and the upstream end 31a at both ends are on the lower side. Connected to port P0.

The pair of inverted U-shaped conduits 31 are connected to the branch tube T1 so that the upstream end 31a can be inserted and removed, and the branch tube T1 is connected to the supply tube T. Accordingly, the metal ink F stored in the ink tank 26 is supplied to the ejection head 30 via the supply tube T, the branch tube T1, and the inverted U-shaped conduit 31.

A bubble collecting pipe 32 branched upward is integrally provided at the top 31 c of the inverted U-shaped pipe 31. As shown in FIG. 7, a rubber stopper 33 that is plugged (plugged) inside the opening is attached to the tip opening of the bubble collecting pipe 32. The rubber plug 33 is locked to a retaining member 34 that is fixed to the outside of the opening of the bubble collecting pipe 32 so as not to be removed from the opening.

The retaining member 34 has an opening hole 34a so that a part of the outer surface of the rubber plug 33 is exposed.
The inverted U-shaped conduit 31 provided with the bubble collecting conduit 32 integrally is formed of a transparent resin so that the metal ink F flowing inside can be visually recognized. The inside of the inverted U-shaped conduit 31 including the bubble collecting conduit 32 is surface-treated to be water-repellent and modified so that the bubbles B contained in the metal ink F stick to the inner surfaces of the conduits 31 and 32. To prevent the bubbles B from being formed.

When the metal ink F flowing through the reverse U-shaped conduit 31 from the upstream end portion 31a toward the downstream end portion 31b contains bubbles B, the inner surface of the reverse U-shaped conduit 31 is water-repellent. It flows smoothly without adhering to the inner surface. When the bubble B reaches the position of the top 31c of the inverted U-shaped conduit 31 where the bubble collecting conduit 32 branches, the bubble B is guided to the bubble collecting conduit 32 by buoyancy. The bubbles B accumulate on the lower side of the rubber plug 33 that closes the bubble collecting conduit 32. Eventually, a large bubble pool LB is formed in the bubble collection pipe line 32.

The bubble reservoir LB formed in the bubble collection pipe 32 is removed using a syringe. That is, the needle of the syringe is inserted into the rubber stopper 33 from the opening hole 34 a of the retaining member 34. Needle is bubble collection line 3
When the bubble reservoir LB in 2 is reached, the syringe is operated to suck out the bubble B in the bubble collection conduit 32.

Therefore, before reaching the discharge head 30, the bubbles B are collected in the bubble collection conduit 32. As a result, the metal ink F from which the bubbles B have been removed is supplied to the ejection head body 30a.
Further, as shown in FIG. 3, a flange 30c is formed on the upper side surface of the discharge head body 30a. The ejection head 30 is inserted from above into a rectangular through hole 36 formed in the support plate 35 of the carriage 29 and extending in the Y direction. At this time, the flange 30c formed on the ejection head 30 serves not only to prevent detachment, but also serves as a connecting portion that is connected and fixed to the support plate 35 with screws or the like (not shown). That is, the ejection head 30 is provided with the support plate 3.
The through hole 36 formed in 5 is inserted from above (anti-Z direction), and the flange 30c is fixed to the support plate 35 with screws (not shown), so that it is attached to the carriage 29.

A nozzle plate 37 is fixed to the lower side of the discharge head main body 30 a protruding from the support plate 35 of the carriage 29. As shown in FIG. 5, the lower surface (nozzle formation surface 37a) of the nozzle plate 37 is formed substantially parallel to the ejection surface 4Ga of the green sheet 4G. The nozzle plate 37 has a distance (platen gap) between the nozzle forming surface 37a and the discharge surface 4Ga of the green sheet 4G when the green sheet 4G is positioned directly below the discharge head 30.
Is held at a predetermined distance.

In FIG. 4, a nozzle row composed of a plurality of nozzles N arranged in the Y direction is formed on the nozzle forming surface 37a. In the nozzle row, 180 nozzles N are formed per inch. In FIG. 4, for convenience of explanation, the number per row is omitted. In this embodiment, the nozzle row is one row, but may be a plurality of rows.

As shown in FIG. 5, a cavity 38 communicating with the port P0 is formed above each nozzle N. The cavity 38 feeds the metal ink F from the ink tank 26 to the port P0.
The metal ink F is supplied to the corresponding nozzle N. On the upper side of the cavity 38, a vibration plate 39 is fixed which vibrates in the vertical direction and expands and contracts the volume in the cavity 38. A piezoelectric element PZ corresponding to the nozzle N is disposed on the upper side of the diaphragm 39. The piezoelectric element PZ contracts and expands in the vertical direction to vibrate the diaphragm 39 in the vertical direction. The vibration plate 39 that vibrates in the vertical direction causes the metal ink F to be ejected from the corresponding nozzle N in the form of a droplet Fb of a predetermined size. The discharged droplets Fb fly in the anti-Z direction of the corresponding nozzle N and land on the discharge surface 4Ga of the green sheet 4G. As a result, the liquid wiring pattern PL made of the metal ink F for forming the internal wiring 15 is drawn on the ejection surface 4Ga.

Next, the operation of the embodiment configured as described above will be described below.
Now, the ejection head 30 is reciprocated in the X arrow direction and the anti-X arrow direction, and the stage 23 is conveyed in the Y arrow direction, so that the droplet Fb is preliminarily facilitated during the reciprocation of the ejection head 30. The operation of discharging at a predetermined timing is repeated. As a result, the liquid wiring pattern PL of the internal wiring 15 is drawn on the green sheet 4G by the landed droplets Fb.

While the liquid wiring pattern PL is being drawn, the metal ink F stored in the ink tank 26 is
Supplied to the ejection head 30. When the supplied metal ink F contains bubbles B, they are guided and collected by the bubble collecting conduit 32 provided at the top 31 c of the inverted U-shaped conduit 31.

Metal ink F from which bubbles B are removed is supplied to the cavity 38 of the ejection head 30. As a result, problems such as missing dots due to the bubbles B can be prevented in advance.
When the bubbles B collected in the bubble collection pipe 32 are accumulated and a large bubble pool LB is formed, a syringe needle is inserted into the rubber stopper 33 and the bubbles B in the bubble collection pipe 32 are sucked. By removing the bubble reservoir LB by removing the bubble B, the bubble B does not overflow from the bubble collecting conduit 32 and is supplied to the discharge head 30.

Next, effects of the embodiment configured as described above will be described below.
(1) According to the above embodiment, the transparent inverted U-shaped pipe 31 is provided together with the supply tube T and the branch supply tube T1 provided between the ink tank 26 and the droplet discharge head 30.
A bubble collecting conduit 32 is provided at the top 31 c on the inverted U-shaped conduit 31 so that the bubbles B accumulated at the top 31 c of the inverted U-shaped conduit 31 are guided to the bubble collecting conduit 32 and collected. did.

Accordingly, the bubbles B contained in the metal ink F are accumulated in the bubble collecting conduit 32 and are not sent to the droplet discharge head 30 below. As a result, since the bubbles B are not supplied to the droplet discharge head 30, no dot dropout occurs, and a high-definition liquid wiring pattern PL can be drawn on the green sheet 4G.

(2) According to the above embodiment, the inverted U-shaped conduit 31 and the bubble collecting conduit 32 are made of a transparent material, and the inner surfaces of the inverted U-shaped conduit 31 and the bubble collecting conduit 32 are Water repellent. Therefore,
Since the bubbles B flowing along the inverted U-shaped conduit 31 and the bubble collecting conduit 32 are difficult to contact the inner surfaces of the conduits 31 and 32, the presence of the difficult-to-see bubbles B generated in the black metal ink F exists. It is easily visible and the timing of generation and removal of the bubbles B can be surely known.

(3) According to the above embodiment, the bubble collecting pipe 32 is the top 31 c of the inverted U-shaped pipe 31.
Since it is only formed by branching off, it can be formed with a simple configuration.
(4) According to the above embodiment, the tip opening of the bubble collecting pipe 32 is sealed with the rubber plug 33. Therefore, the bubbles B collected on the lower surface of the rubber plug 33, that is, the bubbles B accumulated in the bubble collecting pipe 32 can be pulled out by inserting the injection needle into the rubber plug 33. As a result, it is possible to prevent the bubbles B from overflowing from the bubble collecting conduit 32 and being sent to the ejection head 30 or inhibiting the supply of the metal ink F to the ejection head 30.

In addition, you may change the said embodiment as follows.
-In the said embodiment, as shown in FIG. 8, it is the said reverse U-shaped pipe line 31, Comprising: The rubber heater RH as a heating means is stuck to the upstream from the top 31c. Then, the supplied metal ink F may be heated by the rubber heater RH. When the metal ink F is heated, the gas dissolved in the metal ink F also expands to become bubbles B and can be efficiently collected from the top portion 31c into the bubble collecting conduit 32.

In the above embodiment, the functional liquid is embodied as the metal ink F. For example, the present invention may be embodied in a functional liquid containing a liquid crystal material. That is, any functional liquid that is ejected to form a pattern may be used.

In the above embodiment, the substrate is embodied in the green sheet 4G. For example, the substrate may be embodied as a glass substrate, a polyimide substrate, a glass epoxy substrate, or the like.
In the above embodiment, the retaining member 34 is fixed to the outside of the opening of the bubble collecting conduit 32 so that the rubber stopper 33 does not come out, but this may be omitted.

In the above embodiment, the droplet discharge means is embodied in the piezoelectric element drive type droplet discharge head 30. However, the present invention is not limited to this, and the droplet discharge head may be embodied as a resistance heating type or electrostatic drive type discharge head.

The side sectional view of a circuit module. The whole perspective view of a droplet discharge device. The principal part disassembled perspective view explaining the attachment state of a droplet discharge head and a carriage. The perspective view which looked at the droplet discharge head from the green sheet side. The principal part sectional view which looked at the droplet discharge head from the Y direction. The principal part sectional view which looked at the droplet discharge head from the X direction. The expanded partial sectional view of an inverted U-shaped pipe line. The principal part sectional view for explaining another example of a droplet discharge head.

Explanation of symbols

4G: Green sheet as substrate, 4F: Carrier film, 20 ... Droplet discharge device,
30 ... Droplet discharge head, 31 ... Inverted U-shaped pipe, 31c ... Top, 32 ... Bubble collection pipe, 3
3 ... rubber plug, 37 ... nozzle plate, 50 ... control device, 56 ... Peltier element drive circuit, F
... Metal ink, Fb ... Droplet, B ... Bubble, BL ... Bubble accumulation, RH ... Rubber heater, T ... Supply tube, T1 ... Branch tube.

Claims (5)

The functional liquid containing the functional material stored in the storage unit is supplied to the droplet discharge head via the supply flow path, and the droplet of the functional liquid is discharged onto the substrate by the droplet discharge head. A pattern forming apparatus for forming a pattern,
A transparent inverted U-shaped pipe is provided in the supply flow path provided between the reservoir and the droplet discharge head, and a transparent air bubble is collected at the top of the reverse U-shaped pipe. A pattern forming apparatus characterized in that the pipe is branched and the inner surfaces of the inverted U-shaped pipe and the bubble collecting pipe are made water-repellent. The pattern forming apparatus according to claim 1,
The pattern forming apparatus, wherein the functional material contained in the functional liquid is silver fine particles. In the pattern formation apparatus of Claim 1 or 2,
The said board | substrate is a green sheet comprised from the ceramic particle | grains by which the support sheet was stuck on the lower surface, and resin, The pattern formation apparatus characterized by the above-mentioned. In the pattern formation apparatus of any one of Claims 1-3,
A pattern forming apparatus, wherein a heating means is provided upstream from the top of the inverted U-shaped pipe. In the pattern formation apparatus of any one of Claims 1-4,
A pattern forming apparatus, wherein a front end opening of a bubble collecting pipe branched from the top on the inverted U-shaped pipe is sealed with a rubber plug.

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