JP2009032908A - Semiconductor integrated circuit device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce power consumption in a temporary operation stop state. <P>SOLUTION: An input/output circuit unit sends and receives input/output signals having a first voltage to and from an external terminal. An internal circuit unit operates with a second voltage different from the first voltage and has a first switch on a second-voltage or circuit-ground-potential side. The input circuit of the input/output circuit unit has an input portion which operates with the first voltage and a first level converting circuit which operates with the second voltage. the output circuit of the input/output circuit unit has a second level converting circuit which operates with the first voltage and second voltage, and an output portion and a latch which operate with the first voltage. The input/output circuit unit has a second switch on a second-voltage side or the ground-potential side of the circuit portion operating with the second voltage, and a power switch control circuit turns on the first and second switches when the internal circuit is in operation and turns off the first and second switches when in a temporary operation stop state. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a semiconductor integrated circuit device, for example, a system LSI (Large Scale Integrated Circuit) in which one or a plurality of functional modules are divided into circuit blocks and a power supply voltage is supplied to each independently. It is related to effective technology.

In the present applicant, in Japanese Patent Application Laid-Open No. 2005-286082, a power switch MOSFET is provided between the ground line VSSM (virtual GND) of the internal circuit (core) and the ground potential VSS of the circuit, and a large number of logic cell columns are provided. Proposals have been made to cut off the power supply voltage in units of modules (or blocks) arranged.
JP 2005-286082 A

  As in Patent Document 1, the power switch can be disposed between the virtual ground terminal VSSM and the ground terminal VSS of the circuit and disconnected when not needed (standby mode or the like) to reduce power consumption. In the inventor of the present application, when the power switch provided in the internal circuit is shut off and the low power consumption mode is set as in Patent Document 1, the ratio of the power consumption in the input / output circuit section becomes relatively large. Focusing on the fact that it is a device, we examined the reduction of power consumption in the input / output circuit section in order to further reduce the power consumption required for battery-operated semiconductor integrated circuit devices for mobile use. However, if the power supply of the input / output circuit section is cut off, it is the same as the power supply of the entire system is cut off, and there is a problem that the operation cannot be temporarily stopped like the standby mode.

  An object of the present invention is to provide a semiconductor integrated circuit device that realizes low power consumption in a temporary operation stop state. The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

  One example of the present application will be briefly described as follows. The input / output circuit section includes an input circuit that receives an input signal corresponding to a first voltage with an external terminal, and an output circuit that forms an output signal corresponding to the first voltage. The internal circuit section operates at a second voltage different from the first voltage, and has a first switch on the second voltage or the ground potential side of the circuit. The input circuit receives an input signal from the external terminal, operates with the input unit operating at the first voltage, and operates with at least the second voltage, and sets the signal amplitude corresponding to the first voltage to the second voltage. A first level conversion circuit for converting to a corresponding signal amplitude is provided. The output circuit receives an input signal from the internal circuit unit, operates at the first voltage and the second voltage, and changes a signal amplitude corresponding to the second voltage to a signal amplitude corresponding to the first voltage. A second level conversion circuit for conversion, an output unit that operates with the first voltage, receives an output signal of the second level conversion circuit and forms an output signal output from the external terminal, and an input signal of the output unit Has a latch for holding. The input / output circuit section includes a second switch on a ground potential side of the second voltage or a circuit portion that operates at the second voltage, and the power switch control circuit causes the second switch when the internal circuit is in an operating state. The first switch and the second switch are turned on, and the first and second switches are turned off in a predetermined mode in which the internal circuit does not operate.

  Most of the leakage current in the input / output circuit section operates with the signal amplitude corresponding to the internal circuit while the circuit section that sends and receives signals to and from the external terminal operates and maintains a temporary operation stop state The power consumption can be reduced by cutting off the leakage current of the circuit portion occupying.

  FIG. 1 is a schematic block diagram showing one embodiment of a semiconductor integrated circuit device according to the present invention. The semiconductor integrated circuit device of this embodiment is composed of an input / output circuit section and an internal circuit section. In the internal circuit unit, the internal circuit constitutes a specific functional block and is also called a core. In this embodiment, as proposed in Patent Document 1, a MOSFET Q1 (power switch SW1) is provided as a power switch for cutting off the ground potential side of the circuit in order to reduce the standby current. The MOSFET Q1 is composed of a thick film (thick gate insulating film) MOSFET.

  In this embodiment, the input / output circuit section includes a circuit that handles a signal amplitude corresponding to the power supply voltage VCC such as 3.3V, a circuit that handles a signal amplitude corresponding to the internal power supply voltage VDD such as 1.2V, and It is comprised with the circuit which performs both level conversion. As described above, the input / output circuit section is divided into a 3.3V system circuit and a 1.2V system circuit. The 1.2V system circuit is composed of a thin-film (thin gate insulating film) MOSFET as in the internal circuit section. In a semiconductor integrated circuit device for mobile use such as a microcomputer, the number of input / output terminals is as large as about 400. Therefore, the present inventor has noticed that there are as many as 400 input / output circuits in the input / output circuit section, and the leakage current consumed by the 1.2V circuit cannot be ignored. In particular, when the internal circuit section cuts off the leakage current by turning off the power switch (SW1), the relative ratio of the leakage current in the 1.2V circuit increases, and the standby current of the semiconductor integrated circuit device as a whole increases. For the reduction, it is effective to reduce the leakage current in the input / output circuit section.

  The 3.3V circuit in the input / output circuit section is constantly supplied with the power supply voltage VCC and the circuit ground potential VSS. On the other hand, the 1.2V system circuit is not particularly limited, but the power supply voltage VDD is constantly supplied, and the ground potential VSS of the circuit is selectively supplied via the thick film MOSFET Q2 constituting the power switch SW2. Is done. In other words, when the internal circuit unit is in a standby state, the power switch MOSFET Q1 of the internal circuit is turned off and the power switch MOSFET Q2 of the 1.2V system circuit is also turned off. As a result, in the input / output circuit section, for the 1.2V system circuit, in the standby state, the switch MOSFET Q2 that cuts off the leakage current is turned off in the same manner as the internal circuit section.

  In this embodiment, the 1.2V circuit on the internal circuit side and the input / output circuit section is provided with power switches (thick film MOSFETs Q1 and Q2) on the VSS side. As described above, the 1.2V circuit in the input / output circuit section is disconnected on the VSS side, and the internal circuit section is similarly cut off on the VSS side, so that the total channel width of the power switch MOSFETs Q2 and Q1 is off-leaked. The amount will determine the standby current. Since the off-leakage current between the thin-film MOSFET and the thick-film MOSFET generally has a difference of 2 to 3 digits, it is possible to significantly reduce the standby current as seen in the entire semiconductor integrated circuit device. This means that the leakage current in the 3.3V system circuit to which the power supply voltages VCC and VSS are constantly supplied is also reduced by 2 to 3 digits, which is substantially equal to the standby time in the input / output circuit section. Most of the leakage current is consumed by the 1.2V circuit. In this embodiment, the leakage current in the input / output circuit section is reduced by 2 to 3 digits, so that the leakage current in the standby state as the entire semiconductor integrated circuit device can be greatly reduced. Further, since the input / output signal between the 1.2 system circuit of the input / output circuit section of this embodiment and the power shut-off area of the internal circuit section transitions in the same direction when the power is shut off, there is no signal level mismatch, There is no need to consider indefinite propagation.

  For example, when the number of input / output terminals is 400 as described above, a leak current of 40 μA is generated as a whole, where the leak current per input / output terminal is considered to be 0.1 μA / IO. In this embodiment, the leakage current can be reduced by about 40 μA by providing the switch MOSFET Q2 and turning it off. Incidentally, the leakage current in the standby state in the semiconductor integrated circuit device (internal circuit portion) such as the microcomputer having 400 terminals is 100 μA depending on the off state of the power switch MOSFET Q1 by applying the technique of the above-mentioned Patent Document 1. It can be made as small as possible. Therefore, when the switch MOSFET Q2 is not provided in the input / output circuit section, the switch MOSFET Q2 having the leakage current in the standby state of about 140 μA is provided and turned off in the standby state. It can be reduced to about 100 μA. That is, leakage current can be reduced by about 30% only by providing the switch MOSFET Q2.

  FIG. 2 is a schematic block diagram showing another embodiment of the semiconductor integrated circuit device according to the present invention. In this embodiment, a MOSFET Q2 is provided as a power switch SW2 on the VDD side for the 1.2V system circuit in order to reduce the leakage current in the input / output circuit section. In this configuration, the input / output signal between the 1.2 system circuit of the input / output circuit section and the power shut-off area of the internal circuit section transitions in different directions such as VSS and VDD when the power is shut off. An indeterminate propagation preventing circuit is provided to prevent this. This indeterminate propagation preventing circuit is constituted by a gate circuit as described later, for example. The other configuration is the same as that of FIG. 1, and the leakage current in the standby state of the entire semiconductor integrated circuit device can be greatly reduced as in the embodiment of FIG.

  FIG. 3 is an overall layout diagram of an embodiment of a semiconductor integrated circuit device according to the present invention. In this embodiment, the power switch SW2 is arranged on the VSS side of the IO (input / output circuit) section. The internal circuit unit is provided with a power switch SW1 in the same manner as in Patent Document 1. In the internal circuit section, each functional block is a power shut-off area such as the A to C area and the RAM area. A power switch SW1 provided on the VSS side is disposed on each side of the power cut-off region in FIG. As in this embodiment, the circuit is disconnected on the VSS side of the I / O unit, and the internal circuit unit is configured to disconnect the VSS side on the function block (hereinafter also referred to as a core) side that is the respective power cut-off area. In this case, since the input / output signal between the I / O unit and the core-side power cut-off region transitions to the VDD side which is the same direction when cut off, it is not necessary to consider indefinite propagation or the like. In this embodiment, since the power switch SW2 is incorporated in the I / O cell, the cut-off control signal may be connected. As a result, there is no need to be conscious of the arrangement of the power switch, and the layout of the IO unit only needs to arrange IO cells designed in advance corresponding to each external terminal.

  FIG. 4 shows a schematic circuit diagram of an embodiment of the semiconductor integrated circuit device of FIG. FIG. 4 exemplarily shows a part of the input / output circuits of FIG. 3 and one internal circuit (user logic) corresponding thereto. In the IO cell corresponding to one external terminal, the input / output circuit unit operates at a power supply voltage VCC such as 3.3V, and transmits / receives a signal to / from the external terminal. It is composed of a 1.2V system circuit that exchanges signals with an internal circuit unit corresponding to a power supply voltage VDD such as 2V. The 3.3V system circuit and the 1.2V system circuit include a level conversion circuit that performs level conversion of signal amplitudes of 3.3V and 1.2V. In this embodiment, a MOSFET Q2 as a power switch is provided on the ground potential VSS side of the 1.2V circuit.

  The user logic, which is an internal circuit, includes a logic cell such as an inverter circuit, a NOR gate circuit, or a NAND gate circuit arranged in the horizontal direction to form a cell ROW. A power line VDD, a ground line VSS, and a virtual ground line VSSM are arranged in the horizontal direction along the cell ROW. MOSFETs Q12 and Q13 as power switches are disposed at both ends of the ground line VSS and the virtual ground line VSSM. These MOSFETs Q12 and Q13 correspond to SW1 on both sides of the core as shown in FIG. In this embodiment, MOSFETs Q11 to Q14 constituting a power switch are arranged outside the core region (left and right outside), and the control signal line GATE connecting each gate is brought into a ring state. The power switch controller VSWC can supply the control signal line GATE from one end of the ring shape and obtain the monitor signal MONI from the other end. That is, it is possible to confirm on / off of all the MOSFETs constituting the power switch SW1 by the monitor signal MONI. The power switch controller VSWC forms a control signal GATE for controlling the power switches SW1 and SW2 in accordance with a control signal from the system controller SYSC.

  Each circuit constituting the user logic is constituted by a thin-film MOS having only a withstand voltage corresponding to a low power supply voltage VDD such as 1.2 V, as shown in the figure by way of example of the MOSFET constituting the inverter circuit. Is done. These thin film MOSs are naturally set to a low threshold voltage. On the other hand, the MOSFETs Q11 to Q14 constituting the power switch SW1 and the MOSFET Q2 constituting the power switch SW2 are composed of a thick film MOS having a high breakdown voltage corresponding to 3.3V and have a high threshold voltage. To be. This thick film MOSFET is also used as a MOSFET constituting the 3.3V system circuit of the input / output circuit section.

  FIG. 5 shows an overall layout of another embodiment of the semiconductor integrated circuit device according to the present invention. In this embodiment, the power switch SW2 is arranged on the VSS side of the IO (input / output circuit) section. The internal circuit unit is provided with a power switch SW1 in the same manner as in Patent Document 1. In the internal circuit unit, as in the case of the A to C areas and the RAM area, each functional block is a power cutoff area. A power switch SW1 provided on the VSS side is disposed on each side of the power cut-off region in FIG. As in this embodiment, the circuit is disconnected on the VSS side of the I / O unit, and the internal circuit unit is configured to disconnect the VSS side on the function block (hereinafter also referred to as a core) side that is the respective power cut-off area. In this case, since the input / output signal between the I / O unit and the core-side power cut-off region transitions to the VDD side which is the same direction when cut off, it is not necessary to consider indefinite propagation or the like. The power switch SW2 of this embodiment is arranged in a ring shape so as to surround the internal circuit portion between the input / output circuit portion and the internal circuit portion.

  FIG. 6 shows a schematic circuit diagram of an embodiment of the semiconductor integrated circuit device of FIG. FIG. 6 shows the input / output circuit and the internal circuit in the portion indicated by the dotted line in FIG. In the IO cell corresponding to one external terminal, the input / output circuit unit operates with a power supply voltage VCC such as 3.3 V, and 3.3 V system circuit for exchanging signals with the external terminal, as described above. And a 1.2V system circuit that exchanges signals with an internal circuit unit corresponding to a power supply voltage VDD such as 1.2V. The 3.3V system circuit and the 1.2V system circuit include a level conversion circuit that performs level conversion of signal amplitudes of 3.3V and 1.2V. In this embodiment, MOSFETs Q21 to 23 as power switches SW2 are provided in a ring shape so as to surround the internal circuit on the ground potential VSS side of the 1.2V circuit. Thus, by connecting the MOSFETs constituting the power switch SW2 in a ring shape, the virtual ground line VSSM and the ground line VSS from each IO unit are connected to the IO units arranged on the four sides of the semiconductor integrated circuit device LSI. It is possible at any position. As a result, the wiring can be shortened, and the resistance of the ground line of the 1.2V (VDD) circuit of the IO section can be reduced. Other configurations are the same as those in FIGS.

  FIG. 7 shows an overall layout of another embodiment of the semiconductor integrated circuit device according to the present invention. In this embodiment, the power switch SW2 is arranged on the VSS side of the IO (input / output circuit) section. The internal circuit unit is provided with a power switch SW1 in the same manner as in Patent Document 1. Similarly to the above, in the internal circuit unit, each functional block is a power shut-off area such as the A to C area and the RAM area. A power switch SW1 provided on the VSS side is disposed on each side of the power cut-off region in FIG. As in this embodiment, the circuit is disconnected on the VSS side of the I / O unit, and the internal circuit unit is configured to disconnect the VSS side on the function block (hereinafter also referred to as a core) side that is the respective power cut-off area. In this case, since the input / output signal between the I / O unit and the core-side power cut-off region transitions to the VDD side which is the same direction when cut off, it is not necessary to consider indefinite propagation or the like. The power switch SW2 of this embodiment is provided with a power cut-off switch area SW2 outside the I / O cell, and blocks a plurality of I / O cells together.

  FIG. 8 shows a schematic circuit diagram of an embodiment of the semiconductor integrated circuit device of FIG. FIG. 8 shows the input / output circuit and the internal circuit in the portion indicated by the dotted line in FIG. In the IO cell corresponding to one external terminal, the input / output circuit unit operates with a power supply voltage VCC such as 3.3 V, and 3.3 V system circuit for exchanging signals with the external terminal, as described above. And a 1.2V system circuit that exchanges signals with an internal circuit unit corresponding to a power supply voltage VDD such as 1.2V. The 3.3V system circuit and the 1.2V system circuit include a level conversion circuit that performs level conversion of signal amplitudes of 3.3V and 1.2V. In this embodiment, one MOSFET Q2 is provided collectively for a plurality of IO cells.

  In the VDD cut-off configuration of the IO section as in the present application, the power switch SW2 is formed of a thick film MOS, and element layout separation at the time of cut-off is necessary, and the size of the MOSFET necessary for cut-off increases. Entering each cell lengthens the IO cell size. As a result, there is a possibility that the chip size is increased in the X / Y direction and the chip area is not preferable. Therefore, in this embodiment, a plurality of IO cells are grouped together and the cutoff MOSFET Q2 is arranged at one place. Further, the power switch SW2 is provided in the vicinity of the thin film MOS system circuit in the IO cell in order to prevent an adverse effect of potential drop (drop) due to the wiring.

  In this embodiment, the layout of the power switch SW2 can be changed as appropriate, and the gate width W of the power switch SW2 can be easily increased or decreased. Therefore, the on / off time of the power switch SW2 can be controlled with the size of W. As a result, the ON time can be increased or decreased according to the area (circuit scale) to be interrupted, so that the inrush current or the like that causes power supply noise can be reduced by adjusting the interrupt speed. By arranging the power switch SW2 collectively for each of the plurality of IO cells, the area in each IO cell is reduced, and the IO switch SW2 is arranged in an arbitrary position, a module (or IP), or a space in which a gap between cells is generated. This improves the area efficiency.

  FIG. 9 shows a schematic circuit diagram of an embodiment of a semiconductor integrated circuit device according to the present invention. In this embodiment, the power switch SW2 of the input / output circuit unit is shared with the power switch SW1 of the internal circuit unit. In the configuration in which the power switch is provided on the ground potential side VSS for both the input / output circuit portion and the internal circuit portion as in the above embodiment, both can be shared. In this embodiment, a plurality of virtual ground lines VSSM of the VDD system circuit in the input / output circuit section are collected and connected to the virtual ground line VSSM on the internal circuit side.

  FIG. 10 is a schematic circuit diagram showing another embodiment of the semiconductor integrated circuit device according to the present invention. This embodiment is a modification of the embodiment of FIG. 9 and connects the virtual ground lines VSSM of the IO cells to the virtual ground lines VSSM in the cutoff region on the internal circuit side one by one. In the configuration in which the virtual ground line VSSM of the IO cell is connected to the virtual ground line VSSM of the internal circuit as shown in FIGS. 9 and 10, it is not necessary to prepare the power switch SW2 for the IO cell in advance. Further, by sharing the virtual ground line VSSM, the input / output circuit unit, and the virtual ground line VSSM of the internal circuit unit, the power switch SW1 of the internal circuit unit can be effectively utilized, and the power switch SW2 of the input / output circuit unit can be deleted. The size can be reduced to contribute to cost reduction and miniaturization.

  FIG. 11 shows an overall layout of another embodiment of the semiconductor integrated circuit device according to the present invention. In this embodiment, the power switch SW2 is arranged on the VDD side of the IO (input / output circuit) section. The internal circuit unit is provided with a power switch SW1 in the same manner as in Patent Document 1. Similarly to the above, in the internal circuit unit, each functional block is a power shut-off area such as the A to C area and the RAM area. A power switch SW1 provided on the VSS side is disposed on each side of the power cut-off region in FIG. As in this embodiment, the circuit is disconnected on the VDD side of the I / O unit, and the internal circuit unit is configured to disconnect the VSS side on the function block (hereinafter also referred to as a core) side that is a power-off area. In this case, the input / output signals between the I / O section and the core-side power cut-off region transition to different potentials such as the VSS side and the VDD side when cut off, so that the indefinite propagation prevention circuits G1 and G2 are arranged.

  FIG. 12 shows a schematic circuit diagram of one embodiment of the semiconductor integrated circuit device of FIG. FIG. 12 shows the input / output circuit and the internal circuit in the portion indicated by the dotted line in FIG. In the IO cell corresponding to one external terminal, the input / output circuit unit operates with a power supply voltage VCC such as 3.3 V, and 3.3 V system circuit for exchanging signals with the external terminal, as described above. And a 1.2V system circuit that exchanges signals with an internal circuit unit corresponding to a power supply voltage VDD such as 1.2V. The 3.3V system circuit and the 1.2V system circuit include a level conversion circuit that performs level conversion of signal amplitudes of 3.3V and 1.2V. In this embodiment, a MOSFET Q2 for cutting off the power supply voltage VDD is provided for each IO cell.

  In this embodiment, if the power supply VDD and VSS are cut off, the output signal may become indefinite and the input signal may become high impedance. Therefore, the indeterminate may propagate in the module receiving the signal, or the indeterminate through current May occur. Therefore, for example, AND circuits G1 and G2 for preventing indefinite propagation are arranged on the IO side and the cutoff region side. This indefinite propagation prevention circuit needs to be similarly considered between the cut-off regions (A region-B region, etc.). For example, when there is a signal path in which an indefinite level may be input from the A area to the B area when the VSS of the A area is shut off and the VSS of the B area is not shut off, the indefinite state is present. Need to prevent level propagation.

  A signal for preventing indefinite propagation formed by the system controller SYSC is supplied to the control input terminals of the gate circuits G1 and G2 after being converted to the VDD level by the level shifter LS. Further, when the power supply voltage VDD of the input / output circuit section and the power supply voltage VDD of the internal circuit section are supplied from different external power supply terminals, the diodes D1 and D2 for preventing electrostatic breakdown correspond to the levels of the respective control signals. Thus, they are arranged on the ground potential side VSS and the power supply voltage side VDD.

  When the power supply voltage VDD side is cut off as in this embodiment, there is an advantage that the VDD side cut-off can be constructed even by an IO cell that is not cut-off compatible. That is, even if the non-blocking IO cells and the blocking IO cells are arranged adjacent to each other, if the power supply lines of the VDD power supply are different, they can be blocked for each VDD line. In this embodiment, the indefinite propagation preventing circuit is shown on the left side, but an indefinite propagation preventing circuit may be added to the upper and lower sides and the right side as necessary.

  FIG. 13 shows an overall layout of another embodiment of the semiconductor integrated circuit device according to the present invention. Also in this embodiment, the power switch SW2 is arranged on the VDD side of the IO (input / output circuit) section. However, as in the embodiment of FIG. 7, MOSFETs constituting the power switch SW2 are provided in a plurality of IO cells. The indefinite propagation prevention circuit is arranged between the power switch SW1 on the internal circuit side and the IO unit.

  FIG. 14 shows a schematic circuit diagram of one embodiment of the semiconductor integrated circuit device of FIG. FIG. 12 exemplarily shows a part of the input / output circuit of FIG. 13 and the internal circuit corresponding thereto. In the IO cell corresponding to one external terminal, the input / output circuit unit operates with a power supply voltage VCC such as 3.3 V, and 3.3 V system circuit for exchanging signals with the external terminal, as described above. And a 1.2V system circuit that exchanges signals with an internal circuit unit corresponding to a power supply voltage VDD such as 1.2V. The 3.3V system circuit and the 1.2V system circuit include a level conversion circuit that performs level conversion of signal amplitudes of 3.3V and 1.2V. In this embodiment, a MOSFET Q2 that cuts off the power supply voltage VDD collectively for a plurality of IO cells is provided. An indefinite propagation preventing circuit as shown in FIG. 12 is arranged between the power switch SW2 and the internal circuit section. By providing the power switch SW2SW collectively outside the I / O cell as in this embodiment, the same effect as in FIGS. 7 and 8 can be expected. Further, in the case of VDD side blocking, it is possible to construct an IO cell that does not support blocking as described with reference to FIG.

  FIG. 15 is a circuit diagram showing one embodiment of the IO cell according to the present invention. In the drawing, a part of the internal circuit is also exemplarily shown. The IO cell is composed of an input system circuit and an output system circuit. The input system circuit includes an input circuit IN, a level shifter DLS, and a buffer circuit BA1 as an input system circuit. The output system circuit includes a buffer circuit BA2, a level shifter ULS, an output circuit OB, and a flip-flop circuit FF. In the input system circuit, the input circuit IN is supplied with an input signal D supplied from an external terminal. The level shifter DLS performs a level down operation of the VCC level signal to the VDD level. The buffer circuit BA1 transmits the input signal converted to the VDD level to the internal circuit. In the output system circuit, the VDD level signal from the internal circuit is supplied to the buffer circuit. The level shifter ULS performs a level-up operation on the VDD level signal to the VCC level. The output circuit OB outputs the output signal Q converted to the VCC level from an external terminal.

  A power supply voltage VCC is supplied to a part of the input circuit IN, the output circuit OB, and the level shifters DLS and ULS. A power supply voltage VDD is supplied to a part of the level shifters DLS and ULS and the buffer circuits BA1 and BA2. The ground potential of the circuit to which the power supply voltage VDD is supplied is connected to the virtual ground line VSSM. The virtual ground line VSSM is connected to the ground line VSS via the MOSFET Q2 constituting the power switch SW2. A control signal swca formed by the power switch controller VSWC is supplied to the gate of the MOSFET Q2. The MOSFET Q2 constituting the power switch SW2 may be provided for each IO cell as described above, or may be provided for each of a plurality of IO cells. Further, if the wiring resistance of the VSSM is in a low resistance range, a plurality of VSS cells on the IO cell side and the core side may be combined or shared.

  FIG. 16 shows an overall layout of another embodiment of the semiconductor integrated circuit device according to the present invention. In this embodiment, the internal circuit portion is constituted by a power cut-off region that is multi-VDD (VDD1 to VDDn). In the case of multi-VDD in this way, the power supply switch SW2 is provided on the power supply voltage side VDD1 to VDDn, and cutoff of different VDD1 to VDDn is controlled. The purpose of multi-VDD as in this embodiment is a technique for obtaining high speed and low power by overdriving or underdriving the power supply voltage. At this time, in the internal circuit section, since the power supply level is different at least between the cut-off regions, the level shifter LS and the indefinite propagation prevention circuit G are provided. On the other hand, since the power supply voltage of each IO unit has VDD1 to VDDn as the same type according to the power supply type of the core side cut-off region, the core cut-off region 1 to the cut-off region n and the corresponding IO unit In the meantime, a level shifter circuit is unnecessary. However, since the IO unit blocks the power supply voltage side VDD and the internal circuit side blocks the ground potential side VSS, the indefinite propagation prevention circuit is provided on the internal circuit side or the IO unit.

  In this embodiment, the power manager PMG controls the power-off controller VSWC by controlling the power-off controller VSWC in accordance with an instruction from the system controller SYSC (not shown), and controls the on / off of the cut-off area and overdrives or underdrives the VDD in each area. Give instructions. As in this embodiment, when there are a plurality of VDD1, VDD2,... VDDn as a multiple VDD, if there is a level difference of VDD to some extent, a current flows between the power supplies during shutoff. Necessary. Furthermore, an indefinite propagation prevention circuit G is required between the regions. These level shifters LS can be cut off as will be described later, thereby further reducing the power consumption when not required.

  FIG. 17 shows an overall layout of another embodiment of the semiconductor integrated circuit device according to the present invention. In this embodiment, as in FIG. 16, the internal circuit section is configured by a power cutoff region that is multi-VDD (VDD1 to VDDn). In the case of multi-VDD in this way, the power supply switch SW2 is provided on the power supply voltage side VDD1 to VDDn, and cutoff of different VDD1 to VDDn is controlled. On the other hand, the power supply voltage of each IO unit is the same type of VDD as VCC. In this case, since there is a region where the power is cut off, an indefinite propagation prevention (also level shifter) circuit is added between the IO unit and the internal circuit (cut-off region). Further, an indefinite propagation circuit and a level shifter circuit are also added to the IO section. In this embodiment, the power source type of the IO unit is the same type of VCC and VDD, so that the isolation region of the IO unit due to the difference between the power source types VDD1 to VDDn is not required as in the embodiment of FIG. A control signal such as prevention is not required, and the layout becomes easy. Other configurations are the same as those in FIG.

  FIG. 18 shows an overall layout of another embodiment of the semiconductor integrated circuit device according to the present invention. In this embodiment, in addition to the embodiment of FIG. 17, a power switch is added so that the indeterminate propagation preventing / level shifter circuit is completely cut off. In this embodiment, the power switch added to the indeterminate propagation preventing / level shifter circuit is arranged in divided units in order to realize a low resistance between the indeterminate propagation preventing circuit VSSM and VSS. In this configuration, a switch MOSFET is added to the indefinite propagation prevention circuit provided in the cutoff regions 1 to n of the internal circuit, and the leakage current is cut off by the control signal swcc when all the internal circuits are cut off.

  FIG. 19 is a block diagram showing one embodiment of a power switch provided in the internal circuit of the semiconductor integrated circuit device according to the present invention. The power switch provided in the functional block or the shut-off region of the internal circuit is inserted on the VDD side or the VSS side, and has two combinations of P-channel MOSFET and N-channel MOSFET. It is added in consideration of the advantages of P-channel MOSFET and N-channel MOSFET.

  In the example of FIG. 19A, a VSS cut-off, thick N-channel MOSFET is used, and a control signal with 0 / VCC amplitude is supplied to the gate. In the example of FIG. 19B, a VDD blocking, thick film P-channel MOSFET is used, and a control signal with 0 / VDD amplitude is supplied to the gate. In the example of FIG. 19C, VDD blocking and thick N-channel MOSFET are used, and a control signal with 0 / VCC amplitude is supplied to the gate. In the example of FIG. 19D, both VDD / VSS blocking, thick film N-channel MOSFET and thick film P-channel MOSFET are used. A control signal with 0 / VCC amplitude is supplied to the gate of the N-channel MOSFET, and a control signal with 0 / VDD amplitude is supplied to the gate of the P-channel MOSFET.

  FIG. 20 is a block diagram showing an embodiment of a power switch provided in the output system circuit in the input / output circuit section of the semiconductor integrated circuit device according to the present invention. In the example of FIG. 20A, a thick film N-channel MOSFET for blocking VSS is switch-controlled by a control signal swca. The output unit is provided with a flip-flop circuit FF for holding output information and a gate circuit for preventing indefinite propagation when the power is shut off in the VDD circuit. This gate circuit sets the output signal to a fixed level by the signal c when the VDD power supply is shut off.

  In the example of FIG. 20B, the thick film P-channel MOSFET for blocking VDD is switch-controlled by the control signal / swca. Similarly to the above, the output unit is provided with a flip-flop circuit FF for holding output information and a gate circuit for preventing indefinite propagation when the power is shut down in the VDD system circuit. This gate circuit sets the output signal to a fixed level by the signal c when the VDD power supply is shut off.

  In the example of FIG. 20C, the thick film P-channel MOSFET / thick film N-channel MOSFET for blocking VDD / VSS are switch-controlled by the control signals / swca and swca. Similarly to the above, the output unit is provided with a flip-flop circuit FF for holding output information and a gate circuit for preventing indefinite propagation when the power is shut down in the VDD system circuit. This gate circuit sets the output signal to a fixed level by the signal c when the VDD power supply is shut off.

  FIG. 21 is a block diagram showing another embodiment of the power switch provided in the output system circuit in the input / output circuit section of the semiconductor integrated circuit device according to the present invention. In the example of FIG. 21D, the thick film N-channel MOSFET for blocking VSS is switch-controlled by the control signal swca. The output unit is not provided with the flip-flop circuit FF. When the flip-flop circuit FF is not required, even when the VDD output becomes an indefinite level, or when the VDD output becomes a constant level due to power shutoff, no direct current flows between VCC.

  In the example of FIG. 21E, the thick film P-channel MOSFET for blocking the VDD is switch-controlled by the control signal / swca. As in the case (D), the output unit is not provided with the flip-flop circuit FF. In the example of FIG. 21F, a thick film N-channel MOSFET for blocking VSS is switch-controlled by a control signal swca. The output unit is provided with a flip-flop circuit FF. VOE and VOS are used as the operating voltage of the output unit. VOE and VOS are operating voltages of the high-speed differential output circuit.

  FIG. 22 is a schematic configuration diagram of one embodiment of a semiconductor integrated circuit device according to the present invention. This embodiment is directed to a microcomputer used in a mobile electronic device such as a cellular phone, and an internal circuit is composed of a microcomputer unit, a USB unit clock generation unit CPGM, and an analog unit AD / DA as a power cutoff region. The A holding RAM unit is provided above the microcomputer unit, and VCC and VSS are constantly supplied to be used as an area for saving stored data when the microcomputer unit is powered off. This holding RAM is used for holding necessary data in a URAM (user memory) or a register of the microcomputer unit. In the above-described internal circuit, the power switch SW1 is turned off in the standby state to enter the low power consumption mode. At this time, necessary data is saved in the holding RAM.

  In this embodiment, the VDD system circuit of the input / output circuit section at the time of standby is provided with a power switch (not shown) and is shut off at the time of standby as described above. In this embodiment, on the input / output circuit portion arranged along the outer periphery of the semiconductor chip, except for the USB portion and the analog portion, the power is sequentially supplied in the order of VSS-VCC-VCC-VSS-VSS-VDD-VSS. A line is placed. The VSS-VCC pair in order from the outside is used for the input circuit IN and the output circuit OB in FIG. The next VCC-VSS pair is used in the circuits constituting the level shifters DLS and ULS of FIG. VSS-VDD-VSS is used as a power supply line to the circuits constituting the level shifters DLS and ULS in FIG. 14, the buffer circuits BA1 and BA2, and the internal circuit. In the input / output circuit section, VSS is connected to the circuits constituting the level shifters DLS and ULS and the VSSM of the buffer circuits BA1 and BA2 through a switch. These power supply lines are supplied with a plurality of external terminals respectively provided from four sides of the chip.

  PLLVSS and PLLVDD for the clock generation unit CPGM, USBVDD, USBVCC, USBVSS, USBVDDA, USBVCCA, and USBVSSA for the USB unit, and AVCC, AVSS, and the reference voltage AVREF for the AD / DA unit are independent from each external terminal. To be supplied. A system control circuit SYSC such as a real-time clock RTC and a power manager PMG made of a power supply VCC system composed of a thick film MOSFET is always supplied with power and placed in an operating state. The analog circuit AD / DA or the like has off-leakage of 2 to 3 orders of magnitude, and is constantly supplied with power supply AVCC and AVSS. Since the thin film MOSFET and the VDD system circuit have many off-leaks, the circuit includes the core and the IO unit and is cut off by the switch SW1. Needless to say, the power switch SW2 may be separately provided on the top, bottom, left, and right of the chip for the IO unit (for example, on the left and right outside of each SW1), and may be disposed on the top and bottom to shut off the IO unit power VDD.

  FIG. 23 shows a layout diagram of an embodiment of the input / output unit of the semiconductor integrated circuit device of FIG. This embodiment is an example in which a power switch is disposed between an IO unit and a core, and the case where the IO side is VSS cut off and the core side is also cut off the VSS is shown. In this embodiment, an example is shown in which a power switch provided on the core side is connected to a virtual ground line VSSM of a VDD system circuit of a plurality of IO cells on the IO side. This configuration corresponds to the configuration of FIG.

  FIG. 24 shows a layout diagram of another embodiment of the input / output unit of the semiconductor integrated circuit device of FIG. This embodiment is an example in which a power switch is arranged between an IO unit and a core, and a case where VDD is cut off on the IO side and VSS is cut off on the core side is shown. The two switch MOSFETs provided on the IO side distribute the power supply voltage VDD to the virtual power supply lines VDDM of the upper and lower IO cell groups and supply the power supply voltage VDD. On the other hand, the two switch MOSFETs provided on the core side distribute the ground potential VSS to the virtual ground lines VSSM of the upper and lower cells ROW and supply the ground potential VSS. As described above, the VDD-side circuit cutoff switches on the IO side are collectively distributed for every several IO cells.

  FIG. 25 shows a layout diagram of still another embodiment of the input / output unit of the semiconductor integrated circuit device of FIG. In a semiconductor chip (LSI), a power switch is arranged on the upper side to connect the IO side VSSM and the core side VSSM. The same applies to the lower side of a semiconductor chip (not shown). The left side of the semiconductor chip is connected to the IO side VSSM and the core side VSSM. That is, the power switch SW2 provided on the IO side uses the power switch SW1 on the core side in combination. The same applies to the right side of a semiconductor chip (not shown). In this embodiment, the power switch SW1 on the left and right sides of the core side is used together on the IO side, and the distance between the left and right power switches SW1 is too far on the upper and lower sides, and the chip size (5 to 10 mm) is taken into consideration. Since there is a limit to reducing the resistance by increasing the thickness of the power supply wiring, a power switch SW2 is separately provided in the vicinity of the IO.

  FIG. 26 is a flowchart showing one embodiment of the control operation of the power switch in the semiconductor integrated circuit device of this embodiment. The power interruption recovery in the semiconductor integrated circuit device according to the present invention will be described below as a transition flow of the deep standby operation. State 1 is a transient state in which VCC and VDD are turned on from the power-off state. In state 2, the chip is in a normal operation state after power-on is completed. When a deep standby command is executed from the CPU during normal operation, state 3 is entered, and power is shut down in the following order.

  In state 3, whether or not to hold information in the URAM and pre-information in the IO buffer is selected. State 4 is a transient state in which the VDD power supply of IO is executed. Depending on the state 4, the VSS power supply of the core unit is cut off (deep standby state).

  State 6 is a transient state in which a return signal from the terminal is input. State 7 is a transient state in which the IO VDD power supply is restored. In state 8, the VSS power supply of the core is restored, and the normal operation state of state 2 is obtained.

  FIG. 27 shows a circuit diagram of an embodiment of the input system circuit of FIG. The input circuit IN in FIG. 15 includes an inverter circuit IV1. The inverter circuit IV2 and the MOSFETs Q10 to Q14 constitute a level shifter DLS. Inverter circuits IV1 and IV2 operate with power supply voltage VCC and are formed of thick film MOSFETs. Inverter circuit IV2 forms an internal signal in phase with input signal D for level shift operation and supplies it to the gate of N-channel MOSFET Q10. The output signal of the inverter circuit IV1 is supplied to the gate of the N-channel MOSFET Q11. These MOSFETs Q10 and Q11 are constituted by N-channel type thick film MOSFETs because the VCC level input signal is supplied. Between the drains of the MOSFETs Q10 and Q11 and the power supply voltage VDD, there are provided P-channel MOSFETs Q12 and Q13 in which the gates and drains are cross-connected to form a latch. These MOSFETs Q12 and Q13 are formed of thin film MOSFETs.

  A level-shifted output signal is formed from the commonly connected drains of the MOSFETs Q11 and Q13, and a signal din transmitted to the internal circuit through the inverter circuits IV3 and IV4 is formed. These MOSFETs Q10 and Q11 and inverter circuits IV3 and IV4 are connected to a virtual ground line VSSM. A power switch MOSFETQ2 is provided between the virtual ground line VSSM and the ground line VSS. The MOSFET Q2 is formed of a thick film gate MOSFET.

  FIG. 28 shows a circuit diagram of an embodiment of the output system circuit of FIG. The output circuit OB in FIG. 15 includes a drive inverter circuit IV7 and an inverter circuit IV8 as an output stage. Inverter circuits IV7 and IV8 operate at power supply voltage VCC and are formed of thick film MOSFETs. The signal q formed by the internal circuit is input to the inverter circuit IV5 that constitutes the buffer circuit BA2. The inverter circuit IV6 and the MOSFETs Q20 to Q24 constitute a level shifter ULS. The inverter circuit IV6 forms an internal signal in phase with the input signal q for level shift operation and supplies it to the gate of the N-channel MOSFET Q20. The output signal of the inverter circuit IV5 is supplied to the gate of the N-channel MOSFET Q21. Since these MOSFETs Q20 and Q21 operate at the VCC, they are constituted by N-channel thick film MOSFETs. Between the drains of the MOSFETs Q20 and Q21 and the power supply voltage VCC, there are provided P-channel MOSFETs Q22 and Q23 in which the gates and drains are cross-connected to form a latch. These MOSFETs Q22 and Q23 are constituted by thick film MOSFETs.

  A level-shifted output signal is formed from the commonly connected drains of the MOSFETs Q21 and Q23, and an output signal Q is output from an external terminal through the inverter circuits IV7 and IV8. These MOSFETs Q20 and Q21 and inverter circuits IV5 and IV6 are connected to a virtual ground line VSSM. A power switch MOSFETQ2 is provided between the virtual ground line VSSM and the ground line VSS. The MOSFET Q2 is formed of a thick film gate MOSFET. The MOSFET Q2 of the output system circuit and the MOSFET Q2 of the input system circuit are the same. In this embodiment, instead of the flip-flop circuit FF of FIG. 15, a MOSFET Q24 is provided between the input terminal of the inverter circuit IV7 and the power supply voltage VCC, and the control signal swca of the switch MOSFET Q2 is supplied. When the control signal swca is set to the low level, the MOSFET Q2 is turned off, and when the VDD system circuit is powered off, the MOSFET Q24 is turned on to pull up the input signal of the inverter circuit IV7 to the VCC level. Thereby, the output signal Q output from the output system circuit is fixed at the low level. The VCC MOSFETs Q20, Q21, 22, and Q23 are thick film MOSFETs whose off-leakage current is 2 to 3 orders of magnitude smaller than that of the thin film. Therefore, the switch MOSFET Q2 is connected only to the virtual ground line VSSM of the VDD side inverter circuits IV5 and IV6. It is good also as a structure to connect.

  Although the invention made by the inventor has been specifically described based on the above embodiment, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention. For example, the system controller SYSC or the like may be arranged in a region where the input / output circuit at the corner of the semiconductor chip is not formed. For RAMs and registers that cannot be powered off because they want to retain data, the power supply voltage VDD can be switched to a low voltage, or the virtual ground potential VSSM can be set to an intermediate potential while securing a voltage necessary for data retention. It may be a combination of low power consumption technologies.

  The present invention relates to a mobile device that requires low power consumption during standby (standby), a product such as a car audio that is expected to reduce standby power consumption during battery operation, an SOC (system on chip), a microcomputer, and a flash. The present invention can be widely used for semiconductor integrated circuit devices such as memories and other system LSIs.

1 is a schematic block diagram of an embodiment of a semiconductor integrated circuit device according to the present invention. It is a schematic block diagram of another example of the semiconductor integrated circuit device according to the present invention. 1 is an overall layout diagram of an embodiment of a semiconductor integrated circuit device according to the present invention. FIG. 4 is a schematic circuit diagram of an embodiment of the semiconductor integrated circuit device of FIG. 3. It is a whole layout figure of other one Example of the semiconductor integrated circuit device based on this invention. FIG. 6 is a schematic circuit diagram of an embodiment of the semiconductor integrated circuit device of FIG. 5. It is a whole layout figure of other one Example of the semiconductor integrated circuit device based on this invention. FIG. 8 is a schematic circuit diagram of an embodiment of the semiconductor integrated circuit device of FIG. 7. 1 is a schematic circuit diagram of an embodiment of a semiconductor integrated circuit device according to the present invention. It is a schematic circuit diagram of another embodiment of the semiconductor integrated circuit device according to the present invention. It is a whole layout figure of other one Example of the semiconductor integrated circuit device based on this invention. FIG. 12 is a schematic circuit diagram of an embodiment of the semiconductor integrated circuit device of FIG. 11. It is a whole layout figure of other one Example of the semiconductor integrated circuit device based on this invention. FIG. 14 is a schematic circuit diagram of an embodiment of the semiconductor integrated circuit device of FIG. 13. 1 is a circuit diagram of one embodiment of an IO cell according to the present invention. FIG. It is a whole layout figure of other one Example of the semiconductor integrated circuit device based on this invention. It is a whole layout figure of other one Example of the semiconductor integrated circuit device based on this invention. It is a whole layout figure of other one Example of the semiconductor integrated circuit device based on this invention. 1 is a block diagram of an embodiment of a power switch provided in an internal circuit of a semiconductor integrated circuit device according to the present invention. 1 is a block diagram of an embodiment of a power switch provided in an output system circuit in an input / output circuit section of a semiconductor integrated circuit device according to the present invention. It is a block diagram of another embodiment of the power switch provided in the output system circuit in the input / output circuit portion of the semiconductor integrated circuit device according to the present invention. 1 is a schematic configuration diagram of an embodiment of a semiconductor integrated circuit device according to the present invention. FIG. 23 is a layout diagram of an example of an input / output unit of the semiconductor integrated circuit device of FIG. 22; FIG. 23 is a layout diagram of another example of the input / output unit of the semiconductor integrated circuit device of FIG. 22; FIG. 23 is a layout diagram of still another embodiment of the input / output unit of the semiconductor integrated circuit device of FIG. 22; It is a flowchart figure which shows one Example of control operation of the power switch in the semiconductor integrated circuit device of this Example. FIG. 16 is a circuit diagram of an embodiment of the input system circuit of FIG. 15. FIG. 16 is a circuit diagram of an embodiment of the output system circuit of FIG. 15.

Explanation of symbols

  SW1, SW2 ... power switch, IO unit ... I / O circuit unit, SYSC ... system controller, VSWC ... power switch controller, G1, G2 ... gate circuit (undefined propagation prevention circuit), IN ... input circuit, OB ... output circuit, DLS ... Level shifter (down), ULS ... Level shifter (up), BA1, BA2 ... Buffer circuit, URAM ... User RAM, CARAM ... Cache memory, CPGM ... Clock generation unit, AD / DA ... Analog circuit unit, Q1 (Q11-Q14) )... Power switch MOSFET, Q2 (Q21 to Q23)... Power switch MOSFET, IV1 to IV8... Inverter circuit, Q10 to Q24.

Claims (11)

An input / output circuit unit having an input circuit that receives an input signal corresponding to a first voltage with an external terminal, and an output circuit that forms an output signal corresponding to the first voltage;
An internal circuit unit that exchanges signals with the input / output circuit unit and operates at a second voltage different from the first voltage;
A power switch control circuit,
The internal circuit unit has a first switch on the ground potential side of the second voltage or circuit,
The input circuit receives an input signal from the external terminal, operates with the input unit operating at the first voltage, and operates with at least the second voltage, and outputs the first signal having a signal amplitude corresponding to the first voltage. Having a first level conversion circuit for converting to a signal amplitude corresponding to the second voltage;
The output circuit receives an input signal from the internal circuit unit, operates at the first voltage and the second voltage, and corresponds a second signal having a signal amplitude corresponding to the second voltage to the first voltage. A second level conversion circuit that converts the signal amplitude into a signal, an output unit that operates with the first voltage, receives an output signal of the second level conversion circuit, and forms an output signal output from the external terminal, and the output A latch for holding the input signal of the unit,
The input / output circuit unit has a second switch on the ground potential side of the circuit portion operating at the second voltage or the second voltage,
The power switch control circuit turns on the first switch and the second switch when the internal circuit is in an operating state, and turns the first and second switches on in a predetermined mode in which the internal circuit does not operate. A semiconductor integrated circuit device to be turned off. In claim 1,
The internal circuit unit is configured by a MOSFET of a first gate insulating film,
The semiconductor integrated circuit device, wherein the first switch and the second switch are MOSFETs having a second gate insulating film thicker than the first gate insulating film. In claim 2,
The input circuit is composed of a MOSFET of the second gate insulating film,
In the first level conversion circuit, the MOSFET that receives the output signal of the input circuit is configured by the MOSFET of the second gate insulating film, and the other MOSFET is configured by the MOSFET of the first gate insulating film,
The output circuit is composed of a MOSFET of the second gate insulating film,
In the second level conversion circuit, the MOSFET of the circuit operating at the second voltage is constituted by the MOSFET of the first gate insulating film, and the MOSFET of the circuit operating at the first voltage is the MOSFET of the second gate insulating film. A semiconductor integrated circuit device comprising: In claim 2,
The first switch is provided on the second voltage side, the second switch is provided on the ground potential side of the circuit, or the first switch is provided on the ground potential of the circuit, and the second switch is provided on the ground potential side. Provided on the second voltage side,
The signal transmission path between the input / output circuit unit and the internal circuit unit operates with the second voltage, and the transmission of the first signal and the second signal is controlled by a control signal from the power switch control circuit. A gate circuit;
The power switch control circuit has a time difference in timing when the transmission of the control signal to the first signal and the second signal is stopped in the predetermined mode and the first switch and the second switch are turned off. Integrated circuit device. In claim 2,
A semiconductor integrated circuit device in which a MOSFET constituting the second switch is provided in one input / output circuit section corresponding to the one external terminal. In claim 2,
A semiconductor integrated circuit device in which a MOSFET constituting the second switch is provided in a common region for a plurality of input / output circuit portions corresponding to the plurality of external terminals. In claim 5 or 6,
The input / output circuit section and the internal circuit section have a plurality of sets having different circuit functions,
A semiconductor integrated circuit device in which a plurality of sets of input / output circuit units and internal circuit units are independently set to the predetermined mode in response to the operation of the circuit function. In claim 5 or 6,
The first switch provided in the internal circuit unit is configured by a plurality of MOSFETs arranged in parallel, and the gate is sequentially connected to one wiring,
The control signal formed by the power switch control circuit is supplied from one end of the wiring, and the signal from the other end is used as a monitor signal for detecting the on / off states of all the MOSFETs. A semiconductor integrated circuit device input to a circuit. In claim 1,
The first switch and the second switch are both provided on the ground potential side of the circuit,
The second switch is a semiconductor integrated circuit device in which the first switch is shared. In claim 1,
The first switch and the second switch are both provided on the ground potential side of the circuit,
The first switch is provided on both sides of a semiconductor region where the internal circuit portion is formed,
The input / output circuit portion is provided in a peripheral portion of the semiconductor chip so as to surround the internal circuit portion,
The second switch of the input / output circuit portion corresponding to both sides of the internal circuit of the input / output circuit portion is shared with the first switch,
The second switch in the input / output circuit portion corresponding to the upper and lower sides of the internal circuit is a semiconductor integrated circuit device provided adjacent to the input / output circuit portion. In claim 1,
When entering the predetermined mode, after turning off the second switch of the input / output circuit unit, turn off the first switch of the internal circuit unit,
A semiconductor integrated circuit device that, when returning from the predetermined mode to the normal mode, turns on the second switch of the internal circuit section after turning on the second switch of the input / output circuit section.

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